Corrosion-resistant straight pull type single crystal furnace auxiliary furnace

Abstract

The invention relates to the technical field of single crystal furnaces, in particular to an anti-corrosion straight pull type single crystal furnace auxiliary furnace which comprises an auxiliary furnace main body, a driving mechanism and a plurality of lining plates arranged in the circumferential direction of the inner side of the auxiliary furnace main body. A channel used for drawing and forming a monocrystalline silicon column is defined by the inner lining plates, and the inner lining plates are in sliding fit with the rotating wheel disc and the bearing ring correspondingly and synchronously deflect and move in the radial direction under the action of the driving mechanism, so that the aperture of an inner hole of the auxiliary furnace is continuously adjustable. An interlayer cavity is formed between the inner lining plate and the auxiliary furnace main body, inert gas is introduced into the interlayer cavity, and a directional air curtain is formed through an air guide channel in the inner lining plate and an air distribution strip, so that corrosive gas is isolated and protected. And the inner lining plate adopts a detachable structure, so that the auxiliary furnace main body can be effectively isolated in a high-temperature corrosion environment and is convenient to replace. The auxiliary furnace has the advantages of being large in aperture adjusting range, high in atmosphere corrosion resistance, convenient to maintain and suitable for drawing of monocrystalline silicon columns of multiple specifications.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal furnace, in particular to an anti-corrosion Czochralski single crystal furnace auxiliary furnace. BACKGROUND

[0002] The Czochralski single crystal furnace is widely used in the process of single crystal silicon material preparation, and its auxiliary furnace is usually arranged upstream or on the side of the main furnace for raw material supply, atmosphere buffering and growth environment isolation. The stability, cleanliness and corrosion resistance of the internal structure of the auxiliary furnace directly affect the drawing quality of the single crystal silicon column and the long-term operation reliability of the equipment.

[0003] The auxiliary furnace of the Czochralski single crystal furnace in the prior art usually adopts a fixed lining structure as an isolation and protection component. Such lining is usually fixed and installed as a whole along the inner wall of the auxiliary furnace, and the inner hole size is determined at the design stage. The structure is usually a whole cylinder lining pipe or a cylinder structure formed by splicing several fixed lining plates. For example, some auxiliary furnaces are provided with quartz lining pipes or ceramic bushings fixedly arranged inside the metal furnace body to isolate the high-temperature atmosphere from the metal shell. Another technical solution is to fixedly connect a plurality of lining plates in the circumferential direction to form a fixed-diameter channel structure to meet the drawing requirements of single-specification single crystal silicon columns.

[0004] However, the fixed lining structure has obvious deficiencies in practical application. First, since the lining hole diameter is not adjustable, when different diameter specifications of single crystal silicon columns need to be produced, the auxiliary furnace or the whole lining structure needs to be replaced, which is not only complicated to operate, but also has a long downtime, and is difficult to adapt to the current production requirements of multiple specifications and small batches. Second, the fixed lining is in a high-temperature and corrosive atmosphere environment for a long time. Once the lining is corroded, cracked or locally damaged, it is usually difficult to replace locally, which can easily cause the corrosion to further spread to the metal body of the auxiliary furnace, thereby shortening the service life of the whole equipment.

[0005] In addition, the existing auxiliary furnace relies on single inert gas filling or simple gas flow method for atmosphere protection, lacks directional isolation measures for the lining surface and structural gaps, and the corrosive gas is easy to stay and condense or deposit in the lining surface, joint gap position or local low flow area, thereby accelerating the corrosion and aging of the lining material, further affecting the operation stability of the auxiliary furnace and the cleanliness of the single crystal growth environment.

[0006] Therefore, there is an urgent need for a Czochralski single crystal furnace auxiliary furnace structure which can realize adjustable lining hole diameter, detachable replacement of the lining, and at the same time has atmosphere and gas curtain isolation and protection capability, without replacing the whole auxiliary furnace structure, to overcome the problems of poor adaptability, high maintenance cost and insufficient anti-atmosphere corrosion capability of the fixed lining in the prior art. SUMMARY

[0007] The present application aims to solve the problems of the existing Czochralski furnace auxiliary furnace, such as the fixed lining structure, the unadjustable inner hole diameter, the difficulty in adapting to the drawing requirements of single crystal silicon columns of different diameters, the easy damage of the lining in the high-temperature corrosive atmosphere environment, the high maintenance cost, and the insufficient gas corrosion resistance, and provides an anti-corrosion Czochralski furnace auxiliary furnace.

[0008] To achieve the above-mentioned purpose, the present application adopts the following technical solutions: The present application provides an anti-corrosion Czochralski furnace auxiliary furnace, which comprises an auxiliary furnace body, a driving mechanism, and a plurality of lining plates arranged on the inner side of the auxiliary furnace body. The plurality of lining plates are arranged along the circumferential direction of the auxiliary furnace body and form a channel structure for the drawing and forming of single crystal silicon columns. The driving mechanism and the lining plates form a linkage adjustment relationship to realize the adjustment of the inner hole diameter of the auxiliary furnace.

[0009] In a preferred example, the inner side of the auxiliary furnace body is fixedly provided with a bearing ring, the bottom end of the lining plate is slidably connected to the arc sliding groove arranged on the surface of the bearing ring through a sliding pin, and the top end of the lining plate is slidably connected to the sliding guide groove arranged on the bottom surface of the rotating disc driven by the driving mechanism through a sliding bar. The geometric difference between the sliding guide groove and the arc sliding groove allows the lining plate to deflect and slide radially synchronously during the rotation of the rotating disc, thereby changing the inner channel diameter formed by the plurality of lining plates.

[0010] Specifically, the structure allows the auxiliary furnace to continuously adjust the inner hole diameter without replacing the overall structure, so as to adapt to the production requirements of single crystal silicon columns of different diameters and improve the versatility and production flexibility of the equipment.

[0011] In a preferred example, the plurality of lining plates are connected to form an annular structure, and a cavity is formed between the lining plate and the inner wall of the auxiliary furnace body. The cavity is continuously filled with inert gas through the atmosphere injection port arranged on the auxiliary furnace body and maintains a micro-positive pressure state.

[0012] Specifically, the cavity structure can effectively prevent the corrosive gas from penetrating into the metal bearing structure of the auxiliary furnace body, thereby reducing the risk of corrosion of the auxiliary furnace body in the high-temperature atmosphere environment.

[0013] In a preferred example, the lining plate is a double-layer composite structure member, the inner side of which is a dense corrosion-resistant layer, and the outer side is a buffer layer for absorbing thermal stress and reducing crack generation. The lining plate is detachably installed through the sliding pin and the sliding bar.

[0014] Specifically, the structure enables the inner lining plate to be replaced as a whole or in part when reaching the service life or suffering local damage, thereby realizing continuous isolation protection of the auxiliary furnace body, prolonging the overall service life of the auxiliary furnace and reducing the maintenance cost.

[0015] In a preferred example, a sealing slide strip is further arranged at the sliding contact surface of the adjacent inner lining plate, and the sealing slide strip is made of a material with low friction, high temperature resistance and corrosion resistance.

[0016] Specifically, the sealing slide strip ensures smooth relative sliding of the inner lining plates while sealing the joints between the inner lining plates, reducing the entry of corrosive gas into the interlayer cavity or the interior of the auxiliary furnace body through the joints.

[0017] In a preferred example, an air inlet grid is arranged on one side of the inner lining plate, and an air distribution strip is fixedly installed on the other side, and a gas guide channel is arranged in the inner lining plate to communicate the air inlet grid and the air distribution strip, and a plurality of tangential air grid holes are arranged on the surface of the air distribution strip.

[0018] Specifically, the inert gas is sprayed tangentially from the air grid holes after pressure equalization through the gas guide channel, forming a continuous and stable air curtain layer on the surface of the inner lining plate, thereby forming an isolation barrier for corrosive gas and inhibiting the retention and deposition of corrosive gas on the surface of the inner lining plate and the structural joints.

[0019] In a preferred example, a sacrificial corrosion sheet or a thin-walled calibration ring is arranged on the top surface of the driving mechanism. Specifically, this structure facilitates the determination of the corrosion intensity inside the auxiliary furnace and the replacement period of the inner lining plate during equipment maintenance, improving the predictability and safety of equipment operation and maintenance.

[0020] The beneficial effects achieved by the present application are: 1. The driving mechanism can drive the rotation of the rotating disc, and the oblique sliding guide between the rotating disc and the inner lining plate enables the synchronous deflection and radial sliding of the plurality of inner lining plates during rotation, thereby realizing the continuous adjustment of the channel aperture on the inner side of the auxiliary furnace. This structure can flexibly adjust the inner hole size according to the drawing requirements of single crystal silicon columns of different diameters, without the need to replace the overall auxiliary furnace structure, significantly improving the application range and production flexibility of the equipment.

[0021] 2. The present application uses detachable inner lining plates to form the main protection structure on the inner side of the auxiliary furnace, which effectively isolates and protects the auxiliary furnace body in a high-temperature and corrosive atmosphere. When the inner lining plate reaches the service life or suffers local damage, it can be replaced as a whole or in part, avoiding the direct corrosion of the metal bearing structure, thereby prolonging the overall service life of the auxiliary furnace and reducing the maintenance cost.

[0022] 3.The application constructs the equalizing gas guide channel inside the inner lining plate, and forms the directional gas curtain structure with the gas distribution strip, so that the inert gas forms a continuous and stable gas curtain isolation layer on the surface of the inner lining plate, effectively blocks the corrosion of the corrosive gas to the inner lining plate and the main body of the auxiliary furnace, and reduces the residence and deposition of the corrosive gas in the structural gap, further improving the corrosion resistance and operation stability of the auxiliary furnace in a complex atmosphere environment. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 The overall structure schematic diagram of an embodiment of the application; Figure 2 The auxiliary furnace main body cross-sectional structure schematic diagram of an embodiment of the application; Figure 3 The auxiliary furnace main body cross-sectional structure schematic diagram of an embodiment of the application; Figure 4 The auxiliary furnace main body cross-sectional structure schematic diagram of an embodiment of the application; Figure 5 The inner lining plate one end structure schematic diagram of an embodiment of the application; Figure 6 The inner lining plate one end structure schematic diagram of an embodiment of the application; Figure 7 The inner lining plate one end structure schematic diagram of an embodiment of the application; Figure 8 The inner lining plate one end structure schematic diagram of an embodiment of the application; Figure 9 The inner lining plate one end structure schematic diagram of an embodiment of the application;

[0024] Reference signs: 100, auxiliary furnace main body; 110, observation window; 120, atmosphere injection port; 200, worm drive; 210, runner disk; 211, sliding guide groove; 300, inner lining plate; 310, sealing sliding strip; 320, gas distribution strip; 301, air inlet grid; 302, sliding pin; 303, sliding strip; 321, air grid hole; 400, bearing ring; 410, arc sliding groove. DETAILED DESCRIPTION

[0025] To make the purpose, technical scheme and advantages of the application more clear and obvious, the application is further described in detail below with reference to the specific embodiments and the accompanying drawings. It should be noted that the embodiments of the application and the features in the embodiments can be combined with each other without conflict.

[0026] It is understood that the above description is only exemplary, and is not intended to limit the scope of the application.

[0027] The following describes, with reference to the accompanying drawings, some embodiments of the present invention, providing a corrosion-resistant Czochralski single crystal furnace auxiliary furnace.

[0028] Combination Figures 1-9 As shown, the present invention provides a corrosion-resistant Czochralski single crystal furnace auxiliary furnace, comprising an auxiliary furnace body 100, a worm gear drive 200, and several inner lining plates 300 arranged inside the auxiliary furnace body 100. The auxiliary furnace body 100 is installed at the top of the main furnace as the forming cavity structure of the Czochralski single crystal furnace. The crystal column is lifted upward along the axial direction within the channel formed by the several inner lining plates 300 and completes the drawing and forming process.

[0029] In this embodiment, the auxiliary furnace body 100 is a high-temperature resistant metal shell structure, and a bearing ring 400 is fixedly installed on its inner side. The bearing ring 400 has an annular structure and is coaxially arranged with the auxiliary furnace body 100, and is used to provide radial limiting and sliding support for the inner lining plate 300.

[0030] The bottom end of the auxiliary furnace body 100 is provided with a conical cap structure for communicating with the main furnace of the Czochralski single crystal furnace. The inner diameter of the top of the conical cap is the same as the inner diameter of the bearing ring 400 and they are arranged opposite to each other, so as to ensure that the crystal column keeps the axis aligned when passing through the connection part between the auxiliary furnace body 100 and the main furnace, and avoids swaying during the forming process.

[0031] In this embodiment, several inner lining plates 300 are arranged along the circumferential direction of the auxiliary furnace body 100, and adjacent inner lining plates 300 are spliced ​​together to form a forming channel inside the auxiliary furnace.

[0032] The inner liner 300 has a fan-shaped cross-section with smooth surfaces on both sides to reduce the sliding resistance between adjacent inner liner 300s; the width of the end connected to the air distribution strip 320 gradually decreases, which is conducive to forming a stable air curtain flow field.

[0033] An interlayer cavity structure is formed between the inner lining plate 300 and the auxiliary furnace body 100. Inert gas is continuously introduced into the interlayer cavity through the atmosphere injection port 120 provided on the inner side of the auxiliary furnace body 100 and a slightly positive pressure is maintained, making it difficult for corrosive gas to penetrate into the metal load-bearing structure of the auxiliary furnace body 100.

[0034] Structurally, the inner lining plate 300 is a double-layer composite component, with a dense anti-corrosion layer on the inner side and a buffer layer on the outer side to absorb thermal stress and reduce crack formation. The inner lining plate 300 forms a detachable installation structure through sliding pins 302 and sliding strips 303. When the inner lining plate 300 reaches the end of its service life or suffers local damage under long-term high temperature and corrosive atmosphere, it can be completely or partially disassembled and replaced, thereby providing continuous isolation and protection for the auxiliary furnace body 100.

[0035] In this embodiment, the worm gear drive 200 is installed on the upper part of the auxiliary furnace body 100, and its output end drives the rotary disk 210 to rotate around the axis. The bottom surface of the rotary disk 210 is provided with a plurality of radially inclined sliding guide grooves 211.

[0036] The top of the inner lining plate 300 is provided with a slide bar 303, which is slidably sleeved on the inner side of the guide groove 211; the bottom of the inner lining plate 300 is provided with a sliding pin 302, which is slidably sleeved on the inner side of the arc groove 410 on the surface of the bearing ring 400.

[0037] The arc-shaped slide groove 410 has different distances between its two ends and the center of the bearing ring 400. When the worm gear actuator 200 drives the rotary disk 210 to rotate, the geometric difference between the guide groove 211 and the arc-shaped slide groove 410 causes the inner liner plate 300 to deflect and slide radially synchronously during rotation, thereby changing the size of the inner channel aperture formed by the enclosed sections of the inner liner plates 300. By controlling the rotation angle of the worm gear actuator 200, the aperture of the auxiliary furnace can be continuously adjusted to meet the pulling requirements of single crystal silicon pillars of different diameters.

[0038] In this embodiment, a sealing strip 310 is provided at the sliding contact surface of adjacent inner lining plates 300. The sealing strip 310 is made of a low-friction, high-temperature resistant and corrosion-resistant material. While ensuring smooth relative sliding between the inner lining plates 300, it also seals the joint between the inner lining plates 300, thereby reducing the infiltration of corrosive gases into the interlayer cavity and the interior of the auxiliary furnace body 100.

[0039] In this embodiment, an atmosphere inlet 120 is provided on the inner surface of the auxiliary furnace body 100, and inert gas enters the interlayer cavity formed on the outer side of the inner lining plate 300 through the atmosphere inlet 120.

[0040] An air inlet grille 301 is provided on one side of the inner liner 300. The inert gas in the interlayer cavity enters the air guide channel 304 provided inside the inner liner 300 through the air inlet grille 301. After pressure equalization is completed in the air guide channel 304, it is discharged from the air distribution strip 320 fixedly installed on the other side of the inner liner 300.

[0041] The surface of the air distribution strip 320 has a plurality of air grid holes 321, which include air hole structures and strip hole structures. The ends of the air grid holes 321 face the surface of the adjacent inner liner plate 300 in the tangential direction, so that the sprayed inert gas forms a continuous and stable air curtain layer on the surface of the inner liner plate 300. This air curtain layer effectively isolates the corrosive gas, inhibits the intrusion of the corrosive gas into the surface of the inner liner plate 300 and the structural gaps, and reduces the retention and deposition of corrosive gas in local areas.

[0042] In this embodiment, the top surface of the worm gear drive 200 is provided with a sacrificial corrosion plate or a thin-walled calibration ring, which is used to visually judge the corrosion intensity inside the auxiliary furnace and the replacement cycle of the inner lining plate 300 during equipment maintenance, thereby improving the predictability and safety of equipment maintenance.

[0043] Working principle and usage process of this invention: In this invention, the auxiliary furnace body 100 is installed at the top of the main furnace of the Czochralski single crystal furnace and forms a forming cavity structure. During the pulling process, the single crystal silicon pillar is located within a channel formed by several inner lining plates 300, and is lifted vertically upward under the constraint and guidance of this channel to complete the forming. During use, the worm gear drive 200 drives the rotary disk 210 to rotate around its own axis. The inclined sliding guide groove 211 provided on the bottom surface of the rotary disk 210 forms a guiding engagement with the sliding strip 303 at the top of the inner lining plate 300. At the same time, the sliding pin 302 at the bottom end of the inner lining plate 300 forms a limiting engagement with the arc sliding groove 410 on the bearing ring 400.

[0044] When the rotary disk 210 rotates, due to the difference in radial position and center distance between the sliding guide groove 211 and the arc sliding groove 410, each inner liner plate 300 is simultaneously deflected and radially slid under the driving action of the rotary disk 210, causing the diameter of the inner channel formed by the enclosed space of several inner liner plates 300 to change. By controlling the rotation angle of the worm gear drive 200, the diameter of the inner hole of the auxiliary furnace body 100 can be continuously adjusted, thereby enabling the auxiliary furnace to adapt to the pulling requirements of single crystal silicon pillars of different diameters without replacing the overall auxiliary furnace structure or fixed inner liner components.

[0045] Regarding the protective structure of the auxiliary furnace, the inner lining plate 300 serves as the main isolation component inside the auxiliary furnace body 100, forming a sandwich cavity structure with the auxiliary furnace body 100. The inner lining plate 300 is detachably connected to the sliding pin 302 and the sliding strip 303. When the inner lining plate 300 experiences wear, corrosion, or reaches the end of its service life under long-term high temperature or corrosive atmosphere, it can be completely or partially disassembled and replaced without disassembling the auxiliary furnace body 100. This achieves continuous isolation and protection for the auxiliary furnace body 100, preventing corrosion from directly affecting the metal load-bearing structure of the auxiliary furnace body 100.

[0046] During the atmosphere protection and gas curtain isolation process, inert gas enters the interlayer cavity formed on the outer side of the liner plate 300 through the atmosphere inlet 120 on the auxiliary furnace body 100, and then enters the gas guiding channel 304 inside the liner plate 300 through the gas inlet grid 301 provided on one side of the liner plate 300. After pressure equalization is completed in the gas guiding channel 304, it is ejected tangentially through the gas grid holes 321 on the surface of the gas distribution strip 320 provided on the other side of the liner plate 300. The ejected inert gas forms a continuous and stable gas curtain layer on the surface of the liner plate 300. This gas curtain is distributed circumferentially along the liner plate 300, forming an isolation barrier against corrosive gases, inhibiting the intrusion of corrosive gases into the surface and structural gaps of the liner plate 300, and reducing the retention and deposition of corrosive gases in local areas.

[0047] Through the above working principle and usage process, this invention, while achieving adjustable inner hole diameter of the auxiliary furnace body 100, effectively improves the adaptability, corrosion resistance and long-term operational stability of the auxiliary furnace of the Czochralski single crystal furnace in complex high-temperature atmosphere environments by combining the structure of the detachable inner lining plate 300 with the atmosphere-gas curtain collaborative isolation mechanism.

[0048] In the description of this specification, the terms "one embodiment," "some embodiments," "specific embodiment," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0049] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace, characterized in that, The system includes a secondary furnace body (100), a worm gear drive (200), and several inner lining plates (300) arranged inside the secondary furnace body (100). A bearing ring (400) is fixedly installed on the inner side of the secondary furnace body (100). Several arc grooves (410) are opened on the surface of the inner lining plate (300), and a sliding pin (302) is provided at the bottom end of the inner lining plate (300) and slidably sleeved inside the arc groove (410). The inner side of the worm drive (200) is rotatably mounted with a rotary disk (210) located inside the auxiliary furnace body (100). The bottom surface of the rotary disk (210) is provided with a plurality of sliding guide grooves (211), and the top surface of the inner lining plate (300) is provided with a sliding strip (303) that is slidably sleeved inside the sliding guide grooves (211).

2. The corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 1, characterized in that, Several of the inner lining plates (300) are combined to form an annular structure, and an interlayer cavity is formed between the outer periphery of the inner lining plate (300) and the inner wall of the auxiliary furnace body (100). Inert gas is continuously introduced into the interlayer cavity and a slight positive pressure is maintained to prevent corrosive gas from penetrating into the metal load-bearing layer of the auxiliary furnace body (100).

3. The corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 2, characterized in that, An air intake grille (301) is provided on one side of the inner lining plate (300), and an air distribution strip (320) is fixedly installed on the other side. An air grille hole (321) is provided on the surface of the air distribution strip (320). The inner surface of the auxiliary furnace body (100) is provided with an atmosphere inlet (120) that communicates with the air inlet grille (301). The inner lining plate (300) is provided with an internal air guiding channel (304) for connecting the air inlet grille (301) and the air grille hole (321). After the gas in the interlayer cavity is evenly compressed by the air inlet grille (301) and the internal air guiding channel (304), it is distributed and blown out by the air grille hole (321) on the surface of the air distribution strip (320) to achieve circumferential uniform sweeping.

4. The corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 1, characterized in that, The bottom end of the auxiliary furnace body (100) is provided with a cone cap structure for communicating with the main furnace of the Czochralski single crystal furnace, and the inner diameter of the top of the cone cap is the same as the inner diameter of the bearing ring (400) and arranged opposite to each other.

5. A corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 1, characterized in that, The inner lining plate (300) is a double-layer composite structure component, including a dense anti-corrosion layer on the inner side and a buffer layer on the outer side. The dense anti-corrosion layer is used to block the penetration of corrosive gases, and the buffer layer is used to absorb thermal stress and reduce crack generation. The inner lining plate (300) is connected to the slide bar (303) by the sliding pin (302) to form a detachable installation structure.

6. The corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 1, characterized in that, Several of the inner lining plates (300) are arranged along the circumferential direction of the auxiliary furnace body (100), and adjacent inner lining plates (300) slide against each other. A sealing strip (310) is provided at the sliding contact surface of adjacent inner lining plates (300).

7. A corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 6, characterized in that, The sealing strip (310) is a low-friction and corrosion-resistant component, and its material is selected from high-purity graphite, boron nitride, silicon carbide-based composite materials or their composite structures.

8. A corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 3, characterized in that, The inner lining plate (300) has a fan-shaped cross-section, and the width of the end connected to the air distribution strip (320) gradually decreases. The opposite sides of the inner lining plate (300) have a smooth surface structure.

9. A corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 3, characterized in that, The air grid holes (321) on the surface of the air distribution strip (320) include a number of air hole structures and strip hole structures, and the ports of the air hole structures and strip hole structures are tangentially opposite to the surface of the adjacent inner liner plate (300), forming an circumferential air curtain on the surface of the inner liner plate (300).

10. A corrosion-resistant auxiliary furnace for a Czochralski single crystal furnace according to claim 1, characterized in that, The top surface of the worm drive (200) is provided with a sacrificial corrosion plate or a thin-walled calibration ring, which is used to determine the corrosion intensity and replacement cycle inside the auxiliary furnace during maintenance. The worm drive (200) is used to drive the rotary disk (210) to rotate. The sliding guide groove (211) is arranged obliquely on the bottom surface of the rotary disk (210). The arc sliding groove (410) has an arc-shaped structure, and its two ends are at different distances from the center of the bearing ring (400).

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