Grinding wheel dressing equipment, grinding wheel dressing method, device, equipment, product and medium

Abstract

The invention provides grinding wheel dressing equipment, a grinding wheel dressing method, a device, equipment, a product and a medium, and belongs to the technical field of semiconductor manufacturing. The grinding wheel dressing equipment comprises a grinding head which comprises a grinding main shaft (1) and a grinding wheel (2), the grinding wheel (2) is installed on the grinding main shaft (1), and a plurality of grinding teeth (201) are arranged on the grinding wheel (2) in a protruding mode; the grinding disc is used for bearing the finishing plate (3); the driving mechanism is used for driving the grinding main shaft (1) so as to drive the grinding wheel (2) to rotate and translate, so that the finishing plate (3) is used for finishing the grinding teeth (201); and the controller is used for acquiring a first distance between the first end face of the sanding tooth (201) and a target horizontal plane (601) and controlling the driving mechanism to drive the grinding main shaft (1) according to the first distance so as to finish the sanding tooth (201). According to the technical scheme, automatic dressing of the grinding wheel grinding teeth can be achieved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a grinding wheel dressing device, grinding wheel dressing method, apparatus, equipment, product, and medium. Background Technology

[0002] In wafer fabrication, surface testing is required to ensure wafer quality. Before testing, the wafer surface needs to be thinned and polished using a grinding wheel 2. When the grinding wheel 2 reaches the end of its service life and its polishing layer is completely consumed, it needs to be replaced with a new grinding wheel 3. After the new grinding wheel 3 is installed, if there is a difference in the height of the abrasive teeth, it will cause grinding marks on the wafer surface. Therefore, after replacing the grinding wheel 3, a grinding wheel 3 dressing process is required.

[0003] In the existing grinding wheel dressing scheme, such as Figures 1 to 4 As shown, the typical procedure involves first lowering the height of the grinding spindle 1, then using a calibration block set 8 of a specific thickness placed on the grinding table 6 to calibrate the height, i.e., to locate the highest point of the grinding teeth. Then, a dressing plate 3 is used for dressing to unify the height of the grinding teeth. However, in this method, the operator must place their hands under the grinding wheel 3, posing a significant safety hazard. Furthermore, manual calibration results in a lengthy dressing process, making it difficult to guarantee accuracy, and human error may even lead to dressing failure. Summary of the Invention

[0004] This invention provides a grinding wheel dressing device, grinding wheel dressing method, apparatus, equipment, product, and medium, which can realize the automated dressing of grinding wheel teeth.

[0005] To achieve the above objectives, the technical solution adopted in the embodiments of the present invention is as follows:

[0006] A grinding wheel dressing device, comprising:

[0007] A grinding head includes a grinding spindle and a grinding wheel, wherein the grinding wheel is mounted on the grinding spindle, and a plurality of grinding teeth are protruding on a first surface of the grinding wheel, the first surface being a surface of the grinding wheel facing away from the grinding spindle;

[0008] A grinding disc is located in the space below the grinding head, and the grinding disc is used to support the trimming plate.

[0009] A drive mechanism is connected to the grinding spindle. The drive mechanism is used to drive the grinding spindle to drive the grinding wheel to rotate and translate, so that the dressing plate contacts the grinding teeth and dresses the grinding teeth.

[0010] A controller is connected to the drive mechanism. The controller is used to obtain a first distance between the first end face of the abrasive tooth and the target horizontal plane, and control the drive mechanism to drive the grinding spindle according to the first distance to achieve the dressing of the abrasive tooth. The first end face of the abrasive tooth is the end face of the abrasive tooth facing the grinding disc, and the target horizontal plane is the horizontal plane where the upper end face of the grinding disc is located.

[0011] In some embodiments, the grinding head further includes: a mounting platform, a first end face of which is fixedly connected to one end of the grinding spindle, and a second end face of which is used to mount the grinding wheel;

[0012] The grinding disc includes a mounting bracket and a grinding table. The grinding table is mounted on the mounting bracket and is used to support the trimming plate. A distance sensor is mounted on the mounting bracket and is used to detect the first distance.

[0013] This invention also provides a grinding wheel dressing method, applied to the grinding wheel dressing equipment described above. The grinding wheel dressing method includes:

[0014] When the grinding head is in the initial position, the control drive mechanism drives the grinding spindle to rotate. When the grinding head is in the initial position, the distance between the grinding wheel and the dressing plate is greater than 0.

[0015] The second distance between the first surface of the grinding wheel and the target horizontal plane is obtained, as well as the first distance between the first end face of each grinding tooth and the target horizontal plane detected by the distance sensor;

[0016] Based on the second distance and each of the first distances, determine the first position information and the second position information. The first position information is used to indicate the first position where grinding wheel dressing begins, and the second position information is used to indicate the second position where grinding wheel dressing ends.

[0017] The sand teeth are adjusted based on the first and second position information.

[0018] In some embodiments, determining the first location information and the second location information based on the second distance and various first distances includes:

[0019] Obtain the thickness of the trimming plate;

[0020] By comparing each first distance, the maximum and minimum values ​​of each first distance are determined;

[0021] Based on the thickness, maximum value, and minimum value of the trimming plate, the first position information and the second position information are determined respectively.

[0022] In some embodiments, the first position information and the second position information are determined based on the thickness, maximum value, and minimum value of the trimming plate, respectively, including:

[0023] The maximum trimming distance is determined based on the difference between the maximum value and the thickness of the trimming plate, and the minimum trimming distance is determined based on the difference between the minimum value and the thickness of the trimming plate.

[0024] The first position information is determined based on the difference between the second distance and the maximum trimming distance, and the second position information is determined based on the difference between the second distance and the minimum trimming distance.

[0025] In some embodiments, the grinding teeth are trimmed based on the first position information and the second position information, including:

[0026] Based on the first position information, the drive mechanism is controlled to drive the grinding spindle to move downward, thereby moving the grinding wheel to the first position;

[0027] The control drive mechanism drives the grinding spindle to rotate, thereby rotating the grinding wheel and causing friction between the dressing plate and the grinding teeth.

[0028] At preset intervals, the drive mechanism is controlled to drive the grinding spindle downwards a preset distance until the grinding wheel moves to the second position.

[0029] This invention also provides a grinding wheel dressing device, comprising:

[0030] The first control module is used to control the drive mechanism to drive the grinding spindle to rotate when the grinding head is in the initial position, wherein the distance between the grinding wheel and the dressing plate is greater than 0 when the grinding head is in the initial position;

[0031] The first acquisition module is used to acquire, through a distance sensor, a second distance between the first surface of the grinding wheel and the target horizontal plane, and a first distance between the first end face of each grinding tooth and the target horizontal plane;

[0032] The first processing module is used to determine the first position information and the second position information based on the second distance and each of the first distances. The first position information is used to indicate the position where the grinding wheel dressing begins, and the second position information is used to indicate the position where the grinding wheel dressing ends.

[0033] The second control module is used to trim the sand teeth based on the first position information and the second position information.

[0034] In some embodiments, the first processing module includes:

[0035] The first acquisition unit is used to acquire the thickness of the trimming plate;

[0036] The first processing unit is used to determine the maximum and minimum values ​​among the various first distances by comparing them.

[0037] The second processing unit is used to determine the first position information and the second position information based on the thickness, maximum value and minimum value of the trimming plate, respectively.

[0038] In some embodiments, the second processing unit includes:

[0039] The first processing subunit is used to determine the maximum trimming distance based on the difference between the maximum value and the thickness of the trimming plate, and to determine the minimum trimming distance based on the difference between the minimum value and the thickness of the trimming plate.

[0040] The second processing subunit is used to determine the first position information based on the difference between the second distance and the maximum trimming distance, and to determine the second position information based on the difference between the second distance and the minimum trimming distance.

[0041] In some embodiments, the second control module includes:

[0042] The first control unit is used to control the drive mechanism to drive the grinding spindle to move downward according to the first position information, so as to drive the grinding wheel to the first position;

[0043] The second control unit is used to control the drive mechanism to drive the grinding spindle to rotate, thereby driving the grinding wheel to rotate and causing friction between the dressing plate and the grinding teeth.

[0044] The third control unit is used to control the drive mechanism to drive the grinding spindle downward a preset distance at preset intervals until the grinding wheel moves to the second position.

[0045] This invention also provides a control device, including a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the computer program, it implements the grinding wheel dressing method as described above.

[0046] This invention also provides a computer program product, including computer instructions that, when executed by a processor, implement the steps of the above-described grinding wheel dressing method.

[0047] To achieve the above objectives, embodiments of the present invention provide a readable storage medium having a program or instructions stored thereon, which, when executed by a processor, implement the steps in the above-described grinding wheel dressing method.

[0048] The beneficial effects of this invention are:

[0049] In this embodiment, the controller can accurately control the movement of the grinding head by obtaining the first distance between the first end face of the grinding tooth and the target horizontal plane, so that the dressing plate can accurately grind the grinding tooth of the grinding wheel. In this way, the grinding wheel can be dressed quickly and automatically, reducing dressing time, improving equipment uptime, avoiding safety risks and calibration errors during the manual calibration process, and effectively improving the success rate of grinding wheel dressing. Attached Figure Description

[0050] Figure 1 This diagram illustrates the initial state of the grinding wheel before dressing in the existing scheme.

[0051] Figure 2 express Figure 1 A schematic diagram showing the grinding spindle descending to a certain height.

[0052] Figure 3 A schematic diagram illustrating the calibration of the calibration block group in the existing scheme;

[0053] Figure 4 This diagram illustrates the dressing of the grinding wheel in the existing scheme.

[0054] Figure 5 A front view showing the structure of the grinding wheel dressing device according to an embodiment of the present invention;

[0055] Figure 6 A top view showing the structure of the grinding wheel dressing device according to an embodiment of the present invention;

[0056] Figure 7 A schematic flowchart illustrating the grinding wheel dressing method according to an embodiment of the present invention;

[0057] Figure 8 This diagram illustrates the sensor detection-related aspects of the grinding wheel dressing method according to an embodiment of the present invention.

[0058] Figure 9 This is a schematic diagram illustrating the structure of the grinding wheel dressing device according to an embodiment of the present invention. Detailed Implementation

[0059] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0060] To address the aforementioned technical problems, embodiments of the present invention provide a grinding wheel dressing device, a grinding wheel dressing method, an apparatus, equipment, a product, and a medium, which can achieve automated dressing of grinding wheel teeth.

[0061] like Figures 5-6 As shown, an embodiment of the present invention provides a grinding wheel dressing device, comprising:

[0062] The grinding head includes a grinding spindle 1 and a grinding wheel 2. The grinding wheel 2 is mounted on the grinding spindle 1. A plurality of grinding teeth 201 are protruding on the first surface of the grinding wheel 2. The first surface is the surface of the grinding wheel 2 facing away from the grinding spindle 1.

[0063] The grinding disc, located in the space below the grinding head, is used to support the trimming plate 3;

[0064] The drive mechanism is connected to the grinding spindle 1. The drive mechanism is used to drive the grinding spindle 1 to drive the grinding wheel 2 to rotate and translate, so that the dressing plate 3 contacts the grinding teeth 201 and dresses the grinding teeth 201.

[0065] A controller, connected to the drive mechanism, is used to obtain a first distance between the first end face of the grinding tooth 201 and the target horizontal plane 601, and controls the drive mechanism to drive the grinding spindle 1 according to the first distance to achieve dressing of the grinding tooth 201. The first end face of the grinding tooth 201 is the end face of the grinding tooth 201 facing the grinding disk, and the target horizontal plane 601 is the horizontal plane where the upper end face of the grinding disk is located. Specifically, the controller can execute various steps in the grinding wheel dressing method provided in the embodiments of the present invention; details can be found in the descriptions of the various embodiments of the grinding wheel dressing method below.

[0066] In this embodiment, the controller can accurately control the movement of the grinding head by obtaining the first distance between the first end face of the grinding tooth 201 and the target horizontal plane 601, so that the dressing plate 3 can accurately grind the grinding teeth of the grinding wheel 2. In this way, the grinding wheel can be dressed quickly and automatically, reducing dressing time, improving equipment uptime, avoiding safety risks and calibration errors during the manual calibration process, and effectively improving the success rate of grinding wheel dressing.

[0067] In some embodiments, the grinding head further includes: a mounting platform 4, the first end face of the mounting platform 4 being fixedly connected to one end of the grinding spindle 1, and the second end face of the mounting platform 4 being used to mount the grinding wheel 2;

[0068] The grinding disc includes a mounting bracket 5 and a grinding table 6. The grinding table 6 is mounted on the mounting bracket 5 and is used to support the trimming plate 3. A distance sensor 7 is mounted on the mounting bracket 5 and is used to detect a first distance.

[0069] It is understandable that the target horizontal plane 601 is the horizontal plane where the upper surface of the grinding table 6 is located.

[0070] In this embodiment, the controller can accurately control the movement of the grinding head by acquiring the first distance between the first end face of each grinding tooth 201 detected by the distance sensor 7 and the target horizontal plane 601, so that the dressing plate 3 can accurately grind the grinding teeth of the grinding wheel 2. In this way, the grinding wheel can be dressed quickly and automatically, reducing dressing time, improving equipment uptime, avoiding safety risks and calibration errors during the manual calibration process, and effectively improving the success rate of grinding wheel dressing.

[0071] like Figure 7 As shown, this embodiment of the invention also provides a grinding wheel dressing method, applied to the grinding wheel dressing equipment described above. The grinding wheel dressing method includes:

[0072] Step 701: When the grinding head is in the initial position, control the drive mechanism to drive the grinding spindle 1 to rotate. When the grinding head is in the initial position, the distance between the grinding wheel 2 and the dressing plate 3 is greater than 0.

[0073] Here, the initial position can usually be the starting position when the grinding head has not moved downwards, such as the highest position that the grinding head can reach, or a certain position after the grinding head has moved downwards. It should be noted that the initial position of the grinding head must ensure that there is a certain gap between the grinding wheel 2 and the dressing plate 3 placed on the grinding table 6 (that is, the distance between the two must be greater than 0).

[0074] Step 702: Obtain the second distance between the first surface of the grinding wheel 2 and the target horizontal plane 601, and the first distance between the first end face of each grinding tooth 201 detected by the distance sensor 7 and the target horizontal plane 601.

[0075] like Figure 5 As shown, the first surface of the grinding wheel 2 is the surface of the grinding wheel 2 facing away from the mounting platform 4, and the grinding teeth 201 are disposed on this first surface. Figure 8 As shown, the second distance between the first surface and the target horizontal plane 601 can be represented by A0, and the first distance between the first end face of each abrasive tooth 201 (i.e., the end face of the abrasive tooth 201 facing the grinding disc) and the target horizontal plane 601 can be represented as: L X1 L X2 L X3 ...

[0076] Step 703: Based on the second distance and each of the first distances, determine the first position information and the second position information. The first position information is used to indicate the first position where grinding wheel dressing begins, and the second position information is used to indicate the second position where grinding wheel dressing ends.

[0077] It should be noted that the first and second location information here can specifically be distance data, for example, the distance data A in the first location information. max Indicates that the grinding head moves downwards (A). max When the distance is specified, the grinding wheel 2 moves to the first position (the position where wheel dressing begins); correspondingly, the distance data A in the first position information... min Indicates that the grinding head moves downwards (A). min When the distance is equal to the size, the grinding wheel 2 moves to the second position (the position where the grinding wheel dressing ends).

[0078] Step 704: Adjust the sand teeth 201 according to the first position information and the second position information.

[0079] Specifically, based on the first position information, the drive mechanism can be controlled to drive the grinding spindle 1 downward until the grinding wheel 2 moves to the first position. At this time, some of the grinding teeth 201 contact the dressing plate 3. The controller can control the drive mechanism to drive the grinding spindle 1 to rotate, so that friction is generated between the dressing plate 3 and the grinding teeth 201. The dressing plate 3 grinds the grinding teeth 201 that are in contact with it. Afterward, based on the second position information, the grinding spindle 1 can be controlled to move downward a certain distance (preset distance) at intervals (preset duration) until the grinding wheel 2 moves to the second position, completing the grinding wheel dressing process.

[0080] In this embodiment, by acquiring the first distance between the first end face of each abrasive tooth 201 detected by the distance sensor 7 and the target horizontal plane 601, the start and end positions of the grinding wheel dressing can be determined accordingly, thereby precisely controlling the movement of the grinding head and enabling the dressing plate 3 to accurately grind the abrasive teeth of the grinding wheel 2. In this way, the grinding wheel can be dressed quickly and automatically, reducing dressing time, improving equipment uptime, and avoiding safety risks and calibration errors during the manual calibration process, effectively improving the success rate of grinding wheel dressing.

[0081] In some embodiments, step 703, determining the first position information and the second position information based on the second distance and each of the first distances, includes: obtaining the thickness of the trimming plate 3 (denoted by T); and determining the maximum value (denoted by L) among the first distances by comparing them. max (represented by L) and minimum value (using L) min (Representation); Based on the thickness, maximum value, and minimum value of the trimming plate 3, determine the first position information and the second position information respectively.

[0082] like Figure 8 As shown, when the trimming plate 3 is placed on the grinding table 6, the distance between the upper surface 9 of the trimming plate 3 and the target horizontal plane 601 is the thickness T of the trimming plate 3.

[0083] In some specific examples, the first position information and the second position information are determined based on the thickness, maximum value, and minimum value of the trimming plate 3, including:

[0084] (a) Determine the maximum trimming distance based on the difference between the maximum value and the thickness of trimming plate 3, and determine the minimum trimming distance based on the difference between the minimum value and the thickness of trimming plate 3.

[0085] Here, we use △L max Let ΔL represent the maximum trimming distance. max =L max –T,L max Represent the maximum value mentioned above; use △L min Let ΔL represent the minimum trimming distance. min =L min –T,L min This represents the minimum value mentioned above; where T represents the thickness of the trimming plate 3.

[0086] (ii) Determine the first position information based on the difference between the second distance and the maximum trimming distance, and determine the second position information based on the difference between the second distance and the minimum trimming distance.

[0087] As mentioned above, the first location information and the second location information can specifically be distance data, for example, using A max If A represents the distance value in the first location information, then A max =A0–△L min Use A min If A represents the distance value in the second location information, then... min =A0–△L max Where A0 represents the second distance.

[0088] In some embodiments, the sand teeth 201 are trimmed according to the first position information and the second position information, including:

[0089] (i) Based on the first position information, control the drive mechanism to drive the grinding spindle 1 to move downward, so as to drive the grinding wheel 2 to move to the first position.

[0090] (ii) Control the drive mechanism to drive the grinding spindle 1 to rotate, thereby driving the grinding wheel 2 to rotate, so that friction is generated between the dressing plate 3 and the grinding teeth 201.

[0091] Specifically, when the control drive mechanism drives the grinding spindle 1 to move downwards, the grinding head descends from its initial position by A. maxAfter a certain distance, the grinding wheel 2 moves to the first position. At this time, some of the grinding teeth 201 contact the dressing plate 3. The controller can control the drive mechanism to drive the grinding spindle 1 to rotate, so that friction is generated between the dressing plate 3 and the grinding teeth 201. The dressing plate 3 produces a grinding effect on the grinding teeth 201 that are in contact with it.

[0092] (iii) Every preset time interval, control the drive mechanism to drive the grinding spindle 1 to move downward a preset distance until the grinding wheel 2 moves to the second position.

[0093] It should be noted that after the dressing plate 3 begins to grind the abrasive teeth 201, the controller can control the grinding spindle 1 to move downward a certain distance (such as a preset distance) at regular intervals (such as a preset duration) until the grinding wheel 2 moves to the second position, at which point the grinding wheel dressing process is completed.

[0094] The following provides specific examples of the solutions provided in the embodiments of this application.

[0095] The specific process of dressing a grinding wheel using the grinding wheel dressing equipment and method provided by this invention may include the following steps:

[0096] like Figure 5 As shown, firstly, the grinding wheel 2 is installed on the mounting platform 4, and the grinding spindle 1 is returned to its original position, that is, the grinding head is in its initial position. The second distance between the first surface of the grinding wheel 2 and the target horizontal plane 601 at this time is marked as A0. Here, as... Figure 8 As shown, A0 can be understood as: with the target horizontal plane 601 as the reference, the initial coordinate value of the grinding wheel 2 is A0.

[0097] Next, the control drive mechanism drives the grinding spindle 1 to rotate one revolution. During its rotation, the distance sensor 7 detects the first distance between the first end face of each grinding tooth 201 and the target horizontal plane 601, which is recorded as: L X1 L X2 L X3 ...

[0098] Place the dressing plate 3 (i.e., the grinding wheel dressing plate) on the grinding table 6. It is understood that this placement can be done at any previous step (e.g., before installing the grinding wheel 2), and the order of these steps is not limited to this. The thickness of the dressing plate 3 is T.

[0099] Then, obtain L respectively X1 L X2 L X3 The maximum value L in ... max and minimum value L min And based on this, the maximum trimming distance △L is calculated. maxand minimum trimming distance △L min Then, based on the maximum trimming distance △L max and minimum trimming distance △L min Calculate the coordinates A of the starting position of the trimming. max And the coordinates A of the finished position of the trimming. min .

[0100] Finally, drive the grinding spindle 1 to descend to coordinate A. max At the first position, the trimming begins. Every certain time interval (preset duration), the grinding spindle 1 is driven to descend a certain height (preset distance) until it reaches coordinate A. min At the second position, the dressing of the grinding wheel 2 is complete. After dressing, the grinding spindle 1 can be driven to move the grinding wheel 2 back to its original position.

[0101] The grinding wheel dressing method of this invention obtains the first distance between the first end face of each grinding tooth 201 and the target horizontal plane 601 detected by the distance sensor 7, and determines the start and end positions of grinding wheel dressing accordingly. This allows for precise control of the movement of the grinding head, enabling the dressing plate 3 to accurately grind the grinding teeth of the grinding wheel 2. As a result, the grinding wheel can be dressed quickly and automatically, reducing dressing time, improving equipment uptime, and avoiding safety risks and calibration errors during manual calibration, thus effectively improving the success rate of grinding wheel dressing.

[0102] like Figure 9 As shown, this embodiment of the invention also provides a grinding wheel dressing device, comprising:

[0103] The first control module 910 is used to control the drive mechanism to drive the grinding spindle 1 to rotate when the grinding head is in the initial position, wherein the distance between the grinding wheel 2 and the dressing plate 3 is greater than 0 when the grinding head is in the initial position.

[0104] The first acquisition module 920 is used to acquire, via the distance sensor 7, the second distance between the first surface of the grinding wheel 2 and the target horizontal plane 601, and the first distance between the first end face of each grinding tooth 201 and the target horizontal plane 601;

[0105] The first processing module 930 is used to determine first position information and second position information based on the second distance and each first distance. The first position information is used to indicate the position where grinding wheel dressing begins, and the second position information is used to indicate the position where grinding wheel dressing ends.

[0106] The second control module 940 is used to trim the sand teeth 201 according to the first position information and the second position information.

[0107] In this embodiment, by acquiring the first distance between the first end face of each abrasive tooth 201 detected by the distance sensor 7 and the target horizontal plane 601, the start and end positions of the grinding wheel dressing can be determined accordingly, thereby precisely controlling the movement of the grinding head and enabling the dressing plate 3 to accurately grind the abrasive teeth of the grinding wheel 2. In this way, the grinding wheel can be dressed quickly and automatically, reducing dressing time, improving equipment uptime, and avoiding safety risks and calibration errors during the manual calibration process, effectively improving the success rate of grinding wheel dressing.

[0108] In some embodiments, the first processing module 930 includes:

[0109] The first acquisition unit is used to acquire the thickness of the trimming plate 3;

[0110] The first processing unit is used to determine the maximum and minimum values ​​among the various first distances by comparing them.

[0111] The second processing unit is used to determine the first position information and the second position information based on the thickness, maximum value and minimum value of the trimming plate 3, respectively.

[0112] In some embodiments, the second processing unit includes:

[0113] The first processing subunit is used to determine the maximum trimming distance based on the difference between the maximum value and the thickness of the trimming plate 3, and to determine the minimum trimming distance based on the difference between the minimum value and the thickness of the trimming plate 3.

[0114] The second processing subunit is used to determine the first position information based on the difference between the second distance and the maximum trimming distance, and to determine the second position information based on the difference between the second distance and the minimum trimming distance.

[0115] In some embodiments, the second control module 940 includes:

[0116] The first control unit is used to control the drive mechanism to drive the grinding spindle 1 to move downward according to the first position information, so as to drive the grinding wheel 2 to move to the first position;

[0117] The second control unit is used to control the drive mechanism to drive the grinding spindle 1 to rotate, thereby driving the grinding wheel 2 to rotate, so that friction is generated between the dressing plate 3 and the grinding teeth 201.

[0118] The third control unit is used to control the drive mechanism to drive the grinding spindle 1 downward a preset distance at preset intervals until the grinding wheel 2 moves to the second position.

[0119] The apparatus provided in this application embodiment can execute the above method embodiment, and its implementation principle and technical effect are similar, so it will not be described again here.

[0120] This application also provides a control device, including a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the computer program, it implements the grinding wheel dressing method as described above.

[0121] This application also provides a computer program product, including computer instructions, which, when executed by a processor, implement the above-described... Figure 7 The various processes of the method embodiments shown can achieve the same technical effect, and will not be described again here to avoid repetition.

[0122] This application also provides a readable storage medium storing a program or instructions that, when executed by a processor, implement the steps in the above-described grinding wheel dressing method.

[0123] It should be noted that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, since the embodiments are basically similar to the product embodiments, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions of the product embodiments.

[0124] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0125] It is understandable that when a component such as a layer, film, region, or substrate is referred to as being "above" or "below" another component, the component may be "directly" located "above" or "below" the other component, or there may be intermediate components present.

[0126] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0127] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A grinding wheel dressing device, characterized in that, include: The grinding head includes a grinding spindle (1) and a grinding wheel (2). The grinding wheel (2) is mounted on the grinding spindle (1). A plurality of grinding teeth (201) are protruding on the first surface of the grinding wheel (2). The first surface is a surface of the grinding wheel (2) facing away from the grinding spindle (1). A grinding disc is located in the space below the grinding head, and the grinding disc is used to support the trimming plate (3); A drive mechanism is connected to the grinding spindle (1). The drive mechanism is used to drive the grinding spindle (1) to drive the grinding wheel (2) to rotate and translate, so that the dressing plate (3) contacts the grinding teeth (201) and dresses the grinding teeth (201). A controller, connected to the drive mechanism, is used to obtain a first distance between the first end face of the abrasive tooth (201) and the target horizontal plane (601), and control the drive mechanism to drive the grinding spindle (1) according to the first distance to achieve the dressing of the abrasive tooth (201). The first end face of the abrasive tooth (201) is the end face of the abrasive tooth (201) facing the grinding disc, and the target horizontal plane (601) is the horizontal plane where the upper end face of the grinding disc is located.

2. The grinding wheel dressing equipment according to claim 1, characterized in that, The grinding head further includes: a mounting platform (4), the first end face of the mounting platform (4) is fixedly connected to one end of the grinding spindle (1), and the second end face of the mounting platform (4) is used to mount the grinding wheel (2); The grinding disc includes a mounting bracket (5) and a grinding table (6). The grinding table (6) is mounted on the mounting bracket (5) and is used to support the trimming plate (3). A distance sensor (7) is mounted on the mounting bracket (5) and is used to detect the first distance.

3. A method for dressing a grinding wheel, characterized in that, The grinding wheel dressing method, applied to the grinding wheel dressing equipment as described in claim 1 or 2, comprises: When the grinding head is in the initial position, the control drive mechanism drives the grinding spindle (1) to rotate. When the grinding head is in the initial position, the distance between the grinding wheel (2) and the dressing plate (3) is greater than 0. The second distance between the first surface of the grinding wheel (2) and the target horizontal plane (601) is obtained, as well as the first distance between the first end face of each grinding tooth (201) and the target horizontal plane (601) detected by the distance sensor (7); Based on the second distance and each of the first distances, first position information and second position information are determined. The first position information is used to indicate the first position where grinding wheel dressing begins, and the second position information is used to indicate the second position where grinding wheel dressing ends. The sand teeth (201) are trimmed according to the first position information and the second position information.

4. The grinding wheel dressing method according to claim 3, characterized in that, The step of determining the first location information and the second location information based on the second distance and each of the first distances includes: Obtain the thickness of the trimming plate (3); By comparing each of the first distances, the maximum and minimum values ​​of each of the first distances are determined; The first position information and the second position information are determined based on the thickness of the trimming plate (3), the maximum value and the minimum value, respectively.

5. The grinding wheel dressing method according to claim 4, characterized in that, The step of determining the first position information and the second position information based on the thickness of the trimming plate (3), the maximum value, and the minimum value includes: The maximum trimming distance is determined based on the difference between the maximum value and the thickness of the trimming plate (3), and the minimum trimming distance is determined based on the difference between the minimum value and the thickness of the trimming plate (3). The first position information is determined based on the difference between the second distance and the maximum trimming distance, and the second position information is determined based on the difference between the second distance and the minimum trimming distance.

6. The grinding wheel dressing method according to claim 3, characterized in that, The step of trimming the sand teeth (201) based on the first position information and the second position information includes: Based on the first position information, the drive mechanism is controlled to drive the grinding spindle (1) to move downward, so as to move the grinding wheel (2) to the first position; The drive mechanism is controlled to drive the grinding spindle (1) to rotate, thereby driving the grinding wheel (2) to rotate, so that friction is generated between the dressing plate (3) and the grinding teeth (201); At preset intervals, the drive mechanism is controlled to drive the grinding spindle (1) downward a preset distance until the grinding wheel (2) moves to the second position.

7. A grinding wheel dressing device, characterized in that, include: The first control module is used to control the drive mechanism to drive the grinding spindle (1) to rotate when the grinding head is in the initial position, wherein when the grinding head is in the initial position, the distance between the grinding wheel (2) and the dressing plate (3) is greater than 0. The first acquisition module is used to acquire, via distance sensor (7), the second distance between the first surface of the grinding wheel (2) and the target horizontal plane (601), and the first distance between the first end face of each grinding tooth (201) and the target horizontal plane (601); The first processing module is used to determine first position information and second position information based on the second distance and each of the first distances, wherein the first position information is used to indicate the position where grinding wheel dressing begins and the second position information is used to indicate the position where grinding wheel dressing ends. The second control module is used to trim the sand teeth (201) according to the first position information and the second position information.

8. A control device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor; characterized in that, When the processor executes the computer program, it implements the grinding wheel dressing method as described in any one of claims 3 to 6.

9. A computer program product, characterized in that, It includes computer instructions that, when executed by a processor, implement the steps of the grinding wheel dressing method as described in any one of claims 3 to 6.

10. A readable storage medium having a program or instructions stored thereon, characterized in that, When the program or instructions are executed by the processor, they implement the steps in the grinding wheel dressing method as described in any one of claims 3 to 6.

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