An unobstructed observation window for the door of a vacuum evaporation coating machine

Abstract

This invention relates to the field of vacuum evaporation coating machine technology, specifically to an unobstructed observation window for the door of a vacuum evaporation coating machine. The window includes a mounting frame, with an external light-shielding mechanism connected to the side of the mounting frame away from the vacuum evaporation coating machine's door. Inside the mounting frame, a first anti-collision plate and a second anti-collision plate are connected via a support and adjustment assembly. A first glass pane and a second glass pane are sequentially installed from back to front within the mounting frame on the front side of the second anti-collision plate. This unobstructed observation window for the vacuum evaporation coating machine door supports and installs the first and second anti-collision plates via an external mounting ring and a toothed ring inside the support and adjustment assembly. This ensures that the interior of the first and second anti-collision plates is unobstructed, thus preventing obstruction of the middle area of ​​the first and second glass panes and improving the viewing effect and quality.

Description

Technical Field

[0001] This invention relates to the field of vacuum evaporation coating machine technology, specifically to an unobstructed observation window for the door of a vacuum evaporation coating machine. Background Technology

[0002] In the manufacturing process of semiconductors, optical components, etc., vacuum evaporation machines are used to heat and evaporate the coating material, so that the coating material vaporizes and is deposited on the surface of the substrate to form a thin film. An observation window needs to be installed through the door of the vacuum evaporation machine to observe the evaporation process inside.

[0003] For example, the patent disclosed in the prior art with publication number "CN216445456U" is entitled "An observation window structure for a vacuum coating machine." It discloses that six threaded holes are evenly distributed on the outer circumference of the flip flange, and a semi-circular annular groove is opened at the front end of the rotating flange. The two positions correspond exactly. A fluoroplastic pin passes through the threaded holes of the flip flange and gets stuck in the semi-circular annular groove of the rotating flange, thus limiting the rotating flange and preventing it from falling off. Simultaneously, because of this semi-circular annular groove, the rotating flange can rotate relative to the flip flange. There is a recessed platform at the front end of the rotating flange. Before assembly, a polarizing film is attached to one side of the second borosilicate glass, and the side without the polarizing film is placed in the recessed platform. The second borosilicate glass is then bonded to the rotating flange. When the rotating flange rotates, the two pieces of glass can... The angle between polarizing films changes, thereby altering the brightness during observation. For example, the prior art patent application with publication number "CN120291044A" entitled "An observation window assembly for a vacuum evaporation machine door for observing optical film materials" discloses that a first anti-slip plate, a second anti-slip plate, a first glass, and a second glass are arranged sequentially on the observation window body from the inside to the outside of the cavity. A bushing is fitted around the second rotating shaft, and one end of the bushing is engaged with the center of the first glass. Locking nuts are provided on both sides of the first glass to lock the first glass to the bushing. The outer edge of the second glass is located between the mounting frame and the external light-shielding device. The center of the second glass is fitted around the outer ring of the bushing, and the second glass is locked to the bushing by the locking nuts.

[0004] In the existing technology, the observation window has components such as a first adjusting bolt, a second adjusting bolt, and a bushing. These components obstruct the middle area between the first and second glass panes, thus hindering the view of the vacuum evaporation machine's interior. This results in a poor viewing experience and prevents a clear view of the machine's interior. Therefore, we propose an unobstructed observation window for vacuum evaporation machine doors to address these issues. Summary of the Invention

[0005] The purpose of this invention is to provide an unobstructed observation window for the door of a vacuum evaporation machine, to solve the problem mentioned in the background art. Currently available observation windows, due to the inclusion of components such as a first adjusting bolt, a second adjusting bolt, and a bushing, obstruct the view of the middle area between the first and second glass panes. This obstruction hinders the view of the interior of the vacuum evaporation machine, thus affecting the viewing experience and preventing a clear view of the machine's interior.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an unobstructed observation window for a vacuum evaporation machine door, comprising a mounting frame that is installed through the front side of the cavity door of the vacuum evaporation machine, and an external light-shielding mechanism is connected to the side of the mounting frame away from the cavity door of the vacuum evaporation machine. The interior of the mounting frame is connected to a first anti-collision plate and a second anti-collision plate through a support and adjustment component, and a first glass and a second glass are installed sequentially from back to front in the mounting frame on the front side of the second anti-collision plate.

[0007] Preferably, the external light-shielding mechanism includes a connecting frame and an external light-shielding plate, both of which are circularly arranged. The rear side of the connecting frame is connected to the side of the mounting frame away from the cavity door of the vacuum evaporation machine by screws. A light-shielding sheet is embedded in the interior of the external light-shielding plate. A connecting column is fixed through the right side of the external light-shielding plate, and the rear end of the connecting column is rotatably connected to the connecting frame.

[0008] Preferably, the light-shielding sheet is dark glass, and the outer light-shielding plate forms a rotating structure with the connecting column and the connecting frame.

[0009] Preferably, a second anti-splatter plate is provided on the front side of the first anti-splatter plate. Both the first and second anti-splatter plates are larger than a semicircle but smaller than a full circle to prevent the film material from splashing onto the first and second glass from the vertical space junction of the first and second anti-splatter plates, thereby reducing the replacement frequency of the first and second glass.

[0010] Preferably, the support and adjustment assembly includes an outer mounting ring plate installed on the outside of the first anti-collision plate, and the outer mounting ring plate is rotatably installed on the inner wall of the mounting frame. A toothed ring is fixed on the outside of the second anti-collision plate, and the front and rear sides of the toothed ring are rotatably connected to the inner wall of the mounting frame through sealed bearings.

[0011] Preferably, a control lever is rotatably mounted on the left side of the mounting frame, and a transmission gear is keyed to the rear outer side of the control lever, with the right side of the transmission gear meshing with a gear ring.

[0012] Preferably, the front side of the first anti-collision plate is provided with an arc-shaped groove, and the arc length of the first anti-collision plate is greater than the arc length of the groove, and a protruding post is fixed on the rear side of the second anti-collision plate, with the rear end of the protruding post inserted into the groove.

[0013] Preferably, a semi-circular outer sealing block is fixed to the upper outer side of both the first glass and the second glass, and the outer sealing block is in concave-convex fit with a semi-circular groove opened on the upper surface of the mounting frame, and the outer side surface of the first glass and the second glass is in close contact with the inner side wall of the mounting frame.

[0014] Preferably, a plug-in block is installed on the right side of the outer sealing block, and the bottom of the plug-in block is inclined, and a slot is opened inside the bottom of the plug-in block.

[0015] Preferably, a locking plate is installed on the right side of the mounting frame, and a T-shaped locking rod is provided through the inside of the right side of the locking plate. A reset spring is nested on the outer side of the right end of the locking rod, and the left end of the locking rod is inserted into a slot opened inside the plug-in block.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: the vacuum evaporation machine door uses an unobstructed observation window, with no obstructions inside the first and second anti-collision plates, thus avoiding obstruction of the middle area of ​​the first and second glass panels and preventing any obstruction of the view. Therefore, the entire observation window allows for unobstructed viewing of the interior of the vacuum evaporation machine, thereby improving the viewing effect and quality. The specific details are as follows:

[0017] (1) The first anti-collision plate and the second anti-collision plate are supported and installed by the outer mounting ring plate and toothed ring inside the support control component, so that there are no obstructions inside the first anti-collision plate and the second anti-collision plate, and thus the middle part of the first glass and the second glass will not be obstructed, thus the view will not be blocked. Therefore, the entire observation window can be used to view the inside of the vacuum evaporation machine without obstruction, thereby improving the viewing effect and viewing quality.

[0018] (2) Furthermore, by rotating the control lever, the transmission gear is driven to rotate, which in turn drives the gear ring and the second anti-collision plate to rotate. Therefore, it is easy to rotate the second anti-collision plate to coincide with the first anti-collision plate. At the same time, by sliding the protrusion in the groove, the second anti-collision plate will drive the first anti-collision plate to rotate together when it continues to rotate. Therefore, the operator can flexibly adjust the viewing range of the observation window to achieve 360° full-view adjustment.

[0019] (3) The semi-circular outer sealing block is connected to the semi-circular groove on the surface of the mounting frame by a concave-convex seal, which not only facilitates the support and installation of the first glass and the second glass, but also facilitates the disassembly and replacement of the first glass and the second glass in the later stage. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the installation structure of the observation window of the present invention;

[0021] Figure 2 This is a schematic diagram of the rear view of the cavity door structure of the present invention;

[0022] Figure 3 This is a schematic diagram of the three-dimensional structure of the mounting frame of the present invention;

[0023] Figure 4 This is a schematic diagram of the rear view of the mounting frame structure of the present invention;

[0024] Figure 5 This is a schematic diagram of the separation structure of the mounting frame and the external light-shielding mechanism of the present invention;

[0025] Figure 6 This is a schematic diagram of the separation structure of the first and second glass from the mounting frame in this invention;

[0026] Figure 7 This is a schematic diagram of the three-dimensional structure of the second anti-stick plate of the present invention;

[0027] Figure 8 This is a schematic diagram of the connection structure between the first anti-collision plate and the second anti-collision plate of the present invention;

[0028] Figure 9 This is a schematic diagram of the separation structure of the first anti-collision plate and the second anti-collision plate of the present invention;

[0029] Figure 10 This is a partial cross-sectional view of the locking plate of the present invention.

[0030] In the diagram: 1. Mounting frame; 2. Cavity door; 3. External light-shielding mechanism; 31. Connecting frame; 32. External light-shielding plate; 33. Light-shielding sheet; 4. Connecting column; 5. First anti-collision plate; 51. Slide groove; 52. External mounting ring plate; 6. Second anti-collision plate; 61. Gear ring; 62. Protruding column; 7. First glass; 8. Second glass; 9. External sealing block; 91. Insertion block; 10. Transmission gear; 11. Control lever; 12. Locking plate; 121. Locking lever; 122. Return spring. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Please see Figures 1-10 The present invention provides the following technical solution:

[0033] Example 1: In this example, the vacuum evaporation machine door uses an unobstructed observation window. The first anti-collision plate 5 and the second anti-collision plate 6 have no obstructions inside, thus not blocking the middle area of ​​the first glass 7 and the second glass 8 and obstructing the view. Therefore, the entire observation window allows for unobstructed viewing of the interior of the vacuum evaporation machine, thereby improving the viewing effect and quality. For the specific structure, please refer to the attached diagram. Figures 1-9 As shown, the mounting frame 1 is installed through the front side of the cavity door 2 of the vacuum evaporation machine, and the side of the mounting frame 1 away from the cavity door 2 of the vacuum evaporation machine is connected to an external light-shielding mechanism 3. The interior of the mounting frame 1 is connected to a first anti-stick plate 5 and a second anti-stick plate 6 through a support and adjustment component. The first glass 7 and the second glass 8 are installed sequentially from back to front in the mounting frame 1 on the front side of the second anti-stick plate 6.

[0034] The outer light-shielding mechanism 3 includes a connecting frame 31 and an outer light-shielding plate 32, both of which are circularly arranged. The rear side of the connecting frame 31 is connected to the side of the mounting frame 1 away from the cavity door 2 of the vacuum evaporation machine by screws. A light-shielding sheet 33 is embedded inside the outer light-shielding plate 32. A connecting column 4 is fixed through the right side of the outer light-shielding plate 32, and the rear end of the connecting column 4 is rotatably connected to the connecting frame 31. The light-shielding sheet 33 is dark glass. The outer light-shielding plate 32 forms a rotating structure with the connecting frame 31 through the connecting column 4. A second anti-sticking plate 6 is provided on the front side of the first anti-sticking plate 5. Both the first anti-sticking plate 5 and the second anti-sticking plate 6 are larger than a semicircle but smaller than a full circle to prevent the film material from splashing from the vertical space junction of the first anti-sticking plate 5 and the second anti-sticking plate 6 onto the first glass 7 and the second glass 8, thereby reducing the replacement frequency of the first glass 7 and the second glass 8.

[0035] The support and control assembly includes an outer mounting ring plate 52 installed on the outside of the first anti-collision plate 5, and the outer mounting ring plate 52 is rotatably installed on the inner wall of the mounting frame 1. A gear ring 61 is fixed on the outside of the second anti-collision plate 6, and the front and rear sides of the gear ring 61 are rotatably connected to the inner wall of the mounting frame 1 through sealed bearings. A control lever 11 is rotatably installed inside the left side of the mounting frame 1, and a transmission gear 10 is keyed to the rear outer side of the control lever 11. The right side of the transmission gear 10 is meshed with the gear ring 61. An arc-shaped groove 51 is opened on the front side of the first anti-collision plate 5, and the arc length of the first anti-collision plate 5 is greater than the arc length of the groove 51. A protrusion 62 is fixed on the rear side of the second anti-collision plate 6, and the rear end of the protrusion 62 is inserted into the groove 51.

[0036] The mounting frame 1 inside the observation window is installed through the outer side of the cavity 2, as shown in the attached figure. Figure 1As shown, the height of the observation window is level with the positions of the ion source and evaporation source inside the vacuum chamber. The middle observation window is used to observe the ion source, and the observation windows on both sides are used to observe the evaporation source. The entire observation window is then ready for use. When observation is required and the light source brightness is high, the brightness of the visible light source is reduced by using the dark-colored light-shielding sheet 33 inside the outer light-shielding plate 32 to reduce damage to the human eye. When the light source brightness is low, the outer light-shielding plate 32 is manually rotated around the connecting column 4 so that the outer light-shielding plate 32 is not directly in front of the second glass 8. Then, the situation inside the vacuum evaporation machine is observed by directly looking at the second glass 8. During the observation, the front end of the control lever 11 is manually rotated clockwise, causing the control lever 11 to drive the transmission gear 10 to rotate clockwise. The transmission gear 10 drives the gear ring 61 and the second anti-collision plate 6 to rotate counterclockwise. At this time, the protrusion 62 on the rear side of the second anti-collision plate 6 is in the slide groove 51. The second anti-collision plate 6 slides inside the right side of the slide groove 51, causing the protrusion 62 to slide from the inside of the right side of the slide groove 51 to the inside of the left side of the slide groove 51. At this time, the second anti-collision plate 6 rotates to coincide with the position of the first anti-collision plate 5, and the second anti-collision plate 6 is directly in front of the first anti-collision plate 5. Then, when the second anti-collision plate 6 continues to rotate counterclockwise, the protrusion 62 will drive the overlapping first anti-collision plate 5 to rotate together. Therefore, the operator can flexibly adjust the viewing range of the observation window to achieve 360° full-view adjustment. It will not block the middle part of the first glass 7 and the second glass 8, thus preventing the view from being obstructed. Therefore, the entire observation window can be used to view the inside of the vacuum evaporation machine without obstruction. Moreover, when it is necessary to observe and adjust the viewing angle, the rotation of the first anti-collision plate 5 and the second anti-collision plate 6 will not cause the obstruction to fail. Therefore, it can prevent some film material from splashing and adhering to the surface of the first glass 7 and the second glass 8.

[0037] When observation ends, manually rotate the front end of the control lever 11 counterclockwise, as shown above, so that the second anti-fouling plate 6 rotates clockwise by a certain angle. At this time, the first anti-fouling plate 5 and the second anti-fouling plate 6 close, forming a complete circular barrier. This can prevent all the film material from splashing and adhering to the surface of the first glass 7 and the second glass 8 during the vapor deposition process, reduce the replacement frequency of the first glass 7 and the second glass 8, and thus meet the dual functions of 360° full-view adjustment during observation and anti-fouling when not observing, satisfying different usage needs.

[0038] Example 2: The unobstructed observation window of the vacuum evaporation machine door in this example, based on Example 1, facilitates the disassembly and replacement of the first glass 7 and the second glass 8, making operation convenient. For the specific structure, please refer to the attached diagram. Figures 3-4 and appendix Figure 10As shown, a semi-circular outer sealing block 9 is fixed on the upper outer side of the first glass 7 and the second glass 8. The outer sealing block 9 is in concave-convex fit with the semi-circular groove opened on the upper surface of the mounting frame 1. The outer side of the first glass 7 and the second glass 8 is in close contact with the inner side wall of the mounting frame 1. A plug-in block 91 is installed on the right side of the outer sealing block 9. The lower part of the plug-in block 91 is inclined. A slot is opened in the lower part of the plug-in block 91. A locking plate 12 is installed on the right side of the mounting frame 1. A "T"-shaped locking rod 121 is inserted through the right side of the locking plate 12. A return spring 122 is nested on the outer side of the right end of the locking rod 121. The left end of the locking rod 121 is inserted into the slot opened in the lower part of the plug-in block 91.

[0039] When it is necessary to disassemble and replace the first glass 7 and the second glass 8, manually pull the locking rod 121 to the right to separate the locking rod 121 from the slot in the insertion block 91. At this time, the return spring 122 stores force, and then manually pull the corresponding outer sealing block 9 upward to separate the outer sealing block 9 from the mounting frame 1. This allows the outer sealing block 9 to move the first glass 7 or the second glass 8 upward together, separating the first glass 7 or the second glass 8 from the mounting frame 1. Disassembly is convenient. Then, take the new first glass 7 or the second glass 8 and insert it into the slot above the mounting frame 1. At this time, the outer surfaces of the first glass 7 and the second glass 8 are in contact with the inner wall of the mounting frame 1. The semi-circular outer sealing block 9 above the second glass 8 engages with the semi-circular groove on the top of the mounting frame 1. The sealing performance is further enhanced by the sealing gasket installed on the outside of the outer sealing block 9. When the outer sealing block 9 moves downward and is inserted into the mounting frame 1, it will cause the right-side plug block 91 to automatically insert into the groove on the upper surface of the locking plate 12. At this time, the inclined surface below the plug block 91 applies an outward pushing force to the locking rod 121, causing the locking rod 121 to move outward. The return spring 122 stores force, and then the stored force of the return spring 122 automatically drives the locking rod 121 to move in the opposite direction and reset, so that one end of the locking rod 121 is inserted into the groove below the plug block 91, ensuring the stability of the outer sealing block 9 installation.

[0040] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A non-blocking observation window for a vacuum evaporation machine door, comprising a mounting frame (1) which is mounted through the front side of a chamber door (2) of a vacuum evaporation machine, and an outer light shielding mechanism (3) connected to the side of the mounting frame (1) away from the chamber door (2) of the vacuum evaporation machine, characterized in that: The inside of the mounting frame (1) is connected with a first anti-plate (5) and a second anti-plate (6) through a supporting and regulating assembly, the inside of the mounting frame (1) is sequentially provided with a first glass (7) and a second glass (8) from back to front on the front side of the second anti-plate (6), the supporting and regulating assembly comprises an outer mounting ring plate (52) mounted on the outside of the first anti-plate (5), the outer mounting ring plate (52) is rotatably mounted with the inner wall of the mounting frame (1), the outside of the second anti-plate (6) is fixedly provided with a gear ring (61), the front and back sides of the gear ring (61) are rotatably connected with the inner wall of the mounting frame (1) through sealing bearings, the front side of the first anti-plate (5) is provided with an arc-shaped sliding groove (51), the arc length of the first anti-plate (5) is greater than the arc length of the sliding groove (51), and the rear side of the second anti-plate (6) is fixedly provided with a protruding column (62), the rear end of the protruding column (62) is inserted into the sliding groove (51).

2. A non-obstructive viewing window for a vacuum deposition machine door according to claim 1, characterized in that: The outer shading mechanism (3) comprises a connecting frame (31) and an outer shading plate (32), the connecting frame (31) and the outer shading plate (32) are both circularly arranged, the rear side of the connecting frame (31) is connected with one side of the mounting frame (1) away from the cavity door (2) of the vacuum evaporation machine through screws, the inner part of the outer shading plate (32) is embeddedly provided with a shading piece (33), the inner part of the right side of the outer shading plate (32) is fixedly provided with a connecting column (4), and the rear end of the connecting column (4) is rotatably connected with the connecting frame (31).

3. A non-obstructive viewing window for a vacuum deposition machine door according to claim 2, characterized in that: The shading piece (33) is dark glass, and the outer shading plate (32) and the connecting frame (31) form a rotating structure through the connecting column (4).

4. The non-obstructive viewing window for a vacuum deposition machine door of claim 1, wherein: The front side of the first anti-plate (5) is provided with the second anti-plate (6), the first anti-plate (5) and the second anti-plate (6) are both arranged in a shape greater than half a circle and smaller than a whole circle, so that the film material is prevented from splashing from the vertical space intersection of the first anti-plate (5) and the second anti-plate (6) to the first glass (7) and the second glass (8), and the replacement frequency of the first glass (7) and the second glass (8) is reduced.

5. A non-obstructive viewing window for a vacuum deposition machine door according to claim 1, characterized in that: The inner part of the left side of the mounting frame (1) is rotatably provided with a control rod (11), the rear outer side of the control rod (11) is key-connected with a transmission gear (10), and the right side of the transmission gear (10) is meshingly connected with the gear ring (61).

6. A non-obstructive viewing window for a vacuum deposition machine door according to claim 1, characterized in that: The outer side of the upper part of the first glass (7) and the second glass (8) is fixedly provided with a semicircular outer sealing block (9), the outer sealing block (9) is matched with a semicircular groove provided on the upper surface of the mounting frame (1), and the outer side of the first glass (7) and the second glass (8) is in contact with the inner side wall of the mounting frame (1).

7. A non-obstructive viewing window for a vacuum deposition machine door according to claim 6, characterized in that: The right side of the outer sealing block (9) is provided with a plug-in block (91), the lower part of the plug-in block (91) is arranged in an inclined manner, and a slot hole is formed in the inner part of the lower part of the plug-in block (91).

8. A non-obstructive viewing window for a vacuum deposition machine door according to claim 7, characterized in that: The right side surface of the mounting frame (1) is mounted with a locking plate (12), the right side surface of the locking plate (12) is internally and throughly provided with a locking rod (121) in a "T" shape, and the right end of the locking rod (121) is externally and nestedly connected with a reset spring (122), and the left end of the locking rod (121) is inserted into the slot hole internally and below the plug-in block (91).

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