Rotary inclined jig for chip detection

Abstract

The invention belongs to the technical field of semiconductor detection, and relates to a rotary inclined jig for chip detection, which comprises a bottom plate, a side plate, a guide plate and a rotary plate, the two side plates are installed on the two sides of the bottom plate respectively. The guide plate is mounted on the inner side of one side plate; the two ends of the rotating plate are each fixedly provided with a polished rod screw, comb-tooth-shaped grooves are formed in the tops of the side plates, the polished rod screws at the two ends of the rotating plate are placed in the comb-tooth-shaped grooves of the two side plates respectively, and the rotating plate naturally droops to make contact with the guide plate; the guide plates are mounted on the inner sides of the side plates, the comb-tooth-shaped grooves are formed in the tops of the side plates, the polish rod screws are fixed to the two ends of the rotating plates respectively, the polish rod screws at the two ends of the rotating plates are placed in the comb-tooth-shaped grooves of the two side plates respectively, the rotating plates naturally droop to make contact with the guide plates, and the comb-tooth-shaped grooves enable the rotating plates to be arranged in multiple rows; the distance can be flexibly adjusted so as to adapt to chips of different sizes, the guide plate can move back and forth, and unified control over any inclination angle of the rotating plate is achieved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor testing technology and relates to a rotating and tilting fixture for chip testing. Background Technology

[0002] During the chip manufacturing and R&D process, various tests are required, such as optical appearance inspection, X-ray inspection, and ultrasonic scanning. The chips need to be arranged according to certain rules and their tilt angles adjusted to meet different testing requirements. Similarly, in the chip failure analysis process, the chips need to be rotated at different angles to locate various problems.

[0003] Different testing items may require observing and measuring the chip from different angles. However, in the existing technology, most existing chip testing fixtures are designed with a fixed tilt angle or a single row arrangement, resulting in a relatively fixed testing angle and the following problems:

[0004] 1. The chip spacing is fixed, making it unable to accommodate chips of different sizes;

[0005] 2. When the detection angle needs to be adjusted, the tilt adjustment needs to be done row by row. Often, the chip needs to be removed from the fixture and re-clamped. This is not only cumbersome, but also easy to damage the chip, resulting in low detection efficiency.

[0006] 3. The fixed angle relies on mechanical limits, which lacks flexibility.

[0007] Therefore, there is an urgent need for a high-efficiency fixture that can simultaneously adjust the spacing and tilt angle of multiple rows. Summary of the Invention

[0008] To address the aforementioned problems in the prior art, the present invention employs a rotating and tilting fixture for chip detection, comprising:

[0009] The base plate 1, side plate 2, guide plate 3, and rotating plate 4 are provided. There are two side plates 2, which are installed on both sides of the base plate 1. The guide plate 3 is installed on the inner side of one of the side plates 2. The two ends of the rotating plate 4 are fixed with smooth rod screws 41. The top of the side plate 2 is a comb-shaped groove. The smooth rod screws 41 at both ends of the rotating plate 4 are placed in the comb-shaped grooves of the two side plates 2 respectively. The rotating plate 4 hangs down naturally and contacts the guide plate.

[0010] The top of the guide plate 3 is also a comb-shaped groove, and the top of the guide plate 3 is located below the comb-shaped groove of the side plate 2.

[0011] The spacing of the comb-shaped grooves on the guide plate 3 is the same as the spacing of the comb-shaped grooves on the side plate 2.

[0012] The comb-shaped grooves of the side plate 2 are engraved with rotation angle markings, and the heads of the smooth rod screws 41 at both ends of the rotating plate 4 are engraved with arrows, which are used to point to the rotation angle markings of the comb-shaped grooves of the side plate 2.

[0013] The smooth rod screws 41 at both ends of the rotating plate 4 are offset from the center of the rotating plate 4.

[0014] The side plate 2 is provided with a first waist hole 21 and a hand screw 24, and the guide plate 3 is provided with a first threaded hole 31. The hand screw 24 passes through the first waist hole 21 and is screwed into the first threaded hole 31 of the guide plate 3.

[0015] The side plate 2 is also provided with a second waist hole 22 and a smooth rod screw 25. The guide plate 3 is also provided with a second threaded hole 32. The smooth rod screw 25 passes through the second waist hole 22 and is screwed into the second threaded hole 32 of the guide plate 3.

[0016] The side plate 2 has a rotation angle mark engraved above the second waist hole 22, and the head of the smooth rod screw 25 has an arrow engraved on it, which is used to point to the rotation angle mark above the second waist hole 22.

[0017] The side plate 2 has a threaded hole at the bottom, and the base plate 1 has mounting holes on both sides. The mounting holes on both sides of the base plate 1 are connected to the threaded hole at the bottom of the side plate 2 by screws.

[0018] A magnetic strip 42 is fixed on the rotating plate 4 for magnetically attracting the chip.

[0019] Beneficial effects:

[0020] This invention installs a guide plate on the inner side of the side plate, and sets the top of the side plate as a comb-shaped groove. A light rod screw is fixed at each end of the rotating plate. The light rod screws at both ends of the rotating plate are placed in the comb-shaped grooves of the two side plates. The rotating plate hangs down naturally and contacts the guide plate. The comb-shaped groove allows the rotating plate to be arranged in multiple rows, and the spacing can be flexibly adjusted to adapt to chips of different sizes. The guide plate can move back and forth, thereby converting its own linear motion into the rotational motion of the rotating plate, realizing unified control of any tilt angle of the rotating plate, and improving the efficiency and flexibility of tilt angle adjustment. Attached Figure Description

[0021] Figure 1 This is a structural diagram of the rotating and tilting fixture for chip testing provided in an embodiment of the present invention;

[0022] Figure 2 An exploded view of the rotating and tilting fixture for chip testing provided in an embodiment of the present invention;

[0023] Figure 3 (a) is a schematic diagram of the tilt angle adjustment guide plate provided in an embodiment of the present invention;

[0024] Figure 3(b) is a schematic diagram of the tilt adjustment side plate provided in an embodiment of the present invention;

[0025] Figure 3 (c) is a partial schematic diagram of the tilt adjustment side plate provided in an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the fixture spacing adjustment operation provided in an embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of the locking function provided in an embodiment of the present invention;

[0028] Among them, 1 is the base plate, 2 is the side plate, 3 is the guide plate, 4 is the rotating plate, 21 is the first waist hole, 22 is the second waist hole, 23 is the third waist hole, 24 is the hand screw, 25 is the smooth rod screw passing through the second waist hole, 26 is the smooth rod screw passing through the third waist hole, 31 is the first threaded hole, 32 is the second threaded hole, 33 is the third threaded hole, 41 is the smooth rod screw at both ends of the rotating plate, and 42 is the magnetic strip. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] like Figure 1 , Figure 2 As shown, this embodiment of the invention employs a rotating tilting fixture for chip testing, comprising: a base plate 1, side plates 2, a guide plate 3, and a rotating plate 4; there are two side plates 2, which are respectively installed on both sides of the base plate 1; the guide plate 3 is installed on the inner side of one of the side plates 2; optical rod screws 41 are fixed at both ends of the rotating plate 4, the top of the side plate 2 is a comb-shaped groove, and the optical rod screws 41 at both ends of the rotating plate 4 are respectively placed in the comb-shaped grooves of the two side plates 2, and the rotating plate 4 hangs down naturally and contacts the guide plate.

[0031] The base plate 1 serves to fix and support the entire fixture. The base plate 1 can be placed below the test head of the testing equipment, such as below a microscope lens or below an X-ray emission end. The base plate 1 has mounting holes on both sides, and the side plate 2 has threaded holes at the bottom. The mounting holes on both sides of the base plate 1 are connected to the threaded holes at the bottom of the side plate 2 by screws.

[0032] like Figure 4As shown, the side plate 2 is used to support the rotating plate 4 and connect the guide plate 3. The comb-shaped grooves of the side plate 2 are arranged at a certain interval to adjust the spacing between adjacent chips. The comb-shaped grooves enable the rotating plate to be quickly picked up and placed and accurately positioned.

[0033] The comb-shaped grooves of the side plate 2 are engraved with rotation angle markings, and the heads of the smooth rod screws 41 at both ends of the rotating plate 4 are engraved with arrows. The arrows are used to point to the rotation angle markings of the comb-shaped grooves of the side plate 2, and are used to indicate the rotation angle of the rotating plate.

[0034] Side plate 2 is provided with a first waist hole 21 and a hand screw 24, and guide plate 3 is provided with a first threaded hole 31. The hand screw 24 passes through the first waist hole 21 and is screwed into the first threaded hole 31 of guide plate 3; Figure 5 As shown, the tightness of the guide plate 3 can be adjusted by rotating the hand screw 24, thereby fixing the guide plate 3 to the inside of the side plate 2.

[0035] The side plate 2 is also provided with a second waist hole 22 and a smooth rod screw 25. The guide plate 3 is provided with a second threaded hole 32. The smooth rod screw 25 passes through the second waist hole 22 and is screwed into the second threaded hole 32 of the guide plate 3.

[0036] The side plate 2 has a rotation angle mark engraved above the second waist hole 22, and the head of the light rod screw 25 has an arrow engraved. The arrow is used to point to the rotation angle mark above the second waist hole 22, which is used to precisely control the rotation angle of the chip. The rotation angle mark can be obtained by calculating the relationship between the linear movement distance of the light rod screw and the rotation angle.

[0037] In one embodiment, the side plate 2 is further provided with a third waist hole 23 and a second smooth screw 26. The third waist hole 23 and the second waist hole 22 are symmetrical about the first waist hole 21. The guide plate 3 is provided with a third threaded hole 33. The smooth screw 26 passes through the third waist hole 23 and is screwed into the third threaded hole 33 of the guide plate 3. The second waist hole 22 and the third waist hole 23 are the same size and are processed by the same procedure, which can save costs. Furthermore, when a waist hole is damaged, the remaining waist hole can be used.

[0038] The top of the guide plate 3 is a comb-shaped groove, and the top of the guide plate 3 is located below the comb-shaped groove of the side plate 2. The spacing of the comb-shaped groove of the guide plate 3 is the same as the spacing of the comb-shaped groove of the side plate 2. The guide plate 3 slides back and forth along a straight line within a certain range, converting its own linear motion into the rotational motion of the rotating plate 4.

[0039] The optical screw of the rotating plate 4 is not placed in the center, but is slightly off-center. This design is intended to generate torque by using the offset of the center of gravity when the rotating plate 4 is placed on the two side plates 2, so that the side of the rotating plate 4 that is off-center always faces downward and is in close contact with the guide plate 3. A magnetic strip 42 is fixed on the rotating plate 4 for magnetically attracting the chip. The rotating plate 4 is used to rotate the chip to a specific angle for easy detection or failure analysis.

[0040] In one embodiment, the base plate 1 has an external dimension of 308mm in side length and 2.5mm in thickness; the side plate 2 has a length of 298mm, a width of 35mm, and a thickness of 4mm; the top of the side plate 2 has a comb-shaped groove with a spacing of 10mm and a depth of 6mm; the guide plate 3 has a length of 283mm, a width of 28mm, and a thickness of 3mm; the top of the guide plate 3 has a comb-shaped groove with a spacing of 10mm and a depth of 8mm; the width of the comb teeth in the comb-shaped groove on the top of the guide plate 3 is 3mm, and the width of the groove is 7mm; the rotating plate 4 has a length of 296.2mm, a width of 16mm, and a thickness of 3mm; and both the smooth screw and the hand screw are M2×0.4-6H, that is, ordinary internal threads with a diameter of 2mm, a pitch of 0.4mm, and a tolerance zone of 6H.

[0041] like Figure 3 (a) Figure 3 (b) Figure 3 As shown in (c), during use, the chip is placed on the magnetic strip of the rotating plate 4, and the rotating plate 1 is placed in the comb-shaped groove of the side plate 2. The rotating plate 4 hangs naturally and is in close contact with the guide plate 3. The forward and backward movement distance of the guide plate 3 is adjusted by observing the arrow on the head of the light rod screw in the second waist hole 22, thereby adjusting the tilt angle of the chip on the rotating plate 4. After adjustment, the hand screw 24 is tightened to fix the guide plate 3. The guide plate 3 is in contact with each rotating plate 4, so the rotation of all rotating plates 4 can be controlled simultaneously. Furthermore, the open comb-shaped groove design allows for easy placement and removal. The rotating plate 4 after chip testing can be removed, and then a new rotating plate 4 and chip can be placed.

[0042] The above-described embodiments further illustrate the purpose, technical solution, and advantages of the present invention. It should be understood that the above-described embodiments are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made to the present invention within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A rotating and tilting fixture for chip testing, characterized in that, include: The base plate (1), side plate (2), guide plate (3) and rotating plate (4); there are two side plates (2), which are installed on both sides of the base plate (1); the guide plate (3) is installed on the inner side of one of the side plates (2); the two ends of the rotating plate (4) are fixed with smooth rod screws (41), the top of the side plate (2) is a comb-shaped groove, and the smooth rod screws (41) at both ends of the rotating plate (4) are placed in the comb-shaped grooves of the two side plates (2), and the rotating plate (4) hangs down naturally and contacts the guide plate.

2. The rotary tilting fixture for chip testing according to claim 1, characterized in that, The top of the guide plate (3) is also a comb-shaped groove, and the top of the guide plate (3) is located below the comb-shaped groove of the side plate (2).

3. The rotary tilting fixture for chip testing according to claim 2, characterized in that, The spacing of the comb-shaped grooves of the guide plate (3) is the same as the spacing of the comb-shaped grooves of the side plate (2).

4. The rotating tilting fixture for chip testing according to claim 1, characterized in that, The side plate (2) has a comb-shaped groove with a rotation angle mark, and the heads of the smooth rod screws (41) at both ends of the rotating plate (4) are engraved with arrows, which are used to point to the rotation angle mark of the comb-shaped groove of the side plate (2).

5. A rotating tilting fixture for chip testing according to claim 1, characterized in that, The smooth rod screws (41) at both ends of the rotating plate (4) are offset from the center of the rotating plate (4).

6. The rotary tilting fixture for chip testing according to claim 1, characterized in that, The side plate (2) is provided with a first waist hole (21) and a hand screw (24), and the guide plate (3) is provided with a first threaded hole (31). The hand screw (24) passes through the first waist hole (21) and is screwed into the first threaded hole (31) of the guide plate (3).

7. The design method of a rotating tilting fixture for chip testing according to claim 1, characterized in that, The side plate (2) is also provided with a second waist hole (22) and a smooth rod screw (25), and the guide plate (3) is also provided with a second threaded hole (32). The smooth rod screw (25) passes through the second waist hole (22) and is screwed into the second threaded hole (32) of the guide plate (3).

8. A rotating tilting fixture for chip testing according to claim 7, characterized in that, The side plate (2) has a rotation angle mark engraved above the second waist hole (22), and the head of the smooth rod screw (25) has an arrow engraved on it, which is used to point to the rotation angle mark above the second waist hole (22).

9. A rotating tilting fixture for chip testing according to claim 1, characterized in that, The side plate (2) has a threaded hole at the bottom, and the bottom plate (1) has mounting holes on both sides. The mounting holes on both sides of the bottom plate (1) are connected to the threaded hole at the bottom of the side plate (2) by screws.

10. A rotating tilting fixture for chip testing according to claim 1, characterized in that, A magnetic strip (42) is fixed on the rotating plate (4) for magnetically attracting the chip.

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