Photomask layered gluing device and gluing machine
By using a double-layer coating technology, the viscosity of the second adhesive layer is reduced by utilizing the residual heat of the pre-cured adhesive layer, which solves the problem of uneven photoresist coating and achieves higher uniformity of the photoresist layer and higher precision of the photolithography process.
Patent Information
- Application Number
- CN202510971986.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-15
- Publication Date
- 2025-11-18
AI Technical Summary
In existing technologies, uneven photoresist coating affects the precision of photolithography processes, especially due to variations in photoresist viscosity and the rotation speed of the coating machine.
A double-layer coating technology is adopted. A first pre-cured adhesive layer is formed through a first dispensing nozzle and a heating plate. Then, a second dispensing nozzle forms a second adhesive layer on the pre-cured adhesive layer. The residual heat of the pre-cured adhesive layer is used to reduce the viscosity of the second adhesive layer, improve its fluidity, and achieve more uniform coating.
This improved the overall uniformity of the photoresist layer, ensuring the precision of the photolithography process.
Smart Images
Figure CN120961375A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of photomask coating equipment, and particularly to a photomask layer coating device and coating machine. Background Technology
[0002] The photoresist coating machine is a key piece of equipment in the photomask manufacturing process. It is mainly used to uniformly coat liquid photoresist onto the surface of the substrate on the photomask. After coating, the photomask is transferred to the pre-baking station for pre-baking to remove residual solvents in the photoresist, partially cure the photoresist, and enhance its adhesion to the substrate.
[0003] In related technologies, liquid photoresist is dropped onto the center of a substrate, and a coating machine drives the substrate to rotate. Under the action of centrifugal force, the liquid photoresist is uniformly coated on the surface of the substrate. However, due to the influence of the viscosity of the photoresist and the speed change of the coating machine, the uniformity of the coated liquid photoresist is not high, which seriously affects the accuracy of subsequent photolithography processes. Summary of the Invention
[0004] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes two photomask layer coating apparatuses that can improve the uniformity of photoresist coating.
[0005] A coating machine with the above-mentioned photomask layer coating device is also proposed.
[0006] A photomask layering and coating apparatus according to a first aspect of the present invention includes: The base is rotatable about its axis and has a platform for placing a substrate. The first adhesive dispensing assembly includes a first adhesive storage chamber for storing the first adhesive and a first dispensing port communicating with the first adhesive storage chamber. The first dispensing port faces the table surface to dispense the first adhesive onto the substrate surface of the table surface and form a first adhesive layer. The pre-curing component includes a heating plate capable of heating the first adhesive layer and forming a first pre-cured adhesive layer; The second adhesive dispensing assembly includes a second adhesive storage chamber for storing the second adhesive and a second dispensing port communicating with the second adhesive storage chamber. The second dispensing port faces the table surface to dispense the second adhesive onto the surface of the first pre-cured adhesive layer and form the second adhesive layer. A transfer component is connected to the first dispensing nozzle, the heating plate, and the second dispensing nozzle to switch the orientation of the first dispensing nozzle, the heating plate, and the second dispensing nozzle toward the table surface; The transfer assembly is configured to: drive the first dispensing nozzle to move toward the table surface and align with the central region of the substrate on the table surface, dispensing the first adhesive onto the surface of the table surface, the table surface rotating to form a first adhesive layer on the surface of the substrate; drive the heating plate to move toward the table surface to pre-bake the first adhesive layer as a first pre-cured adhesive layer; drive the second dispensing nozzle to move toward the table surface and align with the central region of the substrate on the table surface, dispensing the second adhesive onto the surface of the first pre-cured adhesive layer, the table surface rotating to form a second adhesive layer on the surface of the first pre-cured adhesive layer.
[0007] According to the first aspect of the present invention, the photomask layering coating apparatus has at least the following beneficial effects: the first dispensing nozzle first dispenses adhesive onto the surface of the substrate to form a first adhesive layer; the first adhesive layer is heated by the heating plate of the pre-curing component to pre-cur the first adhesive layer to form a first pre-cured adhesive layer; then, adhesive is dispensed onto the surface of the first pre-cured adhesive layer through the second dispensing nozzle to form a second adhesive layer; the formation of the second adhesive layer is affected by the residual heat of the first pre-cured adhesive layer; the increase in temperature leads to a decrease in the viscosity of the second adhesive layer; the second adhesive layer has better fluidity during spin coating and can be coated more uniformly on the surface of the first pre-cured adhesive layer; after the second adhesive layer is pre-baked, the surface uniformity of the second adhesive layer is higher, and an adhesive layer with higher overall uniformity can be obtained.
[0008] According to some embodiments of the present invention, the viscosity of the second adhesive is lower than that of the first adhesive.
[0009] According to some embodiments of the present invention, the transfer assembly includes a first transfer member and a first drive source drivenly connected to the first transfer member. The first transfer member has a first end, a second end, and a rotating part. The first end is provided with a first dispensing nozzle, and the second end is provided with a second dispensing nozzle. The rotating part is drivenly connected to the first drive source. The first transfer member can switch the orientation of the first dispensing nozzle or the second dispensing nozzle toward the table surface by rotation.
[0010] According to some embodiments of the present invention, the first transfer member further includes a third end connected to the heating plate, and the first transfer member can be rotated to switch the orientation of the first dispensing nozzle, the second dispensing nozzle, or the heating plate toward the table surface.
[0011] According to some embodiments of the present invention, the transfer assembly further includes a second transfer member and a second drive source driven to the second transfer member, the second transfer member being connected to the heating plate to drive the heating plate over the table surface.
[0012] A photomask layer coating apparatus according to a second aspect of the present invention is characterized in that it comprises: The base is rotatable about its axis and has a platform for placing a substrate. The first adhesive dispensing assembly includes a first adhesive storage chamber for storing the first adhesive and a first dispensing port communicating with the first adhesive storage chamber. The first dispensing port faces the table surface to dispense the first adhesive onto the substrate surface of the table surface and form a first adhesive layer. The pre-curing component includes a heating plate capable of heating the first adhesive layer and forming a first pre-cured adhesive layer; A transfer component is connected to the first dispensing nozzle and the heating plate to switch the orientation of the first dispensing nozzle and the heating plate toward the table surface; The transfer assembly is configured to: drive the first dispensing nozzle to move toward the table surface and align with the center region of the substrate on the table surface, dispensing the first adhesive onto the surface of the table surface, the table surface rotating to form a first adhesive layer on the surface of the substrate; drive the heating plate to move toward the table surface to pre-bake the first adhesive layer as a first pre-cured adhesive layer; drive the first dispensing nozzle to move again toward the table surface and align with the center region of the substrate on the table surface, dispensing the second adhesive onto the surface of the first pre-cured adhesive layer, the table surface rotating to form a second adhesive layer on the surface of the first pre-cured adhesive layer.
[0013] According to the second aspect of the present invention, the photomask layering coating apparatus has at least the following beneficial effects: the first dispensing nozzle first dispenses adhesive onto the surface of the substrate to form a first adhesive layer; the first adhesive layer is heated by the heating plate of the pre-curing component to pre-cur the first adhesive layer to form a first pre-cured adhesive layer; then, adhesive is dispensed onto the surface of the first pre-cured adhesive layer through the first dispensing nozzle to form a second adhesive layer; the formation of the second adhesive layer is affected by the residual heat of the first pre-cured adhesive layer; the increase in temperature leads to a decrease in the viscosity of the second adhesive layer; the second adhesive layer has better fluidity during spin coating and can be more uniformly coated on the surface of the first pre-cured adhesive layer; after the second adhesive layer is pre-baked, the surface uniformity of the second adhesive layer is higher, and an adhesive layer with higher overall uniformity can be obtained.
[0014] According to some embodiments of the present invention, the transfer assembly is configured to drive the heating plate to move again toward the table surface to pre-bake the second adhesive layer as a second pre-cured adhesive layer.
[0015] According to some embodiments of the present invention, the heating plate is provided with a spiral first heating element, which is capable of rotation.
[0016] According to some embodiments of the present invention, the heating plate is further provided with a spiral second heating element, the first heating element and the second heating element have opposite directions of rotation and are interlocked, and the first heating element and the second heating element can rotate together.
[0017] According to a third aspect of the present invention, the coating machine is characterized in that it includes: the photomask layer coating apparatus described in the first aspect or the second aspect.
[0018] The adhesive applicator according to a third aspect of the present invention has at least the following advantages: using a photomask layering adhesive applicator can produce an adhesive layer with higher uniformity.
[0019] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of the structure of a photomask layer coating device according to an embodiment of the present invention; Figure 2 for Figure 1 A magnified view of part A in the middle; Figure 3 This is a schematic diagram of the base of a photomask layer coating device according to an embodiment of the present invention; Figure 4 This is a side view of the base of a photomask layer coating apparatus according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the transfer component of a photomask layer coating apparatus according to an embodiment of the present invention; Figure 6 This is a cross-sectional schematic diagram of the pre-curing component of a photomask layer coating apparatus according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the first heating element in the pre-curing assembly of a photomask layer coating apparatus according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of the first heating element and the second heating element in the pre-curing assembly of a photomask layer coating apparatus according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the structure of a photomask layer coating apparatus according to an embodiment of the present invention after the first adhesive and the second adhesive are coated onto the surface of the substrate.
[0021] Icon labels: 100 base plate; 110 substrate; 120 platform; 130 rotary drive source; First dispensing assembly 200; first pre-cured adhesive layer 210; first dispensing tube 220; first adhesive storage tank 230; Pre-fixed component 300; heating plate 310; first heating element 311; heating cavity 312; second heating element 313; Second adhesive component 400; Second adhesive layer 410; Transfer assembly 500; first transfer element 510; first rod 511; second rod 512; third rod 513; first drive source 520. Detailed Implementation
[0022] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0023] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.
[0024] In the description of this invention, "several" refers to one or more, and "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.
[0025] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.
[0026] Reference Figures 1 to 9As shown, a first aspect of the present invention provides a photomask layering adhesive coating apparatus, comprising: a base 100, a first dispensing assembly 200, a pre-curing assembly 300, a second dispensing assembly 400, and a transfer assembly 500. The base 100 is rotatable about its axis and has a platform 120 for placing a substrate 110. The first dispensing assembly 200 includes a first dispensing cavity for storing a first adhesive and a first dispensing port communicating with the first dispensing cavity. The first dispensing port faces the platform 120 to dispense the first adhesive onto the surface of the substrate 110 on the platform 120 and form a first adhesive layer. The pre-curing assembly 300 includes a heating plate 310, which is capable of heating the first adhesive layer and forming a first pre-cured adhesive layer 210. The second dispensing assembly 400 includes a second dispensing cavity for storing a second adhesive and a second dispensing port communicating with the second dispensing cavity. The second dispensing port faces the platform 120 to dispense the second adhesive onto the first pre-cured adhesive layer 210. The surface of the adhesive layer 210 is used to form a second adhesive layer 410; the transfer assembly 500 is connected to the first dispensing nozzle, the heating plate 310 and the second dispensing nozzle to switch the orientation of the first dispensing nozzle, the heating plate 310 and the second dispensing nozzle toward the table surface 120; wherein, the transfer assembly 500 is configured to: drive the first dispensing nozzle to move toward the table surface 120 and align it with the central region of the substrate 110 on the table surface 120, dispensing the first adhesive onto the surface of the base 100, the base 100 rotating and forming the first adhesive layer on the surface of the substrate 110; drive the heating plate 310 to move toward the table surface 120, pre-baking the first adhesive layer to form a first pre-cured adhesive layer 210; drive the second dispensing nozzle to move toward the table surface 120 and align it with the central region of the substrate 110 on the table surface 120, dispensing the second adhesive onto the surface of the first pre-cured adhesive layer 210, the base 100 rotating and forming the second adhesive layer 410 on the surface of the first pre-cured adhesive layer 210. In this embodiment, the photomask layer coating device uses double coating to enable the second adhesive layer 410 to be coated more evenly on the surface of the first adhesive layer, thereby improving the uniformity of the adhesive layer on the surface of the substrate 110.
[0027] In this embodiment, refer to Figure 1 , Figure 3 and Figure 4As shown, the base 100 includes a central plate, multiple surrounding plates evenly distributed circumferentially around the center of the central plate, and a rotation drive source 130. The rotation drive shaft of the rotation drive source 130 is arranged vertically. The center of the central plate is connected to the rotation drive shaft and rotates around the center of the central plate under the drive of the rotation drive shaft. The multiple surrounding plates rotate circumferentially. The upper surface of the surrounding plates is provided with limiting blocks, and the limiting blocks corresponding to the multiple surrounding plates define circular areas. The center of the circular area coincides with the center of the central plate. The upper surface of the surrounding plates forms a platform 120 within the circular area. When the substrate 110 is placed on the platform 120, the center of the substrate 110 coincides with the center of the central plate. When photoresist is coated on the substrate 110 on the platform 120, the rotation drive shaft drives the central plate to rotate, thereby causing the substrate 110 on the platform 120 to rotate. Under the action of centrifugal force, the photoresist on the surface of the substrate 110 is evenly coated on the surface of the substrate 110, while excess photoresist is thrown off under the action of centrifugal force. In addition, an annular barrier is provided around the base 100 to intercept the photoresist that is thrown out during spin coating.
[0028] Reference Figure 1 , Figure 2 and Figure 5 As shown, the first dispensing assembly 200 includes a first dispensing tube 220, a first dispensing reservoir 230, and a first connecting hose connecting the first dispensing tube 220 and the first dispensing reservoir 230. The first dispensing tube 220 has a first dispensing nozzle, and the first dispensing reservoir 230 has a first liquid storage chamber. The first dispensing tube 220 is arranged vertically or inclined vertically, and the first dispensing nozzle is located at the bottom of the first dispensing tube 220. The photoresist in the first dispensing tube 220 can drip onto the center of the substrate 110 on the base 100 under the action of gravity. A control valve is provided on the first dispensing tube 220 to control the opening and closing of the first dispensing nozzle. When a preset amount of photoresist drips from the first dispensing nozzle, the control valve closes. The control valve is an electrically controlled valve, which is electrically connected to the control system to realize the automatic opening and closing of the control valve.
[0029] Reference Figure 1 , Figure 5 and Figure 6 As shown, the pre-curing assembly 300 includes a heating plate 310, which can be moved to the top of the base 100. The heating plate 310 pre-baks the first adhesive layer of the substrate 110 on the base 100 through thermal radiation, causing the first adhesive layer to cure into a first pre-cured adhesive layer 210. This allows the solvent in the first adhesive layer to evaporate, and the thickness of the first adhesive layer is lower than that of a conventional adhesive layer, making it easier for the solvent to evaporate and effectively reducing the influence of impurities in the first adhesive layer. The heating temperature of the heating plate 310 is 40℃~60℃. In this embodiment, the heating temperature is suitable at 40℃. The first pre-cured adhesive layer 210 also has a corresponding heating temperature after curing.
[0030] Reference Figure 1 and Figure 5 As shown, the structure of the second dispensing assembly 400 is the same as that of the first dispensing assembly 200. The second dispensing assembly 400 includes a second dispensing tube, a second glue storage tank, and a second connecting hose connecting the second dispensing tube and the second glue storage tank. The specific arrangement and connection relationship of the second dispensing assembly 400 are the same as those of the first dispensing assembly 200, and will not be described again here. The second dispensing tube of the second dispensing assembly 400 is used to dispense the second adhesive layer 410 onto the upper surface of the first pre-cured adhesive layer 210. It should be noted that when the second adhesive layer 410 is coated on the surface of the first pre-cured adhesive layer 210, the temperature of the first pre-cured adhesive layer 210 needs to be lower than the curing temperature of the second adhesive layer 410, but higher than the temperature of the second adhesive layer 410. For example, when the curing temperature of the second adhesive layer 410 is 35°C, and the temperature of the second adhesive layer 410 is 20°C, the temperature of the first pre-cured adhesive layer 210 is preferably in the temperature range of 20°C to 35°C. In this embodiment, the temperature of the first pre-cured adhesive layer 210 is 27°C.
[0031] Reference Figure 9 As shown, the transfer assembly 500 is connected to the first dispensing tube 220, the second dispensing tube, and the heating plate 310. The transfer assembly 500 drives the first dispensing tube 220, the second dispensing tube, and the heating plate 310 to move directly above the base 100, so that the first dispensing tube 220 applies a first adhesive layer, the heating plate 310 heats the first adhesive layer to form a first pre-cured adhesive layer 210, and the second dispensing tube applies a second adhesive layer 410 to the upper surface of the first pre-cured adhesive layer 210. When the first dispensing tube 220 moves, the movement variable is absorbed through the first connecting hose, and when the second dispensing tube moves, the movement variable is absorbed through the second connecting hose.
[0032] It is worth understanding that, referring to Figure 9 As shown, the first dispensing nozzle first dispenses adhesive onto the surface of the substrate 110 to form a first adhesive layer. The heating plate 310 of the pre-curing component 300 heats the first adhesive layer, causing it to initially cure and form a first pre-cured adhesive layer 210. Then, the second dispensing nozzle dispenses adhesive onto the surface of the first pre-cured adhesive layer 210 to form a second adhesive layer 410. The formation of the second adhesive layer 410 is affected by the residual heat of the first pre-cured adhesive layer 210. The increased temperature leads to a decrease in the viscosity of the second adhesive layer 410. When spin-coating, the second adhesive layer 410 has better fluidity and can be coated more evenly on the surface of the first pre-cured adhesive layer 210. After pre-baking, the surface uniformity of the second adhesive layer 410 is higher, resulting in an adhesive layer with higher overall uniformity.
[0033] In some specific embodiments of the present invention, the viscosity of the second adhesive is lower than that of the first adhesive.
[0034] It is understandable that the lower the viscosity of the photoresist, the better its fluidity. Therefore, the viscosity of the second adhesive is set to be lower than that of the first adhesive to improve its fluidity. During the rotation of the substrate 100, the second adhesive can better cover the surface of the first pre-cured adhesive layer 210 through its own fluidity, so as to fill the uneven positions on the surface of the first pre-cured adhesive layer 210, making the adhesive layer more uniform and improving the uniformity of the photoresist.
[0035] Reference Figure 1 and Figure 5 As shown, in some specific embodiments of the present invention, the transfer assembly 500 includes a first transfer member 510 and a first drive source 520 driven to the first transfer member 510. The first transfer member 510 has a first end, a second end, and a rotating part. The first end is provided with a first dispensing nozzle, and the second end is provided with a second dispensing nozzle. The rotating part is driven to the first drive source 520. The first transfer member 510 can switch the orientation of the first dispensing nozzle or the second dispensing nozzle toward the table surface 120 by rotation.
[0036] In this embodiment, the first transfer member 510 includes a disc-shaped disc body. A first rod 511 and a second rod 512 are evenly distributed around the central axis of the disc. The end of the first rod 511 furthest from the disc body is the first end, and the end of the second rod 512 furthest from the disc body is the second end. The disc body is a rotating part, and a first drive source 520 is connected to the disc body to drive it to rotate around its axis. The movement paths of both the first and second ends pass through the center of the base 100. The first end has a first telescopic rod arranged vertically. The telescopic end of the first telescopic rod is connected to a first dispensing tube 220 or a first control valve, so that by moving vertically, the first dispensing nozzle is brought closer to the surface of the substrate 110, avoiding excessive distance between the first dispensing nozzle and the surface of the substrate 110, which could cause photoresist splattering during dispensing. The second end also has a second telescopic rod arranged vertically. The telescopic end of the second telescopic rod is connected to a second dispensing tube or a second control valve, and its function is the same as that of the first telescopic rod, which will not be described again here.
[0037] Reference Figure 1 and Figure 5 As shown, in some specific embodiments of the present invention, the first transfer member 510 further includes a third end, which is connected to the heating plate 310. The first transfer member 510 can switch the first dispensing nozzle, the second dispensing nozzle, or the heating plate 310 facing the table surface 120 by rotation.
[0038] It is understandable that the heating plate 310, the first drip tube 220, and the second drip tube are transferred through the same first transfer member 510 to reduce additional driving components and save equipment costs.
[0039] In this embodiment, a third rod 513 is provided around the circumference of the disc body along its central axis. The end of the third rod 513 away from the disc body is the third end. The first end, second end, and third end are evenly distributed around the axis of the ring body, with an included angle of 120° between them. A heat insulation layer is provided between the first dispensing assembly 200, the second dispensing assembly 400, and the pre-curing assembly 300 to prevent the heat from the heating plate 310 of the pre-curing assembly 300 from affecting the temperature of the first and second adhesives. Alternatively, both the first dispensing assembly 200 and the second dispensing assembly 400 may be equipped with an active cooling structure, such as a water-cooled circulation pipe. The temperature of the active cooling structure needs to be controlled between 20°C and 25°C.
[0040] In some specific embodiments of the present invention, the transfer assembly 500 further includes a second transfer member and a second drive source connected to the second transfer member. The second transfer member is connected to the heating plate 310 to drive the heating plate 310 over the table 120.
[0041] In this embodiment, the heating plate 310 is transferred by a separate second transfer member, so that the heating plate 310 does not interfere with the first dispensing assembly 200 and the second dispensing assembly 400, reducing the impact of the heat of the heating plate 310 on the first dispensing assembly 200 and the second dispensing assembly 400, and making it easier for the first dispensing assembly 200 and the second dispensing assembly 400 to control the temperature of the photoresist.
[0042] A second aspect of the present invention provides a photomask layering and coating apparatus, comprising: a base 100, a first dispensing assembly 200, a pre-curing assembly 300, and a transfer assembly 500. The base 100 is rotatable about its axis and has a platform 120 for placing a substrate 110. The first dispensing assembly 200 includes a first dispensing cavity for storing a first adhesive and a first dispensing nozzle communicating with the first dispensing cavity. The first dispensing nozzle faces the platform 120 to dispense the first adhesive onto the surface of the substrate 110 on the platform 120 and form a first adhesive layer. The pre-curing assembly 300 includes a heating plate 310, which is capable of heating the first adhesive layer and forming a first pre-cured adhesive layer 210. The transfer assembly 500 is drively connected to the first dispensing nozzle and the heating plate 310. 0, to switch the orientation of the first dispensing nozzle and the heating plate 310 toward the table surface 120; wherein, the transfer assembly 500 is configured to: drive the first dispensing nozzle to move toward the table surface 120 and align it with the central region of the substrate 110 on the table surface 120, dispensing the first adhesive onto the surface of the base 100, the base 100 rotating and forming a first adhesive layer on the surface of the substrate 110; drive the heating plate 310 to move toward the table surface 120, pre-baking the first adhesive layer into a first pre-cured adhesive layer 210; drive the first dispensing nozzle to move again toward the table surface 120 and align it with the central region of the substrate 110 on the table surface 120, dispensing the second adhesive onto the surface of the first pre-cured adhesive layer 210, the base 100 rotating and forming a second adhesive layer 410 on the surface of the first pre-cured adhesive layer 210.
[0043] It is understandable that the first dispensing nozzle first dispenses adhesive onto the surface of the substrate 110 to form a first adhesive layer. The heating plate 310 of the pre-curing component 300 heats the first adhesive layer, causing it to initially cure and form a first pre-cured adhesive layer 210. Then, adhesive is dispensed through the first dispensing nozzle onto the surface of the first pre-cured adhesive layer 210 to form a second adhesive layer 410. The formation of the second adhesive layer 410 is affected by the residual heat of the first pre-cured adhesive layer 210. The increased temperature leads to a decrease in the viscosity of the second adhesive layer 410. When spin-coating, the second adhesive layer 410 has better fluidity and can be coated more evenly on the surface of the first pre-cured adhesive layer 210. After pre-baking, the surface uniformity of the second adhesive layer 410 is higher, resulting in an adhesive layer with higher overall uniformity.
[0044] In some specific embodiments of the present invention, the transfer component 500 is configured to drive the heating plate 310 to move again toward the table surface 120, and pre-baking the second adhesive layer 410 as a second pre-cured adhesive layer.
[0045] It is understandable that the second adhesive layer 410 can be baked by the heating plate 310, so that the second adhesive layer 410 does not need to undergo an additional pre-baking step, thus saving equipment costs.
[0046] Reference Figure 7As shown, in some specific embodiments of the present invention, the heating plate 310 is provided with a spiral first heating element 311, which is capable of rotation.
[0047] It is understandable that when the spiral-shaped first heating element 311 rotates, it can make the heat evenly distributed on the surface of the heating plate 310, so that the temperature of the surface of the heating plate 310 is more uniform, and the first adhesive layer is heated evenly.
[0048] In this embodiment, the heating plate 310 includes a cylindrical plate and a hollow connecting column connected to the end face of the plate. A cylindrical heating cavity 312 is provided inside the cylindrical plate. A first heating element 311 is disposed within the heating cavity 312 to heat the heating plate 310 within the heating cavity 312. The first heating element 311 is spiral-shaped, and when the first heating element 311 rotates, the heat distribution within the heating cavity 312 is more uniform. The heating plate 310 can also be a rectangular plate with a cylindrical heating cavity 312, or a plate of other shapes with a cylindrical heating cavity 312. The heating plate 310 is provided with a first heating rotating shaft connected to the first heating element 311 and a second driving source connected to the first heating rotating shaft. The second driving source is connected to the third end, and the first heating rotating shaft extends into the heating cavity 312 through the hollow connecting column to drive the first heating element 311 to rotate. The first heating rotating shaft is a hollow shaft, and the hollow shaft is used to place wires to electrically connect to the first heating element 311 for electric heating. The first heating element 311 is a resistance wire.
[0049] Reference Figure 8 As shown, in some specific embodiments of the present invention, the heating plate 310 is further provided with a spiral second heating element 313, the first heating element 311 and the second heating element 313 have opposite directions of rotation and are interlocked, and the first heating element 311 and the second heating element 313 can rotate together.
[0050] It is worth noting that the second heating element 313 is also disposed within the heating cavity 312, and fills the void left by the first heating element 311, resulting in a more uniform temperature distribution within the heating cavity 312, a more uniform heating effect from the heating plate 310, and a better heating effect. In this embodiment, the first heating element 311 and the second heating element 313 are connected together to the first heating rotation shaft.
[0051] A third aspect of this invention provides a coating machine, comprising: a photomask layering coating apparatus as described in the first or second aspect embodiment. It is understood that using a photomask layering coating apparatus in the coating machine can yield a more uniform adhesive layer. Other structures of the coating machine are common knowledge to those skilled in the art and will not be described in detail here.
[0052] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.
Claims
1. A photomask layer coating apparatus, characterized in that, include: The base is rotatable about its axis and has a platform for placing a substrate. The first adhesive dispensing assembly includes a first adhesive storage chamber for storing the first adhesive and a first dispensing port communicating with the first adhesive storage chamber. The first dispensing port faces the table surface to dispense the first adhesive onto the substrate surface of the table surface and form a first adhesive layer. The pre-curing component includes a heating plate capable of heating the first adhesive layer and forming a first pre-cured adhesive layer; The second adhesive dispensing assembly includes a second adhesive storage chamber for storing the second adhesive and a second dispensing port communicating with the second adhesive storage chamber. The second dispensing port faces the table surface to dispense the second adhesive onto the surface of the first pre-cured adhesive layer and form the second adhesive layer. A transfer component is connected to the first dispensing nozzle, the heating plate, and the second dispensing nozzle to switch the orientation of the first dispensing nozzle, the heating plate, and the second dispensing nozzle toward the table surface; The transfer component is configured to: drive the first dispensing nozzle to move toward the central region of the substrate facing the table and aligned with the table, dispense the first adhesive onto the surface of the table, rotate the table and form a first adhesive layer on the surface of the substrate; drive the heating plate to move toward the table and pre-bake the first adhesive layer as a first pre-cured adhesive layer; The second dispensing nozzle is driven to move toward the platform and aligned with the center region of the substrate on the platform, and the second adhesive is dispensed onto the surface of the first pre-cured adhesive layer. The platform rotates and forms a second adhesive layer on the surface of the first pre-cured adhesive layer.
2. The photomask layer coating apparatus according to claim 1, characterized in that: The viscosity of the second adhesive is lower than that of the first adhesive.
3. The photomask layer coating apparatus according to claim 1, characterized in that: The transfer assembly includes a first transfer member and a first drive source connected to the first transfer member. The first transfer member has a first end, a second end, and a rotating part. The first end is provided with a first dispensing nozzle, and the second end is provided with a second dispensing nozzle. The rotating part is connected to the first drive source. The first transfer member can switch the orientation of the first dispensing nozzle or the second dispensing nozzle toward the table surface by rotation.
4. The photomask layer coating apparatus according to claim 3, characterized in that: The first transfer member also includes a third end, which is connected to the heating plate. The first transfer member can be rotated to switch the first dispensing nozzle, the second dispensing nozzle, or the heating plate to face the table surface.
5. The photomask layer coating apparatus according to claim 3, characterized in that: The transfer assembly further includes a second transfer member and a second drive source connected to the second transfer member. The second transfer member is connected to the heating plate to drive the heating plate over the table surface.
6. A photomask layer coating apparatus, characterized in that, include: The base is rotatable about its axis and has a platform for placing a substrate. The first adhesive dispensing assembly includes a first adhesive storage chamber for storing the first adhesive and a first dispensing port communicating with the first adhesive storage chamber. The first dispensing port faces the table surface to dispense the first adhesive onto the substrate surface of the table surface and form a first adhesive layer. The pre-curing component includes a heating plate capable of heating the first adhesive layer and forming a first pre-cured adhesive layer; A transfer component is connected to the first dispensing nozzle and the heating plate to switch the orientation of the first dispensing nozzle and the heating plate toward the table surface; The transfer component is configured to: drive the first dispensing nozzle to move toward the central region of the substrate facing the table and aligned with the table, dispense the first adhesive onto the surface of the table, rotate the table and form a first adhesive layer on the surface of the substrate; drive the heating plate to move toward the table and pre-bake the first adhesive layer as a first pre-cured adhesive layer; The first dispensing nozzle is driven to move again toward the platform and aligned with the center region of the substrate on the platform, and the second adhesive is dispensed onto the surface of the first pre-cured adhesive layer. The platform rotates and forms a second adhesive layer on the surface of the first pre-cured adhesive layer.
7. The photomask layer coating apparatus according to any one of claims 1 to 6, characterized in that: The transfer component is configured to drive the heating plate to move again toward the table surface, pre-baking the second adhesive layer as a second pre-cured adhesive layer.
8. The photomask layer coating apparatus according to any one of claims 1 to 6, characterized in that: The heating plate is provided with a spiral-shaped first heating element, which is capable of rotating.
9. The photomask layer coating apparatus according to claim 8, characterized in that: The heating plate is also provided with a spiral second heating element. The first heating element and the second heating element rotate in opposite directions and are interlocked. The first heating element and the second heating element can rotate together.
10. A glue applicator, characterized in that, include: The photomask layer coating apparatus according to any one of claims 1 to 9.