Integrated testing device and method for the shape and properties of large-aperture, long-focal-distance axial lenses

Abstract

This invention discloses an integrated detection device and method for the shape characteristics of large-aperture, long-focal-distance axial lenses, belonging to the field of off-axis lens shape characteristic detection in precision optics, and is used to solve the technical problem of the inability to perform integrated detection of the shape characteristic parameters of off-axis lenses. The device includes a large-aperture planar interferometer, a lens under test, a large-aperture computational hologram, an attitude alignment module, and a precision ranging module. The large-aperture computational hologram is provided with a main test area, an alignment area, and an off-axis calibration area. The attitude alignment module and the precision ranging module are respectively configured on the fixtures of the lens under test and the computational hologram. The detection method includes the following steps: obtaining the background wavefront of the computational hologram detection cavity using a large-aperture standard spherical lens; adjusting the pose of the large-aperture computational hologram and the lens under test based on the large-aperture planar interferometer; measuring the transmitted wavefront of the lens under test and subtracting the background wavefront; measuring and calculating the back intercept of the lens under test, and calculating the off-axis amount in combination with the off-axis angle.

Description

Technical Field

[0001] This invention belongs to the field of precision optical testing, and relates to the testing of off-axis lenses, and particularly to an integrated testing device and method for the shape and properties of large-aperture, long-focal-distance axial lenses. Background Technology

[0002] An off-axis lens is a special type of lens that modulates the wavefront of incident light by controlling the phase distribution at various points on the lens, allowing light rays from different positions to be focused at a specific off-axis location after passing through the lens. Compared to coaxial optical elements, off-axis lenses, because their geometric center axis is off-axis, offer advantages such as high luminous flux, low stray light, and high contrast. Therefore, they are widely used in large optical systems, such as astronomical telescopes, airborne imaging devices, spectrometers, and high-power laser devices.

[0003] As the performance requirements of optical systems continue to increase, the precision machining and testing of lenses face greater challenges. In particular, the testing of key morphological parameters (transmission wavefront, back intercept, and off-axis measurement) of large-aperture, long-focal-distance axial lenses remains an engineering problem that urgently needs to be solved in the field of modern advanced optical manufacturing.

[0004] In existing technologies, large-aperture, long-focal-distance axial lenses widely used in optical systems typically have an aperture of no less than φ400mm, a back intercept range from tens of meters to thousands of meters, and an off-axis amount generally no less than one-third of the aperture being measured. Key challenges in transmitted wavefront detection include difficulties in correcting system asymmetric aberrations, large assembly and adjustment errors in the test optical path, excessively long test optical paths limiting measurement space, and significant environmental disturbances. Back intercept detection suffers from insufficient accuracy in focusing and ranging from tens of meters to thousands of meters. Off-axis amounts cannot be directly measured because the lens optical axis is not representational. Traditional detection techniques are usually designed to solve the detection of single parameters (such as transmitted wavefront or back intercept), but the constraints and component states of the detection systems for each parameter are inconsistent, leading to low measurement efficiency and an inability to accurately evaluate the performance of optical components under operating conditions.

[0005] Patent application number 201610951248.5 discloses a detection device and method for measuring the transmitted wavefront of a long focal length lens using a computational holographic method. The device includes an interferometer, with the long focal length lens to be measured and a Fresnel zone plate arranged sequentially on the outer side of the interferometer along a direction away from the interferometer. The Fresnel zone plate is a concentric ring. When the collimated parallel light output from the interferometer passes through a standard plane mirror at the end of the interferometer, a portion of the collimated parallel light is reflected by the standard plane mirror to form a standard reference beam, while the other portion of the collimated parallel light passes sequentially through the standard plane mirror and the long focal length lens to be measured, is reflected on the Fresnel zone plate, and returns along the original path to form a test beam. The test beam and the standard reference beam produce interference fringes. The detection steps include: fabricating a Fresnel zone plate, measuring the background wavefront, measuring the combined wavefront, and data processing. Before placing the long focal length lens under test, the Fresnel zone plate acts as a reflective plate, and its reflected wavefront reflects the background error of the interferometric detection. After placing the long focal length lens under test, the diffraction wavefront generated by the Fresnel zone plate provides a reference spherical wave for detecting the transmitted wavefront of the lens. Subtracting the background error from this transmitted wavefront can eliminate the transmission wavefront detection error introduced by the fabrication of the Fresnel zone plate, thus improving the detection accuracy. Although this detection device and method can measure the transmitted wavefront of the long focal length lens under test, because its zone plate pattern is a concentric ring, it can only measure the transmitted wavefront of coaxial lenses and cannot measure parameters such as the transmitted wavefront, back intercept, and off-axis amount of off-axis lenses. Furthermore, the 0th-order and 1st-order diffraction light, which serve as the system background, will be reflected into the interferometer, introducing stray light and causing the test data center to be missing or abnormal. In addition, the 0th order reflected wavefront of the zone plate is used as the background wavefront of the system. The parallel light of the interferometer passes through the lens under test and becomes converging light incident on the zone plate, which will introduce defocus and spherical aberration into the measurement results, resulting in a large wavefront measurement error.

[0006] The invention patent with application number 202010172017.0 also discloses a method for calculating the focal length of a holographically measured lens, which includes the following steps: 1) Design of the CGH: Based on the radius of curvature of the front and rear surfaces of the lens under test, the center thickness, the material of the lens, and the distance between the lens under test and the CGH, the radius parameters of each annulus of the CGH are obtained, and the CGH is then manufactured; 2) Acquisition of the background wavefront: Using a plane interferometer, the 0th order wavefront of the CGH is measured multiple times, and the average is taken as the background wavefront; 3) Acquisition of the distance between the lens under test and the CGH: Using a plane interferometer, the lens under test is placed between the standard plane mirror of the plane interferometer and the CGH, and the wavefront of the lens is measured multiple times. At the same time, the distance between the lens and the CGH is measured. The background wavefront is subtracted from each transmitted wavefront, and the relationship between defocus and distance is calculated. The optimal distance is obtained by fitting using the least squares method; 4) Acquisition of the lens focal length: Using a spherical interferometer, the 1st order radius of curvature of the CGH is measured first, and then the focal length of the lens under test is obtained based on the radius of curvature of the CGH and the distance between the lens under test and the CGH. Although this method measures the wavefront of the lens multiple times while simultaneously measuring the distance between the lens and the CGH, the need to move and adjust components for each measurement results in low measurement efficiency. When using a spherical interferometer to measure the radius of curvature and back intercept, the spherical interferometer's lens aperture is less than 10mm, limiting its measurement range to CGHs with converging characteristics but not diverging characteristics. Furthermore, the spherical interferometer requires calibration of the CGH's radius of curvature, restricting the calibration range for non-visible CGHs. Additionally, the lack of limiting measures during multiple lens movements introduces different setup and adjustment errors during the wavefront measurements, affecting the accuracy of the wavefront defocus aberration results.

[0007] Therefore, it is necessary to provide a device and method for integrated detection of the shape parameters (transmitted wavefront, back intercept, and off-axis amount) of off-axis lenses, so as to improve the measurement accuracy of the shape parameters of off-axis lenses. Summary of the Invention

[0008] The purpose of this invention is to solve the technical problem that existing technologies cannot perform integrated detection of the shape parameters (transmission wavefront, back intercept, and off-axis amount) of off-axis lenses, and to provide a device and method for integrated detection of the shape parameters of large-aperture long focal distance off-axis lenses. This method can improve the measurement accuracy of shape parameters by measuring the transmission wavefront, back intercept, and off-axis amount of off-axis lenses.

[0009] To achieve the above objectives, the present invention specifically adopts the following technical solution:

[0010] A large-aperture, long-focal-distance axial lens shape and property integrated detection device includes a large-aperture plane interferometer, a lens under test, a large-aperture computational hologram, an attitude alignment module, and a precision ranging module.

[0011] The surface of the large-aperture computational holographic plate is etched with a main test area, an alignment area, and an off-axis calibration area. The main test area is located within the light-transmitting aperture of the large-aperture computational holographic plate and is used to compensate for aberrations in the measurement optical path. The alignment area is located at the three corners outside the light-transmitting aperture of the large-aperture computational holographic plate and is used to monitor the test posture of the large-aperture computational holographic plate. The off-axis calibration area is rectangular and located at the edge of the substrate of the large-aperture computational holographic plate along the off-axis direction of the lens, and is used to calibrate the off-axis amount of the lens under test.

[0012] The attitude alignment module includes a collimating light aiming component and an interference alignment component. During attitude alignment, the attitude of the lens under test is adjusted so that the collimating light emitted by the collimating light aiming component is reflected back to the collimating light aiming component after being reflected by the surface of the lens under test, thus completing the coarse alignment of the lens attitude. Then, the attitude of the lens under test is finely aligned by the interference fringes of the interference alignment component.

[0013] A precision ranging module is used to measure the distance between the lens under test and the large-aperture holographic plate.

[0014] The measurement optical path is as follows: A large-aperture plane interferometer emits a parallel laser beam. Part of the parallel laser beam is reflected by the reference mirror of the large-aperture plane interferometer to form a reference beam; another part of the parallel laser beam passes through the reference mirror of the large-aperture plane interferometer to form a measurement beam. The measurement beam passes through the lens under test and is incident on the large-aperture computational hologram. After being reflected by the large-aperture computational hologram, it returns to the large-aperture plane interferometer along the same path. The measurement beam and the reference beam form interference fringes, and the wavefront distribution is obtained by analyzing the interference fringes. Then, the lens under test is moved axially so that the defocus aberration of the transmitted wavefront of the lens under test is no greater than λ / 20. The distance between the lens under test and the large-aperture computational hologram is measured using a precision ranging module. The lens under test is replaced with a standard lens with a known back intercept, and the above measurement is repeated. Based on the distance between the lens under test and the large-aperture computational hologram, the distance between the standard lens and the large-aperture computational hologram, and the back intercept of the standard lens, the back intercept and off-axis amount of the lens under test are calculated.

[0015] Furthermore, the substrate of the large-aperture computational hologram is made of fused silica or microcrystalline material, and the aperture of the large-aperture computational hologram is greater than or equal to the aperture of the lens under test.

[0016] Furthermore, the large-aperture computational hologram is tilted, and the tilt angle between the normal of the large-aperture computational hologram and the optical axis of the measurement beam is... Conditions met:

[0017] Tilting the large-aperture computational hologram causes the 0th-order reflected light spot of the large-aperture computational hologram to deviate from the imaging field of the large-aperture planar interferometer, which can eliminate the influence of non-working-order stray light of the computational hologram on the measurement results.

[0018] Furthermore, the diffraction wave in the main test area (32) is selected as order -1, and the phase characterization of the pattern is as follows:

[0019] ;

[0020] in, Represents the number of Zernike terms, Let i represent the Zernike standard polynomial. The Zernike standard polynomial represents the first... Term coefficient, Represents the normalized radial ray coordinates, This represents the coordinates of the angular ray.

[0021] Furthermore, the alignment area employs an equally spaced grating structure, and the -3rd or 3rd order diffraction angle of the grating is equal to the tilt angle of the large-aperture computational hologram. .

[0022] Furthermore, the collimating light aiming assembly is used for coarse alignment of the lens under test, including a collimating light source and a two-dimensional adjustment frame;

[0023] The interferometric alignment assembly is used for the fine alignment of the lens under test. It consists of two polished parallel plates, and the front surface of the parallel plate facing the large-aperture plane interferometer is coated with a high-reflectivity film.

[0024] Furthermore, the process of coarse alignment using the collimating light aiming assembly is as follows: First, the large-aperture computational hologram is moved into the detection cavity of the large-aperture planar interferometer. Then, the collimated laser emitted by the collimating light source passes through the large-aperture computational hologram and is incident on the large-aperture planar interferometer. Next, by adjusting the two-dimensional attitude of the collimating light aiming assembly, the collimated laser reflected by the large-aperture planar interferometer returns to the collimating light source along its original path. Then, the lens under test is moved into the detection cavity of the large-aperture planar interferometer, and the two-dimensional attitude of the lens under test is adjusted so that the collimated laser emitted by the collimating light source returns to the collimating light source along its original path after being reflected by the lens under test.

[0025] The process of fine alignment using the interference alignment assembly is as follows: First, the lens under test and the interference alignment assembly are moved into the detection cavity of the large-aperture plane interferometer, with the plane side of the lens under test facing the large-aperture plane interferometer; then, the two-dimensional orientation of the lens under test and the interference alignment assembly is adjusted so that both the lens under test and the interference alignment assembly can produce interference fringes with the large-aperture plane interferometer with the fewest possible fringes.

[0026] Furthermore, the lens to be tested is mounted on a lens fixture, and the large-aperture computational holographic plate is mounted on a holographic plate fixture. Both the lens fixture and the holographic plate fixture are equipped with L-shaped limit blocks.

[0027] A method for integrated shape and properties testing of a large-aperture, long-focal-distance axial lens includes the aforementioned integrated shape and properties testing device for a large-aperture, long-focal-distance axial lens. When performing integrated shape and properties testing using the integrated shape and properties testing device for a large-aperture, long-focal-distance axial lens, the method includes the following steps:

[0028] Step 1: Calibrate the background wavefront of the detection cavity;

[0029] Move the large-aperture standard spherical lens into the detection cavity of the large-aperture planar interferometer, and adjust the orientation of the large-aperture standard spherical lens and the reference mirror of the large-aperture planar interferometer so that the reflection point of the planar standard reference surface of the large-aperture planar interferometer deviates from the field of view and the reflection point of the reference surface of the large-aperture standard spherical lens is located at the center of the field of view of the large-aperture planar interferometer.

[0030] Next, the large-aperture computational hologram is moved into the detection cavity of the large-aperture planar interferometer. The axial position and two-dimensional orientation of the large-aperture computational hologram are adjusted so that the axial distance between the large-aperture computational hologram and the large-aperture standard spherical lens is h, and the interference fringes between the -1st order diffraction wave in the main test area of ​​the large-aperture planar interferometer and the reference beam of the large-aperture standard spherical lens are minimized. The computational holographic wavefront measured by the large-aperture planar interferometer is denoted as the wavefront. The surface shape of the reference surface of a large-aperture standard spherical lens is measured using a large-aperture non-contact optical surface profilometer, and is denoted as . Then the background wavefront of the detection cavity Represented as:

[0031] ;

[0032] Wherein, the spacing h satisfies the following relationship:

[0033] ;

[0034] in, The fitted radius of curvature of the reference surface of a large-aperture standard spherical lens. This represents the radius of curvature of the -1st order diffraction wavefront in the main test area of ​​the large-aperture holographic plate.

[0035] Step 2, align the holographic panel;

[0036] Remove the large-aperture standard spherical lens and adjust the reflection point of the plane standard reference surface of the large-aperture plane interferometer (1) to the center of the field of view;

[0037] The large-aperture computational hologram is moved into the detection cavity of the large-aperture planar interferometer, and the two-dimensional orientation of the large-aperture computational hologram is adjusted to minimize the interference fringes in the alignment area and off-axis calibration area of ​​the large-aperture computational hologram.

[0038] Step 3, lens installation and position adjustment;

[0039] Move the lens under test into the detection cavity of the large-aperture planar interferometer, and move the lens under test axially to adjust the distance between the lens under test and the large-aperture computational holographic plate to the design distance.

[0040] Step 4: Align the lens off-axis;

[0041] The lens under test is translated along the off-axis direction so that the interference fringes of the off-axis calibration area of ​​the large-aperture computational holographic plate are completely exposed.

[0042] Step 5, adjust the lens posture;

[0043] The collimating beam aiming component and the interference alignment component of the attitude alignment module are respectively established with the reference plane of the large-aperture plane interferometer to establish an orthogonal relationship of the optical axis. The two-dimensional attitude of the lens under test is adjusted so that the collimating beam emitted by the collimating beam aiming component of the attitude alignment module is reflected by the surface of the lens under test and returns to the collimating beam aiming component to complete the coarse alignment of the lens attitude. The interference fringes of the interference alignment component are minimized to achieve fine alignment of the lens attitude.

[0044] Step 6, wavefront measurement;

[0045] A large-aperture planar interferometer emits a parallel laser beam, and the wavefront data of the lens under test is measured through the large-aperture planar interferometer. Then the transmitted wavefront of the lens under test Represented as:

[0046] ;

[0047] Step 7, measure the back intercept and off-axis distance;

[0048] Measure the transmitted wavefront of the lens under test Then, the lens under test is moved along the axis to ensure that the defocus aberration of the transmitted wavefront of the lens is no greater than λ / 20. The distance D between the lens fixture and the corresponding position on the holographic plate fixture is measured using a precision ranging module. Then, the known intercept is used... The standard lens was replaced with the lens under test, and the distance between the standard lens fixture and the large-aperture computational hologram was measured. ;

[0049] Based on distance D, distance and intercept The back intercept of the lens under test was calculated. ;

[0050] Based on back intercept Off-axis angle of the lens under test The vertical off-axis value of the lens under test is calculated. .

[0051] Furthermore, in step 7, the back intercept... The calculation formula is:

[0052] ;

[0053] Vertical off-axis The calculation formula is:

[0054] .

[0055] The beneficial effects of this invention are as follows:

[0056] 1. In this invention, by setting an asymmetric main test area, alignment area, and off-axis calibration area on a large-aperture computational holographic plate, it can be used for integrated measurement of the transmitted wavefront and back intercepts and off-axis quantity of off-axis lenses, and the measurement accuracy of the shape parameters is high.

[0057] 2. In this invention, by setting an attitude alignment module, the attitude of the lens under test can be adjusted conveniently and quickly, and the attitude of the lens under test can be monitored in real time, reducing the error introduced by optical path assembly mismatch and improving the measurement accuracy of shape parameters.

[0058] 3. In this invention, there is no need to calibrate the radius of curvature of the large-aperture holographic plate. Instead, the defocus aberration is adjusted and the standard lens is replaced after measuring the transmitted wave containing the background wave. Only the difference between the lens under test and the standard lens needs to be measured to obtain the back intercept and off-axis amount. The whole detection process is more convenient and efficient. Only the standard lens needs to be replaced, and the introduced error is smaller or non-existent. The measurement accuracy of the shape parameters is higher.

[0059] 4. In this invention, L-shaped limiting blocks are provided on the tooling for the lens and holographic plate (i.e., the special tooling for installing the lens to be tested and the large-aperture computational holographic plate). The corresponding devices are positioned and installed by the L-shaped limiting blocks, reducing the error introduced by the installation of the devices.

[0060] 5. In this invention, under the lens clamping position solidification measure, the distance measurement from the element to the computational hologram is converted into the measurement of the position directly corresponding to the tooling; by measuring the distance from the lens tooling to the computational hologram plate tooling of the lens under test and the standard lens tooling respectively, and calculating the back intercept deviation and off-axis amount, the measurement of back intercept and off-axis amount is more convenient and faster, and the measurement accuracy of shape parameters such as back intercept and off-axis amount is high.

[0061] 6. In this invention, the optical axis of the large-aperture computational hologram and the optical axis of the lens under test are placed at a specific angle, so that all stray light of the non-working order of the large-aperture computational hologram deviates from the field of view of the interferometer, so that the measurement results of the transmitted wavefront are free from stray light interference and the reliability of the measurement results is improved. Attached Figure Description

[0062] Figure 1 This is a schematic diagram of the structure of the present invention;

[0063] Figure 2 This is a schematic diagram of the structure used in this invention for calibrating the background wavefront;

[0064] Figure 3 This is a schematic diagram of the structure of the large-aperture computational holographic plate in this invention;

[0065] Where A represents the off-axis direction of the lens;

[0066] Figure 4 This is a schematic diagram of the tooling structure in this invention;

[0067] Figure 5 This is a schematic diagram of the installation of the precision ranging module in this invention;

[0068] Figure 6 This is a schematic diagram of the installation of the interference alignment component in this invention;

[0069] Figure 7 This is a schematic diagram of the surface profile measurement of the reference surface of a standard spherical lens in this invention;

[0070] Figure 8 This is a schematic diagram of the test results of the experimental examples of the present invention;

[0071] Where A represents the background wavefront of the detection cavity, B represents the transmitted wavefront of the standard lens, C represents the transmitted wavefront of lens 1 under test, D represents the transmitted wavefront of lens 2 under test, and E represents a schematic diagram of the alignment state of the interference alignment assembly.

[0072] The attached figures are labeled as follows: 1-Large-aperture planar interferometer, 2-Lens to be tested, 3-Large-aperture computational hologram, 4-Attitude alignment module, 5-Precision ranging module, 6-Large-aperture standard spherical lens, 7-Interference alignment assembly, 8-L-shaped limiting block, 9-Profilometer probe, 10-Reference surface, 31-Substrate, 32-Main test area, 33-Alignment area, 34-Off-axis calibration area. Detailed Implementation

[0073] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments.

[0074] Therefore, all other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0075] Example 1

[0076] This embodiment provides an integrated shape detection device for large-aperture long focal length off-axis lenses, used to detect the shape parameters (including transmitted wavefront, back intercept, and off-axis amount) of large-aperture long focal length off-axis lenses.

[0077] like Figure 1 As shown, the testing device includes a large-aperture plane interferometer 1, a lens under test 2, a large-aperture computational holographic plate 3, an attitude alignment module 4, and a precision ranging module 5. The large-aperture plane interferometer 1, the lens under test 2, the large-aperture computational holographic plate 3, the attitude alignment module 4, and the precision ranging module 5 are all mounted on the air-bearing vibration isolation platform using their respective fixtures (in this application, the fixture used to install the lens under test 2 is referred to as the lens fixture, and the fixture used to install the large-aperture computational holographic plate 3 is referred to as the holographic plate fixture), which facilitates the positioning and adjustment of each component.

[0078] like Figure 4 As shown, each tooling is equipped with an L-shaped limiting block 8 at its bottom; when installing each component, the bottom of the component is limited by the L-shaped limiting block 8 to reduce the error introduced by the component installation.

[0079] The large-aperture plane interferometer 1 is used to generate and analyze interference fringes and calculate the transmitted wavefront data of the lens 2 under test. During measurement, the large-aperture plane interferometer 1 emits a parallel laser beam. Part of the parallel laser beam is reflected by the reference mirror of the large-aperture plane interferometer 1 to form a reference beam, and the other part of the parallel laser beam passes through the reference mirror of the large-aperture plane interferometer 1 to form a measurement beam. The measurement beam returns to the large-aperture plane interferometer 1 after passing through the optical path, and interferes with the reference beam to form interference fringes. By analyzing the interference fringes, the wavefront distribution can be obtained. Preferably, the measuring aperture of the large-aperture plane interferometer 1 needs to be larger than the size of the lens 2 under test so that the full aperture measurement of the lens 2 under test can be completed in one operation.

[0080] The large-aperture computational hologram 3 is used for aberration compensation in the detection optical path of the lens 2 under test. The large-aperture computational hologram 3 uses fused silica or microcrystalline material as a substrate, and its aperture is not smaller than the size of the lens 2 under test, similar to the large-aperture plane interferometer 1, to achieve a single full-aperture measurement. Figure 3 As shown, the surface of the large-diameter computational holographic plate 3 is polished and etched with a main test area 32, an alignment area 33, and an off-axis calibration area 34. Among them:

[0081] like Figure 3As shown, the main test area 32 is etched within the light-transmitting aperture of the large-aperture computational hologram 3 to compensate for aberrations in the measurement optical path. Based on the aberration compensation principle, the main test area 32 is designed using a ray tracing method after setting the distance between the lens under test 2 and the large-aperture computational hologram 3 to a specific value, achieving zero aberration in the detection system while shortening the detection optical path length to within 1 meter. Adhering to the principle of equal optical path length for all rays within the detection aperture, the diffraction wave of the main test area 32 is selected as order -1, and the phase characterization of the pattern is as follows:

[0082] ;

[0083] in, Represents the number of Zernike terms, Let i represent the Zernike standard polynomial. The Zernike standard polynomial represents the first... Term coefficient, Represents the normalized radial ray coordinates, This represents the coordinates of the angular ray.

[0084] When designing the graphics for the main test area 32, a tilt angle was also introduced. Therefore, such as Figure 1 As shown, the large-aperture computational holographic plate 3 is tilted, and the angle between the normal of the large-aperture computational holographic plate 3 and the measurement beam is . The tilt angle of the large-aperture holographic plate 3 was calculated. The specific angle will affect the final measurement result. Therefore, in order to improve the accuracy of shape parameter measurement, this tilt angle... The optimal condition is achieved by tilting the large-aperture computational hologram 3 so that its 0th-order reflected spot deviates from the imaging field of the large-aperture planar interferometer 1, thus eliminating the influence of non-working-order stray light on the measurement results. After tilting the large-aperture computational hologram 3, its corresponding tilt aberration is... Large-aperture planar interferometer 1 field of view angle Compared with aperture S and tilt aberration Satisfying Relationship: The field of view angle is obtained based on the tilt aberration. Then, if the tilt angle Greater than the field of view This allows the non-working stray light from the large-aperture computational hologram 3 to be deflected out of the imaging field of the large-aperture planar interferometer 1.

[0085] like Figure 3As shown, alignment region 33 is used to monitor the test attitude of the large-aperture computational hologram 3. Alignment region 33 has an overall L-shaped structure, and it is etched at the three corners outside the light-transmitting aperture of the large-aperture computational hologram 3. The number and direction of its interference fringes can reflect the two-dimensional attitude deviation of the large-aperture computational hologram (3). The pattern of alignment region 33 adopts an equally spaced grating structure, and the -3rd or 3rd order diffraction angle of the grating is designed to be equal to the tilt angle of the large-aperture computational hologram 3. The alignment process of the alignment area 33 is as follows: the large-aperture computational hologram 3 is moved into the field of view of the large-aperture planar interferometer 1. The beam generated by the diffraction of the measurement beam of the large-aperture planar interferometer 1 through the alignment pattern interferes with the reference beam of the large-aperture planar interferometer 1 and forms interference fringes. The two-dimensional orientation of the large-aperture computational hologram 3 is adjusted, and when the interference fringes are minimized, it indicates that the large-aperture computational hologram 3 has met the measurement conditions and the alignment is completed.

[0086] like Figure 3 As shown, the off-axis calibration area 34 is etched along the edge of the substrate 31 of the large-aperture computational holographic plate 3 in the off-axis direction of the lens, and is distributed in a rectangular pattern. The dimensions of the rectangle along the off-axis direction of the lens are used to calibrate the off-axis amount of the lens under test 2 relative to the computational hologram. The pattern of the off-axis calibration area 34 is the same as that of the alignment area 33, and interference fringes can be formed simultaneously within the field of view of the large-aperture planar interferometer 1. When the lens under test 2 is moved into the test optical path (i.e., into the detection cavity of the large-aperture planar interferometer 1), the lens under test 2 is translated along the off-axis direction until the interference fringes of the off-axis calibration area 34 are just fully exposed, and the interference fringes of the off-axis calibration area 34 and the main test area 32 appear without gaps. This indicates that the lens under test 2 is placed in the ideal off-axis position, that is, the off-axis amount of the lens under test 2 is ideally adjusted.

[0087] like Figure 1 , Figure 6 As shown, the attitude alignment module 4 includes a collimating light aiming component and an interference alignment component 7, which are used to monitor the attitude changes of the lens under test 2 in real time and reduce optical path misalignment errors. The collimating light aiming component consists of a collimating light source and a two-dimensional adjustment structure, and is used for coarse alignment of the lens under test 2. The coarse alignment process is as follows: First, the large-aperture computational hologram 3 is moved into the detection cavity of the large-aperture planar interferometer 1. Then, the collimated laser emitted by the collimating light source passes through the large-aperture computational hologram 3 and is incident on the reference mirror of the large-aperture planar interferometer 1. Next, by adjusting the two-dimensional attitude of the collimating light aiming assembly, the collimated laser reflected by the large-aperture planar interferometer 1 returns to the collimating light source along its original path, establishing an orthogonal relationship between the optical axis directions of the large-aperture planar interferometer 1 (reference plane) and the collimating light aiming assembly. Then, the lens under test 2 is moved into the detection cavity of the large-aperture planar interferometer 1, and the two-dimensional attitude of the lens under test 2 is adjusted so that the collimated laser emitted by the collimating light source returns to the collimating light source along its original path after being reflected by the lens under test 2, thereby achieving coarse alignment between the optical axes of the large-aperture planar interferometer 1 and the lens under test 2.

[0088] The interference alignment assembly 7 is used for the fine alignment of the lens 2 under test. The interference alignment assembly 7 is fixed on the fixture used to mount the lens 2 under test, such as... Figure 6 As shown. The interference alignment assembly 7 includes two polished parallel plates, which are respectively installed diagonally on the lens under test 2 and have a two-dimensional attitude adjustment function. The parallel plates have an aperture ≤100mm, a surface shape ≤1λ, and a front-to-back surface parallelism ≤5″. The front surface of the parallel plate facing the large-aperture planar interferometer 1 is coated with a high-reflection film. This interference alignment assembly 7 is used for the fine alignment of the lens under test 2. The fine alignment process is as follows: first, the lens under test 2 and the interference alignment assembly 7 are moved into the detection cavity of the large-aperture planar interferometer 1, with the planar side of the lens under test 2 facing the large-aperture planar interferometer 1; then, the two-dimensional attitude of the lens under test 2 and the interference alignment assembly 7 is adjusted so that the lens under test 2 and the interferometer 1 are aligned. If the alignment component 7 can generate interference fringes with the large-aperture plane interferometer 1 with minimal fringes, then the optical axis of the lens under test 2 is aligned with the optical axis of the alignment component 7. When measuring the lens wavefront, rotate the fixture on which the lens under test 2 is mounted so that the convex surface of the lens under test 2 faces the large-aperture plane interferometer 1. Keep the alignment component 7 stationary and adjust the lens under test to minimize the interference fringes between the alignment component 7 and the large-aperture plane interferometer 1. This indicates that the lens has been adjusted to the ideal orientation. At this point, by monitoring the direction and number of interference fringes, changes in the lens orientation can be determined in real time.

[0089] The precision ranging module 5 is used to measure the distance between the large-aperture computational holographic plate 3, the lens under test 2, and the standard lens. It consists of two high-precision distance sensors, symmetrically installed on both sides of the fixture used to mount the large-aperture computational holographic plate 3. Figure 5 As shown, two distance sensors measure the distance from the current position to the surface of the fixture for the lens under test 2, and take the average value as the distance between the large-aperture computational hologram 3 and the fixture for the lens under test 2. Since the back-intercept detection method measures the difference in distance between the lens under test 2 and the standard lens to the large-aperture computational hologram 3, when the positions of the lens under test 2, the standard lens, and the large-aperture computational hologram 3 are fixed in the fixture, the measurement range of the precision ranging module 5 only needs to exceed the distance between the fixture for the lens under test 2 and the fixture for the large-aperture computational hologram 3. Furthermore, it is not necessary to directly measure the distance between the two polished elements, thus avoiding the use of a more expensive mirror ranging system.

[0090] During testing, such as Figure 1As shown, the detection optical path is as follows: a large-aperture plane interferometer 1 emits a parallel laser beam, part of which is reflected by the reference mirror of the large-aperture plane interferometer 1 to form a reference beam; another part of the parallel laser beam passes through the reference mirror of the large-aperture plane interferometer 1 to form a measurement beam. The measurement beam passes through the lens under test 2 and is incident on the large-aperture computational hologram 3. After being reflected by the large-aperture computational hologram 3, it returns to the large-aperture plane interferometer 1 along the original path. The measurement beam and the reference beam form interference fringes in the large-aperture plane interferometer 1, and the wavefront distribution is obtained by analyzing the interference fringes.

[0091] After measuring the wavefront distribution, the lens under test 2 is moved axially to ensure that the defocus aberration of the transmitted wavefront of the lens under test 2 is no greater than λ / 20. The distance between the lens under test 2 and the large-aperture calculation hologram 3 is measured using the precision ranging module 5. The lens under test 2 is replaced with a standard lens with a known back intercept, and the above measurement is repeated. Based on the distance between the lens under test 2 and the large-aperture calculation hologram 3, the distance between the standard lens and the large-aperture calculation hologram 3, and the back intercept of the standard lens, the back intercept and off-axis amount of the lens under test 2 are calculated.

[0092] Furthermore, before conducting formal testing using the detection device, it is necessary to calibrate the background wavefront of the detection cavity using a large-aperture standard spherical lens 6. For example... Figure 2 As shown, specifically:

[0093] Move the large-aperture standard spherical lens 6 into the detection cavity of the large-aperture planar interferometer 1, and adjust the attitude of the large-aperture standard spherical lens 6 and the reference mirror of the large-aperture planar interferometer 1 so that the reflection point of the planar standard reference surface of the large-aperture planar interferometer 1 deviates from the field of view and the reflection point of the reference surface 10 of the large-aperture standard spherical lens 6 is located at the center of the field of view of the large-aperture planar interferometer 1.

[0094] Next, the large-aperture computational hologram 3 is moved into the detection cavity of the large-aperture planar interferometer 1. The axial position and two-dimensional orientation of the large-aperture computational hologram 3 are adjusted so that the axial distance between the large-aperture computational hologram 3 and the large-aperture standard spherical lens 6 is h, and the interference fringes between the -1st order diffraction wave in the main test area of ​​the large-aperture planar interferometer 1 and the reference beam of the large-aperture standard spherical lens 6 are minimized. The computational holographic wavefront measured by the large-aperture planar interferometer 1 is recorded as the wavefront. The surface shape of the reference surface 10 of the large-aperture standard spherical lens 6 is measured by the profilometer probe 9 and denoted as . (like Figure 7 (as shown); then the background wavefront of the detection cavity Represented as:

[0095] ;

[0096] Wherein, the spacing h satisfies the following relationship:

[0097] ;

[0098] in, The fitted radius of curvature of the reference surface 10 of the large-aperture standard spherical lens 6 is represented. This represents the radius of curvature of the first-order diffraction wavefront in the main test area of ​​the large-aperture holographic plate.

[0099] Example 2

[0100] This embodiment provides a method for integrated shape and properties testing of large-aperture long-focal-distance axial lenses. It adopts the integrated shape and properties testing device for large-aperture long-focal-distance axial lenses described in Embodiment 1, which is used to test the shape and properties parameters (including the transmitted wavefront, back intercept, and off-axis amount) of large-aperture long-focal-distance off-axis lenses.

[0101] When using a large-aperture, long-focal-distance axial lens shape-integrated inspection device for shape-integrated inspection, the following steps are included:

[0102] Before testing, the lens to be tested 2 and the large-aperture computational holographic board 3 are installed on their respective fixtures, so that they are in close contact with the L-shaped limiting block 8 at the bottom of the corresponding fixture, ensuring that the components are clamped in a specific position of the fixture during each measurement, thereby reducing the error caused by component clamping.

[0103] The specific steps for testing are as follows:

[0104] Step 1, Calibrate the cavity background;

[0105] like Figure 2 As shown, the large-aperture standard spherical lens 6 is moved into the detection cavity of the large-aperture planar interferometer 1, and the attitudes of the large-aperture standard spherical lens 6, the large-aperture planar interferometer 1, and the reference mirror of the large-aperture planar interferometer 1 are adjusted so that the reflection point of the planar standard reference surface of the large-aperture planar interferometer 1 is deviated from the field of view and the reflection point of the reference surface 10 of the large-aperture standard spherical lens 6 is located at the center of the field of view of the large-aperture planar interferometer 1.

[0106] Next, the large-aperture computational hologram 3 is moved into the detection cavity of the large-aperture planar interferometer 1. The axial position and two-dimensional orientation of the large-aperture computational hologram 3 are adjusted so that the axial distance between the large-aperture computational hologram 3 and the large-aperture standard spherical lens 6 is h, and the interference fringes between the -1st order diffraction wave in the main test area of ​​the large-aperture planar interferometer 1 and the reference beam of the large-aperture standard spherical lens 6 are minimized. The computational holographic wavefront measured by the large-aperture planar interferometer 1 is recorded as the wavefront. The surface shape of the reference surface 10 of the large-aperture standard spherical lens 6 is measured by the profilometer probe 9 and denoted as . (like Figure 7 (as shown); then the background wavefront of the detection cavity Represented as:

[0107] ;

[0108] Wherein, the spacing h satisfies the following relationship:

[0109] ;

[0110] in, The fitted radius of curvature of the reference surface 10 of the large-aperture standard spherical lens 6 is represented. This represents the radius of curvature of the first-order diffraction wavefront in the main test area of ​​the large-aperture holographic plate.

[0111] Step 2, align the holographic panel;

[0112] Remove the large-aperture standard spherical lens 6 and adjust the reflection point of the reference surface 10 of the large-aperture standard spherical lens 6 to the center of the field of view.

[0113] The large-aperture computational hologram 3 is moved into the detection cavity of the large-aperture planar interferometer 1, and the two-dimensional orientation of the large-aperture computational hologram 3 is adjusted to minimize the interference fringes in the alignment area 33 and the off-axis calibration area 34 of the large-aperture computational hologram 3.

[0114] Step 3, lens installation and position adjustment;

[0115] Move the lens 2 to be tested into the detection cavity of the large-aperture planar interferometer 1, and move the lens 2 to be tested axially. Adjust the distance between the lens 2 to be tested and the large-aperture calculation holographic plate 3 to the design distance (this design distance is a distance known before the detection, i.e., the preset value).

[0116] Step 4: Align the lens off-axis;

[0117] The lens 2 to be tested is translated along the off-axis direction so that the interference fringes of the off-axis calibration area of ​​the large-aperture computational holographic plate 3 are completely exposed.

[0118] Step 5, adjust the lens posture;

[0119] The collimating light aiming component and the interference alignment component of the attitude alignment module 4 are respectively established with the reference plane of the large-aperture plane interferometer 1 to establish an orthogonal relationship of the optical axis; the two-dimensional attitude of the lens under test 2 is adjusted so that the collimating light emitted by the collimating light aiming component of the attitude alignment module 4 is reflected by the surface of the lens under test 2 and returns to the collimating light aiming component to complete the coarse alignment of the lens attitude, and the interference fringes of the interference alignment component are minimized to achieve fine alignment of the lens attitude.

[0120] When aligning the attitude alignment module 4 using the attitude alignment module 4, it includes coarse alignment and fine alignment; coarse alignment is achieved by the collimating light aiming component, and fine alignment is achieved by the interference alignment component.

[0121] The process of coarse alignment using a collimating light aiming assembly is as follows: First, the large-aperture computational hologram 3 is moved into the detection cavity of the large-aperture planar interferometer 1. The collimated laser emitted by the collimating light source passes through the large-aperture computational hologram 3 and is incident on the reference mirror of the large-aperture planar interferometer 1. Then, by adjusting the two-dimensional orientation of the collimating light aiming assembly, the collimated laser reflected by the large-aperture planar interferometer 1 returns to the collimating light source along its original path, establishing an orthogonal relationship between the optical axis directions of the large-aperture planar interferometer 1 (reference plane) and the collimating light aiming assembly. Then, the lens under test 2 is moved into the detection cavity of the large-aperture planar interferometer 1, and the two-dimensional orientation of the lens under test 2 is adjusted so that the collimated laser emitted by the collimating light source returns to the collimating light source along its original path after being reflected by the lens under test 2, thereby achieving coarse alignment between the optical axes of the large-aperture planar interferometer 1 and the lens under test 2.

[0122] The process of fine alignment using the interference alignment component 7 is as follows: First, the lens under test 2 and the interference alignment component 7 are moved into the detection cavity of the large-aperture plane interferometer 1, with the plane side of the lens under test 2 facing the large-aperture plane interferometer 1. Then, the two-dimensional orientation of the lens under test 2 and the interference alignment component 7 is adjusted so that both the lens under test 2 and the interference alignment component 7 can produce interference fringes with the large-aperture plane interferometer 1 with the fewest possible fringes. This indicates that the optical axis of the lens under test 2 is aligned with the optical axis of the interference alignment component 7. When measuring the lens wavefront, the fixture on which the lens under test 2 is mounted is rotated so that the convex surface of the lens under test 2 faces the large-aperture plane interferometer 1. The interference alignment component 7 is kept stationary, and the lens under test 2 is adjusted to minimize the interference fringes between the interference alignment component 7 and the large-aperture plane interferometer 1. This indicates that the lens has been adjusted to the ideal orientation. At this time, by monitoring the direction and number of interference fringes, the lens orientation change can be judged in real time.

[0123] Step 6, wavefront measurement;

[0124] A large-aperture planar interferometer 1 emits a parallel laser beam, and the wavefront data of the lens under test 2 is measured through the large-aperture planar interferometer 1. Then the transmitted wavefront of the lens 2 under test Represented as:

[0125] .

[0126] Step 7, measure the back intercept and off-axis distance;

[0127] The transmitted wavefront of lens 2 under test was measured. Then, the lens under test 2 is moved along the axial direction to ensure that the defocus aberration of the lens under test 2 is no greater than λ / 20; the distance between the large-aperture calculation holographic plate 3 fixture and the surface of the lens under test 2 fixture is measured by the two distance sensors of the precision ranging module 5. , Then through the formula The distance D is calculated.

[0128] Then use the known intercept The standard lens was replaced with the lens under test 2, and the distance between the standard lens and the large-aperture plane interferometer 1 was measured. .

[0129] Based on distance D, distance and intercept The back intercept of lens 2 under test was calculated. ; back intercept The calculation formula is:

[0130] ;

[0131] Based on back intercept Off-axis angle of lens 2 under test The vertical off-axis value of lens 2 under test was calculated. Vertical off-axis amount The calculation formula is:

[0132] .

[0133] Test case

[0134] This experimental example uses the detection device described in Example 1 and the detection method described in Example 2 to test the shape parameters of a standard lens and two 400nm aperture off-axis plano-convex lenses. Specifically:

[0135] I. Testing Equipment:

[0136] 1. 600mm plane interferometer;

[0137] 2. Standard lens (back focal length 12709.8mm, vertical off-axis distance 498.54mm, off-axis angle 2.248°);

[0138] 3. 410mm diameter computational holographic plate;

[0139] 4. 400nm aperture off-axis plano-convex lens

[0140] 5. Precision ranging module (ranging accuracy 0.1mm, measuring range 0~500mm);

[0141] 6. Attitude alignment module.

[0142] For the rest, please refer to Example 1.

[0143] II. Experimental Procedure:

[0144] The detection method of Example 2 was used to test a standard lens and two 400nm aperture off-axis plano-convex lenses.

[0145] III. Experimental Results:

[0146] The measurement results of the shape parameters are shown in Table 1:

[0147]

[0148] The images obtained from the experiment, such as Figure 8 As shown.

[0149] IV. Results Analysis:

[0150] The shape parameters of two lenses under test were measured using this experimental example. No abnormal stray points were found in the transmitted wavefront distribution. When the defocus aberration was controlled within λ / 20, the back intercept deviations of the two lenses under test relative to the standard lens were calculated to be -0.19 mm and -4.06 mm, respectively. Considering factors such as clamping, repeatability, ranging error, and defocusing error, an additional back intercept error of approximately 0.8 mm was introduced. Therefore, the relative detection accuracy of both the back intercept and off-axis measurement was approximately 0.007%. This device and method can also be used to measure the consistency of shape parameters of similar batches of lenses.

Claims

1. A device for integrated detection of the shape properties of a large-aperture, long-focal-distance axial lens, characterized in that: It includes a large-aperture planar interferometer (1), a lens under test (2), a large-aperture computational hologram (3), an attitude alignment module (4), and a precision ranging module (5); The surface of the large-aperture computational holographic plate (3) is etched with a main test area (32), an alignment area (33), and an off-axis calibration area (34). The main test area (32) is located within the light-transmitting aperture of the large-aperture computational holographic plate (3) and is used to compensate for aberrations in the measurement optical path. The alignment area (33) is located at the three corners outside the light-transmitting aperture of the large-aperture computational holographic plate (3) and is used to monitor the test posture of the large-aperture computational holographic plate (3). The off-axis calibration area (34) is rectangular and is located at the edge of the substrate (31) of the large-aperture computational holographic plate (3) along the off-axis direction of the lens, and is used to calibrate the off-axis amount of the lens (2) under test. The attitude alignment module (4) includes a collimating light aiming component and an interference alignment component (7). During attitude alignment, the attitude of the lens under test (2) is adjusted so that the collimating light emitted by the collimating light aiming component is reflected back to the collimating light aiming component after being reflected by the surface of the lens under test (2), thus completing the coarse alignment of the lens attitude. Then, the attitude of the lens under test (2) is finely aligned by the interference fringes of the interference alignment component (7). The precision ranging module (5) is used to measure the distance between the lens (2) to be measured and the large-aperture calculation holographic plate (3); The measurement optical path is as follows: A parallel laser beam is emitted from a large-aperture plane interferometer (1). Part of the parallel laser beam is reflected by the reference mirror of the large-aperture plane interferometer (1) to form a reference beam; another part of the parallel laser beam passes through the reference mirror of the large-aperture plane interferometer (1) to form a measurement beam. The measurement beam passes through the lens under test (2) and is incident on the large-aperture computational hologram (3). After being reflected by the large-aperture computational hologram (3), it returns to the large-aperture plane interferometer (1) along the original path. The measurement beam and the reference beam form interference fringes, and the wavefront is obtained by analyzing the interference fringes. The test lens (2) is then moved axially to make the defocus aberration of the transmitted wavefront of the test lens (2) no greater than λ / 20. The distance between the test lens (2) and the large-aperture calculation hologram (3) is measured using a precision ranging module (5). The test lens (2) is replaced with a standard lens with a known back intercept, and the above measurement is repeated. The back intercept and off-axis amount of the test lens (2) are calculated based on the distance between the test lens (2) and the large-aperture calculation hologram (3), the distance between the standard lens and the large-aperture calculation hologram (3), and the back intercept of the standard lens.

2. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 1, characterized in that: The substrate (31) of the large-aperture computational holographic plate (3) is made of fused silica or microcrystalline material, and the aperture of the large-aperture computational holographic plate (3) is greater than or equal to the aperture of the lens (2) to be tested.

3. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 1, characterized in that: The large-aperture computational hologram (3) is tilted, and the tilt angle between the normal of the large-aperture computational hologram (3) and the optical axis of the measurement beam is... Conditions met: Tilting the large-aperture computational hologram (3) causes the 0th order reflected light spot of the large-aperture computational hologram (3) to deviate from the imaging field of the large-aperture planar interferometer (1).

4. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 3, characterized in that: The diffraction wave in the main test area (32) is selected as order -1, and the phase characterization of the pattern is as follows: ； in, Represents the number of Zernike terms, Let i represent the Zernike standard polynomial. The Zernike standard polynomial represents the first... Term coefficient, Represents the normalized radial ray coordinates, This represents the coordinates of the angular ray.

5. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 3, characterized in that: The alignment area (33) adopts an equally spaced grating structure, and the -3rd or 3rd order diffraction angle of the grating is equal to the tilt angle of the large aperture computational hologram (3). .

6. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 1, characterized in that: The collimating light aiming assembly is used for coarse alignment of the lens under test (2), including a collimating light source and a two-dimensional adjustment frame; The interference alignment assembly (7) includes two polished parallel plates, and the front surface of the parallel plate facing the large-aperture plane interferometer (1) is coated with a high-reflectivity film. It is mounted on the tooling of the lens under test (2) and can move synchronously with the lens for precise alignment of the attitude of the lens under test (2).

7. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 6, characterized in that: The process of coarse alignment using the collimating light aiming assembly is as follows: First, the large-aperture computational hologram (3) is moved into the detection cavity of the large-aperture planar interferometer (1), and the collimated laser emitted by the collimating light source passes through the large-aperture computational hologram (3) and is incident on the large-aperture planar interferometer (1); then, by adjusting the two-dimensional attitude of the collimating light aiming assembly, the collimated laser reflected by the large-aperture planar interferometer (1) returns to the collimating light source along the original path; then, the lens under test (2) is moved into the detection cavity of the large-aperture planar interferometer (1), and the two-dimensional attitude of the lens under test (2) is adjusted so that the collimated laser emitted by the collimating light source returns to the collimating light source along the original path after being reflected by the lens under test (2); The process of fine alignment using the interference alignment component (7) is as follows: First, the lens to be tested (2) and the interference alignment component (7) are moved into the detection cavity of the large-aperture plane interferometer (1), and the plane side of the lens to be tested (2) faces the large-aperture plane interferometer (1); then, the two-dimensional orientation of the lens to be tested (2) and the interference alignment component (7) is adjusted so that both the lens to be tested (2) and the interference alignment component (7) can produce interference fringes with the large-aperture plane interferometer (1) with the fewest fringes.

8. The integrated shape detection device for a large-aperture, long-focal-distance axial lens as described in claim 1, characterized in that: The lens to be tested (2) is mounted on the lens fixture, and the large-aperture computational holographic plate (3) is mounted on the holographic plate fixture. L-shaped limit blocks (8) are provided on the table surfaces of both the lens fixture and the holographic plate fixture.

9. A method for integrated detection of the shape and properties of a large-aperture, long-focal-distance axial lens, characterized in that, The device for integrated shape and properties testing of large-aperture, long-focal-distance axial lenses, as described in any one of claims 1-8, includes the following steps when performing integrated shape and properties testing using this device: Step 1, Calibrate the cavity background; Move the large-aperture standard spherical lens (6) into the detection cavity of the large-aperture plane interferometer (1), adjust the attitude of the large-aperture standard spherical lens (6) and the reference mirror of the large-aperture plane interferometer (1), so that the reflection point of the plane standard reference surface of the large-aperture plane interferometer (1) deviates from the field of view and the reflection point of the reference surface (10) of the large-aperture standard spherical lens (6) is located at the center of the field of view of the large-aperture plane interferometer (1); Next, the large-aperture computational hologram (3) is moved into the detection cavity of the large-aperture planar interferometer (1). The axial position and two-dimensional orientation of the large-aperture computational hologram (3) are adjusted so that the axial distance between the large-aperture computational hologram (3) and the large-aperture standard spherical lens (6) is h, and the interference fringes between the -1st order diffraction wave in the main test area of ​​the large-aperture planar interferometer (1) and the reference beam of the large-aperture standard spherical lens (6) are minimized. The computational holographic wavefront measured by the large-aperture planar interferometer (1) is recorded as the wavefront. The surface shape of the reference surface (10) of the large-aperture standard spherical lens (6) is measured by the profilometer probe (9) and recorded as . Then the background wavefront of the detection cavity Represented as: ； Wherein, the spacing h satisfies the following relationship: ； in, The fitted radius of curvature of the reference surface (10) of the large-aperture standard spherical lens (6) is represented. Indicates the radius of curvature of the first-order diffraction wavefront in the main test area of ​​the large-aperture computational hologram (3); Step 2, align the holographic panel; Remove the large-aperture standard spherical lens (6) and adjust the reflection point of the plane standard reference surface of the large-aperture plane interferometer (1) to the center of the field of view; The large-aperture computational hologram (3) is moved into the detection cavity of the large-aperture planar interferometer (1), and the two-dimensional orientation of the large-aperture computational hologram (3) is adjusted to minimize the interference fringes in the alignment area (33) and off-axis calibration area (34) of the large-aperture computational hologram (3). Step 3, lens installation and position adjustment; Move the lens to be tested (2) into the detection cavity of the large-aperture plane interferometer (1), and move the lens to be tested (2) axially. Adjust the distance between the lens to be tested (2) and the large-aperture calculation holographic plate (3) to the design distance. Step 4: Align the lens off-axis; The lens (2) to be tested is translated along the off-axis direction so that the interference fringes of the off-axis calibration area of ​​the large-aperture calculation holographic plate (3) are completely exposed; Step 5, adjust the lens posture; The collimating light aiming component and the interference alignment component of the attitude alignment module (4) are respectively established with the reference plane of the large aperture plane interferometer (1) to establish an orthogonal relationship of the optical axis; the two-dimensional attitude of the lens under test (2) is adjusted so that the collimating light emitted by the collimating light aiming component of the attitude alignment module (4) is reflected by the surface of the lens under test (2) and returns to the collimating light aiming component to complete the coarse alignment of the lens attitude, and the interference fringes of the interference alignment component are minimized to achieve fine alignment of the lens attitude; Step 6, wavefront measurement; A large-aperture plane interferometer (1) emits a parallel laser beam, and the wavefront data of the lens under test (2) is measured by the large-aperture plane interferometer (1). Then the transmitted wavefront of the lens (2) under test Represented as: ； Step 7, measure the back intercept and off-axis distance; The transmitted wavefront of the lens under test (2) was measured. Then, the lens under test (2) is moved along the axis to make the defocus aberration of the transmitted wavefront of the lens under test (2) no greater than λ / 20. The distance D between the lens fixture and the corresponding position on the holographic plate fixture is measured by the precision ranging module (5). Then, the known intercept is used. The standard lens was replaced with the lens under test (2), and the distance between the standard lens fixture and the large-aperture computational hologram (3) was measured. ; Based on distance D, distance and intercept The back intercept of the lens (2) under test was calculated. ; Based on back intercept , the off-axis angle of the lens under test (2) The vertical off-axis value of the lens (2) under test was calculated. .

10. The method for integrated detection of the shape and properties of a large-aperture, long-focal-distance axial lens as described in claim 9, characterized in that: In step 7, the back intercept The calculation formula is: ； Vertical off-axis The calculation formula is: 。

Images