A motion mechanism and a motion device

Abstract

The application provides a motion mechanism and a motion device, and relates to the technical field of semiconductor equipment manufacturing. The motion mechanism comprises a first plate, a second plate, a driving mechanism, a supporting mechanism and an outer guiding mechanism. Each driving mechanism is connected with at least one of the first plate and the second plate through a supporting mechanism. The supporting mechanism forms a supporting mechanism connecting position on the first plate or the second plate. The supporting mechanism is configured to disperse the force provided by the driving mechanism to the supporting mechanism connecting positions on both sides of the driving mechanism. An outer guiding mechanism is arranged between two adjacent driving mechanisms. The outer guiding mechanism comprises two guiding rod groups and a guiding connecting piece connecting the two guiding rod groups. Each guiding rod group comprises a first guiding rod and a second guiding rod. The first guiding rod is directly or indirectly connected with the first plate. The second guiding rod is directly or indirectly connected with the second plate.

Description

Technical Field

[0001] This specification relates to the field of semiconductor equipment manufacturing, and in particular to a motion mechanism and motion device. Background Technology

[0002] The motion mechanism can achieve rotation in two directions within the same horizontal plane, and can further achieve displacement perpendicular to the horizontal plane. The motion device can, based on the motion mechanism, further achieve displacement in two directions along the horizontal plane and rotation about an axis perpendicular to the horizontal plane.

[0003] The motion mechanism or motion device may include a guiding mechanism for guiding the aforementioned rotation and / or displacement. In some related embodiments, the guiding mechanism may include a reed or a combination of reeds. However, using reeds for guidance can easily result in lower overall stiffness of the motion mechanism or motion device. Summary of the Invention

[0004] This specification provides one or more embodiments of a motion mechanism, including: a first plate, a second plate, a drive mechanism for driving the second plate to move relative to the first plate, a support mechanism, and an outer guide mechanism; each drive mechanism is connected to at least one of the first plate and the second plate via a support mechanism, the support mechanism forming a support mechanism connection position on the first plate or the second plate, the support mechanism being configured to: distribute the force provided by the drive mechanism to the support mechanism connection positions located on both sides of the drive mechanism; an outer guide mechanism is provided between two adjacent drive mechanisms, the outer guide mechanism including: two guide rod groups and a guide connector connecting the two guide rod groups, wherein each guide rod group includes a first guide rod and a second guide rod, the first guide rod being directly or indirectly connected to the first plate, and the second guide rod being directly or indirectly connected to the second plate; the outer guide mechanism is configured to be flexible in the direction from the first plate to the second plate.

[0005] In some embodiments, the support mechanism connection location includes: a plurality of support connection points, wherein one or more of the support connection points are located on one side of the drive mechanism, and another one or more of the support connection points are located on the other side of the drive mechanism; and / or, the support mechanism connection location includes: a support connection surface, wherein a portion of the support connection surface is located on one side of the drive mechanism, and another portion of the support connection surface is located on the other side of the drive mechanism.

[0006] In some embodiments, the support mechanism includes: a mounting base and two or more support rods, one end of the support rods being connected to the mounting base and the other end of the support rods being connected to the first plate or the second plate; the drive mechanism is connected to the mounting base.

[0007] In some embodiments, the driving mechanism includes: a first housing, a second housing disposed inside the first housing, a first driving unit for driving the second housing to move relative to the first housing, a driving end, and a second driving unit for driving the driving end to move relative to the second housing; the support mechanism includes: a first support mechanism connecting the driving mechanism and the first plate, and a second support mechanism connecting the driving mechanism and the second plate; the first housing is fixedly connected to the mounting base of the first support mechanism; the driving end is drively connected to the mounting base of the second support mechanism.

[0008] In some embodiments, the mounting base of the second support mechanism has an accommodating space, the accommodating space having an accommodating space mating surface; the driving end has a driving end mating surface, the driving end mating surface being an arc surface, the driving end mating surface being able to abut against the accommodating space mating surface; the mounting base of the second support mechanism is provided with a compression spring, the compression spring having a slot for the driving end to pass through, the compression spring being configured to apply an elastic force toward the accommodating space mating surface to the driving end.

[0009] In some embodiments, one end of the first guide rod is connected to the mounting base of the first support mechanism, and the other end of the first guide rod is connected to the guide connector; one end of the second guide rod is connected to the mounting base of the second support mechanism, and the other end of the second guide rod is connected to the guide connector.

[0010] In some embodiments, the motion mechanism further includes a central guide mechanism located at the center of the first plate. The central guide mechanism includes a first connecting portion connected to the first plate, a second connecting portion connected to the second plate, and a guide rod connecting the first connecting portion and the second connecting portion. The guide rod is configured to be rigid in the direction from the first plate to the second plate.

[0011] In some embodiments, the first connecting portion and / or the second connecting portion includes a disc-shaped flexible member configured to be flexible in the direction from the first plate to the second plate. Alternatively, the first connecting portion and / or the second connecting portion includes: a first member, a second member, an intermediate member disposed between the first member and the second member, one or more first links connecting the first member and the intermediate member, and one or more second links connecting the second member and the intermediate member, wherein the first links and the second links are both inclined relative to the first plate.

[0012] In some embodiments, the motion mechanism further includes: an end-effector measuring mechanism, the end-effector measuring mechanism including: a measuring mechanism base fixedly connected to the first plate, a measuring mechanism guide fixing part disposed on the measuring mechanism base, a measuring mechanism guide moving part movable along the measuring mechanism guide fixing part, a measuring fixing part disposed on the measuring mechanism base, a measuring moving part disposed on the measuring mechanism guide moving part matching the measuring fixing part, and a measuring mechanism flexible member connecting the measuring mechanism guide moving part and the second plate.

[0013] In some embodiments, the flexible component of the measuring mechanism includes: a first flexible plate fixedly connected to the guiding moving part of the measuring mechanism, a second flexible plate fixedly connected to the second plate, a first flexible support mechanism disposed on the first flexible plate, a second flexible support mechanism disposed on the second flexible plate, an outer guide mechanism of the measuring mechanism flexible component connecting the first flexible support mechanism and the second flexible support mechanism, and a central guide mechanism of the measuring mechanism flexible component connecting the first flexible plate and the second flexible plate; the outer guide mechanism of the measuring mechanism flexible component includes: two groups of measuring mechanism flexible component guide rods and a connecting member of the measuring mechanism flexible component guide rods connecting the two groups of measuring mechanism flexible component guide rods, wherein each group of measuring mechanism flexible component guide rods includes: a first guide rod of the measuring mechanism flexible component and a second guide rod of the measuring mechanism flexible component, the first guide rod of the measuring mechanism flexible component being connected to the first flexible support mechanism, and the second guide rod of the measuring mechanism flexible component being connected to the second flexible support mechanism.

[0014] In some embodiments, the motion mechanism further includes a magnetic compensation mechanism, which includes a first magnet and a second magnet configured to attract or de-attract from each other, the first magnet being directly or indirectly connected to the first plate, and the second magnet being directly or indirectly connected to the second plate; the first magnet and the second magnet are configured such that when the driving mechanism drives one side of the second plate to move closer to one side of the first plate, the second magnet in the magnetic compensation mechanism located on one side of the first plate tends to move toward the first magnet.

[0015] In some embodiments, the magnetic compensation mechanism further includes: a magnetic compensation mechanism base fixedly connected to the first plate, a magnetic compensation mechanism guide fixing part disposed on the magnetic compensation mechanism base, a magnetic compensation mechanism guide moving part movable along the magnetic compensation mechanism guide fixing part, and a magnetic compensation mechanism flexible member connecting the magnetic compensation mechanism guide moving part and the second plate, wherein the first magnet is connected to the magnetic compensation mechanism base, and the second magnet is connected to the magnetic compensation mechanism guide moving part.

[0016] In some embodiments, the flexible component of the magnetic compensation mechanism includes: a third flexible plate fixedly connected to the guide moving part of the magnetic compensation mechanism, a fourth flexible plate fixedly connected to the second plate, a third flexible support mechanism disposed on the third flexible plate, a fourth flexible support mechanism disposed on the fourth flexible plate, an outer guide mechanism of the flexible component of the magnetic compensation mechanism connecting the third flexible support mechanism and the fourth flexible support mechanism, and a central guide mechanism of the flexible component of the magnetic compensation mechanism connecting the third flexible plate and the fourth flexible plate; the outer guide mechanism of the flexible component of the magnetic compensation mechanism includes: two groups of guide rods of the flexible component of the magnetic compensation mechanism and a guide connector of the flexible component of the magnetic compensation mechanism connecting the two groups of guide rods of the flexible component of the magnetic compensation mechanism, wherein each group of guide rods of the flexible component of the magnetic compensation mechanism includes: a first guide rod and a second guide rod, the first guide rod of the flexible component of the magnetic compensation mechanism is connected to the third flexible support mechanism, and the second guide rod of the flexible component of the magnetic compensation mechanism is connected to the fourth flexible support mechanism.

[0017] In some embodiments, the first plate has a plurality of sides, and the driving mechanism is located at the middle of each of the sides of the first plate; the first plate has a plurality of corners, and the guide connector of the outer guide mechanism is located at the corner of the first plate.

[0018] This specification provides a motion device according to one or more embodiments, including: the motion mechanism described in any one of the above; the motion device further includes: a third plate disposed above the second plate, the third plate having an inner side plate and an outer side plate surrounding the periphery of the inner side plate, one of the inner side plate and the outer side plate being connected to the second plate; the motion device further includes: a second drive mechanism, the second drive mechanism driving the inner side plate to move relative to the outer side plate.

[0019] This specification provides a motion device according to one or more embodiments, including: the motion mechanism described in any one of the above; wherein at least one of the first plate and the second plate has an inner side plate and an outer side plate surrounding the periphery of the inner side plate; the motion device further includes: a second drive mechanism, the second drive mechanism driving the inner side plate to move relative to the outer side plate.

[0020] The beneficial effects that the embodiments of this specification may bring include, but are not limited to: (1) the combination of rods as the whole flexible guide and decoupling has the characteristics of high stiffness and high flexible guide accuracy, which can improve the control bandwidth (i.e., improve the control frequency), and the motion mechanism and motion device as a whole have the characteristics of high acceleration, high static servo accuracy and timely feedback response; (2) the support mechanism can disperse the force provided by the drive mechanism to the connection position of the support mechanism on both sides of the drive mechanism, so that the first plate or the second plate has the tendency to expand towards its edge, avoiding the deformation such as overall warping caused by the indentation of the edge of the first plate or the second plate due to the force provided by the drive mechanism; (3) the first guide rod, the second guide rod and the drive mechanism can form a triangular frame structure, which has the characteristics of high stiffness; (4) the two support rods and the first plate or the second plate can form a triangular frame structure, and multiple support rods and the first plate or the second plate can form a triangular pyramid, a quadrangular pyramid and other multi-sided pyramid structure, which has better performance. (5) The first and second drive units in the drive mechanism can provide different strokes and accuracies, and can achieve large stroke and high accuracy drive by combining large stroke and low accuracy with small stroke and high accuracy; (6) The fit between the accommodating space mating surface and the drive end mating surface can make the force provided by the drive mechanism to the second plate always perpendicular to the second plate, and have high drive efficiency; (7) A variety of connection structure forms of the first guide rod and the second guide rod are provided; (8) The central guide mechanism can guide, decouple and support the movement of the second plate relative to the first plate, and provides a variety of central guide mechanisms, some of which can restrict the movement of the second plate relative to the first plate in the vertical direction, and others allow the movement of the second plate relative to the first plate in the vertical direction; (9) An end measuring mechanism is set to accurately obtain the position of the second plate relative to the first plate; (10) A magnetic compensation mechanism is set to compensate for the reaction torque generated by each rod of the motion mechanism during rotational displacement. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced can be any one or a combination of the above, or any other possible beneficial effects. Attached Figure Description

[0021] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings denote the same structures or steps.

[0022] Figure 1 , Figure 2 This is a schematic diagram of a motion mechanism according to some embodiments of this specification.

[0023] Figure 3 This is a top-view perspective schematic diagram of the motion mechanism shown in some embodiments of this specification.

[0024] Figure 4 This is a cross-sectional schematic diagram of the motion mechanism shown in some embodiments of this specification.

[0025] Figure 5 This is a schematic diagram of the first plate, second plate, support mechanism, and outer guide mechanism of the motion mechanism shown in some embodiments of this specification.

[0026] Figure 6 This is a schematic diagram of the drive mechanism of the motion mechanism shown in some embodiments of this specification.

[0027] Figure 7 This is an assembly diagram of the drive mechanism of the motion mechanism shown in some embodiments of this specification.

[0028] Figure 8 This is a schematic diagram of a compression spring for a motion mechanism shown in some embodiments of this specification.

[0029] Figure 9 This is a schematic diagram of the center guide mechanism of the motion mechanism shown in some embodiments of this specification.

[0030] Figure 10 This is a schematic diagram of the center guide mechanism of the motion mechanism shown in other embodiments of this specification.

[0031] Figure 11 , Figure 12 This is a schematic diagram of the center guide mechanism of the motion mechanism according to some embodiments of this specification.

[0032] Figure 13 , Figure 14 This is an assembly diagram of the center guide mechanism of the motion mechanism shown in some embodiments of this specification.

[0033] Figure 15 This is a top-view perspective schematic diagram of the center guide mechanism of the motion mechanism shown in some embodiments of this specification.

[0034] Figure 16 This is a schematic diagram of the end-effector measuring mechanism of a motion mechanism according to some embodiments of this specification.

[0035] Figure 17 This is a schematic diagram of the measuring mechanism flexible element of the end-effector measuring mechanism of a motion mechanism according to some embodiments of this specification.

[0036] Figure 18 This is a schematic diagram of a magnetic compensation mechanism for a motion mechanism according to some embodiments of this specification.

[0037] Figure 19This is a schematic diagram of the flexible component of the magnetic compensation mechanism of the motion mechanism according to some embodiments of this specification.

[0038] Figure 20 This is a schematic diagram of the working state of the magnetic compensation mechanism of the motion mechanism shown in some embodiments of this specification.

[0039] Figure 21 This is a schematic diagram of a motion mechanism according to other embodiments of this specification.

[0040] Figure 22 This is a schematic diagram of the support mechanism and the outer guide mechanism of the motion mechanism according to some embodiments of this specification.

[0041] Figure 23 This is a schematic diagram of a motion device according to some embodiments of this specification.

[0042] Figure 24 yes Figure 23 A magnified view of a portion of the image.

[0043] Figure 25 , Figure 26 This is a schematic diagram of a motion device according to other embodiments of this specification.

[0044] In the diagram: 1 First plate; 2 Second plate; 3 Drive mechanism; 31 First housing; 32 Second housing; 33 First drive unit; 34 Drive end; 35 Second drive unit; 36 Drive mechanism guide mechanism; 37 Drive mechanism measuring mechanism; 4 Support mechanism; 41 Mounting base; 42 Support rod; 43 Compression spring; 431 Straight part; 432 Bending part; 401 First support mechanism; 402 Second support mechanism; 5 Outer guide mechanism; 51 Guide rod assembly; 52 Guide connector; 511 First guide rod; 512 Second guide rod; 6 Center guide mechanism; 61 First connecting part; 62 Second connecting part; 63 Guide rod; 640 Disc flexible component; 641 First component; 642 Second component; 643 Intermediate component; 644 First connecting rod; 645 Second connecting rod; 7 End measuring mechanism; 71 Measuring mechanism base; 72 Measuring mechanism guide fixing part; 73 74 Measurement mechanism guide moving part; 75 Measurement fixing part; 76 Measurement moving part; 76 Measurement mechanism flexible component; 761 Flexible component first plate; 762 Flexible component second plate; 763 Flexible component first support mechanism; 764 Flexible component second support mechanism; 765 Measurement mechanism flexible component outer guide mechanism; 7651 Measurement mechanism flexible component guide rod assembly; 76511 Measurement mechanism flexible component first guide rod; 76512 Measurement mechanism flexible component second guide rod; 7652 Measurement mechanism flexible component guide connector; 766 Measurement mechanism flexible component center guide mechanism; 8 Magnetic compensation mechanism; 81 First magnet; 82 Second magnet; 83 Magnetic compensation mechanism base; 84 Magnetic compensation mechanism guide fixing part; 85 Magnetic compensation mechanism guide moving part; 86 Magnetic compensation mechanism flexible component; 861 Flexible component third plate; 862 Flexible component fourth plate; 863 Flexible component third support mechanism; 864 Fourth support mechanism for flexible component; 865 Outer guide mechanism for flexible component of magnetic compensation mechanism; 8651 Guide rod assembly for flexible component of magnetic compensation mechanism; 86511 First guide rod for flexible component of magnetic compensation mechanism; 86512 Second guide rod for flexible component of magnetic compensation mechanism; 8652 Guide connector for flexible component of magnetic compensation mechanism; 866 Center guide mechanism for flexible component of magnetic compensation mechanism; 9 Third plate; 1000 Inner plate; 2000 Outer plate; 3000 Second drive mechanism. Detailed Implementation

[0045] To more clearly illustrate the technical solutions of the embodiments in this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the content described below are some examples or embodiments of this specification. For those skilled in the art, without creative effort, the technical solutions or means disclosed in this specification can be applied to other scenarios based on this technical content.

[0046] It should be understood that the terms "system," "device," "equipment," "part" and / or "component," "unit" and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other words can achieve the same purpose, they may be replaced by other expressions.

[0047] Unless otherwise specified, the technical terms used to describe components, elements, etc. in this specification are not singular but may include plural. Generally speaking, terms such as "comprising" or "including" only indicate that explicitly identified steps, elements, or components are included, and these steps, elements, and components do not constitute an exclusive list, as the described method or apparatus may also include other steps or components.

[0048] In the description of this specification, it should be understood that the directional descriptions, such as up, down, front, back, left, and right, indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. These descriptions are for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this specification, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in this specification in conjunction with the specific content of the technical solution.

[0049] The motion mechanism can realize rotation in two directions within the same horizontal plane (e.g., rotation in a first direction X and / or a second direction Y), and can further realize displacement perpendicular to the horizontal plane (e.g., displacement along a third direction Z perpendicular to the XY plane). The motion device can further realize displacement in two directions along the horizontal plane (e.g., displacement along a first direction X and / or a second direction Y) and rotation about an axis perpendicular to the horizontal plane (e.g., rotation about a third direction Z) based on the motion mechanism.

[0050] The motion mechanism or motion device may include a guiding mechanism for guiding the rotation and / or displacement described above. In some related embodiments, the guiding mechanism may include a reed or a combination of reeds. In some related embodiments, the reed may be a sheet-like structure. For example, a reed parallel to the XY plane may be used to guide displacement along a third direction Z, and to guide rotation about a first direction X and / or a second direction Y. For example, a reed perpendicular to the XY plane may be used to guide displacement along a first direction X and / or a second direction Y, and to guide rotation about a third direction Z.

[0051] However, in some applications, using reeds for guidance can easily lead to low overall stiffness of the motion mechanism or device. In some further applications, while using thicker reeds can improve the overall stiffness of the motion mechanism or device to some extent, it also increases the load on the drive mechanism within the motion mechanism or device, resulting in insufficient dynamic performance.

[0052] Based on this, one or more embodiments of this specification provide a motion mechanism and a motion device. The outer guide mechanism achieves motion guidance through two guide rod groups and a guide connector connecting the two guide rod groups. The guide rods in the guide rod groups have high stiffness and good dynamic performance. Because the motion mechanism and motion device in one or more embodiments of this specification use a combination of rods as a whole for flexible guidance and decoupling, they feature high stiffness and high flexible guidance accuracy, which can improve the control bandwidth (i.e., increase the control frequency). Consequently, the motion mechanism and motion device as a whole possess high acceleration, high static servo accuracy, and timely feedback response.

[0053] Figure 1 , Figure 2 These are schematic diagrams of motion mechanisms shown in some embodiments of this specification. Figure 3 This is a top-view perspective schematic diagram of the motion mechanism shown in some embodiments of this specification. Figure 4 This is a cross-sectional schematic diagram of the motion mechanism shown according to some embodiments of this specification. Please refer to... Figures 1 to 3 As shown, combined with Figure 4 As shown, in one or more embodiments of this specification, the motion mechanism may include: a first plate 1, a second plate 2, a drive mechanism 3 for driving the second plate 2 to move relative to the first plate 1, a support mechanism 4, and an outer guide mechanism 5.

[0054] In some embodiments, the first plate 1 can serve as the substrate of the motion mechanism, or the first plate 1 can be disposed on other substrates. In some embodiments, the second plate 2 can be connected to the component to be driven by the motion mechanism, or the second plate 2 can be further connected to other motion mechanisms, or the second plate 2 can itself form other motion mechanisms.

[0055] In some embodiments, the drive mechanism 3 can be a linear drive mechanism for driving a certain position of the second plate to move relative to a certain position of the first plate along a third direction Z. The number of drive mechanisms 3 can be multiple, for example, three, four, or more. The drive mechanism 3 can be arranged at the corner of the first plate 1 or at the edge of the first plate 1.

[0056] In some embodiments, the support mechanism 4 is used to support the drive mechanism 3 based on the first plate 1 and / or the second plate 2, or the support mechanism 4 is used to realize the connection between the first plate 1 and the drive mechanism 3 and / or between the second plate 2 and the drive mechanism 3, or the support mechanism 4 is used to realize the distribution of the force of the drive mechanism 3 acting on the first plate 1 and / or the second plate 2.

[0057] In some embodiments, each drive mechanism 3 is connected to at least one of the first plate 1 and the second plate 2 via a support mechanism 4. The support mechanism 4 forms a support mechanism connection position on the first plate 1 or the second plate 2. The support mechanism 4 is configured to distribute the force provided by the drive mechanism 3 to the support mechanism connection positions located on both sides of the drive mechanism 3.

[0058] In some embodiments, the support mechanism 4 is configured to distribute the force provided by the drive mechanism 3 to two or more support mechanism connection locations. In some embodiments, a plurality of support mechanism connection locations helps to evenly distribute the force provided by the drive mechanism 3 to the first plate 1 or the second plate 2, avoiding force concentration on the first plate 1 or the second plate 2 caused by the drive mechanism 3, which could lead to deformation of the first plate 1 or the second plate 2. In some embodiments, when the support mechanism 4 distributes the force provided by the drive mechanism 3 to each support mechanism connection location, the directions of the forces acting at each support mechanism connection location may be different; for example, the directions of the forces acting at each support mechanism connection location may intersect or be opposite (e.g., ...). Figure 1 (The components of F1 and F2 in the second direction Y are opposite, and the components of F3 and F4 in the second direction Y are opposite) so that the edges or corners of the first plate 1 or the second plate 2 have an outward expansion tendency, so that the first plate 1 or the second plate 2 remains flat and avoids the first plate 1 or the second plate 2 from being dented and deformed due to the single force provided by the drive mechanism 3.

[0059] In some embodiments, the outer guide mechanism 5 is used to guide the movement of the second plate 2 relative to the first plate 1. In some embodiments, an outer guide mechanism 5 is provided between two adjacent drive mechanisms 3. The outer guide mechanism 5 includes two guide rod groups 51 and a guide connector 52 connecting the two guide rod groups 51. Each guide rod group 51 includes a first guide rod 511 and a second guide rod 512. The first guide rod 511 is directly or indirectly connected to the first plate 1, and the second guide rod 512 is directly or indirectly connected to the second plate 2.

[0060] In some embodiments, see Figure 1 , Figure 2 As shown, the guide connector 52 may be spherical. In some embodiments, the first guide rod 511 and the second guide rod 512 may be connected to the same or different positions of the spherical guide connector 52.

[0061] In other embodiments, see Figure 22 As shown, the guide connector 52 can be a rod-shaped structure. In some embodiments, the first guide rod 511 and the second guide rod 512 can be connected to the ends of the rod-shaped structure of the guide connector 52.

[0062] In other embodiments, the guide connector 52 may also take other shapes, such as a plate-like structure, a block-like structure, a prism-like structure, an H-shaped structure, an I-shaped structure, or a frame structure of various shapes. The ends of the first guide rod 511 and the second guide rod 512 near the guide connector 52 may be in contact with each other or may be separated from each other.

[0063] In some embodiments, within the same guide rod group 51, the first guide rod 511 and the second guide rod 512 have an included angle. In some embodiments, when the second plate 2 moves relative to the first plate 1 along a third direction Z, the included angle between the first guide rod 511 and the second guide rod 512 may be changed to guide and decouple the movement of the second plate 2 relative to the first plate 1 along a third direction Z. In some embodiments, the change in the included angle between the first guide rod 511 and the second guide rod 512 may be based on the deformation of the first guide rod 511 and / or the second guide rod 512 themselves, or on the deformation at the connection between the first guide rod 511 and the guide connector 52 and / or the deformation at the connection between the second guide rod 512 and the guide connector 52.

[0064] In some embodiments, when the second plate 2 moves relative to the first plate 1 about a first direction X and / or a second direction Y, the included angle between the first guide rod 511 and the second guide rod 512 may be changed, as may the included angle between the first guide rod 511 and the first plate 1, and the included angle between the second guide rod 512 and the second plate 2, to guide and decouple the movement of the second plate 2 relative to the first plate 1 along a third direction Z. Similarly, the change of the aforementioned included angles may be based on the deformation of the first guide rod 511 and / or the second guide rod 512 themselves, or on the deformation at the connection point between the first guide rod 511 and the first plate 1 (directly or indirectly) and / or the deformation at the connection point between the second guide rod 512 and the second plate 2 (directly or indirectly).

[0065] In some embodiments, the first guide rod 511 and the second guide rod 512 are rigid in their axial direction to provide fixed constraints for the outer guide mechanism 5 in its non-guided and non-decoupling directions. In some embodiments, the first guide rod 511 and the second guide rod 512 are flexible in their radial direction.

[0066] In some embodiments, the outer guide mechanism 5 is configured to be flexible in the direction from the first plate 1 to the second plate 2. In some embodiments, the outer guide mechanism 5 is configured to be flexible along a third direction Z. In some embodiments, the outer guide mechanism 5 is configured to be rigid along a first direction X and a second direction Y.

[0067] In one or more embodiments of this specification, see Figures 1 to 4 , combined Figure 5 As shown, the support mechanism connection positions include: several support connection points, wherein one or more support connection points are located on one side of the drive mechanism 3, and another one or more support connection points are located on the other side of the drive mechanism 3.

[0068] In some embodiments, the support mechanism 4 may include: a mounting base 41 and two or more support rods 42, one end of which is connected to the mounting base 41, and the other end of which is connected to the first plate 1 or the second plate 2. A drive mechanism 3 is connected to the mounting base 41. In some embodiments, the connection point between the support rod 42 and the first plate 1 or the second plate 2 forms a support mechanism connection position, which is the aforementioned support connection point. It should be noted that the support connection point may have a certain area; in some usage scenarios, the support connection point can be understood as a support mechanism connection position with a small area. In some embodiments, the support connection point may be located at the corner of the first plate 1 or the second plate 2. In other embodiments, the support connection point may also be located in the central region of the edge of the first plate 1 or the second plate 2. In still other embodiments, the support connection point may be located in the central region of the first plate 1 or the second plate 2.

[0069] In some embodiments, see Figure 1 , Figure 5 As shown, the number of support connection points can be two, with the two support connection points located on both sides of the drive mechanism 3. In other embodiments, the number of support connection points can be more than two, such as three or four, with at least two of the support connection points located on both sides of the drive mechanism 3. Correspondingly, in these other embodiments, the support mechanism 4 can include a number of support rods 42 matching the number of support connection points, with the other ends of two support rods 42 connected to the support connection points located on both sides of the drive mechanism 3, and the other support rods 42 connected to support connection points located in the middle region of the edge of the first plate 1 or the second plate 2, or to support connection points located in the central region of the first plate 1 or the second plate 2.

[0070] In some embodiments, the two support rods 42 form a triangular structure with the mounting base 41 as the vertex relative to the first plate 1 or the second plate 2, providing better support performance. In other embodiments, multiple support rods 42 form a polygonal pyramid, such as a triangular pyramid or a square pyramid, with the mounting base 41 as the vertex relative to the first plate 1 or the second plate 2, providing better support performance.

[0071] In some embodiments, the diameter of the support rod 42 may be larger than the diameter of the first guide rod 511 or the second guide rod 512 to provide good support performance.

[0072] In some embodiments, the mounting base 41 may be hemispherical to maximize the conversion of the force provided by the drive mechanism 3 into a force along the axial direction of the first guide rod 511 or the second guide rod 512 (i.e., the first guide rod 511 or the second guide rod 512 extends in a radial direction of the hemispherical mounting base 41). In some embodiments, the mounting base 41 may also be other shapes, such as a sphere, an ellipsoid, a prism, a frustum, a rectangle, an irregular shape, etc.

[0073] In one or more embodiments of this specification, the support mechanism connection position includes: a support connection surface, a portion of which is located on one side of the drive mechanism 3, and another portion of which is located on the other side of the drive mechanism 3.

[0074] In some embodiments, the support mechanism 4 may include: a mounting base connected to the first plate 1 or the second plate 2, and a drive mechanism 3 connected to the mounting base. In some embodiments, the bottom surface of the mounting base forms a support mechanism connection position, which is the support connection surface described above. In some usage scenarios, the support connection surface can be understood as a support mechanism connection position with a large area. In some embodiments, the bottom surface of the mounting base may extend from one corner of the first plate 1 or the second plate 2 to another corner.

[0075] In other embodiments, the support mechanism 4 may include a mounting base and a support member, the mounting base being connected to the support member, the support member being connected to the first plate 1 or the second plate 2, and a drive mechanism being connected to the mounting base. In some embodiments, the bottom surface of the support member forms a support mechanism connection position, which is the support connection surface described above. In some embodiments, the bottom surface of the support member may extend from one corner of the first plate 1 or the second plate 2 to another corner.

[0076] In one or more embodiments of this specification, see Figure 6As shown, the drive mechanism 3 includes: a first housing 31, a second housing 32 disposed inside the first housing 31, a first drive unit 33 for driving the second housing 32 relative to the first housing 31, a drive end 34, and a second drive unit 35 for driving the drive end 34 relative to the second housing 32. In some embodiments, the first drive unit 33 and the second drive unit 35 have the same driving direction. In some embodiments, the drive centers of the first drive unit 33 and the second drive unit 35 coincide. In some embodiments, the strokes of the first drive unit 33 and the second drive unit 35 are different. In some embodiments, the stroke of the first drive unit 33 can be greater than that of the second drive unit 35, and the accuracy of the second drive unit 35 can be greater than that of the first drive unit 33, so that the drive mechanism 3 as a whole has the characteristics of large stroke and high accuracy. In some embodiments, the first drive unit 33 can be a piezoelectric microstepping motor, and the second drive unit 35 can be a piezoelectric actuator.

[0077] In some embodiments, the drive mechanism 3 further includes a drive mechanism guide mechanism 36 for guiding and decoupling the movement of the second housing 32 relative to the first housing 31. The drive mechanism guide mechanism 36 may include a drive mechanism guide fixing part and a drive mechanism guide moving part. The drive mechanism guide fixing part is fixedly connected to the first housing 31, and the drive mechanism guide moving part matches the drive mechanism guide fixing part and is fixedly connected to the second housing 32. In some embodiments, the drive mechanism guide fixing part may be a guide rail, and the drive mechanism guide moving part may be a slider.

[0078] In some embodiments, the drive mechanism 3 further includes a drive mechanism measuring mechanism 37 for measuring the position of the second housing 32 relative to the first housing 31. The drive mechanism measuring mechanism 37 may include a drive mechanism measuring fixed part and a drive mechanism measuring moving part. The drive mechanism measuring fixed part is fixedly connected to the first housing 31, and the drive mechanism measuring moving part matches the drive mechanism measuring fixed part and is fixedly connected to the second housing 32. In some embodiments, the drive mechanism measuring fixed part may be a grating ruler, and the drive mechanism measuring moving part may be a reading head.

[0079] In some embodiments, the support mechanism 4 includes a first support mechanism 401 connecting the drive mechanism 3 and the first plate 1, and a second support mechanism 402 connecting the drive mechanism 3 and the second plate 2. The first housing 31 of the drive mechanism 3 is fixedly connected to the mounting base 41 of the first support mechanism 401. The drive end 34 of the drive mechanism 3 is drively connected to the mounting base 41 of the second support mechanism 402.

[0080] In one or more embodiments of this specification, see Figure 7As shown, the mounting base 41 of the second support mechanism 402 has a receiving space, which can be used to accommodate at least a portion of the drive end 34, and the receiving space has a receiving space mating surface. In some embodiments, the receiving space mating surface can be a plane. In other embodiments, the receiving space mating surface can also be an arc surface. For example, the mounting base 41 of the second support mechanism 402 has a groove in the direction from the first plate 1 to the second plate 2, the groove provides the receiving space, and the bottom of the groove provides the receiving space mating surface.

[0081] In some embodiments, the drive end 34 has a drive end mating surface, which is an arc surface and can abut against the accommodating space mating surface. In some embodiments, the drive end mating surface is an arc surface. Exemplarily, the drive end 34 has a spherical structure or a hemispherical structure, and at least a portion of the upper surface of the drive end 34 provides the drive end mating surface.

[0082] In some embodiments, the mating surface of the drive end and the mating surface of the accommodating space form a mating of an arc surface and a plane, or a mating of two arc surfaces, so that the force provided by the drive mechanism 3 to the mounting base 41 of the second support mechanism 402 is always perpendicular to the tangential direction. In some embodiments where the mating surface of the drive end and the mating surface of the accommodating space form a mating of an arc surface and a plane, the mating surface of the accommodating space may be arranged parallel to the first plate 1, so that the force provided by the drive mechanism 3 to the mounting base 41 of the second support mechanism 402 is always along the third direction Z.

[0083] In some embodiments, see Figure 7 As shown, the mounting base 41 of the second support mechanism 402 is provided with a compression spring 43. The compression spring 43 has a slot through which the drive end 34 passes. The compression spring 43 is configured to apply an elastic force toward the mating surface of the receiving space to the drive end 34.

[0084] In some embodiments, see Figure 8 As shown, the compression spring 43 includes straight portions 431 located on both sides and a curved portion 432 connecting the two straight portions 431. In some embodiments, at least a portion of the two straight portions 431 are respectively fixedly connected to the mounting base 41 of the second support mechanism 402, and the curved portion 432 is disposed within the receiving space of the mounting base 41 of the second support mechanism 402. In some embodiments, the convex arc surface of the curved portion 432 is disposed towards the second plate 2 (or towards the bottom of the groove of the receiving space of the mounting base 41). In some embodiments, the curved portion 432 is configured to apply an elastic force toward the mating surface of the receiving space to the drive end 34 based on elastic deformation.

[0085] In some embodiments, the drive mechanism 3 may include a transmission rod, one end of which is connected to the second drive unit 35, and the other end of which is connected to the drive end 34. The diameter of the transmission rod is smaller than the diameter of the drive end 34, and the diameter of the transmission rod is approximately equal to the width of the narrow side of the groove of the compression spring 43. Figure 8 The width of the spring is matched from the upper left to the lower right so that the upper part of the transmission rod can pass through the groove of the compression spring 43.

[0086] In some embodiments, the width of the narrow side of the groove of the compression spring 43 is smaller than the outer diameter of the spherical drive end 34, so that the compression spring 43 can provide elastic force to the drive end 34. In some embodiments, the length of the wide side of the groove of the compression spring 43 ( Figure 8 The length from the upper right to the lower left is greater than the diameter of the transmission rod (or may be further greater than the outer diameter of the drive end 34) to allow the transmission rod (or drive end 34) to move along the wide side.

[0087] In other embodiments, the width of the narrow side and the length of the wide side of the groove of the compression spring 43 are both smaller than the outer diameter of the bottom surface of the hemispherical or partially spherical drive end 34 (the outer diameter of the bottom surface of the drive end 34 may be less than or equal to the maximum outer diameter of the drive end 34). Meanwhile, the width of the narrow side and the length of the wide side of the groove of the compression spring 43 are both greater than the diameter of the transmission rod, so as to allow the transmission rod (or drive end) to move along the extension direction of the narrow side or along the extension direction of the wide side.

[0088] In one or more embodiments of this specification, see Figure 1 , Figure 2 , Figure 5 As shown, the support mechanism 4 includes: a first support mechanism 401 connecting the drive mechanism 3 and the first plate 1, and a second support mechanism 402 connecting the drive mechanism 3 and the second plate 2. One end of the first guide rod 511 is connected to the mounting base 41 of the first support mechanism 401, and the other end of the first guide rod 511 is connected to the guide connector 52. One end of the second guide rod 512 is connected to the mounting base 41 of the second support mechanism 402, and the other end of the second guide rod 512 is connected to the guide connector 52.

[0089] In other embodiments, one end of the first guide rod 511 is connected to the support rod 42 of the first support mechanism 401, and the other end of the first guide rod 511 is connected to the guide connector 52. One end of the second guide rod 512 is connected to the support rod 42 of the second support mechanism 402, and the other end of the second guide rod 512 is connected to the guide connector 52.

[0090] In some other embodiments, one end of the first guide rod 511 is connected to the first plate 1, and the other end of the first guide rod 511 is connected to the guide connector 52. One end of the second guide rod 512 is connected to the second plate 2, and the other end of the second guide rod 512 is connected to the guide connector 52.

[0091] In one or more embodiments of this specification, see Figures 9 to 12 As shown, the motion mechanism further includes a central guide mechanism 6, located at the center of the first plate 1. The central guide mechanism 6 includes a first connecting portion 61 connected to the first plate 1, a second connecting portion 62 connected to the second plate 2, and a guide rod 63 connecting the first connecting portion 61 and the second connecting portion 62. In some embodiments, the guide rod 63 is configured to be rigid in the direction from the first plate 1 to the second plate 2. In some embodiments, the guide rod 63 is configured to be rigid in a third direction Z. In some embodiments, the guide rod 63 is configured to be flexible in a direction perpendicular to the direction from the first plate 1 to the second plate 2. In some embodiments, the guide rod 63 is configured to be flexible in a first direction X and / or a second direction Y.

[0092] In some embodiments, see Figure 9 As shown, the first connecting part 61 and the second connecting part 62 are rigid structures. At this time, the second plate 2 can rotate relative to the first plate 1 around the first direction X and / or the second direction Y, and the second plate 2 is difficult to translate relative to the first plate 1 along the third direction Z.

[0093] In other embodiments, the first connecting portion 61 and the second connecting portion 62 are flexible structures, in which case the second plate 2 can rotate relative to the first plate 1 around the first direction X and / or the second direction Y, and the second plate 2 can also translate relative to the first plate 1 along the third direction Z.

[0094] In some embodiments, see Figure 10 As shown, the first connecting portion 61 and / or the second connecting portion 62 include a disc-shaped flexible member 640, which is configured to be flexible in the direction from the first plate 1 to the second plate 2. In some embodiments, the disc-shaped flexible member 640 has a plurality of arc-shaped grooves. In some embodiments, the disc-shaped flexible member 640 has multiple sets of arc-shaped grooves, each set of arc-shaped grooves having a plurality of arc-shaped grooves. In some embodiments, the disc-shaped flexible member 640, based on the arc-shaped grooves, allows one or more of its outer edges to move relative to its center in the direction from the first plate 1 to the second plate 2 (i.e., the third direction Z), so that the center guide mechanism 6 is flexible in the direction from the first plate 1 to the second plate 2 (i.e., the third direction Z). In some embodiments, the disc-shaped flexible member can provide flexibility in the third direction Z, while having a simple structure, convenient manufacturing process, and occupying less space in the third direction Z.

[0095] In some embodiments, see Figure 11 , Figure 12 , combined Figures 13 to 15 As shown, the first connecting part 61 and / or the second connecting part 62 includes: a first component 641, a second component 642, an intermediate component 643 disposed between the first component 641 and the second component 642, one or more first connecting rods 644 connecting the first component 641 and the intermediate component 643, and one or more second connecting rods 645 connecting the second component 642 and the intermediate component 643. The first connecting rods 644 and the second connecting rods 645 are both inclined relative to the first plate 1.

[0096] In some embodiments, a plurality of intermediate components 643 are provided between the first component 641 and the second component 642. Each intermediate component 643 is connected to the first component 641 through one or more first connecting rods 644, and each intermediate component 643 is connected to the second component 642 through one or more second connecting rods 645.

[0097] In some embodiments, the number of intermediate members 643 may be four, and the four intermediate members 643 are arranged at the four corners of the first member 641 (or the second member 642).

[0098] In some embodiments, the first member 641 has a first member ramp facing the intermediate member 643. The intermediate member 643 has a first mating ramp facing the first member ramp, and one or more first links 644 connect the first member ramp and the first mating ramp. In some embodiments, the second member 642 has a second member ramp facing the intermediate member 643. The intermediate member 643 has a second mating ramp facing the second member ramp, and one or more second links 645 connect the first member ramp and the second member ramp.

[0099] In some embodiments, the first member 641 has one or more first member bosses, which provide a first member ramp. In some embodiments, the second member 642 has one or more second member bosses, which provide a second member ramp.

[0100] In some embodiments, the first link 644 and the second link 645 are themselves flexible to allow the first member 641 and the second member 642 to move closer to or further away from each other, thereby making the central guide mechanism 6 flexible in the direction from the first plate 1 to the second plate 2 (i.e., the third direction Z). In some embodiments, the connection points at both ends of the first link 644 and the second link 645 can be deformed to adjust the angle between the first link 644 and the first member 641 (first member inclined surface) or the angle between the second link 645 and the second member 642 (second member inclined surface). In some embodiments, the connection points at both ends of the first link 644 and the second link 645 can be deformed to adjust the angle between the first link 644 and the intermediate member 643 (first mating inclined surface) or the angle between the second link 645 and the intermediate member 643 (second mating inclined surface). Based on the above arrangement, the central guide mechanism 6 is flexible in the direction from the first plate 1 to the second plate 2 (i.e., the third direction Z).

[0101] Furthermore, based on the first component inclined surface, the first mating inclined surface, the second component inclined surface, and the second mating inclined surface, it is possible to increase the strength of the first connecting part 61 and / or the second connecting part 62 while reducing the height of the first connecting part 61 and / or the second connecting part 62 (the height in the third direction Z).

[0102] In some embodiments, the first connecting portion 61 and / or the second connecting portion 62, which has a first member 641, a second member 642 and an intermediate member 643, can provide flexibility in the third direction Z and have greater rigidity in other directions, and can prevent rotation about the first direction X and / or the second direction Y while providing flexibility in the third direction Z.

[0103] In one or more embodiments of this specification, see Figure 16 , 17 As shown, the motion mechanism further includes an end-effector measuring mechanism 7, which measures the position of the second plate 2 relative to the first plate 1. The end-effector measuring mechanism 7 includes: a measuring mechanism base 71 fixedly connected to the first plate 1; a measuring mechanism guide fixing part 72 provided on the measuring mechanism base 71; a measuring mechanism guide moving part 73 movable along the measuring mechanism guide fixing part 72; a measuring fixing part 74 provided on the measuring mechanism base 71; a measuring moving part 75 provided on the measuring mechanism guide moving part 73 and matching the measuring fixing part 74; and a measuring mechanism flexible member 76 connecting the measuring mechanism guide moving part 73 and the second plate 2.

[0104] In some embodiments, the measuring mechanism guide fixing part 72 can be a guide rail, and the measuring mechanism guide moving part 73 can be a slider that matches the guide rail. In some embodiments, the measuring fixing part 74 can be a grating ruler, and the measuring moving part 75 can be a reading head.

[0105] In some embodiments, the flexible measuring mechanism 76 includes: a first flexible plate 761 fixedly connected to the measuring mechanism guide moving part 73, a second flexible plate 762 fixedly connected to the second plate 2, a first flexible support mechanism 763 disposed on the first flexible plate 761, a second flexible support mechanism 764 disposed on the second flexible plate 762, a measuring mechanism flexible outer guide mechanism 765 connecting the first flexible support mechanism 763 and the second flexible support mechanism 764, and a measuring mechanism flexible center guide mechanism 766 connecting the first flexible plate 761 and the second flexible plate 762.

[0106] In some embodiments, the structures of the first flexible plate 761 and the second flexible plate 762 are similar to those of the first plate 1 and the second plate 2, and the structures of the first flexible support mechanism 763 and the second flexible support mechanism 764 are similar to those of the first support mechanism 401 and the second support mechanism 402, so they will not be described in detail here.

[0107] In some embodiments, the outer guide mechanism 765 of the measuring mechanism flexible element includes: two measuring mechanism flexible element guide rod groups 7651 and a measuring mechanism flexible element guide connector 7652 connecting the two measuring mechanism flexible element guide rod groups 7651, wherein each measuring mechanism flexible element guide rod group 7651 includes: a measuring mechanism flexible element first guide rod 76511 and a measuring mechanism flexible element second guide rod 76512, the measuring mechanism flexible element first guide rod 76511 is connected to the flexible element first support mechanism 763, and the measuring mechanism flexible element second guide rod 76512 is connected to the flexible element second support mechanism 764.

[0108] In some embodiments, the center guide mechanism 766 of the measuring mechanism flexible element includes: a first connecting portion of the measuring mechanism flexible element connected to the first plate 761 of the flexible element, a second connecting portion of the measuring mechanism flexible element connected to the second plate 762 of the flexible element, and a measuring mechanism flexible element guide rod connecting the first connecting portion and the second connecting portion of the measuring mechanism flexible element. In some embodiments, the measuring mechanism flexible element guide rod is configured to be rigid in the direction from the first plate 761 to the second plate 762 of the flexible element. In some embodiments, the measuring mechanism flexible element guide rod is configured to be flexible in the direction perpendicular to the direction from the first plate 761 to the second plate 762 of the flexible element. In some embodiments, the first connecting portion and the second connecting portion of the measuring mechanism flexible element are rigid structures. In some embodiments, the measuring mechanism flexible element guide rod, the first connecting portion and the second connecting portion of the measuring mechanism flexible element are all rigid in the third direction Z, so that the first plate 761 to the second plate 762 of the flexible element do not undergo relative displacement in the third direction Z, thereby improving the measurement accuracy of the end measuring mechanism 7.

[0109] In some embodiments, the structure of the outer guide mechanism 765 of the measuring mechanism flexible element is similar to that of the outer guide mechanism 5, and the structure of the center guide mechanism 766 of the measuring mechanism flexible element is similar to that of the center guide mechanism 6, so they will not be described in detail again.

[0110] In some embodiments, the number of end-effectors 7 can be multiple. In some embodiments, one end-effector 7 is arranged at each drive mechanism 3. In some embodiments, the number of end-effectors 7 can be three, and the position of the second plate 2 relative to the first plate 1 can be calculated by measuring the displacement in the third direction Z at the corresponding position of the three end-effectors.

[0111] In some embodiments, the drive mechanism 3 and the end measuring mechanism 7 are arranged sequentially from the outside to the center of the first plate 1.

[0112] In one or more embodiments of this specification, see Figure 18 , 19 As shown, the motion mechanism further includes a magnetic compensation mechanism 8, which provides magnetic force between the second plate 2 and the first plate 1. The magnetic compensation mechanism 8 includes a first magnet 81 and a second magnet 82 configured to attract or de-attract each other, the first magnet 81 being directly or indirectly connected to the first plate 1, and the second magnet 82 being directly or indirectly connected to the second plate 2.

[0113] In some embodiments, the first magnet 81 and the second magnet 82 are configured such that when the driving mechanism 3 drives one side of the second plate 2 to move closer to one side of the first plate 1, the second magnet 82 in the magnetic force compensation mechanism 8 located on one side of the first plate 1 tends to move toward the first magnet 81. In some embodiments, the magnetic poles of the first magnet 81 and the second magnet 82 are opposite at their opposite ends to compensate for the additional elastic force generated by the guide flexible members (each guide rod, such as the first guide rod 511 or the second guide rod 512) during movement. It should be noted that the aforementioned "one side of the second plate 2" and "one side of the first plate 1" can refer to any side of the second plate 2 or the first plate 1, such as any edge or any corner, specifically for example... Figure 3 or Figure 15 The left, right, top, bottom, upper left, lower left, upper right, and lower right sides of the middle.

[0114] In some embodiments, the magnetic compensation mechanism 8 further includes: a magnetic compensation mechanism base 83 fixedly connected to the first plate 1, a magnetic compensation mechanism guide fixing part 84 disposed on the magnetic compensation mechanism base 83, a magnetic compensation mechanism guide moving part 85 capable of moving along the magnetic compensation mechanism guide fixing part 84, and a magnetic compensation mechanism flexible member 86 connecting the magnetic compensation mechanism guide moving part 85 and the second plate 2, wherein the first magnet 81 is connected to the magnetic compensation mechanism base 83, and the second magnet 82 is connected to the magnetic compensation mechanism guide moving part 85.

[0115] In some embodiments, the magnetic compensation mechanism guide fixing part 84 can be a guide rail, and the magnetic compensation mechanism guide moving part 85 can be a slider that matches the guide rail.

[0116] In some embodiments, the flexible element 86 of the magnetic compensation mechanism includes: a flexible third plate 861 fixedly connected to the magnetic compensation mechanism guide moving part 85, a flexible fourth plate 862 fixedly connected to the second plate 2, a flexible third support mechanism 863 disposed on the flexible third plate 861, a flexible fourth support mechanism 864 disposed on the flexible fourth plate 862, a magnetic compensation mechanism flexible outer guide mechanism 865 connecting the flexible third support mechanism 863 and the flexible fourth support mechanism 864, and a magnetic compensation mechanism flexible center guide mechanism 866 connecting the flexible third plate 861 and the flexible fourth plate 862.

[0117] In some embodiments, the structures of the third flexible plate 861 and the fourth flexible plate 862 are similar to those of the first plate 1 and the second plate 2, and the structures of the third flexible support mechanism 863 and the fourth flexible support mechanism 864 are similar to those of the first support mechanism 401 and the second support mechanism 402, so they will not be described in detail here.

[0118] The outer guide mechanism 865 of the flexible component of the magnetic compensation mechanism includes: two sets of guide rods 8651 of the flexible component of the magnetic compensation mechanism and a guide connector 8652 of the flexible component of the magnetic compensation mechanism connecting the two sets of guide rods 8651 of the flexible component of the magnetic compensation mechanism. Each set of guide rods 8651 of the flexible component of the magnetic compensation mechanism includes: a first guide rod 86511 of the flexible component of the magnetic compensation mechanism and a second guide rod 86512 of the flexible component of the magnetic compensation mechanism. The first guide rod 86511 of the flexible component of the magnetic compensation mechanism is connected to the third support mechanism 863 of the flexible component, and the second guide rod 86512 of the flexible component of the magnetic compensation mechanism is connected to the fourth support mechanism 864 of the flexible component.

[0119] In some embodiments, the flexible element center guide mechanism 866 of the magnetic compensation mechanism includes: a first connecting portion of the flexible element connected to the third plate 861 of the flexible element, a second connecting portion of the flexible element connected to the fourth plate 862 of the flexible element, and a guide rod connecting the first connecting portion and the second connecting portion of the flexible element. In some embodiments, the guide rod is configured to be rigid in the direction from the third plate 861 to the fourth plate 862 of the flexible element. In some embodiments, the guide rod is configured to be flexible in the direction perpendicular to the direction from the third plate 861 to the fourth plate 862 of the flexible element. In some embodiments, the first connecting portion and the second connecting portion of the flexible element are rigid structures.

[0120] In some embodiments, the structure of the outer guide mechanism 865 of the flexible component of the magnetic compensation mechanism is similar to that of the outer guide mechanism 5, and the structure of the center guide mechanism 866 of the flexible component of the magnetic compensation mechanism is similar to that of the center guide mechanism 6, so they will not be described in detail again.

[0121] In some use cases, see Figure 20 As shown, when the second plate 2 rotates relative to the first plate 1 around the first direction X or the second direction Y (i.e., Rx motion or Ry motion), the links of the motion mechanism (such as the first guide link 511, the second guide link 512, or the support link 42, etc.) may have a tendency to recover due to deformation, thus causing the second plate 2 to have a tendency to rotate in the opposite direction, that is, the motion mechanism generates a counter torque. For example Figure 20 When the second plate 2 rotates counterclockwise relative to the first plate 1, the linkages of the motion mechanism tend to cause the second plate 2 to rotate clockwise relative to the first plate 1. This tendency may increase the load on the drive mechanism 3 and reduce the motion accuracy of the equipment.

[0122] In some applications, the magnetic compensation mechanism 8 can overcome or counteract the tendency of the linkages in the motion mechanism to cause the second plate 2 to rotate in the opposite direction relative to the first plate 1. For example... Figure 20 When the second plate 2 rotates counterclockwise relative to the first plate 1, the left sides of the second plate 2 and the first plate 1 move closer together. The first magnet 81 and the second magnet 82 of the magnetic compensation mechanism 8 located on the left side also move closer together, attracting each other and causing the second plate 2 to move towards the first plate 1, thus compensating for the aforementioned tendency to rotate in the opposite direction. Simultaneously, the first magnet 81 and the second magnet 82 of the magnetic compensation mechanism 8 located on the right side move away from each other, and there is no mutual attraction between them. Therefore, the counter-torque generated by the moving mechanism can be compensated by the magnetic compensation mechanism 8.

[0123] In some embodiments, the "magnetic force-displacement curve" of the magnetic compensation mechanism 8 corresponds to the "elastic force-displacement" curve of the motion mechanism. The "magnetic force-displacement curve" refers to the changing trend of the magnitude of the magnetic force between the first magnet 81 and the second magnet 82 as the second plate 2 rotates relative to the first plate 1 about the first direction X and / or the second direction Y. The "elastic force-displacement" refers to the changing trend of the magnitude of the elastic restoring force (i.e., the force providing the counter-torque of the motion mechanism) generated by the links of the motion mechanism (e.g., the first guide link 511, the second guide link 512, or the support link 42, etc.) as the second plate 2 rotates relative to the first plate 1 about the first direction X and / or the second direction Y. In some embodiments, "corresponding" means that the "magnetic force-displacement curve" and the "elastic force-displacement" curve can coincide, or that the "magnetic force-displacement curve" and the "elastic force-displacement" curve have the same changing trend.

[0124] In some embodiments, the number of magnetic compensation mechanisms 8 may be multiple. In some embodiments, one magnetic compensation mechanism 8 is arranged at each drive mechanism 3.

[0125] In some embodiments, the drive mechanism 3, the end measuring mechanism 7, and the magnetic compensation mechanism 8 are arranged sequentially from the outside to the center of the first plate 1.

[0126] In one or more embodiments of this specification, the first plate 1 has a plurality of sides, and the drive mechanism 3 is located at the middle of each side of the first plate 1. The first plate 1 has a plurality of corners, and the guide connector 52 of the outer guide mechanism 5 is located at the corner of the first plate 1.

[0127] In other embodiments, the first plate 1 has several corners, and the drive mechanism 3 is located at the corners of the first plate 1. The first plate 1 has several sides, and the guide connector 52 of the outer guide mechanism 5 is located at the middle of each side of the first plate 1.

[0128] In one or more embodiments of this specification, see Figure 1 , Figure 2 As shown, the first plate 1 and the second plate 2 can be rectangular, and the number of drive mechanisms 3 can be four.

[0129] In other embodiments, the first plate 1 and the second plate 2 may be circular, and the number of drive mechanisms 3 may be three or four.

[0130] In some other embodiments, see Figure 21 As shown, the first plate 1 and the second plate 2 can form a triangle, and the number of driving mechanisms 3 can be three. The three driving mechanisms 3 are located in the middle of the three sides of the first plate 1 of the triangle.

[0131] In other embodiments, the first plate 1 and the second plate 2 may also have other shapes, such as irregular shapes. In other embodiments, the first plate 1 and the second plate 2 may have the same shape or different shapes.

[0132] In some embodiments, the motion mechanism can be manufactured as a single piece or as separate parts. For example, the first plate 1 and the first support mechanism 401 can be integrally formed or separately formed and then fixedly connected. Similarly, the second plate 2 and the second support mechanism 402 can be integrally formed or separately formed and then fixedly connected. In some embodiments, the first plate 1, the second plate 2, and the central guide mechanism 6 can be integrally formed or separately formed and then fixedly connected. In some embodiments, the components of the central guide mechanism 6 can be integrally formed or separately formed and then fixedly connected.

[0133] Figure 23 These are schematic diagrams of the motion device shown in some embodiments of this specification. Figure 24 yes Figure 23 A magnified view of a portion of the image. See also... Figure 23 , Figure 24 As shown, in one or more embodiments of this specification, the motion device may include a motion mechanism, and the motion device may further include: a third plate 9 disposed above the second plate 2, the third plate 9 having an inner side plate 1000 and an outer side plate 2000 surrounding the periphery of the inner side plate 1000, one of the inner side plate 1000 and the outer side plate 2000 being connected to the second plate 2. In some embodiments, the motion device further includes: a second drive mechanism 3000, the second drive mechanism 3000 driving the inner side plate 1000 to move relative to the outer side plate 2000.

[0134] In some embodiments, four second drive mechanisms 3000 are provided between the inner side plate 1000 and the outer side plate 2000. Two of the second drive mechanisms 3000 are arranged along a first direction X to drive the inner side plate 1000 to move relative to the outer side plate 2000 along the first direction X or to rotate about a third direction Z. The other two second drive mechanisms 3000 are arranged along a second direction Y to drive the inner side plate 1000 to move relative to the outer side plate 2000 along the second direction Y or to rotate about a third direction Z.

[0135] In some embodiments, see Figure 24 As shown, the motion device may include: a first connecting member 3001 connected to the second drive mechanism 3000, a second connecting member 3002 connected to the inner side plate 1000, and a third connecting member 3003 connecting the first connecting member 3001 and the second connecting member 3002. In some embodiments, the first connecting member 3001 and the third connecting member 3003, and the second connecting member 3002 and the third connecting member 3003, are connected by a first spring 3004 to achieve decoupling. In some embodiments, the first connecting member 3001 and the outer side plate 2000 are connected by one or more second springs 3005 to achieve decoupling. In some embodiments, the first spring 3004 and the second spring 3005 extend in different directions to achieve decoupling in different directions. For example, the first spring 3004 extends along a first direction X, and both second springs 3005 extend along a second direction Y.

[0136] In some embodiments, the first connector 3001 is L-shaped. In some embodiments, the second connector 3002 is L-shaped. In some embodiments, the third connector 3003 is straight.

[0137] Figure 25 , Figure 26 This is a schematic diagram of a motion device according to other embodiments of this specification. See also Figure 25 , Figure 26 As shown, in one or more embodiments of this specification, the motion device may include a motion mechanism, wherein at least one of the first plate 1 and the second plate 2 of the motion mechanism has an inner plate 1000 and an outer plate 2000 surrounding the periphery of the inner plate 1000. In some embodiments, the motion device further includes a second drive mechanism 3000, which drives the inner plate 1000 to move relative to the outer plate 2000. In this embodiment, since the inner plate 1000 and the outer plate 2000 are formed on the first plate 1 or the second plate 2, the degree of freedom is increased without increasing the height in the third direction Z, which is beneficial to the overall flattening of the motion device.

[0138] and Figure 23 , Figure 24Similar to the embodiments, the first plate 1 and / or the second plate 2 of the motion device in this embodiment may also include a first connector 3001, a second connector 3002, a third connector 3003, a first spring 3004 and a second spring 3005, so they will not be described in detail here.

[0139] The basic concepts have been described above. It is obvious that the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are taught in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A motion mechanism characterized by, include: The first plate, the second plate, the driving mechanism for moving the second plate relative to the first plate, the support mechanism, and the outer guide mechanism; Each of the drive mechanisms is connected to at least one of the first plate and the second plate via a support mechanism, the support mechanism forming a support mechanism connection position on the first plate or the second plate, the support mechanism being configured to distribute the force provided by the drive mechanism to the support mechanism connection positions located on both sides of the drive mechanism; An outer guide mechanism is provided between two adjacent drive mechanisms. The outer guide mechanism includes two guide rod groups and a guide connector connecting the two guide rod groups. Each guide rod group includes a first guide rod and a second guide rod. The first guide rod is directly or indirectly connected to the first plate, and the other end of the first guide rod is connected to the guide connector. The second guide rod is directly or indirectly connected to the second plate, and the other end of the second guide rod is connected to the guide connector. The outer guide mechanism is configured to be flexible in the direction from the first plate to the second plate, the first guide rod and the second guide rod are rigid in their axial direction, and the first guide rod and the second guide rod are flexible in their radial direction.

2. The motion mechanism of claim 1, wherein, The support mechanism connection positions include: a plurality of support connection points, wherein one or more of the support connection points are located on one side of the drive mechanism, and another one or more of the support connection points are located on the other side of the drive mechanism; And / or, the support mechanism connection position includes: a support connection surface, a portion of which is located on one side of the drive mechanism, and another portion of which is located on the other side of the drive mechanism.

3. The motion mechanism according to claim 1 or 2, characterized in that, The support mechanism includes: a mounting base and two or more support rods, one end of the support rod is connected to the mounting base, and the other end of the support rod is connected to the first plate or the second plate; The drive mechanism is connected to the mounting base.

4. The motion mechanism of claim 3, wherein, The driving mechanism includes: a first housing, a second housing disposed inside the first housing, a first driving unit for driving the second housing to move relative to the first housing, a driving end, and a second driving unit for driving the driving end to move relative to the second housing; The support mechanism includes: a first support mechanism connecting the drive mechanism and the first plate, and a second support mechanism connecting the drive mechanism and the second plate, wherein the first support mechanism and the second support mechanism respectively include the mounting base and the support rod; The first housing is fixedly connected to the mounting base of the first support mechanism; The drive end is connected to the mounting base of the second support mechanism.

5. The motion mechanism of claim 4, wherein, The mounting base of the second support mechanism has a receiving space, and the receiving space has a receiving space mating surface; The driving end has a driving end mating surface, which is an arc surface, and the driving end mating surface can abut against the accommodating space mating surface; The mounting base of the second support mechanism is provided with a compression spring, the compression spring having a slot through which the drive end passes, and the compression spring being configured to apply an elastic force toward the drive end toward the mating surface of the receiving space.

6. The motion mechanism of claim 4, wherein, One end of the first guide rod is connected to the mounting base of the first support mechanism; One end of the second guide rod is connected to the mounting base of the second support mechanism.

7. The motion mechanism of claim 6, wherein, Also includes: A central guiding mechanism is located in the middle of the first plate. The central guiding mechanism includes: a first connecting part connected to the first plate, a second connecting part connected to the second plate, and a guide rod connecting the first connecting part and the second connecting part. The guide rod is configured to be rigid in the direction from the first plate to the second plate.

8. The motion mechanism of claim 7, wherein, The first connecting portion and / or the second connecting portion includes a disc-shaped flexible element, which is configured to be flexible in the direction from the first plate to the second plate; Alternatively, the first connecting portion and / or the second connecting portion may include: a first component, a second component, an intermediate component disposed between the first component and the second component, one or more first connecting rods connecting the first component and the intermediate component, and one or more second connecting rods connecting the second component and the intermediate component, wherein the first connecting rod and the second connecting rod are both inclined relative to the first plate.

9. The motion mechanism of claim 6, wherein, Also includes: An end-effector measurement mechanism includes: a measurement mechanism base fixedly connected to the first plate; a measurement mechanism guide fixing part disposed on the measurement mechanism base; a measurement mechanism guide moving part movable along the measurement mechanism guide fixing part; a measurement fixing part disposed on the measurement mechanism base; a measurement moving part disposed on the measurement mechanism guide moving part matching the measurement fixing part; and a measurement mechanism flexible member connecting the measurement mechanism guide moving part and the second plate.

10. The motion mechanism of claim 9, wherein, The flexible component of the measuring mechanism includes: a first flexible plate fixedly connected to the guide moving part of the measuring mechanism, a second flexible plate fixedly connected to the second plate, a first flexible support mechanism disposed on the first flexible plate, a second flexible support mechanism disposed on the second flexible plate, an outer guide mechanism of the flexible component of the measuring mechanism connecting the first flexible support mechanism and the second flexible support mechanism, and a center guide mechanism of the flexible component of the measuring mechanism connecting the first flexible plate and the second flexible plate; The outer guide mechanism of the flexible component of the measuring mechanism includes: two groups of flexible component guide rods and a connecting member for the flexible component guide rods of the measuring mechanism. Each group of flexible component guide rods includes: a first guide rod and a second guide rod. The first guide rod is connected to the first support mechanism of the flexible component, and the second guide rod is connected to the second support mechanism of the flexible component.

11. The motion mechanism of claim 6, wherein, Also includes: A magnetic compensation mechanism, comprising: a first magnet and a second magnet configured to attract or de-attract each other, the first magnet being directly or indirectly connected to a first plate, and the second magnet being directly or indirectly connected to a second plate. The first magnet and the second magnet are configured such that when the driving mechanism drives one side of the second plate to move closer to one side of the first plate, the second magnet in the magnetic compensation mechanism located on one side of the first plate tends to move toward the first magnet.

12. The motion mechanism of claim 11, wherein, The magnetic compensation mechanism further includes: a magnetic compensation mechanism base fixedly connected to the first plate, a magnetic compensation mechanism guide fixing part disposed on the magnetic compensation mechanism base, a magnetic compensation mechanism guide moving part capable of moving along the magnetic compensation mechanism guide fixing part, and a magnetic compensation mechanism flexible member connecting the magnetic compensation mechanism guide moving part and the second plate, wherein the first magnet is connected to the magnetic compensation mechanism base, and the second magnet is connected to the magnetic compensation mechanism guide moving part.

13. A sports device, characterized in that include: The motion mechanism according to any one of claims 1 to 12; The motion device further includes: a third plate disposed above the second plate, the third plate having an inner plate and an outer plate surrounding the periphery of the inner plate, one of the inner plate and the outer plate being connected to the second plate; The motion device further includes a second drive mechanism, which drives the inner side plate to move relative to the outer side plate.

14. A sports device, characterized in that include: The motion mechanism according to any one of claims 1 to 12; Wherein, at least one of the first plate and the second plate has an inner plate and an outer plate surrounding the periphery of the inner plate; The motion device further includes a second drive mechanism, which drives the inner side plate to move relative to the outer side plate.

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