Oven and wafer baking device thereof

Abstract

The embodiment of the invention discloses an oven and a wafer baking device thereof. Wherein the motor comprises a main body and a driving shaft, one end of the driving shaft extends into the box body, and the main body comprises a shell; a flow channel for a cooling medium to pass through is arranged in the motor, and the flow channel penetrates through the main body and the driving shaft; a first inlet communicated with the flow channel is formed in the shell; and a first outlet communicated with the flow channel is formed in the part, extending into the box body, of the shell or the driving shaft. According to the embodiment of the invention, when the oven is used, the cooling medium is continuously introduced into the runner through the first inlet, so that the cooling medium can continuously take away heat carried by the driving shaft when flowing through the driving shaft, and the heating cooling medium is discharged through the first outlet; therefore, the driving shaft and even the whole motor can be kept in a low temperature range in the working period, the service life of the motor is prolonged, and the performance of the motor is guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of heat treatment, in particular to an oven and wafer baking device thereof. BACKGROUND

[0002] In the process of semiconductor manufacturing, wafers need to undergo various heat treatment processes, such as solidification, annealing, etc., to improve their structural stability and electrical performance. Such heat treatment is usually carried out in a special oven. In order to ensure uniform heating of the wafer, the oven generally adopts a hot air convection circulation system. The core of this system includes a heating assembly, a heating cavity, a motor and a fan driven by the motor. When working, the heating assembly generates heat, the motor drives the fan to rotate, and the hot air is driven to form a uniform and continuous airflow in the heating cavity, thereby ensuring that the temperature distribution of the wafer remains consistent everywhere. However, since the output shaft of the motor needs to be directly or indirectly extended into the heating area of the heating assembly, heat will be continuously transferred to the output shaft, and through the output shaft, it will be continuously conducted to the coil and bearing and other precision components inside the motor. The motor runs at an overrated temperature for a long time, which will cause a series of problems, such as the insulation material of the winding easily accelerating aging at high temperature, etc., thereby seriously restricting the reliability and service life of the motor. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides an oven and wafer baking device thereof to solve the problem of easy aging of the motor in the oven.

[0004] In a first aspect, the present application provides an oven, comprising a cabinet and a motor, the motor being installed on the cabinet, the motor comprising a main body and a driving shaft, one end of the driving shaft extending into the cabinet, and the main body comprising a shell; wherein a flow channel for cooling medium is arranged in the motor, the flow channel penetrating through the main body and the driving shaft; a first inlet is arranged on the shell and communicates with the flow channel; and the shell or the part of the driving shaft extending into the cabinet is provided with a first outlet communicating with the flow channel.

[0005] Based on the above-mentioned oven, when the oven is used, cooling medium is continuously introduced into the flow channel through the first inlet, so that the cooling medium can continuously take away the heat carried by the driving shaft when flowing through the driving shaft, and the cooling medium absorbing heat is discharged through the first outlet, thereby ensuring that the driving shaft and even the whole motor can be kept in a lower temperature range during work, so as to prolong the service life of the motor and ensure its performance.

[0006] In one or more embodiments of the above-mentioned oven, the flow channel comprises a first channel arranged in the driving shaft, the first channel extending along the axial direction of the driving shaft, and the first outlet is arranged at the end or the peripheral side of the driving shaft.

[0007] In one or more embodiments of the oven described above, the cross section of the first channel gradually increases along its own axis.

[0008] In one or more embodiments of the oven described above, the flow channel further comprises a second channel arranged in the main body and a rotary channel arranged in the drive shaft; one end of the second channel is in communication with the first inlet, and the other end is in communication with one end of the rotary channel; the other end of the rotary channel is in communication with the first outlet, and the first outlet is arranged on the shell.

[0009] In one or more embodiments of the oven described above, a cooling cavity for cooling medium is arranged in the shell, and a second inlet and a second outlet are further arranged on the shell, and the second inlet and the second outlet are in communication with the cooling cavity.

[0010] In one or more embodiments of the oven described above, the cooling cavity is arranged around the shell.

[0011] In one or more embodiments of the oven described above, a cooling cylinder is arranged on the drive shaft, and a gap for cooling medium to flow between the cooling cylinder and the drive shaft; a third channel in communication with the gap is arranged on the main body, and a third inlet in communication with the third channel is arranged on the surface of the main body.

[0012] In one or more embodiments of the oven described above, a heat insulation plate is arranged on the side of the main body facing the box body, and the main body is mounted on the box body through the heat insulation plate.

[0013] In one or more embodiments of the oven described above, the box body has a heating cavity, and a heat insulation layer is arranged in the box body and between the heating cavity and the main body.

[0014] In a second aspect, the application provides a wafer baking device, comprising a rack and at least two ovens as described above, and each of the ovens is mounted on the rack.

[0015] The above one or more embodiments of the application have at least one or more of the following beneficial effects: When the oven is used, the cooling medium is continuously introduced into the flow channel through the first inlet, so that the cooling medium can continuously take away the heat carried by the drive shaft when flowing through the drive shaft, and the cooling medium with heat is discharged through the first outlet, so that the drive shaft and even the motor as a whole can be kept in a lower temperature range during work, so as to prolong the service life of the motor and ensure its performance.

[0016] Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will become apparent to those skilled in the art upon examination of the following description and the attached drawings. BRIEF DESCRIPTION OF DRAWINGS

[0017] The disclosure of the present application will become more apparent from the following description in conjunction with the accompanying drawings. It is readily understood by those skilled in the art that the drawings are only for the purpose of illustration and are not intended to limit the scope of protection of the present application. In addition, similar numbers in the figures represent similar components, wherein: Figure 1 is a structural schematic diagram of a wafer baking device provided by an embodiment of the present application; Figure 2 is a sectional view of the internal structure of an oven provided by an embodiment of the present application; Figure 3 is a sectional view of a motor provided by an embodiment of the present application; Figure 4 is a partial sectional view of a drive shaft provided by an embodiment of the present application; Figure 5 is a sectional view of a main body provided by an embodiment of the present application.

[0018] BRIEF DESCRIPTION OF DRAWINGS 1, oven body; 11, heating cavity; 2, main body; 21, outer shell; 211, first inlet; 212, cooling cavity; 213, second inlet; 214, second outlet; 22, third passage; 3, drive shaft; 31, first outlet; 4, flow channel; 41, first passage; 42, second passage; 43, rotary passage; 5, cooling cylinder; 51, gap; 6, heat insulation plate; 7, heat insulation layer; 8, rack. DETAILED DESCRIPTION

[0019] Some embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the scope of protection of the present application.

[0020] At present, when a wafer is heated using an oven, the output shaft of the motor needs to be directly or indirectly extended into the heating area of the heating assembly. Heat is continuously transferred to the output shaft, and is continuously conducted to the coil and bearing and other precision components inside the motor through the output shaft, which easily causes the internal structure or material of the motor to age, thereby seriously restricting the reliability and service life of the motor.

[0021] Therefore, this application provides an innovative oven comprising a housing and a motor. The motor has a flow channel for a cooling medium to pass through, the flow channel connecting the main body and the drive shaft. When using the oven, a cooling medium is continuously introduced into the flow channel through a first inlet, so that the cooling medium can continuously remove the heat carried by the drive shaft as it flows through it, and the heated cooling medium is discharged through a first outlet. This ensures that the drive shaft and the entire motor can be kept within a low temperature range during operation, thereby extending the service life of the motor and ensuring its performance.

[0022] The present application will be described in detail below through specific embodiments.

[0023] Example 1 Reference Figures 1 to 5 As shown in the figure, this application embodiment provides an oven, which includes a housing 1 and a motor. The motor is mounted on the housing 1 and includes a main body 2 and a drive shaft 3. One end of the drive shaft 3 extends into the housing 1, and the main body 2 includes a housing 21. The motor is provided with a flow channel 4 for the passage of cooling medium, and the flow channel 4 passes through the main body 2 and the drive shaft 3. The housing 21 is provided with a first inlet 211 communicating with the flow channel 4. The portion of the housing 21 or the drive shaft 3 extending into the housing 1 is provided with a first outlet 31 communicating with the flow channel 4.

[0024] In some examples, the shape of box 1 can be a regular shape such as a cube or cuboid, or any other irregular shape, as long as its internal space can stably place the wafer.

[0025] It should be noted that a motor generally also includes components such as a stator, rotor, and bearings. In this embodiment, the stator and rotor are included within the main body 2.

[0026] Understandably, the cooling medium can be selected based on the actual operating temperature inside the oven. For example, at temperatures of 200℃ or below, a gaseous medium, such as nitrogen, can be used. If the temperature is above 200℃, a liquid medium, such as purified water, can be used.

[0027] In addition, after the cooling medium flows through the drive shaft 3, the cooled medium needs to be discharged promptly. The discharge location of the cooling medium is also limited by the internal structure of the oven and the type of cooling medium. For example, when the cooling medium is gaseous, it generally rises and discharges through gap 51, so the first outlet 31 can be located at the part of the drive shaft 3 that extends into the chamber 1. When the cooling medium is liquid, considering the presence of other structures inside the chamber 1, especially below the drive shaft 3, the first outlet 31 is generally located on the outer shell 21 to discharge the cooling medium outside the chamber 1. Of course, in some cases, even if the cooling medium flowing into the drive shaft 3 is liquid, the first outlet 31 can still be located at the part of the drive shaft 3 that extends into the chamber 1. However, a corresponding drainage structure needs to be installed inside the chamber 1 to receive the cooling medium flowing out from the drive shaft 3, and then this portion of the cooling medium can be recovered to a corresponding recovery device through pipes and other piping components.

[0028] In some examples, the path of the flow channel 4 can be a straight line, an arc, or any other regular or irregular path, as long as it effectively cools the drive shaft 3 and effectively discharges the cooling medium. In this embodiment, to balance cooling effect and machining difficulty of the flow channel 4, the main part of the flow channel 4 path is straight.

[0029] As an alternative example, see Figure 2 As shown, the flow channel 4 includes a first channel 41 disposed within the drive shaft 3, the first channel 41 extending axially along the drive shaft 3, and a first outlet 31 disposed at the end or periphery of the drive shaft 3. By extending the first channel 41 axially along the drive shaft 3, the cooling medium can effectively remove heat from the drive shaft 3. In this embodiment, the cooling medium is a gas, such as an inert gas like nitrogen, to avoid the cooling medium reacting with the wafer.

[0030] Furthermore, in some examples, the cross-section of the first channel 41 gradually increases along its own axial direction. The gradually increasing cross-section of the first channel 41 allows a larger amount of cooling medium to flow through the hotter portion of the drive shaft 3 simultaneously, thus improving its cooling effect.

[0031] As another alternative example, see [reference] Figure 3 As shown, the flow channel 4 also includes a second channel 42 disposed in the main body 2 and a rotary channel 43 disposed in the drive shaft 3; one end of the second channel 42 is connected to the first inlet 211, and the other end is connected to one end of the rotary channel 43; the other end of the rotary channel 43 is connected to the first outlet 31, and the first outlet 31 is disposed on the outer shell 21.

[0032] It is understood that after the cooling medium flows into the drive shaft 3 through the rotary channel 43, it will flow out of the drive shaft 3 through the rotary channel 43, thereby improving the utilization rate of the cooling medium and ensuring sufficient cooling of the drive shaft 3. In this embodiment, the cooling medium is a liquid, such as pure water; the first outlet 31 extends into the interior of the outer casing 21 to form a connecting channel so that the cooling medium can flow out through the first outlet 31.

[0033] In some examples, refer to Figure 5 As shown, the outer casing 21 has a cooling chamber 212 for the cooling medium to pass through. The outer casing 21 also has a second inlet 213 and a second outlet 214, both of which are connected to the cooling chamber 212. The cooling chamber 212 allows the cooling medium to remove heat from the main body 2 and indirectly remove heat from the drive shaft 3, thereby further cooling the motor. In this embodiment, the cooling medium is a liquid, such as pure water.

[0034] It should be noted that the second inlet 213 and the second outlet 214 can be located at any position on the housing 21, as long as the cooling medium can flow sufficiently through the housing 21. For example, the second inlet 213 and the second outlet 214 can be located at opposite ends of a diagonal line (located on a plane including the motor axis).

[0035] The cooling medium flowing out of the second outlet 214 is recovered by setting up pipelines and recovery containers, and this part of the cooling medium can be recycled after cooling and filtering.

[0036] Furthermore, in some examples, the cooling cavity 212 is disposed around the housing 21 to fully cool the housing 21. Of course, in other examples, the cooling cavity 212 can also be any other regular or irregular shape, as long as it meets the cooling requirements.

[0037] In some examples, refer to Figure 4 As shown, a cooling cylinder 5 is fitted over the drive shaft 3, and a gap 51 is formed between the cooling cylinder 5 and the drive shaft 3 for the cooling medium to flow through; a third channel 22 communicating with the gap 51 is provided on the main body 2, and a third inlet communicating with the third channel 22 is provided on the surface of the main body 2.

[0038] The cooling cylinder 5 allows the cooling medium to flow over the outer side of the drive shaft 3; and combined with the flow channel 4, it allows the cooling medium to flow over the inner side of the drive shaft 3; that is, by cooling both the inner and outer sides of the drive shaft 3, the cooling effect of the drive shaft 3 is further improved. In this embodiment, the cooling medium flowing into the gap 51 is a liquid, such as pure water.

[0039] It should be noted that the gap 51 can be annular or other regular or irregular in shape. In this embodiment, in order to achieve a balanced cooling effect, the gap 51 is annular in shape, and the axis of the gap 51 is coaxial with the axis of the drive shaft 3, so as to evenly cool the outer surface of the drive shaft 3.

[0040] In some examples, refer to Figure 3 As shown, a heat insulation plate 6 is provided on the side of the main body 2 facing the housing 1, and is installed on the housing 1 through the heat insulation plate 6. By setting the heat insulation plate 6, some of the heat flowing to the main body 2 can be blocked, thereby slowing down the heating rate of the motor main body 2.

[0041] Among them, the heat insulation board 6 can be an aluminum foil board, a vacuum insulation board, or a polystyrene foam board, etc.

[0042] In addition, in some examples, to reduce drilling into the motor body 2, the third inlet and the third channel 22 can be provided on the heat insulation plate 6. Specifically, the third inlet is provided on the peripheral side of the heat insulation plate 6, and the third channel 22 is provided inside the heat insulation plate 6. In this embodiment, the cooling medium flowing into the gap 51 is a gas, such as nitrogen.

[0043] It is understood that the housing 1 has a heating chamber 11. In some examples, refer to Figure 2 As shown, the housing 1 is provided with a heat insulation layer 7, which is located between the heating chamber 11 and the main body 2. By providing the heat insulation layer 7 between the main body 2 and the heating chamber 11, heat transfer to the main body 2 can be further hindered, thereby delaying the heating of the motor.

[0044] Among them, the heat insulation layer 7 can be a plate-like structure that can block heat transfer, such as glass wool board or polyurethane foam board.

[0045] Example 2 Corresponding to Embodiment 1 above, refer to Figure 1 As shown in the illustration, this application also provides a wafer baking apparatus, which includes a rack 8 and at least two ovens, each oven being mounted on the rack 8. By centrally mounting the ovens, space can be saved, while reducing the number of wafer handling operations and shortening the wafer handling path length, thereby improving wafer handling and baking efficiency.

[0046] In some examples, all ovens are stacked in layers, with at least two ovens on each layer, and adjacent ovens are tightly fitted and fixedly connected to each other to improve space utilization.

[0047] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An oven comprising a cabinet (1) and a motor mounted on the cabinet (1), characterized in that, The motor comprises a main body (2) and a driving shaft (3), one end of the driving shaft (3) extends into the cabinet (1), and the main body (2) comprises a shell (21); The motor is internally provided with a flow channel (4) through which the cooling medium passes, the flow channel (4) penetrates the main body (2) and the driving shaft (3); The shell (21) is provided with a first inlet (211) in communication with the flow channel (4); The shell (21) or the part of the driving shaft (3) extending into the cabinet (1) is provided with a first outlet (31) in communication with the flow channel (4).

2. The oven according to claim 1, characterized in that, The flow channel (4) comprises a first passage (41) arranged in the driving shaft (3), the first passage (41) extends along the axial direction of the driving shaft (3), and the first outlet (31) is arranged at the end or the circumferential side of the driving shaft (3).

3. The oven according to claim 2, characterized in that, The cross section of the first passage (41) gradually increases along its own axial direction.

4. The oven of claim 1, wherein, The flow channel (4) further comprises a second passage (42) arranged in the main body (2) and a rotary passage (43) arranged in the driving shaft (3); One end of the second passage (42) is in communication with the first inlet (211), and the other end thereof is in communication with one end of the rotary passage (43); The other end of the rotary passage (43) is in communication with the first outlet (31), and the first outlet (31) is arranged on the shell (21).

5. The oven according to any one of claims 1-4, characterized in that, The shell (21) is internally provided with a cooling cavity (212) through which the cooling medium passes, and the shell (21) is further provided with a second inlet (213) and a second outlet (214), and the second inlet (213) and the second outlet (214) are both in communication with the cooling cavity (212).

6. The oven according to claim 5, characterized in that, The cooling cavity (212) is arranged around the shell (21).

7. The oven of claim 1, wherein, The driving shaft (3) is externally provided with a cooling cylinder (5), and a gap (51) through which the cooling medium flows is formed between the cooling cylinder (5) and the driving shaft (3); The main body (2) is provided with a third passage (22) in communication with the gap (51), and the surface of the main body (2) is provided with a third inlet in communication with the third passage (22).

8. The oven of claim 1, wherein, The main body (2) is provided with a heat insulation plate (6) on the side facing the cabinet (1), and is mounted on the cabinet (1) through the heat insulation plate (6).

9. The oven of claim 1, wherein, The cabinet (1) has a heating cavity (11), and the cabinet (1) is internally provided with a heat insulation layer (7) arranged between the heating cavity (11) and the main body (2).

10. A wafer baking apparatus characterized by comprising: The device comprises a rack (8) and at least two ovens as claimed in any one of claims 1-9, and each of the ovens is mounted on the rack (8).

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