Ion source detection device and detection method

Abstract

The invention relates to the technical field of ion source detection, in particular to an ion source detection device and method, and aims to solve the problem that a probe of an existing detection device interferes with the detection precision. The ion source detection device provided by the invention comprises a radial movement assembly, an axial movement assembly and a Langmuir probe, the Langmuir probes are installed on the radial moving assembly and annularly and uniformly distributed around the axis of the ion beam, and the radial moving assembly is installed on the axial moving assembly; the axial movement assembly is used for driving the radial movement assembly to move in the axial direction, and the radial movement assembly is used for driving the Langmuir probe to approach or leave the axis of the ion beam in the radial direction. Comprehensive detection of the ion beam is guaranteed through the Langmuir probes in the annular array, the Langmuir probes in the annular array are moved to different positions for detection through the axial moving assembly, mutual interference of the Langmuir probes arranged in the length direction of the ion beam can be avoided, and the problem that the probes interfere with the detection precision is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion source detection, and in particular to an ion source detection device and a detection method. BACKGROUND

[0002] The basic function of an ion source is to ionize neutral atoms or molecules to form charged ions and focus them into a beam for subsequent processing or analysis. The parameters of the ion beam generated by the ion source device, such as the intensity of the ion beam, the energy distribution, the uniformity of the beam, the divergence angle of the beam, etc., have a crucial influence on the application effect of the ion beam.

[0003] The electron density of the ion beam generated by the existing ion source affects the transmission process, and in turn affects the quality and stability of the ion beam. When using Langmuir probes to detect the electron density, if multiple linear array type Langmuir probes are used for synchronous detection, the existence of the previous group of probes will cause changes in the characteristics of the ions (such as density, direction, energy distribution, etc.). This disturbance will propagate to the subsequent probes, thereby affecting the detection accuracy. SUMMARY

[0004] The purpose of the present application is to provide an ion source detection device and a detection method to solve the problem of probe interference with detection accuracy of the existing detection device.

[0005] To solve the above technical problems, the technical solution provided by the present application is as follows: An ion source detection device, comprising a radial movement assembly, an axial movement assembly and a Langmuir probe; the axial direction of the ion beam is the axial direction, and the direction perpendicular to the axial direction of the ion beam is the radial direction; A plurality of Langmuir probes are installed on the radial movement assembly and are evenly distributed in a ring around the axial line of the ion beam, and the radial movement assembly is installed on the axial movement assembly; The axial movement assembly is used to drive the radial movement assembly to move axially, and the radial movement assembly is used to drive the Langmuir probe to move radially towards or away from the axial line of the ion beam.

[0006] Further, the radial movement assembly comprises a base, a probe seat and a chuck; The Langmuir probe is installed on the probe seat, and a plurality of probe seats are slidingly installed on the base and are evenly distributed in a ring around the axial line of the ion beam; The chuck is rotatably installed on the base and is configured to be able to rotate around the axial line of the ion beam; The probe base is provided with a positioning pin, the base is provided with a radial slot extending in the radial direction, and the chuck is provided with an eccentric positioning slot; the positioning pin is simultaneously inserted into the radial slot and the eccentric positioning slot; the chuck rotates to make the eccentric positioning slot push the positioning pin to slide along the radial slot.

[0007] Further, the axial movement assembly comprises a cavity shell, a screw rod and a guide column; The screw rod is mounted on the cavity shell, the guide column is mounted on the cavity shell and arranged in parallel with the screw rod, and the base is sleeved on the guide column and slides along the guide column; The axial movement assembly further comprises a helical gear; the helical gear is rotatably mounted on the base and engaged with the screw rod, and is configured to be able to rotate around its own axis to drive the base to move along the guide column.

[0008] Further, the radial movement assembly further comprises a worm and a worm wheel, and the worm wheel is sleeved on the chuck; The worm is engaged with the worm wheel, and is configured to be able to rotate around its own axis to drive the worm wheel to rotate around its own axis, and further drive the chuck to rotate.

[0009] Further, the axial movement assembly further comprises a driving gear and a driven gear; The driven gear is coaxially connected with the helical gear, and the driving gear is engaged with the driven gear; The driving gear is configured to be able to rotate around its own axis to drive the driven gear to rotate, and further drive the helical gear to rotate.

[0010] Further, the ion source detection device further comprises a driving assembly, and the driving assembly comprises a central shaft, a spline shaft and a spline sleeve; The central shaft is coaxially connected with the spline shaft, the spline sleeve is sleeved on the spline shaft and is in sliding connection with the spline shaft, and the spline sleeve is coaxially connected with the driving gear; The central shaft is configured to be able to rotate around its own axis to drive the spline shaft, the spline sleeve and the driving gear to rotate.

[0011] Further, the driving assembly further comprises a tip seat and a limiting rod, and the tip seat is coaxially arranged with the spline shaft and rotatably mounted on the spline shaft; The radial movement assembly further comprises a catch cylinder, and the worm is sleeved on the catch cylinder and connected with the catch cylinder; a spiral groove is formed in the inner wall of the catch cylinder, a positioning pin is arranged on the tip seat, and the positioning pin is inserted into the spiral groove and moves along the spiral groove; The central shaft is configured to be movable along its own axis to drive the end head base to move, thereby driving the bit cylinder to rotate to drive the worm to rotate. The limiting rod is connected with the end head base, is inserted into the base and is slidingly installed on the base, and is used for preventing the end head base from rotating.

[0012] Further, the driving assembly further comprises a driving shaft, the driving shaft is sleeved on the central shaft, a same-position pin is arranged on the central shaft, and a V-shaped groove is formed in the driving shaft. The same-position pin is inserted into the V-shaped groove and is slidingly arranged along the V-shaped groove, and the driving shaft is configured to be rotatable around its own axis to drive the central shaft to rotate or move along its own axis direction through the V-shaped groove.

[0013] Further, the driving assembly further comprises a positioning cylinder, the positioning cylinder is sleeved on the central shaft, a U-shaped groove is formed in the central shaft, and a position blocking pin is arranged on the positioning cylinder. The position blocking pin is inserted into the U-shaped groove and is slidingly arranged along the U-shaped groove.

[0014] In another aspect of the present application, an ion source detection method is provided, which uses the ion source detection device described above and comprises the following steps: Device inspection: check whether the ion source device is normally operated to ensure that it can stably generate an ion beam, and check whether the Langmuir probe is intact, clean and free of oxidation or pollution to ensure the measurement accuracy; Parameter setting: set the acquisition frequency and voltage scanning range parameters of the terminal module according to the experimental requirements to ensure that the current-voltage characteristic curve of the Langmuir probe can be accurately obtained; Ion beam detection: the axial movement assembly changes the position of the Langmuir probe in the axial direction, and drives the Langmuir probe to move to different positions on the ion beam propagation path, so as to detect different positions; during detection, the radial movement assembly changes the distance between the Langmuir probe and the ion beam axis, and as the Langmuir probe gradually extends into the ion beam, the terminal module starts to collect the electric signal of the Langmuir probe, records the current-voltage characteristic curve of the ion beam at different depth positions, and after detection is completed, the Langmuir probe returns to the initial position; Parameter extraction: the terminal module analyzes and calculates the current-voltage characteristic curve of each detection position, extracts the key parameters of the ion beam, analyzes the uniformity of the ion density and energy distribution parameters of the ion beam at different depth positions and propagation paths, and judges whether the performance of the ion source device meets the requirements.

[0015] In combination with the above technical solutions, the present application can achieve the following technical effects: 1. The ion source detection device ensures comprehensive detection of the ion beam through the ring array of Langmuir probes, and moving the ring array of Langmuir probes to different positions for detection through the axial movement assembly can avoid mutual interference of the Langmuir probes arranged along the length direction of the ion beam, affecting the detection results, and avoiding the problem of probe interference with detection accuracy.

[0016] 2. The driving assembly can separately drive the axial movement assembly and the radial movement assembly, so that the Langmuir probe reciprocally moves in the axial and radial directions to complete detection in two positions. Two separate drives can be switched through the limiting guide of the V-shaped groove and the U-shaped groove and the forward and reverse rotation of the driving shaft, and they do not affect each other. At the same time, the V-shaped groove and the U-shaped groove can reliably limit the movement distance of the Langmuir probe in the axial and radial directions, and the repeated positioning accuracy is high, which can ensure consistent detection position each time, improve detection accuracy and recheck effect, and is conducive to comparing detection results. Especially after replacing or adjusting parts of the ion source device, the position can be ensured to be consistent with the last detection, so as to make accurate comparison with the last detection effect, and then confirm the adjustment effect and rule, thereby improving the ion source device debugging efficiency. Moreover, the mechanical action is reliable and stable, and compared with electrical control, the problem that sensors are easily disturbed can be avoided, which is conducive to further improving the detection accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0018] Figure 1 The structure schematic diagram of the ion source detection device provided by the embodiment of the present application is shown in the figure. Figure 2 The structure schematic diagram in the hollow shell is shown in the figure. Figure 3 The structure schematic diagram of the base related parts is shown in the figure. Figure 4 The structure schematic diagram of the driving assembly is shown in the figure. Figure 3 The enlarged schematic diagram of A in the figure is shown in the figure. Figure 5 The structure schematic diagram of the helical gear related parts is shown in the figure. Figure 6 The structure schematic diagram of the driving assembly is shown in the figure. Figure 7 Another structure schematic diagram of the driving assembly is shown in the figure. Figure 8 The structure schematic diagram of the driving assembly is shown in the figure. Figure 7 The enlarged schematic diagram of B in the figure is shown in the figure.

[0019] Icon: 100, radial movement assembly; 110, base; 120, probe card; 130, chuck; 140, worm; 150, worm wheel; 160, collet; 121, positioning pin; 131, eccentric positioning groove; 161, helical groove; 200, axial movement assembly; 210, cavity housing; 220, screw; 230, guide column; 240, bevel gear; 250, driving gear; 260, driven gear; 300, Langmuir probe; 400, driving assembly; 410, center shaft; 420, spline shaft; 430, spline sleeve; 440, end seat; 450, limit rod; 460, driving shaft; 470, positioning cylinder; 411, co-site pin; 412, U-shaped groove; 441, positioning pin; 461, V-shaped groove; 471, blocking pin; 10, ion beam; 20, ion source device. DETAILED DESCRIPTION

[0020] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0022] Some embodiments of the present application will be described in detail below with reference to the drawings. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0023] When the existing ion source generates an ion beam 10, the electron density of the ion beam 10 will affect its transmission process, and then affect the quality and stability of the ion beam 10. When the Langmuir probe 300 is used to detect the electron density, if a plurality of linear array type Langmuir probes 300 are used for synchronous detection, the existence of the previous group of probes will cause the characteristics of ions such as density, direction, energy distribution, etc. to change. This disturbance will propagate to the subsequent probes, thereby affecting the detection accuracy.

[0024] In view of this, the present invention provides an ion source detection device, including a radial moving component 100, an axial moving component 200, and a Langmuir probe 300; the axial direction is taken as the axis of the ion beam 10, and the direction perpendicular to the axis of the ion beam 10 is taken as the radial direction; a plurality of Langmuir probes 300 are mounted on the radial moving component 100 and are evenly distributed in a ring around the axis of the ion beam 10, and the radial moving component 100 is mounted on the axial moving component 200; the axial moving component 200 is used to drive the radial moving component 100 to move axially, and the radial moving component 100 is used to drive the Langmuir probes 300 to move radially closer to or away from the axis of the ion beam 10.

[0025] The ion source detection device provided by the present invention ensures comprehensive detection of the ion beam 10 through the ring array of Langmuir probes 300. By moving the ring array of Langmuir probes 300 to different positions for detection through the axial moving component 200, the mutual interference of the Langmuir probes 300 arranged along the length direction of the ion beam 10 can be avoided, thus avoiding the problem of probe interference affecting detection accuracy.

[0026] The following combination Figures 1-8 The structure and shape of the ion source detection device provided in this embodiment will be described in detail: In an optional embodiment, the radial movement assembly 100 includes a base 110, a probe holder 120, and a clamping plate 130, such as... Figure 3 , Figure 4 As shown; the Langmuir probe 300 is mounted on the probe holder 120, and multiple probe holders 120 are slidably mounted on the base 110 and evenly distributed in a ring around the axis of the ion beam 10; the clamp 130 is rotatably mounted on the base 110 and configured to rotate around the axis of the ion beam 10; the probe holder 120 is provided with an adjustment pin 121, the base 110 is provided with a radially extending groove, and the clamp 130 is provided with an eccentric adjustment groove 131; the adjustment pin 121 is inserted into both the radial groove and the eccentric adjustment groove 131; the clamp 130 rotates to cause the eccentric adjustment groove 131 to push the adjustment pin 121 to slide along the radial groove.

[0027] Specifically, the extension direction of the eccentric adjustment groove 131 is neither parallel to nor perpendicular to the radial direction, so that when the clamp 130 rotates, the eccentric adjustment groove 131 applies a thrust to the adjustment pin 121, causing the probe seat 120 to move radially, thereby changing the distance between the Langmuir probe 300 and the ion beam 10.

[0028] In this embodiment, the axial movement assembly 200 includes a cavity housing 210, a screw 220, and a guide post 230, such as Figure 3As shown; the screw 220 is installed in the cavity housing 210, the guide post 230 is installed in the cavity housing 210 and is arranged parallel to the screw 220, the base 110 is fitted on the guide post 230 and slides along the guide post 230; the axial movement assembly 200 also includes a helical gear 240; the helical gear 240 is rotatably installed on the base 110 and the axis of rotation is perpendicular to the screw 220; the helical gear 240 meshes with the screw 220 and is configured to be able to rotate around its own axis to drive the base 110 to move along the guide post 230, thereby driving the radial movement assembly 100 and the Langmuir probe 300 to move axially and change the detection position.

[0029] Alternatively, the helical gear 240 can be replaced with a spur gear, and the screw 220 can be replaced with a rack. Transmission can be achieved through gear and rack meshing, but the stability of the engagement is slightly worse than that of the screw 220 and the helical gear 240.

[0030] Specifically, the radial movement assembly 100 also includes a worm gear 140 and a worm wheel 150, with the worm wheel 150 fitted onto the chuck 130. The worm gear 140 and worm wheel 150 are meshed and rotatably mounted on the base 110, configured to rotate around their own axis to drive the worm wheel 150 to rotate around its own axis, thereby driving the chuck 130 to rotate around its own axis to push the probe holder 120. That is, the worm wheel 150 is connected to and coaxially arranged with the chuck 130.

[0031] Furthermore, the axial movement assembly 200 also includes a driving gear 250 and a driven gear 260; the driven gear 260 is coaxially connected to the helical gear 240, and the driving gear 250 meshes with the driven gear 260; the driving gear 250 is configured to rotate about its own axis to drive the driven gear 260 to rotate, thereby driving the helical gear 240 to rotate. Specifically, as... Figure 5 As shown, both the driving gear 250 and the driven gear 260 are rotatably mounted on the base 110. The driving gear 250 is a sector gear to avoid interference with other parts.

[0032] In an optional embodiment, the ion source detection device further includes a drive assembly 400, which includes a central shaft 410, a splined shaft 420, and a splined sleeve 430. The central shaft 410 is coaxially connected to the splined shaft 420, the splined sleeve 430 is fitted onto the splined shaft 420 and slidably connected to it, and the splined sleeve 430 is coaxially connected to the drive gear 250. The central shaft 410 is configured to rotate around its own axis to drive the splined shaft 420, the splined sleeve 430, and the drive gear 250 to rotate. Specifically, the drive gear 250 is fitted onto the splined sleeve 430, and the splined sleeve 430 is rotatably mounted on the base 110.

[0033] Furthermore, the drive assembly 400 also includes an end seat 440 and a limit rod 450, such as Figure 7 , Figure 8As shown, the end seat 440 is coaxially arranged with the spline shaft 420 and rotatably mounted on the spline shaft 420; the radial movement assembly 100 also includes a positioning sleeve 160, which is rotatably mounted on the base 110, and the worm gear 140 is fitted into the positioning sleeve 160 and connected to it; the inner wall of the positioning sleeve 160 is provided with a spiral groove 161, and the end seat 440 is provided with a positioning pin 441, which is inserted into the spiral groove 161 and moves along the spiral groove 161; the central shaft 410 is configured to move along its own axis to drive the end seat 440 to move, thereby driving the positioning sleeve 160 to rotate and driving the worm gear 140 to rotate.

[0034] In this embodiment, the limiting rod 450 is connected to the end seat 440. The limiting rod 450 is inserted into and slidably installed in the base 110 to prevent the end seat 440 from rotating. Specifically, the limiting rod 450 is a square rod, but other shapes can also be used, such as triangular cross-section, spline cross-section, polygonal cross-section, etc. By setting the limiting rod 450 to prevent the end seat 440 from rotating, it is ensured that the engagement cylinder 160 rotates to drive the worm gear 140 to rotate, which in turn drives the worm wheel 150 to rotate and drives the Langmuir probe 300 to move radially.

[0035] In this embodiment, the drive assembly 400 further includes a drive shaft 460, such as Figure 6 As shown, the drive shaft 460 is fitted onto the central shaft 410, and the central shaft 410 is provided with a corresponding pin 411. The drive shaft 460 is provided with a V-groove 461. The corresponding pin 411 is inserted into the V-groove 461 and slides along the V-groove 461. The drive shaft 460 is configured to rotate around its own axis so as to drive the central shaft 410 to rotate around its own axis or move along its own axis direction through the V-groove 461.

[0036] Furthermore, the drive assembly 400 also includes a positioning cylinder 470, which is fitted onto the central shaft 410. A U-shaped groove 412 is formed on the central shaft 410, and a stop pin 471 is provided on the positioning cylinder 470. The stop pin 471 is inserted into and slides along the U-shaped groove 412. Specifically, the U-shaped groove 412 includes a longitudinal groove extending along the axial direction of the central shaft 410 and a circumferential groove extending along the circumference of the central shaft 410. The two longitudinal grooves are connected to the two ends of the circumferential groove to form the U-shaped groove 412. The drive shaft 460 is connected to a motor to rotate the drive shaft 460 around its own axis. The positioning cylinder 470 is mounted on the base 110, and the drive shaft 460 is rotatably mounted on the positioning cylinder 470.

[0037] The drive assembly 400 provided in this embodiment is used to drive the radial movement assembly 100 and the axial movement assembly 200 respectively, so that the two can operate independently.

[0038] Specifically, in the initial state, the stop pin 471 is located at the corner of the U-shaped groove 412, and the corresponding pin 411 is located at the bottom of the V-shaped groove 461, i.e., at the turning point, as shown below. Figure 6 As shown.

[0039] During operation, the drive shaft 460 rotates. Under the restriction of the stop pin 471, the central shaft 410 cannot rotate. Instead, it moves along its own axis with the cooperation of the V-groove 461 and the corresponding pin 411. At this time, the stop pin 471 slides along the longitudinal groove, thereby driving the spline shaft 420 and the end seat 440 to move. Thus, through the cooperation of the positioning pin 441 and the spiral groove 161, the locating cylinder 160 is driven to rotate, which in turn drives the worm gear 140 to rotate. The worm gear 140 drives the worm wheel 150 and the chuck 130 to rotate, and finally pushes the Langmuir probe 300 to move radially toward the ion beam 10 to be inserted into the ion beam 10 for detection.

[0040] After the test is completed, the drive shaft 460 rotates in the reverse direction, which in turn drives the Langmuir probe 300 to reset to its initial position. At this time, the positions of the stop pin 471 and the corresponding pin 411 are as follows: Figure 6 As shown. Subsequently, the drive shaft 460 continues to rotate, and the corresponding pin 411 enters the other side of the V-groove 461. At this time, the stop pin 471 slides along the circumferential groove. That is, due to the restriction of the circumferential groove, the central shaft 410 cannot move along its own axial direction, but it can rotate. Thus, through the cooperation of the corresponding pin 411 and the V-groove 461, the central shaft 410, the spline shaft 420, the spline sleeve 430 and the driving gear 250 are driven to rotate, which in turn drives the driven gear 260 and the helical gear 240 to rotate in sequence, thereby causing the base 110 to move axially to change the detection position.

[0041] When the stop pin 471 reaches another corner of the U-shaped groove 412, the central shaft 410 stops rotating, and correspondingly, the base 110 stops moving. The stop pin 471 slides along another longitudinal groove, that is, the central shaft 410 moves along its own axis, causing the radial movement assembly 100 to work, driving the Langmuir probe 300 to move radially toward the ion beam 10 to insert into the ion beam 10, completing the detection of another position of the ion beam 10.

[0042] After the test is completed, the drive shaft 460 rotates in the reverse direction, and the Langmuir probe 300 returns to its initial position. Continued rotation causes the stop pin 471 and the corresponding pin 411 to return to their original positions. Figure 6 The initial state shown facilitates the next reciprocating movement and detection.

[0043] In this embodiment, the drive assembly 400 can independently drive the axial movement assembly 200, thereby causing the radial movement assembly 100 and the Langmuir probe 300 to reciprocate along the axial direction at two positions. When the reciprocating movement reaches its endpoint, the drive assembly 400 can independently drive the radial movement assembly 100 to bring the Langmuir probe 300 closer to the ion beam 10 for detection and then return to the starting position. The two independent drives can be switched by the limiting guidance of the V-groove 461 and the U-groove 412 and the forward and reverse rotation of the drive shaft 460, and the two do not affect each other.

[0044] Meanwhile, the V-groove 461 and U-groove 412 reliably limit the axial and radial movement of the Langmuir probe 300, i.e., control it mechanically. This ensures high repeatability and guarantees consistent detection positions each time, improving detection accuracy and re-inspection effectiveness, and facilitating comparison of results from different tests. Especially after replacing or adjusting components of the ion source device 20, it ensures consistency with the previous detection position, allowing for precise comparison of results and confirmation of adjustment effects and patterns, thus improving the debugging efficiency of the ion source device 20. Furthermore, the reliable and stable mechanical action avoids the interference issues that sensors and other components are susceptible to compared to electrical control, further enhancing detection accuracy.

[0045] The Langmuir probes 300 are arranged in a ring array around the central axis 410 of the ion beam 10. This ring array arrangement provides excellent symmetry, enabling uniform collection of ions and electrons from the plasma. This results in more comprehensive and uniform measurement results. Furthermore, the spacing and number of the Langmuir probes 300 can be adjusted according to actual needs to achieve high spatial resolution measurements, suitable for detailed analysis of local plasma characteristics. Variations in the spacing between the Langmuir probes 300 and the central axis 410 of the ion beam 10 allow for the measurement of ion density, energy distribution, and other characteristics of the ion beam 10 at different depths. This enables timely replacement or adjustment of components or operating parameters of the ion source equipment 20 to ensure the uniformity of the ion beam 10 at different depths, thereby improving the application effect and efficiency of the ion beam 10.

[0046] In practical use, when the radial moving component 100 is at the two ends of the axial travel, the Langmuir probe 300 can be gradually extended into the ion beam 10 to complete the detection process at different depths at the same cross-sectional position of the ion beam 10. After the detection at one position is completed, it can return to the initial position to facilitate the detection at another position and avoid the Langmuir probe 300 moving axially while in contact with the ion beam 10. This allows for further assurance of detection accuracy by measuring the ion density distribution at different positions of the ion beam 10 during propagation.

[0047] It should be noted that when the Langmuir probe 300 is inserted into the ion beam 10, a sheath structure will form around the Langmuir probe 300. Therefore, in actual use, the spacing between multiple Langmuir probes 300 should be kept to avoid mutual interference between their sheath structures, thereby further ensuring detection accuracy.

[0048] When the Langmuir probe 300 is inserted into the ion beam 10, a sheath layer forms on the surface of the Langmuir probe 300 due to the potential difference between the Langmuir probe 300 and the surrounding plasma. Electrons, being light and fast, arrive first and make the surface of the Langmuir probe 300 negatively charged. The electric field generated by the accumulation of electrons repels electrons and attracts ions until a dynamic equilibrium is reached where the flow rates of electrons and ions are equal. By applying an adjustable positive / negative bias voltage, the Langmuir probe 300 can selectively collect electron or ion currents, thereby obtaining the current-voltage characteristic curve of the measured position of the ion beam 10 within a voltage range. Subsequently, by analyzing and calculating the current-voltage characteristic curve, the key parameters of the ion beam 10 are extracted to achieve the purpose of parameter and performance detection of the ion beam 10 generated by the ion source device 20.

[0049] The ion source detection device provided in this embodiment can adjust the relative position of the Langmuir probe 300 and the ion beam 10, including axial and radial adjustments, enabling multiple detections at different positions of the ion beam 10. This increases the flexibility of detection and further improves its reliability and efficiency. Simultaneously, the multiple Langmuir probes 300, arranged in a ring array equidistantly around the central axis 410 of the ion beam 10, can uniformly collect ions and electrons from the plasma, providing more uniform and accurate measurement results and ensuring detection precision.

[0050] Based on the ion source detection device provided in this embodiment, an ion source detection method is proposed, which includes the following steps using the aforementioned ion source detection device: Equipment inspection: Check whether the ion source device 20 is operating normally to ensure that it can stably generate the ion beam 10. Check whether the Langmuir probe 300 is intact, clean, free from oxidation or contamination to ensure measurement accuracy. Parameter settings: According to experimental requirements, set the acquisition frequency and voltage scanning range parameters of the terminal module to ensure that the current-voltage characteristic curve of the Langmuir probe 300 can be accurately obtained; Ion beam 10 detection: The axial movement component 200 changes the axial position of the Langmuir probe 300, driving the Langmuir probe 300 to different positions on the propagation path of the ion beam 10, thereby detecting different positions; during detection, the radial movement component 100 changes the distance between the Langmuir probe 300 and the axis of the ion beam 10. As the Langmuir probe 300 gradually extends into the ion beam 10, the terminal module begins to collect the electrical signal of the Langmuir probe 300, records the current-voltage characteristic curves of the ion beam 10 at different depth positions, and after the detection is completed, the Langmuir probe 300 returns to the initial position; Parameter extraction: The terminal module analyzes and calculates the current-voltage characteristic curve of each detection position, extracts the key parameters of the ion beam 10, analyzes the uniformity of the ion density and energy distribution parameters of the ion beam 10 at different depth positions and propagation paths, and judges whether the performance of the ion source device 20 meets the requirements.

[0051] During the preparation phase, the initial spacing of the Langmuir probes 300 needs to be adjusted according to the expected characteristics of the ion beam 10 to avoid mutual interference between their sheath structures. Upon reaching the detection position, the radial movement component 100 is activated, causing the Langmuir probes 300 to gradually extend into the ion beam 10. The terminal module acquires the current-voltage characteristic curve, and after the detection is completed, the radial movement component 100 drives the Langmuir probes 300 to detach from the ion beam 10, returning them to their initial positions.

[0052] In this embodiment, the terminal module stores the current-voltage characteristic curve data of the Langmuir probe 300 for subsequent analysis and processing. It analyzes and calculates the current-voltage characteristic curve at each detection location to extract key parameters of the ion beam 10, such as ion density and energy distribution. Specifically, the ion saturation current can be determined by the current value in the ion saturation region, the electron saturation current can be determined by the current value in the electron saturation region, and the electron temperature can be calculated by the current-voltage relationship in the transition region. By analyzing the uniformity of parameters such as ion density and energy distribution of the ion beam 10 at different depths and propagation paths, the performance of the ion source device 20 is determined to meet the requirements. Based on the detection results, components or operating parameters of the ion source device 20 are replaced or adjusted in a timely manner to ensure the uniformity of the ion beam 10 at different depths and propagation paths, thereby improving the application effect and efficiency of the ion beam 10.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An ion source detection device, characterized in that, It includes a radial moving component (100), an axial moving component (200), and a Langmuir probe (300); the axial direction is the direction of the ion beam (10), and the radial direction is the direction that intersects the ion beam (10) perpendicularly. Multiple Langmuir probes (300) are mounted on the radial moving assembly (100) and are evenly distributed in a ring around the axis of the ion beam (10), and the radial moving assembly (100) is mounted on the axial moving assembly (200). The axial moving component (200) is used to drive the radial moving component (100) to move axially, and the radial moving component (100) is used to drive the Langmuir probe (300) to move radially closer to or away from the axis of the ion beam (10).

2. The ion source detection device according to claim 1, characterized in that, The radial movement assembly (100) includes a base (110), a probe holder (120), and a clamp (130). The Langmuir probe (300) is mounted on the probe holder (120), and a plurality of the probe holders (120) are slidably mounted on the base (110) and evenly distributed in a ring around the axis of the ion beam (10). The chuck (130) is rotatably mounted on the base (110) and configured to rotate about the axis of the ion beam (10); The probe holder (120) is provided with an adjustment pin (121), the base (110) is provided with a radial groove extending in the radial direction, and the chuck (130) is provided with an eccentric adjustment groove (131); the adjustment pin (121) is inserted into both the radial groove and the eccentric adjustment groove (131); the chuck (130) rotates so that the eccentric adjustment groove (131) pushes the adjustment pin (121) to slide along the radial groove.

3. The ion source detection device according to claim 2, characterized in that, The axial movement assembly (200) includes a cavity housing (210), a screw (220), and a guide post (230). The screw (220) is installed on the cavity housing (210), the guide post (230) is installed on the cavity housing (210) and is arranged parallel to the screw (220), and the base (110) is fitted onto the guide post (230) and slides along the guide post (230); The axial movement assembly (200) further includes a helical gear (240); the helical gear (240) is rotatably mounted on the base (110) and meshes with the screw (220), and is configured to rotate about its own axis to drive the base (110) to move along the guide post (230).

4. The ion source detection device according to claim 3, characterized in that, The radial movement assembly (100) also includes a worm (140) and a worm wheel (150), the worm wheel (150) being fitted onto the chuck (130). The worm (140) meshes with the worm wheel (150) and is configured to rotate around its own axis to drive the worm wheel (150) to rotate around its own axis, thereby driving the chuck (130) to rotate.

5. The ion source detection device according to claim 4, characterized in that, The axial movement assembly (200) also includes a drive gear (250) and a driven gear (260). The driven gear (260) is coaxially connected to the helical gear (240), and the driving gear (250) meshes with the driven gear (260); The driving gear (250) is configured to rotate about its own axis to drive the driven gear (260) to rotate, thereby driving the helical gear (240) to rotate.

6. The ion source detection device according to claim 5, characterized in that, It also includes a drive assembly (400), which includes a central shaft (410), a spline shaft (420), and a spline sleeve (430). The central shaft (410) is coaxially connected to the spline shaft (420), the spline sleeve (430) is fitted onto the spline shaft (420) and slidably connected to the spline shaft (420), and the spline sleeve (430) is coaxially connected to the drive gear (250). The central shaft (410) is configured to rotate about its own axis to drive the spline shaft (420), the spline sleeve (430) and the drive gear (250) to rotate.

7. The ion source detection device according to claim 6, characterized in that, The drive assembly (400) further includes an end seat (440) and a limiting rod (450). The end seat (440) is coaxially arranged with the spline shaft (420) and rotatably mounted on the spline shaft (420). The radial movement assembly (100) further includes a positioning sleeve (160), the worm gear (140) is fitted into the positioning sleeve (160) and connected to the positioning sleeve (160); the inner wall of the positioning sleeve (160) is provided with a spiral groove (161), and a positioning pin (441) is provided on the end seat (440), the positioning pin (441) is inserted into the spiral groove (161) and moves along the spiral groove (161); The central shaft (410) is configured to move along its own axis to drive the end seat (440) to move, thereby driving the engagement cylinder (160) to rotate and driving the worm (140) to rotate; The limiting rod (450) is connected to the end seat (440). The limiting rod (450) is inserted into the base (110) and slidably installed on the base (110) to prevent the end seat (440) from rotating.

8. The ion source detection device according to claim 7, characterized in that, The drive assembly (400) further includes a drive shaft (460), which is fitted onto the central shaft (410). The central shaft (410) is provided with a co-position pin (411), and the drive shaft (460) is provided with a V-groove (461). The corresponding pin (411) is inserted into the V-groove (461) and slides along the V-groove (461); the drive shaft (460) is configured to rotate about its own axis to drive the central shaft (410) to rotate about its own axis or move along its own axis direction through the V-groove (461).

9. The ion source detection device according to claim 8, characterized in that, The drive assembly (400) further includes a positioning cylinder (470), which is fitted onto the central shaft (410). A U-shaped groove (412) is provided on the central shaft (410), and a stop pin (471) is provided on the positioning cylinder (470). The stop pin (471) is inserted into the U-shaped groove (412) and slides along the U-shaped groove (412).

10. An ion source detection method, employing the ion source detection device as described in any one of claims 1-9, characterized in that, Includes the following steps: Equipment inspection: Check whether the ion source equipment (20) is operating normally to ensure that it can stably generate ion beam (10), and check whether the Langmuir probe (300) is intact, clean, free from oxidation or contamination to ensure measurement accuracy; Parameter settings: According to the experimental requirements, set the acquisition frequency and voltage scanning range parameters of the terminal module to ensure that the current-voltage characteristic curve of the Langmuir probe (300) can be accurately obtained; Ion beam (10) detection: The axial moving component (200) changes the axial position of the Langmuir probe (300), driving the Langmuir probe (300) to move to different positions on the propagation path of the ion beam (10), thereby detecting different positions; during detection, the radial moving component (100) changes the distance between the Langmuir probe (300) and the axis of the ion beam (10). As the Langmuir probe (300) gradually extends into the ion beam (10), the terminal module begins to collect the electrical signal of the Langmuir probe (300), records the current-voltage characteristic curve of the ion beam (10) at different depth positions, and after the detection is completed, the Langmuir probe (300) returns to the initial position; Parameter extraction: The terminal module analyzes and calculates the current-voltage characteristic curve of each detection position, extracts the key parameters of the ion beam (10), analyzes the uniformity of the ion density and energy distribution parameters of the ion beam (10) at different depth positions and propagation paths, and judges whether the performance of the ion source device (20) meets the requirements.

Images