An electric point temperature measurement method and system based on an MPCVD device

Abstract

The application belongs to the technical field of diamond cultivation, and discloses an electric point temperature measurement method and system based on an MPCVD device, the method comprising: acquiring crystal images of a plurality of target crystals in the MPCVD device through an upper computer, and determining the crystal positions of each target crystal in the crystal images; when the upper computer receives a temperature measurement instruction, driving the stepping motor according to the temperature measurement instruction, and driving the optical platform through the stepping motor; controlling the point temperature measurement instrument to perform pitching motion and rotating motion through the optical platform, so that the point temperature measurement instrument moves to each crystal position in turn; and performing temperature measurement processing on each crystal position through the point temperature measurement instrument to obtain the in-cavity crystal temperature of each target crystal. The application can realize accurate measurement of the diamond crystal temperature in the MPCVD device by driving the optical platform through the stepping motor, and controlling the spatial angle and position of the point temperature measurement instrument through the optical platform.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of diamond cultivation, and particularly relates to an electric point temperature measurement method and system based on an MPCVD device. BACKGROUND

[0002] Diamonds have extremely excellent physical and chemical properties, which have attracted people's attention. However, the reserves of natural diamonds are limited, so people have developed various methods for synthesizing diamonds, such as high pressure and high temperature (HPHT, High pressure Hightemperature), hot filament chemical vapor deposition (HFCVD, hot filament chemical vapor deposition), etc. Among them, the microwave plasma chemical vapor deposition (MPCVD, Microwave plasma chemical vapor deposition) method for synthesizing diamonds can synthesize high-quality and large-area diamonds without the introduction of impurities, and has the advantages of no electrode discharge pollution, fast deposition rate, good stability, etc., and is considered to be the best method for preparing high-quality single crystal diamonds.

[0003] In the MPCVD device, the growth quality of the diamond film is highly dependent on the temperature control in the reaction cavity. At present, a non-contact infrared point temperature measurement instrument (i.e. an infrared temperature measurement sensor) is widely used to measure the temperature of the growth substrate surface through the quartz observation window on the MPCVD device. This method has the advantages of fast response and no interference with the plasma, and is adopted by most devices.

[0004] However, in actual application, when the microwave input power in the MPCVD device is high or the methane concentration in the reaction gas is high, the plasma light intensity is significantly enhanced, which can mask the thermal radiation signal relied on by the infrared temperature measurement instrument in the prior art, so that the temperature measurement point of the diamond crystal cannot be accurately identified, the cavity temperature in the MPCVD device cannot be accurately obtained, and the normal growth of the diamond is affected.

[0005] Therefore, the prior art still needs to be improved and developed. SUMMARY

[0006] The main purpose of the present application is to provide an electric point temperature measurement method, system, terminal and computer readable storage medium based on an MPCVD device, which aims to solve the problem in the prior art that when the microwave input power in the MPCVD device is high or the methane concentration in the reaction gas is high, the thermal radiation signal relied on by the infrared temperature measurement instrument is masked, so that the temperature measurement point of the diamond crystal cannot be accurately identified, the cavity temperature in the MPCVD device cannot be accurately obtained, and the normal growth of the diamond is affected.

[0007] In order to achieve the above object, the application provides an electric point temperature measurement method based on an MPCVD device, which is applied to an electric point temperature measurement system based on an MPCVD device, and comprises a host computer, a stepper motor, an optical platform and a point temperature measurement instrument.

[0008] The host computer acquires crystal images of a plurality of target crystals in the MPCVD device and determines the crystal positions of each of the target crystals in the crystal images;

[0009] When the host computer receives a temperature measurement instruction, the stepper motor is driven according to the temperature measurement instruction, and the optical platform is driven by the stepper motor;

[0010] The point temperature measurement instrument is controlled by the optical platform to perform pitching and rotating movements, so that the point temperature measurement instrument moves to each of the crystal positions in turn;

[0011] Each of the crystal positions is measured by the point temperature measurement instrument, and the in-cavity crystal temperature of each of the target crystals is obtained.

[0012] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the host computer acquires the crystal images of the plurality of target crystals in the MPCVD device and determines the crystal positions of each of the target crystals in the crystal images, specifically comprises:

[0013] A plurality of target crystals in the MPCVD device are determined, and the plurality of target crystals are photographed in real time by a preset industrial camera to obtain the crystal images of each of the target crystals;

[0014] The crystal images are sent to the host computer, and the preset temperature measurement positions of each of the target crystals in the crystal images are identified by the host computer to obtain the crystal positions of each of the target crystals in the crystal images.

[0015] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the stepper motor comprises a first stepper motor and a second stepper motor;

[0016] When the host computer receives a temperature measurement instruction, the stepper motor is driven according to the temperature measurement instruction, and the optical platform is driven by the stepper motor, specifically comprising:

[0017] When the host computer receives a temperature measurement instruction, the host computer generates a driving instruction according to the temperature measurement instruction;

[0018] The host computer sends the driving instruction to a stepper motor driver, and the stepper motor driver drives the first stepper motor and the second stepper motor according to the driving instruction.

[0019] The first stepper motor and the second stepper motor drive the optical platform according to the driving instruction.

[0020] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the optical platform comprises a first optical platform and a second optical platform.

[0021] The first stepper motor and the second stepper motor drive the optical platform according to the driving instruction, specifically comprising:

[0022] The first stepper motor is connected with the first optical platform, and drives the first optical platform according to the driving instruction.

[0023] The second stepper motor is connected with the second optical platform, and drives the second optical platform according to the driving instruction.

[0024] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the optical platform controls the point temperature measurement instrument to perform pitching motion and rotating motion, and the point temperature measurement instrument moves to each crystal position in turn, and the method further comprises:

[0025] The host computer is connected with the point temperature measurement instrument, and the host computer sends the crystal position of each target crystal to the point temperature measurement instrument.

[0026] The point temperature measurement instrument identifies each crystal position to obtain a plurality of red point temperature measurement positions.

[0027] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the optical platform controls the point temperature measurement instrument to perform pitching motion and rotating motion, and the point temperature measurement instrument moves to each crystal position in turn, specifically comprising:

[0028] The first optical platform and the second optical platform determine a preset temperature measurement sequence of a plurality of red point temperature measurement positions, and the first optical platform controls the point temperature measurement instrument to perform pitching motion according to the preset temperature measurement sequence and each red point temperature measurement position.

[0029] The second optical platform controls the point temperature measurement instrument to perform rotating motion according to the preset temperature measurement sequence and each red point temperature measurement position, so that the point temperature measurement instrument moves to each crystal position in turn.

[0030] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the optical platform controls the point temperature measurement instrument to perform the pitching motion and the rotating motion, so that the point temperature measurement instrument moves to each crystal position in sequence, and then the method further comprises the following steps of:

[0031] When the point temperature measurement instrument moves to each crystal position in sequence, a verification process is performed on each crystal position;

[0032] If the verification is passed, the upper computer stores each crystal position and labels it as a motor absolute position;

[0033] When the target crystal is measured again, the step motor and the optical platform control the point temperature measurement instrument to move according to the motor absolute position.

[0034] Optionally, the electric point temperature measurement method based on the MPCVD device, wherein the point temperature measurement instrument performs the temperature measurement process on each crystal position, so as to obtain the in-cavity crystal temperature of each target crystal, and then the method further comprises the following steps of:

[0035] The point temperature measurement instrument uploads each in-cavity crystal temperature to the upper computer, the upper computer superimposes each in-cavity crystal temperature on the corresponding crystal image to obtain an in-cavity crystal temperature image, and the in-cavity crystal temperature image is visually displayed.

[0036] In addition, in order to achieve the above-mentioned purpose, the application further provides an electric point temperature measurement system based on an MPCVD device, wherein the electric point temperature measurement system based on the MPCVD device comprises an upper computer, a step motor, an optical platform and a point temperature measurement instrument, and the upper computer, the step motor, the optical platform and the point temperature measurement instrument are sequentially connected.

[0037] The upper computer is used to acquire the crystal image and the crystal position of each target crystal in the MPCVD device, and drive the step motor.

[0038] The step motor is used to drive the optical platform.

[0039] The optical platform is used to control the point temperature measurement instrument to perform the pitching motion and the rotating motion.

[0040] The point temperature measurement instrument is used to perform the temperature measurement process on each target crystal.

[0041] Optionally, the electric point temperature measurement system based on the MPCVD device, wherein the step motor and the optical platform are connected through a synchronous belt or a worm gear transmission.

[0042] The point temperature measurement instrument is an infrared sensor with a 1.6 μm or 2.2 μm waveband filter.

[0043] In the present application, the host computer acquires crystal images of a plurality of target crystals in the MPCVD device, and determines the crystal positions of each of the target crystals in the crystal images; when the host computer receives a temperature measurement instruction, the step motor is driven according to the temperature measurement instruction, and the optical platform is driven by the step motor; the pitch and rotation movements of the point temperature measuring instrument are controlled by the optical platform, so that the point temperature measuring instrument moves to each of the crystal positions in turn; the temperature of each of the target crystals is obtained by the point temperature measuring instrument. BRIEF DESCRIPTION OF DRAWINGS

[0044] Figure 1 is a flowchart of a preferred embodiment of the electric point temperature measurement method based on the MPCVD device of the present application;

[0045] Figure 2 is a schematic diagram of the overall structure of the system of a preferred embodiment of the electric point temperature measurement method based on the MPCVD device of the present application; DETAILED DESCRIPTION

[0046] To make the purpose, technical solutions and advantages of the present application clearer and more explicit, the present application is further described in detail below with reference to the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application, and are not used to limit the present application.

[0047] In the MPCVD device, the growth quality of the diamond thin film is highly dependent on the temperature control in the reaction cavity. At present, a non-contact infrared point temperature measuring instrument (i.e. an infrared temperature measuring sensor) is widely used to measure the temperature of the growth substrate surface through the quartz observation window on the MPCVD device. This method has the advantages of fast response and no interference with the plasma, and is adopted by most devices.

[0048] However, the following problems exist in practical application: 1. strong light interference leads to temperature measurement failure: when the microwave input power is high or the concentration of methane (CH4) in the reaction gas is high, the plasma light intensity is significantly enhanced, especially in the visible and near-infrared wave bands, which can seriously drown the thermal radiation signal relied on by the infrared temperature measuring instrument, resulting in its inability to accurately identify the temperature measurement point, and the occurrence of "overexposure" or "loss of lock" (in infrared temperature measurement, "overexposure" refers to the total radiation energy received by the detector of the temperature measuring instrument far exceeding the upper limit of its range, resulting in saturation of the output signal; "loss of lock" refers to the inability of the infrared temperature measuring instrument to continuously and stably identify and track the preset temperature measurement area or target signal, resulting in temperature reading interruption, jumping or complete failure), causing temperature measurement failure or data drift. 2. large limitation of fixed temperature measurement position: the installation position of the traditional point temperature measuring instrument is fixed, and only the temperature of the substrate center or a certain specific area can be measured, and the temperature distribution of multiple points on the substrate surface cannot be obtained, making it difficult to evaluate the temperature uniformity and limiting the process optimization capability. 3. inconvenient manual adjustment: if the temperature measurement angle or position needs to be changed, the probe direction usually needs to be adjusted manually, which affects the production efficiency, and frequent adjustment can also affect the process under temperature control. 4. lack of dynamic light avoidance capability: the brightness distribution of plasma changes dynamically with process parameters, and it is difficult to avoid the high brightness area with fixed viewing angle, and it is impossible to achieve "dark temperature measurement". Therefore, the temperature measurement method based on the fixed point temperature measuring instrument in the prior art has been difficult to meet the demand for accurate temperature monitoring under high power and high gas concentration conditions, and a new type of temperature measurement system capable of dynamically adjusting the temperature measurement viewing angle, avoiding strong light interference and realizing multi-point temperature measurement is urgently needed.

[0049] To solve the problem of temperature measurement failure of the infrared point temperature measuring instrument in the existing MPCVD equipment under high power and high gas concentration conditions due to strong light interference of plasma, the present application provides an infrared temperature measurement positioning system capable of electrically adjusting the temperature measurement viewing angle and position, which has the following functions: 1. realizing multi-point temperature measurement on the substrate surface; 2. supporting online dynamic adjustment; 3. improving the stability, accuracy and intelligent level of temperature measurement.

[0050] The electric point temperature measurement method based on the MPCVD equipment according to the preferred embodiment of the present application, as shown in Figure 1 and Figure 2 The electric point temperature measurement method based on the MPCVD equipment is applied to an electric point temperature measurement system based on the MPCVD equipment, which comprises a host computer, a stepper motor, an optical platform and a point temperature measuring instrument, and the electric point temperature measurement method based on the MPCVD equipment comprises the following steps:

[0051] Step S10, acquiring crystal images of a plurality of target crystals in the MPCVD equipment through the host computer, and determining the crystal positions of each of the target crystals in the crystal images.

[0052] The application belongs to the technical field of semiconductor material preparation and high temperature measurement, and particularly relates to an infrared temperature measurement system applied to a microwave plasma chemical vapor deposition device, which is particularly suitable for accurately and stably measuring the temperature in a cavity during diamond film growth.

[0053] As shown in the figure, the application comprises a point temperature measurement instrument, an optical platform, a stepping motor, a control system and upper computer software, in addition to which, an image auxiliary identification module and a safety protection and sealing structure can also be included. Figure 2

[0054] Real-time images are collected by an industrial camera and uploaded to an upper computer of the control system; the upper computer analyzes the real-time images to obtain analysis results, and starts a stepping motor driving program according to the analysis results.

[0055] The functions of the control system include: 1, controlling the coordinated movement of multi-axis motors (i.e. the stepping motor in the application) using the RS-485 communication interface standard with the upper computer; 2, receiving the output signals and image data of the point temperature measurement instrument to realize closed-loop regulation; 3, supporting Modbus (a communication protocol) or TCP or Ethernet communication to integrate the collected data into the device main control system.

[0056] The application also provides a man-machine interaction interface: 1, the upper computer software can indirectly and real-time adjust the probe angle; 2, a multi-point temperature measurement program: preset multiple temperature measurement positions, automatically patrol and measure and record the temperature distribution; 3, video superimposed display: mark the temperature measurement area on the cavity image for intuitive display.

[0057] Specifically, a plurality of target crystals in the MPCVD device are determined, and each target crystal is real-time photographed by a preset industrial camera to obtain a crystal image of each target crystal; the crystal image is sent to the upper computer, and a preset temperature measurement position of each target crystal in the crystal image is identified by the upper computer to obtain a crystal position of each target crystal in the crystal image.

[0058] As shown in the figure, the application first collects the growth real-time images of the crystals in the cavity of the MPCVD device by a preset industrial camera, and the function of collecting images is: 1, facilitating the user to observe when adjusting the point temperature measurement instrument and recording the positions of each crystal target, without adjusting the upper computer software once and then observing the adjustment at the quartz observation window of the MPCVD device; 2, the growth in the cavity can be observed in real-time by the upper computer software without manually moving to the device to observe. Figure 2

[0059] ​​The collection process of the real-time image of the crystal growth in the cavity of the MPCVD device is as follows: an industrial camera is integrated beside the quartz observation window of the MPCVD device to take real-time visible light images of the inside of the cavity to identify the distribution of the plasma bright area. At the same time, through the collected crystal images, the best temperature measurement viewing angle can be determined, that is, the viewing angle that can cover all the observed objects and all the observed objects can be clearly captured, so as to realize the function of "image guiding temperature measurement".

[0060] The preset industrial camera can acquire the growth image of the diamond crystal in the cavity of the MPCVD device in real time, and the upper computer can mark the position of the diamond crystal to be measured on the growth image, so that the subsequent stepping motor, optical platform and point temperature measuring instrument can accurately find the crystal position of each target crystal, thereby improving the accuracy of temperature measurement of the target crystal.

[0061] In step S20, when the upper computer receives a temperature measurement instruction, the stepping motor is driven according to the temperature measurement instruction, and the optical platform is driven by the stepping motor.

[0062] As shown in Figure 2 When it is necessary to measure the temperature of the diamond crystal in the MPCVD device, the "temperature measurement button" can be used. When the upper computer receives a temperature measurement instruction (equivalent to the user triggering the temperature measurement button), the stepping motor driving program is controlled to drive the stepping motor to work according to the temperature measurement instruction, and then the optical platform is controlled by the stepping motor.

[0063] Specifically, when the upper computer receives a temperature measurement instruction, the upper computer generates a driving instruction according to the temperature measurement instruction; the upper computer sends the driving instruction to the stepping motor driving program, and the stepping motor driving program drives the first stepping motor and the second stepping motor according to the driving instruction.

[0064] When the user triggers the "temperature measurement button" on the upper computer (equivalent to the upper computer receiving a temperature measurement instruction), the upper computer generates a driving instruction and starts the stepping motor through the driving instruction. At the same time, the stepping motor rotates according to the driving instruction and the crystal position to be measured, and then the stepping motor drives the optical platform to perform pitching and rotating movements to realize the movement of the point temperature measuring instrument.

[0065] The first stepping motor is connected with the first optical platform and drives the first optical platform according to the driving instruction; the second stepping motor is connected with the second optical platform and drives the second optical platform according to the driving instruction.

[0066] The application is provided with two stepping motors and two optical platforms, each of the stepping motors is used to drive an optical platform, wherein, one optical platform is used to realize the pitching motion, and the other is used to realize the rotating motion, so that the accurate control of the position of the point temperature measuring instrument can be realized.

[0067] In step S30, the point temperature measuring instrument is controlled to pitch and rotate through the optical platform, so that the point temperature measuring instrument moves to each crystal position in sequence.

[0068] The point temperature measuring instrument provided in the application adopts an infrared sensor with a high response frequency and a narrow waveband (such as 1.6 μm or 2.2 μm) filter, so as to avoid the strong emission waveband of the plasma and enhance the selectivity of the thermal radiation signal (the application preferably adopts a point temperature measuring instrument with a wavelength of 1.6 μm, because the wavelength is less affected by the plasma ball).

[0069] The application is also provided with optical platforms which are installed outside the quartz observation window of the MPCVD device and adopt a "pitch-yaw" double-axis structure (Pitch-Yaw Mechanism), so that the angle adjustment of the point temperature measuring instrument in the horizontal and vertical directions can be realized (the pitch axis realizes the vertical direction adjustment, and the rotating axis realizes the horizontal direction adjustment).

[0070] Further, the application adjusts the direction and angle of the probe of the point temperature measuring instrument through the optical platform, wherein, each degree of freedom is driven by a stepping motor, and the synchronous belt or worm gear transmission is adopted to ensure the stability and no backlash.

[0071] Specifically, the upper computer is connected with the point temperature measuring instrument, and the crystal positions of each target crystal are sent to the point temperature measuring instrument through the upper computer; each crystal position is identified through the point temperature measuring instrument, so as to obtain a plurality of red point temperature measuring positions.

[0072] After the crystal positions are sent to the point temperature measuring instrument, the point temperature measuring instrument processes the crystal positions, and generates corresponding red point temperature measuring positions (so that the temperature measuring position of the diamond crystal cannot be found when the concentration in the cavity is increased, and the red point temperature measuring position is set, so that the stepping motor can find the accurate temperature measuring position according to the memory).

[0073] The specific implementation process is as follows: the point temperature measuring instrument is opened to display the red point of the temperature measuring position, in the upper computer software, the real-time video (i.e. the crystal image) is fed back through the software, and the stepping motor is controlled to operate through the function button (sending a command to the motor driver) of the upper computer software, wherein, the application is provided with two stepping motors, and the two stepping motors are connected with the optical platforms (two optical platforms are provided, and correspond to the two stepping motors), the stepping motor drives the optical platform to rotate, and the point temperature measuring instrument is installed on the optical platform.

[0074] The first optical platform and the second optical platform determine a preset temperature measurement sequence of a plurality of the red dot temperature measurement positions, the first optical platform controls the point temperature measurement instrument to perform pitching motion according to the preset temperature measurement sequence and each of the red dot temperature measurement positions, and the second optical platform controls the point temperature measurement instrument to perform rotating motion according to the preset temperature measurement sequence and each of the red dot temperature measurement positions, so that the point temperature measurement instrument moves to each of the crystal positions in turn.

[0075] Two optical platforms are arranged in the application, one is used for controlling the point temperature measurement instrument to perform pitching motion, and the other is used for controlling the point temperature measurement instrument to perform rotating motion, so that all positions on the molybdenum sheet in the cavity of the MPCVD device can be scanned, that is, the user can control the buttons of the stepping motor on the upper computer software to make the point temperature measurement instrument move to the target position.

[0076] It can be understood that two stepping motors are arranged in the application and are connected to two optical platforms respectively, one is a pitching platform, and the other is a rotating platform, the upper computer software is connected with a camera, and the camera shoots the inside of the cavity in real time. When the temperature is formally measured, the probe red dot of the point temperature measurement instrument is turned on, the real-time video image is observed through the upper computer software, and the function buttons of the motor are operated through the upper computer software, so as to adjust the motor.

[0077] Further, when the point temperature measurement instrument moves to each of the crystal positions in turn, a verification process is performed on each of the crystal positions, if the verification is passed, the upper computer stores each of the crystal positions and marks as the absolute position of the motor, and when the target crystal is measured again, the stepping motor and the optical platform control the point temperature measurement instrument to move according to the absolute position of the motor.

[0078] After the temperature measurement is completed, the crystal position can be saved, the system records the crystal position as the absolute position of the motor, so that the next time the crystal position needs to be measured, the stepping motor can scan the position, and it is not necessary to identify the crystal position through the upper computer again.

[0079] In step S40, the point temperature measurement instrument is used to perform temperature measurement on each of the crystal positions, so as to obtain the in-cavity crystal temperature of each of the target crystals.

[0080] As shown in Figure 2 When the point temperature measurement instrument moves to the crystal position to be measured, the temperature of the diamond crystal at the crystal position is measured, and the temperature data after the measurement is directly sent to the upper computer of the control system for visual display.

[0081] The application measures the temperature of the diamond film in the MPCVD equipment through the temperature measuring probe of the adjusted point temperature measuring instrument, and feeds back the real-time temperature data to the host computer of the control system for display.

[0082] Further, the point temperature measuring instrument uploads each cavity crystal temperature to the host computer, the host computer superimposes each cavity crystal temperature on the corresponding crystal image to obtain a cavity crystal temperature image, and the cavity crystal temperature image is visually displayed.

[0083] It can be understood that, in order to improve the visualization effect, the temperature data collected by the application is superimposed on the crystal image collected by the industrial camera, so that the user can more intuitively obtain the temperature distribution of the diamond crystal in the cavity of the MPCVD equipment, and then the growth state of the diamond can be judged, and the normal growth of the diamond is ensured.

[0084] In summary, the application provides an adjustable infrared temperature measurement positioning system based on a stepper motor drive, which dynamically adjusts the observation angle of the temperature measurement probe during the operation of the equipment by electrically controlling the spatial angle and position of the temperature measurement probe, so as to realize stable and reliable temperature measurement.

[0085] The application has the following advantages:

[0086] 1. Multi-point temperature measurement is realized: temperature measurement of different regions of the diamond substrate is supported, and data support is provided for process optimization;

[0087] 2. Online adjustment: the temperature measurement probe of the point temperature measuring instrument can be dynamically adjusted during the operation of the equipment, which greatly improves the production efficiency;

[0088] 3. Enhance process repeatability: save temperature measurement parameter templates to ensure consistent measurement conditions between different batches;

[0089] 4. Strong compatibility: compatible with existing MPCVD equipment, low modification cost;

[0090] 5. High safety: avoid the influence of frequent personnel on the strong light in the cavity.

[0091] Further, as shown in Figure 2 Based on the above electric point temperature measurement method based on the MPCVD equipment, the application also correspondingly provides an electric point temperature measurement system based on the MPCVD equipment, wherein the electric point temperature measurement system based on the MPCVD equipment comprises a host computer, a stepper motor, an optical platform and a point temperature measuring instrument, and the host computer, the stepper motor, the optical platform and the point temperature measuring instrument are connected in sequence.

[0092] The host computer is used to acquire the crystal image and the crystal position of each target crystal in the MPCVD device, and drive the stepper motor;

[0093] The stepper motor is used to drive the optical platform;

[0094] The optical platform is used to control the point temperature measuring instrument to perform pitching motion and rotating motion;

[0095] The point temperature measuring instrument is used to perform temperature measuring treatment on each target crystal.

[0096] Further, the stepper motor and the optical platform are connected through a synchronous belt or a worm gear transmission;

[0097] The point temperature measuring instrument is an infrared sensor of a 1.6 mu m or 2.2 mu m waveband filter.

[0098] In summary, the application provides an electric point temperature measuring method and system based on an MPCVD device, the method comprising: acquiring the crystal image of a plurality of target crystals in the MPCVD device through the host computer, and determining the crystal position of each target crystal in the crystal image; when the host computer receives a temperature measuring instruction, driving the stepper motor according to the temperature measuring instruction, and driving the optical platform through the stepper motor; controlling the point temperature measuring instrument to perform pitching motion and rotating motion through the optical platform, so that the point temperature measuring instrument moves to each crystal position in turn; performing temperature measuring treatment on each crystal position through the point temperature measuring instrument, and obtaining the in-cavity crystal temperature of each target crystal. The application drives the optical platform through the stepper motor, and controls the spatial angle and position of the point temperature measuring instrument through the optical platform, so that the point temperature measuring instrument can dynamically adjust the observation angle during the operation of the MPCVD device, and can accurately measure the temperature of the diamond crystal in the MPCVD device.

[0099] It should be noted that in this document, the terms "comprise", "comprise", or any other variant thereof are intended to cover non-exclusive inclusion, so that processes, methods, articles or terminals including a series of elements not only include those elements, but also include other elements not explicitly listed, or include elements inherent to such processes, methods, articles or terminals. Without more limitations, the element defined by the statement "comprises a" does not exclude the presence of another identical element in the process, method, article or terminal comprising the element.

[0100] It should be understood that the application is not limited to the above examples, and those skilled in the art can make improvements or changes according to the above description, and all these improvements and changes shall belong to the protection scope of the claims of the application.

Claims

1. A method for electrically operated point temperature measurement based on MPCVD equipment, characterized in that, The electric point temperature measurement method based on MPCVD equipment is applied to an electric point temperature measurement system based on MPCVD equipment. The electric point temperature measurement system based on MPCVD equipment includes a host computer, a stepper motor, an optical platform, and a point temperature sensor. The electric point temperature measurement method based on MPCVD equipment includes: The host computer acquires crystal images of multiple target crystals in the MPCVD equipment and determines the crystal position of each target crystal in the crystal image. When the host computer receives a temperature measurement command, it drives the stepper motor according to the temperature measurement command, and drives the optical platform through the stepper motor; The optical platform controls the point thermometer to perform pitch and rotation movements, so that the point thermometer moves sequentially to each of the crystal positions. The temperature of each crystal position is measured by the point thermometer to obtain the intracavity crystal temperature of each target crystal. The step of acquiring crystal images of multiple target crystals in the MPCVD equipment via the host computer and determining the crystal position of each target crystal in the crystal image specifically includes: Multiple target crystals in the MPCVD equipment are identified, and the multiple target crystals are photographed in real time using a preset industrial camera to obtain a crystal image of each target crystal; The crystal image is sent to the host computer, and the host computer marks the preset temperature measurement position of each target crystal in the crystal image to obtain the crystal position of each target crystal in the crystal image. The optical platform controls the point thermometer to perform pitch and rotation movements, causing the point thermometer to move sequentially to each of the crystal positions. Prior to this, the following steps are also included: The host computer establishes a connection with the point temperature measuring instrument, and sends the crystal position of each target crystal to the point temperature measuring instrument through the host computer; The point thermometer marks each crystal position to obtain multiple red dot temperature measurement positions, thereby avoiding the strong emission band of the plasma and enhancing the selectivity of thermal radiation signals. The process of controlling the point thermometer to perform pitch and rotation movements via the optical platform, causing the point thermometer to move sequentially to each of the crystal positions, further includes: When the point temperature measuring instrument moves sequentially to each of the crystal positions, a verification process is performed on each of the crystal positions; If the verification passes, the host computer stores the position of each crystal and marks it as the absolute position of the motor; When the target crystal is measured again, the stepper motor and the optical platform control the movement of the point temperature measuring instrument according to the absolute position of the motor; After the temperature measurement is completed, the crystal position is saved and recorded as the absolute position of the motor. When it is necessary to measure the temperature of the crystal position, the absolute position of the motor is scanned by the stepper motor, without the need for the host computer to identify the crystal position. The point temperature measuring instrument is an infrared sensor with a 1.6μm or 2.2μm band filter.

2. The electrically operated point temperature measurement method based on MPCVD equipment according to claim 1, characterized in that, The stepper motor includes a first stepper motor and a second stepper motor; When the host computer receives a temperature measurement command, it drives the stepper motor according to the temperature measurement command, and the stepper motor drives the optical platform, specifically including: When the host computer receives a temperature measurement command, the host computer generates a drive command based on the temperature measurement command; The host computer sends the drive command to the stepper motor driver program, and the stepper motor driver program drives the first stepper motor and the second stepper motor according to the drive command; The first stepper motor and the second stepper motor drive the optical platform according to the drive command.

3. The electrically operated point temperature measurement method based on MPCVD equipment according to claim 2, characterized in that, The optical platform includes a first optical platform and a second optical platform; The first stepper motor and the second stepper motor drive the optical platform according to the drive command, specifically including: The first stepper motor establishes a connection with the first optical platform and drives the first optical platform according to the drive command; The second stepper motor establishes a connection with the second optical platform and drives the second optical platform according to the drive command.

4. The electrically operated point temperature measurement method based on MPCVD equipment according to claim 3, characterized in that, The step of controlling the point thermometer to perform pitch and rotation movements via the optical platform, so that the point thermometer sequentially moves to each of the crystal positions, specifically includes: The first optical platform and the second optical platform determine a preset temperature measurement sequence for the multiple red dot temperature measurement positions. The first optical platform controls the point temperature measuring instrument to perform pitch movement according to the preset temperature measurement sequence and each red dot temperature measurement position. The second optical platform controls the point thermometer to rotate according to the preset temperature measurement sequence and each of the red dot temperature measurement positions, so that the point thermometer moves sequentially to each of the crystal positions.

5. The electrically operated point temperature measurement method based on MPCVD equipment according to claim 1, characterized in that, The step of measuring the temperature at each crystal position using the point thermometer to obtain the intracavity crystal temperature of each target crystal further includes: The point thermometer uploads the temperature of each intracavity crystal to the host computer. The host computer overlays the temperature of each intracavity crystal onto the corresponding crystal image to obtain an intracavity crystal temperature image, and then visualizes the intracavity crystal temperature image.

6. The method for electrically operated point temperature measurement based on MPCVD equipment according to any one of claims 1-5, characterized in that, The stepper motor and the optical platform are connected by a synchronous belt or a worm gear transmission.

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