Method of drying moisture from the interlayer of a large size double-shell vacuum component

Abstract

The present application belongs to the technical field of fusion device, and relates to a drying method for interlayer moisture of a large-size double-layer shell vacuum component, comprising the following steps: placing the vacuum component after water pressure test in a heating box, starting to uniformly heat the heating box from room temperature to 190 DEG C, then continuously keeping the temperature in the range of 190 DEG C to 210 DEG C for a set time, so that the interlayer moisture of the vacuum component is vaporized to form water vapor, and then stopping heating and cooling with the furnace; during the process of keeping the temperature and stopping heating and cooling with the furnace, continuously blowing dry inert gas into the gas inlet at the lower end of the vacuum component, so that the dry inert gas circulates through the interlayer of the vacuum component and flows out from the gas outlet at the upper end of the vacuum component, until the humidity of the gas outlet is not greater than the relative humidity value of the dry standard, and then stopping blowing dry inert gas into the gas inlet. The present application can completely remove the interlayer residual moisture of the vacuum component after water pressure test, has high drying efficiency, and can avoid damaging the vacuum component.

Description

Technical Field

[0001] This invention relates to the field of dehumidification technology for vacuum components in fusion devices, and more particularly to a method for drying moisture in the interlayer of a large-size double-shell vacuum component. Background Technology

[0002] The vacuum chamber sector of a fusion device is a large-sized, double-shell vacuum component (hereinafter referred to as the vacuum component). After manufacturing, water needs to be injected into the interlayer of the vacuum component for a hydrostatic test. After the test, the water remaining in the interlayer not only affects the vacuum level of the vacuum component but also poses a risk of corrosion. Moreover, the presence of water can also affect leak detection of the vacuum component, as residual water may clog leak points and cause false detections. Hydrostatic testing and vacuum leak detection are mandatory procedures for the vacuum component of the fusion device. Therefore, the water stains remaining after the hydrostatic test of the vacuum component need to be thoroughly cleaned to eliminate the impact on subsequent leak detection tests. However, due to the obstruction of the stiffening plates in the interlayer, water is difficult to drain naturally, making the drying of this complex interlayer space extremely difficult. To eliminate the residual water in the vacuum component after the hydrostatic test, an efficient and thorough water removal method is urgently needed.

[0003] Currently, there is a type of thermal circulation tunnel dryer that uses partitions to divide the interior of the tunnel into low-temperature and high-temperature zones. This facilitates gradual drying of the surface of the capacitor porcelain insulator blanks, resulting in better drying effects. The outer side of the conveyor belt has evenly distributed fixing frames to prevent the products from shaking during drying. Photoelectric sensors are also used to detect and prevent the products from piling up after drying. This method is suitable for the streamlined operation of small parts, but it only dries the surface of the parts and cannot effectively remove moisture from the interior. Therefore, it is not applicable to removing moisture from the interlayer of large-sized, double-shell vacuum components like this one. Summary of the Invention

[0004] This invention aims to at least partially solve one of the technical problems in related technologies. Therefore, one objective of this invention is to provide a method for drying the interlayer moisture of large-size double-layered vacuum components, which can thoroughly remove residual moisture from the interlayer of the vacuum component after a hydrostatic test, has high drying efficiency, and avoids damage to the vacuum component during the drying process.

[0005] A method for drying moisture in the interlayer of a large-size double-layered vacuum component according to an embodiment of the present invention includes the following steps:

[0006] S1: Place the vacuum component after the water pressure test into a heating chamber. The heating chamber starts to heat the vacuum component from room temperature to 190°C. Then, it is kept at a constant temperature within the range of 190°C to 210°C for a set time to allow the moisture in the interlayer of the vacuum component to vaporize and form water vapor. After that, the heating is stopped and the vacuum component is cooled with the furnace.

[0007] S2: During the heat preservation and cooling process of the heating box, dry inert gas is continuously blown into the air inlet at the lower end of the vacuum component by a dehumidifier. The dry inert gas circulates through the interlayer of the vacuum component and flows out from the air outlet at the upper end of the vacuum component until the humidity at the air outlet is not greater than the relative humidity value of the drying standard, at which point the blowing of dry inert gas into the air inlet is stopped.

[0008] The method for drying the interlayer moisture of a large-size double-layered vacuum component according to an embodiment of the present invention involves uniformly heating the vacuum component in a high-temperature baking environment and maintaining the temperature for a period of time, causing the moisture in the interlayer of the vacuum component to vaporize into water vapor. A dehumidifier is then used to continuously blow dry inert gas into the air inlet at the lower end of the vacuum component, allowing the dry inert gas to circulate through the interlayer of the vacuum component and exit from the air outlet at the upper end. The dry inert gas effectively carries away the water vapor in the interlayer of the vacuum component from the air outlet. When the humidity at the air outlet is not greater than the relative humidity value of the drying standard, the vacuum component is considered dried to be satisfactory, and the blowing of dry inert gas into the air inlet is stopped.

[0009] In some embodiments, in step S1, the heating rate of the heating chamber during the heating phase from room temperature to 190°C is ≤20°C / h.

[0010] In some embodiments, in step S1, the duration of continuous heat preservation within the heat preservation range of 190°C to 210°C is set to be between 2.5 and 4 hours.

[0011] In some embodiments, when the heating temperature in step S1 first reaches 190°C, the dehumidifier in step S2 starts up and blows dry inert gas into the air inlet.

[0012] In some embodiments, the heating box includes an insulated box shell, heaters, and thermocouples; the insulated box shell is rectangular, and the heaters are distributed on the inner sides of the four sides and the top of the insulated box shell, with all heaters connected in parallel; the thermocouples are spaced apart on the inner sides of the four sides of the insulated box shell.

[0013] In some embodiments, the heater is an LCD track heater.

[0014] In some embodiments, the insulated box shell includes a metal shell and an insulation layer fixed to the inner wall of the metal shell; the heaters on the four sides and the top of the insulated box shell are arranged in an array; and the thermocouples on the four sides of the insulated box shell are arranged in an array.

[0015] In some embodiments, in step S2, the dry inert gas is dry nitrogen, dry helium, or a mixture of dry nitrogen and dry helium; or the dry inert gas is replaced with dry air.

[0016] In some embodiments, the dry inert gas is 70% to 90% dry helium and 10% to 30% dry nitrogen by volume.

[0017] In some embodiments, the preheating temperature range of the dry inert gas is 70°C to 90°C.

[0018] In some embodiments, in step S2, the humidity of the air outlet is monitored in real time by a hygrometer installed at the air outlet.

[0019] In some embodiments, in step S2, the relative humidity value of the drying standard is 10%.

[0020] In some embodiments, the following steps are also included:

[0021] S3: After step S2, once the interior of the vacuum component has cooled to room temperature, use a miniature endoscope to inspect the interlayer of the vacuum component and observe whether there are water stains on the inner wall of the interlayer. If no water stains are found, the drying operation is complete; otherwise, repeat steps S1 and S2 to dry the vacuum component again.

[0022] The method for drying moisture in the interlayer of a large-size double-layered vacuum component according to this invention has the following advantages: By applying a circulating hot airflow to the interlayer of the vacuum component in a high-temperature baking environment, residual moisture is thoroughly removed, achieving efficient and sufficient drying of the vacuum component of the fusion device and ensuring the smooth progress of subsequent leak detection tests. Furthermore, this method avoids thermal stress caused by the thermal expansion of the vacuum component material, which could lead to deformation or damage to the vacuum component, and prevents oxidation and corrosion of the vacuum component.

[0023] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a method for drying moisture in the interlayer of a large-size double-layer shell vacuum component according to an embodiment of the present invention;

[0025] Figure 2 This is a front view of the heating chamber in the method for drying moisture in the interlayer of a large-size double-layered vacuum component according to an embodiment of the present invention;

[0026] Figure 3This is a side view of the heating chamber in the method for drying moisture in the interlayer of a large-size double-layered vacuum component according to an embodiment of the present invention;

[0027] Figure 4 This is a top view of the heating chamber in the method for drying moisture in the interlayer of a large-size double-layered vacuum component according to an embodiment of the present invention;

[0028] Figure 5 This is a process curve diagram of the method for drying the interlayer moisture of a large-size double-layer shell vacuum component according to an embodiment of the present invention;

[0029] Figure 6 This is a three-dimensional structural diagram of the heating box in the method for drying moisture in the interlayer of a large-size double-layered vacuum component according to an embodiment of the present invention.

[0030] Figure label:

[0031] Vacuum component 1; air inlet 101; air outlet 102; heating box 2; insulation box shell 201; reinforcing rib 2011; heater 202; thermocouple 203. Detailed Implementation

[0032] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0033] The following is combined with Figures 1 to 6 This invention describes a method for drying the moisture in the interlayer of a large-size double-layered vacuum component according to an embodiment of the present invention.

[0034] like Figures 1 to 6 As shown, in the method for drying moisture in the interlayer of a large-size double-layer shell vacuum component in this embodiment of the invention, the large-size double-layer shell vacuum component refers to the vacuum chamber sector of the fusion device (referred to as vacuum component 1 for ease of description).

[0035] The method for drying moisture in the interlayer of a large-size double-layer vacuum component according to an embodiment of the present invention includes the following steps:

[0036] S1: Place the vacuum component 1 after the water pressure test into the heating chamber 2. The heating chamber 2 starts to heat the vacuum component 1 from room temperature to 190°C. Then, it is kept at a constant temperature within the range of 190°C to 210°C for a set time to allow the water in the interlayer of the vacuum component 1 to vaporize and form water vapor. After that, the heating is stopped and the vacuum component 1 is cooled with the furnace.

[0037] The insulation temperature range is 190℃~210℃, which is a high-temperature range. The vacuum component 1 is fully heated in the high-temperature baking environment, which accelerates the vaporization of moisture in the interlayer of the vacuum component 1, improving vaporization efficiency. This allows the dry inert gas in step S2 to be carried away, thereby improving drying efficiency. Furthermore, the vacuum component 1 is made of stainless steel. Since the coefficient of linear expansion of stainless steel increases significantly at high temperatures, the insulation temperature is controlled to not exceed 210℃ to avoid thermal stress caused by the thermal expansion of the vacuum component 1, which could lead to deformation or damage. Additionally, based on the insulation effect of the heating chamber 2, setting the insulation range to 200±10℃ avoids frequent start-up and shutdown of the heating chamber 2, preventing malfunctions.

[0038] S2, during the heat preservation and cooling process of the heating box 2, dry inert gas is continuously blown into the air inlet 101 at the lower end of the vacuum component 1 through the dehumidifier, so that the dry inert gas circulates through the interlayer of the vacuum component 1 and flows out from the air outlet 102 at the upper end of the vacuum component 1 until the humidity of the air outlet 102 is not greater than the relative humidity value of the drying standard, and then the blowing of dry inert gas into the air inlet 101 is stopped.

[0039] During the initial heating phase of the heating chamber 2, from room temperature to 190°C, the dehumidifier does not start, meaning no dry inert gas is blown into the air inlet 101. The main purpose of this heating phase is to heat the interlayer of the vacuum component 1, raising the internal temperature and causing moisture evaporation. Starting the dehumidifier during this phase is uneconomical, the dehumidification effect is poor, and the rapid flow of the dry inert gas over the moisture surface carries away some heat, affecting heating efficiency. However, the dehumidifier's operation during the heat preservation phase offers several advantages: Firstly, the dry inert gas flow removes the saturated air layer on the interlayer surface, maintaining the maximum humidity gradient. The thin, high-humidity saturated air layer adhering to the interlayer surface due to moisture evaporation severely hinders further moisture evaporation. The dry inert gas flow removes this saturated air layer, allowing the dry inert gas to continuously contact the material surface, creating a water vapor partial pressure (i.e., a humidity gradient) and generating the driving force for continuous moisture evaporation. Secondly, it provides a large amount of latent heat required for moisture evaporation. After the flowing dry inert gas is heated to a certain temperature, it is blown into the jacket of the vacuum component 1. Through convection heat transfer, heat energy is continuously transferred to the surface of the material to supply moisture evaporation.

[0040] Dry inert gas can effectively carry away water vapor from the jacketed vacuum component 1, which can not only prevent high-temperature gas from carrying water vapor into the component cavity, but also transfer heat to the water that is difficult to evaporate in the corner of the jacket, promote evaporation, and will not oxidize or corrode the vacuum component 1.

[0041] The method for drying the interlayer moisture of a large-size double-layered vacuum component according to an embodiment of the present invention involves uniformly heating the vacuum component 1 in a high-temperature baking environment and keeping it at that temperature for a period of time, causing the moisture in the interlayer of the vacuum component 1 to vaporize into water vapor. A dehumidifier is then used to continuously blow dry inert gas into the air inlet 101 at the lower end of the vacuum component 1, allowing the dry inert gas to circulate through the interlayer of the vacuum component 1 and exit from the air outlet 102 at the upper end of the vacuum component 1. The dry inert gas effectively carries away the water vapor in the interlayer of the vacuum component 1 from the air outlet 102. When the humidity at the air outlet 102 is not greater than the relative humidity value of the drying standard, the vacuum component 1 is dried to the required standard, and the blowing of dry inert gas into the air inlet 101 is stopped.

[0042] The method for drying moisture in the interlayer of a large-size double-shell vacuum component according to this invention has the following advantages: By applying a circulating hot airflow to the interlayer of the vacuum component 1 in a high-temperature baking environment, residual moisture is thoroughly removed, achieving efficient and sufficient drying of the vacuum component 1 of the fusion device, ensuring the smooth progress of subsequent leak detection tests. Furthermore, this method avoids thermal stress caused by the thermal expansion of the vacuum component 1 material, which could lead to deformation or damage to the vacuum component 1, and prevents oxidation and corrosion of the vacuum component 1.

[0043] In some embodiments, in step S1, the heating rate of the heating chamber 2 during the uniform heating phase from room temperature to 190°C is ≤20°C / h. It is understood that excessively rapid heating can lead to a significant temperature difference between the outer wall (near heater 202) and the inner wall of the vacuum component's interlayer. Different degrees of thermal expansion and contraction can generate substantial thermal stress within the structure, increasing the risk of structural damage. A heating rate ≤20°C / h results in a relatively slow heating process, allowing the temperature of the inner and outer walls of the interlayer, as well as the entire interlayer structure, to become more uniform, thus minimizing thermal stress.

[0044] In some embodiments, in step S1, the temperature is maintained within the range of 190°C to 210°C for a duration of 2.5 to 4 hours. This allows for efficient and complete vaporization of moisture in the interlayer of the vacuum component 1 into water vapor.

[0045] Preferably, the continuous heat preservation time within the heat preservation range of 190℃~210℃ is set to 3 hours.

[0046] In some embodiments, when the heating temperature in step S1 first reaches 190°C, the dehumidifier in step S2 starts and blows dry inert gas into the air inlet 101. That is, during the initial heating phase when the heating chamber 2 is uniformly heated from room temperature to 190°C, the dehumidifier does not start, i.e., it does not blow dry inert gas into the air inlet 101. The dehumidifier only starts when the temperature is first maintained. The main purpose of the heating phase is to heat the interlayer of the vacuum component 1, raising the internal temperature and causing moisture evaporation. Starting the dehumidifier during this heating phase is uneconomical, the dehumidification effect is poor, and the rapid flow of dry inert gas over the moisture surface carries away some heat, affecting the heating efficiency. However, the dehumidifier operating during the maintenance phase has several advantages: firstly, it can remove the saturated air layer on the interlayer surface, maintaining the maximum humidity gradient. The air adhering to the surface of the interlayer forms a thin, highly humid saturated air layer due to moisture evaporation, which severely hinders further evaporation. The airflow can blow away this saturated air layer, allowing the dry inert gas to continuously contact the material surface, forming a water vapor partial pressure (i.e., a humidity gradient), generating the driving force for continuous moisture evaporation; on the other hand, it provides a large amount of latent heat required for moisture evaporation. The flowing dry inert gas, heated to a certain temperature, is blown into the interlayer of the vacuum component 1, continuously transferring heat energy to the material surface through convection heat transfer, supplying the moisture for evaporation.

[0047] In some embodiments, such as Figure 2-4 and Figure 6 As shown, the heating chamber 2 includes an insulated shell 201, heaters 202, and thermocouples 203. The insulated shell 201 is rectangular. The heaters 202 are distributed on the four sides and the inner side of the top of the insulated shell 201, and all heaters 202 are connected in parallel. The thermocouples 203 are spaced apart on the inner side of the four sides of the insulated shell 201. The rectangular shape of the insulated shell 201 facilitates processing, and its dimensions are designed to accommodate the currently under-construction vacuum component 1. For example, the length of the insulated shell 201 is not less than 6 meters (e.g., between 6 and 6.5 meters), the width is not less than 3.5 meters (e.g., between 3.5 and 4 meters), and the height is not less than 3 meters (e.g., between 3 and 3.5 meters). The insulated shell 201 serves as insulation, separating the internal temperature environment from the external temperature environment, and also serves to house the heating elements and thermocouples 203. Heater 202 is used to uniformly heat the vacuum component 1 inside the insulation box shell 201, accelerating the vaporization of moisture in the interlayer of the vacuum component 1 into water vapor and improving drying efficiency; all heaters 202 are connected in parallel, with high heating power, enabling rapid heating of the vacuum component 1. Thermocouple 203 is used to monitor the ambient temperature inside the insulation box shell 201 in real time.

[0048] It should be noted that the power of a single heater 202 is 10KW, and the measuring range of thermocouple 203 is -50℃ to 700℃. The heater 202, thermocouple 203, and dehumidifier are electrically connected to the PLC control module outside the insulation chamber 201, and are controlled by the PLC control module's program. When the temperature is above 210℃, the heater 202 stops heating; when the temperature is below 190℃, the heater 202 starts heating, thus ensuring the insulation range is controlled within 200±10℃, until the humidity at the outlet 102 of the vacuum component 1 does not exceed the relative humidity value of the drying standard, at which point the insulation stops, allowing the vacuum component 1 to cool down with the furnace.

[0049] In some embodiments, the heater 202 is an LCD track heater. The LCD track heater has the following advantages: it uses high-quality nickel-chromium alloy wire as the heating element, enabling it to reach the set temperature in a short time, thus improving work efficiency; it has a flexible structure and flexible fixing methods; it is safe and reliable, using ceramic insulating material to maintain good insulation even at high temperatures; compared with traditional heaters, its service life is significantly extended, reducing replacement frequency and maintenance costs; it can be used with a temperature controller to achieve automatic control and precise adjustment of the heating temperature; in summary, the LCD track heater is characterized by high efficiency, flexibility, safety, and durability.

[0050] In some embodiments, the insulated box shell 201 includes a metal shell and an insulation layer fixed to the inner wall of the metal shell; the metal shell is large in size, and to prevent deformation, the outer wall of the metal shell is provided with reinforcing ribs 2011, and the insulation layer can be made of insulation cotton.

[0051] The heaters 202 on the four sides and top of the insulated box shell 201 are arranged in an array, which is beneficial for uniform heating of the vacuum component 1. The thermocouples 203 on the four sides of the insulated box shell 201 are arranged in an array, which can accurately reflect the temperature of the heating area of ​​the heater 202, so as to accurately adjust the temperature based on the measured temperature.

[0052] like Figure 2-4 and Figure 6 As shown, the following is an example of the specific structure of a heating box 2. Insulation cotton is laid all over the inner wall of the metal shell to form an insulated box shell 201. The insulated box shell 201 contains 64 LCD track heaters 202 and 16 thermocouples 203. Each heater 202 has a power of 10KW, and the thermocouples 203 have a measuring range of -50℃ to 700℃. For example... Figure 2 and Figure 6 As shown, 20 LCD track heaters 202 are arranged in an array (4 rows × 5 columns) on the inner walls of the front and rear sides of the insulated box shell 201. The lateral spacing between the LCD track heaters 202 is 1200 mm, and the longitudinal spacing is 640 mm. Figure 3and Figure 6 As shown, eight LCD track heaters 202 are arranged in an array (4 rows × 2 columns) on the inner walls of the left and right sides of the insulated box shell 201. The lateral spacing between the LCD track heaters 202 is 1600 mm, and the longitudinal spacing is 640 mm. Figure 4 and Figure 6 As shown, 12 LCD track heaters 202 are arranged in an array (3 rows × 4 columns) on the inner wall of the top of the insulated box shell 201. The horizontal spacing between the LCD track heaters 202 is 1200 mm, and the vertical spacing is 860 mm. The inner surface of the bottom of the insulated box shell 201 does not have track heaters 202, and is used to house the vacuum component 1.

[0053] In some embodiments, in step S2, the dry inert gas is dry nitrogen, dry helium, or a mixture of dry nitrogen and dry helium.

[0054] The advantages of using dry nitrogen are as follows: dry nitrogen has extremely stable and inert chemical properties, making it an ideal protective gas that can effectively prevent oxidation and corrosion of vacuum components 1; dry nitrogen has a density of 1.25 g / L, which is slightly higher than that of water vapor, and the density of the mixture of dry nitrogen and water vapor is between 0.6 g / L (the density of water vapor at 100℃) and 1.29 g / L (the density of air), which can better entrain water vapor from below and carry it upwards and out through the outlet 102; dry nitrogen has better fluidity and is more uniform; dry nitrogen can better transfer heat to the moisture that is difficult to evaporate in the corners of the interlayer, promoting evaporation.

[0055] The advantages of using dry helium are: compared to nitrogen, helium has extremely high diffusivity and permeability, allowing it to more easily penetrate microporous structures and remove deep-seated moisture. Furthermore, its good thermal conductivity, combined with the heating involved in the drying process, allows for better heat transfer to moisture that is difficult to evaporate in the corners of the layers, improving heat transfer efficiency. However, from a cost perspective, nitrogen is more economical.

[0056] The dry inert gas uses a mixture of dry helium and dry nitrogen, which results in better drying effect and efficiency.

[0057] It should be noted that dry inert gas can be replaced by dry air.

[0058] In some embodiments, the drying inert gas comprises 70%–90% dry helium and 10%–30% dry nitrogen by volume. The advantage of this gas mixture ratio is that the high proportion of helium, with its strong diffusion capabilities, can rapidly penetrate to the deepest parts of the system, "squeezing out" and carrying away any remaining water molecules, significantly shortening the drying time. Adding a certain proportion of nitrogen achieves an optimal balance between cost and performance. Helium is used to improve drying efficiency and depth, while nitrogen is used to reduce overall cost and maintain an inert environment.

[0059] In some embodiments, the preheating temperature range of the dry inert gas is 70°C to 90°C. That is, the temperature of the dry inert gas blown into the jacket of the vacuum component 1 by the dehumidifier is between 70°C and 90°C. This not only prevents high-temperature gas from carrying water vapor into the component cavity, but also transfers heat to the water that is difficult to evaporate at the corner of the jacket, thus promoting evaporation.

[0060] In some embodiments, in step S2, the humidity of the air outlet 102 is monitored in real time by a hygrometer installed at the air outlet 102, thereby enabling the monitoring of the drying status of the interlayer of the vacuum component 1.

[0061] In some embodiments, in step S2, the relative humidity value of the drying standard is 10%, which meets the standard of extreme dryness. When the relative humidity value detected by the hygrometer at the air outlet 102 is ≤10%, it means that the interlayer drying level of the vacuum component 1 has reached the requirement of extreme dryness.

[0062] In some embodiments, step S3 is further included: after step S2, after the interior of the vacuum component 1 has cooled to room temperature, a micro-endoscope is used to inspect the interlayer of the vacuum component 1 to observe whether there are water stains on the inner wall of the interlayer of the vacuum component 1. If no water stains are found, the drying operation is completed; otherwise, the vacuum component is dried again according to steps S1 and S2. By inspecting the interlayer of the vacuum component 1 for water stains using a micro-endoscope in step 3, the drying requirements of the vacuum component 1 can be further guaranteed.

[0063] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A method of drying moisture from a sandwich of a large size double shell vacuum component, characterized in that, It comprises the following steps: S1: the vacuum component after water pressure test is placed in a heating box, the heating box starts to uniformly heat from room temperature to 190 DEG C, then continues to keep warm in the temperature range of 190 DEG C-210 DEG C for a set time, so that the interlayer moisture of the vacuum component is vaporized to form water vapor, then stop heating and cool down with the furnace; wherein, the vacuum component is a fusion device vacuum chamber sector; the heating speed of the heating box from room temperature to 190 DEG C is ≤20 DEG C / h; the time of keeping warm in the temperature range of 190 DEG C-210 DEG C is 2.5-4 hours; S2: during the process of keeping warm and stopping heating and cooling down with the furnace of the heating box, a dehumidifier is used to continuously blow dry inert gas with a preheating temperature range of 70 DEG C-90 DEG C into the air inlet at the lower end of the vacuum component, so that the dry inert gas circulates through the interlayer of the vacuum component from bottom to top and flows out from the air outlet at the upper end of the vacuum component, the humidity of the air outlet is monitored in real time, until the humidity of the air outlet is not greater than the relative humidity value of the dry standard, which is 10%, stop blowing dry inert gas into the air inlet.

2. The method of claim 1, wherein the method further comprises, When the heating temperature in step S1 reaches 190 DEG C for the first time, the dehumidifier in step S2 starts to blow dry inert gas into the air inlet.

3. The method of claim 1, wherein the method further comprises, The heating box comprises a heat preservation box shell, a heater and a thermocouple; the heat preservation box shell is rectangular, the heater is distributed on the inner side of the four sides and the top of the heat preservation box shell, all the heaters are connected in parallel; the thermocouples are distributed on the inner side of the four sides of the heat preservation box shell.

4. The method of claim 3, wherein the method further comprises, The heater is an LCD track heater.

5. The method of claim 3, wherein the method further comprises, The heat preservation box shell comprises a metal shell and a heat preservation layer fixed on the inner wall of the metal shell; The heaters on the four sides and the top of the heat preservation box shell are arranged in an array; The thermocouples on the four sides of the heat preservation box shell are arranged in an array.

6. The method of claim 1, wherein the method further comprises, In step S2, the dry inert gas is dry nitrogen, dry helium or a mixture of dry nitrogen and dry helium; or the dry inert gas is replaced by dry air.

7. The method of claim 6, wherein the method further comprises, The dry inert gas is 70%-90% dry helium and 10%-30% dry nitrogen by volume.

8. The method of claim 1, wherein the method further comprises, In step S2, the humidity of the air outlet is monitored in real time by a hygrometer arranged at the air outlet.

9. The method of claim 1-8, wherein the method further comprises, It further comprises the following steps: S3: after step S2, after the vacuum component is cooled to room temperature, a micro endoscope is used to check the interlayer of the vacuum component, to observe whether there is water stain on the inner wall of the interlayer of the vacuum component, if there is no water stain, the drying operation is completed; otherwise, the vacuum component is dried again according to steps S1 and S2.

Images