Valve device

Abstract

A valve device (10) is provided with: a nozzle (66) having a flow hole (100) through which a fluid flows; a support member (62) that supports the nozzle; a valve body (68) which has a piezoelectric element (116) and which opens and closes an opening (102) of the flow-through hole by being driven by the piezoelectric element; and a position adjustment mechanism (76) for adjusting the position of the nozzle with respect to the valve body. The position adjustment mechanism has a biasing member (106) that biases the nozzle toward the valve body, and a stopper member (132) that prevents movement of the nozzle by the biasing member by coming into contact with the nozzle.

Description

Technical Field

[0001] This invention relates to a valve device. Background Technology

[0002] For example, U.S. Patent Application Publication No. 2012 / 0161045 discloses a valve device comprising a nozzle having a flow orifice for fluid flow and a valve core having a piezoelectric element. The valve core opens and closes the opening of the flow orifice by actuation of the piezoelectric element.

[0003] A valve device that is expected to be able to open and close the flow orifice of the nozzle effectively. Summary of the Invention

[0004] The purpose of this invention is to solve the above-mentioned problems.

[0005] One aspect of the present invention is a valve device comprising: a nozzle having a flow orifice for fluid flow; a support member supporting the nozzle; a valve core having a piezoelectric element and opening and closing the opening of the flow orifice by actuation of the piezoelectric element; and a position adjustment mechanism for adjusting the position of the nozzle relative to the valve core.

[0006] According to the present invention, the opening of the flow hole of the nozzle can be opened and closed effectively. Attached Figure Description

[0007] The above-described objects, features, and advantages can be readily understood from the following description of embodiments with reference to the accompanying drawings.

[0008] Figure 1 This is a partially omitted perspective view of a valve device according to one embodiment of the present invention.

[0009] Figure 2 This is a partial sectional front view of the valve assembly.

[0010] Figure 3 This is a longitudinal sectional view of the valve assembly.

[0011] Figure 4 This is a partial, omitted longitudinal sectional view of the valve assembly.

[0012] Figure 5 It is along Figure 3 A cross-sectional view of the VV line.

[0013] Figure 6 It is along Figure 5 A sectional view along line VI-VI.

[0014] Figure 7 This is an exploded 3D view of the air supply valve unit.

[0015] Figure 8 It is along Figure 6 A cross-sectional view of line VIII-VIII.

[0016] Figure 9 It is along Figure 3 A cross-sectional view of the IX-IX line.

[0017] Figure 10 This is a diagram illustrating the operation of the air supply valve unit. Detailed Implementation

[0018] The valve device 10 of one embodiment of the present invention will now be described with reference to the accompanying drawings. Figure 1 As shown, the valve device 10 in this embodiment is an electro-pneumatic regulator for controlling the pressure of the output fluid (pressure fluid). The pressure fluid is, for example, compressed air. However, the pressure fluid is not limited to compressed air and may be other gases. Furthermore, the valve device 10 is not limited to an electro-pneumatic regulator.

[0019] The valve device 10, for example, is integrally formed into a longitudinally elongated cuboid shape. Figures 1-3 As shown, the valve device 10 includes a main body 12, a housing 14, an air supply valve unit 16, and an exhaust valve unit 18.

[0020] The main body 12 has a base 20 and a connecting portion 22. The base 20 extends in the width direction (X direction) of the valve device 10. Figures 2-4 As shown, an air supply port 24 and an exhaust port 26 are formed on one end face (the end face in the X1 direction) along the length of the base 20. The air supply port 24 and the exhaust port 26 are staggered in the height direction (Z direction) of the valve device 10. An output port 28 is formed on the other end face (the end face in the X2 direction) along the length of the base 20. For example, bolt holes (not shown) for mounting brackets or the like are formed on the bottom surface (facing the Z1 direction) of the base 20.

[0021] An air supply pipe (not shown) for supplying pressurized fluid to the valve assembly 10 is connected to the air supply port 24. The exhaust port 26 is an orifice for discharging pressurized fluid to the outside of the valve assembly 10. An outlet pipe (not shown) for directing pressurized fluid to a fluid pressure device (not shown) is connected to the outlet port 28.

[0022] like Figure 3 As shown, the connecting portion 22 is mounted to the surface of the base 20 facing the opposite side (Z2 direction) to the bottom surface by bolts 30. The connecting portion 22 protrudes further in the Z2 direction than the base 20. An air supply valve unit 16 and an exhaust valve unit 18 are mounted on the protruding end of the connecting portion 22. The air supply valve unit 16 is arranged in the X1 direction of the connecting portion 22, and the exhaust valve unit 18 is arranged in the X2 direction of the connecting portion 22.

[0023] A fluid flow path 32 for supplying pressurized fluid is formed in the main body 12. The fluid flow path 32 includes a supply flow path 34, an intermediate flow path 36, an output flow path 38, and an exhaust flow path 40. The supply flow path 34 guides the pressurized fluid supplied to the air supply port 24 to the air supply valve unit 16. The intermediate flow path 36 guides the pressurized fluid discharged from the air supply valve unit 16 to the exhaust valve unit 18. The output flow path 38 guides the pressurized fluid discharged from the air supply valve unit 16 to the intermediate flow path 36 to the output port 28. The exhaust flow path 40 guides the pressurized fluid discharged from the exhaust valve unit 18 to the exhaust port 26.

[0024] The air supply path 34 includes a first air supply path 34a and a second air supply path 34b. The first air supply path 34a is formed at the base 20. One end of the first air supply path 34a is connected to the air supply port 24. The second air supply path 34b is formed at the connecting portion 22. The second air supply path 34b extends in the Z direction. One end of the second air supply path 34b is connected to the other end of the first air supply path 34a. The other end of the second air supply path 34b is connected to the air supply valve unit 16.

[0025] The intermediate flow path 36 extends through the connecting portion 22 in the width direction (X direction). The intermediate flow path 36 is located further in the Z2 direction than the second air supply path 34b.

[0026] The output flow path 38 includes a first output flow path 38a and a second output flow path 38b. The first output flow path 38a is formed at the connecting portion 22. One end of the first output flow path 38a is connected to the intermediate flow path 36. The second output flow path 38b is formed at the base portion 20. One end of the second output flow path 38b is connected to the other end of the first output flow path 38a. The other end of the second output flow path 38b is connected to the output port 28.

[0027] The exhaust flow path 40 includes a first exhaust flow path 40a and a second exhaust flow path 40b. The first exhaust flow path 40a is formed at the connecting portion 22. One end of the first exhaust flow path 40a is connected to the exhaust valve unit 18. A first output flow path 38a is located between the first exhaust flow path 40a and the second supply flow path 34b. The second exhaust flow path 40b is formed at the base 20. One end of the second exhaust flow path 40b communicates with the other end of the first exhaust flow path 40a. The other end of the second exhaust flow path 40b communicates with the exhaust port 26.

[0028] like Figure 4As shown, the main body 12 has a sensor mounting portion 44 for mounting a pressure sensor 42. The sensor mounting portion 44 is integrally formed with the connecting portion 22. The sensor mounting portion 44 is provided to cover the second output flow path 38b of the base 20 from the Z2 direction. A through hole 46 opening into the second output flow path 38b is formed in the sensor mounting portion 44. The through hole 46 has a small diameter portion 48 and a large diameter portion 50. The small diameter portion 48 opens in the Z2 direction of the sensor mounting portion 44. The large diameter portion 50 communicates with the small diameter portion 48 and opens in the Z1 direction of the sensor mounting portion 44.

[0029] The pressure sensor 42 includes a sensor body 52 and an inlet tube 54. The sensor body 52 is located outside the body 12. In other words, the sensor body 52 is disposed outside the fluid flow path 32. The inlet tube 54 protrudes from the sensor body 52 through a through hole 46 into the second output flow path 38b. The inlet tube 54 introduces pressurized fluid flowing through the second output flow path 38b into the sensor body 52. ​​A sensor sealing member 56 is provided in the inlet tube 54, which seals the inlet tube 54 and the sensor mounting portion 44.

[0030] The sensor sealing component 56 is an annular rubber seal. The sensor sealing component 56 is disposed on the large-diameter portion 50. The sensor sealing component 56 is separate from the sensor body 52. ​​The sensor mounting portion 44 includes a sealing support portion 58 located between the sensor sealing component 56 and the sensor body 52, and supports the sensor sealing component 56.

[0031] like Figures 1-3 As shown, the housing 14 is disposed in the Z2 direction of the base 20. Inside the housing 14 are housed an air supply valve unit 16, an exhaust valve unit 18, a pressure sensor 42, and a control unit 19 (see reference). Figure 6 The housing 14 is provided with a connector 60 for connecting to external controllers, etc.

[0032] like Figure 6 and Figure 7 As shown, the air supply valve unit 16 includes: a support component 62, a cover component 64, a nozzle 66, a valve core 68, a resin plate 70, a pressing component 72, a valve core force application component 74, and a position adjustment mechanism 76.

[0033] The support member 62 is made of, for example, a rigid resin material. The support member 62 has a support body 78 and a nozzle support portion 80. The support body 78 extends in the Z direction. The support body 78 has a receiving chamber 82 that houses the valve core 68. The receiving chamber 82 opens in the Y1 direction.

[0034] The nozzle support portion 80 protrudes from the support body 78 in the Y2 direction. The nozzle support portion 80 is located at the end of the support body 78 in the Z1 direction. A recess 86 is formed in the nozzle support portion 80, which is circular in shape and recessed from the bottom surface 84 of the receiving chamber 82 in the Y2 direction. Figure 6 A nozzle 66 is disposed in the recess 86. The nozzle support 80 is mounted to the surface of the connecting part 22 facing the X1 direction (see reference) by bolts or the like (not shown). Figure 3 ).

[0035] like Figure 5 and Figure 9 As shown, an inlet flow path 88 and an outlet flow path 90 are formed in the support member 62. Figure 5 As shown, the inlet flow path 88 guides the pressurized fluid from the supply flow path 34 into the interior of the recess 86. The inlet flow path 88 opens on the inner surface of the recess 86. Figure 9 As shown, the outlet flow path 90 guides the pressurized fluid flowing inside the support member 62 to the intermediate flow path 36. The outlet flow path 90 opens at the bottom surface 84 of the receiving chamber 82 (see reference). Figure 7 ).

[0036] like Figure 6 and Figure 7 As shown, the cover component 64 is mounted to the support body 78 via a threaded component 92 in a manner that blocks the opening in the Y1 direction of the receiving chamber 82. The cover component 64 is made of metal. A sealing component 94 is provided between the support body 78 and the cover component 64 to prevent pressurized fluid from leaking to the outside.

[0037] The nozzle 66 has a nozzle body 96 and a nozzle sealing component 98. The nozzle body 96 is made of a metal material, for example. Examples of metal materials constituting the nozzle body 96 include aluminum, brass, and stainless steel. The metal material may also undergo surface treatments such as chromate treatment.

[0038] like Figure 6 As shown, the nozzle body 96 has a flow hole 100 for the flow of pressurized fluid. An opening 102 of the flow hole 100 is formed on the top surface of the nozzle body 96 facing the Y1 direction. A first mounting recess 104 is formed on the base end surface of the nozzle body 96 facing the Y2 direction. The first mounting recess 104 communicates with the flow hole 100. A force-applying member 106 forming a position adjustment mechanism 76 is disposed in the first mounting recess 104.

[0039] The force-applying component 106 applies force to the nozzle body 96 in the Y1 direction. The force-applying component 106 is, for example, a compression coil spring. Alternatively, the force-applying component 106 can be a spring component other than a compression coil spring, or it can be an elastically deformable rubber component, etc. An internal flow path 110 is provided between the nozzle body 96 and the bottom surface 108 of the recess 86, allowing pressurized fluid to flow. The internal flow path 110 communicates with the inlet flow path 88 (see reference). Figure 5 The nozzle sealing component 98 seals the area between the outer peripheral surface of the nozzle body 96 and the inner peripheral surface of the recess 86.

[0040] like Figure 6 and Figure 7 As shown, valve core 68 is disposed in receiving chamber 82. Valve core 68 has plate member 112, contact portion 114, and piezoelectric element 116. Valve core 68 opens and closes opening 102 of flow hole 100 (see reference) by actuation of piezoelectric element 116. Figure 6 and Figure 10 The plate member 112 is a flexible rectangular metal plate extending along the Z direction. A positioning hole 120 is formed at one end (the end in the Z2 direction) of the plate member 112 at its corner, for inserting a pair of protrusions 118 provided on the bottom surface 84 of the receiving chamber 82 (see reference). Figure 7 The other end of the plate member 112 (the end in the Z1 direction) covers a portion of the recess 86 from the Y1 direction.

[0041] The contact portion 114 is mounted on the surface of the plate member 112 facing the Y2 direction. The contact portion 114 and the opening 102 of the flow hole 100 are opposite to each other. The contact portion 114 is made of a resin material such as rubber that can be elastically deformed. The contact portion 114 closes the opening 102 of the flow hole 100 by airtightly contacting the top surface of the nozzle body 96.

[0042] The piezoelectric element 116 is a rectangular plate extending along the extension direction (Z direction) of the plate member 112. Multiple piezoelectric elements 116 are stacked. In this embodiment, two piezoelectric elements 116 are stacked. Alternatively, a single piezoelectric element 116 may also be used. Furthermore, in the air supply valve unit 16, three or more piezoelectric elements 116 may be stacked. The piezoelectric element 116 is mounted on the surface of the plate member 112 facing the Y1 direction. At the Z2 direction end of the valve core 68, multiple joints 122 are provided, which engage cables (not shown) for driving the piezoelectric element 116. The joints 122 are, for example, welded or brazed portions.

[0043] The resin board 70 is insulating. The resin board 70 extends in a rectangular shape along the extension direction (Z direction) of the board component 112. For example... Figures 6-8As shown, a protrusion 124 protruding in the Y2 direction is provided at one end (the end in the Z2 direction) of the resin plate 70. The protrusion 124 contacts one end of the valve core 68. A clearance groove 126 is formed in the middle portion of the protrusion 124 in the X direction for the clearance of multiple joints 122 (see reference). Figure 8 ).

[0044] A groove 128 is formed on the side of the resin plate 70 opposite to the protrusion 124. The groove 128 extends along the entire length of the resin plate 70 in the X direction. A pressing member 72 is disposed between the bottom surface of the groove 128 and the cover member 64. The pressing member 72 presses the protrusion 124 toward the valve core 68. As a result, the valve core 68 is held relative to the support member 62. The pressing member 72 is, for example, a leaf spring. However, the pressing member 72 is not limited to a leaf spring.

[0045] like Figure 6 As shown, a second mounting recess (mounting recess) 130 for mounting the valve core force-applying component 74 is formed at the other end (the end in the Z1 direction) of the resin plate 70. The valve core force-applying component 74 applies force to the other end of the valve core 68 toward the nozzle body 96. The valve core force-applying component 74 is a metal spring component. The valve core force-applying component 74 is, for example, a compression coil spring. Viewed from the Y direction, the valve core force-applying component 74 and the contact portion 114 overlap each other (see reference). Figure 7 ).

[0046] When no voltage is applied to the piezoelectric element 116, the valve core 68 blocks the opening 102 of the flow hole 100. That is, the contact portion 114 of the valve core 68 is pressed against the top surface of the nozzle 66 by the force applied by the valve core force-applying member 74. When no voltage is applied to the piezoelectric element 116, the valve core 68 cuts off the connection between the inlet flow path 88 and the outlet flow path 90 (see reference). Figure 5 and Figure 9 ).

[0047] like Figure 10 As shown, when voltage is applied to the piezoelectric element 116, the valve core 68 opens the opening 102 of the flow hole 100. Specifically, when voltage is applied to the piezoelectric element 116, a contraction force in the Z direction acts on the piezoelectric element 116. The magnitude of this contraction force is proportional to the magnitude of the voltage applied to the piezoelectric element 116. When the contraction force acts on the piezoelectric element 116, the other end of the plate member 112 elastically deforms in a warping manner in the Y1 direction. As a result, the contact portion 114 separates from the top surface of the nozzle 66, and the flow hole 100 opens. With voltage applied to the piezoelectric element 116, the inlet flow path 88 and the outlet flow path 90 are interconnected. The opening degree of the air supply valve unit 16 is adjusted by controlling the voltage applied to the piezoelectric element 116.

[0048] In such an air supply valve unit 16, the valve core 68 (contact portion 114) and the nozzle 66 (opening 102 of the flow hole 100) need to be set in the specified positions with high precision.

[0049] like Figure 5 As shown, the position adjustment mechanism 76 adjusts the position of the nozzle 66 relative to the valve core 68 in the direction (Y1 direction) towards the opening 102 of the flow hole 100. The position adjustment mechanism 76 has the aforementioned force-applying member 106 and stop member 132. The stop member 132 prevents the nozzle 66 from moving due to the force-applying member 106 by contacting the nozzle 66.

[0050] The stop member 132 is provided on the nozzle support portion 80 in a direction that intersects the force application direction of the force application member 106. Specifically, a threaded hole 134 is formed in the nozzle support portion 80, which opens on the inner peripheral surface of the recess 86. The opening 136 of the threaded hole 134 formed on the inner peripheral surface of the recess 86 is located further in the Y1 direction than the nozzle sealing member 98. In other words, the nozzle sealing member 98 is located between the opening 136 and the bottom surface 108 of the recess 86.

[0051] The stop member 132 has a threaded portion 138 and a head 140. The threaded portion 138 engages with a threaded hole 134. A tapered surface 142, which tapers towards the tip of the threaded portion 138, is provided at the top end of the threaded portion 138. The head 140 is provided at the base end of the threaded portion 138. A sealing member 146 is provided on the head 140 to seal between the head 140 and the support member 62. An operating portion 148 for rotating the threaded portion 138 is provided on the head 140. The operating portion 148 is, for example, a groove for engaging a tool (not shown). Alternatively, the operating portion 148 is not limited to a groove, but may also be a protrusion that can be operated by a finger. The operating portion 148 protrudes to the outside of the support member 62.

[0052] The tip of the threaded portion 138 is inserted into the locking recess 150 formed on the outer peripheral surface of the nozzle 66. The locking recess 150 is, for example, an annular groove. The locking recess 150 may not extend in an annular shape, as long as the tip of the threaded portion 138 can be inserted. The first contact surface 152 of the locking recess 150, which contacts the stop member 132, is inclined relative to the force application direction (Y1 direction) of the force application member 106. The first contact surface 152 is inclined in the Y2 direction, radially outward from the nozzle 66. The first contact surface 152 is also inclined relative to the X direction. The first contact surface 152 faces the Y1 direction. The conical surface 142 of the stop member 132 is the second contact surface 154 that contacts the nozzle 66. The inclination angle of the first contact surface 152 relative to the X direction is the same as or approximately the same as the inclination angle of the conical surface 142 (second contact surface 154) relative to the X direction.

[0053] In the air supply valve unit 16, the threaded portion 138 is rotated by operating the operating part 148, thereby allowing the stop member 132 to move forward and backward relative to the nozzle 66. When the stop member 132 moves towards the tip, the nozzle 66 is pushed in the Y2 direction by the stop member 132. Therefore, the nozzle 66 moves away from the valve core 68 while pushing the force-applying member 106 in the Y2 direction. That is, the opening 102 of the flow hole 100 of the nozzle 66 is displaced away from the valve core 68. On the other hand, if the stop member 132 is retracted towards the base, the nozzle 66 moves towards the valve core 68 in the Y1 direction due to the force applied by the force-applying member 106. That is, the opening 102 of the flow hole 100 of the nozzle 66 is displaced towards the valve core 68.

[0054] Thus, in this embodiment, by rotating the operating part 148, the positional relationship between the valve core 68 and the nozzle 66 can be easily and with high precision adjusted. Furthermore, since the operating part 148 protrudes outside the support member 62, the positional relationship between the valve core 68 and the nozzle 66 can be adjusted after the air supply valve unit 16 is assembled.

[0055] The exhaust valve unit 18 is basically constructed in the same way as the air supply valve unit 16 described above. Therefore, detailed descriptions of the structure and operation of the exhaust valve unit 18 are omitted. In the exhaust valve unit 18, similar to the air supply valve unit 16, the positional relationship between the valve core 68 and the nozzle 66 can be adjusted. Furthermore, the inlet flow path 88 of the exhaust valve unit 18 is connected to the intermediate flow path 36 (see reference...). Figure 9 The exhaust valve unit 18's outlet flow path 90 is connected to the first exhaust flow path 40a (see reference). Figure 5 ).

[0056] In this valve device 10, pressurized fluid supplied to the air supply port 24 is guided to the flow hole 100 via a first air supply path 34a, a second air supply path 34b, an inlet flow path 88 of the air supply valve unit 16, an internal flow path 110, and a first mounting recess 104. When the flow hole 100 of the air supply valve unit 16 is open, the pressurized fluid in the flow hole 100 is discharged to the intermediate flow path 36 via the receiving chamber 82 and the outlet flow path 90. The pressurized fluid guided to the intermediate flow path 36 is divided into a first output flow path 38a and an inlet flow path 88 of the exhaust valve unit 18. The pressurized fluid flowing to the first output flow path 38a is discharged from the output port 28 via the second output flow path 38b.

[0057] The pressurized fluid flowing into the inlet flow path 88 of the exhaust valve unit 18 is guided to the flow hole 100 via the internal flow path 110 and the first mounting recess 104. When the flow hole 100 of the exhaust valve unit 18 is open, the pressurized fluid in the flow hole 100 is discharged to the first exhaust flow path 40a via the receiving chamber 82 and the outlet flow path 90. The pressurized fluid guided to the first exhaust flow path 40a is discharged to the outside from the exhaust port 26 via the second exhaust flow path 40b. When the pressurized fluid is discharged from the exhaust port 26, the pressure of the pressurized fluid discharged from the outlet port 28 decreases.

[0058] The pressure of the pressure fluid discharged from the outlet 28 is detected by the pressure sensor 42. The control unit 19 performs feedback control on the voltage (opening degree of the flow orifice 100) applied to each piezoelectric element 116 of the air supply valve unit 16 and the exhaust valve unit 18 so that the pressure detected by the pressure sensor 42 becomes the set pressure.

[0059] According to this embodiment, the position of the nozzle 66 relative to the valve core 68 can be adjusted with high precision by means of the position adjustment mechanism 76. As a result, the opening 102 of the flow hole 100 of the nozzle 66 can be opened and closed properly.

[0060] The valve device 10 is not limited to the structure described above. Alternatively, either the first contact surface 152 or the second contact surface 154 may extend along the X direction. The first contact surface 152 of the nozzle body 96 may also be provided on the outer surface of the nozzle body 96 instead of on the inner surface of the locking recess 150.

[0061] The following notes were also made public in connection with the above-mentioned disclosure.

[0062] (Note 1)

[0063] The valve device 10 includes: a nozzle 66 having a flow orifice 100 for fluid flow; a support member 62 supporting the nozzle; a valve core 68 having a piezoelectric element 116 and opening and closing the opening 102 of the flow orifice by driving the piezoelectric element; and a position adjustment mechanism 76 for adjusting the position of the nozzle relative to the valve core.

[0064] With this structure, the position of the nozzle relative to the valve core can be adjusted with high precision using a position adjustment mechanism. This allows for the efficient opening and closing of the nozzle's flow orifice.

[0065] (Note 2)

[0066] In the valve device described in Appendix 1, the position adjustment mechanism may also include: a force-applying member 106 that applies force to the nozzle toward the valve core; and a stop member 132 that prevents movement of the nozzle caused by the force-applying member by contacting the nozzle.

[0067] Based on this structure, the position of the nozzle relative to the valve core can be adjusted through a simple design.

[0068] (Note 3)

[0069] In the valve device described in Appendix 2, the stop member may be provided on the support member in a manner that allows it to move in a direction intersecting the force application direction of the force application member, and at least one of the first contact surface 152 of the nozzle that contacts the stop member and the second contact surface 154 of the stop member that contacts the nozzle may be inclined relative to the force application direction.

[0070] With this structure, the position of the nozzle relative to the valve core can be adjusted by moving the stop member forward or backward relative to the nozzle.

[0071] (Note 4)

[0072] In the valve device described in Appendix 3, the first contact surface and the second contact surface may be inclined relative to the direction of force application.

[0073] With this structure, the contact area between the stop component and the nozzle can be made larger, thus the nozzle subjected to the force of the force-applying component can be stably maintained in a specified position.

[0074] (Note 5)

[0075] In the valve device described in Appendix 3 or 4, the support member may have: a recess 86 for the nozzle to be disposed; and a threaded hole 134 that opens on the inner circumferential surface of the recess; the force-applying member is located between the bottom surface 108 of the recess and the nozzle; and the stop member has a threaded portion 138 that engages with the threaded hole.

[0076] With this structure, by rotating the threaded portion, the stop component can be easily moved forward and backward relative to the nozzle.

[0077] (Note 6)

[0078] In the valve device described in Appendix 5, the top end of the threaded portion may be provided with a tapered surface 142 that tapers toward the top end of the threaded portion, and the tapered surface is the second contact surface.

[0079] With this structure, since the tapered surface at the top of the threaded part is the second contact surface, the stop component can be made into a simple and relatively small structure.

[0080] (Note 7)

[0081] In the valve device described in Appendix 6, an operating part 148 for rotating the threaded portion may be provided at the end of the threaded portion in the opposite direction to the tip portion, and the operating part protrudes to the outside of the support member.

[0082] With this structure, the threaded part can be easily rotated by operating the operating part. Furthermore, since the operating part protrudes to the outside of the support member, the position of the nozzle relative to the valve core can be adjusted while the nozzle and valve core are assembled to the support member.

[0083] (Note 8)

[0084] In any of the valve devices described in Appendices 5 to 7, the nozzle may also have: a nozzle body 96; and a nozzle sealing member 98 that seals between the nozzle body and the inner circumferential surface of the recess, the nozzle sealing member being located between the opening 136 of the threaded hole formed on the inner circumferential surface of the recess and the bottom surface of the recess.

[0085] With this structure, the nozzle sealing component can prevent fluid from leaking from the threaded hole to the outside of the support component.

[0086] (Note 9)

[0087] In the valve device described in Appendix 8, the nozzle body may also be made of a metal material.

[0088] With this structure, rigidity can be easily improved compared to nozzle bodies made of resin material. This prevents the nozzle from deforming due to forces applied from the force-applying component. Consequently, it prevents the opening of the nozzle's flow orifice from tilting relative to the valve core due to nozzle deformation.

[0089] (Postscript 10)

[0090] In any of the valve devices described in Appendices 1 to 9, the valve core may have a plate member 112 that extends in one direction and is flexible, one end of the plate member being held in the support member, the piezoelectric element being disposed on the surface of the plate member facing the opposite direction to the nozzle, and the plate member being elastically deformed by the drive of the piezoelectric element in such a way that the plate member moves away from the nozzle.

[0091] This structure allows for a simple valve core design.

[0092] (Postscript 11)

[0093] In the valve device described in Appendix 10, the piezoelectric element may also be formed in the form of a plate, and a plurality of the piezoelectric elements may be stacked.

[0094] With this structure, it is possible to increase the elastic deformation of the plate component while suppressing the voltage applied to the piezoelectric element.

[0095] (Postscript 12)

[0096] In the valve device described in Appendix 10 or 11, the plate component may be made of a metal material, and the valve core may have a resin contact portion 114 disposed on the plate component and in airtight contact with the nozzle.

[0097] This structure allows for a simple valve core design.

[0098] (Postscript 13)

[0099] In any of the valve devices described in Appendix 10 to 12, the valve device may also include a valve core force-applying member 74 that applies force to the valve core toward the nozzle.

[0100] With this structure, since the valve core can be pressed against the nozzle by the valve core force-applying component, the opening of the nozzle's flow hole can be reliably blocked by the valve core.

[0101] (Postscript 14)

[0102] In the valve device described in Appendix 13, the valve core force-applying component may be a metal spring component. The valve device includes: a resin plate 70 that supports the spring component and has insulation; and a metal cover component 64 that is mounted on the support component while supporting the resin plate.

[0103] With this structure, by supporting the metal spring component with a resin plate, the cover component can be made of metal. This allows for a simple improvement in the pressure resistance of the cover component.

[0104] (Postscript 15)

[0105] In the valve device described in Appendix 14, a mounting recess 130 may also be formed on the resin plate for mounting the spring component.

[0106] With this structure, misalignment of the spring component relative to the resin plate can be suppressed by installing the recess.

[0107] (Postscript 16)

[0108] In any of the valve devices described in Appendices 1 to 15, the device may include: a main body 12 having a fluid flow path 32 for the fluid to flow through; a pressure sensor 42 for detecting the pressure of the fluid flowing in the fluid flow path, having a through hole 46 in the main body opening into the fluid flow path; the pressure sensor having: a sensor body 52 disposed outside the fluid flow path; and an inlet tube 54 protruding from the sensor body through the through hole into the fluid flow path and for introducing the fluid into the sensor body; a sensor sealing member 56 provided in the inlet tube, the sensor sealing member being disposed in a separate state from the sensor body and sealing between the inlet tube and the main body; the main body including a sealing support 58 located between the sensor sealing member and the sensor body and supporting the sensor sealing member.

[0109] With this structure, the pressure of the fluid flowing in the fluid path can be suppressed by the sealed support, which acts on the sensor body via the sensor sealing component. Therefore, the pressure of the fluid flowing in the fluid path can be detected with high precision using a pressure sensor.

[0110] Furthermore, the present invention is not limited to the above disclosure, and various structures may be adopted without departing from the spirit of the present invention.

Claims

1. A valve device, characterized in that, have: Nozzle (66) having a flow orifice (100) for fluid flow. Support component (62) that supports the nozzle; A valve core (68) having a piezoelectric element (116), and opening and closing the opening (102) of the flow orifice by actuation of the piezoelectric element; and Position adjustment mechanism (76) for adjusting the position of the nozzle relative to the valve core.

2. The valve device according to claim 1, characterized in that, The position adjustment mechanism has: A force-applying component (106) applies force to the nozzle toward the valve core; as well as A stop member (132) prevents movement of the nozzle caused by the force-applying member by contacting the nozzle.

3. The valve device according to claim 2, characterized in that, The stop member is disposed on the support member in a manner that allows it to move in a direction intersecting the direction of the force applied by the force-applying member. At least one of the first contact surface (152) of the nozzle that contacts the stop member and the second contact surface (154) of the stop member that contacts the nozzle is inclined relative to the direction of force application.

4. The valve device according to claim 3, characterized in that, The first contact surface and the second contact surface are inclined relative to the direction of the applied force.

5. The valve device according to claim 3, characterized in that, The support member has the following features: Recess (86), the recess being configured for the nozzle; and A threaded hole (134) opens on the inner circumferential surface of the recess. The force-applying component is located between the bottom surface (108) of the recess and the nozzle. The stop component has a threaded portion (138) that engages with the threaded hole.

6. The valve device according to claim 5, characterized in that, A tapered surface (142) with a reduced diameter toward the top of the threaded portion is provided at the top end of the threaded portion. The conical surface is the second contact surface.

7. The valve device according to claim 6, characterized in that, An operating part (148) for rotating the threaded portion is provided at the end of the threaded portion in the opposite direction to the tip portion. The operating part is exposed to the outside of the support member.

8. The valve device according to claim 5, characterized in that, The nozzle has: Nozzle body (96); and A nozzle sealing component (98) seals the space between the nozzle body and the inner circumferential surface of the recess. The nozzle sealing component is located between the opening (136) of the threaded hole formed on the inner circumferential surface of the recess and the bottom surface of the recess.

9. The valve device according to claim 8, characterized in that, The nozzle body is made of metal.

10. The valve device according to claim 1, characterized in that, The valve core has a plate component (112) that extends in one direction and is flexible. One end of the plate component is held in place by the support component. The piezoelectric element is disposed on the surface of the plate component facing the opposite direction to the nozzle. The plate component is elastically deformed by the piezoelectric element in such a way that the plate component leaves the nozzle.

11. The valve device according to claim 10, characterized in that, The piezoelectric element is formed in the shape of a plate, and multiple piezoelectric elements are stacked.

12. The valve device according to claim 10, characterized in that, The plate component is made of metal. The valve core has a resin contact portion (114) which is disposed on the plate component and in airtight contact with the nozzle.

13. The valve device according to claim 10, characterized in that, The valve device includes a valve core force-applying component (74) that applies force to the valve core toward the nozzle.

14. The valve device according to claim 13, characterized in that, The valve core force-applying component is a metal spring component. The valve device includes: A resin plate (70) that supports the spring component and has insulation properties; and A metal cover component (64) is mounted on the support component while supporting the resin plate.

15. The valve device according to claim 14, characterized in that, A mounting recess (130) is formed on the resin plate for mounting the spring component.

16. The valve device according to any one of claims 1 to 15, characterized in that, have: The main body (12) has a fluid flow path (32) for the fluid to flow through; and Pressure sensor (42), which is used to detect the pressure of the fluid flowing in the fluid path, A through hole (46) is formed in the main body to open into the fluid flow path. The pressure sensor has the following characteristics: Sensor body (52), which is disposed outside the fluid flow path; and An inlet tube (54) protrudes from the sensor body through the through hole into the fluid flow path and is used to introduce the fluid into the sensor body. A sensor sealing component (56) is provided in the inlet tube section. This sensor sealing component is configured to be separate from the sensor body and seals the inlet tube section and the body. The main body includes a sealing support (58) located between the sensor sealing component and the sensor body, and supporting the sensor sealing component.

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