The invention provides a spherical nano
cerium oxide particle and a preparation method thereof, and a
cerium oxide polishing solution and a preparation method thereof, and relates to the technical field of
cerium oxide particle preparation, and the preparation method comprises the following steps: S1, adding an organic reducing acid into cerium
carbonate micro
powder to obtain an organic reducing acid cerium solution; s2, adding an organic
weak base into the organic reduced acid cerium solution; adding an auxiliary
reagent solution, and mixing to obtain a flocculent suspension containing the cerium element; s3, adding an organic modification
reagent into the flocculent suspension containing the cerium element, then adding a reaction regulating agent, carrying out a heating reaction, and
drying to obtain a crude product of particles containing the cerium element; and S4, carrying out high-temperature
calcination on the cerium-element-containing particle crude product to obtain the spherical nano
cerium oxide particles. The spherical nano
cerium oxide particles prepared by the method are suitable for high-end chemical mechanical
polishing liquid of
semiconductor substrates or special glass, the preparation method is low in cost and simple in process, and no harmful gas is generated in the production process.