Intelligent automatic control system and control method for ion pump test

Abstract

The invention belongs to the field of extremely high vacuum ion pump control, and particularly relates to an intelligent automatic control system and method for ion pump testing, and the system comprises a mechanical pump, a molecular pump, a gas conveying device, an ion pump parameter testing unit and a main control unit. The main control unit is used for respectively controlling the start and stop of the mechanical pump parameter test unit, the molecular pump parameter test unit and the ion pump parameter test unit; meanwhile, system parameters are set, ion pump parameters are tested in real time, ion pump parameter data are obtained, and a test report of the ion pump is obtained in real time; the mechanical pump, the molecular pump and an ion pump of the ion pump parameter testing unit are connected in series, and the air inlet end of the ion pump of the ion pump parameter testing unit is connected with the gas conveying device and used for conveying gas to the ion pump. According to the invention, the efficiency of ion pump testing, the statistics of test data and the accuracy of the data are greatly improved, and the uncertainty of a test conclusion caused by human factors is reduced at the same time.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of ultra-high vacuum ion pump control, in particular to an intelligent automatic control system and control method for ion pump testing. BACKGROUND

[0002] The ultra-high vacuum ion pump, also known as a Penning pump, is a widely used clean vacuum pump. The performance testing of the ion pump includes: four-stage mass spectrometry testing, limit testing, and pumping speed testing. However, human operation is mainly involved in these tests, and human control is required for obtaining vacuum, baking control, data recording, and other operations. More importantly, during pumping speed testing, manual adjustment of the micro-adjusting valve is required to achieve the testing conditions. Such operations require a large amount of manpower and material resources, and the uncertainty during the testing process is high, i.e., the uniformity and repeatability of the testing process cannot be guaranteed, accurate testing data cannot be obtained, and the experimental results are difficult to convince people. SUMMARY

[0003] To solve the above problems, starting from the existing technology, the purpose of the application is to provide an intelligent automatic control system and control method for ion pump testing, which includes functions such as fully automatic control of the ion pump testing process, fully automatic recording of testing data, automatic analysis of testing data and calculation, automatic adjustment of the vacuum degree of the ion pump during pumping speed testing, and the like.

[0004] The technical solution adopted by the application to achieve the above purpose is as follows: an intelligent automatic control system for ion pump testing, comprising: a mechanical pump, a molecular pump, a gas delivery device, an ion pump parameter testing unit, and a main control unit.

[0005] The main control unit is connected with the mechanical pump, the molecular pump, and the ion pump parameter testing unit, respectively, for controlling the start and stop of the mechanical pump, the molecular pump, and the ion pump parameter testing unit. At the same time, system parameters are set, the ion pump parameters are tested in real time, ion pump parameter data are obtained, and a testing report of the ion pump is obtained in real time.

[0006] The ion pumps of the mechanical pump, the molecular pump, and the ion pump parameter testing unit are connected in series, and the gas inlet end of the ion pump of the ion pump parameter testing unit is connected with the gas delivery device for delivering gas to the ion pump.

[0007] The ion pump parameter testing unit comprises: an angle valve, an ion pump, a gas control unit, and an ion pump controller connected with the main control unit.

[0008] The ion pump controller is connected with the control end of the ion pump for action control of the ion pump according to the instructions sent by the main control unit.

[0009] The input end of the ion pump is connected with the output end of the molecular pump through an angular valve;

[0010] The gas inlet end of the ion pump is connected with a gas delivery device, and a gas control unit is arranged between the ion pump and the gas delivery device.

[0011] The gas control unit comprises a motor and a fine adjustment valve connected with the motor.

[0012] The motor is connected with the main control unit, and is used for receiving instructions of the main control unit to realize adjustment of the fine adjustment valve.

[0013] Further comprising a vacuum parameter detection unit, the vacuum parameter detection unit comprises a vacuum gauge and a vacuum gauge;

[0014] The vacuum gauge is connected with the main control unit, and the vacuum gauge and the vacuum gauge are connected with each other.

[0015] The detection end of the vacuum gauge is connected with the ion pump, and is used for detecting the vacuum degree of the ion pump and further acquiring the pumping speed of the ion pump.

[0016] The system parameters include baking temperature, pump starting time, baking time and test time.

[0017] A control method of an intelligent automatic control system for ion pump test, comprising the following steps:

[0018] 1) The main control unit is connected with the mechanical pump, the molecular pump, the angular valve, the ion pump power supply, the vacuum gauge, the mechanical pump, the molecular pump, and the motor for controlling the fine adjustment valve, respectively;

[0019] 2) The main control unit sets various parameters of the ion pump test, including setting the baking temperature, setting the pump starting time, and setting the baking time; and step 3) is executed to start the test;

[0020] 3) The main control unit sets the system parameters to control the ion pump to perform the pumping speed test;

[0021] 4) During the pumping speed test, the main control unit acquires the vacuum degree of the ion pump according to the vacuum degree detected by the vacuum gauge at the moment and the preset test point, controls the fine adjustment valve, and further realizes control of the gas inlet amount to achieve the test condition, finally obtains the pumping speed data of the ion pump, and completes the pumping speed test;

[0022] 5) After the pumping speed test is completed, the main control unit acquires all the pumping speed data in the test process; compares and analyzes the pumping speed data recorded during the test, and automatically generates a test report of the ion pump according to all the test parameters of the ion pump.

[0023] The main control unit sets system parameters, controls the ion pump to perform a pumping test, including the following steps:

[0024] 1-1) The main control unit sends an opening instruction to the mechanical pump and determines the relationship between the timer and the opening time of the mechanical pump;

[0025] 1-2) When the time of the timer exceeds the set opening time of the mechanical pump, the main control unit sends an instruction to open the molecular pump and determines the relationship between the timer and the opening time of the molecular pump in real time;

[0026] 1-3) When the time of the timer exceeds the set opening time of the molecular pump, the main control unit controls the molecular pump to start baking, and determines the relationship between the timer and the set baking time;

[0027] 1-4) When the time of the timer exceeds the set baking time, the main control unit opens the vacuum gauge and prepares to measure the ion pump; the main control unit determines the relationship between each unit and the timer time according to the time of the timer, and completes the sequential closing of the angular valve, stopping the molecular pump baking, closing the molecular pump, and closing the mechanical pump action;

[0028] 1-5) After completing steps 1-1) to 1-4), the main control unit performs a pumping test, opens the ion pump, and the vacuum gauge detects the vacuum degree of the ion pump in real time.

[0029] The step 4) is specifically:

[0030] 2-1) After the test starts, the first time the air intake is adjusted, the motor rotates and is fixed to a certain angle, after the motor rotates, the vacuum degree is stabilized for 5 seconds, and a changed vacuum degree is obtained;

[0031] 2-2) The main control unit fits the change in vacuum degree when the motor rotates every 0.1 degree according to the last rotation angle of the motor and the change in vacuum degree;

[0032] 2-3) The main control unit compares the current vacuum degree with the preset vacuum degree, multiplies the 0.1 degree vacuum degree change size with the N zero order value difference between the current vacuum degree and the preset vacuum degree, thereby calculating the rotation angle required for the next adjustment;

[0033] 2-4) Each time the fine adjustment valve is adjusted, steps 2-1) to 2-3) are performed according to the last calculation result and the next test vacuum degree;

[0034] 2-5) When the timer reaches the preset test time, the motor calculates and acts according to the last calculation result and the next test vacuum degree;

[0035] 2-6) Repeat steps 2-1) to 2-5) until the test is completed. During the test, the readings of the ion pump power supply and vacuum gauge are continuously recorded. Based on the vacuum values ​​of the vacuum gauge corresponding to the upper and lower ends of the vacuum gauge on the ion pump, the pumping speed data of the current ion pump is automatically calculated and analyzed.

[0036] The ion pump parameter data includes: vacuum level of the vacuum gauge, current and voltage of the ion pump power supply, real-time pumping speed of the ion pump, and baking temperature data.

[0037] The present invention has the following beneficial effects and advantages:

[0038] 1. This invention realizes fully automatic control of the testing process, and further realizes the functions of automatically adjusting the vacuum degree in the ion pump during pumping speed testing, fully automatic recording of test data, and automatic calculation based on the recorded data;

[0039] 2. Because the entire process of this invention is automated, it not only greatly improves the efficiency of ion pump testing, the statistics of test data, and the accuracy of data, but also reduces the uncertainty of test conclusions caused by human factors. Attached Figure Description

[0040] Figure 1 This is a flowchart illustrating the automated process of vacuum generation and baking using an ion pump according to the present invention.

[0041] Figure 2 This is a flowchart illustrating the principle of the automated pumping speed test for the ion pump of this invention.

[0042] Figure 3 This is a diagram of the main control unit interface of the intelligent automated testing system of the present invention;

[0043] Figure 4 This is a schematic diagram of the control system of the present invention;

[0044] Among them, 1 is a mechanical pump; 2 is a molecular pump; 3 is an angle valve; 4 is an ion pump; 5 is a motor; 6 is a fine-tuning valve; 7 is a vacuum gauge; 8 is an ion pump controller; 9 is a vacuum gauge; and 10 is the main control unit. Detailed Implementation

[0045] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0046] like Figure 4 The diagram shown is a structural schematic of the control system of the present invention. The present invention is an intelligent automated control system for ion pump testing, comprising: a mechanical pump 1, a molecular pump 2, a gas delivery device, an ion pump parameter testing unit, and a main control unit.

[0047] The main control unit is connected with the mechanical pump 1, the molecular pump 2 and the ion pump parameter test unit respectively, and is used for controlling the start and stop of the mechanical pump 1, the molecular pump 2 and the ion pump parameter test unit respectively; meanwhile, system parameters are set, the ion pump parameters are tested in real time, ion pump parameter data are obtained, and the test report of the ion pump is obtained in real time;

[0048] The mechanical pump 1, the molecular pump 2 and the ion pump 4 of the ion pump parameter test unit are connected in series, and the gas inlet end of the ion pump 4 of the ion pump parameter test unit is connected with the gas conveying device, and is used for conveying gas to the ion pump.

[0049] The ion pump parameter test unit comprises an angle valve 3, an ion pump 4, a gas control unit and an ion pump controller 8 which are connected with the main control unit respectively;

[0050] The ion pump controller 8 is connected with the control end of the ion pump 4, and is used for controlling the action of the ion pump 4 according to the instruction sent by the main control unit;

[0051] The input end of the ion pump 4 is connected with the output end of the molecular pump 2 through the angle valve 3;

[0052] The gas inlet end of the ion pump 4 is connected with the gas conveying device, and the gas control unit is arranged between the ion pump 4 and the gas conveying device.

[0053] The gas control unit comprises a motor 5 and a fine adjustment valve 6 connected with the motor 5;

[0054] The motor 5 is connected with the main control unit, and is used for receiving the instruction of the main control unit and adjusting the fine adjustment valve 6.

[0055] Further, a vacuum parameter detection unit is arranged, and the vacuum parameter detection unit comprises a vacuum gauge 9 and a vacuum gauge 7;

[0056] The vacuum gauge 9 is connected with the main control unit, and the vacuum gauge 9 is connected with the vacuum gauge 7;

[0057] The detection end of the vacuum gauge 7 is connected with the ion pump 4, and is used for detecting the vacuum degree of the ion pump 4 and further obtaining the pumping speed of the ion pump.

[0058] As shown in the structural schematic diagram of the control system of the application, Figure 1 the control method of the intelligent automatic control system for ion pump test comprises the following steps:

[0059] 1) The main control unit is connected with the mechanical pump, the molecular pump, the angle valve, the ion pump power supply, the vacuum gauge, the mechanical pump 1, the molecular pump 2 and the motor for controlling the fine adjustment valve respectively;

[0060] 2) Set the various parameters of the ion pump 4 test through the main control unit, including: setting the baking temperature, setting the pump start time, and setting the baking time; execute step 3) to start the test;

[0061] 3) The main control unit sets the system parameters and controls the ion pump 4 to perform the pumping speed test;

[0062] 4) During the pumping speed test, the main control unit obtains the vacuum level of the ion pump 4 based on the vacuum level detected by the vacuum gauge 9 and the preset test point, controls the fine-tuning valve 6, and then controls the air intake to meet the test conditions, finally obtaining the pumping speed data of the ion pump 4 and completing the pumping speed test.

[0063] 5) After the pumping speed test is completed, the main control unit acquires all pumping speed data during the test; after comparing and analyzing the pumping speed data recorded during the test, it automatically generates a test report for the ion pump based on all the tested ion pump parameter data.

[0064] like Figure 1 The diagram shows the automated process flow for vacuum acquisition and baking using the ion pump in this invention. This invention achieves fully automated testing, utilizing a software timer and test items to control the testing progress. When the conditions of both the timer and the test item are met simultaneously, corresponding actions are taken, such as turning on the mechanical pump, then starting the molecular pump according to the testing progress, followed by baking. Once the specified temperature is reached, the vacuum gauge and ion pump are activated, and the angle valve is closed according to the set time, until all testing steps are completed. The specific steps are as follows:

[0065] 1-1) The main control unit sends an start command to the mechanical pump 1 and determines the relationship between the timer and the start time of the mechanical pump 1;

[0066] 1-2) When the timer exceeds the set start time of mechanical pump 1, the main control unit sends a command to start molecular pump 2 and judges the relationship between the timer and the start time of molecular pump 2 in real time.

[0067] 1-3) When the timer exceeds the set start time of molecular pump 2, the main control unit controls molecular pump 2 to start baking, and at the same time, determines the relationship between the timer and the set baking time.

[0068] 1-4) When the timer exceeds the set baking time, the main control unit turns on the vacuum gauge 9 to prepare to measure the ion pump 4; the main control unit judges the relationship between the timer and each unit and the timer according to the time, and completes the actions of closing the angle valve 3, stopping the molecular pump 2 baking, turning off the molecular pump, and turning off the mechanical pump 1 in sequence.

[0069] 1-5) After completing steps 1-1) to 1-4), the main control unit performs a pumping test, turns on ion pump 4, and the vacuum gauge 9 detects the vacuum level of ion pump 4 in real time.

[0070] like Figure 2 The diagram shown is a flowchart of the automated ion pump pumping speed test process of this invention. To achieve automatic vacuum adjustment during ion pump pumping speed testing, a connection is first established with a vacuum gauge via communication to obtain its vacuum level. Then, a communication connection is established with the motor, enabling the motor to control the fine-tuning valve. After the test begins, the following steps are executed:

[0071] 2-1) After the test begins, when the intake volume is adjusted for the first time, motor 5 rotates and is fixed at a certain angle. After the motor rotates, wait for the vacuum to stabilize for 5 seconds and obtain a changed vacuum.

[0072] 2-2) Based on the angle of the previous rotation of motor 5 and the change in vacuum, the main control unit fits the change in vacuum for every 0.1 degree rotation of motor 5;

[0073] 2-3) The main control unit compares the current vacuum level with the preset vacuum level, and multiplies the magnitude of the 0.1 degree vacuum level change with the N zero-point-level difference between the current vacuum level and the preset vacuum level to calculate the angle of rotation required for the next adjustment.

[0074] 2-4) Each time the fine-tuning valve 6 is adjusted, execute steps 2-1) to 2-3).

[0075] 2-5) When the timer reaches the preset test time, motor 5 will calculate and act based on the previous calculation result and the next test vacuum degree;

[0076] 2-6) Repeat steps 2-1) to 2-5) until the test ends. During the test, the readings of the ion pump power supply and vacuum gauge are continuously recorded. Based on the vacuum values ​​of the vacuum gauge 9 corresponding to the upper and lower ends of the vacuum gauge 4 on the ion pump, the pumping speed data of the current ion pump is automatically calculated and analyzed.

[0077] like Figure 3 The diagram shows the control interface of the main control unit of the intelligent automated testing system of the present invention. As can be seen from the diagram, in this embodiment, the measured ion pump parameter data includes: the vacuum degree of vacuum gauge 9, the current and voltage of ion pump power supply, the real-time pumping speed of ion pump 4, and the baking temperature data.

[0078] The system parameters to be set include: baking temperature, pump start time, baking time, and test time.

[0079] In summary, the application realizes full-automatic control of the test process, and realizes functions of automatic adjustment of the vacuum degree in the ion pump during the pumping speed test, full-automatic recording of the test data, automatic calculation according to the recorded data, etc. Since the whole process is automatic operation, the efficiency of the ion pump test and the accuracy of the test data statistics and data are greatly improved, and the uncertainty of the test conclusion caused by human factors is reduced.

[0080] The above merely describes the embodiments of the application, but is not intended to limit the protection scope of the application. Any modification, equivalent replacement, improvement, extension, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. An intelligent automated control system for ion pump testing, characterized in that, The utility model relates to a kind of ion pump parameter testing unit and vacuum system, comprising: Mechanical pump (1), molecular pump (2), gas delivery device, ion pump parameter testing unit and main control unit; The main control unit is connected with mechanical pump (1), molecular pump (2) and ion pump parameter testing unit respectively, for respectively controlling the start-stop of mechanical pump (1), molecular pump (2) and ion pump parameter testing unit;At the same time, set system parameters, test ion pump parameters in real time, obtain ion pump parameter data, and obtain ion pump test report in real time; The ion pump (4) of the ion pump parameter testing unit is connected with the mechanical pump (1), the molecular pump (2) and the ion pump (4) in series, and the gas inlet end of the ion pump (4) of the ion pump parameter testing unit is connected with the gas delivery device, for delivering gas to the ion pump.

2. The intelligent automated control system for ion pump testing of claim 1, wherein, The ion pump parameter testing unit comprises an angle valve (3), an ion pump (4), a gas control unit and an ion pump controller (8) connected with the main control unit; The ion pump controller (8) is connected with the control end of the ion pump (4), for controlling the action of the ion pump (4) according to the instruction sent by the main control unit; The input end of the ion pump (4) is connected with the output end of the molecular pump (2) through the angle valve (3); The gas inlet end of the ion pump (4) is connected with the gas delivery device, and the gas control unit is arranged between the ion pump (4) and the gas delivery device.

3. The intelligent automated control system for ion pump testing of claim 2, wherein, The gas control unit comprises a motor (5) and a fine adjustment valve (6) connected with the motor (5); The motor (5) is connected with the main control unit, for receiving the instruction of the main control unit to adjust the fine adjustment valve (6).

4. The intelligent automated control system for ion pump testing of claim 1, wherein, It also comprises a vacuum parameter detection unit, which comprises a vacuum gauge (9) and a vacuum gauge (7); The vacuum gauge (9) is connected with the main control unit, and the vacuum gauge (9) is connected with the vacuum gauge (7); The detection end of the vacuum gauge (7) is connected with the ion pump (4), for detecting the vacuum degree of the ion pump (4) and further obtaining the pumping speed of the ion pump.

5. The intelligent automated control system for ion pump testing of claim 1, wherein, The setting system parameters include baking temperature, pump starting time, baking time and test time.

6. The control method of an intelligent automated control system for ion pump testing according to any one of claims 1 to 5, characterized in that, The utility model relates to a kind of ion pump parameter testing unit and vacuum system, comprising: 1) connect the main control unit with mechanical pump, molecular pump, angle valve, ion pump power supply, vacuum gauge, mechanical pump (1), molecular pump (2) and motor for controlling fine adjustment valve respectively; 2) set each parameter of ion pump (4) test by main control unit, including: setting baking temperature, setting pump starting time, and setting baking time;Execute step 3) to start test; 3) the main control unit sets system parameters, controls ion pump (4) to execute pumping speed test; 4) in the process of pumping speed test, the vacuum degree of ion pump (4) is detected by vacuum gauge (9) according to the main control unit, and the test point is preset, the vacuum degree of ion pump (4) is obtained, the fine adjustment valve (6) is controlled, and then the gas intake is controlled to achieve test conditions, finally the pumping speed data of ion pump (4) is obtained, and the pumping speed test is completed. 5) After the end of the pumping speed test, the main control unit obtains all the pumping speed data during the test; after comparing and analyzing the pumping speed data recorded during the test, the main control unit automatically generates a test report of the ion pump according to all the test parameters of the ion pump.

7. The control method of an intelligent automated control system for ion pump testing of claim 6, wherein, The main control unit sets system parameters and controls the ion pump (4) to perform a pumping speed test, including the following steps: 1-1) The main control unit sends an opening instruction to the mechanical pump (1) and judges the relationship between the timer and the opening time of the mechanical pump (1); 1-2) When the time of the timer exceeds the set opening time of the mechanical pump (1), the main control unit sends an instruction to open the molecular pump (2) and judges the relationship between the timer and the opening time of the molecular pump (2) in real time; 1-3) When the time of the timer exceeds the set opening time of the molecular pump (2), the main control unit controls the molecular pump (2) to start baking, and judges the relationship between the timer and the set baking time; 1-4) When the time of the timer exceeds the set baking time, the main control unit opens the vacuum gauge (9) to prepare for measuring the ion pump (4); the main control unit judges the relationship between each unit and the timer according to the time of the timer, and completes the sequential closing of the angular valve (3), stopping the molecular pump (2) baking, closing the molecular pump, and closing the mechanical pump (1); 1-5) After completing steps 1-1) to 1-4), the main control unit performs a pumping test, opens the ion pump (4), and the vacuum gauge (9) detects the vacuum degree of the ion pump (4) in real time.

8. The control method of an intelligent automated control system for ion pump testing of claim 6, wherein, The step 4) is specifically: 2-1) After the test starts, the first time the gas intake is adjusted, the motor (5) rotates and is fixed to a certain angle, after the motor rotates, the vacuum degree is stabilized for 5 seconds, and a changed vacuum degree is obtained; 2-2) The main control unit fits the change in vacuum degree when the motor (5) rotates 0.1 degrees each time according to the last rotation angle of the motor (5) and the change in vacuum degree; 2-3) The main control unit compares the current vacuum degree with the preset vacuum degree, multiplies the 0.1-degree vacuum degree change size by the N zero-order value difference between the current vacuum degree and the preset vacuum degree, to calculate the angle of rotation required for the next adjustment; 2-4) Each time the fine adjustment valve (6) is adjusted, steps 2-1) to 2-3) are performed; 2-5) When the timer reaches the preset test time, the motor (5) calculates and acts according to the last calculation result and the next test vacuum degree; 2-6) Repeat steps 2-1) to 2-5) until the test is completed, and the readings of the ion pump power supply and the vacuum gauge are continuously recorded during the test, and the vacuum degree values of the vacuum gauges (9) corresponding to the upper and lower ends of the vacuum gauge (7) of the ion pump are automatically calculated and analyzed to obtain the pumping speed data of the current ion pump.

9. The control method of an intelligent automated control system for ion pump testing of claim 6, wherein, The ion pump parameter data includes the vacuum degree of the vacuum gauge, the current and voltage of the ion pump power supply, the real-time pumping speed of the ion pump (4), and the baking temperature data.

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