Nanoimprint template anti-sticking treatment apparatus

Abstract

The present application relates to the technical field of micro-nano manufacturing, and particularly relates to a nano-imprint template anti-adhesion treatment device, which comprises a reaction chamber and an anti-adhesion reagent conveying system, and can complete the whole process of template surface plasma activation, anti-adhesion reagent quantitative conveying and low-temperature vapor deposition in the same chamber; accurate control of microliter-level reagent is realized through a glue spraying valve and a multi-stage valve control system, low-temperature film forming is realized in combination with a heating evaporation dish, high-temperature damage to a flexible template is avoided, plasma in-situ activation enhances surface reactivity, and the adhesion of an anti-adhesion layer is improved. The present application solves the problems of process dispersion, uneven film layer and poor compatibility of traditional equipment, significantly improves the quality of the anti-adhesion layer and the service life of the template, and is suitable for high-precision nano-imprint processes in the fields of semiconductors, optical devices and the like.

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