Capacitance detection method and system for metal resonator gyroscope based on transimpedance amplification circuit

Abstract

The invention discloses a transimpedance amplification circuit-based capacitance detection method and a transimpedance amplification circuit-based capacitance detection system for a metal resonant gyroscope. The method comprises the following steps: converting periodic weak capacitance change generated by vibration displacement between a plate electrode and a metal harmonic oscillator of the metal resonant gyroscope in a resonant state into a corresponding alternating current signal; converting the alternating current signal into a corresponding voltage signal by using a transimpedance amplification circuit, and amplifying the voltage signal to obtain an amplified voltage signal; suppressing low-frequency drift and high-frequency noise interference in the amplified voltage signal through a filter to obtain a filtered voltage signal; and demodulating the filtered voltage signal, extracting amplitude information of a detection mode of the metal harmonic oscillator, and converting the amplitude information into an angular velocity signal of the metal resonant gyroscope. The technical problem that weak capacitance signals in the metal micro-hemispherical resonator gyroscope are difficult to effectively extract is solved.

Description

Technical Field

[0001] This invention relates to the field of metal resonant gyroscopes, and more specifically, to a capacitance detection method and system for a metal resonant gyroscope based on a transimpedance amplifier circuit. Background Technology

[0002] Metal micro-hemispherical resonant gyroscopes are a typical type of solid-state vibration gyroscope. Their sensing structure is made of metallic materials, offering advantages such as low cost, compact structure, and good shock resistance, making them particularly suitable for harsh environments involving high temperature, high shock, and strong vibration. These gyroscopes measure angular velocity by exciting a metal resonator to generate resonant vibrations in specific modes and sensing amplitude changes caused by angular velocity along the detection axis. A common detection method is electrostatic capacitance detection, which obtains minute displacement information by measuring the capacitance change between the resonator and a fixed electrode. However, since the capacitance change in the resonant state is typically in the picofarad range, the signal is extremely weak and easily affected by circuit noise and external interference. Therefore, high requirements are placed on the sensitivity, gain stability, and anti-interference capability of the detection circuit.

[0003] In existing technologies, various capacitance detection circuits, including charge amplifiers, switched-capacitor amplifiers, and ring diode structures, are commonly used to extract weak capacitance signals. While these solutions improve the signal-to-noise ratio and response speed to varying degrees, they generally suffer from insufficient gain, weak noise suppression, and limited dynamic response performance. For example, traditional charge amplifier structures exhibit poor stability in high-frequency applications; and switched-capacitor circuits have high requirements for process matching and timing control, making it difficult to meet stable operation requirements in complex environments. Furthermore, some existing solutions rely on empirical parameter selection, lacking system modeling and quantitative analysis support, resulting in unstable performance under different application conditions and hindering widespread application in high-precision inertial navigation.

[0004] Therefore, how to construct a weak capacitance detection circuit system with low noise, high gain, excellent dynamic response and system stability has become a key technical problem that urgently needs to be solved in the field of metal micro-hemispherical resonant gyroscope signal extraction. Summary of the Invention

[0005] This invention provides a capacitance detection method and system for a metal resonant gyroscope based on a transimpedance amplifier circuit, which at least solves the technical problem of the difficulty in effectively extracting weak capacitance signals in a metal micro-hemispherical resonant gyroscope.

[0006] According to one aspect of the present invention, a capacitance detection method for a metal resonant gyroscope based on a transimpedance amplifier circuit is provided, comprising: converting the periodic weak capacitance change between the plate electrode and the metal resonator of the metal resonant gyroscope in the resonant state due to vibration displacement into a corresponding alternating current signal; using a transimpedance amplifier circuit to convert the alternating current signal into a corresponding voltage signal, and amplifying the voltage signal to obtain an amplified voltage signal; suppressing low-frequency drift and high-frequency noise interference in the amplified voltage signal through a filter to obtain a filtered voltage signal; demodulating the filtered voltage signal to extract the amplitude information of the metal resonator detection mode, and converting the amplitude information into an angular velocity signal of the metal resonant gyroscope.

[0007] According to another aspect of the present invention, a capacitance detection system for a metal resonant gyroscope based on a transimpedance amplifier circuit is also provided, comprising: a detection module configured to convert the periodic weak capacitance change generated by the vibration displacement between the plate electrode and the metal resonator of the metal resonant gyroscope in the resonant state into a corresponding alternating current signal; a gain module configured to convert the alternating current signal into a corresponding voltage signal using a transimpedance amplifier circuit, and amplify the voltage signal to obtain an amplified voltage signal; a conditioning module configured to suppress low-frequency drift and high-frequency noise interference in the amplified voltage signal through a filter to obtain a filtered voltage signal; and a demodulation module configured to demodulate the filtered voltage signal, extract the amplitude information of the metal resonator detection mode, and convert the amplitude information into an angular velocity signal of the metal resonant gyroscope.

[0008] In this embodiment of the invention, the periodic, weak capacitance change generated by the vibration displacement between the plate electrode and the metal resonator in the resonant state of the metal resonant gyroscope is converted into a corresponding alternating current signal. A transimpedance amplifier circuit is used to convert the alternating current signal into a corresponding voltage signal, which is then amplified to obtain an amplified voltage signal. A filter is used to suppress low-frequency drift and high-frequency noise interference in the amplified voltage signal, resulting in a filtered voltage signal. The filtered voltage signal is then demodulated to extract the amplitude information of the metal resonator's detection mode, and this amplitude information is converted into the angular velocity signal of the metal resonant gyroscope. This solution addresses the technical problem of effectively extracting weak capacitance signals in metal micro-hemispherical resonant gyroscopes. Attached Figure Description

[0009] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and, together with their description, serve to explain the invention and do not constitute an undue limitation thereof. In the drawings:

[0010] Figure 1 This is a flowchart of an optional capacitance detection method for a metal resonant gyroscope based on a transimpedance amplifier circuit according to an embodiment of the present invention;

[0011] Figure 2 This is a schematic diagram of the structure of an optional capacitance detection system for a metal resonant gyroscope based on a transimpedance amplifier circuit according to an embodiment of the present invention;

[0012] Figure 3 This is a flowchart of another optional capacitance detection method for a metal resonant gyroscope based on a transimpedance amplifier circuit according to an embodiment of the present invention;

[0013] Figure 4 This is a structural diagram of a metal resonant gyroscope according to an embodiment of the present invention;

[0014] Figure 5 This is a circuit diagram of an optional transresistance circuit according to an embodiment of the present invention;

[0015] Figure 6 A schematic diagram of the structure of an electronic device suitable for implementing embodiments of the present disclosure is shown. Detailed Implementation

[0016] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0017] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0018] According to an embodiment of the present invention, a method embodiment for capacitance detection of a metal resonant gyroscope based on a transimpedance amplifier circuit is provided. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0019] Figure 1 This is a capacitance detection method for a metal resonant gyroscope based on a transimpedance amplifier circuit according to an embodiment of the present invention, such as... Figure 1 As shown, the method includes the following steps:

[0020] Step S102: The periodic weak capacitance change between the plate electrode and the metal resonator caused by vibration displacement in the resonant state of the metal resonant gyroscope is converted into a corresponding alternating current signal.

[0021] For example, when the metal resonant gyroscope is in a resonant state, the weak capacitance change that occurs over time due to the periodic change of the gap between the plate electrode and the metal resonator as the resonant vibration occurs is detected; a DC bias voltage is applied to the detection capacitor to convert the weak capacitance change into an AC current signal that is consistent with the resonant frequency of the metal resonator.

[0022] Step S104: Using a transimpedance amplifier circuit, the AC current signal is converted into a corresponding voltage signal, and the voltage signal is amplified to obtain an amplified voltage signal.

[0023] The transimpedance amplifier circuit includes an operational amplifier and a feedback network connected between the output and inverting input of the operational amplifier. The feedback network consists of a feedback resistor and a feedback capacitor connected in parallel. The feedback resistor converts the AC current signal into a voltage signal, and the feedback capacitor improves the phase margin of the transimpedance amplifier circuit. The operational amplifier has its non-inverting input grounded and its inverting input connected to an AC current signal for amplifying the voltage signal.

[0024] The parameters of the feedback network can be optimized using frequency domain, time domain, and phase margin analysis methods. For example, in the frequency domain, a transfer function model of the transimpedance amplifier circuit is established, and the gain response characteristics of the system under different combinations of feedback resistors and capacitors are analyzed. The values ​​of the feedback resistors and capacitors are adjusted to enable the system to obtain linear gain characteristics and stable gain amplitude within the target resonant frequency range. In the time domain, a unit step signal is applied to the input of the transimpedance amplifier circuit, and the output response curve of the transimpedance amplifier circuit is analyzed. The settling time and response speed of the transimpedance amplifier circuit are calculated, and the feedback resistors and capacitors are adjusted based on the settling time and response speed. In stability analysis, based on the gain-bandwidth product of the operational amplifier and combined with the parameters of the feedback resistor and input capacitor, the minimum value of the feedback capacitor is calculated to optimize the configuration of the feedback capacitor.

[0025] Step S106: The low-frequency drift and high-frequency noise interference in the amplified voltage signal are suppressed by a filter to obtain the filtered voltage signal.

[0026] Step S108: Demodulate the filtered voltage signal, extract the amplitude information of the metal resonator detection mode, and convert the amplitude information into the angular velocity signal of the metal resonator gyroscope.

[0027] For example, the voltage signal after filtering is demodulated to extract the amplitude information of the detection mode of the metal resonator; based on the functional mapping relationship between the vibration amplitude of the detection mode of the metal resonator gyroscope and the input angular velocity, the angular velocity information of the metal resonator gyroscope is calculated using the amplitude information.

[0028] To achieve high-precision acquisition and amplification of extremely weak capacitance change signals in a metallic micro-hemispherical resonant gyroscope, this application provides a capacitance detection system based on a transimpedance amplification structure. This system, targeting the picofarad (pF) level of capacitance micro-change characteristics, employs a strategy combining multi-stage gain amplification and filtering conditioning to effectively convert and extract capacitance changes into a measurable voltage signal, thereby improving the accuracy of signal analysis and the stability of the system.

[0029] Figure 2 This is a capacitance detection system for a metal resonant gyroscope based on a transimpedance amplifier circuit according to an embodiment of the present invention, such as... Figure 2As shown, the detection system comprises a detection module 22, a gain module 24, a conditioning module 26, and a demodulation module 28. The detection module 22 employs a high input impedance design, enabling it to sense minute changes in capacitance between the resonator and the detection electrode and convert them into corresponding AC voltage signals. The gain module 24 further amplifies the signal amplitude based on the preceding signal, enhancing the system's ability to process weak signals. The conditioning module 26 includes a first conditioning module 26-1 and a second conditioning module 26-2, which are high-pass and low-pass filters, respectively, used to suppress low-frequency drift and high-frequency interference, improving the quality and stability of the output signal. The demodulation module 28 extracts effective information from the AC signal and converts it into an output result corresponding to the angular velocity, providing accurate input data support for applications such as inertial navigation.

[0030] The detection module 22 is a crucial part of the entire detection system responsible for the initial signal conversion. It converts the minute capacitance changes in the metal micro-hemispherical resonant gyroscope caused by external motion into a voltage signal. Since these capacitance changes are in the picofarad range, the resulting current signal amplitude is extremely weak, requiring a circuit structure with low noise, high sensitivity, and good dynamic response characteristics for processing. The detection module 22 is implemented based on a high-input-impedance transimpedance amplifier circuit, which efficiently converts the tiny AC current generated by capacitance changes into a voltage output suitable for subsequent processing. To ensure stable operation of the system over a wide frequency range, parallel feedback capacitors are introduced into the feedback network path to improve phase margin, avoid high-frequency oscillations, and reduce system noise bandwidth. In this embodiment, the feedback capacitor design is optimized in conjunction with the system's gain-bandwidth product (GBW). If the capacitor value is too small, the circuit may exhibit unstable behavior due to phase lag; conversely, if the capacitor value is too large, it will sacrifice signal bandwidth while improving system stability, resulting in a longer response time. Under different feedback capacitor conditions, the system's performance in the frequency and time domains varies significantly. Therefore, a suitable balance needs to be found between signal amplification capability and system response speed to optimize the parameters of the feedback network. Specifically, frequency response analysis shows that as the feedback capacitor increases, the circuit gain decreases, but the system phase margin significantly improves, and stability is enhanced. Time-domain analysis indicates that configuring the feedback capacitor can effectively reduce overshoot and oscillation, making the voltage output waveform more stable and reliable. When the feedback capacitor is set within a preset capacitance range, such as 0.3 to 0.6 pF, preferably 0.43 pF, the system can achieve a relatively fast response speed and a moderate output amplitude while maintaining stability.

[0031] Gain module 24 is used to amplify the voltage signal. To further enhance the system's response to weak capacitive signals and meet the signal amplitude requirements of subsequent processing stages, gain module 24 is set after the output of detection circuit 22. As a subsequent stage in the voltage amplification path, this module is used to amplify the small signal that has been converted into voltage form again to ensure that the signal amplitude reaches the dynamic range required for demodulation and data processing. Gain module 24 adopts an amplifier circuit structure with linear characteristics and stable phase response to minimize signal distortion under different frequency conditions. At the same time, this module needs to improve the overall signal strength without significantly introducing additional noise; therefore, the amplifier itself should have low noise and high bandwidth performance characteristics.

[0032] The conditioning module 26 is used to condition the voltage signal. To improve the system's anti-interference capability in complex electromagnetic environments and further optimize the signal's spectral characteristics, a conditioning module is provided. This module consists of a high-pass filter and a low-pass filter, employing a passive filter network structure. It effectively removes non-target frequency band interference components from the signal, ensuring the stability and purity of the output signal. The conditioning module 26 includes a first conditioning module 26-1 and a second conditioning module 26-2. The first conditioning module 26-1 is a high-pass filter located between the detection module 22 and the gain module 24, constructed using a series capacitor and a parallel grounding resistor. It is mainly used to shield DC drift and low-frequency noise, preventing them from causing cumulative interference to subsequent circuits. The second conditioning module 26-2 is a low-pass filter deployed in the system's output path, implemented using an RC network. It effectively suppresses high-frequency noise, electromagnetic interference, and parasitic signals, preventing them from entering the demodulation module 28, thereby ensuring the validity and identifiability of the final signal. The conditioning module 26 can maintain a good signal-to-noise ratio within the target operating frequency band, significantly improving the output quality and anti-interference stability of the overall detection system.

[0033] The demodulation module 28 is used to extract the envelope features from the resonant signal. By effectively demodulating the amplitude of the AC voltage signal, it obtains an output quantity proportional to the amplitude of the metal resonator's motion, thereby indirectly reflecting the magnitude of the input angular velocity. Based on principles such as coherent demodulation or envelope detection, the demodulation module 28 decouples the amplitude information of the AC signal into a time-varying low-frequency signal through phase matching with a reference signal. After further filtering, this low-frequency signal outputs a stable angular velocity measurement result. High linearity and low distortion must be maintained during demodulation to ensure that the final obtained angular velocity signal has good dynamic response characteristics and measurement accuracy.

[0034] Figure 3 This is another capacitance detection method for a metal resonant gyroscope based on a transimpedance amplifier circuit according to an embodiment of the present invention, applied to the capacitance detection system described above, such as... Figure 3 As shown, the method includes the following steps:

[0035] Step S302: Construct the transimpedance amplifier circuit.

[0036] Metal micro-hemispherical resonant gyroscope, such as Figure 4 The image shows a solid-state vibrating gyroscope, whose sensitive structure mainly includes a metal resonator 42 made of alloy material, and a plate electrode 44, a lip tooth 46 and a base 48 that cooperate with it.

[0037] Under electrostatic excitation, the metal resonator is driven into a resonant state, causing its detection capacitance, which functions as a capacitive sensor, to exhibit continuous and periodic minute changes. These capacitance fluctuations cause changes in charge distribution, further generating an alternating current signal with extremely low amplitude. To achieve efficient extraction and amplification of this type of weak current signal, this embodiment constructs a transimpedance amplifier circuit structure based on a high input impedance operational amplifier.

[0038] like Figure 5 As shown, the transimpedance amplifier circuit mainly includes a high input impedance operational amplifier A and a feedback resistor R. f Feedback capacitor C f Detection capacitor C x and bias voltage source V b The circuit comprises several components. A detection capacitor, connected in the input signal path, senses the minute capacitance changes caused by the resonant motion between the metal micro-hemispherical resonator and the plate electrode. A bias voltage source provides a stable DC bias voltage to the detection capacitor, causing it to generate a time-varying charge in the resonant state, thereby exciting a weak AC current signal. This AC current is input to the inverting input of an operational amplifier, whose non-inverting input is grounded, forming a transimpedance amplification structure. The operational amplifier output is connected to its inverting input via a feedback resistor, achieving voltage conversion of the input micro-current. A feedback capacitor and feedback resistor are connected in parallel to adjust the frequency response characteristics of the feedback path, improving the phase margin and system stability of the circuit, and suppressing high-frequency noise. The entire transimpedance amplification circuit structure ensures the complete introduction of the current signal through a high-impedance input, completes voltage amplification and filtering through a transimpedance feedback network, and ultimately achieves stable extraction and real-time response of the resonant signal.

[0039] The output voltage of the transimpedance amplifier is:

[0040] C x =C0+C m sinωt

[0041]

[0042] In the above formula, C x C is the capacitance being measured, C0 is the constant capacitance of the sensor, and C...m V is the variable capacitance of the sensor. b For a fixed bias voltage, ω is the resonant frequency, and Z is the resonant frequency. f It is R f and C f The parallel impedance, t is time, and I is the parallel impedance under a fixed bias voltage V. b Below, the constantly changing C x A change in charge generates a continuous, weak current, V out This is the output voltage of the transimpedance amplifier.

[0043] Step S304: Adjust the parameters of the feedback network of the transimpedance amplifier circuit.

[0044] To comprehensively evaluate the performance of the transimpedance amplifier circuit in the detection system, it is necessary to analyze it from multiple dimensions, including frequency domain response, time domain characteristics, and system stability, in order to optimize the parameters of the feedback network. In this embodiment, based on the ideal operational amplifier model and combined with the virtual short and virtual open characteristics, a unified modeling framework is established to quantitatively analyze the impact of feedback network parameters on the key performance of the system.

[0045] 1) Frequency domain analysis.

[0046] In this transimpedance amplifier structure, the input current generated by the sensing capacitor flows entirely through the feedback network. The feedback network consists of a feedback resistor and a capacitor connected in parallel, and its equivalent impedance can be expressed as:

[0047]

[0048] Under ideal assumptions such as neglecting open-loop gain and input parasitic capacitance, the output voltage of the circuit can be expressed as:

[0049]

[0050] Where j represents the imaginary part of the complex number, V in This represents the input voltage. The frequency domain transfer function of a transimpedance amplifier circuit can be expressed as:

[0051]

[0052] Therefore, when the operating frequency is much higher than the pole frequency of the feedback network, the gain is proportional to the measurement capacitance and tends to be constant, while the output signal has a 180° phase shift compared to the input. However, under low-frequency conditions, the system gain increases linearly with frequency.

[0053] 2) Phase margin analysis.

[0054] To prevent output oscillation caused by phase lag in the high-frequency band, a capacitor C is added to the feedback branch. fUsed for phase compensation. In this embodiment, the lower limit of the feedback capacitor is theoretically determined by the gain-bandwidth product f of the operational amplifier. GBW With feedback factors The determination is based on the following estimation formula:

[0055]

[0056] If the feedback capacitor is too small, it may result in insufficient phase margin and instability; if it is too large, it will slow down the circuit response. In this embodiment, by selecting a reasonable value for the feedback capacitor, the system has a good phase margin within the operating frequency band, ensuring the stability and reliability of the closed-loop system and avoiding system oscillation problems caused by an insufficiently large capacitor.

[0057] 3) Time-domain analysis

[0058] In time-domain analysis, if a unit step signal is applied to the input, the Laplace transform of the input signal is V. in (s)=1 / s, and the Laplace form of the corresponding output voltage can be written as:

[0059]

[0060] Where s is a complex variable in the complex frequency domain, the inverse transform of the above expression yields the response in the time domain as follows:

[0061]

[0062] From this expression, we can see that the initial value of the output voltage is (-C). x / C f The voltage then gradually decreases to 0V. This can be achieved by adjusting R... f and C f The product of these factors can control the response speed, thereby optimizing transient response while ensuring system stability.

[0063] In summary, through in-depth modeling and analysis of the transimpedance amplifier circuit in the frequency and time domains, the influence relationship between the feedback resistor and capacitor parameters on the circuit gain, response speed, and stability was determined. Based on the above influence relationship, the feedback network parameters were systematically optimized to achieve stable extraction and rapid response of weak capacitor signals.

[0064] Step S306: The AC current signal is processed using a transimpedance amplifier circuit.

[0065] When the metal micro-hemispherical resonant gyroscope is in a resonant state, its detection capacitor will generate a tiny capacitance signal that changes periodically with time. Under the action of DC bias voltage, this capacitance signal will induce a tiny alternating current across the capacitor.

[0066] To achieve efficient detection of this weak AC current signal, this embodiment utilizes an operational amplifier with high input impedance to construct a transimpedance amplifier circuit, as described above. This transimpedance amplifier circuit is used to convert current to voltage and performs phase compensation for system stability. After being processed by the transimpedance amplifier, the AC current is converted into an AC voltage signal with an amplitude proportional to the input current at the output terminal, thus completing the initial signal extraction.

[0067] Step S308: Perform signal conditioning on the voltage signal.

[0068] The signal conditioning process includes two stages: a series high-pass filter and a low-pass filter, which are used to filter out low-frequency and high-frequency interference components, respectively.

[0069] The high-pass filter, located between the preamplifier circuit and the subsequent gain circuit, consists of a series capacitor and a grounding resistor. It primarily removes potential DC bias and low-frequency drift interference from the signal, thereby improving the system's response to the effective AC components. The low-pass filter, located at the end of the voltage signal output path, effectively suppresses high-frequency noise and parasitic interference signals through a typical RC filter network, preventing them from affecting subsequent demodulation and data acquisition processes.

[0070] By combining the high-pass and low-pass filter circuits described above, the spectral characteristics of the signal can be significantly improved. While retaining the useful signal components, unnecessary interference frequency bands are removed, thereby optimizing the signal waveform and improving the output stability and signal-to-noise ratio of the entire detection system.

[0071] Step S310: Demodulation processing is performed.

[0072] The filtered voltage signal is demodulated to extract the amplitude information of the metal resonator detection mode, and the amplitude information is converted into the angular velocity signal of the metal resonator gyroscope.

[0073] Specifically, demodulation processing can employ methods such as envelope detection, phase-sensitive demodulation, or quadrature demodulation to convert the high-frequency carrier signal into a low-frequency or DC amplitude signal. By eliminating the carrier component in the signal through demodulation techniques, the modulation amplitude, which is proportional to the angular velocity, is retained, thus achieving equivalent signal restoration. Subsequently, according to the system's preset calibration parameters, the amplitude signal can be converted into a corresponding angular velocity output, realizing the physical quantity conversion from capacitance change to angular velocity.

[0074] This demodulation process not only significantly improves the identifiability and measurability of the signal, but also ensures the system's sensitive response and stable output to changes in angular velocity under different operating environments.

[0075] Figure 6 A schematic diagram of an electronic device suitable for implementing embodiments of the present disclosure is shown. It should be noted that... Figure 6 The electronic device shown is merely an example and should not be construed as limiting the functionality and scope of the embodiments disclosed herein.

[0076] like Figure 6 As shown, the electronic device includes a central processing unit (CPU) 1001, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 1002 or a program loaded from a storage section 1008 into a random access memory (RAM) 1003. The RAM 1003 also stores various programs and data required for system operation. The CPU 1001, ROM 1002, and RAM 1003 are interconnected via a bus 1004. An input / output (I / O) interface 1005 is also connected to the bus 1004.

[0077] The following components are connected to I / O interface 1005: an input section 1006 including a keyboard, mouse, etc.; an output section 1007 including a cathode ray tube (CRT), liquid crystal display (LCD), etc., and speakers, etc.; a storage section 1008 including a hard disk, etc.; and a communication section 1009 including a network interface card such as a LAN card, modem, etc. The communication section 1009 performs communication processing via a network such as the Internet. A drive 1010 is also connected to I / O interface 1005 as needed. A removable medium 1011, such as a disk, optical disk, magneto-optical disk, semiconductor memory, etc., is installed on drive 1010 as needed so that computer programs read from it can be installed into storage section 1008 as needed.

[0078] The above are merely preferred embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A capacitance detection method for a metal resonant gyroscope based on a transimpedance amplifier circuit, characterized in that, include: The periodic weak capacitance change between the plate electrode and the metal resonator caused by vibration displacement in the resonant state of the metal resonant gyroscope is converted into a corresponding alternating current signal. An AC current signal is converted into a corresponding voltage signal using a transimpedance amplifier circuit, and the voltage signal is amplified to obtain an amplified voltage signal. The voltage signal after amplification is suppressed by a filter and then filtered to obtain the filtered voltage signal. The filtered voltage signal is demodulated to extract the amplitude information of the metal resonator detection mode, and the amplitude information is converted into the angular velocity signal of the metal resonator gyroscope.

2. The method according to claim 1, characterized in that, The periodic, weak capacitance changes generated by the vibration displacement between the plate electrode and the metal resonator of a metal resonant gyroscope in the resonant state are converted into corresponding alternating current signals, including: When the metal resonant gyroscope is in a resonant state, the weak capacitance change over time is detected by the periodic change of the gap between the plate electrode and the metal resonator as the resonant vibration occurs. A DC bias voltage is applied to the detection capacitor to convert the weak capacitance change into an AC current signal that matches the resonant frequency of the metal resonator.

3. The method according to claim 1, characterized in that, The transimpedance amplifier circuit includes: An operational amplifier with its non-inverting input terminal grounded and its inverting input terminal connected to an AC current signal; The feedback network is connected between the output terminal and the inverting input terminal of the operational amplifier. The feedback network consists of a feedback resistor and a feedback capacitor connected in parallel. The feedback resistor is used to convert the AC current signal into a voltage signal, and the feedback capacitor is used to improve the phase margin of the transimpedance amplifier circuit.

4. The method according to claim 3, characterized in that, Before utilizing the transimpedance amplifier circuit, the method also includes optimizing the parameters of the feedback network using frequency domain, time domain, and phase margin analysis methods.

5. The method according to claim 4, characterized in that, Frequency domain, time domain, and phase margin analysis methods are used to optimize the parameters of the feedback network, including: In the frequency domain, a transfer function model of the transimpedance amplifier circuit is established, and the gain response characteristics of the system under different combinations of feedback resistors and feedback capacitors are analyzed. The values ​​of the feedback resistors and feedback capacitors are adjusted so that the system can obtain linear gain characteristics and stable gain amplitude within the target resonant frequency range. In the time domain, a unit step signal is applied to the input terminal of the transimpedance amplifier circuit. The output response curve of the transimpedance amplifier circuit is analyzed, the settling time and response speed of the transimpedance amplifier circuit are calculated, and the feedback resistor and feedback capacitor are adjusted based on the settling time and response speed. In stability analysis, the minimum value of the feedback capacitor is calculated based on the gain-bandwidth product of the operational amplifier and the parameters of the feedback resistor and the input capacitor, so as to optimize the configuration of the feedback capacitor.

6. The method according to claim 1, characterized in that, The filtered voltage signal is demodulated to extract the amplitude information of the metal resonator detection mode, and the amplitude information is converted into the angular velocity signal of the metal resonator gyroscope, including: The filtered voltage signal is demodulated to extract the amplitude information of the metal resonator detection mode; Based on the functional mapping relationship between the vibration amplitude of the detected mode and the input angular velocity of the metal resonant gyroscope, the angular velocity information of the metal resonant gyroscope is calculated using the amplitude information.

7. A capacitance detection system for a metal resonant gyroscope based on a transimpedance amplifier circuit, characterized in that, include: The detection module is configured to convert the periodic weak capacitance change between the plate electrode and the metal resonator caused by vibration displacement in the resonant state of the metal resonant gyroscope into a corresponding alternating current signal. The gain module is configured to use a transimpedance amplifier circuit to convert an AC current signal into a corresponding voltage signal, and amplify the voltage signal to obtain an amplified voltage signal. The conditioning module is configured to suppress low-frequency drift and high-frequency noise interference in the amplified voltage signal through a filter, thereby obtaining a filtered voltage signal. The demodulation module is configured to demodulate the filtered voltage signal, extract the amplitude information of the metal resonator detection mode, and convert the amplitude information into the angular velocity signal of the metal resonator gyroscope.

8. A computer-readable storage medium, characterized in that, The computer-readable storage medium includes a stored program, wherein, when the program is executed, it controls the device on which the computer-readable storage medium is located to perform the method of any one of claims 1 to 6.

9. A computer device, characterized in that, include: Memory and processor The memory stores computer programs; A processor for executing a computer program stored in memory, wherein the computer program, when executed, causes the processor to perform the method of any one of claims 1 to 6.

10. A computer program product, comprising a computer program, characterized in that, When executed by a processor, the computer program implements the steps of the method of any one of claims 1 to 6.

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