Self-adaptive tail gas distribution treatment system

Abstract

The invention relates to the technical field of semiconductor process equipment tail gas treatment, and discloses a self-adaptive tail gas distribution treatment system which comprises a self-adaptive tail gas distribution unit, a plurality of process equipment, a tail gas treatment unit and a control unit, the gas outlet end of the process equipment is connected with the self-adaptive tail gas distribution unit, the self-adaptive tail gas distribution unit is connected with the tail gas treatment unit, and the control unit is respectively connected with the self-adaptive tail gas distribution unit and the tail gas treatment unit; the process equipment is used for generating tail gas comprising process waste gas, diluted air and process special gas; through production scheduling of the tail gas distribution system, the treatment efficiency of each tail gas treatment subsystem is fully exerted, the number of treatment system equipment can be correspondingly reduced, the investment cost of plants and equipment is saved, in the N-to-N mode, standby idle running of excessive tail gas treatment units is avoided through self-adaptive regulation and control, resource optimization configuration is achieved, and the service life of the tail gas treatment system is prolonged. An automatic distribution system is formed by a centralized pipeline and an automatic valve.

Description

Technical Field

[0001] This invention relates to the field of exhaust gas treatment technology for semiconductor process equipment, specifically an adaptive exhaust gas distribution and treatment system. Background Technology

[0002] Previous solutions for exhaust gas treatment in semiconductor factories used a system where one process device corresponds to one exhaust gas treatment system. This meant that the process device and the exhaust gas treatment system were connected in series, resulting in a strong correlation between them. When the process device was shut down for maintenance, the exhaust gas treatment system would also be shut down for maintenance, and vice versa.

[0003] Traditionally, each process unit is paired with a single exhaust gas treatment system. During the design process, for safety reasons, the treatment capacity of the exhaust gas treatment system is usually higher than the rated exhaust gas volume of the process unit. When multiple process units and exhaust gas treatment systems in the entire plant adopt a "one-to-one" layout, the total treatment capacity of all exhaust gas treatment systems will be much higher than the total rated exhaust gas volume of all process units, meaning that the treatment efficiency of the exhaust gas treatment systems cannot be fully utilized. Because each piece of process equipment corresponds to a separate exhaust gas treatment system, with these two systems linked together and operating in tandem, the equipment has very low scalability and overall production utilization rate is low. In industrial applications, as production capacity increases, there are often multiple pieces of process equipment, each requiring a corresponding exhaust gas treatment system. However, in production scheduling and management, because the production cycle time of the process equipment is dynamically adjusted, the exhaust gas treatment system also needs to be adjusted accordingly, resulting in low overall workshop capacity efficiency. Therefore, an adaptive exhaust gas allocation and treatment system is proposed. Summary of the Invention

[0004] The purpose of this invention is to provide an adaptive exhaust gas distribution and treatment system to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an adaptive exhaust gas distribution and treatment system, comprising an adaptive exhaust gas distribution unit, several process devices, an exhaust gas treatment unit, and a control unit; The process equipment's outlet is connected to an adaptive exhaust gas distribution unit, which is connected to an exhaust gas treatment unit. The control unit is connected to both the adaptive exhaust gas distribution unit and the exhaust gas treatment unit. The process equipment is used to generate tail gas, which includes process waste gas, dilution air, and process specialty gas. The adaptive exhaust gas distribution unit is used to collect and distribute exhaust gas from the process equipment; The exhaust gas treatment unit is used to treat the distributed exhaust gas; The control unit is used for regulating the exhaust gas treatment process.

[0006] Preferably, the adaptive exhaust gas distribution unit described above includes a plurality of first collection pipes, a plurality of second collection pipes, a plurality of third collection pipes, a first centralized pipeline, a second centralized pipeline, and a third centralized pipeline; The first collection pipe is used to collect process waste gas generated by the process equipment; The second collection pipe is used to collect dilution air generated by the process equipment; The third collection pipe is used to collect process gases generated by the process equipment; The first centralized pipeline is used to collect process waste gas from several first collection pipes; The second centralized pipeline is used to collect the diluted air from several second collection pipes; The third centralized pipeline is used to collect the process gases from several third collection pipes.

[0007] Preferably, as described above, a plurality of the first collection pipes are connected to a first centralized pipeline, a plurality of the second collection pipes are connected to a second centralized pipeline, and a plurality of the third collection pipes are connected to a third centralized pipeline.

[0008] Preferably, as described above, a first pressure gauge and a first automatic valve are respectively installed on the first collecting pipe, and a second automatic valve is installed on the first centralized pipeline; A second pressure gauge and a third automatic valve are respectively installed on the second collection pipe, and a fourth automatic valve is installed on the second centralized pipeline; A third pressure gauge and a fifth automatic valve are installed on the third collection pipe, and a sixth automatic valve is installed on the third centralized pipeline.

[0009] Preferably, the exhaust gas treatment unit described above includes an air path treatment module and a water path treatment module; The gas processing module is connected to the water processing module; The gas processing module is used to provide a gas flow environment and safely deliver the exhaust gas to the alkaline scrubbing tower. The water treatment module is used to ensure full contact between the spray liquid and the gas, catalyzing the decomposition of MTS and neutralizing HCl.

[0010] Preferably, the above-mentioned gas processing module includes a relay fan, a negative pressure gauge, an air mixing box, an alkaline washing tower, a first exhaust fan valve, a second exhaust fan valve, a first variable frequency exhaust fan, a second variable frequency exhaust fan, and an exhaust silencer. The relay fan is used to provide power for gas transport; The negative pressure gauge is used to monitor the negative pressure of the system; The air mixing chamber is used to mix exhaust gas with air to dilute flammable gas; The alkaline scrubbing tower is used for alkaline scrubbing treatment of the exhaust gas; The first exhaust fan valve and the second exhaust fan valve are used to adjust the air volume and airflow direction in the system; The first and second variable frequency exhaust fans are used to control the air volume to adapt to real-time demand changes. The exhaust silencer is used to reduce the noise generated during the exhaust process.

[0011] Preferably, the air inlet of the relay fan is connected to the air outlet of the first centralized pipeline, the second centralized pipeline and the third centralized pipeline, the air outlet of the relay fan is connected to the air inlet of the air mixing box, the air outlet of the air mixing box is connected to the air inlet of the alkaline washing tower, and the air outlet of the alkaline washing tower is connected to the air inlet of the first exhaust fan valve and the second exhaust fan valve respectively. The outlet end of the first exhaust fan valve is connected to the inlet end of the first variable frequency exhaust fan; The outlet end of the second exhaust fan valve is connected to the inlet end of the second variable frequency exhaust fan; The first and second frequency conversion exhaust fans are connected to exhaust silencers at their air outlets.

[0012] Preferably, the water treatment module described above includes a tap water pipe, a sodium hydroxide pipe, and a sewage pipe; The tap water pipe is equipped with a tap water tank at the inlet end, the sodium hydroxide pipe is equipped with a sodium hydroxide tank at the inlet end, and the sewage pipe is equipped with a neutralized water collection tank at the outlet end.

[0013] Preferably, the above-mentioned water supply pipe is equipped with a water supply pump, the sodium hydroxide pipe is equipped with a chemical pump, and the sewage pipe is equipped with a sewage pump. The discharge ends of the water supply pump and the chemical pump are both connected to the feed end of the alkaline washing tower, and the inlet end of the sewage pipe is connected to the wastewater discharge end of the alkaline washing tower.

[0014] Preferably, the aforementioned water pipe and water pump are used to provide spray water to the alkaline washing tower; The sodium hydroxide pipe and the chemical pump are used to supply alkaline solution to the alkaline washing tower; The drain pipe and drain pump are used to discharge wastewater from the alkali washing tower.

[0015] The above is preferred.

[0016] Compared with the prior art, the present invention, employing the above technical solution, has the following technical effects: I. This invention incorporates an adaptive exhaust gas distribution unit, which adjusts the original combination relationship between the exhaust gas treatment unit and the process equipment from "one-to-one" to "N to n" (n < N), avoiding interference between the process equipment and the exhaust gas treatment unit due to the failure of a single piece of equipment, and ensuring the stable and long-term operation of the entire system. The exhaust gas treatment unit adopts negative pressure exhaust, combined with mixing and dilution, hydrolysis and alkaline washing, to ensure that the exhaust gas reacts fully, effectively improving the performance of a single exhaust gas treatment unit.

[0017] Second, by scheduling production through the exhaust gas distribution system, the processing efficiency of each exhaust gas treatment subsystem can be fully utilized, thereby reducing the number of treatment system devices and saving investment costs for plant and equipment. In the "N to N" mode, adaptive control avoids too many exhaust gas treatment units running idle, achieving optimal resource allocation. The automatic distribution system, composed of centralized pipelines and automatic valves, links multiple process equipment and multiple exhaust gas treatment units into a whole, realizing an adaptive system solution for efficient scheduling of process equipment and exhaust gas treatment equipment.

[0018] Third, by using a multi-stage fan series structure combining front-end relay fans and terminal exhaust fans, and through fixed-frequency control of the relay fans and variable-frequency control of the exhaust fans, the exhaust duct maintains a constant negative pressure for exhausting the process equipment, ensuring stable system operation. The front-stage air mixing box, combined with the rear-stage water and alkaline spray, achieves dilution, absorption, and neutralization of various types of gases, including flammable, unstable, flammable and explosive, acidic, and corrosive gases. This multi-stage exhaust gas spray treatment allows for free combination of process equipment and exhaust gas treatment system during production, with minimal interference between the entire process and exhaust gas treatment system. Combined with the adaptive exhaust gas distribution unit control unit, the total exhaust gas treatment capacity of the exhaust gas treatment system is always slightly greater than the total exhaust gas emission capacity of the production process equipment, reducing power waste in the exhaust gas treatment system. The process equipment and exhaust gas treatment units can be reduced or increased according to production needs, spreading investment costs and reducing operation and maintenance costs, thus improving the system's economy and practicality. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the exhaust gas path of the process equipment of the present invention; Figure 2 This is a schematic diagram of the overall system of the present invention; Figure 3 This is a control principle diagram of the present invention; Figure 4 This is a schematic diagram of one of the systems of the present invention.

[0021] Explanation of reference numerals in the attached drawings: 11. First collection pipe; 12. Second collection pipe; 13. Third collection pipe; 111. First centralized pipeline; 121. Second centralized pipeline; 131. Third centralized pipeline; 1101. First pressure gauge; 1102. First automatic valve; 1103. Second automatic valve; 1201. Second pressure gauge; 1202. Third automatic valve; 1203. Fourth automatic valve; 1301. Third pressure gauge; 1302. Fifth automatic valve; 130 3. Sixth automatic valve; 1204. Intermediate fan; 1205. Negative pressure gauge; 1206. Air mixing box; 1207. Alkali washing tower; 12081. First exhaust fan valve; 12082. Second exhaust fan valve; 12091. First variable frequency exhaust fan; 12092. Second variable frequency exhaust fan; 1210. Exhaust silencer; 01. Water supply pipe; 101. Water supply pump; 02. Sodium hydroxide pipe; 201. Chemical pump; 03. Sewage pipe; 301. Sewage pump. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0024] Example Please see Figure 1-4 This invention provides a technical solution: an adaptive exhaust gas distribution and treatment system, including an adaptive exhaust gas distribution unit, several process devices, an exhaust gas treatment unit, and a control unit; the exhaust gas of the semiconductor deposition process equipment can be divided into three branches according to its gas characteristics: process waste gas, dilution air, and process special gas. These exhaust gases are flammable and explosive, such as H2, gases, acids and corrosives, such as HCl, and flammable and unstable gases, such as MTS and silanes.

[0025] like Figure 1The gas from the first collection pipe (branch 11) of the process waste gas passes through the high-temperature furnace chamber. Methyltrichlorosilane (CH3Cl3Si) undergoes the following decomposition reaction at high temperatures: the main components of the reaction products are high concentrations of H2 and a small amount of HCl gas. The waste gas also contains some SiC powder, a reaction product of the process special gases. At a reaction temperature of 1200℃-1600℃, the main chemical reactions of MTS pyrolysis are as follows: CH3SiCl3 → SiC + 3HCl The second collection pipe 12 of the dilution air branch is composed of air, mainly N2 and O2. Since the dilution air branch is connected to the cabinets of GAS BOX (special gas cabinet) and MFC BOX (flow distribution cabinet), when gas leakage occurs in GAS BOX (special gas cabinet) and MFC BOX (flow distribution cabinet), a small amount of process special gas will be mixed into the dilution air branch. The third collection pipe 13 of the process special gas branch mainly consists of high-concentration H2 and a small amount of MTS gas. During the process production purging stage, the process gas containing high-concentration H2 and a small amount of MTS gas passes through the GAS BOX (special gas cabinet) and MFC BOX (flow distribution cabinet), bypasses the process high-temperature reaction furnace chamber, and is directly discharged into the adaptive tail gas distribution unit. The tail gas treatment unit is used to treat the process waste gas in the production process and the unreacted process special gas in the purging or commissioning process. Because the process waste gas contains high concentrations of H2 and HCl, and the process special gas also contains MTS, it is flammable, easily decomposed, and reacts violently with water.

[0026] This system first uses a large-volume air dilution method to dilute high-concentration H2, rapidly reducing it to below its explosive limit of 25% LEL, meeting environmental standards before releasing it into the atmosphere. Secondly, it employs a spray hydrolysis method to decompose MTS gas in the process gas. During the hydrolysis spraying process, HCl gas in the process waste gas and HCl produced by the MTS hydrolysis reaction react with water to produce acid. Finally, it uses a NaOH alkaline scrubbing spray method to neutralize the acidic HCl gas. The specific manifestations of these physicochemical reactions are as follows: Hydrolysis reaction: Methyltrichlorosilane undergoes a hydrolysis reaction with water molecules to produce trimethylsilanol CH3Si(OH)3 and hydrochloric acid HCl.

[0027] Exhaust gas treatment unit: CH3iCl3 + 3H2O → CH3Si(OH)3 + 3HCl Acid production reaction: The hydrochloric acid produced by the hydrolysis reaction will make the reaction solution acidic because hydrochloric acid is a strong acid. This will cause the pH value of the reaction solution to decrease, becoming acidic.

[0028] HCl (hydrogen chloride) + H₂O → HCl + H₂O Neutralization reaction: NaOH and HCl undergo a neutralization reaction to produce NaCl and water (H2O). NaOH + HCl → NaCl + H2O The process equipment's outlet is connected to an adaptive exhaust gas distribution unit, which in turn is connected to an exhaust gas treatment unit. A control unit is connected to both the adaptive exhaust gas distribution unit and the exhaust gas treatment unit. The process equipment generates exhaust gas, including process waste gas, dilution air, and process specialty gases. The adaptive exhaust gas distribution unit collects and distributes the exhaust gas from the process equipment. The exhaust gas treatment unit treats the distributed exhaust gas. The control unit regulates the exhaust gas treatment process. Figure 3 This is the control principle diagram of the control unit.

[0029] The adaptive exhaust gas distribution unit includes several first collection pipes 11, several second collection pipes 12, several third collection pipes 13, a first centralized pipeline 111, a second centralized pipeline 121, and a third centralized pipeline 131. The first collection pipes 11 are used to collect process waste gas generated by the process equipment; the second collection pipes 12 are used to collect dilution air generated by the process equipment; the third collection pipes 13 are used to collect process specialty gases generated by the process equipment; the first centralized pipeline 111 is used to collect the process waste gas from the several first collection pipes 11; the second centralized pipeline 121 is used to collect the dilution air from the several second collection pipes 12; and the third centralized pipeline 131 is used to collect the process specialty gases from the several third collection pipes 13.

[0030] Several first collection pipes 11 are connected to a first centralized pipeline 111, several second collection pipes 12 are connected to a second centralized pipeline 121, and several third collection pipes 13 are connected to a third centralized pipeline 131. A first pressure gauge 1101 and a first automatic valve 1102 are respectively installed on the first collection pipes 11, and a second automatic valve 1103 is installed on the first centralized pipeline 111. The second collection pipe 12 is equipped with a second pressure gauge 1201 and a third automatic valve 1202, and the second centralized pipeline 121 is equipped with a fourth automatic valve 1203; the third collection pipe 13 is equipped with a third pressure gauge 1301 and a fifth automatic valve 1302, and the third centralized pipeline 131 is equipped with a sixth automatic valve 1303.

[0031] The first centralized pipeline 111, the second centralized pipeline 121, and the third centralized pipeline 131 collect different types of exhaust gases generated by multiple process equipment and then distribute them to multiple exhaust gas treatment units for processing. The first pressure gauge 1101, the second pressure gauge 1201, and the third pressure gauge 1301 are used to monitor the negative pressure value of the process equipment. The first automatic valve 1102, the third automatic valve 1202, and the fifth automatic valve 1302 cut off and connect the centralized pipeline of the adaptive exhaust gas distribution unit according to the production status. The second automatic valve 1103, the fourth automatic valve 1203, and the sixth automatic valve 1303 are used to cut off and connect the adaptive exhaust gas distribution unit and the exhaust gas treatment unit.

[0032] The exhaust gas treatment unit includes a gas path treatment module and a water path treatment module; the gas path treatment module is connected to the water path treatment module; the gas path treatment module is used to provide a gas flow environment and safely transport the exhaust gas to the alkaline scrubbing tower 1207; the water path treatment module is used to ensure that the spray liquid and the gas are in full contact, catalyzing the decomposition of MTS and neutralizing HCl.

[0033] The gas processing module includes a relay fan 1204, a negative pressure gauge 1205, an air mixing chamber 1206, an alkaline scrubbing tower 1207, a first exhaust fan valve 12081, a second exhaust fan valve 12082, a first variable frequency exhaust fan 12091, a second variable frequency exhaust fan 12092, and an exhaust silencer 1210. The relay fan 1204 provides power for gas transport; the negative pressure gauge 1205 monitors the system negative pressure; and the air mixing chamber 1206 mixes exhaust gas with air to dilute the gas. The system includes: a flammable gas release unit; an alkaline scrubbing tower 1207 for alkaline scrubbing of the exhaust gas; a first exhaust fan valve 12081 and a second exhaust fan valve 12082 for adjusting the air volume and airflow direction in the system; a first variable frequency exhaust fan 12091 and a second variable frequency exhaust fan 12092 for controlling the air volume to adapt to real-time demand changes; and an exhaust silencer 1210 for reducing noise generated during exhaust. The gas path treatment module takes into account both the dilution of high-concentration H2 and ensuring smooth flow of exhaust gas.

[0034] The air inlet of relay fan 1204 is connected to the air outlet of the first centralized pipeline 111, the second centralized pipeline 121, and the third centralized pipeline 131. The air outlet of relay fan 1204 is connected to the air inlet of air mixing box 1206. The air outlet of air mixing box 1206 is connected to the air inlet of alkaline washing tower 1207. The air outlet of alkaline washing tower 1207 is connected to the air inlet of the first exhaust fan valve 12081 and the second exhaust fan valve 12082. The air outlet of the first exhaust fan valve 12081 is connected to the air inlet of the first variable frequency exhaust fan 12091. The air outlet of the second exhaust fan valve 12082 is connected to the air inlet of the second variable frequency exhaust fan 12092. Exhaust silencers 1210 are connected to the air outlets of the first variable frequency exhaust fan 12091 and the second variable frequency exhaust fan 12092.

[0035] The first collection pipe 11, the second collection pipe 12, the third collection pipe 13, the first centralized pipeline 111, the second centralized pipeline 121, and the third centralized pipeline 131 are all under negative pressure. The negative pressure value is adjusted according to the production process. The negative pressure is achieved by using two fans connected in series with a smaller power in the front and a larger power in the back. The front fan is a relay fan 1204, which operates at a fixed frequency. The back fan is an exhaust fan, which uses frequency conversion control to ensure that the negative pressure gauge 1205 is stable near the negative pressure value required by the process. Under the negative pressure control of the pipeline, water vapor in the alkaline washing tower 1207 will enter the exhaust fan at the end of the pipeline and will form scale on the exhaust fan impeller, affecting the dynamic balance of the fan and causing vibration. Therefore, the exhaust fan needs to be cleaned regularly. In order to improve the fault tolerance of the exhaust gas system, the exhaust fan adopts a one-for-one standby configuration.

[0036] Process exhaust gas and process specialty gas enter the air mixing box 1206 under negative pressure. The relay fan 1204 blows in a large amount of air to quickly dilute H2. The diluted H2 passes through the alkali washing tower 1207 and is discharged from the exhaust gas treatment unit by the exhaust fan.

[0037] The water treatment module includes a tap water pipe 01, a sodium hydroxide pipe 02, and a sewage pipe 03; The tap water pipe 01 has a tap water tank at the inlet end, the sodium hydroxide pipe 02 has a sodium hydroxide tank at the inlet end, and the sewage pipe 03 has a neutralized water collection tank at the outlet end. The function of the water treatment module is to catalyze the decomposition of MTS and neutralize HCl.

[0038] A water supply pump 101 is installed on the water supply pipe 01, a chemical pump 201 is installed on the sodium hydroxide pipe 02, and a sewage pump 301 is installed on the sewage discharge pipe 03. A sewage discharge valve can be installed at one end of the sewage pump. When neutralized water needs to be discharged, the sewage pump is turned on. The discharge ends of the water supply pump 101 and the chemical pump 201 are connected to the feed end of the alkaline washing tower 1207. The liquid inlet end of the sewage discharge pipe 03 is connected to the wastewater discharge end of the alkaline washing tower 1207. The water supply pipe 01 and the water supply pump 101 are used to provide spray water to the alkaline washing tower 1207. The sodium hydroxide pipe 02 and the chemical pump 201 are used to provide alkaline solution to the alkaline washing tower 1207. The sewage discharge pipe 03 and the sewage pump 301 are used to discharge the wastewater from the alkaline washing tower 1207.

[0039] The water supply pump 101 and the chemical pump 201 provide alkaline substances for the neutralization and absorption of HCl gas. The drain pipe 03 is equipped with a drain valve and a drain pump 301. Combined with the program control of the control unit, the neutralized water treated by the alkaline washing tower 1207 is transferred to the neutralized water collection tank.

[0040] The water treatment module uses a "water wash followed by alkaline wash" method. First, the MTS gas in the process gas is decomposed by spray hydrolysis. During the hydrolysis spray process, the HCl gas in the process waste gas and the HCl produced by the MTS hydrolysis reaction will react with water to produce acid. Then, the HCl acid gas is neutralized by NaOH alkaline washing spray method, and finally discharged through sewage pipe 03 for centralized treatment.

[0041] Working Principle: Before the process equipment starts emitting exhaust gas, the control unit first confirms that each exhaust gas treatment unit is in normal working condition. Taking one process equipment as an example, its normal working characteristics are that both the third automatic valve 1202 and the fourth automatic valve 1203 are in the open state, and one of the relay fan 1204, the first variable frequency exhaust fan 12091, and the second variable frequency exhaust fan 12092 in the exhaust gas treatment unit's air circuit is in normal working condition. The control unit controls the frequency of the variable frequency exhaust fan to ensure that the negative pressure gauge 1205 of the exhaust gas treatment unit is controlled within ±20Pa of the predetermined negative pressure value.

[0042] The NaOH chemical pump 201 in the exhaust gas treatment unit's water circuit is replenishing normally, maintaining the pH in the alkaline scrubbing tower 1207 consistently above 7, with an ideal pH range of 8-12. The spray heads in the alkaline scrubbing tower 1207 (not shown in the diagram) are continuously spraying, and the water mist atomization effect is good. On the one hand, this allows the MTS entering the alkaline scrubbing tower 1207 to fully react with the water, and on the other hand, the water mist can combine with gaseous HCl to form hydrochloric acid, which ultimately neutralizes the NaOH in the water. The sewage pump 301 periodically discharges the neutralized wastewater, and the water supply pump 101 is replenishing water normally, maintaining the water level in the alkaline scrubbing tower 1207 within the set range.

[0043] The adaptive exhaust gas distribution unit schedules the start and stop status of the exhaust gas treatment unit based on the exhaust gas volume emitted by the process equipment. This ensures that the processing capacity of the exhaust gas treatment unit is greater than the total emissions from the process equipment in real time, while also preventing too many exhaust gas treatment units from running idle, thus achieving adaptive control.

[0044] Suppose there are N (N>1) process equipment units that need to be prepared for production, and correspondingly, they need to be allocated to N sets of exhaust gas treatment units for processing, i.e., an "N to N" model. Assume that the exhaust gas emissions from process equipment 1#, 2# to N# are P1, P2...PN respectively, and the treatment capacities of exhaust gas treatment units 1#, 2# to N# are S1, S2, and SN respectively. A necessary condition is that S1+S2+...+SN≥P1+P2+...+PN, and SN≥PN is assumed.

[0045] This invention, by adding an adaptive exhaust gas distribution unit, adjusts the original "one-to-one" combination relationship between the exhaust gas treatment unit and the process equipment to "N-to-n", where n < N. This avoids interference between the process equipment and the exhaust gas treatment unit due to the failure of a single device, ensuring stable and long-term operation of the entire system with high fault tolerance. Furthermore, the exhaust gas treatment unit uses negative pressure exhaust, combined with mixing and dilution, hydrolysis and alkaline washing to ensure full reaction of the exhaust gas, improving the performance of a single exhaust gas treatment unit. Finally, through production scheduling via the exhaust gas distribution system, the processing efficiency of each exhaust gas treatment subsystem is fully utilized, which can correspondingly reduce the number of treatment system devices and save on plant and equipment investment costs.

[0046] The control flow of the control unit for the adaptive exhaust gas distribution unit and the exhaust gas treatment unit is as follows: 1. Before the process equipment starts producing exhaust gas, calculate the total exhaust gas emissions of N process equipment and determine the number and number of exhaust gas treatment units that need to be started. 2. Confirm that the exhaust gas treatment units (1#, 2#, ..., N#) are started and in a stable working state in sequence. At this time, the intake valve N202 of the exhaust gas treatment unit-N# and the exhaust valve N203 of the dilution air are open, and the two relay fans 1204 and the exhaust fan are running normally. 3. Open the intake valves (N103, N303) of the exhaust gas treatment unit - N# to ensure that all branches of the adaptive exhaust gas distribution unit - N# are in a constant negative pressure state, so as to ensure that the total treatment capacity of all opened exhaust gas treatment units is greater than or equal to the total emission capacity of the process equipment. 4. Selectively open the exhaust valves (N102, N302) of the process equipment-N# according to the needs of the stage, so that the exhaust gas from different branches of the process equipment-N# can smoothly enter the exhaust gas treatment unit through the distribution system under negative pressure suction, and complete the treatment of the exhaust gas of the process equipment. 5. When the process equipment stops production, the exhaust gas emission will also decrease accordingly. When the exhaust gas treatment unit for the remaining work exceeds the exhaust capacity of the remaining process equipment, and there is a subsystem in an idle state, the exhaust gas treatment unit will be selectively shut down after confirmation by the program. 6. Perform the confirmation and calculation of the third and fifth steps in real time. Through the programmed control of the control unit, the matching relationship between the real-time process equipment and the exhaust gas treatment unit is ensured to complete the normal production of the process equipment while giving full play to the production capacity of the exhaust gas treatment unit. 7. After all process equipment has stopped production, close the exhaust valves of the process equipment, keep the exhaust gas treatment unit running and in a stable working state for a period of time until there is no exhaust gas residue in the pipeline of the adaptive exhaust gas distribution unit, then close the intake valve of the exhaust gas treatment unit, and only then can the exhaust gas treatment unit be shut down for maintenance.

[0047] In summary, this invention incorporates an adaptive exhaust gas distribution unit, adjusting the original "one-to-one" combination relationship between the exhaust gas treatment unit and the process equipment to "N to n" (n < N). This avoids interference between the process equipment and the exhaust gas treatment unit due to the failure of a single piece of equipment, ensuring the stable and long-term operation of the entire system. The exhaust gas treatment unit adopts negative pressure exhaust, combined with mixing and dilution, hydrolysis and alkaline washing, to ensure that the exhaust gas reacts fully, effectively improving the performance of a single exhaust gas treatment unit.

[0048] By scheduling production through the exhaust gas distribution system, the processing efficiency of each exhaust gas treatment subsystem can be fully utilized, thereby reducing the number of treatment system devices and saving investment costs for plant and equipment. In the "N to N" mode, adaptive control avoids too many exhaust gas treatment units running idle, achieving optimal resource allocation. The automatic distribution system, composed of centralized pipelines and automatic valves, links multiple process equipment and multiple exhaust gas treatment units into a whole, realizing an adaptive system solution for efficient scheduling of process equipment and exhaust gas treatment equipment.

[0049] By using a multi-stage fan series structure combining a front-end relay fan 1204 with a terminal exhaust fan, and through fixed-frequency control of the relay fan 1204 and variable-frequency control of the exhaust fans, the exhaust duct maintains a constant negative pressure for exhausting the process equipment, ensuring stable system operation. The front-stage air mixing box 1206, combined with subsequent water and alkaline spraying, achieves dilution, absorption, and neutralization of various types of gases, including flammable, unstable, flammable and explosive, acidic, and corrosive gases, through multi-stage exhaust gas spraying treatment. This allows for free combination of process equipment and the exhaust gas treatment system during production, with minimal interference between the entire process and the exhaust gas treatment system. Combined with the adaptive exhaust gas distribution unit control unit, the total exhaust gas treatment capacity of the system is always slightly greater than the total exhaust gas emission capacity of the production process equipment, reducing power waste in the exhaust gas treatment system. The process equipment and exhaust gas treatment units can be reduced or increased according to production needs, thus distributing investment costs and reducing operation and maintenance costs, improving the system's economy and practicality.

[0050] Those skilled in the art will understand that the features described in the various embodiments and / or claims of the present invention can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in the present invention. In particular, the features described in the various embodiments and / or claims of the present invention can be combined or combined in various ways without departing from the spirit and teachings of the present invention. All such combinations and / or combinations fall within the scope of the present invention.

Claims

1. An adaptive exhaust gas distribution and treatment system, characterized in that, It includes an adaptive exhaust gas distribution unit, several process devices, an exhaust gas treatment unit, and a control unit; The process equipment's outlet is connected to an adaptive exhaust gas distribution unit, which is connected to an exhaust gas treatment unit. The control unit is connected to both the adaptive exhaust gas distribution unit and the exhaust gas treatment unit. The process equipment is used to generate tail gas, which includes process waste gas, dilution air, and process specialty gas. The adaptive exhaust gas distribution unit is used to collect and distribute exhaust gas from the process equipment; The exhaust gas treatment unit is used to treat the distributed exhaust gas; The control unit is used for regulating the exhaust gas treatment process.

2. The adaptive exhaust gas distribution and treatment system according to claim 1, characterized in that, The adaptive exhaust gas distribution unit includes several first collection pipes (11), several second collection pipes (12), several third collection pipes (13), a first centralized pipeline (111), a second centralized pipeline (121), and a third centralized pipeline (131). The first collection pipe (11) is used to collect process waste gas generated by the process equipment; The second collection pipe (12) is used to collect dilution air generated by the process equipment; The third collection pipe (13) is used to collect process gases generated by the process equipment; The first centralized pipeline (111) is used to collect the process waste gas from several first collection pipes (11); The second central conduit (121) is used to collect diluted air from several second collection pipes (12); The third centralized pipeline (131) is used to collect the process special gases from several third collection pipes (13).

3. The adaptive exhaust gas distribution and treatment system according to claim 2, characterized in that, Several first collection pipes (11) are connected to a first centralized pipeline (111), several second collection pipes (12) are connected to a second centralized pipeline (121), and several third collection pipes (13) are connected to a third centralized pipeline (131).

4. The adaptive exhaust gas distribution and treatment system according to claim 3, characterized in that, A first pressure gauge (1101) and a first automatic valve (1102) are respectively installed on the first collection pipe (11), and a second automatic valve (1103) is installed on the first centralized pipeline (111). A second pressure gauge (1201) and a third automatic valve (1202) are respectively installed on the second collection pipe (12), and a fourth automatic valve (1203) is installed on the second centralized pipeline (121). The third collection pipe (13) is equipped with a third pressure gauge (1301) and a fifth automatic valve (1302), and the third centralized pipeline (131) is equipped with a sixth automatic valve (1303).

5. The adaptive exhaust gas distribution and treatment system according to claim 2, characterized in that, The exhaust gas treatment unit includes an air path treatment module and a water path treatment module; The gas processing module is connected to the water processing module; The gas processing module is used to provide a gas flow environment and safely deliver the exhaust gas to the alkaline scrubbing tower (1207). The water treatment module is used to ensure full contact between the spray liquid and the gas, catalyzing the decomposition of MTS and neutralizing HCl.

6. The adaptive exhaust gas distribution and treatment system according to claim 5, characterized in that, The gas processing module includes a relay fan (1204), a negative pressure gauge (1205), an air mixing box (1206), an alkaline scrubbing tower (1207), a first exhaust fan valve (12081), a second exhaust fan valve (12082), a first variable frequency exhaust fan (12091), a second variable frequency exhaust fan (12092), and an exhaust silencer (1210). The relay fan (1204) is used to provide power for gas transport; The negative pressure gauge (1205) is used to monitor the negative pressure of the system; The air mixing box (1206) is used to mix exhaust gas with air to dilute flammable gas; The alkaline scrubbing tower (1207) is used for alkaline scrubbing treatment of the exhaust gas; The first exhaust fan valve (12081) and the second exhaust fan valve (12082) are used to adjust the air volume and airflow direction in the system; The first variable frequency exhaust fan (12091) and the second variable frequency exhaust fan (12092) are used for air volume control to adapt to real-time demand changes; The exhaust silencer (1210) is used to reduce the noise generated during the exhaust process.

7. The adaptive exhaust gas distribution and treatment system according to claim 6, characterized in that, The air inlet of the relay fan (1204) is connected to the air outlet of the first centralized pipeline (111), the second centralized pipeline (121) and the third centralized pipeline (131). The air outlet of the relay fan (1204) is connected to the air inlet of the air mixing box (1206). The air outlet of the air mixing box (1206) is connected to the air inlet of the alkaline washing tower (1207). The air outlet of the alkaline washing tower (1207) is connected to the air inlet of the first exhaust fan valve (12081) and the second exhaust fan valve (12082) respectively. The outlet end of the first exhaust fan valve (12081) is connected to the inlet end of the first variable frequency exhaust fan (12091); The outlet end of the second exhaust fan valve (12082) is connected to the inlet end of the second variable frequency exhaust fan (12092); The first variable frequency exhaust fan (12091) and the second variable frequency exhaust fan (12092) are connected to an exhaust silencer (1210) at their air outlets.

8. The adaptive exhaust gas distribution and treatment system according to claim 7, characterized in that, The water treatment module includes a tap water pipe (01), a sodium hydroxide pipe (02), and a sewage pipe (03). The water inlet of the water pipe (01) is equipped with a water tank, the inlet of the sodium hydroxide pipe (02) is equipped with a sodium hydroxide tank, and the outlet of the sewage pipe (03) is equipped with a neutralized water collection tank.

9. An adaptive exhaust gas distribution and treatment system according to claim 8, characterized in that, A water supply pump (101) is installed on the tap water pipe (01), a chemical pump (201) is installed on the sodium hydroxide pipe (02), and a sewage pump (301) is installed on the sewage pipe (03). The discharge ends of the water supply pump (101) and the chemical pump (201) are connected to the feed end of the alkaline washing tower (1207), and the liquid inlet end of the sewage pipe (03) is connected to the wastewater discharge end of the alkaline washing tower (1207).

10. An adaptive exhaust gas distribution and treatment system according to claim 9, characterized in that, The water supply pipe (01) and water pump (101) are used to provide spray water to the alkaline washing tower (1207); The sodium hydroxide tube (02) and the chemical pump (201) are used to supply alkaline solution to the alkaline washing tower (1207); The drain pipe (03) and drain pump (301) are used to discharge wastewater from the alkaline washing tower (1207).

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