Silk screen transfer device and control method

Abstract

The invention relates to the technical field of semiconductor equipment, and discloses a silk screen transfer device and a control method.The silk screen transfer device comprises a mounting disc, a sensing element, a grabbing structure and a controller; the sensing element is arranged on the mounting disc and used for detecting the first position parameter of the silk screen and / or the second position parameter of the ceramic layer, so that the silk screen and the ceramic layer can be accurately positioned, the grabbing structures are arranged on the mounting disc in a matched mode, and the grabbing structures are provided with the movable clamping jaws capable of relatively rotating, so that the silk screen is grabbed and released. The controller controls the opening and closing states of the movable clamping jaws according to the position information collected by the sensing element, so that reliable clamping can be achieved with proper clamping force in the transferring process, and deformation or damage of the silk screen caused by too large or too small clamping force is avoided; therefore, the stability and the service life of the product in the subsequent electric heating or electrostatic adsorption function are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a screen transfer device and a control method. BACKGROUND

[0002] In the chip manufacturing process, the wafer foundry needs to perform photolithography, etching, thin film deposition, ion implantation, cleaning and other process operations on a blank wafer. The temperature field distribution of the wafer has a great influence on the smooth performance of the above processes, and further affects the yield of the wafer. The wafer processing first heats the wafer with a ceramic heater or an electrostatic chuck to form a stable temperature distribution. At the same time, the ceramic heater or the electrostatic chuck should have a certain adsorption force to adsorb the wafer on the ceramic heater or the electrostatic chuck, so as to facilitate the smooth performance of each process.

[0003] In the manufacturing process of the ceramic heater or the electrostatic chuck, metal heating coil for heating ceramic and metal adsorption mesh coil for adsorbing wafer are placed in different ceramic layers. The metal heating coil for heating generates heat after being powered on, heats the ceramic layer, and then the heater or the electrostatic chuck forms a stable temperature field, and then heats the wafer to make the wafer form a balanced temperature distribution. The metal adsorption mesh coil for adsorbing forms a stable electrostatic field after being powered on, and adsorbs the wafer on the heater or the electrostatic chuck.

[0004] The circuit structure of the ceramic heater or the electrostatic chuck is complex: in order to ensure the uniform distribution of the temperature of the disc surface of the heater or the electrostatic chuck, multiple heating coils need to be set to form different heating zones; in order to ensure the uniform distribution of the adsorption force and the rapid detachment, multiple adsorption coils need to be set, and currently double adsorption coils are the mainstream.

[0005] In the manufacturing process of the ceramic layer of the ceramic heater or the electrostatic chuck, the ceramic layer needs to be manufactured in a hot press furnace body. After the bottom ceramic is hot pressed, the heating coil is placed, and then the ceramic powder is placed, and the adsorption mesh coil is placed after hot pressing.

[0006] In the prior art, the metal heating coil and the metal adsorption mesh coil are placed manually. Since the metal heating coil and the metal adsorption mesh coil have a thin disc shape with a small diameter and low positioning accuracy, the metal heating coil and the metal adsorption mesh coil are prone to deformation or damage during transportation, which may cause a melting phenomenon during long-time power-on, affecting the stability and service life of the power-on heating or electrostatic adsorption function in the later period. SUMMARY

[0007] Therefore, the present application provides a silk screen transfer device and a control method to solve the problem that the positioning accuracy is low when the heating wire coil and the metal adsorption screen coil are manually transported and placed, which leads to deformation and damage, and further leads to poor stability and short service life of the product in the subsequent power heating or electrostatic adsorption function.

[0008] To solve the above technical problems, the technical solutions of the present application are as follows:

[0009] In a first aspect, the present application provides a silk screen transfer device, comprising: a mounting disc, an inductive element, a grabbing structure, and a controller; the inductive element is arranged on the mounting disc, and is adapted to detect a first position parameter of the silk screen and / or a second position parameter of the ceramic layer; the grabbing structure is provided with a plurality of grabbing structures, and the grabbing structure is arranged on the mounting disc and provided with a movable claw; and the controller is adapted to receive the first position parameter and / or the second position parameter to control the movable claw to rotate relatively, so that the grabbing structure is in a clamping state or a release state.

[0010] The present application has the following advantages:

[0011] The silk screen transfer device provided by the present application detects the first position parameter of the silk screen and / or the second position parameter of the ceramic layer by arranging an inductive element on the mounting disc, so that the silk screen and the ceramic layer can be accurately positioned. The grabbing structure arranged on the mounting disc is provided with a movable claw that can rotate relatively, so as to realize the grabbing and releasing of the silk screen. The controller controls the opening and closing states of each movable claw according to the position information collected by the inductive element, so as to ensure that the silk screen can be reliably clamped with appropriate clamping force during the transfer process, and avoid deformation or damage of the silk screen caused by excessive or insufficient clamping force. The silk screen transfer device provided by the present application can effectively improve the positioning accuracy and stability of the silk screen during the transportation and installation process, reduce the manual operation error, reduce the risk of deformation and damage, and thus improve the stability and service life of the product in the subsequent power heating or electrostatic adsorption function, which has good practical value and promotion prospect.

[0012] According to the first aspect of the present application, the mounting disc comprises a first disc surface and a second disc surface connected from top to bottom, the first disc surface and the second disc surface are arranged in a stepped manner, the first disc surface and the second disc surface are both disc structures, the diameter of the first disc surface is greater than the diameter of the second disc surface, and the grabbing structure is arranged on the second disc surface.

[0013] According to the first aspect of the present application, the sensing element comprises a first sensing element and a second sensing element, the first sensing element is arranged at the center of the first disc surface, and the second sensing element is arranged on the second disc surface, the second sensing element is arranged in multiple and uniformly spaced on the second disc surface in a circumferential direction.

[0014] According to the first aspect of the present application, the screen transfer device further comprises a plurality of electromagnetic elements in communication with the controller, the electromagnetic elements are arranged in a circular ring structure and uniformly spaced in a radial direction on the second disc surface, the controller controls the electromagnetic elements to be powered on to drive the gripping structure to be in the clamping state, and the controller controls the electromagnetic elements to be powered off to make the gripping structure to be in the releasing state.

[0015] According to the first aspect of the present application, the gripping structure is arranged in multiple and arrayed on the second disc surface.

[0016] According to the first aspect of the present application, the adjacent two gripping structures are oppositely arranged.

[0017] According to the first aspect of the present application, the gripping structure comprises a support frame and a connecting shaft, the support frame is fixedly arranged on the second disc surface, the connecting shaft is arranged in the support frame, and the movable claw is hinged to the connecting shaft, and the electromagnetic element can be attracted to drive the movable claw to rotate to clamp or release the screen.

[0018] According to the first aspect of the present application, the movable claw is perpendicular to the second disc surface to make the gripping structure have a releasing state, and the movable claw is parallel to the second disc surface or arranged at an angle between the extension line of the movable claw and the second disc surface to make the gripping structure have a clamping state.

[0019] According to the first aspect of the present application, the screen transfer device further comprises a mechanical arm, the mechanical arm is drivingly connected to the side of the mounting disc away from the gripping structure, the mechanical arm drives the mounting disc to move between the hot press furnace and the material disc to clamp the screen in the material disc and carry it to the ceramic layer of the hot press furnace.

[0020] Secondly, the present application provides a control method of the screen transfer device, comprising the following steps:

[0021] Assembling and testing the screen transfer device, after the screen transfer device is assembled and completed, the screen transfer condition is tested;

[0022] Establishing a database, a three-dimensional coordinate database of the hot press furnace cavity is established;

[0023] Collecting image data, placing a ceramic layer in a hot press furnace cavity, transferring a screen through the screen transfer device, setting an image collector at the top of the hot press furnace cavity to collect image data, and the sensing element of the screen transfer device obtaining a grid pattern of the hot press furnace cavity, the screen transfer device descending along the midpoint of the grid pattern, the image collector repeatedly collecting images of the screen transferred to the ceramic layer, and transmitting and storing to the database;

[0024] Training the collected images with a convolutional neural network, reading and preprocessing the data in the database, and fitting; selecting a training model, setting a feature value threshold, adjusting the feature value threshold according to the positional relationship of the screen transported to the ceramic layer, and then adjusting the motion parameters of the screen transfer device. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or prior art description will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0026] Figure 1 A shaft view of a screen transfer device provided in the first aspect of the present application;

[0027] Figure 2 A top view of a screen transfer device provided in the first aspect of the present application;

[0028] Figure 3 A shaft view of a screen transfer device provided in the first aspect of the present application;

[0029] Explanation of reference signs:

[0030] 1, mounting disc; 11, first disc surface; 12, second disc surface; 2, sensing element; 21, first sensing element; 22, second sensing element; 3, grabbing structure; 31, support frame; 32, connecting shaft; 33, movable clamping jaw; 4, electromagnetic element; 5, mechanical arm. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0032] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as there is no conflict.

[0035] Referring to Figure 1 and Figure 2 In the first aspect of the present application, the present application provides a screen transfer device, comprising: a mounting disc 1, a sensing element 2, a grabbing structure 3 and a controller; the sensing element 2 is arranged on the mounting disc 1 and is adapted to detect a first position parameter of the screen and / or a second position parameter of the ceramic layer; the grabbing structure 3 is provided with a plurality of grabbing structures 3, the grabbing structure 3 is arranged on the mounting disc 1, the grabbing structure 3 is provided with a movable jaw 33; the controller is adapted to receive the first position parameter and / or the second position parameter to control the movable jaw 33 to rotate relatively, so that the grabbing structure 3 is in a clamping state or a releasing state.

[0036] Specifically, the present application provides a silk screen transfer device, which is characterized by the following technical solutions. An inductive element 2 is arranged on a mounting disc 1 to detect the first position parameter of the silk screen and / or the second position parameter of the ceramic layer, so that the silk screen and the ceramic layer can be accurately positioned. A plurality of grabbing structures 3 are arranged on the mounting disc 1, and the grabbing structures 3 are provided with movable clamping jaws 33 that can rotate relative to each other to realize silk screen grabbing and releasing. A controller controls the opening and closing states of the movable clamping jaws 33 according to the position information collected by the inductive element 2, so that reliable clamping can be realized with appropriate clamping force during the transfer process, and excessive or insufficient clamping force can be avoided to cause silk screen deformation or damage. The silk screen transfer device provided by the present application can effectively improve the positioning accuracy and stability of the silk screen during the carrying and installation process, reduce the manual operation error, reduce the risk of deformation and damage, and improve the stability and service life of the product in the subsequent power heating or electrostatic adsorption function, thereby having good practical value and promotion prospect.

[0037] In the first aspect of the present application, the mounting disc 1 comprises a first disc surface 11 and a second disc surface 12 arranged in a step-like manner from top to bottom. The first disc surface 11 and the second disc surface 12 are both disc structures, and the diameter of the first disc surface 11 is greater than that of the second disc surface 12. The grabbing structure 3 is arranged on the second disc surface 12.

[0038] In the first aspect of the present application, the inductive element 2 comprises a first inductive part 21 and a second inductive part 22. The first inductive part 21 is arranged at the center of the first disc surface 11, and the second inductive part 22 is arranged on the second disc surface 12. The second inductive part 22 is provided in a plurality of forms and is uniformly and circumferentially arranged on the second disc surface 12.

[0039] Specifically, the mounting disc 1 is arranged to comprise a first disc surface 11 and a second disc surface 12, which are connected in a step-like manner from top to bottom. The grabbing structure 3 is arranged on the second disc surface 12. The diameter of the first disc surface 11 is greater than that of the second disc surface 12. The inductive element 2 comprises a first inductive part 21 and a second inductive part 22. The first inductive part 21 is arranged at the midpoint of the second disc surface 12. The second inductive part 22 is arranged at the outer edge of the first disc surface 11 and is uniformly and circumferentially arranged. The overall position information collection is further improved in comprehensiveness and accuracy.

[0040] It can be understood that the first inductive part 21 is located at the center of the first disc surface 11, which helps to obtain the center position parameter of the silk screen or the ceramic layer in the overall device coordinate system as the main reference point. The plurality of second inductive parts 22 are uniformly and circumferentially distributed on the second disc surface 12, which can detect the state of the silk screen edge or a plurality of key points in real time, thereby realizing multi-point joint sensing and error compensation.

[0041] The arrangement not only enhances the three-dimensional perception of the screen and its relative position, but also improves the control accuracy of the device in different grabbing postures, so that the controller can more reasonably allocate the action state of each grabbing structure 3, further reducing the clamping failure, deviation or damage caused by position recognition deviation.

[0042] In the first aspect of the present application, the screen transfer device further comprises a plurality of electromagnetic elements 4 connected in communication with the controller, and the electromagnetic elements 4 are arranged in a circular ring structure and uniformly spaced along the radial direction on the second disc surface 12. The controller controls the electromagnetic elements 4 to be powered on to drive the grabbing structure 3 to be in a clamping state, and controls the electromagnetic elements 4 to be powered off to make the grabbing structure 3 in a release state.

[0043] Specifically, by arranging a plurality of electromagnetic elements 4 in a circular ring structure on the second disc surface 12 and in communication with the controller, the controller can quickly and accurately control the clamping state of the grabbing structure 3. The plurality of electromagnetic elements 4 are uniformly spaced along the radial direction, which not only ensures the consistency of the force on the grabbing structure 3 at different positions, but also improves the dynamic response speed and controllability of the entire clamping system.

[0044] It can be understood that the controller can control the on-off of the electromagnetic elements 4 in a centralized or zoned manner, thereby driving the corresponding grabbing structure 3 to act synchronously or on demand, achieving efficient clamping or release operation, and avoiding unstable grabbing problems caused by complex mechanical structure or response lag. In addition, compared with traditional pneumatic or pure mechanical structure, the electromagnetic driving method has the advantages of compact structure, rapid response, easy maintenance, etc., which is helpful to the development of the overall device towards automation and modularization.

[0045] The present application realizes intelligent control of the action state of the grabbing structure 3 by introducing electromagnetic control means, which not only improves the automation level and control accuracy in the screen transfer process, but also enhances the reliability and adaptability of the device, further reducing the risk of screen deformation or damage caused by human error.

[0046] In the first aspect of the present application, a plurality of grabbing structures 3 are arranged on the second disc surface 12.

[0047] In the first aspect of the present application, two adjacent grabbing structures 3 are arranged oppositely.

[0048] Specifically, by distributing a plurality of grabbing structures 3 in an array form on the second disc surface 12 and oppositely arranging two adjacent grabbing structures 3, the structural symmetry and mechanical balance of the grabbing device are significantly improved. The array distribution mode facilitates customized arrangement according to the shape characteristics of the screen or the transferred component, making the grabbing point coverage more reasonable and enabling stable clamping of workpieces of different sizes and shapes.

[0049] It can be understood that the oppositely arranged grabbing structures 3 help to form a symmetrical clamping force during clamping, thereby avoiding warping, deviation or damage of the screen during transfer due to uneven force.

[0050] Referring to Figure 3 In the first aspect embodiment of the present application, the grabbing structure 3 comprises a support frame 31 and a connecting shaft 32; the support frame 31 is fixedly arranged on the second disc surface 12; the connecting shaft 32 is arranged through the support frame 31; an active jaw 33 is hinged to the connecting shaft 32, and an electromagnetic element 4 can be attracted to drive the active jaw 33 to rotate to adapt to clamping or releasing the screen.

[0051] In the first aspect embodiment of the present application, the active jaw 33 is perpendicular to the second disc surface 12 to make the grabbing structure 3 have a releasing state, or the active jaw 33 is parallel to the second disc surface 12 or is arranged at an angle between the extension line of the active jaw 33 and the second disc surface 12 to make the grabbing structure 3 have a clamping state.

[0052] Specifically, by comprising the support frame 31 fixed on the second disc surface 12, the connecting shaft 32 arranged through the support frame 31, and the active jaw 33 rotatable around the connecting shaft 32, and by combining the driving mode of the electromagnetic element 4, the device realizes stable and controllable conversion between the clamping state and the releasing state under the premise of compact structure.

[0053] Among them, the active jaw 33 is hinged to the connecting shaft 32 and is driven to rotate by the electromagnetic element 4, which can realize rapid response and good repeatability of clamping operation without relying on complex transmission structure. The control mode of electromagnetic attraction has the advantages of simple structure, convenient maintenance, high control precision, etc. compared with traditional mechanical driving, and is suitable for transfer scenarios with high automation degree.

[0054] Further, when the movable clamping jaw 33 is perpendicular to the second disc surface 12, the grabbing structure 3 is in a released state, facilitating the release or replacement of the screen; when the movable clamping jaw 33 is parallel to the second disc surface 12 or is arranged at an angle, the grabbing structure 3 is in a clamped state, and can reliably clamp the screen. The angle changing mechanism not only clearly defines the clamping function, but also realizes flexible control through angle adjustment, avoiding screen deformation or damage caused by excessive clamping force.

[0055] The present application realizes efficient and safe transfer of the screen through reasonable cooperation of the grabbing mechanism and electromagnetic driving, and improves the performance of the overall device in terms of grabbing precision, motion stability and automatic control, meeting the needs of high stability and high reliability of clamping operation in industrial production.

[0056] According to the first aspect embodiment of the present application, the screen transfer device further comprises a mechanical arm 5, which is drivingly connected to the side of the mounting disc 1 away from the grabbing structure 3, and drives the mounting disc 1 to move between the hot press furnace and the tray to adapt to clamping the screen in the tray and carrying it to the ceramic layer of the hot press furnace.

[0057] Specifically, by setting the mechanical arm 5 drivingly connected to the side of the mounting disc 1 away from the grabbing structure 3, the mounting disc 1 as a carrying platform can realize precise and stable spatial movement under the driving of the mechanical arm 5, thereby realizing automatic carrying operation of the screen from the tray to the ceramic layer in the hot press furnace. This structure avoids the problems of screen breakage or misplacement caused by large positioning error and inconsistent operation in the traditional manual carrying process.

[0058] The mechanical arm 5 as a driving unit can realize high repeatability of motion trajectory control according to the preset path and control instruction, ensure that each grabbing and releasing operation is at a predetermined position, and improve the overall operation efficiency and precision. The mounting disc 1 keeps the relative position of the grabbing structure 3 stable during movement, and cooperates with the linkage control of the inductive element 2 and the electromagnetic element 4 to realize real-time monitoring and precise control of the screen state during the whole process.

[0059] It can be understood that the present application organically integrates the screen grabbing, moving and positioning functions, significantly improves the carrying efficiency and operation stability of the screen before high-temperature processing, effectively reduces the functional defects or production loss caused by carrying errors, and enhances the overall automation level and industrial applicability of the system.

[0060] In the second aspect, the present application provides a control method of a screen transfer device, comprising the following steps:

[0061] Assemble and test the screen transfer device, after the screen transfer device is assembled, test the screen transfer condition;

[0062] Specifically, select the station, assemble the screen transfer device, including the installation of the mechanical arm 5, the mounting disc 1, the electromagnetic element 4 and the grabbing structure 3, then power on, test the multi-degree-of-freedom transfer of the mechanical arm 5, test the lifting screen transfer of the mounting disc 1, test the rotating activity of the magnetic field control grabbing structure 3, lower the mechanical arm 5, gradually reduce the current, and observe the stability of the mechanical hand releasing the screen.

[0063] A database is established, and a three-dimensional coordinate database of the hot press cavity is established.

[0064] Image data is collected, a ceramic layer is placed in the hot press cavity, a screen is transferred by the screen transfer device, an image collector is arranged at the top of the hot press cavity to collect image data, and the inductive element 2 of the screen transfer device acquires the grid pattern of the hot press cavity. The screen transfer device descends along the midpoint of the grid pattern, the image collector repeatedly collects images of the screen transferred to the ceramic layer, and transmits and stores them to the database.

[0065] Specifically, a ceramic layer is placed in the hot press cavity, and the screen is started to be transferred by the mechanical arm 5. At the top of the hot press cavity, an image collector is used to collect images, and an inductive element 2 is used to acquire the grid pattern of the cavity. The mechanical arm 5 slowly descends along the midpoint of the cavity grid pattern, and collects images of the bottom ceramic layer during the descent. These images are collected every 10 seconds and stored in the database.

[0066] The collected images are trained using a convolutional neural network, the data in the database is read and preprocessed, and fitting is performed; a training model is selected, a characteristic value threshold is set, the characteristic value threshold is adjusted according to the positional relationship of the screen transported to the ceramic layer, and the motion parameters of the screen transfer device are adjusted.

[0067] Specifically, data preparation and preprocessing: various images of the screen deviating from the predetermined position after falling onto the ceramic layer are read from the database. The predetermined position in this application is four feature points selected on the ceramic layer in the cavity. The ceramic layer is circular, and the four endpoints of the cross-diameter specified on the circumference are feature points. After preparing the data, data cleaning and data labeling are performed. Data cleaning is to clean up various images with unclear image data. After preparing the data, the standard of image data labeling is defined. The standard is determined: the distance between the coil and the four feature points on the ceramic layer. For distance judgment, the distance between the entire image and the four feature points is within the standard, defined as 1, and the rest is defined as 0. According to the established standard, the images after cleaning are labeled.

[0068] After the image data is cleaned and labeled, it needs to be vectorized. Vectorization is the process of converting image data into tensors. After vectorization, the image needs to be standardized. Many deep learning frameworks provide batch processing functions to convert images to tensors, which can easily preprocess image data and perform standardization at the same time.

[0069] Model selection and training: When starting to train the model, the image dataset is small, and each cavity accumulates data of about a few thousand images, so there is a problem of overfitting. For small data sets, there are three main methods for deep learning to perform image classification: training from scratch, using a pre-trained model for feature extraction, and fine-tuning a pre-trained model. Since image data is constantly being generated in production, we use a pre-trained model for feature extraction with data augmentation. There are many models available: VGG16, VGG19, Xception, MobileNet, ResNet50, etc. We choose to use Keras framework + VGG16 or VGG19 to extract features from the images of the four main feature points of the screen falling on the ceramic layer.

[0070] First, add the model, then use the frozen convolution base to train the model end-to-end. The advantage of this is that it can continuously expand the dataset and extract features from more images.

[0071] Feature value threshold selection: When the robot arm descends in the cavity, the sensing element 2 emits a laser beam that falls on the ceramic layer, forming a circle with the selected four feature points as the center and a certain value as the radius. When the screen falls on the ceramic layer, the criteria for determining whether the screen is successfully placed are as follows: in a clockwise direction, the screen falls within the right half of the circle. The radius of these four circles is the feature value threshold we choose.

[0072] Model evaluation and validation: For the feature extraction model with data augmentation, after each training, the coil release height is learned in the cavity, the current in the electromagnetic element 4 is cut off, the movable jaw 33 is opened, and the screen falls on the ceramic layer. Evaluate the effect and record the accuracy. After multiple model training, the accumulated data set gradually increases, and the validation accuracy can reach about 90%.

[0073] Data accumulation and continuous learning: After starting production, each time the screen is transferred, the screen transfer effect needs to be carefully recorded and evaluated. As the amount of accumulated data increases, the amount of image data provided for model training increases, and the accuracy of the model improves.

[0074] It can be understood that by building an intelligent handling platform including a multi-degree-of-freedom robot arm 5, a magnetic field control device, an image acquisition unit and a deep learning system, high-precision and low-loss automatic transfer of molybdenum wire or molybdenum mesh coils on the surface of the ceramic layer of the hot-pressing furnace can be realized.

[0075] Firstly, through the assembly test of the multi-degree-of-freedom robot arm 5 and the magnetic field control device, the stability and response capability in the links of grabbing, lifting and releasing are verified to ensure the reliability and repeated positioning accuracy of the overall handling device under continuous operation conditions.

[0076] Secondly, by constructing a three-dimensional coordinate database of the hot-pressing furnace cavity and combining the laser projection to form a standardized grid pattern, the accurate calibration of the spatial feature points of the ceramic layer is realized, so that the path and target point of the wire mesh during placement have a unified coordinate reference, thereby greatly improving the pose control accuracy.

[0077] In addition, during the wire mesh lowering and transferring process, the image acquisition device acquires ceramic layer images in a timely manner, and cooperates with the sensing device to form a multi-source perception mechanism. The image data is uploaded to the database in real time to form a trainable data basis. The system uses a pre-trained convolutional neural network such as the VGG16 / VGG19 model to extract and fit image features, defines the relative position relationship between feature points and coils, and introduces a "feature value threshold" judgment mechanism to form a set of quantifiable coil placement judgment standards.

[0078] Further, this method constructs a dynamic iterative deep learning closed-loop system through continuous image acquisition, data cleaning, label standardization, model training and verification, etc. Control parameters such as lowering speed, current change and release timing can be adjusted in real time according to image feedback, effectively improving the self-correction ability of the system to the wire mesh transfer posture error.

[0079] As the production process continues to run, image data is continuously accumulated, and model training accuracy and prediction ability are simultaneously improved. The accuracy can gradually reach more than 90%, with good system scalability and self-adaptability, providing an intelligent and data-driven solution for high-precision wire mesh automatic handling.

[0080] Although embodiments of the present application are described in conjunction with the drawings, various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the present application, and such modifications and changes fall within the scope defined by the appended claims.

Claims

1. A screen transfer device characterized by, The installation disc (1) comprises a first disc surface (11) and a second disc surface (12) which are connected from top to bottom, the first disc surface (11) and the second disc surface (12) are arranged in a stepped manner, the first disc surface (11) and the second disc surface (12) are both disc structures, and the diameter of the first disc surface (11) is greater than that of the second disc surface (12), and the grabbing structure (3) is arranged on the second disc surface (12). The sensing element (2) comprises a first sensing element (21) and a second sensing element (22), the first sensing element (21) is arranged at the center of the first disc surface (11), the second sensing element (22) is arranged on the second disc surface (12), the second sensing element (22) is arranged in multiple and is uniformly and spacedly arranged on the second disc surface (12) in a circumferential direction. Further comprising an electromagnetic element (4) in communication connection with the controller, the electromagnetic element (4) is arranged in multiple and in a circular ring structure, and is uniformly and spacedly arranged on the second disc surface (12) in a radial direction, the controller controls the electromagnetic element (4) to be powered on to drive the grabbing structure (3) to be in the clamping state, and the controller controls the electromagnetic element (4) to be powered off to make the grabbing structure (3) to be in the releasing state. The grabbing structure (3) is arranged in multiple and is arrayed on the second disc surface (12). Two adjacent grabbing structures (3) are arranged oppositely.

2. The screen transfer device of claim 1, wherein, The grabbing structure (3) comprises:

3. The screen transfer device of claim 2, wherein, A support frame (31) is fixedly arranged on the second disc surface (12); 4. The screen transfer device of claim 3, wherein, A connecting shaft (32) is arranged in the support frame (31); 5. The screen transfer device of claim 4, wherein, The movable claw (33) is hinged with the connecting shaft (32), and the electromagnetic element (4) can attract and drive the movable claw (33) to rotate around the connecting shaft (32) to clamp or release the wire mesh.

6. The screen transfer device of claim 5, wherein, The movable claw (33) is perpendicular to the second disc surface (12) to make the grabbing structure (3) have a releasing state, and the movable claw (33) is parallel to the second disc surface (12) or is arranged in an extension line of the movable claw (33) and the second disc surface (12) at an angle to make the grabbing structure (3) have a clamping state.

7. The screen transfer device of any one of claims 4 to 6, wherein, ​ ​ ​ ​ 8. The screen transfer device of claim 7, wherein, ​ 9. The screen transfer device of claim 1, wherein, Further comprising a mechanical arm (5) which is in transmission connection with the side of the mounting disc (1) away from the grabbing structure (3), the mechanical arm (5) drives the mounting disc (1) to move between the hot-pressing furnace and the material disc, so as to be suitable for clamping the wire mesh in the material disc and carrying it to the ceramic layer of the hot-pressing furnace.

10. A method of controlling a screen transfer device, characterized by, The method comprises the following steps: Assembling and testing the wire mesh transfer device, after the wire mesh transfer device according to any one of claims 1-9 is assembled, the wire mesh transfer condition is tested; Establishing a database, a three-dimensional coordinate database of the hot-pressing furnace cavity is established; Collecting image data, a ceramic layer is placed in the hot-pressing furnace cavity, the wire mesh is transferred by the wire mesh transfer device, an image collector is arranged at the top position of the hot-pressing furnace cavity to collect image data, and the sensing element (2) of the wire mesh transfer device acquires a grid pattern of the hot-pressing furnace cavity, the wire mesh transfer device descends along the midpoint of the grid pattern, the image collector repeatedly collects images of the wire mesh transferred to the ceramic layer, and transmits and stores the images to the database; Training the collected images by using a convolutional neural network, reading and preprocessing the data in the database, and fitting; selecting a training model, setting a characteristic value threshold, adjusting the characteristic value threshold according to the positional relationship of the wire mesh transported to the ceramic layer, and then adjusting the motion parameters of the wire mesh transfer device.

Images