Novel high-cleanliness cache elevator

Abstract

The invention belongs to the technical field of semiconductor industry production equipment manufacturing, and particularly relates to a novel high-cleanliness cache elevator which comprises a control system, a support, a shell and a cache frame, the cache frame is arranged on the side wall of the support, and a whole formed by the support and the cache frame is wrapped by the shell in a sealed mode. A feeding and discharging port is formed in the side, opposite to the temporary storage frame, of the side wall of the shell, a lifting table is arranged on the support through a driving device, a moving table and a jacking device matched with the moving table are arranged on the lifting table, a grabber is arranged on the moving table, and the moving direction of the moving table is parallel to a connecting line segment between the support and the temporary storage frame. Conveyor belts are arranged on the two sides, in the moving direction of the moving table, of the lifting table, the conveying direction of the conveyor belts is parallel to the moving direction of the moving table, an FFU is arranged at the position, over the support, of the shell, a draught hood is arranged at the position, corresponding to the temporary storage frame, of the side wall of the shell, and the control system is in signal connection with the lifting table, the moving table and a driving device for driving the conveyor belts.

Description

Technical Field

[0001] This application belongs to the field of semiconductor industry production equipment manufacturing technology, specifically a new type of high-cleanliness buffer elevator. Background Technology

[0002] In semiconductor board-level packaging production, the large boards completed in the previous process need to be smoothly transferred to the next process equipment. This requires the use of automated conveyor lines to transport the large boards. However, automated conveyor lines are not dust-free. The transfer of large boards between the overhead line and the ground line is achieved through elevators. When the load of the process equipment changes, congestion often occurs, affecting the efficiency of large board transfer. Summary of the Invention

[0003] The purpose of this application is to address the shortcomings of existing technologies by designing a novel high-cleanliness buffer lift that integrates the elevator and buffer rack into a single unit, and incorporates an FFU (fan filter unit) on the top of the casing along with an exhaust hood on the side wall of the casing. This design enables large plates to flow and buffer in a dust-free environment, thereby solving the problem of congestion that occurs when the process equipment experiences load changes.

[0004] The above-mentioned technical objective of this application is achieved through the following technical solution: A novel high-cleanliness buffer lift includes a control system, a support frame, a housing, and a buffer rack. The buffer rack is mounted on the side wall of the support frame. The support frame and the buffer rack together are enclosed by the housing. An inlet / outlet is located on the side wall of the housing facing away from the buffer rack. A lifting platform is mounted on the support frame via a drive device. The lifting platform has a moving stage and a lifting device that cooperates with the moving stage. A gripper is located on the moving stage. The moving direction of the moving stage is parallel to the connecting line between the support frame and the buffer rack. Conveyor belts are located on both sides of the moving stage on the lifting platform, and the conveyor belts move in a direction parallel to the moving stage. An air extraction unit (FFU) is located directly above the support frame on the housing. An exhaust hood is located on the side wall of the housing corresponding to the buffer rack. The control system is signal-connected to the lifting platform, the moving stage, and the drive device that drives the conveyor belts.

[0005] Preferably, the driving device includes a first guide rail, a first servo motor, and a slider. The first guide rail is vertically fixed on the bracket, and the slider is slidably disposed between the two ends of the first guide rail. The lifting platform is fixedly connected to the slider. The first servo motor is fixedly disposed at the bottom of the bracket. A first pulley is disposed on the output shaft of the first servo motor, and a second pulley is disposed at the top of the bracket. The first pulley and the second pulley are connected by a belt drive. The portion of the belt located between the first pulley and the second pulley is fixedly connected to the lifting platform. The first servo motor is signal-connected to the control system.

[0006] Preferably, a support frame is provided on each side of the upper surface of the lifting platform in the direction of movement of the moving platform. Each support frame is provided with two rollers. The connecting line segment between the two rollers on the same support frame is parallel to the direction of movement of the moving platform. The two rollers on the same support frame are connected by the conveyor belt. A second servo motor is provided on the moving platform. The output shaft of the second servo motor is connected to the rollers on each support frame. The second servo motor is connected to the control system.

[0007] Preferably, the moving platform includes a third servo motor, a second guide rail, a main platform, and a secondary platform. The second guide rail is fixedly mounted on the main platform. The main platform is fixedly connected to the portion of a belt located between the first and second pulleys. The main platform is fixedly connected to the slider. The secondary platform is slidably connected between the two ends of the second guide rail. The output shaft of the third servo motor is driven by a lead screw. The secondary platform has threaded holes that engage with the two ends of the lead screw. The end of the lead screw facing away from the third servo motor is rotatably connected to the main platform. The lead screw and the second guide rail are both parallel to the moving direction of the moving platform. A lifting frame is mounted on the secondary platform via a lifting device, and a gripping claw is mounted on the lifting frame.

[0008] Preferably, the main platform is provided with a lifting device on each side of the auxiliary platform, and the two lifting devices are located on both sides of the moving platform in the direction of movement.

[0009] Preferably, the lifting device includes a cylinder and a lifting claw. The cylinder is vertically mounted on the main platform, and the lifting claw is disposed at the free end of the piston rod of the cylinder.

[0010] Preferably, the gripper is a suction cup with its opening facing upwards.

[0011] Preferably, the cache rack has multiple product placement layers arranged from top to bottom.

[0012] Preferably, the output end of the control system is equipped with a display screen, and the control system is able to construct a 3D virtual model that is completely synchronized with the physical warehouse based on real-time data and display the 3D virtual model on the display screen.

[0013] The beneficial effects of this application are: This application proposes a novel high-cleanliness buffer lift that integrates the elevator and buffer rack into a single unit, and incorporates an FFU (fan filter unit) on the top of the housing in conjunction with an exhaust hood on the side wall of the housing. This design enables large plates to flow and buffer in a dust-free environment, thereby solving the problem of congestion that occurs when the process equipment experiences load changes. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this application; Figure 2 for Figure 1 A schematic diagram of the structure after the outer shell has been removed; Figure 3 for Figure 2 A partial view on the right; Figure 4 for Figure 3 Enlarged view of point A in the middle; Figure 5 This is a schematic diagram of the lifting platform in this application; Figure 6 To showcase Figure 5 A schematic diagram of the bottom structure; Figure 7 This is an exploded view of the lifting platform in this application.

[0015] The components are as follows: 1. Support frame; 2. Outer shell; 3. Buffer rack; 4. Inlet / outlet; 5. FFU (Fan Filter Unit); 6. Exhaust hood; 7. First guide rail; 8. First servo motor; 9. Slider; 10. Belt; 11. Support frame; 12. Conveyor belt; 13. Second servo motor; 14. Third servo motor; 15. Second guide rail; 16. Main platform; 17. Auxiliary platform; 18. Cylinder; 19. Lifting claw; 20. Suction cup; 22. Lifting frame. Detailed Implementation

[0016] like Figures 1 to 7As shown, a novel high-cleanliness buffer lift includes a control system, a support 1, a housing 2, and a buffer rack 3. The buffer rack 3 is mounted on the side wall of the support 1. The support 1 and the buffer rack 3 are enclosed by the housing 2. The side wall of the housing 2 has an inlet / outlet 4 on the side facing away from the buffer rack 3. The support 1 has a lifting platform mounted on it via a drive device. The lifting platform has a moving platform and a lifting device that cooperates with the moving platform. The moving platform has a gripper. The moving direction of the moving platform is parallel to the connecting line between the support 1 and the buffer rack 2. The lifting platform has conveyor belts 12 on both sides of the moving platform. The conveying direction of the conveyor belts 12 is parallel to the moving direction of the moving platform. The housing 2 has an FFU 5 directly above the support 1. The side wall of the housing 2 has an exhaust hood 6 corresponding to the buffer rack 3. The control system is signal-connected to the lifting platform, the moving platform, and the drive device that drives the conveyor belts 12.

[0017] In this embodiment, an FFU5 is installed on the outer casing 2 directly above the support 1. The air pressure from the transmission system pushes the physical air generated by the transmission system down to the return air area at the bottom of the support 1, the buffer rack 3, and the exhaust hood 6, achieving a high-cleanliness, dust-free design. The control system enables intelligent scheduling by monitoring the operational status and congestion of subsequent processes in real time, automatically calculating and optimizing the scheduling path and buffering order of the large boards. When congestion occurs in the process, the system intelligently temporarily stores the large boards in the buffer rack 3. Once the process is running smoothly, the large boards are automatically scheduled to continue operation, significantly reducing waiting time and improving production efficiency. Material enters through inlet / outlet 4 and is received by the moving platform. The conveyor belt 12 on the moving platform moves the material to a preset position. Then, the lifting device rises, lifting the material so that the gripper can grasp its lower surface. After the gripper grasps the lower surface, the lifting device descends and no longer holds the material. The gripper then restricts the material's position on the moving platform, preventing it from changing position during ascent and descent, and ensuring the material's position is not affected by wind pressure. When the lifting platform reaches the corresponding position of the buffer rack 3 set by the control system, the gripper releases its restriction on the material. The conveyor belt 12 remains stationary, and the lifting device descends again for precise adjustment to ensure the material is level with the position on the buffer rack 3. The moving platform moves from the lifting platform into the buffer rack 3 and places the material on the rack 3, ensuring the material is placed at the correct position. The moving platform then withdraws from the buffer rack 3. When discharging, the control system controls the lifting platform to rise and fall to the preset position. At this time, the moving platform moves from the lifting platform to the buffer rack 3. The lifting device rises, causing the moving platform to lift the material from bottom to top, so that the material leaves the support surface on the buffer rack 3. Then, the gripper grabs the material. After that, the moving platform carries the material back to the lifting platform. Then, the lifting platform continues to rise and fall to the corresponding inlet / outlet 4 according to the instructions of the control system. The gripper releases the limit on the material. Finally, the conveyor belt 12 sends the material out of the outlet 4 and to the outside of the outer shell 2.

[0018] In a preferred embodiment, the driving device includes a first guide rail 7, a first servo motor 8, and a slider 9. The first guide rail 7 is vertically fixed on the bracket 1, and the slider 9 is slidably disposed between the two ends of the first guide rail 7. The lifting platform is fixedly connected to the slider 9. The first servo motor 8 is fixedly disposed at the bottom of the bracket 1, and a first pulley is provided on the output shaft of the first servo motor 8. A second pulley is provided at the top of the bracket 1, and the first pulley and the second pulley are connected by a belt 10. The portion of the belt 10 located between the first pulley and the second pulley is fixedly connected to the lifting platform. The first servo motor 8 is signal-connected to the control system. With this configuration, the first servo motor 8 drives the belt 10 to move, thereby causing the lifting platform to rise and fall. The arrangement of the slider 9 and the first guide rail 7 ensures that the lifting platform does not sway during the rising and falling process.

[0019] In a preferred embodiment, a support frame 11 is provided on each side of the upper surface of the lifting platform in the direction of movement of the moving platform. Each support frame 11 has two rollers, and the connecting line segment between the two rollers on the same support frame 11 is parallel to the direction of movement of the moving platform. The two rollers on the same support frame 11 are connected by a conveyor belt 12. A second servo motor 13 is provided on the moving platform, and the output shaft of the second servo motor 13 is connected to the rollers on each support frame 11. The second servo motor 13 is signal-connected to the control system. The support frames 11 are used to mount the conveyor belt 12, and the second servo motor 13 is used to drive the conveyor belt 12.

[0020] In a preferred embodiment, the moving platform includes a third servo motor 14, a second guide rail 15, a main platform 16, and a secondary platform 17. The second guide rail 15 is fixedly mounted on the main platform 16. The main platform 16 is fixedly connected to the portion of the belt 10 located between the first pulley and the second pulley. The main platform 16 is fixedly connected to the slider 9. The secondary platform 17 is slidably connected between the two ends of the second guide rail 15. The output shaft of the third servo motor 14 is driven by a lead screw. The secondary platform 17 has threaded holes that engage with the two ends of the lead screw. The end of the lead screw facing away from the third servo motor 14 is rotatably connected to the main platform 16. The lead screw and the second guide rail 15 are both parallel to the moving direction of the moving platform. A lifting frame 22 is mounted on the secondary platform 17 via a lifting device, and the lifting frame 22 is equipped with a gripping claw. With this setup, when the material needs to be placed from the support 1 to the buffer rack 3, the third servo motor 14 starts, and the lead screw starts to rotate, thereby driving the auxiliary platform 17 to move on the main platform 16 to the buffer rack 3. The lifting frame 22 is adaptively adjusted according to the height of the material lifted by the lifting device, so that the gripper can grab the lower surface of the material.

[0021] As a preferred embodiment, the main platform 16 is provided with a lifting device on each side of the auxiliary platform 17, with the two lifting devices located on opposite sides of the moving platform in the direction of movement. The purpose of providing two lifting devices is to ensure smooth material lifting and prevent material tilting.

[0022] In a preferred embodiment, the lifting device includes a cylinder 18 and a lifting claw 19. The cylinder is vertically mounted on the main platform 16, and the lifting claw 19 is disposed at the free end of the piston rod of the cylinder 18. The lifting claw 19 is raised and lowered by the cylinder 18.

[0023] As a preferred embodiment, the gripping claw is an upward-facing suction cup 20. This makes it convenient to hold the lower surface of the material by the suction cup 20.

[0024] As a preferred embodiment, the buffer rack 3 has multiple product placement layers arranged sequentially from top to bottom. This allows the buffer rack 3 to store multiple materials, one per layer, thus achieving the buffering function. Each layer represents one storage location, and the real-time status of each storage location is monitored by a photoelectric sensor.

[0025] As a preferred method, the mobile frame is equipped with an automatic barcode scanner. Each material has an ID information. When the material (large plate) enters the inlet / outlet 4, it is automatically scanned and the identification information, including batch number, status, etc., is recorded for subsequent tracking and management.

[0026] As a preferred embodiment, the output of the control system is equipped with a display screen. The control system can construct a 3D virtual model that is completely synchronized with the physical warehouse based on real-time data and display the 3D virtual model on the display screen. Through the display screen settings, the control system can show the material movement path, making it convenient for maintenance personnel to view.

Claims

1. A novel high-cleanliness buffer elevator, characterized in that, The system includes a control system, a support (1), a housing (2), and a buffer rack (3). The buffer rack (3) is located on the side wall of the support (1). The support (1) and the buffer rack (3) together are enclosed by the housing (2). The side wall of the housing (2) has an inlet / outlet (4) on the side facing away from the buffer rack (3). The support (1) is equipped with a lifting platform via a drive device. The lifting platform has a moving platform and a lifting device that cooperates with the moving platform. The moving platform has a gripper. The moving direction is parallel to the connecting line segment between the support (1) and the buffer rack (2). The lifting platform is provided with conveyor belts (12) on both sides of the moving platform in the moving direction. The conveying direction of the conveyor belts (12) is parallel to the moving direction of the moving platform. The housing (2) is provided with an FFU (5) directly above the support (1). The side wall of the housing (2) is provided with an exhaust hood (6) corresponding to the buffer rack (3). The control system signal connects the lifting platform, the moving platform, and the drive device for driving the conveyor belt (12).

2. The novel high-cleanliness buffer elevator according to claim 1, characterized in that: The driving device includes a first guide rail (7), a first servo motor (8), and a slider (9). The first guide rail (7) is vertically fixed on the bracket (1). The slider (9) is slidably arranged between the two ends of the first guide rail (7). The lifting platform is fixedly connected to the slider (9). The first servo motor (8) is fixedly arranged at the bottom of the bracket (1). A first pulley is provided on the output shaft of the first servo motor (8). A second pulley is provided at the top of the bracket (1). The first pulley and the second pulley are connected by a belt (10). The part of the belt (10) located between the first pulley and the second pulley is fixedly connected to the lifting platform. The first servo motor (8) is signal-connected to the control system.

3. The novel high-cleanliness buffer elevator according to claim 2, characterized in that: On the upper surface of the lifting platform, a support frame (11) is provided on each side of the moving platform in the direction of movement. Each support frame (11) is provided with two rollers. The connecting line segment between the two rollers on the same support frame (11) is parallel to the direction of movement of the moving platform. The two rollers on the same support frame (11) are connected by the transmission belt (12). A second servo motor (13) is provided on the moving platform. The output shaft of the second servo motor (13) is connected to the rollers on each support frame (11). The second servo motor (13) is connected to the control system.

4. A novel high-cleanliness buffer elevator according to claim 2, characterized in that: The moving platform includes a third servo motor (14), a second guide rail (15), a main platform (16), and a secondary platform (17). The second guide rail (15) is fixedly mounted on the main platform (16). The main platform (16) is fixedly connected to the portion of the belt (10) located between the first pulley and the second pulley. The main platform (16) is fixedly connected to the slider (9). The secondary platform (17) is slidably connected between the two ends of the second guide rail (15). The output shaft of the third servo motor (14) is connected to a lead screw. The secondary platform (17) is provided with a threaded hole that is threaded to both ends of the lead screw. The end of the lead screw facing away from the third servo motor (14) is rotatably connected to the main platform (16). The lead screw and the second guide rail (15) are both parallel to the moving direction of the moving platform. The secondary platform (17) is provided with a lifting frame (22) through a lifting device. The lifting frame (22) is provided with a gripping claw.

5. A novel high-cleanliness buffer elevator according to claim 4, characterized in that: The main platform (16) is provided with a lifting device on each side of the auxiliary platform (17), and the two lifting devices are located on both sides of the moving platform in the direction of movement.

6. A novel high-cleanliness buffer elevator according to claim 5, characterized in that: The lifting device includes a cylinder (18) and a lifting claw (19). The cylinder is vertically mounted on the main platform (16), and the lifting claw (19) is mounted on the free end of the piston rod of the cylinder (18).

7. A novel high-cleanliness buffer elevator according to claim 4, characterized in that: The gripper is an upward-opening suction cup (20).

8. A novel high-cleanliness buffer elevator according to claim 4, characterized in that: The cache rack (3) has multiple product placement layers arranged from top to bottom.

9. A novel high-cleanliness buffer elevator according to claim 1, characterized in that: The output of the control system is equipped with a display screen. The control system can build a 3D virtual model that is completely synchronized with the physical warehouse based on real-time data and display the 3D virtual model on the display screen.

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