Auxiliary equipment for PZT-MEMS processing

Abstract

The invention relates to auxiliary equipment for PZT-MEMS machining, and relates to the technical field of sputtering tables, the auxiliary equipment comprises a cavity, a rotating frame is rotationally arranged in the cavity, the rotating axis of the rotating frame is vertical, a driving mechanism is arranged on the cavity, and the driving mechanism is used for driving the rotating frame to rotate; an overturning ring is rotationally arranged at the top of the rotating frame, the rotating axis of the overturning ring is horizontal, the rotating axis of the overturning ring passes through the circle center of the overturning ring, and an overturning mechanism is arranged on the rotating frame and used for driving the overturning ring to intermittently rotate by 180 degrees; a plurality of clamping blocks are evenly distributed on the inner side of the overturning ring in the circumferential direction at intervals, the clamping blocks slide in the radius direction of the overturning ring, and a clamping and placing piece used for driving the clamping blocks to slide is arranged on the overturning ring. The double-sided sputtering device has the effects that uniform sputtering deposition can be conveniently carried out on the double sides of the substrate, and the processing efficiency and quality of double-sided sputtering of the substrate are improved.

Description

Technical Field

[0001] This application relates to the field of sputtering stage technology, and in particular to an auxiliary device for PZT-MEMS processing. Background Technology

[0002] Sputtering deposition technology is a core process for the preparation of PZT (lead zirconate titanate) piezoelectric thin films in the field of microelectromechanical systems (MEMS), and the quality of the film directly affects the piezoelectric response and reliability of the device. During the sputtering process, the sputtering chamber maintains a high vacuum environment and applies radio frequency / DC energy, causing target atoms or ions to detach from the surface and deposit on the substrate to form a dense thin film.

[0003] In related technologies, the sputtering chamber of sputtering equipment is usually equipped with a sputtering stage for fixing the substrate. However, in sputtering operations, the substrate is usually fixedly mounted on the sputtering stage, and sputtering deposition can only be performed on one side of the substrate, resulting in the other side being unable to be sputtered and deposited. Furthermore, the sputtering deposition is uneven, affecting the sputtering deposition effect. When double-sided deposition is required, the substrate needs to be manually flipped, which is quite cumbersome. Summary of the Invention

[0004] To facilitate uniform sputtering deposition on both sides of the substrate and improve the processing efficiency and quality of double-sided sputtering of the substrate, this application provides an auxiliary device for PZT-MEMS processing.

[0005] This application provides an auxiliary device for PZT-MEMS processing, which adopts the following technical solution: An auxiliary device for PZT-MEMS processing includes a cavity, inside which a rotating frame is rotatably mounted. The rotation axis of the rotating frame is vertical. A driving mechanism is provided on the cavity to drive the rotating frame to rotate. A flipping ring is rotatably mounted on the top of the rotating frame. The rotation axis of the flipping ring is horizontal and passes through the center of the flipping ring. A flipping mechanism is provided on the rotating frame to drive the flipping ring to rotate intermittently by 180 degrees. Several clamping blocks are evenly and spaced along the circumferential direction on the inner side of the flipping ring. The clamping blocks slide along the radial direction of the flipping ring. The flipping ring is provided with clamping and placing components for driving the clamping blocks to slide. The inner sides of all the clamping blocks abut against the sidewall of the substrate and jointly clamp the substrate.

[0006] By adopting the above technical solution, during substrate processing, the clamping block is first driven to slide along the radius of the flipping ring using the clamping mechanism, thereby clamping and fixing the substrate inside the flipping ring, ensuring that neither the upper nor lower surface of the substrate is obstructed. Next, the drive mechanism is activated, causing the rotating frame to rotate, allowing the substrate to rotate along the axis inside the cavity. At this time, the sputtering equipment performs uniform sputtering deposition on one side of the substrate. Once one side of the substrate is deposited, the flipping mechanism is activated, driving the flipping ring to rotate intermittently by 180 degrees, flipping the substrate and exposing the side that was not previously sputtered. Subsequently, the rotating frame continues to rotate, performing uniform sputtering deposition on the other side of the substrate. This eliminates the need for manual substrate flipping, simplifying the operation process and facilitating uniform sputtering deposition on both sides of the substrate, thus improving the processing efficiency and quality of double-sided substrate sputtering.

[0007] Preferably, the drive mechanism includes a motor, which is fixed to the bottom of the cavity, and the drive shaft of the motor is fixedly connected to the bottom of the rotating frame.

[0008] By adopting the above technical solution, when the motor starts, the drive shaft directly drives the rotating frame to rotate synchronously. This rigid connection method effectively reduces energy loss in the power transmission process, enabling the rotating frame to obtain a stable and controllable speed.

[0009] Preferably, the flipping mechanism includes a driving gear, a driven gear, an extension shaft, a movable platform, locking teeth, a cam, a easing torsion spring, and a power component. The driven gear is coaxially fixed to the flipping ring, and the extension shaft is rotatably connected to the side wall of the rotating frame. The rotation axis of the extension shaft is parallel to the rotation axis of the flipping ring. The driving gear is sleeved on the extension shaft and rotatably connected to it. The driving gear and the driven gear mesh with each other, and the number of teeth of the driving gear is half the number of teeth of the driven gear. The cam is coaxially fixed to the extension shaft, one end of the easing torsion spring is fixedly connected to the cam, and the other end of the easing torsion spring is fixedly connected to the driving gear. The movable platform is movably connected to the rotating frame, and locking teeth are fixedly provided on the movable platform. The locking teeth extend into the tooth groove of the driving gear and abut against the tooth groove of the driving gear. The cam abuts against the movable platform and can push the locking teeth on the movable platform away from the tooth groove of the driving gear. The power component is used to drive the extension shaft to rotate.

[0010] By adopting the above technical solution, when the power component drives the extension shaft to rotate, the coaxially fixed cam rotates accordingly. When the cam's protrusion is not in contact with the movable table, the locking teeth extend into the tooth groove of the drive gear, locking the drive gear and preventing it from rotating with the extension shaft. At this time, the driven gear meshed with the drive gear also cannot rotate, and the substrate on the flip ring only rotates along the axial direction. Simultaneously, the rotation of the extension shaft only drives the cam to rotate, and the easing torsion spring gradually accumulates elastic potential energy. When the cam rotates to the point where its protrusion contacts the movable table, the cam pushes the movable table to move, causing the locking teeth to disengage from the tooth groove of the drive gear. At this time, the easing torsion spring releases its elastic potential energy, driving the drive gear to rotate rapidly until the cam's protrusion disengages from the movable table, at which point the locking teeth lock the drive gear again. Since the number of teeth on the driving gear is half that of the driven gear, the cam rotates once, the protrusion contacts the moving table once, the driving gear rotates once, and the driven gear rotates 180 degrees, thereby driving the flipping ring and the clamped substrate to complete a 180-degree flip, thus completing the flipping action of the substrate.

[0011] Preferably, a reinforcing frame is provided on the side wall of the rotating frame. The reinforcing frame includes a base plate and a side plate. The base plate is fixedly connected to the rotating frame. The side plate is fixed at the end of the base plate away from the rotating frame and extends upward. One end of the extension shaft is rotatably connected to the side wall of the rotating frame, and the other end of the extension shaft is rotatably connected to the side plate.

[0012] By adopting the above technical solution, the reinforcing frame improves the support stability of the extension shaft. The fixed connection between the base plate and the rotating frame, as well as the vertical extension of the side plate, form a rigid L-shaped structure, providing two-point support for the extension shaft. This effectively reduces the deflection and vibration of the extension shaft during rotation, ensuring the meshing accuracy of the driving gear and the driven gear. During equipment operation, the extension shaft needs to withstand multiple forces from the cam, the damping torsion spring, and the driving gear. Especially during the tilting process, the damping torsion spring generates a large torque when releasing energy. If the extension shaft support is unstable, it may lead to poor gear meshing, affecting the tilting accuracy and even causing equipment damage. The application of the reinforcing frame shortens the support span of the extension shaft, enhances its resistance to deformation, and makes power transmission smoother and more reliable.

[0013] Preferably, the movable platform is located between the drive gear and the base plate, and a thrust spring is provided between the movable platform and the base plate. One end of the thrust spring abuts against the movable platform, and the other end of the thrust spring abuts against the base plate. The thrust spring drives the movable platform away from the base plate.

[0014] By adopting the above technical solution, the thrust spring provides the reset driving force for the movable stage. When the cam rotates to the protrusion, the cam pushes the movable stage against the elastic force of the thrust spring to move towards the base plate, causing the locking teeth to disengage from the tooth groove of the drive gear and release the locked state. At this time, the slowing torsion spring releases energy to drive the drive gear to rotate, completing the flipping action of the substrate. After the flipping is completed, as the cam continues to rotate, the profile curve of the cam gradually decreases, and the thrust on the movable stage also weakens. The elastic restoring force of the thrust spring pushes the movable stage away from the base plate, causing the locking teeth to re-enter the tooth groove of the drive gear and restore the locked state.

[0015] Preferably, the base plate has a guide groove, a guide rod slides in the guide groove, the movable platform is fixedly connected to the guide rod, and the thrust spring is sleeved on the guide rod.

[0016] By adopting the above technical solution, the cooperation between the guide groove and the guide rod provides linear motion guidance for the movable table, ensuring stable and reliable meshing of the locking teeth and the drive gear. When the cam pushes the movable table to move, the guide rod slides linearly in the guide groove, limiting the movement trajectory of the movable table and minimizing the problem of poor meshing between the locking teeth and the gear due to lateral offset. At the same time, the guide rod also plays a role in protecting the spring, preventing the spring from bending or twisting laterally during compression and extension, extending the service life of the spring, and improving the reliability and stability of the entire mechanism.

[0017] Preferably, the movable platform is rotatably provided with rollers, and the cam abuts against the rollers.

[0018] By adopting the above technical solution, the roller transforms the sliding friction between the cam and the movable table into rolling friction, reducing the friction and wear of the contact surfaces. When the cam rotates and pushes the movable table, the roller rolls on the cam profile, making the motion transmission smoother and more stable.

[0019] Preferably, the power assembly includes a bevel gear, a gear ring, a driving pulley, a driven pulley, and a transmission belt. The gear ring is fixed inside the cavity, and the axis of the gear ring coincides with the rotation axis of the rotating frame. The bevel gear rotates at the bottom of the side wall of the rotating frame and meshes with the gear ring. The driving pulley is coaxially fixed with the bevel gear, and the driven pulley is coaxially fixed with the cam. The transmission belt is driven between the driving pulley and the driven pulley, with one end of the transmission belt sleeved on the driving pulley and the other end sleeved on the driven pulley.

[0020] By adopting the above technical solution, when the drive mechanism drives the rotating frame to rotate, the bevel gear fixed to the bottom of the side wall of the rotating frame revolves around the gear ring. Since the gear ring is fixed to the bottom of the cavity and its axis coincides with the rotation center of the rotating frame, the bevel gear will rotate on its own axis while revolving, due to meshing with the gear ring. The rotation of the bevel gear is transmitted to the transmission belt through the coaxially fixed driving pulley, and then the transmission belt drives the driven pulley to rotate, thereby driving the extension shaft and cam, which are coaxially fixed with the driven pulley, to rotate. In this way, the circular motion of the rotating frame is converted into the rotational motion of the cam, providing a stable power input for the tilting mechanism.

[0021] Preferably, a telescopic rod is provided between the clamping block and the inner side of the flipping ring, one end of the telescopic rod is fixedly connected to the clamping block, and the other end of the telescopic rod is fixedly connected to the inner side of the flipping ring.

[0022] By adopting the above technical solution, when the clamping component drives the clamping block to move, the telescopic rod extends and retracts as the clamping block slides. The rigid structure of the telescopic rod restricts the movement trajectory of the clamping block, minimizing the possibility of the clamping block shifting or swaying during movement, thereby ensuring accurate contact and reliable clamping between the clamping block and the sidewall of the substrate.

[0023] Preferably, the clamping component includes a knob and a screw. The screw passes through the inner and outer walls of the flip ring and is threadedly connected to the flip ring. One end of the screw is rotatably connected to the clamping block, and the knob is fixedly connected to the other end of the screw.

[0024] By employing the above technical solution, when the substrate needs to be clamped, the operator rotates a knob, causing the screw to rotate within the threaded hole of the flip ring. Since the screw is rotatably connected to the clamping block, and the clamping block's rotational freedom is restricted by a telescopic rod, the screw's rotational motion is converted into linear motion of the clamping block along the radial direction of the flip ring. By rotating multiple knobs, all clamping blocks can be moved towards the center until they abut against the sidewall of the substrate, achieving a secure clamping of the substrate.

[0025] In summary, this application includes at least one of the following beneficial technical effects: 1. By setting up a cavity, rotating frame, flipping ring, clamping block, clamping and placing parts, flipping mechanism, and motor, the motor drives the rotating frame to rotate, so that the substrate continuously rotates along the axis during the sputtering process, ensuring sputtering uniformity. The clamping block and clamping and placing parts ensure reliable clamping of the substrate and do not block the substrate surface, ensuring that both sides can be sputtered. The flipping mechanism drives the flipping ring to flip intermittently 180 degrees, which can complete the substrate flipping without manual intervention. 2. By setting up a drive gear, driven gear, extension shaft, movable table, locking teeth, cam, slowing torsion spring, power component, and reinforcing frame, the power component drives the extension shaft to rotate, which in turn drives the cam to rotate. Every time the cam rotates once, the cam's protruding part contacts the movable table once, causing the locking teeth to disengage from the drive gear. At this time, the slowing torsion spring releases its elastic potential energy, driving the drive gear to rotate quickly once, which in turn drives the driven gear and the flipping ring to complete a 180-degree flip. 3. By setting up bevel gears, toothed rings, driving pulleys, driven pulleys, and transmission belts, when the rotating frame rotates around the center of the cavity, the bevel gear fixed at its bottom rolls on the fixed toothed ring, generating a rotational motion. The power is transmitted to the extension shaft through the transmission belt, driving the cam to rotate, thereby triggering locking and releasing actions to achieve the flipping of the substrate. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of an auxiliary device for PZT-MEMS processing provided in the embodiments of this application.

[0027] Figure 2 This is a schematic diagram of the internal structure of a cavity in an auxiliary device for PZT-MEMS processing provided in an embodiment of this application.

[0028] Figure 3 yes Figure 2 Enlarged view of section A.

[0029] Figure 4 yes Figure 2 Enlarged view of section B.

[0030] Figure 5 yes Figure 2 Enlarged view of section C.

[0031] Explanation of reference numerals in the attached drawings: 1. Cavity; 11. Motor; 2. Rotating frame; 21. Tilting ring; 211. Clamping block; 212. Telescopic rod; 22. Clamping component; 221. Knob; 222. Screw; 23. Reinforcing frame; 231. Base plate; 2311. Guide groove; 232. Side plate; 3. Tilting mechanism; 31. Driving gear; 32. Driven gear; 33. Extension shaft; 34. Movable table; 341. Locking tooth; 342. Guide rod; 243. Roller; 35. Thrust spring; 36. Cam; 37. Slowing torsion spring; 38. Power assembly; 381. Bevel gear; 382. Gear ring; 383. Driving pulley; 384. Driven pulley; 385. Transmission belt. Detailed Implementation

[0032] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0033] This application discloses an auxiliary device for PZT-MEMS processing. (Refer to...) Figure 1 It includes a cavity 1, the interior of which forms a sputtering working space. A top cover is provided on the top of the cavity 1 to enclose the cavity 1, and a support leg is fixedly provided on the bottom of the cavity 1 to support the cavity 1.

[0034] Reference Figure 1 and Figure 2 A rotating frame 2 is rotatably mounted inside the cavity 1 via bearings. The rotating frame 2 is a U-shaped structure with an upward-facing opening, and its rotation axis is vertical. A drive mechanism, specifically a motor 11, is located at the bottom of the cavity 1. The motor 11 is fixed to the bottom of the cavity 1, and its drive shaft is fixedly connected to the center of the bottom of the rotating frame 2, for driving the rotating frame 2 to rotate at a uniform speed.

[0035] Reference Figure 2 A rotating frame 2 has a rotating ring 21 mounted on its top via a bearing. The rotating ring 21 is a centrally open annular structure. The rotation axis of the rotating ring 21 is horizontal and passes through its center. A rotating mechanism 3 is mounted on the rotating frame 2, which drives the rotating ring 21 to rotate intermittently by 180 degrees.

[0036] To facilitate reliable fixation of the substrate, refer to Figure 2 and Figure 5 A plurality of clamping blocks 211 are evenly and spaced along the circumferential direction on the inner side of the flipping ring 21. In this embodiment, four clamping blocks 211 are provided. A telescopic rod 212 is provided between each clamping block 211 and the inner side of the flipping ring 21. The telescopic rod 212 is specifically a sleeve-type rigid telescopic rod 212. One end of the telescopic rod 212 is fixedly connected to the clamping block 211, and the other end is fixedly connected to the inner side of the flipping ring 21, so as to restrict the clamping block 211 to slide only along the radial direction of the flipping ring 21. A buffer pad is also fixed on the inner side of the clamping block 211 to increase the friction between the clamping block 211 and the substrate and to provide buffering for the contact between the substrate and the clamping block 211.

[0037] Reference Figure 2 and Figure 5 A clamping element 22 is provided on the flip ring 21 to drive the clamping block 211 to slide. The clamping element 22 includes a knob 221 and a screw 222. The screw 222 passes through the inner and outer walls of the flip ring 21 and is threadedly connected to the flip ring 21. One end of the screw 222 is rotatably connected to the clamping block 211 through a bearing, and the other end of the screw 222 is fixedly connected to the knob 221. By rotating the knob 221, the screw 222 drives the clamping block 211 to move along the radial direction of the flip ring 21, thereby clamping or releasing the substrate. When the substrate is clamped by all the clamping blocks 211, both the upper and lower surfaces of the substrate are fully exposed, which facilitates direct sputtering deposition on the other side of the substrate after the flip ring 21 is flipped.

[0038] To facilitate the intermittent 180-degree rotation of the flipping ring 21, refer to... Figure 2 and Figure 3 A reinforcing frame 23 is fixedly installed on the side wall of the rotating frame 2. The reinforcing frame 23 includes a base plate 231 and a side plate 232. One end of the base plate 231 is fixedly connected to the side wall of the rotating frame 2, and the side plate 232 is located at the end of the base plate 231 away from the rotating frame 2 and extends vertically upward.

[0039] Reference Figure 3 The flipping mechanism 3 includes a driving gear 31, a driven gear 32, an extension shaft 33, a movable table 34, a locking tooth 341, a cam 36, a easing torsion spring 37, and a power assembly 38. The driven gear 32 is coaxially fixed to the flipping ring 21. The extension shaft 33 is rotatably connected to the side wall of the rotating frame 2. Specifically, one end of the extension shaft 33 is rotatably connected to the side wall of the rotating frame 2, and the other end of the extension shaft 33 is rotatably connected to the side plate 232, achieving stable rotation of the extension shaft 33. The rotation axis of the extension shaft 33 is parallel to the rotation axis of the flipping ring 21. The driving gear 31 is sleeved on the extension shaft 33 and rotatably connected to the extension shaft 33 through a bearing. The driving gear 31 and the driven gear 32 mesh with each other, and the number of teeth of the driving gear 31 is half the number of teeth of the driven gear 32. The cam 36 is coaxially fixed to the extension shaft 33, one end of the easing torsion spring 37 is fixedly connected to the cam 36, and the other end of the easing torsion spring 37 is fixedly connected to the driving gear 31.

[0040] Reference Figure 3 The movable platform 34 is movably connected to the rotating frame 2. Specifically, the movable platform 34 is located between the drive gear 31 and the base plate 231. A guide groove 2311 is provided on the base plate 231, and a guide rod 342 slides within the guide groove 2311. The top of the movable platform 34 is fixedly connected to the top of the guide rod 342. A thrust spring 35 is provided between the movable platform 34 and the base plate 231. One end of the thrust spring 35 abuts against the movable platform 34, and the other end abuts against the base plate 231. The thrust spring 35 is sleeved on the guide rod 342, and the thrust spring 35 drives the movable platform 34 away from the base plate 231.

[0041] Reference Figure 3 A locking tooth 341 is fixedly installed on the top of the movable platform 34. The locking tooth 341 extends into the tooth groove of the drive gear 31 and abuts against the tooth groove of the drive gear 31 to restrict the rotation of the drive gear 31. The cam 36 abuts against the movable platform 34 and can push the locking tooth 341 on the movable platform 34 away from the drive gear 31, thereby allowing the drive gear 31 to rotate freely. Specifically, a roller 243 is rotatably installed on the movable platform 34, and the cam 36 abuts against the roller 243.

[0042] Reference Figures 2 to 4The power assembly 38 drives the extension shaft 33 to rotate. The power assembly 38 includes a bevel gear 381, a gear ring 382, ​​a driving pulley 383, a driven pulley 384, and a transmission belt 385. The gear ring 382 is fixed to the bottom wall inside the cavity 1, and its axis coincides with the rotation axis of the rotating frame 2. The bevel gear 381 rotates at the bottom of the side wall of the rotating frame 2, meshing with the gear ring 382. The driving pulley 383 is coaxially fixed with the bevel gear 381, and the driven pulley 384 is coaxially fixed with the cam 36, i.e., fixed to the extension shaft 33. The transmission belt 385 is driven between the driving pulley 383 and the driven pulley 384. One end of the transmission belt 385 is sleeved on the driving pulley 383, and the other end is sleeved on the driven pulley 384. The transmission belt 385 can be further configured as a synchronous belt.

[0043] The implementation principle of an auxiliary device for PZT-MEMS processing according to an embodiment of this application is as follows: During the sputtering deposition of the substrate, the substrate is first placed inside the flipping ring 21. By rotating the knob 221, the screw 222 is rotated, causing the clamping blocks 211 to move towards the center along the radial direction of the flipping ring 21 until the buffer pads inside all the clamping blocks 211 are tightly abutted against the sidewall of the substrate, thus achieving a stable clamping of the substrate. At this time, one side of the substrate faces upward, and both the upper and lower surfaces of the substrate are fully exposed. Next, the motor 11 is started, and the motor 11 drives the rotating frame 2 to rotate at a constant speed around the vertical axis. The substrate then makes a circular motion within the cavity 1, and the sputtering equipment performs sputtering deposition on the upper surface of the substrate. Due to the continuous rotation of the substrate, target atoms or ions can be uniformly deposited on the substrate surface, improving the uniformity of sputtering deposition. During this process, as the rotating frame 2 rotates, the bevel gear 381 rolls on the gear ring 382. The bevel gear 381 rotates on its own axis while revolving with the rotating frame 2. The rotation of bevel gear 381 is transmitted to driven pulley 384 via drive pulley 383 and transmission belt 385, thereby driving extension shaft 33 and cam 36 to rotate. When the protruding part of cam 36 is not in contact with roller 243 of movable table 34, thrust spring 35 pushes movable table 34 closer to drive gear 31. Locking tooth 341 extends into the tooth groove of drive gear 31, locking drive gear 31. At this time, cam 36 rotates, drive gear 31 is locked, and torsion spring between cam 36 and drive gear 31 deforms and accumulates elastic potential energy. When cam 36 rotates until the protruding part contacts roller 243 of movable table 34, cam 36 pushes movable table 34 against the elastic force of thrust spring 35 to move towards base plate 231, causing locking tooth 341 to disengage from tooth groove of drive gear 31, and drive gear 31 to unlock. At this time, slowing torsion spring 37 releases the previously accumulated elastic potential energy, driving drive gear 31 to rotate rapidly one revolution. Since the number of teeth on the driving gear 31 is half that of the driven gear 32, the driven gear 32 drives the flipping ring 21 to rotate 180 degrees, completing the flipping of the substrate, with the previously undeposited lower surface facing upwards. The cam 36 continues to rotate, and after the protruding part disengages from the roller 243, the thrust spring 35 pushes the movable table 34 to reset, and the locking tooth 341 re-enters the tooth groove of the driving gear 31, locking the driving gear 31. The rotating frame 2 continues to rotate, and the sputtering equipment performs uniform sputtering deposition on the flipped surface of the substrate. This process is repeated, achieving efficient and uniform sputtering processing on both sides of the substrate, eliminating the need for manual intervention in substrate flipping, and improving the processing efficiency and quality of the substrate.

[0044] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An auxiliary device for PZT-MEMS processing, comprising a cavity (1), characterized in that: A rotating frame (2) is rotatably mounted inside the cavity (1). The rotation axis of the rotating frame (2) is vertical. A driving mechanism is mounted on the cavity (1) to drive the rotating frame (2) to rotate. A flipping ring (21) is rotatably mounted on the top of the rotating frame (2). The rotation axis of the flipping ring (21) is horizontal and passes through the center of the flipping ring (21). A flipping mechanism (3) is mounted on the rotating frame (2). The flipping mechanism (3) is used to drive the flipping ring (21) to rotate intermittently by 180 degrees; the inner side of the flipping ring (21) is evenly and intermittently distributed with a number of clamping blocks (211) along the circumferential direction, the clamping blocks (211) slide along the radial direction of the flipping ring (21), the flipping ring (21) is provided with clamping and placing parts (22) for driving the clamping blocks (211) to slide, and the inner side of all the clamping blocks (211) abuts against the side wall of the substrate and together clamps the substrate.

2. The auxiliary equipment for PZT-MEMS processing according to claim 1, characterized in that: The driving mechanism includes a motor (11), which is fixed to the bottom of the cavity (1), and the drive shaft of the motor (11) is fixedly connected to the bottom of the rotating frame (2).

3. The auxiliary equipment for PZT-MEMS processing according to claim 1, characterized in that: The flipping mechanism (3) includes a driving gear (31), a driven gear (32), an extension shaft (33), a movable table (34), a locking tooth (341), a cam (36), a slowing torsion spring (37), and a power assembly (38). The driven gear (32) is coaxially fixed with the flipping ring (21). The extension shaft (33) is rotatably connected to the side wall of the rotating frame (2). The rotation axis of the extension shaft (33) is parallel to the rotation axis of the flipping ring (21). The driving gear (31) is sleeved on the extension shaft (33) and rotatably connected to the extension shaft (33). The driving gear (31) and the driven gear (32) mesh with each other. The number of teeth of the driving gear (31) is the same as the number of teeth of the driven gear (32). Half of; the cam (36) is fixed coaxially with the extension shaft (33), one end of the easing torsion spring (37) is fixedly connected to the cam (36), and the other end of the easing torsion spring (37) is fixedly connected to the drive gear (31); the movable table (34) is movably connected to the rotating frame (2), and a locking tooth (341) is fixedly provided on the movable table (34). The locking tooth (341) extends into the tooth groove of the drive gear (31) and abuts against the tooth groove of the drive gear (31). The cam (36) abuts against the movable table (34) and can push the locking tooth (341) on the movable table (34) away from the tooth groove of the drive gear (31). The power component (38) is used to drive the extension shaft (33) to rotate.

4. The auxiliary equipment for PZT-MEMS processing according to claim 3, characterized in that: A reinforcing frame (23) is provided on the side wall of the rotating frame (2). The reinforcing frame (23) includes a base plate (231) and a side plate (232). The base plate (231) is fixedly connected to the rotating frame (2). The side plate (232) is fixed at the end of the base plate (231) away from the rotating frame (2) and extends upward. One end of the extension shaft (33) is rotatably connected to the side wall of the rotating frame (2), and the other end of the extension shaft (33) is rotatably connected to the side plate (232).

5. The auxiliary equipment for PZT-MEMS processing according to claim 4, characterized in that: The movable platform (34) is located between the drive gear (31) and the base plate (231). A thrust spring (35) is provided between the movable platform (34) and the base plate (231). One end of the thrust spring (35) abuts against the movable platform (34), and the other end of the thrust spring (35) abuts against the base plate (231). The thrust spring (35) drives the movable platform (34) away from the base plate (231).

6. The auxiliary equipment for PZT-MEMS processing according to claim 5, characterized in that: The base plate (231) is provided with a guide groove (2311), and a guide rod (342) slides in the guide groove (2311). The movable platform (34) is fixedly connected to the guide rod (342), and the thrust spring (35) is sleeved on the guide rod (342).

7. The auxiliary equipment for PZT-MEMS processing according to claim 3, characterized in that: The movable platform (34) is rotatably equipped with rollers (243), and the cam (36) abuts against the rollers (243).

8. The auxiliary equipment for PZT-MEMS processing according to claim 3, characterized in that: The power assembly (38) includes a bevel gear (381), a gear ring (382), a drive pulley (383), a driven pulley (384), and a transmission belt (385). The gear ring (382) is fixed inside the cavity (1), and the axis of the gear ring (382) coincides with the rotation axis of the rotating frame (2). The bevel gear (381) rotates at the bottom of the side wall of the rotating frame (2), and the bevel gear (381) meshes with the gear ring (382). The drive pulley (383) is coaxially fixed with the bevel gear (381), and the driven pulley (384) is coaxially fixed with the cam (36). The transmission belt (385) is driven between the drive pulley (383) and the driven pulley (384). One end of the transmission belt (385) is sleeved on the drive pulley (383), and the other end of the transmission belt (385) is sleeved on the driven pulley (384).

9. The auxiliary equipment for PZT-MEMS processing according to claim 1, characterized in that: A telescopic rod (212) is provided between the clamping block (211) and the inner side of the flipping ring (21). One end of the telescopic rod (212) is fixedly connected to the clamping block (211), and the other end of the telescopic rod (212) is fixedly connected to the inner side of the flipping ring (21).

10. An auxiliary device for PZT-MEMS processing according to claim 1, characterized in that: The clamping component (22) includes a knob (221) and a screw (222). The screw (222) passes through the inner and outer walls of the flip ring (21) and is threadedly connected to the flip ring (21). One end of the screw (222) is rotatably connected to the clamping block (211), and the other end of the knob (221) is fixedly connected to the screw (222).

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