Optical element switching device and optical quantity detection equipment

Abstract

The invention provides an optical element switching device and optical quantity detection equipment, and belongs to the field of semiconductor quantity detection optical devices. The optical element switching device comprises a multi-station optical element and a switching driving module; the switching driving module is installed in a light path of the quantity detection system and drives the multi-station optical element to move spatially for station switching. According to the invention, an element switching scheme is provided for the optical path of the semiconductor quantity detection equipment, element switching requirements of different spaces can be adapted according to requirements, the scheme switchability of the equipment is improved, and the device is convenient to popularize and apply in nanoscale and submicron-scale quantity detection scenes such as semiconductor overlay alignment, CD, defects and the like.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor quantity detection optical devices, specifically relating to an optical element switching device and an optical quantity detection equipment. Background Technology

[0002] In the field of semiconductor metrology, optical paths need to be adjusted, such as aperture stops, polarization stops, beam-shaped stops, and opening / closing. Therefore, to adapt to different optical scenarios, the corresponding optical distances need to be adjusted or switched. Traditionally, a motor drives rotation, which cannot adapt to multi-dimensional spatial adjustments. Therefore, a spatial position switching device for optical elements needs to be designed. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, the present invention aims to provide an optical element switching device and an optical quantity detection device, which can solve the above-mentioned problems.

[0004] An optical element switching device is disclosed, comprising a multi-station optical element and a switching drive module; the switching drive module is installed in the optical path of the measurement system and drives the multi-station optical element to move spatially to switch stations.

[0005] Furthermore, the multi-station optical element includes a plate and a transposition element disposed on the plate.

[0006] Furthermore, the plate of the multi-station optical element is a rectangular plate or a circular plate, and one or more transposition elements are set on the plate.

[0007] Furthermore, the transposition element can be an element with different aperture size, different light transmission shape, or different polarization direction.

[0008] Furthermore, the switching drive module employs spatial translation drive and / or rotation drive, and multi-station optical elements are located at the active end of the switching drive module.

[0009] Furthermore, the spatial translation drive mode switching drive module includes one or a combination of a transverse drive unit, a longitudinal drive unit, and a lifting drive unit.

[0010] Furthermore, the rotation drive mode switching drive module includes a rotation drive unit or a combination of a rotation drive unit and a spatial translation drive mode drive unit.

[0011] The present invention also provides an optical quantity detection device, which includes a frame, a movable stage, a measuring frame, a Z-axis drive module, a broadband quantity detection light source, a quantity detection main optical module, and an alignment module. The aforementioned optical element switching device is provided in the optical path of the quantity detection main optical module. The measuring frame is mounted on the frame, the Z-axis drive module is fixed to the measuring frame, and the broadband quantity detection light source, the quantity detection main optical module, and the alignment module are all mounted on the Z-axis drive module.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: This application provides a component switching scheme for the optical path of semiconductor metrology equipment, which can adapt to the component switching requirements of different spaces as needed, improves the switchability of the equipment scheme, and facilitates its application in nanometer and submicron level metrology detection scenarios such as semiconductor overlay alignment, CD, and defects. Attached Figure Description

[0013] Figures 1-3 Schematic diagrams of different examples of the optical element switching device for the spatial translation driving mode of the present invention; Figure 4 and Figure 5 Schematic diagrams of different examples of optical element switching devices including rotation drive modes; Figure 6 This is a schematic diagram of an optical quantity detection device.

[0014] In the picture: 10. Multi-station optical components; 11. Plate body; 12. Transposition components; 20. Switching drive module; 21. Horizontal movement drive unit; 22. Vertical movement drive unit; 23. Lifting drive unit; 24. Rotation drive unit. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0016] An optical element switching device, see Figures 1-5 The optical element switching device includes a multi-station optical element 10 and a switching drive module 20; the switching drive module is installed in the optical path of the quantity detection system and drives the multi-station optical element 10 to move in space to switch stations.

[0017] The multi-station optical element 10 includes a plate 11 and a transposition element 12 disposed on the plate 11.

[0018] In a specific example, the plate 11 of the multi-station optical element 10 is a rectangular plate. Figures 1-3 ) or circular plate ( Figure 4 and Figure 5 One or more transposition elements 12 are provided on the plate 11.

[0019] Among them, the transposition element 12 is an element with different aperture size, different light transmission shape or different polarization direction. The illustration shows an example with different aperture size.

[0020] Specific examples of transposition element 12 include apertures, polarizers, and filters. The illustrated example shows apertures with different aperture sizes.

[0021] In the case of a plate 11 with multiple transposition elements 12, the multiple transposition elements 12 can be arranged in a rectangular array, a ring array, or other similar manner.

[0022] The switching drive module 20 employs spatial translation drive and / or rotation drive, and the multi-station optical element 10 is located at the active end of the switching drive module.

[0023] The spatial translation drive mode switching drive module includes one or a combination of the transverse drive unit 21, the longitudinal drive unit 22, and the lifting drive unit 23.

[0024] Furthermore, the rotation drive mode switching drive module includes a rotation drive unit 24 or a combination of a rotation drive unit 24 and a spatial translation drive mode drive unit.

[0025] Figure 1 In the example, the switching drive module 20 includes a horizontal drive unit 21, a vertical drive unit 22, and a lifting drive unit 23. The plate 11 is mounted on the lifting drive unit 23 with its orientation facing upwards.

[0026] Figure 2 In the example, the switching drive module 20 includes a longitudinal traverse drive unit 22 and a lifting drive unit 23. The plate 11 is arranged laterally on the lifting drive unit 23.

[0027] Figure 3 In the example, the switching drive module 20 only includes the lifting drive unit 23, but it can also use only the horizontal drive unit 21 or the vertical drive unit 22. The plate 11 is arranged downwards on the lifting drive unit 23.

[0028] Figure 4In the example, the switching drive module 20 includes a horizontal drive unit 21, a vertical drive unit 22, and a rotation drive unit 24. Multiple transposition elements 12 with different apertures are formed in a ring matrix on the plate 11, as shown in the figure, representing apertures with different apertures. Of course, these can also be replaced with polarizers, filters, etc., or apertures of different shapes, such as cross-shaped light-transmitting holes, multi-square light-transmitting holes, multi-circular light-transmitting holes, etc.

[0029] Figure 5 In the example, the switching drive module 20 includes a horizontal drive unit 21, a vertical drive unit 22, a lifting drive unit 23, and a rotation drive unit 24.

[0030] Of course, the switching drive module 20 may also include only the rotation drive unit 24.

[0031] An optical quantity detection device, see Figure 6 The equipment includes a frame 100, a movable stage 200, a measuring frame 300, a Z-axis drive module 400, a broadband quantity detection light source 500, a quantity detection main optical module 600, and an alignment module 700. The aforementioned optical element switching device is provided in the optical path of the quantity detection main optical module 600. The measuring frame 300 is mounted on the frame 100, and the Z-axis drive module 400 is fixed to the measuring frame 300. The broadband quantity detection light source 500, the quantity detection main optical module 600, and the alignment module 700 are all mounted on the Z-axis drive module 400.

[0032] The device places the broadband quantity detection light source 500, the quantity detection main optical module 600 and the alignment module 700 on the Z-axis drive module 400, which is different from the traditional lifting mechanism which is placed on the moving stage 200. This simplifies the design and improves the stability of the probe.

[0033] Currently, this device and equipment are specifically used as optical quantity detection equipment for overlay alignment, and can also be extended to nanometer and submicron level quantity detection scenarios such as CD and defects in bright and dark fields of wafers.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical element switching device, characterized in that: The optical element switching device includes a multi-station optical element (10) and a switching drive module; the switching drive module is installed in the optical path of the quantity detection system and drives the multi-station optical element (10) to move in space to switch stations.

2. The optical element switching device according to claim 1, characterized in that: The multi-position optical element (10) includes a plate (11) and a transposition element (12) disposed on the plate (11).

3. The optical element switching device according to claim 2, characterized in that: The plate (11) of the multi-station optical element (10) is a rectangular plate or a circular plate, and one or more transposition elements (12) are provided on the plate (11).

4. The optical element switching device according to claim 3, characterized in that: The transposition element (12) is an element with different aperture size, different light transmission shape or different polarization direction.

5. The optical element switching device according to claim 1, characterized in that: The switching drive module adopts spatial translation drive and / or rotation drive, and the multi-station optical element (10) is set at the active end of the switching drive module.

6. The optical element switching device according to claim 5, characterized in that: The spatial translation drive mode switching drive module includes one or a combination of a transverse drive unit (21), a longitudinal drive unit (22), and a lifting drive unit (23).

7. The optical element switching device according to claim 6, characterized in that: The rotation drive mode switching drive module includes a rotation drive unit (24) or a combination of a rotation drive unit (24) and a space translation drive mode drive unit.

8. An optical quantity detection device, characterized in that: The device includes a frame (100), a movable stage (200), a measuring frame (300), a Z-axis drive module (400), a broadband quantity detection light source (500), a quantity detection main optical module (600), and an alignment module (700). The optical path of the quantity detection main optical module (600) is provided with the optical element switching device as described in any one of claims 1-7. The measuring frame (300) is mounted on the frame (100), the Z-axis drive module (400) is fixed to the measuring frame (300), and the broadband quantity detection light source (500), the quantity detection main optical module (600), and the alignment module (700) are all mounted on the Z-axis drive module (400).

Images