High-precision angle adjusting device suitable for optical element

Abstract

The invention relates to the technical field of precision adjustment, in particular to a high-precision angle adjusting device suitable for an optical element, and the device comprises a moving plate, a fixed frame, an elastic part, and an adjusting mechanism. A fixing hole for accommodating and fixing a target optical element is formed in the moving plate; the movable plate is rotationally connected with the fixed frame; the adjusting mechanism is connected with the moving plate and is used for adjusting the pitch angle and the azimuth angle of the target optical element; the fixing frame is connected with the adjusting mechanism and used for fixing the adjusting mechanism. The two ends of the elastic piece are connected with the movable plate and the fixing frame respectively, and the elastic piece is in a stretching state all the time. By adopting the high-precision angle adjusting device provided by the invention, accurate fine adjustment of the pitch angle and the azimuth angle of the target optical element can be realized, the whole device is simple and redundancy-free, the operation is convenient and fast, the assembly is convenient, and the structural strength can be ensured while the occupied space is minimized.

Description

Technical Field

[0001] This application relates to the field of precision adjustment technology, specifically to a high-precision angle adjustment device suitable for optical components. Background Technology

[0002] When installing optical components in an optical system, due to the inherent characteristics and usage requirements of the components, it is often necessary to fine-tune them to the required positions after installation. This ensures that the components maintain their spatial relative positions with other optical components within the system, meet their optical characteristics, and fulfill their intended functions (e.g., when using an interferometer to detect the surface shape of a component). During adjustment, angle and pitch adjustments are typically required depending on the situation. Furthermore, in special environments (such as optical laboratories), the requirements for the adjustment frame are even higher. Traditional adjustment frames, due to large gaps between components and a lack of effective vibration-resistant design, are susceptible to environmental resonance, such as vibrations from the experimental platform or equipment operation. These factors can cause optical component position drift and optical path offset, leading to a series of problems such as blurred imaging and distorted measurement data. Ordinary optical adjustment frames can no longer meet the required accuracy and anti-interference requirements; therefore, it is necessary to design an adjustment device that can meet the needs of special environments. Summary of the Invention

[0003] The purpose of this application is to provide a high-precision angle adjustment device suitable for optical components, so as to meet the high-precision adjustment requirements of optical component angles under special environments.

[0004] To achieve the above objectives, this application provides a high-precision angle adjustment device suitable for optical elements. The high-precision angle adjustment device includes a movable plate, a fixed frame, an elastic element, and an adjustment mechanism. The movable plate has a fixing hole for accommodating and fixing the target optical element. The movable plate is rotatably connected to the fixed frame. The adjustment mechanism is connected to the movable plate and is used to adjust the pitch angle and azimuth angle of the target optical element. The fixed frame is connected to the adjustment mechanism and is used to fix the adjustment mechanism. The two ends of the elastic element are respectively connected to the movable plate and the fixed frame, and the elastic element is always in a stretched state.

[0005] In this embodiment, the adjustment mechanism includes a first precision adjustment push rod and a second precision adjustment push rod; the first precision adjustment push rod and the second precision adjustment push rod are respectively connected to the fixed frame, and the telescopic ends of the first precision adjustment push rod and the telescopic ends of the second adjustment push rod respectively abut against the moving plate, with abutment points A1 and A2 on the moving plate respectively; wherein, points A1 and A2 are located on the same plate surface of the moving plate; and points A1 and A2 are respectively close to the edges of two adjacent sides of the plate surface; the center of the fixing hole is point O, and the distances of points A1 and A2 from point O are d1 and d2 respectively; wherein d1=d2; the position point where the moving plate is rotatably connected to the fixed frame is point B, and point B is located on the same plate surface of the moving plate as points A1 and A2, and the position of point B is close to the top corner of the plate surface; with the line BO as the axis, points A1 and A2 are symmetrically distributed on both sides of BO.

[0006] In this embodiment of the application, a first groove and a second groove are respectively provided at the positions of points A1 and A2 on the movable plate. The first groove and the second groove are adapted to the ends of the first precision adjustment push rod and the second precision adjustment push rod, respectively. The first groove and the second groove are centered on points A1 and A2, respectively.

[0007] In this embodiment of the application, the high-precision angle adjustment device further includes a rotating component, which is connected to the moving plate (1) and the fixed frame (2) respectively.

[0008] In this embodiment, the first or second precision adjustment push rod includes a precision adjustment screw; the fixed frame is provided with a mounting hole for limiting the axial displacement of the precision adjustment screw; the telescopic end of the precision adjustment screw passes through the mounting hole on the fixed frame and is positioned towards the moving plate, and the telescopic end of the precision adjustment screw always abuts against the moving plate; the precision adjustment screw is connected to the fixed frame by a bearing or a locking nut / screw.

[0009] In this embodiment of the application, a phosphor bronze bushing is embedded in the mounting hole, and the telescopic end of the precision adjusting screw passes through the phosphor bronze bushing and abuts against the moving plate.

[0010] In this embodiment of the application, the elastic element includes a spring, and there are multiple springs. For any one spring, one end is connected to the movable plate and the other end is connected to the fixed frame. The connection points of the multiple springs on the movable plate are symmetrically distributed about the line BO.

[0011] In this embodiment, the movable plate has a pre-tightening screw hole that connects to the outside and the fixing hole; the high-precision angle adjustment device further includes: a nylon pad, wherein there are multiple nylon pads, and the nylon pads are embedded in the reserved grooves on the inner sidewall of the fixing hole and abut against the sidewall of the target optical element; a nylon rubber head screw, which abuts against the sidewall of the target optical element through the pre-tightening screw hole; taking the abutment point of the nylon rubber head screw against the sidewall of the target optical element as the vertex, at least two abutment points of the nylon pads against the optical element and the vertex form an isosceles triangle; the center of the target optical element installed in the fixing hole coincides with the center of the fixing hole.

[0012] In this embodiment of the application, the high-precision angle adjustment device further includes an angle sensor, which is located near the moving plate and is used to detect the pitch angle and azimuth angle information of the target optical element in real time.

[0013] In this embodiment, the mounting bracket is made of stainless steel.

[0014] The solution provided in this application has at least the following beneficial effects: The high-precision angle adjustment device for optical components provided in this application utilizes a movable plate adapted to the shape of the target optical component to fix the target optical component. Two sets of precision adjusting screws control the normal displacement of two non-collinear key points of the movable plate, achieving precise fine-tuning of the pitch and azimuth angles. The adjustment mechanism is simplified and has no transmission backlash, making it convenient to operate and highly accurate. The device adopts an integrated, streamlined structure, reducing redundant components and minimizing space occupation while ensuring structural strength, perfectly adapting to the installation scenarios of miniaturized optical systems. Furthermore, the device is easy to install and disassemble, and can be repeatedly assembled and reused. For example, by replacing the movable plate with fixed holes of different shapes and sizes, it can accommodate target optical components of different shapes and specifications, demonstrating excellent adaptability.

[0015] Other features and advantages of the embodiments of this application will be described in detail in the following detailed description section. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the following detailed description to explain the embodiments of this application, but do not constitute a limitation on the embodiments of this application. In the drawings: Figure 1 The schematic diagram illustrates the structure of the high-precision angle adjustment device in the embodiment from a first perspective. Figure 2 The schematic diagram illustrates the structure of the high-precision angle adjustment device in the embodiment from a second perspective. Figure 3The schematic diagram illustrates the structure of the high-precision angle adjustment device in the embodiment from a third-person perspective. Figure 4 The schematic diagram shows the location of each connection point on the moving plate.

[0017] Explanation of reference numerals in the attached figures 1. Moving plate; 11. Fixing hole; 12. Pre-tightening screw hole; 2. Fixing frame; 3. Adjustment mechanism; 31. First precision adjustment push rod; 32. Second precision adjustment push rod; 4. Rotating component; 5. Phosphor bronze bushing; 6. Nylon pad; 7. Elastic component; 100. Target optical element. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only for illustration and explanation of the embodiments of this application and are not intended to limit the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0019] It should be noted that if the embodiments of this application involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0020] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0021] Example 1 like Figure 1As shown, this embodiment provides a high-precision angle adjustment device suitable for optical elements. The high-precision angle adjustment device includes a moving plate 1, an adjustment mechanism 3, an elastic element 7, and a fixing frame 2. The moving plate 1 has a fixing hole 11 for accommodating and fixing the target optical element 100. The moving plate 1 is rotatably connected to the fixing frame 2. The adjustment mechanism 3 is connected to the moving plate 1 and is used to adjust the pitch angle and azimuth angle of the target optical element 100. The fixing frame 2 is connected to the adjustment mechanism 3 and is used to fix the adjustment mechanism 3. The two ends of the elastic element 7 are respectively connected to the moving plate 1 and the fixing frame 2, and the elastic element 7 is always in a stretched state.

[0022] Specifically, the movable plate 1 is provided with a fixing hole 11 that is adapted to the target optical element 100. Taking a circular target optical element 100 as an example, the corresponding fixing hole 11 can be circular or... Figure 1 The superior arc shape of the through hole reduces the contact area between the target microcrystal and the moving plate 1, and facilitates the disassembly and installation of the target optical element 100. To fix the target optical element 100 in the center of the fixing hole 11 (i.e., the center of the optical element coincides with the center of the fixing hole 11), and to meet the high-precision requirements of optical path calibration in specific application scenarios (e.g., the mirror calibration of a Michelson interferometer), a reserved groove is provided on the inner sidewall of the bottom of the fixing hole 11 in this embodiment. This reserved groove is used to accommodate and fix the nylon pad 6, which can elevate the target optical element 100 so that the center of the target optical element 100 coincides with the center of the fixing hole 11. The nylon pad 6 can be fixedly connected to the moving plate 1 by bolts or other fasteners. Additionally, a pre-tightening screw hole 12 communicating with the outside is provided at the top of the fixing hole 11. When fixing the target optical element 100, the free end of the nylon rubber head screw can pass through the pre-tightening screw hole 12 and abut against the sidewall of the target optical element 100 (this abutment point is R1). To improve the stability of the fixed target optical element 100, at least two nylon pads 6 are placed at the bottom of the fixing hole 11. These two nylon pads 6, together with the contact points (R2 and R3) and R1 of the optical element, form an isosceles triangle with R1 as the vertex (the center of gravity of the target optical element 100 coincides with the center of the fixing hole 11). The nylon pads 6 and the nylon rubber head screws are all made of nylon, and their hardness is less than that of the target optical element 100, which can prevent scratching the target optical element 100.

[0023] The adjustment mechanism 3 includes a first precision adjustment push rod 31 and a second precision adjustment push rod 32. The first precision adjustment push rod 31 and the second precision adjustment push rod 32 are used to adjust the pitch angle (rotation about the X-axis) and azimuth angle (rotation about the Y-axis) of the target optical element 100 (moving plate 1), respectively. Taking a moving plate 1 containing at least two right-angled sides as an example, the first precision adjustment push rod 31 and the second precision adjustment push rod 32 abut against the moving plate 1, and the two abutment points should be close to the two right-angled sides respectively. The distances of the two abutment points from the right-angle vertex are L1 and L2, respectively, preferably equal. For ease of use and measurement, the first precision adjustment push rod 31 and the second precision adjustment push rod 32 can adopt the same structure. For example, both the first precision adjustment push rod 31 and the second precision adjustment push rod 32 can be precision adjustment screws, such as the precision adjustment screws of the FPSAN series, whose specific size can be adapted to the size of the moving plate 1 (target optical element 100). In addition, a precision adjusting screw driven by PZT piezoelectric ceramics can be used to meet the needs of automatic control.

[0024] The fixing frame 2 is used to fix the first precision adjustment push rod 31 and the second precision adjustment push rod 32, so that the telescopic ends of the first precision adjustment push rod 31 and the second precision adjustment push rod 32 can accurately abut against the preset points on the moving plate 1. The fixing frame 2 (the side facing the moving plate 1) can also serve as a reference surface for measuring the rotation angle of the moving plate 1. The two mounting holes used to fix the first precision adjustment push rod 31 and the second precision adjustment push rod 32 must correspond to the positions of the abutment preset points on the moving plate 1, respectively. For example, the structure of the fixing frame 2 can adopt... Figure 3 The L-shaped structure is shown. The first precision adjustment push rod 31 or the second precision adjustment push rod 32 can be connected to the mounting bracket 2 via a bearing or a locking nut / screw. Furthermore, the mounting bracket 2, as a fixed reference part, should have a certain mass to ensure the overall stability of the device. Preferably, the mounting bracket 2 is made of stainless steel.

[0025] Please refer to Figure 1 , Figure 2 and Figure 3To adjust the tilt angle (pitch and azimuth) of the movable plate 1, in this embodiment, the movable plate 1 is rotatably connected to the fixed frame 2 via a rotating component 4. To ensure that the movable plate 1 can rotate around both the X-axis and the Y-axis, the rotating component 4 should have at least two rotational degrees of freedom. Specifically, the rotating component 4 includes steel balls. Two symmetrical conical grooves can be drilled at predetermined positions (such as near the vertex of a right angle) using a 120° drill bit, and the steel balls can be accurately placed into them. Since an elastic component 7 is also connected between the movable plate 1 and the fixed frame 2, and the elastic component 7 is always in a stretched state, and the movable plate 1 will not rotate within a large range (rotation range: pitch ±3°, azimuth ±3°) to meet the high-precision adjustment requirements, the steel balls will always be reliably clamped between the movable plate 1 and the fixed frame 2. By utilizing the structural cooperation between the steel ball, the moving plate 1, and the fixed frame 2, the adjustment dimension is defined. A point-contact rolling structure is used to construct a low-friction, high-precision two-axis rotation fulcrum, achieving both precise adjustment and ensuring stability after adjustment, while also simplifying the structural design of the adjustment frame. Furthermore, the elastic element 7 includes a spring, whose two ends can be connected and fixed to the moving plate 1 and the fixed frame 2 respectively via screws.

[0026] Example 2

[0027] Based on the structural relationships in Embodiment 1, this embodiment further optimizes and limits the positional connection relationships between the moving plate 1, the adjusting mechanism 3, and the fixed frame 2. Specifically, as follows... Figure 3 and Figure 4 As shown, the contact points of the telescopic ends of the first precision adjustment push rod 31 and the second adjustment push rod on the moving plate 1 are points A1 and A2, respectively; where points A1 and A2 are located on the same plate surface of the moving plate 1; and points A1 and A2 are respectively close to the edges of two adjacent sides of the plate surface; the center of the fixing hole 11 is point O, and the distances of points A1 and A2 from point O are d1 and d2, respectively; where d1=d2; the position point where the moving plate 1 is rotatably connected to the fixing frame 2 is point B, and point B is located on the same plate surface as points A1 and A2, and the position of point B is close to the top corner of the plate surface; with the line BO as the axis, points A1 and A2 are symmetrically distributed on both sides of BO; preferably, points A1 and A2 should also be as far apart as possible from each other to increase the rotation lever arm (the distance between point B and point A1 or the distance between point B and point A2), reduce the reaction force borne by the first precision adjustment push rod 31 and the second precision adjustment push rod 32, and improve the overall stability of the device. Based on the above positional relationship (the distance from the force application point of the two precision adjustment push rods to the center of the fixed hole 11 is the same, and the distance from the force application point of the two precision adjustment push rods to the rotation point is also the same), the force exerted on the moving plate 1 on both sides is almost the same, which facilitates the adjustment and control of the pitch angle and azimuth angle. At the same time, there will be no problem of uneven wear and aging on both sides after long-term use, which helps to improve the service life of the device.

[0028] Furthermore, to ensure the symmetry of the forces and improve the overall stability of the device, multiple springs are used. For any given spring, one end is connected to the moving plate 1, and the other end is connected to the fixed frame 2. The connection points of the multiple springs on the moving plate 1 are symmetrically distributed about the line connecting points B and B. For example, two springs are evenly distributed between points B and A1. Figure 4 Points C1 and C2 are the connection points between the two springs and the moving plate 1, respectively. Two springs are evenly distributed between points B and A2. Figure 4 Points C3 and C4 are the connection points between the two springs and the moving plate 1, respectively. Based on this setting, it can be ensured that when one of the precision adjustment push rods applies force to the moving plate 1, the entire device will not vibrate. Even if it is subjected to slight vibration or external force, the component position can be maintained by the reverse action of the elastic force, reducing accuracy drift, improving the overall rigidity of the adjustment frame, and preventing the component from tilting during the adjustment process.

[0029] Preferably, in this embodiment, a first groove and a second groove are respectively provided at points A1 and A2 on the movable plate 1. The first groove and the second groove are adapted to the ends of the first precision adjusting push rod 31 and the second precision adjusting push rod 32, respectively; the first groove and the second groove are centered on points A1 and A2, respectively. The arrangement of the first groove and the second groove facilitates the alignment of the first precision adjusting push rod 31 and the second precision adjusting push rod 32 during installation, and prevents slippage or misalignment at the contact points when the first precision adjusting push rod 31 or the second precision adjusting push rod 32 applies force to the movable plate 1.

[0030] Preferably, a phosphor bronze bushing 5 is embedded in the mounting hole, and the telescopic end of the precision adjusting screw passes through the phosphor bronze bushing 5 and abuts against the moving plate 1. Since the external sleeve (axially limited by the sleeve, radially limited by the internal screw) needs to be rotated during the control of the telescopic end of the precision adjusting screw, the phosphor bronze bushing 5, with its high wear resistance, corrosion resistance, and good self-lubricating properties, can prevent direct friction between the sleeve and the inner wall of the mounting hole, improving the smoothness of sleeve rotation and the convenience of operation for the operator.

[0031] Furthermore, the high-precision angle adjustment device also includes an angle sensor, which is located near the moving plate 1 and is used to detect the pitch and azimuth information of the target optical element 100 in real time. It can be used to monitor the adjustment accuracy of the angle and the status of the adjustment mechanism 3 in real time (if there is an error, it can be detected in time).

[0032] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0033] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A high-precision angle adjustment device for optical elements, characterized in that The high-precision angle adjusting device comprises a moving plate (1), a fixed frame (2), an elastic member (7) and an adjusting mechanism (3); The moving plate (1) is provided with a fixing hole (11) for accommodating and fixing a target optical element (100); the moving plate (1) is rotationally connected with the fixed frame (2); The adjusting mechanism (3) is connected with the moving plate (1) and used for adjusting the pitch angle and azimuth angle of the target optical element (100); The fixed frame (2) is connected with the adjusting mechanism (3) and used for fixing the adjusting mechanism (3); The two ends of the elastic member (7) are respectively connected with the moving plate (1) and the fixed frame (2), and the elastic member (7) is always in a stretched state.

2. The high-precision angle adjustment device according to claim 1, characterized in that The adjusting mechanism (3) comprises a first precision adjusting push rod (31) and a second precision adjusting push rod (32); the first precision adjusting push rod (31) and the second precision adjusting push rod (32) are respectively connected with the fixed frame (2), the telescopic end of the first precision adjusting push rod (31) and the telescopic end of the second precision adjusting push rod are respectively abutted with the moving plate (1), and the abutted points on the moving plate (1) are respectively A1 point and A2 point; wherein, the A1 point and the A2 point are located on the same plate surface of the moving plate (1); and the A1 point and the A2 point are respectively close to the edges of the two adjacent sides of the plate surface; The center of the fixing hole (11) is O point, the distances between the A1 point and the A2 point and the O point are respectively d1 and d2; wherein d1=d2; The position point at which the moving plate (1) is rotationally connected with the fixed frame (2) is B point, the B point, the A1 point and the A2 point are located on the same plate surface of the moving plate (1), and the position at which the B point is located is close to the top corner of the plate surface; the A1 point and the A2 point are symmetrically distributed on the two sides of the BO line as the axis.

3. The high-precision angle adjustment device according to claim 2, characterized in that First and second grooves are respectively arranged at the positions of the A1 point and the A2 point of the moving plate (1), the first and second grooves are respectively adapted to the end of the first precision adjusting push rod (31) and the end of the second precision adjusting push rod (32), and the first and second grooves are respectively centered on the A1 point and the A2 point.

4. The high-precision angle adjustment device according to claim 2, characterized by The high-precision angle adjusting device further comprises a rotating member (4), and the rotating member (4) is connected with the moving plate (1) and the fixed frame (2).

5. The high-precision angle adjustment device according to claim 2, characterized in that The first precision adjusting push rod (31) or the second precision adjusting push rod (32) comprises a precision adjusting screw; the fixed frame (2) is provided with a mounting hole for limiting the axial displacement of the precision adjusting screw; The telescopic end of the precision adjusting screw is arranged towards the moving plate (1) through the mounting hole of the fixed frame (2), and the telescopic end of the precision adjusting screw is always abutted with the moving plate (1); the precision adjusting screw is connected with the fixed frame (2) through a bearing or a locking nut / screw.

6. The high-precision angle adjustment device according to claim 5, characterized in that The mounting hole is embedded with a phosphor bronze bushing (5), and the telescopic end of the precision adjusting screw is abutted with the moving plate (1) through the phosphor bronze bushing (5).

7. The high-precision angle adjustment device according to claim 2, characterized by The elastic member (7) comprises springs, and the springs are in plurality, one end of any spring is connected with the moving plate (1), and the other end is connected with the fixed frame (2); the connecting points of the plurality of springs on the moving plate (1) are in an axisymmetric distribution state with the BO connecting line as the axis.

8. The high-precision angle adjustment device according to claim 1, characterized in that The moving plate (1) is provided with a pre-tightening screw hole (12) which is communicated with the outside and the fixed hole (11); the high-precision angle adjusting device further comprises: The nylon pad rod (6) is in plurality, and the nylon pad rod (6) is embedded in the reserved groove of the inner side wall of the fixed hole (11) and abuts against the side wall of the target optical element (100); The nylon rubber head top wire abuts against the side wall of the target optical element (100) through the pre-tightening screw hole (12); With the abutment point of the nylon rubber head top wire and the side wall of the target optical element (100) as the vertex, there are at least two abutment points of the nylon pad rod (6) and the optical element and the vertex to form an isosceles triangle; The center of the target optical element (100) installed in the fixed hole (11) is coincided with the center of the fixed hole (11).

9. The high-precision angle adjustment device according to claim 1, characterized in that The high-precision angle adjusting device further comprises an angle sensor which is arranged near the moving plate (1) and is used for detecting the pitch angle and azimuth angle information of the target optical element (100) in real time.

10. The high-precision angle adjustment device according to any one of claims 1 to 9, characterized in that The fixed frame (2) is made of stainless steel.

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