Magnetic filtering type CBD coating machine

Abstract

The magnetic filtering type CBD coating machine comprises an octagonal furnace, and a group of arc sources A, a group of arc sources B, a group of arc sources C and a group of arc sources D are arranged on the octagonal furnace; the group of arc sources A is communicated with 20-30A current and is used as a bottoming execution module; the group of arc sources B are communicated with current of 80-100A and are used as a rough coating execution module; the group of arc sources C is communicated with 300-350A current and is used as a semi-precision magnetic filtering arc coating execution module; the group of arc sources D is communicated with 380-390A current and is used as a precision magnetic filtering coating execution module; each of the group of arc sources A and the group of arc sources B comprises two thick part arc source setting plates which are correspondingly arranged, each thick part arc source setting plate is provided with three arc sources which are uniformly arranged, and the distance between every two adjacent arc sources is 250-300mm.

Description

TECHNICAL FIELD

[0001] The present application relates to surface treatment technology, in particular to surface precision coating preparation technology and its use equipment, specifically, a magnetic filter type CBD coating machine. BACKGROUND

[0002] In the field of precision coating preparation technology, using arc source to prepare coating is one of the common ways. The target material of the arc source is accelerated in the magnetic field, bombards the surface of the product, and forms a precise coating on the surface of the product. However, the current arc source bombards the surface of the product, which is easy to produce droplets, that is, particles produced by the target material. When the particle size is not uniform, an uneven granular coating is formed on the surface of the product, which affects the quality of the coating.

[0003] Therefore, it is necessary to provide a magnetic filter type CBD coating machine to solve the above problems. SUMMARY

[0004] The purpose of the present application is to provide a magnetic filter type CBD coating machine.

[0005] The technical scheme is as follows: A magnetic filter type CBD coating machine, comprising an octagonal furnace, a group of arc sources A, a group of arc sources B, a group of arc sources C, and a group of arc sources D are arranged on the octagonal furnace. The group of arc sources A is connected to a 20-30A current and used as a base coating execution module. The group of arc sources B is connected to an 80-100A current and used as a rough coating execution module. The group of arc sources C is connected to a 300-350A current and used as a semi-precision magnetic filter arc coating execution module. The group of arc sources D is connected to a 380-390A current and used as a precision magnetic filter coating execution module. The group of arc sources A and the group of arc sources B each include two corresponding rough part arc source setting plates, and three arc sources are arranged uniformly on the rough part arc source setting plate. The distance between adjacent arc sources is 250-300mm. The group of arc sources C and the group of arc sources D each include a first precision part arc source setting plate and a second precision part arc source setting plate. Three arc sources are arranged uniformly on the first precision part arc source setting plate. Two arc sources are arranged uniformly on the second precision part arc source setting plate. The arc source on the second precision part arc source setting plate is located between the two arc sources on the first precision part arc source setting plate in terms of height and direction. The height difference between the center of the arc source on the second precision part arc source setting plate and the arc source on the first precision part arc source setting plate is 120-160mm.

[0006] Further, the octagonal furnace is provided with a vacuum extraction port and an ion source in the middle.

[0007] Further, the arc source is composed of a target material composite combination arc source, the target material composite combination arc source comprises a target material module, the target material module comprises an external target material, the external target material is provided with an internal target material, the external target material is one of a titanium target, a chromium target, a titanium aluminum target and a chromium aluminum target, and the internal target material is one of a titanium target, a chromium target, a titanium aluminum target and a chromium aluminum target after removing the material of the external target material; The external target material is provided with an outer coil and a middle coil, and the internal target material is provided with an inner coil, the outer coil and the middle coil cooperate with the external target material to form an outer target material driving and executing structure, and the inner coil cooperates with the internal target material to form an inner target material executing structure, the outer target material driving and executing structure and the inner target material executing structure are combined to form a quick switching type composite target material arc source structure.

[0008] Further, the target material module is provided with a plasma confinement ring and a bunching ring.

[0009] Further, the target material module is provided with a target material cooling seat.

[0010] Further, the target material module is provided with an arc striking module.

[0011] Further, the target material module, the plasma confinement ring and the bunching ring and the target material cooling seat are arranged on a fixed main body.

[0012] Further, the target material module, the plasma confinement ring and the bunching ring and the target material cooling seat are arranged on a fixed main body through a mounting flange.

[0013] Further, the fixed main body is further provided with a coil cooling water plate module.

[0014] Compared with the prior art, the present application effectively solves the liquid drop phenomenon during plating and ensures the plating quality by combining a rough type, semi-precision magnetic plating film with a precision magnetic filtering type plating film, and combining a rough type, semi-precision magnetic plating film layer with a precision magnetic filtering type plating film layer. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a schematic diagram of the present application.

[0016] Figure 2 is a structural schematic diagram of a group of arc sources A or a group of arc sources B.

[0017] Figure 3 is a structural schematic diagram of a group of arc sources C or a group of arc sources D.

[0018] Figure 4 is a sectional view of the arc source.

[0019] Figure 5 is a schematic diagram of the target material module. DETAILED DESCRIPTION Embodiment:

[0020] Please refer to Figures 1-5 The embodiment shows a magnetic filtering type CBD coating machine, which comprises an octagonal furnace 100, a group of arc sources A 200, a group of arc sources B 300, a group of arc sources C 400, and a group of arc sources D 500 arranged on the octagonal furnace 100 The group of arc sources A 200 is connected to a current of 20-30 A and used as a base coating execution module; The group of arc sources B 300 is connected to a current of 80-100 A and used as a rough coating execution module; The group of arc sources C 400 is connected to a current of 300-350 A and used as a semi-precision magnetic filtering arc coating execution module; The group of arc sources D 500 is connected to a current of 380-390 A and used as a precision magnetic filtering coating execution module; The group of arc sources A 200 and the group of arc sources B 300 each comprise two corresponding rough part arc source setting plates 201, and the rough part arc source setting plates 201 are provided with three arc sources 1000 arranged uniformly, and the distance between adjacent arc sources 1000 is 250-300 mm; The group of arc sources C 400 and the group of arc sources D 500 each comprise a first precision part arc source setting plate 401 and a second precision part arc source setting plate 402, the first precision part arc source setting plate 401 is provided with three arc sources 1000 arranged uniformly, and the second precision part arc source setting plate 402 is correspondingly provided with two arc sources 1000 arranged uniformly, the arc source 1000 on the second precision part arc source setting plate 402 is located between the two arc sources 1000 on the first precision part arc source setting plate 401 in terms of height and direction, and the height difference between the center of the arc source 1000 on the second precision part arc source setting plate 402 and the arc source 1000 on the first precision part arc source setting plate 401 is 120-160 mm.

[0021] Among them: The octagonal furnace 100 is provided with a vacuum extraction port 600 and an ion source 700 arranged in the middle.

[0022] The arc source 1000 is composed of a target material composite combination type arc source, which comprises a target material module 1, the target material module 1 comprises an external target material 11, and an internal target material 12 is arranged in the external target material 11, the external target material 11 is one of a titanium target, a chromium target, a titanium-aluminum target, and a chromium-aluminum target, and the internal target material 12 is one of a titanium target, a chromium target, a titanium-aluminum target, and a chromium-aluminum target after removing the material of the external target material; Corresponding to the external target material 11 is provided with outer coil 2 and middle coil 3, corresponding to the internal target material 12 is provided with inner coil 4, outer coil 2 and middle coil 3 cooperate with external target material 11, form outer circle target material drive execution structure, inner coil 4 cooperate with internal target material 12, form inner circle target material execution structure, outer circle target material drive execution structure, inner circle target material execution structure do business, combination forms quick switching type compound target formula arc source structure.

[0023] Corresponding to the target material module 1, the plasma confinement ring 5 and the bunching ring 6 are arranged.

[0024] Corresponding to the target material module 1, the target cooling seat 7 is arranged.

[0025] Corresponding to the target material module 1, the arc leading module 8 is arranged.

[0026] The target material module 1, the plasma confinement ring 5 and the bunching ring 6, and the target cooling seat 7 are arranged on the fixed main body 9.

[0027] The target material module 1, the plasma confinement ring 5 and the bunching ring 6, and the target cooling seat 7 are fixedly arranged on the fixed main body 9 through the mounting flange 10.

[0028] The fixed main body 9 is also provided with a coil cooling water plate module 11.

[0029] In the embodiment, the current through the arc source 1000 is used to control the magnetic field, and the greater the power of the target material module 1 corresponding to the outer coil 2 / middle coil 3 / inner coil 4, the greater the filtering degree of the magnetic field to the target material ions.

[0030] Compared with the prior art, the present application combines the rough type, semi-precision magnetic coating and the precision magnetic filtering type coating through the rough type, semi-precision magnetic coating layer, which effectively solves the liquid drop phenomenon during coating and ensures the coating quality.

[0031] For those skilled in the art, without departing from the inventive concept, a number of modifications and improvements can be made, which are within the scope of the present application.

Claims

1. A magnetic filter type CBD coating film forming machine, characterized by: The octagonal furnace is provided with a group of arc sources A, a group of arc sources B, a group of arc sources C and a group of arc sources D. The group of arc sources A is connected with a current of 20-30 A and is used as a bottoming execution module. The group of arc sources B is connected with a current of 80-100 A and is used as a rough coating execution module. The group of arc sources C is connected with a current of 300-350 A and is used as a semi-precision magnetic filtering arc coating execution module. The group of arc sources D is connected with a current of 380-390 A and is used as a precision magnetic filtering arc coating execution module. The group of arc sources A and the group of arc sources B each include two rough part arc source setting plates arranged correspondingly, and the rough part arc source setting plates are provided with three arc sources arranged uniformly, and the distance between adjacent arc sources is 250-300 mm. The group of arc sources C and the group of arc sources D each include a first precision part arc source setting plate and a second precision part arc source setting plate arranged correspondingly, the first precision part arc source setting plate is provided with three arc sources arranged uniformly, the second precision part arc source setting plate is correspondingly provided with two arc sources arranged uniformly, the arc sources on the second precision part arc source setting plate are located between the two arc sources on the first precision part arc source setting plate in the height direction, and the height difference between the center of the arc sources on the second precision part arc source setting plate and the arc sources on the first precision part arc source setting plate is 120-160 mm.

2. The magnetic filtering CBD coating machine of claim 1, wherein: The octagonal furnace is provided with a vacuum extraction port and an ion source arranged in the middle.

3. The magnetic filtering CBD coating machine of claim 1, wherein: The arc source is composed of a target material composite combination arc source, the target material composite combination arc source includes a target material module, the target material module includes an external target material, and the external target material is provided with an internal target material, the external target material is one of a titanium target, a chromium target, a titanium-aluminum target and a chromium-aluminum target, and the internal target material is one of a titanium target, a chromium target, a titanium-aluminum target and a chromium-aluminum target after the material of the external target material is removed. The external target material is provided with an outer coil and a middle coil, and the internal target material is provided with an inner coil, the outer coil and the middle coil cooperate with the external target material to form an outer ring target material driving execution structure, the inner coil cooperates with the internal target material to form an inner ring target material execution structure, and the outer ring target material driving execution structure and the inner ring target material execution structure are combined to form a quick switching type composite target material arc source structure.

4. The magnetic filtering CBD coating machine of claim 3, wherein: The target material module is provided with a plasma confinement ring and a bunching ring.

5. The magnetic filtered CBD coating machine of claim 4, wherein: The target material module is provided with a target material cooling seat.

6. The magnetic filtered CBD coating machine of claim 5, wherein: The target material module is provided with an arc striking module.

7. The magnetic filtered CBD coating machine of claim 6, wherein: The target material module, the plasma confinement ring and the bunching ring and the target material cooling seat are arranged on a fixed main body.

8. The magnetic filtered CBD coater of claim 7, wherein: The target material module, the plasma confinement ring and the bunching ring and the target material cooling seat are fixedly arranged on the fixed main body through a mounting flange.

9. The magnetic filtered CBD coater of claim 8, wherein: The fixed main body is also provided with a coil cooling water plate module.

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