Liftable multi-shaft concentric driving device and lifting and range changing method thereof

Abstract

The application provides a liftable multi-shaft concentric driving device and a lifting and range changing method thereof. The device comprises a rack, a direct driving unit and a lifting assembly. The direct driving unit comprises a plurality of stacked direct driving motors and a plurality of driving shafts. The driving shafts are concentrically arranged and connected with the direct driving motors. The driving shaft arranged at the shaft center is provided with a receiving cavity. The lifting assembly comprises a lead screw, a clearance shaft, a bearing seat and a driving unit. The bottom of the rack is provided with a base. The driving end of the lead screw is connected with the base through the bearing seat and is drivingly connected with the driving unit arranged on the rack. The tail swing of the clearance shaft is connected with the bottom direct driving motor and the shaft body of the clearance shaft extends into the receiving cavity of the driving shaft at the shaft center. The clearance shaft is provided with a stroke cavity to receive the lead screw and support the lead screw nut. The direct driving unit is lifted. The lifting stroke is supported, the device is convenient to disassemble and the compatibility is improved.

Description

Technical Field

[0001] This invention relates to the field of wafer transfer equipment technology, and in particular to a multi-axis concentric drive device for driving a wafer transfer robot with lifting and lowering functions, and a lifting and lowering stroke switching method thereof. Background Technology

[0002] In semiconductor wafer manufacturing, wafer handling robots are core automated equipment that connects various processes and ensures smooth production. Due to the delicate surface, susceptibility to contamination, and physical fragility of wafers, and the fact that the manufacturing process involves hundreds of steps and dozens of pieces of equipment, manual handling is completely insufficient. Therefore, the role of handling robots is not only to "move wafers," but also to fulfill the critical mission of ensuring production efficiency, yield, and automation.

[0003] Currently, in the design of existing wafer handling robots, due to the need to support multi-degree-of-freedom motion, the main drive unit structure must not only be able to drive multiple coaxial drive shafts to rotate individually, but also have overall lifting capabilities. This makes the overall structural design of the main drive unit quite complex, and the possibility of later modification is usually not considered. When facing scenarios where it is necessary to increase the lifting stroke later, due to structural limitations, modification is basically impossible, the overall disassembly and modification are difficult, and the design compatibility is poor. Summary of the Invention

[0004] Therefore, the main objective of this invention is to provide a lifting multi-axis concentric drive device and its lifting stroke switching method, so as to overcome the limitation that the lifting stroke of traditional devices cannot be modified, and to simplify the loading and unloading operation during modification.

[0005] To achieve the above objectives, according to one aspect of the present invention, a liftable multi-axis concentric drive device is provided, comprising: a frame, a direct drive unit, and a lifting assembly, wherein the direct drive unit includes: a plurality of stacked direct drive motors and a plurality of drive shafts, wherein each drive shaft is concentrically arranged and connected to each direct drive motor, and a receiving cavity is provided within the drive shaft located at the shaft center; the lifting assembly includes: a lead screw, a clearance shaft, a bearing seat, and a drive unit, a base is provided at the bottom of the frame, and the drive unit is connected to the frame. The base is provided with a first quick-release port. The lead screw drive end is connected to the base via a bearing seat and is located at the first quick-release port, where it is connected to the drive unit. The tail swing of the clearance shaft is connected to the bottom direct drive motor, and the shaft extends into the receiving cavity of the drive shaft at the shaft center. The tail swing of the clearance shaft is provided with a second quick-release port. The clearance shaft is provided with a stroke cavity that communicates with the second quick-release port to receive the lead screw and be supported by the lead screw nut, thereby lifting the direct drive unit up and down. The first and second quick-release ports are arranged coaxially, and their openings are larger than the lead screw nut.

[0006] In a possible preferred embodiment, the liftable multi-axis concentric drive device further includes: a guide unit, wherein the guide unit is fixed on the frame, the direct drive unit is connected to the guide unit, supported by the lifting assembly, and guided to rise and fall with the guide unit.

[0007] In a possible preferred embodiment, the drive unit includes: a driver, a transmission wheel, a drive wheel, and a transmission belt, wherein the driver is fixed on the frame, the drive wheel is connected to the driver, the transmission wheel is connected to the lead screw, and the transmission belt is sleeved on the drive wheel and the transmission wheel to form a belt drive.

[0008] In a possible preferred embodiment, the lifting assembly further includes a sealing plate, wherein the bottom of the bottom direct drive motor is provided with a first sealing groove, and the tail swing of the clearance shaft is provided with a second sealing groove. The first and second sealing grooves are embedded with sealing gaskets, and the clearance shaft is connected to the bottom direct drive motor via the sealing plate to seal the first and second sealing grooves.

[0009] In a possible preferred embodiment, the bearing housing is connected to the bottom surface of the base to be located at the first quick-release port.

[0010] In a possible preferred embodiment, the liftable multi-axis concentric drive device further includes: a bellows cover, wherein the top of the frame is provided with a shaft platform, the shaft platform is provided with a shaft hole, the drive shaft of the direct drive unit is adapted to the shaft hole, the top of the bellows cover is connected to the shaft platform, and the bottom of the bellows cover is connected to the direct drive motor on the top layer of the direct drive unit, so as to enclose the drive shaft inside the frame.

[0011] In a possible preferred embodiment, the liftable multi-axis concentric drive device further includes a guide locking unit comprising a linear module, a locking block, and a locking screw, wherein the linear module's slide rail is fixed on the frame, the slider is connected to the direct drive unit, the locking block is connected to the slider, and the locking screw engages with the locking block to abut against the slide rail, thereby locking the slider's displacement.

[0012] To achieve the above objectives, according to another aspect of the present invention, a lifting stroke switching method for a lifting multi-axis concentric drive device as described in the corresponding example above is also provided, the steps of which include:

[0013] Stop the direct drive unit and drive unit, remove the bearing housing from the base, and separate the lead screw from the drive unit;

[0014] From the first and second quick-release ports, remove the lead screw from the clearance shaft, replace it with the target stroke lead screw, restore the bearing housing, and connect the target stroke lead screw to the drive unit.

[0015] To achieve the above objectives, according to another aspect of the present invention, a lifting stroke switching method for a lifting multi-axis concentric drive device as described in the corresponding example above is also provided, the steps of which include:

[0016] Stop the direct drive unit, control the lifting assembly to rise to the limit and then stop, and lock the current lifting position of the direct drive unit via the guide locking unit;

[0017] Remove the bearing housing from the base to separate the lead screw from the drive unit;

[0018] Remove the lead screw from the clearance shaft, take it out from the gap between the direct drive unit and the base, replace it with the target stroke lead screw, restore the bearing housing, connect the target stroke lead screw to the drive unit, and unlock the guide locking unit.

[0019] The lifting multi-axis concentric drive device and its lifting stroke switching method provided by this invention cleverly utilize the space within the drive shaft of the direct drive unit to house the clearance shaft with reserved stroke switching space, thereby forming a non-interfering concentric nested structure. This design provides room for modification to accommodate lead screws with different target strokes. For easy disassembly, a base structure with a first quick-release port is designed in the frame structure and coaxially arranged with the second quick-release port on the clearance shaft. Furthermore, the housing cavity within the clearance shaft and the lead screw form a support structure, with the lead screw mounted at the first quick-release port via a bearing seat. Therefore, during modification, only the bearing seat needs to be removed and the drive unit separated from the lead screw transmission end; the lead screw can then be easily removed and replaced from the clearance shaft through the first and second quick-release ports. This process greatly simplifies the loading and unloading operations during modification, breaking through the limitation of traditional devices being unable to modify the lifting stroke. This allows the lifting multi-axis concentric drive device of this invention to be compatible with multiple target lifting strokes according to different usage scenarios, thus improving the overall compatibility and convenience of modifying the lifting structure of such devices. Attached Figure Description

[0020] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0021] Figures 1 to 2 This is a partial structural schematic diagram of the lifting multi-axis concentric drive device of the present invention;

[0022] Figure 3 This is a half-sectional structural diagram of the lifting multi-axis concentric drive device of the present invention;

[0023] Figure 4 for Figure 3 A magnified schematic diagram of a portion of the structure of the A-ring;

[0024] Figures 5 to 6This is a schematic diagram of the structure of the lifting multi-axis concentric drive device of the present invention, which includes a guide locking unit;

[0025] Figure 7 This is a half-section structural diagram of the lifting multi-axis concentric drive device of the present invention when it is raised to its limit.

[0026] Explanation of reference numerals in the attached figures

[0027] Frame 1, direct drive unit 2, lifting assembly 3, linear module 4, bellows cover 5, sealing gasket 6, base 11, shaft platform 12, first direct drive motor 21, second direct drive motor 22, third direct drive motor 23, first drive shaft 24, second drive shaft 25, third drive shaft 26, lead screw 31, clearance shaft 32, bearing seat 33, drive unit 34, sealing plate 35, slider 41, slide rail 42, locking block 43, locking screw 44, storage cavity 241, first quick release port 111, second quick release port 321, stroke cavity 322, second sealing groove 323, driver 341, transmission wheel 342, drive wheel 343, transmission belt 344, first sealing groove 231. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0030] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0031] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. The terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0032] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0033] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "lay out," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances and in conjunction with existing technology. Furthermore, unless otherwise specified, the embodiments and features in the embodiments of this invention can be combined with each other. One or more of the components shown in the figures may be necessary or not, and the relative positional relationships between the components shown in the figures can be adjusted according to actual needs.

[0034] To overcome the limitation of traditional devices that cannot be modified in terms of lifting stroke, and to simplify loading and unloading operations during modification, such as Figures 1 to 7 As shown, the present invention provides a lifting multi-axis concentric drive device, an example of which includes: a frame 1, a direct drive unit 2, and a lifting assembly 3.

[0035] Among them, such as Figures 1 to 3 As shown, the direct drive unit 2 in this example includes: a plurality of stacked direct drive motors and a plurality of drive shafts, wherein, as... Figure 3As shown, in this example, the direct drive unit 2 has a three-layer structure, including: a first direct drive motor 21, a second direct drive motor 22, and a third direct drive motor 23. The direct drive motors in each layer are connected to each other via flanges, and the output ends of each layer are coaxially connected. There are three corresponding drive shafts, including: a first drive shaft 24, a second drive shaft 25, and a third drive shaft 26. These drive shafts are arranged concentrically and interlocked, and are sequentially connected to the output ends of the direct drive motors from the bottom layer to the top layer, forming a multi-axis concentric drive structure. Furthermore, as shown... Figure 3 As shown, the first drive shaft 24 located at the center of the direct drive unit 2 has a storage cavity 241 to provide a basis for the lifting assembly 3 to be compatible with different lifting strokes.

[0036] Among them, such as Figures 3 to 4 As shown, the lifting assembly 3 example includes: a lead screw 31, a clearance shaft 32, a bearing seat 33, and a drive unit 34. The frame 1 has a base 11 at its bottom, which is suspended to leave a transmission space at the bottom. The base 11 has a first quick-release port 111. The drive unit 34 is connected to the frame 1. The transmission end of the lead screw 31 is connected to the base 11 via the bearing seat 33 to be located at the first quick-release port 111 and to be connected to the drive unit 34 in a transmission manner. The tail of the freewheel 32 is connected to the third direct drive motor 23 at the bottom layer, and the shaft extends into the storage cavity 241 of the first drive shaft 24. The shaft of the freewheel 32 and the first drive shaft 24 are sleeved at intervals and do not interfere with each other. The tail of the freewheel 32 is provided with a second quick release port 321. The freewheel 32 is provided with a stroke cavity 322 that communicates with the second quick release port 321. The stroke cavity 322 can be determined according to the length of the lead screw 31 with the maximum modified stroke and the space of the storage cavity 241 of the first drive shaft 24. The stroke cavity 322 is stepped and is structurally used to store the lead screw 31 and be supported by the lead screw 31 nut to lift the direct drive unit 2 up and down.

[0037] Furthermore, to facilitate the disassembly and replacement of the lead screw 31, the first and second quick-release ports 111 and 321 are preferably coaxially arranged, and their openings are larger than the nut of the lead screw 31. With this configuration, during modification, it is only necessary to remove the bearing housing 33 and separate the drive unit 34 from the transmission end of the lead screw 31, and then the lead screw 31 can be easily pulled out from the clearance shaft 32 in one go through the first and second quick-release ports 111 and 321 for replacement. This structure can greatly simplify the loading and unloading operation during modification.

[0038] Furthermore, in order to stabilize the lifting process of the direct drive unit 2, in optional embodiments, such as Figure 1As shown, the liftable multi-axis concentric drive device further includes a guide unit. In this example, the guide unit is a linear module 4. The slide rails 42 of the linear module 4 are fixed on the frame 1, located on both sides of the direct drive unit 2, and parallel to the lifting direction. The direct drive unit 2 is connected to the slider 41 of the linear module 4, supported by the lifting assembly 3, and guided to rise and fall with the slide rails 42, thereby stabilizing the lifting process. This guide unit does not need to be disassembled during lifting stroke modification and does not affect the modification process.

[0039] Furthermore, such as Figures 1 to 3 As shown, the drive unit 34 in this example includes: a driver 341, a transmission wheel 342, a drive wheel 343, and a transmission belt 344. The driver 341 is fixed to the frame 1. The drive wheel 343 is connected to the driver 341. The transmission wheel 342 is connected to the lead screw 31. The transmission belt 344 is sleeved on the drive wheel 343 and the transmission wheel 342, forming a belt drive. With this belt drive structure, disassembly only requires loosening the transmission belt 344, allowing the lead screw 31 to be easily removed from the clearance shaft 32 for replacement via the first and second quick-release ports 111 and 321. Compared to traditional direct-drive motor structures, this offers greater ease of disassembly and improved component replaceability.

[0040] Furthermore, to facilitate disassembly during modifications to the lifting stroke, such as... Figures 3 to 4 As shown, in a preferred embodiment, the bearing seat 33 is preferably connected to the bottom surface of the base 11 and is set at the first quick-release port 111. With this setting, the bearing seat 33 will be disassembled from the bottom surface of the base 11, which is consistent with the outward pulling direction of the lead screw 31, making it easier to disassemble along one side and improving the convenience of loading and unloading.

[0041] Furthermore, in order to achieve dustproof or vacuum sealing, such as Figures 1 to 3 As shown, in an optional embodiment, the liftable multi-axis concentric drive device further includes: a bellows cover 5, wherein the top of the frame 1 is provided with a shaft platform 12, and the shaft platform 12 is provided with shaft holes. Each drive shaft of the direct drive unit 2 is adapted to the shaft holes and can extend and retract therefrom. The top end of the bellows cover 5 is connected to the shaft platform 12, and the bottom end is connected to the first direct drive motor 21 on the top layer of the direct drive unit 2, so as to enclose each drive shaft inside the frame 1. In this way, when the frame 1 is fitted with a shell to form a seal, it can effectively seal off the contaminants that enter the interior from the shaft holes, and ensure that the working debris and dust of the direct drive unit 2 and the lifting assembly 3 inside the frame 1 will not be released to contaminate the wafer or vacuum environment.

[0042] Furthermore, in order to improve the sealing between the direct drive unit 2 and the lifting assembly 3, such as... Figure 4As shown, in a preferred embodiment, the lifting assembly 3 further includes a sealing plate 35, wherein the bottom of the third direct drive motor 23 is provided with a first sealing groove 231, and the tail swing of the clearance shaft 32 is provided with a second sealing groove 323. Sealing gaskets 6 are embedded in the first and second sealing grooves 231 and 323. The clearance shaft 32 is connected to the third direct drive motor 23 via the sealing plate 35, and the first and second sealing grooves 231 and 323 are sealed by the sealing plate 35. This seals the connection gap between the clearance shaft 32 and the direct drive motor, improving the sealing performance.

[0043] On the other hand, corresponding to the above example, the present invention also provides a lifting stroke switching method for the lifting multi-axis concentric drive device as described above, the steps of which include:

[0044] Stop the direct drive unit 2 and drive unit 34, remove the bearing housing 33 from the base 11, and separate the lead screw 31 from the drive unit 34;

[0045] After removing the lead screw 31 from the clearance shaft 32 through the first and second quick-release ports 111 and 321, replacing it with the target stroke lead screw 31, restore the bearing housing 33, and connect the target stroke lead screw 31 to the drive unit 34.

[0046] Furthermore, to support vertical replacement of the lead screw 31, such as Figures 5 to 7 As shown, in another optional embodiment, the liftable multi-axis concentric drive device further includes a guide locking unit, which includes a linear module 4, a locking block 43, and a locking screw 44. The slide rail 42 of the linear module 4 is fixed on the frame 1, located on both sides of the direct drive unit 2, parallel to the lifting direction, and the slider 41 is connected to the direct drive unit 2. The locking block 43 is connected to the slider 41, and the locking screw 44 is engaged with the locking block 43 to abut against the slide rail 42, thereby locking the slider 41 from displacement.

[0047] With this setting, such as Figure 7 As shown, when replacing the lead screw 31, the control lifting assembly 3 stops after rising to its limit. The current lifting position of the direct drive unit 2 is locked by the guide locking unit. The bearing seat 33 is removed from the base 11, and the lead screw 31 is separated from the drive unit 34. A gap space is formed between the direct drive unit 2 and the base 11, allowing the lead screw 31 to be taken out directly from there. This makes it convenient to replace the lead screw 31 when the equipment is upright, without having to lay it down and pull it out from the bottom of the base 11.

[0048] On the other hand, corresponding to the above example of supporting vertical replacement of lead screw 31, the present invention also provides a lifting stroke switching method for a liftable multi-axis concentric drive device, the steps of which include:

[0049] Stop the direct drive unit 2, control the lifting assembly 3 to rise to the limit and then stop, and lock the current lifting position of the direct drive unit 2 through the guide locking unit; remove the bearing seat 33 from the base 11 and separate the lead screw 31 from the drive unit 34;

[0050] Remove the lead screw 31 from the clearance shaft 32, take it out from the gap between the direct drive unit 2 and the base 11, replace it with the target stroke lead screw 31, restore the bearing housing 33, connect the target stroke lead screw 31 to the drive unit 34, and unlock the guide locking unit.

[0051] In summary, the lifting multi-axis concentric drive device and its lifting stroke switching method provided by this invention can cleverly utilize the space within the drive shaft of the direct drive unit 2 to accommodate the clearance shaft 32 with reserved stroke switching space, thereby forming a non-interfering concentric nested structure. This design provides room for modification to accommodate lead screws 31 with different target strokes. Furthermore, for easy disassembly, this invention incorporates a base 11 structure with a first quick-release port 111 in the frame 1 structure, and arranges it coaxially with the second quick-release port 321 on the clearance shaft 32. In addition, the receiving cavity 241 within the clearance shaft 32 and the lead screw 31 form a support structure, with the lead screw 31 mounted at the first quick-release port 111 via a bearing seat 33. Therefore, during modification, only the bearing seat 33 needs to be disassembled and the drive unit 34 separated from the transmission end of the lead screw 31, allowing the lead screw 31 to be easily removed and replaced from the clearance shaft 32 in one go through the first and second quick-release ports 111 and 321. This process greatly simplifies the loading and unloading operations during modification, breaks through the limitation that traditional devices cannot modify the lifting stroke, and enables the lifting multi-axis concentric drive device of the present invention to be compatible with multiple target lifting strokes according to different usage scenarios, thus improving the overall compatibility and convenience of modifying the lifting structure of such devices.

[0052] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the invention should be included within the protection scope of the invention.

[0053] Furthermore, various different implementations of the present invention can be combined arbitrarily, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed in the present invention.

Claims

1. A lifting multi-axis concentric drive device, comprising: The system comprises a frame, a direct drive unit, and a lifting assembly. The direct drive unit includes several stacked direct drive motors and several drive shafts, wherein each drive shaft is concentrically arranged and connected to a direct drive motor, and a storage cavity is provided inside the drive shaft located at the shaft center. The lifting assembly includes a lead screw, a clearance shaft, a bearing seat, and a drive unit. A base is provided at the bottom of the frame, and the drive unit is connected to the frame. The base has a first quick-release port. The drive end of the lead screw is connected to the base via the bearing seat and is located at the first quick-release port, where it is connected to the drive unit. The tail of the clearance shaft is connected to the bottom direct drive motor, and the shaft extends into the storage cavity of the drive shaft at the shaft center. The tail of the clearance shaft has a second quick-release port, and a stroke cavity communicating with the second quick-release port is provided inside the clearance shaft to house the lead screw and be supported by the lead screw nut, thereby lifting the direct drive unit. The first and second quick-release ports are coaxially arranged, and their openings are larger than the lead screw nut.

2. The lifting multi-axis concentric drive device according to claim 1, further comprising: A guide unit, wherein the guide unit is fixed on the frame, and the direct drive unit is connected to the guide unit, supported by the lifting assembly, and guided and lifted by the guide unit.

3. The lifting multi-axis concentric drive device according to claim 1, wherein the drive unit comprises: The device includes a driver, a transmission wheel, a drive wheel, and a transmission belt, wherein the driver is fixed on the frame, the drive wheel is connected to the driver, the transmission wheel is connected to the lead screw, and the transmission belt is sleeved on the drive wheel and the transmission wheel to form a belt drive.

4. The lifting multi-axis concentric drive device according to claim 1, wherein the lifting assembly further includes: The sealing plate includes a first sealing groove at the bottom of the bottom direct drive motor and a second sealing groove at the tail swing of the clearance shaft. Sealing gaskets are embedded in the first and second sealing grooves. The clearance shaft is connected to the bottom direct drive motor via the sealing plate to seal the first and second sealing grooves.

5. The liftable multi-axis concentric drive device according to claim 1, wherein the bearing seat is connected to the bottom surface of the base and is disposed at the first quick-release port.

6. The lifting multi-axis concentric drive device according to claim 1, further comprising: The bellows cover has a shaft platform at the top of the frame, a shaft hole at the shaft platform, and the drive shaft of the direct drive unit is adapted to the shaft hole. The top of the bellows cover is connected to the shaft platform, and the bottom is connected to the direct drive motor at the top of the direct drive unit, so as to enclose the drive shaft inside the frame.

7. The lifting multi-axis concentric drive device according to claim 1, further comprising: The guide locking unit includes: a linear module, a locking block, and a locking screw, wherein the slide rail of the linear module is fixed on the frame, the slider is connected to the direct drive unit, the locking block is connected to the slider, and the locking screw is engaged with the locking block to abut against the slide rail and lock the slider displacement.

8. A lifting stroke switching method for a lifting multi-axis concentric drive device as described in any one of claims 1 to 6, comprising the steps of: Stop the direct drive unit and drive unit, remove the bearing housing from the base, and separate the lead screw from the drive unit; From the first and second quick-release ports, remove the lead screw from the clearance shaft, replace it with the target stroke lead screw, restore the bearing housing, and connect the target stroke lead screw to the drive unit.

9. A lifting stroke switching method for the lifting multi-axis concentric drive device as described in claim 7, comprising the following steps: Stop the direct drive unit, control the lifting assembly to rise to the limit and then stop, and lock the current lifting position of the direct drive unit via the guide locking unit; Remove the bearing housing from the base to separate the lead screw from the drive unit; Remove the lead screw from the clearance shaft, take it out from the gap between the direct drive unit and the base, replace it with the target stroke lead screw, restore the bearing housing, connect the target stroke lead screw to the drive unit, and unlock the guide locking unit.

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