Scribing device

Abstract

The invention is suitable for the technical field of semiconductor processing, and provides a scribing device which comprises a mounting bottom plate, a cutting blade, a sensor, a flow guide block and an air blowing assembly, the cutting blade is used for cutting a product, the sensor is used for detecting the working state of the cutting blade, the flow guide block is arranged on the mounting bottom plate, and the air blowing assembly is arranged on the mounting bottom plate. The air blowing assembly is arranged on the mounting bottom plate, and the air blowing assembly is used for conveying air to the sensor so as to blow away water covering the sensor. The scribing machine comprises the scribing device. By means of the mode of combining the flow guide block and the air blowing assembly, water vapor left on the sensor can be blown away while water vapor dredging and blocking redirection are achieved, the possibility that the sensor is interfered by the water vapor is reduced to the maximum extent, and therefore the reliability of the detection result of the cutting blade is improved; and therefore, the product cutting effect and stability are improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor processing, and particularly relates to a dicing device. BACKGROUND

[0002] In the field of precision manufacturing of semiconductor devices, electronic components, etc., as a key processing equipment, the dicing machine undertakes the important task of accurately cutting brittle materials such as wafers and ceramic substrates into units of the required size. In the working process of the dicing machine, in order to ensure the stability of the blade cutting, a sensor for detecting the blade is usually installed near the blade. At the same time, in order to ensure the smooth progress of the cutting and avoid the temperature of the blade being too high, cooling water is sprayed to the blade and the cutting position during the cutting process, but under the action of the high-speed rotating blade, the cooling water will splash onto the sensor, thereby affecting the detection accuracy of the sensor, and further causing the dicing machine to have the problem of low detection reliability of the blade, which affects the stability and cutting effect of the cutting. SUMMARY

[0003] The present application aims to provide a dicing device, which aims to solve the technical problem of low detection reliability of the cutting blade of the dicing device in the prior art.

[0004] The present application is implemented as follows: in a first aspect, a dicing device for cutting semiconductor products is provided, which comprises a mounting base plate, a cutting blade, a sensor, a flow guide block and a gas blowing assembly. The cutting blade is used for cutting the products. The sensor is used for detecting the working state of the cutting blade. The flow guide block is arranged on the mounting base plate. The flow guide block has a separation tip. The flow guide block is further provided with a first flow dividing groove and a second flow dividing groove. The first flow dividing groove and the second flow dividing groove are respectively located on the two sides of the separation tip, and the first flow dividing groove and the second flow dividing groove are in communication with each other at the separation tip. The second flow dividing groove is further provided with a blocking structure at one end away from the separation tip. The gas blowing assembly is arranged on the mounting base plate. The gas blowing assembly is used for delivering gas to the sensor to blow away the water covering the sensor.

[0005] In an optional embodiment, the flow guide block has a first working surface and a second working surface. The first working surface and the second working surface are both perpendicular to the cutting blade, and the first working surface and the second working surface intersect to form the separation tip. The first flow dividing groove is arranged on the first working surface, and the second flow dividing groove is arranged on the second working surface.

[0006] In an optional embodiment, the rotation axis of the cutting blade is arranged in a horizontal direction, and the included angle between the first working surface and the horizontal plane is 20° to 25°.

[0007] In an alternative embodiment, the blocking structure comprises a blocking block arranged inside the second diversion groove, and a blocking groove is further arranged on the inner side of the blocking block.

[0008] In an alternative embodiment, the cutting device further comprises a water blocking cover, which is arranged on the guide block or the mounting base plate, and covers one end of the first diversion groove away from the separation tip, so as to block the water jet from the first diversion groove.

[0009] In an alternative embodiment, the air blowing assembly comprises a guide, an adjusting screw and a gas distribution member, the guide is arranged on the mounting base plate, the gas distribution member is slidingly arranged on the guide, the guide has a protrusion, the adjusting screw is arranged through the protrusion, the adjusting screw has a rotation freedom around its own axis relative to the protrusion, the end of the adjusting screw is threadedly connected with the gas distribution member, the gas distribution member has a gas outlet structure, the guide has a gas inlet structure, the adjusting screw has a connecting channel for connecting the gas inlet structure and the gas outlet structure, and the sensor is arranged on the gas distribution member.

[0010] In an alternative embodiment, the gas inlet structure comprises a ring-shaped cavity and a gas inlet channel, the ring-shaped cavity is arranged on the protrusion, the ring-shaped cavity surrounds the adjusting screw, the gas inlet channel is used for connecting the ring-shaped cavity and an external gas path, the part of the adjusting screw located in the ring-shaped cavity is provided with a screw air inlet, and the screw air inlet is used for connecting the ring-shaped cavity and the connecting channel, so that the gas flow can enter the connecting channel through the ring-shaped cavity.

[0011] In an alternative embodiment, the number of sensors is two, and the two sensors are respectively located on the two sides of the cutting blade, the gas outlet structure comprises a first gas outlet channel and two second gas outlet channels, the outlet of the connecting channel is located at the end of the adjusting screw and is connected with the first gas outlet channel, the inlets of the two second gas outlet channels are connected with the first gas outlet channel, and the outlets of the two second gas outlet channels are respectively arranged towards the two sensors.

[0012] In an alternative embodiment, the two second gas outlet channels are arranged at an included angle, and the included angle between the two second gas outlet channels is 40° to 60°.

[0013] In an alternative embodiment, the mounting base plate is further provided with a limiting block and a pressing block, the limiting block and the mounting base plate form a mounting space for mounting the guide, and the pressing block is used for pressing at least part of the guide in the mounting space.

[0014] The technical effect of the present application relative to the prior art is that the cutting blade is provided on the mounting base, and the semiconductor product can be cut by the cutting blade. During the operation of the cutting blade, the cutting blade can be monitored by the sensor to ensure the cutting effect and stability. The flow guide block and the air blowing assembly are also provided on the mounting base. The flow guide block has a separation tip. The first and second flow distribution grooves are provided on the flow guide block and located on the two sides of the separation tip. The first and second flow distribution grooves are in communication at the separation tip. The second flow distribution groove is provided with a blocking structure at the end away from the separation tip. In addition, the air blowing assembly is also provided on the mounting base.

[0015] Compared with the prior art, the flow guide block can be arranged behind the sensor in the rotation direction of the cutting blade, and the separation tip can be arranged downward. The second flow distribution groove can be arranged toward the cutting blade. One end of the first flow distribution groove is in communication with the second flow distribution groove at the separation tip, and the other end extends away from the cutting blade. When the water vapor flow generated by the high-speed rotation of the cutting blade moves to the flow guide block, the water vapor flow can be separated by the separation tip. Most of the water vapor can enter the first flow distribution groove and be guided to the area away from the sensor and the cutting blade through the first flow distribution groove. A small amount of remaining water vapor will be thrown into the second flow distribution groove by the cutting blade and flow back to the separation tip along the second flow distribution groove after being blocked by the blocking structure, so as to realize the diversion and blocking of the water vapor. Thus, the purpose of diverting and blocking the water vapor can be achieved.

[0016] Finally, when a small amount of water vapor covers the sensor, the air blowing assembly can deliver gas to the sensor to blow the water vapor covering the sensor away from the sensor, so as to avoid the interference of the residual water vapor with the sensor. Through the combination of the flow guide block and the air blowing assembly, the residual water vapor on the sensor can be blown away while realizing the diversion and blocking of the water vapor. The possibility of the interference of the water vapor with the sensor is greatly reduced, the reliability of the detection result of the cutting blade is improved, and the cutting effect and stability are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application or the prior art description. Obviously, the drawings described below are only some embodiments of the present application. Those skilled in the art can obtain other drawings according to these drawings without any creative effort.

[0018] Figure 1 is a structural schematic view of a slicing device provided by the embodiment of the present application; Figure 2 is a structural schematic view of a flow guide block adopted by the embodiment of the present application; Figure 3 This is a schematic diagram of the air blowing assembly used in the embodiments of the present invention; Figure 4 This is a schematic cross-sectional view of the air blowing assembly used in the embodiments of the present invention. Figure 1 ; Figure 5 This is a schematic cross-sectional view of the air blowing assembly used in the embodiments of the present invention. Figure 2 ; Figure 6 yes Figure 4 A magnified structural diagram of point A in the middle.

[0019] Explanation of reference numerals in the attached figures: 1. Mounting base plate; 2. Cutting blade; 3. Sensor; 4. Guide block; 41. First diversion groove; 42. Second diversion groove; 43. Separating tip; 44. First working surface; 45. Second working surface; 46. Cutting block; 461. Cutting groove; 5. Air blowing assembly; 51. Guide component; 511. Protrusion; 52. Adjusting screw; 53. Air distribution component; 54. Air intake structure; 541. Annular cavity; 542. Air intake channel; 55. Air outlet structure; 551. First air outlet channel; 552. Second air outlet channel; 56. Connecting channel; 57. Screw air inlet; 58. Air circuit connector; 59. Mounting bushing; 6. Cooling water manifold; 7. Water baffle; 8. Limiting block; 9. Clamping block. Detailed Implementation

[0020] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention. In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. In this embodiment, according to Figure 1 The XYZ rectangular coordinate system established in the text is defined as follows: the side located in the positive direction of the X-axis is defined as front, and the side located in the negative direction of the X-axis is defined as back; the side located in the positive direction of the Y-axis is defined as left, and the side located in the negative direction of the Y-axis is defined as right; the side located in the positive direction of the Z-axis is defined as up, and the side located in the negative direction of the Z-axis is defined as down.

[0021] In addition, the terms "first", "second", etc. are used only for descriptive purposes and should not be construed as indicating or implying relative importance or an indicated number of technical features. Therefore, the features defined as "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited. In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0022] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below in combination with the drawings and examples.

[0023] Please refer to Figures 1 to 6 As shown in the drawings, in the embodiment of the present application, a dicing device is provided for cutting semiconductor products, the dicing device comprises a mounting base plate 1, a cutting blade 2, a sensor 3, a flow guide block 4 and a blowing assembly 5, the cutting blade 2 is used for cutting the product, the sensor 3 is used for detecting the working state of the cutting blade 2, the flow guide block 4 is arranged on the mounting base plate 1, the flow guide block 4 has a separation tip 43, the flow guide block 4 is further provided with a first flow dividing groove 41 and a second flow dividing groove 42, the first flow dividing groove 41 and the second flow dividing groove 42 are respectively located on the two sides of the separation tip 43, and the first flow dividing groove 41 and the second flow dividing groove 42 are in communication with each other at the separation tip 43, the second flow dividing groove 42 is further provided with a blocking structure at the end away from the separation tip 43, the blowing assembly 5 is arranged on the mounting base plate 1, and the blowing assembly 5 is used for conveying gas to the sensor 3 to blow away the water covering the sensor 3.

[0024] Specifically, the mounting base plate 1 refers to a support component with a certain volume, and the mounting base plate 1 can be block-shaped, plate-shaped or combined in multiple shapes. The cutting blade 2 refers to a disc-shaped component with a certain diameter, which can cut the product through high-speed rotation. The cutting blade 2 can be arranged on the main shaft. The high-speed rotation of the cutting blade 2 can be realized by connecting the cutting blade 2 with the output shaft of the driving assembly. The sensor 3 refers to a component that can detect the state of the blade, and the sensor 3 can identify the states such as blade wear, blade collapse, radial runout, fracture risk and life consumption in real time, so as to ensure the cutting accuracy, yield and equipment safety. The sensor 3 can be installed on the mounting base plate 1, or can be installed on other components, such as the air blowing assembly 5. The sensor 3 can adopt a laser displacement sensor 3 or an acoustic vibration sensor 3, and the sensor 3 can be installed on the mounting base plate 1 or other components.

[0025] The flow guide block 4 refers to a component with a certain volume, and the flow guide block 4 can be block-shaped, plate-shaped or combined in multiple shapes. The separation tip 43 refers to a protruding structure with a certain height, and the cross section of the separation tip 43 gradually decreases from top to bottom along the height direction, and the separation tip 43 can be composed of multiple intersecting surfaces. The first flow separation groove 41 and the second flow separation groove 42 both refer to a groove structure with a certain depth, and both ends of the first flow separation groove 41 and the second flow separation groove 42 can be open.

[0026] The blocking structure refers to a structure or component that can block water vapor or water flow. The blocking structure can be a blocking block, a blocking plate or a blocking protrusion.

[0027] The air blowing assembly 5 refers to a component that can be connected with an external gas source and direct high-speed gas to a specified area or position. The air blowing assembly 5 can be installed on the mounting base plate 1 by clamping or inserting.

[0028] The slicing device provided by the embodiment of the application can cut the semiconductor product through the cutting blade 2 arranged on the mounting base plate 1. During the operation of the cutting blade 2, the sensor 3 can monitor the cutting blade 2 to ensure the effect and stability of product cutting. Meanwhile, the flow guide block 4 and the air blowing assembly 5 are arranged on the mounting base plate 1, the flow guide block 4 has the separation tip 43, the flow guide block 4 is further provided with the first flow separation groove 41 and the second flow separation groove 42 located on the two sides of the separation tip 43, the first flow separation groove 41 and the second flow separation groove 42 are communicated with each other at the separation tip 43, the second flow separation groove 42 is further provided with a blocking structure at one end away from the separation tip 43, and the air blowing assembly 5 is further arranged on the mounting base plate 1.

[0029] Compared with the prior art, the guide block 4 can be arranged behind the sensor 3 in the rotation direction of the cutting blade 2, and the partition tip 43 is arranged downward. Meanwhile, the second diversion groove 42 can be arranged toward the cutting blade 2, one end of the first diversion groove 41 communicates with the second diversion groove 42 at the partition tip 43, and the other end extends away from the cutting blade 2. When the water vapor flow generated by the high-speed rotation of the cutting blade 2 moves to the guide block 4, the water vapor flow can be separated by the partition tip 43, so that most of the water vapor can enter the first diversion groove 41 and be guided to an area away from the sensor 3 and the cutting blade 2 through the first diversion groove 41, so that the guide block 4 can achieve the purpose of guiding a large amount of water vapor. A small amount of remaining water vapor will be thrown into the second diversion groove 42 by the cutting blade 2, and the small amount of water vapor will be concentrated by the inner wall of the second diversion groove 42. The second diversion groove 42 is also provided with a blocking structure to block the water vapor. After being blocked, the water will flow back along the second diversion groove 42 under the action of gravity, and the water will escape from the guide block 4 at the partition tip 43, so that the guide block 4 can achieve the purpose of blocking and redirecting a small amount of water vapor.

[0030] Finally, when a small amount of water vapor covers the sensor 3, the gas blowing assembly 5 can also be used to deliver gas to the sensor 3 to blow the water covering the sensor 3 away from the sensor 3, so as to avoid the interference of the residual water vapor with the sensor 3. Through the combination of the guide block 4 and the gas blowing assembly 5, the water vapor can be guided, blocked and redirected, and the residual water vapor on the sensor 3 can also be blown away, which maximally reduces the possibility of interference of the sensor 3 by the water vapor, improves the reliability of the detection result of the cutting blade 2, and ensures the cutting effect and stability.

[0031] In one embodiment, please refer to Figure 2 The guide block 4 has a first working surface 44 and a second working surface 45, the first working surface 44 and the second working surface 45 are both perpendicular to the cutting blade 2, the first working surface 44 and the second working surface 45 intersect to form the partition tip 43, the first diversion groove 41 is arranged on the first working surface 44, and the second diversion groove 42 is arranged on the second working surface 45. Specifically, the first working surface 44 and the second working surface 45 both refer to a surface structure with a certain area. The first working surface 44 can be a plane or a curved surface, and the second working surface 45 can also be a plane or a curved surface.

[0032] In the embodiment, when the guide block 4 is installed, the second working surface 45 can be arranged towards the cutting blade 2, and the first working surface 44 can be arranged away from the cutting blade 2. The water vapor flow formed by the cutting blade 2 can be separated by the separation tip 43 formed by the intersection of the first working surface 44 and the second working surface 45, so that part of the water vapor flow can move along the first working surface 44, and another part of the water vapor flow can move along the second working surface 45. Meanwhile, the first flow separation groove 41 is arranged on the first working surface 44, and the second flow separation groove 42 is arranged on the second working surface 45. The water vapor flow is limited and guided by the first flow separation groove 41 and the second flow separation groove 42, so that the water vapor can be better guided by the guide block 4.

[0033] In an optional embodiment, referring to Figure 2 , the first working surface 44 can be a planar structure, and the second working surface 45 can be an arc surface structure, and the curvature of the second working surface 45 can be adapted to the diameter of the cutting blade 2. In the embodiment, by arranging the first working surface 44 as a planar surface, the first flow separation groove 41 can be arranged in a straight line on the first planar surface, so that the water in the first flow separation groove 41 can quickly flow away from the cutting blade 2 and the sensor 3 under the guidance of the first flow separation groove 41, avoiding the risk of water vapor accumulating in the first flow separation groove 41, and improving the water vapor guiding effect of the guide block 4. The second working surface 45 is arranged as an arc surface adapted to the cutting blade 2, so that the second flow separation groove 42 can be arranged as an arc groove, and the second flow separation groove 42 can have a greater length in the direction of rotation of the cutting blade 2, so that the second flow separation groove 42 can block more water vapor, thereby improving the blocking effect of the guide block 4 on the water vapor.

[0034] It should be noted that the blocking structure is arranged at the end of the second flow separation groove 42 away from the separation tip 43, which is also to avoid the influence of the blocking structure on the length of the second flow separation groove 42, so that the second flow separation groove 42 can have a larger capacity. Meanwhile, by arranging the blocking structure at the end away from the separation tip 43, the water vapor can be blocked when the water vapor flow rate is the lowest, and the splashing phenomenon caused by the water vapor due to excessive speed can be avoided, thereby improving the blocking and redirection effect of the second flow separation groove 42 on the water vapor, and making the guide block 4 more convenient to use.

[0035] Based on the above-mentioned feature guide 51, referring to Figure 2 , the rotation axis of the cutting blade 2 is arranged in a horizontal direction, and the included angle between the first working surface 44 and the horizontal plane is 20° to 25°.

[0036] Specifically, the cutting blade 2 is usually arranged along a vertical direction, and thus the rotation axis of the cutting blade 2 is arranged along a horizontal direction. The included angle in this embodiment refers to the included angle between the first working surface 44 and the horizontal plane after the flow guide block 4 is installed. As preferred, the included angle between the first working surface 44 and the horizontal plane can be 22.5°.

[0037] In this embodiment, after the flow guide block 4 is installed, by arranging the included angle between the first working surface 44 and the horizontal plane to be 20°-25°, the included angle between the first shunt groove 41 arranged on the first working surface 44 and the horizontal plane can also be 20°-25°, and the separation tip 43 can separate 70%-80% of the water vapor under the premise of ensuring the water vapor flow speed in the first shunt groove 41, so that the shunt effect of the separation tip 43 is better.

[0038] In one embodiment, referring to Figure 2 , the blocking structure includes a cut-off block 46 arranged inside the second shunt groove 42, and the inner side of the cut-off block 46 is further provided with a cut-off groove 461. Specifically, the cut-off block 46 refers to a component with a certain volume, and the cut-off block 46 can be block-shaped, plate-shaped or a combination of multiple shapes. The cut-off block 46 can be an integral molding structure with the flow guide block 4, for example, by machining integral molding. The cut-off block 46 can also be a separate structure with the flow guide block 4, which can be installed in the second shunt groove 42 by clamping, welding or fastener connection and the like. The cut-off groove 461 refers to a groove structure with a certain depth, and the cut-off groove 461 can be arranged on the side surface of the cut-off block 46 located in the second shunt groove 42. Among them, the cut-off groove 461 can be arranged along the width direction of the second shunt groove 42.

[0039] In this embodiment, by arranging the cut-off block 46 in the second shunt groove 42, the water vapor in the second shunt groove 42 can be blocked and the flow direction can be changed, preventing the sewage from continuing to approach the sensor 3 along the second shunt groove 42 to cover the lens of the sensor 3. Meanwhile, the cut-off groove 461 is also arranged on the cut-off block 46, and by arranging the cut-off groove 461, the water vapor can be guided to the side wall of the second shunt groove 42, so that the water vapor can flow down along the side wall of the second shunt groove 42. In addition, it can also avoid the water vapor flow from splashing when hitting the cut-off block 46.

[0040] In one embodiment, referring to Figure 1The water blocking cover 7 is installed on the guide block 4 or the mounting base plate 1, and covers one end of the first diversion groove 41 away from the separation tip 43, so as to block the water jet from the first diversion groove 41. Specifically, the water blocking cover 7 refers to a cover structure with a certain accommodating space, and the water blocking cover 7 can be formed by surrounding a thin plate component, and an opening structure can be arranged on the water blocking cover 7. The water blocking cover 7 can be installed on the guide block 4 or the mounting base plate 1 by clamping, inserting or fastener connection.

[0041] In the embodiment, the water blocking cover 7 can be arranged on the guide block 4 or the mounting base plate 1, and covers one end of the first diversion groove 41 away from the separation tip 43. The water jet from the first diversion groove 41 can be prevented from splashing to other parts of the device by the blocking of the water blocking cover 7, so that the use of the scribing device is safer.

[0042] In an optional embodiment, referring to Figure 1 The scribing device further comprises a cooling water collecting pipe 6, and the cooling water can be delivered to the cutting blade 2 through the cooling water collecting pipe 6. The water blocking cover 7 can be arranged on the cooling water collecting pipe 6, so that the installation of the water blocking cover 7 is more convenient, and the space occupied by the water blocking cover 7 can be saved.

[0043] In an embodiment, referring to Figures 3 to 5 The air blowing assembly 5 comprises a guide piece 51, an adjusting screw 52 and a gas distribution piece 53. The guide piece 51 is arranged on the mounting base plate 1, and the gas distribution piece 53 is slidingly arranged on the guide piece 51. The guide piece 51 has a protruding part 511, the adjusting screw 52 penetrates through the protruding part 511, and the adjusting screw 52 has a rotation freedom around its own axis relative to the protruding part 511. The end of the adjusting screw 52 is threadedly connected with the gas distribution piece 53. The gas distribution piece 53 has an air outlet structure 55. The guide piece 51 has an air inlet structure 54 for communicating with an external air source. The adjusting screw 52 has a connecting channel 56 for communicating the air inlet structure 54 and the air outlet structure 55 with each other. The sensor 3 is arranged on the gas distribution piece 53.

[0044] Specifically, the guide piece 51 refers to a component with a certain volume, and the guide piece 51 can be block-shaped, plate-shaped or combined in multiple shapes. The guide piece 51 can be installed on the mounting base plate 1 by clamping, inserting or fastener connection. The protruding part 511 refers to a part with a certain volume on the guide piece 51, and the protruding part 511 can be block-shaped. The air inlet structure 54 refers to a structure that can be connected with an external air path, and the air inlet structure 54 can be one of a cavity structure, a channel structure or a hole structure, or can be combined by multiple structures.

[0045] The gas distribution member 53 refers to a component with a certain volume, which can be block-shaped, plate-shaped or a combination of various shapes. The gas distribution member 53 can be connected to the guide member 51 through a sliding structure, such as a sliding block and a sliding rail. The gas outlet structure 55 refers to a structure for discharging gas from the gas distribution member 53, which can be a cavity structure, a channel structure or a hole structure, or a combination of the above structures.

[0046] The adjusting screw 52 refers to a rod-shaped component with a certain length, which can be provided with threads on the outer wall to be threadedly connected to the gas distribution member 53. The connecting channel 56 refers to a channel structure with a certain length, which can be arranged along the axis of the adjusting screw 52.

[0047] In this embodiment, the guide member 51 is arranged on the mounting base plate 1, the gas distribution member 53 is arranged on the guide member 51, and the sensor 3 is mounted on the gas distribution member 53. The guide member 51 has a protrusion 511, the adjusting screw 52 is threaded through the protrusion 511 and is threadedly connected to the gas distribution member 53, and the adjusting screw 52 has a rotational freedom around its own axis relative to the protrusion 511. The rotation of the adjusting screw 52 can drive the gas distribution member 53 to slide along the axis of the adjusting screw 52, thereby adjusting the position of the sensor 3. The gas distribution member 53 has a gas outlet structure 55, the guide member 51 has a gas inlet structure 54, and the adjusting screw 52 has a connecting channel 56. The gas inlet structure 54 and the gas outlet structure 55 are connected through the connecting channel 56. High-speed gas can enter the gas inlet structure 54 from the external pipeline, then enter the gas outlet structure 55 through the connecting channel 56 on the adjusting screw 52, and finally blow onto the lens of the sensor 3. Based on the adjustment of the position of the sensor 3 by the adjusting screw 52, the purpose of cleaning the water vapor on the sensor 3 can still be achieved, making the use of the air blowing assembly 5 more convenient and improving the convenience of detecting the cutting blade 2.

[0048] In one embodiment, please refer to Figure 4 and Figure 6 The gas inlet structure 54 includes an annular cavity 541 and a gas inlet channel 542. The annular cavity 541 is arranged on the protrusion 511 and surrounds the adjusting screw 52. The gas inlet channel 542 is used to connect the annular cavity 541 and the external pipeline. The adjusting screw 52 has a screw gas inlet 57 on the part located in the annular cavity 541. The screw gas inlet 57 is used to connect the annular cavity 541 and the connecting channel 56, so that the gas flow can enter the connecting channel 56 through the annular cavity 541.

[0049] Specifically, the annular cavity 541 refers to a cavity structure with a certain accommodating space. When the adjusting screw 52 is not installed, the annular cavity 541 can be a columnar cavity. When the adjusting screw 52 is arranged through the protruding portion 511, the adjusting screw 52 can be inserted into the columnar cavity. The outer portion of the adjusting screw 52 and the inner wall of the columnar cavity form the annular cavity 541 described above. The air inlet channel 542 refers to a channel structure with a certain length. One end of the air inlet channel 542 can be in communication with the annular cavity 541, and the other end of the air inlet channel 542 can be in communication with the external air path through the air path joint 58.

[0050] The screw air inlet 57 refers to an opening structure with a certain area. The connecting channel 56 and the outer portion of the adjusting screw 52 can be communicated through the screw air inlet 57. The screw air inlet 57 can be arranged along the radial direction of the adjusting screw 52.

[0051] In this embodiment, the annular cavity 541 and the air inlet channel 542 form the air inlet structure 54. The annular cavity 541 is arranged on the protruding portion 511, and then the annular cavity 541 is communicated with the external air path through the air inlet channel 542. When the adjusting screw 52 is arranged through the protruding portion 511, part of the adjusting screw 52 is also inserted into the annular cavity 541. The screw air inlet 57 is arranged on the part of the adjusting screw 52 located in the annular cavity 541, and is used to communicate the annular cavity 541 with the connecting channel 56. After the external gas enters the annular cavity 541, it can enter the connecting channel 56 through the screw air inlet 57. Since the annular cavity 541 surrounds the adjusting screw 52, the screw air inlet 57 on the adjusting screw 52 can communicate the annular cavity 541 with the connecting channel 56 no matter where the adjusting screw 52 rotates to, so that the air inlet structure 54 is more convenient to use.

[0052] In an optional embodiment, please refer to Figure 6 The protruding portion 511 is provided with a mounting hole arranged through the protruding portion 511. The adjusting screw 52 can be arranged through the protruding portion 511 through the mounting hole. The adjusting screw 52 and the inner wall of the mounting hole can be further provided with a mounting shaft sleeve 59. The mounting shaft sleeve 59 can limit the adjusting screw 52 in the direction along the axis of the adjusting screw 52, so that the rotation of the adjusting screw 52 is more stable and reliable.

[0053] In this embodiment, a sealing ring can be arranged between the mounting shaft sleeve 59 and the inner wall of the mounting hole. The mounting shaft sleeve 59 and the sealing ring can make the sealing performance of the annular cavity 541 better.

[0054] In an embodiment, please refer to Figure 6, the number of sensors 3 is two, and the two sensors 3 are located on both sides of the cutting blade 2, the air outlet structure 55 includes a first air outlet channel 551 and two second air outlet channels 552, the outlet of the connecting channel 56 is located at the end of the adjusting screw 52, and is in communication with the first air outlet channel 551, the inlets of the two second air outlet channels 552 are in communication with the first air outlet channel 551, and the outlets of the two second air outlet channels 552 are respectively arranged towards the two sensors 3, and the airflow can be divided into two streams through the two second air outlet channels 552.

[0055] Specifically, the first air outlet channel 551 and the second air outlet channel 552 both refer to a channel structure with a certain length, a threaded hole can be arranged at the inlet of the first air outlet channel 551, the end of the adjusting screw 52 is inserted into the threaded hole and is threadedly connected with the inner wall of the threaded hole. By arranging the outlet of the connecting channel 56 at the end of the adjusting screw 52, the communication between the connecting channel 56 and the first air outlet channel 551 can be realized at the same time of installing the adjusting screw 52.

[0056] In the embodiment, by arranging the first air outlet channel 551 and the two second air outlet channels 552 on the air distribution block, the communication between the connecting channel 56 and the first air outlet channel 551 can be realized at the same time of threadedly connecting the adjusting screw 52 and the air distribution block. Meanwhile, the inlets of the two second air outlet channels 552 are in communication with the first air outlet channel 551, and the outlets of the two second air outlet channels 552 are respectively arranged towards the two sensors 3, so that the airflow can be divided into two streams through the two second air outlet channels 552 after entering the first air outlet channel 551 from the connecting channel 56, and then the two streams are blown towards the two sensors 3 respectively. By high-speed airflow, the water vapor on the lens of the sensor 3 can be blown away, so that the sensor 3 remains clean.

[0057] In one embodiment, referring to Figure 6 , the two second air outlet channels 552 are arranged at an angle, and the angle between the two second air outlet channels 552 is 40° to 60°. Specifically, the lens of the two sensors 3 can be arranged along the sliding direction of the air distribution piece 53, and the angle between each second air outlet channel 552 and the lens of the corresponding sensor 3 is equal. When the angle between the two second air outlet channels 552 is 40° to 60°, the angle between each second air outlet channel 552 and the lens of the corresponding sensor 3 is 20° to 30°. In the embodiment, by arranging the two second air outlet channels 552 at an angle and the angle between the two second air outlet channels 552 being 40° to 60°, the angle between each second air outlet channel 552 and the lens of the corresponding sensor 3 can be 20° to 30°. When the airflow is blown onto the lens of the sensor 3, the water vapor on the lens of the sensor 3 can be blown away smoothly, so that the cleaning effect of the air blowing assembly 5 is better, and the stability of detection is improved.

[0058] In an alternative embodiment, referring to Figure 6 , the angle between two second air outlet channels 552 is 50°, and the angle between each second air outlet channel 552 and the lens of the corresponding sensor 3 is 25°.

[0059] In an embodiment, referring to Figure 1 , the mounting base 1 is further provided with a limiting block 8 and a pressing block 9. The limiting block 8 and the mounting base 1 form a mounting space for mounting the guide member 51, and the pressing block 9 is used to press at least part of the guide member 51 in the mounting space. Specifically, the limiting block 8 refers to a block-shaped component with a certain volume, which can be mounted on the mounting base 1 by means of clamping, inserting or fastener connection, etc. The pressing block 9 refers to a block-shaped component with a certain volume, which can be mounted on the mounting base 1 by means of clamping, inserting or fastener connection, etc. In this embodiment, the limiting block 8 and the mounting base 1 form a mounting space for mounting the guide member 51, and the pressing block 9 is used to press at least part of the guide member 51 in the mounting space, which can make the installation of the guide member 51 more convenient and firm, and further make the installation of the air blowing assembly 5 and the sensor 3 more stable.

[0060] The above is only the preferred embodiment of the present application, and only the technical principles of the present application are specifically described. These descriptions are only for explaining the principles of the present application, and cannot be explained as the limitation of the protection scope of the present application in any way. Based on the explanations herein, any modification, equivalent replacement and improvement within the spirit and principles of the present application, and other specific embodiments of the present application which can be thought by those skilled in the art without creative labor, should be included in the protection scope of the present application.

Claims

1. A scribing apparatus, characterized by comprising: The device includes a mounting base plate, a cutting blade, a sensor, a flow guide block, and an air blowing assembly. The cutting blade is used to cut the product, and the sensor is used to detect the working status of the cutting blade. The flow guide block is disposed on the mounting base plate and has a dividing tip. The flow guide block also has a first flow divider and a second flow divider, which are located on opposite sides of the dividing tip and are interconnected at the dividing tip. A blocking structure is also provided at the end of the second flow divider away from the dividing tip. The air blowing assembly is disposed on the mounting base plate and is used to deliver gas to the sensor to blow away water covering the sensor.

2. The dicing apparatus of claim 1, wherein The guide block has a first working surface and a second working surface. Both the first working surface and the second working surface are perpendicular to the cutting blade, and the first working surface and the second working surface intersect to form the dividing tip. The first diversion groove is disposed on the first working surface, and the second diversion groove is disposed on the second working surface.

3. The dicing apparatus of claim 2, wherein The rotation axis of the cutting blade is set in the horizontal direction, and the angle between the first working surface and the horizontal plane is 20° to 25°.

4. The dicing apparatus of claim 1, wherein The blocking structure includes a flow-blocking block disposed inside the second diversion channel, and the inner side of the flow-blocking block is also provided with a flow-blocking groove.

5. The dicing apparatus of claim 4, wherein The slicing device also includes a water baffle, which is installed on the guide block or the mounting base plate. The water baffle covers the end of the first diversion channel away from the dividing tip and is used to block water ejected from the first diversion channel.

6. The scribing apparatus according to any one of claims 1 to 5, wherein The air blowing assembly includes a guide, an adjusting screw, and an air distributor. The guide is mounted on the mounting base plate, and the air distributor is slidably mounted on the guide. The guide has a protrusion, and the adjusting screw passes through the protrusion, having a degree of freedom to rotate about its own axis relative to the protrusion. The end of the adjusting screw is threadedly connected to the air distributor. The air distributor has an air outlet structure, and the guide has an air inlet structure. The adjusting screw has a connecting channel for connecting the air inlet structure and the air outlet structure, and the sensor is mounted on the air distributor.

7. The dicing apparatus of claim 6, wherein The air intake structure includes an annular cavity and an air intake channel. The annular cavity is disposed on the protrusion and surrounds the adjusting screw. The air intake channel is used to connect the annular cavity with an external air passage. The portion of the adjusting screw located inside the annular cavity is provided with a screw air inlet. The screw air inlet is used to connect the annular cavity with the connecting channel so that airflow can enter the connecting channel through the annular cavity.

8. The dicing apparatus of claim 6, wherein The number of the sensors is two, and the two sensors are respectively located at two sides of the cutting blade, the air outlet structure comprises a first air outlet channel and two second air outlet channels, the outlet of the connecting channel is located at the end of the adjusting screw and is in communication with the first air outlet channel, the inlets of the two second air outlet channels are in communication with the first air outlet channel, and the outlets of the two second air outlet channels are respectively arranged towards the two sensors.

9. The dicing apparatus of claim 8, wherein The two second air outlet channels are arranged at an angle, and the angle between the two second air outlet channels is 40°-60°.

10. The scribing apparatus of claim 6 wherein, The mounting bottom plate is further provided with a limiting block and a pressing block, the limiting block and the mounting bottom plate form a mounting space for mounting the guide piece, and the pressing block is used for pressing at least part of the guide piece in the mounting space.

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