Sheet splitting equipment

Abstract

The invention discloses sheet splitting equipment, which belongs to the technical field of sheet splitting, and comprises a transmission line, a sheet splitting device, a sheet splitting device and a sheet splitting device, the first film pasting device is used for providing a lower film sheet; the transfer device is suitable for picking up the sheet and covering the sheet on the lower membrane, so that the lower membrane is attached to the lower surface of the sheet, and the sheet attached with the lower membrane is carried to the input end of the transmission line; the rolling device is located above the conveying path of the conveying line and is suitable for descending to the sheet when the sheet flows through so as to perform rolling splitting on the upper surface of the sheet; the second film pasting device is used for winding and unwinding the coiled upper film belt; wherein the upper film belt unwound from the second film pasting device is guided to cover the upper surface of the sheet below the rolling device, and the rolling device is suitable for rolling the upper surface of the sheet through the upper film belt. The sheet is not prone to damage in the splitting process, the split small particles can be arranged in order, the transportation reliability is high, follow-up transferring and placing are facilitated, and the transferring efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of sheet splitting technology, and particularly to a sheet splitting device. Background Technology

[0002] After semiconductor wafers are manufactured, slits need to be pre-cut into their surfaces, and then they are split into several smaller particles using a splitting device. For example, Chinese utility model patent CN202221367867.7 discloses a brittle sheet splitting machine, which includes a feeding system, a belt conveyor system, a roller rolling system, and a discharge device. The feeding system is used to feed the brittle sheet to the belt conveyor system, which is used to convey the brittle sheet to the roller rolling system. The roller rolling system is suitable for contacting and rolling the brittle sheet to achieve the splitting of the brittle sheet. The belt conveyor system conveys the split sheet to the discharge device for unloading.

[0003] However, with the above structure, the roller rolling system directly contacts the brittle sheet, which can easily cause damage to the sheet surface; the small particles formed after the brittle sheet is split are independent of each other, and the small particles are easily scattered during the conveyor belt system, resulting in poor conveying reliability; the split small particles need to be arranged on a tray afterward, and the scattered small particles are not conducive to orderly transfer and will reduce transfer efficiency.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Summary of the Invention

[0005] The purpose of this invention is to provide a sheet splitting device that is not easily damaged during the sheet splitting process, and the split small particles can be arranged in an orderly manner, resulting in high transportation reliability, facilitating subsequent transfer and tray placement, and improving transfer efficiency.

[0006] The objective of this invention is achieved through the following technical solution: a sheet splitting device, comprising: Transmission lines are used to transport sheets; The first film application device is used to provide the lower film sheet; A transfer device is adapted to pick up a sheet and cover it onto the lower diaphragm, so that the lower diaphragm is attached to the lower surface of the sheet, and to transport the sheet with the lower diaphragm attached to it to the input end of the transmission line; A rolling device, located above the transmission path of the transmission line, is adapted to descend to the sheet as the sheet flows through it to roll and separate the upper surface of the sheet. The second film applicator is used to unload and rewind the rolled-up upper film tape; The upper film tape unwound from the second film applicator is guided to cover the upper surface of the sheet below the rolling device, the rolling device being adapted to roll the upper surface of the sheet using the upper film tape.

[0007] Furthermore, the transfer device includes: First X-axis module; The first Z-axis drive unit is connected to the first X-axis module via a transmission connection. The transfer bracket is connected to the first Z-axis drive component. A first adsorption element is disposed on the transfer support for adsorbing the sheet; A second Z-axis drive component is disposed on the transfer bracket; The second adsorption element is connected to the second Z-axis drive element for adsorbing the lower membrane. Wherein, when the lower film is attached to the lower surface of the sheet, at least a portion of the surface of the lower film is not covered by the sheet and is exposed, and the second adsorption member is adapted to adsorb the exposed portion of the lower film.

[0008] Further, the first film application device includes: The feeding mechanism is adapted to convey a lower film belt pre-cut with the lower film sheet; A conveying mechanism adapted to transfer the lower diaphragm; A film application table is adapted to receive the lower film sheet transported out by the transport mechanism; The transfer device is adapted to transfer the sheet to the laminating table so that the lower film is attached to the sheet.

[0009] Furthermore, the transmission line is provided with a top film mechanism, which is adapted to lift the upper film strip located above the transmission line.

[0010] Furthermore, the second film application device includes: A first unwinding mechanism is located on one side of the transmission line in the width direction and is adapted to unwind the upper film tape into a roll; A first winding mechanism is located on the other side of the transmission line in the width direction and is adapted to wind up the upper film tape; The top membrane mechanism includes at least two top membrane assemblies disposed on both sides of the transmission line in the width direction, and the top membrane assemblies are located below the upper membrane strip.

[0011] Furthermore, when the sheet to which the lower film is attached is covered with the upper film strip, at least a portion of the surface of the lower film is exposed and not covered by the sheet and the upper film strip. The rolling device is provided with a film pressing mechanism, which is adapted to press the exposed portion of the lower film downward.

[0012] Furthermore, the upper surface of the lower diaphragm has an adhesive region and a non-adhesive region, the sheet is placed in the adhesive region, and the non-adhesive region forms an exposed portion for the pressing mechanism to press against. The surface of the upper film strip is non-adhesive, or the adhesiveness of the upper film strip is less than that of the lower diaphragm.

[0013] Furthermore, the transmission line is parallel to the X-axis direction, and two rolling devices are arranged side by side along the X-axis direction. One of the rolling devices is adapted to roll the sheet along the X-axis direction, and the other rolling device is adapted to roll the sheet along the Y-axis direction. There are two second film-applying devices, which correspond one-to-one with the rolling devices.

[0014] Furthermore, the rolling device includes: The X-axis rolling device includes a second X-axis module, a first Z-axis module that is drivenly connected to the second X-axis module, and a first rolling mechanism that is drivenly connected to the first Z-axis module. The first rolling mechanism is adapted to roll a sheet along the X-axis direction under the drive of the second X-axis module. The Y-axis rolling device includes a third Y-axis module, a second Z-axis module driven by the third Y-axis module, and a second rolling mechanism driven by the second Z-axis module. The second rolling mechanism is adapted to roll the sheet along the Y-axis direction under the drive of the third Y-axis module.

[0015] Furthermore, the sheet splitting device also includes: A dust removal device is located upstream of the rolling device and is adapted to remove dust from the sheet on the transmission line to which the lower diaphragm is attached; The feeding device is suitable for feeding the sheet with the lower film attached to the output end of the transmission line.

[0016] Compared with the prior art, the present invention has the following beneficial effects: By setting a first film-applying device, before the sheet is transferred to the conveyor line, the first film-applying device and the transfer device cooperate with each other to attach a lower film to the lower surface of the sheet. The small particles formed by the subsequent disassembly of the sheet are all adhered to the lower film, which is not easy to scatter, has good conveying reliability, and facilitates the orderly transfer of subsequent small particles, thus improving transfer efficiency. In addition, by setting a second film-applying device, after the conveyor line transports the sheet to the area below the rolling device, the second film-applying device can unwind an upper film belt and cover the upper surface of the sheet. The rolling device is suitable for rolling the upper surface of the sheet through the upper film belt, avoiding direct contact between the rolling device and the sheet, reducing the probability of damage to the sheet surface. Moreover, by using a rolled upper film belt to cover the sheet, the rolled upper film belt can be directly wound up with the unwinding and winding action. At the same time, the upper film belt that has not been rolled can continue to be unwound to the area below the rolling device to cooperate with the new sheet transported by the conveyor line, resulting in good smoothness and high efficiency. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the sheet splitting device of the present invention.

[0018] Figure 2 This is a schematic diagram of the transfer device in this invention.

[0019] Figure 3 yes Figure 2 A schematic diagram of the installation of various components on the transfer bracket.

[0020] Figure 4 This is a schematic diagram of the structure of the first film-applying device in this invention.

[0021] Figure 5 This is a schematic diagram of the X-axis rolling device in this invention.

[0022] Figure 6 yes Figure 5 Installation diagram of the first rolling mechanism and mounting bracket.

[0023] Figure 7 yes Figure 6 A diagram in another direction.

[0024] Figure 8 This is a schematic diagram of the Y-axis rolling device in this invention.

[0025] Figure 9 This is a schematic diagram of the installation of the transmission line and the second film-applying device in this invention.

[0026] Figure 10 This is a schematic diagram of the top membrane mechanism in this invention.

[0027] Figure 11 This is a schematic diagram of the dust removal device in this invention.

[0028] Explanation of reference numerals in the attached figures: 100. Transmission line; 110. Top film mechanism; 111. Top film assembly; 1111. Top film cylinder; 1112. Lifting block; 200. Sheet; 300. Transfer device; 310. First X-axis module; 320. First Z-axis drive; 330. Transfer bracket; 340. First suction element; 350. Second Z-axis drive; 360. Second suction element; 370. Connecting plate; 400. First film application device; 410. Lower film belt; 411. 412. Lower film sheet; 413. Adhesive area; 414. Non-adhesive area; 425. Feeding mechanism; 426. First unwinding roller; 427. First take-up roller; 428. Peeling table; 439. Transport mechanism; 430. First Y-axis module; 431. Third Z-axis drive; 432. Third adsorption component; 433. Third adsorption component; 440. Film application table; 450. Second Y-axis module; 500. Rolling device; 511. X-axis rolling device; 512. Second X-axis module; 513. First Z-axis module; 513, First rolling mechanism; 5131, Roller; 5132, Flat plate; 514, Mounting plate; 515, Mounting bracket; 520, Y-axis rolling device; 521, Third Y-axis module; 522, Second Z-axis module; 523, Second rolling mechanism; 530, Film pressing mechanism; 531, Film pressing cylinder; 532, Film pressing block; 600, Second film application device; 610, First unwinding mechanism; 611, Second unwinding roller; 61 2. First guide roller; 620. First winding mechanism; 621. Second winding roller; 622. Second guide roller; 630. Upper film belt; 700. Dust removal device; 710. Second unwinding mechanism; 720. Second winding mechanism; 730. Roller brush mechanism; 731. Fourth Y-axis module; 732. Fourth Z-axis drive unit; 733. Cleaning roller brush; 734. Roller brush bracket; 800. Unloading device; 810. Vision mechanism; 820. Transfer mechanism. Detailed Implementation

[0029] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and not for limiting the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0030] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0031] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0032] Please see Figure 1 As shown, a sheet splitting device corresponding to a preferred embodiment of the present invention includes: a transmission line 100 for conveying a sheet 200; a first film-applying device 400 for providing a lower film 411; a transfer device 300 adapted to pick up the sheet 200 and cover it onto the lower film 411, so that the lower film 411 is attached to the lower surface of the sheet 200, and to transport the sheet 200 with the lower film 411 attached to it to the input end of the transmission line 100; and a rolling device 500 located at the transmission line 100. Above the transmission path of the conveyor 100, it is adapted to descend to the sheet 200 as it flows through, so as to roll and separate the upper surface of the sheet 200; a second film applicator 600 is used to unwind and rewind the rolled upper film tape 630; wherein the upper film tape 630 unwound from the second film applicator 600 is guided to cover the upper surface of the sheet 200 below the rolling device 500, and the rolling device 500 is adapted to roll the upper surface of the sheet 200 through the upper film tape 630.

[0033] This invention, by setting up a first film-applying device 400, allows the first film-applying device 400 and the transfer device 300 to cooperate before transferring the sheet 200 to the conveyor line 100. This enables a lower film 411 to be attached to the lower surface of the sheet 200, ensuring that the small particles formed by the subsequent disassembly of the sheet 200 adhere to the lower film 411, preventing them from scattering, improving conveying reliability, and facilitating the orderly transfer of subsequent small particles, thus improving transfer efficiency. Furthermore, by setting up a second film-applying device 600, after the conveyor line 100 transports the sheet 200 to below the rolling device 500, the second film-applying device 600 can unwind the upper film tape. 630, and covers the upper surface of the sheet 200. The rolling device 500 is adapted to roll the upper surface of the sheet 200 with the upper film belt 630, avoiding direct contact between the rolling device 500 and the sheet 200, reducing the probability of surface damage. The upper film belt 630 is rolled up to cover the sheet 200. After being rolled, the upper film belt 630 can be directly wound up with the unwinding action. At the same time, the upper film belt 630 that has not been rolled can continue to be unwound to the underside of the rolling device 500 to cooperate with the new sheet 200 transmitted from the transmission line 100. It has good smoothness and high efficiency.

[0034] Furthermore, the transmission line 100 is arranged along the X-axis direction, the transfer device 300 and the first film application device 400 are located at the input end of the transmission line 100, and the rolling device 500 and the second film application device 600 are located between the input end and the output end of the transmission line 100.

[0035] Furthermore, referring to Figure 2 and Figure 3 As shown, the transfer device 300 includes a first X-axis module 310, a first Z-axis drive 320, a transfer bracket 330, a first suction member 340, a second Z-axis drive 350, and a second suction member 360. The first X-axis module 310 and the first Z-axis drive 320 are driveably connected, and the transfer bracket 330 is driveably connected to the first Z-axis drive 320. The first suction member 340 and the second Z-axis drive 350 are both disposed on the transfer bracket 330, and the second suction member 360 is driveably connected to the second Z-axis drive 350.

[0036] The first X-axis module 310 is a linear module arranged along the X-axis direction. The first Z-axis drive 320 and the second Z-axis drive 350 are both linear cylinders arranged along the Z-axis direction. The transfer bracket 330 and the components located thereon are adapted to move along the X-axis and Z-axis directions under the drive of the first X-axis module 310 and the first Z-axis drive 320. The second adsorption member 360 is adapted to move along the Z-axis direction under the drive of the second Z-axis drive 350. The first adsorption member 340 and the second adsorption member 360 are both vacuum adsorption structures. The first adsorption member 340 is specifically a suction head, which is used to adsorb the upper surface of the sheet 200. The second adsorption member 360 is specifically a suction nozzle, which is used to adsorb the lower membrane 411.

[0037] In this embodiment, the size of the lower diaphragm 411 is larger than the size of the sheet 200. After the lower diaphragm 411 is attached to the lower surface of the sheet 200, at least a portion of the surface of the lower diaphragm 411 is exposed and not covered by the sheet 200. The second adsorption member 360 is adapted to contact the exposed portion of the lower diaphragm 411 under the drive of the second Z-axis drive member 350 to adsorb, thereby preventing the lower diaphragm 411 from detaching from the sheet 200 during the handling process due to only adsorbing the sheet 200, and improving the reliability during the handling process.

[0038] Preferably, the sheet 200 is placed in the middle region of the lower diaphragm 411, and the periphery of the lower diaphragm 411 protrudes relative to the periphery of the sheet 200. There are multiple second adsorption members 360, which are arranged around the first adsorption member 340 by a connecting plate 370. The connecting plate 370 is connected to the output end of the second Z-axis drive member 350 and has a ring structure to avoid the first adsorption member 340. The multiple second adsorption members 360 cooperate to adsorb the upper surface of the lower diaphragm 411, thereby improving the reliability of the lower diaphragm 411 after adsorption.

[0039] When the transfer device 300 is working, the first adsorption member 340 can transfer the sheet 200 to the first film application device 400 under the drive of the first X-axis module 310 and the first Z-axis drive member 320, so that the sheet 200 and the lower film 411 are attached together. Then, the second adsorption member 360 descends and contacts the lower film 411 under the drive of the second Z-axis drive member 350 to adsorb the lower film 411. Then, the first X-axis module 310 and the first Z-axis drive member 320 cooperate with each other to transfer the sheet 200 with the lower film 411 attached to it to the transmission line 100.

[0040] Furthermore, referring to Figure 4 As shown, the first laminating device 400 includes a feeding mechanism 420, a conveying mechanism 430, and a laminating table 440. The feeding mechanism 420 is used to convey a roll of lower film tape 410, on which a plurality of lower film sheets 411 are pre-cut, and the lower film sheets 411 are arranged at equal intervals along the length of the lower film tape 410. The conveying mechanism 430 is adapted to transfer the lower film sheets 411, the laminating table 440 is adapted to receive the lower film sheets 411 transported out by the conveying mechanism 430, and the transfer device 300 is adapted to transfer the sheet 200 to the laminating table 440, so that the lower film sheets 411 are attached to the sheet 200.

[0041] Furthermore, the feeding mechanism 420 includes a first unwinding roller 421, a first take-up roller 422, and a peeling table 423. The rolled lower film strip 410 is placed on the first unwinding roller 421. The lower film strip 410 unwound from the first unwinding roller 421 is wound up by the peeling table 423 onto the first take-up roller 422. The conveying mechanism 430 can remove the lower film sheet 411 from the peeling table 423 and transfer it to the laminating table 440.

[0042] In one embodiment, the peeling table 423 can change the flow direction of the lower film belt 410, causing the lower film sheet 411 to peel off the lower film belt 410 and remain on the peeling table 423. The outer contour of the lower film sheet 411 is preferably circular to facilitate peeling. The above method is a conventional structure for roll material feeding, and will not be described in detail here. In this case, the lower film belt 410 includes a base layer and a film layer. The upper surface of the base layer is an adhesive surface, the film layer is attached to the adhesive surface, and the lower film sheet 411 is pre-cut from the film layer.

[0043] Admittedly, in other embodiments, the peeling table 423 may not peel off the lower film 411. In this case, the lower film belt 410 may only include the base layer, and the lower film 411 may be pre-cut directly on the base layer. The lower film 411 and the base layer have uncut connection points. When the lower film 411 flows to the peeling table 423, the conveying mechanism 430 directly adsorbs the lower film 411 on the lower film belt 410 and peels it off the lower film belt 410 under the rising action. This invention is not limited here.

[0044] Furthermore, the upper surface of the lower diaphragm 411 has an adhesive region 412 and a non-adhesive region 413. The sheet 200 is placed in the adhesive region 412, and the non-adhesive region 413 forms an exposed portion. This satisfies the requirement of reliable adhesion between the sheet 200 and the lower diaphragm 411, while facilitating subsequent adsorption or release of the lower diaphragm 411 by the second adsorption member 360. In this embodiment, the upper surface of the lower diaphragm 411 is a non-adhesive surface, with an adhesive coating in its middle to form the adhesive region 412. The other areas besides the adhesive region 412 form the non-adhesive region 413. The contour of the adhesive region 412 matches the contour of the sheet 200, and its contour size is equal to or slightly larger than the contour size of the sheet 200. The sheet 200 is completely placed in the adhesive region 412.

[0045] Furthermore, the conveying mechanism 430 includes a first Y-axis module 431, a third Z-axis drive 432, and a third adsorption member 433. The third Z-axis drive 432 is drivenly connected to the first Y-axis module 431. The first Y-axis module 431 is a linear module arranged along the Y-axis direction. The third Z-axis drive 432 is a linear cylinder arranged along the Z-axis direction. The third adsorption member 433 is drivenly connected to the third Z-axis drive 432. The structure of the third adsorption member 433 is the same as that of the second adsorption member 360. Multiple adsorption members are also provided for adsorbing multiple positions on the upper surface of the lower diaphragm 411.

[0046] The film application table 440 is located on one side of the feeding mechanism 420 in the Y-axis direction. It is a vacuum adsorption table. The film application table 440 is provided with a second Y-axis module 450. The second Y-axis module 450 is a linear module arranged along the Y-axis direction. The second Y-axis module 450 is suitable for moving the film application table 440 to the receiving position to receive the lower film sheet 411 transported by the conveying mechanism 430, or moving the film application table 440 to the film application position to receive the sheet 200 transported by the transfer device 300.

[0047] Furthermore, referring to Figure 1 As shown, in this embodiment, two rolling devices 500 are arranged side-by-side along the X-axis. One rolling device 500 is adapted to roll the sheet 200 along the X-axis, and the other rolling device 500 is adapted to roll the sheet 200 along the Y-axis, thereby meeting different splitting requirements. Correspondingly, there are two second film-applying devices 600, each corresponding to one of the rolling devices 500. Of course, in other embodiments, only one rolling device 500 may be provided. Specifically, the rolling device 500 includes an X-axis rolling device 510 and a Y-axis rolling device 520, with the X-axis rolling device 510 located downstream of the Y-axis rolling device 520.

[0048] Reference Figures 5 to 7 As shown, the X-axis rolling device 510 includes a second X-axis module 511, a first Z-axis module 512, and a first rolling mechanism 513. The second X-axis module 511 and the first Z-axis module 512 are both linear modules. The first Z-axis module 512 is driven to the second X-axis module 511. The first rolling mechanism 513 is driven to the first Z-axis module 512. The first rolling mechanism 513 is adapted to descend under the drive of the first Z-axis module 512 to contact the upper film belt 630, and roll the sheet 200 along the X-axis direction under the drive of the second X-axis module 511.

[0049] Specifically, the output end of the second X-axis module 511 is provided with a mounting plate 514, the first Z-axis module 512 is provided on the mounting plate 514, and a mounting frame 515 is provided on the mounting plate 514 in a height-adjustable manner. The output end of the first Z-axis module 512 is connected to the mounting frame 515. The first rolling mechanism 513 includes a roller 5131 and a flat plate 5132. The roller 5131 is rotatably provided at the bottom of the mounting frame 515, and the rotation axis of the roller 5131 is parallel to the Y-axis. The flat plate 5132 is provided at the bottom of the mounting frame 515, and there are two of them, which are respectively provided on both sides of the roller 5131 on its axis. The bottom of the flat plate 5132 is flush with or approximately flush with the bottom of the roller 5131. The flat plate 5132 can flatten the upper film belt 630, so that the roller 5131 can more reliably split the sheet 200.

[0050] Reference Figure 8As shown, the Y-axis rolling device 520 includes a third Y-axis module 521, a second Z-axis module 522, and a second rolling mechanism 523. Both the third Y-axis module 521 and the second Z-axis module 522 are linear modules. The second Z-axis module 522 is driveably connected to the third Y-axis module 521, and the second rolling mechanism 523 is driveably connected to the second Z-axis module 522. The second rolling mechanism 523 is adapted to descend under the drive of the second Z-axis module 522 to contact the upper film belt 630, and rolls the sheet 200 along the Y-axis direction under the drive of the third Y-axis module 521. The structure of the second rolling mechanism 523 is the same as that of the first rolling mechanism 513, and its rotation axis is parallel to the X-axis; further details are omitted here.

[0051] Furthermore, referring to Figure 9 As shown, the second film applicator 600 includes a first unwinding mechanism 610 and a first winding mechanism 620 arranged opposite to each other. The first unwinding mechanism 610 is located on one side of the transmission line 100 in the width direction and is adapted to unwind the rolled upper film strip 630. The first winding mechanism 620 is located on the other side of the transmission line 100 in the width direction and is adapted to wind up the upper film strip 630. The first unwinding mechanism 610 includes a second unwinding roller 611 and a plurality of first guide rollers 612 located downstream therefrom. The first winding mechanism 620 includes a second winding roller 621 and a plurality of second guide rollers 622 located upstream therefrom. The rolled upper film strip 630 is placed on the second unwinding roller 611, and the second unwinding roller 611 unwinds the upper film strip 630. The upper film strip 630 is guided sequentially by the first guide rollers 612 and the second guide rollers 622 and then wound up by the second winding roller 621. The first guide roller 612 and the second guide roller 622 are adapted to tension the upper film belt 630 and to position the upper film belt 630, located above the transmission line 100, close to the upper surface of the sheet 200. Preferably, there is a certain gap between the upper film belt 630 and the sheet 200 to facilitate the flow of the sheet 200 into the area below the upper film belt 630 without obstruction by the upper film belt 630.

[0052] However, with the above structure, when the rolling device 500 rolls the sheet 200 through the upper film belt 630, the upper film belt 630 may adhere to the upper surface of the sheet 200, which is not conducive to the outflow of the sheet 200 and the release and retraction of the upper film belt 630. As a preferred embodiment, the transmission line 100 is provided with a top film mechanism 110, which is adapted to lift the upper film belt 630 above the transmission line 100 to separate it from the upper surface of the sheet 200.

[0053] Specifically, refer to Figure 10As shown, the top film mechanism 110 includes at least two top film assemblies 111 respectively disposed on both sides of the transmission line 100 in the width direction. The top film assemblies 111 are located below the upper film belt 630, and the top film assemblies 111 on both sides cooperate to lift or lower the upper film belt 630. The top film assembly 111 includes a top film cylinder 1111 and a lifting block 1112 connected to the output end of the top film cylinder 1111. The lifting block 1112 can contact and lift the lower surface of the upper film belt 630 under the drive of the top film cylinder 1111. In this embodiment, since there are two second film application devices 600, there are also two top film mechanisms 110, corresponding to each of the second film application devices 600.

[0054] The lower surface of the upper film belt 630 is non-adhesive, or its adhesiveness is less than that of the lower film sheet 411. When the top film mechanism 110 pushes the upper film belt 630 away from the sheet 200, the upper film belt 630 is not easily adhered to the sheet 200. However, since the sheet 200 is relatively light in weight, there is a possibility that the upper film belt 630 will cause the sheet 200 and the lower film sheet 411 to rise together.

[0055] As a preferred embodiment, refer to Figure 5 and Figure 6 As shown, when the sheet 200 with the lower film 411 attached is covered by the upper film strip 630, at least a portion of the surface of the lower film 411 is exposed and not covered by the sheet 200 and the upper film strip 630. Each rolling device 500 is provided with a film pressing mechanism 530, which is adapted to press down on the exposed portion of the lower film 411. When it is necessary to lift the upper film strip 630 away from the sheet 200, the position of the film pressing mechanism 530 can be adjusted by the rolling device 500 to correspond to the exposed portion of the lower film 411. Then, the film pressing mechanism 530 can move downward to press down on the lower film 411, thereby fixing the sheet 200 and the lower film 411. Then, the top film mechanism 110 pushes the upper film strip 630 away from the sheet 200 to prevent the sheet 200 and the lower film 411 from rising together.

[0056] In this embodiment, the width of the upper film strip 630 is smaller than the outer diameter of the lower film sheet 411. That is, after the upper film strip 630 covers the sheet 200, the lower film sheet 411 protrudes from the upper film strip 630 on both sides in the X-axis direction to form exposed portions. The pressing mechanism 530 is adapted to simultaneously press the exposed portions of the lower film sheet 411 on both sides in the X-axis direction. For example, in one embodiment, the pressing mechanism 530 includes two pressing assemblies corresponding one-to-one with the exposed portions. The pressing assembly includes a pressing cylinder 531 and a pressing block 532 connected to the output end of the pressing cylinder 531. The pressing block 532 is adapted to descend and press the lower film sheet 411 under the drive of the pressing cylinder 531. Admittedly, in another embodiment, the single rolling device 500 may also be provided with only a single film pressing assembly, which includes a single film pressing cylinder 531 and two film pressing blocks 532. The two film pressing blocks 532 are connected to the output end of the film pressing cylinder 531 through a frame, and the film pressing blocks 532 correspond one-to-one with the exposed parts.

[0057] Furthermore, referring to Figure 1 and Figure 11 As shown, the sheet splitting equipment includes a dust removal device 700, which is located upstream of the rolling device 500 and is suitable for removing dust from the sheet 200 on which the lower diaphragm 411 is attached on the transmission line 100.

[0058] The dust removal device 700 includes a second unwinding mechanism 710, a second winding mechanism 720, and a roller brush mechanism 730. The first unwinding mechanism 610 and the second winding mechanism 720 are respectively located on both sides of the transmission line 100 in the Y-axis direction. The first unwinding mechanism 610 is used to unwind the rolled-up cleanroom cloth, and the first winding mechanism 620 is used to wind up the unwound cleanroom cloth. The sheet 200 can flow directly under the nonwoven fabric under the drive of the transmission line 100. The structure of the second unwinding mechanism 710 is similar to that of the first unwinding mechanism 610, and the structure of the second winding mechanism 720 is similar to that of the first winding mechanism 620. Further details will not be provided here. The roller brush mechanism 730 is located above the transmission line 100. It includes a fourth Y-axis module 731, a fourth Z-axis drive 732, and a cleaning roller brush 733. The fourth Z-axis drive 732 is connected to the fourth Y-axis module 731. The cleaning roller brush 733 is connected to the fourth Z-axis drive 732 through a roller brush bracket 734. The cleaning roller brush 733 can rotate relative to the roller brush bracket 734, and its axis of rotation is parallel to the X-axis.

[0059] When the dust removal device 700 is working, the second unwinding mechanism 710 and the second winding mechanism 720 cooperate to move the clean lint-free cloth to the top of the conveyor line 100. When the sheet 200 flows to the bottom of the lint-free cloth under the drive of the conveyor line 100, the cleaning roller brush 733 descends under the drive of the fourth Z-axis drive member 732 and moves along the Y-axis under the drive of the fourth Y-axis module 731, so that it rolls on the surface of the sheet 200 and the lower film 411 through the lint-free cloth. The dust on the sheet 200 and the lower film 411 will be attached to the lint-free cloth. After cleaning is completed, the cleaning roller brush 733 is reset, and the sheet 200 flows to the rolling device 500.

[0060] Preferably, the transmission line 100 is also provided with a top film mechanism 110 at the position corresponding to the dust removal device 700. The top film mechanism 110 is used to lift the cleanroom cloth so as to facilitate the separation of the cleanroom cloth from the sheet 200 and avoid it from hindering the flow of the sheet 200.

[0061] Furthermore, the sheet splitting equipment also includes a feeding device 800, located at the feeding end of the conveyor line 100. The feeding device 800 includes a vision mechanism 810 and a transfer mechanism 820, which are respectively disposed on both sides of the conveyor line 100 in the width direction. The vision mechanism 810 is adapted to detect the appearance of the split sheet 200 at the output end of the conveyor line 100, and the transfer mechanism 820 is adapted to pick up the sheet 200 at the output end of the conveyor line 100 and transfer it to a preset position. For example, when a defective split of the sheet 200 is detected, the transfer mechanism 820 transfers the sheet 200 to a defective area; when a satisfactory split of the sheet 200 is detected, the transfer mechanism 820 transfers it to a downstream station for further processing.

[0062] The working process of the sheet splitting device of the present invention is as follows: The first film-applying device 400 feeds the lower film sheet 411, the transfer device 300 picks up the sheet 200 and covers it on the lower film sheet 411, and then transports the sheet 200 with the lower film sheet 411 attached to it to the input end of the transmission line 100; then the transmission line 100 carries the sheet 200 to the dust removal device 700, and the dust removal device 700 removes dust from the sheet 200 and the upper surface of the lower film sheet 411; then the transmission line 100 carries the sheet 200 to the rolling device 500, at which time the upper film belt 630 is located at the rolling device. Between sheet 500 and sheet 200, the rolling device 500 moves downward and rolls the upper surface of sheet 200 via upper film belt 630 to separate sheet 200; after rolling, the rolling device 500 rises a certain distance, the film pressing mechanism 530 presses down on the exposed part of lower film 411, and then the top film mechanism 110 lifts upper film belt 630 to separate upper film belt 630 from sheet 200; then the film pressing mechanism 530 releases lower film 411, and the transmission line 100 carries the separated sheet 200 to the output end, where the feeding device 800 feeds it.

[0063] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A sheet splitting apparatus, characterized by, The application relates to a film pasting device. The film pasting device comprises: a conveying line (100) for conveying a sheet (200); a first film pasting device (400) for providing a lower film sheet (411); a transfer device (300) adapted to pick up the sheet (200) and cover the sheet (200) on the lower film sheet (411), so that the lower film sheet (411) is attached to the lower surface of the sheet (200), and the sheet (200) with the attached lower film sheet (411) is conveyed to the input end of the conveying line (100); a rolling device (500) located above the conveying path of the conveying line (100) and adapted to descend to the sheet (200) when the sheet (200) flows through, so as to roll and separate the upper surface of the sheet (200); a second film pasting device (600) for a coiled upper film strip (630); 2. The sheet splitting apparatus of claim 1, wherein, wherein the upper film strip (630) unwound from the second film pasting device (600) is guided to cover the upper surface of the sheet (200) below the rolling device (500), and the rolling device (500) is adapted to roll the upper surface of the sheet (200) through the upper film strip (630). The transfer device (300) comprises: a first X-axis module (310); a first Z-axis driving member (320) in driving connection with the first X-axis module (310); a transfer support (330) in driving connection with the first Z-axis driving member (320); a first suction member (340) arranged on the transfer support (330) and used for sucking the sheet (200); a second Z-axis driving member (350) arranged on the transfer support (330); a second suction member (360) in driving connection with the second Z-axis driving member (350) and used for sucking the lower film sheet (411); 3. The sheet splitting apparatus of claim 1, wherein, wherein, after the lower film sheet (411) is attached to the lower surface of the sheet (200), at least part of the surface of the lower film sheet (411) is exposed and not covered by the sheet (200), and the second suction member (360) is adapted to suck the exposed part of the lower film sheet (411). The first film pasting device (400) comprises: a feeding mechanism (420) adapted to convey a lower film strip (410) with the lower film sheet (411) pre-cut; a conveying mechanism (430) adapted to transfer the lower film sheet (411); a film pasting table (440) adapted to receive the lower film sheet (411) transferred by the conveying mechanism (430); 4. The sheet splitting apparatus of claim 1, wherein, wherein the transfer device (300) is adapted to transfer the sheet (200) to the film pasting table (440), so that the lower film sheet (411) is attached to the sheet (200).

5. The sheet splitting apparatus of claim 4, wherein, A top film mechanism (110) is arranged on the conveying line (100), and the top film mechanism (110) is adapted to lift the upper film strip (630) above the conveying line (100). The second film pasting device (600) comprises: a first unwinding mechanism (610) located on one side of the conveying line (100) in the width direction and adapted to unwind the coiled upper film strip (630); A first winding mechanism (620) is located on the other side of the transmission line (100) in the width direction and is adapted to wind the upper film belt (630); The top film mechanism (110) comprises at least two top film assemblies (111) arranged on both sides of the transmission line (100) in the width direction, and the top film assemblies (111) are located below the upper film belt (630).

6. The sheet splitting apparatus of claim 1, wherein, When the sheet (200) attached with the lower film sheet (411) is covered with the upper film belt (630), at least part of the surface of the lower film sheet (411) is exposed without being covered by the sheet (200) and the upper film belt (630), and the rolling device (500) is provided with a film pressing mechanism (530) adapted to press downward on the exposed part of the lower film sheet (411).

7. The sheet splitting apparatus of claim 6, wherein, The upper surface of the lower film sheet (411) has a sticky area (412) and a non-sticky area (413), the sheet (200) is placed on the sticky area (412), the non-sticky area (413) forms an exposed part for the film pressing mechanism (530) to press, and the surface of the upper film belt (630) is non-sticky or the stickiness of the upper film belt (630) is smaller than that of the lower film sheet (411).

8. The sheet splitting apparatus of claim 1, wherein, The conveying direction of the transmission line (100) is parallel to the X-axis direction, two rolling devices (500) are arranged side by side along the X-axis direction, one of the rolling devices (500) is adapted to roll the sheet (200) along the X-axis direction, and the other rolling device (500) is adapted to roll the sheet (200) along the Y-axis direction, and the number of the second film pasting devices (600) is two and corresponds to the rolling devices (500) one by one.

9. The sheet splitting apparatus of claim 8, wherein, The rolling device (500) comprises: An X-axis rolling device (510) comprising a second X-axis module (511), a first Z-axis module (512) in transmission connection with the second X-axis module (511), and a first rolling mechanism (513) in transmission connection with the first Z-axis module (512), the first rolling mechanism (513) being adapted to roll the sheet (200) along the X-axis direction under the drive of the second X-axis module (511); A Y-axis rolling device (520) comprising a third Y-axis module (521), a second Z-axis module (522) in transmission connection with the third Y-axis module (521), and a second rolling mechanism (523) in transmission connection with the second Z-axis module (522), the second rolling mechanism (523) being adapted to roll the sheet (200) along the Y-axis direction under the drive of the third Y-axis module (521).

10. The sheet splitting apparatus of claim 1, wherein, The sheet splitting device further comprises: A dust removal device (700) located upstream of the rolling device (500) and adapted to remove dust from the sheet (200) attached with the lower film sheet (411) on the transmission line (100); A blanking device (800) adapted to blank the sheet (200) attached with the lower film sheet (411) at the output end of the transmission line (100).

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