Vacuum coating system and coating method thereof

Abstract

The application discloses a vacuum coating system and a coating method thereof, and comprises the following steps: S1, drying the target material, and placing the naturally cooled target material in a crucible, and then sealing a lower shell; S2, placing a single crystal germanium sheet and an optical glass sheet as a substrate on a flange at the bottom end of a placing cylinder, and sealing an upper shell; S3, vacuumizing the lower shell and the upper shell; and S4, starting an electron gun corresponding to the crucible, and generating a high-energy electron beam to heat the target material to an evaporation temperature, and after the target material evaporates, the target material moves upwards in the form of particles and is deposited on the surface of the substrate. The application adopts a design that multiple crucibles are distributed along a vertical direction and have coaxial lines, so that the evaporation directions of the target materials in each crucible are consistent. After the target materials in the crucibles are heated to the evaporation temperature, the target materials move upwards in the vertical direction of the substrate, the position of the substrate is not frequently adjusted, the operation of the coating process is simplified, the uniformity and efficiency of the coating are improved, and the coating process is suitable for the requirements of multilayer and complex coating.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more specifically, to a vacuum coating system and coating method thereof. Background Technology

[0002] Vacuum deposition is a process that uses methods such as heating, electron guns, or magnetron sputtering under high vacuum conditions to evaporate or sputter metallic or non-metallic materials into particles and deposit them onto a substrate surface to form a thin film. This technology plays a crucial role in the manufacture of optical devices, electronic components, semiconductors, and decorative items, significantly improving the optical performance, corrosion resistance, and surface strength of substrates. For high-precision vacuum deposition, the vacuum level and target switching efficiency are two important factors that directly affect production quality and speed.

[0003] Current vacuum coating equipment faces several technical bottlenecks in operation: First, a high vacuum must be achieved by evacuating the equipment before coating, a time-consuming process, especially with frequent substrate changes. This disrupts the vacuum, requiring re-evacuation and significantly reducing efficiency. Second, different coating layers often require different target materials, necessitating rapid target switching during the coating process. Existing technologies (such as CN118007071B) use electromagnetically driven rotating covers to expose different targets, but this method suffers from the following problems:

[0004] Inconsistent target evaporation direction: The multiple target receiving tanks in existing equipment are usually distributed in a ring. When the target material at different positions is evaporated, it is difficult to keep the direction of particle movement toward the substrate consistent, resulting in uneven film distribution. This requires the substrate to be constantly adjusted in position during the coating process to align with different targets, which increases the complexity of operation and time cost.

[0005] Low vacuum efficiency: After each removal or replacement of the substrate, the vacuum coating equipment needs to be evacuated again. However, the traditional vacuum chamber design is relatively large, and the evacuation time is long. Frequent operation further reduces the overall efficiency.

[0006] Cumbersome operation and lack of stability: Traditional equipment usually requires mechanical parts to rotate and displace to adjust the position of the target when switching targets. These operations are not only cumbersome and time-consuming, but the mechanical parts are also prone to wear and tear due to frequent switching, resulting in a decrease in equipment accuracy and reduced stability after long-term use.

[0007] Therefore, current vacuum coating processes urgently need an improved method that can provide rapid target switching, maintain consistent evaporation direction, and shorten vacuuming time, in order to improve overall process efficiency and coating quality. Summary of the Invention

[0008] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0009] Therefore, the object of the present invention is to provide a vacuum coating system and coating method thereof to solve the problems in the prior art.

[0010] In a first aspect, the present invention provides a vacuum coating system.

[0011] The lower shell and the upper shell are connected by a connecting pipe. The lower shell contains a plurality of vertically distributed crucibles. An electron gun is correspondingly provided on the inner wall of the lower shell on one side of each crucible. A heat insulation sleeve is fitted on the outer wall of the crucible. The outer wall of the heat insulation sleeve is integrally formed with two symmetrically distributed first sliding blocks. A first guide post is slidably connected to the first sliding block. One end of the first guide post is welded and fixed to a vertical plate. A first driving mechanism for pushing the crucible to move horizontally is provided on the vertical plate.

[0012] The upper housing is provided with a support plate, which has multiple through holes along its length. Second sliding blocks are welded and fixed to the outer walls on both sides of the support plate. Second guide posts are slidably connected to the second sliding blocks. The two ends of the second guide posts are welded to the inner wall of the upper housing. The upper housing is also provided with a second driving mechanism for pushing the second sliding blocks to move horizontally.

[0013] A set of first connecting posts runs through the pallet. A sealing post is welded and fixed to the bottom end of the first connecting post. A sealing ring is fitted and welded to the outer circular wall of the sealing post.

[0014] A set of second connecting posts runs through the wall of the support plate surrounding the through hole. The bottom end of the second connecting post is welded and fixed to the top end of the placement cylinder. The placement cylinder and the through hole are arranged coaxially. The bottom inner wall of the placement cylinder protrudes to form an annular flange.

[0015] A first movable ring is welded and fixed to the top of the first connecting column, and a second movable ring is welded and fixed to the top of the second connecting column. Both the first and second connecting columns are fitted with elastic springs. The upper housing is provided with a third driving mechanism for driving the first and second movable rings to move vertically.

[0016] As a preferred technical solution:

[0017] In the vacuum coating system described above, the top of the lower housing and the bottom of the upper housing are provided with connecting holes that communicate with a connecting pipe. Flange rings are welded and fixed to the outer walls of both ends of the connecting pipe, and both ends of the connecting pipe are flange-sealed to the outer walls of the lower housing and the upper housing.

[0018] The flange connection, achieved through the above technical solution, means that the connecting pipe can be removed separately, facilitating individual cleaning of the inside of the connecting pipe. Furthermore, the lower and upper shells are welded and fixed together by metal connectors, ensuring that the structural strength between the lower and upper shells is not affected after the connecting pipe is removed.

[0019] In the vacuum coating system described above, a first vacuum tube is welded to one side wall of the lower housing, and a second vacuum tube is welded to the bottom of one side of the upper housing. A vacuum pump is connected to one end of the first and second vacuum tubes via a T-junction.

[0020] Through the above technical solution, the vacuum pump can simultaneously evacuate the interior of the lower and upper housings through the first and second vacuum tubes. Valves are installed on both the first and second vacuum tubes. When it is only necessary to evacuate the interior of the upper housing, the second vacuum tube can be closed through the valve, thus ensuring that the vacuum state inside the lower housing is not disrupted.

[0021] In the vacuum coating system described above, the lower housing has an opening groove on one side wall for the insertion of a first guide post, the outer wall of the lower housing surrounding the opening groove is sealed to the inner side of the vertical plate, the top wall of the upper housing has a through groove, and a cover plate is bolted to the upper housing wall surrounding the through groove.

[0022] The above technical solution allows the opening slot to be used to remove the crucible from the lower shell, which facilitates the addition of the target material inside the lower shell. When the cover is opened, an opening is formed on the surface of the upper shell, through which the substrate can be placed or removed from the placement cylinder.

[0023] In the vacuum coating system described above, the connecting pipe and the crucible are arranged coaxially, the inner diameter of the connecting pipe is larger than the diameter of the crucible, and the inner diameter of the connecting pipe, the diameter of the sealing column, and the diameter of the placement cylinder are all the same.

[0024] The above technical solution, through the design of the position and size of the connecting tube and the crucible, allows the particles evaporated from the target material inside either crucible to move toward the connecting tube, thus eliminating the need to adjust the position of the substrate when performing multiple coatings on the substrate.

[0025] In the vacuum coating system described above, the first driving mechanism includes a first stator magnetic rail and a first mover that cooperates with the first stator magnetic rail. The first stator magnetic rail is located between two first guide posts. The first stator magnetic rail is bolted to a fixing strip. One end of the fixing strip is welded to the inner wall of the vertical plate. The first mover is bolted to one end of a connecting rod. The other end of the connecting rod is integrally formed with a heat insulation sleeve.

[0026] The second drive mechanism includes a second stator magnetic rail fixed to the inner wall of the upper housing, and a second mover cooperating with the second stator magnetic rail. The second mover is bolted to a second sliding block on one side of the support plate.

[0027] Through the above technical solution, the first stator magnetic rail and the second stator magnetic rail are composed of a U-shaped frame and a stator. A row of stators is fixed on both sides of the U-shaped groove of the U-shaped frame, so that a magnetic field gap is formed between the two rows of stators.

[0028] Both the first and second movers consist of a mover coil and a load fixing plate. The mover coil is located in the aforementioned magnetic field gap. The load fixing plate on the first mover is connected to the connecting rod, and the load fixing plate on the second mover is connected to the second sliding block. When the mover coil is energized, it will induce a motion force with the stator, thereby achieving horizontal linear motion.

[0029] In the vacuum coating system described above, the heat insulation sleeve, the first sliding block, and the connecting rod are all made of ceramic fiber. Two limiting rings are fitted on the first guide post and welded to it. The first sliding block is located on the first guide post between the two limiting rings.

[0030] Through the above technical solution, the material design of the heat insulation sleeve, the first sliding block and the connecting rod enables the three to have high temperature resistance and low thermal conductivity. When the target material inside the crucible evaporates and moves, it will generate high temperature. The heat insulation sleeve can block the heat transfer, thereby avoiding interference from high temperature on the first stator magnetic rail and the second mover, and ensuring the stable operation of the first stator magnetic rail and the second mover.

[0031] In the vacuum coating system described above, the third driving mechanism includes two electromagnets fixed to the inner wall of the top of the upper housing, and a magnet block that cooperates with the electromagnets. The opposite sides of the magnet block and the electromagnets are magnetic poles of the same name.

[0032] Two symmetrically distributed magnet blocks are fixedly bonded to the top surfaces of both the first and second movable rings.

[0033] With the above technical solution, when the first movable ring and the second movable ring move horizontally to below the electromagnet, the two magnets on the first movable ring and the second movable ring are exactly opposite to the two electromagnets. In this way, the electromagnets and the magnets generate a repulsive force after being energized, which can push the first movable ring and the second movable ring downward.

[0034] In the vacuum coating system described above, two symmetrically distributed third guide columns are welded and fixed to the inner walls on both sides of the vertical plate, protrusions are welded and fixed to the outer walls on both sides of the lower housing, and two symmetrically distributed fixing blocks are welded and fixed to the back wall of the lower housing.

[0035] The third guide post passes through the protrusion and is slidably connected to the protrusion. An internal threaded cylinder is welded and fixed to the end of the third guide post that is not connected to the vertical plate. A threaded hole coaxial with the internal threaded cylinder is opened on the fixing block.

[0036] With the above technical solution, when the vertical plate is attached to the outer wall of the lower shell, the threaded hole is aligned with the threaded hole on the inner threaded cylinder. By screwing bolts into the fixing block and the inner threaded cylinder, the fixing block and the inner threaded cylinder can be connected as one unit, thereby allowing the vertical plate to remain fixed and improving the sealing between the vertical plate and the lower shell.

[0037] In a second aspect, the present invention provides a coating method comprising the following steps:

[0038] S1: Dry the target material, allow it to cool naturally, and then place it in a crucible. Next, seal the lower shell.

[0039] S2: Place a single-crystal germanium wafer and an optical glass plate as substrates on the flange at the bottom of the placement cylinder, and then seal the upper housing.

[0040] S3: Evacuate the lower and upper housings.

[0041] S4: Start the electron gun corresponding to the crucible, set the evaporation temperature, the electron gun generates a high-energy electron beam to heat the target material to the evaporation temperature, after the target material evaporates, it moves upward in the form of particles and is deposited on the substrate surface.

[0042] Compared with the prior art, the present invention has at least the following beneficial effects:

[0043] (1) Unified evaporation direction simplifies the coating process: This method uses multiple crucibles distributed vertically and coaxially to ensure that the evaporation direction of the target material in each crucible is consistent. After the target material in the crucible is heated to the evaporation temperature, it moves vertically upward to the substrate, avoiding frequent adjustments to the substrate position, greatly simplifying the coating process, significantly improving the uniformity and efficiency of the coating, and making it suitable for the needs of multi-layer and complex coatings.

[0044] (2) High-efficiency target switching to meet multi-layer coating requirements: The device is equipped with a first drive mechanism that can quickly switch between different targets by driving the crucible to move horizontally back and forth. When a crucible has finished coating, the first drive mechanism moves it horizontally to the side, and the next crucible immediately enters the working position without the need to rotate or change the cover plate, thereby improving the speed and stability of switching between different targets and meeting the requirements of multi-layer composite coating. At the same time, the target replacement operation does not require shielding, making it more convenient to add targets later.

[0045] (3) Vacuum State Maintenance and Rapid Vacuuming Design: This method features a separate upper and lower shell structure with sealing pillars and sealing rings at the shell connection, enabling rapid sealing between the upper and lower shells. When the substrate is removed, the lower shell is isolated from the upper shell by the sealing assembly, preserving the vacuum state of the lower shell. After repositioning the substrate, only the upper shell needs to be evacuated. Due to the small volume of the upper shell, this design significantly reduces the evacuation time, optimizes the operation process, and significantly improves the overall work efficiency.

[0046] (4) High-temperature insulation and magnetic drive improve system stability and lifespan: Each crucible is fitted with an insulating sleeve made of high-temperature resistant ceramic fiber to prevent high temperature conduction and protect other electronic components from thermal interference. Furthermore, the crucible movement is magnetically driven, eliminating the need for traditional mechanical shafts, ensuring a vacuum seal inside the casing, preventing mechanical wear, and improving the equipment's durability and operational stability. This design effectively extends the equipment's lifespan and is suitable for long-term, high-frequency production scenarios. Attached Figure Description

[0047] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0048] Figure 1 This is an internal front view of the present invention;

[0049] Figure 2 This is a top view of the interior of the upper housing of the present invention;

[0050] Figure 3 This is a top view of the first guide post and the crucible of the present invention;

[0051] Figure 4 This is a perspective view of the first movable ring and sealing post of the present invention;

[0052] Figure 5 This is a perspective view of the second movable ring and the placement cylinder of the present invention;

[0053] Figure 6 This is a perspective view of the lower housing, upper housing, and connecting pipe of the present invention;

[0054] Figure 7 This is a top view of the vertical plate and the third guide post of the present invention;

[0055] Figure 8 This is a schematic diagram of the process flow of the vacuum coating method of the present invention.

[0056] In the diagram: 1. Lower shell; 2. Upper shell; 3. Connecting pipe; 4. First vacuum tube; 5. Second vacuum tube; 6. Opening slot; 7. Vertical plate; 8. First guide post; 9. First sliding block; 10. Crucible; 11. Heat insulation sleeve; 12. Limiting ring; 13. First stator magnetic rail; 14. First mover; 15. Connecting rod; 16. Support plate; 17. Through hole; 18. Second sliding block; 19. Second guide post; 20. Second 21. Stator magnetic rail; 22. Second mover; 23. First movable ring; 24. First connecting post; 25. Sealing post; 26. Sealing ring; 27. Second movable ring; 28. Placement cylinder; 29. ​​Flange; 30. Spring; 31. Electromagnet; 32. Magnetic block; 33. Cover plate; 34. Electron gun; 35. Third guide post; 36. Protrusion; 37. Internal threaded cylinder; 38. Fixing block; 39. Fixing strip. Detailed Implementation

[0057] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0058] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the scope of protection of the invention is not limited to the specific embodiments disclosed below.

[0059] Figure 8 The process flow of the vacuum coating method of the present invention is shown, which includes the following steps:

[0060] S1: Dry the target material, let it cool naturally, and then place it in the crucible 10. Then seal the lower shell 1.

[0061] S2: Place a single-crystal germanium wafer and an optical glass plate as substrates on the flange 29 at the bottom of the placement cylinder 28, and then seal the upper housing 2.

[0062] S3: Evacuate the lower housing 1 and the upper housing 2.

[0063] S4: Start the electron gun 34 corresponding to the crucible 10, set the evaporation temperature, and the electron gun 34 generates a high-energy electron beam to heat the target material to the evaporation temperature. After the target material evaporates, it moves upward in the form of particles and is deposited on the substrate surface.

[0064] like Figures 1-5As shown, the lower shell 1 and the upper shell 2 are connected by a connecting pipe 3. The lower shell 1 is provided with a plurality of vertically distributed crucibles 10. An electron gun 34 is provided on the inner wall of the lower shell 1 on one side of each crucible 10. A heat insulation sleeve 11 is fitted on the outer wall of the crucible 10. The outer wall of the heat insulation sleeve 11 is integrally formed with two symmetrically distributed first sliding blocks 9. A first guide post 8 is slidably connected to the first sliding block 9. One end of the first guide post 8 is welded and fixed to the vertical plate 7. A first driving mechanism for pushing the crucible 10 to move horizontally is provided on the vertical plate 7.

[0065] The upper housing 2 is provided with a support plate 16. The support plate 16 has multiple through holes 17 along its length. The outer walls on both sides of the support plate 16 are welded and fixed with second sliding blocks 18. The second sliding blocks 18 are slidably connected to second guide posts 19. The two ends of the second guide posts 19 are welded to the inner wall of the upper housing 2. The upper housing 2 is also provided with a second drive mechanism for pushing the second sliding blocks 18 to move horizontally.

[0066] A set of first connecting posts 23 runs through the pallet 16. A sealing post 24 is welded and fixed to the bottom end of the first connecting post 23. A sealing ring 25 is welded and fixed to the outer circular wall of the sealing post 24.

[0067] A set of second connecting posts 27 are inserted through the wall of the support plate 16 surrounding the through hole 17. The bottom end of the second connecting post 27 is welded and fixed to the top end of the placement cylinder 28. The placement cylinder 28 is arranged coaxially with the through hole 17. A circular flange 29 is formed by protruding from the inner wall of the bottom end of the placement cylinder 28.

[0068] A first movable ring 22 is welded and fixed to the top of the first connecting post 23, and a second movable ring 26 is welded and fixed to the top of the second connecting post 27. A spring spring 30 is sleeved on both the first connecting post 23 and the second connecting post 27. A third driving mechanism for driving the first movable ring 22 and the second movable ring 26 to move vertically is provided inside the upper housing 2.

[0069] The first sliding block 9 can move horizontally and linearly on the first guide post 8, and the heat insulation sleeve 11 can move between the two first guide posts 8 through the two first sliding blocks 9. The heat insulation sleeve 11 is bolted to the crucible 10 or otherwise fixedly connected, which is not restricted here. At this time, the crucible 10 can move synchronously with the heat insulation sleeve 11.

[0070] Multiple crucibles 10 are provided, each containing a different target material. When it is necessary to switch between different crucibles 10, for example, when it is necessary to evaporate the target material in the bottommost crucible 10, the other crucibles 10 can be moved horizontally by the first drive mechanism. The other crucibles 10 will be offset from the bottommost crucible 10, so that the bottommost crucible 10 can be directly opposite the connecting tube 3. At this time, an electron gun 34 opposite to it generates a high-energy electron beam to strike the target material in the crucible 10. By converting energy into heat energy, the target material is heated to the evaporation temperature. After the target material evaporates, it moves upward and enters the connecting tube 3.

[0071] At the same time, the second sliding block 18 is driven to move linearly along the second guide post 19 by the second driving mechanism. The second sliding block 18 can drive the tray 16 to move synchronously. The tray 16 can drive the placement cylinder 28 to align vertically with the connecting pipe 3 by moving. At this time, the second movable ring 26 can be pushed downward by the third driving mechanism. The second movable ring 26 pushes the placement cylinder 28 into the connecting pipe 3 through the second connecting post 27.

[0072] The flange 29 on the placement cylinder 28 is used to support the substrate. After the evaporated target particles move into the connecting tube 3, they can be deposited on the surface of the substrate to complete the coating operation. After the coating of a substrate is completed, the second movable ring 26 will squeeze the elastic spring 30 during its downward movement. When the third drive mechanism stops running, the elastic spring 30 can drive the second movable ring 26 to reset. The second movable ring 26 drives the placement cylinder 28 to reset through the second connecting column 27. The support plate 16 can drive different placement cylinders 28 to align vertically with the connecting tube 3 by continuing to move, thereby realizing continuous operation.

[0073] After the substrates on the placement cylinder 28 have been coated, the coated substrates need to be removed and replaced with new ones. The support plate 16 continues to move, causing the sealing column 24 to align vertically with the connecting pipe 3. The third drive mechanism can push the first movable ring 22 downward. The first movable ring 22 drives the sealing column 24 downward through the first connecting column 23. The sealing column 24 extends into the connecting pipe 3, and the connection between the connecting pipe 3 and the upper housing 2 will be tightly fitted with the sealing ring 25. In this way, the sealing column 24 and the sealing ring 25 can isolate the lower housing 1 and the upper housing 2. At this time, the lower housing 1 and the upper housing 2 are not connected. Thus, when operating the substrate, the vacuum degree in the lower housing 1 will not be damaged. When working again in the future, only the upper housing 2 needs to be evacuated, which greatly reduces the evacuation time and helps to improve the work efficiency.

[0074] like Figure 1 and Figure 6As shown, the top of the lower housing 1 and the bottom of the upper housing 2 are provided with connecting holes that communicate with the connecting pipe 3. Flange rings are welded and fixed to the outer walls of both ends of the connecting pipe 3. Both ends of the connecting pipe 3 are connected to the outer walls of the lower housing 1 and the upper housing 2 with flange sealing.

[0075] A first vacuum tube 4 is welded to one side wall of the lower shell 1, and a second vacuum tube 5 is welded to the bottom of one side of the upper shell 2. A vacuum pump is connected to one end of the first vacuum tube 4 and the second vacuum tube 5 through a T-junction.

[0076] The lower housing 1 has an opening groove 6 on one side wall for the first guide post 8 to pass through. The outer wall of the lower housing 1 around the opening groove 6 is sealed and fitted to the inner side of the vertical plate 7. The upper housing 2 has a through groove on the top wall. The upper housing 2 wall around the through groove is bolted with a cover plate 33.

[0077] During the process of the evaporated target particles entering the connecting tube 3 and depositing on the substrate surface, excess target particles will adhere to the inner wall of the connecting tube 3. When cleaning is required, the connecting tube 3 can be removed from between the lower shell 1 and the upper shell 2, which is convenient.

[0078] When the lower housing 1 and the upper housing 2 are connected by the connecting pipe 3, the vacuum pump can simultaneously evacuate the interior of the lower housing 1 and the upper housing 2 through the first vacuum pipe 4 and the second vacuum pipe 5, which can improve the vacuuming efficiency.

[0079] When the lower housing 1 and the upper housing 2 are not connected, the vacuum pump can evacuate the upper housing 2 separately through the second vacuum tube 5, which can reduce the time of the vacuuming operation.

[0080] In addition to its guiding function, the first guide post 8 also serves to support the crucible 10. The vertical plate 7 can then drive the crucible 10 through the opening slot 6 via the first guide post 8, making it easier to remove the crucible 10 from the lower shell 1 and thus quickly place the target material inside the crucible 10.

[0081] The cover plate 33 is a detachable installation structure. By removing the cover plate 33, the placement cylinder 28 can be operated through the opening left after the cover plate 33 is removed. The through hole 17 on the support plate 16 can facilitate the removal of the substrate on the flange 29 and the placement of a new substrate on the flange 29.

[0082] like Figure 1 As shown, the connecting pipe 3 and the crucible 10 are arranged on the same axis. The inner diameter of the connecting pipe 3 is larger than the diameter of the crucible 10. The inner diameter of the connecting pipe 3, the diameter of the sealing column 24, and the diameter of the placement cylinder 28 are all the same.

[0083] When the sealing column 24 extends into the connecting pipe 3, the sealing column 24 is sealed by a rubber ring bonded to its outer circular wall.

[0084] When the placement tube 28 is inserted into the connecting tube 3, the placement tube 28 can fit against the inner wall of the connecting tube 3. In this way, most of the target particles in the connecting tube 3 will be deposited on the substrate surface on the flange 29, and the remaining target particles will be attached to the inner wall of the connecting tube 3. This can prevent these excess target particles from being attached to the inner wall of the upper shell 2, making it easier to clean them.

[0085] like Figure 1 , Figure 2 and Figure 3 As shown, the first drive mechanism includes a first stator magnetic rail 13 and a first mover 14 that cooperates with the first stator magnetic rail 13. The first stator magnetic rail 13 is located between two first guide posts 8. The first stator magnetic rail 13 is bolted to a fixing strip 39. One end of the fixing strip 39 is welded to the inner wall of the vertical plate 7. The first mover 14 is bolted to one end of a connecting rod 15. The other end of the connecting rod 15 is integrally formed with a heat insulation sleeve 11.

[0086] The second drive mechanism includes a second stator magnetic rail 20 fixed on the inner wall of the upper housing 2, and a second mover 21 cooperating with the second stator magnetic rail 20. The second mover 21 is bolted to a second sliding block 18 on one side of the support plate 16.

[0087] The first stator magnetic rail 13 and the first mover 14, as well as the second stator magnetic rail 20 and the second mover 21, are all combined into a linear motion mechanism. The first mover 14 moves linearly within the first stator magnetic rail 13 and can drive the heat insulation sleeve 11 to move via the connecting rod 15. The heat insulation sleeve 11 will drive the crucible 10 to move horizontally back and forth. Through horizontal movement, multiple crucibles 10 can be selected to perform operations, thereby evaporating target materials of different materials.

[0088] The second moving element 21 moves linearly within the second stator magnetic track 20, which can drive the second sliding block 18 to move synchronously, thereby realizing the horizontal reciprocating movement of the pallet 16.

[0089] Traditional electric motor or hydraulic cylinder drive methods require the main shaft and piston rod to pass through the lower housing 1. During repeated movements, gaps may be generated between the main shaft and piston rod and the lower housing 1, which is detrimental to the sealing performance of the lower housing 1. However, this device uses magnetic drive, without the intervention of the main shaft or piston rod, which can ensure the sealing performance and vacuum level of the lower housing 1.

[0090] like Figure 3 As shown, the heat insulation sleeve 11, the first sliding block 9 and the connecting rod 15 are all made of ceramic fiber. Two limiting rings 12 are fitted on the first guide post 8 and welded to it. The first sliding block 9 is located on the first guide post 8 between the two limiting rings 12.

[0091] The distance between the two limiting rings 12 is the sliding range of the first sliding block 9. This can limit the sliding range of the first sliding block 9 and prevent the crucible 10 from slipping off the first guide post 8 during the movement process. It also plays a positioning role, so that the crucible 10 can be accurately aligned with the connecting pipe 3 vertically.

[0092] like Figure 1 and Figure 5 As shown, the third drive mechanism includes two electromagnets 31 fixed on the inner wall of the top of the upper housing 2, and a magnet block 32 that cooperates with the electromagnets 31. The opposite sides of the magnet block 32 and the electromagnets 31 are magnetic poles of the same name.

[0093] Two symmetrically distributed magnet blocks 32 are fixedly bonded to the top surfaces of both the first movable ring 22 and the second movable ring 26.

[0094] When the first movable ring 22 or the second movable ring 26 moves below the electromagnet 31, the electromagnet 31 and the magnet block 32 are facing each other vertically. After the electromagnet 31 runs, it will generate a repulsive force with the magnet block 32, which will push the first movable ring 22 or the second movable ring 26 downward.

[0095] like Figure 7 As shown, two symmetrically distributed third guide posts 35 are welded and fixed to the inner walls on both sides of the vertical plate 7, and protrusions 36 are welded and fixed to the outer walls on both sides of the lower shell 1. Two symmetrically distributed fixing blocks 38 are welded and fixed to the back wall of the lower shell 1.

[0096] The third guide post 35 passes through the protrusion 36 and is slidably connected to the protrusion 36. The end of the third guide post 35 that is not connected to the vertical plate 7 is welded and fixed with an internal threaded cylinder 37. The fixing block 38 has a threaded hole that is coaxial with the internal threaded cylinder 37.

[0097] The third guide post 35 can move horizontally in a straight line along the protrusion 36, and the third guide post 35, together with the protrusion 36, supports the vertical plate 7, thereby enabling the vertical plate 7 to move horizontally smoothly. During the horizontal movement of the vertical plate 7, the crucible 10 can be moved out of the lower shell 1.

[0098] When the vertical plate 7 is attached to the outer wall of the lower housing 1 and covers the opening slot 6, a rubber ring is glued to the inner side of the vertical plate 7. The rubber ring can improve the sealing between the vertical plate 7 and the outer wall of the lower housing 1.

[0099] To ensure that the vertical plate 7 fits tightly with the lower housing 1, bolts can be screwed into the fixing block 38 and the internal threaded cylinder 37 to connect the internal threaded cylinder 37 and the fixing block 38 into one unit.

[0100] In the description of this specification, terms such as "connection," "installation," and "fixation" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meanings of the above terms within this invention based on the specific circumstances.

[0101] In the description of this specification, the terms "one embodiment," "some embodiments," "specific embodiment," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0102] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A vacuum coating system, characterized in that, in, The lower shell (1) and the upper shell (2) are connected by a connecting pipe (3). Several vertically distributed crucibles (10) are arranged inside the lower shell (1). An electron gun (34) is arranged on the inner wall of the lower shell (1) on one side of each crucible (10). A heat insulation sleeve (11) is fitted on the outer wall of the crucible (10). The outer wall of the heat insulation sleeve (11) is integrally formed with symmetrically distributed first sliding blocks (9). A first guide post (8) is slidably connected to the first sliding block (9). One end of the first guide post (8) is welded and fixed to the vertical plate (7). 7) A first driving mechanism for pushing the crucible (10) to move horizontally is provided on the upper shell (2); a support plate (16) is provided inside the upper shell (2), and multiple through holes (17) are opened along its length direction on the support plate (16). Second sliding blocks (18) are welded and fixed on the outer walls on both sides of the support plate (16). A second guide post (19) is slidably connected to the second sliding block (18). The two ends of the second guide post (19) are welded and connected to the inner wall of the upper shell (2). A second driving mechanism for pushing the second sliding block (18) to move horizontally is also provided inside the upper shell (2). A set of first connecting posts (23) runs through the tray (16). A sealing post (24) is welded and fixed to the bottom of the first connecting post (23). A sealing ring (25) is welded and fixed to the outer circular wall of the sealing post (24). A set of second connecting posts (27) runs through the wall of the tray (16) around the through hole (17). The bottom of the second connecting post (27) is welded and fixed to the top of the placement cylinder (28). The placement cylinder (28) and the through hole (17) are arranged on the same axis. A circular flange (29) is formed by the protrusion of the inner wall of the bottom end of the placement cylinder (28). A first movable ring (22) is welded and fixed to the top of the first connecting post (23). A second movable ring (26) is welded and fixed to the top of the second connecting post (27). A spring spring (30) is fitted on both the first connecting post (23) and the second connecting post (27). A third driving mechanism for driving the first movable ring (22) and the second movable ring (26) to move vertically is provided inside the upper housing (2).

2. The vacuum coating system according to claim 1, characterized in that: The top of the lower housing (1) and the bottom of the upper housing (2) are provided with connecting holes that communicate with the connecting pipe (3). Flange rings are welded and fixed to the outer walls of both ends of the connecting pipe (3). Both ends of the connecting pipe (3) are connected to the outer walls of the lower housing (1) and the upper housing (2) with flange sealing.

3. The vacuum coating system according to claim 1, characterized in that: The lower housing (1) has a first vacuum tube (4) welded to one side wall, and the upper housing (2) has a second vacuum tube (5) welded to one side bottom. A vacuum pump is connected to one end of the first vacuum tube (4) and the second vacuum tube (5) via a T-junction.

4. The vacuum coating system according to claim 1, characterized in that: The lower housing (1) has an opening groove (6) on one side wall for the first guide post (8) to pass through. The outer wall of the lower housing (1) around the opening groove (6) is sealed and fitted to the inner side of the vertical plate (7). The upper housing (2) has a through groove on the top wall. The upper housing (2) around the through groove is bolted with a cover plate (33).

5. The vacuum coating system according to claim 1, characterized in that: The connecting pipe (3) and the crucible (10) are arranged along the same axis. The inner diameter of the connecting pipe (3) is larger than the diameter of the crucible (10). The inner diameter of the connecting pipe (3), the diameter of the sealing column (24), and the diameter of the placement cylinder (28) are all the same.

6. The vacuum coating system according to claim 1, characterized in that: The first drive mechanism includes a first stator magnetic rail (13) and a first mover (14) that cooperates with the first stator magnetic rail (13). The first stator magnetic rail (13) is located between two first guide posts (8). The first stator magnetic rail (13) is bolted to a fixing strip (39). One end of the fixing strip (39) is welded to the inner wall of the vertical plate (7). The first mover (14) is bolted to one end of a connecting rod (15). The other end of the connecting rod (15) is integrally formed with a heat insulation sleeve (11).

7. The vacuum coating system according to claim 1, characterized in that: The second drive mechanism includes a second stator magnetic rail (20) fixed on the inner wall of the upper housing (2) and a second mover (21) cooperating with the second stator magnetic rail (20). The second mover (21) is bolted to a second sliding block (18) on one side of the support plate (16).

8. The vacuum coating system according to claim 1, characterized in that: The heat insulation sleeve (11), the first sliding block (9) and the connecting rod (15) are all made of ceramic fiber. Two limiting rings (12) are fitted on the first guide post (8) and welded to it. The first sliding block (9) is located on the first guide post (8) between the two limiting rings (12).

9. A vacuum coating system according to claim 1, characterized in that: The third driving mechanism includes two electromagnets (31) fixed on the inner wall of the top of the upper housing (2) and a magnet block (32) that cooperates with the electromagnets (31). The opposite side of the magnet block (32) and the electromagnet (31) are the same magnetic poles. Two symmetrically distributed magnet blocks (32) are fixedly bonded to the top surfaces of the first movable ring (22) and the second movable ring (26); The vertical plate (7) has two symmetrically distributed third guide columns (35) welded and fixed on the inner walls of both sides. The lower shell (1) has two protrusions (36) welded and fixed on the outer walls of both sides. The lower shell (1) has two symmetrically distributed fixing blocks (38) welded and fixed on the back wall. The third guide post (35) passes through the protrusion (36) and is slidably connected to the protrusion (36). The end of the third guide post (35) that is not connected to the vertical plate (7) is welded and fixed with an internal threaded cylinder (37). The fixing block (38) has a threaded hole that is coaxial with the internal threaded cylinder (37).

10. A coating method using the system described in any one of claims 1-9, characterized in that: Includes the following steps: S1: Dry the target material, let it cool naturally, and then place it in the crucible (10). Then seal the lower shell (1). S2: Place a single-crystal germanium wafer and an optical glass plate as substrates on the flange (29) at the bottom of the placement tube (28), and then seal the upper housing (2); S3: Evacuate the lower shell (1) and the upper shell (2); S4: Start the electron gun (34) corresponding to the crucible (10), set the evaporation temperature, the electron gun (34) generates a high-energy electron beam to heat the target material to the evaporation temperature, after the target material evaporates, it moves upward in the form of particles and is deposited on the substrate surface.

Images