Heating and washing tail gas treater

Abstract

The invention discloses a heating and washing tail gas treatment device, and relates to the technical field of tail gas treatment. The device comprises a flowing-through mixer, an air inlet pipe is fixedly installed at the top of the flowing-through mixer, a plurality of nitrogen input pipes and air input pipes which are evenly distributed are fixedly installed on the peripheral side of the flowing-through mixer, a heating cavity is fixedly installed at the bottom of the flowing-through mixer, and the bottom end of the air inlet pipe extends into the heating cavity; and a gas-liquid circulating pipe which is horizontally arranged is fixedly mounted at the bottom of the heating cavity. By arranging the drooping pipe, input CDA can be sprayed out through the drooping pipe and all the annular gas outlet pipes to be mixed with gas needing to be treated, a gas outlet of the CDA is far away from a gas outlet of the gas needing to be treated, and the main mixing area of the CDA and the gas needing to be treated is kept away from the gas outlet of the gas needing to be treated in the mode that the CDA and the gas needing to be treated are isolated firstly and then mixed; and powder is further prevented from accumulating around the air inlet pipe, powder blockage is effectively reduced, and the device is suitable for long-time high-load operation.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of tail gas treatment, in particular to a heated water washing tail gas treatment device. BACKGROUND

[0002] In semiconductor production, harmful tail gas is generated, which will pollute the atmosphere if directly discharged, so the tail gas needs to be treated to inhibit the waste gas from destroying the environment and harming others. The common semiconductor production tail gas treatment methods currently include dry adsorption and heated water washing. Compared with the former (frequent replacement of adsorbent), the water washing system has a longer maintenance cycle. The core value of the heated water washing tail gas treatment device in the semiconductor industry is that it can efficiently decompose difficult-to-treat gases and perform water washing purification, and has the advantages of high treatment efficiency and low maintenance cost.

[0003] The existing semiconductor tail gas treatment water washing system usually uniformly mixes the gases to be treated with CDA and nitrogen after inputting the gases from the gas inlet into the mixer, and then inputs the gases into the heating cavity for oxidation and reduction to convert the gases into chemically stable gases, dust or water-soluble gases that need secondary treatment. Direct mixing in the mixer in advance will cause the gas inlet mixer to be blocked, and the subsequent single spray structure for cooling water washing will cause the purified exhaust gas after treatment to have insufficient purification effect, which needs to be repeatedly washed multiple times. Therefore, a heated water washing tail gas treatment device is proposed. SUMMARY

[0004] The present application aims to solve the problem that the existing semiconductor tail gas treatment water washing system mixes the gases in advance in the mixer, which causes the gas inlet mixer to be blocked, and the single spray structure for cooling water washing causes the purified exhaust gas after treatment to have insufficient purification effect, which needs to be repeatedly washed multiple times. The present application provides a heated water washing tail gas treatment device.

[0005] The present application specifically adopts the following technical solutions to achieve the above-mentioned purposes: The utility model provides a kind of heated water washing tail gas treater, including flow through mixer, the top of the flow through mixer is fixedly installed with air inlet pipe, the peripheral side of the flow through mixer is fixedly installed with multiple evenly distributed nitrogen input pipe and air input pipe, the bottom of the flow through mixer is fixedly installed with heating cavity, the bottom end of the air inlet pipe extends to the inside of the heating cavity, the bottom of the heating cavity is fixedly installed with horizontally arranged gas-liquid circulation pipe, one end of the gas-liquid circulation pipe is fixedly installed with vertically arranged spray tower, the top end of the spray tower is fixedly installed with exhaust pipe, the inside of one end of the gas-liquid circulation pipe close to the spray tower is provided with first cooling cavity, the inside of the spray tower is sequentially provided with second cooling cavity and third cooling cavity from bottom to top, the bottom of the gas-liquid circulation pipe is provided with circulating water tank, the top of the circulating water tank is fixedly installed with backflow pipe, the backflow pipe is fixedly installed in the bottom of the gas-liquid circulation pipe, one side of the circulating water tank is provided with circulating pump, the water inlet end of the circulating pump is fixedly installed with three-way control valve, one end of the three-way control valve is communicated with the inside of the circulating water tank, the water outlet end of the circulating pump is fixedly installed with water delivery pipe, one side of the water delivery pipe is fixedly installed with three shunt pipes from bottom to top, one end of three shunt pipes respectively extends to the inside of the first cooling cavity, the second cooling cavity and the third cooling cavity and is fixedly installed with spray tray.

[0006] Further, one end of the air input pipe inside the flow through mixer is fixedly installed with a hanging pipe, the bottom end of multiple hanging pipes is fixedly installed with the same ring flow pipe, the inner ring side wall of the ring flow pipe is fixedly installed with multiple evenly distributed air injection pipes, and the air injection pipes are all towards the bottom end of the air inlet pipe.

[0007] Further, one end of the air input pipe inside the flow through mixer is fixedly installed with a vertically arranged drooping pipe, and the bottom end of the drooping pipe extends to the inside of the heating cavity and is fixedly installed with multiple evenly distributed annular air outlet pipes from top to bottom.

[0008] Further, the bottom of the first cooling cavity, the second cooling cavity and the third cooling cavity is fixedly installed with a one-way air valve and a recovered water valve, the bottom end of the one-way air valve is fixedly installed with a gas collection disc, and the bottom end of the recovered water valve is fixedly installed with a recovery pipe.

[0009] Further, the inside of the first cooling cavity, the second cooling cavity and the third cooling cavity is fixedly installed with a vortex box, the bottom of the vortex box is provided with an air inlet communicated with the top end of the one-way air valve, the inside of the vortex box is provided with a spiral flow channel and a gas guide channel communicated with the air inlet, the bottom inner wall of the gas guide channel is provided with a leakage port communicated with the recovered water valve, the top of the vortex box is fixedly installed with a receiving disc communicated with the gas guide channel, and the receiving disc is located directly below the spray tray.

[0010] Further, the bottom inner wall of the circulating water tank is fixedly installed with a supporting frame, the top of the supporting frame is fixedly installed with an inner tank, one side of the circulating water tank is fixedly installed with two drainage control valves, one end of the three-way control valve and the two drainage control valves extends to the inside of the inner tank, the inside of the inner tank is fixedly installed with a vertically arranged retaining frame, the inside of the retaining frame is fixedly installed with a liquid level sensor, one side of the circulating water tank is provided with two drainage pumps, the water inlet ends of the two drainage pumps are communicated with the two drainage control valves respectively, the water outlet ends of the two drainage pumps are fixedly installed with the same drainage pipe, one side of the circulating water tank is provided with an emergency water tank, one end of the drainage pipe is communicated with the inside of the emergency water tank.

[0011] Further, the top of one side of the circulating water tank is fixedly installed with an overflow pipe, the two ends of the overflow pipe are communicated with the inside of the inner tank and the emergency water tank respectively, the other end of the three-way control valve is fixedly installed with a water suction pipe, one end of the water suction pipe is communicated with the inside of the emergency water tank.

[0012] Further, a separation cavity is arranged between the circulating water tank and the inner tank, a liquid leakage detection belt is fixedly installed on the bottom inner wall of the separation cavity, and an overflow port communicated with the separation cavity is formed in the top inner wall of the inner tank.

[0013] The beneficial effects of the present application are as follows: 1、The present application sets the circulating pipe, so that the nitrogen gas input through the nitrogen gas input pipe is rectified in the circulating pipe through each suspension pipe, and then is sprayed obliquely upward to the bottom end of the heating cavity through each air injection pipe. The nitrogen gas is used to flush the air outlet of the air inlet pipe and its periphery while the nitrogen gas is input, so as to prevent the powder in the gas to be treated from accumulating around the air inlet pipe. 2、The present application sets the drooping pipe, so that the input CDA is sprayed through the drooping pipe and each annular air outlet pipe, and is mixed with the gas to be treated. The air outlet of the CDA is far away from the air outlet of the gas to be treated. By the way of isolating the CDA and the gas to be treated first and then mixing, the main mixing area of the two is avoided from the air outlet of the gas to be treated, so as to further prevent the powder from accumulating around the air inlet pipe, effectively reduce the powder blockage, and be suitable for long time high load operation. 3、The present application sets the one-way air valve and the recovery water valve, so that the cooling cavity type water spraying system can not only directly spray and wash the gas, but also can close the recovery water valve, so that the cooling water sprayed by the spraying disc is accumulated in the inside of each cooling cavity. The gas directly flows into the cooling water through the one-way air valve, and is washed by water bath, so as to realize the double washing of water bath first and then spraying, and improve the washing effect. 4. By setting up a vortex box, the present invention allows the cooling water sprayed in the cooling chamber to be received by the receiving plate at the bottom of the spray plate and flow into the volute flow channel and the guide flow channel. The volute flow channel and the guide flow channel greatly increase the flow path of the gas inside the cooling chamber, so that after the gas enters the air inlet through the gas collection plate and the one-way gas valve, it fully contacts the cooling water in the volute flow channel and the guide flow channel, further improving the gas washing effect. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the three-dimensional structure of the mixer through which the present invention flows; Figure 3 This is the present invention. Figure 2 Schematic diagram of the structure at point A in the middle; Figure 4 This is a schematic diagram of the internal three-dimensional structure of the third cooling chamber of the present invention; Figure 5 This is a schematic diagram of the internal three-dimensional structure of the vortex box of the present invention; Figure 6 This is a first-view three-dimensional structural diagram of the combination of the circulating water tank and the emergency water tank of the present invention; Figure 7 This is a second-view three-dimensional structural diagram of the combination of the circulating water tank and the emergency water tank of the present invention; Figure 8 This is a schematic diagram of the internal three-dimensional structure of the circulating water tank of the present invention; Reference numerals: 1. Flowing through mixer; 2. Inlet pipe; 3. Nitrogen input pipe; 4. Air input pipe; 5. Heating chamber; 6. Gas-liquid circulation pipe; 7. Spray tower; 8. Exhaust pipe; 9. First cooling chamber; 10. Second cooling chamber; 11. Third cooling chamber; 12. Circulating water tank; 13. Return pipe; 14. Circulating pump; 15. Three-way control valve; 16. Water supply pipe; 17. Diverter pipe; 18. Spray plate; 19. Suspension pipe; 20. Circulation pipe; 21. Jet pipe; 22. Drooping pipe; 23. Annular outlet pipe; 24. 25. One-way air valve; 26. Air collection plate; 27. Water recovery valve; 28. Recovery pipe; 29. ​​Vortex box; 2001. Air inlet; 21. Spiral flow channel; 22. Air guide channel; 23. Drain outlet; 24. Receiver plate; 35. Inner box; 36. Overflow outlet; 37. Support bracket; 38. Retainer; 39. Liquid level sensor; 40. Drain pump; 41. Drain control valve; 32. Drain pipe; 43. Emergency water tank; 44. Overflow pipe; 55. Pumping pipe; 66. Chamber; 77. Leakage detection strip. Detailed Implementation

[0015] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0017] It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", and the like are only used to distinguish description, and cannot be understood as indicating or implying relative importance.

[0018] In the description of the embodiments of the present application, it should be noted that the positions or location relationships indicated by the terms "inner", "outer", "upper", and the like are based on the positions or location relationships shown in the drawings, or the positions or location relationships in which the products of the present application are usually placed, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated devices or elements must have a particular position, be constructed and operated in a particular position, and therefore cannot be understood as limiting the present application.

[0019] As shown in Figures 1 to 8 , a heated water washing tail gas treater includes a mixed device 1, an air inlet pipe 2 fixedly installed on the top of the mixed device 1, a plurality of nitrogen inlet pipes 3 and air inlet pipes 4 fixedly installed on the circumferential side of the mixed device 1, and a heating cavity 5 fixedly installed on the bottom of the mixed device 1, wherein the bottom end of the air inlet pipe 2 extends into the interior of the heating cavity 5, and the air inlet pipes 4 are fixedly installed with a plurality of hanging pipes 19 at one end in the interior of the mixed device 1. Figure 1 , Figure 2 , Figure 3 ,

[0020] More specifically, when the heated water washing tail gas treater is in use, the gas to be treated enters from the gas inlet pipe 2, flows through the mixer 1, nitrogen is introduced into each nitrogen inlet pipe 3, CDA compressed dry air is introduced into the air inlet pipe 4, and the gas to be treated and CDA and nitrogen enter the heating cavity 5 at the same time. The nitrogen introduced through the nitrogen inlet pipe 3 is rectified in the circulation pipe 20, and then sprayed obliquely upward through the jet pipes 21 to the bottom end of the heating cavity 5. At the same time, the nitrogen is used to flush the gas outlet of the gas inlet pipe 2 and its surroundings, preventing the powder in the gas to be treated from accumulating around the gas inlet pipe 2.

[0021] As shown in Figure 2 , specifically, the air inlet pipe 4 is fixedly installed with a vertically arranged drooping pipe 22 at one end inside the mixer 1, and the bottom end of the drooping pipe 22 extends into the heating cavity 5 and is fixedly installed with a plurality of uniformly distributed annular gas outlet pipes 23 from top to bottom.

[0022] More specifically, by arranging the drooping pipe 22, the CDA introduced through the air inlet pipe 4 is introduced to the bottom end through the drooping pipe 22 and sprayed through the annular gas outlet pipes 23 to mix with the gas to be treated. The gas outlet of the CDA in the heating cavity 5 is away from the gas outlet of the gas to be treated. By isolating the CDA and the gas to be treated first and then mixing them, the main mixing area of the two is away from the gas outlet of the gas to be treated, further preventing the powder from accumulating around the gas inlet pipe 2 and effectively reducing the powder blockage, suitable for long-term high-load operation.

[0023] As shown in Figure 1 , specifically, the bottom of the heating cavity 5 is fixedly installed with a horizontally arranged gas-liquid circulation pipe 6, one end of the gas-liquid circulation pipe 6 is fixedly installed with a vertically arranged spray tower 7, the top end of the spray tower 7 is fixedly installed with an exhaust pipe 8, the inside of the end of the gas-liquid circulation pipe 6 close to the spray tower 7 is provided with a first cooling cavity 9, the inside of the spray tower 7 is sequentially provided with a second cooling cavity 10 and a third cooling cavity 11 from bottom to top, the bottom of the gas-liquid circulation pipe 6 is provided with a circulating water tank 12, the top of the circulating water tank 12 is fixedly installed with a return pipe 13, the return pipe 13 is fixedly installed at the bottom of the gas-liquid circulation pipe 6, as shown in Figure 6 , Figure 7 , one side of the circulating water tank 12 is provided with a circulating pump 14, the water inlet end of the circulating pump 14 is fixedly installed with a three-way control valve 15, one end of the three-way control valve 15 is in communication with the inside of the circulating water tank 12, the water outlet end of the circulating pump 14 is fixedly installed with a water delivery pipe 16, one side of the water delivery pipe 16 is fixedly installed with three shunt pipes 17 from bottom to top, as shown in Figure 4 , one end of each of the three shunt pipes 17 extends into the first cooling cavity 9, the second cooling cavity 10 and the third cooling cavity 11 and is fixedly installed with a spray disc 18.

[0024] In the embodiment, the number, position and type of the gas inlet pipes 2 can be customized. The gas inlet pipes 2 are internally provided with pressure detectors. The nitrogen inlet pipe 3 and the air inlet pipe 4 are internally provided with pressure regulating valves, pressure switches, electromagnetic valves, flow meters and hand valves. The heating cavity 5 is internally provided with temperature sensors. The gas outlet pipe 8 is internally provided with pressure detectors and temperature sensors. Each water spraying system is provided with electromagnetic valves, flow switches, flow meters and hand valves. The circulating water tank 12 is externally connected to a cooling water source and a filtering system through a filtering pipe network to recycle powders and water-soluble gas solutions.

[0025] More specifically, the mixed gas is heated at high temperature in the heating cavity 5 to cause a violent oxidation-reduction reaction, converting the insoluble or difficult-to-handle gases such as silane and phosphine into chemically stable gases, powders or water-soluble gases such as silicon dioxide and phosphoric acid that need secondary treatment. The treated harmless high-temperature gas or water-soluble gas is input into the spraying tower 7 through the gas-liquid circulating pipe 6. At this time, the circulating pump 14 extracts the cooling water in the circulating water tank 12 and synchronously inputs the cooling water into the first cooling cavity 9, the second cooling cavity 10 and the third cooling cavity 11 through the water supply pipe 16 and the shunt pipe 17, and then sprays the cooling water through the spraying disc 18. The gas is cooled and treated by the water spraying system of the cooling cavity, and then discharged to the central treatment system through the gas outlet pipe 8. The dust generated by the treatment of part of the gas flows into the gas-liquid circulating pipe 6 after being sprayed by water, and then flows back to the circulating water tank 12 through the backflow pipe 13, completing the treatment of the gas and the backflow circulation of the cooling water.

[0026] As shown in Figure 4 More specifically, the bottom of each of the first cooling cavity 9, the second cooling cavity 10 and the third cooling cavity 11 is fixedly provided with a one-way air valve 24 and a recycled water valve 26. The bottom end of the one-way air valve 24 is fixedly provided with a gas collecting disc 25. The bottom end of the recycled water valve 26 is fixedly provided with a recycled pipe 27.

[0027] More specifically, by providing the one-way air valve 24 and the recycled water valve 26, in addition to directly spraying and washing the gas, the recycled water valve 26 can be closed, so that the cooling water sprayed by the spraying disc 18 accumulates in the cooling cavities, and the gas directly flows into the cooling water through the one-way air valve 24 to perform water bath gas washing, realizing double gas washing of water bath and spraying in sequence and improving the gas washing effect.

[0028] As shown in Figure 4 , Figure 5As shown, specifically, the inside of the first cooling cavity 9, the second cooling cavity 10 and the third cooling cavity 11 are fixedly installed with a vortex box 28, the bottom of the vortex box 28 is provided with an air inlet 2801 which is communicated with the top end of the one-way air valve 24, the inside of the vortex box 28 is provided with a spiral flow channel 2802 and a gas guide channel 2803 which are communicated with the air inlet 2801, the bottom inner wall of the gas guide channel 2803 is provided with a flow outlet 2804 which is communicated with the recovery water valve 26, the top of the vortex box 28 is fixedly installed with a receiving disc 29 which is communicated with the gas guide channel 2803, and the receiving disc 29 is located directly below the spraying disc 18.

[0029] More specifically, by setting the vortex box 28, when the sprayed cooling water accumulates in the cooling cavity, it will be received by the receiving disc 29 at the bottom of the spraying disc 18 and flow into the spiral flow channel 2802 and the gas guide channel 2803, which greatly increases the flow path of the gas inside the cooling cavity, so that the gas is fully contacted with the cooling water in the spiral flow channel 2802 and the gas guide channel 2803 after being input into the air inlet 2801 through the gas receiving disc 25 and the one-way air valve 24, further improving the gas washing effect.

[0030] As shown in Figure 7 , Figure 8 Specifically, the bottom inner wall of the circulating water tank 12 is fixedly installed with a supporting frame 31, the top of the supporting frame 31 is fixedly installed with an inner tank 30, one side of the circulating water tank 12 is fixedly installed with two drainage control valves 35, the three-way control valve 15 and one end of the two drainage control valves 35 all extend into the inside of the inner tank 30, the inside of the inner tank 30 is fixedly installed with a vertically arranged retaining frame 32, the inside of the retaining frame 32 is fixedly installed with a liquid level sensor 33, one side of the circulating water tank 12 is provided with two drainage pumps 34, the water inlet ends of the two drainage pumps 34 are respectively communicated with the two drainage control valves 35, the water outlet ends of the two drainage pumps 34 are fixedly installed with the same drainage pipe 36, one side of the circulating water tank 12 is provided with an emergency water tank 37, and one end of the drainage pipe 36 is communicated with the inside of the emergency water tank 37.

[0031] In this embodiment, the water outlet ends of the drainage pumps 34 are all provided with PVC check valves.

[0032] More specifically, by setting the drainage pump 34, the cooling water is stored in the inner tank 30, and the liquid level is monitored in real time by the liquid level sensor 33. The storage of cooling water is divided into three safety water levels of low, high and highest. The water level sensing of the liquid level sensor 33 controls the discharge and input of cooling water in the inner tank 30. When the water storage exceeds the safety water level, the drainage pump 34 extracts excess cooling water through the drainage control valve 35 and inputs it into the emergency water tank 37 through the drain pipe 36 for temporary storage, thereby reducing the storage pressure in the inner tank 30. Two drainage pumps 34 are used in standby, effectively preventing the inner tank 30 from overflowing due to excessive water level, and ensuring that the water pressure is within a safe threshold.

[0033] As shown in Figure 7 , specifically, the overflow pipe 38 is fixedly installed on one side of the top of the circulating water tank 12, and the two ends of the overflow pipe 38 are respectively connected with the interiors of the inner tank 30 and the emergency water tank 37. The other end of the three-way control valve 15 is fixedly installed with a water suction pipe 39, and one end of the water suction pipe 39 is connected with the interior of the emergency water tank 37.

[0034] More specifically, by setting the overflow pipe 38, when the two drainage pumps 34 cannot quickly and effectively reduce the water storage in the inner tank 30 below the safety water level, the excess cooling water will directly overflow into the emergency water tank 37 through the overflow pipe 38, realizing emergency discharge. The circulating pump 14 can be directly connected with the interior of the emergency water tank 37 through the switching of the three-way control valve 15, so as to suck out the cooling water in the emergency water tank 37 and put it into the circulating system.

[0035] As shown in Figure 8 , specifically, a partition cavity 40 is arranged between the circulating water tank 12 and the inner tank 30. A liquid leakage detection belt 41 is fixedly installed on the inner wall of the bottom of the partition cavity 40. An overflow port 3001 is formed in the top inner wall of the inner tank 30 and is connected with the partition cavity 40.

[0036] In this embodiment, the overflow port 3001 is higher than the overflow pipe 38 and is located at the top of the inner tank 30.

[0037] More specifically, by setting the overflow port 3001, the liquid leakage detection belt 41 located at the bottom of the partition cavity 40 can timely detect whether there is an internal leakage in the partition cavity 40, and monitor the leakage of the inner tank 30 in real time. When the circulating system fails, the two drainage pumps 34 and the overflow pipe 38 cannot completely discharge the abnormally increased cooling water in the inner tank 30. The cooling water overflows from the overflow port 3001 into the partition cavity 40, and is then detected by the liquid leakage detection belt 41. The heating water washing tail gas processor is immediately shut down for inspection to avoid production accidents.

[0038] In summary: the heating water washing tail gas treater in use, the gas to be treated from the inlet pipe 2 into the mixer 1, the nitrogen gas input pipe 3 inside each input nitrogen, air input pipe 4 into CDA compressed dry air, the gas to be treated and CDA and nitrogen gas into the heating cavity 5 at the same time, by setting the circulation pipe 20, so that the nitrogen gas input through the nitrogen gas input pipe 3, will be input into the circulation pipe 20 through each suspension pipe 19 for rectification, and then through each jet pipe 21 oblique upward to the bottom of the heating cavity 5, while inputting nitrogen gas, using nitrogen gas to flush the gas outlet of inlet pipe 2 and its periphery, to prevent the powder in the gas to be treated from accumulating around the inlet pipe 2, by setting the drooping pipe 22, so that the CDA input by the air input pipe 4 will be input to the bottom through the drooping pipe 22, and sprayed through each annular gas outlet pipe 23 to mix with the gas to be treated, the gas outlet of CDA in the heating cavity 5 is away from the gas outlet of the gas to be treated, by isolating CDA and the gas to be treated first, then mixing, the main mixing area of the two avoids the gas outlet of the gas to be treated, further preventing the powder from accumulating around the inlet pipe 2, effectively reducing the powder blockage, suitable for long time high load operation, by setting the heating cavity 5 and the spray tower 7, so that the mixed gas is heated in the heating cavity 5, and the difficultly soluble or difficultly treated gas such as silane, phosphine, etc. is converted into chemically stable gas, dust or water soluble gas such as silicon dioxide, phosphoric acid, etc. which needs secondary treatment, the harmless high temperature gas or water soluble gas after treatment is input into the spray tower 7 through the gas-liquid circulation pipe 6, at this time the circulating pump 14 extracts the cooling water in the circulating water tank 12, and inputs the cooling water into the first cooling cavity 9, the second cooling cavity 10 and the third cooling cavity 11 through the water inlet pipe 16 and the shunt pipe 17 at the same time, and then sprays through the spray disc 18, the gas is cooled and treated by the cooling cavity type water spraying system, and then discharged to the central processing system through the exhaust pipe 8, part of the gas after treatment produces dust which flows into the gas-liquid circulation pipe 6 after water spraying, and then returns to the circulating water tank 12 through the return pipe 13, completing the treatment of the gas and the return circulation of the cooling water, by setting the one-way air valve 24 and the recovery water valve 26, the cooling cavity type water spraying system can not only directly spray the gas, but also can close the recovery water valve 26, so that the cooling water sprayed by the spray disc 18 accumulates in each cooling cavity, the gas directly flows into the cooling water through the one-way air valve 24, and the water bath gas washing is realized, realizing the double gas washing of water bath first and then spraying, improving the gas washing effect, by setting the vortex box 28, the sprayed cooling water is received by the receiving disc 29 at the bottom of the spray disc 18 when it accumulates in the cooling cavity, and then flows into the spiral flow channel 2802 and the guide flow channel 2803, the spiral flow channel 2802 and the guide flow channel 2803 greatly increase the flow path of the gas in the cooling cavity, so that the gas contacts with the cooling water in the spiral flow channel 2802 and the guide flow channel 2803 after being input into the inlet 2801 through the gas receiving disc 25 and the one-way air valve 24, further improving the gas washing effect, by setting the drainage pump 34,The cooling water is stored in the inner tank 30, and the liquid level is monitored in real time by the liquid level sensor 33. The storage of cooling water is divided into three safety water levels, i.e. low level, high level and highest level. The discharge and input of cooling water in the inner tank 30 are controlled by the water level sensing of the liquid level sensor 33. When the storage of cooling water exceeds the safety water level, the excess cooling water is extracted by the drainage pump 34 through the drainage control valve 35 and is input into the emergency water tank 37 through the drainage pipe 36 for temporary storage, so as to reduce the storage pressure in the inner tank 30. The two drainage pumps 34 are used alternately, which effectively prevents the water level in the inner tank 30 from being too high to overflow, and ensures that the water pressure is within the safety threshold. By setting the overflow pipe 38, when the two drainage pumps 34 still cannot quickly and effectively reduce the storage of cooling water in the inner tank 30 to below the safety water level, the excess cooling water will directly overflow into the emergency water tank 37 through the overflow pipe 38, realizing emergency discharge. The circulating pump 14 can be directly connected with the emergency water tank 37 through the switching of the three-way control valve 15, so as to extract the cooling water in the emergency water tank 37 and put it into the circulating system. By setting the overflow port 3001, the liquid leakage detection belt 41 located at the bottom of the partition cavity 40 can timely detect whether there is an internal leakage in the partition cavity 40, so as to monitor the leakage of the inner tank 30 in real time. When the circulating system fails, the two drainage pumps 34 and the overflow pipe 38 cannot completely discharge the abnormally increased cooling water in the inner tank 30. The cooling water overflows from the overflow port 3001 into the partition cavity 40, and is then detected by the liquid leakage detection belt 41. The heating water washing tail gas processor is immediately stopped for inspection to avoid the occurrence of production accidents.

[0039] The basic principles, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only the principles of the present application. Various changes and improvements can be made to the present application without departing from the spirit and scope of the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection required by the present application is defined by the appended claims and their equivalents.

Claims

1. A heated water-washing exhaust gas processor, characterized in that, The system includes a flow-through mixer (1), with an inlet pipe (2) fixedly installed at the top of the flow-through mixer (1), and multiple uniformly distributed nitrogen input pipes (3) and air input pipes (4) fixedly installed around the flow-through mixer (1). A heating chamber (5) is fixedly installed at the bottom of the flow-through mixer (1), with the bottom end of the inlet pipe (2) extending into the interior of the heating chamber (5). A horizontally arranged gas-liquid circulation pipe (6) is fixedly installed at the bottom of the heating chamber (5), and a vertically arranged spray tower (7) is fixedly installed at one end of the gas-liquid circulation pipe (6). An exhaust pipe (8) is fixedly installed at the top of the spray tower (7). A first cooling chamber (9) is provided inside the gas-liquid circulation pipe (6) near the spray tower (7), and a second cooling chamber (10) and a third cooling chamber (11) are arranged sequentially from bottom to top inside the spray tower (7). A circulating water tank (12) is provided at the bottom of the gas-liquid circulation pipe (6). A return pipe (13) is fixedly installed at the top of the circulating water tank (12). The return pipe (13) is fixedly installed at the bottom of the gas-liquid circulation pipe (6). A circulating pump (14) is provided on one side of the circulating water tank (12). A three-way control valve (15) is fixedly installed at the water inlet end of the circulating pump (14). One end of the three-way control valve (15) is connected to the inside of the circulating water tank (12). A water supply pipe (16) is fixedly installed at the water outlet end of the circulating pump (14). Three diversion pipes (17) are fixedly installed on one side of the water supply pipe (16) from bottom to top. One end of the three diversion pipes (17) extends into the inside of the first cooling chamber (9), the second cooling chamber (10), and the third cooling chamber (11), respectively, and a spray plate (18) is fixedly installed in each of them.

2. The heated water washing exhaust gas processor according to claim 1, characterized in that, The air input pipe (4) is fixedly installed with a suspension pipe (19) at one end inside the mixer (1). The bottom ends of the multiple suspension pipes (19) are fixedly installed with the same circulation pipe (20). Multiple evenly distributed jet pipes (21) are fixedly installed on the inner side wall of the circulation pipe (20). The jet pipes (21) are all facing the bottom end of the air intake pipe (2).

3. The heated water-washing exhaust gas processor according to claim 1, characterized in that, The air input pipe (4) is fixedly installed with a vertically arranged pendant pipe (22) at one end inside the mixer (1). The bottom end of the pendant pipe (22) extends into the heating chamber (5) and is fixedly installed with multiple evenly distributed annular air outlet pipes (23) from top to bottom.

4. The heated water-washing exhaust gas processor according to claim 1, characterized in that, The bottom of the first cooling chamber (9), the second cooling chamber (10) and the third cooling chamber (11) are all fixedly installed with a one-way air valve (24) and a recovery water valve (26). The bottom end of the one-way air valve (24) is fixedly installed with an air collection plate (25), and the bottom end of the recovery water valve (26) is fixedly installed with a recovery pipe (27).

5. A heated water-washing exhaust gas processor according to claim 4, characterized in that, The first cooling chamber (9), the second cooling chamber (10) and the third cooling chamber (11) are all fixedly installed with a vortex box (28). The bottom of the vortex box (28) is provided with an air inlet (2801) that is connected to the top of the one-way air valve (24). The inside of the vortex box (28) is provided with a spiral flow channel (2802) and a guide flow channel (2803) that are connected to the air inlet (2801). The bottom inner wall of the guide flow channel (2803) is provided with a drain port (2804) that is connected to the recovery water valve (26). The top of the vortex box (28) is fixedly installed with a receiving plate (29) that is connected to the guide flow channel (2803). The receiving plate (29) is located directly below the spray plate (18).

6. A heated water-washing exhaust gas processor according to claim 1, characterized in that, A support frame (31) is fixedly installed on the bottom inner wall of the circulating water tank (12). An inner box (30) is fixedly installed on the top of the support frame (31). Two drain control valves (35) are fixedly installed on one side of the circulating water tank (12). One end of the three-way control valve (15) and the two drain control valves (35) extends into the interior of the inner box (30). A vertically arranged retainer (32) is fixedly installed inside the inner box (30). A liquid level sensor (33) is fixedly installed inside the retainer (32). Two drain pumps (34) are provided on one side of the circulating water tank (12). The inlet ends of the two drain pumps (34) are respectively connected to the two drain control valves (35). The outlet ends of the two drain pumps (34) are fixedly installed with the same drain pipe (36). An emergency water tank (37) is provided on one side of the circulating water tank (12). One end of the drain pipe (36) is connected to the interior of the emergency water tank (37).

7. A heated water-washing exhaust gas processor according to claim 6, characterized in that, An overflow pipe (38) is fixedly installed on one side of the top of the circulating water tank (12). The two ends of the overflow pipe (38) are respectively connected to the interior of the inner tank (30) and the emergency water tank (37). A water pumping pipe (39) is fixedly installed on the other end of the three-way control valve (15). One end of the water pumping pipe (39) is connected to the interior of the emergency water tank (37).

8. A heated water-washing exhaust gas processor according to claim 6, characterized in that, A partition (40) is provided between the circulating water tank (12) and the inner tank (30). A leakage detection belt (41) is fixedly installed on the bottom inner wall of the partition (40). An overflow port (3001) communicating with the partition (40) is opened on the top inner wall of the inner tank (30).

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