Air pumping structure of piezoelectric fan and piezoelectric fan

Abstract

The invention provides an air pumping structure of a piezoelectric fan and the piezoelectric fan. The air pumping structure comprises a cavity. A vibrator is arranged in the cavity; the cavity is provided with an inlet and an outlet; a first gap and a second gap are formed between the free end of the vibrator and the inlet; the vibrator is provided with a first side and a second side which are oppositely arranged; a first side surface and a second side surface which are oppositely arranged are arranged in the cavity; a first space is formed between the first side of the vibrator and the first side surface of the cavity; a second space is formed between the second side of the vibrator and the second side surface of the cavity; the inlet, the first gap, the first space and the outlet are sequentially communicated to form a first airflow channel; the inlet, the second gap, the second space and the outlet are sequentially communicated to form a second airflow channel. Through the extrusion effect of the vibrator on the first space and the second space, the energy utilization rate of the vibrator can be improved.

Description

Technical Field

[0001] This application belongs to the field of piezoelectric fan technology, and more specifically, relates to a piezoelectric fan pumping structure and a piezoelectric fan. Background Technology

[0002] Compared to mainstream electromagnetic fans, piezoelectric fans have advantages such as thinner thickness, smaller size, and higher pressure. Their principle is to convert electrical signals into mechanical vibrations through piezoelectric ceramics / films, causing the diaphragm to move and producing a fan-like effect, ultimately generating gas flow and achieving the purpose of pumping air. However, the vibrational energy of the oscillator within the pumping structure of a piezoelectric fan cannot be effectively utilized, resulting in low energy utilization of the oscillator. Summary of the Invention

[0003] To improve or solve the technical problem of low energy utilization of oscillators in related technologies, this application provides a pumping structure for a piezoelectric fan and a piezoelectric fan.

[0004] In a first aspect, embodiments of this application provide a pumping structure for a piezoelectric fan, including a chamber; a vibrator is disposed within the chamber; the chamber has an inlet and an outlet;

[0005] The free end of the oscillator forms a first gap and a second gap with the inlet; the oscillator has a first side and a second side disposed opposite to each other; the cavity has a first side and a second side disposed opposite to each other; a first space is formed between the first side of the oscillator and the first side of the cavity; a second space is formed between the second side of the oscillator and the second side of the cavity. The inlet, the first gap, the first space, and the outlet are sequentially connected to form a first airflow channel; the inlet, the second gap, the second space, and the outlet are sequentially connected to form a second airflow channel.

[0006] The above technical solution constructs a first airflow channel and a second airflow channel by placing an oscillator within the chamber and creating a first gap and a second gap between the free end of the oscillator and the inlet, respectively, and simultaneously forming a first space and a second space between the oscillator and the sidewall of the chamber. This structure allows the oscillator to simultaneously drive two airflows along two separate channels during vibration. Compared to the traditional single-channel structure, this design more fully utilizes the energy generated by the oscillator's vibration, effectively improving the energy utilization rate of the oscillator and reducing energy loss.

[0007] Furthermore, the oscillator includes a first oscillator; the free end of the first oscillator extends into the inlet, and a first side of the free end of the first oscillator forms a first gap with the inlet; a second side of the free end of the first oscillator forms a second gap with the inlet.

[0008] In the above technical solution, the free end of the first oscillator extends into the inlet, allowing the oscillator to interact more directly with the incoming airflow during vibration. The oscillator's vibrational energy can be transferred to the airflow more quickly and effectively, driving the airflow along both channels. Compared to a structure where the oscillator does not extend into the inlet, this design reduces energy loss during transmission and improves the efficiency of converting the oscillator's vibrational energy into airflow kinetic energy, thus generating a larger airflow rate and velocity at the same oscillator vibrational power.

[0009] Furthermore, when the free end of the first oscillator is not vibrating, the height of the first gap and the height of the second gap may be the same or different; the length of the free end of the oscillator extending into the inlet is 50-300um.

[0010] In the above technical solution, when the free end of the first oscillator is not vibrating, the heights of the first gap and the second gap are the same, which means that the airflow entering from the inlet can be evenly distributed into the first airflow channel and the second airflow channel in the initial stage. This symmetrical airflow distribution method makes the airflow rate and velocity in the two channels basically the same in the initial stage, which is conducive to more precise control and adjustment of the airflow in the later stage, and ensures the stability and balance of the entire pump structure during operation.

[0011] When the free end of the first oscillator is not vibrating, the different heights of the first and second gaps can be customized to distribute the airflow according to specific application requirements. Different gap heights can affect the resistance characteristics of the airflow channel, thereby optimizing the pumping performance of the pumping structure.

[0012] Furthermore, the oscillator includes a second oscillator; there is a gap between the free end of the second oscillator and the inlet; there is a first gap between the first corner of the free end of the second oscillator and the inlet; there is a second gap between the second corner of the free end of the second oscillator and the inlet; one side of the first corner is on the same plane as the first side of the second oscillator, and one side of the second corner is on the same plane as the second side of the second oscillator.

[0013] In the above technical solution, the free end of the second oscillator is spaced from the inlet, and its first and second corners form a first gap and a second gap with the inlet, respectively. This design allows the airflow to be guided not only by the first oscillator in the horizontal direction (assuming the inlet is horizontal) when entering the chamber, but also further segmented by the second oscillator in the vertical direction (based on the directional change caused by the corner design). The airflow can enter different airflow channels from more dimensions. Compared with a single oscillator structure, the airflow distribution is more detailed and precise, which helps to form a more complex and orderly airflow field and meet the diverse needs of different application scenarios for airflow distribution.

[0014] One side of the first corner is on the same plane as the first side of the second oscillator, and one side of the second corner is on the same plane as the second side of the second oscillator, thus defining the positions of the two corners. This connection method allows the first and second gaps to naturally connect with the spaces on both sides of the oscillator, which is more conducive to forming stable first and second airflow channels. The airflow can flow smoothly along these channels, reducing turbulence and energy loss at channel transitions and improving pumping efficiency.

[0015] Furthermore, the size of the spacing is 0.2-1 times the amplitude of the second oscillator.

[0016] In the above scheme, when the spacing is 0.2-1 times the amplitude, precise control of airflow intake can be achieved. Within this range, the distance between the free end of the second oscillator and the inlet will change periodically during vibration, but will always remain within a suitable range. This avoids the situation where the spacing is too small, causing frequent collisions between the oscillator and the inlet during vibration, thus hindering normal airflow entry; and also avoids the situation where the spacing is too large, causing excessive dispersion of airflow upon entry, resulting in poor airflow guidance.

[0017] An appropriate spacing helps maintain a stable airflow channel during oscillation. As the oscillator vibrates, the change in the spacing between its free end and the inlet guides the airflow into a specific flow pattern. When the spacing is within the range of 0.2-1 times the amplitude, the airflow can form a relatively stable airflow stream at the first and second gaps, flowing orderly along the first and second airflow channels. This reduces airflow turbulence and backflow within the channels, improves the flow efficiency of the airflow channels, and enables the pump structure to deliver gas more efficiently.

[0018] Furthermore, the chamber is provided with an air inlet channel; the outlet includes a first sub-outlet and a second sub-outlet; The air intake channel extends along a first direction or along a second direction; one end of the air intake channel is connected to one end of the inlet; the gas in the air intake channel is used to enter the inlet along the first direction, the gas in the first space is used to flow out from the first sub-outlet along the first direction, and the gas in the second space is used to flow out from the second sub-outlet along the first direction; the first direction and the second direction intersect.

[0019] Furthermore, the oscillator includes a substrate and a driving element for driving the substrate to vibrate; the driving frequency of the driving element and the mechanical vibration frequency of the substrate are consistent with the acoustic modal frequency of the cavity. The acoustic modal frequencies of the cavity conform to the following formula (1): (1) in, The length of the first space along the length direction of the oscillator or the length of the second space along the length direction of the oscillator; The acoustic modal frequency of the cavity; t is the speed of sound; n is an integer greater than or equal to zero; t is the speed of sound. The coefficient is t, and t is a number greater than 0.

[0020] In the above scheme, when the driving frequency of the driving element, the mechanical vibration frequency of the oscillator, and the acoustic modal frequency of the chamber are consistent, the system will resonate. Resonance allows the oscillator to obtain maximum energy input from the driving element, efficiently converting electrical energy into mechanical vibration energy. Simultaneously, the vibrational energy of the oscillator can be optimally coupled to the air within the chamber, exciting acoustic resonance and causing strong vibrations and orderly flow of air molecules. This efficient energy coupling and resonance enhancement significantly improves the energy utilization efficiency of the pump structure, enabling the generation of greater airflow and pressure with less energy consumption, thereby enhancing pump performance. The above formula provides a precise theoretical basis for the design of the chamber size, and the integer n in the formula provides flexibility in the design. Different n values ​​correspond to different chamber sizes and acoustic modal frequencies. Appropriate n values ​​can be selected to adjust the chamber size according to specific application requirements and performance specifications, thereby optimizing the performance of the pump structure.

[0021] Furthermore, the flow resistance of the first gap is a first flow resistance; the flow resistance of the second gap is a second flow resistance; the first flow resistance increases as the second flow resistance decreases, or the first flow resistance decreases as the second flow resistance increases; The first flow resistance conforms to the following formula (2): (2) in, First flow resistance; The pressure difference between the first space and the inlet. The gas flow rate through the first gap; The second flow resistance conforms to the following formula (3): (3) in, Second flow resistance; The pressure difference between the second space and the inlet. This represents the gas flow rate through the second gap.

[0022] In the above scheme, as the oscillator vibrates periodically, the first gap and the second gap change periodically, and the size of the first gap and the second gap have an inverse relationship. This makes the first flow resistance increase as the second flow resistance decreases, and the first flow resistance decreases as the second flow resistance increases. This ensures that the first airflow channel and the second airflow channel can be in a pumping state regardless of whether the oscillator vibrates upward or downward, thereby improving the energy utilization rate of the oscillator.

[0023] Furthermore, two oscillators are disposed within the cavity; a first gas passage is provided between the two oscillators; the cavity has a third side and a fourth side disposed opposite to each other; the inlet includes a first inlet and a second inlet; the first inlet and the second inlet are respectively disposed on the third side and the fourth side of the cavity; The free end of one of the oscillators forms a first gap and a second gap with the first inlet; The free end of the other oscillator forms another first gap and another second gap with the second inlet; A first space is formed between a first side of one of the oscillators and a first side of the chamber; A second space is formed between the second side of one of the oscillators and the second side of the chamber; Another first space is formed between the first side of the other oscillator and the first side of the chamber; Another second space is formed between the second side of the other oscillator and the second side of the chamber; The first space and the other first space are connected; A second gas channel is formed between the outer wall of the first gas channel and the inner wall of the outlet; The first inlet, a first gap of one of the oscillators, a first space, and the first gas channel are sequentially connected to form a first airflow channel; the first inlet, a second gap of one of the oscillators, a second space, and the second gas channel are sequentially connected to form a second airflow channel; The second inlet, a second gap of one of the oscillators, a second space, and the second gas channel are sequentially connected to form a second airflow channel; the second inlet, another second gap of the other oscillator, another second space, and the second gas channel are sequentially connected to form another second airflow channel.

[0024] In the above technical solution, the free end of each oscillator forms a first gap and a second gap with the corresponding inlet, and then forms a first space and a second space with the sidewall of the chamber, respectively, thus constructing an independent first airflow channel and a second airflow channel. This design allows airflow to enter from different inlets and flow through their respective independent airflow channels. The two oscillators independently and collaboratively guide the airflow, avoiding mutual interference and turbulence between airflows, and achieving orderly airflow distribution.

[0025] Because of the presence of multiple independent airflow channels, the system can flexibly adjust the airflow path according to actual needs. In some applications, different airflow channels may need to be selected based on different operating modes or gas characteristics. For example, when it is necessary to quickly expel part of the gas from the chamber, the airflow channel corresponding to a certain oscillator can be used first; while when specific treatment or buffering of the gas is required, the airflow channel corresponding to another oscillator can be selected. This flexible airflow path selection capability improves the adaptability and functionality of the pump structure.

[0026] Furthermore, the outlet is located on the second side of the chamber; or The chamber is provided with an air inlet channel, the air inlet of which is located on the first side or the second side of the chamber. The air inlet channel extends along a first direction or along a second direction. One end of the air inlet channel is connected to one end of the inlet. The chamber has a fifth side. The opposite sides of the fifth side of the chamber are connected to the first side and the second side of the chamber. The outlet is located on the fifth side of the chamber.

[0027] Furthermore, the chamber includes a first chamber and a second chamber; the first chamber and the second chamber are each equipped with one of the oscillators; An air intake channel is provided between the first chamber and the second chamber; the inlet includes a first inlet located in the first chamber and a second inlet located in the second chamber; the first inlet and the second inlet are respectively connected to the air intake channel; The outlet includes a first outlet located on the second side of the first chamber and a second outlet located on the second side of the second chamber; A first space is formed between a first side of one of the oscillators and a first side of the first chamber; A second space is formed between the second side of one of the oscillators and the second side of the first chamber; Another first space is formed between the first side of the other oscillator and the first side of the second chamber; Another second space is formed between the second side of the other oscillator and the second side of the second chamber; The free end of one of the oscillators forms a first gap and a second gap with the first inlet; The free end of the other oscillator forms another first gap and another second gap with the second inlet; The first inlet, a first gap of one of the oscillators, a first space, and the first outlet are sequentially connected to form a first airflow channel; the first inlet, a second gap of one of the oscillators, a second space, and the first outlet are sequentially connected to form a second airflow channel; The second inlet, another first gap of the other oscillator, another first space and the second outlet are sequentially connected to form another first airflow channel; the second inlet, another second gap of the other oscillator, another second space and the second outlet are sequentially connected to form another second airflow channel.

[0028] In the above technical solution, the chamber is divided into a first chamber and a second chamber, each equipped with an oscillator, achieving independent management of airflow within each zone. The oscillators in each chamber operate independently, constructing independent first and second airflow channels through their respective first gaps, second gaps, first spaces, and second spaces. This zoned design allows different chambers to independently adjust and control airflow according to actual needs.

[0029] The two oscillators operate independently in two separate chambers, essentially functioning as two independent pumping units operating simultaneously. Each oscillator generates airflow through its own vibration, drawing gas in through the inlet and expelling it through the airflow channel. This parallel operation significantly increases the gas flow rate through the outlet per unit time, improving the overall pumping efficiency of the pumping structure.

[0030] Secondly, this application provides a piezoelectric fan, including the aforementioned pumping structure.

[0031] This application discloses a piezoelectric fan pumping structure and a piezoelectric fan. An oscillator is installed within a chamber, which has an inlet and an outlet. The free end of the oscillator forms a first gap and a second gap with the inlet. A first space is formed between a first side of the oscillator and a first side of the chamber. A second space is formed between a second side of the oscillator and a second side of the chamber. The inlet, first gap, first space, and outlet are sequentially connected to form a first airflow channel. The inlet, second gap, second space, and outlet are sequentially connected to form a second airflow channel. When the free end of the oscillator vibrates towards the first space, the pressure in the first space increases, causing gas to be discharged from the outlet, and the volume of the second space increases. The increased pressure in the first space causes gas in the second space to be discharged from the outlet when the free end of the oscillator vibrates towards the second space. Simultaneously, the decreased volume of the second space causes the pressure in the second space to increase again, causing gas in the first space to be discharged from the outlet when the free end of the oscillator vibrates towards the first space. This cycle repeats, allowing the energy generated by compressing the first space to be used to compress the second space and discharge gas, thereby reducing energy loss from oscillation and improving the energy utilization rate of the oscillator. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of a pump structure according to one embodiment.

[0034] Figure 2 This is a schematic diagram of the pump structure according to another embodiment.

[0035] Figure 3 This is a diagram showing the relationship between pressure changes, gap changes, and flow rate of a pump structure in one embodiment.

[0036] Figure 4 This is a graph showing the integral flow rate variation of a gap in a pump structure under one embodiment.

[0037] Figure 5 The diagram shows the integral flow rate variation of a gap in the pump structure under another embodiment and in another case.

[0038] Figure 6 This is a graph showing the integral flow rate variation of a gap in the pump structure in another embodiment and another case.

[0039] Figure 7This is a graph showing the relationship between the flow resistance ratio and amplitude of the gap in a pump structure according to one embodiment. Figure 7 In the middle, the benchmark design is Figure 1 The initial height of the first gap a 5 is 30µm, the length extending into the inlet 17 is 100µm, and the flow resistance at the amplitude of 15µm is denoted as A0; the lengths of the first oscillator extending into the inlet 2 are adjusted to 50µm, 100µm, 200µm, and 300µm, and the flow resistance of each adjustment design is denoted as A. N , where N is a positive integer greater than or equal to 1; Figure 7 The ordinate is A N / A0.

[0040] Figure 8 This is a graph showing the relationship between the flow resistance ratio and amplitude of the gap in the pump structure of another embodiment. Figure 8 In the middle, the benchmark design is Figure 2 The length of the 20mm spacing is 5µm. At an amplitude of 15µm, the corresponding flow resistance is denoted as A. 00 Adjusting the length of the 20-pitch gap resulted in designs with pitch lengths of 5µm, 10µm, and 15µm. The flow resistance of each design is denoted as A. Y , where Y is a positive integer greater than or equal to 1; Figure 8 The vertical axis has a flow resistance ratio of A. Y / A 00 .

[0041] Figure 9 This is a graph showing the relationship between the flow resistance ratio and amplitude of the gap in the pump structure. #1 represents the relationship between the flow resistance ratio and amplitude of the gap in one embodiment of the pump structure; #2 represents the relationship between the flow resistance ratio and amplitude of the gap in another embodiment of the pump structure. Figure 9 In the middle, the baseline design of #1 is Figure 7 The baseline design, #2 is the baseline design. Figure 8 The baseline design.

[0042] Figure 10 This is a graph showing the relationship between the outlet pressure and flow rate of the pump structure. In this graph, #1 represents the pressure and flow rate relationship of one embodiment of the pump structure; #2 represents the pressure and flow rate relationship of another embodiment of the pump structure. Figure 10 In the middle, the baseline design of #1 is Figure 7 The baseline design, #2 is the baseline design. Figure 8 The baseline design.

[0043] Figure 11 This is a schematic diagram of the first pump structure in its initial state.

[0044] Figure 12This is a schematic diagram of the structure in the first state where the third and fourth oscillators vibrate in opposite directions.

[0045] Figure 13 This is a schematic diagram of the structure in the second state where the third and fourth oscillators vibrate in the same direction.

[0046] Figure 14 This is a schematic diagram of the second pump structure in its initial state.

[0047] Figure 15 This is a schematic diagram of the internal structure of a piezoelectric fan with a first pumping structure.

[0048] Figure 16 This is a schematic diagram of the internal structure of a piezoelectric fan with a second pumping structure.

[0049] Figure 17 This is a schematic diagram of the overall external structure of a piezoelectric fan with a third pumping structure.

[0050] Figure 18 This is a schematic diagram of the internal structure of a piezoelectric fan with a third pumping structure.

[0051] Figure 19 This is a schematic diagram of a piezoelectric fan with a fourth pumping structure, according to one embodiment.

[0052] Figure 20 for Figure 19 A schematic diagram of the left-side view structure.

[0053] Figure 21 for Figure 20 A schematic diagram of the structure of section AA in the middle.

[0054] Figure 22 This is a schematic diagram of a piezoelectric fan with a fourth pumping structure, representing another embodiment.

[0055] The attached figures are labeled as follows: 100-Cavity, 1-Oscillator, 2-Inlet, 3-Outlet, 4-Free end, 5-First gap a, 6-Second gap a, 7-First side a of the oscillator, 8-Second side a of the oscillator, 9-First side of the chamber, 10-Second side of the chamber, 11-First space, 12-Second space, 13-Upper shell, 14-Lower shell, 15-Inlet air passage, 16-Base, 17-Length extending into the inlet, 18-First gap b, 19-Second gap b, 20-Spacing, 21-First length, 22-Second length, 23-Third oscillator, 24-Fourth oscillator, 25-First gas passage, 26-First inlet a, 27-Second inlet a; 28-Third side of the chamber, 29-Fourth side of the chamber, 30-First gap c, 31-Second gap c, 32-First gap d, 33-Second gap d, 34-First space a, 35 - Second space a, 36- First space b, 37- Second space b, 38- Second gas channel, 39- Inlet channel, 40- First chamber, 41- Second chamber, 42- Fifth vibrator, 43- Sixth vibrator, 44- First inlet b, 45- Second inlet b, 46- First outlet, 47- Second outlet, 48- First space c, 49- Second space c, 50- First space d, 51- Second space d, 52- First gap e, 53- Second gap e, 54- First gap f, 55- Second gap f, 56- First piezoelectric fan, 57- First pumping structure, 58- Second piezoelectric fan, 59- Second pumping structure, 60- Outlet a, 61- Outlet b, 62- Inlet, 63- Third pumping structure, 64- Third piezoelectric fan, 65- First sub-outlet, 66- Second sub-outlet, 67- Fifth side of the chamber. Detailed Implementation

[0056] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0057] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0058] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0060] To improve or solve the technical problem of low energy utilization of oscillator 1 in related technologies, in a first aspect, embodiments of this application provide a pumping structure for a piezoelectric fan, see reference. Figures 1-22 As shown, the device includes a chamber 100; an oscillator 1 is disposed within the chamber 100; the chamber 100 has an inlet 2 and an outlet 3; the free end 4 of the oscillator forms a first gap and a second gap (e.g., first gap a 5 and second gap a 6) with the inlet 2; the oscillator 1 has a first side a 7 and a second side a 8 of the oscillator arranged opposite to each other; the chamber 100 has a first side 9 and a second side 10 of the chamber arranged opposite to each other; a first space 11 is formed between the first side a 7 of the oscillator and the first side 9 of the chamber; a second space 12 is formed between the second side a 8 of the oscillator and the second side 10 of the chamber; the inlet 2, the first gap, the first space 11 and the outlet 3 are sequentially connected to form a first airflow channel; the inlet 2, the second gap, the second space 12 and the outlet 3 are sequentially connected to form a second airflow channel.

[0061] For example, see Figure 1 and Figure 2 As shown, the pump structure includes a chamber 100; optionally, the chamber 100 includes an upper shell 13 and a lower shell 14; the upper shell 13 and the lower shell 14 are fastened together to form the chamber 100; optionally, the bottom of the upper shell 13 is a rectangular structure with an opening; a rectangular inlet 2 is provided on the left side of the upper shell 13 extending laterally; the lower shell 14 is an L-shaped structure, one side of the lower shell 14 extends into the bottom of the lower shell so that the other side of the lower shell 14 is offset from the upper shell 13 to form an air intake channel 15; the air intake channel 15 formed between the upper shell 13 and the lower shell 14 allows external gas to pass through the inlet 2.

[0062] A first space 11 is formed between the upper inner wall of chamber 100 and the upper side of oscillator 1, and a second space 12 is formed between the lower inner wall of chamber 100 and the lower side of oscillator 1. The left end of oscillator 1 is a free end 4. It can be understood that the free end 4 of oscillator 1 can extend into inlet 2 or outside inlet 2, thus forming a first gap and a second gap with inlet 2. See, for example. Figure 1 As shown, inlet 2, first gap a 5, first space 11, and outlet 3 are sequentially connected to form a first airflow channel; inlet 2, second gap a 6, second space 12, and outlet 3 are sequentially connected to form a second airflow channel; see reference. Figure 2 As shown, inlet 2, first gap b18, first space 11 and outlet 3 sequentially form a first airflow channel; inlet 2, second gap b19, second space 12 and outlet 3 sequentially connect to form a second airflow channel.

[0063] Optionally, a base 16 is provided below the oscillator 1, which serves to support the oscillator 1 and prevent airflow turbulence caused by the mixing of gas discharged from the first space 11 and gas discharged from the second space 12.

[0064] The volume and pressure of the first space 11 and the second space 12 will change with the vibration of the free end 4 of the oscillator. According to the ideal gas law, it can be deduced that pressure is inversely proportional to volume, that is, an increase in pressure in the first space 11 and the second space 12 is accompanied by a decrease in volume. (See also...) Figure 1 As shown, when the drive signal is input, when the free end 4 of the oscillator vibrates upward and approaches the upper wall of the inlet 2, the first gap a 5 shrinks, the flow resistance increases, and at the same time, the first space 11 is compressed, making the volume of the first space 11 smaller and the pressure increase. The volume of the second space 12 increases, so that the gas in the inlet 2 enters the second space 12 and is discharged from the outlet 3. When the free end 4 of the oscillator vibrates downward, the pressure in the compressed first space 11 increases the force of the free end 4 of the oscillator pressing the gas in the second space 12 downward, and the gas in the second space 12 is discharged from the outlet.

[0065] When the oscillator vibrates upward to its limit position, the resistance of the first gap a5 is relatively large, causing the gas in the first space to be discharged from the outlet 3, while only a very small amount of gas is discharged from the first gap a5. Simultaneously, when the free end vibrates downward, the second gap a6 decreases, the flow resistance increases, the volume of the second space decreases, and the pressure increases. When the free end vibrates downward to its limit position, the resistance of the second gap a6 is relatively large, causing the gas in the second space a35 to be discharged from the outlet 3. Within one time period (i.e., the free end vibrates upward and downward once back to the initial state), a large amount of gas flows into the first space 11 or the second space 12 alternately through the first gap a5 or the second gap a6, while a small amount of gas flows out from the first gap a5 or the second gap a6, thus establishing a positive net flow rate from the inlet 2 to the outlet 3.

[0066] In the above scheme, when the free end 4 of the oscillator vibrates towards the first space 11, causing the first gap to decrease, the gas flow rate of the second airflow channel is greater than that of the first airflow channel. At this time, the pressure in the first space 11 is greater than the pressure in the second space 12. When the free end 4 of the oscillator vibrates towards the second space 12, causing the second gap to decrease, the gas flow rate of the first airflow channel is greater than that of the second airflow channel. At this time, the pressure in the first space 11 is less than the pressure in the second space 12. In the above process, the pressure generated by compressing the first space 11 and the second space 12 can supplement the vibration energy of the oscillator 1, thereby achieving the purpose of improving the energy utilization rate of the oscillator 1.

[0067] The above technical solution constructs a first airflow channel and a second airflow channel by placing an oscillator 1 inside the chamber 100 and forming a first gap and a second gap between the free end 4 of the oscillator 1 and the inlet 2, and simultaneously forming a first space 11 and a second space 12 between the oscillator 1 and the side wall of the chamber 100. This structure allows the oscillator 1 to simultaneously drive two airflows to flow along the two channels when it vibrates. Compared with the traditional single-channel structure, this structure can make fuller use of the energy generated by the vibration of the oscillator 1, effectively improving the energy utilization rate of the oscillator 1 and reducing energy loss.

[0068] Therefore, in this embodiment of the application, when the free end 4 of the oscillator vibrates toward the first space 11, the pressure of the first space 11 increases, causing the gas in the first space 11 to be discharged from the outlet 3, and the volume of the second space 12 increases. The increased pressure in the first space 11 causes the gas in the second space 12 to be discharged from the outlet 3 when the free end 4 of the oscillator vibrates toward the second space 12. At the same time, the decrease in the volume of the second space 12 causes the pressure in the second space 12 to increase, and this pressure causes the gas in the first space 11 to be discharged from the outlet 3 when the free end 4 of the oscillator vibrates toward the first space 11. This cycle repeats, so that the energy generated by squeezing the first space 11 can be periodically used to squeeze the second space 12 to discharge the gas in the second space 12, thereby reducing the energy loss of the oscillator 1 and improving the energy utilization rate of the oscillator 1.

[0069] Furthermore, the oscillator 1 includes a first oscillator; the free end 4 of the first oscillator extends into the inlet 2, and a first gap is formed between the first side of the free end 4 of the first oscillator and the inlet 2; a second gap is formed between the second side of the free end 4 of the first oscillator and the inlet 2.

[0070] In some embodiments, see Figure 1 As shown, oscillator 1 is the first oscillator. When the free end 4 of the first oscillator extends into the inlet 2, the free end 4 and the inlet 2 form a first gap a5 on the upper side of the free end 4 and a second gap a6 on the lower side of the free end 4. When the free end 4 of the first oscillator vibrates upward, the first gap a5 decreases, the volume of the second space 12 increases, thereby reducing the amount of gas entering the first space 11 and increasing the pressure of the first space 11. When the free end 4 of the first oscillator vibrates downward, the first gap a5 increases, the volume of the second space 12 decreases, thereby increasing the amount of gas entering the first space 11 and decreasing the pressure of the first space 11. When the oscillator vibrates periodically up and down, the gas will periodically be discharged from the first airflow channel and the second airflow channel.

[0071] In the above technical solution, the free end 4 of the first oscillator extends into the inlet 2, allowing the oscillator 1 to interact more directly with the incoming airflow during vibration. The vibrational energy of the oscillator 1 can be transferred to the airflow more quickly and effectively, driving the airflow along the two channels. Compared with a structure where the oscillator 1 does not extend into the inlet 2, this design reduces energy loss during transmission and improves the efficiency of converting the vibrational energy of the oscillator 1 into airflow kinetic energy, thereby generating a larger airflow rate and velocity under the same vibrational power of the oscillator 1.

[0072] In the above technical solution, the free end 4 of the first oscillator extends into the inlet 2, allowing the vibration energy to be transferred to the airflow more concentratedly, reducing energy loss caused by insufficient contact between the oscillator 1 and the airflow. The extended design of the first oscillator and the aforementioned gap are suitable for achieving macroscopic airflow control with high flow rate and high pressure.

[0073] Furthermore, when the free end 4 of the first oscillator is not vibrating, the height of the first gap and the height of the second gap may be the same or different; the length of the free end 4 of the oscillator extending into the inlet 2 is 50-300um.

[0074] Optionally, the height of the first gap and the height of the second gap may be the same or different; the length of the first oscillator extending into the inlet 2 may be 50um, 100um, 200um, 250um or 300um, etc., which will not be elaborated here.

[0075] Optionally, the heights of the first gap a5 and the second gap a6 are the same. For example, if the heights of the first gap a5 and the second gap a6 are 30 μm, the free end 4 of the oscillator will produce a vibration with an amplitude of ±16 μm and a vibration frequency of 26.5 kHz. The pressure in the first space 11 and the second space 12 is ±2.5 kPa, and the height variation of the first gap a5 and the second gap a6 is approximately ±16 μm. The up-and-down vibration process of the free end 4 of the first oscillator is simulated. The following uses the first gap a5 as an example to illustrate the relationship between pressure changes, gap size changes, and flow rate changes during the pumping process of the pumping structure. The final flow rate change of the first gap a5 is shown in [reference needed]. Figure 3 and Figure 4 As shown. See also Figure 3 and Figure 4 As shown, with the periodic change of the first gap a5, the pressure in the first space 11 changes periodically, thus causing the flow rate to change periodically, resulting in a change in net flow rate. (See reference...) Figure 4 As shown, the inflow-to-outflow ratio of the first gap a 5 is approximately 4:1, resulting in a net flow rate (a negative value indicates the amount of gas discharged).

[0076] For example, by adjusting the heights of the first gap a5 and the second gap a6 to 40µm, the free end 4 of the oscillator generates an amplitude of ±20µm, while other parameters remain unchanged. The up-and-down vibration process of the free end 4 of the first oscillator is simulated. The first gap a5 is used as an example below. See details... Figure 5 As shown. The inlet-outlet flow ratio of the first gap a5 is approximately 6:1, resulting in a downward net flow (a negative value indicates the amount of gas discharged).

[0077] For example, by adjusting the heights of the first gap a5 and the second gap a6 to 50µm, the free end 4 of the oscillator generates an amplitude of ±45µm, while keeping other parameters unchanged. The up-and-down vibration process of the free end 4 of the first oscillator is simulated. The first gap a5 is used as an example below. See details... Figure 6 As shown, the inflow-to-outflow ratio of the first gap a 5 is approximately 9:1, resulting in a downward net flow (a negative value indicates the amount of gas discharged).

[0078] The experimental results obtained from simulations with the first oscillator extending into inlet 2 at lengths of 50µm, 100µm, 200µm, and 300µm are shown in the attached figures. Figure 7 It can be seen that the increased length of the free end 4 of the first oscillator extending into the inlet 17 is beneficial to improving the flow resistance ratio.

[0079] It should be noted that the flow resistance ratio refers to the ratio of the flow resistance of the corresponding gap under two different conditions. The flow resistance can be calculated using formulas (2) and (3). Figures 7-9 The flow resistance ratio on the vertical axis refers to the ratio of the flow resistance under the adjusted design condition to the flow resistance under the baseline design condition.

[0080] by Figure 7 For example, the baseline design is Figure 1 The initial height of the first gap a 5 is 30µm, the inlet extension length 17 is 100µm, and the flow resistance at the amplitude of 15µm is denoted as A0. Adjustments to the inlet extension length 17 yielded designs with extension lengths of 50µm, 100µm, 200µm, and 300µm for the first oscillator at the inlet 2. The flow resistance of each adjustment design is denoted as A. N . Figure 7 The ordinate is A N / A0.

[0081] For example, when the inlet length 17 equals 300µm, the flow resistance corresponding to the first gap a5 is denoted as A1. Figure 7 The flow resistance ratio corresponding to this design adjustment is equal to A1 divided by A0; when the inlet length 17 equals 300um, the flow resistance corresponding to the first gap a5 is denoted as A2. Figure 7 The corresponding flow resistance ratio for this design adjustment is equal to A2 divided by A0. And so on. See also... Figure 7 It can be seen that increasing the inlet length by 17 can improve the flow resistance ratio.

[0082] In the above technical solution, when the free end 4 of the first oscillator is not vibrating, the heights of the first gap and the second gap are the same, which means that the airflow entering from the inlet 2 can be evenly distributed into the first airflow channel and the second airflow channel in the initial stage. This symmetrical airflow distribution method makes the airflow rate and velocity in the two channels basically the same in the initial stage, which is conducive to more precise control and adjustment of the airflow in the later stage, and ensures the stability and balance of the entire pump structure during operation.

[0083] In the above scheme, if the insertion length is less than 50 μm, the interaction range between the free end 4 of the oscillator and the inlet 2 is insufficient, resulting in a weakened airflow control capability. If the insertion length is greater than 300 μm, the free end 4 of the oscillator may collide with the inlet 2 during vibration due to inertia or resonance of the chamber 100, causing structural damage or a surge in noise. An excessively long insertion length will increase the resistance to airflow and reduce the flow rate.

[0084] Optionally, the height of the first gap a5 can be 1.2, 1.4, 1.8 or 2 times the amplitude of the first oscillator, which is not limited here.

[0085] Furthermore, the oscillator 1 includes a second oscillator; the free end 4 of the second oscillator has a gap 20 with the inlet 2; the first corner of the free end 4 of the second oscillator has a first gap with the inlet 2; the second corner of the free end 4 of the second oscillator has a second gap with the inlet 2; the first corner is connected to the first side of the oscillator, and the second corner is connected to the second side of the second oscillator.

[0086] In some embodiments, see Figure 2 As shown, the oscillator 1 includes a second oscillator; the free end 4 of the second oscillator has a distance 20 between it and the inlet 2, and the first corner of the free end 4 of the second oscillator has a first gap b 18 between it and the inlet 2; the second corner of the free end 4 of the second oscillator has a second gap b 19 between it and the inlet 2. The upper surface of the first corner is on the same plane as the upper surface of the free end 4 of the second oscillator, and the lower surface of the second corner is on the same plane as the lower surface of the free end 4 of the second oscillator.

[0087] In the above technical solution, the free end 4 of the second oscillator is spaced 20mm from the inlet 2, and its first and second corners form a first gap and a second gap with the inlet 2, respectively. This design allows the airflow to be guided not only horizontally (assuming the inlet 2 is horizontal) by the second oscillator when entering the chamber 100, but also further segmented vertically (based on the directional change caused by the corner design). The airflow can enter different airflow channels from more dimensions. Compared with a single oscillator structure, the airflow distribution is more detailed and precise, which helps to form a more complex and orderly airflow field and meet the diverse needs of different application scenarios for airflow distribution.

[0088] Optionally, the upper surface of the first corner is on the same plane as the upper surface of the oscillator, and the lower surface of the second corner is on the same plane as the lower surface of the oscillator, thus defining the positions of the two corners. This connection method allows the first and second gaps to naturally connect with the spaces on both sides of the oscillator, which is more conducive to forming stable first and second airflow channels. The airflow can flow smoothly along these channels, reducing turbulence and energy loss at channel transitions and improving pumping efficiency.

[0089] In the above scheme, when the free end 4 of the oscillator vibrates up and down, the first corner and the second corner alternately move closer to or further away from the inlet 2, causing the first gap and the second gap to change periodically, forming a "inhalation-exhaustion" pumping effect.

[0090] The first and second corner portions of the free end 4 of the second oscillator form a first gap and a second gap with the edge of the inlet 2, respectively. The corner structure makes the gap distribution more concentrated in the key area of ​​the oscillator 1's vibration, enhancing the local sensitivity of the airflow response. The second oscillator adopts a composite design of spacing 20 and corner gaps, which is suitable for achieving high-precision, directional micro airflow control.

[0091] Furthermore, the size of the spacing 20 is 0.2-1 times the amplitude of the second oscillator. Optionally, the size of the spacing 20 can be 0.2, 0.3, 0.4, 0.5, 0.6, 0.8, or 1 times the amplitude of the second oscillator, etc., and is not limited here.

[0092] In the above scheme, when the spacing 20 is 0.2-1 times the amplitude, precise control of airflow intake can be achieved. Within this range, the distance between the free end 4 and the inlet 2 of the second oscillator will change periodically during vibration, but will always remain within a suitable range. This prevents the oscillator 1 from frequently colliding with the inlet 2 during vibration due to an excessively small spacing 20, thus hindering normal airflow entry; and also prevents the airflow from being too dispersed during entry due to an excessively large spacing 20, resulting in poor airflow guidance.

[0093] An appropriate spacing 20 helps maintain a stable airflow channel during the vibration of the oscillator 1. As the oscillator 1 vibrates, the variation in the spacing 20 between its free end 4 and the inlet 2 guides the airflow to form a specific flow pattern. When the spacing 20 is within the range of 0.2-1 times the amplitude, the airflow can form a relatively stable airflow bundle at the first and second gaps, flowing orderly along the first and second airflow channels. This reduces airflow turbulence and backflow within the channels, improves the flow efficiency of the airflow channels, and enables the pump structure to deliver gas more efficiently.

[0094] In the above scheme, the size of the gap 20 needs to be such that when the oscillator 1 vibrates toward the first space 11, the size of the first gap can be minimized to minimize the flow rate of gas flowing into the first space 11. At the same time, it is also necessary to prevent the oscillator 1 from touching the wall of the inlet 2 when vibrating. For the above considerations, the size of the gap 20 is 0.2-1 times the amplitude of the second oscillator.

[0095] Optionally, the size of the spacing 20 can be 5-15 μm, provided that it is 0.2-1 times the amplitude of the second oscillator. Specifically, the spacing 20 can be 5 μm, 6 μm, 7 μm, 8 μm, 10 μm or 15 μm, and there is no limitation here.

[0096] Optionally, the first gap b 18 and the second gap b 19 are the same size. Simulations were performed on the above scheme under different gaps 20. See [reference needed]. Figure 8 It can be seen that the free end 4 of the second oscillator produces different flow resistance ratios under different amplitudes and different spacings 20.

[0097] Optionally, the calculation method for the flow resistance corresponding to each gap in this flow resistance ratio can be found in formulas (2) and (3). Figure 7 As shown, increasing the inlet length by 17 can increase the flow resistance ratio, with a more significant improvement. The maximum flow resistance ratio is 20-25; see reference [link / reference needed]. Figure 8 As shown, reducing the spacing of 20 increases the flow resistance ratio, with a maximum flow resistance ratio of approximately 35-40. Under the same amplitude, this scheme is comparable to... Figure 7 Compared to related solutions, it has a larger flow resistance ratio.

[0098] The baseline design for #1 is as follows: Figure 1 The pump structure is shown. The initial height of the first gap a 5 is 30 μm, the inlet length 17 is 100 μm, and the amplitude of the free end 4 of the first oscillator is set at ±15 μm.

[0099] The baseline design for #2 is as follows: Figure 2 The pump structure is shown. The length of the spacing 20 is 5 μm, and the amplitude of the free end 4 of the second oscillator is set at ±15 μm.

[0100] Simulation parameter settings: In designs #1 and #2, the pressure difference between the first space 11 and the second space 12 is 1000 Pa. Simulations of the baseline designs for #1 and #2 yield the following results: Figure 9 and Figure 10 The results are shown.

[0101] See Figure 9 As shown, at an amplitude of ±10µm, the scheme with the second oscillator has a larger flow resistance ratio than the scheme with the first oscillator at the same amplitude; see reference. Figure 10 As shown, at a flow rate of less than 2 L / min, the second oscillator design produces a gas with a higher outlet pressure at the same flow rate.

[0102] Understandably, a pump structure with a flow resistance ratio corresponding to the flow resistance ratio of the gas from the inlet flow channel 15 can be selected to suit the product's requirements. (See also...) Figure 9 As shown, #1 exhibits a larger flow rate and lower pressure. For applications with large space requirements and high heat dissipation power consumption, such as laptops and desktop computers, a pump structure with slightly lower pressure and higher gas flow rate can be chosen. #2 exhibits higher pressure and lower flow rate. In miniaturized heat dissipation applications such as mobile phones, watches, and smart glasses, it requires less heat dissipation space and lower heat dissipation power consumption, with a slightly lower flow rate and higher pressure. If both pressure and flow rate are required, a combination of the two pump structures can be used.

[0103] Furthermore, the flow resistance of the first gap is a first flow resistance; the flow resistance of the second gap is a second flow resistance; the first flow resistance increases as the second flow resistance decreases, or the first flow resistance decreases as the second flow resistance increases; The first flow resistance conforms to the following formula (2): (2) in, First flow resistance; The pressure difference between the first space and the inlet. The gas flow rate through the first gap; The second flow resistance conforms to the following formula (3): (3) in, Second flow resistance; The pressure difference between the second space and the inlet. This represents the gas flow rate through the second gap.

[0104] In the above scheme, as the oscillator vibrates periodically, the first gap and the second gap change periodically, and the size of the first gap and the second gap have an inverse relationship. This makes the first flow resistance increase as the second flow resistance decreases, and the first flow resistance decreases as the second flow resistance increases. This ensures that the first airflow channel and the second airflow channel can be in a pumping state regardless of whether the oscillator vibrates upward or downward, thereby improving the energy utilization rate of the oscillator.

[0105] In order to generate a larger vibration amplitude and a greater pressure change, in some embodiments, it is necessary to increase the frequency while ensuring a larger amplitude.

[0106] The oscillator includes a substrate and a driving element for driving the substrate to vibrate; the driving frequency of the driving element and the mechanical vibration frequency of the substrate are consistent with the acoustic modal frequency of the cavity. The acoustic modal frequencies of the cavity conform to the following formula (1): (1) in, The length of the first space along the length direction of the oscillator or the length of the second space along the length direction of the oscillator; The acoustic modal frequency of the cavity; t is the speed of sound; n is an integer greater than or equal to zero; t is the speed of sound. The coefficient is given, and t is a number greater than 0. Optionally, 0.9 ≤ t ≤ 1.1.

[0107] For example, the length of the first space 11 along the length direction of the oscillator is a first length 21, and the length of the second space 12 along the length direction of the oscillator is a second length 22. The first length 21 can be the distance between the left inner wall and the right inner wall inside the cavity; the second length 22 can be the distance between the left inner wall of the second space 12 and the left outer wall of the base 16.

[0108] It is understandable that the first length 21 and the second length 22 can be calculated according to formula (1). Under different t values, the values ​​of the first length 21 and the second length 22 are different and the values ​​of the first length 21 and the second length 22 are relatively close. "Relatively close" means that the difference can not exceed 10% of the larger of the first length 21 and the second length 22.

[0109] Taking oscillator 1 as an example, the first oscillator can adopt the following parameters: the first gap a5 and the second gap a6 are the same; the height of the first gap a5 and the second gap a6 is 30µm; the free end 4 of the oscillator generates a vibration with an amplitude of ±16µm and a vibration frequency of 26.5kHz. The pressure in the first space 11 and the second space 12 is ±2.5kPa, and the height variation of the first gap a5 and the second gap a6 is approximately ±16µm. The length of the driving element is set to 3mm, and the substrate is connected and fixed to the chamber 100 through a cantilever beam with a thickness of 0.25mm. The frequency used for the first-order bending vibration of the first oscillator is 28.6kHz, and the maximum amplitude is 18µm; the frequency used for the second-order bending vibration of the first oscillator is 69kHz, and the maximum amplitude is 4.6µm.

[0110] When the driving element drives the substrate, it generates periodic vibrations. The driving element uses piezoelectricity / magnetoelectricity / thermoelectricity to convert electrical signals into deformation / force, providing a driving force with a frequency consistent with the driving signal. In some embodiments, see [reference needed]. Figure 1 As shown, the length of the first space 11 along the length direction of the oscillator 1 is the first length 21, and the length of the second space 12 along the length direction of the oscillator 1 is the second length 22. The first length 21 and the second length 22 are close, so that the vibration not only produces gap changes, but also excites pressure fluctuations, thereby generating a larger airflow and pressure with less energy consumption, and improving the pumping performance. The above scheme considers the acoustic cavity mode of the fluid cavity, adjusts the acoustic cavity mode frequency by adjusting the size, and makes the first length 21 and the second length 22 satisfy formula (1) according to the acoustic cavity resonance generation principle.

[0111] In the above scheme, when the driving frequency of the driving element, the mechanical vibration frequency of the oscillator 1, and the acoustic modal frequency of the chamber 100 are consistent, the system will resonate. Resonance allows the oscillator 1 to obtain maximum energy input from the driving element, efficiently converting electrical energy into mechanical vibration energy. Simultaneously, the vibrational energy of the oscillator 1 can be optimally coupled to the air inside the chamber 100, exciting the acoustic resonance of the chamber 100 and causing strong vibrations and orderly flow of air molecules. This efficient energy coupling and resonance enhancement greatly improves the energy utilization efficiency of the pumping structure, enabling the generation of greater airflow and pressure with less energy consumption, thereby enhancing pumping performance. The above formula provides a precise theoretical basis for the design of the chamber 100 dimensions, and the integer n in the formula provides flexibility in the design of the chamber 100 dimensions. Different n values ​​correspond to different chamber 100 dimensions and acoustic modal frequencies. Appropriate n values ​​can be selected to adjust the chamber 100 dimensions according to specific application requirements and performance requirements, thereby optimizing the performance of the pumping structure.

[0112] In some embodiments, the pumping structure is a first pumping structure 57. See also... Figures 11-13 As shown, the first pump structure 57 includes a chamber 100, and the number of oscillators 1 is two or more; the multiple oscillators 1 may include only the first oscillator, only the second oscillator, or both the first and second oscillators.

[0113] It is understood that oscillator 1 includes a third oscillator 23 and a fourth oscillator 24; both the third oscillator 23 and the fourth oscillator 24 can be either the first oscillator or the second oscillator. Optionally, the explanation will be based on the example where both the third oscillator 23 and the fourth oscillator 24 are the first oscillator.

[0114] The third vibrator 23 and the fourth vibrator 24 are disposed within the chamber 100; a first gas passage 25 is provided between the third vibrator 23 and the fourth vibrator 24; the chamber 100 has a third side and a fourth side disposed opposite to each other; the inlet 2 includes a first inlet a 26 and a second inlet a 27; the first inlet a 26 and the second inlet a 27 are respectively disposed on the third side 28 and the fourth side 29 of the chamber; the free end 4 of the third vibrator 23 forms a first gap c 30 and a second gap c 31 with the first inlet a 26; the free end 4 of the fourth vibrator 24 forms a first gap d 32 and a second gap d 33 with the second inlet a 27; a first space a 34 is formed between the first side of the third vibrator 23 and the first side of the chamber; a second space a 35 is formed between the second side of the third vibrator 23 and the second side of the chamber; a first space b 36 is formed between the first side of the fourth vibrator 24 and the first side of the chamber; a second space b is formed between the second side of the fourth vibrator 24 and the second side of the chamber. 37; First space a 34 and first space b 36 are connected; outlet 3 is located on the second side of the chamber; a second gas channel 38 is formed between the outer wall of the first gas channel 25 and the inner wall of the outlet 3; first inlet a 26, first gap c 30 of third vibrator 23, first space a 34, and first gas channel 25 are connected in sequence to form a first airflow channel a; first inlet a 26, second gap c 31 of third vibrator 23, second space a 35, and second gas channel 38 are connected in sequence to form a second airflow channel a; second inlet a 27, first gap d 32 of fourth vibrator 24, first space b 36, and first gas channel 25 are connected in sequence to form a first airflow channel b; second inlet a 27, second gap d 33 of fourth vibrator 24, second space b 37, and second gas channel 38 are connected in sequence to form a second airflow channel b.

[0115] See Figure 11 As shown, in the initial state, the free ends 4 of the third oscillator 23 and the fourth oscillator 24 of the first pumping structure 57 are in a horizontal state. The first pumping structure 57 can operate in two states: a first state and a second state. (See reference...) Figure 12As shown, in the first state, the free ends 4 of the third oscillator 23 and the fourth oscillator 24 vibrate in opposite directions, i.e., periodically vibrate up and down; this makes the overall spatial changes of the first space a 34 and the first space b 36 relatively stable with the overall spatial changes of the second space a 35 and the second space b 37.

[0116] In the second state, see Figure 13 As shown, the free ends 4 of the third oscillator 23 and the free ends 4 of the fourth oscillator 24 vibrate in the same direction, so that the pressure generated by the entire space of the first space a 34 and the first space b 36 can be superimposed, and a greater pressure is generated on the entire space of the second space a 35 and the second space b 37, thereby meeting the needs of a larger flow resistance scenario.

[0117] In the above technical solution, the free end 4 of each oscillator forms a first gap and a second gap with the corresponding inlet 2, and then forms a first space 11 and a second space 12 with the side wall of the chamber 100, respectively constructing an independent first airflow channel and a second airflow channel. This design allows airflow to enter from different inlets 2 and flow through their respective independent airflow channels. The two oscillators 1 independently and collaboratively guide the airflow, avoiding mutual interference and turbulence between airflows, and achieving orderly airflow distribution.

[0118] Because of the presence of multiple independent airflow channels, the system can flexibly adjust the airflow path according to actual needs. In some applications, different airflow channels may need to be selected based on different operating modes or gas characteristics. For example, when it is necessary to quickly expel some gas from chamber 100, the airflow channel corresponding to a certain oscillator can be used first; while when specific processing or buffering of the gas is required, the airflow channel corresponding to another oscillator can be selected. This flexible airflow path selection capability improves the adaptability and functionality of the pump structure.

[0119] In some embodiments, the pumping structure includes a second pumping structure 59. See also Figure 14 As shown, the second pumping structure 59 includes a chamber 100. The chamber 100 includes a first chamber 40 and a second chamber 41; the number of oscillators 1 is two or more.

[0120] It is understood that oscillator 1 includes a fifth oscillator 42 and a sixth oscillator 43; both the fifth oscillator 42 and the sixth oscillator 43 can be either the first oscillator or the second oscillator. Optionally, the explanation will be based on the example where both the fifth oscillator 42 and the sixth oscillator 43 are the first oscillator.

[0121] The first chamber 40 and the second chamber 41 are respectively provided with a fifth vibrator 42 and a sixth vibrator 43; an air intake channel 39 is provided between the first chamber 40 and the second chamber 41; the inlet 2 includes a first inlet b 44 provided in the first chamber 40 and a second inlet b 45 provided in the second chamber 41; the first inlet b 44 and the second inlet b 45 are respectively connected to the air intake channel 39; the outlet 3 includes a first outlet 46 provided on the second side of the first chamber 40 and a second outlet 47 provided on the second side of the second chamber; a first space c 48 is formed between the first side of the fifth vibrator 42 and the first side of the first chamber; a second space c 49 is formed between the second side of the fifth vibrator 42 and the second side of the first chamber 40; a first space d 50 is provided between the first side of the sixth vibrator 43 and the first side of the second chamber 41; a second space d 51 is provided between the second side of the sixth vibrator 43 and the second side of the second chamber; the free end 4 of the fifth vibrator 42 forms a first gap e 52 and a second gap e 52 with the first inlet b 44. 53; The free end 4 of the sixth oscillator 43 forms a first gap f 54 and a second gap f 55 with the second inlet b 45; the first inlet b 44, a first gap e 52 of the fifth oscillator 42, the first space c 48 and the first outlet 46 are connected in sequence to form a first airflow channel c; the first inlet b 44, the second gap e 53 of the fifth oscillator 42, the second space c 49 and the first outlet 46 are connected in sequence to form a second airflow channel c; the second inlet b 45, the first gap f 54, the first space d 50 and the second outlet 47 are connected in sequence to form a first airflow channel d; the second inlet b 45, the second gap f 55, the second space d 51 and the second outlet 47 are connected in sequence to form a second airflow channel d.

[0122] In the above technical solution, the chamber 100 is divided into a first chamber 40 and a second chamber 41, and each chamber is equipped with an oscillator 1, thereby achieving independent management of airflow in different zones. The oscillator 1 in each chamber 100 operates independently, constructing independent first and second airflow channels through their respective first gaps, second gaps, first spaces 11, and second spaces 12. This zoned design allows different chambers 100 to independently adjust and control airflow according to actual needs.

[0123] The two oscillators 1 operate independently in two separate chambers 100, equivalent to two independent pumping units operating simultaneously. Each oscillator 1 generates airflow through its own vibration, drawing gas in from the inlet 2 and discharging it through the airflow channel. This parallel operation significantly increases the gas flow rate through the outlet 3 per unit time, improving the overall pumping efficiency of the pumping structure.

[0124] Secondly, this application provides a piezoelectric fan, including the aforementioned pumping structure.

[0125] Exemplary, in some embodiments, see [reference] Figure 15 As shown, the piezoelectric fan includes a first piezoelectric fan 56, and the first piezoelectric fan 56 includes a first pumping structure 57.

[0126] Exemplary, in some embodiments, see [reference] Figure 16 As shown, the piezoelectric fan includes a second piezoelectric fan 58, and the second piezoelectric fan 58 includes a second pumping structure 59.

[0127] Exemplary, in some embodiments, see [reference] Figures 17-18 As shown, the piezoelectric fan includes a third piezoelectric fan 64, which includes a third pumping structure 63. The difference between the third pumping structure 63 and the first pumping structure 57 is that the outlet is located on the fifth side 67 of the chamber.

[0128] See Figures 17-18 As shown, the upper and lower sides of the fifth side 67 of the chamber are connected to the first side 9 and the second side 10 of the chamber, respectively; the first direction is the X direction. The second direction is the Y direction. The X direction can be parallel to the upper or lower side of the fifth side 67 of the chamber, and the Y direction can be parallel to the left or right side of the fifth side 67; when the chamber has a rectangular structure, the X direction can be horizontal and the Y direction can be vertical, which is not limited here.

[0129] The chamber is provided with an air inlet channel 15. The air inlet 62 of the air inlet channel 15 can be located on either the first side 9 or the second side 10 of the chamber. The air inlet channel 15 can extend along the X-direction or the Y-direction within the chamber, and the air outlet of the air inlet channel 15 can be connected to the air inlet of the chamber. The outlet is located on the fifth side of the chamber.

[0130] Optionally, the outlet includes outlet a 60 and outlet b 61; optionally, outlet a and outlet b are located on the rear side of the third piezoelectric fan 64 (i.e., the fifth side 67 of the chamber), and the inlet includes air inlet 62 located on the upper side of the third piezoelectric fan 64 (i.e., the first side 9 of the chamber); optionally, outlet a 60 communicates with the upper side of the first space 11; outlet b 61 communicates with the second space 12.

[0131] The remaining structure of the third pumping structure 63 is the same as that of the first pumping structure 57.

[0132] Exemplarily, in some embodiments, the piezoelectric fan includes a fourth pumping structure; the fourth pumping structure is related to... Figure 1 or Figure 2 The difference in the pump structure shown is: See Figures 19-22As shown, the chamber is provided with an air inlet channel 15; the outlet includes a first sub-outlet 65 and a second sub-outlet 66; the first direction is X-axis and the second direction is Y-axis.

[0133] Understandably, the air intake duct 15 can extend along the X direction, see reference. Figures 19-21 As shown. The air intake channel can also extend along the Y direction, see reference. Figure 22 As shown. The inlet channel 15 is connected to the inlet 2. Optionally, the lower end of the inlet channel 15 is connected to the left end of the inlet 2; the gas in the inlet channel 15 is used to enter the inlet 2 along the X direction, the gas in the first space 11 is used to flow out from the first sub-outlet 65 along the X direction, and the gas in the second space 12 is used to flow out from the second sub-outlet 66 along the X direction; the first direction and the second direction intersect. Optionally, the first direction and the second direction are perpendicular to each other.

[0134] The remaining structure of the fourth pumping structure is the same as Figure 1 or Figure 2 The pump structures shown are identical.

[0135] The functions and effects of the technical features in this technical solution that are similar to or related to the aforementioned technical solution are similar to those in the aforementioned technical solution, and the inventive concept and beneficial effects of this technical solution are similar to those in the aforementioned technical solution, so they will not be repeated here.

[0136] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A pumping structure for a piezoelectric fan, characterized in that, Includes a chamber; the chamber contains an oscillator; the chamber has an inlet and an outlet; The free end of the oscillator forms a first gap and a second gap with the inlet; the oscillator has a first side and a second side disposed opposite to each other; the cavity has a first side and a second side disposed opposite to each other; a first space is formed between the first side of the oscillator and the first side of the cavity; a second space is formed between the second side of the oscillator and the second side of the cavity. The inlet, the first gap, the first space, and the outlet are sequentially connected to form a first airflow channel; the inlet, the second gap, the second space, and the outlet are sequentially connected to form a second airflow channel.

2. The air pumping structure of the piezoelectric fan according to claim 1, characterized in that, The oscillator includes a first oscillator; the free end of the first oscillator extends into the inlet, and a first gap is formed between the first side of the free end of the first oscillator and the inlet; a second gap is formed between the second side of the free end of the first oscillator and the inlet.

3. The air pumping structure of the piezoelectric fan according to claim 2, characterized in that, When the free end of the first oscillator is not vibrating, the height of the first gap and the height of the second gap may be the same or different; the length of the free end of the oscillator extending into the inlet is 50-300um.

4. The air pumping structure of the piezoelectric fan according to claim 1, characterized in that, The oscillator includes a second oscillator; there is a gap between the free end of the second oscillator and the inlet; there is a first gap between the first corner of the free end of the second oscillator and the inlet; there is a second gap between the second corner of the free end of the second oscillator and the inlet; one side of the first corner is on the same plane as the first side of the second oscillator, and one side of the second corner is on the same plane as the second side of the second oscillator.

5. The air pumping structure of the piezoelectric fan according to claim 4, characterized in that, The spacing is 0.2-1 times the amplitude of the second oscillator.

6. The air pumping structure of the piezoelectric fan according to any one of claims 1-5, characterized in that, The chamber is provided with an air inlet channel; the outlet includes a first sub-outlet and a second sub-outlet; The air intake channel extends along a first direction or along a second direction; one end of the air intake channel is connected to one end of the inlet; the gas in the air intake channel is used to enter the inlet along the first direction, the gas in the first space is used to flow out from the first sub-outlet along the first direction, and the gas in the second space is used to flow out from the second sub-outlet along the first direction; the first direction and the second direction intersect.

7. The air pumping structure of the piezoelectric fan according to any one of claims 1-5, characterized in that, The oscillator includes a substrate and a driving element for driving the substrate to vibrate; the driving frequency of the driving element and the mechanical vibration frequency of the substrate are consistent with the acoustic modal frequency of the cavity. The acoustic modal frequencies of the cavity conform to the following formula (1): （1） in, The length of the first space along the length direction of the oscillator or the length of the second space along the length direction of the oscillator; The acoustic modal frequency of the cavity; t is the speed of sound; n is an integer greater than or equal to zero; t is the speed of sound. The coefficient is t, and t is a number greater than 0.

8. The air pumping structure of the piezoelectric fan according to any one of claims 1-5, characterized in that, The flow resistance of the first gap is a first flow resistance; the flow resistance of the second gap is a second flow resistance; the first flow resistance increases as the second flow resistance decreases, or the first flow resistance decreases as the second flow resistance increases; The first flow resistance conforms to the following formula (2): （2） in, First flow resistance; The pressure difference between the first space and the inlet. This refers to the gas flow rate through the first gap; The second flow resistance conforms to the following formula (3): （3） in, Second flow resistance; The pressure difference between the second space and the inlet. This represents the gas flow rate through the second gap.

9. The air pumping structure of the piezoelectric fan according to claim 1, characterized in that, The two oscillators are disposed within the cavity; A first gas passage is provided between the two oscillators; the chamber has a third side and a fourth side disposed opposite to each other; the inlet includes a first inlet and a second inlet; the first inlet and the second inlet are respectively disposed on the third side and the fourth side of the chamber; The free end of one of the oscillators forms a first gap and a second gap with the first inlet; The free end of the other oscillator forms another first gap and another second gap with the second inlet; A first space is formed between a first side of one of the oscillators and a first side of the chamber; A second space is formed between the second side of one of the oscillators and the second side of the chamber; Another first space is formed between the first side of the other oscillator and the first side of the chamber; Another second space is formed between the second side of the other oscillator and the second side of the chamber; The first space and the other first space are connected; A second gas channel is formed between the outer wall of the first gas channel and the inner wall of the outlet; The first inlet, a first gap of one of the oscillators, a first space, and the first gas channel are sequentially connected to form a first airflow channel; the first inlet, a second gap of one of the oscillators, a second space, and the second gas channel are sequentially connected to form a second airflow channel; The second inlet, a second gap of one of the oscillators, a second space, and the second gas channel are sequentially connected to form a second airflow channel; the second inlet, another second gap of the other oscillator, another second space, and the second gas channel are sequentially connected to form another second airflow channel.

10. The air pumping structure of the piezoelectric fan according to claim 9, characterized in that, The outlet is located on the second side of the chamber; or The chamber is provided with an air inlet channel, the air inlet of which is located on the first side or the second side of the chamber. The air inlet channel extends along a first direction or along a second direction. One end of the air inlet channel is connected to one end of the inlet. The chamber has a fifth side. The opposite sides of the fifth side of the chamber are connected to the first side and the second side of the chamber. The outlet is located on the fifth side of the chamber.

11. The air pumping structure of the piezoelectric fan according to claim 1, characterized in that, The chamber includes a first chamber and a second chamber; the first chamber and the second chamber are each equipped with one of the vibrators; An air intake channel is provided between the first chamber and the second chamber; the inlet includes a first inlet located in the first chamber and a second inlet located in the second chamber; the first inlet and the second inlet are respectively connected to the air intake channel; The outlet includes a first outlet located on the second side of the first chamber and a second outlet located on the second side of the second chamber; A first space is formed between a first side of one of the oscillators and a first side of the first chamber; A second space is formed between the second side of one of the oscillators and the second side of the first chamber; Another first space is formed between the first side of the other oscillator and the first side of the second chamber; Another second space is formed between the second side of the other oscillator and the second side of the second chamber; The free end of one of the oscillators forms a first gap and a second gap with the first inlet; The free end of the other oscillator forms another first gap and another second gap with the second inlet; The first inlet, a first gap of one of the oscillators, a first space, and the first outlet are sequentially connected to form a first airflow channel; the first inlet, a second gap of one of the oscillators, a second space, and the first outlet are sequentially connected to form a second airflow channel; The second inlet, another first gap of the other oscillator, another first space and the second outlet are sequentially connected to form another first airflow channel; the second inlet, another second gap of the other oscillator, another second space and the second outlet are sequentially connected to form another second airflow channel.

12. A piezoelectric fan, characterized in that, Includes the pump structure described in any one of claims 1-11.

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