Rectification assembly of reflector and interferometer measurement and calibration system

Abstract

The invention discloses a rectification assembly of a reflector and an interferometer measurement and calibration system, and relates to the technical field of laser measurement. The rectifying assembly comprises a rectifying cover, the rectifying cover is arranged on the upstream of the reflecting mirror in the air bath direction, the rectifying cover comprises a first rectifying face, the first rectifying face is connected with the reflecting face, and the first rectifying face inclines towards the direction away from the plane where the reflecting face is located in the direction away from the reflecting mirror. The rectification assembly of the reflector ensures the stability of the gas environment, avoids the fluctuation of the gas pressure, and ensures the precision of the interferometer.

Description

Technical Field

[0001] This invention relates to the field of laser measurement technology, and in particular to a rectifier assembly for a reflector and an interferometer calibration system. Background Technology

[0002] An interferometer is a high-precision measuring instrument based on the principle of optical interference, widely used in precision measurement and other technical fields. During the operation of an interferometer, air fluctuations alter the refractive index distribution of the light path, causing phase noise, reducing the contrast of interference fringes, and affecting measurement accuracy.

[0003] In existing technologies, an air bath assembly is typically placed between the reflector and the receiver to continuously and stably blow out airflow to stabilize the airflow environment between the reflector and the receiver. However, when the airflow comes into contact with the reflector, it creates eddies near the reflector, causing distortion of the airflow on the reflector surface and fluctuations in air pressure, which affects the accuracy of the interferometer. Summary of the Invention

[0004] The purpose of this invention is to provide a rectifier assembly for a reflector and an interferometer calibration system, which ensures the stability of the gas environment, avoids pressure fluctuations, and guarantees the accuracy of the interferometer.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A rectifier assembly for a reflector, the reflector having a reflective surface, the rectifier assembly comprising:

[0007] A fairing is disposed upstream of the reflector along the air bath direction. The fairing includes a first rectifying surface connected to the reflective surface and inclined in a direction away from the reflector, away from the plane containing the reflective surface.

[0008] As an optional embodiment of the rectification component of the aforementioned reflector, the first rectification surface is tangential to the reflective surface.

[0009] As an optional embodiment of the rectifier assembly of the aforementioned reflector, the rectifier also includes a second rectifier surface, which is inclined in a direction away from the reflector towards the plane containing the reflector surface, so that the second rectifier surface is connected to the end of the first rectifier surface away from the reflector surface.

[0010] As an optional embodiment of the rectification component of the aforementioned reflector, the first rectification surface and the second rectification surface are tangentially connected.

[0011] As an optional solution for the rectification component of the aforementioned reflector, the angle between the first rectification surface and the second rectification surface at the connection position is set at an acute angle.

[0012] As an optional embodiment of the rectifier assembly of the aforementioned reflector, the first rectifier surface and the second rectifier surface are connected by a flow-splitting surface, and the flow-splitting surface is tangent to the first rectifier surface and the flow-splitting surface is tangent to the second rectifier surface.

[0013] As an optional embodiment of the rectification component of the aforementioned reflector, the rectification component further includes a guide plate, which is disposed downstream of the reflector along the air bath direction. The guide plate includes a guiding surface, which is connected to the reflecting surface.

[0014] As an optional embodiment of the above-mentioned reflector's rectifier assembly, the guiding surface is tangential to the reflecting surface.

[0015] As an optional embodiment of the rectifier assembly for the aforementioned reflector, the rectifier assembly is detachably connected to the reflector.

[0016] An interferometer includes a rectifier assembly for the mirror described above, and further includes a mirror, an air bath assembly, and a receiver, wherein the air bath assembly is configured to form a stable air bath environment between the mirror and the receiver, and the rectifier assembly is disposed on the mirror.

[0017] The beneficial effects of this invention are:

[0018] This invention provides a rectifier assembly for a reflector and an interferometer calibration system. The rectifier assembly includes a rectifier cover. Along the direction away from the reflector, the first rectifier surface of the rectifier cover is inclined in the direction away from the plane where the reflecting surface is located. This can guide the airflow blowing vertically towards the reflector to the front of the reflector, avoiding the airflow from meeting the airflow in front of the reflector when it changes direction sharply after encountering the reflector. This solves the problem of eddies generated in front of the reflector by the air bath airflow, ensuring the stability of the gas environment between the reflector and the receiver, avoiding air pressure fluctuations, and ensuring the accuracy of the interferometer. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the interferometer calibration system provided in Embodiment 1 of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of the reflector and rectifier assembly provided in Embodiment 1 of the present invention;

[0021] Figure 3 This is a schematic diagram of the structure of the reflector and rectifier assembly provided in Embodiment 2 of the present invention.

[0022] In the picture:

[0023] 1. Reflector; 11. Main body; 12. Reflecting surface;

[0024] 2. Air bath assembly;

[0025] 3. Receiver;

[0026] 4. Fairing; 41. First rectifier surface; 42. Second rectifier surface; 43. Splitting surface;

[0027] 5. Deflector plate; 51. First deflector section; 52. Second deflector section. Detailed Implementation

[0028] Embodiments of the present invention are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0029] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0030] Unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0031] Unless otherwise expressly specified and limited, "above" or "below" a second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of a second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" of a second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0033] Example 1

[0034] This embodiment provides an interferometer calibration system, such as Figure 1 As shown, the interferometer calibration system includes a light source, a reflector 1, and a receiver 3. The light emitted from the light source is split into two or more coherent beams by a beam splitter. One beam is directed towards the reflector 1 and then reflected by the reflector 1 towards the receiver 3. This beam has a fixed optical path and can therefore be used as a reference optical path. The other beams are directed towards the object to be measured and the reflected light is directed towards the receiver 3. The coherent beams are then recombined after passing through different paths to form interference fringes. Physical quantities (such as length, refractive index, surface morphology, etc.) are measured by analyzing the changes in the fringes.

[0035] Because interferometers are highly precise, fluctuations in the air through which the light path passes can alter the refractive index distribution, causing phase noise, reducing the contrast of interference fringes, and affecting measurement accuracy. To ensure a stable air environment, the interferometer calibration system also includes an air bath assembly 2, which is configured to create a stable air bath environment between the reflector 1 and the receiver 3. A rectifier assembly is located on the reflector 1.

[0036] For ease of description, the air bath assembly 2 can drive the airflow downwards. The reflector 1 includes a main body 11 and a reflecting surface 12 disposed at the front end of the main body 11. The front end of the main body 11 refers to the end of the main body 11 facing the receiver 3, and the rear end of the main body 11 refers to the end of the main body 11 facing away from the receiver 3. The main body 11 serves to stably fix the reflector 1 within the interferometer, while the reflecting surface 12 is used to reflect light.

[0037] The direction of the air bath airflow is perpendicular to the upper surface of the main body 11. When the air bath airflow makes a large change of direction upon contacting the main body 11, it encounters the airflow in front of the reflector 1, which will form vortices or turbulence in front of the reflector 1. This causes the airflow on the surface of the reflector 1 to be distorted and the air pressure to fluctuate, thus affecting the accuracy of the interferometer.

[0038] like Figure 1 and Figure 2 As shown, in order to solve the above problems, this embodiment also provides a rectifier assembly (hereinafter referred to as rectifier assembly) for the reflector 1. The rectifier assembly includes a rectifier cover 4, which is disposed upstream of the reflector 1 along the air bath direction. The rectifier cover 4 includes a first rectifier surface 41, which is connected to the reflector surface 12. Along the direction away from the reflector 1, the first rectifier surface 41 is inclined in the direction away from the plane where the reflector surface 12 is located.

[0039] Along the direction away from the reflector 1, the first rectifying surface 41 of the fairing 4 is tilted away from the plane where the reflector 12 is located. This can guide the airflow that is blown vertically toward the reflector 1 above the reflector 1 to the front of the reflector 1, thereby solving the problem of eddies generated in front of the reflector 1 by the air bath airflow, ensuring the stability of the gas environment between the reflector 1 and the receiver 3, avoiding air pressure fluctuations, and ensuring the accuracy of the interferometer.

[0040] Preferably, the first rectifying surface 41 is tangentially arranged to the reflecting surface 12. This structure further improves the smoothness between the first rectifying surface 41 and the reflecting surface 12, which guide the flow direction of the air bath. This allows the air bath, which is deflected by the rectifier 4, to gradually change its flow direction to be the same as the flow direction of the air bath in front of the reflector 1. This enables the two air baths to merge stably, avoiding disturbances and thus improving the stability of the gas environment between the reflector 1 and the receiver 3.

[0041] In this embodiment, the fairing 4 further includes a second rectifying surface 42, which is inclined towards the plane containing the reflecting surface 12 in a direction away from the reflector 1, so that the second rectifying surface 42 is connected to the end of the first rectifying surface 41 away from the reflecting surface 12. The second rectifying surface 42 can guide the airflow of the gas bath above the reflector 1 that is far from the reflecting surface 12 in a direction away from the reflecting surface 12, thereby avoiding the air bath airflow from affecting the airflow in front of the reflecting surface 12 and reducing the disturbance to the gas in front of the reflecting surface 12.

[0042] Preferably, the first rectifying surface 41 and the second rectifying surface 42 are tangentially connected. This structure enables the airflow in the air bath above the reflector 1 to be smoothly separated and flow along the first rectifying surface 41 or the second rectifying surface 42, ensuring the stability of the airflow.

[0043] like Figure 1 and Figure 2 As shown, the first rectifying surface 41 is inclined backward in an upward direction, and the slope of the inclination gradually decreases. That is to say, the first rectifying surface 41 is an upwardly convex arc surface, which can gradually guide the airflow of the air bath above the reflector 1 to the same flow direction as the airflow of the air bath at the front end of the reflector 1.

[0044] Similarly, the second rectifier surface 42 is inclined forward in an upward direction, and the slope of the inclination gradually decreases. The second rectifier surface 42 is set as a mirror image of the first rectifier surface 41, and the second rectifier surface 42 and the first rectifier surface 41 together form a semi-circular arc surface.

[0045] In this embodiment, the rectification assembly also includes a guide plate 5, which is disposed downstream of the reflector 1 along the air bath direction. The guide plate 5 includes a guide surface that is connected to the reflector 12. When the air bath airflow in front of the reflector 1 flows to the area below the reflector 12, the air bath airflow will flow to the area below the main body 11. Therefore, the air bath airflow flows backward at this time, which can easily cause turbulence in the airflow near the area below the reflector 12, forming turbulence or eddies. The guide plate 5 can extend the turbulent area downward, away from the reflector 12, thereby reducing the disturbance to the airflow near the reflector 12, ensuring the stability of the gas environment between the reflector 1 and the receiver 3, avoiding air pressure fluctuations, and ensuring the accuracy of the interferometer.

[0046] Furthermore, the guide surface is tangential to the reflective surface 12 to prevent the airflow in front of the reflective surface 12 from becoming turbulent due to a rapid change in flow direction when it flows along the reflective surface 12 to the guide surface, thereby further improving the stability of the airflow when it leaves the reflective surface 12.

[0047] Preferably, the guiding surface includes a first guiding section 51 and a second guiding section 52. The first guiding section 51 extends away from the reflector 1 along the air bath direction. The second guiding section 52 is connected to the end of the first guiding section 51 away from the reflector 1 and is inclined backward along the direction away from the reflector 1. The first guiding section 51 can serve as an extension of the reflector 12, ensuring that the air bath airflow maintains a constant flow direction within a certain distance away from the reflector 12. The second guiding section 52 can continue to guide the air bath airflow, directing it to the area below the main body 11, further distancing the turbulent position of the air bath airflow away from the guiding surface from the reflector 12.

[0048] Understandably, the rectifier needs to be able to connect to the existing reflector 1 and also needs to be fixed to the reflector 1 to ensure the stability of the rectifier. Therefore, the rectifier and the reflector 1 are detachably connected.

[0049] Specifically, the fairing 4 and the deflector 5 are fixed to the reflector 1 by adhesive or magnetic attraction, and are easy for operators to disassemble.

[0050] Example 2

[0051] This embodiment is based on Embodiment 1, and the structure of the fairing 4 has been improved.

[0052] like Figure 3As shown, in this embodiment, the angle between the first rectifying surface 41 and the second rectifying surface 42 at the connection position is an acute angle (i.e., the first rectifying surface 41 and the second rectifying surface 42 are set at an acute angle at the connection position). This structure allows the airflow blowing towards the shroud 4 to be split by the angle between the first rectifying surface 41 and the second rectifying surface 42. Since this angle is acute, the change in the direction of the airflow caused by the first rectifying surface 41 and the second rectifying surface 42 during the splitting process is relatively gradual, effectively avoiding disturbances and turbulence caused by a large change in the flow direction of the airflow when it contacts the top of the shroud 4.

[0053] Preferably, the first rectifying surface 41 and the second rectifying surface 42 are connected by a flow-dividing surface 43, and the flow-dividing surface 43 is tangent to the first rectifying surface 41 and the second rectifying surface 42. The flow-dividing surface 43 is an arc surface. The arrangement of the flow-dividing surface 43 can ensure that there are no sharp corners on the top of the shroud 4, avoiding stress concentration at sharp corners that could easily cause breakage. At the same time, the flow-dividing surface 43 is tangent to both the first rectifying surface 41 and the second rectifying surface 42, which can ensure the stability of the airflow during the air bath.

[0054] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A rectifier assembly for a reflector, the reflector (1) having a reflective surface (12), characterized in that, include: A fairing (4) is disposed upstream of the reflector (1) along the air bath direction. The fairing (4) includes a first rectifying surface (41), which is connected to the reflector (12) and is inclined in a direction away from the reflector (1) toward the plane where the reflector (12) is located.

2. The rectifier assembly of the reflector according to claim 1, characterized in that, The first rectifying surface (41) is tangential to the reflecting surface (12).

3. The rectifier assembly of the reflector according to claim 1, characterized in that, The fairing (4) further includes a second rectifier surface (42), and along the direction away from the reflector (1), the second rectifier surface (42) is inclined toward the plane where the reflector surface (12) is located, so that the second rectifier surface (42) is connected to the end of the first rectifier surface (41) away from the reflector surface (12).

4. The rectifier assembly of the reflector according to claim 3, characterized in that, The first rectifying surface (41) is tangentially connected to the second rectifying surface (42).

5. The rectifier assembly of the reflector according to claim 3, characterized in that, The angle between the first rectifying surface (41) and the second rectifying surface (42) at the connection position is set at an acute angle.

6. The rectifier assembly of the reflector according to claim 5, characterized in that, The first rectifier surface (41) and the second rectifier surface (42) are connected by a diverter surface (43), and the diverter surface (43) is tangent to the first rectifier surface (41) and the diverter surface (43) is tangent to the second rectifier surface (42).

7. The rectifier assembly of the reflector according to claim 1, characterized in that, The rectifier assembly also includes a guide plate (5), which is disposed downstream of the reflector (1) along the air bath direction. The guide plate (5) includes a guide surface, which is connected to the reflector (12).

8. The rectifier assembly for the reflector according to claim 7, characterized in that, The guiding surface is tangential to the reflecting surface (12).

9. The rectifier assembly of the reflector according to any one of claims 1 to 8, characterized in that, The rectifier assembly is detachably connected to the reflector (1).

10. An interferometer calibration system, characterized in that, The rectifier assembly including the reflector according to any one of claims 1 to 9 further includes a reflector (1), an air bath assembly (2) and a receiver (3), wherein the air bath assembly (2) is configured to form a stable air bath environment between the reflector (1) and the receiver (3), and the rectifier assembly is disposed on the reflector (1).

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