Automatic winding carbon rope assembly and vacuum evaporation equipment

Abstract

The application relates to an automatic carbon rope winding assembly and a vacuum evaporation device. A carbon rope roll is rotatably arranged on a rotating disc, the carbon rope roll supplies carbon ropes to a carbon rope electrode assembly, so that each carbon rope electrode sequentially passes through the carbon rope and is connected with the carbon rope roll; the rotating disc is rotatably arranged with the carbon rope electrode assembly as the center, drives the carbon rope roll to rotate relative to the carbon rope electrode assembly, so that the carbon rope is contacted on at least one carbon rope electrode, and is limited by the limiting structure of the carbon rope electrode. After a carbon rope section used in the evaporation process is broken, a new carbon rope section can be automatically wound without destroying the vacuum environment, and the carbon rope section does not need to be manually replaced each time the evaporation is finished, so that continuous evaporation of carbon films with different thicknesses is realized, and the production efficiency is improved; the carbon rope roll can repeatedly provide carbon rope sections for the carbon rope electrode, so that continuous production is realized in cooperation with other structures, the influence caused by the breaking of the carbon rope section is greatly reduced, and the traditional production process of the carbon rope electrode assembly evaporation carbon rope section is not affected at all.

Description

Technical Field

[0001] This application relates to the field of vacuum thermal evaporation carbon plating, and in particular to automatic carbon rope winding components and vacuum evaporation equipment. Background Technology

[0002] Vacuum thermal evaporation carbon deposition is a physical vapor deposition technique. First, in a vacuum environment, a carbon source is heated to a high temperature by electric current, causing solid carbon to sublimate into carbon vapor. Then, the carbon vapor is transported and condensed in the vacuum environment, depositing onto the substrate surface to gradually form a uniform nanoscale carbon film. This carbon coating is a crucial step in ensuring high-fidelity, artifact-free data in various advanced analytical techniques. Its unique advantages are particularly prominent in the following applications:

[0003] For EBSD analysis, the amorphous properties of carbon films are crucial. Unlike metal coatings that produce their own diffraction patterns, carbon films provide excellent conductivity without interfering with crystallographic signals such as Kikuchi patterns in the sample, making them an ideal choice for obtaining pure and accurate EBSD results.

[0004] For EDS (Energy Dispersive Spectroscopy) analysis, carbon's low atomic number offers significant advantages. It produces almost no additional X-ray background signal, avoiding the peak overlap problems that may occur with coatings such as gold and platinum, thus ensuring unimpeded and high-precision analysis of light and trace elements in samples.

[0005] For FIB preparation of TEM samples: the carbon film is a crucial protective layer. Pre-depositing a carbon film before FIB cutting and Pt deposition can effectively protect the outermost analytical area of ​​the sample, preventing damage or amorphization under ion beam bombardment, thereby ensuring the original structural integrity of the final TEM sample.

[0006] For biological and sensitive samples: carbon films not only minimize charging effects and thermal damage through electrical and thermal conductivity, but their extremely fine particles also reproduce the intricate ultrastructures of biological samples well. More importantly, they significantly increase secondary electron yield, resulting in brighter and clearer images for these low-contrast samples.

[0007] Therefore, carbon coating has become an indispensable core technology for achieving high-resolution morphological observation and high-precision compositional analysis in cutting-edge applications such as EBSD, EDS, TEM-FIB, and bioelectron microscopy, and is widely used in scanning electron microscopy sample preparation. The industry mainly employs two mainstream evaporation source technologies: the carbon rod method and the carbon rope method.

[0008] The main drawback of the carbon rod method lies in process control. It requires a high current drive, generating a significant thermal effect that can affect heat-sensitive samples. More critically, precise control of the coating thickness and batch-to-batch repeatability are poor. Furthermore, the operation requires frequent manual sharpening of the carbon rod to a specific shape, which not only increases the complexity of the operation but also introduces human uncertainty.

[0009] The carbon fiber method, also known as the carbon fiber method, has a low operating current and low thermal effect, and can achieve highly precise and repeatable control over the coating thickness, making it more suitable for high-resolution imaging. However, because carbon fiber is inherently brittle, it may break during use. This means that when a section of carbon fiber breaks after evaporation, the operator must interrupt the workflow, disrupt the vacuum environment, manually replace it with the next section of carbon fiber, and then re-evacuate the vacuum. This frequent downtime and manual intervention significantly reduces the continuity and efficiency of the experiment. Summary of the Invention

[0010] Therefore, it is necessary to provide an automatic carbon rope winding assembly and a vacuum evaporation equipment.

[0011] One embodiment of this application is an automatic carbon rope winding assembly, which includes a rotating disk, a carbon rope electrode assembly, and a carbon rope roll.

[0012] The carbon rope electrode assembly includes a carbon rope electrode and a limiting structure, and the carbon rope electrode is configured to connect to a power supply copper pillar.

[0013] The carbon rope roll is rotatably disposed on the rotating disk, and the carbon rope roll is configured to supply carbon rope to the carbon rope electrode assembly so that each of the carbon rope electrodes is sequentially connected to the carbon rope roll via the carbon rope.

[0014] The rotating disk is rotatably arranged around the carbon rope electrode assembly. When the rotating disk is rotating, it drives the carbon rope roll to rotate relative to the carbon rope electrode assembly, so as to bring the carbon rope into contact with at least one of the carbon rope electrodes and limit it to the limiting structure of the carbon rope electrode.

[0015] The aforementioned automatic carbon rope winding assembly, through the cooperation of a rotating disk, carbon rope electrode assembly, and carbon rope coil, achieves automatic replenishment of carbon rope even when carbon rope segments between carbon rope electrodes break. On one hand, it is suitable for the vapor deposition process; after a carbon rope segment breaks during vapor deposition, a new carbon rope segment can be automatically wound without disrupting the vacuum environment, eliminating the need for manual replacement of carbon rope segments after each vapor deposition cycle. This enables continuous vapor deposition of carbon films of varying thicknesses, improving production efficiency. On the other hand, the carbon rope coil, in conjunction with the rotating disk, allows the carbon rope coil to repeatedly provide carbon rope segments to the carbon rope electrodes, thus facilitating the matching of... By combining it with other structures to achieve continuous production, the impact of carbon rope segment breakage is greatly reduced. On the one hand, the carbon rope electrode is connected to the power supply copper column to enable the access of electrical energy. On the other hand, the carbon rope electrode assembly cooperates with the rotating disk. The carbon rope electrode assembly remains stationary while the rotating disk rotates around the carbon rope electrode assembly. This does not affect the traditional production process of carbon rope segment evaporation of the carbon rope electrode assembly. It can retain the advantages of high-precision control of the carbon rope method and overcome the core disadvantage of the traditional method that requires manual replacement, which leads to vacuum destruction. Therefore, it is conducive to adapting to traditional production processes, thereby improving the universality of automatic carbon rope winding assembly.

[0016] In some embodiments, the limiting structure includes an electrode center post and a compression spring, the compression spring being configured to elastically abut the electrode center post against the carbon rope electrode to elastically clamp the carbon rope on the carbon rope electrode.

[0017] In some embodiments, the automatic carbon rope winding assembly further includes an insulating boss disposed on the rotating disk, the insulating boss having a protrusion;

[0018] When the rotating disk is rotating, it drives the insulating protrusion to rotate relative to the carbon rope electrode assembly. When the protrusion abuts against the electrode center post, the electrode center post releases the carbon rope on the carbon rope electrode. When the protrusion disengages from the electrode center post, the electrode center post resets and elastically clamps the carbon rope on the carbon rope electrode.

[0019] In some embodiments, the carbon rope electrode assembly has two carbon rope electrodes and their limiting structure; or,

[0020] The carbon rope electrode assembly includes a first carbon rope electrode assembly and a second carbon rope electrode assembly.

[0021] The first carbon rope electrode assembly includes a first electrode center post, a first carbon rope electrode, a first electrode spring, a first electrode insulating sleeve, and a first retaining spring.

[0022] The first electrode insulating sleeve is placed outside the first carbon rope electrode. The first electrode center post passes through the first carbon rope electrode. The first electrode spring and the first retaining spring are both located inside the first carbon rope electrode. One end of the first electrode spring abuts against the first carbon rope electrode, and the other end abuts against the first retaining spring. The first electrode center post is engaged with the first retaining spring and abuts against the first carbon rope electrode through the first retaining spring. The first electrode spring is configured to elastically abut the first electrode center post against the first carbon rope electrode so that the first electrode center post is at the top position of the first carbon rope electrode and together with the first carbon rope electrode, clamps the carbon rope on the first carbon rope electrode.

[0023] The second carbon rope electrode assembly includes a second electrode center post, a second carbon rope electrode, a second electrode spring, a second electrode insulating sleeve, and a second retaining spring.

[0024] The second electrode insulating sleeve is placed outside the second carbon rope electrode. The second electrode center post passes through the second carbon rope electrode. The second electrode spring and the second retaining spring are both located inside the second carbon rope electrode. One end of the second electrode spring abuts against the second carbon rope electrode, and the other end abuts against the second retaining spring. The second electrode center post is engaged with the second retaining spring and abuts against the second carbon rope electrode through the second retaining spring. The second electrode spring is configured to elastically abut the second electrode center post against the second carbon rope electrode, so that the second electrode center post is at the top position of the second carbon rope electrode, and together with the second carbon rope electrode, clamps the carbon rope on the second carbon rope electrode.

[0025] In some embodiments, the automatic carbon rope winding assembly further includes a scraper rotatably disposed on the rotating disk; the scraper is configured to have a position in contact with the carbon rope electrode when the rotating disk is rotating, so as to scrape off the carbon rope wound on the carbon rope electrode.

[0026] In some embodiments, the scraper is driven to the rotating disk via a scraper gear, so that the rotation direction of the scraper is opposite to that of the rotating disk.

[0027] In some embodiments, the automatic carbon rope winding assembly further includes the power supply copper pillar; or,

[0028] The automatic carbon rope winding assembly further includes a first bearing and a second bearing. The carbon rope electrode assembly passes through the rotating disk and is connected to the rotating disk via the first bearing and the second bearing, so that the rotating disk is rotatably arranged around the carbon rope electrode assembly; or...

[0029] The limiting structure restricts the position of the carbon rope on the carbon rope electrode by snapping or clamping; or...

[0030] The automatic carbon rope winding assembly further includes a carbon rope positioning plate disposed on the rotating disk; the carbon rope positioning plate is located between the carbon rope roll and the carbon rope electrode assembly, and each of the carbon rope electrodes sequentially contacts the carbon rope positioning plate through the carbon rope; the carbon rope positioning plate is configured to contact the carbon rope and restrict the position of the carbon rope.

[0031] In some embodiments, the automatic carbon rope winding assembly further includes a mounting flange, a baffle cover, and a protective cover;

[0032] The carbon rope electrode assembly is mounted on the mounting flange, the rotating disk is rotatably mounted on the mounting flange, and the baffle and the protective cover are respectively disposed on both sides of the mounting flange to form a protective space. The carbon rope electrode assembly, the rotating disk, and the carbon rope coil are all located within the protective space; or...

[0033] The automatic carbon rope winding assembly further includes a power supply copper pillar assembly, which includes a first power supply copper pillar, a second power supply copper pillar, a copper pillar insulating cap, a copper pillar cover plate, a copper pillar flange seat, and a copper pillar insulating gasket. The first and second power supply copper pillars serve as the power supply copper pillars, each fitted with a copper pillar insulating cap, and sequentially pass through the copper pillar cover plate, the copper pillar flange seat, and the copper pillar insulating gasket, respectively connecting to the carbon rope electrode. The copper pillar cover plate is disposed on the copper pillar flange seat, and the copper pillar flange seat is disposed on the mounting flange through the copper pillar insulating gasket, so as to supply power to the carbon rope electrode through the first and second power supply copper pillars under a sealed vacuum state.

[0034] In some embodiments, the automatic carbon rope winding assembly further includes a monitoring component that drives the rotating disk, the monitoring component being configured to control the rotation of the rotating disk when the carbon rope segment between the two carbon rope electrodes is disconnected, including controlling the rotation direction and / or rotation rate of the rotating disk.

[0035] In some embodiments, a vacuum evaporation apparatus includes a housing and an automatic carbon rope winding assembly as described in any embodiment, the automatic carbon rope winding assembly being disposed within the housing. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1This is a schematic diagram of an embodiment of the automatic carbon rope winding assembly described in this application.

[0038] Figure 2 for Figure 1 Another schematic diagram of the embodiment shown.

[0039] Figure 3 for Figure 1 A schematic diagram of the structure after removing the baffle cover in the embodiment shown.

[0040] Figure 4 for Figure 2 The illustrated embodiment is a structural diagram from another direction after the protective cover has been removed.

[0041] Figure 5 for Figure 1 The illustrated embodiment is a partial structural diagram in another direction.

[0042] Figure 6 for Figure 5 Another schematic diagram of the embodiment shown.

[0043] Figure 7 for Figure 1 The illustrated embodiment is shown as a partial structural cross-sectional view from another direction.

[0044] Figure 8 for Figure 1 The illustrated embodiment shows a half-sectional view of the carbon rope rotating shaft assembly and the carbon rope coil.

[0045] Figure 9 for Figure 1 The illustrated embodiment shows a half-sectional view of the scraper wheel and scraper wheel shaft assembly.

[0046] Figure 10 for Figure 1 The illustrated embodiment shows a schematic diagram of the working state of the carbon rope coil located on one side of the carbon rope electrode assembly.

[0047] Figure 11 for Figure 10 The schematic diagram shows the carbon rope segment in a broken state in the embodiment shown.

[0048] Figure 12 for Figure 11 The illustrated embodiment shows a schematic diagram of the state in which the carbon rope coil rotates relative to the carbon rope electrode assembly to achieve automatic winding of the carbon rope.

[0049] Figure 13 for Figure 1 The illustrated embodiment shows a schematic diagram of the working state of the carbon rope coil located on the other side of the carbon rope electrode assembly.

[0050] Figure 14 for Figure 13The schematic diagram shows the carbon rope segment in a broken state in the embodiment shown.

[0051] Figure 15 for Figure 14 The illustrated embodiment shows a schematic diagram of the state in which the carbon rope coil rotates relative to the carbon rope electrode assembly to achieve automatic winding of the carbon rope. Detailed Implementation

[0052] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0053] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0055] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0056] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0057] This application discloses an automatic carbon rope winding assembly and a vacuum evaporation equipment, which includes some or all of the technical features of the following embodiments; that is, the automatic carbon rope winding assembly and the vacuum evaporation equipment include some or all of the following structures. In one embodiment of this application, an automatic carbon rope winding assembly includes a rotating disk, a carbon rope electrode assembly, and a carbon rope roll; the carbon rope electrode assembly is provided with carbon rope electrodes and a limiting structure, and the carbon rope electrodes are configured to connect to power supply copper pillars; the carbon rope roll is rotatably disposed on the rotating disk, and the carbon rope roll is configured to supply carbon rope to the carbon rope electrode assembly so that each of the carbon rope electrodes is sequentially connected to the carbon rope roll through the carbon rope; the rotating disk is rotatably disposed around the carbon rope electrode assembly, and when the rotating disk is rotating, it drives the carbon rope roll to rotate relative to the carbon rope electrode assembly so that the carbon rope contacts at least one of the carbon rope electrodes and is limited by the limiting structure of the carbon rope electrode. The aforementioned automatic carbon rope winding assembly, through the cooperation of a rotating disk, carbon rope electrode assembly, and carbon rope roll, achieves automatic replenishment of carbon rope even when carbon rope segments between carbon rope electrodes break. On one hand, it is suitable for the vapor deposition process; after a carbon rope segment breaks during vapor deposition, a new carbon rope segment can be automatically wound without disrupting the vacuum environment, eliminating the need for manual replacement after each vapor deposition cycle. This enables continuous vapor deposition of carbon films of varying thicknesses, improving production efficiency. On the other hand, the carbon rope roll, in conjunction with the rotating disk, allows the carbon rope roll to repeatedly provide carbon rope segments for the carbon rope electrodes, facilitating continuous production in conjunction with other structures and significantly reducing the impact of carbon rope segment breakage. Furthermore, the carbon rope electrode assembly remains stationary while the rotating disk rotates around it, completely unaffecting the traditional production process of vapor deposition of carbon rope segments. Therefore, it is compatible with traditional production processes, thus enhancing the versatility of the automatic carbon rope winding assembly.

[0058] The following is combined Figures 1 to 15 The automatic carbon rope winding assembly and vacuum evaporation equipment are described in detail below. Figure 1 The related embodiments show the mounting flange 1 and the baffle cover 2 of the automatic carbon rope winding assembly 100. Figure 2 The related embodiments show a protective cover 3 located on the other side of the mounting flange 1. Figure 3The relevant embodiments show a scraper 4, a scraper shaft assembly 5, a baffle cover insulating pad 6, a rotating disk 7, a first carbon rope electrode assembly 8, a carbon rope segment 9, an electrode protective cover 10, a second carbon rope electrode assembly 11, a carbon rope shaft assembly 12, a carbon rope coil 13, a carbon rope positioning shaft assembly 14, a carbon rope positioning plate 15, and a carbon rope 200 located on the mounting flange 1 side. The carbon rope 200 is wound on the carbon rope coil 13, with one end connected to two carbon rope electrodes via the carbon rope positioning plate 15. The section of the carbon rope 200 located between the two carbon rope electrodes is the carbon rope segment 9. Figure 4 The related embodiments show a synchronous gear belt 16, a servo pulley 17, a servo mounting base 18, a servo 19, a power supply copper pillar assembly 20, and a magnetohydrodynamic transmission assembly 21 located on the other side of the mounting flange 1; Figure 5 and Figure 6 The relevant embodiments show an insulating flange 22, an insulating boss 23, a rotating disk gear 24, a fixed internal gear 25, a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, a power supply copper pillar assembly 20, and a magnetic fluid transmission assembly 21 located on opposite sides of the rotating disk 7. The power supply copper pillar assembly 20 includes a first power supply copper pillar 2001, a second power supply copper pillar 2002, a copper pillar insulating cap 2003, a copper pillar cover plate 2004, a copper pillar flange seat 2005, and a copper pillar insulating pad 2006. The magnetic fluid transmission assembly 21 includes a magnetic fluid gear 2101, a magnetic fluid fixed seat 2102, a magnetic fluid cover plate 2103, a magnetic fluid transmission shaft 2104, and a magnetic fluid pulley 2105. Figure 7 The relevant embodiments show a first bearing 26, a second bearing 27, a first electrode center post 801, a first carbon rope electrode 802, a first electrode spring 803, a first electrode insulating sleeve 804, a first retaining spring 805, a second electrode center post 1101, a second carbon rope electrode 1102, a second electrode spring 1103, a second electrode insulating sleeve 1104, and a second retaining spring 1105; Figure 8 The related embodiments show a carbon rope swivel assembly 12 and a carbon rope roll 13. The carbon rope swivel assembly 12 includes a carbon rope swivel fixing post 1201, a carbon rope swivel 1202 and a magnetic suction element 1203. Figure 9 The relevant embodiments show a scraper 4 and a scraper shaft assembly 5. The scraper shaft assembly 5 includes a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, a first scraper bearing 504, a second scraper bearing 505, and a scraper bearing washer 506. Figure 10 , Figure 11 , Figure 12 , Figure 13 , Figure 14 and Figure 15 The related embodiments show that the rotating disk 7 rotates around the carbon rope electrode assembly and wraps around the carbon rope segment 9.

[0059] like Figures 1 to 3As shown, in some embodiments, an automatic carbon rope winding assembly 100 includes a rotating disk 7, a carbon rope electrode assembly, and a carbon rope reel 13; the carbon rope electrode assembly is provided with carbon rope electrodes and limiting structures, and the carbon rope electrodes are configured to connect to power supply copper pillars; the carbon rope reel 13 is rotatably disposed on the rotating disk 7, and the carbon rope reel 13 is configured to supply carbon rope 200 to the carbon rope electrode assembly so that each of the carbon rope electrodes is sequentially connected to the carbon rope reel 13 through the carbon rope 200; that is, the carbon rope reel 13 is configured to wind the carbon rope 200, that is, the carbon rope reel 13 is wound with carbon rope 200, and the section of the carbon rope 200 located between two carbon rope electrodes is called the carbon rope segment 9.

[0060] The rotating disk 7 is rotatably arranged around the carbon rope electrode assembly, that is, the center of rotation of the rotating disk 7 is the center of the carbon rope electrode assembly. Figure 3 As shown, the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11 are used as a whole, with the center position of the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11 as the rotation center of the rotating disk 7; or as shown... Figure 7 As shown, it can also be understood that the first carbon rope electrode 802 and the second carbon rope electrode 1102 are used as a whole, with the center position of the first carbon rope electrode 802 and the second carbon rope electrode 1102 as the rotation center of the rotating disk 7. When the rotating disk 7 is rotating, it drives the carbon rope roll 13 to rotate relative to the carbon rope electrode assembly, so that the carbon rope 200 contacts at least one of the carbon rope electrodes and is confined within the limiting structure of the carbon rope electrode. Normal operating state is as follows... Figure 10 or Figure 13 As shown; after working for a period of time, as Figure 11 or Figure 14 As shown, when the carbon rope segment 9 between the two carbon rope electrodes is disconnected, the carbon rope coil 13 is still connected to one carbon rope electrode via the carbon rope 200 in this state. The carbon rope coil 13 rotates relative to the carbon rope electrode assembly, as shown. Figure 12 or Figure 15 As shown, this allows carbon rope 200 to be connected to another carbon rope electrode, thus forming a new carbon rope segment 9 between the two carbon rope electrodes.

[0061] This design, through the cooperation of the rotating disk 7, the carbon rope electrode assembly, and the carbon rope coil 13, achieves automatic replenishment of the carbon rope 200 even when the carbon rope segment 9 between the carbon rope electrodes breaks. On one hand, it is suitable for the vapor deposition process; after the carbon rope segment 9 breaks during vapor deposition, a new carbon rope segment 9 can be automatically wound without disrupting the vacuum environment, eliminating the need for manual replacement of the carbon rope segment 9 after each vapor deposition cycle. This enables continuous vapor deposition of carbon films of varying thicknesses, improving production efficiency. On the other hand, the carbon rope coil 13, in conjunction with the rotating disk 7, allows the carbon rope coil 13 to repeatedly provide carbon rope segments 9 to the carbon rope electrodes, that is, to replenish the carbon rope segments wound on adjacent carbon rope electrodes. The carbon rope segment 9 facilitates continuous production in conjunction with other structures, greatly reducing the impact of carbon rope segment 9 breakage. Furthermore, the carbon rope electrode is connected to the power supply copper pillar, enabling electrical energy access. Additionally, the carbon rope electrode assembly works in conjunction with the rotating disk 7, keeping the carbon rope electrode assembly stationary while the rotating disk 7 rotates around it. This completely avoids affecting the traditional production process of vaporizing the carbon rope segment 9 onto the carbon rope electrode assembly. It retains the advantages of high-precision control of the carbon rope method while overcoming the core drawback of the traditional method requiring manual replacement of the carbon rope segment 9, which leads to vacuum disruption. Therefore, it is suitable for adapting to traditional production processes, thereby improving the versatility of the automatic carbon rope winding assembly 100.

[0062] like Figure 3 As shown, to facilitate the replacement of the carbon rope coil 13, as an example, the automatic carbon rope winding assembly 100 further includes a carbon rope shaft assembly 12 disposed on the rotating disk 7, and the carbon rope coil 13 is rotatably disposed on the rotating disk 7 via the carbon rope shaft assembly 12. As an example, combined with... Figure 8 The carbon rope rotating shaft assembly 12 includes a carbon rope rotating shaft fixing post 1201, a carbon rope rotating shaft 1202, and a magnetic attractor 1203. The carbon rope rotating shaft fixing post 1201 is disposed on the rotating disk 7, and the carbon rope rotating shaft 1202 is rotatably disposed on the carbon rope rotating shaft fixing post 1201. The carbon rope coil 13 is magnetically attracted to the carbon rope rotating shaft 1202 by the magnetic attractor 1203. As an example, the magnetic attractor 1203 is a magnet or a magnetic steel, etc. In this embodiment, the carbon rope coil 13 is rotatable relative to the carbon rope rotating shaft fixing post 1201.

[0063] This design, on the one hand, allows the carbon rope coil 13 to be rotatably mounted by setting the carbon rope shaft assembly 12 on the rotating disk 7. Combined with the magnetic attraction of the magnetic suction component 1203, this enables quick assembly and disassembly of the carbon rope coil 13 and the carbon rope shaft 1202 without the need for complex tools or cumbersome operations, greatly simplifying the replacement process of the carbon rope coil 13, saving replacement time, and reducing equipment downtime. On the other hand, the carbon rope shaft 1202 is rotatably mounted on the carbon rope shaft fixing post 1201, ensuring that the carbon rope coil 13 can smoothly release the carbon rope 200 as it rotates with the rotating disk 7. This prevents the carbon rope 200 from getting stuck or broken due to improper release, ensuring the stability of the carbon rope 200 supply and further reducing the impact of carbon rope segment 9 breakage on vapor deposition production. On the other hand, the magnetic component 1203 uses common magnetic materials such as magnets or magnets, which are not only low-cost and readily available, but also have stable magnetic attraction. This not only firmly fixes the carbon rope coil 13, preventing it from loosening or shifting during rotation, but also allows for easy separation for replacement, balancing reliability and ease of operation. This helps control the manufacturing and maintenance costs of the automatic carbon rope winding assembly 100. Furthermore, the carbon rope rotating shaft assembly 12 has a simple and compact structural design, and is well-compatible with existing components such as the rotating disk 7 and the carbon rope coil 13. It can be integrated into the existing system without requiring significant modifications to the overall structure of the automatic carbon rope winding assembly 100, without interfering with the traditional process of vapor-depositing the carbon rope segment 9 of the carbon rope electrode assembly, further enhancing the versatility and practicality of the automatic carbon rope winding assembly 100.

[0064] To maintain the position of the carbon rope 200 on the carbon rope electrode and prevent the carbon rope segment 9 from being unable to be reconnected after breaking, in some embodiments, the limiting structure restricts the position of the carbon rope 200 on the carbon rope electrode by snapping or clamping. An example of a clamping method is given below. In some embodiments, the limiting structure includes an electrode center post and a compression spring. The compression spring is configured to elastically abut the electrode center post against the carbon rope electrode to elastically clamp the carbon rope 200 on the carbon rope electrode. As an example, the carbon rope electrode assembly also includes an electrode insulating sleeve and a retaining spring. The electrode insulating sleeve is fitted over the carbon rope electrode. The electrode center post snaps into the retaining spring and abuts against the carbon rope electrode through the retaining spring. Both the compression spring and the retaining spring are located inside the carbon rope electrode. The electrode center post passes through the carbon rope electrode and elastically abuts against the carbon rope electrode at its top position.

[0065] This design, on the one hand, uses a locking structure to fix the position of the carbon rope 200 through snapping or clamping, effectively preventing the carbon rope 200 from shifting after the carbon rope segment 9 breaks, thus ensuring a stable connection between the carbon rope 200 and the carbon rope electrode. This lays the foundation for the subsequent automatic winding of new carbon rope segments 9 and further ensures the continuity of the vapor deposition process. On the other hand, taking the clamping structure composed of a compression spring and an electrode center post as an example, the elastic force provided by the compression spring allows the electrode center post to tightly abut against the carbon rope electrode, achieving flexible clamping of the carbon rope 200. This prevents the carbon rope 200 from loosening and avoids damage to the carbon rope 200 from rigid clamping. At the same time, the electrode insulating sleeve ensures electrical safety, and the retaining spring helps to fix the electrode center post, improving the overall stability of the locking structure. Moreover, the layout of each component is reasonable and does not interfere with the original function of the carbon rope electrode assembly. It is compatible with traditional vapor deposition processes and facilitates the promotion and application of the automatic carbon rope winding assembly 100.

[0066] like Figure 5 As shown, in order to facilitate the release and reset of the elastic clamping by rotation, in some embodiments, the automatic carbon rope winding assembly 100 further includes an insulating boss 23 disposed on the rotating disk 7, the insulating boss 23 having a protrusion; when the rotating disk 7 is rotating, it drives the insulating boss 23 to rotate relative to the carbon rope electrode assembly; when the protrusion abuts against the electrode center post, the electrode center post releases the carbon rope 200 on the carbon rope electrode; and when the protrusion disengages from the electrode center post, the electrode center post resets and elastically clamps the carbon rope 200 on the carbon rope electrode.

[0067] This design, on the one hand, by setting insulating bosses 23 with raised portions on the rotating disk 7, allows for the automatic switching of the clamping tightness of the electrode center post on the carbon rope 200, driven by the rotation of the rotating disk 7. When the raised portion abuts, the carbon rope 200 is released, facilitating the supply of new carbon rope segments 9 by the carbon rope roll 13; when the contact is broken, the clamping is reset, ensuring the stable fixation of the carbon rope 200 without manual intervention, further enhancing the automation level of carbon rope 200 replacement and fixation. On the other hand, the insulating bosses 23 have insulating properties, preventing electrical connection with the carbon rope electrode assembly, preventing leakage or current interference, and ensuring the electrical safety of the assembly and the stability of the vapor deposition process. At the same time, this structure is driven only by the original rotation of the rotating disk 7, without the need for an additional power unit, simplifying the overall structure of the automatic carbon rope winding assembly 100 and reducing manufacturing costs.

[0068] The following description uses two carbon rope electrodes as an example; however, if necessary, the embodiments of this application are also applicable to a larger number of carbon rope electrodes. In some embodiments, the carbon rope electrode assembly has two carbon rope electrodes and their limiting structure. Figure 3 and Figure 7As shown, in some embodiments, the carbon rope electrode assembly includes a first carbon rope electrode assembly 8 and a second carbon rope electrode assembly 11; the first carbon rope electrode assembly 8 includes a first electrode center post 801, a first carbon rope electrode 802, a first electrode spring 803, a first electrode insulating sleeve 804, and a first retaining spring 805; the first electrode insulating sleeve 804 is fitted over the first carbon rope electrode 802, the first electrode center post 801 passes through the first carbon rope electrode 802, and the first electrode spring 803 and the first retaining spring 805 are both located inside the first carbon rope electrode 802. One end of the first electrode spring 803 abuts against the first carbon rope electrode 802, and the other end abuts against the first retaining spring 805. The first electrode center post 801 is engaged with the first retaining spring 805 and abuts against the first carbon rope electrode 802 through the first retaining spring 805. The first electrode spring 803 is configured to elastically abut the first electrode center post 801 against the first carbon rope electrode 802, so that the first electrode center post 801 is at the top position of the first carbon rope electrode 802, and together with the first carbon rope electrode 802, they clamp the first carbon rope electrode 802. The carbon rope 200; the second carbon rope electrode assembly 11 includes a second electrode center post 1101, a second carbon rope electrode 1102, a second electrode spring 1103, a second electrode insulating sleeve 1104, and a second retaining spring 1105; the second electrode insulating sleeve 1104 is sleeved outside the second carbon rope electrode 1102, the second electrode center post 1101 passes through the second carbon rope electrode 1102, the second electrode spring 1103 and the second retaining spring 1105 are both located inside the second carbon rope electrode 1102, and one end of the second electrode spring 1103 abuts against the second carbon rope electrode. One end of the electrode is 1102, and the other end abuts against the second retaining spring 1105. The second electrode center post 1101 is engaged with the second retaining spring 1105 and abuts against the second carbon rope electrode 1102 through the second retaining spring 1105. The second electrode spring 1103 is configured to elastically abut the second electrode center post 1101 against the second carbon rope electrode 1102, so that the second electrode center post 1101 is at the top position of the second carbon rope electrode 1102, and together with the second carbon rope electrode 1102, clamps the carbon rope 200 on the second carbon rope electrode 1102.

[0069] This design, on the one hand, uses two carbon rope electrodes as an example to construct the carbon rope electrode assembly, clarifying the specific composition and assembly relationship of each component, making the structural design clearer. This facilitates manufacturing, assembly, and debugging, and also provides clear guidance for subsequent maintenance and repair, reducing operational difficulty. On the other hand, in the first carbon rope electrode assembly 8, the first electrode spring 803, through the first retaining spring 805 and in conjunction with the first electrode center post 801, elastically abuts against the first carbon rope electrode 802, achieving stable clamping of the carbon rope 200. Similarly, in the second carbon rope electrode assembly 11, the second electrode spring 1103, in conjunction with the second retaining spring 1105 and the second electrode center post 1101, firmly fixes the carbon rope 200. The synergistic effect of the two components effectively prevents the carbon rope 200 from shifting, ensuring smooth reconnection after the carbon rope segment 9 breaks. This provides a reliable guarantee for continuous vapor deposition through automatic winding of the carbon rope assembly 100, reducing production interruptions caused by carbon rope 200 fixation issues. On the other hand, the first electrode insulating sleeve 804 and the second electrode insulating sleeve 1104 are respectively fitted over the corresponding carbon rope electrodes, which can isolate the current, prevent leakage risk, ensure the safe operation of the equipment and the personal safety of the operators, and improve the safety and reliability of the component during use. Furthermore, this design is applicable to a wider number of carbon rope electrodes, not limited to two, greatly expanding the application scenarios of the automatic carbon rope winding component 100. It can be adapted to both two and more carbon rope electrodes required for vapor deposition, further improving the versatility of the component and enabling it to better meet the vapor deposition needs under different production conditions, thus helping to improve production efficiency and carbon film vapor deposition quality.

[0070] like Figure 5 and Figure 7As shown, in an embodiment with an insulating boss 23, as an example, when the rotating disk 7 is rotating, it drives the insulating boss 23 to rotate relative to the carbon rope electrode assembly. When the boss abuts against the first electrode center post 801, it overcomes the elastic force of the first electrode spring 803, causing the carbon rope 200 between the first electrode center post 801 and the first carbon rope electrode 802 to be released. That is, the carbon rope 200 between the first electrode center post 801 and the first carbon rope electrode 802 is released, so as to facilitate the scraping of residual carbon rope 200 wrapped on the first carbon rope electrode 802 in an embodiment with a scraper wheel 4. Then, when the boss is disengaged from the first electrode center post 801, the first electrode center post 801 is reset under the action of the first electrode spring 803, and the first electrode center post 801 and the first carbon rope electrode 802 elastically clamp the carbon rope 200 on the first carbon rope electrode 802. Similarly, when the protrusion abuts against the second electrode center post 1101, the elastic force of the second electrode spring 1103 is overcome, causing the carbon rope 200 between the second electrode center post 1101 and the second carbon rope electrode 1102 to be released, so as to facilitate the scraping of the residual carbon rope 200 wrapped around the second carbon rope electrode 1102 in the embodiment with scraper 4; then, when the protrusion is rotated to the state where it is no longer in contact with the second electrode center post 1101, the second electrode center post 1101 is reset under the action of the second electrode spring 1103, and the second electrode center post 1101 and the second carbon rope electrode 1102 elastically clamp the carbon rope 200 on the second carbon rope electrode 1102. As an example, the carbon rope 200 can be wound around the first carbon rope electrode 802 or the second carbon rope electrode 1102 1 / 6 to 5 / 6 turns, and then clamped by the first electrode center post 801 and the first carbon rope electrode 802, or by the second electrode center post 1101 and the second carbon rope electrode 1102.

[0071] This design has two advantages. First, when the insulating boss 23 rotates with the rotating disk 7, the protrusion can precisely act on the first electrode center post 801 and the second electrode center post 1101. Upon contact, it overcomes the spring force of the corresponding electrode to release the carbon rope 200. This, combined with the scraper wheel 4, allows for efficient scraping of residual carbon rope 200 on the first carbon rope electrode 802 and the second carbon rope electrode 1102, preventing residual carbon rope from affecting the winding and vapor deposition quality of the new carbon rope segment 9. After disengagement, the electrode center post resets and clamps the carbon rope 200 under the action of the spring force, ensuring the new carbon rope segment 9 is fixed and stable, providing a reliable foundation for subsequent vapor deposition. Second, it is clear that the carbon rope 200 can be wound around the carbon rope electrode 1 / 6 to 5 / 6 turns before clamping. This winding range ensures that the carbon rope 200 is in full contact with the electrode to guarantee conductivity and vapor deposition effect, while avoiding excessive winding that could lead to waste or breakage of the carbon rope 200, thus balancing practicality and economy. On the other hand, the entire process relies on the original rotation of the rotary disk 7 for driving, without the need for an additional power device, simplifying the structure of the automatic carbon rope winding assembly 100, and without interfering with the traditional vapor deposition process.

[0072] like Figure 3 As shown, to avoid adverse effects caused by residual carbon rope 200 on the carbon rope electrode, in some embodiments, the automatic carbon rope winding assembly 100 further includes a scraper 4 rotatably disposed on the rotating disk 7; the scraper 4 is configured to have a position contacting the carbon rope electrode when the rotating disk 7 is rotating, so as to scrape off the carbon rope 200 wound on the carbon rope electrode. To more completely remove the residual carbon rope 200 on the carbon rope electrode, in some embodiments, the scraper 4 is drivenly connected to the rotating disk 7 via a scraper gear 503, so that the rotation direction of the scraper 4 is opposite to that of the rotating disk 7.

[0073] This design achieves two key benefits. First, by mounting a rotatable scraper 4 on the rotating disk 7, the scraper 4 contacts the carbon rope electrode, effectively removing residual carbon rope 200 from the electrode. This prevents residual carbon rope from affecting the stable connection between the new carbon rope segment 9 and the electrode, thus preventing unstable evaporation current or carbon film quality deviations caused by residue. This ensures the continuity of the evaporation process and the quality of the finished carbon film. Second, the scraper 4 is connected to the rotating disk 7 via a scraper gear 503, allowing the scraper 4 to rotate in the opposite direction to the rotating disk 7. This creates a reverse friction effect, which more thoroughly removes residual carbon rope 200 from the electrode. Compared to co-rotation or fixed scraping structures, this method offers superior scraping performance. Furthermore, this transmission method relies on the existing power of the rotating disk 7, eliminating the need for additional drive components, simplifying the structure of the automatic carbon rope winding assembly 100, and reducing manufacturing costs.

[0074] Traditional apparatuses for carbon deposition on non-conductive samples in scanning electron microscopy primarily employ high-temperature carbon rope evaporation deposition technology. Before each sample processing, the old carbon rope must be manually removed and a new one wound onto the deposition electrode. This process is not only cumbersome but also prevents the continuous deposition of carbon films of varying thicknesses, severely limiting its efficiency and applicability. Furthermore, manual replacement of the carbon rope can lead to operational errors, affecting the uniformity and quality stability of the carbon film, further restricting the apparatus's application potential in high-precision fields. As an example, the automatic carbon rope winding assembly 100 also includes a fixed gear, which is fixed relative to the carbon rope electrode assembly and does not rotate with the rotating disk 7; the fixed gear is either a fixed external gear or a fixed internal gear 25; for example... Figure 3 and Figure 6 As shown. The following example uses a fixed internal gear 25. As an example, the fixed internal gear 25 is annular and concentrically arranged with the rotating disk 7, meaning the fixed internal gear 25 coincides with the axis of rotation of the rotating disk 7. The automatic carbon rope winding assembly 100 also includes a scraper gear 503, which meshes with the fixed internal gear 25 and is connected to the scraper 4. When the rotating disk 7 is rotating, the fixed internal gear 25 drives the scraper gear 503 to rotate, thereby driving the scraper 4 to rotate, and the rotation direction of the scraper 4 is opposite to that of the rotating disk 7. As an example, both the scraper gear 503 and the fixed internal gear 25 are located at the bottom of the rotating disk 7 or within the internal space of the rotating disk 7 to avoid direct exposure to the carbon steaming environment, thus reducing carbon buildup pollution.

[0075] This design, on the one hand, utilizes the characteristic that the fixed internal gear 25 does not rotate with the rotating disk 7. When the rotating disk 7 rotates, it drives the scraper gear 503 and the connected scraper 4 to rotate in the opposite direction. Compared with traditional manual carbon rope replacement devices, it can automatically and efficiently scrape off the residual carbon rope 200 on the carbon rope electrode, avoiding the tediousness of manual operation and solving the problem that traditional devices cannot continuously deposit carbon films of different thicknesses, greatly improving work efficiency and broadening the scope of application. On the other hand, the reverse-rotating scraper 4 can more thoroughly remove residual carbon rope 200, reduce the deposition error caused by residue, ensure the uniformity and quality stability of the carbon film, break through the application limitations of traditional devices in high-precision fields, and improve the adaptability of the automatic carbon rope winding assembly 100 in high-end inspection scenarios such as carbon deposition of non-conductive samples in scanning electron microscopes. On the other hand, by placing both the scraper gear 503 and the fixed internal gear 25 at the bottom or inside the rotating disk 7, their direct exposure to the carbon steaming environment can be avoided, effectively reducing carbon buildup pollution and minimizing problems such as gear jamming and wear caused by carbon buildup. This extends the service life of the component, reduces maintenance frequency and costs, and ensures the long-term stable operation of the automatic carbon rope winding component 100. Furthermore, the concentric arrangement of the fixed internal gear 25 and the rotating disk 7 ensures stable transmission, and the rotation direction and speed of the scraper 4 are controllable, further improving the accuracy of scraping off residual carbon rope 200. Moreover, the entire transmission structure relies on the original rotational power of the rotating disk 7, eliminating the need for additional drive components and simplifying the overall structure of the component.

[0076] like Figure 3 As shown, as an example, the automatic carbon rope winding assembly 100 further includes a scraper shaft assembly 5 rotatably mounted on the rotating disk 7, with the scraper 4 disposed on the scraper shaft assembly 5. (In conjunction with...) Figure 9As an example, the scraper shaft assembly 5 includes a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, and a scraper bearing. The scraper bearing seat 502 is mounted on the rotating disk 7. The scraper shaft 501 is connected to the scraper bearing seat 502 through the scraper bearing. The scraper shaft 501 is also axially connected to the scraper 4 and the scraper gear 503, that is, the scraper 4 uses the scraper shaft 501 as its rotation axis, and the rotation axis of the scraper gear 503 coincides with the scraper shaft 501. The scraper gear 503 meshes with the fixed internal gear 25 to... While the rotating disk 7 is rotating, the scraper 4 is driven to rotate by the scraper shaft 501. As the rotating disk 7 rotates around the carbon rope electrode assembly, the scraper 4 rotates around the scraper shaft 501, similar to when the rotating disk 7 revolves. Through the cooperating scraper gear 503 and the fixed internal gear 25, the scraper 4 is driven to rotate on its own axis, so that the scraper 4 rotates around the carbon rope electrode. Thus, when the carbon rope segment 9 between adjacent carbon rope electrodes is broken, the remaining carbon rope 200 wrapped around the carbon rope electrode is scraped off.

[0077] like Figure 9 As shown, as an example, the scraper shaft assembly 5 includes a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, a first scraper bearing 504, a second scraper bearing 505, and a scraper bearing washer 506. The scraper bearing seat 502 is mounted on the rotating disk 7. The scraper shaft 501 is connected to the first scraper bearing 504 and the second scraper bearing 505 through the scraper bearing washer 506, and is also connected to the scraper bearing seat 502 through the first scraper bearing 504 and the second scraper bearing 505. The scraper shaft 501 is also axially connected to the scraper 4 and the scraper gear 503, respectively. The scraper gear 503 meshes with the fixed internal gear 25. As an example, the first scraper bearing 504 and the second scraper bearing 505 are integrally formed. As an example, the scraper shaft 501 and the scraper bearing washer are integrally formed.

[0078] This design serves two purposes. First, by installing the scraper shaft assembly 5 on the rotating disk 7, the scraper 4 is stably installed via the scraper shaft 501, scraper bearing seat 502, and other components. This ensures the coaxiality and stability of the scraper 4 during rotation, preventing deviations in scraping residual carbon rope 200 due to loose installation, guaranteeing the scraping effect, laying the foundation for the stable winding of new carbon rope segments 9, and further maintaining the continuity of the vapor deposition process. Second, the scraper shaft 501 simultaneously connects the scraper 4 and the scraper gear 503, and the scraper gear 503 meshes with the fixed internal gear 25. This allows the scraper 4 to rotate around the scraper shaft 501 via gear transmission when the rotating disk 7 revolves, forming a composite motion of revolution and rotation. This motion allows the scraper 4 to fully contact the carbon rope electrode during rotation, efficiently scraping away residual carbon rope 200 on the electrode. Especially after the carbon rope segment 9 breaks, it can completely remove residue, avoiding affecting the subsequent connection of carbon rope 200 and the quality of vapor deposition. On the other hand, the design of the scraper bearing reduces friction between the scraper shaft 501 and the scraper bearing seat 502, reduces component wear, extends the service life of the scraper shaft assembly 5, and ensures smooth rotation of the scraper 4, avoiding incomplete scraping caused by jamming. The entire assembly has a compact structure and is highly compatible with existing components such as the rotating disk 7 and the fixed internal gear 25. It can be integrated into the automatic carbon rope winding assembly 100 without significant modifications, and does not interfere with traditional vapor deposition processes and related structural components.

[0079] In some embodiments, the automatic carbon rope winding assembly 100 further includes the power supply copper pillar; in some embodiments, such as Figure 4 As shown, the automatic carbon rope winding assembly 100 also includes a power supply copper pillar assembly 20; combined with Figure 6 In some embodiments, the power supply copper pillar assembly 20 includes a first power supply copper pillar 2001, a second power supply copper pillar 2002, a copper pillar insulating cap 2003, a copper pillar cover plate 2004, a copper pillar flange seat 2005, and a copper pillar insulating gasket 2006. The first power supply copper pillar 2001 and the second power supply copper pillar 2002 serve as the power supply copper pillars, each fitted with a copper pillar insulating cap 2003, and sequentially passing through the copper pillar cover plate 2004, the copper pillar flange seat 2005, and the copper pillar insulating gasket 2006, respectively connecting to the carbon rope electrode. The copper pillar cover plate 2004 is disposed on the copper pillar flange seat 2005, and the copper pillar flange seat 2005 is disposed on the mounting flange 1 through the copper pillar insulating gasket 2006, so as to supply power to the carbon rope electrode through the first power supply copper pillar 2001 and the second power supply copper pillar 2002 under a sealed vacuum state. As an example, the first power supply copper pillar 2001 is connected to the first carbon rope electrode 802, and the second power supply copper pillar 2002 is connected to the second carbon rope electrode 1102 to achieve conductivity.

[0080] This design, on the one hand, achieves stable power transmission to the carbon rope electrodes by setting up a power supply copper pillar assembly 20, with the first power supply copper pillar 2001 and the second power supply copper pillar 2002 respectively connected to the first carbon rope electrode 802 and the second carbon rope electrode 1102. This provides reliable power support for the high-temperature evaporation carbon deposition of the carbon rope 200, ensuring the normal operation of the evaporation process and avoiding the impact of unstable power supply on the carbon film deposition quality. On the other hand, in the power supply copper pillar assembly 20, the copper pillar insulating cap 2003 and the copper pillar insulating pad 2006 effectively isolate the power supply copper pillar from the electrical connection with other components, preventing the risk of leakage and ensuring the safe operation of the equipment. At the same time, the copper pillar cover plate 2004 and the copper pillar flange seat 2005, together with the copper pillar insulating pad 2006, are installed on the mounting flange 1, which can maintain the power supply function in a sealed vacuum environment. This meets the vacuum environment requirements of the evaporation process, allowing for continuous power supply without breaking the vacuum, providing conditions for continuous evaporation deposition of carbon films of different thicknesses, and further improving production efficiency. On the other hand, the component has a simple structure and reasonable assembly, and is well compatible with carbon rope electrode components, which is conducive to its promotion and application in scenarios such as vacuum carbon plating.

[0081] like Figure 7 As shown, in order to facilitate the assembly of the carbon rope electrode assembly and the rotating disk 7, in some embodiments, the automatic carbon rope winding assembly 100 further includes a first bearing 26 and a second bearing 27. The carbon rope electrode assembly passes through the rotating disk 7 and is connected to the rotating disk 7 through the first bearing 26 and the second bearing 27, so that the rotating disk 7 is rotatably arranged with the carbon rope electrode assembly as the center; as an example, the first bearing 26 and the second bearing 27 are integrally formed.

[0082] This design serves two purposes. First, by connecting the carbon rope electrode assembly to the rotating disk 7 via the first bearing 26 and the second bearing 27, the rotating disk 7 can rotate stably around the carbon rope electrode assembly. This ensures the coaxiality and stability of the rotating disk 7 when driving components such as the carbon rope coil 13 and the scraper wheel 4, preventing rotational deviation that could lead to inaccurate winding of the carbon rope 200 or incomplete removal of residual carbon rope by the scraper wheel 4. This lays the foundation for the stable operation of the automatic carbon rope winding assembly 100. Second, the bearing connection simplifies the assembly process between the carbon rope electrode assembly and the rotating disk 7, reducing installation difficulty. At the same time, the bearing reduces frictional losses during relative rotation, extending the service life of the components and preventing friction-induced jamming that could affect the automatic replenishment winding and evaporation efficiency of the carbon rope 200.

[0083] like Figure 3As shown, to protect the carbon rope 200 between the carbon rope electrode assembly and the carbon rope roll 13, in some embodiments, the automatic winding carbon rope assembly 100 further includes a carbon rope positioning piece 15 disposed on the rotating disk 7; the carbon rope positioning piece 15 is located between the carbon rope roll 13 and the carbon rope electrode assembly, and each of the carbon rope electrodes sequentially contacts the carbon rope positioning piece 15 through the carbon rope 200; the carbon rope positioning piece 15 is configured to contact the carbon rope 200 and restrict the position of the carbon rope 200. As an example, the carbon rope positioning piece 15 has a perforation, through which the carbon rope 200 supplied by the carbon rope roll 13 contacts the carbon rope electrode; exemplaryly, the carbon rope positioning piece 15 has a cylindrical surface, through which the carbon rope 200 supplied by the carbon rope roll 13 contacts a portion of the cylindrical surface before passing through the perforation. As an example, the automatic carbon rope winding assembly 100 also includes a carbon rope positioning shaft assembly 14 disposed on the rotating disk 7, and the carbon rope positioning piece 15 is detachably disposed on the carbon rope positioning shaft assembly 14.

[0084] This design, on the one hand, by setting carbon rope positioning plates 15 on the rotating disk 7, positioning them between the carbon rope roll 13 and the carbon rope electrode assembly and contacting the carbon rope 200, effectively restricts the position of the carbon rope 200, preventing it from shifting, tangling, or loosening during the supply process from the carbon rope roll 13 to the carbon rope electrode. This ensures a stable transmission path for the carbon rope 200, guaranteeing precise contact between the carbon rope 200 and each carbon rope electrode, providing a foundation for the stable winding and vapor deposition of the subsequent carbon rope segment 9, and reducing vapor deposition failures caused by carbon rope 200 positional deviations. On the other hand, the carbon rope positioning plates 15 have perforations for the carbon rope 200 to pass through, or rely on their cylindrical surfaces to guide the carbon rope 200's direction, further optimizing the guiding effect of the carbon rope 200. Simultaneously, they buffer the tension of the carbon rope 200 during transmission, preventing breakage due to excessive tension or accumulation due to insufficient tension, protecting the integrity of the carbon rope 200, reducing the probability of breakage of the carbon rope segment 9, and minimizing the risk of production interruptions. On the other hand, the carbon rope positioning shaft assembly 14 enables the detachable setting of the carbon rope positioning piece 15, which facilitates the replacement of the appropriate carbon rope positioning piece 15 according to the specifications of the carbon rope 200, the position of the carbon rope electrode, and other requirements, thereby improving the flexibility and adaptability of the assembly; and the assembly structure of the carbon rope positioning piece 15 and the carbon rope positioning shaft assembly 14 is relatively simple and practical.

[0085] like Figure 1 and Figure 2 As shown, in some embodiments, the automatic carbon rope winding assembly 100 further includes a mounting flange 1, a baffle cover 2, and a protective cover 3; the carbon rope electrode assembly is disposed on the mounting flange 1, the rotating disk 7 is rotatably disposed on the mounting flange 1, and the baffle cover 2 and the protective cover 3 are respectively disposed on both sides of the mounting flange 1 to form a protective space. Figure 3The carbon rope electrode assembly, the rotating disk 7, and the carbon rope coil 13 are all located within the protective space. As an example, the baffle cover 2 and the protective cover 3 are integrally formed. As an example, the automatic carbon rope winding assembly 100 also includes a baffle cover insulating pad 6, and the baffle cover 2 is mounted on the mounting flange 1 via the baffle cover insulating pad 6. Figure 3 As shown, as an example, the automatic carbon rope winding assembly 100 also includes an electrode protection cover 10, which is disposed on the carbon rope electrode assembly to cover the carbon rope electrode located on one side of the carbon rope roll 13 while the carbon rope segment 9 between adjacent carbon rope electrodes is exposed.

[0086] This design, on the one hand, forms a protective space through the cooperation of the mounting flange 1, baffle 2, and protective cover 3, enclosing core components such as the carbon rope electrode assembly, rotating disk 7, and carbon rope coil 13. This effectively isolates external dust, impurities, and other contaminants, preventing contamination from affecting the operational accuracy and service life of the components. It also prevents the diffusion of carbon rope 200 evaporation products during the vapor deposition process, ensuring a clean internal environment for the components and providing environmental protection for the quality of carbon film vapor deposition. On the other hand, the baffle 2 is installed on the mounting flange 1 via the baffle 2 insulating gasket 6, achieving insulation isolation between the baffle 2 and the mounting flange 1, preventing leakage between components and ensuring electrical safety. Furthermore, the baffle 2 and protective cover 3 can be integrated, simplifying the assembly process, improving the sealing of the protective space, further enhancing the protective effect, and reducing the difficulty and cost of component assembly. On the other hand, the electrode protection cover 10 is placed on the carbon rope electrode assembly. Under the premise that the exposed carbon rope section 9 does not affect the vapor deposition, the carbon rope electrode on one side of the carbon rope roll 13 is covered. This can prevent the non-working area of ​​the carbon rope electrode from being contaminated with impurities or damaged by friction during the transmission of the carbon rope 200, ensuring the stable conductivity of the carbon rope electrode. Moreover, the entire protective structure is well compatible with the original components of the assembly and does not interfere with the automatic winding and vapor deposition process of the carbon rope.

[0087] like Figure 5 As shown, as an example, the automatic carbon rope winding assembly 100 further includes an insulating flange 22, on which the carbon rope electrode assembly is disposed, and the insulating flange 22 is disposed on the mounting flange 1; for an embodiment with an electrode protective cover 10, as an example, the electrode protective cover 10 is disposed on the insulating flange 22. Figure 4As shown, as an example, the automatic carbon rope winding assembly 100 further includes a synchronous gear belt 16, a servo pulley 17, a servo mounting base 18, a servo 19, and a magnetohydrodynamic (MHD) transmission assembly 21. The servo mounting base 18 is disposed on the mounting flange 1, the servo 19 is disposed on the servo mounting base 18, the servo pulley 17 is disposed on the servo 19, and is connected to the MHD transmission assembly 21 via the synchronous gear belt 16. The MHD transmission assembly 21 is connected to the rotating disk 7, for example, through a transmission connection. As an example, the automatic carbon rope winding assembly 100 also includes a rotating disk gear 24 connected to the rotating disk 7. The MHD transmission assembly 21 meshes with the rotating disk gear 24, and the MHD transmission assembly 21 is connected to the rotating disk 7 via the rotating disk gear 24. The servo 19 drives the rotating disk 7 to rotate via the MHD transmission assembly 21.

[0088] This design, on the one hand, by setting up an insulating flange 22, mounts the carbon rope electrode assembly onto it and then fixes it to the mounting flange 1, effectively achieving insulation isolation between the carbon rope electrode assembly and the mounting flange 1, avoiding the risk of leakage caused by current conduction to the mounting flange 1. At the same time, the electrode protection cover 10 can be installed based on the insulating flange 22, further ensuring the insulation protection effect of the carbon rope electrode assembly, improving the operational safety of the automatic carbon rope winding assembly 100, and meeting the electrical safety requirements of the vapor deposition process. On the other hand, the servo motor 19 is fixed to the mounting flange 1 via the servo motor mounting base 18, and drives the magnetohydrodynamic transmission assembly 21 through the synchronous gear belt 16 and the servo motor pulley 17, which in turn drives the rotating disk 7 to rotate through the rotating disk gear 24, forming a stable power transmission link. This transmission method can precisely control the speed and direction of the rotating disk 7, ensuring that the rotating disk 7 drives the carbon rope coil 13, scraper 4 and other components to move along a preset trajectory, ensuring the accuracy of automatic winding of the carbon rope 200 and scraping of residual carbon rope, and avoiding the action deviation caused by manual drive. On the other hand, the application of the magnetohydrodynamic transmission component 21 can achieve power transmission while maintaining a vacuum-sealed environment, without disrupting the vacuum conditions required for vapor deposition, thus ensuring continuous vapor deposition of carbon films of different thicknesses.

[0089] like Figure 6 As shown in the figure, as an example, the magnetohydrodynamic transmission assembly 21 includes a magnetohydrodynamic gear 2101, a magnetohydrodynamic mounting base 2102, a magnetohydrodynamic cover plate 2103, a magnetohydrodynamic transmission shaft 2104, and a magnetohydrodynamic pulley 2105; the magnetohydrodynamic gear 2101 and the magnetohydrodynamic pulley 2105 are respectively disposed on the magnetohydrodynamic transmission shaft 2104, and the magnetohydrodynamic transmission shaft 2104 and the magnetohydrodynamic cover plate 2103 are respectively disposed on the magnetohydrodynamic mounting base 2102; the magnetohydrodynamic pulley 2105 is connected to the servo pulley 17 through a synchronous gear belt 16; the magnetohydrodynamic gear 2101 is connected to the rotating disk 7 through a rotating disk gear 24 to cooperate in driving the rotating disk 7 to rotate.

[0090] This design, on the one hand, ensures that the magnetic fluid transmission component 21, through the magnetic fluid gear 2101 and magnetic fluid pulley 2105, cooperates with the rotating disk gear 24 and servo pulley 17 respectively, to establish a stable power transmission path from the servo 19 to the rotating disk 7. This allows for precise power transmission, ensuring that the rotating disk 7 rotates at a preset speed and direction. This guarantees that the carbon rope coil 13 supplies carbon rope 200 and the scraper 4 removes residual carbon rope with precise and controllable action, avoiding power transmission deviations that could lead to incorrect winding of the carbon rope 200 or incomplete scraping, thus providing reliable power support for the automatic carbon rope winding process. On the other hand, the magnetic fluid mounting base 2102 and magnetic fluid cover 2103 provide a stable mounting foundation for components such as the magnetic fluid transmission shaft 2104, ensuring the smoothness of the component transmission process and reducing transmission losses caused by component shaking. At the same time, the magnetic fluid transmission characteristics can achieve power transmission while maintaining a vacuum-sealed environment, without disrupting the vacuum conditions required for vapor deposition, meeting the needs of continuous vapor deposition, and allowing for automatic replenishment of the carbon rope 200 without interrupting the process. On the other hand, the structure of this component is well compatible with the existing components such as the servo motor 19 and the rotating disk 7 of the automatic carbon rope winding component 100. It does not interfere with the traditional process of carbon rope segment 9 vapor deposition of the carbon rope electrode component, further improving the stability and versatility of the component operation and helping to ensure vapor deposition efficiency and carbon film quality.

[0091] To reduce manual intervention and achieve automation as much as possible, in some embodiments, the automatic carbon rope winding assembly 100 further includes a monitoring component that drives the rotating disk 7. The monitoring component is configured to control the rotation of the rotating disk 7 when the carbon rope segment 9 between the two carbon rope electrodes is disconnected, including controlling the rotation direction and / or rotation speed of the rotating disk 7. Alternatively, the monitoring component is configured to control the rotation of the rotating disk 7 when the carbon rope segment 9 between the two carbon rope electrodes is disconnected, including controlling the rotation direction or rotation speed of the rotating disk 7.

[0092] This design, on the one hand, by setting up a monitoring component that drives the rotating disk 7, allows it to monitor the status of the carbon rope segment 9 between the two carbon rope electrodes in real time. When the carbon rope segment 9 breaks, it promptly triggers control of the rotating disk 7, initiating the automatic carbon rope 200 replenishment process without manual observation or intervention. This completely solves the cumbersome operation problem of traditional manual carbon rope replacement, significantly reducing labor costs and operation time, and further improving the automation level of the automatic carbon rope winding assembly 100, providing a key guarantee for continuous deposition of carbon films of different thicknesses. On the other hand, the monitoring component can not only control the rotation of the rotating disk 7, but also precisely control its rotation direction and speed: a reasonable rotation direction ensures that the carbon rope 200 released by the carbon rope roll 13 moves accurately toward the carbon rope electrode, avoiding the carbon rope 200 deviating from the preset path and causing winding failure; an appropriate rotation speed matches the supply demand of the carbon rope 200, preventing the carbon rope 200 from becoming loose and accumulating due to excessive rotation, or the carbon rope 200 from breaking due to excessive tension due to excessive rotation, ensuring a stable and orderly carbon rope 200 winding process, and improving the success rate and quality of winding new carbon rope segment 9. On the other hand, the drive connection design between the monitoring component and the rotating disk 7 can work in conjunction with existing structures such as the carbon rope rotating shaft component 12, scraper 4, and power supply copper pillar component 20 of the automatic carbon rope winding component 100: after the carbon rope segment 9 is disconnected, the monitoring component controls the rotating disk 7 to rotate, driving the carbon rope coil 13 to supply rope and the scraper 4 to scrape off the residual carbon rope, while the power supply copper pillar component 20 continuously and stably supplies power, forming a complete automated closed-loop process.

[0093] The following will continue to combine Figures 1 to 15The example illustrates the automatic carbon rope winding assembly 100. In some embodiments, the automatic carbon rope winding assembly 100 is equipped with a pair of carbon rope electrodes fixed to the mounting flange 1, including a first carbon rope electrode 802 and a second carbon rope electrode 1102; the automatic carbon rope winding assembly 100 includes a rotating disk 7 capable of revolving around the carbon rope electrodes, the rotating disk 7 being provided with a carbon rope coil 13, a carbon rope positioning plate 15, and a scraper 4. Through the rotational movement of the rotating disk 7, the scraper 4 can scrape off the remaining parts of the carbon rope segments 9 that have broken after use on the carbon rope electrodes, while the carbon rope 200 on the carbon rope coil 13 is automatically wound onto the carbon rope electrodes to form new carbon rope segments 9. In some embodiments, the carbon rope electrodes, including the first carbon rope electrode 802 and the second carbon rope electrode 1102, are directly connected and fixed to the power supply copper post. A vertically movable electrode center post is provided in the center of the carbon rope electrode, and a compression spring is provided between the carbon rope electrode and the electrode center post. In some embodiments, the rotating disk 7 is equipped with a fixed insulating boss 23, which is higher on one side and lower on the other. As the rotating disk 7 rotates, the insulating boss 23 drives the electrode center post to move up and down, thereby achieving the clamping and releasing function of the carbon rope. In some embodiments, the scraper 4 is connected to a transmission gear, such as a fixed internal gear 25, which can rotate in the opposite direction while the rotating disk 7 rotates, thereby effectively scraping away carbon ropes that have broken after use.

[0094] This design allows the carbon rope 200 used in the vapor deposition process to automatically reconnect and form new carbon rope segments 9 after breakage, eliminating the need for manual replacement after each vapor deposition cycle and enabling continuous deposition of carbon films of varying thicknesses. The carbon rope electrodes are directly connected and fixed to the power supply copper pillars, eliminating sliding friction losses and ensuring stable and reliable power supply. The transmission mechanism is hidden inside the rotating disk 7, avoiding direct exposure to the carbon deposition environment and effectively reducing the risk of carbon buildup contamination.

[0095] In some embodiments, a vacuum evaporation deposition apparatus includes a housing and an automatic carbon rope winding assembly 100 as described in any embodiment, the automatic carbon rope winding assembly 100 being disposed within the housing. That is, the vacuum evaporation deposition apparatus includes the automatic carbon rope winding assembly 100 as described in any embodiment, and can also be referred to as an automatic carbon rope winding carbon deposition device. Because the automatic carbon rope winding assembly 100 as described in any embodiment is used, the vacuum evaporation deposition apparatus also possesses the beneficial technical effects of the automatic carbon rope winding assembly 100, which will not be elaborated upon here.

[0096] In some embodiments, a vacuum evaporation equipment or its automatic carbon rope winding assembly 100 includes a mounting flange 1 for fixing and supporting other components to facilitate assembly of the automatic carbon rope winding assembly 100; a protective cover 3 for protecting the internal components of the automatic carbon rope winding assembly 100; a baffle cover insulating pad 6 mounted on the mounting flange 1; a baffle cover 2 mounted on the baffle cover insulating pad 6; a scraper wheel 4 fixed on a scraper wheel shaft assembly 5; a scraper wheel shaft assembly fixedly mounted on a rotating disk 7; a carbon rope positioning plate 15 fixed on a carbon rope positioning shaft assembly 14; a carbon rope positioning shaft assembly 14 fixed on the rotating disk 7; a carbon rope shaft assembly 12 fixed on the rotating disk 7; a carbon rope coil 13 placed on the carbon rope shaft assembly 12; and a first carbon rope electrode assembly 8. The second carbon rope electrode assembly 11 is fixed to the insulating flange 22, the electrode protective cover 10 is fixed to the insulating flange 22, the insulating flange 22 is fixed to the mounting flange 1, the insulating boss 23 is fixed to the rotating disk 7, the rotating disk gear 24 is fixed to the rotating disk 7, the fixed internal gear 25 is fixed to the mounting flange 1, the first bearing 26 is fixed to the rotating disk 7, the second bearing 27 is fixed to the rotating disk 7, the power supply copper pillar assembly 20 is fixed to the mounting flange 1, the magnetohydrodynamic transmission assembly 21 is fixed to the mounting flange 1, the synchronous gear belt 16 is connected to the servo pulley 17, the servo pulley 17 is fixed to the servo 19, the servo 19 is fixed to the servo mounting base 18, and the servo mounting base 18 is fixed to the mounting flange 1.

[0097] As an example, the first carbon rope electrode assembly 8 includes a first electrode center post 801, a first carbon rope electrode 802, a first electrode spring 803, a first electrode insulating sleeve 804, and a first retaining spring 805. The first electrode center post 801 is installed at the center of the first carbon rope electrode 802 and can move up and down. The first electrode spring 803 is sleeved on the outside of the first electrode center post 801 and plays a compression and reset role. The first retaining spring 805 is fixed on the first electrode center post 801 and its function is to fix the first electrode spring 803.

[0098] As an example, the second carbon rope electrode assembly 11 includes a second electrode center post 1101, a second carbon rope electrode 1102, a second electrode spring 1103, a second electrode insulating sleeve 1104, and a second retaining spring 1105. The second electrode center post 1101 is installed at the center of the second carbon rope electrode 1102 and can move up and down. The second electrode spring 1103 is sleeved on the outside of the second electrode center post 1101 and plays a compression and reset role. The second retaining spring 1105 is fixed on the second electrode center post 1101 and its function is to fix the second electrode spring 1103.

[0099] As an example, the power supply copper pillar assembly 20 includes a first power supply copper pillar 2001, a second power supply copper pillar 2002, a copper pillar insulating cap 2003, a copper pillar cover plate 2004, a copper pillar flange seat 2005, and a copper pillar insulating pad 2006. The first power supply copper pillar 2001 is fixed on the copper pillar insulating pad 2006, the second power supply copper pillar 2002 is fixed on the copper pillar insulating pad 2006, the copper pillar insulating cap 2003 is fixed on the first power supply copper pillar 2001 and the second power supply copper pillar 2002, the copper pillar insulating pad 2006 is fixed on the copper pillar flange seat 2005, and the copper pillar insulating cap 2003 is fixed on the copper pillar flange seat 2005. The function of the power supply copper pillar assembly 20 is to supply power to the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11, and at the same time, it can seal the vacuum.

[0100] As an example, the magnetohydrodynamic transmission assembly 21 includes a magnetohydrodynamic gear 2101, a magnetohydrodynamic mounting base 2102, a magnetohydrodynamic cover plate 2103, a magnetohydrodynamic transmission shaft 2104, and a magnetohydrodynamic pulley 2105. The magnetohydrodynamic gear 2101 is fixed on the magnetohydrodynamic transmission shaft 2104, the magnetohydrodynamic pulley 2105 is fixed on the magnetohydrodynamic transmission shaft 2104, the magnetohydrodynamic transmission shaft 2104 is fixed on the magnetohydrodynamic mounting base 2102, and the magnetohydrodynamic cover plate 2103 is fixed on the magnetohydrodynamic mounting base 2102. The function of the magnetohydrodynamic transmission assembly 21 is to seal the vacuum and drive the rotating disk to rotate through gear transmission.

[0101] As an example, the carbon rope swivel assembly 12 includes a carbon rope swivel fixing post 1201, a carbon rope swivel 1202, and a magnetic attractor 1203. The carbon rope swivel 1202 is fixed to the carbon rope swivel fixing post 1201, and the magnetic attractor 1203 is fixed to the carbon rope swivel fixing post 1201. The function of the carbon rope swivel assembly 12 is to attract the carbon rope roll 13 to the carbon rope swivel 1202 through the magnetic attraction of the magnetic attractor 1203, without affecting the rotation of the carbon rope roll.

[0102] As an example, the scraper shaft assembly 5 includes a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, a first scraper bearing 504, a second scraper bearing 505, and a scraper bearing washer 506. The scraper gear 503 is fixed on the scraper shaft 501, the scraper bearing washer 506 is fixed on the scraper shaft 501, the first scraper bearing 504 is fixed on the scraper bearing seat 502, and the second scraper bearing 505 is fixed on the scraper bearing seat 502. The scraper shaft 501 is mounted on the first scraper bearing 504 and the second scraper bearing 505. After the scraper gear 503 meshes with the fixed internal gear 25, it rotates, thereby driving the scraper shaft 501 to rotate. The scraper 4 rotates with the scraper shaft 501, making it easier to scrape off the carbon rope that has broken after use.

[0103] The following example illustrates the specific usage of the vacuum evaporation equipment or its automatic carbon rope winding assembly 100. In use, first remove the baffle cover 2, then place the carbon rope roll 13 onto the carbon rope shaft assembly 12. The carbon rope 200 on the carbon rope roll 13 passes through the carbon rope positioning piece 15 and is clamped onto the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11, forming a carbon rope segment 9 between the first carbon rope electrode 802 and the second carbon rope electrode 1102. Then, return the baffle cover 2 to its original position. The initial internal state of the automatic carbon rope winding assembly 100 is as follows: Figure 10 As shown.

[0104] The automatic carbon rope winding assembly 100 is installed in the vacuum chamber of the vacuum evaporation equipment. After the vacuum chamber reaches the required vacuum level, the thermal evaporation power supply outputs current to the power supply copper pillar assembly 20. The current is transmitted to the second carbon rope electrode assembly 11, flows through the carbon rope segment 9 to the first carbon rope electrode assembly 8. When the carbon rope segment 9 is energized, it generates high temperature, which causes the solid carbon to sublimate into vapor instantly. Subsequently, carbon atoms collide with the low-temperature sample surface and condense and deposit, thereby forming a nanoscale uniform carbon film. During this process, the carbon rope segment 9 will be continuously consumed and eventually break. The vacuum evaporation equipment or its automatic carbon rope winding assembly 100 can monitor whether the carbon rope segment 9 breaks at any time. After the carbon rope segment 9 breaks, the servo motor 19 drives the rotating disk gear 24 to rotate through the magnetohydrodynamic gear 2101, thereby driving the rotating disk 7 to rotate. An insulating boss 23 is fixed on the rotating disk 7. The insulating boss 23 has a side protrusion. The starting part, i.e., the inclined boss, rotates, causing the first electrode center post 801 to move upward, thereby loosening the broken carbon rope segment 9. The scraper wheel 4, carbon rope positioning plate 15, and carbon rope coil 13 on the rotating disk 7 will rotate together with the rotating disk 7. The scraper wheel gear 503 below the scraper wheel shaft assembly 5 will mesh with the fixed internal gear 25 to achieve rotation, for example, rotation in the opposite direction, thereby driving the scraper wheel 4 to rotate to scrape off the broken carbon rope segment 9 after use. The broken carbon rope segment 9 will fall from the opening below the baffle cover 2 into the carbon rope collection box in the vacuum chamber. The carbon rope 200 on the carbon rope coil 13 starts from the second carbon rope electrode assembly 11 and wraps around to the first carbon rope electrode assembly 8 to form a new carbon rope segment 9. After the insulating boss 23 rotates to the lowest position, the first electrode center post 801 moves towards the first carbon rope electrode 802 under the action of the first electrode spring 803, thereby clamping the carbon rope. This process is as follows. Figure 11 and Figure 12 As shown, after rewinding with the new carbon rope segment, as Figure 13 As shown.

[0105] This allows for continued carbon evaporation without breaking the vacuum. The thermal evaporation power supply continues to output current to the copper pillar assembly 20, which is then transmitted to the second carbon rope electrode assembly 11. The current flows through the carbon rope segment 9 to the first carbon rope electrode assembly 8. Similarly, the carbon rope segment 9 generates high temperatures upon being energized, resulting in the evaporation and deposition of a carbon film. During this process, the carbon rope segment 9 is continuously consumed and eventually breaks. After the carbon rope segment 9 breaks, the servo motor 19 drives the rotating disk gear 24 to rotate via the magnetohydrodynamic gear 2101, thereby rotating the rotating disk 7. An insulating boss 23 is fixed on the rotating disk 7, and the insulating boss 23 has a protrusion serving as a sloping boss. During rotation, it drives the second electrode center pillar 1101 to move upwards, thereby releasing the broken carbon rope segment 9. The scraper on the rotating disk 7... Wheel 4, carbon rope positioning plate 15, and carbon rope coil 13 rotate together with the rotating disk 7. The scraper gear 503 below the scraper shaft assembly 5 meshes with the fixed internal gear 25 to rotate, thereby driving the scraper wheel 4 to rotate and easily scrape off broken carbon ropes after use. The broken carbon rope segments 9 fall from the opening below the baffle cover 2 into the carbon rope collection box in the vacuum chamber. The carbon rope 200 on the carbon rope coil 13 starts from the first carbon rope electrode assembly 8 and winds around to the second carbon rope electrode assembly 11 to form new carbon rope segments 9. After the insulating boss 23 rotates to its lowest position, the second electrode center post 1101 moves towards the second carbon rope electrode 1102 under the action of the second electrode spring 1103, thereby clamping the carbon rope. This process is as follows: Figure 14 and Figure 15 As shown, after rewinding with the new carbon rope segment, as Figure 10 As shown.

[0106] That is, as Figure 10 As shown, carbon rope coil 13 is located above the direction shown in the diagram, and carbon rope segment 9 is intact and unbroken; as Figure 11 As shown, carbon rope segment 9 broke after being energized; as Figure 12 As shown, the rotating disk 7 rotates clockwise in the direction shown, and the scraper 4 scrapes off the residual carbon rope 200 on one of the first carbon rope electrode 802 and the second carbon rope electrode 1102. The carbon rope coil 13 is formed by winding the carbon rope 200 around the carbon rope electrode to form a new carbon rope segment 9; as shown Figure 13 As shown, carbon rope coil 13 is located below in the direction shown in the diagram, and carbon rope segment 9 is intact and unbroken; as Figure 14 As shown, carbon rope segment 9 broke after being energized; as Figure 15 As shown, the rotating disk 7 rotates clockwise in the direction shown in the figure, and the scraper 4 scrapes off the remaining carbon rope 200 on the other of the first carbon rope electrode 802 and the second carbon rope electrode 1102. The carbon rope coil 13 is used to wind the carbon rope 200 around the carbon rope electrode to form a new carbon rope segment 9.

[0107] After the above steps, the automatic carbon rope winding assembly 100 can automatically scrape off the broken carbon rope and wind on a new carbon rope without disrupting the vacuum environment, thereby achieving the function of continuous carbon film deposition.

[0108] It should be noted that other embodiments of this application also include an automatic carbon rope winding assembly and a vacuum evaporation equipment formed by combining the technical features of the above embodiments.

[0109] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0110] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. An automatic winding assembly (100) around a carbon rope, characterized by, The automatic carbon rope winding assembly (100) comprises a rotating disc (7), a carbon rope electrode assembly (8, 11) and a carbon rope winding (13); The carbon rope electrode assembly (8, 11) is provided with a carbon rope electrode (802, 1102) and a limiting structure, and the carbon rope electrode (802, 1102) is configured to be connected with a power supply copper column (2001, 2002); The carbon rope winding (13) is rotatably arranged on the rotating disc (7), and the carbon rope winding (13) is configured to supply a carbon rope (200) to the carbon rope electrode assembly (8, 11) so that each carbon rope electrode (802, 1102) sequentially passes through the carbon rope (200) connected with the carbon rope winding (13); The rotating disc (7) is rotatably arranged at the center of the carbon rope electrode assembly (8, 11), and in the rotating state, the rotating disc (7) drives the carbon rope winding (13) to rotate relative to the carbon rope electrode assembly (8, 11) to contact the carbon rope (200) on at least one carbon rope electrode (802, 1102), and the limiting structure of the carbon rope electrode (802, 1102) is limited.

2. The automatic winding assembly (100) according to claim 1, characterized in that, The limiting structure comprises an electrode center column (801, 1101) and a compression spring, and the compression spring is configured to elastically abut the electrode center column (801, 1101) on the carbon rope electrode (802, 1102) to elastically clamp the carbon rope (200) on the carbon rope electrode (802, 1102).

3. The automatic winding assembly (100) according to claim 2, characterized in that, The automatic carbon rope winding assembly (100) further comprises an insulating boss (23) arranged on the rotating disc (7), and the insulating boss (23) is provided with a protruding portion; In the rotating state, the rotating disc (7) drives the insulating boss (23) to rotate relative to the carbon rope electrode assembly (8, 11), in the state of rotating to abut the protruding portion on the electrode center column (801, 1101), the electrode center column (801, 1101) releases the clamping of the carbon rope (200) on the carbon rope electrode (802, 1102), and in the state of rotating to the protruding portion and the electrode center column (801, 1101) are out of contact, the electrode center column (801, 1101) is reset and elastically clamps the carbon rope (200) on the carbon rope electrode (802, 1102).

4. The automatic winding assembly (100) according to claim 1, characterized in that, The carbon rope electrode assembly (8, 11) is provided with two carbon rope electrodes (802, 1102) and their limiting structures; or, The carbon rope electrode assembly (8, 11) comprises a first carbon rope electrode assembly (8) and a second carbon rope electrode assembly (11); The first carbon rope electrode assembly (8) comprises a first electrode center column (801), a first carbon rope electrode (802), a first electrode spring (803), a first electrode insulating sleeve (804) and a first clamping spring piece (805); The first electrode insulating sleeve (804) is sleeved outside the first carbon rope electrode (802), the first electrode center column (801) passes through the first carbon rope electrode (802), the first electrode spring (803) and the first clamping spring sheet (805) are located in the first carbon rope electrode (802), one end of the first electrode spring (803) abuts against the first carbon rope electrode (802), the other end abuts against the first clamping spring sheet (805), the first electrode center column (801) is clamped with the first clamping spring sheet (805) and abuts against the first carbon rope electrode (802) through the first clamping spring sheet (805), and the first electrode spring (803) is configured to elastically abut the first electrode center column (801) on the first carbon rope electrode (802), so that the first electrode center column (801) is located at the top of the first carbon rope electrode (802) and clamps the carbon rope (200) on the first carbon rope electrode (802) together with the first carbon rope electrode (802). The second carbon rope electrode assembly (11) comprises a second electrode center column (1101), a second carbon rope electrode (1102), a second electrode spring (1103), a second electrode insulating sleeve (1104) and a second clamping spring sheet (1105). The second electrode insulating sleeve (1104) is sleeved outside the second carbon rope electrode (1102), the second electrode center column (1101) passes through the second carbon rope electrode (1102), the second electrode spring (1103) and the second clamping spring sheet (1105) are located in the second carbon rope electrode (1102), one end of the second electrode spring (1103) abuts against the second carbon rope electrode (1102), the other end abuts against the second clamping spring sheet (1105), the second electrode center column (1101) is clamped with the second clamping spring sheet (1105) and abuts against the second carbon rope electrode (1102) through the second clamping spring sheet (1105), and the second electrode spring (1103) is configured to elastically abut the second electrode center column (1101) on the second carbon rope electrode (1102), so that the second electrode center column (1101) is located at the top of the second carbon rope electrode (1102) and clamps the carbon rope (200) on the second carbon rope electrode (1102) together with the second carbon rope electrode (1102).

5. The automatic winding assembly (100) according to claim 1, characterized in that, The automatic carbon rope winding assembly (100) further comprises a scraping wheel (4) rotatably arranged on the rotating disc (7); the scraping wheel (4) is configured to have a position contacting the carbon rope electrode (802, 1102) in a state that the rotating disc (7) rotates, so as to scrape off the carbon rope (200) wound on the carbon rope electrode (802, 1102).

6. The automatic winding assembly (100) according to claim 5, characterized in that, The scraping wheel (4) is in transmission connection with the rotating disc (7) through a scraping wheel gear (503), so that the rotating direction of the scraping wheel (4) is opposite to that of the rotating disc (7).

7. The automatic winding assembly (100) according to claim 1, characterized in that, The automatic carbon rope winding assembly (100) further comprises the power supply copper column (2001, 2002); or The automatic carbon rope winding assembly (100) further comprises a first bearing (26) and a second bearing (27), the carbon rope electrode assembly (8, 11) passes through the rotating disc (7) and is connected with the rotating disc (7) through the first bearing (26) and the second bearing (27), so that the rotating disc (7) is rotatably arranged with the carbon rope electrode assembly (8, 11) as the center; or The limiting structure limits the position of the carbon rope (200) on the carbon rope electrode (802, 1102) in a clamping or clamping manner; or The automatic carbon rope winding assembly (100) further comprises a carbon rope positioning piece (15) arranged on the rotating disc (7); the carbon rope positioning piece (15) is located between the carbon rope roll (13) and the carbon rope electrode assembly (8, 11), each carbon rope electrode (802, 1102) sequentially passes through the carbon rope (200) and contacts the carbon rope positioning piece (15); the carbon rope positioning piece (15) is configured to contact the carbon rope (200) and limit the position of the carbon rope (200).

8. The automatic winding assembly (100) according to claim 1, characterized in that, The automatic carbon rope winding assembly (100) further comprises a mounting flange (1), a baffle cover (2) and a protective cover (3); The carbon rope electrode assembly (8, 11) is arranged on the mounting flange (1), the rotating disc (7) is rotatably arranged on the mounting flange (1), and the baffle cover (2) and the protective cover (3) are arranged on two sides of the mounting flange (1) respectively to form a protection space, the carbon rope electrode assembly (8, 11), the rotating disc (7) and the carbon rope roll (13) are located in the protection space; or The automatic carbon rope winding assembly (100) further comprises a power supply copper column assembly (20), the power supply copper column assembly (20) comprises a first power supply copper column (2001), a second power supply copper column (2002), a copper column insulation cap (2003), a copper column cover plate (2004), a copper column flange seat (2005) and a copper column insulation pad (2006); the first power supply copper column (2001) and the second power supply copper column (2002) are used as the power supply copper column (2001, 2002), the copper column insulation cap (2003) is sleeved on the first power supply copper column (2001) and the second power supply copper column (2002) respectively, sequentially passes through the copper column cover plate (2004), the copper column flange seat (2005) and the copper column insulation pad (2006), and is connected with the carbon rope electrode (802, 1102) respectively; the copper column cover plate (2004) is arranged on the copper column flange seat (2005), the copper column flange seat (2005) is arranged on the mounting flange (1) through the copper column insulation pad (2006), so as to supply power to the carbon rope electrode (802, 1102) through the first power supply copper column (2001) and the second power supply copper column (2002) in a sealed vacuum state.

9. The automatic winding assembly (100) according to any one of claims 1 to 8, characterized in that, The automatic carbon rope winding assembly (100) further comprises a monitoring assembly connected to the rotating disc (7), which is configured to control the rotation of the rotating disc (7) in the state that the carbon rope segment (9) between the two carbon rope electrodes (802, 1102) is disconnected, including controlling the rotation direction and / or rotation rate of the rotating disc (7).

10. A vacuum evaporation apparatus, characterized by, The automatic carbon rope winding assembly (100) as claimed in any one of claims 1 to 9 is arranged in a housing.

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