Grid mesh device, ion source equipment and ion source performance evaluation method

Abstract

The invention relates to the technical field of semiconductor processing equipment, in particular to a grid mesh device, ion source equipment and an ion source performance evaluation method. The grid mesh device comprises a conductive assembly, a screen grid, an acceleration grid, a deceleration grid and a grid mesh mounting plate, the screen grid, the acceleration grid and the deceleration grid are sequentially stacked, are arranged at intervals in an insulated mode, are all installed at the opening end of an external ion source shell through the grid mesh mounting plate, and are all arranged with the grid mesh mounting plate in an insulated mode. The speed reduction grid is arranged close to the grid mesh mounting plate and is electrically connected with an external current detection module through a conductive assembly so as to output current for detection. According to the ion source, the screen grid, the acceleration grid and the deceleration grid are all insulated from the grid mesh mounting plate, and the conductive assembly is additionally arranged, so that the deceleration grid can be electrically connected with an external current detection module through the conductive assembly, the current of the deceleration grid is detected, the performance of the ion source is evaluated more accurately, and higher and higher process requirements and stability requirements are met.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, in particular to a grid device, an ion source device and an ion source performance evaluation method. BACKGROUND

[0002] The radio frequency ion source is applied to semiconductor processing equipment such as vacuum coating equipment and ion beam etching equipment, and is widely applied to high-precision optical fields such as optical communication, visual optics and navigation guidance. In the working of the radio frequency ion source, the radio frequency electrode applies a high-frequency alternating electric field to ionize the working gas (such as argon or oxygen) to generate plasma. The ions in the plasma are accelerated, focused and drawn out to form an ion beam under the action of the bias voltage of the grid device, and the ion beam bombards the target or the substrate to be etched to achieve the purpose of ion beam deposition or etching.

[0003] In the evaluation of the performance of the radio frequency ion source, the deceleration grid of the grid device is usually grounded, and the current in the power loop of the direct current bias voltage of the screen grid and the acceleration grid in the grid device is monitored to determine whether the radio frequency ion source is running normally and to evaluate whether the performance of the radio frequency ion source is normal. However, as the application of the ion source is more and more widely, the process requirements are also higher and higher, and the stability of the ion source is also higher and higher, and the above-mentioned grid device cannot meet the performance evaluation requirements of the radio frequency ion source. SUMMARY

[0004] The embodiments of the present application provide a grid device, an ion source device and an ion source performance evaluation method to solve the problem that the existing grid device cannot meet the performance evaluation requirements of the radio frequency ion source.

[0005] The present application discloses a grid device, which comprises a conductive assembly, a screen grid, an acceleration grid, a deceleration grid and a grid mounting plate. The screen grid, the acceleration grid and the deceleration grid are sequentially laminated and insulated from each other, and are all installed at the opening end of an external ion source housing through the grid mounting plate. The screen grid, the acceleration grid and the deceleration grid are all insulated from the grid mounting plate, and the deceleration grid is arranged close to the grid mounting plate and electrically connected with an external current detection module through the conductive assembly to output the current for detection.

[0006] Optionally, the grid device further comprises an insulating ring, which is clamped between the deceleration grid and the grid mounting plate.

[0007] Optionally, the conductive assembly comprises a guide sub-assembly and a positioning sub-assembly, the guide sub-assembly is electrically connected with the deceleration grid and the positioning sub-assembly and is insulated mounted on the grid mounting plate, and the positioning sub-assembly is used for being insulated mounted on the external ion source housing and can be electrically connected with the external current detection module.

[0008] Optionally, the guiding subassembly comprises a first supporting column, a first electrode tab and a second electrode tab, the first supporting column is fixed on the grid mounting plate, the first electrode tab and the second electrode tab are both insulated and positioned on the first supporting column, the first electrode tab is electrically connected with the deceleration grid, and the second electrode tab is electrically connected with the first electrode tab and the positioning subassembly.

[0009] Optionally, the guiding subassembly further comprises a first insulating piece, a second insulating piece and a first fixing piece, the first supporting column is arranged in sequence through the grid mounting plate, the first insulating piece, the second insulating piece and the first fixing piece, the first insulating piece and the second insulating piece are clamped between the grid mounting plate and the first fixing piece, and the first electrode tab and the second electrode tab are clamped and positioned between the first insulating piece and the second insulating piece.

[0010] Optionally, a limiting protrusion is arranged on an end face of the first insulating piece towards the second insulating piece, a limiting groove is arranged on an end face of the second insulating piece towards the first insulating piece, a first through hole is arranged on the first electrode tab, and a second through hole is arranged on the second electrode tab, the limiting protrusion is arranged through the first through hole and the second through hole and accommodated in the limiting groove, the groove of the limiting groove abuts the first electrode tab and the second electrode tab against the end face of the first insulating piece towards the second insulating piece, and the supporting column is arranged through the middle part of the limiting protrusion and the groove bottom wall of the limiting groove.

[0011] Optionally, the positioning subassembly comprises a second supporting column, a third electrode tab, a fourth electrode tab, a conductive mounting piece and a second fixing piece, the second supporting column is used for being fixed on an inner wall of an external ion source shell, the third electrode tab is insulated and mounted on the second supporting column, the conductive mounting piece is arranged through the second electrode tab, the third electrode tab, the fourth electrode tab and the second fixing piece, so that the second electrode tab, the third electrode tab and the fourth electrode tab are electrically connected with each other, and the fourth electrode tab can be electrically connected with an external current detection module.

[0012] The application further discloses an ion source device, which comprises an ion source shell formed with an opening, a current detection module and the grid device as any one of the above.

[0013] Optionally, the current detection module comprises a current detection instrument and a high-frequency filter circuit, the current detection instrument is used for detecting the current value of the deceleration grid of the grid device, and the current detection instrument and the high-frequency filter circuit are both connected in series between the conductive component of the grid device and the ground terminal.

[0014] The application further discloses an ion source performance evaluation method applied to the ion source equipment. The current value of the deceleration grid is detected in real time through the current detection module; The current value is compared with a preset current value; If the current value is greater than the preset current value, it is determined that the ion source performance is abnormal; If the current value is less than or equal to the preset current value, it is determined that the ion source performance is normal.

[0015] The grid device, the ion source equipment and the ion source performance evaluation method have the beneficial effects that the screen grid, the acceleration grid and the deceleration grid are installed at the opening end of the external ion source housing through the grid mounting plate, the screen grid, the acceleration grid and the deceleration grid are all insulatively arranged with the grid mounting plate, and the conductive component is additionally arranged, so that the deceleration grid can be electrically connected with the external current detection module through the conductive component to detect the current of the deceleration grid, and the performance of the ion source can be more accurately evaluated, the performance evaluation requirement of the radio frequency ion source is met, and the increasingly higher process requirement and stability requirement are met. BRIEF DESCRIPTION OF DRAWINGS

[0016] The technical solutions of the application will be further described in detail below with reference to the drawings and embodiments, and the drawings show that: Figure 1 is a perspective structural schematic view of the grid device (omitting the mesh structure in the middle of the screen grid, the acceleration grid and the deceleration grid) of the embodiment of the application; Figure 2 is an exploded structural schematic view of the grid device shown in FIG. 1; Figure 1 Figure 3 is a schematic view of the conductive component of the embodiment of the application; Figure 4 is a sectional structural schematic view of the guide subassembly mounted in the grid mounting plate state of the embodiment of the application; Figure 5 is a perspective structural schematic view of the ion source equipment of the embodiment of the application; Figure 6 is a structural block diagram of the current detection module of the embodiment of the application connected with the deceleration grid through the conductive component; Figure 7 is a circuit principle diagram of the high-frequency filter circuit of the embodiment of the application; ​Figure 8 is a flowchart of the ion source performance evaluation method of the embodiments of the present application.

[0017] The reference signs in the drawings are as follows: 100, grid device; 110, conductive assembly; 111, guiding subassembly; 1111, first support column; 1112, first electrode tab; 1113, second electrode tab; 1114, first insulating piece; 11141, limiting protrusion; 1115, second insulating piece; 1115a, limiting groove; 1116, first fixing piece; 112, positioning subassembly; 1121, second support column; 1122, third electrode tab; 1123, fourth electrode tab; 1124, conductive mounting piece; 1125, second fixing piece; 120, screen grid; 130, acceleration grid; 140, deceleration grid; 150, grid mounting plate; 160, insulating ring; 200, ion source housing; 200a, opening; 300, current detection module; 310, current detection instrument; 320, high-frequency filter circuit; L1, first inductor; L2, second inductor; L3, third inductor; L4, fourth inductor; C1, first capacitor; C2, second capacitor; C3, third capacitor; C4, fourth capacitor. DETAILED DESCRIPTION

[0018] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The preferred embodiments of the present application will be described in detail with reference to the drawings.

[0019] The existing grid device usually includes a screen grid, an acceleration grid, and a deceleration grid. The screen grid, the acceleration grid, and the deceleration grid all absorb a certain amount of electrons or ions to form respective currents. The screen grid and the acceleration grid are applied with a certain direct current bias when working, so their respective currents can be detected in real time through the loop of the respective power supplies. The deceleration grid is connected to the ground, and is usually directly connected to the process cavity through the ion source metal outer cover, that is, directly grounded.

[0020] However, as the application of the ion source is more and more widely, the process requirements of the application are higher and higher, and thus the stability requirements of the ion source are higher and higher, and only monitoring the currents from the screen grid and the acceleration grid cannot meet the more accurate judgment on the performance of the ion source (such as the collimation of the extracted ion beam, the working stability, and the service life prediction).

[0021] Therefore, the embodiments of the present application provide a grid device 100, which can lead out the current of the deceleration grid 140 for detection. The current of the deceleration grid 140 can help to more accurately judge the performance of the ion source, and meet the requirements of higher stability and higher process requirements of the ion source. Therefore, the embodiments of the present application provide a grid device 100, which can lead out the current of the deceleration grid 140 for detection. The current of the deceleration grid 140 can help to more accurately judge the performance of the ion source, and meet the requirements of higher stability and higher process requirements of the ion source.

[0022] The grid device 100 according to the embodiment of the present application comprises a conductive assembly 110, a screen grid 120, an accelerating grid 130, a decelerating grid 140 and a grid mounting plate 150. Figure 1 and Figure 2 As shown in the figure, the grid device 100 comprises a conductive assembly 110, a screen grid 120, an accelerating grid 130, a decelerating grid 140 and a grid mounting plate 150, the screen grid 120, the accelerating grid 130 and the decelerating grid 140 are sequentially stacked and insulatively arranged between each other, and are all installed at the opening 200a end of the external ion source housing 200 through the grid mounting plate 150, the screen grid 120, the accelerating grid 130 and the decelerating grid 140 are all insulatively arranged with the grid mounting plate 150, the decelerating grid 140 is arranged close to the grid mounting plate 150 and is electrically connected with the external current detection module 300 through the conductive assembly 110, so as to output the current for detection.

[0023] The grid device 100 according to the embodiment of the present application installs the screen grid 120, the accelerating grid 130 and the decelerating grid 140 at the opening 200a end of the external ion source housing 200 through the grid mounting plate 150, insulatively arranges the screen grid 120, the accelerating grid 130 and the decelerating grid 140 with the grid mounting plate 150, and additionally arranges the conductive assembly 110, so that the decelerating grid 140 can be electrically connected with the external current detection module 300 through the conductive assembly 110, thereby detecting the current of the decelerating grid 140, helping to more accurately evaluate the performance of the ion source, meeting the performance evaluation requirements of the radio frequency ion source, and meeting the increasingly high process requirements and ion source stability requirements.

[0024] In the application of the grid device 100 according to the embodiment of the present application, the grid device 100 is installed at the opening 200a end of the ion source housing 200, and the screen grid 120, the accelerating grid 130 and the decelerating grid 140 are sequentially distributed along the emission direction of the ion beam. When the ions pass through the grid holes of the screen grid 120, they will be accelerated in the electric field between the screen grid 120 and the accelerating grid 130 (positive ions move in the direction of low potential under the action of electric field force), and obtain kinetic energy. The decelerating grid 140 is located on the outer side of the accelerating grid 130 (the side closest to the target material or workpiece), and its potential is usually higher than that of the accelerating grid 130, forming a reverse electric field with the accelerating grid 130. The reverse electric field will produce a converging effect on the high-speed moving ion beam, offsetting the diffusion of the ion beam caused by the space charge repulsion, so that the ion beam is more concentrated. The grid mounting plate 150 plays a role in fixing and supporting the screen grid 120, the accelerating grid 130 and the decelerating grid 140, so that they are positioned and installed at the opening 200a end of the external ion source housing 200. When the ion source is abnormal, the current on the decelerating grid 140 will change greatly, while the currents of the screen grid 120 and the accelerating grid 130 may not change much. Therefore, by insulating the decelerating grid 140 from the grid mounting plate 150 and leading the current of the decelerating grid 140 out through the conductive assembly 110 and electrically connecting it with the external current detection module 300, the current of the decelerating grid 140 can be monitored, and the performance of the ion source can be more accurately evaluated.

[0025] Reference Figure 1 And Figure 2 In the optional embodiment of the present application, the grid device 100 further comprises an insulating ring 160, which is clamped between the deceleration grid 140 and the grid mounting plate 150.

[0026] The insulating ring 160 can separate and insulate the grid mounting plate 150 from the deceleration grid 140, further avoiding contact between the grid mounting plate 150 and the deceleration grid 140, and ensuring the authenticity of the current detection data of the deceleration grid 140. In addition, the setting of the insulating ring 160 can also reduce the possibility of gas leakage from the gap between the deceleration grid 140 and the grid mounting plate 150 during the operation of the ion source.

[0027] Optionally, the insulating ring 160 is usually made of ceramic or other insulating materials with moderate hardness. The ceramic insulating ring 160 can not only achieve the separation and insulation of the grid mounting plate 150 and the deceleration grid 140, but also can withstand high temperature during the operation of the ion source.

[0028] Reference Figures 1 to 3 In the optional embodiment of the present application, the conductive assembly 110 comprises a guide subassembly 111 and a positioning subassembly 112. The guide subassembly 111 is electrically connected to the deceleration grid 140 and is insulatively mounted on the grid mounting plate 150. The positioning subassembly 112 is insulatively mounted on the external ion source housing 200 and can be electrically connected to the external current detection module 300.

[0029] The guide subassembly 111 serves as a bridge between the deceleration grid 140 and the positioning subassembly 112, and can lead the current of the deceleration grid 140 out, ensuring that the current of the deceleration grid 140 is conducted to the positioning subassembly 112 through a preset path, avoiding contact with the grid mounting plate 150 or other grids. The positioning subassembly 112 is insulatively mounted on the external ion source housing 200, which can cut off the conduction path of the current of the deceleration grid 140 to the ion source housing 200 (the ion source housing 200 is usually grounded, and direct conduction may cause signal shunt), ensuring the authenticity of the current detection of the deceleration grid 140. At the same time, since the positioning subassembly 112 is mounted on the ion source housing 200, it can ensure that the connection point with the external current detection module 300 is stable at a preset fixed position, reducing the fluctuation of the contact resistance between the current detection module 300 and the positioning subassembly 112, and providing more stable and reliable original current data for subsequent evaluation of the performance of the ion source.

[0030] Reference Figure 3 And Figure 4In an alternative embodiment of the present application, the guiding subassembly 111 comprises a first support column 1111, a first electrode tab 1112 and a second electrode tab 1113. The first support column 1111 is fixed on the grid mounting plate 150. The first electrode tab 1112 and the second electrode tab 1113 are both insulated and positioned on the first support column 1111. The first electrode tab 1112 is electrically connected with the deceleration grid 140, and the second electrode tab 1113 is electrically connected with the first electrode tab 1112 and the positioning subassembly 112.

[0031] The first electrode tab 1112 is directly electrically connected with the deceleration grid 140, and is responsible for capturing the current signal on the deceleration grid 140 at a close distance. The second electrode tab 1113 serves as an intermediate conduction carrier, which receives the current from the first electrode tab 1112 and transmits it to the positioning subassembly 112. This two-stage conduction design can reduce the risk of poor contact caused by the length of a single tab being too long or assembly deviation. The first support column 1111 is fixed on the grid mounting plate 150, providing a stable mounting reference for the first electrode tab 1112 and the second electrode tab 1113. Moreover, the first electrode tab 1112 and the second electrode tab 1113 are used as current conduction carriers, which have a certain deformation ability while maintaining electrical conductivity. They can not only adapt to the slight thermal expansion and contraction displacement of the deceleration grid 140 during operation, but also maintain close contact with the mating components through their own elastic force, avoiding fluctuations in contact resistance caused by rigid connection and meeting higher signal accuracy requirements.

[0032] Further, with reference to Figure 3 and Figure 4 , the guiding subassembly 111 further comprises a first insulating member 1114, a second insulating member 1115 and a first fixing member 1116. The first support column 1111 is sequentially arranged through the grid mounting plate 150, the first insulating member 1114, the second insulating member 1115 and the first fixing member 1116. The first insulating member 1114 and the second insulating member 1115 are clamped between the grid mounting plate 150 and the first fixing member 1116. The first electrode tab 1112 and the second electrode tab 1113 are clamped and positioned between the first insulating member 1114 and the second insulating member 1115.

[0033] The first support column 1111 is arranged through the grid mounting plate 150, and the grid mounting plate 150 becomes a first fixed point of the first support column 1111, and forms a two-end clamping structure with the first fixing member 1116, so that the first electrode lead 1112 and the second electrode lead 1113 are positioned and mounted on the first support column 1111, and the positions of the first electrode lead 1112 and the second electrode lead 1113 are stable and in good contact. Through the clamping of the first insulating member 1114 and the second insulating member 1115, the first electrode lead 1112 and the second electrode lead 1113 can realize stable electrical connection, and the first insulating member 1114 and the second insulating member 1115 can avoid the contact between the first electrode lead 1112 and the second electrode lead 1113 and the grid mounting plate 150.

[0034] Optionally, the first fixing member 1116 can be a nut, and the first insulating member 1114, the second insulating member 1115, the first electrode lead 1112 and the second electrode lead 1113 are locked on the first support column 1111. Optionally, the first support column 1111 usually adopts a screw or a bolt, which can be matched with the nut to lock and position the first insulating member 1114, the second insulating member 1115, the first electrode lead 1112 and the second electrode lead 1113. The first insulating member 1114, the second insulating member 1115, the first electrode lead 1112 and the second electrode lead 1113 are locked and positioned on the grid mounting plate 150 by the screw or the bolt matched with the nut, which is simple and convenient to assemble.

[0035] Further, with reference to Figure 3 and Figure 4 , the first insulating member 1114 is provided with a limiting protrusion 11141 on an end face facing the second insulating member 1115, the second insulating member 1115 is provided with a limiting groove 1115a on an end face facing the first insulating member 1114, the first electrode lead 1112 is provided with a first through hole, the second electrode lead 1113 is provided with a second through hole, the limiting protrusion 11141 is arranged through the first through hole and the second through hole and is accommodated in the limiting groove 1115a, the groove of the limiting groove 1115a abuts against the first electrode lead 1112 and the second electrode lead 1113 on the end face of the first insulating member 1114 facing the second insulating member 1115, and the support column is arranged through the middle part of the limiting protrusion 11141 and the groove bottom wall of the limiting groove 1115a.

[0036] The limiting protrusion 11141 passes through the first through hole of the first electrode tab 1112 and the second through hole on the second electrode tab 1113, which can insulate the first electrode tab 1112 and the second electrode tab 1113 from the first support column 1111, avoiding the formation of a current loop between the first electrode tab 1112, the second electrode tab 1113, the first support column 1111 and the grid mounting plate 150. After the limiting protrusion 11141 is accommodated in the limiting groove 1115a, the groove of the limiting groove 1115a tightly abuts the first electrode tab 1112 and the second electrode tab 1113 against the end face of the first insulating member 1114, realizing stable electrical connection between the first electrode tab 1112 and the second electrode tab 1113. When assembling the guide subassembly 111, the assembler only needs to pass through the through holes of each component in sequence, which can simultaneously complete the assembly and positioning of the grid mounting plate 150, the first insulating member 1114, the second insulating member 1115, the first electrode tab 1112 and the second electrode tab 1113, without the need to separately calibrate the positions of each component, thereby shortening the assembly time.

[0037] Reference Figure 3 In the optional embodiment of the present application, the positioning subassembly 112 includes a second support column 1121, a third electrode tab 1122, a fourth electrode tab 1123, a conductive mounting member 1124 and a second fixing member 1125. The second support column 1121 is used to be fixed on the inner wall of the external ion source housing 200. The third electrode tab 1122 is insulatively mounted on the second support column 1121. The conductive mounting member 1124 passes through the second electrode tab 1113, the third electrode tab 1122, the fourth electrode tab 1123 and the second fixing member 1125, so that the second electrode tab 1113, the third electrode tab 1122 and the fourth electrode tab 1123 are electrically connected with each other. The fourth electrode tab 1123 can be electrically connected with the external current detection module 300.

[0038] The second support column 1121 is fixed on the inner wall of the ion source housing 200, and can be designed in length and installation angle according to the space size inside the ion source housing 200, thereby providing a stable installation reference for the third electrode tab 1122 and the fourth electrode tab 1123. The third electrode tab 1122 is electrically connected with the second electrode tab 1113 of the guide subassembly 111, and is responsible for receiving the current signal from the deceleration grid 140. The fourth electrode tab 1123 serves as an output end, and transmits the current to the external current detection module 300. This relay type conduction can be flexibly adjusted according to the space layout inside the ion source housing 200. Moreover, the third electrode tab 1122 and the fourth electrode tab 1123 are used as the conduction carriers of the current, which have certain deformation ability while maintaining electrical conductivity, can adapt to the temperature change inside the ion source, and can maintain close contact with the abutting component through their own elastic force, thereby avoiding the fluctuation of contact resistance caused by rigid connection, and meeting higher signal accuracy requirements.

[0039] In terms of assembly, the conductive mounting member 1124 is sequentially threaded through the second electrode tab 1113, the third electrode tab 1122, and the fourth electrode tab 1123, thereby directly realizing electrical connection of the three. The conductive mounting member 1124 is not only a carrier for current conduction, but also indirectly fixes the second electrode tab 1113, the third electrode tab 1122, and the fourth electrode tab 1123 with the second support column 1121 through the threaded second fixing member 1125. This design eliminates the need for separate conductive connecting members and fixing structures, reduces the number of parts (such as the need for additional wires or buckles), makes the overall structure more compact, and is particularly suitable for narrow spaces inside the ion source housing 200. The locking force of the second fixing member 1125 is evenly transmitted to the contact surfaces of the electrode tabs through the conductive mounting member 1124, avoiding deformation of the tabs (such as indentation of thin tab) caused by excessive local pressure. At the same time, the stress points of the second electrode tab 1113, the third electrode tab 1122, and the fourth electrode tab 1123 are concentrated around the conductive mounting member 1124, reducing stress concentration at the edges and prolonging the fatigue life of the second electrode tab 1113, the third electrode tab 1122, and the fourth electrode tab 1123.

[0040] Optionally, the conductive mounting member 1124 can be made of conductive copper bolts, conductive rivets, etc. The second fixing member 1125 can be a nut that locks the second electrode tab 1113, the third electrode tab 1122, and the fourth electrode tab 1123 on the conductive mounting member 1124. The conductive copper bolts or conductive rivets in cooperation with the nut can quickly realize the locking and positioning of the second electrode tab 1113, the third electrode tab 1122, and the fourth electrode tab 1123, and the assembly is simple and convenient.

[0041] The embodiments of the present application also provide an ion source device. Referring to Figure 1 、 Figure 5 and Figure 6 , the ion source device includes an ion source housing 200 formed with an opening 200a, a current detection module 300, and a grid device 100 as described above. The grid mounting plate 150 of the grid device 100 is mounted at the end of the opening 200a of the ion source housing 200. The current detection module 300 is electrically connected to the conductive assembly 110 of the grid device 100 and grounded. The current detection module 300 is used to detect the current value of the deceleration grid 140 of the grid device 100.

[0042] The grid device 100 in the ion source equipment of the embodiment of the application is installed at the opening 200a end of the ion source shell 200 through the screen grid 120, the acceleration grid 130 and the deceleration grid 140 installed through the grid mounting plate 150, the screen grid 120, the acceleration grid 130 and the deceleration grid 140 are all insulated from the grid mounting plate 150, and the conductive assembly 110 is additionally arranged, so that the deceleration grid 140 can be electrically connected with the current detection module 300 through the conductive assembly 110, the current detection module 300 is also grounded, and the current of the deceleration grid 140 is detected, so that the performance of the ion source can be more accurately evaluated, and the increasingly higher process requirements and stability requirements can be met.

[0043] The grid device 100 in the ion source equipment has the same structure and beneficial effects as the grid device 100 in the foregoing embodiment. The structure and beneficial effects of the grid device 100 have been described in detail in the foregoing embodiment, and will not be described here again.

[0044] Reference Figure 5 and Figure 6 In the optional embodiment of the application, the current detection module 300 includes a current detection instrument 310 and a high-frequency filter circuit 320, the current detection instrument 310 is used to detect the current value of the deceleration grid 140 of the grid device 100, and the current detection instrument 310 and the high-frequency filter circuit 320 are both connected in series between the conductive assembly 110 of the grid device 100 and the ground end.

[0045] The current detection instrument 310 can detect and obtain the current value of the deceleration grid 140 of the grid device 100, so as to evaluate the performance of the ion source subsequently. Since the grid device 100 works in a radio frequency environment, there will be high-frequency electromagnetic interference, and these interferences will be superimposed on the real current signal of the deceleration grid 140, causing the current detection instrument 310 to misread. To solve this problem, the high-frequency filter circuit 320 is arranged in the embodiment of the application, which can filter high-frequency current, so that the detected current is not disturbed, the authenticity of the detected current is ensured, and the accuracy of the performance evaluation of the ion source is further improved.

[0046] Reference Figure 6 and Figure 7 In the optional embodiment of the application, the high-frequency filter circuit 320 includes a first inductor L1, a second inductor L2, a third inductor L3, a fourth inductor L4, a first capacitor C1, a second capacitor C2, a third capacitor C3 and a fourth capacitor C4, the first inductor L1, the second inductor L2, the third inductor L3 and the fourth inductor L4 are connected in series, the other end of the first inductor L1 is connected with the conductive assembly 110 of the grid device 100, the other end of the fourth inductor L4 is used as an output end, the first capacitor C1, the second capacitor C2, the third capacitor C3 and the fourth capacitor C4 are connected in parallel, a first parallel node is connected with the conductive assembly 110 of the grid device 100, and a second parallel node is grounded.

[0047] The high-frequency filter circuit 320 is constructed by setting the first inductor L1, the second inductor L2, the third inductor L3, the fourth inductor L4, the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4. The inductor has the characteristic of "passing low frequency and blocking high frequency", and the higher the frequency, the greater the inductive reactance. When the current signal containing high-frequency interference is transmitted from the conductive component 110, the real current of low frequency can smoothly pass through the first inductor L1, the second inductor L2, the third inductor L3, and the fourth inductor L4, while the high-frequency interference will be attenuated step by step due to the sharp increase in inductive reactance, thereby filtering out the high-frequency current. At the same time, the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4 are connected in parallel, one end of which is connected to the conductive component 110, and the other end is grounded, thereby forming a high-frequency discharge channel. The high-frequency interference signal will preferentially flow to the ground end through the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4. The parallel connection of the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4 can increase the discharge capacity of high-frequency signals. Even in the face of short-time strong high-frequency pulses (such as sharp peak interference generated by plasma discharge), they can also quickly absorb them, avoiding the interference signal from breaking through the inductor barrier. Therefore, the high-frequency filter circuit 320 of the embodiment of the present application can filter high-frequency current, so that the detected current is not disturbed, and the authenticity of the detected current is ensured.

[0048] In an optional embodiment of the present application, the current detection instrument 310 can also be connected to a terminal device such as a computer, an upper computer, etc. The terminal device can receive and record the current value detected and acquired by the current detection instrument 310.

[0049] The ion source device of the embodiment of the present application can be a device applying an ion source, such as a vacuum coating device, an ion beam etching device, etc.

[0050] Reference Figure 8 The embodiment of the present application also provides an ion source performance evaluation method, which is applied to the ion source device described above. The ion source performance evaluation method comprises the following steps: S10, acquiring the current value of the deceleration grid in real time by the current detection module; S20, comparing the current value with the preset current value; S30, if the current value is greater than the preset current value, determining that the ion source performance is abnormal; S40, if the current value is less than or equal to the preset current value, determining that the ion source performance is normal.

[0051] The current value of the deceleration grid is detected in real time by the current detection module in the embodiments of the present application, and the current of the deceleration grid is taken as a core index, and the performance of the ion source is quickly evaluated by comparison with the preset current value, which can meet the requirements of higher process and higher stability. The structure and beneficial effects of the ion source device have been described in detail in the foregoing embodiments, and will not be described here.

[0052] The preset current value is a threshold value determined based on the design parameters of the ion source, process requirements, etc., and its essence is the upper limit of the current of the deceleration grid when the performance of the ion source is in the normal working interval. The operator can set it, and judge whether the performance of the ion source is normal based on this.

[0053] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them. For those skilled in the art, the technical solutions recorded in the above embodiments can be modified, or some technical features can be replaced by equivalents; all these modifications and replacements shall belong to the protection scope of the claims of the present application.

Claims

1. A screen device, characterized in that The grid net device comprises a conductive assembly, a screen grid, an accelerating grid, a decelerating grid and a grid net mounting plate, the screen grid, the accelerating grid and the decelerating grid are sequentially stacked and insulated from each other, and are all mounted on the opening end of the external ion source shell through the grid net mounting plate, the screen grid, the accelerating grid and the decelerating grid are all insulated from the grid net mounting plate, the decelerating grid is arranged close to the grid net mounting plate and is electrically connected with the external current detection module through the conductive assembly to output the current for detection.

2. The screen device of claim 1, wherein The grid net device further comprises an insulating ring, which is clamped between the decelerating grid and the grid net mounting plate.

3. The screen device of claim 1, wherein The conductive assembly comprises a guide sub-assembly and a positioning sub-assembly, the guide sub-assembly is electrically connected with the decelerating grid and the positioning sub-assembly and is insulated mounted on the grid net mounting plate, and the positioning sub-assembly is used for being insulated mounted on the external ion source shell and can be electrically connected with the external current detection module.

4. The screen device of claim 3, wherein The guide sub-assembly comprises a first support column, a first electrode tab and a second electrode tab, the first support column is fixed on the grid net mounting plate, the first electrode tab and the second electrode tab are both insulated and positioned on the first support column, the first electrode tab is electrically connected with the decelerating grid, and the second electrode tab is electrically connected with the first electrode tab and the positioning sub-assembly.

5. The screen device of claim 4, wherein The guide sub-assembly further comprises a first insulating piece, a second insulating piece and a first fixing piece, the first support column is sequentially arranged through the grid net mounting plate, the first insulating piece, the second insulating piece and the first fixing piece, the first insulating piece and the second insulating piece are clamped between the grid net mounting plate and the first fixing piece, and the first electrode tab and the second electrode tab are clamped and positioned between the first insulating piece and the second insulating piece.

6. The screen device of claim 5, wherein An end surface of the first insulating piece towards the second insulating piece is provided with a limiting protrusion, an end surface of the second insulating piece towards the first insulating piece is provided with a limiting groove, the first electrode tab is provided with a first through hole, the second electrode tab is provided with a second through hole, the limiting protrusion is arranged through the first through hole and the second through hole and is accommodated in the limiting groove, the groove of the limiting groove abuts the first electrode tab and the second electrode tab against the end surface of the first insulating piece towards the second insulating piece, and the support column is arranged through the middle part of the limiting protrusion and the groove bottom wall of the limiting groove.

7. The screen device of claim 4, wherein The positioning sub-assembly comprises a second support column, a third electrode tab, a fourth electrode tab, a conductive mounting piece and a second fixing piece, the second support column is used for being fixed on the inner wall of the external ion source shell, the third electrode tab is insulated mounted on the second support column, the conductive mounting piece is arranged through the second electrode tab, the third electrode tab, the fourth electrode tab and the second fixing piece, so that the second electrode tab, the third electrode tab and the fourth electrode tab are electrically connected with each other, and the fourth electrode tab can be electrically connected with the external current detection module.

8. An ion source apparatus, characterized by, The ion source device comprises an ion source shell with an opening, a current detection module and a grid device according to any one of claims 1-7, the grid mounting plate of the grid device is mounted at the opening end of the ion source shell, the current detection module is electrically connected with the conductive assembly of the grid device and grounded, and the current detection module is used for detecting the current value of the deceleration grid of the grid device.

9. The ion source apparatus of claim 8, wherein, The current detection module comprises a current detection instrument and a high-frequency filter circuit, the current detection instrument is used for detecting the current value of the deceleration grid of the grid device, and the current detection instrument and the high-frequency filter circuit are both connected in series between the conductive assembly of the grid device and the ground end.

10. A method of ion source performance evaluation, characterized by, The ion source performance evaluation method is applied to the ion source device according to claim 8 or 9, and comprises the following steps: The current value of the deceleration grid is detected in real time through the current detection module; The current value is compared with a preset current value; If the current value is greater than the preset current value, it is judged that the ion source performance is abnormal; If the current value is less than or equal to the preset current value, it is judged that the ion source performance is normal.

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