Non-working-face contact type carrying and positioning device for large-size glass masks

By employing a non-contact clamping mechanism and symmetrically arranged clamping cylinders and counterweights, the risk of damage during the handling of glass photomasks is eliminated, enabling rapid and precise positioning and stable clamping, thus ensuring the integrity of the glass surface and high operational efficiency.

CN121516563APending Publication Date: 2026-02-13HUNAN YUHUAN JINGYAN TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202511766575.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-11-27
Publication Date
2026-02-13

AI Technical Summary

Technical Problem

Traditional methods of handling and positioning glass photomasks pose a high risk of damage, especially to the surface, leading to product scrap.

Method used

It adopts a non-contact clamping mechanism, which achieves zero contact through the symmetrical layout of the clamping cylinder and the counterweight, and the chamfering of the clamping edge. Combined with the design of the anti-air groove and the top block, it ensures accurate and stable positioning.

Benefits of technology

It enables rapid, precise positioning and stable clamping of glass photomasks, avoiding surface damage and deformation, reducing labor intensity, and improving operational flexibility and process standardization.

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Abstract

The invention discloses a large-size glass mask plate non-working face contact type carrying and positioning device, and belongs to the technical field of mask plate transportation, the large-size glass mask plate non-working face contact type carrying and positioning device comprises a fixing plate, and the fixing plate is arranged on the outer side of a glass mask plate in a sleeving mode; a clamping mechanism used for clamping is arranged on the outer side of the fixing plate, clamping mechanisms are arranged on the clamping mechanism in pairs, and the clamping mechanisms are used for clamping the fixing plate. On the premise that rapid, accurate and stable positioning and clamping are achieved, it can be guaranteed that the upper end face and the lower end face of a workpiece do not make contact with a clamping tool in the whole process at the same time.
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Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of mask plate transportation, and particularly relates to a non-working surface contact type carrying and positioning device for large-size glass mask plates. BACKGROUND

[0002] In the manufacturing and processing of large-size glass mask plates, the surface of the glass mask plate is provided with a precise etching pattern, and any slight contact, scratching or pollution will cause the product to be scrapped, resulting in huge economic losses. The traditional carrying and positioning method has a high risk of surface damage. For example, when a vacuum chuck or a mechanical clamp directly contacting the front and back surfaces is used to clamp the glass mask plate, the upper and lower surfaces of the glass mask plate will be damaged.

[0003] To solve the above problems, the application provides a non-contact carrying and positioning tool for large-size glass mask plates, which can ensure that the workpiece working surface is not in contact with the clamping tool during the whole process while achieving fast, accurate and stable positioning and clamping.

[0004] To achieve the above object, the technical scheme adopted by the application is as follows: A non-working surface contact type carrying and positioning device for large-size glass mask plates, comprising a fixed plate, the fixed plate is sleeved on the outside of the glass mask plate; a clamping mechanism for clamping is arranged on the outside of the fixed plate, a pair of clamping mechanisms are arranged on the clamping mechanism, and the clamping mechanisms are used for clamping the fixed plate.

[0005] As a further improvement of the above technical scheme, the clamping mechanism comprises a long-side clamping block and a short-side clamping block, the long-side clamping block and the short-side clamping block are driven by a gas cylinder, a long-side counterweight block is arranged on the opposite side of the long-side clamping block, and a short-side counterweight block is arranged on the opposite side of the short-side clamping block.

[0006] As a further improvement of the above technical scheme, a top block is arranged in the fixed plate, and the arrangement position of the top block is located on the other side of the opposite positions of the long-side clamping block, the short-side clamping block, the long-side counterweight block and the short-side counterweight block.

[0007] As a further improvement of the above technical scheme, an empty slot is arranged on the fixed plate, and the empty slot is arranged on the four edges of the fixed plate.

[0008] As a further improvement of the above technical scheme, the long-side clamping block comprises a clamping gas cylinder, the clamping gas cylinder is arranged on the side wall of the clamping mechanism through a mounting seat, and a clamping claw is arranged on the telescopic end of the clamping gas cylinder.

[0009] As a further improvement of the above technical scheme, the number of long-side clamping blocks is not less than 2, and the number of short-side clamping blocks is not less than 2.

[0010] As a further improvement of the above technical solution, the clamping mechanism is provided with a mounting flange, and the mounting flange is provided with a threaded hole.

[0011] Compared with the prior art, the beneficial effects of the present application are: through the chamfering of the clamping edge, the "zero contact" with the functional area of the glass mask is realized, and the risk of surface damage is fundamentally eliminated. The design of the positioning plate and the air clearance groove realizes the rapid and accurate positioning of the workpiece, and the cylinder clamping system ensures the stability and reliability of the final position. The symmetrical layout of the cylinder and the counterweight ensures uniform distribution of clamping force, effectively preventing clamping deformation and vibration of large-size thin glass workpieces. Combined with the manual operation of the booster arm, the flexibility of operation is ensured, and the labor intensity is reduced, and the standardization and efficiency of the process are realized through the design of the tooling. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a top view structural schematic diagram of the present application.

[0013] Figure 2 It is a bottom view structural schematic diagram of the present application.

[0014] Figure 3 It is a first perspective view structural schematic diagram of the present application.

[0015] Figure 4 It is a second perspective view structural schematic diagram of the present application.

[0016] In the figure: 1, glass mask; 2, fixed plate; 3, air clearance groove; 4, first short edge clamping block; 5, second short edge clamping block; 6, first long edge clamping block; 7, second long edge clamping block; 8, first short edge counterweight; 9, second short edge counterweight; 10, first long edge counterweight; 11, second long edge counterweight; 12, threaded connection hole; 13, clamping block. DETAILED DESCRIPTION

[0017] In order for those skilled in the art to better understand the technical solutions of the present application, the present application will be described in detail below in conjunction with examples, and the description in this part is only exemplary and explanatory, and should not have any limiting effect on the protection scope of the present application.

[0018] A large-size glass mask non-working surface contact type carrying and positioning device, comprising a fixed plate, the fixed plate is sleeved on the outside of the glass mask, such as Figure 2As shown, a cavity is provided in the middle of the fixing plate. The shape of the cavity is larger than that of the glass mask. When positioning the glass mask, the glass mask is placed in the cavity. A clamping mechanism is provided on the outside of the fixing plate to clamp the fixing plate. The clamping mechanism has a pair of clamping mechanisms. When the clamping mechanism clamps the fixing plate, the force of the clamping mechanism on the fixing plate will cause the fixing plate to deform, so that the inner wall of the cavity of the fixing plate contacts the side wall of the glass mask, thus achieving the clamping effect of the glass mask.

[0019] The clamping mechanism includes a retractable clamping block on one side of the fixed plate and a counterweight on the opposite side. When the clamping block and the counterweight are clamped, the counterweight on the opposite side can provide a reverse force when the clamping block performs the clamping action under the action of the cylinder. This ensures that the clamping process is smooth and without off-center load, balances the clamping force and ensures stable clamping, and prevents the glass from deforming or breaking due to uneven force.

[0020] like Figures 1-2 As shown, in a preferred embodiment of the above, the clamping mechanism includes a long-side clamping block and a short-side clamping block, which are driven by a cylinder. The long-side clamping block includes a first long-side clamping block and a second long-side clamping block, and the short-side clamping block includes a first short-side clamping block and a second short-side clamping block. A long-side counterweight is provided on the opposite side of the long-side clamping block, and the long-side counterweight includes a first long-side counterweight and a second long-side counterweight. Similarly, a short-side counterweight is provided on the opposite side of the short-side clamping block, and the short-side counterweight includes a first short-side counterweight and a second short-side counterweight. The first long-side clamping block and the first long-side counterweight are arranged opposite each other. Figure 2 or Figure 1 As shown, the second long-side clamping block, the second long-side counterweight block, the first short-side clamping block, the first short-side counterweight block, and the second short-side clamping block and the second short-side counterweight block are arranged in the same way as the first long-side clamping block and the first long-side counterweight block.

[0021] like Figure 2 As shown in Figure 3, a top block is provided on the inner wall of the cavity inside the fixing plate. The function of the top block is to transmit the deformation of the fixing plate. The protruding top block can reduce the distance between the top block and the glass mask when the fixing plate deforms, so the top block can press against the side wall of the glass mask more quickly. The top block is located on the other side of the long side clamping block, short side clamping block, long side counterweight block and short side counterweight block.

[0022] like Figures 1-4 As shown, in a preferred embodiment of the above, the fixing plate is provided with a clearance groove, by... Figure 2As can be seen from point 3, since the width of the long side of the fixed plate is wider than the width of the short side, a clearance groove is provided on the long side of the fixed plate. The clearance groove is located inside the top block. The clearance groove can reduce the width of the side wall of the fixed plate at the location of the clearance groove. When the clamping mechanism clamps, it can reduce the rigidity of the side wall of the fixed plate and ensure that deformation can occur in time. At the same time, the clearance groove provides operating space for the grippers of the external handling equipment. When the width of the short side of the fixed plate increases, the clearance groove can also be set on the short side of the fixed plate.

[0023] like Figure 1 As shown in Figure 4, in a preferred embodiment of the above, the first long-side clamping block, the second long-side clamping block, the first short-side clamping block, and the second short-side clamping block have the same structure, each including a clamping cylinder. The clamping cylinder is mounted on the side wall of the clamping mechanism via a mounting base, and the telescopic end of the clamping cylinder is provided with a clamping claw.

[0024] The clamping claws are provided with triangular protrusions, and the fixing plate is provided with chamfers that cooperate with the triangular protrusions. The mounting base is set on the side wall of the clamping block by bolts. The mounting base is provided with a clamping cylinder. The telescopic end of the clamping cylinder is connected to the clamping claws through a connecting plate, which is located below the mounting base. Similarly, the counterweight is also provided with clamping claws, and the fixing plate at the counterweight location is also provided with chamfers that cooperate with the clamping claws.

[0025] By clamping and chamfering the edges, "zero contact" with the functional areas of the glass mask is achieved, fundamentally eliminating the risk of surface damage.

[0026] As a preferred embodiment of the above, the number of long-side clamping blocks is not less than 2, and the number of short-side clamping blocks is not less than 2.

[0027] As a preferred embodiment of the above, the clamping mechanism is provided with a mounting flange, and the mounting flange is provided with a threaded hole.

[0028] In this embodiment, the fixing plate is used to support and initially position the glass mask, and it is provided with four clearance slots. The positions of the clearance slots can be referenced. Figure 2 The aforementioned clearance groove provides operating space for the grippers of external handling equipment. The clamping system adopts a symmetrical layout. On one of the two opposite short sides of the fixed plate, a first short-side clamping cylinder and a second short-side clamping cylinder are installed; on one of the two adjacent long sides, a first long-side clamping cylinder and a second long-side clamping cylinder are installed. To balance the clamping force and ensure stable clamping, such as... Figure 2As shown, first long edge counterweight and second long edge counterweight are arranged on the other side long edge; wherein the first long edge counterweight, the second long edge counterweight and the first long edge clamping cylinder, the second long edge clamping cylinder are arranged corresponding to the position, the first short edge counterweight and the second short edge counterweight are arranged on the other side short edge, wherein the first short edge counterweight and the second short edge counterweight are arranged corresponding to the position of the first short edge clamping cylinder and the second short edge clamping cylinder; the mounting flange arranged on the fixed plate is used for reliably connecting the entire device with the external equipment flange through the threaded hole arranged on the flange.

[0029] Working process: Placing: the clamping jaw of the external handling equipment (such as a power arm) clamps the glass mask and places it inside the fixed plate, wherein the air gap provides a placing space for the clamping jaw, which can be placed into the cavity inside the fixed plate under the condition of clamping the glass mask.

[0030] Clamping: the four clamping cylinders act simultaneously and synchronously apply clamping force from the four sides of the fixed plate; the corresponding counterweights provide counteracting force to ensure that the clamping process is stable and without unbalanced load, preventing the glass from deforming or breaking due to uneven stress; when the clamping force is applied to the four sides of the fixed plate, the fixed plate deforms, and the top block arranged on the four sides of the deformed fixed plate can conduct the clamping force to the side wall of the glass mask, thereby playing a clamping role on the glass mask.

[0031] Releasing: after the processing is completed, the clamping cylinders are synchronously retracted to release the constraint on the glass mask (1), facilitating the handling equipment to take it away.

[0032] It should be noted that in this text, the terms "include", "contain" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or includes elements inherent to such process, method, article or equipment.

[0033] The principles and implementation modes of the present application are described by applying specific examples in this text, and the above examples are only used to help understand the method of the present application and its core idea.

[0034] The above is only the preferred embodiment of the present application, and it should be noted that due to the limitation of language expression, there are infinite specific structures, and for ordinary skilled persons in the technical field, some improvements, refinements or changes can be made without departing from the principles of the present application, and the above technical features can also be combined in an appropriate manner; these improvements, refinements, changes or combinations, or the direct application of the inventive concept and technical solution to other occasions without improvement, shall be regarded as the protection scope of the present application.

Claims

1. A non-working surface contact handling and positioning device for large-size glass masks, characterized in that, The device includes a fixing plate, which is sleeved on the outside of a glass mask; a clamping mechanism for clamping is provided on the outside of the fixing plate, and a pair of clamping mechanisms are provided on the clamping mechanism for clamping the fixing plate.

2. The large-size glass mask non-working surface contact handling and positioning device according to claim 1, characterized in that, The clamping mechanism includes a long-side clamping block and a short-side clamping block, which are driven by a cylinder. A long-side counterweight is provided on the opposite side of the long-side clamping block, and a short-side counterweight is provided on the opposite side of the short-side clamping block.

3. The large-size glass mask non-working surface contact handling and positioning device according to claim 2, characterized in that, A top block is provided on the inner side of the fixing plate. The top block is located on the other side of the long side clamping block, the short side clamping block, the long side counterweight block, and the short side counterweight block.

4. The large-size glass mask non-working surface contact handling and positioning device according to claim 3, characterized in that, The fixing plate is provided with clearance grooves, which are provided on all four sides of the fixing plate.

5. The large-size glass mask non-working surface contact handling and positioning device according to claim 2, characterized in that, The long-side clamping block includes a clamping cylinder, which is mounted on the side wall of the clamping mechanism via a mounting base, and the telescopic end of the clamping cylinder is provided with a clamping claw.

6. The large-size glass mask non-working surface contact handling and positioning device according to claim 5, characterized in that, The number of long-side clamping blocks shall not be less than 2, and the number of short-side clamping blocks shall not be less than 2.

7. The large-size glass mask non-working surface contact handling and positioning device according to claim 5, characterized in that, The clamping mechanism is provided with a mounting flange, and the mounting flange is provided with a threaded hole.