A workpiece holding method and device for ultrafast laser welding, and an ultrafast laser welding device

Abstract

The application provides a workpiece fixing method and device for ultrafast laser welding, and an ultrafast laser welding device, and the method comprises the following steps: fixing an upper workpiece to a transparent cover plate by using an adhesive layer; wherein the adhesive layer is fixed to the lower surface of the transparent cover plate, and the transparent cover plate is supported by a support structure; by adjusting the adjustable object table located below the transparent cover plate, the lower workpiece fixed on the adjustable object table and the upper workpiece are separated or attached; wherein after the lower workpiece and the upper workpiece are attached, the ultrafast laser welding is performed by focusing the ultrafast laser through the transparent cover plate and the adhesive layer to the attached surface. The application can adapt to the working condition that the workpieces cannot be pre-stacked, and realize the ultrafast laser welding.

Description

Technical Field

[0001] This invention relates to the field of laser packaging technology, and more particularly to a workpiece fixation method and apparatus for ultrafast laser welding, and an ultrafast laser welding apparatus. Background Technology

[0002] Ultrafast laser welding is a high-precision welding technology that utilizes the nonlinear absorption effect of the interaction between ultrashort pulse lasers and materials. It features ultra-high precision, low heat-affected zone, and wide applicability to a wide range of materials.

[0003] Currently, ultrafast laser welding is mostly used for two workpieces that are pre-stacked together. For example, an ultrafast laser precision welding system and method for glass materials (patent number CN112171055A) generally involves cleaning the welding surfaces of the workpieces separately, then stacking and clamping them onto a stage, raising the stage to make it fit tightly against the cover glass to reduce the gap between the welding surfaces of the workpieces, and finally performing ultrafast laser welding.

[0004] However, in actual processing, sometimes two workpieces cannot be pre-stacked and need to be separated to complete certain operations (e.g., vacuuming, precision alignment, etc.) before being stacked and bonded. Current technology lacks a solution for separating and fixing two workpieces without affecting subsequent ultrafast laser welding when they cannot be pre-stacked.

[0005] This invention enables the separation and bonding of workpieces before they are joined together, and then ultrafast laser welding is completed after bonding, under conditions where workpieces cannot be pre-stacked. Its applicable scenarios include, but are not limited to: (1) In vacuum ultrafast laser welding scenarios, two workpieces can be separated first, and then a vacuum can be drawn to ensure that the workpieces obtain a vacuum at the maximum pumping speed, which is helpful for obtaining high vacuum at the microscale. (2) In scenarios of workpiece optical alignment, existing technologies typically do not provide specific structural or methodological designs for the alignment process. The alignment method proposed in this invention can achieve micron-level alignment in conjunction with a microscope and a high-precision displacement stage. Summary of the Invention

[0006] In view of this, embodiments of the present invention provide a workpiece retention method and apparatus for ultrafast laser welding, and an ultrafast laser welding apparatus, to eliminate or improve one or more defects existing in the prior art.

[0007] One aspect of the present invention provides a workpiece fixation method for ultrafast laser welding, the method comprising the following steps: fixing an upper workpiece to a transparent cover plate using an adhesive layer; wherein the adhesive layer is fixed to the lower surface of the transparent cover plate, and the transparent cover plate is supported by a support structure; adjusting an adjustable stage located below the transparent cover plate to separate or attach a lower workpiece fixed on the adjustable stage to the upper workpiece; wherein, after the lower workpiece and the upper workpiece are attached, ultrafast laser welding is performed by focusing an ultrafast laser through the transparent cover plate and the adhesive layer onto the attachment surface.

[0008] In some embodiments of the present invention, adjusting the adjustable stage located below the transparent cover plate to separate or attach the lower workpiece and the upper workpiece fixedly placed on the adjustable stage includes: when the lower workpiece and the upper workpiece are separated, the operations performed include: performing a vacuuming operation on the support structure; and / or performing an optical alignment operation on the lower workpiece and the upper workpiece; and after the vacuuming operation or the optical alignment operation is completed, attaching the lower workpiece and the upper workpiece.

[0009] In some embodiments of the present invention, when the operation performed includes a vacuuming operation, the support structure is a vacuum chamber, and the adhesive layer, the upper workpiece, the transparent cover plate, the adjustable stage and the lower workpiece are located in the vacuum chamber. The adjustable stage is a liftable stage or a multi-axis displacement stage. When the operation performed includes an optical alignment operation, the adjustable stage is a multi-axis displacement stage.

[0010] In some embodiments of the present invention, before the vacuuming operation, the upper workpiece is fixed to the transparent cover plate using an adhesive layer, including: aligning and stacking the lower and upper workpieces together; placing the stacked lower and upper workpieces on an adjustable platform; raising the platform so that the upper workpiece contacts and adheres firmly to the adhesive layer; and lowering the platform so that the lower and upper workpieces are separated, thereby fixing the upper workpiece to the transparent cover plate.

[0011] In some embodiments of the present invention, the optical alignment operation includes: adjusting the adjustable stage so that both the lower and upper workpieces can be clearly imaged in the optical observation system without contact; adjusting the adjustable stage so that alignment marks pre-made on the lower and upper workpieces are aligned; and raising the adjustable stage so that the lower and upper workpieces fit together tightly.

[0012] Corresponding to the above method, the present invention also provides a workpiece separation and fixation device for ultrafast laser welding, comprising: a transparent cover plate and an adhesive layer fixed to its lower surface, the adhesive layer being used to fix an upper workpiece to the transparent cover plate; an adjustable stage for fixing a lower workpiece, wherein the separation or bonding of the upper and lower workpieces is achieved by adjusting the adjustable stage; and a support structure for supporting the transparent cover plate, such that the transparent cover plate is located above the adjustable stage; wherein, after the lower and upper workpieces are bonded, ultrafast laser welding is performed using an ultrafast laser focused on the bonding surface, the ultrafast laser passing through the transparent cover plate and the adhesive layer.

[0013] In some embodiments of the present invention, the device further includes a vacuum system for evacuating the support structure; wherein, when the device includes a vacuum system, the support structure is a vacuum chamber, and the adhesive layer, the upper workpiece, the transparent cover plate, the adjustable stage and the lower workpiece are located in the vacuum chamber, and the adjustable stage is a liftable stage or a multi-axis displacement stage.

[0014] In some embodiments of the present invention, the device further includes an optical observation system for optically aligning the lower and upper workpieces; wherein, when the device includes the optical observation system, the adjustable stage is a multi-axis displacement stage.

[0015] In some embodiments of the present invention, the material of the adhesive layer includes one or more of the following: PDMS, PMMA, hydrogel, TPE, jelly gel, PVB film and transparent silicone; the material of the transparent cover includes: optical glass, sapphire, fluoride crystal, polymer material or special optical plastic.

[0016] Corresponding to the above method, the present invention also provides an ultrafast laser welding apparatus, comprising: a workpiece separation and fixing device for ultrafast laser welding as described in any of the above embodiments; and an ultrafast laser source for generating ultrafast laser and focusing the ultrafast laser through a transparent cover plate and an adhesive layer onto the bonding surface for ultrafast laser welding.

[0017] The workpiece fixation method proposed in this invention can adapt to working conditions where workpieces cannot be pre-stacked, enabling ultrafast laser welding. It solves the technical challenge of separating and / or bonding workpieces before welding. These working conditions where workpieces cannot be pre-stacked include, but are not limited to, vacuum welding in vacuum ultrafast laser welding scenarios, and optical alignment bonding in scenarios requiring optical alignment of workpieces.

[0018] Additional advantages, objects, and features of the invention will be set forth in part in the description which follows, and will also become apparent in part to those skilled in the art upon studying the description, or may be learned by practice of the invention. The objects and other advantages of the invention can be realized and obtained by means of the structures specifically pointed out in the specification and drawings.

[0019] Those skilled in the art will understand that the objectives and advantages achievable with this invention are not limited to those specifically described above, and that the above and other objectives achievable with this invention will become clearer from the following detailed description. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, are not intended to limit the scope of the invention. In the drawings:

[0021] Figure 1 This is a flowchart of the workpiece retention method for ultrafast laser welding according to the present invention.

[0022] Figure 2 This is a structural diagram of the workpiece holding device for ultrafast laser welding in Example 1.

[0023] Figure 3 This is a structural diagram of the workpiece holding device for ultrafast laser welding in Example 2.

[0024] Figure 4 This is a structural diagram of the workpiece holding device for ultrafast laser welding in Example 3.

[0025] Figure 5 This is a schematic diagram of the arrangement of alignment marks used for optical alignment.

[0026] Explanation of reference numerals in the attached figures:

[0027]

[0028] Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the embodiments and accompanying drawings. Here, the illustrative embodiments and descriptions of this invention are used to explain the invention, but are not intended to limit the invention.

[0030] It should also be noted that, in order to avoid obscuring the invention with unnecessary details, only the structures and / or processing steps closely related to the solution according to the invention are shown in the accompanying drawings, while other details that are not closely related to the invention are omitted.

[0031] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, element, step, or component, but does not exclude the presence or addition of one or more other features, elements, steps, or components.

[0032] It should also be noted that, unless otherwise specified, the term "connection" in this article can refer not only to a direct connection, but also to an indirect connection involving an intermediary.

[0033] In the following description, embodiments of the invention will be illustrated with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or similar parts, or the same or similar steps.

[0034] To address the challenge of effectively separating and fixing two workpieces on a processing platform without affecting subsequent ultrafast laser welding when the workpieces to be welded cannot be pre-stacked, this invention proposes a workpiece fixing method and apparatus for ultrafast laser welding, as well as an ultrafast laser welding method and apparatus based thereon.

[0035] The principle of this method is as follows: the upper workpiece is fixed to the cover glass so that the upper workpiece can be separated from the lower workpiece before welding; after certain operations are completed (such as vacuuming, precision alignment, etc.), the upper workpiece is attached to the lower workpiece, thereby avoiding affecting the subsequent ultrafast laser welding.

[0036] Figure 1 This is a flowchart of the workpiece retention method for ultrafast laser welding according to the present invention, which includes the following steps:

[0037] Step S110: Fix the upper workpiece to the transparent cover plate using an adhesive layer; wherein the adhesive layer is fixed to the lower surface of the transparent cover plate, and the transparent cover plate is supported by a support structure.

[0038] Here, "transparent" means that the transparent cover and adhesive layer do not absorb or have low absorption of ultrafast lasers.

[0039] The methods for attaching the adhesive layer to the transparent cover plate include, but are not limited to: pre-fabricating the adhesive layer and then attaching it to the transparent cover plate; or, applying the adhesive layer to the transparent cover plate and then curing it. The adhesive layer is a transparent and adhesive material, used to firmly adhere the upper workpiece to the transparent cover plate so that it does not fall off under gravity.

[0040] Step S120: By adjusting the adjustable stage located below the transparent cover plate, the lower workpiece and the upper workpiece fixed on the adjustable stage are separated or attached; wherein, after the lower workpiece and the upper workpiece are attached, ultrafast laser welding is performed by focusing an ultrafast laser through the transparent cover plate and the adhesive layer onto the bonding surface.

[0041] The workpiece fixation method proposed in this invention can adapt to working conditions where workpieces cannot be pre-stacked, enabling ultrafast laser welding. It solves the technical challenge of separating and / or bonding workpieces before welding. These working conditions where workpieces cannot be pre-stacked include, but are not limited to, vacuum welding in vacuum ultrafast laser welding scenarios, and optical alignment bonding in scenarios requiring optical alignment of workpieces.

[0042] In some embodiments of the invention, in order to achieve better laser welding results, the method further includes cleaning the workpiece before step S110 to obtain a better welding surface.

[0043] Using this embodiment helps to make the welding surfaces fit more tightly.

[0044] In some embodiments of the present invention, adjusting the adjustable stage located below the transparent cover plate to separate or attach the lower workpiece and the upper workpiece fixedly placed on the adjustable stage includes: when the lower workpiece and the upper workpiece are separated, the operations performed include: performing a vacuuming operation on the support structure; and / or performing an optical alignment operation on the lower workpiece and the upper workpiece; and after the vacuuming operation or the optical alignment operation is completed, attaching the lower workpiece and the upper workpiece.

[0045] When the operation performed includes vacuuming, the support structure is a vacuum chamber, and the adhesive layer, upper workpiece, transparent cover, adjustable stage, and lower workpiece are located within the vacuum chamber. The adjustable stage is a liftable stage or a multi-axis displacement stage. When the operation performed includes optical alignment, the adjustable stage is a multi-axis displacement stage.

[0046] This embodiment illustrates a scenario where workpieces cannot be pre-stacked, demonstrating the necessity and criticality of this design.

[0047] In some embodiments of the present invention, before the vacuuming operation, the upper workpiece is fixed to the transparent cover plate using an adhesive layer, including: (1) aligning and stacking the lower and upper workpieces together; (2) placing the stacked lower and upper workpieces on an adjustable platform; (3) raising the platform so that the upper workpiece contacts and adheres firmly to the adhesive layer; and (4) lowering the platform so that the lower and upper workpieces are separated, thereby fixing the upper workpiece to the transparent cover plate.

[0048] Using this embodiment, workpiece self-alignment based on an adjustable stage can be achieved, which helps to improve the alignment accuracy when the workpiece is bonded.

[0049] In some embodiments of the present invention, the optical alignment operation includes: (1) adjusting the adjustable stage so that the lower workpiece and the upper workpiece can be clearly imaged in the optical observation system without contact; (2) adjusting the adjustable stage so that the alignment marks pre-made on the lower workpiece and the upper workpiece are aligned; (3) raising the adjustable stage so that the lower workpiece and the upper workpiece fit together tightly.

[0050] Using this embodiment, the lower and upper workpieces can be precisely aligned based on an optical observation system, improving the accuracy of workpiece alignment.

[0051] Figure 2 This is a structural diagram of the workpiece holding device for ultrafast laser welding in Example 1. The device includes:

[0052] (1) A transparent cover plate 3 and an adhesive layer 4 fixed on its lower surface, wherein the adhesive layer 4 is used to fix the upper workpiece 5 to the transparent cover plate 3.

[0053] (2) Adjustable platform 2 is used to fix the lower workpiece 6. The upper workpiece 5 and the lower workpiece 6 can be separated or attached by adjusting the adjustable platform 2.

[0054] (3) Support structure 1, used to support the transparent cover plate 3, so that the transparent cover plate 3 is located above the adjustable platform 2.

[0055] In this process, after the lower workpiece 6 and the upper workpiece 5 are bonded together, ultrafast laser welding is performed using an ultrafast laser focused on the bonding surface. The ultrafast laser passes through the transparent cover plate 3 and the adhesive layer 4. Laser focusing can be achieved by adjusting the vertical position of the laser head.

[0056] Among them, adjustable stage refers to the adjustable spatial position of the stage, which is achieved based on hinges or other fixed structures.

[0057] By employing this embodiment of the invention, the steps of any of the methods described in the above embodiments can be implemented.

[0058] In some embodiments of the present invention, the device may further include a vacuum system 7, which is used to perform a vacuuming operation on the support structure. When the device includes a vacuum system, the support structure 1 is a vacuum chamber, and the adhesive layer, upper workpiece, transparent cover, adjustable stage, and lower workpiece are located within the vacuum chamber. The adjustable stage is a liftable stage 21 or a multi-axis displacement stage 22.

[0059] In some embodiments of the present invention, the apparatus further includes an optical observation system 8, which is used to perform optical alignment operations on the lower workpiece 6 and the upper workpiece 5. Wherein, when the apparatus includes the optical observation system 8, the adjustable stage 2 is a multi-axis displacement stage 22.

[0060] Optionally, the material category of the adhesive layer includes one or more of the following: PDMS, PMMA, hydrogel, TPE, gel, PVB film, and transparent silicone.

[0061] Optionally, the materials used for the transparent cover include: optical glass, sapphire, fluoride crystals, polymer materials, or specialty optical plastics.

[0062] In a specific embodiment of the present invention, the laser welding method based on embodiment 1 includes the following steps: (1) cleaning the workpiece to obtain a better welding surface; (2) fixing the adhesive layer on the transparent cover plate; (3) attaching the upper workpiece to be welded onto the adhesive layer; (4) fixing the lower workpiece on the stage; (5) making the vacuum chamber reach a predetermined vacuum level; (6) raising the stage to make the upper and lower workpieces fit tightly together; (7) making the ultrafast laser pass through the transparent cover plate and the adhesive layer and focus on the bonding surface to complete the welding.

[0063] In another specific embodiment of the present invention, the laser welding method based on embodiment 1 includes the following steps: (1) cleaning the workpiece to obtain a better welding surface; (2) fixing the adhesive layer on the transparent cover plate; (3) manually aligning and stacking the upper and lower workpieces together; (4) placing the stacked workpieces on the stage; (5) raising the stage to make the upper workpiece contact and adhere firmly to the adhesive layer; (6) lowering the stage to separate the lower workpiece from the upper workpiece under the action of gravity; (7) making the vacuum chamber reach a predetermined vacuum level; (8) raising the stage to make the upper and lower workpieces fit tightly together; (9) focusing the ultrafast laser through the transparent cover plate and the adhesive layer onto the bonding surface to complete the welding.

[0064] The main difference between the two specific embodiments is that the latter aligns and bonds once first. So that after separation and vacuuming, as long as there is no major disturbance, the two workpieces will still be aligned when they are bonded again. This is a self-alignment method.

[0065] Figure 3 This is a structural diagram of the workpiece holding device for ultrafast laser welding in Example 2. Example 1 is a workpiece holding device based on vacuum system 7, and Example 2 is a workpiece holding device based on optical observation system 8.

[0066] In a specific embodiment of the present invention, the laser welding method based on embodiment 2 includes the following steps: (1) machining alignment marks on the workpiece to be welded; (2) cleaning the workpiece to obtain a better welding surface; (3) fixing the adhesive layer to the transparent cover plate; (4) attaching the upper workpiece to be welded to the adhesive layer; (5) fixing the lower workpiece on the stage; (6) raising the adjustable stage so that both the upper and lower workpieces can be clearly imaged in the optical observation system without contact; (7) adjusting the adjustable stage (multi-axis displacement stage) so that the alignment marks of the upper and lower workpieces are aligned according to the design; (8) further moving the adjustable stage upward so that the upper and lower workpieces are tightly attached; (9) focusing the ultrafast laser through the transparent cover plate and the adhesive layer onto the bonding surface to complete the welding.

[0067] Figure 4 This is a structural diagram of the workpiece holding device for ultrafast laser welding in Example 3. Example 3 includes a vacuum system 7 and an optical observation system 8, which coexist.

[0068] In a specific embodiment of the present invention, the laser welding method based on embodiment 3 includes the following steps: (1) machining alignment marks on the workpiece to be welded; (2) cleaning the workpiece to obtain a better welding surface; (3) fixing the adhesive layer to the transparent cover plate; (4) attaching the upper workpiece to be welded to the adhesive layer; (5) fixing the lower workpiece on the stage; (6) bringing the chamber to a predetermined vacuum level; (7) adjusting the adjustable stage so that both the upper and lower workpieces can be clearly imaged in the optical observation system without contact; (8) adjusting the adjustable stage (multi-axis displacement stage) so that the alignment marks of the upper and lower workpieces are aligned according to the design; (9) further moving the adjustable stage upward so that the upper and lower workpieces are tightly bonded; (10) focusing the ultrafast laser through the transparent cover plate and the adhesive layer onto the bonding surface to complete the welding.

[0069] Figure 5 This is a schematic diagram of the arrangement of alignment marks used for optical alignment. For example... Figure 5 As shown, alignment marks 91 on the upper workpiece and alignment marks 92 on the lower workpiece are pre-processed. Based on embodiment 3, precise alignment of vacuum ultrafast laser welding can be achieved. The alignment marks should be arranged on the welding surface, which helps to ensure that the alignment marks on the two workpieces can be seen clearly at the same time within the limited depth of focus of the optical observation system.

[0070] The methods for pre-processing the alignment marks include, but are not limited to: dry etching, wet etching, coating, drilling, and grooving.

[0071] Corresponding to the above methods and apparatus, the present invention also proposes an ultrafast laser welding apparatus, comprising: a workpiece separation and fixing device for ultrafast laser welding as described in any of the above embodiments; and an ultrafast laser source for generating ultrafast laser and focusing the ultrafast laser through a transparent cover plate and an adhesive layer onto the bonding surface for ultrafast laser welding.

[0072] Those skilled in the art will understand that the exemplary components, systems, and methods described in conjunction with the embodiments disclosed herein can be implemented in hardware, software, or a combination of both. Whether implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this invention. When implemented in hardware, it can be, for example, electronic circuits, application-specific integrated circuits (ASICs), appropriate firmware, plug-ins, function cards, etc. When implemented in software, the elements of this invention are programs or code segments used to perform the desired tasks. The programs or code segments can be stored in a machine-readable medium or transmitted over a transmission medium or communication link via data signals carried in a carrier wave.

[0073] It should be clarified that the present invention is not limited to the specific configurations and processes described above and shown in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown. Those skilled in the art can make various changes, modifications, and additions, or change the order of steps, after understanding the spirit of the present invention.

[0074] In this invention, features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, and / or combined with or in place of features of other embodiments.

[0075] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, various modifications and variations of the embodiments of the present invention are possible. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A workpiece retention method for ultrafast laser welding, characterized in that, include: Before vacuuming, align the lower and upper workpieces and stack them together. Place the stacked lower and upper workpieces onto the adjustable platform; The adjustable lifting stage allows the upper workpiece to contact and adhere firmly to the adhesive layer; A lowering adjustable stage separates the lower workpiece from the upper workpiece, and fixes the upper workpiece to the transparent cover plate; wherein the adhesive layer is fixed to the lower surface of the transparent cover plate, and the transparent cover plate is supported by a support structure. A vacuum operation was performed on the support structure; An optical alignment operation is performed on the lower workpiece and the upper workpiece; By adjusting the adjustable stage located below the transparent cover plate, the lower workpiece and the upper workpiece fixed on the adjustable stage are made to fit tightly together. Ultrafast laser welding is then performed by focusing the ultrafast laser through the transparent cover plate and the adhesive layer onto the bonding surface. The supporting structure is a vacuum chamber, in which the adhesive layer, the upper workpiece, the transparent cover, the adjustable stage, and the lower workpiece are located. The optical alignment operation includes: adjusting the adjustable stage so that both the lower and upper workpieces can be clearly imaged in the optical observation system without contact; and adjusting the adjustable stage so that the alignment marks pre-made on the lower and upper workpieces are aligned.

2. The method according to claim 1, characterized in that, The adjustable stage is a multi-axis displacement stage.

3. A workpiece separation and retention device applied to the workpiece retention method for ultrafast laser welding as described in claim 1 or 2, characterized in that, include: A transparent cover plate and an adhesive layer fixed to its lower surface, the adhesive layer being used to fix an upper workpiece to the transparent cover plate; An adjustable stage is used to fix the lower workpiece in place. The upper workpiece and the lower workpiece can be separated or attached by adjusting the adjustable stage. A support structure is provided to support the transparent cover plate, so that the transparent cover plate is positioned above the adjustable platform. The device also includes a vacuum system and an optical observation system. The vacuum system is used to perform a vacuuming operation on the support structure. When the device includes a vacuum system, the support structure is a vacuum chamber, and the adhesive layer, the upper workpiece, the transparent cover plate, the adjustable stage, and the lower workpiece are located inside the vacuum chamber. In this process, after the lower and upper workpieces are bonded together, an ultrafast laser focused on the bonding surface is used for ultrafast laser welding, and the ultrafast laser passes through the transparent cover plate and the adhesive layer.

4. The apparatus according to claim 3, characterized in that, The adjustable stage is a multi-axis displacement stage.

5. The apparatus according to claim 3 or 4, characterized in that, The optical observation system is used to perform optical alignment operations on the lower and upper workpieces. The adjustable stage is a multi-axis displacement stage.

6. The apparatus according to claim 3, characterized in that, The material category of the adhesive layer includes any one of PDMS, PMMA, hydrogel, TPE, gel, and PVB film; The materials used for the transparent cover include any one of the following: optical glass, sapphire, fluoride crystals, and polymer materials.

7. An ultrafast laser welding device, characterized in that, include: The workpiece separation and fixing device according to any one of claims 3-6; An ultrafast laser source is used to generate ultrafast lasers and focus them onto the bonding surface through the transparent cover plate and adhesive layer for ultrafast laser welding.

Images