High-pressure annealing device

Abstract

The present invention relates to a high-pressure annealing apparatus including a nozzle assembly, and discloses a technology for preventing damage while being combined with a gas supply module when a gas nozzle supplies gas to the inside of a cavity of the high-pressure annealing apparatus. An embodiment of the high-pressure annealing apparatus according to the present invention comprises: a chamber providing a process space to which a gas is supplied to react with a substrate; the nozzle assembly is used for spraying the gas to the process space of the cavity; and a cavity support body which supports the cavity by mounting the cavity, and which is provided with a mounting part which protrudes from the inner surface and to which at least a part of the nozzle assembly is mounted.

Description

TECHNICAL FIELD

[0001] The present invention relates to a high pressure annealing apparatus, and more particularly, to a high pressure annealing apparatus that separates an integrated nozzle into a nozzle and a gas supply module and supports the gas nozzle by a nozzle support member to prevent breakage of the gas nozzle. BACKGROUND

[0002] Recently, a high pressure hydrogen annealing process that removes semiconductor surface defects by high pressure hydrogen or deuterium is applied.

[0003] In such a high pressure annealing apparatus, a method of inserting an integrated gas nozzle made of quartz into a manifold has been used to supply gas, but the integrated gas nozzle is easily broken at a bent portion during maintenance.

[0004] To solve such a problem, various techniques of separating an integrated gas nozzle into a gas nozzle and a gas supply portion connected to a manifold to prevent breakage have been proposed.

[0005] However, the existing method of inserting a nozzle into one end of a gas supply portion has a problem of tilting of the gas nozzle, and thus has a problem of not uniformly supplying gas over a substrate or of particles flowing onto the substrate due to vibration at a combined position of the gas nozzle and the gas supply portion that supply high temperature and high pressure gas.

[0006] The method of inserting a gas nozzle into a gas supply portion, which is a mainly used method, has a problem of breakage of the gas nozzle during installation or detachment of the gas nozzle to or from the gas supply portion, unlike the integrated gas nozzle.

[0007] In addition, a method of fixing a gas supply module by connecting a support member to a lower end of the gas supply portion is mainly used, but this cannot solve the tilting and vibration of the gas nozzle.

[0008] Therefore, a technique that can solve the breakage risk of the gas nozzle when the nozzle is inserted into the gas supply portion and secure vertical alignment of the inserted nozzle to reduce vibration is required. SUMMARY

[0009] The present invention is to solve the problems of the prior art as described above, and to propose a scheme that can reduce the breakage risk of a gas nozzle while using a high pressure annealing apparatus.

[0010] In particular, the present invention is to solve the problem that a gas nozzle made of quartz material is easily broken at a bent portion because it is integrally made when the high pressure annealing apparatus is maintained.

[0011] Further, in the case where the nozzle is divided into the gas supply part and the nozzle, the breakage problem occurring in the process of mounting or detaching the nozzle to / from the gas supply part is solved, and the vertical alignment of the nozzle is ensured to solve the vibration and particle generation problems occurring at the nozzle.

[0012] The objects of the present application are not limited to the foregoing, and other objects and advantages of the present application not mentioned will be understood from the following description.

[0013] To achieve the technical problem, according to an embodiment of the high-pressure annealing apparatus of the present application, a chamber providing a process space to which a gas is supplied to react with a substrate, a nozzle assembly spraying the gas to the process space of the chamber, and a chamber support body supporting the chamber on which the chamber is seated and having a mounting part mounting at least a part of the nozzle assembly protruding from an inner side, the nozzle assembly including a nozzle spraying the gas to the process space of the chamber, a gas supply module seated at a lower end of the nozzle and supplying the gas to the nozzle, a nozzle support member including a first support body surrounding and abutting a part of one side of the nozzle and a second support body surrounding and abutting a part of the other side of the nozzle opposite to the first support body and supporting the nozzle in a state where the nozzle is seated on the gas supply module by the combination of the first support body and the second support body, and a combination member combining the first support body and the second support body with each other.

[0014] As an example, the chamber support body can include a gas supply module insertion hole into which the gas supply module is inserted, the mounting part being located at an upper end of the gas supply module insertion hole, the first support body being mounted at an upper end of the mounting part and adjusting the seating position of the nozzle seated on the gas supply module while a part of one side of the nozzle is in close contact with an inner side of the first support body.

[0015] Further, the first support body and the second support body can be in contact with each other at both ends corresponding to a part of the nozzle while surrounding the part of the nozzle, and the combination member can press and fix the nozzle by being in contact with outer sides of the first support body and the second support body.

[0016] As another example, the first support body can include a flange of which a lower end portion extends outward, and a slot located at the flange and having a long axis direction from the gas supply module insertion hole toward the center of the chamber support body, the mounting part including a hole fastening a fastening member corresponding to the slot, and the position of the fastening member fastened in the slot can be changed to adjust the mounting position of the nozzle assembly.

[0017] As another example, the gas supply module can include a supply module body including a nozzle seating portion in which the gas jet nozzle is seated on one side and a horizontal insertion portion that is inserted into the gas supply module insertion hole on the other side, the nozzle seating portion including a vertical inflow path formed in the inside of the nozzle seating portion to allow gas to flow into the gas jet nozzle, and a seating groove formed in the upper end of the nozzle seating portion to seat the lower end of the gas jet nozzle.

[0018] As an example, the coupling member can include a clip that elastically presses around the outer side surfaces of the first support body and the second support body to couple the first support body and the second support body to each other.

[0019] As an example, the coupling member can include a clamp that surrounds the outer side surfaces of the first support body and the second support body, and a bolt that is coupled to the clamp to press the first support body and the second support body against the gas jet nozzle.

[0020] As an example, the first support body and the second support body can each include an extension portion that is bent and extended outward from each of the both side ends, and a fastening hole that is formed in the extension portion of the first support body and the extension portion of the second support body to correspond to each other, and the coupling member can include a fastener that is coupled to the fastening holes to press the first support body and the second support body against the gas jet nozzle.

[0021] As an example, the coupling member can include a slide that is provided with a through hole into which the first support body and the second support body are inserted in an abutting state, the slide contacting the outer side surfaces of the first support body and the second support body that are inserted to fix the first support body and the second support body to be pressed against the gas jet nozzle.

[0022] Further, a first screw thread can be formed on the outer side surfaces of the first support body and the second support body, and a second screw thread can be formed on the inner side surfaces of the slide, the first screw thread and the second screw thread being coupled to each other.

[0023] As another example, the seating groove can include a nozzle alignment protrusion that is formed to protrude upward from a portion of the seating groove, and the gas jet nozzle can include a nozzle alignment groove that is formed to be recessed inward from a position corresponding to the nozzle alignment protrusion, the nozzle alignment protrusion and the nozzle alignment groove being aligned and coupled to each other to align the direction of the ejection port of the gas jet nozzle.

[0024] According to the present application, when the nozzle is combined with the gas supply module, the risk of damage to the nozzle can be reduced, the vertical and horizontal alignment of the nozzle can be ensured, and the gas can be stably supplied while reducing vibration when the gas is supplied.

[0025] In particular, in the present application, the nozzle support member can be used as a vertical guide to prevent damage to the nozzle by impact when the gas supply module is inserted into the nozzle, thereby preventing damage to the nozzle.

[0026] In addition, the nozzle can be supported by contact of the nozzle support member through the surface at one side of the nozzle, thereby aligning the nozzle vertically, reducing vibration at the nozzle when high-pressure gas is supplied, and solving the problem of particle generation due to damage to the nozzle during gas supply.

[0027] The effects of the present application are not limited to the above-mentioned effects, and yet another effect not mentioned can be clearly understood from the following description for those having ordinary knowledge in the technical field to which the present application pertains. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a longitudinal sectional view and an enlarged sectional view of an embodiment of a high-pressure annealing apparatus according to the present application.

[0029] Figure 2 is a perspective view of an embodiment of a nozzle assembly suitable for use in the high-pressure annealing apparatus of the present application.

[0030] Figure 3 is an exploded view of an embodiment of a nozzle assembly suitable for use in the high-pressure annealing apparatus of the present application.

[0031] Figure 4 is an exploded view of an embodiment of a nozzle support member and a coupling member of the present application.

[0032] Figure 5 is a cross-sectional view and a perspective view of the nozzle support member and the coupling member shown. Figure 4

[0033] Figure 6 is an embodiment of a supply module body of the present application in which a nozzle is seated.

[0034] Figure 7 is an embodiment of a variation of the supply module body according to Figure 6 .

[0035] Figure 8 is an adjustment example of a mounting position of a nozzle assembly suitable for use in the high-pressure annealing apparatus of the present application.

[0036] Figures 9 to 13 ​An embodiment of a variation of a nozzle assembly according to the high-pressure annealing apparatus of the present application is shown.

[0037] Figure 14 An embodiment of a variation of a jet nozzle and a nozzle seating portion according to the high-pressure annealing apparatus of the present application is shown.

[0038] (Reference Numerals)

[0039] 10: High-pressure annealing apparatus

[0040] 20: Nozzle assembly

[0041] 100: Cavity

[0042] 110: Outer cavity 120: Inner cavity

[0043] 130: Cavity support

[0044] 131: Mounting portion

[0045] 132: Gas supply module insertion hole

[0046] 200: Jet nozzle

[0047] 300: Nozzle support member

[0048] 310: First support member 360: Second support member

[0049] 400: Coupling member

[0050] 500: Gas supply module

[0051] 510: Supply module body

[0052] 520: Module mounting cap

[0053] 530: Adapter DETAILED DESCRIPTION

[0054] In order to explain the present application and working advantages of the present application and the purposes achieved by the implementation of the present application, the preferred embodiments of the present application are exemplified below, which are observed with reference thereto.

[0055] First, the terms used in the present application are used only for the purpose of explaining specific embodiments, and are not intended to limit the present application, and unless explicitly indicated otherwise in the context, the singular expression can include the plural expression. In addition, in the present application, the terms "include" or "have" and the like should be understood as to designate the presence of the features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and do not preclude the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0056] In explaining the present application, detailed description on related known structures or functions is omitted in case it is judged that it can obscure the gist of the present application.

[0057] The present application proposes a technology for preventing breakage of a nozzle, vertically fixing the nozzle, and reducing vibration of the nozzle to stably supply gas when a gas supply module is inserted into the nozzle in a nozzle assembly applicable to a high-pressure annealing apparatus.

[0058] Hereinafter, the present application will be explained with reference to an embodiment thereof.

[0059] Figure 1 An embodiment of a high-pressure annealing apparatus including a nozzle assembly according to the present application is shown.

[0060] A high-pressure annealing apparatus 10 to which the present application is applicable can be composed of a nozzle assembly 20 and a cavity 100, and the cavity 100 can be applicable to a double-cavity structure including an outer cavity 120 and an inner cavity 110.

[0061] The outer cavity 120 can be configured to surround the inner cavity 110 at a certain distance from the inner cavity 110. The outer cavity 120 can provide an outer space to accommodate the inner cavity 110 to maintain the outer space at a pressure corresponding to the high pressure of the inner cavity 110 and to protect the inner cavity 110. More specifically, the outer space can be a space in the inner space provided by the outer cavity 120 except for an area occupied by the inner cavity 110.

[0062] The outer cavity 120 can be formed of a metal material, and the material of the outer cavity 120 can be appropriately changed according to circumstances.

[0063] The inner cavity 110 can perform an annealing process in a high-pressure environment, and as an example, the inner cavity 110 is a non-metal material, and can be preferably formed of a quartz material. The material of the inner cavity 110 can be appropriately changed according to circumstances.

[0064] The inner cavity 110 can provide a process space for performing a heat treatment process for a process object. A door (not shown) can be selectively fastened at a lower portion of the inner cavity 110, and the inner space of the inner cavity 110 can be closed according to fastening of the door.

[0065] The process object can be located in the process space of the inner cavity 110. For example, the process object can be loaded as a plurality of layers in a wafer boat (not shown) as a wafer and located in the process space of the inner cavity 110.

[0066] A gas supplied to the process space of the inner cavity 110 is a first gas as a heat treatment process gas, and can be selected from various heat treatment gases such as hydrogen, deuterium, ammonia, oxygen, chlorine, nitrogen, etc.

[0067] The first gas can be supplied to the process space of the inner cavity 110 through the nozzle assembly 20.

[0068] As an example, the gas nozzle 200 of the nozzle assembly 20 can be configured to supply the first gas to the process space of the inner cavity 110 from the lower direction to the upper direction.

[0069] The nozzle assembly 20 can be configured as many as necessary.

[0070] The shielding gas can be supplied in order to adjust the pressure of the outer space of the outer cavity 120 to the pressure corresponding to the pressure of the inner cavity 110. As the shielding gas supplied to the outer space of the outer cavity 120, the second gas can be selected from various inert gases such as nitrogen.

[0071] The gas supply means (not shown) can include a flowmeter (not shown) and a pump (not shown) for each of the first gas and the second gas, and the controller can control the gas supply means to adjust the gas supply amount, the gas supply time, the gas supply speed, the gas supply pressure, etc. of each of the first gas supplied to the inner cavity 110 and the second gas supplied to the outer cavity 120 following the heat treatment process curve.

[0072] The cavity support 130 can support the inner cavity 110.

[0073] A sealing member (not shown) that can prevent leakage of gas can be installed between the cavity support 130 and the inner cavity 110.

[0074] Figure 1 An enlarged sectional view A of FIG. 1A shows a part of the longitudinal section of the annealing apparatus and the gas assembly in an enlarged manner.

[0075] As an example, the cavity support 130 can install the nozzle assembly 20 with at least one protruding installation portion 131 and at least one gas supply module insertion hole 132 on the inner wall surface.

[0076] That is, at least one point of the nozzle assembly 20 can be installed in the installation portion 131, and a part of the nozzle assembly 20 can be inserted into the gas supply module insertion hole 132 to fix the position of the nozzle assembly 20.

[0077] As an example, the cavity support 130 can be a manifold that can install a plurality of nozzle assemblies 20, and the manifold can be formed of a metal material and can be appropriately changed according to circumstances.

[0078] As an example, a plurality of nozzle assemblies 20 can be installed with a plurality of installation portions 131 and gas supply module insertion holes 132 provided in the cavity support 130.

[0079] The nozzle assembly 20 can include a gas injection nozzle 200, a nozzle support member 300, a coupling member 400, and a gas supply module 500.

[0080] The gas injection nozzle 200 can inject gas into the process space.

[0081] The nozzle support member 300 can include a first support body 310 supporting the gas injection nozzle 200 in vertical alignment and fixing the position of the gas injection nozzle 200, and a second support body 360.

[0082] The coupling member 400 can couple the first support body 310 and the second support body 360 of the nozzle support member 300 to the gas injection nozzle 200 in close contact with each other.

[0083] The gas supply module 500 can house the gas injection nozzle 200 at an upper end of one side.

[0084] The other side of the gas supply module 500 can be inserted into a gas supply module insertion hole 132 formed in an inner wall surface of the cavity support body 130.

[0085] The gas supply module 500 can supply gas flowing from the outside of the cavity 100 to the gas injection nozzle 200.

[0086] Figure 2 FIG. 1 shows a perspective view of an embodiment of a nozzle assembly 20 suitable for use in a high-pressure annealing apparatus 10 according to the present application, Figure 3 FIG. 2 shows an exploded view of the nozzle assembly 20.

[0087] Reference will now be made in detail to various structures of the present application, Figures 4 to 6 for observation.

[0088] Figure 4 FIG. 3 shows an embodiment of a nozzle support member and a coupling member in an exploded view, Figure 5 FIG. 4 shows a cross-sectional view and a perspective view of the nozzle support member and the coupling member shown in FIG. 3. Figure 4

[0089] FIG. 5 shows an embodiment of the present application in which a gas injection nozzle is housed in a supply module body. Figure 6 As an example, the gas injection nozzle 200 can be provided with one or more injection ports 211 at a nozzle upper end 210.

[0090] Further, the gas injection nozzle 200 can be housed in the upper end of the gas supply module 500 at a gas injection nozzle lower end 220.

[0091] As an example, the gas injection nozzle 200 can be formed of a non-metallic material, preferably a quartz material.

[0092]

[0093] ​As an example, the injection port 211 can include one or more through holes in the gas injection nozzle 200 toward the process space, thereby injecting gas into the process space.

[0094] The injection port 211 is not limited to the above-described embodiment, and the position of the injection port 211 can be provided at the middle end or the lower end of the gas injection nozzle 200 as needed, and the form of the injection port 211 can be configured as a branch pipe protruding or extending from the gas injection nozzle 200.

[0095] The mounting portion 131 can be formed by protruding from the wall surface of the cavity support body 130 toward the center direction of the cavity support body 130.

[0096] The mounting portion 131 can be a recessed groove 134 at the center side surface of the cavity support body 130, and the groove 134 of the mounting portion 131 can be formed to be larger than the outer diameter of the gas injection nozzle 200, and the gas injection nozzle 200 can pass through the inner space.

[0097] Further, each of the both side upper ends of the groove 134 of the mounting portion 131 can have a hole 133 to which a fastening bolt or a fastener can be fastened.

[0098] The nozzle support member 300 can include a first support body 310 in contact with one side surface of the gas injection nozzle 200 and a second support body 360 in contact with the other side surface.

[0099] As an example, the first support body 310 can be mounted and fixed to the upper surface of the mounting portion 131.

[0100] As an example, the first support body 310 can have an outwardly extending flange 321 at the lower end portion, and the lower end surface of the flange 321 can be mounted to the upper surface of the mounting portion 131 protruding from the cavity support body 130. Figure 3

[0101] That is, the flange 321 of the first support body 310 can extend in the lateral direction when the gas supply module insertion hole 132 is viewed from the inner center of the cavity support body 130.

[0102] The flange 321 of the first support body 310 can have a slot 322 whose long axis direction is toward the center of the inner cavity 120 from the gas supply module insertion hole 132.

[0103] The first support body 310 can be fixed by combining a fastener with the slot 322 and the hole 133 of the mounting portion 131 corresponding to the slot 322.

[0104] As an example, the gas injection nozzle 200 can be placed on the one side upper end of the gas supply module 500 in a state in which the inner side surface 315 of the first support body 310 is in close contact with the lower end 220 of the gas injection nozzle.

[0105] ​Further, the position of the gas supply module 500 can be adjusted while the gas nozzle 200 is placed on the upper end of one side of the gas supply module 500 in a state in which the inner side surface 315 of the first support body 310 is in close contact with the lower end 220 of the gas nozzle.

[0106] That is, the gas nozzle 200 can be placed in a vertically aligned state in the gas supply module 500 to prevent the lower end 220 of the gas nozzle from being damaged due to impact or stress by using the first support body 310 as a vertical guide and a support table for the gas nozzle 200.

[0107] The position at which the first support body 310 contacts the gas nozzle 200 is not limited to the lower end 220 of the gas nozzle 200, and the position of the first support body 310 can be changed according to the position of the mounting portion 131 to contact the upper end or the middle end side of the gas nozzle 200, and a guide can be provided so that the gas nozzle 200 can be placed in a vertically aligned state in the gas supply module 500.

[0108] Further, a plurality of first support bodies 310 can be provided so that the vertical guide is configured to contact the side surface of the gas nozzle 200 while being coupled to the plurality of mounting portions 131 corresponding to the respective support bodies, and the gas nozzle 200 can be vertically inserted.

[0109] As another example, a flange 321 can be additionally arranged at the upper end or the middle end of one first support body 310 to couple the first support body 310 to the plurality of mounting portions 131 provided in the wall surface of the cavity support body 130.

[0110] That is, one first support body 310 formed long in the length direction can be coupled to the plurality of mounting portions 131 arranged vertically to secure the vertical stability of the first support body 310.

[0111] As an example, the coupling member 400 can be a C-shaped clip open on one side, and wings are formed at both side ends.

[0112] That is, the coupling member 400 is made of an elastic material and presses the nozzle support member 300 located in the inner space 430 of the coupling member by an elastic force, so that the nozzle support member 300 is in close contact with the gas nozzle 200.

[0113] It can be that an upper step 312 that fixes the coupling member 400 as a clip from moving upward is formed at the upper end of the first support body 310, and a lower step 313 that fixes the coupling member 400 from being detached downward is formed at the lower portion of the first support body 310.

[0114] An upper step 362 that fixes the coupling member 400 not to move upward can be formed at the upper end of the second support body 360, and a lower step 363 that fixes the coupling member 400 not to be separated downward can be formed at the lower end of the second support body 360.

[0115] Further, the outer side between the upper step 312 and the lower step 313 of the first support body 310 and the outer side between the upper step 362 and the lower step 363 of the second support body 360 can form an insertion surface 311, 361 in each support body 310, 360, so that the first support body 310 and the second support body 360 can be inserted into the coupling member 400 as a clip.

[0116] That is, the nozzle support member 300 can be inserted into the inner space 430 of the coupling member 400, so that both side ends 314 of the first support body 310 and both side ends 364 of the second support body 360 correspond to each other and are in contact with each other, and the inner side of the coupling member 400 surrounds the insertion surface 361 of the second support body 360 at the outer side of the second support body 360.

[0117] The coupling member 400 can elastically press the first support body 310 and the second support body 360 to be coupled to each other while surrounding a part of the first support body 310, and can make the inner sides 315, 365 of the first support body 310 and the second support body 360 adhere to the outer side of the gas jet nozzle 200.

[0118] When the first support body 310 and the second support body 360 are elastically pressed while adhering to the side of the gas jet nozzle 200, it can be fixed that the gas jet nozzle 200 does not move in the vertical direction and the horizontal direction by the friction generated at the inner sides 315, 365 of each support body.

[0119] The coupling member 400 can have wings 420 extended at both ends of the open side, so that the wings 420 are pushed toward the wall surface of the cavity support body 130, and thus the coupling member 400 is easily installed in the nozzle support member 300.

[0120] In addition, the coupling member 400 can be easily detached from the nozzle support member 300 by pulling the coupling member 400 toward the inside of the cavity support body 130 using the wings 420.

[0121] The coupling direction of the coupling member 400 can be changed according to the shape of the coupling member and the direction in which the elastic force of the coupling member is applied, so that the coupling member 400 is coupled or fixed to the nozzle support member 300 in different directions.

[0122] The gas supply module 500 can be composed of a supply module body 510, a module installation cover 520, and an adapter 530.

[0123] The lower end 220 of the air nozzle 200 can be placed on the upper side of one side of the main body 510 of the supply module.

[0124] One side of the module mounting cover 520 is inserted into the gas supply module insertion hole 132 from the outside of the cavity support 130.

[0125] Furthermore, the other side of the supply module body 510 is inserted into the interior of the module mounting cover 520, which is inserted into the gas supply module insertion hole 132 from the interior of the cavity support 130.

[0126] Insert one side of the adapter 530 into the other side of the module mounting cover 520.

[0127] That is, the other side of the supply module body 510 and the other side of the adapter 530 can contact each other inside the module mounting cover 520 and be fixed by the module mounting cover 520.

[0128] A gas supply device (not shown) can be connected to the other side of the adapter 530.

[0129] As an example, the supply module body 510 may include a nozzle mounting portion 511 on one side for mounting the lower end 220 of the jet nozzle and a horizontal insertion portion 517 inserted into the interior of one side of the module mounting cover 520 on the other side.

[0130] As an example, a mounting groove 516 may be provided at the upper end of the nozzle mounting portion 511, and the lower end 220 of the jet nozzle may be mounted inside the mounting groove 516, thereby forming a vertical inflow path 512 that allows gas to flow into the lower end 220 of the mounted jet nozzle.

[0131] The horizontal insertion part 517 located on the side of the nozzle mounting part 511 can form a horizontal inflow path 518 inside, so that the gas injected from the adapter 530 flows into the nozzle mounting part 511.

[0132] The vertical inflow path 512 can be connected to the horizontal inflow path 518 on the side, thereby transmitting the gas flowing in from the horizontal inflow path 518 upwards and injecting it into the interior of the lower end 220 of the nozzle.

[0133] As another example, the nozzle mounting part 511 and the horizontal insertion part 517 can be made as two separate parts that can be combined with each other.

[0134] As an example, such as Figure 6 As shown in (b), the outer wall 513 and the inner wall 514 of the placement groove can be formed to have a certain distance D.

[0135] Furthermore, a certain distance D can be configured to be sufficiently greater than the thickness T of the nozzle, so that the nozzle 200 can be placed in the mounting slot 516 without damage.

[0136] That is, a certain distance D sufficiently large can prevent the impact and tension generated when the gas nozzle 200 is inserted into the supply module body 510, thereby reducing the risk of breakage of the lower end 220 of the gas nozzle.

[0137] Further, the height H of the outer wall 513 and the height h of the inner wall 514 of the seating groove 516 can be configured to the extent that the gas nozzle 200 does not come off.

[0138] Figure 7 A modification example of adjusting the height H of the outer wall 513 and the height h of the inner wall 514 of the seating groove 516 is shown.

[0139] As an example, Figure 7 The height H of the outer wall 513 and the height h of the inner wall 514 of (a) can be applied as in (b) of Figure 7 The height H' of the outer wall 513 and the height h' of the inner wall 514 of (b) are reduced.

[0140] That is, by reducing the heights H', h' of the outer wall and the inner wall, tension can be prevented from being generated by the outer wall 513 and the inner wall 514 of the seating groove due to the inclination of the lower end 220 of the gas nozzle.

[0141] As another example, when the gas nozzle 200 is seated in an inclined state, chamfering or beveling can be performed at each upper end corner of the outer wall 513 and the inner wall 514 of the seating groove corresponding to the lower end 220 of the gas nozzle, so that the lower end 220 of the gas nozzle can be seated in the seating groove 516 without breakage.

[0142] The gas flowing through the gas supply device (not shown) can be injected toward the process space through the injection port 211 from the outside of the chamber 100 via the adapter 530, the horizontal inflow path 518, the vertical inflow path 512, and the gas nozzle 200.

[0143] As another example, in order to prevent gas leakage between the adapter 530 and the supply module body 510 or between the adapter 530 and the gas supply pipe (not shown), the gas supply module 500 can be attached with a sealing member (not shown) between each component.

[0144] The structure and material of the gas supply module 500 can be changed according to the type, temperature, and pressure of the supplied gas.

[0145] Figure 8 An example of position adjustment of the nozzle assembly 20 is shown.

[0146] The lower end surface of the first support body 310' can be mounted on the upper surface of the mounting portion 131, and the first support body 310' can be fixed in the vertical direction by coupling a portion of the fastening member to the slot 322' and the hole of the mounting portion 131 corresponding to the slot 322'.

[0147] The position of a portion of the cavity support body 130 of the nozzle assembly 20 can be adjusted in the R direction toward the center of the inside of the cavity support body 130 in the gas supply module insertion hole 132.

[0148] That is, a portion 220', 310', 360', 322', 400', 510' of the nozzle assembly 20 can be adjusted to move in the R direction from the position illustrated by the two-dot chain line.

[0149] The position of the nozzle assembly 20 can be fixed by coupling the fastening member 302 to the slot 322' of the first support body 310 and the hole 133 of the mounting portion completely.

[0150] The coupling member 400 described above is not limited to a clip, and can be implemented by being deformed as necessary.

[0151] In this regard, Figures 9 to 13 Embodiments of a nozzle assembly according to a modification of the high-pressure annealing apparatus according to the present application will be described, and for portions repeated from the above-described embodiments, the description thereof will be omitted or briefly described.

[0152] As Figure 9 illustrated, the coupling member 400b can be inserted into the slot 316b formed in the insertion portion of the first support body 310b by forming a protrusion 431b in the direction of the nozzle support member 300 at the point at which the wing 420b of the clip starts, and thus the coupling member 400b can be fixed to the nozzle support member 300.

[0153] As Figure 10 illustrated, the coupling member 400c can be composed of a clip 420c surrounding the insertion surfaces of the first support body 310c and the second support body 360c, a clip coupling bolt 451c, and a nut 452c, as an example.

[0154] The clip 420c can pressurize the insertion surfaces of the first support body 310c and the second support body 360c by coupling the bolt 451c to the provided hole 440c, and the nozzle support member 300 can be more closely attached to the gas nozzle 200 by the coupling member 400c.

[0155] As Figure 11As shown, as an example, the first support 310d and the second support 360d can respectively form wings 340d and 390d extending from the two ends 314 and 364 of each support in opposite directions to the inner space 301 of the nozzle support member.

[0156] Furthermore, the fastening holes 341d formed on the wing 340d of the first support body and the fastening holes 391d formed on the wing 390d of the second support body can be formed at corresponding positions.

[0157] The connecting part 400d, including the fastener 450d and the nut 452d, can be fastened to the fastening hole 391d to make the nozzle support part 300 fit more tightly against the nozzle 200.

[0158] Furthermore, the first support 310d and the second support 360d may be made of elastic metal material, and the wings 340d of the first support and the wings 390d of the second support may be separated by a certain interval d.

[0159] That is, by fastening the fastener 450d to the fastening holes 341d and 391d of the first support body and the second support body, the nozzle support component 300 can be more closely attached to the jet nozzle 200 through the fastener 450d.

[0160] The structure that forms a certain interval d between the supports is not limited to the embodiment described above, and can also be applied to other variations of the connecting component 400 and the nozzle support component 300 as needed.

[0161] like Figure 12 As shown, as an example, the connecting component 400e may be a slider with a through hole 430e inside, and the first support 310e and the second support 360e may be configured to be inserted into the through hole 430e of the connecting component 400e without the upper steps 312 and 362.

[0162] In addition, the connecting component 400e can contact the insertion surfaces of the inserted first support 310e and second support 360e to fix the nozzle support component 300 in a state of being tightly attached to the jet nozzle 200.

[0163] Furthermore, the second support 360e may include a second support protrusion 380e that is not pushed downward when inserted into the through hole 430e of the coupling member.

[0164] That is, the protrusion 380e of the second support body can be configured such that the lower step 363 of the second support body 360e protrudes in the direction of the lower step 313 of the corresponding first support body.

[0165] The lower step 313 of the first support 310e may include a first support groove 330e that corresponds to the protrusion 380e of the second support and is recessed so that the protrusion 380e of the second support can be inserted.

[0166] The first support groove 330e and the second support protrusion 380e are not limited to the embodiment described above. They can be adapted to other variations of the connecting member 400 and the nozzle support member 300 as needed, or formed at other positions such as the two end faces of each support instead of the lower end, so that the second support 360 is fixed so as not to move up or down when the supports are connected and when the supports and the connecting member are connected.

[0167] As an example, the first support 310e and the second support 360e can be formed with a thickness greater than that at the upper end in a certain range, so that the connecting component 400e contacts the outer side of each support and the nozzle support component 300 is tightly attached to the jet nozzle 200.

[0168] Furthermore, the thickness can be configured to increase towards the lower end, thereby dispersing the pressure applied by the connecting component 400e and reducing the risk of breakage of the nozzle 200.

[0169] That is, such as Figure 12 As shown in (b), the insertion surfaces of the support bodies 310e and 360e can be formed with increased thickness while constituting an inclination angle θ, thereby dispersing the pressure applied by the connecting member 400e to the lower end of the insertion surface to the lower end 220 of the nozzle and reducing the risk of damage to the lower end 220 of the nozzle while fixing the position of the nozzle 200.

[0170] As an example, Figure 13 The nozzle support member 300 can have a first thread 431f inside the connecting member 400f and a second thread 316f on the outer side of the nozzle support member 300, so that the nozzle support member 300 and the jet nozzle 200 remain in a tight fit while the two threads are engaged.

[0171] The first thread 431f and the second thread 316f can be deformed into a slot and a protrusion, so that the connecting member 400f is connected to the outside of the first support 310f and the second support 360f along the direction of the slot with the protrusion inserted into the slot.

[0172] As an example, Figure 14 The nozzle alignment groove 221 at the lower end 220 of the jet nozzle and the nozzle alignment protrusion 519 on the main body 510 of the supply module are shown.

[0173] When the nozzle alignment groove 221 and the nozzle alignment protrusion 519 are combined to the lower end 220 of the gas nozzle to the supply module body 510, the nozzle alignment groove 221 can be formed in the lower end 220 of the gas nozzle so as to be aligned with the direction of the injection port 211, and the nozzle alignment protrusion 519 can be formed on the seating surface 515 of the seating groove which contacts the end surface of the lower end 220 of the gas nozzle.

[0174] Therefore, the injection port 211 can be aligned while the nozzle alignment groove 221 is combined to the nozzle alignment protrusion 519, and the gas injected through the injection port 211 can be supplied toward the substrate located in the process space.

[0175] The nozzle alignment groove 221 and the nozzle alignment protrusion 519 can be formed in an arc shape as shown in the cross section B-B', and can be changed to other shapes as needed.

[0176] Further, the nozzle alignment groove 221 and the nozzle alignment protrusion 519 are not limited to one each, and can be formed in a plurality so as to make the direction of the gas nozzle 200 more easily aligned.

[0177] The nozzle assembly mentioned above is not limited to the high pressure annealing chamber formed in a double cavity, and can be applied to the high pressure annealing chamber formed in a single or a plurality of cavities as needed.

[0178] The above description is only illustrative of the technical concept of the present application, and various modifications and changes can be made by those skilled in the art without departing from the essential characteristics of the present application. Therefore, the embodiments described in the present application are not intended to limit the technical concept of the present application, but to illustrate the technical concept of the present application, and the technical concept of the present application is not limited by such embodiments. The scope of protection of the present application should be interpreted by the appended claims, and all technical concepts within the equivalent scope should be interpreted as included in the scope of the present application.

Claims

1. A high-pressure annealing apparatus, characterized in that, include: A cavity provides a process space into which gas is supplied to react with the substrate. A nozzle assembly that injects the gas into the process space of the cavity; as well as A cavity support body, which houses and supports the cavity, and has a mounting portion that protrudes from the inner side for mounting at least a portion of the nozzle assembly. The nozzle assembly includes: The nozzle injects gas into the process space of the cavity. A gas supply module is placed at the lower end of the nozzle and supplies gas to the nozzle; A nozzle support component includes a first support body surrounding and abutting a portion of one side of the nozzle, and a second support body opposite to the first support body surrounding and abutting a portion of the other side of the nozzle, and supports the nozzle in a state where the nozzle is placed in the gas supply module through the combination of the first support body and the second support body; and The connecting component allows the first support body and the second support body to be connected to each other.

2. The high-pressure annealing apparatus according to claim 1, characterized in that, The cavity support includes: A gas supply module insertion hole allows the gas supply module to be inserted. The mounting part is located at the upper end of the gas supply module insertion hole. The first support body is installed at the upper end of the mounting portion. While one side of the nozzle is in close contact with the inner side of the first support, the placement position of the nozzle in the gas supply module is adjusted.

3. The high-pressure annealing apparatus according to claim 2, characterized in that, The first support and the second support are in contact with each other at their respective ends while surrounding a portion of the jet nozzle. The connecting component applies pressure to the outer surfaces of the first support and the second support to fix the jet nozzle.

4. The high-pressure annealing apparatus according to claim 2, characterized in that, The first support body includes: The flange extends outward at its lower end; and The slot is located on the flange, and its major axis is oriented from the gas supply module insertion hole toward the center of the cavity support. The mounting portion corresponds to the slot and includes holes for fastening fasteners. The mounting position of the nozzle assembly is adjusted by changing the position of the fasteners tightened in the slot.

5. The high-pressure annealing apparatus according to claim 2, characterized in that, The gas supply module includes: The supply module body includes a nozzle mounting portion on one side for mounting the air jet nozzle and a horizontal insertion portion on the other side for inserting into the gas supply module insertion hole. The nozzle mounting portion includes: A vertical inflow path is formed inside the nozzle mounting portion to allow gas to flow into the jet nozzle; and The mounting groove is a groove formed at the upper end of the nozzle mounting portion to mount the lower end of the air jet nozzle.

6. The high-pressure annealing apparatus according to claim 1, characterized in that, The connecting component includes: The clamp applies elastic pressure around the outer surfaces of the first support and the second support simultaneously, thereby binding the first support and the second support together.

7. The high-pressure annealing apparatus according to claim 1, characterized in that, The connecting component includes: The clamp surrounds the outer surfaces of the first support and the second support; and Bolts, attached to the clamp, bring the first support body and the second support body into close contact with the jet nozzle.

8. The high-pressure annealing apparatus according to claim 1, characterized in that, The first support and the second support each include: The extensions bend outwards from each of the two ends; and Fastening holes are formed correspondingly in the extensions of the first support body and the second support body. The connecting component includes: Fasteners are respectively engaged with the fastening holes to make the first support body and the second support body fit tightly against the jet nozzle.

9. The high-pressure annealing apparatus according to claim 1, characterized in that, The connecting component includes: The slider is provided with a through hole for the first support body and the second support body to be inserted when they are in abutting position. The slider contacts the outer surfaces of the inserted first and second supports, thereby fixing the first and second supports tightly against the nozzle.

10. The high-pressure annealing apparatus according to claim 9, characterized in that, A first thread is formed on the outside of the first support and the second support. A second thread is formed on the inner surface of the slider. The first thread and the second thread are combined.

11. The high-pressure annealing apparatus according to claim 5, characterized in that, The placement slot includes: The nozzle alignment protrusion is formed by protruding upwards from a portion of the mounting groove. The jet nozzle includes: The nozzle alignment groove is formed by recessing inward at a position corresponding to the nozzle alignment protrusion. The nozzle alignment protrusion engages with the nozzle alignment groove to align the nozzle with the direction of the jet nozzle's spray opening.

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