Motor control system and motor control method of ion implanter

Abstract

The invention provides a motor control system and a motor control method of an ion implanter, and relates to the technical field of control. In the application, the motor control system of the ion implanter can comprise a processor, a resource configuration module, a motor driver and a motor. The processor can adopt a data sending method in a DMA mode to send first serial port data to the motor driver, and the first serial port data comprises at least one control instruction for the motor in the ion implantation process; after the resource configuration module determines that the processor sends the first serial port data to the motor driver, the resource configuration module can release resources which are pre-configured for serial port communication between the processor and the motor driver. The motor driver can receive the first serial port data sent by the processor and control the motor according to the first serial port data. Therefore, the stability and efficiency of motor control are improved.

Description

Technical Field

[0001] The present application relates to the field of control technology, and in particular to a motor control system and a motor control method for an ion implanter. Background Art

[0002] Ion implanters are a key piece of equipment in semiconductor manufacturing. The real-time and precise control of motors in these machines significantly impacts the quality and yield of semiconductor products (e.g., wafers).

[0003] In related technologies, the processor in an ion implanter typically communicates with the implanter's motor via a serial interface (SI). Therefore, the processor's central processing unit (CPU) sequentially executes serial communication services and ion implantation services to control the motor. Serial communication services involve data transmission between multiple modules within the ion implanter, such as the processor, motor, and sensors.

[0004] However, the above motor control method increases the time period for motor status acquisition and command issuance due to serial communication, thereby affecting the stability and efficiency of motor control. That is, the stability and efficiency of motor control are low. Summary of the Invention

[0005] Embodiments of the present application provide a motor control system and a motor control method for an ion implanter, so as to improve the stability and efficiency of motor control.

[0006] In a first aspect, an embodiment of the present application provides a motor control system for an ion implanter, the motor control system for the ion implanter comprising: a processor, a resource configuration module, a motor driver, and a motor; The processor is configured to send first serial port data to the motor driver using a data transmission method in a direct memory access (DMA) manner; the first serial port data includes at least one control instruction for the motor during an ion implantation process; The resource configuration module is configured to release resources pre-configured for serial port communication between the processor and the motor driver after determining that the processor sends the first serial port data to the motor driver; The motor driver is configured to receive the first serial port data sent by the processor and control the motor according to the first serial port data.

[0007] In an optional embodiment, the first serial port data further includes: a request for obtaining status information of the motor driver; The processor is further configured to, when the processor determines that the motor driver and / or the motor is used for ion implantation, acquire a frequency according to a first state within a set time range and send the first serial port data to the motor driver; Furthermore, a data receiving method in DMA mode is used to receive second serial port data sent by the motor driver; the second serial port data is used to indicate the motion state of the motor driver.

[0008] In an optional embodiment, the resource configuration module is further configured to trigger a DMA interrupt when determining that the processor receives the second serial port data; The DMA interrupt is used to instruct the processor to stop processing data for the ion implantation service and start processing data of the second serial port.

[0009] In an optional embodiment, the processor is further configured to, when determining that the motor driver and / or the motor is not used for ion implantation, send the first serial port data to the motor driver at a second state acquisition frequency within the set time range; wherein the second state acquisition frequency is less than the first state acquisition frequency; And, using the data receiving method in the DMA mode to receive third serial port data sent by the motor driver; the third serial port data is used to indicate the motion state of the motor driver; The second state acquisition frequency is less than the first state acquisition frequency.

[0010] In an optional embodiment, the motor control system of the ion implanter further includes: a task scheduling module; The task scheduling module is configured to determine a start time for obtaining the state of the motor according to semaphores and mutexes corresponding to threads in the resource configuration module; And, a first message carrying the status acquisition start time is sent to the motor driver, so that the motor driver starts to collect the operating status of the motor at the status acquisition start time.

[0011] In an optional embodiment, the task scheduling module is further configured to determine the task priorities respectively corresponding to the multiple tasks to be processed and / or the resource allocation strategies of the multiple tasks to be processed according to the task processing requirements of the multiple tasks to be processed.

[0012] In a second aspect, an embodiment of the present application further provides a motor control method for an ion implanter, which is applied to a processor in the motor control system of the ion implanter as described in the first aspect, and the method includes: In response to a motor control request for the motor, calling a data sending method in a DMA mode; The data transmission method in the DMA mode is adopted to send first serial port data to the motor driver; the first serial port data includes at least one control instruction for the motor during the ion implantation process.

[0013] In an optional embodiment, the first serial port data further includes: a request for obtaining status information of the motor driver, and the method further includes: The data receiving method using the DMA mode is used to receive the second serial port data sent by the motor driver; the second serial port data is the serial port data returned by the motor driver according to the first state acquisition frequency within a set time range when the processor determines that the motor driver and / or the motor is used for ion implantation, and the second serial port data is used to indicate the motion state of the motor driver.

[0014] In an optional embodiment, the data receiving method using the DMA mode, after receiving the second serial port data sent by the motor driver, further includes: In response to a DMA interrupt triggered by the resource configuration module when determining that the processor receives the second serial port data, data processing for the ion implantation service is stopped, and data processing for the second serial port data is started.

[0015] In an optional embodiment, the method further includes: The data receiving method using the DMA mode is used to receive the third serial port data sent by the motor driver; the third serial port data is the serial port data returned by the motor driver according to the second state acquisition frequency within the set time range when the processor determines that the motor driver and / or the motor is not used for ion implantation, and the third serial port data is used to indicate the motion state of the motor driver; wherein the second state acquisition frequency is less than the first state acquisition frequency.

[0016] The beneficial effects of this application are as follows: In the motor control system of the ion implanter provided in the embodiment of the present application, the processor can use the DMA data transmission method to send the first serial port data to the motor driver, thereby realizing high-speed transmission of data between the processor and the motor driver; and the resource configuration module can release the resources pre-configured for serial communication between the processor and the motor driver after determining that the processor sends the first serial port data to the motor driver, thereby reducing the occupation of system resources by data transmission. In addition, after receiving the first serial port data sent by the processor, the motor driver can realize efficient control of the motor according to at least one control instruction included in the first serial port data. It can be seen that the aforementioned motor control system avoids the problem in the related art that the time period for motor state acquisition and command issuance is increased due to serial communication, thereby resulting in low stability and efficiency of motor control, thereby improving the stability and efficiency of motor control.

[0017] In addition, other features and advantages of the present application will be described in the following description, and in part will become apparent from the description, or may be understood by practicing the present application. The objectives and other advantages of the present application can be realized and obtained through the structures particularly pointed out in the written description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described here are used to provide a further understanding of the present application, constitute a part of the present application, and do not constitute an improper limitation of the present application. In the drawings: Figure 1 A logic diagram of serial port motor control of a related ion implanter provided in an embodiment of the present application; Figure 2 A schematic diagram of the system architecture of a motor control system for an ion implanter provided in an embodiment of the present application; Figure 3 A schematic diagram of the system architecture of a motor control system for another ion implanter provided in an embodiment of the present application; Figure 4 A schematic diagram of the system architecture of a motor control system for another ion implanter provided in an embodiment of the present application; Figure 5 A schematic diagram of an implementation flow of a motor control method executed by a processor in a motor control system provided in an embodiment of the present application; Figure 6 A logic diagram of motor control for an ion implanter provided in an embodiment of the present application. DETAILED DESCRIPTION

[0019] The following describes embodiments of the present application in more detail with reference to the accompanying drawings. Although certain embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be construed as limited to the embodiments described herein. Instead, these embodiments are provided to provide a more thorough and complete understanding of the present application. It should be understood that the drawings and embodiments of the present application are for illustrative purposes only and are not intended to limit the scope of protection of the present application.

[0020] It should be understood that the various steps described in the method embodiments of the present application can be performed in different orders and / or in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this respect.

[0021] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the description below. It should be noted that the concepts of "first", "second", etc. mentioned in this application are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0022] It should be noted that the modifications of "one" and "multiple" mentioned in this application are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly indicated in the context, they should be understood as "one or more".

[0023] The names of the messages or information exchanged between multiple devices in the embodiments of the present application are only used for illustrative purposes and are not used to limit the scope of these messages or information.

[0024] The following explains some of the terms used in the embodiments of the present application to facilitate understanding by those skilled in the art.

[0025] (1) Wafer: refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After the silicon crystal rod is ground, polished and sliced, it is formed into silicon wafers, also known as wafers. Domestic wafer production lines mainly focus on 8-inch and 12-inch wafers.

[0026] (2) DMA: It is a high-speed data transfer mechanism that allows data to be exchanged directly between peripherals and memory, or between memory and memory, without the intervention of the central processing unit (CPU).

[0027] (3) SI: Also known as serial port, it is an expansion interface that uses serial communication, meaning that data is transmitted sequentially, one bit at a time. Because SI communication lines are simple, only one pair of transmission lines is needed to achieve two-way communication (telephone lines can be used directly as transmission lines), which greatly reduces costs and is particularly suitable for long-distance communication, but the transmission speed is slow.

[0028] (4) Universal synchronous / asynchronous receiver / transmitter (USART): It is a commonly used serial communication interface that usually has functions such as data transmission, data reception, and synchronous and asynchronous communication.

[0029] (5) Advanced RISC machines (ARM): A microprocessor architecture and chip technology designed based on the principles of reduced instruction set computers (RISC).

[0030] (6) Free real-time operating system (Free RTOS): It is an open source, lightweight real-time operating system with functions such as task management, memory management, interrupt management and time management.

[0031] (7) Semaphore: used to control access to shared resources and can limit the number of processes or threads that can access a shared resource simultaneously. Typically, a semaphore is represented by an integer value, but optionally, it is represented by a binary number, where a 1 bit represents the number of available resources and a 0 bit represents the number of available resources. When a process or thread requests a resource, the semaphore value is decremented by 1, and when the resource is released, the semaphore value is incremented by 1.

[0032] (8) Mutex: Used to protect shared resources, ensuring that only one process or thread can access the resource at a time. Mutexes are usually implemented using locks. When one process or thread acquires a lock, other processes or threads cannot acquire the lock.

[0033] Based on the above nouns and related terminology explanations, the following briefly introduces the design concept of the embodiments of the present application: Ion implanters are a critical piece of process equipment in semiconductor manufacturing. The real-time and precise motor control in this process directly impacts wafer quality and yield. However, due to the often harsh operating conditions of ion implanters, such as high voltage and strong radiation, related technologies typically separate serial communication services (e.g., serial communication functions) from ion implantation operations by communicating with motors (e.g., servo motors) through serial ports.

[0034] For example, see Figure 1 As shown in FIG, while waiting for serial port data (i.e., waiting for USART reception), the processing of the ion implantation service is stagnant, wasting system resources (e.g., CPU resources). In addition, a separate blank time needs to be reserved for processing the ion implantation service, which increases the motor status reading time period.

[0035] It can be seen that the use of the above-mentioned motor control method will increase the time period for motor status acquisition and command issuance due to serial communication, thereby affecting the stability and efficiency of motor control. That is, the existing motor control method has the problem of low stability and efficiency of motor control, and it is impossible to reduce the cycle time by increasing the serial port baud rate.

[0036] In view of this, in order to solve or improve the above problems and improve the stability and efficiency of motor control, the embodiment of the present application provides a system architecture diagram of a motor control system of an ion implanter. Figure 2 As shown, the motor control system (e.g., an ARM-based motor control system) may include: a processor 11, a resource configuration module 12, a motor driver 13, and a motor 14. The resource configuration module 12 may exchange information with the processor 11 and the motor driver 13, respectively. The motor driver 13 may also interact with the resource configuration module 12 and the motor 14, respectively.

[0037] In an embodiment of the present application, the processor 11 can be configured to transmit first serial port data to the motor driver 13 using a DMA data transmission method. The first serial port data may include at least one control instruction for the motor 14 during the ion implantation process. Optionally, the processor 11 can transmit one control instruction at a time during the transmission of the first serial port data to the motor driver 13, and can only transmit the next control instruction after the motor driver 13 responds.

[0038] The resource configuration module 12 can be configured to release resources (e.g., CPU resources, memory resources, etc.) pre-configured for serial communication between the processor 11 and the motor driver 13 after determining that the processor 11 has sent the first serial port data to the motor driver 13. The motor driver 13 can be configured to receive the first serial port data sent by the processor 11 and control the motor 14 based on the first serial port data. It should be noted that the resource configuration module 12 can also be referred to as a resource scheduling module, and of course, other names are also possible, and this embodiment of the application does not specifically limit this.

[0039] It should be understood that the embodiments of the present application do not impose any restrictions on the number of devices or components involved in the above system architecture. For example, the above system architecture may include more motor drivers, or fewer motor drivers, or may also include other network devices or modules (such as sensors). Figure 3 As shown, the motor control system may include: a processor (e.g., an ARM chip), a resource configuration module (e.g., FreeRTOS), multiple motor drivers, multiple motors, and multiple sensors. A motor driver may correspond to one motor, and a motor may correspond to one or more sensors, although this embodiment of the application does not specifically limit this.

[0040] Optionally, the multiple devices or components included in the motor control system of the ion implanter described above may be deployed separately or integrated, and this embodiment of the present application does not specifically limit this. For example, the processor 11 and the resource configuration module 12 may be deployed separately, or the resource configuration module may be integrated and deployed in the processor 11.

[0041] Based on the above method, the processor 11 can use a DMA data transmission method to send the first serial port data to the motor driver 13, thereby realizing high-speed transmission of data between the processor 11 and the motor driver 13. In addition, the resource configuration module 12 can release the resources pre-configured for serial communication between the processor 11 and the motor driver 13 after determining that the processor 11 sends the first serial port data to the motor driver 13, thereby reducing the occupation of system resources by data transmission. In addition, after receiving the first serial port data sent by the processor 11, the motor driver 13 can realize efficient control of the motor 14 according to at least one control instruction included in the first serial port data. It can be seen that the motor control system of the above-mentioned ion implanter can avoid the problem in the related art that the time period for motor state acquisition and command issuance is increased due to serial communication, thereby resulting in low stability and efficiency of motor control, thereby improving the stability and efficiency of motor control.

[0042] In addition, by configuring the processor 11 in the motor control system provided in the embodiment of the present application with a DMA data sending method, the problem of the related technology that the processor 11 cannot efficiently control the motor 14 in real time due to the usually harsh working environment of the ion implanter is overcome. Therefore, the response speed of the motor control is significantly improved.

[0043] To efficiently monitor the operating status of motor 14 and achieve efficient control of motor 14, processor 11 may also employ a DMA data transmission method to send a request for obtaining status information of motor 14 to motor driver 13. Therefore, in an optional implementation, the aforementioned first serial port data may also include a request for obtaining status information of motor driver 13. In this case, processor 11 may also be configured to, upon determining that motor driver 13 and / or motor 14 is being used for ion implantation, send first serial port data to motor driver 13 at a first status acquisition frequency (e.g., 5 seconds / time) within a set time range (e.g., 5 minutes); and, employ a DMA data reception method to receive second serial port data sent by motor driver 13. This second serial port data may be used to indicate the motion status of motor driver 13.

[0044] The above-mentioned second serial port data can also be called the status information of the motor driver 13 or the operating status information of the motor driver 13. Of course, it can also have other names, and the embodiment of the present application does not make specific limitations on this.

[0045] In an optional implementation, the resource configuration module 12 may also be configured to trigger a DMA interrupt when determining that the processor 11 receives the second serial port data. The DMA interrupt may be configured to instruct the processor 11 to stop processing data for the ion implantation service and start processing the second serial port data.

[0046] Thus, utilizing the DMA data transmission mode, DMA data reception mode, and DMA interrupts not only reduces the system resource usage of serial port communication but also ensures real-time response to received second serial port data. In other words, the DMA mode is used for high-speed data transmission between the processor 11 and the motor driver 13, allowing for rapid data transmission without requiring the resource configuration module 12 to operate, freeing up the resources of the resource configuration module 12 for other operations. Furthermore, after the processor 11 completes sending the first serial port data, the resource configuration module 13 can immediately suspend the task of processing the ion implantation service, freeing up the resources of the resource configuration module 12 for use in the ion implantation service. Furthermore, when the second serial port data is transmitted back, the processor 11 can use DMA to receive it. Once the processor 11 finishes receiving the second serial port data, the resource configuration module 13 can trigger a DMA interrupt, allowing the processor 11 to process the received second serial port data. It should be understood that after the DMA interrupt instructs the processor 11 to stop processing data for the ion implantation service, the processor 11 can free up the resources required for processing the ion implantation service and use them for processing the second serial port data.

[0047] Therefore, since the ion implantation service can be processed while sending and receiving serial port data (i.e., sending the first serial port data and receiving the second serial port data), the idle state of the resource configuration module 12 waiting for the motor driver 13 to return data is avoided, the system resources are utilized to the maximum extent, and the overall task execution efficiency and the real-time performance of the system are improved.

[0048] Existing motor control systems lack effective synchronization mechanisms and coordinated control logic, resulting in loose coordination between multi-axis motors. This leads to low efficiency in complex operating environments and is prone to delays and errors. Furthermore, during ion implantation tasks, the motor control system must continuously and frequently monitor the operating status of each motor, even when a specific axis is not needed. This results in excessive waste of system resources.

[0049] Optionally, when the processor 11 determines that the motor driver 13 and / or the motor 14 are not being used for ion implantation, the processor 11 may further be configured to send first serial port data to the motor driver 13 at a second state acquisition frequency (e.g., 15 seconds / time) within a set time range (e.g., 5 minutes); and receive third serial port data from the motor driver 13 using a DMA data receiving method. The second state acquisition frequency is lower than the first state acquisition frequency, and the third serial port data may be used to indicate the motion state of the motor driver 13.

[0050] by Figure 3Taking the motor 1 and motor 2 shown as an example, assuming that motor 1 is used for ion implantation and motor 2 is not used for ion implantation, the processor can acquire information on the operating status of motor driver A according to the first state acquisition frequency (e.g., 8 seconds / time) within a set time range (e.g., 10 minutes), and obtain the second serial port data returned by motor driver A to indicate the operating status of motor driver A; and the processor can acquire information on the operating status of motor driver B according to the second state acquisition frequency (e.g., 30 seconds / time) within the aforementioned set time range (i.e., 10 minutes), and obtain the third serial port data returned by motor driver B to indicate the operating status of motor driver B.

[0051] Based on the above approach, in the business process of an ion implanter, if the ion implanter's motor control system uses multi-axis control, if there are multiple motors that are not in use during the business process, continuing to frequently obtain the operating status of this motor will waste system resources and increase the time period for motor status acquisition. Therefore, temporarily reducing the frequency of motor status acquisition can better meet the real-time requirements of the motor in use.

[0052] In addition, existing motor control systems usually rely on a fixed task execution order, making it difficult to dynamically schedule tasks according to actual working conditions, resulting in low task processing efficiency. In other words, the task scheduling of existing motor control systems is inflexible. In order to achieve flexible scheduling of multiple tasks included in ion implantation, refer to Figure 4 As shown, the motor control system for the ion implanter provided in the embodiment of the present application may further include a task scheduling module 15. The task scheduling module 15 may be configured to determine the task priorities corresponding to the plurality of pending tasks (e.g., data acquisition, logical operations, network communication, etc.) and / or the resource allocation strategy for the plurality of pending tasks based on the task processing requirements of the plurality of pending tasks. This approach ensures the orderly execution or progress of the plurality of pending tasks during the motor control process.

[0053] It can be understood that the task priorities corresponding to the above-mentioned multiple pending tasks can be used to determine the task execution order of the above-mentioned multiple pending tasks, and the resource allocation strategy of the above-mentioned multiple pending tasks is determined according to the resource requirements corresponding to the above-mentioned multiple pending tasks.

[0054] In an optional implementation, task scheduling module 15 may also be configured to determine a start time for acquiring the status of motor 14 based on the semaphores and mutexes corresponding to the threads in resource configuration module 12; and to send a first message carrying the status acquisition start time to motor driver 13, so that motor driver 13 begins acquiring the operating status of motor 14 at the status acquisition start time. This not only optimizes task scheduling but also ensures data consistency and synchronization between control instructions, thereby improving the overall efficiency of the motor control system.

[0055] Taking Free RTOS as an example, processor 11 can utilize Free RTOS's semaphores and mutexes to determine the start time for the motor control system to execute data acquisition tasks related to motor status acquisition (i.e., the status acquisition start time). This start time is then used to begin acquiring motor operating status information. This approach optimizes task scheduling through Free RTOS, dynamically adjusting task priorities and resource allocation. This allows the motor control system to more flexibly handle multitasking requirements, ensuring real-time response for critical control tasks while improving overall task processing efficiency.

[0056] Furthermore, by combining DMA with an interrupt mechanism, FreeRTOS, and multi-axis synchronous control technology, efficient control and monitoring of motor 14 is achieved. Without relying on traditional high-load processing modes, the motor control system automatically optimizes task scheduling and data transfer in a multi-tasking environment, significantly improving the responsiveness and stability of the motor control system. Automatic data transfer management through DMA effectively reduces system resource usage, while the interrupt mechanism ensures real-time task processing. The synchronization of multi-axis control further enhances the overall performance of the motor control system.

[0057] In summary, the motor control system for the ion implanter provided by the embodiment of the present application can automatically manage data transmission through DMA and interrupt mechanisms, reducing the load on the resource allocation module and meeting the real-time control requirements of the ion implantation business. Furthermore, it implements multi-axis synchronous control, maintaining synchronization and coordination of multiple motors even in complex operating environments, ensuring the real-time data transmission and control accuracy of the motor control system. Therefore, compared to related technologies, the motor control system of the present application can achieve more timely and precise motor control, further improving the quality and yield of wafers.

[0058] Furthermore, based on the same technical concept, an embodiment of the present application also provides a motor control method for an ion implanter, so as to improve the problems of low stability and efficiency of motor control in existing motor control systems.

[0059] For example, see Figure 5As shown, it is a schematic diagram of an implementation process of a motor control method executed by a processor in a motor control system provided by an embodiment of the present application. The specific implementation process of the method is as follows: S501: In response to a motor control request for a motor, a DMA data transmission method is called.

[0060] For example, when executing step S501 , after receiving the motor control request for the motor, the processor may call a DMA data transmission method to complete the subsequent transmission of serial port data.

[0061] S502: Using a DMA data transmission method, the first serial port data is sent to the motor driver.

[0062] The first serial port data includes at least one control instruction for the motor during the ion implantation process. For example, the at least one control instruction may include: a control instruction for adjusting the motor speed, a control instruction for the motor speed duration, and a control instruction for the motor rotation mode.

[0063] Optionally, during the process of sending the first serial port data to the motor driver, the processor may send a control instruction at a time, and may send the next control instruction only after the motor driver responds.

[0064] Optionally, the first serial port data may further include a request for obtaining status information of the motor driver. Then, the processor transmits a status information acquisition request to the motor driver using a DMA data transmission method, and the motor driver then returns second serial port data indicating the operating status of the motor driver to the processor. The aforementioned second serial port data may also be referred to as operating status information of the motor driver, which is not limited in this embodiment of the present application. Accordingly, the processor may further receive the second serial port data sent by the motor driver using a DMA data reception method.

[0065] In other words, the second serial port data may be serial port data returned by the motor driver according to the first state acquisition frequency within a set time range when the processor determines that the motor driver and / or the motor is used for ion implantation.

[0066] To further improve the stability and efficiency of motor control, after receiving the second serial port data from the motor driver using DMA, the processor can also respond to a DMA interrupt triggered by the resource configuration module upon determining that the processor has received the second serial port data, stopping data processing for the ion implantation task and resuming data processing on the second serial port data. This not only enables real-time processing of the second serial port data but also enables flexible scheduling of task execution.

[0067] Furthermore, if a motor among the multiple motors included in the motor control system is not being used for ion implantation, the state acquisition frequency of the motor driver can be temporarily reduced to meet the real-time requirements of the motor being used for ion implantation. Therefore, upon determining that a motor driver is not being used and / or the motor is not being used for ion implantation, the processor can acquire information about the motor's operating status at the second state acquisition frequency within the aforementioned set time range, thereby obtaining third serial port data indicating the operating status of the motor driver. The aforementioned second state acquisition frequency is lower than the aforementioned first state acquisition frequency.

[0068] For example, the preset time range may be 10 minutes, the first state acquisition frequency may be 5 seconds / time, and the second state acquisition frequency may be 20 seconds / time. Optionally, the processor may further adopt a DMA data receiving method to receive the third serial port data sent by the motor driver.

[0069] In other words, the third serial port data may be serial port data returned by the motor driver according to the second state acquisition frequency within a set time range when the processor determines that the motor driver and / or the motor is not used for ion implantation.

[0070] In an alternative implementation, see Figure 6 As shown, it is a logical diagram of the motor control of an ion implanter provided in an embodiment of the present application. After receiving the motor control request for the motor, the processor can call and adopt the data sending method in DMA mode to send the first serial port data to the motor controller; and adopt the data receiving method based on DMA mode to receive the second serial port data sent by the motor controller. Moreover, after receiving the second serial port data sent by the motor controller, the processor can trigger a DMA interrupt to process the second serial port data. In this way, the response speed and stability of the motor control system are improved. In addition, the processor can still continue the ion implantation business in the process of receiving and sending serial port data, thereby improving the overall efficiency of the motor control system.

[0071] To summarize, based on the motor control method of the ion implanter recorded in the above steps S501~S502, the processor can adopt a DMA-based data transmission method (i.e., a DMA-based data sending method and a DMA-based data receiving method) to interact with the motor driver in the motor control system, thereby avoiding the problem of increased communication time due to serial communication in related technologies, resulting in lower stability and efficiency of motor control, and improving the stability and efficiency of motor control.

[0072] Furthermore, it should be understood that what is disclosed above is merely a preferred embodiment of the present application and certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the claims of the present invention are still within the scope covered by the present application.

Claims

1. A motor control system for an ion implanter, characterized in that: include: Processor, resource configuration module, motor driver and motor; The processor is configured to send first serial port data to the motor driver using a data sending method in a direct memory access (DMA) manner; The first serial port data includes at least one control instruction for the motor during the ion implantation process; The resource configuration module is configured to release resources pre-configured for serial port communication between the processor and the motor driver after determining that the processor sends the first serial port data to the motor driver; The motor driver is configured to receive the first serial port data sent by the processor and control the motor according to the first serial port data.

2. The motor control system according to claim 1, wherein: The first serial port data further includes: a request for obtaining status information of the motor driver; The processor is further configured to, when determining that the motor driver and / or the motor is used for ion implantation, acquire a frequency according to a first state within a set time range and send the first serial port data to the motor driver; Furthermore, a data receiving method in DMA mode is used to receive second serial port data sent by the motor driver; the second serial port data is used to indicate the motion state of the motor driver.

3. The motor control system according to claim 2, wherein: The resource configuration module is further configured to trigger a DMA interrupt when determining that the processor receives the second serial port data; The DMA interrupt is used to instruct the processor to stop processing data for the ion implantation service and start processing data of the second serial port.

4. The motor control system according to claim 2, wherein: The processor is further configured to, when determining that the motor driver and / or the motor is not used for ion implantation, send the first serial port data to the motor driver according to a second state acquisition frequency within the set time range; wherein the second state acquisition frequency is less than the first state acquisition frequency; Furthermore, the data receiving method in the DMA mode is used to receive the third serial port data sent by the motor driver; the third serial port data is used to indicate the motion state of the motor driver.

5. The motor control system according to any one of claims 2 to 4, characterized in that: The system further comprises: a task scheduling module; The task scheduling module is configured to determine a start time for obtaining the state of the motor according to semaphores and mutexes corresponding to threads in the resource configuration module; And, a first message carrying the status acquisition start time is sent to the motor driver, so that the motor driver starts to collect the operating status of the motor at the status acquisition start time.

6. The motor control system according to claim 5, characterized in that: The task scheduling module is further configured to determine the task priorities respectively corresponding to the plurality of tasks to be processed and / or the resource allocation strategies for the plurality of tasks to be processed according to the task processing requirements of the plurality of tasks to be processed.

7. A motor control method for an ion implanter, characterized in that: A processor used in a motor control system of an ion implanter according to any one of claims 1 to 6, comprising: In response to a motor control request for the motor, calling a data sending method in a direct memory access (DMA) mode; The data transmission method in the DMA mode is adopted to send first serial port data to the motor driver; the first serial port data includes at least one control instruction for the motor during the ion implantation process.

8. The method according to claim 7, wherein The first serial port data further includes: a request for obtaining status information of the motor driver, and the method further includes: A data receiving method using DMA is used to receive second serial port data sent by the motor driver; the second serial port data is serial port data returned by the motor driver according to the first state acquisition frequency within a set time range when the processor determines that the motor driver and / or the motor is used for ion implantation, and the second serial port data is used to indicate the motion state of the motor driver.

9. The method according to claim 8, wherein The data receiving method using DMA mode, after receiving the second serial port data sent by the motor driver, further includes: In response to a DMA interrupt triggered by the resource configuration module when determining that the processor receives the second serial port data, data processing for the ion implantation service is stopped, and data processing for the second serial port data is started.

10. The method according to claim 8 or 9, characterized in that The method further comprises: The data receiving method using the DMA mode is used to receive the third serial port data sent by the motor driver; the third serial port data is the serial port data returned by the motor driver according to the second state acquisition frequency within the set time range when the processor determines that the motor driver and / or the motor is not used for ion implantation, and the third serial port data is used to indicate the motion state of the motor driver; wherein the second state acquisition frequency is less than the first state acquisition frequency.

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