Auxiliary vacuum device for beam through-wall transmission, beam through-wall transmission system and beam through-wall transmission method

Abstract

The invention discloses a beam through-wall transmission auxiliary vacuum device, a beam through-wall transmission system and a beam through-wall transmission method.The beam through-wall transmission auxiliary vacuum device is applied to accelerator beam through-wall transmission, is used for being detachably installed in a beam through-wall pipe in a sealed mode and comprises a tubular external member; the tubular external member comprises a plurality of sleeves which are arranged in a step-by-step nesting manner; a getter layer is arranged on the surface of the inner wall and / or the outer wall of each sleeve; each sleeve is provided with a heating component for heating the getter layer; in a working state, the sleeves sequentially extend out, any two adjacent sleeves are axially connected and locked at a working position, and the working position is located in the beam through-wall pipe; the technical problems that in the prior art, a through-wall pipe is long, vacuum at the position of the through-wall pipe can only be exhausted through vacuum pumps at the two ends of the through-wall pipe, the vacuum degree at the position, away from a pumping speed opening, of the center of the pipe can be reduced, and local loss of beam current in the middle section of the pipe is too large are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of particle acceleration, in particular to an auxiliary vacuum device for beam transmission through a wall, a beam transmission system through a wall and a method. BACKGROUND

[0002] In the field of accelerators, the transport path of accelerated particles is usually long, and the energy of accelerated particles is usually as high as several tens of MeV. A large amount of radiation is generated when the accelerated particles are transported to the target to generate the required particles, and the radiation needs to be shielded.

[0003] At present, a 2-4 meter concrete wall is usually built to shield the radiation generated by the accelerated particles, and a through-wall tube needs to be built in the concrete wall. In order to ensure the shielding effect, only a small hole can be opened on the concrete wall so that the through-wall tube can just pass through. Since the through-wall tube is long, the vacuum at the through-wall tube can only rely on the vacuum pumps at both ends of the through-wall tube for pumping. The vacuum degree at the center of the tube far from the pump suction port will decrease, which will cause excessive local loss of beam and generate a lot of radiation. It is difficult to install a vacuum pump in the narrow space in the concrete wall. Therefore, an auxiliary vacuum structure or method is needed to improve the vacuum degree at the through-wall tube. SUMMARY

[0004] The present application aims to provide an auxiliary vacuum device for beam transmission through a wall, a beam transmission system through a wall and a method, to solve the technical problem that in the prior art, the through-wall tube is long, the vacuum at the through-wall tube can only rely on the vacuum pumps at both ends of the through-wall tube for pumping, the vacuum degree at the center of the tube far from the pump suction port will decrease, which will cause excessive local loss of beam at the middle section of the tube.

[0005] In order to solve the above technical problems, the present application adopts the following technical solutions:

[0006] In a first aspect, the present application provides an auxiliary vacuum device for beam transmission through a wall, which is used for accelerator beam transmission through a wall, and is detachably and sealingly installed in a beam transmission tube through a wall, and comprises a tubular assembly, wherein the tubular assembly comprises a plurality of nested sleeves; the inner wall and / or the outer wall of each sleeve is provided with a getter layer; each sleeve is provided with a heating component for heating the getter layer; in a working state, each sleeve is sequentially extended, and any two adjacent sleeves are axially connected and locked in a working position in the beam transmission tube through a wall. In an initial state of the auxiliary vacuum device, each sleeve is retracted and nested, and in the working state, each sleeve is sequentially extended, and the adjacent sleeves are axially limited, so that each sleeve is located in the corresponding working position, and the total working length of the tubular assembly is increased in segments by sequentially extending each sleeve and connecting and locking the adjacent sleeves. In the auxiliary vacuum state, the heating component is operated to activate the getter and improve the vacuum degree in the beam transmission tube through a wall.

[0007] Further, in the working state, any two adjacent sleeves have an overlapping part, and the heating component is installed at one end of the inner sleeve away from the corresponding outer sleeve.

[0008] Further, the heating component is a first induction coil, the outer periphery of the corresponding beam transmission tube through a wall is provided with a second induction coil, the second induction coil is used for electrically connecting with an external alternating power supply, the first induction coil and the second induction coil are made of conductive material, and correspondingly, each sleeve is made of heat-conducting material.

[0009] Further, the inner sleeve of any two adjacent sleeves is in sliding connection with the corresponding outer sleeve, and in the working state, each sleeve is sequentially extended, and any two adjacent sleeves are axially limited in the working position by a detachable interlocking structure. In this way, the detachable interlocking structure can prevent the relative position of each sleeve from changing after being extended, and can also prevent each sleeve from producing radial displacement or retraction in the working state, thereby causing process instability.

[0010] Further, the inner wall of the outer sleeve of any two adjacent sleeves is provided with a sliding groove, and the outer surface of the inner sleeve is fixedly provided with a sliding block, the sliding block and the sliding groove are matched with each other, and when the inner sleeve is extended relative to the outer sleeve, the sliding block slides in the sliding groove; the detachable interlocking structure is a clamping structure, which comprises a clamping groove, and the clamping groove is arranged at one end of the sliding groove, and when the inner sleeve is extended from the outer sleeve, the inner sleeve is rotated to clamp the sliding block in the clamping groove, so as to limit the relative position between the inner sleeve and the outer sleeve.

[0011] Further, each of the sleeves is nested in a decreasing or increasing diameter order.

[0012] Further, in the initial state, the axes of each of the sleeves coincide, and in the working state, each of the sleeves can be extended along the axial direction and locked in the working position, and the axes of each of the sleeves coincide with the axis of the beam through-wall tube. In this way, each of the sleeves can be more conveniently extended and retracted, and in the working position, the position is more centered, which is beneficial for installation and disassembly.

[0013] In a second aspect, the present application further provides a beam through-wall transmission system using the auxiliary vacuum device as described above, comprising,

[0014] a beam through-wall tube passing through the shielding wall; further comprising,

[0015] a first vacuum chamber and a second vacuum chamber respectively arranged at two ends of the beam through-wall tube; the first vacuum chamber or the second vacuum chamber is used for connecting to the accelerator beam outlet or the target system inlet;

[0016] the beam channels of the first vacuum chamber and the second vacuum chamber are respectively detachably sealed connected with the two ends of the beam through-wall tube through the auxiliary vacuum devices; each of the auxiliary vacuum devices corresponds to the tubular sleeve which respectively extends into the beam through-wall tube from the two ends of the beam through-wall tube, and the free end of each of the tubular sleeves extends to a position close to the center of the beam through-wall tube;

[0017] the heating component is a first induction coil, the corresponding outer periphery of the beam through-wall tube has a second induction coil, the second induction coil is used for electrically connecting with an external alternating power supply; the first induction coil and the second induction coil are made of conductive material; correspondingly, each of the sleeves is made of heat-conducting material.

[0018] In this way, the second induction coil is connected with alternating current, which can make the first induction coil heat, and then activate the getter on the wall of each sleeve through the heat conduction of each sleeve.

[0019] Further, the beam through-wall transmission system further comprises a first telescopic bellows and a second telescopic bellows; the two ends of the first telescopic bellows are respectively detachably connected with the beam channel of the first vacuum chamber and the corresponding installed auxiliary vacuum device; the two ends of the second telescopic bellows are respectively detachably connected with the beam channel of the second vacuum chamber and the corresponding installed auxiliary vacuum device.

[0020] Further comprising a first vacuum pump and a second vacuum pump respectively sealed connected with the pumping channels of the first vacuum chamber and the second vacuum chamber, for pumping the first vacuum chamber and the second vacuum chamber.

[0021] Thirdly, the present invention also provides a beam-through-wall transmission method, utilizing the beam-through-wall transmission system described above, comprising the following steps:

[0022] S1. Wrap a second induction coil around the outer circumference of the beam through-wall tube or embed it in the corresponding shielding wall, and connect it to an external AC power source. Then fix the beam through-wall tube at a preset position in the shielding wall.

[0023] S2. Install the first vacuum chamber and the second vacuum chamber respectively, and seal the first vacuum pump and the second vacuum pump to the first vacuum chamber and the second vacuum chamber respectively;

[0024] S3. Connect the first telescopic bellows and the second telescopic bellows to the beam channels of the first vacuum chamber and the second vacuum chamber respectively, and keep the first telescopic bellows and the second telescopic bellows in a contracted state; so as to ensure that the auxiliary vacuum device has sufficient installation space and can flexibly adjust the installation space.

[0025] S4. Install the auxiliary vacuum device in its initial state at one end of the first telescopic bellows and the second telescopic bellows facing the beam through-wall pipe, respectively.

[0026] S5. Extend each sleeve in the auxiliary vacuum device at both ends one by one and connect two adjacent sleeves axially and lock them in the working position until all sleeves are extended and locked in the working position. At this time, connect the auxiliary vacuum device at both ends to the two ends of the beam through-wall tube.

[0027] S6. First, turn on the pre-pump to make the beam through-wall tube reach the first preset vacuum level, then turn on the first vacuum pump and the second vacuum pump to make the beam through-wall tube reach the second preset vacuum level.

[0028] S7. Apply alternating current to the second induction coil to heat up the first induction coil, thereby raising the temperature of each sleeve to the getter activation temperature and activating the getter; each sleeve simultaneously bakes the beam through-wall tube to help improve the vacuum level inside the beam through-wall tube.

[0029] S8. When the beam penetration tube reaches the third preset vacuum level, turn off the AC power of the second induction coil and start the accelerator to deliver the particle beam to the target system.

[0030] The present invention has the following beneficial effects: the auxiliary vacuum device of the present invention is telescopic and can extend into the middle position of the beam penetration tube, which can improve the vacuum degree of the beam penetration tube and reduce local divergence and beam leakage. The present invention can not only improve the vacuum degree in the beam penetration tube, but also has the advantages of small space occupation, high efficiency, low cost, and easy replacement and disassembly. Attached Figure Description

[0031] To make the objectives, technical solutions, and advantages of the invention clearer, the invention will now be described in further detail with reference to the accompanying drawings, wherein:

[0032] Figure 1 This is a schematic diagram of the auxiliary vacuum device of the present invention.

[0033] Figure 2 This is a schematic diagram of any of the casing structures of the present invention.

[0034] Figure 3 This is a schematic diagram of the assembly structure of the auxiliary vacuum device and the beam transmission pipeline of the present invention.

[0035] Figure 4 This is a schematic diagram of the beam through-wall transmission system of the present invention.

[0036] Figure 5 for Figure 4 Enlarged view of area A in the middle.

[0037] Figure 6 for Figure 4 Enlarged view of area B in the middle.

[0038] Explanation of reference numerals in the attached drawings: 1. Auxiliary vacuum device; 11. Mounting flange; 12. Sleeve; 13. First induction coil; 14. Slide groove; 15. Slider; 16. Slot; 2. Beam through-wall tube; 3. Second induction coil; 4. Beam through-wall transmission system; 41. First vacuum chamber; 42. Second vacuum chamber; 43. First telescopic bellows; 44. Second telescopic bellows; 45. First vacuum pump; 46. Second vacuum pump; 47. First pipeline support; 48. Second pipeline support; 49. First gate valve; 410. Second gate valve; 411. Foreboard pump; 5. Shielding wall. Detailed Implementation

[0039] The technical solutions of some embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments disclosed in the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments provided in the present invention are within the scope of protection of the present invention. It should be noted that the same reference numerals and letters in the drawings represent similar parts. Once a part is defined in one drawing, it will not be defined and explained again in subsequent drawings.

[0040] This invention can be applied to accelerator beam transmission through walls or any other beam transmission through walls scenario. It solves the technical problem in the prior art where the wall-penetrating tube is long, the vacuum at the wall-penetrating tube can only be pumped by vacuum pumps at both ends of the wall-penetrating tube, and the vacuum level at the center of the tube far from the pump pump port will decrease, which will lead to excessive local beam loss in the middle section of the tube.

[0041] The auxiliary vacuum device, beam through-wall transmission system, and method disclosed in this invention have the following technical advantages:

[0042] 1. The auxiliary vacuum device of the present invention is telescopic and can be inserted into the middle position of the beam through-wall tube, which can improve the vacuum degree of the through-wall beam tube and reduce local divergence and leakage of the beam.

[0043] 2. This invention can not only improve the vacuum level in the beam through-wall pipe, but also has the advantages of small space occupation, high efficiency, low cost, and easy replacement and disassembly.

[0044] To further illustrate the structure and method of the present invention, the following embodiments are disclosed.

[0045] In some embodiments, please refer to Figure 1 This embodiment provides an auxiliary vacuum device 1 for beam through-wall transmission, including a tubular assembly comprising a plurality of nested sleeves 12; each sleeve 12 has a getter layer on its inner and / or outer wall surface; each sleeve 12 is provided with a heating element for heating the getter layer; in the working state, each sleeve 12 extends out sequentially and any two adjacent sleeves 12 are axially connected and locked in the working position, which is located inside the beam through-wall tube 2.

[0046] Specifically, in the initial state of the auxiliary vacuum device 1, each of the sleeves 12 retracts and nests. In the working state, each sleeve 12 is extended sequentially, and axial positioning is applied between adjacent sleeves 12, ensuring that each sleeve 12 is in its corresponding working position. By extending each sleeve 12 in stages and completing the connection and locking between adjacent sleeves 12, the total working length of the tubular assembly is increased in segments. During auxiliary vacuum operation, the heating element is activated to activate the getter and increase the vacuum level inside the beam-through-wall tube 2.

[0047] The auxiliary vacuum device 1 is installed inside the through-wall pipe. At the same time, the auxiliary vacuum device 1 extends and retracts forward to transport the getter to the working position to achieve the purpose of gas suction. There is no need to make a larger hole in the wall, thus ensuring the shielding effect of the shielding wall 5.

[0048] In some embodiments, please refer to Figure 1The auxiliary vacuum device 1 also includes a mounting flange 11, which is fixedly connected to one end of the tubular kit. The mounting flange 11 facilitates the detachable connection between the auxiliary vacuum device 1 and the beam through-wall tube 2.

[0049] In some embodiments, during operation, any two adjacent sleeves 12 have an overlapping portion, and the heating element is installed at the end of the inner sleeve of any two adjacent sleeves 12 that extends outward and is away from the corresponding outer sleeve.

[0050] In some embodiments, please refer to Figure 3 The heating component is a first induction coil 13, and the outer periphery of the corresponding beam through-wall tube 2 has a second induction coil 3, which is used to be electrically connected to an external AC power source; the first induction coil 13 and the second induction coil 3 are made of conductive materials; correspondingly, each of the sleeves 12 is made of thermally conductive materials.

[0051] In this embodiment, the getter activation process is as follows: an alternating current is passed through the second induction coil 3 to perform high-frequency induction heating on each of the first induction coils 13 in the auxiliary vacuum device 1, and each of the first induction heating coils conducts heat to each of the sleeves 12. When the auxiliary vacuum device 1 is heated to 500°C, the getter is activated and begins to work.

[0052] In some embodiments, the second induction coil 3 is wound around the outer periphery of the beam through-wall tube 2 or there is a gap between the second induction coil 3 and the outer periphery of the beam through-wall tube 2.

[0053] In some embodiments, the first induction coil 13 is made of stainless steel, more preferably 430 stainless steel.

[0054] In some embodiments, the second induction coil 3 is made of copper.

[0055] In some embodiments, the beam through-wall tube 2 and each of the sleeves 12 are made of thermally conductive material, preferably aluminum, more preferably 6061 aluminum.

[0056] In some embodiments, please refer to Figure 1 and Figure 2 In this configuration, the inner sleeve of any two adjacent sleeves 12 is slidably connected to the corresponding outer sleeve. During operation, each sleeve 12 extends sequentially, and any two adjacent sleeves 12 are axially confined to their working positions via a detachable interlocking structure. This detachable interlocking structure ensures that the relative positions of each sleeve 12 remain unchanged after extension, and also prevents radial displacement or retraction of each sleeve 12 during operation, thus avoiding process instability.

[0057] In some embodiments, the detachable interlocking structure adopts one of the following: threaded connection structure, snap-fit ​​structure, flange bolt connection structure, radial pin connection structure, and keyway locking connection structure.

[0058] In some embodiments, please refer to Figure 2 The inner wall of the outer sleeve of any two adjacent sleeves 12 is provided with a sliding groove 14, and the outer surface of the corresponding inner sleeve is fixed with a slider 15. The slider 15 and the sliding groove 14 cooperate with each other. When the inner sleeve extends relative to the outer sleeve, the slider 15 slides in the sliding groove 14. The detachable interlocking structure is a snap-fit ​​structure, including a snap-fit ​​groove 16. The snap-fit ​​groove 16 is provided at one end of the sliding groove 14. When the inner sleeve extends from the outer sleeve, the inner sleeve is rotated so that the slider 15 is snapped into the snap-fit ​​groove 16 to limit the relative position between the inner sleeve and the outer sleeve.

[0059] In some embodiments, the sleeves 12 are nested in order of decreasing or increasing diameter.

[0060] In some embodiments, preferably, please refer to Figure 1 The various sleeves 12 are nested in descending order of diameter. In implementation, the free end of the tubular assembly extends into the center of the beam penetration tube 2. A vacuum pump is also installed to achieve a vacuum state within the beam penetration tube 2 through the vacuum pump and the sleeves 12. Because the diameters of the sleeves 12 decrease, the cross-section of the tubular assembly is close to a conical cross-section or a trapezoidal cross-section with a narrower upper base. This allows for the efficient and preferential removal of the core high-speed airflow, facilitating gas flow across the entire pipe cross-section. It also reduces "dead zones" in the low-speed region and relatively reduces inefficient removal of low-speed gas from the pipe wall, thereby improving the pumping performance and efficiency of the vacuum pump and reducing evacuation time. Furthermore, the smaller diameter sleeves 12 extend deeper into the beam penetration tube 2, while the larger diameter sleeves 12 are closer to the outside of the beam penetration tube 2. Other external structures are fixedly connected to the larger diameter sleeves 12, making the entire structure more stable.

[0061] In some embodiments, in the initial state, the axes of each sleeve 12 coincide. In the working state, each sleeve 12 can extend along the axial direction and be locked in the working position, and the axis of each sleeve 12 coincides with that of the beam through-wall pipe 2. This makes it easier for each sleeve 12 to extend and retract, and its position in the working position is more centered, which is beneficial for installation and disassembly.

[0062] In some embodiments, the getter layer on the inner and / or outer wall surfaces of each of the sleeves is a non-evaporable getter film. Specifically, the non-evaporable getter film includes, for example, titanium films, zirconium films, molybdenum films, tungsten films, tantalum films, niobium films, and their alloys; the alloy getter film includes, for example, titanium-based alloys, zirconium-based alloys, and zirconium-cobalt-based alloys. Of course, the types of getters described in this embodiment are merely illustrative and do not list all applicable materials. Any layered structure made from other materials capable of achieving vacuum-induced getter function can also serve as a getter layer.

[0063] In some embodiments, the getter layer on the inner and / or outer wall surfaces of each of the sleeves is preferably a zirconium vanadium iron alloy getter film, which is uniformly sputtered onto the outer and / or inner walls of each of the sleeves by magnetron sputtering.

[0064] In some embodiments, please refer to Figure 4 The present invention also provides a beam through-wall transmission system 4, which utilizes the auxiliary vacuum device 1 described above, including,

[0065] A beam penetration tube 2 passes through the shielding wall 5; it also includes,

[0066] A first vacuum chamber 41 and a second vacuum chamber 42 are respectively disposed at both ends of the beam through-wall tube 2; the first vacuum chamber 41 or the second vacuum chamber 42 is used to connect to the accelerator beam outlet or the target system inlet;

[0067] The beam channels of the first vacuum chamber 41 and the second vacuum chamber 42 are respectively detachably and sealed to both ends of the beam penetration tube 2 through the auxiliary vacuum device 1; the tubular components corresponding to each of the auxiliary vacuum devices 1 extend into the beam penetration tube 2 from both ends of the beam penetration tube 2, and the free end of each of the tubular components extends to a position close to the center of the beam penetration tube 2.

[0068] The heating component is a first induction coil 13, and the outer periphery of the corresponding beam through-wall tube 2 has a second induction coil 3, which is used to be electrically connected to an external AC power source; the first induction coil 13 and the second induction coil 3 are made of conductive materials; correspondingly, each of the sleeves 12 is made of thermally conductive materials.

[0069] In this way, when alternating current is applied to the second induction coil 3, the first induction coil 13 heats up. This heat conduction through each sleeve 12 activates the getter on the wall of each sleeve 12, enabling gas intake. Simultaneously, the heated sleeves also heat the beam penetration tube 2, making it easier to reach the third preset vacuum level inside the beam penetration tube 2. In some embodiments, please refer to... Figure 4The second induction coil 3 is wound around the outer periphery of the beam penetration tube 2, and there is no gap between the second induction coil 3 and the outer periphery of the beam penetration tube 2, or...

[0070] The second induction coil 3 is embedded in the shielding wall 5 and surrounds the outer periphery of the beam through-wall tube 2, and there is a gap between the second induction coil 3 and the outer periphery of the beam through-wall tube 2.

[0071] In some embodiments, the area where the second induction coil 3 is located can cover each of the first induction coils 13, so that when the second induction coil 3 is energized, each of the first induction coils 13 can generate heat.

[0072] In some embodiments, please refer to Figures 4 to 6 The beam through-wall transmission system 4 further includes a first telescopic bellows 43 and a second telescopic bellows 44; specifically, Figure 5 The contracted state of the first telescopic bellows 43 is shown. Figure 6 The image shows the extended state of the second telescopic bellows 44; the two ends of the first telescopic bellows 43 are detachably connected to the beam channel of the first vacuum chamber 41 and the corresponding auxiliary vacuum device 1, respectively; the two ends of the second telescopic bellows 44 are detachably connected to the beam channel of the second vacuum chamber 42 and the corresponding auxiliary vacuum device 1, respectively; it also includes a first vacuum pump 45 and a second vacuum pump 46 that are sealed and connected to the evacuation channels of the first vacuum chamber 41 and the second vacuum chamber 42, respectively, for evacuating the first vacuum chamber 41 and the second vacuum chamber 42.

[0073] Regarding the aforementioned beam penetration transmission system 4, one embodiment is provided, wherein the shielding wall 5 has a thickness of 2.5m, and the beam penetration transmission system 4 includes...

[0074] A beam penetration tube 2 passes through a shielding wall 5;

[0075] It also includes a first vacuum chamber 41 and a second vacuum chamber 42 respectively disposed at both ends of the beam through-wall tube 2; the first vacuum chamber 41 or the second vacuum chamber 42 is used to connect to the accelerator beam outlet or the target system inlet;

[0076] The beam channels of the first vacuum chamber 41 and the second vacuum chamber 42 are detachably and sealed to both ends of the beam through-wall tube 2 through the auxiliary vacuum device 1; each auxiliary vacuum device 1 is 18cm long in the initial state.

[0077] Each of the auxiliary vacuum devices 1 has a corresponding tubular assembly that extends into the beam penetration tube 2 from both ends, and the free end of each tubular assembly extends to a position close to the center of the beam penetration tube 2.

[0078] The heating component is a first induction coil 13, and a second induction coil 3 is provided on the outer periphery of the corresponding beam through-wall tube 2. The area where the second induction coil 3 is set can cover each of the first induction coils 13, so that when the second induction coil 3 is energized, each of the first induction coils 13 can generate heat. The second induction coil 3 is used for electrical connection with an external AC power source. The first induction coil 13 is made of stainless steel, the second induction coil 3 is made of copper, and each of the sleeves 12 is made of aluminum.

[0079] It also includes a first telescopic bellows 43 and a second telescopic bellows 44, with a compression of 25 cm; the two ends of the first telescopic bellows 43 are detachably connected to the beam channel of the first vacuum chamber 41 and the corresponding auxiliary vacuum device 1, respectively; the two ends of the second telescopic bellows 44 are detachably connected to the beam channel of the second vacuum chamber 42 and the corresponding auxiliary vacuum device 1, respectively; it also includes a first vacuum pump 45 and a second vacuum pump 46, which are respectively sealed and connected to the evacuation channels of the first vacuum chamber 41 and the second vacuum chamber 42, for evacuating the first vacuum chamber 41 and the second vacuum chamber 42;

[0080] A first gate valve 49 is installed at the beam channel of the first vacuum chamber 41; a second gate valve 410 is installed at the suction port of the first vacuum pump 45.

[0081] It also includes a backing pump 411, which is connected to the first vacuum pump 45.

[0082] The components are installed sequentially. After installation, the vacuuming process includes: starting the pre-pump 411 and opening the first gate valve 49 and the second gate valve 410; then, when the vacuum level in the beam penetration tube 2 reaches the first preset vacuum level, i.e., the pre-pump pressure of the molecular pump starts at 1 Pa, starting the first vacuum pump 45 and the second vacuum pump 46; when the vacuum level in the beam penetration tube 2 reaches the second preset vacuum level, i.e., 1 e -4 The getter on the auxiliary vacuum device 1 can be activated when the vacuum level reaches the Pa level. When the vacuum level inside the beam through-wall tube 2 reaches the third preset vacuum level, i.e., 1e -5 When Pa, the working vacuum level of the beam channel is reached.

[0083] When the auxiliary vacuum device 1 needs to be replaced: First, the entire system needs to be devastated. Then, the first telescopic bellows 43 and the second telescopic bellows 44 are compressed by 25cm. Then, the sliders 15 of each sleeve 12 are moved from the slot 16 to the groove 14 in sequence, and each sleeve 12 is retracted. The auxiliary vacuum device 1 can then be removed from the beam through-wall tube 2. The auxiliary vacuum device 1 spare parts are then reinstalled, and the system can be restarted.

[0084] The vacuum breaking process before disassembling the auxiliary vacuum device 1 includes: first, shutting off the first vacuum pump 45 and the second vacuum pump 46, and after waiting for 30 minutes, shutting off the pre-pump 411. At this time, nitrogen gas can be introduced into the first vacuum chamber 41 and the second vacuum chamber 42 through the venting pipe. When the pressure in the first vacuum chamber 41 and the second vacuum chamber 42 is close to the atmospheric pressure, nitrogen gas introduction can be stopped, and all gate valves and other valves can be closed. At this time, the disassembly of the auxiliary vacuum device 1 can be carried out.

[0085] In some embodiments, the present invention also provides a beam through-wall transmission method, utilizing the beam through-wall transmission system 4 as described above, comprising the following steps:

[0086] S1. Wrap a second induction coil 3 around the outer periphery of the beam through-wall tube 2 or embed it in the corresponding shielding wall 5, and connect it to an external AC power source. Then fix the beam through-wall tube 2 at a preset position in the shielding wall 5.

[0087] S2. Install the first vacuum chamber 41 and the second vacuum chamber 42 respectively, and seal the first vacuum pump 45 and the second vacuum pump 46 to the first vacuum chamber 41 and the second vacuum chamber 42 respectively.

[0088] S3. Connect the first telescopic bellows 43 and the second telescopic bellows 44 to the beam channels of the first vacuum chamber 41 and the second vacuum chamber 42 respectively, and keep the first telescopic bellows 43 and the second telescopic bellows 44 in a contracted state; so as to ensure that the auxiliary vacuum device 1 has sufficient installation space and can flexibly adjust the installation space.

[0089] S4. Install the auxiliary vacuum device 1 in its initial state at one end of the first telescopic bellows 43 and the second telescopic bellows 44 facing the beam through-wall pipe 2, respectively.

[0090] S5. Extend each sleeve 12 in the auxiliary vacuum device 1 at both ends one by one, connect two adjacent sleeves 12 axially and lock them in the working position until all sleeves 12 are extended and locked in the working position. At this time, connect the auxiliary vacuum device 1 at both ends to the two ends of the beam through-wall tube 2.

[0091] S6. Turn on the first vacuum pump 45 and the second vacuum pump 46 to bring the beam through-wall tube 2 to a second preset vacuum level; the second preset vacuum level is on the order of 1e. -4 Pa;

[0092] S7. Apply alternating current to the second induction coil to heat up the first induction coil 13, thereby raising the temperature of each sleeve 12 to the getter activation temperature and activating the getter; each sleeve simultaneously bakes the beam through-wall tube to help improve the vacuum degree inside the beam through-wall tube.

[0093] S8. When the internal vacuum level of the beam penetrating tube 2 reaches the third preset vacuum level, the AC power to the second induction coil 3 is turned off, and the accelerator is started to deliver the particle beam to the target system. The third preset vacuum level is on the order of 1e. -5 Pa.

[0094] In some embodiments, in step S5, after all the sleeves 12 have extended and locked in the working position, it is also necessary to seal and connect the first telescopic bellows 43 and the second telescopic bellows 44 to the corresponding auxiliary vacuum device 1 and the two ends of the beam through-wall tube 2 respectively. During this process, if the distance between the first vacuum chamber 41 and the second vacuum chamber 42 and the two ends of the beam through-wall tube 2 is large, the first telescopic bellows 43 and the second telescopic bellows 44 are in an extended state.

[0095] In the description disclosed in this invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to has a specific orientation, or is constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the disclosure of this invention. Unless the context requires otherwise, throughout the specification and claims, the term "comprising" is interpreted as open and encompassing, that is, "including, but not limited to."

[0096] In the description of this specification, the terms "one embodiment," "some embodiments," "exemplary embodiment," "exemplary," or "some examples," etc., are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example disclosed in this invention. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples.

[0097] The terms "first" and "second" are used merely to distinguish different descriptive objects and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated; that is, they do not limit the position, order, priority, quantity, or content of the described objects. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments disclosed in this invention, unless otherwise stated, "a plurality of" means two or more. Furthermore, the terms "horizontal," "vertical," etc., do not mean that the component must be absolutely horizontal or suspended, but rather allow for a certain angle of inclination. For example, "horizontal" only indicates that its direction is closer to a horizontal state than "vertical," not that the structure must be perfectly horizontal.

[0098] "At least one of A, B, and C" has the same meaning as "at least one of A, B, or C," both including the following combinations of A, B, and C: only A, only B, only C, a combination of A and B, a combination of A and C, a combination of B and C, and a combination of A, B, and C. In the description of the embodiments of this application, unless otherwise stated, " / " means "or," for example, A / B can mean A or B; "A and / or B" includes the following three combinations: only A, only B, and a combination of A and B.

[0099] Exemplary embodiments are described herein with reference to sectional views and / or plan views, which are provided as idealized exemplary drawings. In the description of this invention, it should also be noted that, unless otherwise expressly specified and limited, the terms "set," "install," "connect," "link," etc., should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also be a connection within two components. Those skilled in the art will understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0100] In the accompanying drawings, the thickness of layers and regions has been enlarged for clarity. Therefore, variations in shape relative to the drawings are contemplated due to factors such as manufacturing techniques and / or tolerances. Consequently, exemplary embodiments should not be construed as limited to the shapes of the regions shown herein, but rather include shape deviations caused, for example, by manufacturing processes. For instance, etched areas shown as rectangular would typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to show the actual shapes of areas of the device, nor are they intended to limit the scope of the exemplary embodiments.

[0101] The above description is merely a specific embodiment of the present invention, but the scope of protection disclosed in the present invention is not limited thereto. Any variations or substitutions conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection disclosed in the present invention. Therefore, the scope of protection disclosed in the present invention should be determined by the scope of the claims.

Claims

1. An auxiliary vacuum device for beam through-wall transmission, used in accelerator beam through-wall transmission, for detachable and sealed installation in a beam through-wall tube, characterized in that, The device includes a tubular assembly comprising multiple nested sleeves; each sleeve has a getter layer on its inner and / or outer wall surfaces; each sleeve is provided with a heating element for heating the getter layer; in the working state, each sleeve extends out sequentially and any two adjacent sleeves are axially connected and locked in the working position, which is located inside the beam through-wall tube.

2. The auxiliary vacuum device for beam through-wall transmission according to claim 1, characterized in that, In the working state, any two adjacent sleeves have an overlapping portion, and the heating element is installed at the end of the inner sleeve that extends out of any two adjacent sleeves and is away from the corresponding outer sleeve.

3. The auxiliary vacuum device for beam through-wall transmission according to claim 1, characterized in that, The heating component is a first induction coil, and the outer periphery of the corresponding beam through-wall tube has a second induction coil, which is used to be electrically connected to an external AC power source; the first and second induction coils are made of conductive materials; correspondingly, each of the sleeves is made of thermally conductive materials.

4. The auxiliary vacuum device for beam through-wall transmission according to claim 1, characterized in that, The inner sleeve of any two adjacent sleeves is slidably connected to the corresponding outer sleeve; in the working state, each sleeve extends out in sequence and any two adjacent sleeves are axially limited to the working position by a detachable interlocking structure.

5. The auxiliary vacuum device for beam through-wall transmission according to claim 4, characterized in that, The inner wall of the outer sleeve in any two adjacent sleeves is provided with a sliding groove, and a slider is fixed on the outer surface of the corresponding inner sleeve. The slider and the sliding groove cooperate with each other. When the inner sleeve extends relative to the outer sleeve, the slider slides in the sliding groove. The detachable interlocking structure is a snap-fit ​​structure, including a snap-fit ​​groove. The snap-fit ​​groove is provided at one end of the sliding groove. When the inner sleeve extends from the outer sleeve, the inner sleeve is rotated so that the slider is snapped into the snap-fit ​​groove to limit the relative position between the inner and outer sleeves.

6. The auxiliary vacuum device for beam through-wall transmission according to claim 1, characterized in that, The various sleeves are nested in order of decreasing or increasing diameter.

7. The auxiliary vacuum device for beam through-wall transmission according to claim 1, characterized in that, In the initial state, the axes of each sleeve coincide. In the working state, each sleeve can extend along the axial direction and be locked in the working position, and the axis of each sleeve coincides with that of the beam through-wall tube.

8. A beam-through-wall transmission system, characterized by utilizing the auxiliary vacuum device as described in claim 1, wherein... Includes a beam penetration tube that passes through a shielding wall; It also includes a first vacuum chamber and a second vacuum chamber respectively disposed at both ends of the beam through-wall tube; the first vacuum chamber or the second vacuum chamber is used to connect to the accelerator beam outlet or the target system inlet; The beam channels of the first vacuum chamber and the second vacuum chamber are detachably and sealed to both ends of the beam penetration tube through the auxiliary vacuum device; the tubular components corresponding to each of the auxiliary vacuum devices extend into the beam penetration tube from both ends, and the free ends of each of the tubular components extend to a position close to the center of the beam penetration tube. The heating component is a first induction coil, and the outer periphery of the corresponding beam through-wall tube has a second induction coil, which is used to be electrically connected to an external AC power source; the first and second induction coils are made of conductive materials; correspondingly, each of the sleeves is made of thermally conductive materials.

9. The beam through-wall transmission system according to claim 8, characterized in that, It also includes a first telescopic bellows and a second telescopic bellows; the two ends of the first telescopic bellows are detachably connected to the beam channel of the first vacuum chamber and the corresponding auxiliary vacuum device, respectively; the two ends of the second telescopic bellows are detachably connected to the beam channel of the second vacuum chamber and the corresponding auxiliary vacuum device, respectively. It also includes a first vacuum pump and a second vacuum pump that are respectively sealed and connected to the evacuation channels of the first vacuum chamber and the second vacuum chamber, for evacuating the first vacuum chamber and the second vacuum chamber. It also includes a backing pump, which is connected to the first vacuum pump.

10. A method for beam transmission through a wall, utilizing the beam transmission through a wall system as described in claim 9, characterized in that, Includes the following steps: S1. Wrap a second induction coil around the outer circumference of the beam through-wall tube or embed it in the corresponding shielding wall, and connect it to an external AC power source. Then fix the beam through-wall tube at a preset position in the shielding wall. S2. Install the first vacuum chamber and the second vacuum chamber respectively, and seal the first vacuum pump and the second vacuum pump to the first vacuum chamber and the second vacuum chamber respectively; S3. Connect the first telescopic bellows and the second telescopic bellows to the beam channels of the first vacuum chamber and the second vacuum chamber respectively, and keep the first telescopic bellows and the second telescopic bellows in a contracted state. S4. Install the auxiliary vacuum device in its initial state at one end of the first telescopic bellows and the second telescopic bellows facing the beam through-wall pipe, respectively. S5. Extend each sleeve in the auxiliary vacuum device at both ends one by one and connect two adjacent sleeves axially and lock them in the working position until all sleeves are extended and locked in the working position. At this time, connect the auxiliary vacuum device at both ends to the two ends of the beam through-wall tube. S6. First, turn on the pre-pump to make the beam through-wall tube reach the first preset vacuum level, then turn on the first vacuum pump and the second vacuum pump to make the beam through-wall tube reach the second preset vacuum level. S7. Apply alternating current to the second induction coil to heat up the first induction coil, thereby raising the temperature of each sleeve to the getter activation temperature and activating the getter; each sleeve simultaneously bakes the beam through-wall tube to help improve the vacuum level inside the beam through-wall tube. S8. When the beam penetration tube reaches the third preset vacuum level, turn off the AC power of the second induction coil and start the accelerator to deliver the particle beam to the target system.

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