Copper foil silanization treatment device and treatment method

Abstract

The invention relates to the technical field of copper foil surface treatment, and provides a copper foil silanization treatment device and method.The copper foil silanization treatment device comprises soaking equipment and roller positioning equipment, a treatment tank is arranged in the soaking equipment and communicated with a liquid injection cavity, the liquid injection cavity is communicated with a liquid injection pipe, and the liquid injection cavity is communicated with a first sampling pipe; the first sampling pipe is communicated with a first overflow pipe and a first detection cavity, a first X-ray fluorescence analyzer is arranged in the first detection cavity, the treatment tank is communicated with a liquid discharge cavity, the liquid discharge cavity is communicated with a liquid discharge pipe, a first liquid supplementing tank is formed in the treatment tank, the first liquid supplementing tank is communicated with a first liquid supplementing pipe, and the first liquid supplementing tank is communicated with a second sampling pipe; the second sampling pipe is communicated with a second overflow pipe and a second detection cavity, and a second X-ray fluorescence analyzer is arranged in the second detection cavity. By adopting the structure, the silanization treatment quality of the copper foil is improved, and the anti-stripping performance of the copper foil is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of copper foil surface treatment, in particular to a copper foil silanization treatment device and method. BACKGROUND

[0002] Copper foils are widely used in various electronic devices and components. As the types of electronic devices gradually increase and their functions gradually improve, the performance requirements for copper foils also become increasingly high.

[0003] The surface treatment of copper foils is a very important link in determining the performance of finished copper foils. Depending on the types of copper foils and different use requirements for copper foils, the surface treatment processes are also different. To improve the peel resistance of copper foils, silane coupling agents are used in the prior art to treat the surface of copper foils. When a silane solution is applied to the rough surface of a copper foil, a silicon-containing covering layer can be formed, effectively improving the peel strength of the copper foil. The uniformity of silane coating, the concentration of silane solution, and the treatment time of silane solution all affect the peel strength of the copper foil. The application method is usually divided into spraying or soaking. The advantage of soaking the copper foil in the silane solution is that it is beneficial to make the surface treatment of the copper foil more uniform and stable.

[0004] However, during the silanization treatment of the copper foil, the silane in the treatment tank for soaking the copper foil is consumed, and the concentration of silane in the treatment tank will fluctuate. In the prior art, the control of the concentration of silane is limited to controlling the silane solution added to the treatment tank, i.e., only the concentration of the silane storage and addition system is regulated, and the concentration fluctuation generated when the silane solution in the treatment tank reacts with the surface of the copper foil is not monitored and controlled. The uneven concentration of silane in the treatment tank can easily lead to the formation of an uneven covering layer on the surface of the copper foil, resulting in different peel strengths in different areas of the copper foil surface, and thus poor peel resistance of the copper foil. SUMMARY

[0005] To overcome the shortcomings of the prior art, the present application provides a copper foil silanization treatment device and method. The present application takes samples of silane solution at different positions in the treatment tank through a first sampling pipe and a second sampling pipe, and measures the silicon concentration in the silane solution in real time by combining an X-ray fluorescence analyzer to monitor and regulate the concentration of silane in the treatment tank. The present application aims to solve the technical problem of lacking monitoring of the fluctuation of silane concentration in the treatment tank for soaking the copper foil in the prior art.

[0006] To achieve the above-mentioned purpose, the present application is realized by the following technical solutions: The application discloses a copper foil silanization treatment device, which comprises a soaking device and a roller positioning device, a treatment tank is arranged in the shell of the soaking device, the roller positioning device is connected with a plurality of rollers and enables the rollers to be located in the treatment tank, one end of the treatment tank is communicated with a liquid injection cavity, the liquid injection cavity is communicated with a liquid injection pipe, a silane solution is injected into the liquid injection cavity through the liquid injection pipe, the top end of the liquid injection cavity is communicated with a first sampling pipe, a first sampling valve is arranged on the first sampling pipe, the side wall of the first sampling pipe is communicated with a first overflow pipe, the end of the first sampling pipe, which is away from the liquid injection cavity, is communicated with a first detection cavity, a first X-ray fluorescence analyzer is arranged in the first detection cavity, the end of the treatment tank, which is away from the liquid injection cavity, is communicated with a liquid discharge cavity, the bottom of the liquid discharge cavity is consistent with the bottom of the treatment tank, the liquid discharge cavity is communicated with a liquid discharge pipe, a first liquid supplementing groove is formed in the side wall of the treatment tank, the first liquid supplementing groove is communicated with a first liquid supplementing pipe, the top end of the first liquid supplementing groove is communicated with a second sampling pipe, a second sampling valve is arranged on the second sampling pipe, the side wall of the second sampling pipe is communicated with a second overflow pipe, the end of the second sampling pipe, which is away from the first liquid supplementing groove, is communicated with a second detection cavity, and a second X-ray fluorescence analyzer is arranged in the second detection cavity.

[0007] Compared with the prior art, the application has the beneficial effects that: by arranging the first sampling pipe communicated with the liquid injection cavity, when the first sampling valve on the first sampling pipe is opened, the concentration of the silane solution in the first sampling pipe is consistent with that of the silane solution in the liquid injection cavity and the vicinity of the liquid injection cavity according to the principle of communicating vessels, and the concentration of the silane in the first sampling pipe is monitored in real time by the first X-ray fluorescence analyzer, so that the real-time monitoring of the silane concentration is realized, the silane concentration of the end of the treatment tank, which is continuously injected with the silane solution, is the highest, and the reaction with the surface of the copper foil is the most violent, and the concentration monitoring of the end close to the liquid injection cavity is beneficial to controlling the overall silane concentration in the treatment tank, and the accurate silane concentration is beneficial to improving the treatment quality of the surface of the copper foil; by arranging the second sampling pipe communicated with the first liquid supplementing groove and combining the second X-ray fluorescence analyzer, the silane concentration in and near the first liquid supplementing groove is monitored, which is beneficial to supplementing the liquid according to the silane concentration in the first liquid supplementing groove, and the liquid supplemented into the first liquid supplementing groove can still be sampled by the second sampling pipe after being mixed with the silane solution already existing in the first liquid supplementing groove, the concentration after the supplementing is continuously monitored, which is beneficial to controlling the accuracy of the supplementing and improving the uniformity of the silane concentration in the treatment tank, thereby improving the silanization treatment quality of the copper foil and the anti-peeling performance of the copper foil.

[0008] Further, the first liquid supplement pipe is provided with a first liquid supplement valve and a third flow meter, a second liquid supplement tank is formed in the sidewall of the treatment tank, the second liquid supplement tank is communicated with a second liquid supplement pipe, the top end of the second liquid supplement tank is communicated with a third sampling pipe, the third sampling pipe is provided with a third sampling valve, the sidewall of the third sampling pipe is communicated with a third overflow pipe, the end of the third sampling pipe away from the second liquid supplement tank is communicated with a third detection cavity, the third detection cavity is provided with a third X-ray fluorescence analyzer, and the second liquid supplement pipe is provided with a second liquid supplement valve and a fourth flow meter.

[0009] Further, the first overflow pipe, the second overflow pipe and the third overflow pipe are arranged at the same height.

[0010] Further, the liquid injection pipe is provided with a first flow meter and a liquid injection valve, and the liquid discharge pipe is provided with a second flow meter and a liquid discharge valve.

[0011] Further, the collimator in the first X-ray fluorescence analyzer corresponds to the position of the first sampling pipe.

[0012] Further, the first liquid supplement tank and the second liquid supplement tank are provided with vibration plates near the end close to the treatment tank.

[0013] Further, the treatment tank is provided with a slope at the bottom, the end of the slope close to the liquid injection cavity is higher than the end of the slope close to the liquid discharge cavity, the top surface of the slope is provided with a plurality of heating plates, and the sidewall of the treatment tank is provided with a temperature sensor and a liquid level meter.

[0014] Further, the roller positioning device comprises a portal frame, a first sliding rail, a second sliding rail, a first connecting mechanism and a second connecting mechanism, the portal frame is connected with the first sliding rail and the second sliding rail, the first sliding rail and the second sliding rail are arranged opposite to each other, one end of the first connecting mechanism is slidingly connected with the first sliding rail, the end of the first connecting mechanism away from the first sliding rail is rotationally connected with one end of the roller, the end of the roller away from the first connecting mechanism is rotationally connected with one end of the second connecting mechanism, and the end of the second connecting mechanism away from the roller is slidingly connected with the second sliding rail.

[0015] Further, the first connecting mechanism comprises a connecting rod, the connecting rod is provided with a stabilizing seat, a first pulley is rotationally connected to the connecting rod, the first pulley is slidingly connected to the top end of the first sliding rail, a plurality of second pulleys are rotationally connected to the stabilizing seat, the second pulleys are slidingly connected to the bottom end of the first sliding rail, a scale is arranged on the sidewall of the first sliding rail, an observation groove is formed in the connecting rod, and the observation groove corresponds to the position of the scale.

[0016] A copper foil silanization treatment method applied to the copper foil silanization treatment device in the technical solution above, comprising the following steps: A plurality of roller bodies are placed in a treatment tank of the soaking equipment through a roller body positioning device, the treatment tank is connected to a liquid injection cavity, a liquid discharge cavity and a first liquid supplement tank, the liquid injection cavity is connected to a liquid injection pipe, the liquid discharge cavity is connected to a liquid discharge pipe, and the first liquid supplement tank is connected to a first liquid supplement pipe; The silane solution is injected into the liquid injection cavity through the liquid injection pipe, and the silane solution enters the treatment tank from the liquid injection cavity; The first sampling valve is opened, and the silane solution enters the first sampling pipe connected to the liquid injection cavity, the side wall of the first sampling pipe is connected to the first overflow pipe, and the end of the first sampling pipe away from the liquid injection cavity is connected to the first detection cavity, and the first X-ray fluorescence analyzer is arranged in the first detection cavity; The second sampling valve is opened, and the silane solution enters the second sampling pipe connected to the first liquid supplement tank, the side wall of the second sampling pipe is connected to the second overflow pipe, and the end of the second sampling pipe away from the first liquid supplement tank is connected to the second detection cavity, and the second X-ray fluorescence analyzer is arranged in the second detection cavity; The liquid discharge pipe is opened, and part of the silane solution in the treatment tank flows out through the liquid discharge cavity and the liquid discharge pipe to adjust the liquid level in the treatment tank; The first X-ray fluorescence analyzer is opened to detect the silane concentration in the first sampling pipe, when the silane concentration is equal to the preset concentration, the copper foil is transported into the treatment tank through a plurality of roller bodies to soak the copper foil in the silane solution; The second X-ray fluorescence analyzer is opened to detect the silane concentration in the second sampling pipe, when the silane concentration is less than the preset concentration, the silane stock solution is supplemented into the first liquid supplement tank through the first liquid supplement pipe. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the copper foil silanization treatment device in the first embodiment of the present application; Figure 2 It is a top view structural schematic diagram of the soaking equipment in the copper foil silanization treatment device in the first embodiment of the present application; Figure 3 It is a partial structural schematic diagram of the soaking equipment in the copper foil silanization treatment device in the first embodiment of the present application; Figure 4 It is a partial structural schematic diagram of the copper foil silanization treatment device in the first embodiment of the present application; Figure 5 It is a structural schematic diagram of the roller body positioning device in the copper foil silanization treatment device in the first embodiment of the present application; Figure 6 SEM picture of the copper foil prepared by the silanization treatment method of the copper foil in the second embodiment of the present application; Main component symbol explanation: 100, treatment tank; 101, shell; 110, slope part; 111, heating plate; 120, temperature sensor; 130, liquid level gauge; 200, liquid injection cavity; 201, first inspection window; 210, liquid injection pipe; 211, liquid injection valve; 212, first flow meter; 220, first sampling pipe; 221, first overflow pipe; 222, first sampling valve; 230, first detection cavity; 300, liquid discharge cavity; 310, liquid discharge pipe; 311, liquid discharge valve; 312, second flow meter; 400, first liquid supplement tank; 401, second inspection window; 410, first liquid supplement pipe; 411, first liquid supplement valve; 412, third flow meter; 420, second sampling pipe; 421, second overflow pipe; 422, second sampling valve; 430, second detection cavity; 500, second liquid supplement tank; 510, second liquid supplement pipe; 511, second liquid supplement valve; 512, fourth flow meter; 600, first X-ray fluorescence analyzer; 601, second X-ray fluorescence analyzer; 610, X-ray tube; 620, collimator; 630, lens; 700, vibration plate; 800, roller body; 810, copper foil; 820, silane solution; 900, roller body positioning device; 910, connecting rod; 911, observation tank; 920, first pulley; 921, first sliding rail; 922, scale; 930, stabilizing seat; 931, second pulley; 940, gantry.

[0018] The following detailed description will further describe the present application with reference to the above-mentioned drawings. DETAILED DESCRIPTION

[0019] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The present application is shown in several embodiments in the drawings. However, the present application can be realized in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the present application is more thorough and complete.

[0020] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intervening element. The terms "vertical", "horizontal", "left", "right", and similar expressions used herein are for illustrative purposes only.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0022] Referring to Figures 1 to 5 The copper foil silanization treatment device in the first embodiment of the application comprises a soaking device and a roller positioning device 900. A treatment tank 100 is arranged in the casing 101 of the soaking device. The roller positioning device 900 connects a plurality of rollers 800 and positions the rollers 800 in the treatment tank 100. One end of the treatment tank 100 is connected to a liquid injection cavity 200. The liquid injection cavity 200 is connected to a liquid injection pipe 210. The silane solution 820 is injected into the liquid injection cavity 200 through the liquid injection pipe 210. A liquid injection valve 211 and a first flow meter 212 are arranged on the liquid injection pipe 210. The top end of the liquid injection cavity 200 is connected to a first sampling pipe 220. The side wall of the first sampling pipe 220 is connected to a first overflow pipe 221. A first sampling valve 222 is arranged on the first sampling pipe 220. The end of the first sampling pipe 220 away from the liquid injection cavity 200 is connected to a first detection cavity 230. A first X-ray fluorescence analyzer 600 is arranged in the first detection cavity 230. The end of the treatment tank 100 away from the liquid injection cavity 200 is connected to a liquid discharge cavity 300. The bottom of the liquid discharge cavity 300 is flush with the bottom of the treatment tank 100. The liquid discharge cavity 300 is connected to a liquid discharge pipe 310. A liquid discharge valve 311 and a second flow meter 312 are arranged on the liquid discharge pipe 310. A slope portion 110 is arranged at the bottom of the treatment tank 100. The end of the slope portion 110 close to the liquid injection cavity 200 is higher than the end of the slope portion 110 close to the liquid discharge cavity 300. A plurality of heating plates 111 are arranged on the top surface of the slope portion 110.

[0023] Preferably, the roller body positioning device 900 is arranged on the ground, suspending two roller bodies 800 in the treatment tank 100, the liquid level of the silane solution 820 in the treatment tank 100 is flush with the axial height of the two roller bodies 800, by regulating the liquid injection valve 211, the first flow meter 212, the liquid discharge valve 311 and the second flow meter 312, the liquid flow in the treatment tank 100 is stable, and the liquid level is maintained unchanged, the direction of the roller body 800 running the copper foil 810 is from one end of the treatment tank 100 close to the liquid injection cavity 200 to one end close to the liquid discharge cavity 300, by controlling the speed of the roller body 800 running the copper foil 810, combined with the distance between the two roller bodies 800 and the diameter of the roller body 800, the length of time that the copper foil 810 is soaked in the silane solution 820 can be accurately controlled, the consistency of the soaking process of the copper foil 810 is improved, the slope part 110 is used to guide the silane solution 820, when it is necessary to empty the treatment tank 100, the slope part 110 helps the liquid to be discharged to the liquid discharge cavity 300 by gravity, the setting height of the first overflow pipe 221 is consistent with the highest liquid level allowed in the treatment tank 100, the first overflow pipe 221 can make the liquid level in the first sampling pipe 220 not exceed the height of the first overflow pipe 221, so that the excess liquid is discharged in time to prevent the silane solution 820 from entering the first detection cavity 230, when the first sampling valve 222 is opened, according to the principle of communicating vessels, the silane solution 820 enters the first sampling pipe 220 from the liquid injection cavity 200, and the liquid level is always consistent with the liquid level in the treatment tank 100, the first X-ray fluorescence analyzer 600 can detect the content of silicon element in the silane solution 820, so as to obtain the concentration of silane, if the liquid flow rate in the liquid injection cavity 200 and the treatment tank 100 is fast, the first sampling valve 222 can be closed when detecting the concentration of silicon element, so that the sample environment in the first sampling pipe 220 is stable, and the detection result is more accurate. Understandably, by real-time monitoring of the concentration of silicon element in the first sampling pipe 220 through the first X-ray fluorescence analyzer 600, real-time monitoring of the concentration of silane can be realized, in the treatment tank 100, the concentration of silane is the highest near the liquid injection cavity 200, and the reaction with the surface of the copper foil 810 is the most violent, monitoring the concentration near the liquid injection cavity 200 is beneficial to controlling the overall concentration of silane in the treatment tank 100, and accurate concentration of silane is beneficial to improving the processing quality of the surface of the copper foil and improving the peel resistance of the copper foil 810.

[0024] The first liquid supplement tank 400 and the second liquid supplement tank 500 are arranged on the side wall of the treatment tank 100, the first liquid supplement tank 400 is communicated with the first liquid supplement pipe 410, the first liquid supplement valve 411 and the third flow meter 412 are arranged on the first liquid supplement pipe 410, the top end of the first liquid supplement tank 400 is communicated with the second sampling pipe 420, the side wall of the second sampling pipe 420 is communicated with the second overflow pipe 421, the second sampling valve 422 is arranged on the second sampling pipe 420, one end of the second sampling pipe 420 away from the first liquid supplement tank 400 is communicated with the second detection cavity 430, the second X-ray fluorescence analyzer 601 is arranged in the second detection cavity 430, the second liquid supplement tank 500 is communicated with the second liquid supplement pipe 510, the top end of the second liquid supplement tank 500 is communicated with the third sampling pipe, the third sampling valve is arranged on the third sampling pipe, the side wall of the third sampling pipe is communicated with the third overflow pipe, one end of the third sampling pipe away from the second liquid supplement tank 500 is communicated with the third detection cavity, the third X-ray fluorescence analyzer is arranged in the third detection cavity, the second liquid supplement valve 511 and the fourth flow meter 512 are arranged on the second liquid supplement pipe 510, the first liquid supplement tank 400 and the second liquid supplement tank 500 close to the treatment tank 100 are both provided with the vibration plate 700.

[0025] Preferably, the first replenishing tank 400 and the second replenishing tank 500 are respectively located on the opposite two side walls of the processing tank 100, and the second X-ray fluorescence analyzer 601 can analyze the silane concentration in the second sampling tube 420, i.e. the silane concentration in the first replenishing tank 400, and the third X-ray fluorescence analyzer can analyze the silane concentration in the third sampling tube, i.e. the silane concentration in the second replenishing tank 500, the first replenishing pipe 410 and the second replenishing pipe 510 are connected to the external silane stock solution storage device, and the silane stock solution introduced through the first replenishing pipe 410 and the second replenishing pipe 510 has a silane concentration greater than that of the silane solution 820, when the silane solution 820 with the specified concentration is replenished from the liquid injection cavity 200 to the processing tank 100, the silane solution 820 reacts with the copper foil 810 transported to the processing tank 100, silane is consumed, thereby reducing the concentration of the silane solution 820, and the flow direction of the silane solution 820 is from the liquid injection cavity 200 to the liquid discharge cavity 300, the end of the processing tank 100 close to the liquid injection cavity 200 is the liquid inlet end, and it can be understood that the silane solution concentration in the middle section of the processing tank 100 is less than that at the liquid inlet end of the processing tank 100, therefore, the silane solution concentration in the middle section of the processing tank 100 is increased by replenishing the silane stock solution, when the silane stock solution enters the first replenishing tank 400, it mixes with the silane solution 820 in the first replenishing tank 400, and the mixed solution can also enter the second sampling tube 420, which is beneficial to monitor the concentration of the mixed solution, thereby adjusting the third flow meter 412 in time to control the replenishment amount and speed of the silane stock solution, so that the concentration of the mixed solution meets the required specified concentration, which is beneficial to improve the uniformity of the silane concentration in the processing tank 100, and the second replenishing tank 500 is the same, the first replenishing tank 400 and the second replenishing tank 500 are helpful to improve the quality of silanization treatment of the copper foil, and further improve the anti-peeling performance of the copper foil.

[0026] The collimator 620 in the first X-ray fluorescence analyzer 600 corresponds to the first sampling tube 220, the first overflow tube 221, the second overflow tube 421 and the third overflow tube are arranged at the same height, and the temperature sensor 120 and the liquid level meter 130 are arranged on the sidewall of the treatment tank 100. Preferably, the first X-ray fluorescence analyzer 600, the second X-ray fluorescence analyzer 601 and the third X-ray fluorescence analyzer are consistent in structure and each include an X-ray tube 610, the collimator 620, a lens 630 and a detector. The X-ray tube 610 is connected with a high-voltage generator. Due to the high voltage, X-rays of a certain intensity are generated to irradiate the sample. Different elements in the sample generate X-fluorescence of different intensities under the irradiation of X-rays. The content of the element exciting the fluorescence can be calculated according to the intensity of the X-fluorescence. The temperature sensor 120 cooperates with the heating plate 111 to control the temperature of the silane solution 820, so that the surface treatment quality of the copper foil is higher. The liquid level meter 130 is used to monitor the liquid level of the silane solution 820 in the treatment tank 100. Further, the top of the first detection cavity 230, the second detection cavity 430 and the third detection cavity are communicated with the outside of the shell 101, and a maintenance window is arranged in each detection cavity. The first maintenance window 201 of the first detection cavity 230 corresponds to the first X-ray fluorescence analyzer 600, and the second maintenance window 401 of the second detection cavity 430 corresponds to the second X-ray fluorescence analyzer 601.

[0027] The roller body positioning device 900 comprises a portal frame 940, a first sliding rail 921, a second sliding rail, a first connecting mechanism and a second connecting mechanism, the portal frame 940 is connected with the first sliding rail 921 and the second sliding rail, the first sliding rail 921 and the second sliding rail are oppositely arranged, one end of the first connecting mechanism is slidingly connected with the first sliding rail 921, the other end of the first connecting mechanism away from the first sliding rail 921 is rotationally connected with one end of the roller body 800, the other end of the roller body 800 away from the first connecting mechanism is rotationally connected with one end of the second connecting mechanism, the other end of the second connecting mechanism away from the roller body 800 is slidingly connected with the second sliding rail, the first connecting mechanism comprises a connecting rod 910, a stabilizing seat 930 is arranged on the connecting rod 910, a first pulley 920 is rotationally connected on the connecting rod 910, the first pulley 920 is slidingly connected with the top end of the first sliding rail 921, a plurality of second pulleys 931 are rotationally connected on the stabilizing seat 930, the second pulleys 931 are slidingly connected with the bottom end of the first sliding rail 921, a scale 922 is arranged on the side wall of the first sliding rail 921, an observation groove 911 is formed on the connecting rod 910, and the observation groove 911 corresponds to the scale 922 in position. Preferably, the distance between the two roller bodies 800 can be accurately controlled through the observation groove 911 and the scale 922, the portal frame 940 is arranged on the ground, and the plurality of second pulleys 931 are beneficial to improve the connection stability of the first connecting mechanism and the first sliding rail 921.

[0028] The second embodiment of the present application provides a copper foil silanization treatment method, which is applied to the copper foil silanization treatment device in the first embodiment and comprises the following steps: A plurality of roller bodies are arranged in a treatment tank of the soaking device through a roller body positioning device, the treatment tank is connected with a liquid injection cavity, a liquid discharge cavity and a first liquid supplement tank, the liquid injection cavity is connected with a liquid injection pipe, the liquid discharge cavity is connected with a liquid discharge pipe, and the first liquid supplement tank is connected with a first liquid supplement pipe; The silane solution is injected into the liquid injection cavity through the liquid injection pipe, and the silane solution enters the treatment tank from the liquid injection cavity; The first sampling valve is opened, so that the silane solution enters a first sampling pipe connected with the liquid injection cavity, the side wall of the first sampling pipe is connected with a first overflow pipe, one end of the first sampling pipe away from the liquid injection cavity is connected with a first detection cavity, and a first X-ray fluorescence analyzer is arranged in the first detection cavity; The second sampling valve is opened, so that the silane solution enters a second sampling pipe connected with the first liquid supplement tank, the side wall of the second sampling pipe is connected with a second overflow pipe, one end of the second sampling pipe away from the first liquid supplement tank is connected with a second detection cavity, and a second X-ray fluorescence analyzer is arranged in the second detection cavity; opening the drain pipe to make part of the silane solution in the treatment tank flow out through the drain cavity and the drain pipe to adjust the liquid level in the treatment tank; opening the first X-ray fluorescence analyzer to detect the silane concentration in the first sampling pipe, and when the silane concentration is equal to the preset concentration, transporting the copper foil through the plurality of roller bodies into the treatment tank to immerse the copper foil in the silane solution. opening the second X-ray fluorescence analyzer to detect the silane concentration in the second sampling pipe, and when the silane concentration is less than the preset concentration, supplementing the silane stock solution into the first liquid supplement tank through the first liquid supplement pipe.

[0029] Preferably, the liquid level in the treatment tank 100 is maintained through the liquid injection pipe 210 and the drain pipe 310, and the flow rate of the silane solution 820 is also kept stable, specifically, the flow rate of the silane solution 820 in the liquid injection pipe 210 is 5 m³ / h~7 m³ / h, and the preset concentration is the silane concentration required for the copper foil silanization treatment, specifically, the preset concentration is 1.5 g / L, and the copper foil with anti-peeling performance is prepared by the copper foil silanization treatment method in the second embodiment of the present application, and the SEM electron microscope picture of the copper foil is obtained, please refer to Figure 6 The copper peak of the copper foil surface wraps the spherical grains, and the distribution of the spherical grains extends to the bottom of the copper peak, the surface uniformity is good, the anti-peeling performance is strong, the nodule on the top of the copper peak is shaped, the particle is large, and the anti-peeling strength is large.

[0030] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0031] The above-described embodiments only express several implementation manners of the present application, the description is more specific and detailed, but it cannot be understood as the limitation of the patent scope of the present application. It should be noted that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A copper foil silanization treatment apparatus characterized by comprising: The soaking device and the roller positioning device are provided, the treatment tank is arranged in the shell of the soaking device, the roller positioning device is connected with a plurality of rollers and enables the rollers to be located in the treatment tank, one end of the treatment tank is communicated with a liquid injection cavity, the liquid injection cavity is communicated with a liquid injection pipe, a silane solution is injected into the liquid injection cavity through the liquid injection pipe, the top end of the liquid injection cavity is communicated with a first sampling pipe, the first sampling pipe is provided with a first sampling valve, the side wall of the first sampling pipe is communicated with a first overflow pipe, the end of the first sampling pipe away from the liquid injection cavity is communicated with a first detection cavity, the first detection cavity is provided with a first X-ray fluorescence analyzer, the end of the treatment tank away from the liquid injection cavity is communicated with a liquid discharge cavity, the bottom of the liquid discharge cavity is consistent with the bottom of the treatment tank in height, the liquid discharge cavity is communicated with a liquid discharge pipe, the side wall of the treatment tank is provided with a first liquid supplementing groove, the first liquid supplementing groove is communicated with a first liquid supplementing pipe, the top end of the first liquid supplementing groove is communicated with a second sampling pipe, the second sampling pipe is provided with a second sampling valve, the side wall of the second sampling pipe is communicated with a second overflow pipe, the end of the second sampling pipe away from the first liquid supplementing groove is communicated with a second detection cavity, and the second detection cavity is provided with a second X-ray fluorescence analyzer.

2. The copper foil silanization treatment apparatus according to claim 1, characterized by The first liquid supplementing pipe is provided with a first liquid supplementing valve and a third flowmeter, the side wall of the treatment tank is further provided with a second liquid supplementing groove, the second liquid supplementing groove is communicated with a second liquid supplementing pipe, the top end of the second liquid supplementing groove is communicated with a third sampling pipe, the third sampling pipe is provided with a third sampling valve, the side wall of the third sampling pipe is communicated with a third overflow pipe, the end of the third sampling pipe away from the second liquid supplementing groove is communicated with a third detection cavity, the third detection cavity is provided with a third X-ray fluorescence analyzer, and the second liquid supplementing pipe is provided with a second liquid supplementing valve and a fourth flowmeter.

3. The copper foil silanization treatment apparatus according to claim 2, characterized by The first overflow pipe, the second overflow pipe and the third overflow pipe are arranged at equal heights.

4. The copper foil silanization treatment apparatus according to claim 1, characterized by The liquid injection pipe is provided with a first flowmeter and a liquid injection valve, and the liquid discharge pipe is provided with a second flowmeter and a liquid discharge valve.

5. The copper foil silanization treatment apparatus according to claim 1, characterized by The collimator in the first X-ray fluorescence analyzer corresponds to the position of the first sampling pipe.

6. The copper foil silanization treatment apparatus according to claim 2, characterized by The end of the first liquid supplementing groove close to the treatment tank and the end of the second liquid supplementing groove close to the treatment tank are both provided with vibration plates.

7. The copper foil silanization treatment apparatus according to claim 1, characterized by The bottom of the treatment tank is provided with a slope part, the end of the slope part close to the liquid injection cavity is higher than the end of the slope part close to the liquid discharge cavity, the top surface of the slope part is provided with a plurality of heating plates, and the side wall of the treatment tank is provided with a temperature sensor and a liquid level meter.

8. The copper foil silanization treatment apparatus according to claim 1, characterized by The roller positioning device comprises a portal frame, a first sliding rail, a second sliding rail, a first connecting mechanism and a second connecting mechanism, the portal frame is connected with the first sliding rail and the second sliding rail, the first sliding rail and the second sliding rail are oppositely arranged, one end of the first connecting mechanism is slidingly connected with the first sliding rail, the end of the first connecting mechanism away from the first sliding rail is rotationally connected with one end of the roller, the end of the roller away from the first connecting mechanism is rotationally connected with one end of the second connecting mechanism, and the end of the second connecting mechanism away from the roller is slidingly connected with the second sliding rail.

9. The copper foil silanization treatment apparatus according to claim 1, characterized by The first connecting mechanism comprises a connecting rod, a stabilizing seat arranged on the connecting rod, a first pulley rotatably connected to the connecting rod, the first pulley being slidingly connected to the top end of the first slide rail, a plurality of second pulleys rotatably connected to the stabilizing seat, the second pulleys being slidingly connected to the bottom end of the first slide rail, a scale arranged on the sidewall of the first slide rail, and an observation slot formed in the connecting rod and corresponding to the scale.

10. A copper foil silanization treatment method applied to the copper foil silanization treatment apparatus as claimed in any one of claims 1 to 9, characterized by, The method comprises the following steps: a plurality of roller bodies are placed in a treatment tank of a soaking device by a roller body positioning device, the treatment tank being connected to a liquid injection cavity, a liquid discharge cavity and a first liquid supplement tank, the liquid injection cavity being connected to a liquid injection pipe, the liquid discharge cavity being connected to a liquid discharge pipe, and the first liquid supplement tank being connected to a first liquid supplement pipe; a silane solution is injected into the liquid injection cavity through the liquid injection pipe, and the silane solution enters the treatment tank from the liquid injection cavity; a first sampling valve is opened, and the silane solution enters a first sampling pipe connected to the liquid injection cavity, a sidewall of the first sampling pipe being connected to a first overflow pipe, and an end of the first sampling pipe away from the liquid injection cavity being connected to a first detection cavity in which a first X-ray fluorescence analyzer is arranged; a second sampling valve is opened, and the silane solution enters a second sampling pipe connected to the first liquid supplement tank, a sidewall of the second sampling pipe being connected to a second overflow pipe, and an end of the second sampling pipe away from the first liquid supplement tank being connected to a second detection cavity in which a second X-ray fluorescence analyzer is arranged; the liquid discharge pipe is opened, and part of the silane solution in the treatment tank flows out through the liquid discharge cavity and the liquid discharge pipe to adjust the liquid level in the treatment tank; the first X-ray fluorescence analyzer is opened to detect the silane concentration in the first sampling pipe, and when the silane concentration is equal to a preset concentration, a copper foil is transported into the treatment tank through the plurality of roller bodies to soak the copper foil in the silane solution; the second X-ray fluorescence analyzer is opened to detect the silane concentration in the second sampling pipe, and when the silane concentration is less than the preset concentration, silane stock solution is supplemented into the first liquid supplement tank through the first liquid supplement pipe.

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