Double-cylinder laminated splash-proof CUP for chip processing

Abstract

The invention relates to the field of semiconductor processing, in particular to a double-cylinder laminated splash-proof CUP for chip processing, which comprises a bottom plate, a protective CUP, an adjusting mechanism and a cylinder driving mechanism, a vertically-arranged bottom cylinder is fixed to the bottom plate, a supporting table is installed in the bottom cylinder, and the supporting table can rotate around the vertical axis and is used for containing a chip. The protection CUP and the bottom cylinder are coaxially attached, and the height of the protection CUP is adjustable; a plurality of exhaust pipes distributed in the circumferential direction of the bottom cylinder are installed in the bottom cylinder, the exhaust pipes are obliquely arranged relative to the vertical direction, the upper ends of the exhaust pipes in the tangential direction of the rotating direction of the supporting table are located on the front side of the lower ends, and air can be exhausted from the upper ends to the lower ends of the exhaust pipes; the inclination degree of the exhaust pipe relative to the vertical direction is adjustable, and during suction, suction airflow with the rotating direction opposite to that of water drops thrown out during rotation of the supporting table can be generated, so that the moving speed of the water drops after being thrown out is slowed down, the water drops are prevented from colliding with the protection CUP or the collision speed of the water drops and the protection CUP is reduced, and water drop splashing is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor processing, in particular to a double-cylinder stacked waterproof splash-proof CUP for chip processing. BACKGROUND

[0002] As the core and cornerstone of modern information industry, the manufacturing level of chips is directly related to the performance, reliability and integration of integrated circuits. In the manufacturing process of chips, cleaning is a crucial and repeated process, which aims to remove particles, metal ions and organic contaminants remaining on the surface of silicon wafers in the previous processes such as photolithography, etching and ion implantation. A clean wafer surface is a prerequisite for ensuring the quality of subsequent film deposition, photolithographic patterning and other processes, and ultimately achieving high yield and high performance chip products.

[0003] Currently, the chip cleaning technologies widely used in the industry include wet cleaning and rotary spray cleaning. Among them, rotary spray cleaning is widely used in production lines due to its high efficiency and good uniformity. In this process, the chip (wafer) is placed on a support table (such as a vacuum chuck) that can rotate at high speed. Through the spray heads arranged at different positions and angles above the wafer, deionized water, chemical liquid and other cleaning media are sprayed onto the wafer surface in sequence or simultaneously. The chemical action of the liquid and the huge centrifugal force generated by rotation work together to strip and remove the contaminants.

[0004] However, there is a significant technical problem in the practical application of this technology: liquid splashing and mist control during cleaning. Specifically, when the support table rotates at high speed, the liquid (including waste liquid after cleaning and pure water rinsing liquid) attached to the surface of the chip is violently thrown around under the action of strong centrifugal force. These high-speed moving liquid droplets will impact the inner wall of the protective cover (commonly known as Cup) surrounding the chip. This impact will cause two main problems: first, some liquid droplets will splash again, forming smaller, randomly moving water droplets or water mist. These re-splashed droplets may fall back onto the already cleaned chip surface, causing secondary contamination and seriously affecting the cleaning effect and product yield. Second, a large amount of water mist generated during the process will diffuse in the process chamber, which may condense on optical sensors and drive components, affecting the long-term stability and reliability of the equipment, and is also not conducive to the rapid and effective exhaust of waste gas.

[0005] To alleviate the above problems, the prior art usually sets an air extraction port at the bottom or sidewall of the protective cup, and generates downward or outward airflow by an external negative pressure device to try to extract the splashed droplets and mist. However, the conventional air extraction structure is usually fixed, and the airflow direction and flow rate are not adjustable. When facing different process requirements (for example, high-pressure washing requires stronger impact force to remove stubborn contaminants, which is usually accompanied by a specific high-speed rotation mode of the support table; while low-pressure or normal-pressure fine cleaning has a relatively low rotation speed), the fixed air extraction mode is difficult to achieve the optimal protection effect, and has certain limitations. SUMMARY

[0006] The present application provides a double-cylinder laminated splash-proof cup for chip processing to solve the problem of the limitations of the protection effect of the existing protective cup.

[0007] The double-cylinder laminated splash-proof cup for chip processing of the present application adopts the following technical solutions: A double-cylinder laminated splash-proof cup for chip processing, comprising a bottom plate, a protective cup, an adjusting mechanism, and a cylinder driving mechanism; a vertical bottom cylinder is fixed on the bottom plate, and a support table is installed in the bottom cylinder for rotating around a vertical axis and placing a chip; the protective cup is coaxially attached to the bottom cylinder and can move up and down relative to the bottom cylinder; a plurality of air extraction pipes are installed in the bottom cylinder and distributed circumferentially around the bottom cylinder; the air extraction pipes are inclined relative to the vertical direction, and the upper end of a tangential air extraction pipe along the rotation direction of the support table is located in front of the lower end, and air can be extracted from the upper end to the lower end; the inclination of the air extraction pipes relative to the vertical direction is adjustable; the adjusting mechanism is used to adjust the inclination of the air extraction pipes, and the included angle of the air extraction pipes relative to the vertical direction is positively correlated with the rotation speed of the support table; the cylinder driving mechanism comprises a first cylinder and a second cylinder, the output shaft of the first cylinder is connected to the protective cup, and the first cylinder is installed on the output shaft of the second cylinder.

[0008] Optionally, a motor is arranged below the base for driving the rotation of the support table, and the rotation speed of the motor is adjustable; the adjusting mechanism comprises a rotating disc, a pressing disc, and a push rod; the pressing disc is installed below the bottom cylinder and slides up and down, and two parts on the air extraction pipe are respectively ball-hinged to the bottom of the bottom cylinder and the pressing disc; the lower surface of the pressing disc has a conical surface with a high center and a low edge; the rotating disc is located below the pressing disc and is coaxial with the output shaft of the motor and rotates under the drive of the motor; the push rod is arranged on the rotating disc and connected to the rotating disc through a first elastic member, and the upper end of the push rod abuts against the lower surface of the pressing disc; when the rotating disc rotates, the push rod moves away from the center of the rotating disc under the centrifugal force, pushes the pressing disc upward, and increases the inclination of the air extraction pipe.

[0009] Optionally, the adjusting mechanism further comprises a support swing arm, a sliding block and an adjusting unit, the support swing arm is connected with the top rod and is rotatably installed on the rotating disc around a vertical axis; the top rod drives the support swing arm to swing around the hinged position of the support swing arm and the rotating disc when the top rod moves; an arc groove is formed on the rotating disc, and the sliding block is slidingly installed in the arc groove; the first elastic member comprises a first spring and a second spring, the first spring is connected with the sliding block and the top rod, and the second spring is connected with the sliding block and the rotating disc; the included angle between the support swing arm and the reference diameter is a reference included angle, the reference included angle is always less than 180°, and the reference diameter is the diameter of the rotating disc at the hinged position of the support swing arm and the rotating disc; the center of the arc groove is located at the position of the top rod in the initial state and on the side of the extension line of the support swing arm close to the center of the rotating disc and the side of the top rod away from the support swing arm, and has an end close to the center of the rotating disc and an end away from the center of the rotating disc; the included angle between the first spring and the second spring on the side away from the center of the rotating disc is an acute angle, the included angle between the first spring and the support swing arm on the side close to the center of the rotating disc is an obtuse angle, and the sliding block moves along the arc groove to the side away from the center of the rotating disc to press the second spring; the adjusting unit adjusts the position of the sliding block in the arc groove in the initial state.

[0010] Optionally, the second cylinder is started according to needs after the first cylinder is extended to the position; the adjusting unit comprises a lifting disc and a second elastic member, the lifting disc is movably installed below the bottom plate and below the rotating disc; the upper surface of the lifting disc has a conical surface which is high in the center, low at the edge and coaxial with the rotating disc; the second elastic member is arranged between the output shaft of the second cylinder and the lifting disc, the output shaft of the second cylinder extends through the second elastic member to push the lifting disc to move upward; the lower side of the sliding block is provided with a roller, the roller abuts against the conical surface of the upper surface of the lifting disc, and the lifting disc pushes the sliding block to move along the arc groove to the side away from the center of the rotating disc when the lifting disc moves upward.

[0011] Optionally, the support swing arm, the top rod, the first elastic member, the sliding block and the arc groove form a pushing group, and there are a plurality of pushing groups which are uniformly distributed around the rotating disc.

[0012] Optionally, the upper end of the top rod is in the form of a ball head.

[0013] Optionally, at least two guide columns are slidingly arranged on the bottom plate, the protective cup is connected with the at least two guide columns, the at least two guide columns are connected through a connecting piece, the output shaft of the first cylinder is connected with the connecting piece, and the protective cup is driven to move up and down through the guide columns.

[0014] Optionally, the second cylinder is fixed below the bottom plate, and a connecting frame is arranged on the output shaft of the second cylinder, and the first cylinder is installed on the connecting frame.

[0015] Optionally, an overflow hole is formed in the bottom of the bottom cylinder for discharging the liquid after cleaning.

[0016] Optionally, an upwardly and inwardly extending rim is arranged on the upper end of the protective cup.

[0017] The beneficial effects of the present application are: the double-cylinder stacked waterproof splash-proof CUP for chip processing of the present application is provided with a plurality of suction pipes distributed around the circumference of the bottom cylinder, and the suction pipes are arranged obliquely relative to the vertical direction and have suction force from top to bottom, and when suction is performed, air flow in the opposite direction to the rotation direction of water droplets splashed out when the support table rotates can be generated, and the moving speed of the water droplets after being splashed out is slowed down, and the water droplets are hindered from colliding with the protective CUP or the speed of the water droplets colliding with the protective CUP is reduced, and the splashing of the water droplets is reduced. In addition, the water mist in the protective CUP can be sucked out by the suction pipes, and the influence of the water mist on the chip is reduced.

[0018] Further, the included angle of the suction pipes relative to the vertical direction is positively correlated with the rotating speed of the support table, when the rotating speed of the support table is slow, the included angle of the suction pipes relative to the vertical direction can be small, the suction air flow generated by the inclination of the suction pipes is sufficient to hinder the movement of the water droplets, and the suction effect on the water mist in the protective CUP can also be ensured. When the rotating speed of the support table is fast, the moving speed of the water droplets after being splashed out is fast, and at this time, the included angle of the suction pipes relative to the vertical direction is increased to increase the suction air flow of the plurality of suction pipes in the horizontal direction, so that the hindering effect on the movement of the water droplets is ensured, and the splashing is reduced.

[0019] Further, when the second cylinder is extended to make the protective CUP in the high gear, it indicates that the chip is subjected to high-pressure cleaning, and the water droplets generated are more likely to splash, and by moving the lifting disc upward along with the extension of the second cylinder, the initial position of the sliding block in the arc groove is adjusted, so that the top rod is more easily moved away from the center of the rotating disc, the suction pipes can quickly respond to the adjustment, and the suction pipes can be adjusted at a faster speed when the rotating speed of the support table is increased, so that the hindering effect on the movement of the water droplets when the suction pipes are suctioned is ensured, and the splashing is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only show some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without any creative labor.

[0021] Figure 1 Fig. 1 is a schematic diagram of the overall structure of an embodiment of a double-cylinder stacked waterproof splash-proof CUP for chip processing of the present application; Figure 2 Fig. 2 is a schematic diagram of another view of the overall structure of an embodiment of a double-cylinder stacked waterproof splash-proof CUP for chip processing of the present application; Figure 3 Fig. 3 is a side view of the overall structure of an embodiment of a double-cylinder stacked waterproof splash-proof CUP for chip processing of the present application; Figure 4 for Figure 3 Schematic diagram of cross section along the AA direction; Figure 5 for Figure 4 Enlarged view of point X in the middle; Figure 6 This is a front view of the overall structure of an embodiment of a dual-cylinder stacked splash-proof CUP for chip processing according to the present invention; Figure 7 for Figure 6 Schematic diagram of cross section along the BB direction; Figure 8 for Figure 7 Enlarged view of point Y in the middle; Figure 9 This is a schematic diagram of the rotating disk structure in an embodiment of a dual-cylinder stacked splash-proof CUP for chip processing according to the present invention; Figure 10 for Figure 9 Another perspective illustration; Figure 11 This is a schematic diagram of the protective CPU in a high-level position in an embodiment of the dual-cylinder stacked splash-proof CUP for chip processing according to the present invention. Figure 12 This is a schematic diagram illustrating the state of the protective CPU in a low-speed setting in an embodiment of the dual-cylinder stacked splash-proof CPU for chip processing according to the present invention.

[0022] In the diagram: 100, base; 110, bottom cylinder; 120, exhaust pipe; 130, motor; 140, guide column; 150, connector; 160, support frame; 200, protective CUP; 310, rotating disk; 311, arc groove; 312, fixing block; 320, top pressure plate; 330, top rod; 340, support swing arm; 350, slider; 351, roller; 361, lifting plate; 362, second elastic element; 370, first spring; 380, second spring; 410, first cylinder; 420, second cylinder; 421, connecting frame. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] An embodiment of the present invention, a dual-cylinder stacked splash-proof CUP for chip processing, is as follows: Figures 1 to 12As shown, it comprises a base 100, a protective cup 200, an adjusting mechanism and a cylinder driving mechanism.

[0025] A bottom cylinder 110 is fixed on the base 100 and arranged vertically, and a support table (not shown in the figure) is installed in the bottom cylinder 110, which can rotate around a vertical axis and is used to place chips. The base 100 is also provided with a high-pressure cleaning nozzle and an atmospheric pressure cleaning nozzle, which are used to clean the chips placed on the support table. In order to avoid interference between the two nozzles, they are usually arranged at different heights when arranged. Correspondingly, the height of the support table during high-pressure cleaning needs to be higher than that during low-pressure cleaning. In addition, the bottom of the bottom cylinder 110 is provided with an overflow hole for discharging the liquid after cleaning, and a hose can be connected below the overflow hole to guide the liquid out.

[0026] The protective cup 200 is coaxially attached to the bottom cylinder 110 and can move up and down relative to the bottom cylinder 110. Specifically, the protective cup 200 is located inside the bottom cylinder 110, and the upper end of the protective cup 200 is provided with a rim extending upward and outward of the bottom cylinder 110. The bottom of the bottom cylinder 110 is provided with a plurality of suction pipes 120 distributed circumferentially, which are arranged obliquely relative to the vertical direction, and the upper end of the tangential suction pipe 120 along the rotation direction of the support table is located in front of the lower end, and can suck air from the upper end to the lower end; the degree of inclination of the suction pipe 120 relative to the vertical direction can be adjusted. The lower end of the suction pipe 120 can be connected to a negative pressure suction device (not shown in the figure) through a hose, which provides a downward suction force for the suction pipe 120. Since the plurality of suction pipes 120 are all arranged obliquely, they can generate suction airflow in the opposite direction of the rotation direction of the water droplets when the support table rotates, thereby slowing down the movement speed of the water droplets after being thrown out, hindering their impact with the protective cup 200 or reducing the impact speed of the water droplets with the protective cup 200, and reducing the splashing of the water droplets. In addition, the suction pipe 120 can also suck out the water mist in the protective cup 200, reducing the impact of the water mist on the chips.

[0027] The adjusting mechanism is used to adjust the inclination degree of the suction pipes 120, and make the included angle of the suction pipes 120 relative to the vertical direction positively correlated with the rotating speed of the support table. The greater the included angle of the suction pipes 120 relative to the vertical direction, the greater the horizontal component of the suction force of the suction pipes 120, the greater the tangential suction air flow generated by the plurality of suction pipes 120 along the circumferential direction of the support table rotation, and the better the effect of hindering the movement of water droplets. However, since the suction pipes 120 tend to be horizontal, the suction effect on the water mist in the protective CUP 200 is weak. Therefore, when the rotating speed of the support table is slow, the included angle of the suction pipes 120 relative to the vertical direction can be small, and the suction air flow generated by the inclination degree of the suction pipes 120 is sufficient to hinder the movement of water droplets, and also ensures the suction effect on the water mist in the protective CUP 200. When the rotating speed of the support table is fast, the moving speed of the water droplets after being thrown out is fast. At this time, the included angle of the suction pipes 120 relative to the vertical direction is increased to increase the horizontal suction air flow of the plurality of suction pipes 120, ensure the hindering effect on the movement of water droplets, and reduce splashing.

[0028] The cylinder driving mechanism includes a first cylinder 410 and a second cylinder 420. The output shaft of the first cylinder 410 is connected with the protective CUP 200, and the first cylinder 410 is installed on the output shaft of the second cylinder 420. Specifically, the second cylinder 420 is fixed below the base 100, and the output shaft of the second cylinder 420 is provided with a connecting frame 421, and the first cylinder 410 is installed on the connecting frame 421. A supporting frame 160 is fixed below the base 100, the second cylinder 420 is installed on the supporting frame 160, and the supporting frame 160 is provided with a limiting structure for limiting the extension stroke of the first cylinder 410 and the second cylinder 420. The limiting structure can be a plurality of limiting holes opened on the supporting frame 160 and a latch movably inserted into the limiting holes, or a stroke sensing switch provided on the supporting frame 160, to further ensure the extension stroke of the first cylinder 410 or the second cylinder 420.

[0029] Before cleaning the chip, the first cylinder 410 and the second cylinder 420 are in the retracted state, and the protective CUP 200 is in the lowest position, which is convenient for placing or installing the chip on the support table. If the chip is cleaned at low pressure, only the first cylinder 410 is started to extend, and the first cylinder 410 drives the protective CUP 200 to move upward to the low gear for protection. If the chip is cleaned at high pressure, the first cylinder 410 is first started to extend, and then the second cylinder 420 is started to extend, so that the protective CUP 200 moves upward to the high gear for protection.

[0030] In the embodiment, a motor 130 for driving the support table to rotate is arranged below the base 100, and the rotating speed of the motor 130 is adjustable; the adjusting mechanism comprises a rotating disc 310, a pressing disc 320 and a top rod 330; the pressing disc 320 is slidingly installed below the bottom cylinder 110, and two places on the suction pipe 120 are respectively ball-hinged to the bottom of the bottom cylinder 110 and the pressing disc 320; when the pressing disc 320 moves upward, the suction pipe 120 tends to be horizontal, and the degree of inclination increases; when the pressing disc 320 moves downward, the suction pipe 120 tends to be vertical, and the degree of inclination decreases. The lower surface of the pressing disc 320 has a conical surface with a center high and an edge low. The rotating disc 310 is below the pressing disc 320, coaxial with the output shaft of the motor 130 and rotates under the drive of the motor 130; specifically, a transmission shaft is coaxially connected on the output shaft of the motor 130, and the rotating disc 310 and the support table can be both installed on the transmission shaft. The top rod 330 is arranged on the rotating disc 310 and connected with the rotating disc 310 through a first elastic member, and the upper end of the top rod 330 abuts against the lower surface of the pressing disc 320; preferably, the upper end of the top rod 330 is a ball head type. When the rotating disc 310 rotates, the top rod 330 moves away from the center of the rotating disc 310 under the centrifugal force, pushes the pressing disc 320 to move upward and increases the degree of inclination of the suction pipe 120.

[0031] In the embodiment, the adjusting mechanism further comprises a support swing arm 340, a sliding block 350 and an adjusting unit. The support swing arm 340 is connected with the top rod 330 and is rotatably installed on the rotating disc 310 about a vertical axis. The top rod 330 is attached to the upper surface of the rotating disc 310 and moves away from the center of the rotating disc 310 under the centrifugal force generated by the rotation of the rotating disc 310. When the top rod 330 moves, the support swing arm 340 swings about the hinged position of the support swing arm 340 and the rotating disc 310. An arc groove 311 is formed on the rotating disc 310, and the sliding block 350 is slidingly installed in the arc groove 311. The first elastic member comprises a first spring 370 and a second spring 380. The first spring 370 is connected with the sliding block 350 and the top rod 330, and the second spring 380 is connected with the sliding block 350 and the rotating disc 310. Specifically, a fixed block 312 is arranged on the rotating disc 310 and located on the side of the arc groove 311 away from the center of the rotating disc 310. The two ends of the second spring 380 are connected with the sliding block 350 and the fixed block 312 on the rotating disc 310, respectively. The included angle between the support swing arm 340 and a reference diameter line is a reference included angle, which is always less than 180°. The reference diameter line is a diameter line of the rotating disc 310 at the hinged position of the support swing arm 340 and the rotating disc 310. The center of the arc groove 311 is the position of the top rod 330 in the initial state and is located on the side of the extension line of the support swing arm 340 close to the center of the rotating disc 310 and the side of the top rod 330 away from the support swing arm 340, having one end close to the center of the rotating disc 310 and the other end away from the center of the rotating disc 310. The included angle between the first spring 370 and the second spring 380 away from the center of the rotating disc 310 is an acute angle, and the included angle between the first spring 370 and the side of the support swing arm 340 close to the center of the rotating disc 310 is an obtuse angle. When the sliding block 350 moves along the arc groove 311 away from the center of the rotating disc 310, the second spring 380 is compressed and the first spring 370 is stretched. The adjusting unit adjusts the position of the sliding block 350 in the arc groove 311 in the initial state. The farther the sliding block 350 is from the center of the rotating disc 310 in the arc groove 311, the easier it is for the top rod 330 to overcome the elastic force of the first spring 370 and move away from the center of the rotating disc 310, making the angle adjustment of the suction pipe 120 more sensitive.

[0032] In the embodiment, the second cylinder 420 is started according to the need after the first cylinder 410 is extended to the position; the adjusting unit comprises a lifting disc 361 and a second elastic member 362, the lifting disc 361 is movably installed below the base 100 and below the rotating disc 310, the upper surface of the lifting disc 361 has a conical surface which is high in the center, low at the edge and coaxial with the rotating disc 310; the second elastic member 362 is arranged between the output shaft of the second cylinder 420 and the lifting disc 361, the output shaft of the second cylinder 420 is extended through the second elastic member 362 to push the lifting disc 361 to move upward; the lower side of the sliding block 350 is provided with a roller 351 which is in abutment with the conical surface of the upper surface of the lifting disc 361, the lifting disc 361 moves upward to push the sliding block 350 to move along the arc groove 311 away from the center of the rotating disc 310. When the second cylinder 420 is extended to make the protective cup 200 in the high gear, it indicates that the chip is subjected to high-pressure cleaning, and the water droplets generated are more likely to splash, by making the lifting disc 361 move upward with the extension of the second cylinder 420, the air suction pipe 120 can quickly respond to the adjustment, and then when the rotating speed of the support table is increased, the air suction pipe 120 can adjust the inclination angle faster, so as to ensure the hindering effect on the movement of the water droplets during suction, and reduce the splashing.

[0033] In the embodiment, the support swing arm 340, the top rod 330, the first elastic member, the sliding block 350 and the arc groove 311 constitute a pushing group, and there are multiple pushing groups which are uniformly distributed in the circumferential direction of the rotating disc 310.

[0034] In the embodiment, at least two guide columns 140 are slidably arranged on the base 100, the edge of the upper end of the protective cup 200 is connected with the at least two guide columns 140, the at least two guide columns 140 are connected through the connecting member 150, the output shaft of the first cylinder 410 is connected with the connecting member 150 and drives the protective cup 200 to move up and down through the guide column 140.

[0035] The double-cylinder stacked splash-proof CUP for chip processing of the application is in the initial state, the first cylinder 410 and the second cylinder 420 are in the retracted state, the protective CUP 200 is in the lowest position, and the chip is placed or installed on the support table. If the chip needs to be cleaned by low pressure, only the first cylinder 410 is extended, and the first cylinder 410 drives the protective CUP 200 to move upward to the low gear for protection; if the chip needs to be cleaned by high pressure, the first cylinder 410 is extended first, and then the second cylinder 420 is extended, so that the protective CUP 200 moves upward to the high gear for protection. While the motor 130 drives the support table to rotate, the high-pressure nozzle or the low-pressure nozzle sprays and cleans the chip, and the suction device is started to generate suction air flow opposite to the rotation direction of the water droplets through the plurality of suction pipes 120, slow down the moving speed of the water droplets after being thrown out, hinder the impact of the water droplets with the protective CUP 200 or reduce the impact speed of the water droplets with the protective CUP 200, reduce the splashing of the water droplets, and suck out the water mist in the protective CUP 200, reducing the influence of the water mist on the chip. Part of the water droplets flows out from the overflow hole after falling to the bottom of the bottom cylinder 110.

[0036] The rotating disc 310 rotates synchronously with the output shaft of the motor 130, when the output speed of the motor 130 is fast or increases, the top rod 330 moves away from the center of the rotating disc 310 under the centrifugal force, drives the support swing arm 340 to swing while stretching the first spring 370, and pushes the top pressure disc 320 to move upward, increasing the inclination degree of the suction pipe 120, and further increasing the suction air flow of the plurality of suction pipes 120 in the horizontal direction, ensuring the hindering effect on the movement of the water droplets and reducing the splashing. When high-pressure cleaning is performed, the first cylinder 410 and the second cylinder 420 are extended in sequence, the lifting disc 361 moves upward under the drive of the second cylinder 420, the sliding block 350 moves away from the center of the rotating disc 310 along the arc groove 311, so that the top rod 330 is more easily moved away from the center of the rotating disc 310 under the centrifugal force, and the inclination degree of the suction pipe 120 is more sensitive.

[0037] The above only describes the preferred embodiments of the application and is not intended to limit the application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the application shall be included in the protection scope of the application.

Claims

1. A dual-cylinder stacked splash-proof CUP for chip processing, characterized in that: Includes base plate, protective CUP, adjustment mechanism and cylinder drive mechanism; A vertically mounted base cylinder is fixed on the base plate. A support platform is installed inside the base cylinder. The support platform can rotate around the vertical axis and is used to place the chip. The protective CPU is coaxially attached to the base cylinder and can move up and down relative to the base cylinder. Multiple air extraction pipes are installed inside the base cylinder, which are arranged circumferentially. The air extraction pipes are inclined relative to the vertical direction, and the upper end of the tangential air extraction pipe along the rotation direction of the support platform is located in front of the lower end, and air can be extracted from the upper end to the lower end. The degree of inclination of the air extraction pipes relative to the vertical direction is adjustable. The adjustment mechanism is used to adjust the inclination of the suction pipe and make the angle between the suction pipe and the vertical direction positively correlated with the rotation speed of the support platform. The cylinder drive mechanism includes a first cylinder and a second cylinder. The output shaft of the first cylinder is connected to the protective CUP, and the first cylinder is mounted on the output shaft of the second cylinder.

2. The dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: A motor for driving the support platform to rotate is installed under the base, and the speed of the motor is adjustable; the adjustment mechanism includes a rotating disk, a top pressure disk, and a push rod; the top pressure disk is slidably installed under the bottom cylinder, and two points on the suction pipe are respectively ball-jointed to the bottom of the bottom cylinder and the fixed pressure disk; the lower surface of the top pressure disk has a conical surface with a high center and low edges; the rotating disk is located below the top pressure disk and is coaxial with the output shaft of the motor and rotates under the drive of the motor; the push rod is set on the rotating disk and connected to the rotating disk through a first elastic element, and the upper end of the push rod abuts against the lower surface of the top pressure disk; when the rotating disk rotates, the push rod moves away from the center of the rotating disk under centrifugal force, pushing the top pressure disk upward and increasing the inclination of the suction pipe.

3. The dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: The adjustment mechanism also includes a support swing arm, a slider, and an adjustment unit. The support swing arm is connected to a push rod and is rotatably mounted on a rotating disk about a vertical axis. When the push rod moves, it causes the support swing arm to swing about its hinge position with the rotating disk. An arc groove is provided on the rotating disk, and the slider is slidably mounted in the arc groove. The first elastic element includes a first spring and a second spring. The first spring connects the slider and the push rod, and the second spring connects the slider and the rotating disk. The angle between the support swing arm and the reference radial line is the reference angle, which is always less than 180°. The reference radial line is the hinge position between the support swing arm and the rotating disk. The diameter of the rotating disk is set; the center of the arc groove is the position of the push rod in the initial state, and it is located on the side of the extended line of the support arm closer to the center of the rotating disk and the side of the push rod away from the support arm, with one end close to the center of the rotating disk and one end away from the center of the rotating disk; the angle between the first spring and the second spring on the side away from the center of the rotating disk is an acute angle, and the angle between the first spring and the support arm on the side close to the center of the rotating disk is an obtuse angle. The slider moves along the arc groove to the side away from the center of the rotating disk to compress the second spring; the adjustment unit adjusts the position of the slider in the arc groove in the initial state.

4. A dual-cylinder stacked splash-proof CUP for chip processing according to claim 3, characterized in that: The second cylinder is activated as needed after the first cylinder extends to its position. The adjustment unit includes a lifting plate and a second elastic element. The lifting plate is movably mounted below the base plate and located below the rotating disk. The upper surface of the lifting plate has a conical surface with a high center and low edges, and is coaxial with the rotating disk. The second elastic element is located between the output shaft of the second cylinder and the lifting plate. The extension of the output shaft of the second cylinder pushes the lifting plate upward through the second elastic element. A roller is provided on the lower side of the slider. The roller abuts against the conical surface of the upper surface of the lifting plate. The upward movement of the lifting plate pushes the slider to move away from the center of the rotating disk along the arc groove.

5. A dual-cylinder stacked splash-proof CUP for chip processing according to claim 3, characterized in that: The supporting swing arm, push rod, first elastic element, slider and arc groove constitute a push assembly. There are multiple push assemblies, which are evenly distributed around the circumference of the rotating disk.

6. The dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: The top of the top rod is ball-shaped.

7. A dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: At least two guide posts are slidably mounted on the base. The protective CUP is connected to the at least two guide posts. The at least two guide posts are connected by a connector. The output shaft of the first cylinder is connected to the connector and drives the protective CUP to move up and down through the guide posts.

8. A dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: The second cylinder is fixed below the base, and a connecting bracket is installed on the output shaft of the second cylinder. The first cylinder is installed on the connecting bracket.

9. A dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: An overflow hole is provided at the bottom of the bottom cylinder to drain the liquid after cleaning.

10. A dual-cylinder stacked splash-proof CUP for chip processing according to claim 1, characterized in that: The upper part of the protective CUP has an upward and inward extending edge.

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