Shutdown alarm device and method for chemical mechanical polishing equipment and polishing equipment

Abstract

The invention relates to the technical field of chemical mechanical polishing, and discloses a shutdown alarm device and method for chemical mechanical polishing equipment and the polishing equipment. The shutdown alarm device comprises an alternating current and direct current converter, a photoelectric sensor, a time delay module and an alarm; the AC-DC converter is connected with a first power supply, and the first power supply is different from a second power supply of the mobile device; the optical signal transmitting end and the optical signal receiving end are arranged in the moving range of the anti-dazzling screen; the delay module is used for switching off the connection between the fourth input end and the second output end when the anti-dazzling screen shields the light emitted by the optical signal transmitting end, and the delay module is used for switching on the connection between the fourth input end and the second output end after a preset duration when the anti-dazzling screen does not shield the light emitted by the optical signal transmitting end; the preset time length is greater than the time length that the anti-dazzling screen passes through the optical signal transmitting end twice. The situation that alarming is not timely after the whole chemical mechanical polishing equipment is powered off can be avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical mechanical polishing, and in particular to a shutdown alarm device and method for chemical mechanical polishing equipment, and polishing equipment. Background Art

[0002] Chemical Mechanical Polishing (CMP) is a key process in semiconductor manufacturing, used to achieve global planarization of wafer surfaces. CMP works by removing excess material from the wafer surface through a synergistic effect of chemical etching and mechanical grinding, achieving atomic-level flatness.

[0003] If a CMP system is shut down for an extended period due to a fault, it can lead to production interruptions, equipment damage, and reduced production quality. Currently, CMP system shutdown detection relies on the CMP system's own software system. When the entire CMP system loses power, the software system becomes inoperable, making it difficult to promptly alert personnel of the shutdown. Summary of the Invention

[0004] In view of this, the present invention provides a shutdown alarm device, method and polishing equipment for chemical mechanical polishing equipment to solve the problem that it is difficult to issue an alarm in time after the entire chemical mechanical polishing equipment is powered off.

[0005] In the first aspect, the present invention provides a shutdown alarm device for chemical mechanical polishing equipment. The chemical mechanical polishing equipment includes a moving device and a shading plate. When the chemical mechanical polishing equipment is working normally, the moving device drives the shading plate to periodically reciprocate along a preset direction. The shutdown alarm device includes an AC-DC converter, a photoelectric sensor, a delay module and an alarm; the AC-DC converter includes a first input terminal, a first DC output terminal and a second DC output terminal, the first input terminal is connected to a first power supply, and the AC-DC converter is used to convert the AC power of the first power supply into DC power, and the first power supply is different from the second power supply of the moving device; the photoelectric sensor includes a second input terminal, a third input terminal, a first output terminal, an optical signal transmitting terminal and an optical signal receiving terminal, and the second input terminal is connected to the first DC output terminal. A current output terminal, a third input terminal is connected to the second DC output terminal, and the optical signal transmitting terminal and the optical signal receiving terminal are arranged within the moving range of the shading plate; the delay module includes a fourth input terminal, a fifth input terminal and a second output terminal, the fourth input terminal is connected to the second DC output terminal, the fifth input terminal is connected to the first output terminal, the second output terminal is connected to one end of the alarm, and the other end of the alarm is connected to the first DC output terminal; when the shading plate blocks the light emitted by the optical signal transmitting terminal, the delay module is used to cut off the connection between the fourth input terminal and the second output terminal, and when the shading plate no longer blocks the light emitted by the optical signal transmitting terminal, the delay module is used to turn on the connection between the fourth input terminal and the second output terminal after a preset time length to trigger the alarm to sound an alarm, and the preset time length is greater than the time length of the shading plate passing through the optical signal transmitting terminal twice.

[0006] In this embodiment, through the interaction between the delay module, photoelectric sensor, and alarm, an automatic alarm is triggered when the downtime of the chemical mechanical polishing equipment reaches a set value. The alarm time can be flexibly adjusted, which not only avoids false alarms but also allows real-time monitoring of the operating status of the chemical mechanical polishing equipment and rapid response when the chemical mechanical polishing equipment's operating status is abnormal, allowing staff to promptly detect abnormal conditions in the chemical mechanical polishing equipment. Furthermore, the first power supply of the delay module, photoelectric sensor, and alarm is independent of the chemical mechanical polishing equipment, avoiding the situation where the alarm is not timely after the entire chemical mechanical polishing equipment loses power, thereby improving the timeliness and accuracy of the alarm in the event of an unexpected downtime. In addition, the shutdown alarm device is assembled in an electrical box, which is flexible to install, occupies a small area, and can be adapted to different sites.

[0007] In an optional implementation, the delay module is a delay relay or a programmable logic controller.

[0008] In an alternative embodiment, when the time delay module is a time delay relay, the time delay module further comprises a first switch between the fourth input end and the second output end, and the first switch comprises a normally closed contact; when the light shield blocks the light emitted by the light signal emitting end, the second output end outputs a first electric signal, the first electric signal triggers the normally closed contact to be disconnected, so as to turn off the connection between the fourth input end and the second output end.

[0009] In the embodiment, if the body or the cable of the photoelectric sensor is damaged during the operation of the chemical mechanical polishing equipment, the time delay relay will also lose power, and when the cumulative time of the continuous power loss reaches the preset time length, the alarm is triggered to issue an alarm, so that the staff can find that the shutdown alarm device is invalid in a timely manner.

[0010] In an alternative embodiment, the shutdown alarm device further comprises a shielding switch and a first indicator light, the shielding switch comprises a second switch and a third switch; the second output end is connected to one end of the alarm in series with the second switch, one end of the third switch is connected to the second DC output end, and the other end of the third switch is connected to the first DC output end in series with the first indicator light.

[0011] In an alternative embodiment, the shutdown alarm device further comprises a second indicator light; one end of the second indicator light is connected to the first DC output end, and the other end of the second indicator light is connected to the second DC output end.

[0012] In the embodiment, by arranging the second indicator light, it can be determined intuitively and accurately whether the first power supply is abnormal through the on-off of the second indicator light.

[0013] In an alternative embodiment, the shutdown alarm device further comprises a circuit breaker; one end of the circuit breaker is connected to the first power supply, and the other end of the circuit breaker is connected to the first input end.

[0014] In an alternative embodiment, the photoelectric sensor is an NPN type opposite-shooting photoelectric sensor, a PNP type opposite-shooting photoelectric sensor, or a reflective photoelectric sensor.

[0015] In a second aspect, the present application provides a shutdown alarm method of a chemical mechanical polishing equipment, which is applied to the time delay module of the shutdown alarm device of the chemical mechanical polishing equipment in the first aspect or any of the alternative embodiments thereof, and the method comprises the following steps: receiving a state signal from a photoelectric sensor, wherein the state signal comprises a first electric signal and a second electric signal, the first electric signal is used to represent that a light shield blocks the light emitted by a light signal emitting end, and the second electric signal is used to represent that the light shield does not block the light emitted by the light signal emitting end; determining whether the chemical mechanical polishing equipment is shutdown based on the state signal, and triggering an alarm to issue an alarm when the chemical mechanical polishing equipment is shutdown.

[0016] In a third aspect, the present invention provides a chemical mechanical polishing device, which includes a moving device, a shading plate, and a shutdown alarm device of the chemical mechanical polishing device of the first aspect or any corresponding embodiment thereof; when the chemical mechanical polishing device is operating normally, the moving device drives the shading plate to perform periodic reciprocating motion along a preset direction, and the optical signal transmitting end and the optical signal receiving end of the shutdown alarm device are arranged within the moving range of the shading plate.

[0017] In an optional embodiment, the moving device is a wafer loader, a wafer exchange device, a wafer drying device or a polishing plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in related technologies, the following briefly introduces the drawings required for use in the specific embodiments or related technical descriptions. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 2 is a schematic structural diagram of a shutdown alarm device for chemical mechanical polishing equipment according to an embodiment of the present invention;

[0020] Figure 2 2 is a schematic structural diagram of another shutdown alarm device for chemical mechanical polishing equipment according to an embodiment of the present invention;

[0021] Figure 3 2 is a schematic structural diagram of a shutdown alarm device for chemical mechanical polishing equipment according to an embodiment of the present invention;

[0022] Figure 4 2 is a schematic structural diagram of a shutdown alarm device for chemical mechanical polishing equipment according to another embodiment of the present invention;

[0023] Figure 5 The figure is a flow chart of a shutdown alarm method for chemical mechanical polishing equipment according to an embodiment of the present invention.

[0024] Figure numerals: 110, AC-DC converter; 120, photoelectric sensor; 121, second input terminal; 122, third input terminal; 123, first output terminal; 124, optical signal transmitting terminal; 125, optical signal receiving terminal; 130, delay module; 131, fourth input terminal; 132, fifth input terminal; 133, second output terminal; 134, first switch; 140, alarm; 150, shielding switch; 151, second switch; 152, third switch; 160, first indicator light; 170, second indicator light; 180, circuit breaker; 200, first power supply; 300, mobile device; 400, light shielding sheet. DETAILED DESCRIPTION

[0025] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. According to the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of the present invention.

[0026] Chemical mechanical polishing, also known as chemical mechanical planarization (CMP), is a technology that combines chemical action and mechanical grinding to planarize substrate materials such as silicon wafers being processed. It can achieve high-precision surface polishing, address the shortcomings of pure chemical or pure mechanical polishing, and achieve a global planarization effect. Chemical mechanical polishing is widely used in fields such as semiconductor device manufacturing.

[0027] At present, the shutdown detection of chemical mechanical polishing equipment usually relies on software systems and manual monitoring, lacks a stable backup alarm system and has low efficiency. Once the chemical mechanical polishing equipment loses power as a whole or the software system crashes, there is a risk that the alarm will not be able to promptly alert the staff of the chemical mechanical polishing equipment shutdown.

[0028] In view of this, the present invention provides a shutdown alarm device, method and polishing equipment for chemical mechanical polishing equipment. Through the cooperation of the photoelectric sensor and the delay module, the automatic alarm function of the chemical mechanical polishing equipment being shut down for a long time can be realized. Moreover, since the power supply of the shutdown alarm device is independent, it is not limited by the failure of the chemical mechanical polishing equipment (such as overall power failure, etc.), ensuring that the chemical mechanical polishing equipment can be handled in time when it is shut down, thereby reducing production losses.

[0029] The shutdown alarm device for chemical mechanical polishing equipment provided by the present invention is described in detail below with reference to the accompanying drawings.

[0030] like Figure 1As shown, the shutdown alarm device of the chemical mechanical polishing equipment includes an AC-DC converter 110 , a photoelectric sensor 120 , a delay module 130 and an alarm 140 .

[0031] The AC / DC converter 110 includes a first input terminal AC, a first DC output terminal DC-, and a second DC output terminal DC+. The first input terminal AC is connected to the first power supply 200. The AC / DC converter 110 is used to convert the AC power from the first power supply 200 into DC power. The first input terminal AC is the AC terminal of the AC / DC converter 110 and includes a phase line (L), a neutral line (N), and a ground line (PE). The first DC output terminal DC- and the second DC output terminal DC+ are the DC terminals of the AC / DC converter 110. The first power supply 200 can be an AC power source powered by the power grid or a self-contained power source (such as a generator). The voltage at the DC terminal can be determined by the designer based on the requirements of the photoelectric sensor 120, the delay module 130, and the alarm 140. For example, the voltage at the DC terminal can be 24V.

[0032] The photoelectric sensor 120 includes a second input terminal 121, a third input terminal 122, a first output terminal 123, an optical signal transmitting terminal 124 and an optical signal receiving terminal 125. The second input terminal 121 is connected to the first DC output terminal DC-, and the third input terminal 122 is connected to the second DC output terminal DC+.

[0033] Specifically, if Figure 1 As shown, the chemical mechanical polishing equipment also includes a moving device 300 and a shading plate 400 arranged on the moving device 300. When the chemical mechanical polishing equipment is working normally, the moving device 300 drives the shading plate 400 to periodically reciprocate along a preset direction. The preset direction can be adjusted by the designer based on actual needs.

[0034] It should be understood that chemical mechanical polishing equipment typically consists of two parts: polishing and cleaning. Each part is divided into multiple modules. During the chemical mechanical polishing process, wafers are moved between these different modules. The moving device 300 is a component that reciprocates within a certain range. For example, the moving device 300 can be a wafer loader, which is used to move wafers between different carriers. The wafer loader's lifting and lowering motion is driven by a pneumatic cylinder.

[0035] The optical signal transmitting end 124 is used to transmit light to the optical signal receiving end 125, and the optical signal receiving end 125 is used to receive light from the optical signal transmitting end 124. The optical signal transmitting end 124 and the optical signal receiving end 125 are arranged within the moving range of the light shielding plate 400. When the light shielding plate 400 moves to the optical signal transmitting end 124, it will block the light emitted by the optical signal transmitting end 124.

[0036] The delay module 130 includes a fourth input terminal 131, a fifth input terminal 132 and a second output terminal 133. The fourth input terminal 131 is connected to the second DC output terminal DC+, the fifth input terminal 132 is connected to the first output terminal 123, the second output terminal 133 is connected to one end of the alarm 140, and the other end of the alarm 140 is connected to the first DC output terminal DC-.

[0037] When the shading plate 400 blocks the light emitted from the optical signal transmitting end, the delay module 130 is used to cut off the connection between the fourth input end 131 and the second output end 133. When the shading plate 400 no longer blocks the light emitted from the optical signal transmitting end, the delay module 130 is used to turn on the connection between the fourth input end 131 and the second output end 133 after a preset time period to trigger the alarm 140 to sound an alarm.

[0038] The preset time length is greater than the time length when the shading plate 400 passes through the optical signal transmitting end 124 twice. For example, if the time length when the shading plate 400 passes through the optical signal transmitting end 124 twice is 15 seconds, the preset time length may be 20 seconds or 25 seconds.

[0039] Specifically, when the mobile device 300 is working normally, the shading plate 400 moves back and forth periodically along a preset direction. When the shading plate 400 moves to the optical signal transmitting end 124, it blocks the light emitted by the optical signal transmitting end 124, causing the optical signal receiving end 125 to fail to receive light, triggering the first output end 123 to output a first electrical signal (such as a low-level signal 0V). After the delay module 130 receives the first electrical signal, it cuts off the connection between the fourth input end 131 and the second output end 133. At this time, one end of the alarm 140 is in a disconnected state from the second DC output end DC+, and the alarm 140 is not powered and does not issue an alarm.

[0040] When the light shielding plate 400 moves out of the optical signal transmitting end 124, it no longer blocks the light emitted by the optical signal transmitting end 124, and the optical signal receiving end 125 can receive the light, triggering the first output end 123 to output a second electrical signal (such as a high-level signal). After the delay module 130 receives the second electrical signal, it starts timing and turns on the connection between the fourth input end 131 and the second output end 133 after a preset time.

[0041] During the timing process, if the mobile device 300 is operating normally, the light shielding plate 400 will move again to the optical signal transmitting end 124 if the timing does not reach the preset time, triggering the first output end 123 to output the first electrical signal, thereby causing the delay module 130 to once again disconnect the connection between the fourth input end 131 and the second output end 133, and the alarm 140 will not sound an alarm. It should be noted that when the chemical mechanical polishing equipment is operating normally, the above process is repeated continuously, and the alarm 140 will not sound an alarm.

[0042] If the mobile device 300 abnormally stops, the light shield 400 will not move to the light signal emitting end 124 again, and the timing time continuously accumulates, when the timing reaches the preset time length, the connection between the fourth input end 131 and the second output end 133 is turned on, at this time, one end of the alarm 140 and the second DC output end DC+ are in a conductive state, the alarm 140 is powered to issue an alarm.

[0043] In the embodiment, through the cooperation between the delay module, the photoelectric sensor and the alarm, when the shutdown time of the chemical mechanical polishing equipment reaches the set value, the alarm is automatically triggered, the alarm time can be flexibly adjusted, not only the false alarm is avoided, but also the working state of the chemical mechanical polishing equipment can be monitored in real time, and when the working state of the chemical mechanical polishing equipment is abnormal, the response is fast, so that the staff can timely find the abnormal situation of the chemical mechanical polishing equipment. Moreover, the first power supply of the delay module, the photoelectric sensor and the alarm is independent of the chemical mechanical polishing equipment, so that the situation that the alarm is not timely after the whole chemical mechanical polishing equipment is powered off is avoided, and the timeliness and accuracy of the alarm in the case of accidental shutdown are improved. In addition, the shutdown alarm device is assembled in an electrical box, which is flexible to install and small in occupied area, and can adapt to different sites.

[0044] The type of the alarm 140 is not limited in the embodiment, as long as the staff can be timely reminded of the shutdown of the chemical mechanical polishing equipment, for example, the alarm 140 can be a sound alarm or a sound and light alarm.

[0045] Specifically, the sound alarm delivers the alarm through emitting specific sound (such as bee sound, siren, voice prompt, etc.). The sound and light alarm delivers the alarm through sound and light (light flickering frequency), and indicates the abnormality of the chemical mechanical polishing equipment.

[0046] For example, the delay module 130 can be a delay relay or a programmable logic controller (PLC).

[0047] The delay relay is an electrical control element capable of delaying a certain time before outputting a signal after triggering an input signal, which delays a certain time before outputting a signal after receiving an input signal through an internal timing circuit or mechanical device, and is usually divided into power-on delay, power-off delay, interval delay and repetition delay. The power-off delay is that the auxiliary contact is restored to the initial state after a certain time delay after the relay is powered off.

[0048] The programmable logic controller is a digital operation electronic system specially designed for industrial environment, which stores operation instructions such as logic operation, sequence control, timing, counting and arithmetic operation through programmable memory, and controls various types of mechanical equipment or production process through digital or analog input / output interface.

[0049] When the delay module 130 is a delay relay, as shown in FIG. Figure 2 As shown, the delay module 130 further includes a first switch 134 located between the fourth input terminal 131 and the second output terminal 133 . The first switch 134 includes a normally closed contact 15 - 16 and a normally open contact 15 - 18 .

[0050] Specifically, when the light shielding sheet 400 blocks the light emitted from the optical signal transmitting end 124, the second output end 133 outputs a first electrical signal, which causes the time delay relay to be energized and closed. Figure 3 As shown, the normally closed contacts 15 - 16 are disconnected, the connection between the fourth input terminal 131 and the second output terminal 133 is in a cut-off state, and the alarm 140 is not powered and does not sound an alarm.

[0051] When the chemical mechanical polishing equipment is shut down, the moving device 300 no longer drives the shading plate 400 to perform periodic reciprocating motion along the preset direction, and the shading plate 400 no longer blocks the light emitted by the optical signal transmitting end 124. The second output end 133 outputs a second electrical signal, and the second electrical signal triggers the delayed release timing function of the delay relay. When the timing time reaches the preset time, the delay relay is instantly tripped, closing the normally closed contacts 15-16, as shown in FIG. Figure 2 In the state shown, direct current is supplied to the alarm 140 to trigger the alarm action.

[0052] In this embodiment, if the body or cable of the photoelectric sensor 120 is damaged during the operation of the chemical mechanical polishing equipment, the delay relay will also lose power. When the continuous power outage time accumulates to a preset time, the alarm will be triggered to sound an alarm, so that the staff can promptly discover the failure of the shutdown alarm device.

[0053] Exemplarily, the time delay relay may be a pulse-triggered action and timed release type time relay.

[0054] When the delay module 130 is a programmable logic controller, the programmable logic controller can also be provided with a switch, and control the on and off of the switch through a timer delay to implement the above-mentioned logic of triggering an alarm when the chemical mechanical polishing equipment stops.

[0055] Optionally, the programmable logic controller can start timing after receiving the first electrical signal, and trigger the connection between the fourth input terminal and the second output terminal after the timing time reaches a preset time, thereby realizing the above-mentioned chemical mechanical polishing equipment shutdown triggering alarm logic.

[0056] In this embodiment, the programmable logic controller is used as a delay module, and various modes such as power-on delay, power-off delay, pulse trigger timing release, etc. can be realized through programming. The preset duration can also be flexibly adjusted through the program without manually adjusting the potentiometer or replacing the relay. It can also be linked with other control logic (such as sensor signals, counters, communication protocols) to realize complex timing control (such as multi-stage delay, conditional trigger delay).

[0057] In some embodiments, as Figure 4 As shown, the shutdown alarm device further includes a shielding switch 150 and a first indicator light 160 . The shielding switch 150 includes a second switch 151 and a third switch 152 .

[0058] Specifically, the second output terminal 133 is connected in series with the second switch 151 and then connected to one end of the alarm 140, one end of the third switch 152 is connected to the second DC output terminal DC+, and the other end of the third switch 152 is connected in series with the first indicator light 160 and then connected to the first DC output terminal DC-.

[0059] Second switch 151 represents the operating position. When second switch 151 is on and third switch 152 is off, the shutdown alarm device can detect whether the chemical mechanical polishing equipment has shut down. In this case, first indicator light 160 is off. Third switch 152 represents the shielding position. When third switch 152 is on and the second switch is off, the alarm function is shielded. That is, alarm 140 does not sound an alarm regardless of whether the chemical mechanical polishing equipment is shut down. In this case, first indicator light 160 is on. The on / off status of the first indicator light allows personnel to determine whether the shutdown alarm device has activated the shutdown alarm function.

[0060] It should be noted that the switching states of the second switch 151 and the third switch 153 can be manually adjusted by the staff, and the switching states of the second switch 151 and the third switch 153 are opposite. For example, when the switching state of the second switch 151 is on, the switching state of the third switch 153 is off; when the switching state of the second switch 151 is off, the switching state of the third switch 153 is on.

[0061] In this embodiment, by providing the shielding switch 150 and the first indicator light 160 , the time at which the shutdown alarm device performs the shutdown alarm function can be flexibly adjusted.

[0062] For example, Figure 4 As shown, the shutdown alarm device further includes a second indicator light 170 .

[0063] Specifically, one end of the second indicator light 170 is connected to the first direct current output terminal DC−, and the other end of the second indicator light 170 is connected to the second direct current output terminal DC+.

[0064] In this embodiment, by providing the second indicator light 170 , it is possible to intuitively and accurately determine whether the first power supply is abnormal by turning on and off the second indicator light 170 .

[0065] Furthermore, if Figure 4 As shown, the shutdown alarm device further includes a circuit breaker 180 .

[0066] Specifically, one end of the circuit breaker 180 is connected to the first power supply 200 , and the other end of the circuit breaker 180 is connected to the first input end AC.

[0067] A circuit breaker is a switching device that can connect, carry and disconnect current in normal circuits and fault circuits. It has both switching and protection functions. It can control the circuit on and off manually or automatically, and quickly cut off the connection between the first power supply and the shutdown alarm device in the event of faults such as overload, short circuit, and leakage.

[0068] Exemplarily, the photoelectric sensor may be an NPN through-beam photoelectric sensor, a PNP through-beam photoelectric sensor, or a reflective photoelectric sensor.

[0069] Specifically, both the NPN-type through-beam photoelectric sensor and the PNP-type through-beam photoelectric sensor can be installed separately by an infrared light-emitting diode (light signal emitting end) and a phototransistor (light signal receiving end) to form a straight light path. The infrared light-emitting diode continuously emits infrared light. When the phototransistor receives infrared light, the internal circuit is in the initial state (NPN-type outputs high level, PNP-type outputs low level). When the light shield blocks the light path, the phototransistor cannot receive the light signal, the internal circuit flips, and the output of the NPN-type changes from high level to low level (0V, low level is valid), and the output of the PNP-type changes from low level to high level (power supply voltage, high level is valid). The light signal emitting end and the light signal receiving end of the reflective photoelectric sensor are integrated in the same housing. It works by detecting the reflected signal of light from the object and is divided into diffuse reflection type and mirror reflection type.

[0070] Below is Figure 4 Taking for example, the shutdown alarm process of the shutdown alarm device for the chemical mechanical polishing equipment provided by the present invention is described in detail.

[0071] Exemplarily, the moving device is a wafer loader. When the chemical mechanical polishing equipment (hereinafter referred to as the machine) stops, the wafer loader will stop moving and stop at a high position, a middle position, or a low position, wherein the high position refers to the farthest position that the wafer loader can move, the low position refers to the closest position that the wafer loader can move, and the middle position can refer to the position where the midpoint between the high position and the low position is located. A square baffle is fixed on the wafer loader as a light shielding plate, and the photoelectric sensor 120 is installed at a position within the cylinder stroke range on the base where the wafer loader is located, and the position of the photoelectric sensor 120 cannot coincide with the high position, the middle position, and the low position. In this embodiment, the photoelectric sensor is an NPN type through-beam photoelectric sensor.

[0072] Specifically, in the preparation stage, single-phase three-wire low-voltage utility power is introduced to the AC end of the AC-DC converter 110 through a socket.

[0073] During the initial power-up phase, circuit breaker 180 is closed to supply power to the shutdown alarm device. AC / DC converter 110 converts AC power into DC power, which then powers the photoelectric sensor, time delay relay, first indicator light, second indicator light, and alarm. The time delay relay's release delay (i.e., a preset duration) is set. When the cumulative monitored downtime reaches the preset duration, the alarm is triggered. The normally closed contact of the time delay relay is in the on state, the manually operated muting switch is in the muting position, the first indicator light illuminates, and the alarm function is muted.

[0074] After the machine is started, the shielding switch is operated to the working position, and the monitoring function of the shutdown alarm device is enabled. When the wafer loader moves and the light shield passes the position of the photoelectric sensor, the light output by the light signal transmitting end is blocked, and the first output end outputs a first level signal (such as 0V), causing the delay relay to be energized and attracted, disconnecting the normally closed contacts 15-16; the wafer loader continues to move, and the light shield is instantly separated from the position of the photoelectric sensor. The light signal receiving end can receive light, and the first output end no longer outputs 0V, causing the delay relay to lose power, thereby triggering the delayed release function of the delay relay and starting timing;

[0075] During normal operation, the wafer loader periodically reciprocates. If the timing has not reached the preset duration, the light shield will again block the light signal transmitter, triggering the photoelectric sensor to output the first electrical signal. Once the time delay relay is energized again, the delayed release function ceases, interrupting timing. Normally closed contacts 15-16 remain open. The wafer loader continues to move within its travel range, disengaging the light shield from the photoelectric sensor, re-triggering the delayed release timing function of the time delay relay and restarting timing. This repeats the above steps continuously during normal operation, with the time delay relay's normally closed contacts 15-16 remaining open, preventing the alarm from activating.

[0076] If the machine shuts down unexpectedly, due to the characteristics of the wafer loader's cylinder, the shade can only stop in one of the high, middle, or low positions. The shade no longer blocks light from the photoelectric sensor, and the timer relay de-energizes and counts until it reaches the preset duration. The timer relay trips instantly, closing normally closed contacts 15-16. At this point, the second DC output terminal sends power to the alarm, triggering it. If the photoelectric sensor or cable is damaged during machine operation, the timer relay will also de-energize. When the power-off duration reaches the set value, the alarm will be triggered.

[0077] The first power supply provided in this embodiment is independent of the machine's shutdown alarm device. By integrating components such as sensors and time relays, this not only enables automatic alarms for prolonged machine shutdowns, reducing reliance on manual monitoring, but also avoids the potential for alarms to be lost due to a complete power outage, improving the timeliness and accuracy of alarms in unexpected shutdowns at a low cost. The shutdown alarm device utilizes components from an electrical box assembly system, offering flexible installation and a small footprint. It can sound an alarm when a sensor or cable is damaged, ensuring the reliability of the shutdown alarm device, effectively improving the timeliness, safety, and efficiency of production, and reducing the risk of equipment failure and labor costs.

[0078] The present invention also provides a shutdown alarm method for chemical mechanical polishing equipment, which can be used for the delay module (such as PLC) of the shutdown alarm device of the above-mentioned chemical mechanical polishing equipment. Figure 5 FIG. 1 is a flow chart of a shutdown alarm method for chemical mechanical polishing equipment according to an embodiment of the present invention. Figure 5 As shown, the method includes the following steps:

[0079] Step S501: receiving a status signal from a photoelectric sensor.

[0080] The state signal includes a first electrical signal and a second electrical signal. The first electrical signal is used to indicate that the shading plate blocks the light emitted from the optical signal transmitting end, and the second electrical signal is used to indicate that the shading plate does not block the light emitted from the optical signal transmitting end.

[0081] Step S502 : determining whether the chemical mechanical polishing equipment is shut down based on the status signal, and triggering an alarm to sound an alarm when the chemical mechanical polishing equipment is shut down.

[0082] Specifically, after receiving a first electrical signal once, if the first electrical signal is not received again after a preset time period, it is determined that the chemical mechanical polishing equipment is shut down, and the connection between the fourth input terminal and the second output terminal is turned on, triggering the alarm; if the first electrical signal is received within the preset time period, it is determined that the chemical mechanical polishing equipment is working normally and no alarm is triggered.

[0083] The method for stopping alarm of the chemical mechanical polishing equipment provided by the embodiment is based on the state signal to determine whether the chemical mechanical polishing equipment is stopped after receiving the state signal from the photoelectric sensor, and triggers the alarm when the chemical mechanical polishing equipment is stopped. In the embodiment, the automatic alarm of the long-time stop of the chemical mechanical polishing equipment is realized through the state signal, the dependence on manual monitoring is reduced, the timeliness, safety and efficiency of production are effectively improved, the risk of equipment failure and the cost of manual work are reduced, and the power supply of the photoelectric sensor and the delay module can be independent of the chemical mechanical polishing equipment, avoiding the defect that the alarm cannot be triggered when the chemical mechanical polishing equipment is powered off as a whole.

[0084] The application further provides a chemical mechanical polishing equipment, which comprises a moving device 300, a light shield 400 and the stopping alarm device of the chemical mechanical polishing equipment provided by any one of the above embodiments.

[0085] When the chemical mechanical polishing equipment is working normally, the moving device drives the light shield to move back and forth along the preset direction periodically, and the light signal transmitting end and the light signal receiving end of the stopping alarm device are arranged in the moving range of the light shield.

[0086] For example, the moving device 300 can be a wafer loader, a wafer exchange device, a wafer spin-drying device or a polishing disc.

[0087] The wafer exchange device is used to realize the exchange and transmission of wafers between different processes. In a semiconductor manufacturing production line, the wafer needs to go through a plurality of different processing processes, and the wafer exchange device can accurately transfer the wafer from the processing position of one process to the processing position of the next process according to the requirements of the production process, so as to ensure the efficient flow of the wafer.

[0088] The wafer spin-drying device is used to dry the wafer after the wet process such as cleaning. The working principle is mainly to use the centrifugal force generated by high-speed rotation to remove the chemical reagents, moisture and particulate dust remaining on the surface of the wafer, and usually combine clean nitrogen to carry away the remaining particulate dust, so that the surface of the wafer reaches a clean and dry state.

[0089] In the rotary chemical mechanical polishing equipment, the polishing head reciprocates along the polishing disc in the radial direction, and the polishing disc usually synchronously moves back and forth periodically, and the relative movement is generated by the cooperation of the two, so that the material on the surface of the wafer is uniformly removed, and global planarization is realized.

[0090] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships according to the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the present invention.

[0091] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0092] In the description of this specification, the description with reference to the terms "this embodiment", "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0093] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0094] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations shall all fall within the scope defined by the present invention.

Claims

1. A shutdown alarm device for chemical mechanical polishing equipment, characterized in that: The chemical mechanical polishing device includes a moving device and a light shielding plate. When the chemical mechanical polishing device is operating normally, the moving device drives the light shielding plate to periodically reciprocate along a preset direction. The shutdown alarm device includes an AC-DC converter, a photoelectric sensor, a delay module, and an alarm. The AC-DC converter includes a first input terminal, a first DC output terminal, and a second DC output terminal. The first input terminal is connected to a first power supply. The AC-DC converter is used to convert the AC power of the first power supply into DC power. The first power supply is different from the second power supply of the mobile device. The photoelectric sensor includes a second input terminal, a third input terminal, a first output terminal, a light signal transmitting terminal, and a light signal receiving terminal, wherein the second input terminal is connected to the first DC power output terminal, the third input terminal is connected to the second DC power output terminal, and the light signal transmitting terminal and the light signal receiving terminal are arranged within the moving range of the light shielding plate; The delay module includes a fourth input terminal, a fifth input terminal, and a second output terminal, wherein the fourth input terminal is connected to the second DC output terminal, the fifth input terminal is connected to the first output terminal, the second output terminal is connected to one terminal of the alarm, and the other terminal of the alarm is connected to the first DC output terminal; When the shading plate blocks the light emitted from the optical signal emitting end, the delay module is used to cut off the connection between the fourth input end and the second output end. When the shading plate no longer blocks the light emitted from the optical signal emitting end, the delay module is used to turn on the connection between the fourth input end and the second output end after a preset time period to trigger the alarm to sound an alarm. The preset time period is greater than the time it takes for the shading plate to pass through the optical signal emitting end twice.

2. The shutdown alarm device according to claim 1, characterized in that: The delay module is a delay relay or a programmable logic controller.

3. The shutdown alarm device according to claim 2, characterized in that: When the delay module is a delay relay, the delay module further includes a first switch located between the fourth input terminal and the second output terminal, and the first switch includes a normally closed contact; When the light shielding sheet blocks the light emitted from the optical signal emitting end, the second output end outputs a first electrical signal, and the first electrical signal triggers the normally closed contact to disconnect, thereby cutting off the connection between the fourth input end and the second output end.

4. The shutdown alarm device according to any one of claims 1 to 3, characterized in that: The shutdown alarm device further includes a shielding switch and a first indicator light, wherein the shielding switch includes a second switch and a third switch; The second output end is connected in series with the second switch and then connected to one end of the alarm, one end of the third switch is connected to the second DC output end, and the other end of the third switch is connected in series with the first indicator light and then connected to the first DC output end.

5. The shutdown alarm device according to any one of claims 1 to 3, characterized in that: The shutdown alarm device also includes a second indicator light; One end of the second indicator light is connected to the first DC output end, and the other end of the second indicator light is connected to the second DC output end.

6. The shutdown alarm device according to any one of claims 1 to 3, characterized in that: The shutdown alarm device also includes a circuit breaker; One end of the circuit breaker is connected to the first power supply, and the other end of the circuit breaker is connected to the first input end.

7. The shutdown alarm device according to any one of claims 1 to 3, characterized in that: The photoelectric sensor is an NPN-type through-beam photoelectric sensor, a PNP-type through-beam photoelectric sensor or a reflective photoelectric sensor.

8. A shutdown alarm method for chemical mechanical polishing equipment, characterized in that: A delay module for a shutdown alarm device of a chemical mechanical polishing device according to any one of claims 1 to 7, the method comprising: Receive a status signal from the photoelectric sensor, wherein the status signal includes a first electrical signal and a second electrical signal, the first electrical signal being used to indicate that the light shielding plate blocks the light emitted from the light signal emitting end, and the second electrical signal being used to indicate that the light shielding plate does not block the light emitted from the light signal emitting end; It is determined whether the chemical mechanical polishing equipment is shut down based on the status signal, and when the chemical mechanical polishing equipment is shut down, an alarm is triggered to sound an alarm.

9. A chemical mechanical polishing device, characterized in that: A chemical mechanical polishing device comprises a moving device, a light shielding sheet, and a shutdown alarm device for the chemical mechanical polishing device according to any one of claims 1 to 7; When the chemical mechanical polishing equipment is working normally, the moving device drives the shading plate to periodically reciprocate along a preset direction, and the optical signal transmitting end and the optical signal receiving end of the shutdown alarm device are arranged within the moving range of the shading plate.

10. The chemical mechanical polishing equipment according to claim 9, characterized in that: The moving device is a wafer loader, a wafer exchange device, a wafer drying device or a polishing plate.

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