Vacuum consumable-free film tearing mechanism
Through the vacuum non-consumable film tearing mechanism, the vacuum adsorption clamping module and the roller are used to roll the film, which solves the problem of tape consumables and realizes efficient and accurate automatic film tearing, which is suitable for the production of semiconductor thin plate products.
Patent Information
- Application Number
- CN202510881392.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-27
- Publication Date
- 2025-10-03
AI Technical Summary
The existing film tearing method has the following problems: the tape viscosity fluctuates under high temperature environment, the consumables cost is high, the scope of application is limited, and the film tearing efficiency and accuracy are insufficient.
It adopts a vacuum film tearing mechanism without consumables, uses a vacuum adsorption clamping module and a roller to roll the film, and combines the clamping mechanism to achieve automatic film tearing.
It reduces production costs, improves film tearing efficiency and accuracy, broadens the scope of application, reduces the risk of product damage, and realizes automated production.
Smart Images

Figure CN120736078A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of film tearing equipment, and in particular to a vacuum consumable-free film tearing mechanism. Background Art
[0002] In the semiconductor industry, the processing and manufacturing process of large-area thin-plate products involves the use of thin film structures to achieve the purpose of protecting the product surface or providing temporary support and fixation. For example, an isolation film is used as a key protective layer to isolate the product from the air. Before formal production, the isolation film needs to be accurately torn off to ensure the smooth progress of subsequent operations. For example, when processing ultra-thin wafers, flexible substrates or fragile products, due to their insufficient rigidity, they cannot withstand the stress of certain processing (such as photolithography, etching, cleaning, and transmission). They need to be temporarily fixed on a rigid carrier, which requires a temporary fixing film. During processing, the temporary fixing film firmly fixes the thin / flexible product on the carrier to prevent displacement, warping or vibration damage. After processing is completed, this layer of temporary fixing film still needs to be torn off for subsequent operations. The two more common film tearing methods currently on the market have certain limitations.
[0003] On the one hand, the method of using tape to adhere the film to be removed, then using the tape in conjunction with a motor or cylinder to lift the edge of the film, and then using a clamping mechanism to tear the film off, exhibits significant drawbacks in some special environments. For example, in high-temperature environments, the viscosity of the film will fluctuate significantly due to temperature differences, which places extremely stringent requirements on the properties of the tape. More importantly, the use of consumable tape not only increases costs, but also reduces production efficiency due to the frequent manual replacement of the tape, making it difficult to achieve consistent and stable film tearing results.
[0004] On the other hand, creating a tear-off area at the edge of the carrier, leaving a portion of the film exposed for subsequent clamping and tearing, also has significant limitations. This method requires the film application area to be larger than the product area to reserve space. However, in actual production scenarios, the film application area is often equal to or even smaller than the product area, making this method completely unusable in such situations and greatly limiting its scope of application. Summary of the Invention
[0005] In order to solve the above technical problems, the purpose of the present invention is to provide a vacuum consumable-free film tearing mechanism; the vacuum consumable-free mechanism uses vacuum action in conjunction with a roller and a suction nozzle to perform rolling film tearing, and after film tearing, a clamping mechanism is used to fix the film layer, and then the film is torn off, which solves the consumables problem of the tape film tearing method, reduces costs, improves film tearing efficiency and tearing effect, and at the same time, the rolling film tearing method can directly act on the surface of the film, is not limited to the size of the film and the product, has wide applicability, and improves the accuracy of the film tearing action.
[0006] In order to achieve the above technical objectives and the above technical effects, the present invention is implemented through the following technical solutions:
[0007] A vacuum non-consumable film tearing mechanism is used to tear off the film layer on the surface of the product, which includes a lifting mechanism, a transverse movement mechanism and a vacuum adsorption clamping module; the vacuum adsorption clamping module is connected to the lifting mechanism, and the lifting mechanism is connected to the transverse movement mechanism;
[0008] The lifting mechanism drives the vacuum adsorption clamping module to move up and down, so that the vacuum adsorption clamping module contacts and separates from the surface of the product;
[0009] The vacuum adsorption and clamping module includes a vacuum film adsorption mechanism and a clamping mechanism. The vacuum film adsorption mechanism includes a roller and a suction nozzle mounted on the roller. The roller rolls through friction with the product surface to roll up the film layer adsorbed by the suction nozzle through vacuum action. The clamping mechanism cooperates with the roller to clamp the film layer.
[0010] The transverse movement mechanism drives the vacuum adsorption clamping module to move so as to tear off the film layer during the movement.
[0011] Furthermore, the vacuum film adsorption mechanism also includes a hollow tube, which is suspended under the lifting mechanism through a hanger, the roller is fixedly installed on the hollow tube, and the suction nozzle is connected to the hollow tube; one end of the hollow tube is connected to the vacuum generating device, and the hollow tube can rotate with the roller.
[0012] Furthermore, there are multiple rollers and suction nozzles, and the multiple rollers are arranged in sequence on the hollow tube.
[0013] Furthermore, the vacuum non-consumable film tearing mechanism also includes a nozzle reset module, which includes a nozzle reset drive mechanism and a nozzle reset lever installed on the hollow tube. The nozzle reset drive mechanism acts on the nozzle reset lever to drive the roller on the hollow tube to rotate, so that the nozzle is reset.
[0014] Furthermore, the nozzle reset drive mechanism includes a reset drive member and a nozzle reset toggle block connected to the reset drive member, and the reset drive member drives the nozzle reset toggle block to move to act on the nozzle reset lever.
[0015] Furthermore, an elastic damping mechanism is provided on the hollow tube, and the elastic damping mechanism includes a damping rotating block, a damping fixed block and a spring plunger. The damping rotating block is installed on the hollow tube, the damping fixed block is fixed on the hanger, and the damping fixed block is arranged on one side of the damping rotating block. The spring plunger is passed through the damping fixed block, and its end is in contact with the damping rotating block.
[0016] Furthermore, the clamping mechanism includes a clamping drive, a clamping fixed part, a clamping rotating part and a clamping rod, the clamping fixed part and the clamping drive are fixed on the hanger, the clamping rotating part is rotatably connected to the clamping fixed part, the clamping drive is connected to one end of the clamping rotating part, the clamping rod is fixed to the other end of the clamping rotating part, and the clamping drive drives the clamping rotating part to rotate, so as to utilize the clamping rod and the roller to clamp the film layer.
[0017] Furthermore, the lifting mechanism includes a fixed frame, a lifting drive and a lifting guide assembly, the lifting drive is fixed on the fixed frame, the lifting drive is connected to the hanger, and the lifting drive drives the hanger to move up and down under the guidance of the lifting guide assembly.
[0018] Furthermore, a lifting gap is provided between the hanger and the lifting drive member, and a lifting spring is installed between the hanger and the fixing frame.
[0019] Furthermore, the transverse movement mechanism includes a transverse movement driving member and a transverse movement linear module. The transverse movement linear module is connected to the fixed frame. The transverse movement driving member drives the lifting mechanism and the vacuum adsorption clamping module to move in cooperation with the transverse movement linear module.
[0020] The technical effects of the present invention are:
[0021] (1) Abandon tape consumables
[0022] The present invention completely abandons the traditional tape film-forming method, completely eliminates the continuous procurement cost of the tape consumable material, reduces production costs, and does not require frequent manual replacement of the tape, saving labor costs and time costs, and improving production efficiency.
[0023] (2) Breaking through the film area limit
[0024] The present invention has wide applicability. Specifically, the present invention uses vacuum adsorption in conjunction with a roller and a suction nozzle to directly act on the surface of the film to peel off the film. It is not limited by the size relationship between the film and the product. No matter the film is the same size as the product or the film is smaller than the product, the film peeling action can be smoothly achieved. Compared with the method of making room for film tearing at the edge of the carrier, the scope of application is greatly broadened, and the film tearing needs in more different scenarios can be met.
[0025] (3) Improve film tearing accuracy and yield
[0026] The present invention adopts vacuum adsorption to tear the film. During the tearing process, the film tearing mechanism is in flexible contact with the product and will not crush the product.
[0027] The present invention can achieve progressive film peeling, in which the roller rolls up the film layer by friction (rather than hard pulling), combined with the uniform force of vacuum adsorption, to avoid damage to the product due to large film peeling stress. Moreover, this film peeling method eliminates obvious relative friction between the product and the carrier, which can prevent the product from being scratched.
[0028] The present invention uses the friction rolling between the roller and the surface of the product to enable the suction nozzle to more accurately absorb and roll up the film layer, and the film-tearing effect is stable and reliable. After the film is peeled off, the clamping mechanism cooperates with the roller to further fix the film layer, and the transverse movement mechanism drives the overall movement to achieve film tearing. The entire process can be accurately controlled, which improves the accuracy of the film tearing action, can achieve a precise film tearing effect, reduce the risk of damage to the product, and ensure product quality.
[0029] (4) Realize automatic film tearing
[0030] The lifting mechanism, transverse movement mechanism and vacuum adsorption clamping module in the present invention cooperate with each other to realize an automated process from film starting to film tearing, reduce manual intervention, improve production efficiency, and facilitate the intelligent and automated management of the production process. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 It is a structural schematic diagram of the vacuum consumable-free film tearing mechanism of the present invention.
[0032] Figure 2 It is a partial structural diagram of the vacuum adsorption film lifting mechanism in the present invention.
[0033] Figure 3 Schematic diagram of the structure of the clamping mechanism in the present invention.
[0034] Figure 4 It is a structural schematic diagram of the elastic damping mechanism in the present invention.
[0035] Figure 5 This is a structural diagram of the coordination between the damping rotating block and the spring plunger in the elastic damping mechanism.
[0036] Figure 6 This is a flow chart of the vacuum adsorption and clamping actions implemented by the vacuum consumable-free film tearing mechanism of the present invention.
[0037] In the figure, 1: hollow tube; 2: roller; 3: suction nozzle; 4: hanger, 401: longitudinal hanger, 402: transverse hanger; 5: damping rotating block, 501: groove; 6: spring plunger; 7: damping fixed block; 8: reset drive member; 9: suction nozzle reset lever; 10: suction nozzle reset toggle block; 11: clamping drive member; 12: clamping push block, 1201: top shaft; 13: clamping fixed member, 1301: limit block; 14: clamping rotating member, 1401: elongated hole; 15: clamping rod; 16: fixing frame; 17: lifting drive member; 18: lifting guide assembly; 19: lifting connecting block; 20: lifting spring; 21: spring fixing column; 22: transverse linear module; 23: membrane layer. DETAILED DESCRIPTION
[0038] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.
[0039] like Figures 1 to 6 As shown, the present invention provides a preferred embodiment of a vacuum, consumable-free film tearing mechanism for removing film layers from product surfaces, which can be applied to production lines for semiconductor thin plate products. The vacuum, consumable-free film tearing mechanism includes a lifting mechanism, a transverse movement mechanism, and a vacuum adsorption clamping module. The vacuum adsorption clamping module is connected to the lifting mechanism, which is in turn connected to the transverse movement mechanism.
[0040] Specifically, if Figure 2 and Figure 3 As shown, the vacuum adsorption clamping module includes a vacuum adsorption film-lifting mechanism and a clamping mechanism. The vacuum adsorption film-lifting mechanism includes a hollow tube 1, a roller 2 installed on the hollow tube 1, and a suction nozzle 3 installed on the roller 2. There are one or more rollers 2, and each roller 2 is correspondingly provided with a suction nozzle 3. When there are multiple rollers 2, the multiple rollers 2 are arranged on the hollow tube 1 in sequence along the axial direction of the hollow tube, which can be suitable for products with a larger width. The hollow tube 1 is suspended below the lifting mechanism by a hanger 4. Specifically, the hanger 4 includes a longitudinal hanger plate 401 and a transverse hanger plate 402. The end of the longitudinal hanger plate 401 has a mounting hole, and the hollow tube 1 is installed in the mounting hole of the longitudinal hanger plate 401 through a bearing. One end of the hollow tube 1 is connected to the vacuum generating device, and the other end is a closed structure. The roller 2 is fixedly mounted on the hollow tube 1, and the suction nozzle 3 is connected to the hollow tube 1. The roller 2 can roll through the friction between it and the surface of the product to roll up the film layer sucked by the suction nozzle 3 through the vacuum action, thus achieving film removal. During the rolling process of the roller 2, the hollow tube 1 also rotates with the roller 2.
[0041] like Figure 4 and Figure 5As shown, the hollow tube 1 is also provided with an elastic damping mechanism. Specifically, the elastic damping mechanism includes a damping rotating block 5, a damping fixed block 7, and a spring plunger 6. The damping rotating block 5 is fixedly mounted on the hollow tube 1, and the damping fixed block 7 is fixed to the hanger 4. The damping fixed block 7 is arranged on one side of the damping rotating block 5 and is fitted with the hollow tube 1. The spring plunger 6 is transversely passed through the damping fixed block 7, and its end contacts the damping rotating block 5. The damping rotating block 5 can rotate with the hollow tube 1. There is a certain gap between the damping fixed block 7 and the damping rotating block 5. This gap is elastically compensated by the spring plunger 6. That is, the elastic end of the spring plunger 6 contacts the damping rotating block 5, and uses its own spring force to provide a certain resistance to the rotation of the damping rotating block 5, so that there is a certain friction between the damping fixed block 7 and the damping rotating block 5, so that the damping rotating block 5 and the hollow tube 1 can move relative to each other without moving to an uncontrollable degree due to inertia. In addition, in order to ensure that the damping rotating block 5 is more secure in the specified position and increase the stability of the mechanism, a groove 501 can be provided on the damping rotating block 5. The shape of the groove is V-shaped, arc-shaped, etc. In the preferred embodiment, the groove is a V-shaped groove.
[0042] The vacuum non-consumable film tearing mechanism also includes a nozzle reset module, which includes a nozzle reset drive mechanism and a nozzle reset lever 9 mounted on the hollow tube 1. The nozzle reset drive mechanism includes a reset drive member 8 and a nozzle reset toggle block 10 connected to the reset drive member. The reset drive member 8 is mounted on the horizontal hanger plate 402 of the hanger 4. The reset drive member 8 drives the nozzle reset toggle block 10 to move back and forth to act on the nozzle reset lever 9, thereby driving the hollow tube 1 and the roller on the hollow tube 1 to rotate, thereby resetting the nozzle 3. In this preferred embodiment, the reset drive member 8 is a cylinder, and the nozzle reset toggle block 10 is mounted on the slider of the cylinder.
[0043] The clamping mechanism includes a clamping drive 11, a clamping fixture 13, a clamping rotator 14, and a clamping rod 15. Both the clamping fixture 13 and the clamping drive 11 are fixed to the hanger 4. The clamping rotator 14 is rotatably connected to the clamping fixture 13. The upper end of the clamping rotator 14 is provided with an elongated hole 1401. The clamping drive 11 is connected to the upper end of the clamping rotator 14 via a clamping push block 12. A top shaft 1201 provided on the clamping push block 12 engages with the elongated hole 1401 in the clamping rotator 14, allowing the top shaft 1201 to move relative to the elongated hole 1401 during operation. The clamping rod 15 is fixed to the other end of the clamping rotator 14, with the axial direction of the clamping rod 15 parallel to the axial direction of the hollow tube 1. The clamping drive 11 drives the clamping rotatable member 14 via the clamping push block 12, thereby clamping the rolled film layer using the clamping rod 15 in conjunction with the roller 2. In this preferred embodiment, the clamping drive 11 is a pneumatic cylinder. Furthermore, a stop block 1301 is provided on one side of the clamping fixture 13 to limit the rotation of the clamping rotatable member 14.
[0044] The lifting mechanism includes a fixed frame 16, a lifting drive 17, and a lifting guide assembly 18. The lifting drive 17 is fixed to the fixed frame 16. A lifting connection block 19 is provided on the horizontal hanging plate 402 of the hanger 4, and the lifting connection block 19 has an inverted T-shaped connection port. The connecting end of the lifting drive 17 is connected to the inverted T-shaped connection port of the lifting connection block 19, and a lifting gap is provided between the lifting drive 17 and the lifting connection block 19. Spring fixing columns 21 are installed on the upper side of the hanging plate of the hanger 4 and the lower side of the fixed frame 16. The two ends of the lifting spring 20 provided between the hanger 4 and the fixed frame 16 are respectively connected to the two spring fixing columns 21. The lifting drive 17 can be a power mechanism such as a cylinder, an electric cylinder, a motor screw assembly, or a cam assembly, and the lifting guide assembly 18 can be a linear motion module such as a linear bearing guide rail assembly, a guide column and a guide sleeve assembly. In this preferred embodiment, the lifting drive 17 is a cylinder, and the lifting guide assembly 18 is a linear bearing guide rail assembly. The lifting drive 17 drives the hanger 4 and its attached vacuum adsorption clamping module and other structures to move up and down under the guidance of the lifting guide assembly 18. Among them, the lifting spring 20 is guaranteed to descend to the designed maximum value when the vacuum adsorption clamping module descends. The lifting gap is designed to accommodate film tearing of products of different thicknesses within this gap.
[0045] The transverse mechanism includes a transverse drive (not shown) and a transverse linear module 22. The transverse linear module 22 is connected to the fixed frame 16. The transverse drive drives the lifting mechanism and the vacuum adsorption clamping module through the transverse linear module 22. The transverse drive can be a motor drive assembly or a cylinder drive assembly, while the transverse linear module 22 can be a linear bearing guide assembly, a gear rack drive assembly, a synchronous belt drive assembly, etc.
[0046] When working, Figure 6 As shown, the lifting mechanism works, driving the hanger 4 and the vacuum adsorption clamping module set thereon to descend, and the suction nozzle 3 on the roller 2 contacts the surface of the product (as shown in FIG. Figure 6 In the state shown in (a), the vacuum generating device is started, and the suction nozzle 3 absorbs the film layer 23 on the surface of the product through the vacuum action; when the vacuum adsorption reaches a certain pressure value, the transverse movement mechanism is started, driving the vacuum adsorption clamping module to move, and the friction between the roller 2 and the surface of the product causes the film layer 23 to be rolled on the surface of the roller 2 under the vacuum adsorption state (as shown in Figure 6 At this time, the nozzle 3 rotates a certain angle according to the lateral displacement, and the nozzle reset lever 9 on the hollow tube 1 also rotates. After the film is completed, the clamping mechanism works, and the clamping rod 15 rotates to the roller 2, and cooperates with the roller 2 to clamp the film layer 23 (as shown in FIG. Figure 6In the state shown in (c), mechanical clamping is added while vacuum adsorption is in progress to ensure clamping reliability and prevent the film layer 23 from falling out. The transverse mechanism continues to work, and the vacuum adsorption clamping module tears off the film layer 23 during the movement. After the film is torn off, the clamping mechanism is released, the nozzle reset module is activated, and the nozzle reset toggle block 10 toggles the nozzle reset lever 9, thereby driving the nozzle 3 on the roller 2 back to the initial state (as shown in FIG. Figure 6 (d) in the state shown in Figure 2), so that the next film tearing work can be carried out; after the nozzle 3 is reset, the nozzle reset toggle block 10 returns to its initial state (as shown in Figure 2). Figure 6 After the vacuum is broken, the air blowing function causes the film layer 23 to fall off the roller 2 and fall into the film recovery bucket.
[0047] The vacuum consumable-free mechanism of the present invention utilizes vacuum in conjunction with a roller and a suction nozzle to perform rolling film peeling. After film peeling, the film layer is fixed by a clamping mechanism, and then the film is torn off, which solves the consumables problem of the tape film peeling method, reduces costs, and improves the film peeling efficiency and effect. At the same time, the rolling film peeling method can directly act on the surface of the film, is not limited to the size of the film and the product, has wide applicability, and improves the accuracy of the film peeling action.
[0048] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations that come within the meaning and range of equivalents of the claims be embraced therein.
[0049] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.
Claims
1. A vacuum non-consumable film tearing mechanism, used to tear off the film layer on the surface of the product, characterized in that: It includes a lifting mechanism, a transverse movement mechanism and a vacuum adsorption clamping module; the vacuum adsorption clamping module is connected to the lifting mechanism, and the lifting mechanism is connected to the transverse movement mechanism; The lifting mechanism drives the vacuum adsorption clamping module to move up and down, so that the vacuum adsorption clamping module contacts and separates from the surface of the product; The vacuum adsorption and clamping module includes a vacuum film adsorption mechanism and a clamping mechanism. The vacuum film adsorption mechanism includes a roller and a suction nozzle mounted on the roller. The roller rolls through friction with the product surface to roll up the film layer adsorbed by the suction nozzle through vacuum action. The clamping mechanism cooperates with the roller to clamp the film layer. The transverse movement mechanism drives the vacuum adsorption clamping module to move so as to tear off the film layer during the movement.
2. A vacuum film-tearing mechanism without consumables according to claim 1, characterized in that: The vacuum film adsorption mechanism also includes a hollow tube, which is suspended below the lifting mechanism through a hanger, the roller is fixedly installed on the hollow tube, and the suction nozzle is connected to the hollow tube; one end of the hollow tube is connected to the vacuum generating device, and the hollow tube can rotate with the roller.
3. The vacuum film-tearing mechanism without consumables according to claim 2, characterized in that: There are multiple rollers and suction nozzles, and the multiple rollers are sequentially arranged in the axial direction of the hollow tube.
4. The vacuum film-tearing mechanism without consumables according to claim 2, characterized in that: It also includes a nozzle reset module, which includes a nozzle reset drive mechanism and a nozzle reset lever installed on the hollow tube. The nozzle reset drive mechanism acts on the nozzle reset lever to drive the roller on the hollow tube to rotate, so as to reset the nozzle.
5. The vacuum film-tearing mechanism without consumables according to claim 4, characterized in that: The nozzle reset drive mechanism includes a reset drive member and a nozzle reset toggle block connected to the reset drive member, and the reset drive member drives the nozzle reset toggle block to move to act on the nozzle reset toggle rod.
6. The vacuum film-tearing mechanism without consumables according to claim 2, characterized in that: The hollow tube is also provided with an elastic damping mechanism, which includes a damping rotating block, a damping fixed block and a spring plunger. The damping rotating block is installed on the hollow tube, the damping fixed block is fixed on the hanger, and the damping fixed block is arranged on one side of the damping rotating block. The spring plunger is passed through the damping fixed block, and its end is in contact with the damping rotating block.
7. The vacuum film-tearing mechanism without consumables according to claim 2, characterized in that: The clamping mechanism includes a clamping drive, a clamping fixed part, a clamping rotating part and a clamping rod. The clamping fixed part and the clamping drive are fixed on the hanger. The clamping rotating part is rotatably connected to the clamping fixed part. The clamping drive is connected to one end of the clamping rotating part. The clamping rod is fixed to the other end of the clamping rotating part. The clamping drive drives the clamping rotating part to rotate, so as to clamp the film layer by utilizing the clamping rod and the roller.
8. The vacuum film-tearing mechanism without consumables according to claim 2, characterized in that: The lifting mechanism includes a fixed frame, a lifting drive member and a lifting guide assembly. The lifting drive member is fixed on the fixed frame, the lifting drive member is connected to the hanger, and the lifting drive member drives the hanger to move up and down under the guidance of the lifting guide assembly.
9. The vacuum film-tearing mechanism without consumables according to claim 8, characterized in that: A lifting gap is provided between the hanger and the lifting drive member, and a lifting spring is installed between the hanger and the fixing frame.
10. The vacuum film-tearing mechanism without consumables according to claim 8, characterized in that: The transverse movement mechanism includes a transverse movement driving member and a transverse movement linear module. The transverse movement linear module is connected to the fixed frame. The transverse movement driving member drives the lifting mechanism and the vacuum adsorption clamping module to move in cooperation with the transverse movement linear module.