A cooling device for polycrystalline silicon production

Abstract

This invention relates to the field of polysilicon production technology and discloses a cooling device for polysilicon production. A lower cooling box is fixedly connected to the top of a fixed base plate. A pressurized water tank is fixedly fitted onto the surface of the lower cooling box near its bottom. The lower cooling box has regularly arranged air inlets at its bottom position where it is fixedly connected to the pressurized water tank. By incorporating an exhaust fan, a pressurized water tank, atomizing nozzles, an upper cooling box, an upper protective plate, and a recovery box, the device facilitates the cooling process during polysilicon production. The atomizing nozzles spray water from inside the pressurized water tank, and the exhaust fan blows the atomized water vapor evenly onto the surfaces of the upper and lower ingot furnaces. This allows the atomized water to evaporate rapidly under the airflow, carrying away heat and causing the surface temperature of the ingot to drop at a uniform rate. This avoids a large temperature difference between the inside and outside of the polysilicon during cooling, thereby improving the production quality of the polysilicon and preventing cracking.

Description

Technical Field

[0001] This invention relates to the field of polysilicon production technology, and more specifically to a cooling device for polysilicon production. Background Technology

[0002] Polycrystalline silicon is a material composed of silicon atoms and is widely used in the production of electronic products such as solar cells and semiconductor chips. The production process of polycrystalline silicon includes multiple steps, usually from raw silicon to high-purity polycrystalline silicon and then to the manufacture of solar panels. Among these steps, the cooling process is very important in the entire manufacturing process, especially in the polycrystalline silicon ingot casting and cutting process. The control of cooling directly affects the quality, grain structure and purity of the final product.

[0003] Currently, water cooling is the most common method for cooling polycrystalline silicon ingots. However, due to the high thermal conductivity of water, the initial cooling rate is relatively fast, and the surface temperature of the ingot drops sharply while the internal temperature remains high. This temperature difference between the surface and the interior generates tensile or compressive stress, which eventually leads to the formation of cracks. In addition, water cooling requires a large amount of water resources, especially in circulating cooling systems. Although some water can be recycled, there will still be losses due to evaporation and leakage. In areas with scarce water resources, the use of water cooling may face resource constraints and environmental pressures. Furthermore, after the polycrystalline silicon has cooled, an additional power mechanism is generally required to remove the polycrystalline silicon, which increases the complexity and cost of polycrystalline silicon production. Summary of the Invention

[0004] In order to overcome the above-mentioned defects of the prior art, embodiments of the present invention provide a cooling device for polysilicon production to solve the technical problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a cooling device for polycrystalline silicon production, comprising a fixed base plate, characterized in that: a lower cooling box is fixedly connected to the top of the fixed base plate; a pressurized water tank is fixedly sleeved on the surface of the lower cooling box near its bottom; the lower cooling box has regularly arranged air inlets at its bottom position where the pressurized water tank is fixedly connected; a heat dissipation frame is fixedly connected inside the lower cooling box near its bottom; a bottom protective plate is fixedly connected to the inner wall of the lower cooling box at the top of the heat dissipation frame; a lower ingot furnace is fixedly connected inside the bottom protective plate near its top; and an upper cooling box is movably connected to the top of the lower cooling box. The upper cooling box is movably connected to a sealed cover plate at its top position. An upper protective plate is fixedly connected to the inner wall of the upper cooling box near its bottom position. An upper casting furnace is fixedly connected to the inside of the upper cooling box near its top position. A recycling box is movably connected to one side of the surface of the upper cooling box. An auxiliary lifting plate is fixedly connected to one side of the surface of both the upper and lower cooling boxes. A lifting rod is movably sleeved on the inside of the auxiliary lifting plate near the lower and upper cooling boxes. A limit shaft is movably sleeved on the other side of the auxiliary lifting plate. An auxiliary adjustment plate is movably connected to the bottom position of the fixed base plate. A servo motor is fixedly connected to the top position of the auxiliary adjustment plate.

[0006] The pressurized water tank has a water storage cavity inside. The auxiliary lifting plate has circular through holes at the positions of the movable lifting rod and the limiting shaft. An exhaust fan is movably fitted inside the heat dissipation frame. A feeding pusher plate is movably connected to the bottom of the lower ingot furnace. The pressurized water tank has neatly arranged atomizing nozzles near the lower cooling box, with the ends of the atomizing nozzles furthest from the pressurized water tank located inside the lower cooling box. Annular locking blocks are provided around the bottom of the feeding pusher plate. Limiting telescopic shafts are fixedly connected to both sides of the bottom of the feeding pusher plate, with the ends of the limiting telescopic shafts furthest from the feeding pusher plate fixedly connected to... At the top two sides of the heat sink, a lifting and lowering screw shaft is fixedly connected to the center of the bottom of the feeding push plate. An adjustable bushing is movably sleeved on the surface of the lifting and lowering screw shaft near the bottom. A limit ring is provided on the surface of the adjustable bushing near the top. A regularly arranged rectangular connecting block is provided on the surface of the adjustable bushing near the bottom. A feeding auxiliary rod is fixedly connected to one side of the upper ingot furnace surface. An L-shaped pull rod is movably sleeved at the bottom of the feeding auxiliary rod. An auxiliary pull block is provided at the end of the L-shaped pull rod away from the feeding auxiliary rod. The auxiliary pull block is movably sleeved on the surface of the adjustable bushing at the bottom of the limit ring.

[0007] By incorporating an exhaust fan, a pressurized water tank, atomizing nozzles, an upper cooling box, an upper protective plate, and a recovery box, the system facilitates cooling during polysilicon production. The atomizing nozzles spray water from the pressurized water tank, and the exhaust fan ensures the atomized water vapor evenly covers the surfaces of both the upper and lower ingot furnaces. This accelerated evaporation of the atomized water carries away heat, resulting in a uniform decrease in the surface temperature of the ingot. This prevents large temperature differences between the inside and outside of the polysilicon during cooling, avoiding tensile or compressive stress and improving production quality by preventing cracking. Simultaneously, the upper cooling box and upper protective plate guide the evaporated water vapor to the recovery box for recycling, preventing water waste and reducing environmental impact.

[0008] In a preferred embodiment, support frames are provided at the four corners of the bottom of the fixed base plate, and heat dissipation holes are provided at the center of the fixed base plate. Limiting sliders are provided on both sides of the surface of the auxiliary adjustment plate, and limiting grooves are provided on the surface of the support frames near the auxiliary adjustment plate. A first drive shaft is driven to the top of the servo motor, and the first drive shaft is movably connected to the bottom of the lower cooling box. A second drive shaft is driven to the bottom of the first drive shaft, away from the servo motor, and movably connected to the bottom of the lifting rod. A third drive shaft is movably connected to the bottom of the lifting rod, inside the fixed base plate. The second transmission wheel shaft is connected to one side of the surface of the third transmission wheel shaft. The fixed base plate has a transmission cavity at the position where it is movably connected to the third transmission wheel shaft. The fixed base plate has a cylindrical shaft cavity at the position where it is movably connected to the second transmission wheel shaft. The fixed base plate also has a transmission inner cavity at one end where the second transmission wheel shaft is connected to the third transmission wheel shaft. By providing a servo motor, a first transmission wheel shaft, a second transmission wheel shaft, a third transmission wheel shaft, and an auxiliary adjustment plate, it is beneficial for the servo motor to descend after the polycrystalline silicon has cooled, thereby causing the servo motor to drive the first transmission wheel shaft, the second transmission wheel shaft, and the third transmission wheel shaft to rotate. This allows the ingot furnace to separate into upper and lower parts, increasing the convenience of subsequent polycrystalline silicon removal.

[0009] In a preferred embodiment, a drive shaft is provided at the top of the servo motor, and a bevel gear is fixedly sleeved on the surface of the drive shaft near the bottom. A regularly arranged connecting block is provided on the surface of the drive shaft near the top. By providing the bevel gear and connecting block, it is beneficial to change the function when the bevel gear and connecting block are moved up and down by the servo motor during polysilicon cooling and unloading, reducing the need for additional power mechanism assembly and thus reducing cost expenditure.

[0010] In a preferred embodiment, a water mist return chamber is provided inside the upper cooling box near the top. Conical guide grooves are provided around the top of the water mist return chamber at the connection point to the casting furnace. A drainage groove is provided in the upper cooling box at the location where it is connected to the recovery box. Regularly arranged nozzle slots are provided on the surface of the bottom protective plate near the bottom. Regularly arranged air inlets are provided on the surface of the heat dissipation frame. By providing the water mist return chamber and conical guide grooves, it is beneficial that when the wind accelerates the evaporation of water mist and carries away the heat, the rising steam is guided and recovered through the conical guide grooves in the water mist return chamber, thereby avoiding water waste and reducing environmental pressure.

[0011] In a preferred embodiment, a guide cone is provided at the top of the upper protective plate and near the surface of the upper casting furnace. A neatly arranged auxiliary recovery trough is provided at the location of the guide cone on the upper protective plate. A collection trough is provided inside the upper protective plate and near the top. A recovery chamber is provided inside the recovery box. A water inlet is provided on the side of the recovery box near the upper cooling box. Clamping blocks are provided on both sides of the surface of the recovery box near the upper cooling box. These clamping blocks are movably engaged with the surface of the upper cooling box. By providing the guide cone, auxiliary recovery trough, collection trough, and recovery box, it is beneficial to guide the water vapor to the inside of the collection trough as it rises through evaporation, and then into the recovery box for recycling, thereby avoiding water waste.

[0012] In a preferred embodiment, a fan spindle is provided inside the exhaust fan, and regularly arranged fan blades are fixedly connected to the surface of the fan spindle. An adjustment cavity is provided inside the fan spindle, and a lower adjustment slot is provided at the bottom of the adjustment cavity. A lower auxiliary connection slot is provided on the inner wall of the lower adjustment slot. An upper auxiliary connection slot is provided inside the fan spindle near the top. An adjustable bushing is movably fitted inside the adjustment cavity. By providing an adjustment cavity, a lower auxiliary connection slot, and an upper auxiliary connection slot, it is beneficial to connect the exhaust fan through the lower auxiliary connection slot when the servo motor rises, and simultaneously enter the upper auxiliary connection slot through the rising of the adjustable bushing, so that the exhaust fan and the adjustable bushing are connected, thereby completing the polysilicon unloading operation.

[0013] In a preferred embodiment, the lifting rod has a threaded groove on its surface near the top, and the limiting shaft has an adjusting ring on its surface near the bottom. The bottom of the limiting shaft is movably connected to the top side of the auxiliary adjusting plate. The adjusting ring and the threaded groove on the lifting rod facilitate the servo motor to lift and lower under the action of the adjusting ring. At the same time, the rotation of the lifting rod separates the lower cooling box and the upper cooling box, increasing the convenience of polysilicon removal.

[0014] The technical effects and advantages of this invention are as follows:

[0015] This invention, by incorporating an exhaust fan, a pressurized water tank, atomizing nozzles, an upper cooling box, an upper protective plate, and a recovery box, facilitates cooling during polysilicon production. The atomizing nozzles atomize and spray water from the pressurized water tank, and the exhaust fan ensures the atomized water vapor evenly covers the surfaces of the upper and lower ingot furnaces. This allows the atomized water to evaporate rapidly under the airflow, carrying away heat and resulting in a uniform decrease in the surface temperature of the ingot. This prevents large temperature differences between the inside and outside of the polysilicon during cooling, avoiding tensile or compressive stress and improving the production quality of the polysilicon, thus preventing cracking. Simultaneously, the upper cooling box and upper protective plate guide the evaporated water vapor to the recovery box for recycling, preventing water waste and reducing environmental impact.

[0016] This invention, by incorporating a limiting shaft, an auxiliary adjustment plate, a first transmission shaft, a second transmission shaft, a third transmission shaft, a lifting rod, a transmission shaft, a bevel gear, and a connecting block, facilitates the following: after the polycrystalline silicon has cooled, the limiting shaft rotates to lower the auxiliary adjustment plate, thereby causing the bevel gear on the surface of the transmission shaft to mesh with the gear at the top of the first transmission shaft. The connecting block disengages from the exhaust fan, causing the servo motor to drive the first transmission shaft to rotate, stopping the exhaust fan. Furthermore, the lifting rod, driven by the mutual transmission of the first, second, and third transmission shafts, raises the upper cooling box.

[0017] Then, the upper ingot furnace drives the material feeding auxiliary rod to rise. At this time, the material feeding auxiliary rod drives the adjustable bushing to rise. After the limit rod is reset, the exhaust fan drives the lifting material feeding screw to rise, which in turn causes the material feeding push plate to rise and the cooled polysilicon to be ejected from the lower ingot furnace for feeding operation. This reduces the installation of additional power mechanisms and the configuration of feeding devices, thereby reducing the complexity and cost of polysilicon production. Attached Figure Description

[0018] Figure 1 This is a schematic cross-sectional view of the overall structure of the present invention.

[0019] Figure 2 This is a schematic diagram of the overall structure of the present invention.

[0020] Figure 3 This is a cross-sectional schematic diagram of the fixed base plate structure of the present invention.

[0021] Figure 4 This is a schematic diagram of the fixed base plate structure of the present invention.

[0022] Figure 5 This is a schematic diagram of the servo motor structure of the present invention.

[0023] Figure 6 This is a schematic cross-sectional view of the cooling box structure of the present invention.

[0024] Figure 7 This is a schematic cross-sectional view of the upper cooling box structure of the present invention.

[0025] Figure 8 This is a schematic cross-sectional view of the lower cooling box structure of the present invention.

[0026] Figure 9 This is a cross-sectional schematic diagram of the recycling bin structure of the present invention.

[0027] Figure 10 This is a schematic diagram of the feeding pusher structure of the present invention.

[0028] Figure 11 This is a cross-sectional schematic diagram of the exhaust fan structure of the present invention.

[0029] The attached diagram is labeled as follows: 1. Fixed base plate; 101. Support frame; 102. Heat dissipation hole; 103. Limiting slide groove; 104. Cylindrical shaft cavity; 105. Transmission cavity; 106. Transmission inner cavity; 2. Lower cooling box; 201. Air inlet; 3. Pressurized water tank; 301. Water storage inner cavity; 4. Heat dissipation frame; 401. Air inlet hole; 5. Bottom protective plate; 501. Nozzle slot; 6. Lower ingot furnace; 7. Upper... 701. Cooling chamber; 702. Water mist return chamber; 703. Conical guide channel; 704. Drainage channel; 8. Sealed cover plate; 9. Upper protective plate; 901. Guide cone plate; 902. Auxiliary recovery tank; 903. Collection tank; 10. Recovery box; 1001. Recovery inner cavity; 1002. Water inlet; 1003. Clamping block; 11. Upper ingot furnace; 12. Auxiliary lifting plate; 1201. Circular through hole; 13. 14. Lifting rod; 15. Limiting shaft; 16. Adjusting ring; 17. Auxiliary adjusting plate; 18. Limiting slider; 19. Servo motor; 10. Transmission shaft; 11. Bevel gear; 12. Connecting block; 13. First transmission shaft axle; 14. Second transmission shaft axle; 15. Third transmission shaft axle; 20. Exhaust fan; 21. Fan main shaft; 22. Fan blades; 23. Adjustment... Inner cavity; 2005, lower adjusting slot; 2006, lower auxiliary connecting slot; 2007, upper auxiliary connecting slot; 21, material feeding push plate; 2101, annular locking block; 22, atomizing nozzle; 23, material feeding auxiliary rod; 2301, L-shaped pull rod; 2302, auxiliary pull block; 24, limiting telescopic shaft; 25, lifting material feeding screw shaft; 26, adjusting bushing; 2601, rectangular connecting block; 27, limiting collar. Detailed Implementation

[0030] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. In addition, the forms of the various structures described in the following embodiments are merely illustrative. The cooling device for polycrystalline silicon production involved in the present invention is not limited to the structures described in the following embodiments. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Reference Figures 1-11As shown, the present invention provides a cooling device for polysilicon production, including a fixed base plate 1. The device is characterized in that: a lower cooling box 2 is fixedly connected to the top of the fixed base plate 1; a pressurized water tank 3 is fixedly fitted onto the surface of the lower cooling box 2 near its bottom; the lower cooling box 2 has regularly arranged air inlets 201 at its bottom position where the pressurized water tank 3 is fixedly connected; a heat dissipation frame 4 is fixedly connected to the inside of the lower cooling box 2 near its bottom; a bottom protective plate 5 is fixedly connected to the inner wall of the lower cooling box 2 at the top of the heat dissipation frame 4; a lower ingot furnace 6 is fixedly connected to the inside of the bottom protective plate 5 near its top; and an upper cooling box 7 is movably connected to the top of the lower cooling box 2. A sealed cover plate 8 is movably connected to the upper cooling box 7. An upper protective plate 9 is fixedly connected to the inner wall of the upper cooling box 7 near the bottom. An upper casting furnace 11 is fixedly connected to the inside of the upper cooling box 7 near the top. A recycling box 10 is movably connected to one side of the surface of the upper cooling box 7. An auxiliary lifting plate 12 is fixedly connected to one side of the surface of both the upper cooling box 7 and the lower cooling box 2. A lifting rod 13 is movably sleeved inside the auxiliary lifting plate 12 near the lower cooling box 2 and the upper cooling box 7. A limiting shaft 14 is movably sleeved inside the other side of the auxiliary lifting plate 12. An auxiliary adjustment plate 15 is movably connected to the bottom of the fixed base plate 1. A servo motor 16 is fixedly connected to the top of the auxiliary adjustment plate 15.

[0032] The pressurized water tank 3 has a water storage cavity 301 inside. The auxiliary lifting plate 12 has circular through holes 1201 at the positions of the movable lifting rod 13 and the limiting shaft 14. The heat dissipation frame 4 has an exhaust fan 20 movably sleeved inside. The bottom of the lower ingot furnace 6 is movably connected to a feeding push plate 21. The pressurized water tank 3 has a neatly arranged atomizing nozzle 22 near the lower cooling box 2. The ends of the atomizing nozzles 22 away from the pressurized water tank 3 are all located inside the lower cooling box 2. The bottom of the feeding push plate 21 has annular locking blocks 2101 around its perimeter. The bottom sides of the feeding push plate 21 are fixedly connected to limiting telescopic shafts 24. The ends of the limiting telescopic shafts 24 away from the feeding push plate 21 are fixedly connected to the heat dissipation frame. 4. At the top two sides, a lifting and lowering screw shaft 25 is fixedly connected to the bottom center of the feeding push plate 21. An adjustable bushing 26 is movably sleeved on the surface of the lifting and lowering screw shaft 25 near the bottom. A limiting collar 27 is opened on the surface of the adjustable bushing 26 near the top. A regularly arranged rectangular connecting block 2601 is opened on the surface of the adjustable bushing 26 near the bottom. A feeding auxiliary rod 23 is fixedly connected to one side of the surface of the upper ingot furnace 11. An L-shaped pull rod 2301 is movably sleeved at the bottom of the feeding auxiliary rod 23. An auxiliary pull block 2302 is opened at the end of the L-shaped pull rod 2301 away from the feeding auxiliary rod 23. The auxiliary pull block 2302 is movably sleeved on the surface of the adjustable bushing 26 at the bottom of the limiting collar 27.

[0033] In this embodiment, the inclusion of an exhaust fan 20, a pressurized water tank 3, an atomizing nozzle 22, an upper cooling box 7, an upper protective plate 9, and a recovery box 10 facilitates the cooling process during polysilicon production. The atomizing nozzle 22 atomizes and sprays water from the pressurized water tank 3, and the exhaust fan 20 evenly covers the surfaces of the upper and lower ingot furnaces 11 and 6. This allows the atomized water to evaporate rapidly under the influence of the airflow, carrying away heat and causing the surface temperature of the ingot to drop at a uniform rate. This prevents a large temperature difference between the inside and outside of the polysilicon during cooling, avoiding tensile or compressive stress and improving the production quality of the polysilicon by preventing cracking. Simultaneously, the upper cooling box 7 and the upper protective plate 9 guide the evaporated water vapor to the recovery box 10 for recycling, preventing water waste and reducing environmental pressure.

[0034] Reference Figures 1-4 As shown, support frames 101 are provided at the four corners of the bottom of the fixed base plate 1, and heat dissipation holes 102 are provided at the center of the fixed base plate 1. Limiting sliders 1501 are provided on both sides of the surface of the auxiliary adjustment plate 15. Limiting grooves 103 are provided on the surface of the support frames 101 near the auxiliary adjustment plate 15. A first transmission shaft wheel 17 is driven and connected to the top side of the servo motor 16. The first transmission shaft wheel 17 is movably connected to the bottom side of the lower cooling box 2. A second transmission shaft 18 is driven and connected to the bottom side of the first transmission shaft wheel 17 away from the servo motor 16. The driving wheel shaft 18 is movably connected to one side of the bottom of the lifting rod 13. The bottom of the lifting rod 13 and one side inside the fixed base plate 1 are movably connected to the third transmission wheel shaft 19. The second transmission wheel shaft 18 is motive-connected to one side of the surface of the third transmission wheel shaft 19. The fixed base plate 1 has a transmission cavity 105 at the position where the third transmission wheel shaft 19 is movably connected. The fixed base plate 1 has a cylindrical shaft cavity 104 at the position where the second transmission wheel shaft 18 is movably connected. The fixed base plate 1 has a transmission inner cavity 106 at the position where the second transmission wheel shaft 18 is motive-connected to the third transmission wheel shaft 19.

[0035] In this embodiment, by providing a servo motor 16, a first transmission shaft 17, a second transmission shaft 18, a third transmission shaft 19, and an auxiliary adjustment plate 15, it is beneficial that after the polycrystalline silicon is cooled, the servo motor 16 is driven to descend via the auxiliary adjustment plate 15, thereby causing the servo motor 16 to drive the first transmission shaft 17, the second transmission shaft 18, and the third transmission shaft 19 to rotate, so that the ingot furnace is separated into upper and lower parts, increasing the convenience of subsequent removal of polycrystalline silicon.

[0036] Reference Figure 5As shown, a drive shaft 1601 is provided at the top of the servo motor 16, a bevel gear 1602 is fixedly sleeved on the surface of the drive shaft 1601 near the bottom, and a regularly arranged connecting block 1603 is provided on the surface of the drive shaft 1601 near the top.

[0037] In this embodiment, by providing a bevel gear 1602 and a connecting block 1603, it is beneficial to change the function of the bevel gear 1602 and the connecting block 1603 when the polysilicon is cooled and unloaded, driven by the servo motor 16 to move up and down, thereby reducing the assembly of additional power mechanisms and reducing cost expenditure.

[0038] Reference Figures 7-8 As shown, a water mist return chamber 701 is provided inside the upper cooling box 7 near the top. A conical guide groove 702 is provided around the top of the water mist return chamber 701 at the position where it is connected to the upper casting furnace 11. A drainage groove 703 is provided in the upper cooling box 7 at the position where it is connected to the recycling box 10. A neatly arranged nozzle groove 501 is provided on the surface of the bottom protective plate 5 near the bottom. A neatly arranged air inlet hole 401 is provided on the surface of the heat dissipation rack 4.

[0039] In this embodiment, by providing a water mist return chamber 701 and a conical guide groove 702, it is beneficial that when the wind accelerates the evaporation of water mist and carries away the heat, the rising steam is guided and recovered through the conical guide groove 702 opened in the water mist return chamber 701, thereby avoiding the waste of water resources and reducing environmental pressure.

[0040] Reference Figures 7-9 As shown, a guide cone plate 901 is provided at the top of the upper protective plate 9 and near the surface of the upper ingot furnace 11. An auxiliary recovery trough 902 is provided at the location where the guide cone plate 901 is provided on the upper protective plate 9. A collection trough 903 is provided inside the upper protective plate 9 and near the top. A recovery cavity 1001 is provided inside the recovery box 10. A water inlet 1002 is provided on the side of the recovery box 10 near the upper cooling box 7. A snap-fit ​​block 1003 is provided on both sides of the surface of the recovery box 10 near the upper cooling box 7. The snap-fit ​​block 1003 is movably snapped onto the surface of the upper cooling box 7.

[0041] In this embodiment, by providing a guide cone 901, an auxiliary recovery tank 902, a collection tank 903, and a recovery box 10, it is beneficial to guide the water vapor to the inside of the collection tank 903 through the guide cone 901 and the auxiliary recovery tank 902 when the water mist evaporates and rises, and then enter the recovery box 10 for recycling through the collection tank 903, thereby avoiding the waste of water resources.

[0042] Reference Figure 11As shown, a fan main shaft 2001 is provided inside the exhaust fan 20. Regularly arranged fan blades 2002 are fixedly connected to the surface of the fan main shaft 2001. An adjustment cavity 2004 is provided inside the fan main shaft 2001. A lower adjustment slot 2005 is provided at the bottom of the adjustment cavity 2004. A lower auxiliary connecting slot 2006 is provided on the inner wall of the lower adjustment slot 2005. An upper auxiliary connecting slot 2007 is provided inside the fan main shaft 2001 near the top. An adjustable bushing 26 is movably sleeved inside the adjustment cavity 2004.

[0043] In this embodiment, by providing an adjustable inner cavity 2004, a lower auxiliary connecting groove 2006, and an upper auxiliary connecting groove 2007, it is beneficial to connect the exhaust fan 20 through the lower auxiliary connecting groove 2006 when the servo motor 16 rises, and at the same time enter the upper auxiliary connecting groove 2007 through the rising of the adjustable bushing 26, so that the exhaust fan 20 is connected to the adjustable bushing 26, thereby completing the polysilicon unloading operation.

[0044] Reference Figure 3 As shown, a threaded groove is provided on the surface of the lifting rod 13 near the top, and an adjusting ring 1401 is provided on the surface of the limiting shaft 14 near the bottom. The bottom position of the limiting shaft 14 is movably connected to the top side of the auxiliary adjusting plate 15.

[0045] In this embodiment, the adjustment ring 1401 and the threaded groove on the surface of the lifting rod 13 facilitate the lifting and lowering of the servo motor 16 under the drive of the adjustment ring 1401. At the same time, the rotation of the lifting rod 13 separates the lower cooling box 2 and the upper cooling box 7, increasing the convenience of polysilicon removal.

[0046] The working principle of this invention is as follows: First, when using the device, remove the sealed cover plate 8 on the top of the upper cooling box 7. Then, inject molten polycrystalline silicon into the upper casting furnace 11. Next, reset the sealed cover plate 8 and seal the upper casting furnace 11. Then, turn on the servo motor 16 and the pressurized water tank 3, so that the water in the water storage cavity 301 is atomized and sprayed into the lower cooling box 2 through the atomizing nozzle 22. Then, the atomized water vapor is activated by the exhaust fan 20 inside the heat dissipation rack 4, so that the atomized water vapor evenly covers the surface of the upper casting furnace 11 and the lower casting furnace 6. At the same time, the activation of the exhaust fan 20 allows external air to enter the lower cooling box 2 through the air inlet 201 and the air inlet hole 401. The water mist adhering to the surfaces of the upper ingot furnace 11 and the lower ingot furnace 6 is accelerated to evaporate under the influence of wind. This evaporated water mist absorbs heat from inside the upper and lower ingot furnaces 11 and 6. The evaporated water mist is then blown upwards by the wind to the guide cone 901 and the water mist return chamber 701. Part of the steam is then guided by the slope of the guide cone 901 to the auxiliary recovery tank 902, and then enters the collection tank 903. Simultaneously, the steam inside the water mist return chamber 701 is guided by the conical guide channel 702, causing the condensed steam to flow at the top of the guide cone 901. The flowing water droplets then enter the collection tank 903. At this point, the water recovered in the collection tank 903 is transferred to the upper layer... The water enters the inlet 1002 through the drainage channel 703 of the cooling box 7, and then enters the recycling chamber 1001 for centralized collection. After the polycrystalline silicon inside the upper casting furnace 11 has cooled, the recycling box 10 is pulled away from the upper cooling box 7. At this time, the locking block 1003 moves away from the surface of the upper cooling box 7. The water collected in the recycling chamber 1001 is then injected into the water storage chamber 301 for secondary use. When it is necessary to remove the polycrystalline silicon, the adjusting ring 1401 is rotated, which drives the limiting shaft 14 to rotate. The rotation of the limiting shaft 14 then drives the auxiliary adjusting plate 15 to move down at the bottom of the fixed base plate 1. As the auxiliary adjustment plate 15 descends, the limiting sliders 1501 on both sides slide within the limiting grooves 103 of the support frame 101. The servo motor 16 then descends along with the auxiliary adjustment plate 15. Simultaneously, the connecting block 1603 on the surface of the transmission shaft 1601 disengages from the lower auxiliary connecting groove 2006 inside the lower adjustment slot 2005. The servo motor 16 then separates from the exhaust fan 20. When the bevel gear 1602 descends to the top of the gear on the first transmission shaft wheel 17, the servo motor 16 activates, causing the first transmission shaft wheel 17 to rotate. The first transmission shaft wheel 17 then drives the second transmission shaft 18 to rotate, and the second transmission shaft 18 then drives the third transmission shaft 19 and the lifting rod 13 to rotate.At this time, the rotation of the lifting rod 13 causes the auxiliary lifting plate 12 and the upper cooling box 7 to rise under the restriction of the limiting shaft 14;

[0047] Then, the upper cooling box 7 rises, causing the upper ingot furnace 11 to separate from the lower ingot furnace 6. As the upper ingot furnace 11 rises, it lifts the material feeding auxiliary rod 23 and the L-shaped pull rod 2301. The auxiliary pull block 2302 then pulls the limiting collar 27 on the surface of the adjustable bushing 26 upwards. The rectangular connecting block 2601 on the surface of the adjustable bushing 26 rises to the position of the upper auxiliary connecting groove 2007. At this point, the adjustable bushing 26 is connected to the exhaust fan 20. Then, the adjusting ring 1401 is rotated again, causing the limiting shaft 14 to reset the auxiliary adjusting plate 15. The auxiliary adjusting plate... 15 drives the servo motor 16 to reset, and then the connecting block 1603 of the transmission shaft 1601 enters the lower auxiliary connecting slot 2006 of the lower adjusting slot 2005. At this time, the servo motor 16 is connected to the exhaust fan 20. When the servo motor 16 is turned on to drive the exhaust fan 20 to rotate, the adjusting bushing 26 rotates accordingly. Then the rotation of the adjusting bushing 26 causes the lifting and unloading screw shaft 25 to rise under the restriction of the limiting telescopic shaft 24. At this time, the unloading push plate 21 lifts the polycrystalline silicon cooled inside the lower ingot furnace 6, and then the lifted polycrystalline silicon can be taken out.

[0048] In conclusion, the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A cooling device for polycrystalline silicon production, comprising a fixed base plate (1), characterized in that: The fixed base plate (1) is fixedly connected to the top of the lower cooling box (2). The surface of the lower cooling box (2) and near the bottom is fixedly fitted with a pressurized water tank (3). The lower cooling box (2) is provided with a regularly arranged air inlet (201) at the bottom of the pressurized water tank (3). The lower cooling box (2) is fixedly connected to the bottom of the lower cooling box (2). The lower cooling box (2) is fixedly connected to the bottom of the heat dissipation rack (4). The lower cooling box (2) is fixedly connected to the top of the heat dissipation rack (4). The lower cooling box (2) is fixedly connected to the top of the heat dissipation rack (4). The lower ingot furnace (6) is fixedly connected to the bottom of the lower cooling box (5). The upper cooling box (2) is movably connected to the top of the lower cooling box (2). The upper cooling box (7) is movably connected to the top of the upper cooling box (7). 7) An upper protective plate (9) is fixedly connected to the inner wall and near the bottom. An upper casting furnace (11) is fixedly connected to the inside of the upper cooling box (7) and near the top. A recycling box (10) is movably connected to one side of the surface of the upper cooling box (7). An auxiliary lifting plate (12) is fixedly connected to one side of the surface of both the upper cooling box (7) and the lower cooling box (2). A lifting rod (13) is movably sleeved inside the auxiliary lifting plate (12) and near the lower cooling box (2) and the upper cooling box (7). A limiting shaft (14) is movably sleeved inside the other side of the auxiliary lifting plate (12). An auxiliary adjusting plate (15) is movably connected to the bottom of the fixed base plate (1). A servo motor (16) is fixedly connected to the top of the auxiliary adjusting plate (15). The pressurized water tank (3) has a water storage cavity (301) inside. The auxiliary lifting plate (12) has circular through holes (1201) at the positions of the movable lifting rod (13) and the limiting shaft rod (14). The heat dissipation frame (4) has an exhaust fan (20) movably sleeved inside. The bottom of the lower ingot furnace (6) is movably connected to a feeding push plate (21). The pressurized water tank (3) has a neatly arranged atomizing nozzle (22) near the interior of the lower cooling box (2). The ends of the atomizing nozzles (22) away from the pressurized water tank (3) are all located inside the lower cooling box (2). The bottom of the feeding push plate (21) has an annular locking block (2101) around its perimeter. The bottom sides of the feeding push plate (21) are fixedly connected to limiting telescopic shafts (24). The end of the limiting telescopic shaft (24) away from the feeding push plate (21) is fixedly connected to... At the top two sides of the heat sink (4), a lifting feeding screw shaft (25) is fixedly connected to the bottom center of the feeding push plate (21). An adjustable bushing (26) is movably sleeved on the surface of the lifting feeding screw shaft (25) near the bottom. A limiting collar (27) is opened on the surface of the adjustable bushing (26) near the top. A regularly arranged rectangular connecting block (2601) is opened on the surface of the adjustable bushing (26) near the bottom. A feeding auxiliary rod (23) is fixedly connected to one side of the surface of the upper ingot furnace (11). An L-shaped pull rod (2301) is movably sleeved at the bottom of the feeding auxiliary rod (23). An auxiliary pull block (2302) is opened at the end of the L-shaped pull rod (2301) away from the feeding auxiliary rod (23). The auxiliary pull block (2302) is movably sleeved on the surface of the adjustable bushing (26) at the bottom of the limiting collar (27).

2. The cooling device for polycrystalline silicon production according to claim 1, characterized in that: The fixed base plate (1) has support frames (101) at the four corners of its bottom, and a heat dissipation hole (102) at the center of its center. Limiting sliders (1501) are provided on both sides of the surface of the auxiliary adjustment plate (15). Limiting grooves (103) are provided on the side of the support frame (101) closest to the auxiliary adjustment plate (15). A first transmission shaft wheel (17) is connected to the top of the servo motor (16). The first transmission shaft wheel (17) is movably connected to the bottom of the lower cooling box (2). A second transmission shaft (18) is connected to the bottom of the first transmission shaft wheel (17) on the side furthest from the servo motor (16). A transmission shaft (18) is movably connected to one side of the bottom of the lifting rod (13). A third transmission shaft (19) is movably connected to the bottom of the lifting rod (13) and to one side inside the fixed base plate (1). The second transmission shaft (18) is movably connected to one side of the surface of the third transmission shaft (19). The fixed base plate (1) has a transmission cavity (105) at the position where the third transmission shaft (19) is movably connected. A cylindrical shaft cavity (104) is opened inside the fixed base plate (1) at the position where the second transmission shaft (18) is movably connected. A transmission inner cavity (106) is opened inside the fixed base plate (1) at one end where the second transmission shaft (18) is movably connected to the third transmission shaft (19).

3. The cooling device for polycrystalline silicon production according to claim 1, characterized in that: The servo motor (16) has a transmission shaft (1601) at the top position. A bevel gear (1602) is fixedly sleeved on the surface of the transmission shaft (1601) near the bottom position. A regularly arranged connecting block (1603) is provided on the surface of the transmission shaft (1601) near the top position.

4. The cooling device for polycrystalline silicon production according to claim 1, characterized in that: The upper cooling box (7) has a water mist return chamber (701) inside and near the top. The water mist return chamber (701) has a conical guide groove (702) around the top of the position connected to the upper casting furnace (11). The upper cooling box (7) has a drainage groove (703) at the position where it is connected to the recycling box (10). The bottom protective plate (5) has a regularly arranged nozzle groove (501) on its surface and near the bottom. The heat sink (4) has a regularly arranged air inlet hole (401) on its surface.

5. A cooling device for polycrystalline silicon production according to claim 1, characterized in that: A guide cone plate (901) is provided at the top of the upper protective plate (9) and near the surface of the upper ingot furnace (11). An auxiliary recycling trough (902) is provided at the location where the guide cone plate (901) is provided. A collection trough (903) is provided inside the upper protective plate (9) and near the top. A recycling cavity (1001) is provided inside the recycling box (10). A water inlet (1002) is provided on the side of the recycling box (10) near the upper cooling box (7). A snap-fit ​​block (1003) is provided on both sides of the surface of the recycling box (10) near the upper cooling box (7). The snap-fit ​​block (1003) is movably snapped onto the surface of the upper cooling box (7).

6. The cooling device for polycrystalline silicon production according to claim 1, characterized in that: The exhaust fan (20) has a fan spindle (2001) inside. The fan spindle (2001) has regularly arranged fan blades (2002) fixedly connected to its surface. The fan spindle (2001) has an adjustment cavity (2004) inside. The adjustment cavity (2004) has a lower adjustment slot (2005) at its bottom. The lower adjustment slot (2005) has a lower auxiliary connection slot (2006) on its inner wall. The fan spindle (2001) has an upper auxiliary connection slot (2007) inside and near its top. The adjustable bushing (26) is movably sleeved inside the adjustment cavity (2004).

7. A cooling device for polycrystalline silicon production according to claim 1, characterized in that: The lifting rod (13) has a threaded groove on its surface near the top, and the limiting shaft (14) has an adjusting ring (1401) on its surface near the bottom. The bottom of the limiting shaft (14) is movably connected to the top side of the auxiliary adjusting plate (15).

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