SMIF box linkage opening and closing device and SMIF box loading equipment

Abstract

The invention provides an SMIF box linkage opening and closing device and SMIF box loading equipment, relates to the technical field of semiconductor equipment, and aims at solving the problems that according to an existing SMIF box, separation of a box cover and a bottom substrate and connection of the box cover and a moving mechanism after the box cover is opened are achieved through different power sources. The SMIF box linkage opening and closing device comprises a fixed part, a movable part, an unlocking mechanism and a second locking part. The unlocking mechanism is installed on the fixed part, the second locking part is movably installed on the movable part, and the second locking part is provided with a follow-up position for connecting the box cover and the movable part and a separation position for releasing the connection state of the box cover and the movable part; the unlocking mechanism is in transmission connection with the first lock piece and the second lock piece and used for driving the first lock piece to move to the unlocking position and meanwhile linkage the second lock piece to move to the follow-up position and driving the first lock piece to move to the locking position and meanwhile linkage the second lock piece to move to the separation position. Separation of the box cover and the base plate and connection of the box cover and the moving mechanism are achieved through the same power source.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more specifically, to an SMIF box linkage opening and closing device and an SMIF box loading device. Background Technology

[0002] In semiconductor manufacturing, wafer transfer is crucial for IC (Integrated Circuit) production. To ensure wafer quality during transfer between different processes and to prevent dust or other contamination, SMIF (Standard Mechanical Interface) boxes are often used for wafer transfer. These boxes significantly reduce dust particles flowing over the wafer, minimizing contamination and ensuring that the gas surrounding the wafer remains stationary relative to it during transfer, storage, and most processes, while also preventing external dust particles from entering the wafer environment.

[0003] However, in existing SMIF boxes, the separation of the box cover from the bottom substrate and the fixed connection between the box cover and the moving mechanism after the box cover is opened are achieved by different power sources, which is not only not conducive to control, but also has high driving costs. Summary of the Invention

[0004] The first objective of this invention is to provide an SMIF box linkage opening and closing device to solve the technical problems of existing SMIF boxes, such as the separation of the box cover from the bottom substrate and the fixed connection between the box cover and the moving mechanism after the box cover is opened, which are achieved by using different power sources.

[0005] The present invention provides an SMIF cell linkage opening and closing device, wherein the SMIF cell includes a substrate and a cover covering the substrate, a wafer receiving cavity is formed between the cover and the substrate, and a first locking member is provided between the cover and the substrate. The first locking member has a locking position for connecting the cover and the substrate and an unlocking position for releasing the connection between the cover and the substrate.

[0006] The SMIF box linkage opening and closing device includes a fixed component, a movable component, an unlocking mechanism, and a second locking component. The fixed component supports the substrate, the unlocking mechanism is mounted on the fixed component, and the second locking component is movably mounted on the movable component. The second locking component has a follow-up position connecting the box cover and the movable component, and a separation position releasing the box cover from the movable component. The unlocking mechanism is drivenly connected to both the first locking component and the second locking component, and is used to move the first locking component to the unlock position while simultaneously moving the second locking component to the follow-up position, and to move the first locking component to the lock position while simultaneously moving the second locking component to the separation position.

[0007] Furthermore, the unlocking mechanism includes a rotating cam rotatably mounted on the fixing member. The rotating cam has a first outer contour and a second outer contour, wherein the radius of curvature of the first outer contour is greater than the radius of curvature of the second outer contour. The first outer contour cooperates with the second locking member to move the second locking member away from the lid, thereby moving the second locking member to the separated position. The second outer contour cooperates with the second locking member to move the second locking member closer to the lid, thereby moving the second locking member to the follow-up position. The second locking member always has a tendency to move towards the follow-up position.

[0008] Furthermore, the unlocking mechanism also includes a push rod, which is movably mounted on the fixing member and located between the rotating cam and the second locking member; one end of the push rod is used to abut against the outer contour of the rotating cam, and the other end of the push rod is used to abut against the second locking member; the push rod always tends to abut against the outer contour of the rotating cam.

[0009] Furthermore, the second outer contour is an arc shape.

[0010] Furthermore, the second locking element is provided at a set of opposite sidewalls of the box cover, and a push rod is provided between each second locking element and the rotating cam; the rotating cam has two first outer contours and two second outer contours, with the first outer contours and second outer contours alternating; and / or, a cam follower is provided at one end of the push rod facing the rotating cam, and the push rod abuts against the rotating cam through the cam follower; and / or, the unlocking mechanism further includes a guide rail, the guide rail is fixedly connected to the fixing element, the push rod is slidably disposed on the guide rail, and the sliding direction of the push rod is along the length direction of the push rod; and / or, the unlocking mechanism further includes a return spring, the push rod includes an active section for abutting against the outer contour of the rotating cam, and a driven section for abutting against the second locking element, the return spring is fixedly connected to the active section and the driven section, and the return spring is used to ensure that the push rod always has a tendency to abut against the outer contour of the rotating cam.

[0011] Furthermore, the lid includes a cover body and a flange extending outward from the cover body, and the second lock includes a latch; in the follow-up position of the second lock, the latch extends above the flange.

[0012] Furthermore, the second locking element includes a plurality of synchronously moving locking tongues, which are spaced apart along the edge of the cover.

[0013] Furthermore, the rotating cam is fixedly provided with an opening pin, which is used to cooperate with the first locking member to switch the first locking member between the locked position and the unlocked position; the rotating cam is located below the fixing member, the fixing member is provided with an arc-shaped guide groove, and the opening pin passes through the arc-shaped guide groove to cooperate with the first locking member.

[0014] Furthermore, the SMIF box linkage opening and closing device further includes a positioning sensor, which is installed on the movable member and is used to detect the position of the second locking member; and / or, the movable member has a central opening, which surrounds the fixed member; the movable member is used to connect with a lifting drive device; and / or, the SMIF box further includes a wafer basket, which is disposed on the substrate and is used to carry wafers.

[0015] The beneficial effects of the SMIF box linkage opening and closing device of the present invention are:

[0016] By setting up an SMIF box linkage opening and closing device mainly composed of a fixed component, a movable component, an unlocking mechanism, and a second locking component, when the SMIF box is in the locked position, that is, when the first locking component is in the locked position connecting the box cover and the substrate, the SMIF box is placed on the fixed component via the substrate, and the second locking component is in the disengaged position, releasing the connection between the box cover and the movable component. When wafer transfer is required, that is, when the box cover needs to be opened, the unlocking mechanism can be used to switch the first locking component to the unlocked position, separating the box cover from the substrate. Simultaneously, when the first locking component switches to the unlocked position, the second locking component also switches from the disengaged position to the follow-up position connecting the box cover and the movable component, so that the box cover and the movable component are connected together. The movement of the movable component then drives the box cover to open, thereby completing the subsequent wafer transfer process.

[0017] After the wafer transfer is completed, when it is necessary to close the cover, the movable component can be used to move the cover to the position of the substrate. At this time, the cover and the substrate are only in a placement relationship, and there is no connection between them. Then, the reverse action of the unlocking mechanism is used to switch the first locking component from the unlock position to the locking position connecting the cover and the substrate, so that the cover and the substrate are connected together. At the same time as the first locking component switches to the above-mentioned locking position, the second locking component will also switch from the follower position to the separation position that releases the connection between the cover and the movable component, so that the cover and the movable component are separated, thereby allowing the SMIF box to be removed from the fixing component.

[0018] This SMIF box linkage opening and closing device, through the aforementioned configuration, utilizes the unlocking mechanism to simultaneously drive both the first and second locking components. This allows for the release of the box lid from the base plate and the simultaneous connection of the lid to the movable component when the lid needs to be opened, and the release of the lid from the movable component and the connection of the lid to the base plate when the lid needs to be closed. This achieves linkage between the first and second locking components during opening and closing. This configuration allows the separation of the lid from the base plate and the connection of the lid to the movable component after opening, as well as the separation of the lid from the movable component and the connection of the lid to the base plate after closing, to all be achieved using the same power source. This facilitates control and reduces driving costs, thus effectively solving the technical problems existing in the prior art.

[0019] The second objective of this invention is to provide an SMIF box loading device to solve the technical problems of existing SMIF boxes, such as the separation of the box cover from the bottom substrate and the fixed connection between the box cover and the moving mechanism after the box cover is opened, which are achieved by using different power sources.

[0020] The SMIF box loading device provided by the present invention includes a support frame, a lifting drive device, and the aforementioned SMIF box linkage opening and closing device, wherein the lifting drive device is installed on the support frame and is drivenly connected to the movable part; the fixed part is fixedly connected to the support frame.

[0021] The beneficial effects of the SMIF box loading device of the present invention are:

[0022] By incorporating the aforementioned SMIF box linkage opening and closing device into the SMIF box loading equipment, the SMIF box loading equipment possesses all the advantages of the aforementioned SMIF box linkage opening and closing device, which will not be elaborated upon here. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0024] Figure 1 A schematic diagram of the structure of an SMIF box using the SMIF box linkage opening and closing device provided in this embodiment of the invention;

[0025] Figure 2 This is a schematic diagram showing the relative positional relationship between the SMIF box linkage opening and closing device and the SMIF box provided in an embodiment of the present invention.

[0026] Figure 3A top view of the SMIF box linkage opening and closing device provided in an embodiment of the present invention, wherein the first locking member is in the locked position and the second locking member is in the disengaged position;

[0027] Figure 4 The top view of the SMIF box linkage opening and closing device provided in the embodiment of the present invention, wherein the first locking member is in the unlocked position and the second locking member is in the follow-up position;

[0028] Figure 5 This is a schematic diagram of the SMIF box loading device provided in an embodiment of the present invention when the lid of the SMIF box is closed;

[0029] Figure 6 This is a schematic diagram of the SMIF box loading device provided in an embodiment of the present invention when the lid of the SMIF box is open;

[0030] Figure 7 This is a cross-sectional schematic diagram of the SMIF box linkage opening and closing device provided in an embodiment of the present invention.

[0031] Explanation of reference numerals in the attached figures:

[0032] 101 - Box cover; 102 - Wafer basket; 103 - Substrate; 104 - Wafer;

[0033] 201-Rotary cam; 202-Opening pin; 203-Arc-shaped guide groove; 204-Cam follower; 205-Push rod; 206-Second locking element; 207-Position sensor; 208-Fixed element; 209-Moving element; 210-Guide slide rail; 211-Spring guide block; 212-Reset spring; 213-Opening impact block;

[0034] 301 - Support frame; 302 - Transmission port. Detailed Implementation

[0035] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0036] This embodiment provides an SMIF box linkage opening and closing device.

[0037] Figure 1 This is a structural diagram of the SMIF box for using the SMIF box linkage opening and closing device provided in this embodiment. Figure 1As shown, the SMIF box includes a substrate 103 and a box cover 101 covering the substrate 103. A wafer receiving cavity is formed between the box cover 101 and the substrate 103. A first locking member is provided between the box cover 101 and the substrate 103. The first locking member has a locking position that connects the box cover 101 and the substrate 103 and an unlocking position that releases the connection between the box cover 101 and the substrate 103.

[0038] Figure 2 This is a schematic diagram showing the relative positional relationship between the SMIF box linkage opening and closing device and the SMIF box provided in this embodiment; Figure 3 This is a top view of the SMIF box linkage opening and closing device provided in this embodiment, where the first locking member is in the locked position and the second locking member 206 is in the disengaged position. Figure 4 This is a top view of the SMIF box linkage opening and closing device provided in this embodiment, where the first locking member is in the unlocked position and the second locking member 206 is in the follow-up position. Figures 2 to 4 As shown, in this embodiment, the SMIF box linkage opening and closing device includes a fixed part 208, a movable part 209, an unlocking mechanism, and a second lock part 206.

[0039] Please continue to refer to Figures 2 to 4 In this embodiment, specifically, the fixing member 208 is used to support the base plate 103, the unlocking mechanism is installed on the fixing member 208, the second locking member 206 is movably installed on the movable member 209, and the second locking member 206 has a follow-up position connecting the cover 101 and the movable member 209 and a separation position releasing the connection between the cover 101 and the movable member 209; the unlocking mechanism is drivenly connected to both the first locking member and the second locking member 206, and is used to drive the first locking member to the unlock position while simultaneously driving the second locking member 206 to the follow-up position, and to drive the first locking member to the lock position while simultaneously driving the second locking member 206 to the separation position.

[0040] Please continue to refer to Figure 3 When the SMIF box is in the locked position, that is, when the first locking member is in the locked position connecting the box cover 101 and the substrate 103, the SMIF box is placed on the fixing member 208 via the substrate 103, and the second locking member 206 is in the separated position, where the box cover 101 is released from the connection with the movable member 209. When it is necessary to transfer the wafer 104, that is, when it is necessary to open the box cover 101, the first locking member can be switched to the unlocked position, which separates the box cover 101 from the substrate 103, by using the action of the unlocking mechanism. At the same time as the first locking member switches to the unlocked position, the second locking member 206 also switches from the separated position to the follow-up position connecting the box cover 101 and the movable member 209, so that the box cover 101 and the movable member 209 are connected together, so that the movement of the movable member 209 can drive the box cover 101 to open, thereby completing the subsequent wafer 104 transfer process.

[0041] Please continue to refer to Figure 4 After the wafer 104 is transferred, when it is necessary to close the cover 101, the movable member 209 can be used to move the cover 101 to the position of the substrate 103. At this time, the cover 101 and the substrate 103 are only placed and placed, and there is no connection between them. Then, the reverse action of the unlocking mechanism is used to switch the first lock from the unlock position to the locking position connecting the cover 101 and the substrate 103, so that the cover 101 and the substrate 103 are connected together. At the same time as the first lock switches to the above-mentioned locking position, the second lock 206 will also switch from the follower position to the separation position that releases the connection between the cover 101 and the movable member 209, so that the cover 101 and the movable member 209 are separated, and the SMIF box can be removed from the fixing member 208.

[0042] The SMIF box linkage opening and closing device, through the aforementioned configuration, utilizes the action of the unlocking mechanism to simultaneously drive the first and second locking members 206. This allows for the release of the box cover 101 from the base plate 103 and the simultaneous connection of the box cover 101 to the movable member 209 when the box cover 101 needs to be opened, and the release of the box cover 101 from the movable member 209 and the simultaneous connection of the box cover 101 to the base plate 103 when the box cover 101 needs to be closed. This achieves linkage between the first and second locking members 206 during the opening and closing processes. This configuration allows the separation of the box cover 101 from the base plate 103, the connection of the box cover 101 to the movable member 209 after opening, and the separation of the box cover 101 from the movable member 209 and the connection of the box cover 101 to the base plate 103 after closing, all to be achieved using the same power source. This facilitates control and reduces driving costs, thus effectively solving the technical problems existing in the prior art.

[0043] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the unlocking mechanism may include a rotary cam 201. Specifically, the rotary cam 201 is rotatably mounted on the fixing member 208. The rotary cam 201 has a first outer contour and a second outer contour. The radius of curvature of the first outer contour is greater than the radius of curvature of the second outer contour. The first outer contour cooperates with the second locking member 206 to move the second locking member 206 away from the cover 101, so that the second locking member 206 moves to the separation position (see...). Figure 3 The second outer contour cooperates with the second locking member 206 to bring the second locking member 206 close to the cover 101, so that the second locking member 206 moves to the follow-up position; the second locking member 206 always has a tendency to move to the follow-up position.

[0044] Please continue to refer to Figure 3When the SMIF box is in the locked position, the rotating cam 201 maintains contact with the second locking member 206 through the first outer contour. The first locking member is in the locked position, and the box cover 101 is connected to the substrate 103 to close the wafer housing cavity. At the same time, since the radius of curvature of the first outer contour is large, the second locking member 206 can be driven away from the box cover 101, so that the second locking member 206 is in the separated position to release the restriction of the second locking member 206 on the box cover 101. At this time, the SMIF box can be removed from the fixing member 208.

[0045] When it is necessary to open the lid 101, the rotating cam 201 can be adjusted according to... Figure 3 The shown viewpoint rotates counterclockwise to Figure 4 The position of the rotating cam 201, where it engages with the second locking member 206, transitions from the first outer contour to the second outer contour. During this process, the first locking member switches from the locked position to the unlocked position, separating the cover 101 from the substrate 103. By setting the second locking member 206 to always have a tendency to move towards the follower position, when the rotating cam 201 rotates to the second outer contour facing the second locking member 206, the radius of curvature of the outer contour of the rotating cam 201 engaging with the second locking member 206 decreases. As a result, the second locking member 206 moves closer to the cover 101, connecting the cover 101 with the movable member 209. This allows the cover 101 and the movable member 209 to move synchronously, enabling the movable member 209 to drive the cover 101 to open the SMIF box, thus facilitating the subsequent wafer 104 transfer process.

[0046] Please continue to refer to Figure 4 After the wafer 104 is transferred, when it is necessary to close the cover 101, the movable part 209 can be used to move the cover 101 to the position of the substrate 103, and the cover 101 can be placed on the substrate 103; then, the rotating cam 201 is moved according to... Figure 4 The shown viewpoint rotates clockwise to Figure 3 The position of the rotating cam 201, which is used to cooperate with the second locking member 206, transitions from the second outer contour to the first outer contour. Since the radius of curvature of the first outer contour is larger, the rotating cam 201 will push the second locking member 206 away from the cover 101 during the above-mentioned rotational movement, thereby releasing the connection between the cover 101 and the movable member 209. At the same time, the first locking member switches from the unlocked position to the locked position, connecting the cover 101 and the base plate 103 together, so that the SMIF box can be removed from the fixing member 208 as a whole.

[0047] By setting a rotary cam 201 in the unlocking mechanism, the opening and closing process of the lid 101 can be achieved by the rotation of the rotary cam 201 when it is necessary to open or close the lid 101, which simplifies the opening and closing process of the lid 101.

[0048] In this embodiment, the SMIF box linkage opening and closing device may further include a rotary motor. Specifically, the housing of the rotary motor can be connected to the fixing member 208, and the motor shaft of the rotary motor can be fixedly connected to the rotary cam 201, so as to drive the rotary cam 201 by the action of the rotary motor. The counterclockwise and clockwise rotation of the rotary cam 201 can be achieved by the forward or reverse rotation of the rotary motor. This configuration enables the automatic opening and closing of the box cover 101.

[0049] In other embodiments, the rotation of the rotary cam 201 can also be driven manually or by other rotary drive components, which will not be described in detail in this embodiment.

[0050] In this embodiment, the second locking member 206 can be connected to the movable member 209 by an elastic element so that the second locking member 206 always has a tendency to move toward the following position.

[0051] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the unlocking mechanism may further include a push rod 205. Specifically, the push rod 205 is movably mounted on the fixing member 208, and the push rod 205 is located between the rotating cam 201 and the second locking member 206. One end of the push rod 205 is used to abut against the outer contour of the rotating cam 201, and the other end of the push rod 205 is used to abut against the second locking member 206. The push rod 205 always tends to abut against the outer contour of the rotating cam 201.

[0052] By setting a push rod 205 in the unlocking mechanism, the power transmission from the rotary cam 201 to the second locking member 206 during the rotation of the rotary cam 201 can be realized by using the push rod 205, which can effectively reduce the size of the rotary cam 201 and reduce the cost of the rotary cam 201.

[0053] In this SMIF box linkage opening and closing device, during the rotation of the rotary cam 201, the entire rotational stroke of the rotary cam 201 realizes the opening and closing of the first locking member. At the same time, when the rotary cam 201 rotates to the point where it engages with the push rod 205 through the second outer contour, the rotary cam 201 no longer generates driving force on the push rod 205. That is to say, during the stage when the second outer contour of the rotary cam 201 engages with the push rod 205, the position of the push rod 205 remains unchanged. In other words, the position of the second locking member 206 remains unchanged and is always in the follow-up position that connects the box cover 101 to the movable member 209.

[0054] The above configuration allows the SMIF box linkage opening and closing device to be compatible with first locking members at different opening and closing angles. For example, when the first locking member can be opened or closed by rotating the rotary cam 201 by 90° (the opening or closing of the first locking member is achieved during the rotation of the rotary cam 201 by 90°), if the specifications of the first locking member change, such as requiring the rotary cam 201 to rotate 100° to open or close the first locking member, since the position of the push rod 205 remains unchanged when the rotary cam 201 rotates to engage with the second outer contour, even if the maximum rotation stroke of the rotary cam 201 changes to accommodate the opening or closing angle of the first locking member, it will not affect the original locking position of the push rod 205, that is, it will not affect the position of the second locking member 206. The second locking member 206 remains in the original position when the box cover 101 is connected to the movable part 209, and the movement of the second locking member 206 is not affected by the rotation angle of the rotary cam 201. Therefore, the SMIF box linkage opening and closing device can adapt to first locking members at different unlocking angles.

[0055] In this embodiment, the second outer contour is arc-shaped. By setting the second outer contour to an arc shape, the position of the push rod 205 is more stable and does not fluctuate when the rotating cam 201 engages with the push rod 205 through the second outer contour.

[0056] Please continue to refer to Figure 3 and Figure 4 In this embodiment, a cam follower 204 is provided at one end of the push rod 205 facing the rotating cam 201. Specifically, the push rod 205 abuts against the rotating cam 201 through the cam follower 204.

[0057] The aforementioned cam follower 204 reduces the friction between the push rod 205 and the outer contour of the rotary cam 201 during contact, thereby ensuring the smoothness of the rotary cam 201 during rotation.

[0058] Figure 7 This is a cross-sectional schematic diagram of the SMIF box linkage opening and closing device provided in this embodiment. Figure 7 As shown, the unlocking mechanism may also include a guide rail 210, wherein the guide rail 210 is fixedly connected to the fixing member 208, and the push rod 205 is slidably disposed on the guide rail 210, and the sliding direction of the push rod 205 is along the length direction of the push rod 205.

[0059] The aforementioned guide rail 210 can guide the push rod 205 during its movement, ensuring that the movement path of the push rod 205 always follows the direction of the rotating cam 201 toward the second locking member 206. While ensuring the smooth movement of the push rod 205, it can also improve the unlocking efficiency of the second locking member 206.

[0060] Please continue to refer to Figure 7 In this embodiment, the unlocking mechanism may further include a return spring 212. Specifically, the push rod 205 includes an active section for engaging with the outer contour of the rotating cam 201 and a driven section for engaging with the second locking member 206. The return spring 212 is fixedly connected to the active section and the driven section, and the return spring 212 is used to ensure that the push rod 205 always has a tendency to engage with the outer contour of the rotating cam 201.

[0061] By setting a return spring 212, the push rod 205 always tends to abut against the rotary cam 201, thereby enabling reliable driving of the push rod 205 during the rotation of the rotary cam 201.

[0062] Specifically, the active section can be configured as a hollow structure so that the driven section can be inserted into the active section. The return spring 212 is then fitted onto the driven section, with one end of the return spring 212 fixedly connected to the active section and the other end fixedly connected to the driven section. This configuration guides the return spring 212 during its extension and retraction, preventing bending or twisting and ensuring its installation stability, thus preventing it from detaching from the push rod 205.

[0063] In this embodiment, high-strength plastic can be provided in the driven section of the push rod 205 that abuts against the second locking member 206, thereby achieving the abutment engagement with the second locking member 206. This arrangement can reduce wear, thereby reducing the pollution of the internal environment caused by wear-generated particles.

[0064] In other embodiments, rollers can be provided on the driven section of the push rod 205 where it abuts against the second locking member 206, thereby achieving the abutment engagement with the second locking member 206. This arrangement can also reduce wear.

[0065] Please continue to refer to Figure 3 and Figure 4 In this embodiment, a second locking member 206 is provided at a set of opposite sidewalls of the box cover 101, and a push rod 205 is provided between each second locking member 206 and the rotating cam 201; the rotating cam 201 has two first outer contours and two second outer contours, wherein the first outer contours and the second outer contours are alternately arranged.

[0066] The above settings increase the number of connection points between the lid 101 and the movable part 209, as well as the distribution area of ​​these connection points. This ensures that when the lid 101 is connected to the movable part 209 via the second locking member 206, a set of opposite sidewalls of the lid 101 are all limited by the connection, guaranteeing the stability of the lid 101 when it moves with the movable part 209. At the same time, it also improves the reliability of the connection between the lid 101 and the movable part 209.

[0067] In this embodiment, the cover 101 includes a cover body and a flange extending outward from the cover body, and the second lock 206 includes a latch; in the follow-up position of the second lock 206, the latch extends above the flange.

[0068] The combination of the lid 101 and the second locking member 206 not only reliably limits the lid 101 and prevents it from falling off during the movement of the moving member 209, but also has a simple structure.

[0069] In other embodiments, a slot may be provided on the outer peripheral surface of the cover 101, so that when the second lock 206 is in the follow-up position, the lock tongue is inserted into the slot to connect the cover 101 and the movable part 209.

[0070] Please continue to refer to Figures 2 to 4 In this embodiment, the second locking member 206 includes two synchronously moving locking tongues, which are arranged at intervals along the edge of the cover.

[0071] This setting increases the number of connection points between the second locking member 206 and the corresponding edge of the lid 101, which plays a certain role in limiting the flipping of the lid 101 and preventing the lid 101 from flipping over.

[0072] In this embodiment, a connecting rod can be provided in the second locking member 206 to fix the two locking tongues. The push rod 205 is driven to move closer to or away from the cover 101 by the abutting action of the connecting rod.

[0073] In other embodiments, multiple branch segments can be provided on the driven section of the push rod 205 that abuts against the second locking member 206, and these multiple branch segments abut against the connecting rod of the second locking member 206. This arrangement can increase the number of points of action of the push rod 205 on the second locking member 206, thereby ensuring the smooth movement of the second locking member 206.

[0074] In other embodiments, the latches in the second locking member 206 may also be three or four, that is, three or four latches may be provided on the same edge of the cover 101.

[0075] Please continue to refer to Figures 2 to 4In this embodiment, the rotating cam 201 is fixedly provided with an opening pin 202, wherein the opening pin 202 is used to cooperate with the first locking member so that the first locking member switches between the locked position and the unlocked position.

[0076] The aforementioned opening pin 202 facilitates the rotation of the cam 201 to drive the first locking element, thereby enabling reliable switching of the first locking element between the locked and unlocked positions.

[0077] It should be noted that in this embodiment, the opening pin 202 can drive the first locking member with reference to the existing fork mechanism, and the connection structure between the cover 101 and the substrate 103 is also existing in the art.

[0078] In this embodiment, the rotating cam 201 is located below the fixing member 208. The fixing member 208 has an arc-shaped guide groove 203, and the box-opening pin 202 passes through the arc-shaped guide groove 203 to cooperate with the first locking member.

[0079] By positioning the rotary cam 201 below the fixing member 208, the flatness of the bearing surface of the fixing member 208 can be ensured, preventing the SMIF box from shaking after being placed on the fixing member 208. By creating an arc-shaped guide groove 203 in the fixing member 208, the opening pin 202 passes through the arc-shaped guide groove 203 to engage with the first locking member. The arc-shaped guide groove 203 guides the movement of the opening pin 202, ensuring the smoothness of the rotary cam 201 in opening and closing the box cover 101.

[0080] In addition, the arc-shaped guide groove 203 also plays a certain role in limiting the rotation stroke of the rotary cam 201, thereby limiting the clockwise and counterclockwise rotation of the rotary cam 201 and ensuring that the rotary cam 201 will not rotate excessively when it rotates to open or close the first locking member.

[0081] Please continue to refer to Figure 2 In this embodiment, the SMIF box linkage opening and closing device may also include a position sensor 207, which is installed on the movable part 209 and is used to detect the position of the second locking part 206.

[0082] During the opening process of the box lid 101, when the position sensor 207 detects that the second locking member 206 is in the follow-up position, it can send a corresponding detection signal to the controller of the SMIF box loading device, so that the controller can control the movement of the movable member 209. This setting can avoid the situation where the box lid 101 does not move simultaneously because the movable member 209 moves due to the second locking member 206 not switching to the follow-up position, reducing the risk of misoperation and ensuring the reliability of the SMIF box linkage opening and closing device.

[0083] In this embodiment, a detection port can be provided in the movable part 209, allowing the lower end of the second locking member 206 to extend downward from the detection port. A position sensor 207 is installed on the lower surface of the movable part 209 to detect the lower end of the second locking member 206. Specifically, when the position sensor 207 detects the second locking member 206, it indicates that the second locking member 206 is in a separated position away from the cover 101; when the position sensor 207 does not detect the second locking member 206, it indicates that the second locking member 206 is in a follow-up position close to the cover 101.

[0084] The aforementioned arrangement of the position sensor 207 reduces the space occupied above the moving part 209 and does not interfere with the movement of the SMIF box.

[0085] Please continue to refer to Figures 2 to 4 In this embodiment, the movable member 209 has a central opening, and the movable member 209 is arranged around the fixed member 208 through the central opening; the movable member 209 is used to connect with the lifting drive device.

[0086] After the second locking member 206 switches from the separated position to the follow-up position, the lifting drive device is activated, driving the movable member 209 to rise, thereby driving the cover 101 to rise synchronously, completing the purpose of opening the cover 101, thereby exposing the wafer 104 in the wafer accommodating cavity, so as to realize the wafer 104 transfer process; after the wafer 104 transfer is completed, the lifting drive device is activated, driving the movable member 209 to fall, thereby driving the cover 101 to fall synchronously, thereby placing the cover 101 on the substrate 103.

[0087] The above-mentioned design not only ensures that the cover 101 will not collide with the internal wafer 104 during opening and closing, but also improves the structural strength of the movable part 209 and reduces its deformation by setting the movable part 209 to have a central opening.

[0088] Please continue to refer to Figure 1 In this embodiment, the SMIF box may also include a wafer basket 102. Specifically, the wafer basket 102 is disposed on the substrate 103 and is used to carry the wafer 104.

[0089] By setting the wafer basket 102 in the SMIF box, reliable support for multiple wafers 104 can be achieved.

[0090] Figure 5 This is a schematic diagram of the SMIF box loading device provided in this embodiment when the box cover 101 of the SMIF box is closed; Figure 6 This is a schematic diagram of the SMIF box loading device provided in this embodiment when the box cover 101 of the SMIF box is open. Figure 5 and Figure 6As shown, this embodiment also provides an SMIF box loading device, including a support frame 301, a lifting drive device (not shown in the figure) and the above-mentioned SMIF box linkage opening and closing device, wherein the lifting drive device is installed on the support frame 301 and is drivenly connected to the movable part 209; the fixed part 208 is fixedly connected to the support frame 301.

[0091] By incorporating the aforementioned SMIF box linkage opening and closing device into the SMIF box loading equipment, the SMIF box loading equipment possesses all the advantages of the aforementioned SMIF box linkage opening and closing device, which will not be elaborated upon here.

[0092] Please continue to refer to Figure 5 and Figure 6 The support frame 301 has a wafer transfer port 302. When wafer 104 needs to be transferred, the rotation of the rotary cam 201 causes the first locking member to be in the unlocked position and the second locking member 206 to be in the follow-up position. At this time, the cover 101 is separated from the substrate 103, and the cover 101 is connected to the movable member 209. Under the action of the lifting drive device, the cover 101 can be lifted to... Figure 6 The position shown exposes the wafer basket 102 and aligns it with the wafer transfer port 302, allowing the wafer 104 to be transferred through the transfer port 302. After the wafer 104 is transferred, the lifting drive device lowers the cover 101 to the position shown. Figure 5 At the position shown, place the cover 101 on the substrate 103. By using the reverse rotation of the rotating cam 201, the first locking member is in the locked position and the second locking member 206 is in the separated position. At this time, the cover 101 and the substrate 103 are connected, and the cover 101 and the movable member 209 are separated. The SMIF box can be taken out as a whole from the transfer port 302.

[0093] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

[0094] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0095] In the above embodiments, descriptions of directions such as "up", "down", "inner", "outer", and "side" are all based on the accompanying drawings.

[0096] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A SMIF cell linkage opening and closing device, the SMIF cell comprising a substrate (103) and a cover (101) covering the substrate (103), wherein a wafer receiving cavity is formed between the cover (101) and the substrate (103), and a first locking member is disposed between the cover (101) and the substrate (103), the first locking member having a locking position connecting the cover (101) and the substrate (103) and an unlocking position releasing the connection between the cover (101) and the substrate (103); characterized in that, The SMIF box linkage opening and closing device includes a fixed part (208), a movable part (209), an unlocking mechanism, and a second locking part (206); The fixing member (208) is used to support the base plate (103). The unlocking mechanism is installed on the fixing member (208). The second locking member (206) is movably installed on the movable member (209). The second locking member (206) has a follow-up position connecting the cover (101) and the movable member (209) and a separation position releasing the connection between the cover (101) and the movable member (209). The unlocking mechanism is drivenly connected to both the first locking member and the second locking member (206). It is used to drive the first locking member to the unlock position while simultaneously moving the second locking member (206) to the follow-up position, and to drive the first locking member to the lock position while simultaneously moving the second locking member (206) to the separation position.

2. The SMIF box linkage opening and closing device according to claim 1, characterized in that, The unlocking mechanism includes a rotary cam (201) rotatably mounted on the fixing member (208). The rotary cam (201) has a first outer contour and a second outer contour. The radius of curvature of the first outer contour is greater than that of the second outer contour. The first outer contour cooperates with the second locking member (206) to move the second locking member (206) away from the cover (101) so that the second locking member (206) moves to the separated position. The second outer contour cooperates with the second locking member (206) to move the second locking member (206) closer to the cover (101) so that the second locking member (206) moves to the following position. The second locking member (206) always has a tendency to move toward the following position.

3. The SMIF box linkage opening and closing device according to claim 2, characterized in that, The unlocking mechanism further includes a push rod (205), which is movably mounted on the fixing member (208) and is located between the rotating cam (201) and the second locking member (206). One end of the push rod (205) is used to abut against the outer contour of the rotating cam (201), and the other end of the push rod (205) is used to abut against the second locking member (206). The push rod (205) always tends to abut against the outer contour of the rotating cam (201).

4. The SMIF box linkage opening and closing device according to claim 2, characterized in that, The second outer contour is an arc shape.

5. The SMIF box linkage opening and closing device according to claim 3, characterized in that, The second locking element (206) is provided at a set of opposite sidewalls of the box cover (101), and a push rod (205) is provided between each second locking element (206) and the rotating cam (201); the rotating cam (201) has two first outer contours and two second outer contours, and the first outer contours and the second outer contours are alternately arranged; and / or, a cam follower (204) is provided at one end of the push rod (205) facing the rotating cam (201), and the push rod (205) abuts against the rotating cam (201) through the cam follower (204); and / or, the unlocking mechanism further includes a guide rail (210), the guide rail ( 210) is fixedly connected to the fixing member (208), the push rod (205) is slidably disposed on the guide slide rail (210), and the sliding direction of the push rod (205) is along the length direction of the push rod (205); and / or, the unlocking mechanism further includes a return spring (212), the push rod (205) includes an active section for abutting and cooperating with the outer contour of the rotary cam (201), and a driven section for abutting and cooperating with the second locking member (206), the return spring (212) is fixedly connected to the active section and the driven section, and the return spring (212) is used to make the push rod (205) always have a tendency to abut with the outer contour of the rotary cam (201).

6. The SMIF box linkage opening and closing device according to claim 2, characterized in that, The lid (101) includes a cover body and a flange extending outward from the cover body, and the second lock (206) includes a latch; in the follow-up position of the second lock (206), the latch extends above the flange.

7. The SMIF box linkage opening and closing device according to claim 6, characterized in that, The second locking element (206) includes a plurality of synchronously moving locking tongues, which are arranged at intervals along the edge of the cover.

8. The SMIF box linkage opening and closing device according to claim 2, characterized in that, The rotating cam (201) is fixedly provided with an opening pin (202), which is used to cooperate with the first locking member to switch the first locking member between the locked position and the unlocked position; the rotating cam (201) is located below the fixing member (208), which has an arc-shaped guide groove (203), and the opening pin (202) passes through the arc-shaped guide groove (203) to cooperate with the first locking member.

9. The SMIF box linkage opening and closing device according to claim 1, characterized in that, The SMIF box linkage opening and closing device further includes a position sensor (207), which is installed on the movable part (209) and is used to detect the position of the second locking member (206); and / or, the movable part (209) has a central opening, and the movable part (209) is arranged around the fixed member (208) through the central opening; the movable part (209) is used to connect with the lifting drive device; and / or, the SMIF box further includes a wafer basket (102), which is disposed on the substrate (103) and is used to carry the wafer (104).

10. An SMIF box loading device, characterized in that, The device includes a support frame (301), a lifting drive device, and an SMIF box linkage opening and closing device as described in any one of claims 1-9, wherein the lifting drive device is installed on the support frame (301) and is drivenly connected to the movable part (209); the fixed part (208) is fixedly connected to the support frame (301).

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