Concentrated harmless treatment device and method for inflammable dust

Abstract

According to the flammable dust centralized harmless treatment device and method, conveying and repeated turning and falling of materials are achieved through the design of a double-layer bottom plate of a chain plate scraper, the sufficiency and uniformity of dust oxidation reaction are ensured by combining an air volume automatic control system based on temperature feedback, and the oxidation efficiency is remarkably improved; the dust crushing device integrated at the discharge end of the chain plate scraper effectively solves the problem of blockage caused by hardened dust after oxidation, and ensures the continuity of material conveying; the shutter dust discharging and weighing mechanism realizes online accurate metering and automatic controllable discharging of oxidized dust, and provides preparation for subsequent working steps; and finally, the oxidized dust is fully stirred, extruded and humidified through a multi-step positive and negative rotation stirring and quantitative water spraying humidifying procedure of the spiral humidifier, the specific surface area of the oxidized dust is effectively reduced, the chemical structure of the oxidized dust is passivated, and therefore safe, automatic, efficient and thorough harmless centralized treatment on the flammable dust is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of dust removal in semiconductor industry production, and in particular to a combustible dust centralized harmless treatment device and method. BACKGROUND

[0002] In the production of semiconductor industry, especially in the process of pulling single crystal silicon, polycrystalline silicon and heavily doped single crystal, inert gas is often used as protective atmosphere in order to protect the process environment and equipment. These gases need to be purified by filters before being recycled, and a large amount of fine dust generated in the process is collected. These dusts are mainly composed of silicon powder and other materials, which are extremely flammable and explosive, posing a great hidden danger to production safety. At present, the commonly used treatment method in the industry is to oxidize and passivate the collected dust inside the filter system or nearby, trying to reduce its flammability through oxidation reaction. Common structures include filter units integrated with heating or oxidation functions, or simple oxidation bins set downstream of the filter.

[0003] However, the existing technical solutions have many significant problems. First, the close coupling of the oxidation process with the filter equipment makes it easy for operators to cause dust flash combustion or explosion due to misoperation (such as introducing air) or equipment residual heat when maintaining and repairing the filter, resulting in personnel injury accidents. At the same time, the high-temperature oxidation process also easily burns through or damages the filter bag. Second, due to inaccurate control of the oxidation environment, there are often cases of insufficient and uneven oxidation, making it difficult to guarantee the treatment effect. The dust that has not been completely oxidized still poses a risk in subsequent processing. More seriously, if the filter bag is burned through without being detected, a large amount of unfiltered dust will directly enter the downstream vacuum pump system, causing the vacuum pump to stall and shut down, resulting in the interruption of the entire expensive crystal pulling process and causing significant direct economic losses and production losses to the enterprise. In addition, the existing devices usually have low automation level and rely heavily on manual judgment and operation, resulting in low processing efficiency and poor consistency.

[0004] Therefore, there is an urgent need in the field to develop a special device that can separate the oxidation process from the filtration, achieve automated precise control, ensure complete and uniform oxidation, and ultimately achieve complete harmless treatment of dust, in order to solve the series of outstanding problems in the existing technology, such as poor safety, low reliability, unstable treatment effect, and large potential economic losses. SUMMARY

[0005] The purpose of the present application is to provide a combustible dust centralized harmless treatment device and method to solve the problems existing in the prior art.

[0006] To achieve the above purpose, the present application provides the following solutions:

[0007] The present application provides a combustible dust centralized harmless treatment device, comprising:

[0008] The feeding mechanism, the oxidation cabin, the dust humidifying cabin and the electrical cabinet cabin arranged inside the dust humidifying cabin are sequentially communicated;

[0009] The oxidation cabin is internally provided with an oxidation conveying mechanism, which comprises a star-shaped dust discharging valve, a chain plate scraper and a dust crushing device; the feeding port of the star-shaped dust discharging valve is located below the feeding pipe and is driven by a universal joint, and the discharging port thereof corresponds to the feeding end of the chain plate scraper; the chain plate scraper is driven by a plum blossom joint and comprises an upper layer bottom plate and a lower layer bottom plate, which are used for conveying and turning over the dust; the dust crushing device is arranged at the discharging end of the chain plate scraper and is used for crushing the dust agglomerates after oxidation;

[0010] The air outlet end of the oxidation conveying mechanism is provided with an exhaust air filtering mechanism for filtering the dust after oxidation.

[0011] Preferably, the oxidation cabin, the dust humidifying cabin and the electrical cabinet cabin are arranged inside a centralized harmless treatment device shell, which comprises a frame and a skin covering the outside of the frame; the top of the oxidation cabin is provided with openable first, second, third and fourth cabin covers, the side thereof is provided with openable left and right oxidation cabin doors, and the bottom thereof is provided with an oxidation cabin bottom plate, and a sealing strip is arranged at each connection position for sealing; the side of the dust humidifying cabin is provided with openable left side, maintenance side, water supply maintenance, spiral humidifier discharging port and filter maintenance doors, and the bottom thereof is provided with a dust humidifying cabin bottom plate; the side of the electrical cabinet cabin is provided with openable first and second electrical cabinet doors;

[0012] The feeding mechanism comprises a feeding port flange connected with an upstream device through a connecting hose, the feeding port flange is connected with a feeding pipe, and the feeding pipe is installed on the cabin cover at the top of the oxidation cabin through a reducing pipe and a rectangular flange;

[0013] The driving mechanism comprises a first motor reducer for driving the star-shaped dust discharging valve and a second motor reducer for driving the chain plate scraper;

[0014] The control system is arranged in the electrical cabinet cabin and comprises a PLC controller, a touch screen, a first temperature sensor for detecting the temperature of the oxidation cabin, a second temperature sensor and a weighing sensor for detecting the weight of the dust in the louvered dust discharging and weighing mechanism; the first temperature sensor and the second temperature sensor are respectively connected with a first Kf joint and a second Kf joint; the control system is in communication connection with the first motor reducer, the second motor reducer, the louvered dust discharging and weighing mechanism, the spiral humidifier, the first temperature sensor, the second temperature sensor and the weighing sensor, and is used for realizing automatic control.

[0015] Preferably, the chain scraper further comprises:

[0016] Two chain scraper beams are arranged in parallel in the oxidation cabin;

[0017] Chain wheel driving shaft and chain wheel driven shaft are respectively installed at both ends of the two chain scraper beams through belt bearing;

[0018] Chain wheels are installed at both ends of the chain wheel driving shaft and the chain wheel driven shaft;

[0019] Round chains are sleeved on both sides of the chain wheels;

[0020] A plurality of scrapers are fixedly installed between the two round chains at intervals;

[0021] The dust crushing device comprises a fixed seat, a dust crushing plate, and a spring; the fixed seat is fixedly installed at the end of the lower layer bottom plate; the dust crushing plate is rotatably installed on the fixed seat; and the spring is sleeved on both sides of the dust crushing plate to provide a reset force for the dust crushing plate.

[0022] Preferably, the louvered dust discharging and weighing mechanism further comprises a louvered dust discharging and weighing hopper assembly, a louvered dust discharging and weighing guide cylinder mechanism, a louvered dust discharging and weighing mechanism, and a louvered dust discharging and weighing weighing mechanism.

[0023] The louvered dust discharging and weighing mechanism comprises:

[0024] The hopper assembly comprises a trapezoidal ash feeding hopper and a hopper rectangular flange arranged at the upper and lower ends of the trapezoidal ash feeding hopper;

[0025] The guide cylinder mechanism comprises a mini cylinder, a first guide rod, a second guide rod, a first guide sleeve, a second guide sleeve, and a guide rod connecting plate;

[0026] The louvered dust discharging and weighing hopper assembly comprises a louvered dust discharging and weighing strip hole plate, a louvered dust discharging and weighing reverse blade rotatably installed thereon, a louvered dust discharging and weighing rotating rod fixedly connected with the reverse blade, a discharging pull rod, and a discharging connecting rod; the mini cylinder is in transmission connection with the discharging connecting rod through the guide cylinder mechanism to drive the louvered dust discharging and weighing reverse blade to open and close;

[0027] The weighing mechanism comprises a weighing sensor and a weighing sensor mounting plate, and is used for monitoring the dust mass in the hopper assembly in real time;

[0028] The pneumatic vibrator is installed on the hopper assembly to assist in discharging.

[0029] Preferably, a spiral humidifier is further included, with an inlet connected below the outlet of the louvered dust discharging and weighing mechanism, for humidifying and stirring the received dust;

[0030] The spiral humidifier comprises:

[0031] A humidifier housing is provided with an inlet and an outlet at two ends respectively;

[0032] A spiral stirring spindle is rotatably arranged in the humidifier housing, and provided with a right-hand spiral belt and a left-hand spiral belt;

[0033] A servo motor reducer is connected with the spiral stirring spindle through a key at an output end;

[0034] First, second, third and fourth water spraying nozzles are arranged on the top of the humidifier housing, and connected with a water source through first, second, third and fourth electromagnetic valves and control pipelines respectively.

[0035] Preferably, the air exhaust filtering mechanism comprises an air inlet pipe, a filter and a fan; one end of the air inlet pipe is in communication with the inside of the oxidation cabin, and the other end is connected with the inlet of the filter; the fan is connected with the outlet of the filter, and the air outlet of the fan is connected with a pipeline for discharging the filtered gas through a smoke exhaust pipe;

[0036] The air exhaust filtering mechanism further comprises an air door and an air door pipeline; one end of the air door pipeline is in communication with the outside, and the other end is in communication with the inside of the oxidation cabin through the bottom plate of the oxidation cabin; the air door is arranged on the air door pipeline, and used for adjusting the air amount entering the oxidation cabin.

[0037] Preferably, a booster water pump is further included; the water inlet of the booster water pump is connected with an external water source through a water inlet pipeline, and the water outlet is connected with a water collecting pipe through a water delivery hose; the water collecting pipe is connected with the first, second, third and fourth water spraying nozzles of the spiral humidifier through the first, second, third and fourth electromagnetic valves through a plurality of water distribution hoses.

[0038] Preferably, the filter is fixed in the dust humidifying cabin through a filter mounting frame, an upper filter mounting plate and a lower filter mounting plate; the filter comprises a housing, a filter core, a clean air chamber housing and an openable filter cover; the filter cover is locked and sealed through a joint screw, a joint nut and a filter cover pressing rod.

[0039] The application further provides a flammable dust centralized harmless treatment method, comprising the following steps:

[0040] S1. The dust to be treated falls into the star-shaped dust unloading valve under the action of weight through the feed inlet, the star-shaped dust unloading valve is connected with the universal coupling and is driven by the first motor reducer, and the matching rotating speed of the chain scraper conveyor is uniform, and the material is uniformly distributed on the upper layer of the chain scraper conveyor;

[0041] S2. The dust starts to be controllably oxidized in the oxidation cabin of the centralized harmless treatment device, the chain scraper conveyor is driven by the second motor reducer, the dust is pushed to the end by the scraper, falls into the lower layer of the chain scraper conveyor, and the dust is redistributed to make it more fully oxidized, the scraper is scraped back again in the reverse direction, the movement of the scraper collides with the broken dust plate, the dust in the sheet structure is crushed, and with the continuous movement of the scraper, the broken dust plate moves around the fixed seat and is pressed down, and after the scraper passes completely, the broken dust plate is reset under the action of the spring; in the process of oxidation, external air enters the oxidation cabin of the centralized harmless treatment device through the air door, the air door coarsely adjusts the air intake, the gas in the oxidation cabin of the shell of the centralized harmless treatment device is conveyed to the filter through the induced draft tube and the pipe joint, and after filtration, the air is discharged to the atmosphere by the fan and the smoke pipe; the first temperature sensor and the second temperature sensor collect the dust temperature at different positions in the oxidation cabin in real time, and feed back to the PLC control system, the system controls the rotating speed of the fan, the air intake speed of the air into the oxidation cabin is controlled by controlling the exhaust speed, and thus the oxidation process is controlled;

[0042] S3. The oxidized dust is discharged into the louvered dust unloading and weighing mechanism through the oxidation cabin discharge port, at this time, the louvered dust unloading and weighing mechanism is in a closed state, the weighing sensor monitors the dust quality in real time, and when the dust reaches the set quality, the weighing sensor under the louvered dust unloading and weighing mechanism gives a signal, the signal is transmitted to the mini pneumatic cylinder through PLC processing to drive the hopper reversing blade to reverse by 90 degrees, and a feedback signal is given, and at the same time, the pneumatic vibrator starts to work to help accelerate the unloading;

[0043] S4. The oxidized dust is discharged into the spiral humidifier through the feed inlet, when the dust in the louvered dust unloading and weighing mechanism is discharged to the set humidification batch quality, the weighing sensor gives a signal again, the hopper reversing blade is closed again under the action of the mini pneumatic cylinder, a feedback signal is given, and at the same time, the pneumatic vibrator stops working, while the louvered dust unloading and weighing mechanism is discharging dust, the spiral humidifier completes the material humidification to the discharge operation through seven working steps.

[0044] Preferably, the seven working steps include:

[0045] The first working step is that the spiral stirring main shaft is driven to rotate forward by a preset number of revolutions by a servo motor reducer, the forward rotating spiral belt on the spiral stirring main shaft pushes the dust away from the humidifier shell, and at the same time, the first electromagnetic valve, the second electromagnetic valve, the third electromagnetic valve and the fourth electromagnetic valve are opened, and water is quantitatively sprayed on the dust through the first water nozzle, the second water nozzle, the third water nozzle and the fourth water nozzle respectively;

[0046] The second working step, the spiral stirring main shaft reverses for a preset number of turns, and the second electromagnetic valve and the fourth electromagnetic valve open the water spray;

[0047] The third working step, the spiral stirring main shaft rotates forward for a preset number of turns, and the first electromagnetic valve and the third electromagnetic valve open the water spray;

[0048] The fourth working step, the spiral stirring main shaft reverses for a preset number of turns, and the second electromagnetic valve and the fourth electromagnetic valve open the water spray;

[0049] The fifth working step, the spiral stirring main shaft rotates forward for a preset number of turns, and the first electromagnetic valve and the third electromagnetic valve open the water spray;

[0050] The sixth working step, the spiral stirring main shaft reverses for a preset number of turns, and no water is sprayed;

[0051] The seventh working step, the spiral stirring main shaft rotates forward to discharge the stirred humidified powder, and finally discharges through the discharge port of the spiral humidifier.

[0052] The present application has the following beneficial technical effects compared with the prior art:

[0053] The combustible dust centralized harmless treatment device and method provided by the present application fundamentally eliminates the risk of burning of the filter bag of the filter during the dust oxidation process through the innovative layout of physically separating the oxidation cabin from the filter equipment, greatly improving the safety and reliability of the filter equipment; the double-layer bottom plate design of the chain scraper conveyor is used to realize the conveying and repeated turning and falling of the material, and the air volume automatic control system based on temperature feedback is combined to ensure the sufficiency and uniformity of the dust oxidation reaction, significantly improving the oxidation efficiency; the dust crushing device integrated at the discharge end of the chain scraper conveyor effectively solves the blockage problem caused by the hardened dust after oxidation, ensuring the continuity of the material conveying; the louvered dust unloading and weighing mechanism realizes online accurate measurement and automatic controllable unloading of the dust after oxidation, providing preparation for subsequent steps; finally, through the multi-step forward and reverse stirring and quantitative water spraying and humidifying program of the spiral humidifier, the dust after oxidation is fully stirred, extruded and humidified, effectively reducing its specific surface area and passivating its chemical structure, thereby realizing safe, efficient and complete centralized harmless treatment of combustible dust, automatic operation throughout the process, greatly saving labor costs and eliminating the risks brought by human operation. BRIEF DESCRIPTION OF DRAWINGS

[0054] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0055] Figure 1 Front view of the present application;

[0056] Figure 2 Top view of the present application;

[0057] Figure 3 Rear view of the present application;

[0058] Figure 4 Sectional view of the present application;

[0059] Figure 5 Front view of the present application centralized harmless treatment device shell;

[0060] Figure 6 Sectional view of the present application centralized harmless treatment device shell;

[0061] Figure 7 Sectional view of the present application centralized harmless treatment device shell;

[0062] Figure 8 Sectional view of the present application centralized harmless treatment device shell;

[0063] Figure 9 Front view of the present application chain scraper;

[0064] Figure 10 Top view of the present application chain scraper;

[0065] Figure 11 Sectional view of the present application chain scraper;

[0066] Figure 12 Partial view of the present application chain scraper;

[0067] Figure 13 Front view of the present application louvered ash unloading and weighing mechanism;

[0068] Figure 14 Top view of the present application louvered ash unloading and weighing mechanism;

[0069] Figure 15 Axial side view of the present application louvered ash unloading and weighing mechanism;

[0070] Figure 16 Front view of the present application spiral humidifier;

[0071] Figure 17 Front view of the present application spiral humidifier main shaft;

[0072] Figure 18 Filter installation view of the present application;

[0073] Figure 19 Front view of the present application filter;

[0074] Reference signs:

[0075] 1, soft connection pipe; 2, air door; 3, air door pipeline; 4, first motor reducer; 5, first temperature sensor; 6, universal coupling; 7, second motor reducer; 8, plum coupling; 9, air outlet connecting pipeline; 10, clamp; 11, pipe joint; 12, air inlet pipe; 13, water inlet pipeline; 14, busbar mounting plate; 15, busbar; 16, water distribution hose; 17, right-angle pipe joint; 18, first electromagnetic valve; 19, second electromagnetic valve; 20, third electromagnetic valve; 21, fourth electromagnetic valve; 22, water delivery hose; 23, second temperature sensor; 24, touch screen; 25, fireproof cloth; A, centralized harmless treatment device shell; A1, feed inlet flange; A2, first hatch cover; A3, oxidation cabin left side hatch; A4, left side hatch; A5, skin; A6, frame; A7, water supply maintenance door; A8, spiral humidifier discharge port hatch; A9, filter maintenance door; A10, electrical cabinet hatch; A11, oxidation cabin right side hatch; A12, motor fixing seat; A13, smoke exhaust pipe; A14, motor fixing seat; A15, first Kf joint; A16, electrical cabinet hatch; A17, maintenance side hatch; A18, oxidation cabin bottom plate; A19, hatch cover sealing strip; A20, hatch sealing strip; A21, oxidation cabin discharge port; A22, dust humidification cabin bottom plate; A23, filter mounting rack; A24, rectangular flange; A25, feed pipe; A26, reducing pipe; A27, second hatch cover; A28, third hatch cover; A29, fourth hatch cover; A30, filter upper mounting plate; A31, filter lower mounting plate; A32, second Kf joint; A33, air inlet of air inlet; B, chain scraper; B1, bearing with seat; B2, bearing mounting plate; B3, chain scraper beam; B4, adjusting screw; B5, dust shield; B6, sprocket driven shaft; B7, sprocket; B8, round chain; B9, chain hook; B10, scraper; B11, upper layer bottom plate;

[0076] B12, lower layer bottom plate; B13, fixed seat; B14, broken dust board; B15, spring; B16, sprocket drive shaft; C, star-shaped dust discharging valve; D, louver dust discharging and weighing mechanism; D1, hopper circle edge; D2, trapezoidal ash feeding hopper; D3, hopper rectangular flange; D4, mini air cylinder; D5, first guide rod; D6, first guide sleeve; D7, guide rod connecting plate; D8, second guide sleeve; D9, air cylinder mounting plate; D10, second guide rod; D11, pneumatic vibrator; D12, rectangular sheet metal pipe; D13, lower hopper rectangular flange; D14, dust discharging cone hopper; D15, lower hopper bottom support flat plate; D16, side edge connecting bottom support circle edge; D17, lower welded lower feeding pipe; D18, lower feeding pipe circle edge; D19, weighing sensor mounting plate; D20, plate connecting pipe; D21, weighing mounting plate connecting pipe circle edge; D22, louver dust discharging strip hole plate; D23, hopper reverse blade; D24, louver dust discharging rotating rod; D25, discharging pull rod; D26, discharging pull rod; D27, louver dust discharging cylinder action connecting rod; D28, weighing sensor; D29, inner hexagonal screw; D30, nut; E, spiral humidifier; E1, first humidifier shell; E2, second humidifier shell; E3, third humidifier shell; E4, bearing seat; E5, bearing cover; E6, first sealing ring; E7, feeding port; E8, first water spraying nozzle; E9, second water spraying nozzle; E10, third water spraying nozzle; E11, fourth water spraying nozzle; E12, clamp; E13, spiral stirring main shaft; E14, shaft seat flange; E15, motor side bearing seat; E16, motor connecting seat; E17, servo motor speed reducer; E18, key; E19, discharge port; E20, double row angular contact ball bearing; E21, locking nut; E22, check ring; E23, second sealing ring; E24, wool sealing gasket; E25, sealing cover plate; E26, wool pad sealing plate; E27, third sealing ring; E28, sealing cover plate; E29, deep groove ball bearing; E30, main shaft; E31, right-hand helical belt; E32, helical belt support rod; E33, left-hand helical belt; F, filter; F1, shell; F2, air inlet Kf joint; F3, shell flange; F4, clean air chamber shell; F5, hinged screw fixing seat; F6, hinged nut; F7, hinged screw; F8, filter cover pressing rod; F9, filter cover support; F10, filter cover; F11, filter cover shaft seat; F12, filter air outlet pipeline; F13, fan; F14, filter element; G, booster water pump. DETAILED DESCRIPTION

[0077] The serial numbers assigned to components in this document, such as "first," "second," etc., are merely used to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). In the description of this invention, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention.

[0078] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0079] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0080] The purpose of this invention is to provide a centralized harmless treatment device and method for flammable dust, so as to solve the problems existing in the prior art.

[0081] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0082] Example 1:

[0083] This embodiment provides a centralized, harmless treatment device for flammable silicon dust in semiconductor crystal pulling processes. For example... Figures 1-19As shown, the device integrates oxidation, crushing, metering, and humidification, and can implement controllable oxidation, lump breaking, batch weighing, and forced humidification of flammable dust such as aluminum and magnesium in a closed environment, realizing harmless, reduction, and resourceful disposal of dust. The device is in the form of a rectangular cabin structure, composed of a centralized harmless treatment device shell A. The inside of the shell is divided into an oxidation cabin, a dust humidification cabin, and an electrical cabinet cabin from top to bottom, and the cabins are air-tightly isolated by welding, bolts, and sealing elements. The outer wall of the shell is covered with a continuous skin A5 to ensure strength and aesthetics. The shell skeleton is supported by a frame A6 welded from rectangular tubes, and the doors, access ports, and observation windows of each functional cabin are arranged at the corresponding openings of the frame A6 for assembly and maintenance.

[0084] Specifically, the oxidation cabin is located on the upper layer of the shell and is enclosed by the first cabin cover A2, the second cabin cover A27, the third cabin cover A28, the fourth cabin cover A29, the left side cabin door A3 of the oxidation cabin, the right side cabin door A11 of the oxidation cabin, and the bottom plate A18 of the oxidation cabin. Reliable sealing is achieved between each cabin cover and door through cabin cover sealing strips A19 and door sealing strips A20 to prevent dust from escaping during oxidation. The top center of the oxidation cabin is provided with a feed port flange A1, which is flexibly connected with the external dust collection pipeline through a soft connecting pipe 1 to isolate mechanical vibration and thermal expansion and contraction. The feed port flange A1 is sequentially welded with a feed pipe A25, a reducing pipe A26, and a rectangular flange A24 downward, and the rectangular flange A24 is welded and fixed with the second cabin cover A27 to form a vertical feeding channel from the top of the shell to the inside of the oxidation cabin.

[0085] Further, the star-shaped dust valve C and the chain scraper B are arranged in the oxidation cabin from top to bottom. The shell of the star-shaped dust valve C is fixed on the upper part of the oxidation cabin by bolts, and the rotor is driven by the first motor reducer 4 through the universal joint 6. The universal joint 6 can compensate the installation error and reduce the impact, so that the star-shaped dust valve C uniformly and quantitatively spreads the dust on the upper layer bottom plate B11 of the chain scraper B. The chain scraper B is hoisted below the oxidation cabin bottom plate A18 through the chain scraper beam B3, and the chain scraper beam B3 is a groove steel structure arranged in parallel, and the end is welded and fixed with the frame A6. The chain wheel driving shaft B16 and the chain wheel driven shaft B6 are respectively installed at both ends of the chain scraper beam B3 through the bearing B1 with seat, the chain wheel B7 is fixed on the shaft end, the round chain B8 is sleeved on the chain wheel B7, the chain hook B9 is riveted at intervals on the outside of the round chain B8, and the scraper B10 crosses the two round chains B8 and is fastened by screws, forming a closed material scraping loop. The second motor reducer 7 is fixed on the motor fixing seat A12, and the motor fixing seat A12 is welded on the outer wall of the oxidation cabin. The second motor reducer 7 drives the chain wheel driving shaft B16 through the star-shaped coupling 8, so that the chain scraper B runs in the set direction. The material falling gap is left between the upper layer bottom plate B11 and the lower layer bottom plate B12, and the dust is turned over from top to bottom when the scraper B10 advances, so that the dust is fully contacted with the oxidation air; when returning, the scraper B10 reverses the material on the lower layer bottom plate B12, and pushes the oxidized dust to the oxidation cabin discharge port A21. In order to prevent the dust from blocking due to caking during oxidation, a broken dust mechanism is arranged at the discharge end of the chain scraper B. The broken dust mechanism is composed of a fixing seat B13, a broken dust plate B14 and a spring B15. The fixing seat B13 is welded at the end of the lower layer bottom plate B12, the broken dust plate B14 is hinged to the fixing seat B13 through a pin shaft, and the spring B15 is sleeved on both ends of the pin shaft and applies a pre-tightening force to the broken dust plate B14 towards the chain plate direction. When the flaky dust moves to the broken dust plate B14 with the scraper B10, the broken dust plate B14 is pressed and turned down around the pin shaft, and the flaky dust is forced to break; after the scraper B10 passes, the broken dust plate B14 is quickly reset under the action of the spring B15, preparing for the next breaking action.

[0086] Further, the oxidation cabin bottom plate A18 is provided with an oxidation cabin discharge port A21, which is flexibly connected with the louvered dust discharging and weighing mechanism D through the fireproof cloth 25, preventing dust flying and allowing the weighing module to freely float. The louvered dust discharging and weighing mechanism D is located in the dust humidifying cabin, and sequentially includes a feeding hopper assembly, a guide cylinder mechanism, a louvered dust discharging hopper mechanism, a dynamic discharging hopper mechanism and a weighing bottom plate group mechanism from top to bottom. The feeding hopper assembly is composed of a hopper circle edge D1, a trapezoidal dust feeding hopper D2 and a hopper rectangular flange D3. The hopper circle edge D1 is welded to the outer edge of the upper opening of the trapezoidal dust feeding hopper D2, and can be tightly sealed with the fireproof cloth 25 through a pressing plate and bolts. The hopper rectangular flange D3 is welded to the lower opening of the trapezoidal dust feeding hopper D2, and is locked with the second hopper rectangular flange D3 through a hexagonal screw D29 and a nut D30, forming a rigid transition section. The guide cylinder mechanism is installed outside the rectangular metal tube D12. The mini cylinder D4 is provided with a magnetic ring, and can output reciprocating linear motion. The piston rod end of the mini cylinder D4 is threadedly connected with a guide rod connecting plate D7. The guide rod connecting plate D7 is provided with a first guide rod D5 and a second guide rod D10 at four corners respectively. The first guide rod D5 is slidably connected with the guide sleeve D6 and the cylinder mounting plate D9. The second guide rod D10 is slidably connected with the second guide sleeve D8 and the cylinder mounting plate D9. The cylinder mounting plate D9 is welded to the outer wall of the rectangular metal tube D12, ensuring stable movement. The second guide rod D10 is fixedly connected with a discharging pull rod D25 through the nut D30. The discharging pull rod D25 is hingedly connected with a louvered dust discharging and cylinder action connecting rod D27 through a louvered dust discharging connecting rod D26. The louvered dust discharging and cylinder action connecting rod D27 is welded to a louvered dust discharging rotating rod D24 at the other end. The louvered dust discharging rotating rod D24 is installed in the louvered dust discharging and strip hole plate D22 through bearings at both ends. The louvered dust discharging and strip hole plate D22 is riveted with a hopper reverse blade D23, forming a four-bar linkage mechanism. The mini cylinder D4 can drive the hopper reverse blade D23 to flip between 0° and 90°, realizing the opening and closing of the discharging port. The louvered dust discharging and hopper mechanism is bolted with the feeding hopper assembly through the rectangular metal tube D12, and is provided with the louvered dust discharging and strip hole plate D22 and the hopper reverse blade D23. The plate surface is provided with strip holes, allowing dust to fall and forming a sealing surface when closed. The dynamic discharging hopper mechanism is located below the louvered dust discharging and hopper mechanism. The upper opening of an active dust discharging cone hopper D14 is welded with a discharging hopper rectangular flange D13. A discharging hopper bottom support plate D15 is welded between the active dust discharging cone hopper D14 and a discharging circular tube D17. The side connecting bottom support circle edge D16 and the discharging circular tube circle edge D18 are used for strengthening and preventing hand injury.The weighing bottom plate group mechanism is located below the dynamic lower hopper mechanism, the weighing sensor D28 adopts a cantilever beam structure, the fixed end is bolted with the dust humidification cabin bottom plate A22 through the weighing sensor mounting plate D19, the free end is connected with the lower hopper bottom support flat plate D15 through the internal hexagonal screw D29, the plate connecting circular pipe D20 is sleeved outside the lower welded lower discharge circular pipe D17 and is welded with the weighing sensor mounting plate D19 through the weighing mounting plate connecting circular pipe ring edge D21, a rigid frame is formed, and the weighing precision is ensured. The pneumatic vibrator D11 is fixed to the outer wall of the rectangular sheet metal pipe D12 through a support, is synchronously started when the discharge signal is triggered, and high-frequency vibration is utilized to prevent dust bridging.

[0087] Further, the dust humidifying cabin is located on the left side of the lower layer of the shell, and a spiral humidifier E, a filter F and a booster water pump G are installed inside. The spiral humidifier E is in the form of a U-shaped groove structure, which is segmented and welded by a first humidifier shell E1, a second humidifier shell E2 and a third humidifier shell E3. The two ends of the shell are welded with a feeding port E7 and a discharging port E19 respectively. The feeding port E7 is flange-connected with the baffle dust discharging and weighing mechanism D, and the discharging port E19 is flange-connected with the spiral humidifier discharging port cabin door A8, which is convenient for maintenance. The spiral stirring main shaft E13 penetrates the inside of the shell, and its structure is composed of a main shaft E30, a positive rotation spiral belt E31, an opposite rotation spiral belt E33 and a spiral belt support rod E32. The positive rotation spiral belt E31 and the opposite rotation spiral belt E33 rotate in opposite directions, so that the material can be pushed forward and back mixed respectively during forward and reverse rotation, ensuring uniform humidification. One end of the main shaft E30 is connected with the output shaft of a servo motor reducer E17 through a key E18. The servo motor reducer E17 is installed at the outer end of a motor side bearing seat E15 through a motor connecting seat E16. The motor side bearing seat E15 is fixed with the shaft seat flange E14 through bolts. The shaft seat flange E14 is connected with the flange of the third humidifier shell E3. The other end of the main shaft E30 is supported in the bearing seat E4 through a double-row angular contact ball bearing E20. The bearing seat E4 is fixed with the shaft seat flange E3 through bolts. The shaft seat flange E3 is connected with the flange of the first humidifier shell E1. Deep groove ball bearings E29 or double-row angular contact ball bearings E20 are arranged in the bearing seats E4 and E15 to meet the requirements of axial and radial composite load. Wool pad sealing plates E26, wool sealing pads E24 and sealing cover plates E25 are arranged outside the bearings in sequence to form multiple seals to prevent dust or water vapor from entering the bearing cavity. Four threaded holes are formed in the top of the first humidifier shell E1 along the axial direction at equal intervals. A first water nozzle E8, a second water nozzle E9, a third water nozzle E10 and a fourth water nozzle E11 are installed through clamps E12. The four water nozzles are connected with a busbar 15 through a water distribution hose 16, a right-angle pipe joint 17, a first electromagnetic valve 18, a second electromagnetic valve 19, a third electromagnetic valve 20 and a fourth electromagnetic valve 21. The busbar 15 is connected with the outlet of the booster water pump G through a water delivery hose 22. The inlet of the booster water pump G is connected with an external tap water network through a water inlet pipeline 13. A busbar mounting plate 14 is welded to the bottom plate A22 of the dust humidifying cabin to fix the busbar 15. The PLC system controls the opening and closing and opening degree of the electromagnetic valves according to the feedback of the dust quality of the weighing sensor D28 to realize precise water adding and ensure that the moisture content meets the environmental protection requirements.

[0088] Further, the filter F is located on the right side of the dust humidification cabin and is bolted to the shell frame through the filter mounting frame A23. The filter F is enclosed by the shell F1, the clean gas chamber shell F4 and the filter cover F10 to form a sealed cavity. The shell flange F3 is welded between the shell F1 and the clean gas chamber shell F4 and is used to install the filter element F14. The filter element F14 is a cylindrical high-efficiency membrane filter material. Its open end is tightly pressed between the shell flange F3 and the clean gas chamber shell F4, and the other end is closed. The filter element F14 has a large filtering area and low resistance. The air inlet Kf joint F2 is welded to the side wall of the shell F1 and is connected to the oxidation cabin bottom plate A18 through the clamp 10, the pipe joint 11 and the air inlet pipe 12. The high-temperature dust-containing gas in the oxidation cabin enters the filter F under the negative pressure of the fan F13, and the clean gas enters the air outlet connecting pipeline 9 through the filter outlet pipeline F12 after being filtered by the filter element F14, and is finally discharged into the atmosphere through the exhaust pipe A13. One side of the filter cover F10 is connected to the clean gas chamber shell F4 through a hinge, and the other side is locked through the joint screw fixed seat F5, the joint screw F7, the joint nut F6 and the filter cover pressing rod F8. The filter cover support F9 cooperates with the filter cover shaft seat F11 to realize quick opening and closing, which is convenient for replacing and maintaining the filter element. The fan F13 is a variable frequency centrifugal fan. Its speed is automatically adjusted by the PLC according to the temperature signals fed back by the first temperature sensor 5 and the second temperature sensor 23 in the oxidation cabin in real time, so as to realize closed-loop control of the oxidation process temperature.

[0089] Further, the electrical cabinet cabin is located on the right side of the lower layer of the shell and is enclosed by the electrical cabinet cabin door A10, the electrical cabinet cabin door A16 and the skin A5. The cabin door is sealed by the cabin door sealing strip A20 to prevent dust and moisture from entering. The touch screen 24 is installed on the outside of the electrical cabinet cabin door A10 and is used as a human-computer interaction interface to display real-time parameters such as temperature, weight and flow. Manual / automatic mode switching, parameter setting and fault inquiry can be performed. The cabin is arranged with PLC, frequency converter, relay, circuit breaker and switching power supply and other electrical elements. All cables enter and exit through waterproof joints to ensure safe and reliable operation of the system.

[0090] Example 2

[0091] The present embodiment provides a method for treating flammable dust based on the above device, comprising the following steps:

[0092] S1. The dust to be treated falls into the star-shaped dust unloading valve C through the feed inlet 1 under the action of gravity. The star-shaped dust unloading valve C is connected to the universal coupling 6 and is driven by the first motor reducer 4. The matching speed of the star-shaped dust unloading valve C and the chain scraper B is uniform. The material is uniformly distributed on the upper layer of the chain scraper B.

[0093] S2. Dust begins to be controllably oxidized in the oxidation cabin of the centralized harmless treatment device A, the chain scraper B is driven by the second motor reducer 7, the dust is pushed to the end by the scraper B10, falls into the lower floor B12 under the chain scraper B, the dust is redistributed to make it more fully oxidized, the scraper B10 is scraped back again in reverse, the scraper B10 moves and collides with the broken dust plate B14, the dust in the sheet structure is crushed, with the continuous movement of the scraper B10, the broken dust plate B14 is pressed down by moving around the fixed seat B13, when the scraper B10 passes completely, the broken dust plate B14 is reset under the action of the spring B15; in the process of oxidation, the outside air enters the oxidation cabin of the centralized harmless treatment device A through the air door 2, the air door coarsely adjusts the air intake, the gas in the oxidation cabin of the centralized harmless treatment device shell A is conveyed to the filter F through the air duct 12 and the pipe joint 11, and after filtration, is discharged to the atmosphere by the fan F13 and the exhaust pipe A13; the first temperature sensor 5 and the second temperature sensor 23 collect the dust temperature at different positions in the oxidation cabin in real time, feed back to the PLC control system, the system controls the rotating speed of the fan F13, controls the air intake speed of the air into the oxidation cabin by controlling the exhaust speed, so as to control the oxidation process;

[0094] S3. The oxidized dust is discharged into the louvered dust discharging and weighing mechanism D through the oxidation cabin discharge port A21, at this time, the louvered dust discharging and turning blade D23 in the louvered dust discharging and weighing mechanism D is in a closed state, the weighing sensor D28 monitors the dust quality in real time, when the dust continuously falls to reach the set quality, the weighing sensor D28 under the louvered dust discharging and weighing mechanism D gives a signal, which is transmitted to the mini pneumatic cylinder D4 through PLC processing to drive the hopper reverse turning blade D23 to reverse 90 degrees and give a feedback signal to the position, and the pneumatic vibrator D11 starts to work to help accelerate the dust discharging;

[0095] S4. The oxidized dust is discharged into the spiral humidifier E through the feed port E7, when the dust in the louvered dust discharging and weighing mechanism D is discharged to the set humidification batch quality, the weighing sensor D28 gives a signal again, the hopper reverse turning blade D23 is closed again under the drive of the mini pneumatic cylinder D4 and gives a feedback signal to the closed position, and the pneumatic vibrator D11 stops working, while the louvered dust discharging and weighing mechanism D is discharging dust, the spiral humidifier E completes the material humidification to discharge operation through seven working steps.

[0096] Further, the seven working steps include:

[0097] The first working step, the spiral stirring main shaft E13 is driven by the servo motor reducer E17 to rotate forward for a preset number of revolutions, the positive rotation spiral belt E31 on the spiral stirring main shaft E13 pushes away the dust in the humidifier shell, and the first electromagnetic valve 18, the second electromagnetic valve 19, the third electromagnetic valve 20 and the fourth electromagnetic valve 21 are opened, and water is quantitatively sprayed on the dust through the first water nozzle E8, the second water nozzle E9, the third water nozzle E10 and the fourth water nozzle E11 respectively;

[0098] The second working step, the spiral stirring main shaft E13 is reversed for a preset number of revolutions, and the second electromagnetic valve 19 and the fourth electromagnetic valve 21 are opened to spray water;

[0099] The third working step, the spiral stirring main shaft E13 is driven by the servo motor reducer E17 to rotate forward for a preset number of revolutions, and the first electromagnetic valve 18 and the third electromagnetic valve 20 are opened to spray water;

[0100] The fourth working step, the spiral stirring main shaft E13 is reversed for a preset number of revolutions, and the second electromagnetic valve 19 and the fourth electromagnetic valve 21 are opened to spray water;

[0101] The fifth working step, the spiral stirring main shaft E13 is driven by the servo motor reducer E17 to rotate forward for a preset number of revolutions, and the first electromagnetic valve 18 and the third electromagnetic valve 20 are opened to spray water;

[0102] The sixth working step, the spiral stirring main shaft E13 is reversed for a preset number of revolutions, and no water is sprayed.

[0103] The seventh working step, the spiral stirring main shaft E13 is driven by the servo motor reducer E17 to rotate forward to discharge the stirred humidified powder, and finally discharged through the discharge port E19 of the spiral humidifier E.

[0104] Through the above structure and control strategy, the embodiment realizes the centralized treatment of the whole process of flammable dust from collection, oxidation, crushing, metering to humidification and passivation, not only solves the safety and reliability hidden dangers caused by the coupling of oxidation and filtration in the traditional technology, but also greatly improves the oxidation uniformity, processing efficiency and automation level through the innovative design of double-layer conveying of chain and scraper, temperature closed-loop air volume control, online weighing batch humidification, etc., providing a safe, economic and sustainable dust harmless solution for high-value process environment in the semiconductor industry.

[0105] The technical features of the above embodiments can be combined arbitrarily, and to make the description concise, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present disclosure.

[0106] It should be noted that the components mentioned in the above embodiments are all general standard components or components known to those skilled in the art, and their structure and principle can be known to those skilled in the art through technical manuals or through conventional experimental methods.

[0107] The principles and implementation manners of the present application are described by using specific examples, and the above examples are only used to help understand the method of the present application and its core idea; meanwhile, for those skilled in the art, according to the idea of the present application, the specific implementation manners and application ranges will be changed. In conclusion, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A centralized harmless treatment device for flammable dust, characterized in that, include: The feeding mechanism, oxidation chamber, dust humidification chamber, and electrical cabinet are connected in sequence. The oxidation chamber is equipped with an oxidation conveying mechanism, including a star-shaped ash discharge valve (C), a chain scraper conveyor (B), and a dust crushing device. The inlet of the star-shaped ash discharge valve (C) is located below the feed pipe (A25) and is driven by a universal coupling (6). Its outlet corresponds to the feed end of the chain scraper conveyor (B). The chain scraper conveyor (B) is driven by a plum blossom coupling (8) and includes an upper bottom plate (B11) and a lower bottom plate (B12) for conveying and turning over dust. The dust crushing device is located at the discharge end of the chain scraper conveyor (B) for crushing the dust that has clumped after oxidation. The outlet of the oxidation conveying mechanism is equipped with an exhaust filtration mechanism to filter the oxidized dust.

2. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, The oxidation chamber, dust humidification chamber, and electrical cabinet are all housed within the shell (A) of the centralized harmless treatment device. The shell (A) of the centralized harmless treatment device includes a frame (A6) and a skin (A5) covering it. The top of the oxidation chamber is equipped with an openable first cover (A2), a second cover (A27), a third cover (A28), and a fourth cover (A29). Its sides are equipped with an openable left-side door (A3) and a right-side door (A11). Its bottom... An oxidation chamber bottom plate (A18) is provided, and sealing strips (19) are provided at each connection point for sealing; the dust humidification chamber is provided with an openable left side door (A4), a maintenance side door (A17), a water supply maintenance door (A7), a spiral humidifier discharge port door (A8), and a filter maintenance door (A9) on its side, and a dust humidification chamber bottom plate (A22) is provided at its bottom; the electrical cabinet compartment is provided with an openable first electrical cabinet door (A10) and a second electrical cabinet door (A16) on its side; It also includes a feeding mechanism, which includes a feed port flange (A1) connected to the upstream equipment via a connecting hose (1), the feed port flange (A1) being connected to a feed pipe (A25), and the feed pipe (A25) being installed on the cover (A27) at the top of the oxidation chamber via a reducing pipe (A26) and a rectangular flange (24); The drive mechanism includes a first motor reducer (4) for driving the star-shaped ash discharge valve (C) and a second motor reducer (7) for driving the chain scraper conveyor (B); The control system, located within the electrical cabinet, includes a PLC controller, a touch screen (24), a first temperature sensor (5) and a second temperature sensor (23) for detecting the temperature of the oxidation chamber, and a weighing sensor (D28) for detecting the weight of dust in the louvered ash discharge weighing mechanism (D). The first temperature sensor (5) and the second temperature sensor (23) are respectively connected to the first Kf connector (A15) and the second Kf connector (A32). The control system is communicatively connected to the first motor reducer (4), the second motor reducer (7), the louvered ash discharge weighing mechanism (D), the spiral humidifier (E), the first temperature sensor (5), the second temperature sensor (23), and the weighing sensor (D28) to achieve automated control.

3. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, The chain scraper conveyor (B) also includes: Two chain scraper conveyor beams (B3) are arranged in parallel inside the oxidation chamber; The sprocket drive shaft (B16) and the sprocket driven shaft (B6) are respectively mounted on both ends of the two chain scraper beams (B3) via bearings with mounting brackets (B1); A sprocket (B7) is installed at both ends of the sprocket drive shaft (B16) and the sprocket driven shaft (B6); a round chain (B8) is fitted onto the sprockets (B7) on both sides. Multiple scrapers (B10) are fixedly installed at intervals between the two circular chains (B8); The dust-shredding device includes a fixed base (B13), a dust-shredding plate (B14), and a spring (B15); the fixed base (B13) is fixedly installed at the end of the lower base plate (B12); the dust-shredding plate (B14) is rotatably installed on the fixed base (B13); the spring (B15) is sleeved on both sides of the dust-shredding plate (B14) to provide it with a restoring force.

4. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, It also includes a louvered dust discharge and weighing mechanism (D), wherein the hopper ring edge (D1) of the louvered dust discharge and weighing mechanism (D) is flexibly connected to the discharge port (A21) at the bottom of the oxidation chamber through a fireproof cloth (25), for receiving oxidized dust and weighing and intermittently unloading it; The louvered ash discharge and weighing mechanism (D) includes: The hopper assembly includes a trapezoidal ash inlet hopper (D2) and rectangular hopper flanges (D3) located at its upper and lower ends; The guide cylinder mechanism includes a miniature cylinder (D4), a first guide rod (D5), a second guide rod (D10), a first guide sleeve (D6), a second guide sleeve (D8), and a guide rod connecting plate (D7); The louvered ash discharge hopper mechanism includes a louvered ash discharge strip perforated plate (D22), louvered ash discharge reversing blades (D23) rotatably mounted thereon, a louvered ash discharge rotating rod (D24) fixedly connected to the reversing blades, an unloading pull rod (D25), and an unloading connecting rod (D26); the mini cylinder (D4) is driven to the unloading connecting rod (D26) through the guide cylinder mechanism to drive the louvered ash discharge reversing blades (D23) to open and close; The weighing mechanism, including a weighing sensor (D28) and a weighing sensor mounting plate (D19), is used to monitor the dust mass in the hopper assembly in real time. A pneumatic vibrator (D11) is installed on the hopper assembly to assist in unloading.

5. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, It also includes a spiral humidifier (E), the feed inlet (E7) of which is connected below the discharge outlet of the louvered dust unloading and weighing mechanism (D), for humidifying and stirring the received dust; The spiral humidifier (E) includes: The humidifier casing has an inlet (E7) and an outlet (E19) at its two ends, respectively; A spiral stirring shaft (E13) is rotatably disposed inside the humidifier housing, and is provided with a forward spiral ribbon (E31) and a reverse spiral ribbon (E33); The output end of the servo motor reducer (E17) is connected to the spiral stirring main shaft (E13) via a key (E18); The first spray nozzle (E8), the second spray nozzle (E9), the third spray nozzle (E10), and the fourth spray nozzle (E11) are arranged along the top of the humidifier housing and are connected to the water source through the first solenoid valve (18), the second solenoid valve (19), the third solenoid valve (20), the fourth solenoid valve (21), and control pipelines, respectively.

6. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, The exhaust filtration mechanism includes an exhaust pipe (12), a filter (F), and a fan (F13); one end of the exhaust pipe (12) is connected to the interior of the oxidation chamber, and the other end is connected to the inlet of the filter (F); the fan (F13) is connected to the outlet of the filter (F), and its outlet is connected to a pipe (9) for discharging the filtered gas through the exhaust pipe (A13); The exhaust filtration mechanism also includes a damper (2) and a damper pipe (3); one end of the damper pipe (3) is connected to the outside, and the other end passes through the bottom plate (A18) of the oxidation chamber and is connected to the inside of the oxidation chamber; the damper (2) is set on the damper pipe (3) and is used to regulate the amount of air entering the oxidation chamber.

7. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, It also includes a booster pump (G); the inlet of the booster pump (G) is connected to an external water source through an inlet pipe (13), and its outlet is connected to a manifold (15) through a water delivery hose (22); the manifold (15) is connected to the first spray nozzle (E8), the second spray nozzle (E9), the third spray nozzle (E10), and the fourth spray nozzle (E11) on the spiral humidifier (E) through multiple water distribution hoses (16) via the first solenoid valve (18), the second solenoid valve (19), the third solenoid valve (20), and the fourth solenoid valve (21).

8. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, The filter (F) is fixed in the dust humidification chamber by a filter mounting bracket (A23), an upper filter mounting plate (A31), and a lower filter mounting plate (A30); the filter (F) includes a housing (F1), a filter element (F14), a clean air chamber housing (F4), and an openable filter cover (F10); the filter cover (F10) is locked and sealed by a hinged screw (F7), a hinged nut (F6), and a filter cover pressure rod (F8).

9. The method for centralized harmless treatment of flammable dust using the centralized harmless treatment device according to any one of claims 1-8, characterized in that, Includes the following steps: S1. The dust to be processed falls into the star-shaped ash discharge valve (C) through the feed port (1) under the action of weight. The star-shaped ash discharge valve (C) is connected to the universal coupling (6) and driven by the first motor reducer (4). The speed is matched with that of the chain plate scraper (B) and the material is evenly distributed on the upper bottom plate (B11) of the chain plate scraper (B). S2. The dust begins to be controlled-controlled oxidized in the oxidation chamber of the centralized harmless treatment device (A). The chain scraper conveyor (B) is driven by the second motor reducer (7). The dust is pushed to the end by the scraper (B10) and falls into the lower bottom plate (B12) of the chain scraper conveyor (B). The dust is re-distributed to make it more fully oxidized. The scraper (B10) scrapes back in the opposite direction. The movement of the scraper (B10) collides with the dust crushing plate (B14). The sheet-like dust is crushed. As the scraper (B10) continues to move, the dust crushing plate (B14) moves around the fixed seat (B13) and is pressed down. When the scraper (B10) has completely passed, the dust crushing plate (B14) is pressed down by the action of the spring (B15). Reset; During the oxidation process, outside air enters the oxidation chamber of the centralized harmless treatment device (A) through the damper (2). The damper roughly adjusts the air intake volume, and the gas in the oxidation chamber of the centralized harmless treatment device shell (A) is transported to the filter (F) through the exhaust pipe (12) and pipe joint (11). After filtration, it is discharged to the atmosphere by the fan (F13) and the exhaust pipe (A13). The first temperature sensor (5) and the second temperature sensor (23) collect the dust temperature at different positions in the oxidation chamber in real time and feed it back to the PLC control system. The system controls the speed of the fan (F13) and controls the air intake speed of the oxidation chamber by controlling the exhaust speed, thereby controlling the oxidation process. S3. The oxidized dust is discharged into the louvered ash discharge weighing mechanism (D) through the discharge port (A21) of the oxidation chamber. At this time, the louvered ash discharge rotating blades (D23) inside the louvered ash discharge weighing mechanism (D) are in the closed state. The weighing sensor (D28) monitors the dust quality in real time. After the dust falls continuously and reaches the set quality, the weighing sensor (D28) below the louvered ash discharge weighing mechanism (D) gives a signal, which is processed by the PLC and transmitted to the mini cylinder (D4) to drive the hopper rotating blades (D23) to rotate 90 degrees and send a positioning feedback signal. At the same time, the pneumatic vibrator (D11) is started to help accelerate the ash discharge. S4. The oxidized dust falls into the spiral humidifier (E) through the feed inlet (E7). When the dust in the louvered ash discharge weighing mechanism (D) reaches the set humidification batch mass, the weighing sensor (D28) gives a signal again. The hopper reversing blade (D23) closes again under the drive of the mini cylinder (D4) and sends a closing feedback signal. At the same time, the pneumatic vibrator (D11) stops working. While the louvered ash discharge weighing mechanism (D) discharges ash, the spiral humidifier (E) completes the material humidification and discharge operation through seven steps.

10. The method for centralized harmless treatment of flammable dust according to claim 9, characterized in that, The seven steps include: In the first step, the servo motor reducer (E17) drives the spiral stirring spindle (E13) to rotate forward a preset number of times. The spiral ribbon (E31) on the spiral stirring spindle (E13) pushes the dust away from the humidifier housing. At the same time, the first solenoid valve (18), the second solenoid valve (19), the third solenoid valve (20), and the fourth solenoid valve (21) open, and water is sprayed onto the dust in a metered amount through the first water spray nozzle (E8), the second water spray nozzle (E9), the third water spray nozzle (E10), and the fourth water spray nozzle (E11). In the second step, the spiral stirring spindle (E13) reverses the preset number of revolutions, and at the same time the second solenoid valve (19) and the fourth solenoid valve (21) open to spray water. In the third step, the spiral stirring main shaft (E13) rotates forward a preset number of times, and at the same time, the first solenoid valve (18) and the third solenoid valve (20) open to spray water. In the fourth step, the spiral stirring spindle (E13) reverses the preset number of revolutions, and at the same time, the second solenoid valve (19) and the fourth solenoid valve (21) open to spray water. In the fifth step, the spiral stirring main shaft (E13) rotates forward a preset number of times, and at the same time, the first solenoid valve (18) and the third solenoid valve (20) open to spray water. The sixth step involves reversing the spiral mixing spindle (E13) a preset number of times without spraying water. In the seventh step, the spiral mixing main shaft (E13) rotates forward to discharge the mixed humidified powder, which is finally discharged through the discharge port (E19) of the spiral humidifier (E).

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