Wafer box pressing equipment

Abstract

The invention relates to the technical field of wafer processing, and discloses wafer box pressing equipment which comprises a table body and further comprises a frame body installed at the top of the table body, a water tank arranged on the table body and used for storing pure water, a pressing mechanism arranged at the top of the table body and used for pressing a wafer box into the pure water, and a protection mechanism arranged in the water tank and used for protecting the wafer box from being damaged. The water tank is arranged in the frame body and used for protecting the wafer box, the positioning mechanism is arranged on the frame body and used for pushing the wafer box to the middle position of the water tank, and the material pressing mechanism comprises a fixing plate which is fixedly connected to the top of the table body. The electric push rod drives the lifting plate to ascend and descend, then the first rotating rod is moved to the proper position above the wafer box through the hinge plate, then the driving motor drives the first rotating rod to turn over and drives the pressing roller to press downwards, the position of the pressing roller can be flexibly adjusted, accurate pressing can be achieved regardless of the size of the wafer box, the material pressing effect is effectively improved, and the working efficiency is improved. Therefore, the wafer box can be stably pressed into the pure water.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer processing, in particular to a wafer box pressing equipment. BACKGROUND

[0002] Wafer refers to a silicon wafer used for making silicon semiconductor circuits, and its raw material is silicon. High-purity polysilicon is dissolved and added to a silicon crystal seed, then slowly pulled out to form a cylindrical single crystal silicon. After the silicon rod is ground and polished, it is cut into slices to form a silicon wafer, that is, a wafer. During the manufacturing process of the wafer, the wafer surface needs to be kept wet and cleaned after polishing by a polishing machine. Therefore, the wafer is often soaked in pure water for temporary storage. The wafer loading box is made of PP material, and the PP material wafer box will float in water, causing the wafer to be exposed to the water surface.

[0003] According to the wafer box pressing equipment disclosed in Chinese Patent No. CN222690641U, a main support frame is provided with a water tank, auxiliary installation assemblies are arranged on both sides of the water tank on the main support frame, a cylinder installation assembly is arranged on the auxiliary installation assembly, a lower pressing power assembly is arranged on the cylinder installation assembly, a lower pressing guide assembly is arranged on the auxiliary installation assembly, a lower pressing plate is arranged at the moving part of the lower pressing guide assembly, an auxiliary limiting assembly is arranged on one side of the lower pressing plate on the auxiliary installation assembly, a plurality of limiting columns are arranged on the auxiliary installation assembly in an arc shape, a bearing is arranged on the lower pressing plate, an installation rod is arranged on the bearing, an auxiliary groove wheel is arranged at one end of the installation rod, and an auxiliary pressing rod is arranged at the end of the installation rod away from the auxiliary groove wheel. The wafer box pressing equipment has a clever structure design, and effectively avoids the floating phenomenon of the wafer in the water tank, effectively keeping the wafer wet.

[0004] The above-mentioned patent uses an auxiliary pressing rod to press the wafer box, but the position of the auxiliary pressing rod is fixed, and the pressing effect is poor for wafer boxes of different sizes, especially for small wafer boxes. Therefore, a wafer box pressing equipment is proposed to solve the above-mentioned problems. SUMMARY

[0005] The technical problem to be solved by the present application is to provide a wafer box pressing equipment to solve the above-mentioned problems in the prior art.

[0006] To solve the above-mentioned technical problems, the technical scheme adopted by the present application is as follows: a wafer box pressing equipment, comprising a table body, further comprising: a frame body installed on the top of the table body; a water tank arranged on the table body for storing pure water; a pressing mechanism arranged on the top of the table body for pressing the wafer box into the pure water; A protection mechanism is arranged in the interior of the sink to protect the wafer box; A positioning mechanism is arranged on the frame to push the wafer box to the middle position of the sink; The pressing mechanism comprises: A fixed plate is fixedly connected to the top of the table body; A first sliding rod is fixedly connected to the fixed plate; A moving block is slidably sleeved on the first sliding rod, and the moving block is slidably connected to the top of the table body; A first rotating rod is rotatably connected to the top of the moving block; A connecting plate is fixedly connected to the first rotating rod; A sliding groove is formed in the connecting plate; A pressing roller is slidably connected to the inner wall of the sliding groove; A buffer spring is fixedly connected to the first rotating rod and the pressing roller at both ends; A lifting assembly is arranged on the inner wall of the frame; A rotating assembly is arranged on the lifting assembly.

[0007] Preferably, the lifting assembly comprises a fixed block, an electric push rod, a lifting plate, a second rotating rod, and a hinged plate. The fixed block is fixedly connected to the inner wall of the frame. The electric push rod is fixedly installed on the top of the fixed block. The lifting plate is fixedly connected to the top of the output end of the electric push rod. The second rotating rod is rotatably connected to the bottom of the lifting plate. The hinged plate is hingedly connected to the first rotating rod and the second rotating rod at both ends.

[0008] Preferably, the rotating assembly comprises a driving motor, a pinion, and a gear. The driving motor is fixedly installed on the top of the lifting plate. The pinion is fixedly connected to the output end of the driving motor. The number of the second rotating rods at the bottom of the lifting plate is two. The gear is fixedly sleeved on the two second rotating rods, and the two gears are meshed with each other. One of the gears is meshed with the pinion. The second rotating rod is drivingly connected to the first rotating rod through a synchronous belt pulley.

[0009] Preferably, a frame door is hingedly connected to the front of the frame, and the frame door is provided with a coated glass.

[0010] Preferably, the number of the first sliding rods is two. The two first sliding rods are arranged on both sides of the sink, and the two first sliding rods are connected through the first rotating rod.

[0011] Preferably, the protection mechanism comprises an electromagnet, a second sliding rod, a sliding plate, a magnet block, a protection pad, a return spring, the electromagnet is fixedly installed on the left and right sides of the inner wall of the sink, the second sliding rod is fixedly connected to the inner wall of the sink, and the number of the second sliding rod is two, the sliding plate is slidably sleeved on the two second sliding rods, the number of the sliding plate is two, the two sliding plates are symmetrically arranged on the second sliding rod, the magnet block is fixedly connected to one side of the sliding plate close to the electromagnet, and the opposite surface of the magnet block and the electromagnet has the same magnetism, the protection pad is arranged on the side of the sliding plate away from the electromagnet, and the return spring is sleeved on the second sliding rod, and the two ends of the return spring are fixedly connected with the inner wall of the sink and the other end of the sliding plate respectively.

[0012] Preferably, the positioning mechanism comprises a fan, a main pipe, a first branch pipe and an air outlet pipe, the fan is fixedly installed on the back of the frame body, one end of the main pipe is in communication with the output end of the fan, one end of the first branch pipe is in communication with the other end of the main pipe, and a first adjusting valve is arranged on the first branch pipe, one end of the air outlet pipe is in communication with the first branch pipe, and the other end of the air outlet pipe penetrates through the outer wall of the sink.

[0013] Preferably, the positioning mechanism further comprises a second branch pipe, an air outlet frame and a mesh plate, one end of the second branch pipe is in communication with the main pipe, the other end of the second branch pipe penetrates through the frame body and is in communication with the air outlet frame, a second adjusting valve is arranged on the second branch pipe, the air outlet frame is fixedly connected to the inner wall top of the frame body, and the mesh plate is fixedly connected to the inner wall of the air outlet frame.

[0014] The above technical scheme can bring the following beneficial effects: 1. The wafer box pressing equipment can flexibly adjust the position of the pressing roller, accurately press down regardless of the size of the wafer box, effectively improve the pressing effect, and ensure that the wafer box can be stably pressed into pure water.

[0015] 2. When the pressing roller contacts the wafer box, the buffer spring can effectively buffer the pressure to avoid rigid collision between the pressing roller and the wafer box, which greatly reduces the impact force on the wafer box and reduces the risk of damage to the wafer inside the wafer box due to collision, ensuring the quality of the wafer.

[0016] 3、The wafer box pressing equipment, the protection mechanism utilizes the principle that the electromagnet and the magnet block repel each other, after the wafer box is placed into the sink, the electromagnet is electrified to generate repulsion, the magnet block and the sliding plate connected with it move to the inside, make the protection pad and the wafer box two sides closely contact, can effectively prevent the collision of wafer box with the left and right sides of the sink during the soaking process, provide reliable protection for the wafer box, avoid the damage of wafer box or internal wafer caused by collision.

[0017] 4、The wafer box pressing equipment, the through first branch pipe by the air flow of fan blowing is blown out by the air outlet pipe, drives the pure water flow, makes the wafer box move to the appropriate position, facilitates the accurate pressing of compression roller, and the air flow blown out by the air outlet pipe can buffer the wafer box, avoid the collision of wafer box with the front and back sides of the sink wall, cooperate with the protection mechanism, further improve the protection effect of wafer box, improve the stability and reliability of the pressing operation.

[0018] 5、The wafer box pressing equipment, the air flow blown out by the second branch pipe is downward to the top of wafer box through the air outlet frame and the screen plate, makes the wafer box more stable during soaking, solves the problem of unstable position of wafer box in the sink. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is the structural schematic diagram of the present application; Figure 2 It is the back schematic diagram of the present application; Figure 3 It is the internal schematic diagram of the present application; Figure 4 It is the structural schematic diagram of the present application; Figure 5 It is the pressing mechanism schematic diagram of the present application; Figure 6 It is the protection mechanism schematic diagram of the present application; Figure 7 It is the positioning mechanism schematic diagram of the present application; Figure 8 It is the enlarged schematic diagram of A of the present application; Figure 9 It is the enlarged schematic diagram of B of the present application.

[0020] In the figure: 1, table body; 2, frame body; 3, water tank; 4, pressing mechanism; 41, fixed plate; 42, first sliding rod; 43, moving block; 44, first rotating rod; 45, connecting plate; 46, sliding groove; 47, pressing roller; 48, buffer spring; 49, fixed block; 410, electric push rod; 411, lifting plate; 412, second rotating rod; 413, hinged plate; 414, driving motor; 415, pinion; 416, gear; 5, protection mechanism; 51, electromagnet; 52, second sliding rod; 53, sliding plate; 54, magnet block; 55, protection pad; 56, return spring; 6, positioning mechanism; 61, fan; 62, main pipe; 63, first branch pipe; 64, air outlet pipe; 65, second branch pipe; 66, air outlet frame; 67, mesh plate. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0022] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0023] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "setting" should be understood broadly, for example, can be fixedly connected, set, or can be detachably connected, set, or integrally connected, set. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0024] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "several" is two or more, unless otherwise explicitly specified and limited.

[0025] Please refer to Figures 1-9The embodiment of the application is a wafer box pressing equipment, which comprises a table body 1, a frame body 2 installed on the top of the table body 1, a water tank 3 arranged on the table body 1 and used for storing pure water, a pressing mechanism 4 arranged on the top of the table body 1 and used for pressing the wafer box into the pure water, a protection mechanism 5 arranged in the water tank 3 and used for protecting the wafer box, and a positioning mechanism 6 arranged on the frame body 2 and used for pushing the wafer box to the middle position of the water tank 3. The pressing mechanism 4 comprises a fixed plate 41 fixedly connected to the top of the table body 1, a first sliding rod 42 fixedly connected to the fixed plate 41, a moving block 43 slidably sleeved on the first sliding rod 42 and slidably connected to the top of the table body 1, a first rotating rod 44 rotatably connected to the top of the moving block 43, a connecting plate 45 fixedly connected to the first rotating rod 44, a sliding groove 46 formed in the connecting plate 45, a pressing roller 47 slidably connected to the inner wall of the sliding groove 46, and a buffer spring 48 fixedly connected to the first rotating rod 44 and the pressing roller 47. The lifting assembly comprises a fixed block 49, an electric push rod 410, a lifting plate 411, a second rotating rod 412 and a hinged plate 413. The fixed block 49 is fixedly connected to the inner wall of the frame body 2, the electric push rod 410 is fixedly installed on the top of the fixed block 49, the lifting plate 411 is fixedly connected to the top of the output end of the electric push rod 410, the second rotating rod 412 is rotatably connected to the bottom of the lifting plate 411, and the two ends of the hinged plate 413 are hingedly connected to the first rotating rod 44 and the second rotating rod 412. The rotating assembly comprises a driving motor 414, a small gear 415 and a large gear 416. The driving motor 414 is fixedly installed on the top of the lifting plate 411, the small gear 415 is fixedly connected to the output end of the driving motor 414, the number of the second rotating rods 412 on the bottom of the lifting plate 411 is two, the large gear 416 is fixedly sleeved on the two second rotating rods 412 and meshes with each other, and one of the large gears 416 meshes with the small gear 415. The second rotating rod 412 is drivingly connected to the first rotating rod 44 through a synchronous belt wheel. The front of the frame body 2 is hingedly connected with a frame door, the frame door is provided with a coated glass, the number of the first sliding rods 42 is two, the two first sliding rods 42 are arranged on the two sides of the water tank 3 and are connected through the first rotating rod 44. The protection mechanism 5 comprises an electromagnet 51, a second sliding rod 52, a sliding plate 53, a magnet block 54, a protection pad 55 and a reset spring 56. The electromagnet 51 is fixedly installed on the inner wall of the water tank 3, the second sliding rod 52 is fixedly connected to the inner wall of the water tank 3 and has a number of two, the sliding plate 53 is slidably sleeved on the second sliding rod 52, the number of the sliding plates 53 is two, the two sliding plates 53 are symmetrically arranged on the second sliding rod 52, the magnet block 54 is fixedly connected to one side of the sliding plate 53 close to the electromagnet 51 and has the same magnetism as the opposite surface of the electromagnet 51, the protection pad 55 is arranged on the side of the sliding plate 53 away from the electromagnet 51, and the reset spring 56 is sleeved on the second sliding rod 52.And the two ends of the reset spring 56 are fixedly connected with the inner wall of the water tank 3 and the other end of the sliding plate 53 respectively.

[0026] Working principle: place the wafer box in the water tank 3, power on the electromagnet 51, and adjust the magnetic force of the electromagnet 51 by adjusting the current size, drive the magnet block 54 to move inward through the repulsion between the electromagnet 51 and the magnet block 54, so that the protective pad 55 contacts the two sides of the wafer box, and the two sides of the wafer box are protected, the lifting plate 411 is driven to lift through the start of the electric push rod 410, so that the two first rotating rods 44 are moved through the hinged plate 413, and the two first rotating rods 44 are above the wafer box, and the small gear 415 is driven to rotate through the start of the driving motor 414, and the rotation of the small gear 415 drives the two large gears 416 to rotate in opposite directions, thereby driving the two first rotating rods 44 to rotate, and the two compression rollers 47 are driven to flip downward through the connecting plate 45, contact the upper side of the wafer box, and press the wafer box into the pure water, so that the wafer box is completely immersed in the pure water for soaking, and the buffer spring 48 and the sliding groove 46 are arranged to buffer when the compression roller 47 contacts the wafer box, so as to avoid rigid collision between the compression roller 47 and the wafer box, thereby reducing the impact force on the wafer box and reducing the risk of damage to the wafer inside the wafer box, when the wafer box is soaked, the electromagnet 51 is powered off, the sliding plate 53 is reset under the action of the reset spring 56, the compression roller 47 is driven to rotate to the upper side through the start of the driving motor 414, so that the wafer box floats up under the action of the buoyancy, and then the wafer box can be taken out.

[0027] Please refer to Figures 1-9 On the basis of the above embodiment, in another embodiment of the present application, preferably, the positioning mechanism 6 comprises a fan 61, a main pipe 62, a first branch pipe 63, an air outlet pipe 64, the fan 61 is fixedly installed on the back of the frame 2, one end of the main pipe 62 is in communication with the output end of the fan 61, one end of the first branch pipe 63 is in communication with the other end of the main pipe 62, and a first adjusting valve is arranged on the first branch pipe 63, one end of the air outlet pipe 64 is in communication with the first branch pipe 63, and the other end of the air outlet pipe 64 penetrates the outer wall of the water tank 3, the positioning mechanism 6 further comprises a second branch pipe 65, an air outlet frame 66 and a mesh plate 67, one end of the second branch pipe 65 is in communication with the main pipe 62, and the other end of the second branch pipe 65 penetrates the frame 2 and is in communication with the air outlet frame 66, a second adjusting valve is arranged on the second branch pipe 65, the air outlet frame 66 is fixedly connected to the inner wall top of the frame 2, and the mesh plate 67 is fixedly connected to the inner wall of the air outlet frame 66.

[0028] Working principle: when the wafer box is put into the pure water, the fan 61 is started, the fan 61 sends airflow to the first branch pipe 63 and the second branch pipe 65 through the main pipe 62, the airflow in the first branch pipe 63 is blown out through the air outlet pipe 64 on both sides of the water tank 3, so as to drive the pure water to flow, the wafer box flows to the middle position of the water tank 3, so as to assist the pressing mechanism 4 to press down, the pressing roller 47 is in the symmetrical position on the top of the wafer box, and the pressing effect is improved, and the airflow in the second branch pipe 65 blows downward through the mesh plate 67 on the air outlet frame 66, so as to exert a downward force on the top of the wafer box, so that the wafer box is soaked more stably, the airflow size of the air outlet pipe 64 and the air outlet frame 66 can be realized by adjusting the first adjusting valve and the second adjusting valve, so that the positioning effect is not affected by too large or too small airflow.

[0029] The application provides a wafer box pressing equipment, and there are many methods and ways to realize the technical scheme, and the above description is only the preferred embodiment of the application. It should be pointed out that for ordinary skilled in the art, some improvements and decorations can be made without departing from the principle of the application, and these improvements and decorations should be regarded as the protection scope of the application. The components not mentioned in the embodiment can be realized by using the existing technology.

Claims

1. A wafer box pressing device, comprising a table body, characterized in that: Also includes: The frame is installed on the top of the table; A water tank is provided on the table body and is used to store pure water; A pressing mechanism is provided on the top of the table body and is used to press the wafer box into the pure water; A protection mechanism is provided inside the water tank and is used to protect the wafer box; A positioning mechanism is provided on the frame and is used to push the wafer box to the middle position of the water tank; The pressing mechanism includes: A fixed plate, fixedly connected to the top of the table body; a first sliding rod, fixedly connected to the fixed plate; A moving block is slidably sleeved on the first slide rod, and the moving block is slidably connected to the top of the table body; a first rotating rod, rotatably connected to the top of the moving block; A connecting plate, fixedly connected to the first rotating rod; A chute is provided on the connecting plate; a pressure roller, slidably connected to the inner wall of the chute; A buffer spring, with two ends fixedly connected to the first rotating rod and the pressure roller respectively; A lifting assembly is arranged on the inner wall of the frame; The rotating assembly is arranged on the lifting assembly.

2. The wafer box pressing device according to claim 1, characterized in that: The lifting assembly includes a fixed block, an electric push rod, a lifting plate, a second rotating rod, and a hinged plate. The fixed block is fixedly connected to the inner wall of the frame, the electric push rod is fixedly installed on the top of the fixed block, the lifting plate is fixedly connected to the top of the output end of the electric push rod, the second rotating rod is rotatably connected to the bottom of the lifting plate, and the two ends of the hinged plate are respectively hinged to the first rotating rod and the second rotating rod.

3. The wafer box pressing device according to claim 2, characterized in that: The rotating assembly includes a driving motor, a pinion, and a large gear. The driving motor is fixedly mounted on the top of the lifting plate. The pinion is fixedly connected to the output end of the driving motor. There are two second rotating rods at the bottom of the lifting plate. The large gear is fixedly sleeved on the two second rotating rods, and the two large gears are meshed with each other, one of the large gears is meshed with the pinion, and the second rotating rod is connected to the first rotating rod through a synchronous pulley.

4. The wafer box pressing device according to claim 3, characterized in that: A frame door is hinged on the front of the frame body, and coated glass is arranged on the frame door.

5. The wafer box pressing device according to claim 4, characterized in that: There are two first sliding rods, which are respectively arranged on both sides of the water tank, and are connected by a first rotating rod.

6. The wafer box pressing device according to claim 5, characterized in that: The protective mechanism includes an electromagnet, a second sliding rod, a skateboard, a magnet block, a protective pad, and a reset spring. The electromagnet is fixedly installed on the left and right sides of the inner wall of the water tank, the second sliding rod is fixedly connected to the inner wall of the water tank, and there are two second sliding rods. The skateboard is slidably sleeved on the two second sliding rods. There are two skateboards, and the two skateboards are symmetrically arranged on the second sliding rods. The magnet block is fixedly connected to the side of the skateboard close to the electromagnet, and the opposite surfaces of the magnet block and the electromagnet have the same magnetic properties. The protective pad is arranged on the side of the skateboard away from the electromagnet. The reset spring is sleeved on the second sliding rod, and the two ends of the reset spring are respectively fixedly connected to the inner wall of the water tank and the other end of the skateboard.

7. The wafer box pressing device according to claim 6, characterized in that: The positioning mechanism includes a fan, a main pipe, a first branch pipe, and an air outlet pipe. The fan is fixedly mounted on the back of the frame. One end of the main pipe is connected to the output end of the fan. One end of the first branch pipe is connected to the other end of the main pipe, and a first regulating valve is provided on the first branch pipe. One end of the air outlet pipe is connected to the first branch pipe, and the other end of the air outlet pipe passes through the outer wall of the water tank.

8. The wafer box pressing device according to claim 7, characterized in that: The positioning mechanism also includes a second branch pipe, an air outlet frame, and a mesh plate. One end of the second branch pipe is connected to the main pipe, and the other end of the second branch pipe passes through the frame and is connected to the air outlet frame. A second regulating valve is provided on the second branch pipe. The air outlet frame is fixedly connected to the top of the inner wall of the frame, and the mesh plate is fixedly connected to the inner wall of the air outlet frame.

Images