Micromechanics detection device and detection method

Abstract

The invention relates to the technical field of mechanical detection, and particularly discloses a micromechanics detection device and method, and the device comprises a first clamping module which is provided with a first clamping part used for clamping a first plate-shaped structure; the second clamping module is provided with a second clamping piece used for clamping a second plate-shaped structure; the driving module is used for driving the first clamping module to do N-dimensional motion relative to the second clamping module, and N is an integer larger than 2; the sensor assembly is used for measuring stress and / or torque of the first clamping module and / or the second clamping module; and the calculation control module is used for controlling the driving module and determining the microcosmic force between the first plate-shaped structure and the second plate-shaped structure according to the stress and / or torque of the first clamping module and / or the second clamping module. Complex multi-dimensional loads can be applied to materials or microstructures, actual working conditions can be simulated more truly, and rich mechanical data can be obtained.

Description

Technical Field

[0001] This invention relates to the field of mechanical testing technology, and in particular to a micromechanical testing device and method. Background Technology

[0002] Currently, most existing mechanical testing between plates uses indirect measurement methods, such as laser interferometers, to monitor the micro-deformation of the two plates and infer the force. This process is complex and its accuracy is difficult to guarantee. Furthermore, it cannot capture transient force changes during dynamic processes and lacks effective means for in-situ, real-time, and quantitative detection of these micro-forces.

[0003] Therefore, there is an urgent need for a method that can accurately detect the microscopic forces between adjacent planar structures in micro-nano gaps. Summary of the Invention

[0004] In order to overcome the above-mentioned shortcomings of existing detection methods, the present invention provides a micromechanical detection device and detection method.

[0005] In a first aspect, the present invention provides a micromechanical detection device, comprising: The first clamping module has a first clamping member for clamping the first plate-shaped structure; The second clamping module has a second clamping member for clamping the second plate-shaped structure; The driving module is used to drive the first clamping module to perform N-dimensional motion relative to the second clamping module, where N is an integer greater than 2; A sensor assembly for measuring the force and / or torque applied to the first clamping module and / or the second clamping module; The calculation control module is used to control the drive module and determine the micro-force between the first plate structure and the second plate structure based on the force and / or torque of the first clamping module and / or the second clamping module.

[0006] According to a specific embodiment, in the above-mentioned detection device, the sensor assembly includes a sensor body, which is respectively disposed in the first clamping module and the second clamping module, or respectively disposed on both sides of the first clamping module and the second clamping module. The side of the first clamping module away from the first plate-shaped structure is connected to the sensor body, the side of the sensor body away from the first clamping module is connected to the driving module, and the side of the second clamping module away from the second plate-shaped structure is connected to the sensor body.

[0007] According to one specific embodiment, in the above-mentioned detection device, the second clamping module includes a position adjustment component, which is connected to the side of the sensor body away from the second plate-shaped structure, and the position adjustment component is used to drive the second clamping module to move relative to the first clamping module.

[0008] According to a specific embodiment, in the above-mentioned detection device, the position adjustment component includes a pneumatic control component, and the pneumatic control component is externally connected to an air supply device, which is used to pump air to the pneumatic control component; the position adjustment component also includes a fixed frame, one end of the pneumatic control component is connected to the second clamping member, and the other end is connected to the fixed frame.

[0009] According to one specific embodiment, in the above-mentioned detection device, the sensor body is a multi-dimensional force sensor, which is configured to simultaneously detect forces in at least three orthogonal directions and / or torques in three directions.

[0010] According to one specific embodiment, in the above-mentioned detection device, the driving module is a multi-axis displacement stage, which is configured to provide at least three degrees of freedom of displacement, and drives the first clamping module to perform N-dimensional motion through the combination of at least three degrees of freedom.

[0011] According to a specific embodiment, in the above-mentioned detection device, the calculation control module is configured to control the actions of the drive module and / or the second clamping module to achieve the corresponding detection conditions, and to determine the micro-force between the first plate structure and the second plate structure based on the force and / or torque measured on the first clamping module and / or the second clamping module under the corresponding detection conditions.

[0012] According to one specific embodiment, the detection device further includes a liquid supply module for supplying liquid to the surface of the first plate-shaped structure or the second plate-shaped structure.

[0013] According to a specific embodiment, the detection device further includes a vibration damping platform and a support frame. The support frame is mounted on the vibration damping platform. The vibration damping platform is sequentially connected to the drive module, the sensor assembly, and the first clamping module. The support frame is connected to the second clamping module.

[0014] Secondly, the present invention provides a micromechanical detection method, comprising: The first clamping module holding the first plate-shaped structure and the second clamping module holding the second plate-shaped structure are moved respectively, so that the relative position between the first plate-shaped structure and the second plate-shaped structure reaches a preset state; In a preset state, multidimensional motion is applied to the first clamping module and / or the second clamping module to obtain the force and / or torque of at least one of the first clamping module and the second clamping module; Based on the forces and / or torques applied to the first clamping module and / or the second clamping module, mechanical data curves are plotted, and the micro-forces between the first plate structure and the second plate structure are determined based on the mechanical data curves.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: Based on the above-mentioned first aspect of the technical solution, the present invention drives the first clamping module to perform at least two-dimensional motion relative to the second clamping module through the driving module, which can apply complex multi-axis loads to materials or microstructures, more realistically simulate actual working conditions, and at the same time perform high-precision synchronous measurement of multi-dimensional forces and multi-dimensional torques on specimens at the microscale to obtain rich mechanical data. Based on the technical solution of the second aspect mentioned above, the present invention moves two plate-like structures to a preset state, and then applies multidimensional motion to obtain the forces and / or torques of the two plate-like structures respectively, thereby obtaining mechanical curves containing multiple stages, thus determining the complex micro-forces between the two plate-like structures and extracting the most mechanical information from a single detection. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the micromechanical detection device provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of liquid confinement provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the micromechanical detection device provided in an embodiment of the present invention; Figure 4 A schematic flowchart of the detection method provided in an embodiment of the present invention; Figure 5 A schematic diagram of the mechanical data curves of associated air pressure and gap provided for an embodiment of the present invention.

[0017] Marked in the image: 100-First clamping module, 101-First clamping component, 102-First plate structure, 200-Second clamping module, 201-Second clamping component, 202-Second plate structure, 203-Position adjustment assembly, 300-Drive module, 400-Sensor assembly, 401-Support plate, 500-Vibration damping platform, 600-Support frame, 700-Detection lens group, 800-Computational control module. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to specific embodiments. However, this should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0019] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of the present invention is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the present invention or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a particular device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on the present invention.

[0020] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0021] Furthermore, in the description of the technical solution of this invention, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "provided with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0022] In traditional micromechanical testing, researchers often need to use multiple different specialized devices to perform different tests such as compression, friction, peeling, and bending. For example, they may use nanoindenters or tensile testing machines for uniaxial (such as compression and tension) or simple biaxial tests. There is a lack of an integrated micromechanical testing platform that can efficiently and accurately complete multiple modes of mechanical testing (such as extrusion, friction, adhesion / demolding) on ​​a single device, thereby improving testing efficiency.

[0023] Based on this, the present invention provides a detection device with high-precision motion control and micro-force sensing. By controlling two opposing plates to perform multi-dimensional motion, the device collects the force situation in real time throughout the process to quantify various micro-forces. It can not only perform composite mechanical property testing such as tension-torsion, compression-shear, and bending-torsion, but also apply cyclic multi-axis loads to micro-devices or materials, more realistically simulating the complex mechanical environment in which the device is located in actual operation. Thus, it can achieve in-situ, real-time, and quantitative detection of the mechanical properties between the plates and simultaneously monitor their mechanical response.

[0024] When two plate-like structures are at different micro-nano distances, various microscopic forces will be generated. These forces mainly include: Microscopic adsorption forces, including van der Waals forces, electrostatic forces, capillary forces, etc., can cause two plate-like structures to "adhere" or "pull" unexpectedly at extremely close distances, disrupting the accuracy of their relative positions and causing relative position errors. Contact stress: When two plate-like structures are in contact at certain parts, uneven distribution of microscopic contact pressure between them can also lead to damage to the two plates. Demolding force: When two plate-like structures are filled with a viscous medium, a demolding force will occur between them when the two plate-like structures separate. Excessive demolding force may cause irregular residue of the medium on the plate or damage to the surface of the plate-like structures.

[0025] These forces are difficult to measure, but they directly affect the surface shape of the two plate-like structures or cause damage to them. Existing technologies lack effective means for in-situ, real-time monitoring of these forces during actual processes. Process optimization largely relies on post-process testing and trial-and-error, which is inefficient and costly. The detection device provided by this invention can detect force changes in the plate-like structure during dynamic processes and further analyze complete data on microscopic forces during relative motion. This provides direct mechanical data for process optimization and intelligent control, guiding the adjustment of key parameters (viscosity, surface tension, contact angle, etc.) in liquid thin films and surface modification treatments. This reduces liquid bridging forces, pressure resistance, and viscous forces caused by the liquid, enabling precise optimization of process parameters.

[0026] The technical solution provided by the present invention will be described and explained in detail below with reference to the accompanying drawings and specific embodiments.

[0027] For details, please refer to Figure 1 The diagram illustrates the structure of a micromechanical detection device provided in an embodiment of the present invention, including a first clamping module 100 having a first clamping member 101 for clamping a first plate-shaped structure 102; a second clamping module 200 having a second clamping member 201 for clamping a second plate-shaped structure 202; a driving module 300 for driving the first clamping module 100 to perform N-dimensional motion relative to the second clamping module 200, where N is an integer greater than or equal to 2; a sensor assembly 400 for measuring the force and / or torque on the first clamping module 100 and / or the second clamping module 200; and a calculation and control module 800 for controlling the driving module 300 and determining the micro-force between the first plate-shaped structure 102 and the second plate-shaped structure 202 based on the force and / or torque on the first clamping module 100 and / or the second clamping module 200.

[0028] It is understood that, in the embodiments of the present invention, the first plate structure 102 and the second plate structure 202 can be plate structures of any shape and relatively flat, such as square wooden plates, circular silicon-based plates, and micro carbon nanotubes. The materials of the two plate structures can be the same or different, depending on the actual testing requirements.

[0029] Correspondingly, based on the differences between the two plate-like structures, the first clamping member 101 and the second clamping member 201 are corresponding devices capable of clamping and fixing the corresponding plate-like structures, such as miniature vacuum suction cups, mechanical grippers, and miniature clampers, which can clamp the corresponding plate-like structures without damage.

[0030] In this embodiment of the invention, the first clamping module is driven by the driving module 300 to perform at least two-dimensional motion relative to the second clamping module. This allows for the application of complex multidimensional forces and torques to materials or microstructures, more realistically simulating actual working conditions. Simultaneously, it enables high-precision synchronous measurement of multidimensional forces and torques on specimens at the microscale, obtaining abundant mechanical data.

[0031] Understandably, traditional testing typically only measures one side of the plate. Due to factors such as sensor error, installation deviation, and deformation of the plate itself, measuring only one side introduces unavoidable and non-eliminable systematic errors. The sensor assembly 400 provided in this embodiment includes sensor bodies respectively disposed in the first clamping module 100 and the second clamping module 200, thereby collecting the forces and / or torques on the first clamping module 100 and / or the second clamping module 200 to eliminate these interference factors. For example, if a difference is found between the forces and / or torques measured on the first clamping module 100 and the second clamping module 200, the error can be calibrated through cross-validation, and a more accurate estimate can be obtained through a data fusion algorithm, thereby extracting the true contact force and obtaining the mechanical information between the two plate-like structures. To improve the response speed and measurement accuracy of the sensor body to mechanical information, the sensor body can also be integrated into the first and second clamping modules.

[0032] In one possible implementation, the sensor body can be positioned between the first clamping module 100 and the drive module 300. In this configuration, the sensor assembly 400 is connected to the side of the first clamping module 100 away from the first plate-like structure 102, and the drive module 300 is connected to the side of the sensor assembly 400 away from the first clamping module 100. This ensures that the drive module 300 can drive the first clamping module 100 linearly, and the sensor body can more accurately measure the mechanical feedback of the first clamping module 100. Similarly, in the second clamping module 200, another sensor body can be connected to the side of the second clamping module away from the second plate-like structure.

[0033] Accordingly, if the system error is small enough, the embodiments of the present invention may also select one of the first clamping module 100 or the second clamping module 200 to set a single-sided sensor body according to the actual detection needs.

[0034] Furthermore, to avoid energy dissipation and reduce mechanical transmission errors, in this embodiment of the invention, the sensor assembly 400 further includes a support plate 401, which is connected to the sensor body and provides buffering and vibration reduction to the sensor body. In one possible implementation, the support plate 401 can be a configurable vibration-damping buffer component. The stiffness and damping characteristics of this component can be selected or adjusted according to the measured object and the detection method, thereby reducing environmental interference and the slight vibration of the detection device itself along the force transmission path, and further improving the measurement accuracy of the sensor body. For example, when detecting a two-wafer plate structure, a high-stiffness material is required to accurately control the displacement, while moderate damping is needed to obtain a stable force response. Rigid foam board or similar materials can be used as a vibration-damping buffer component for the sensor body.

[0035] Based on this, in order to improve the accuracy of mechanical measurements, the sensor body can adopt a multi-dimensional force sensor. The multi-dimensional force sensor is configured to simultaneously detect forces in at least three orthogonal directions and / or torques in three directions, thereby providing the most comprehensive experimental data for mechanical finite element analysis and constitutive models.

[0036] It is understood that the drive module 300 is a drive device with at least three degrees of freedom, such as a three-axis Cartesian robot or a displacement stage, which drives the first gripping module 100 to move, indicating that the drive module 300 and the first gripping module 100 have an indirect or direct connection relationship. In one possible implementation, in order to achieve complex movements of the first gripping module 100, in this embodiment of the invention, the drive module 300 adopts a multi-axis displacement stage, which is configured to provide at least three degrees of freedom of displacement, and drives the first gripping module 100 to perform N-dimensional movements through the combination of at least three degrees of freedom.

[0037] Furthermore, the multi-axis displacement stage can be a six-axis displacement stage, which can provide six degrees of freedom of displacement. Through the combination of the six degrees of freedom, the first clamping module 100 can complete any required movement in three-dimensional space, such as translation or rotation.

[0038] Understandably, when the first clamping module 100 performs N-dimensional motion relative to the second clamping module 200, the second clamping module 200 can select a fixing component or a driving component according to actual detection requirements. For example, when detecting the first plate-like structure 102 applying a multi-dimensional load to the fixed second plate-like structure 202, the second clamping module 200 can use a fixed workpiece stage, ensuring that the clamped second plate-like structure 202 always maintains the same posture. When detecting the adhesion between the first plate-like structure 102 and the second plate-like structure 202, whether they are in contact or moving away, the second clamping module 200 can use a micro-motion platform with the ability to drive the second plate-like structure 202, such as a mechanism with a mechanical clamping arm, which can also provide N-dimensional motion for the second plate-like structure 202.

[0039] In one possible implementation, in order to meet actual detection requirements, the second clamping module 200 provided in this embodiment of the invention includes a position adjustment component 203. The position adjustment component 203 is connected to the side of the sensor body away from the second plate structure 202. The position adjustment component 203 is used to drive the second clamping module 200 to move relative to the first clamping module 100.

[0040] To achieve more precise motion control, in this embodiment of the invention, the position adjustment component 203 includes a pneumatic control component, which can drive the second clamping module 200 through precise air pressure control. Specifically, the pneumatic control component is externally connected to an air supply device, which pumps air to the pneumatic control component; the position adjustment component 203 also includes a fixed frame, with one end of the pneumatic control component connected to the second clamping member 201 and the other end connected to the fixed frame. It is understood that the fixed frame can fix one end of the pneumatic control component, allowing the other end of the pneumatic control component to generate relative displacement to drive the second clamping member 201.

[0041] It is understandable that the relative positions of the first plate structure 102 and the second plate structure 202 in space are determined by the actual detection requirements and the corresponding clamping components. They can be relatively parallel or perpendicular in space, or in any position where contact is generated and the force and / or torque changes can be measured.

[0042] For example, in measuring the compressive force of two plates, the two plates can be in any relatively parallel position in space; when measuring the normal load of two plate-like structures, the two plate-like structures are in relative positions on a horizontal plane in space. Correspondingly, the first clamping module 100 and the second clamping module 200 are configured to enable the two plates to be in the positions required for the corresponding detection.

[0043] It should be noted that since there is no absolutely flat plate or absolutely parallel structure, the overall surface undulation of a planar structure cannot be zero. Therefore, the flat plate and parallelism mentioned here are only relative planes or parallelisms, and do not limit the surface shape and mutual position of the structure.

[0044] In this embodiment of the invention, in order to achieve more precise position and motion control, the calculation control module 800 is configured to control the actions of the drive module 300 and / or the second clamping module 200 to achieve the corresponding detection conditions, and to determine the micro-force between the first plate structure 102 and the second plate structure 202 based on the force and / or torque measured on the first clamping module 100 and / or the second clamping module 200 under the corresponding detection conditions.

[0045] Understandably, one of the fundamental principles of this invention lies in Newton's third law of classical mechanics and the analysis of isolated systems. When the first plate structure 102 and the second plate structure 202 interact, the action and reaction forces between them are equal in magnitude and opposite in direction. If each plate structure and its directly supporting structure are considered as an isolated body, and the inertia and non-measurable external forces during the movement of this isolated body are ignored, then the vector sum of all external forces transmitted through each clamping module and acting on this isolated body is equal to the force experienced by each plate structure. Therefore, by measuring the forces and / or torques on the first clamping module 100 and / or the second clamping module 200, the interaction force between the two plate structures can be obtained indirectly and accurately.

[0046] In one possible implementation, given that the first plate-like structure 102 and the second plate-like structure 202 are in a parallel relative position, the detection device provided in this embodiment of the invention further includes a liquid supply module for supplying liquid to the gap between the first plate-like structure 102 and the second plate-like structure 202. That is, the present invention can further detect the force situation of the liquid confined between the two planes.

[0047] When liquids are confined to the micro- and nanoscale, interfacial effects and intermolecular forces become prominent. During approach and separation, the main forces involved include van der Waals forces, surface tension, electric double-layer forces, Laplace pressure, and solvation / hydration forces. Due to surface interactions and confined geometry, the fluid properties differ significantly from those of the bulk phase (macroscopic fluid state), rendering the continuous medium theory inapplicable. A schematic diagram of the forces acting on a liquid between two planes is shown below. Figure 2 As shown. The liquid between the two planes may be formed by external application due to actual needs, or it may be formed by the condensation of moisture in the air in a humid environment within the nanoscale gap.

[0048] Understandably, the liquid supply described above is based on actual testing needs, depending on the specific requirements of the testing scenario and the choice of plate-like structure. For example, the appropriate quantity and type of liquid to supply may be selected for experiments with different liquid thicknesses. It should be noted that during the liquid supply process, the liquid may have the density and fluidity of being dripped.

[0049] In one possible implementation, in order to further improve the performance and accuracy of the detection device, the present invention embodiment also includes a vibration damping platform 500 and a support frame 600. The support frame 600 is mounted on the vibration damping platform 500. The vibration damping platform 500 is sequentially connected to the drive module 300, the sensor assembly 400 and the first clamping module 100. The support frame 600 is connected to the second clamping module 200.

[0050] The present invention will be further described and explained below with reference to a specific embodiment.

[0051] Please refer to Figure 3 It shows a schematic diagram of the detection device structure of the first plate-shaped structure 102 and the second plate-shaped structure 202 provided in an embodiment of the present invention, as follows. Figure 3 As shown, the first clamping module 100 uses a support stage and is sequentially connected to the sensor assembly 400 and the drive module 300. The sensor assembly 400 includes a support plate 401 and a sensor body. The second clamping module 200 is based on... Figure 3 As shown, from bottom to top, the assembly consists of a suction cup, a suction cup mounting plate, and a position adjustment component 203 connected in sequence. To provide a good vibration damping environment and improve the stability of the first plate-shaped structure 102 and the second plate-shaped structure 202 during the detection process, this embodiment also includes a vibration damping platform 500 and a support frame 600. The vibration damping platform 500 provides vibration damping for the detection device, and the drive module 300 is mounted on the vibration damping platform 500. The fixed frame is connected to the position adjustment component 203, thereby mounting the second clamping module 200 above the vibration damping platform 500. Additionally, a liquid supply module can be installed on the support frame 600 and positioned appropriately to supply liquid to the surface of the first plate-shaped structure 102. For ease of implementation, liquid supply to the surface of the first plate-shaped structure 102 can also be done manually.

[0052] Furthermore, in this embodiment, the position adjustment component 203 employs a pneumatic control component, which is externally connected to an air supply device. The air supply device pumps air into the pneumatic control component to change the shape of the second plate-shaped structure 202. During the compression detection process, when the distance between the first plate-shaped structure 102 and the second plate-shaped structure 202 is sufficiently small, they partially come into contact. At this point, if the drive module 300 is used to reduce the gap between them, the drive module 300 may not have sufficient movement accuracy, or the force transmitted from the drive module to the first plate-shaped structure 102 may be too large, leading to damage to either the first plate-shaped structure 102 or the second plate-shaped structure 202. Therefore, the pneumatic control component can be used to change the shape of the second plate-shaped structure 202 by adjusting its output air pressure, thereby adjusting the micro-distance between the second plate-shaped structure 202 and the first plate-shaped structure 102. The pneumatic control component blows air onto the surface of the second plate-shaped structure 202 to pressurize it, causing the second plate-shaped structure 202 to protrude away from the pneumatic control module. It is understandable that the air pressure value of the pneumatic control component is directly proportional to the distance the second plate structure 202 moves.

[0053] Furthermore, in this embodiment, the driving module 300 employs a six-axis displacement stage, which can drive the first plate-like structure 102 to perform multi-dimensional spatial motion in a Cartesian coordinate system. It is understood that a six-axis displacement stage can provide six degrees of freedom of displacement, and through the combination of these six degrees of freedom, the first plate-like structure 102 can complete any desired motion in three-dimensional space, such as translation or rotation. Furthermore, the number of axes of the multi-axis displacement stage can be selected according to actual detection requirements. For example, when only the micro-forces during the lateral movement of the first plate-like structure 102 and the second plate-like structure 202 need to be detected, a three-axis displacement stage providing two degrees of freedom and one degree of rotation can be selected. Other cases will not be elaborated upon here.

[0054] Furthermore, the sensor body employs a multi-dimensional force sensor, such as a six-dimensional force sensor, capable of acquiring forces and torques in six dimensions: X / Y / Z / Rx / Ry / Rz. In this embodiment, the sensor body is only installed in the first clamping module 100, which is sufficient to meet the micromechanical detection requirements between the first plate-like structure 102 and the second plate-like structure 202.

[0055] Furthermore, in this embodiment, the computing control module 800 can employ any terminal device, such as a high-performance artificial intelligence computing processing device group including a central processing unit (CPU), a graphics processing unit (GPU), and a field-programmable gate array (FPGA), to realize control and analysis functions. It controls the drive module 300 and / or the second clamping module 200 to achieve the required mechanical detection conditions by adjusting the distance or relative motion state between the first plate structure 102 and the second plate structure 202, and controls the sensor assembly 400 to collect force and / or torque data under the mechanical detection conditions, then plots a mechanical curve, and obtains the microscopic force between the first plate structure 102 and the second plate structure 202 corresponding to the mechanical detection conditions through the mechanical curve.

[0056] For example, the computational control module 800 can adjust the output air pressure of the pneumatic control component by controlling the air supply device to change the shape of the second plate structure 202; or, it can control a six-axis displacement stage to drive the first plate structure 102 to adjust its position and attitude by receiving position parameters, wherein the position parameters include the position parameters of the first plate structure 102 under the required micromechanical detection conditions, such as the (X / Y / Z / Rx / Ry / Rz) coordinates in the Cartesian coordinate system; or, it can receive the forces and torques in the six dimensions of X / Y / Z / Rx / Ry / Rz collected by the six-dimensional force sensor to obtain the micro-force between the first plate structure 102 and the second plate structure 202 corresponding to the mechanical detection conditions.

[0057] Based on this, the calculation and control module 800 can control the distance between the first plate structure 102 and the second plate structure 202 to achieve a close fit, or control the first plate structure 102 and the second plate structure 202 to perform lateral movement or separation movement on the basis of close fit, etc., thereby realizing the detection of extrusion pressure, film resistance and demolding force between the first plate structure 102 and the second plate structure 202, and realizing the measurement of the micro forces generated therein.

[0058] Understandably, given the relatively fixed spatial relationship between the first clamping module 100 and the second clamping module 200, their positions and orientations can determine the specific spatial location of the two plate-like structures they clamp. This allows for the correlation between the measured micro-forces and the gap between the two plate-like structures, yielding richer mechanical data. Furthermore, control parameters can be correlated, such as the air pressure values ​​controlling the pneumatic control components and the position parameters of the six-axis displacement stage.

[0059] Furthermore, in this embodiment, the six-dimensional force sensor can acquire forces and torques in six dimensions: X / Y / Z / Rx / Ry / Rz. Microscopic forces can be converted from these six-dimensional forces and torques into forces along the corresponding directions. It should be understood that the six-dimensional force sensor possesses complete six-dimensional force and torque measurement capabilities, which is an inherent physical characteristic. However, in different micromechanical testing conditions performed according to specific testing needs, it is not always necessary to acquire all six dimensions of mechanical data signals. Based on the expected relative motion pattern and interaction type between the first plate structure 102 and the second plate structure 202, technicians can selectively enable, read, and process the output signals of one, more, or all dimensions by configuring the calculation control module 800. For example, when performing a normal compression test, the force component along the Z-axis can be primarily acquired and focused on; when performing an in-plane friction test, the force components along the X and / or Y axes and the force component along the Z-axis are primarily acquired; when performing tests involving torsion or complex out-of-plane deformation, one or more torque components need to be further acquired. Furthermore, at the data processing level, it is not necessarily directly equivalent to the raw reading of a single dimension of the sensor. The force and torque signals from one or more relevant dimensions output by the six-dimensional force sensor can be calculated and synthesized using known geometric parameters and mechanical principles by the calculation and control module 800. For example, the pure normal force or pure tangential force acting at the contact point of a plate-like structure can be obtained by combining the force and torque signals measured by the sensor. Based on this, this embodiment retains the full-dimensional measurement capabilities of the sensor hardware for complex testing needs, while also providing the detection method with high flexibility and specificity, making data processing more efficient and enabling the accurate extraction of mechanical parameters most directly related to specific testing conditions.

[0060] Based on the above technical solution, this embodiment enables the distance or mutual motion state between the first plate structure 102 and the second plate structure 202 to reach the actual required micromechanical detection conditions, and obtains the force on the first plate structure 102 during the motion, realizing in-situ and real-time monitoring of micro-forces, avoiding the lag of post-analysis, and enabling quantitative and high-precision measurement, raising the measurement results from qualitative judgment to quantitative analysis. It can accurately measure forces at the micro Newton (N) level, accurately optimize process parameters at each stage, such as demolding process parameters (separation speed, angle), effectively reduce irregular residues of the medium on the plate or damage to the surface of the plate structure, evaluate the performance of medium materials between different plate structures, and accelerate material development.

[0061] like Figure 3 As shown, in this embodiment, a detection mirror group 700 can also be provided on the second clamping member 201 to detect the deformation of the first plate structure or the filling of liquid between the two plate structures.

[0062] Furthermore, in conjunction with the above-mentioned detection device, the embodiments of the present invention can also perform detection for different liquid supply effects during the detection process, specifically including: Single droplet detection: The ability of a droplet to diffuse is detected by providing droplets of different sizes or numbers between two plate-like structures.

[0063] Single-field multi-droplet detection: Detecting microscopic forces at different liquid thicknesses under different combinations of liquid size / droplet spacing.

[0064] Stepping droplet detection: Detects the microscopic interaction between liquid residue and two plate-like structures when they are stepped.

[0065] The obtained microscopic force data can be analyzed to control the distance and relative movement between the two plate-like structures. For example, if the pressure resistance is too high during the actual bonding process, the droplet size and the speed of the first plate-like structure 102 can be adjusted accordingly. Further details will not be elaborated here.

[0066] On the other hand, embodiments of the present invention also provide a micromechanical detection method, please refer to... Figure 4 It illustrates a flowchart of the micromechanical detection method provided in an embodiment of the present invention, including: Step 1: Move the first clamping module holding the first plate structure and the second clamping module holding the second plate structure respectively, so that the relative position between the first plate structure and the second plate structure reaches a preset state; Step 2: Under a preset state, apply multidimensional motion to the first clamping module and / or the second clamping module to obtain the force and / or torque of at least one of the first clamping module and the second clamping module; Step 3: Plot mechanical data curves based on the forces and / or torques of the first clamping module and / or the second clamping module, and determine the micro-forces between the first plate structure and the second plate structure based on the mechanical data curves.

[0067] Based on the above, the embodiments of the present invention move two clamping modules to make the two plate-shaped structures reach a preset state, and then apply multi-dimensional motion to obtain the force and / or torque of the two plate-shaped structures respectively, so as to obtain mechanical curves containing multiple stages, thereby determining the complex micro-forces between the two plate-shaped structures and extracting the maximum amount of mechanical information from a single detection.

[0068] Furthermore, in the above detection process, based on the need to collect the microscopic force between the two plate-like structures according to the present invention, the two plate-like structures first need to be moved to a preset state where detection can be performed. The preset state is that the distance between the first plate-like structure and the second plate-like structure reaches a preset threshold. The preset threshold can be set according to the actual detection needs and the driving accuracy of the corresponding driving module. For example, when detecting plate-like structures at the micron / nanoscale using microlenses, optical fibers, etc., the distance between the two plate-like structures can be controlled to within 100nm through high-precision movement control. In this embodiment, for the purpose of illustrating the detection process, the distance between the first plate-like structure 102 and the second plate-like structure 202 is controlled between 10nm and 30nm for the microscopic force detection.

[0069] Furthermore, depending on different detection requirements, such as when the first plate-shaped structure is already set up and in a fixed initial position, the second plate-shaped structure can be moved to achieve a preset relative position between the first and second plate-shaped structures. When the second plate-shaped structure is in a fixed position, the movement method is the same as described above and will not be repeated here.

[0070] Furthermore, in this embodiment of the invention, applying multidimensional motion to the first clamping module and / or the second clamping module is achieved by controlling the multidimensional force and multidimensional torque applied to the first clamping module and / or the second clamping module. In one possible implementation, the multidimensional force may include the normal force of the plane on which the first plate-like structure and / or the second plate-like structure are located. Under the loading of this multidimensional force, the first plate-like structure and the second plate-like structure can come into contact and generate compression, which can yield an accurate compression depth-load curve for calculating the elastic modulus and hardness of the material. At this time, for the first plate-like structure, the normal force is the normal force from the plane on which the first plate-like structure is located to the second plate-like structure, which can be further obtained by subtracting the initial value from the stable value of the mechanical data curve to obtain the micro-compression force. Alternatively, under the loading of this multidimensional force, after extrusion, separation can be performed, and the peel strength or adhesion strength of the two contact sections can be detected. At this time, for the first plate-like structure, the normal force is the normal force from the plane where the second plate-like structure is located to the first plate-like structure. The force curve during the separation process can be accurately recorded, providing objective and accurate reference data for evaluating the interfacial bonding performance of coatings, films, adhesives, etc. Furthermore, the micro-adhesion force is obtained by subtracting the initial value from the maximum value of the mechanical data curve.

[0071] Furthermore, after the two plate-like structures are compressed, they are under a stable normal load. Applying a controllable tangential force at this point can simulate real friction conditions. Specifically, in the above detection method, the multidimensional force includes the tangential force on the plane where the first and / or second plate-like structures are located. Based on the loading of this multidimensional force, micro-friction detection can be achieved, and the change of frictional force with time or displacement can be measured in real time for calculating the friction coefficient and studying the friction mechanism. Furthermore, the micro-frictional force can be obtained by subtracting the initial value from the stable value that recovers from the mechanical data curve.

[0072] Based on this, embodiments of the present invention can also set different tangential forces to meet the needs of different friction detection standards and application scenarios, such as simulating uniform sliding, start-stop conditions, and vibration conditions. Specifically, the tangential force can be set as a constant load, a variable load, or a changing load to provide flexible and diverse friction excitation modes, covering a wide range from basic research to working condition simulation.

[0073] Furthermore, embodiments of the present invention can also apply pure torque or measure torsional shear strength at the micro-interface. Specifically, in the above detection method, the multidimensional torque includes the torque on the plane where the first plate-like structure and / or the second plate-like structure are located. Under the loading of this multidimensional torque, the first plate-like structure can rotate along the contact point with the second plate-like structure, thereby realizing micro-torsional shear detection, which can be used to study the shear resistance of the interface and the torsional load failure threshold of micro-devices. Furthermore, the micro-shear force can be calculated based on the mechanical data curve.

[0074] It is understood that the detection method provided by this invention can perform micromechanical testing on two plate-like structures located at any relative position in space. Based on this, and considering that the two plate-like structures must first reach a preset state, the first clamping module and / or the second clamping module can be driven in any manner to allow the first and second plate-like structures to move in multiple directions. Therefore, in this embodiment of the invention, no restrictions are placed on the initial position of the two plate-like structures or the movement process to the preset state.

[0075] In one possible implementation, before performing the detection, the first plate-like structure and the second plate-like structure can be arranged parallel to each other along a horizontal plane. This arrangement provides a better initial position for the two plate-like structures. Furthermore, if the two plate-like structures are arranged coaxially, the movement dimension of the two clamping modules can be further reduced, simplifying the detection process and adapting to a wider range of optional detection conditions.

[0076] Furthermore, based on the fact that the two plate-like structures are arranged parallel to each other along a horizontal plane, this embodiment of the invention also includes supplying liquid to the surface of the first or second plate-like structure before performing the detection. It is understood that when liquid is supplied to the surface of the plate-like structures arranged parallel to each other along a horizontal plane, after their relative positions reach a preset state, the liquid, due to compression, will form a thin film between the two plate-like structures. When the liquid film is present, during the compression, friction, and separation process of the two plate-like structures, due to the viscosity and inertia of the liquid, it cannot be instantly emptied or detached. The liquid film will generate a series of microscopic attractive forces, such as liquid bridge forces, van der Waals forces, and pressure resistance. Moreover, the changes in force are relatively continuous and smooth. For example, the pressure resistance will smoothly increase as the gap decreases.

[0077] Understandably, the force analysis of the first and second plate-like structures during the compression, lateral relative motion, and separation processes can be summarized into two dimensions: lateral and longitudinal. The lateral process mainly considers friction within the matching liquid, solid-liquid interface friction, and solid-solid contact friction. Large gaps primarily involve friction within the matching liquid, while small gaps mainly involve solid-liquid interface friction and solid-solid contact friction. The longitudinal process mainly considers the compression / demolding effect, liquid bridging, and intermolecular interactions. Large gaps primarily involve the compression / demolding effect, while small gaps mainly involve intermolecular interactions. Liquid bridging occurs throughout the liquid contact and spreading process.

[0078] Furthermore, based on the influencing factors of microscopic forces, the detection results obtained through the detection method provided by this invention can guide the optimization of both the movement strategy and the process treatment. The comparison process uses the "single variable principle" to characterize the optimization effect.

[0079] It is understandable that traditional detection methods cannot efficiently and continuously complete the acquisition of complex multidimensional mechanical excitation and response in a single detection process. For example, it may require multiple changes of fixtures, equipment, or sample repositioning. The detection method provided in this embodiment applies multidimensional motion to the first clamping module and / or the second clamping module. Any multidimensional force and torque can be selected or combined according to actual detection needs. For example, several multidimensional forces and torques can be continuously implemented in the same scenario, ultimately obtaining a continuous data curve plotted based on the forces and / or torques of the first and / or second plate-like structures. This continuous data curve can reflect the different microscopic forces generated by the two plate-like structures under various multidimensional forces. This embodiment of the invention can seamlessly connect positioning, loading, and data acquisition in a single detection process, greatly improving detection efficiency and consistency. Furthermore, it can clearly define the synchronization between the application of multidimensional forces and real-time acquisition, ensuring that each multidimensional force corresponds to a precise force value, guaranteeing the timeliness and accuracy of mechanical data, and providing possibilities for studying dynamic mechanical processes. The selection and combination methods are not limited in this invention and will not be elaborated further here.

[0080] In one possible implementation, the detection method provided in this embodiment of the invention can be executed using the detection device described above.

[0081] The following example uses the detection of micro-forces between the first plate structure 102 and the second plate structure 202 as an example, combined with... Figure 3 The detection device shown will be used to further describe the detection method provided in the embodiments of the present invention.

[0082] Specifically, when the relative positions between the first plate-shaped structure 102 and the second plate-shaped structure 202 reach a preset state, the calculation and control module 800 can, according to the above detection method, control the output air pressure of the pneumatic control component to apply a normal force towards the first plate-shaped structure 102 to the second plate-shaped structure 202, causing the second plate-shaped structure 202 to move towards the first plate-shaped structure 102 and compress it. The sensor body then acquires the force on the first plate-shaped structure 102 as the gap between the two plate-shaped structures decreases. In this embodiment, the output air pressure value of the pneumatic control, the gap between the first plate-shaped structure 102 and the second plate-shaped structure 202, and the obtained mechanical data curves can be correlated to obtain richer data content. Please refer to... Figure 5 It shows a schematic diagram of the mechanical data curves of the associated air pressure and gap provided in this embodiment.

[0083] In the initial state, the initial gap between the first plate structure 102 and the second plate structure 202 is set to 10 μm. At this time, there is no contact between the two plate structures. The force collected by the sensor assembly is the gravity of the first clamping module 100, the first plate structure 102, the second clamping module 200, and the second plate structure 202. To avoid these gravitational forces affecting the detection process of micro-forces, the sensor assembly is zeroed out in the initial state, and the sensor assembly reading is 0. The force collected in subsequent detection processes is the resultant force between the first plate structure 102 and the second plate structure 202.

[0084] First pressurization stage: The pneumatic control assembly supplies air to the second plate structure 202 to control the deformation of the second plate structure 202 and change the gap between the first plate structure 102 and the second plate structure 202. (See attached diagram) Figure 5For ease of explanation, the pressurization process is divided into two stages: the first stage has a pressure of 2 kPa, and the second stage has a pressure of 3 kPa. The force collected by the sensor assembly is the resultant force of the air pressure and the liquid bridge force. In the first stage, this resultant force is 1.515 N, which manifests as a tensile force on the first plate structure 102. That is, although the external force applied to the first plate structure 102 in this stage is a pressure, due to the existence of micro-nano gaps, the microscopic force on the first plate structure 102 is a tensile force. When the air pressure changes to 3 kPa, that is, in the second stage, the resultant force is 0.6 N, and the first plate structure 102 is subjected to a tensile force facing the second plate structure 202. That is, as the external force increases, the tensile force on the first plate structure 102 decreases.

[0085] In the first gap-reduction stage: the drive module 300 moves the first plate-shaped structure 102 upward, reducing the gap between the first plate-shaped structure 102 and the second plate-shaped structure 202 to 5μm, while maintaining an air pressure of 3kPa. At this time, the force collected by the sensor assembly rapidly decreases from 0.6N to -4.49N, meaning the tension on the first plate-shaped structure 102 becomes pressure. Due to the smaller gap, the liquid spreads between the first plate-shaped structure 102 and the second plate-shaped structure. Therefore, as the liquid spreads, the force on the first plate-shaped structure 102 begins to decrease, gradually stabilizing from -4.49N to 1.0N.

[0086] Second pressurization stage: In this stage, the gap value remains constant at 5 μm, and the air pressure is gradually increased from 3 kPa to 6 kPa, increasing by 1 kPa each time. Due to the increased pressure, the gap between the first plate structure 102 and the second plate structure 202 decreases. Figure 5 As can be seen, at each pressurization instant, the force collected by the sensor assembly experiences a momentary increase, and then, as the liquid spreads, the micro-forces of the two plate-like structures decrease. This phenomenon occurs with each pressurization, facilitating the study of the micro-forces of the two plate-like structures under small gaps. When the air pressure is 6 kPa, the force on the first plate-like structure 102 stabilizes at -3.6 N.

[0087] The second gap-reduction stage: The drive module 300 moves the first plate-shaped structure 102 upward, reducing the gap between the first plate-shaped structure 102 and the second plate-shaped structure 202 to 2μm, while maintaining an air pressure of 6kPa. At this time, the force collected by the sensor assembly rapidly drops to -6.2N, and then gradually recovers to -5N. At this point, the liquid between the first plate-shaped structure 102 and the second plate-shaped structure 202 is fully spread out, and the liquid completely wets the contact surface of the two plate-shaped structures, thus ending the entire detection process.

[0088] The pressurization process described above and the process of the drive module 300 driving the first plate structure 102 to move upward will both cause the gap between the two plate structures to become smaller. The difference is that the pneumatic control component changes the gap to a much smaller extent than the drive module 300, and only makes minor adjustments to the gap value.

[0089] Furthermore, when the relative positions between the first plate structure 102 and the second plate structure 202 reach a preset state, the calculation and control module 800 can control the drive module 300 to apply tangential force and torque to the first plate structure 102 through the received position parameters, causing the first plate structure 102 to move laterally relative to the plane, and acquiring the force on the first plate structure 102 during the movement. Similarly, this process can correlate the displacement parameters with the obtained mechanical data curve. The sliding resistance can be obtained by subtracting the initial value from the stable value in the mechanical data curve, providing guidance for the sliding displacement parameters of the first plate structure 102 and the second plate structure 202. The obtained curve is compared with... Figure 5 The similarities are not elaborated upon here.

[0090] Furthermore, when the relative positions between the first plate-shaped structure 102 and the second plate-shaped structure 202 reach a preset state, the calculation and control module 800 can control the drive module 300 to apply a normal force away from the second plate-shaped structure 202 to the first plate-shaped structure 102 based on the received position parameters. This causes the first plate-shaped structure 102 to separate from the second plate-shaped structure 202 along the normal direction, and the force on the first plate-shaped structure 102 during the movement is obtained. Similarly, a mechanical data curve associated with the position parameters can be plotted. The demolding force can be obtained by subtracting the initial value from the maximum value in this mechanical data curve, which can provide guidance for the demolding process parameters of the first plate-shaped structure 102 and the second plate-shaped structure 202. The obtained curve is consistent with... Figure 5 The similarities are not elaborated upon here.

[0091] It is understandable that, combined with the above detection methods, this embodiment can achieve hardware-level synchronization of motion control and data acquisition, and the obtained data can truly reflect the essence of the micromechanical process. The data quality is high, the signal-to-noise ratio is good, and a series of complex detection conditions can be achieved through the detection device, extracting the maximum amount of information from a single experiment.

[0092] It is understandable that, when performing micromechanical testing on the first plate structure 102 and the second plate structure 202 using the aforementioned multidimensional forces and torques, any one method or combination can be selected based on actual testing requirements. For example, several multidimensional forces can be continuously applied in the same scenario, ultimately yielding continuous mechanical data curves based on the continuous acquisition of the forces acting on the first plate structure 102, thus obtaining the micro-forces during each trajectory motion process. The selection and combination methods described above are not limited in this embodiment and will not be elaborated further.

[0093] Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present invention should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of terms such as "exemplary" or "for example" is intended to present the relevant concepts in a concrete manner for ease of understanding.

[0094] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A micromechanical detection device, characterized in that, include: The first clamping module (100) has a first clamping member (101) for clamping the first plate-shaped structure (102). The second clamping module (200) has a second clamping member (201) for clamping the second plate-shaped structure (202); The driving module (300) is used to drive the first clamping module (100) to perform N-dimensional motion relative to the second clamping module (200), where N is an integer greater than 2; A sensor assembly (400) is used to measure the force and / or torque on the first clamping module (100) and / or the second clamping module (200); The calculation control module (800) is used to control the drive module (300) and determine the micro-force between the first plate structure (102) and the second plate structure (202) based on the force and / or torque of the first clamping module (100) and / or the second clamping module (200).

2. The micromechanical detection device according to claim 1, characterized in that, The sensor assembly (400) includes a sensor body, which is respectively disposed in the first clamping module (100) and the second clamping module (200), or respectively disposed on both sides of the first clamping module (100) and the second clamping module (200). The side of the first clamping module (100) away from the first plate structure (102) is connected to the sensor body, and the side of the sensor body away from the first clamping module (100) is connected to the drive module (300). The side of the second clamping module (200) away from the second plate structure (202) is connected to the sensor body.

3. The micromechanical detection device according to claim 2, characterized in that, The second clamping module (200) includes a position adjustment component (203), which is connected to the side of the sensor body away from the second plate structure (202). The position adjustment component (203) is used to drive the second clamping module (200) to move relative to the first clamping module (100).

4. The micromechanical detection device according to claim 3, characterized in that, The position adjustment assembly (203) includes a pneumatic control assembly, which is externally connected to an air supply device for pumping air into the pneumatic control assembly; the position adjustment assembly (203) also includes a fixed frame, with one end of the pneumatic control assembly connected to the second clamping member (201) and the other end connected to the fixed frame.

5. The micromechanical detection device according to claim 2, characterized in that, The sensor body is a multi-dimensional force sensor, which is configured to simultaneously detect forces in at least three orthogonal directions and / or torques in three directions.

6. The micromechanical detection device according to claim 1, characterized in that, The drive module (300) is a multi-axis displacement stage, which is configured to provide at least three degrees of freedom of displacement and drive the first clamping module (100) to perform N-dimensional motion through the combination of at least three degrees of freedom.

7. The micromechanical detection device according to claim 1, characterized in that, The calculation control module (800) is configured to control the actions of the drive module (300) and / or the second clamping module (200) to achieve the corresponding detection conditions, and to determine the micro-force between the first plate structure (102) and the second plate structure (202) based on the force and / or torque measured on the first clamping module (100) and / or the second clamping module (200) under the corresponding detection conditions.

8. The micromechanical detection device according to claim 1, characterized in that, The detection device further includes a liquid supply module for supplying liquid to the surface of the first plate structure (102) or the second plate structure (202).

9. The micromechanical detection device according to claim 1, characterized in that, The detection device further includes a vibration damping platform (500) and a support frame (600). The support frame (600) is mounted on the vibration damping platform (500). The vibration damping platform (500) is sequentially connected to the drive module (300), the sensor assembly (400), and the first clamping module (100). The support frame (600) is connected to the second clamping module (200).

10. A micromechanical detection method, characterized in that, include: The first clamping module holding the first plate-shaped structure and the second clamping module holding the second plate-shaped structure are moved respectively, so that the relative position between the first plate-shaped structure and the second plate-shaped structure reaches a preset state; In a preset state, multidimensional motion is applied to the first clamping module and / or the second clamping module to obtain the force and / or torque of at least one of the first clamping module and the second clamping module; Based on the forces and / or torques applied to the first clamping module and / or the second clamping module, mechanical data curves are plotted, and the micro-forces between the first plate structure and the second plate structure are determined based on the mechanical data curves.

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