Mask plate fixing device, mask plate assembly and evaporation equipment

Abstract

The invention discloses a mask plate fixing device, a mask plate assembly and evaporation equipment, the mask plate fixing device comprises supporting assemblies oppositely arranged in the first direction, a preset area is formed between the oppositely-arranged supporting assemblies, each supporting assembly comprises a first surface facing the second direction, and the second direction is perpendicular to the first direction; the first surface comprises a first fixing area, the first fixing area comprises a welding surface and a supporting structure, the welding surface is used for welding the mask plate, the supporting structure is located on the side, close to the preset area, of the welding surface, and the supporting structure protrudes out of the welding surface in the second direction. According to the mask plate fixing device provided by the invention, wrinkles of the mask plate in the net stretching process can be reduced, and the net stretching precision of the mask plate is improved.

Description

Technical Field

[0001] This application belongs to the field of display technology, and in particular relates to a mask fixing device, a mask assembly, and an evaporation equipment. Background Art

[0002] Organic Light Emitting Diode (OLED) display panels possess numerous advantages such as high contrast, low power consumption, wide viewing angle, and thinness, and are widely used in smartphones, automotive applications, and smart wearables. In the fabrication process of OLED display panels, the light-emitting layer is typically formed through a vapor deposition process. In this process, the substrate to be deposited is placed above the vapor deposition apparatus, and a mask is positioned between the apparatus and the substrate. The light-emitting layer is deposited onto the substrate through the mask. However, in existing technologies, the light-emitting layer formed using the vapor deposition process suffers from regional color mixing issues, affecting product yield. Summary of the Invention

[0003] The purpose of this application is to at least solve the problem of regional color mixing in the luminescent layer formed by the vapor deposition process. This purpose is achieved through the following technical solution:

[0004] A first aspect of this application provides a mask fixing device, including support components disposed opposite to each other along a first direction, with a preset area formed between the oppositely disposed support components. The support components include a first surface facing a second direction, the second direction being perpendicular to the first direction. The first surface includes a first fixing area, the first fixing area including a welding surface and a support structure. The welding surface is used for welding the mask. The support structure is located on the side of the welding surface near the preset area, and the support structure protrudes from the welding surface along the second direction.

[0005] The mask fixing device provided in this application includes two support components arranged opposite to each other along a first direction. This device is used to fix a mask, with one end of the mask fixed to one support component and the other end fixed to the other support component, thereby achieving the meshing of the mask. A preset area is formed between the oppositely arranged support components. The preset area may include a cutout portion that communicates with a mask opening on the mask, allowing the vapor deposition material to pass sequentially through the cutout portion and the mask opening during subsequent vapor deposition. Each support component includes a first surface facing a second direction, which is perpendicular to the first direction. The first surface includes a first fixing area for fixing the mask. Specifically, the first fixing area includes a welding surface and a support structure, which work together to fix and support the mask. The welding surface is used for welding and fixing to the mask, thereby fixing the position of the mask. The support structure is located on the side of the welding surface close to the preset area, and the support structure protrudes from the welding surface along the second direction. Thus, the mask plate can be supported by the support structure, allowing the mask plate to unfold on the support structure. This reduces wrinkles on the mask plate during the meshing process and reduces the probability of wrinkles generated at the fixed position on the welding surface spreading towards the preset area. This further improves the wrinkles during the meshing process, reduces the difficulty of meshing, and improves the meshing accuracy of the mask plate.

[0006] In some embodiments of this application, the support structure includes a support surface and a support portion, the support surface being connected to the welding surface, the support portion being located on the support surface, and the support portion protruding from the welding surface along the second direction.

[0007] In some embodiments of this application, the support portion is formed at the edge of the support surface near the preset area.

[0008] In some embodiments of this application, the support portion includes a first protrusion structure disposed on the support surface, the first protrusion structure being disposed along the extending direction of the support surface, and the first protrusion structure protruding from the welding surface along the second direction.

[0009] In some embodiments of this application, the support surface has a first edge near the preset region, and the first protrusion structure includes a second edge near the preset region;

[0010] The first edge coincides with the second edge; or, the first edge is closer to the preset area relative to the second edge, and the first protrusion structure protrudes from the first edge along the second direction.

[0011] In some embodiments of this application, the support surface is planar, and the support surface has a first edge and a third edge disposed opposite to each other, the third edge being connected to the welding surface, and the first edge being closer to the preset area relative to the third edge.

[0012] In some embodiments of this application, the welding surface is planar, and the supporting surface is parallel to the welding surface; or,

[0013] The welding surface is planar, and the welding surface includes a fourth edge and a fifth edge disposed opposite to each other. The fourth edge is connected to the support surface and protrudes from the fifth edge along the second direction.

[0014] In some embodiments of this application, the first edge protrudes toward the second direction relative to the third edge, the inclination angle of the support surface relative to the reference plane ranges from 0.1° to 10°, and the reference plane is the plane formed by the first direction and the setting direction of the support component.

[0015] In some embodiments of this application, an isolation groove is provided between the support surface and the welding surface.

[0016] In some embodiments of this application, the support surface includes an arcuate surface that protrudes toward the second direction, and the arcuate surface forms the support portion.

[0017] The second aspect of this application also provides a mask assembly, including any of the mask fixing devices provided in the first aspect of this application;

[0018] The mask assembly further includes a mask plate, wherein two opposite edges of the mask plate along a first direction are respectively fixed to the welding surface of the corresponding support assembly, and the support structure supports the mask plate.

[0019] In some embodiments of this application, the mask assembly further includes a support layer located between the mask and the mask fixing device, the support layer including a plurality of protrusions fixed to the mask fixing device.

[0020] In some embodiments of this application, the first surface is provided with a recessed portion, the recessed portion is located at both ends of the first fixing area along the setting direction of the support component, and the protrusion is fixed in the recessed portion.

[0021] In some embodiments of this application, the support layer includes a support plate, the support plate includes a support plate body and a through hole formed in the support plate body, the through hole is disposed opposite to the preset area, and the protrusion is located at the edge of the support plate body.

[0022] In some embodiments of this application, the support layer includes multiple support strips, which intersect to form a hollow area. The hollow area is disposed opposite to the preset area, and the protruding part is located at the end of the support strip.

[0023] The second aspect of this application also provides a vapor deposition apparatus, including a vapor deposition device, and further including any of the mask fixing devices provided in the first aspect of this application or any of the mask assembly provided in the second aspect of this application, wherein the preset area in the mask fixing device matches the vapor deposition area of ​​the vapor deposition device, and the second direction is the same as the vapor deposition direction of the vapor deposition device. Attached Figure Description

[0024] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0025] Figure 1 This is a schematic diagram of the structure of a mask fixing device provided in an embodiment of this application;

[0026] Figure 2 yes Figure 1 The first type of cross-sectional view along the A-A' direction;

[0027] Figure 3 This is a reference diagram showing the usage state of a mask fixing device provided in an embodiment of this application;

[0028] Figure 4 yes Figure 1 The second type of cross-sectional view along the A-A' direction;

[0029] Figure 5 yes Figure 1 The third type of cross-sectional view along the A-A' direction;

[0030] Figure 6 This is a reference diagram showing the usage state of another mask fixing device provided in the embodiments of this application;

[0031] Figure 7 yes Figure 1 The fourth cross-sectional view along the A-A' direction;

[0032] Figure 8 yes Figure 1 The fifth type of cross-section along the A-A' direction;

[0033] Figure 9 yes Figure 1 The sixth cross-sectional view along the A-A' direction;

[0034] Figure 10 yes Figure 1 The seventh cross-sectional view along the A-A' direction;

[0035] Figure 11 This is a schematic diagram of the structure of a mask assembly provided in an embodiment of this application;

[0036] Figure 12 This is a schematic diagram of the structure of the support layer in a mask assembly provided in an embodiment of this application.

[0037] The attached figures are labeled as follows:

[0038] 1. Mask plate fixing device; x, first direction; 10, preset area; 101, cutout portion; 11, support assembly; y, second direction; 110, first surface; 111, first fixing area; 1111, welding surface; 1112, support structure; 1113, support surface; 1114, support portion; 1115, first protruding structure; z, third direction; L1, first edge; L2, second edge; L3, third edge; L4, fourth edge; L5, fifth edge; 1116, isolation groove; 2. Mask plate assembly; 3. Mask plate; 4. Support layer; 40, protrusion; 41, support plate; 411, support plate body; 412, through hole; 112, second fixing area; 1121, recessed portion; 42, support strip; 421, cutout area; 12, connecting assembly. Detailed Implementation

[0039] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0040] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0041] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0042] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure is flipped, an element described as "below other elements or features" or "below other elements or features" would subsequently be oriented as "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0043] The vapor deposition process requires a mask assembly, which includes a mask holder, a precision metal mask, and a support layer. The precision metal mask needs to be stretched and fixed to the mask holder. During stretching, the precision metal mask is stretched to a designated area and then fixed to the mask holder using a laser welding process. However, in related technologies, the mask is prone to wrinkling after stretching, severely affecting the yield of display panel fabrication.

[0044] Research has revealed that wrinkles easily form on photomasks after they are stretched. The reason is that the photomask is fixed to the photomask fixing device via a welding platform. However, due to the fixing effect of the weld points on the welding platform and the tensile force during the stretching process, wrinkles easily form after the photomask is fixed to the fixing device. These wrinkles extend from the area of ​​the photomask opposite the welding platform to the evaporation zone, resulting in poor stretching. Poor stretching can lead to gaps between the photomask assembly and the substrate to be evaporated, causing regional color mixing after evaporation. Specifically, the light-emitting layers in adjacent sub-pixel areas are prone to positional shifts, resulting in color mixing, which severely affects the yield of display panel fabrication. Based on the research on the above problems, this application provides a photomask fixing device, a photomask assembly, and an evaporation equipment to improve the stretching accuracy of photomasks.

[0045] like Figure 1 and Figure 2 As shown, according to an embodiment of this application, a mask fixing device 1 is proposed. The mask fixing device 1 includes support components 11 arranged opposite each other along a first direction x, with a preset region 10 formed between the oppositely arranged support components 11. During the vapor deposition process, the preset region 10 matches the vapor deposition region. The support component 11 includes a first surface 110 facing a second direction y, which is perpendicular to the first direction x. The first surface 110 includes a first fixing region 111, which includes a welding surface 1111 and a support structure 1112. The welding surface 1111 and the support structure 1112 can both extend along the setting direction of the support component. The welding surface 1111 is used to weld the mask 3, and the support structure 1112 is located on the side of the welding surface 1111 near the preset region 10, protruding from the welding surface 1111 along the second direction y.

[0046] The mask fixing device 1 provided in this application includes two support components 11 arranged opposite to each other along the first direction x, such as... Figure 3As shown, the mask fixing device 1 is used to fix the mask 3. One end of the mask 3 is fixed to one of the support components 11, and the other end is fixed to another support component 11, thereby achieving the mesh setting of the mask 3. A preset area 10 is formed between the opposing support components 11. The preset area 10 may include a cutout portion 101, which communicates with the mask opening on the mask 3, so that the vapor deposition material can pass through the cutout portion 101 and the mask opening sequentially during the subsequent vapor deposition process. The support component 11 includes a first surface 110 facing the second direction y, which is perpendicular to the first direction x. The first surface 110 includes a first fixing area 111, which is used to fix the mask 3. Specifically, the first fixing area 111 includes a welding surface 1111 and a support structure 1112. The welding surface 1111 and the support structure 1112 work together to fix and support the mask 3. The welding surface 1111 is used to weld and fix the mask plate 3, thereby fixing the position of the mask plate 3. The support structure 1112 is located on the side of the welding surface 1111 close to the preset area 10, and the support structure 1112 protrudes from the welding surface 1111 along the second direction y. The support structure 1112 can support the mask plate 3, allowing the mask plate 3 to be laid out on the support structure 1112. This reduces wrinkles in the mask plate 3 during the meshing process and reduces the probability of wrinkles generated at the fixed position of the welding surface 1111 spreading towards the preset area 10. This further improves the wrinkles during the meshing process, reduces the difficulty of meshing, and improves the meshing accuracy of the mask plate 3.

[0047] The mask plate can be fixed to the mask plate fixing device in the following way: the mask plate is stretched to a suitable position along the first direction using a tensioning device; then the mask plate is pressed down and adhered to the welding surface, and the area of ​​the mask plate corresponding to the welding surface is welded to the welding surface. In related technologies, after the mask plate is welded to the welding surface, due to the tensile force in the first direction and the effect of welding fixation, wrinkles extending inward from the welding surface 1111 will appear on the mask plate 3.

[0048] The mask fixing device disclosed herein includes a first fixing area 111 comprising a welding surface 1111 and a support structure 1112. The support structure 1112 is located on the side of the welding surface 1111 close to the preset area 10. The support structure 1112 protrudes from the welding surface 1111 along the second direction y. When the mask 3 is welded to the welding surface 1111 at both ends along the first direction, the support structure 1112 will support the mask 3 along the second direction y, causing the wrinkles to spread out and preventing the wrinkles from extending toward the preset area 10. This improves the wrinkle problem of the mask 3 in the preset area 10, enhances the vapor deposition effect, improves the color mixing problem formed by vapor deposition, and improves the product yield.

[0049] Specifically, each first fixing area 111 may correspond to one end of a mask plate 3, and one end of each mask plate 3 is connected to a first fixing area 111 in a support component 11, and the other end is connected to a first fixing area 111 in another support component 11.

[0050] In the above embodiment, the second direction y is perpendicular to the first surface 110 of the support component 11, and the second direction y is a direction from the first surface 110 away from the support component 11. The support structure 1112 protrudes from the welding surface 1111 along the second direction y, that is, the support structure 1112 protrudes from the welding surface 1111 along the second direction y in a direction away from the support component 11.

[0051] Specifically, each support component 11 may include one or more first fixing areas 111, and each first fixing area 111 corresponds to a mask plate 3.

[0052] Specifically, the mask 3 in this application may include a fine metal mask 3 (FMM), which is used to vapor-deposit the light-emitting layer within the sub-pixels during the fabrication of the display panel. Using the mask fixing device 1 to fix the fine metal mask 3 helps improve the meshing accuracy of the fine metal mask 3 and reduces the probability of wrinkles, particularly reducing the probability of wrinkles occurring at the position where the fine metal mask 3 is opposite to the preset area 10. This improves the accuracy of the display panel during the vapor deposition process and reduces the probability of color mixing during the fabrication process. Specifically, reducing wrinkles generated during the meshing of the mask 3 allows for a tighter fit between the mask 3 and the substrate to be vapor-deposited in the display panel, thereby improving the accuracy of the light-emitting layer formation and reducing the probability of color mixing due to light-emitting layer misalignment, thus improving the fabrication yield of the display panel. Improving the fabrication yield of the display panel effectively reduces costs and increases production capacity.

[0053] Specifically, the area opposite to the preset area 10 of the precision metal mask 3 is the vapor deposition area, used to form a predetermined pattern on the substrate to be vapor deposited on the display panel by vapor deposition material. Both ends of the precision metal mask 3 are used to fix it to the mask fixing device 1 to achieve the stretching of the precision metal mask 3. During stretching, the precision metal mask 3 is first stretched to a suitable position, then the ends of the precision metal mask 3 are pressed down and adhered to the welding surface 1111, and the precision metal mask 3 is fixed on the welding surface 1111. Due to the tensile force and the force of the solder joint when the mask 3 is welded to the welding surface 1111, wrinkles extending from the ends towards the vapor deposition area are easily formed on the mask 3. At this time, because the support structure 1112 in the mask fixing device 1 protrudes from the welding surface 11 along the second direction y... 11, thereby allowing the wrinkles to unfold under the support force provided by the support structure 1112, reducing the probability of wrinkle formation. At the same time, the wrinkles generated under the action of the solder joint force can be blocked by the support force of the support structure 1112 on the side of the support structure 1112 near the solder surface 1111, preventing the wrinkles from extending into the vapor deposition area. This can improve the flatness of the vapor deposition area of ​​the mask 3, thereby reducing the impact of wrinkles on the bonding effect between the mask 3 and the substrate to be vapor deposited, and thus improving the manufacturing yield of the display panel.

[0054] Specifically, the welding surface 1111 and the mask plate 3 can be fixed by laser welding process.

[0055] Specifically, the support component 11 can be a hollow metal structure.

[0056] Specifically, the mask fixing device 1 may also include a connecting component 12, which is connected between opposite ends of two oppositely arranged support components 11. The mask fixing device 1 may include two connecting components 12, each of which extends along a first direction x. Multiple connecting components 12 and support components 11 are distributed at intervals along the direction surrounding the preset area 10 and connected end to end in sequence to form an annular square frame structure.

[0057] In one specific implementation, such as Figure 2 As shown, the support structure 1112 includes a support surface 1113 and a support portion 1114. The support surface 1113 is connected to the welding surface 1111, and the support portion 1114 is located on the support surface 1113. The support portion 1114 protrudes from the welding surface 1111 along the second direction y.

[0058] In the above embodiments, the support structure 1112 includes a support surface 1113 and a support portion 1114. The support portion 1114 is used to contact the mask plate 3 and support the mask plate 3, thereby smoothing out the wrinkles of the mask plate 3 to reduce the probability of wrinkle formation. The support portion 1114 provides tight support to the mask plate 3, thereby limiting the wrinkles generated at the fixed position between the mask plate 3 and the welding surface 1111 to the side of the mask plate 3 away from the preset area 10, that is, to the side of the support portion 1114 away from the preset area 10 along the first direction x. This improves the flatness of the mask plate 3 at the relative position with respect to the preset area 10, thereby improving the evaporation yield.

[0059] In the above embodiments, the connection between the support surface 1113 and the welding surface 1111 includes the support surface 1113 and the welding surface 1111 being continuously and adjacently arranged, i.e., directly connected; or the connection between the support surface 1113 and the welding surface 1111 includes the support surface 1113 and the welding surface 1111 being indirectly connected, for example, through the isolation groove 1116, etc.

[0060] In the above embodiments, the support portion 1114 is located on the support surface 1113, including the support portion 1114 and the support surface 1113 being independent of each other but connected to each other, and the support portion 1114 and the support surface 1113 being an integral structure.

[0061] In the above embodiment, the support portion 1114 protrudes from the welding surface 1111 along the second direction y, so that the mask plate 3 contacts the support portion 1114 and is supported by the support portion 1114. That is, a portion of the end of the mask plate 3 is fixed to the welding surface 1111, and a portion contacts the support portion 1114 and is supported by the support portion 1114.

[0062] Specifically, along the first direction x, the distance between the supporting surface 1113 and the welding surface 1111 ranges from 0 mm to 5 mm. The distance between the supporting surface 1113 and the welding surface 1111 is the interval between their closest sides along the first direction x, and also the distance between the projections of the supporting surface 1113 and the welding surface 1111 along the second direction y. A distance of 0 along the first direction x indicates that the supporting surface 1113 and the welding surface 1111 can be interconnected. The distance between the supporting surface 1113 and the welding surface 1111 along the first direction x should not be too large, otherwise it will be detrimental to supporting and fixing the mask plate 3. Therefore, the distance between the supporting surface 1113 and the welding surface 1111 along the first direction x can be controlled within 5 mm to ensure good support of the mask plate 3 after the end of the mask plate 3 is welded and fixed to the welding surface 1111 via the supporting part 1114.

[0063] Specifically, if Figure 2As shown, the distance between the edge of the welding surface 1111 near the support surface 1113 and the edge of the welding surface 1111 away from the support surface 1113 is M, where 0 < M ≤ 10 mm. M should not be too small, as this would affect the fixing area between the mask plate 3 and the welding surface 1111, thus compromising the fixing strength of the welding surface 1111 to the mask plate 3. Conversely, M should not be too large, as this would result in a larger footprint for the mask plate fixing device 1. Therefore, setting M to be greater than 0 and less than or equal to 10 mm allows for meeting the fixing strength requirements of the welding surface 1111 to the mask plate 3 while maintaining a smaller footprint for the mask plate fixing device 1.

[0064] Specifically, the distance M between the edge of the welding surface 1111 that is close to the support surface 1113 and the edge of the welding surface 1111 that is away from the support surface 1113 can be 0.5mm, 1mm, 3mm, 6mm, 9mm, 10mm, etc.

[0065] In one specific implementation, such as Figure 2 As shown, a support portion 1114 is formed at the edge of the support surface 1113 near the preset area 10.

[0066] In the above embodiments, when the support surface 1113 and the support part 1114 have an integral structure, the edge of the support surface 1113 near the preset area 10 can form the support part 1114. At this time, the support part 1114 is located inside the support surface 1113 and is located at the end of the support surface 1113 that is furthest from the welding surface 1111 along the second direction y. Thus, when the mask plate 3 is fixed on the welding surface 1111, the support part 1114 can contact the mask plate 3 and provide good support for the mask plate 3.

[0067] Specifically, the edge of the support surface 1113 near the preset area 10 can be perpendicular to the first direction x, so that the edge can fully contact the mask plate 3 to achieve sufficient support for the mask plate 3 and further reduce the probability of wrinkles.

[0068] Specifically, the first edge L1 can be passivated to protect the mask plate 3 and prevent scratches on the mask plate 3, thereby reducing damage to the mask plate 3.

[0069] Specifically, the first edge L1 can be rounded and passivated to make the first edge L1 smoother, so as to protect the mask plate 3.

[0070] Specifically, the support surface 1113 can be a plane, and the tilt angle α1 of the support surface 1113 relative to the reference plane ranges from 0.1° to 10°. The reference plane is the plane formed by the first direction x and the setting direction of the support component 11. The setting direction of the support component 11 can be parallel to the third direction z, and the third direction z is perpendicular to the first direction x and the second direction y. At this time, the angle between the support surface 1113 and the reference plane is 0.1° to 10°. On the one hand, this allows the edge of the support surface 1113 near the preset area 10 to provide support for the mask plate 3. On the other hand, it allows the mask plate 3 to smoothly transition from the support surface 1113 to the welding surface 1111, thereby improving the flatness of the mask plate 3 and reducing the probability of wrinkles.

[0071] In one specific implementation, such as Figure 4 As shown, the support portion 1114 includes a first protrusion structure 1115 disposed on the support surface 1113. The first protrusion structure 1115 is disposed along the extension direction of the support surface 1113 and protrudes from the welding surface 1111 along the second direction y.

[0072] In the above embodiments, the support portion 1114 includes a first protrusion structure 1115 disposed on the support surface 1113, the first protrusion structure 1115 and the support surface 1113 being independent of each other and fixedly connected to each other.

[0073] Specifically, the support surface 1113 can be a plane or a curved surface, and the first protrusion structure 1115 is located on the support surface 1113, that is, the first protrusion structure 1115 is located on the side of the support surface 1113 facing the second direction y and is fixed to the support surface 1113.

[0074] Specifically, the first protruding structure 1115 is arranged along the extension direction of the support surface 1113, and the first protruding structure 1115 protrudes from the welding surface 1111 along the second direction y. The support surface 1113 can extend along the third direction z, which is perpendicular to the first direction x and the second direction y. Arranging the first protruding structure 1115 along the third direction z can increase the support range of the first protruding structure 1115 on the mask plate 3, which helps to block the wrinkles generated by the mask plate 3 when it is fixed with the welding surface 1111 more likely on the side of the first protruding structure 1115 away from the preset area 10, so as to further improve the mesh-forming effect of the mask plate 3.

[0075] Specifically, if Figure 4 As shown, the thickness of the first protrusion structure 1115 is H, where 0.1 μm ≤ H ≤ 60 μm. The thickness of the first protrusion structure 1115 is the maximum distance between the top and bottom of the first protrusion structure 1115.

[0076] Specifically, the thickness H of the first protrusion structure 1115 can be 0.1μm, 3μm, 10μm, 15.5μm, 20μm, 25μm, 30μm, 32μm, 43.5μm, 50μm, 57.5μm, 59μm, 60μm, etc.

[0077] If the thickness of the first protrusion structure 1115 is too small, the mask plate 3 will easily come into contact with the support surface 1113. If the thickness of the first protrusion structure 1115 is too large, it will be detrimental to the use of the mask plate 3. Therefore, when the thickness of the first protrusion structure 1115 is in the range of 0.1μm to 60μm, good support for the mask plate 3 can be achieved.

[0078] The first protrusion structure 1115 is located on the support surface 1113. When the support surface 1113 is a plane, the thickness of the first protrusion structure 1115 is the maximum dimension in the direction perpendicular to the support surface 1113.

[0079] Specifically, if Figure 4 As shown, along the first direction x, the distance between the first protrusion structure 1115 and the welding surface 1111 is L, 0 < L ≤ 10 mm, so that it can slowly extend towards the first protrusion structure 1115 after the mask plate 3 is fixed to the welding surface 1111.

[0080] Specifically, the first protrusion structure 1115 includes a first cross section, which is parallel to the first direction x and parallel to the second direction y. The shape of the first cross section is a semi-circle or a polygon. When it is a polygon, the apex position of the polygon away from the support surface 1113 includes an arc-shaped chamfer.

[0081] In one specific embodiment, the support surface 1113 has a first edge L1 near the preset region 10, and the first protrusion structure 1115 includes a second edge L2 near the preset region 10.

[0082] like Figure 4 As shown, the first edge L1 coincides with the second edge L2; or, as... Figure 5 As shown, the first edge L1 is closer to the preset region 10 relative to the second edge L2, and the first protrusion structure 1115 protrudes from the first edge L1 along the second direction y.

[0083] In the above embodiments, the support surface 1113 has a first edge L1 near the preset region 10. The support surface 1113 can extend along a third direction z perpendicular to the first direction x and the second direction y, so that the first edge L1 can be parallel to the third direction z, and the first edge L1 can also intersect with the third direction z. The first protrusion structure 1115 includes a second edge L2 near the preset region 10. The second edge L2 can coincide with the first edge L1, that is, the first protrusion structure 1115 is fixed at the position of the support surface 1113 near the preset region 10. Alternatively, the first edge L1 is closer to the preset region 10 than the second edge L2, that is, the first protrusion structure 1115 is fixed between the first edge L1 of the support surface 1113 and the welding surface 1111.

[0084] In the above embodiments, such as Figure 6 As shown, the first protrusion structure 1115 protrudes from the first edge L1 along the second direction y, so that the mask plate 3 is in contact with the first protrusion structure 1115 but not with the first edge L1, thereby supporting the mask plate 3 through the first protrusion structure 1115.

[0085] Specifically, the first protrusion structure 1115 can extend along the third direction z, thereby improving the support range and support effect of the mask plate 3.

[0086] In one specific embodiment, the support surface 1113 is planar and has a first edge L1 and a third edge L3 disposed opposite to each other. The third edge L3 is connected to the welding surface 1111, and the first edge L1 is closer to the preset area 10 relative to the third edge L3.

[0087] In the above embodiments, the support surface 1113 is planar, and it may have a certain angle with the plane provided by the mask fixing device 1, or the two may be arranged parallel to each other. The planar design of the support surface 1113 helps to reduce the manufacturing difficulty and facilitates the control of the support effect of the support part 1114.

[0088] In the above embodiment, the support surface 1113 includes a first edge L1 and a third edge L3 disposed opposite to each other, and the first edge L1 and the third edge L3 may be disposed parallel to each other. The third edge L3 is connected to the welding surface 1111, and the first edge L1 is located on the side of the third edge L3 closer to the preset area 10, that is, the first edge L1 is located on the side of the third edge L3 away from the welding surface 1111. The first edge L1 and the third edge L3 may both be parallel to a third direction z, and the third direction z is perpendicular to the first direction x and the second direction y.

[0089] In one specific implementation, such as Figure 7 As shown, the welding surface 1111 is planar, and the supporting surface 1113 is parallel to the welding surface 1111; or,

[0090] like Figure 8 As shown, the welding surface 1111 is planar and includes a fourth edge L4 and a fifth edge L5 disposed opposite to each other. The fourth edge L4 is connected to the support surface 1113 and protrudes from the fifth edge L5 along the second direction y.

[0091] In the above embodiments, when the supporting surface 1113 is planar, the welding surface 1111 can also be planar. The planar design of both the supporting surface 1113 and the welding surface 1111 reduces manufacturing difficulty and precision, and helps improve the fixing accuracy between the mask fixing device 1 and the mask 3. Since the surface of the mask 3 used to fix to the welding surface 1111 is planar, the planar design of the welding surface 1111 helps improve the flatness of the mask 3 after it is fixed to the welding surface 1111.

[0092] Specifically, when both the support surface 1113 and the welding surface 1111 are planar, the support surface 1113 and the welding surface 1111 can be parallel, and the support surface 1113 and the welding surface 1111 can be coplanar. In this case, the preparation method of the first fixing region 111 is simpler and the preparation yield is higher.

[0093] Specifically, when both the supporting surface 1113 and the welding surface 1111 are planar, the supporting surface 1113 and the welding surface 1111 may not be parallel but intersect, that is, the tilt angles of the supporting surface 1113 and the welding surface 1111 are different. In this case, the supporting surface 1113 is planar, and it may have a certain angle relative to the plane on which the mask fixing device 1 is set, or the two may be parallel. The welding surface 1111 has a certain angle with the plane on which the mask fixing device 1 is set. Moreover, the welding surface 1111 includes a fourth edge L4 and a fifth edge L5 arranged opposite to each other. The fourth edge L4 is connected to the supporting surface 1113, and the fourth edge L4 protrudes from the fifth edge L5 along the second direction y, so that the mask 3 can smoothly transition from the supporting part 1114 to the welding surface 1111, thereby further reducing the probability of wrinkle generation.

[0094] In one specific implementation, such as Figure 5 As shown, the first edge L1 protrudes towards the second direction y relative to the third edge L3, and the inclination angle of the support surface 1113 relative to the reference plane ranges from 0.1° to 10°. The reference plane is the plane formed by the first direction x and the setting direction of the support component 11.

[0095] In the above embodiment, the support surface 1113 can be a plane, and the first edge L1 protrudes towards the second direction y relative to the third edge L3, that is, the support surface 1113 has a certain angle relative to the plane on which the mask fixing device 1 is set. The tilt angle of the support surface 1113 relative to the reference plane ranges from 0.1° to 10°. The reference plane is the plane formed by the first direction x and the setting direction of the support component 11. The setting direction of the support component 11 can be parallel to the third direction z, and the third direction z is perpendicular to the first direction x and the second direction y. The support surface 1113 is a plane, which facilitates fixing to the first protrusion structure 1115 and helps to simplify the design of the first protrusion structure 1115. The included angle between the support surface 1113 and the reference plane is 0.1° to 10°, which allows the mask 3 to smoothly transition from the first protrusion structure 1115 to the welding surface 1111, thereby improving the flatness of the mask 3 and reducing the probability of wrinkles.

[0096] In one specific implementation, such as Figure 9 As shown, an isolation groove 1116 is provided between the support surface 1113 and the welding surface 1111.

[0097] In the above embodiment, the isolation groove 1116 is formed by the first surface 110 recessed to the side away from the second direction y. The isolation groove 1116 is located between the support surface 1113 and the welding surface 1111. The isolation groove 1116 can be used to realize the natural transition of the mask plate 3 from the welding surface 1111 to the support surface 1113, reducing the probability of wrinkles.

[0098] Specifically, the sidewall of the isolation groove 1116 may be inclined relative to the reference plane or perpendicular to the reference plane.

[0099] In one specific implementation, such as Figure 10 As shown, the support surface 1113 includes an arcuate surface that protrudes toward the second direction y, and the arcuate surface forms the support portion 1114.

[0100] In the above embodiment, the support surface 1113 and the support portion 1114 are integrally formed, and at least a portion of the support surface 1113 protrudes in the second direction y to form the support portion 1114. This embodiment can omit the fixing step of the support surface 1113 and the support portion 1114, and can improve the connection strength between the support surface 1113 and the support portion 1114.

[0101] In one possible implementation, the first surface 110 further includes a second fixing region 112, the second fixing region 112 including a recess 1121, the recess 1121 being recessed relative to the first fixing region 111 on the side opposite to the second direction y.

[0102] In the above embodiments, the second fixing area 112 may be formed between adjacent first fixing areas 111 for fixing the support plate 41 / support bar 42.

[0103] Specifically, the second fixed area 112 may include a flat portion, and the support plate 41 and the flat portion may be fixed by welding.

[0104] Specifically, the side of the connecting component 12 facing the second direction y may also include the aforementioned second fixing area 112. The side of the connecting component 12 facing the second direction y includes a second surface, and the second fixing area 112 is formed by recessing from the second surface toward the side away from the second direction y.

[0105] This application also provides a mask assembly 2, including any of the mask fixing devices 1 provided in the above embodiments.

[0106] Specifically, the mask assembly 2 also includes a mask 3, with two opposite edges of the mask 3 along the first direction x respectively fixed to the welding surface 1111 of the corresponding support assembly 11, and the support structure supports the mask.

[0107] Specifically, the mask plate 3 is located on the side of the first surface 110 of the mask plate fixing device 1 facing the second direction y, and the mask plate 3 is fixed to the welding surface 1111 of the mask plate fixing device 1.

[0108] In the above embodiment, the mask assembly 2 includes a mask fixing device 1 and a mask 3, with the mask 3 fixed to the mask fixing device 1. Both ends of the mask 3 are fixed to two opposing support assemblies 11. Specifically, the end of the mask 3 is welded to the welding surface 1111, and the portion of the mask 3 furthest from the end contacts and is supported by the support structure 1112. The welding surface 1111 fixes the mask plate 3, and the support structure 1112 supports the mask plate 3. On the one hand, it can reduce the probability of wrinkles generated at the position where the end of the mask plate 3 is fixed to the welding surface 1111, extending to the side of the support structure 1112 away from the welding surface 1111, thereby blocking the wrinkles outside the position where the mask plate 3 is opposite to the preset area 10. On the other hand, the support structure 1112 provides a supporting force to the mask plate 3 in the second direction y, thereby flattening the wrinkles generated by the mask plate 3 during the stretching process in the first direction x, so as to reduce wrinkles and improve the flatness of the mask plate 3.

[0109] In one feasible implementation, such as Figure 11 As shown, the mask assembly 2 also includes a support layer 4, which is located between the mask 3 and the mask fixing device 1. The support layer 4 includes a plurality of protrusions 40, which are fixed to the mask fixing device 1.

[0110] In the above embodiment, the mask assembly 2 further includes a support layer 4, and the mask fixing device 1, the support layer 4, and the mask 3 are arranged sequentially along the second direction y. The support layer 4 serves to provide support for the mask 3 and also to provide shielding for the mask 3 to form a preset pattern. The edge of the support layer 4 forms a protrusion 40, and the support layer 4 is fixed to the mask fixing device through the protrusion 40.

[0111] In one feasible implementation, such as Figure 11 As shown, the first surface 110 is provided with a recess 1121, which is located at both ends of the first fixing area 111 along the setting direction of the support component 11, and the protrusion 40 is fixed in the recess 1121.

[0112] The first surface 110 also includes a second fixing region 112, which includes a recess 1121. The recess 1121 is recessed relative to the first fixing region 111 on a side opposite to the second direction y. The protrusion 40 is located within the recess 1121 and is fixed to the recess 1121.

[0113] In the above embodiment, the first surface 110 further forms a second fixing region 112, which is used to fix the support layer 4. The second fixing region 112 includes a recess 1121, which is recessed relative to the first fixing region 111 on the side away from the second direction y, so that the support layer 4 and the mask plate 3 are both fixed on the same side of the mask plate fixing device 1 and interference is avoided. The protrusion 40 is located in the recess 1121 and is welded to the recess 1121, so that the fixing position of the support layer 4 and the mask plate fixing device 1 is located below the fixing position of the mask plate 3 and the mask plate fixing device 1, so that the support layer 4 can provide support for the mask plate 3 while avoiding interference with the mask plate 3, which helps to ensure the flatness of the mask plate 3.

[0114] In one feasible implementation, such as Figure 11 As shown, the support layer 4 includes a support plate 41, which includes a support plate body 411 and a through hole 412 formed in the support plate body 411. The through hole 412 is disposed opposite to the preset area 10, and the protrusion 40 is located at the edge of the support plate body 411.

[0115] In the above embodiment, the support layer 4 includes a support plate 41, which includes a support plate body 411 and a through hole 412 extending through the support plate body 411 along the second direction y. The through hole 412 is positioned opposite to the preset area 10 and is used for passing vapor-deposited material. The protrusion 40 is located at the edge of the support plate body 411, and the two can have an integral structure.

[0116] In one feasible implementation, such as Figure 12As shown, the support layer 4 includes multiple support strips 42, which intersect to form a hollow area 421. The hollow area 421 is positioned opposite to the preset area 10, and the protrusion 40 is located at the end of the support strip 42.

[0117] In the above embodiment, the support layer 4 includes multiple support strips 42, which intersect to form a hollow area 421. Specifically, the multiple support strips 42 can be arranged in a crisscross pattern, with some support strips 42 extending along a first direction x and some extending along a third direction z. The hollow area 421 is positioned opposite to the preset area 10 and is used for passing vapor-deposited material. The ends of the support strips 42 can serve as protrusions 40, which are fixed to the second fixing area 112 of the mask fixing device 1.

[0118] This application also provides a vapor deposition apparatus, including a vapor deposition device, and further including any of the mask fixing devices 1 provided in the above embodiments or any of the mask assembly 2 provided in the above embodiments. The preset area 10 in the mask fixing device 1 matches the vapor deposition area of ​​the vapor deposition device, and the second direction y is the same as the vapor deposition direction of the vapor deposition device.

[0119] In the above embodiments, the vapor deposition device in the vapor deposition equipment is used to store vapor deposition materials and vapor deposit the vapor deposition materials from the vapor deposition area along the vapor deposition direction to the preset area 10 in the mask plate fixing device 1. The vapor deposition materials then pass through the preset area and the vapor deposition area of ​​the mask plate and finally vapor deposit to the preset position of the substrate to be vapor deposited.

[0120] The above are merely preferred embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A mask plate fixing device, characterized in that, The device includes support components arranged opposite each other along a first direction, with a preset area formed between the oppositely arranged support components. Each support component includes a first surface facing a second direction, which is perpendicular to the first direction. The first surface includes a first fixing area, which includes a welding surface and a support structure. The welding surface is used for welding a mask plate. The support structure is located on the side of the welding surface near the preset area and protrudes from the welding surface along the second direction.

2. The mask plate fixing device according to claim 1, characterized in that, The support structure includes a support surface and a support portion. The support surface is connected to the welding surface, the support portion is located on the support surface, and the support portion protrudes from the welding surface along the second direction.

3. The mask plate fixing device according to claim 2, characterized in that, The support portion is formed at the edge of the support surface near the preset area.

4. The mask plate fixing device according to claim 2, characterized in that, The support portion includes a first protrusion structure disposed on the support surface, the first protrusion structure being disposed along the extending direction of the support surface, and the first protrusion structure protruding from the welding surface along the second direction.

5. The mask plate fixing device according to claim 4, characterized in that, The support surface has a first edge near the preset area, and the first protruding structure includes a second edge near the preset area; The first edge coincides with the second edge; or, the first edge is closer to the preset area relative to the second edge, and the first protrusion structure protrudes from the first edge along the second direction.

6. The mask fixing device according to any one of claims 2-5, characterized in that, The support surface is planar and has a first edge and a third edge that are disposed opposite to each other. The third edge is connected to the welding surface, and the first edge is closer to the preset area relative to the third edge.

7. The mask fixing device according to claim 6, characterized in that, The welding surface is planar, and the supporting surface is parallel to the welding surface; or, The welding surface is planar, and the welding surface includes a fourth edge and a fifth edge disposed opposite to each other. The fourth edge is connected to the support surface and protrudes from the fifth edge along the second direction.

8. The mask plate fixing device according to claim 6, characterized in that, The first edge protrudes toward the second direction relative to the third edge, and the inclination angle of the support surface relative to the reference plane ranges from 0.1° to 10°. The reference plane is the plane formed by the first direction and the setting direction of the support component.

9. The mask plate fixing device according to claim 2, characterized in that, An isolation groove is provided between the supporting surface and the welding surface.

10. The mask plate fixing device according to claim 2, characterized in that, The support surface includes an arcuate surface that protrudes toward the second direction, and the arcuate surface forms the support portion.

11. A mask assembly, characterized in that, Includes the mask plate fixing device as described in any one of claims 1-10; The mask assembly further includes a mask plate, wherein two opposite edges of the mask plate along a first direction are respectively fixed to the welding surface of the corresponding support assembly, and the support structure supports the mask plate.

12. The mask assembly according to claim 11, characterized in that, The mask assembly further includes a support layer located between the mask and the mask fixing device. The support layer includes a plurality of protrusions, which are fixed to the mask fixing device.

13. The mask assembly according to claim 12, characterized in that, The first surface is provided with recessed portions, which are located at both ends of the first fixing area along the setting direction of the support assembly. The protrusion is fixed within the recess.

14. The mask assembly according to claim 12, characterized in that, The support layer includes a support plate, the support plate includes a support plate body and a through hole formed in the support plate body, the through hole is disposed opposite to the preset area, and the protrusion is located at the edge of the support plate body.

15. The mask assembly according to claim 12, characterized in that, The support layer includes multiple support strips, which intersect to form a hollow area. The hollow area is positioned opposite to the preset area, and the protruding part is located at the end of the support strip.

16. A vapor deposition apparatus, characterized in that, The device includes a vapor deposition apparatus, and further includes a mask fixing device according to any one of claims 1-10 or a mask assembly according to any one of claims 11-15, wherein the preset area in the mask fixing device matches the vapor deposition area of ​​the vapor deposition apparatus, and the second direction is the same as the vapor deposition direction of the vapor deposition apparatus.

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