Vacuum welding device and method for ultrathin vapor chamber

Abstract

The invention relates to the technical field of vapor chamber machining devices, and provides an ultrathin vapor chamber vacuum welding device and method.The ultrathin vapor chamber vacuum welding device comprises a feeding mechanism, a welding box, a laser welding window, a vacuum pump connector and a pressing assembly, a feeding opening is formed in the bottom of the welding box, and the feeding mechanism is used for feeding a vapor chamber to the feeding opening; the welding box is hollow, a vacuum cavity is formed in the welding box, and the vacuum cavity is communicated with the feeding port; the laser welding window is arranged at the top of the welding box in a sealed mode and is opposite to the feeding port in the vertical direction, and the laser welding window is used for allowing laser to penetrate through. The vacuum pump connector is arranged on the welding box, one end of the vacuum pump connector is communicated with the vacuum cavity, and the other end of the vacuum pump connector is connected with external vacuum equipment; the pressing assembly is arranged on the welding box and used for pressing and fixing the edge of the vapor chamber at the feeding port. The uniform-temperature plate welding device has the effects that the uniform-temperature plate can be conveniently fixed, and the welding precision is improved.

Description

Technical Field

[0001] This application relates to the field of heat exchanger processing equipment, and in particular to a vacuum welding device and method for ultra-thin heat exchangers. Background Technology

[0002] With the miniaturization of electronic products and the continuous compression of product space, the actual convection heat transfer area of ​​the original passive heat dissipation solution is small, resulting in the accumulation of heat in the original power consumption product of the chip, causing the local temperature of the product to be too high, affecting the normal user experience. A vapor chamber can be used as a heat dissipation solution to transfer and dissipate heat, and can very effectively and evenly diffuse heat to a surface laterally.

[0003] The manufacturing method of the heat spreader is as follows: First, make the upper cover, lower cover, and copper mesh of predetermined specifications; second, fix the copper mesh in the groove of the upper cover; third, form a portion of the rat-tail water inlet on both the upper and lower covers; fourth, weld the edges of the upper and lower covers together; fifth, insert the copper tube into the rat-tail water inlet and fix it with adhesive; sixth, inject water into the inner cavity of the product through the copper tube; seventh, perform vacuum treatment on the inner cavity of the product through the copper tube, and after the vacuum value reaches the predetermined value, clamp and seal the copper tube; eighth, heat the product at the heat source end to drive excess moisture into the copper tube; ninth, flatten and seal the rat-tail water inlet; tenth, weld and seal the rat-tail water inlet; eleventh, cut off the portion of the rat-tail water inlet and copper tube other than the weld line.

[0004] The existing heat spreader processing equipment first punches the raw materials into an upper and lower cover through a stamping process. After cutting the mesh with a mesh cutting and dotting equipment, it is welded to the upper cover. After dotting, it enters the edge sealing process, where the upper and lower covers are assembled and welded together. After edge sealing, a copper tube is inserted into the enlarged hole at the tail end using a tube insertion and glue dispensing equipment, and glue is applied to seal the opening. After glue dispensing, water is injected and vacuum is drawn using a first removal equipment. Once the vacuum value reaches the required value, the copper tube is clamped and sealed. Then, a second removal equipment is used for secondary degassing and laser welding sealing. Finally, the tail end and copper tube are cut off.

[0005] Regarding the aforementioned technologies, existing welding equipment requires manual fixation using jigs when welding heat spreaders. The fixation accuracy of the heat spreader is easily affected by the operator's skill level, thus impacting the welding accuracy. Therefore, improvements are needed. Summary of the Invention

[0006] To facilitate the fixing of the heat exchange plate, improve welding accuracy, and reduce the labor intensity of personnel, this application provides a vacuum welding device for an ultra-thin heat exchange plate.

[0007] Firstly, the ultrathin uniform temperature plate vacuum welding device provided in this application adopts the following technical solution: A vacuum welding device for ultrathin heat spreaders includes a feeding mechanism, a welding box, a laser welding window, a vacuum pump interface, and a clamping assembly. The welding box is located above the feeding mechanism, and a feed inlet is provided at the bottom of the welding box. The feeding mechanism is used to feed the heat spreader to the feed inlet. The welding box is hollow and forms a vacuum cavity, which communicates with the feed inlet. The laser welding window is sealed on the top of the welding box and is vertically opposite to the feed inlet. The laser welding window is used to allow laser light to pass through. The vacuum pump interface is located on the welding box, with one end connected to the vacuum chamber and the other end connected to an external vacuum device; the clamping assembly is located on the welding box and is used to clamp and fix the edge of the heat exchange plate at the feed inlet.

[0008] By adopting the above technical solution, the feeding mechanism in this application relies on the cooperation of a pneumatic telescopic rod and a feeding plate. Specifically, the fixture carrying the temperature equalization plate is placed on the feeding plate, which is then placed on the six-equal division divider. When the divider rotates to its position, the temperature equalization plate rotates directly below the discharge port. The pneumatic telescopic rod is then activated to move vertically upwards, thereby lifting the feeding plate and sealing the fixture at the inlet, achieving a tight connection and forming a sealed cavity environment. At this time, the temperature equalization plate is within the vacuum cavity.

[0009] Next, the clamping assembly presses the heat spreader plate firmly onto the fixture, thus fixing the heat spreader plate in place. The vacuum pump interface is used to connect a vacuum pump, which can remove air and water from the vacuum chamber during use. The vacuum chamber is evacuated by starting the vacuum equipment.

[0010] After vacuuming is completed, an external laser device is activated, which welds the compressed heat spreader through a laser welding window. The laser welding window is made of transparent quartz glass and has a quartz glass light passage, allowing the laser beam to be incident perpendicularly. By using a galvanometer scanning system or a robot to coordinate the movement of the laser beam, precise welding of annular and irregularly shaped welds can be achieved.

[0011] After welding is completed, the vacuum in the vacuum chamber is first released, and then the clamping component is released from its clamping effect on the heat spreader. The feeding mechanism controls the fixture to reset downwards so that the workers can unload the heat spreader.

[0012] Preferably, it also includes an observation window, which is sealed on the side wall of the welding box and is made of transparent quartz glass for workers to observe.

[0013] By adopting the above technical solution, the observation window is sealed and fitted with transparent quartz glass to observe the situation inside the vacuum chamber, making it convenient for staff to observe the welding effect of the heat spreader from the outside, so as to flexibly respond to unexpected situations in the production process.

[0014] Preferably, it also includes a vacuum breaking interface, which is located on the welding box and communicates with the vacuum chamber, and a vacuum valve is provided at the vacuum breaking interface; It also includes a vacuum gauge interface, which is located on the welding box and communicates with the vacuum chamber. A vacuum gauge is provided at the vacuum gauge interface.

[0015] By adopting the above technical solution, the vacuum breaking interface is used to install an L-shaped pneumatic high-vacuum valve, which is used to break the vacuum after evacuation. The essence of vacuum breaking is a "pressure balance process". The vacuum chamber is under negative pressure. By opening the channel through the valve, gas with a pressure close to that of the outside is introduced into the chamber, eliminating the pressure difference between the inside and outside of the chamber, and finally restoring the chamber pressure to normal pressure or slightly positive pressure, which facilitates the subsequent opening of the cover to remove and place the heat exchange plate.

[0016] The vacuum gauge interface is used to install a vacuum gauge to detect the vacuum value inside the chamber, making it easy to determine whether the vacuum level inside the vacuum chamber is maintained at the required pressure.

[0017] Preferably, the clamping assembly includes an outer guide rail, an outer sliding block, a driving component, a connecting shaft, an outer connecting rod, an inner first rod, an inner second rod, an inner pressure frame, and an inner guide rail. The outer guide rail is vertically mounted on the outer side wall of the welding box. The outer sliding block is jacked up and down on the outer guide rail. The driving component is connected to the outer sliding block and is used to control the jacking up and down of the outer sliding block. The connecting shaft is horizontally arranged and rotatably connected to the inside of the welding box, with the end of the connecting shaft extending outward; one end of the outer connecting rod is connected to the connecting shaft, and the other end is hinged to the outer sliding block; two connecting shafts are arranged in parallel, and two outer connecting rods are arranged symmetrically, with the two outer connecting rods respectively connected to the two connecting shafts; The inner first rod, inner second rod, inner pressure frame, and inner guide rail are all located inside the vacuum cavity. One end of the inner first rod is sleeved on the connecting shaft, and the other end is hinged to the inner second rod. The end of the inner second rod away from the inner first rod is hinged to the inner pressure frame. The inner guide rail is located on the inner wall of the welding box, and the inner pressure frame is slidably connected to the inner guide rail. The inner pressure frame is hollow and used to press the edge of the heat exchange plate. The inner first rod is connected to both connecting shafts, and each inner first rod is connected to the inner pressure frame through the inner second rod.

[0018] By adopting the above technical solution, during the pressing process, the driving component controls the outer sliding block to move vertically downward along the outer guide rail. Since the outer connecting rod is hinged to the outer sliding block, the movement of the outer sliding block changes the angle between the outer connecting rod and the outer sliding block. That is, the outer connecting rod will rotate around the connecting shaft as the pivot, thereby driving the connecting shaft to rotate.

[0019] The rotation of the connecting shaft can drive the inner first rod to rotate synchronously. Due to the connecting effect of the inner second rod and the limiting effect of the inner guide rail, the inner second rod transmits the movement of the inner first rod to the inner pressure frame, so that the inner pressure frame moves vertically downward along the inner guide rail, so that the inner pressure frame gradually approaches and presses against the heat spreader plate, thus completing the fixation of the heat spreader plate.

[0020] Preferably, the inner pressure frame is provided with a slider, the slider is slidably connected to the inner guide rail, the inner guide rail is provided with several parallel rails, and the slider is provided with several corresponding rails.

[0021] By adopting the above technical solution, the slider is engaged with the inner guide rail, and the up-and-down movement of the inner pressure frame is achieved by the cooperation between the slider and the inner guide rail. Multiple sliders and multiple inner guide rails cooperate with each other to improve the stability of the inner pressure frame during its up-and-down movement.

[0022] Preferably, it further includes a compression spring and a pressure plate. The pressure plate is disposed on the inner pressure frame and is used to elastically press the heat exchange plate. The two ends of the compression spring are respectively connected to the pressure plate and the inner pressure frame. The inner pressure frame has several countersunk holes. One end of the compression spring is located in the countersunk hole. The screw passes through the pressure plate and the compression spring and is screwed onto the inner pressure frame. The pressure plate can move relative to the inner pressure frame.

[0023] By adopting the above technical solution, when the inner second rod moves the inner pressure frame downward, the pressure plate will first approach and contact the heat spreader, realizing the pre-pressing of the heat spreader positioning fixture by the pressure plate. Next, a vacuum is drawn. After the vacuum is completed, the pressure plate is further controlled to move downward. Due to the presence of the compression spring, the pressure plate, under the reaction force of the heat spreader, will move relative to the inner pressure frame (i.e., the pressure plate will move in the direction closer to the inner pressure frame). At this time, the compression spring deforms and is compressed, achieving elastic compression contact between the pressure plate and the heat spreader. Compared to rigid pressing contact, the cooperation between the pressure plate and the compression spring can play a certain buffering and protective role, reducing damage to the heat spreader and improving the integrity of the heat spreader surface quality. Finally, laser welding is triggered to weld the heat spreader.

[0024] It should be noted that the reason for pre-compressing the heat spreader with a pressure plate before vacuuming is that, after the heat spreader is filled with water, half of it is laser-welded under normal conditions, and then the excess water and air are removed at a vacuum station before welding the other half. Pre-compression allows for some space in the product, enabling the removal of excess water and air from the heat spreader cavity. If the heat spreader is directly compressed all at once before vacuuming, it would be difficult to remove all the water. The amount of water in the heat spreader cavity is crucial, affecting its performance. Pre-compression with the pressure plate allows for precise control of the amount of water remaining in the cavity, down to 0.01g.

[0025] Preferably, the driving component is a servo motor, which is connected to the outer sliding block via a linear actuator.

[0026] By adopting the above technical solution, the servo motor is connected to the outer sliding block through a linear actuator, which can drive the outer sliding block to perform linear motion, enabling the outer sliding block to move up and down along the outer guide rail. The closed-loop control characteristics can provide real-time feedback of linear displacement, speed, and other signals, dynamically correcting transmission errors and load disturbances, allowing repeatability positioning accuracy to easily reach the micron level and significantly reducing cumulative deviation. When paired with actuators such as ball screws or linear servo motors, the mechanical transmission clearance is extremely small and the rigidity is sufficient, effectively suppressing vibration and creep phenomena caused by high-speed start-stop or load changes, ensuring the smoothness of the motion process. At the same time, the servo system has a fast response speed, can quickly track command signals, reduce dynamic lag, and maintain accurate positioning even in high-frequency reciprocating motion, significantly improving motion consistency and reliability under high-precision working conditions. If the product preload is too loose, the moisture will be sucked out; therefore, a servo motor is used to control the pressing stroke of the pressure plate.

[0027] Preferably, the welding box includes a box body and a cover plate, the cover plate is fastened to the box body by fasteners, and the laser welding window is sealed on the cover plate.

[0028] By adopting the above technical solution, welding impurities will remain on the inner wall of the welding box after long-term use, which can easily contaminate the welding of the heat spreader. To facilitate the cleaning of contaminants, the entire cover can be removed from the box, opening the top of the box and providing sufficient operating space for cleaning.

[0029] Preferably, the box body is provided with an extension plate on its periphery near the feed inlet, and the extension plate is provided with a sealing strip. The sealing strip is near the feed inlet and is used to seal with the fixture carrying the temperature equalization plate.

[0030] By adopting the above technical solution, when the feeding mechanism controls the fixture to move in the direction close to the feed inlet, the fixture and the sealing strip press against each other to achieve a tight connection, improve the sealing of the vacuum chamber, and ensure the welding effect of the heat spreader.

[0031] Secondly, this application also provides a vacuum welding method for ultra-thin heat exchange plates, which uses an ultra-thin heat exchange plate vacuum welding device with all the above-described structures to weld the heat exchange plate, including the following steps: S1. During welding, the fixture carrying the heat spreader is driven upward by the feeding mechanism and moves close to the welding box to seal the feed port. At this time, the heat spreader is in a sealed vacuum chamber. S2. Next, the clamping assembly is run to press the heat spreader plate onto the fixture to fix the heat spreader plate. Then, the vacuum equipment is started to evacuate the vacuum chamber. S3. After vacuuming is completed, the laser equipment is run. The laser equipment welds the compressed heat exchange plate through the laser welding window. S4. After welding, the vacuum in the vacuum chamber is first released, and then the clamping assembly releases its clamping effect on the heat spreader. The feeding mechanism controls the fixture to reset so that the heat spreader can be unloaded.

[0032] In summary, this application includes at least one of the following beneficial technical effects: (1) By setting up the clamping component, the feeding mechanism feeds the heat spreader plate to the feed inlet, at which time the vacuum chamber forms a sealed environment; then the clamping component is run to press the heat spreader plate onto the fixture, thereby fixing the heat spreader plate; then the vacuum equipment is started to evacuate the vacuum chamber. After the evacuation is completed, the external laser equipment is run to weld the clamped heat spreader plate through the laser welding window. During the welding process, the heat spreader plate is subjected to pressure from the clamping component, ensuring the stability of the heat spreader plate position, and the laser equipment can accurately weld the heat spreader plate according to the preset program.

[0033] (2) By setting up a pressure plate and a compression spring, due to the presence of the compression spring, the pressure plate will move relative to the inner pressure frame due to the reaction force of the heat exchange plate (i.e., the pressure plate will move in the direction closer to the inner pressure frame). At this time, the compression spring will deform and be compressed, so as to achieve elastic compression contact between the pressure plate and the heat exchange plate and reduce damage to the heat exchange plate.

[0034] (3) By setting the welding box as a box body and a cover, the staff can remove the entire cover from the box body, so that the top of the box body is open, giving the staff enough operating space to clean up the dirt. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the vacuum welding apparatus in the embodiments of this application; Figure 2 This is a schematic diagram of the vacuum welding apparatus from another perspective in the embodiments of this application; Figure 3 This is a partial structural schematic diagram of the vacuum welding apparatus in the embodiments of this application; Figure 4 This is a structural schematic diagram of the connection state between the inner pressure frame and the pressure plate in an embodiment of this application; Figure 5 This is a schematic diagram of the structure of the inner pressure frame in an embodiment of this application.

[0036] Reference numerals: 1. Welding box; 11. Box body; 12. Cover plate; 2. Laser welding window; 3. Vacuum pump interface; 4. Clamping assembly; 41. Outer guide rail; 42. Outer sliding block; 43. Drive component; 44. Connecting shaft; 45. Outer connecting rod; 46. Inner first rod; 47. Inner second rod; 48. Inner pressure frame; 49. Inner guide rail; 5. Feed port; 6. Vacuum chamber; 7. Observation window; 8. Vacuum breaking interface; 9. Vacuum gauge interface; 10. Slider; 13. Compression spring; 14. Extension plate; 15. Sealing strip; 16. Pressure plate; 17. Countersunk hole. Detailed Implementation

[0037] The technical solutions of this application will now be described with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can be embodied in many different forms and is not limited to the embodiments described herein.

[0038] In the representation of this application, the reference to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., means that a specific feature, structure, material, or characteristic represented in connection with that embodiment or example is included in at least one embodiment or example of this application. Moreover, the specific features, structures, materials, or characteristics represented may be combined in any suitable manner in one or more embodiments or examples.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0040] In the description of the embodiments of this application, unless otherwise expressly specified and limited, the technical terms "installation," "connection," "joining," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection; a detachable connection; an integral part; or a mechanical connection. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0041] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Without conflict, those skilled in the art can combine and integrate the different embodiments or examples shown in this application, as well as the features of those embodiments or examples.

[0042] This application discloses a vacuum welding apparatus for ultrathin heat spreaders. (Refer to...) Figures 1 to 3The vacuum welding apparatus includes a feeding mechanism, a welding box 1, a laser welding window 2, a vacuum pump interface 3, and a clamping assembly 4. The welding box 1 is rectangular and located above the feeding mechanism. A feed inlet 5 is located at the bottom of the welding box 1, and the feeding mechanism is used to feed a fixture containing a heat exchange plate to the feed inlet 5. The welding box 1 is hollow and forms a vacuum chamber 6, which communicates with the feed inlet 5. The laser welding window 2 is sealed at the top of the welding box 1 and is vertically opposite the feed inlet 5, allowing laser light to pass through.

[0043] It should be noted that in this embodiment, the feeding of the heat spreader plate is achieved through the cooperation of a pneumatic telescopic rod and a feeding plate. Specifically, the fixture carrying the heat spreader plate is placed on the feeding plate, which in turn is placed on the six-equal division divider. When the divider rotates to its final position, the heat spreader plate rotates to be directly below the discharge port. The pneumatic telescopic rod is then activated to move vertically upward, thereby lifting the feeding plate and sealing the fixture at the inlet 5, achieving a tight connection and forming a sealed cavity environment. At this time, the heat spreader plate is located within the vacuum chamber 6.

[0044] Vacuum pump interface 3 is installed on welding box 1, with one end connected to vacuum chamber 6. The other end of vacuum pump interface 3 is connected to external vacuum equipment (such as a vacuum pump), which is used to evacuate vacuum chamber 6. Clamping assembly 4 is installed on welding box 1 and is used to clamp and fix the edges of the heat spreader plate at feed inlet 5. After the heat spreader plate is fed, clamping assembly 4 is used to clamp the heat spreader plate onto the fixture, thus fixing the heat spreader plate. Then, the vacuum equipment is activated to remove air and water from vacuum chamber 6. After evacuation, external laser equipment is activated, and the laser equipment welds the clamped heat spreader plate through laser welding window 2. Because laser welding window 2 is made of transparent quartz glass, it serves as a light-transmitting channel, allowing the laser beam to be incident perpendicularly. By using a galvanometer scanning system or a robot to collaboratively control the laser beam movement, precise welding of annular and irregularly shaped welds is achieved.

[0045] Specifically, the welding box 1 is also equipped with an observation window 7, a vacuum breaking interface 8, and a vacuum gauge interface 9. The observation window 7 is sealed on the side wall of the welding box 1 and is made of transparent quartz glass, allowing workers to observe and respond flexibly to unexpected situations during welding. The vacuum breaking interface 8 is fixedly connected to the welding box 1 and communicates with the vacuum chamber 6. An L-shaped pneumatic high-vacuum valve is installed at the vacuum breaking interface 8. The vacuum gauge interface 9 is fixedly connected to the welding box 1 and communicates with the vacuum chamber 6. A vacuum gauge is installed at the vacuum gauge interface 9 to detect the vacuum value inside the chamber, facilitating the determination of whether the vacuum level in the vacuum chamber 6 is maintained at the required pressure during welding. After welding, the channel is opened through the L-shaped pneumatic high-vacuum valve to introduce gas with a pressure close to that of the outside environment into the chamber, eliminating the pressure difference between the inside and outside of the chamber, releasing the clamping component 4 from the pressure of the heat spreader plate, and causing the loading mechanism to control the fixture to reset downwards, allowing workers to unload the heat spreader plate.

[0046] In this embodiment, the clamping assembly 4 includes an outer guide rail 41, an outer sliding block 42, a driving component 43, a connecting shaft 44, an outer connecting rod 45, an inner first rod 46, an inner second rod 47, an inner pressure frame 48, and an inner guide rail 49. The outer guide rail 41 is vertically mounted on the outer side wall of the welding box 1. The outer sliding block 42 is flexibly mounted on the outer guide rail 41. The driving component 43 is connected to the outer sliding block 42 and is used to control the lifting and lowering of the outer sliding block 42. The driving component 43 is a servo motor, which is connected to the outer sliding block 42 through a linear actuator. For example, if the servo motor is paired with a ball screw: the servo motor drives the screw to rotate, and the nut on the screw converts the rotational motion into axial linear motion, thereby realizing the lifting and lowering of the outer sliding block 42. It has high precision and rigidity, making it suitable for heavy-duty and high-precision applications.

[0047] The connecting shaft 44 is horizontally positioned and rotatably connected inside the welding box 1, with its end extending outwards. One end of the outer connecting rod 45 is connected to the connecting shaft 44, and the other end is hinged to the outer sliding block 42. Two connecting shafts 44 are arranged in parallel, and two outer connecting rods 45 are arranged symmetrically on the left and right sides. The two outer connecting rods 45 are respectively connected to the two connecting shafts 44.

[0048] The inner first rod 46, inner second rod 47, inner pressure frame 48, and inner guide rail 49 are all located within the vacuum chamber 6. One end of the inner first rod 46 is sleeved on the connecting shaft 44, and the other end is hinged to the inner second rod 47. The end of the inner second rod 47 furthest from the inner first rod 46 is hinged to the inner pressure frame 48. The inner guide rail 49 is fixedly connected to the inner wall of the welding box 1, and the inner pressure frame 48 is slidably connected to the inner guide rail 49. A slider 10 is fixedly connected to the inner pressure frame 48, and the slider 10 is slidably connected to the inner guide rail 49. The slider 10 and the inner guide rail 49 cooperate with each other to restrict the linear movement of the inner pressure frame 48. Several inner guide rails 49 are arranged in parallel, and several sliders 10 are correspondingly arranged, with each slider 10 sliding on its respective inner guide rail 49. The cooperation of multiple sliders 10 and multiple inner guide rails 49 improves the stability of the inner pressure frame 48 when it moves up and down. The inner pressure frame 48 is hollow and is used to press the edge of the heat exchange plate; both connecting shafts 44 are connected to the inner first rod 46, and each inner first rod 46 is hinged to the inner pressure frame 48 through the inner second rod 47.

[0049] When pressed, the drive unit 43 controls the outer sliding block 42 to move vertically downward along the outer guide rail 41. Since the outer connecting rod 45 is hinged to the outer sliding block 42, the movement of the outer sliding block 42 changes the angle between the outer connecting rod 45 and the outer sliding block 42. That is, the outer connecting rod 45 will rotate around the connecting shaft 44 as the pivot, thereby driving the connecting shaft 44 to rotate.

[0050] The rotation of the connecting shaft 44 can drive the inner first rod 46 to rotate synchronously. Due to the connecting effect of the inner second rod 47 and the limiting effect of the inner guide rail 49, the inner second rod 47 transmits the movement of the inner first rod 46 to the inner pressure frame 48, so that the inner pressure frame 48 moves vertically downward along the inner guide rail 49, so that the inner pressure frame 48 gradually approaches and presses against the heat exchange plate, thus completing the fixation of the heat exchange plate.

[0051] In some embodiments, refer to Figure 4 and Figure 5 A pressure plate 16 is also installed on the inner pressure frame 48. The length and width of the pressure plate 16 are the same as those of the inner pressure frame 48. The pressure plate 16 is used to elastically compress the heat exchange plate. The pressure plate 16 is connected to the inner pressure frame 48 by a compression spring 13 and screws. The two ends of the compression spring 13 are connected to the pressure plate 16 and the inner pressure frame 48 respectively. The inner pressure frame 48 has several countersunk holes 17. One end of the compression spring 13 is located in the countersunk hole 17. The screw passes through the pressure plate 16 and the compression spring 13 and is screwed onto the inner pressure frame 48. The pressure plate 16 can move relative to the inner pressure frame 48.

[0052] When the inner second rod 47 moves the inner pressure frame 48 downward, the pressure plate 16 will first approach and contact the heat spreader, thus pre-pressing the heat spreader positioning fixture with the pressure plate 16. Next, a vacuum is drawn. After the vacuum is complete, the pressure plate 16 is further controlled to move downward. Due to the presence of the compression spring 13, the pressure plate 16 experiences a reaction force from the heat spreader and will move relative to the inner pressure frame 48 (i.e., the pressure plate 16 will move in the direction closer to the inner pressure frame 48). At this time, the compression spring 13 deforms and is compressed, achieving elastic compression contact between the pressure plate 16 and the heat spreader. Compared to rigid pressing contact, the cooperation between the pressure plate 16 and the compression spring 13 provides a certain buffering protection, reducing damage to the heat spreader and improving the integrity of the heat spreader surface quality. Finally, laser welding is triggered to weld the heat spreader. Simultaneously, when the pressure plate 16 shifts, the screws act as guides and limits, ensuring stable displacement of the pressure plate 16. The pressure plate 16 has a groove for accommodating screws. The end of the screw away from the inner pressure frame 48 is deeply embedded in the groove. This ensures that the pressure surface of the pressure plate 16 presses on the heat exchange plate, while the end of the screw does not touch the heat exchange plate.

[0053] In addition, in this embodiment, the welding box 1 includes a box body 11 and a cover plate 12. The cover plate 12 is fastened to the end of the box body 11 away from the feed port 5 by fasteners, which are fastening bolts or fastening screws. The laser welding window 2 is sealed on the cover plate 12. An extension plate 14 is integrally connected to the periphery of the box body 11 near the feed port 5. A sealing strip 15 is fixedly installed on the extension plate 14. The sealing strip 15 is close to the feed port 5 and is used to seal with the fixture carrying the heat spreader. When the feeding mechanism controls the fixture to move in the direction close to the feed port 5, the fixture and the sealing strip 15 close together and press tightly to achieve a tight connection, improve the sealing of the vacuum chamber 6, and ensure the welding effect of the heat spreader.

[0054] After prolonged use, welding impurities may remain on the inner wall of the welding box 11, which can easily contaminate the welding of the heat spreader. To facilitate cleaning, the entire cover 12 can be removed from the box 11, opening the top of the box 11 and providing sufficient operating space for cleaning.

[0055] The implementation principle of the ultrathin heat spreader vacuum welding device according to this application embodiment is as follows: During welding, the heat spreader is first fed using a feeding mechanism, so that the fixture carrying the heat spreader is sealed at the feed inlet 5, thereby forming a sealed cavity environment. At this time, the heat spreader is located in the vacuum cavity 6. Then, the clamping assembly 4 is operated to press the heat spreader onto the fixture, completing the fixation of the heat spreader. The vacuum pump interface 3 is used to connect a vacuum pump. By starting the vacuum pump, the vacuum cavity 6 is evacuated, removing the air and water inside the vacuum cavity 6.

[0056] After vacuuming is completed, the external laser equipment is activated, and the laser equipment welds the compressed heat spreader through the laser welding window 2. The laser welding window 2 is a quartz glass light channel that allows the laser beam to be incident perpendicularly. By using a galvanometer scanning system or a robot to coordinate the movement of the laser beam, precise welding of annular and irregularly shaped welds can be achieved.

[0057] After welding is completed, the L-shaped pneumatic high vacuum valve is opened to release the vacuum state in the vacuum chamber 6. Then, the clamping component 4 is released from its clamping effect on the heat exchange plate. Finally, the feeding mechanism controls the fixture to reset downward so that the workers can unload the welded heat exchange plate.

[0058] Based on the above embodiments, this application also provides a vacuum welding method for ultra-thin heat spreaders, which uses an ultra-thin heat spreader vacuum welding device with all the above structures to weld the heat spreader, including the following steps: S1. When the welding operation starts, the fixture carrying the heat exchange plate is lifted upward under the drive of the feeding mechanism and gradually approaches the welding box 1 to form a seal on the feed port 5; at this time, the heat exchange plate is in the sealed vacuum chamber 6. S2. Then, start the clamping assembly 4 to press the heat spreader plate tightly against the surface of the fixture, completing the positioning and fixing of the heat spreader plate; then start the vacuum equipment to perform a vacuuming operation on the vacuum chamber 6. S3. After the vacuuming operation is completed, start the laser equipment. The equipment will perform welding operations on the heat spreader that has been pressed and positioned through the laser welding window 2. S4. After the welding operation is completed, the vacuum in the vacuum chamber 6 is released, and then the clamping assembly 4 releases the clamping state on the heat spreader. The feeding mechanism drives the fixture to return to the initial position, preparing for the subsequent unloading operation of the heat spreader.

[0059] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An ultra-thin vapor chamber vacuum welding device, characterized in that, The utility model relates to a laser welding device for uniform temperature plate, including feeding mechanism, welding box (1), laser welding window (2), vacuum pump interface (3) and compression assembly (4), the welding box (1) is located feeding mechanism's top, the bottom of welding box (1) is equipped with feeding port (5), the feeding mechanism is used to the uniform temperature plate feeding to feeding port (5) place, the welding box (1) is hollow and is formed with vacuum chamber (6), and the vacuum chamber (6) is communicated with feeding port (5);Laser welding window (2) is sealed in the top of welding box (1) with feeding port (5) is opposite up and down, and laser welding window (2) is used for the laser transmission; Vacuum pump interface (3) is located on the welding box (1), and one end is communicated with the vacuum chamber (6), and the other end of vacuum pump interface (3) is connected with the vacuum equipment outside;Compression assembly (4) is located on the welding box (1), and is used for the edge compression fixation of the uniform temperature plate at feeding port (5).

2. The vacuum brazing device of claim 1, wherein, It also includes an observation window (7), which is sealed on the side wall of the welding box (1), and the observation window (7) is made of transparent quartz glass for observation by the staff.

3. The vacuum brazing device of claim 1, wherein the vacuum brazing device is configured to be used in a process of manufacturing a super-thin vapor chamber. It also includes a vacuum breaking interface (8), which is located on the welding box (1) and communicated with the vacuum chamber (6), and a vacuum valve is arranged at the vacuum breaking interface (8). It also includes a vacuum gauge interface (9), which is located on the welding box (1) and communicated with the vacuum chamber (6), and a vacuum gauge is arranged at the vacuum gauge interface (9).

4. The vacuum brazing device of claim 1, wherein, The compression assembly (4) includes an outer guide rail (41), an outer sliding block (42), a driving member (43), a connecting shaft (44), an outer connecting rod (45), an inner first rod (46), an inner second rod (47), an inner compression frame (48), and an inner guide rail (49). The outer guide rail (41) is vertically arranged on the outer side wall of the welding box (1). The outer sliding block (42) is vertically arranged on the outer guide rail (41). The driving member (43) is connected with the outer sliding block (42) to control the vertical movement of the outer sliding block (42). The connecting shaft (44) is horizontally arranged and rotatably connected to the inner part of the welding box (1). The end of the connecting shaft (44) extends outward. One end of the outer connecting rod (45) is connected with the connecting shaft (44), and the other end is hingedly connected with the outer sliding block (42). Two connecting shafts (44) are parallelly arranged. Two outer connecting rods (45) are symmetrically arranged, and two outer connecting rods (45) are respectively connected with two connecting shafts (44). The inner first rod (46), the inner second rod (47), the inner pressing frame (48) and the inner guide rail (49) are located in the vacuum cavity (6), one end of the inner first rod (46) is sleeved on the connecting shaft (44), and the other end is hingedly connected with the inner second rod (47); the inner second rod (47) is hingedly connected to the inner pressing frame (48) away from the inner first rod (46); the inner guide rail (49) is arranged on the inner wall of the welding box (1), and the inner pressing frame (48) is slidably connected to the inner guide rail (49); the inner pressing frame (48) is hollow and used for pressing the edge of the uniform temperature plate; the two connecting shafts (44) are connected with the inner first rods (46), and the inner first rods (46) are connected with the inner pressing frame (48) through the inner second rods (47).

5. The vacuum brazing device of claim 4, wherein the vacuum brazing device is configured to be used in a process of manufacturing a super-thin vapor chamber. The inner pressing frame (48) is provided with a sliding block (10), the sliding block (10) is slidably connected to the inner guide rail (49), and the inner guide rail (49) is provided with a plurality of parallel sliding blocks (10).

6. The vacuum brazing device of claim 4, wherein the vacuum brazing device is configured to be used in a process of manufacturing a super-thin vapor chamber. Further comprising a compression spring (13) and a pressing plate (16), the pressing plate (16) is arranged on the inner pressing frame (48) and used for elastically pressing the uniform temperature plate, and the two ends of the compression spring (13) are connected with the pressing plate (16) and the inner pressing frame (48) respectively; a plurality of countersunk holes (17) are arranged on the inner pressing frame (48), one end of the compression spring (13) is located in the countersunk hole (17), a screw passes through the pressing plate (16) and the compression spring (13) and is screwed on the inner pressing frame (48), and the pressing plate (16) can move relative to the inner pressing frame (48).

7. The vacuum brazing device of claim 6, wherein the vacuum brazing device is configured to be used in a process of manufacturing a super-thin vapor chamber. The driving member (43) is a servo motor, and the servo motor is connected with the outer sliding block (42) through a linear actuator.

8. The vacuum brazing device of claim 1, wherein, The welding box (1) comprises a box body (11) and a cover plate (12), the cover plate (12) is locked on the box body (11) through a fastener, and the laser welding window (2) is sealingly arranged on the cover plate (12).

9. The vacuum brazing device of claim 8, wherein, The box body (11) is provided with an extension plate (14) near the circumferential side of the feeding port (5), the extension plate (14) is provided with a sealing strip (15), the sealing strip (15) is close to the feeding port (5) and is used for sealing cooperation with a jig carrying the uniform temperature plate.

10. A method for bonding a uniform temperature plate by using the vacuum bonding device for a uniform temperature plate according to any one of claims 1 to 9, characterized by, The method comprises the following steps: S1, when welding, the jig carrying the uniform temperature plate is driven upward by the feeding mechanism and approaches the welding box (1), the feeding port (5) is closed, and at this time the uniform temperature plate is in the sealed vacuum cavity (6); S2, then the pressing assembly (4) is operated to press the uniform temperature plate on the jig, the uniform temperature plate is fixed, and then the vacuum equipment is started to vacuum the vacuum cavity (6); S3, after vacuuming is completed, the laser equipment is operated, and the laser equipment transmits through the laser welding window (2) to weld the pressed uniform temperature plate; S4, after welding is completed, the vacuum degree of the vacuum cavity (6) is broken first, then the pressing assembly (4) releases the pressing effect on the uniform temperature plate, and the feeding mechanism controls the jig to reset, so that the uniform temperature plate is unloaded.

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