Anti-falling device, method and system for reducing vibration quantity of carrier based on OHT

Abstract

The invention provides an OHT-based anti-falling device, method and system for reducing the vibration quantity of a carrier, the OHT-based anti-falling device for reducing the vibration quantity of the carrier comprises two anti-falling damping mechanisms which are oppositely arranged, and each anti-falling damping mechanism comprises a motor base which is arranged at a preset mounting position of the OHT; the driving mechanism comprises a driving motor and a motor rotating shaft seat, the driving motor is arranged on the first end face of the motor base, and an output shaft of the driving motor is sleeved with the motor rotating shaft seat; the detection assembly is arranged on the second end face of the motor base; the opening and closing connecting rod mechanism comprises an opening and closing connecting rod assembly connected with the motor rotating shaft seat and a damping clamping assembly arranged on the opening and closing connecting rod assembly, and the damping clamping assembly is arranged on the end face, close to the driving motor, of the opening and closing connecting rod mechanism. By means of the anti-falling device, the vibration amount of the carrier can be reduced, the carrier can be prevented from falling, and then continuous and stable material carrying of the OHT is improved.

Description

Technical Field

[0001] This application relates to the field of OHT (Overhead Crane) technology, and in particular to a fall prevention device, method and system based on OHT to reduce vehicle vibration. Background Technology

[0002] In the semiconductor packaging field, various processes in a semiconductor wafer fab are distributed across different floors, requiring wafers to be transported between these floors along with their carriers. Currently, semiconductor wafer foundries commonly employ Overhead Hoist Transportation (OHT) systems to automate the transfer of wafers between different processing equipment using OHT carts. Existing methods for transporting wafers across floors typically involve handling materials at heights of 3 meters or more, using simple mechanisms (pallets) to secure the carriers and prevent them from falling during transport. Furthermore, most OHTs generate vibration during transport, which affects semiconductor defect rates and consequently impacts the continuous, stable, and efficient material handling capabilities of the OHT system.

[0003] Therefore, how to reduce the vibration of the carrier and prevent the carrier from falling during wafer handling is an urgent problem to be solved. Summary of the Invention

[0004] This application provides a fall prevention device, method, and system based on OHT to reduce vehicle vibration and prevent vehicle from falling.

[0005] In a first aspect, embodiments of this application provide a fall protection device based on OHT to reduce vehicle vibration, the fall protection device comprising two fall protection and shock absorption mechanisms arranged opposite to each other, the fall protection and shock absorption mechanisms comprising: The motor base is positioned at the preset mounting location of the OHT; The drive mechanism includes a drive motor and a motor shaft seat, wherein the drive motor is disposed on the first end face of the motor base and the motor shaft seat is sleeved on the output shaft of the drive motor; The detection component is disposed on the second end face of the motor base; The opening and closing linkage mechanism includes an opening and closing linkage assembly connected to the motor shaft seat, and a shock-absorbing clamping assembly disposed on the opening and closing linkage assembly; the shock-absorbing clamping assembly is disposed on the end face of the opening and closing linkage mechanism near the drive motor.

[0006] In this embodiment, the shock-absorbing clamping assembly includes two opposing shock-absorbing linkage mechanisms. Each shock-absorbing linkage mechanism includes: a spring arm, a support arm disposed near the second end face of the spring arm, a shock-absorbing wheel disposed at the first end of the spring arm, a spring bearing seat disposed at the second end of the spring arm, and a spring disposed in the spring bearing seat. The shock-absorbing clamping assembly is used to clamp the carrier and reduce the vibration of the carrier during the operation of the OHT. The support arm is used to support the carrier. The spring is used to absorb the vibration of the carrier. The shock-absorbing wheel is used to contact the carrier and provide frictional force to the carrier in the vertical direction.

[0007] In this embodiment of the application, the opening and closing linkage assembly includes a first link and a second link; When the opening and closing linkage mechanism is opened, the drive motor drives the motor shaft seat sleeved on the output shaft to rotate in the first direction. The first link and the second link respond to the rotation of the motor shaft seat to drive the shock-absorbing clamping assembly disposed on the first link and the second link to clamp the carrier. When the opening and closing linkage mechanism is closed, the drive motor drives the motor shaft seat sleeved on the output shaft to rotate in the second direction. The first link and the second link respond to the rotation of the motor shaft seat to drive the shock-absorbing clamping assembly provided on the first link and the second link to release the carrier and retract the opening and closing linkage mechanism.

[0008] In this embodiment, the shock-absorbing wheel is made of antistatic polyurethane, and the antistatic resistance value of the antistatic polyurethane is in the range of 10. 6 ~10 8 Ohms; the shock-absorbing wheel is used to reduce vibration and prevent static electricity generated between the shock-absorbing mechanism and the vehicle.

[0009] In this embodiment, the opening and closing linkage assembly further includes a first pivot member hinged to the motor shaft seat and the first link, and a second pivot member hinged to the motor shaft seat and the second link; when the first link and the second link move to the closed position and the first link and the second link are close to a straight line, the opening and closing linkage assembly is in a dead-point locked state to prevent the fall protection device from opening due to vibration and falling off the vehicle.

[0010] In this embodiment, the motor base includes: a transverse support beam, and a first platform of a preset shape disposed on the transverse support beam; a first hole of a preset size is provided in the middle area of ​​the first platform, and the drive motor is installed on the first platform by fasteners and is connected to the motor shaft seat for transmission through the first hole.

[0011] In this embodiment, the detection component includes: a detection unit, a control unit, and an alarm unit disposed on a second platform; the second platform is parallel to the second end face and spaced from the second end face by a second preset length, wherein: The detection unit is used to detect a first signal of the vehicle within the clamping area; the clamping area is the area formed by the cooperation of the pair of opening and closing linkage mechanisms. The control unit is connected to the detection unit and is used to receive the first signal; determine the speed parameters of the vehicle based on the first signal; and send a preset alarm message to the alarm unit when the speed parameters are greater than or equal to a preset speed threshold. The alarm unit receives the alarm information sent by the control unit and outputs the corresponding prompt information.

[0012] Secondly, embodiments of this application provide a fall prevention method for reducing vehicle vibration based on an OHT (Output-Free Handling) system, applied to an OHT handling system. The OHT handling system includes an OHT, OHT grippers, a vehicle, and a fall prevention device. The method includes: The system controls the OHT to transport the vehicle. When the OHT arrives at the temporary storage station, the system controls the OHT grippers to grip the vehicle according to a preset gripping strategy. During vehicle transport, the system controls the OHT to move according to a preset traveling strategy, which includes: Control the OHT to carry the vehicle along a preset direction of travel to the first temporary storage station, and control the fall protection device to be in the activated state; In response to the OHT stopping and positioning at the first temporary storage station, the system controls the fall arrestor to be in the off state, and controls the OHT to place the first vehicle at the first temporary storage station; After the first vehicle is placed at the first temporary storage station, the OHT gripper is controlled to retract to the OHT, and the fall arrestor is controlled to be in the activated state. During the vehicle grabbing process, the OHT is controlled to perform operations according to a preset grabbing strategy, which includes: Control the OHT to travel to the second temporary storage station; In response to the OHT stopping and positioning at the second temporary storage station, the OHT gripper is controlled to descend along the Z-axis to the second temporary storage station; The OHT gripper is controlled to pick up the second carrier; the second carrier is placed in the second temporary storage station; In response to the successful gripping of the second vehicle by the OHT gripper, the OHT gripper is controlled to lift the second vehicle upward and place the second vehicle on the fall arrestor; Control the OHT gripper to retract to the OHT, and control the anti-fall device to activate.

[0013] Thirdly, embodiments of this application provide an electronic device including a processor, a memory, a communication interface, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the processor, and the programs include instructions for performing steps in any method of the second aspect of embodiments of this application.

[0014] Fourthly, embodiments of this application provide a computer-readable storage medium storing a computer program for electronic data interchange, wherein the computer program causes a computer to perform some or all of the steps described in any method of the second aspect of this application.

[0015] Fifthly, embodiments of this application provide an OHT-based vehicle vibration reduction fall arrest system, which performs some or all of the steps described in any method of the second aspect of this application. This OHT-based vehicle vibration reduction fall arrest system may include some or all of the structures described in any device of the first aspect of this application.

[0016] By implementing the embodiments of this application, the following beneficial effects are achieved: This application describes a fall arrest device, method, and system for reducing vehicle vibration based on an OHT (Out-of-Temperature Threat). The fall arrest device for reducing vehicle vibration based on an OHT includes: two fall arrest and shock absorption mechanisms arranged opposite to each other. Each fall arrest and shock absorption mechanism includes: a motor base, which is disposed at a preset mounting position of the OHT; a drive mechanism, which includes a drive motor and a motor shaft seat, wherein the drive motor is disposed on the first end face of the motor base and the motor shaft seat is sleeved on the output shaft of the drive motor; a detection component, which is disposed on the second end face of the motor base; and an opening and closing linkage mechanism, which includes an opening and closing linkage assembly connected to the motor shaft seat and a shock absorption clamping component disposed on the opening and closing linkage assembly, wherein the shock absorption clamping component is disposed on the end face of the opening and closing linkage mechanism near the drive motor. Thus, on the one hand, the linkage, antistatic rubber wheel and spring are connected by a mechanism that drives the linkage through a drive module. The rubber wheel is installed on the linkage to fix the vehicle. If the vehicle falls, the spring can absorb the energy generated by the descent of the vehicle, thereby reducing the vibration of the vehicle. On the other hand, if the vehicle falls, the support arm supports the vehicle to prevent the vehicle from falling completely, thereby preventing the vehicle from falling. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a fall arrestor based on OHT to reduce vehicle vibration, provided in an embodiment of this application. Figure 2 This is a schematic diagram of the structure of a vehicle provided in an embodiment of this application; Figure 3 This is an architecture diagram of a vehicle vibration reduction anti-fall system based on OHT provided in an embodiment of this application; Figure 4 This is a schematic flowchart of a method for reducing vehicle vibration based on OHT provided in an embodiment of this application; Figure 5 This is a schematic diagram of a scenario for an aerial transport vehicle provided in an embodiment of this application; Figure 6 This is a schematic diagram of a scenario where an aerial transport vehicle picks up a vehicle, as provided in an embodiment of this application. Figure 7 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0019] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0020] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0021] It should be understood that the term "and / or" in this document is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document indicates that the preceding and following related objects are in an "or" relationship. In the embodiments of this application, "multiple" refers to two or more.

[0022] In the embodiments of this application, "at least one item" or its similar expression refers to any combination of these items, including any combination of a single item or a plurality of items. "One or more" means one or more, while "multiple" means two or more. For example, "at least one item" of a, b, or c can represent the following seven cases: a, b, c; a and b; a and c; b and c; a, b, and c. Each of a, b, and c can be an element or a set containing one or more elements.

[0023] In this application, the term "connection" refers to various connection methods, such as direct connection or indirect connection, to achieve communication between devices. This application does not impose any limitations on this.

[0024] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0025] The following is an explanation of the relevant terms used in this application: OHT: Overhead Hoist Transportation (OHT) is an automated overhead transport system used in cleanrooms in industries such as semiconductors. It operates via suspended tracks and can precisely transfer vehicles to meet the requirements of high cleanliness and efficient material flow.

[0026] Currently, semiconductor wafer foundries commonly employ Overhead Hoist Transportation (OHT) systems to automate the transfer of wafers between various processing equipment using OHT carts. Existing methods for transporting wafers across floors typically involve handling materials at heights of 3 meters or more, using simple mechanisms (pallets) to secure the carts and prevent them from falling during transport. Furthermore, most OHTs generate vibration during transport, which affects the defect rate of semiconductors and consequently impacts the continuous, stable, and efficient material handling capabilities of the OHT system.

[0027] To address the aforementioned problems, this application provides a fall prevention device, method, and system based on OHT (Outdoor Material Handling) to reduce vehicle vibration. The fall prevention device based on OHT includes: two opposing fall prevention and shock absorption mechanisms, each comprising: a motor base disposed at a preset mounting position of the OHT; a drive mechanism including a drive motor and a motor shaft seat, the drive motor being disposed on a first end face of the motor base, and the motor shaft seat being sleeved on the output shaft of the drive motor; a detection component disposed on a second end face of the motor base; and an opening / closing linkage mechanism including an opening / closing linkage assembly connected to the motor shaft seat, and a shock-absorbing clamping component disposed on the opening / closing linkage assembly, wherein the shock-absorbing clamping component is disposed on the end face of the opening / closing linkage mechanism near the drive motor. By implementing the fall prevention device described in this application, the vibration of the vehicle can be reduced and the vehicle can be prevented from falling, thereby improving the continuous and stable material handling of the OHT.

[0028] The following is combined with Figure 1 The structure of a vehicle vibration reduction anti-fall device based on OHT in an embodiment of this application will be described. Figure 1 This is a schematic diagram of a vehicle vibration reduction fall arresting device based on OHT provided in an embodiment of this application. The OHT-based device includes two opposing fall arresting and shock absorption mechanisms, each comprising: The motor base 110 is located at the preset mounting position of the OHT; The drive mechanism 120 includes a drive motor and a motor shaft seat 121. The drive motor is disposed on the first end face of the motor base, and the motor shaft seat is sleeved on the output shaft of the drive motor. The detection component 130 is disposed on the second end face of the motor base; The opening and closing linkage mechanism 140 includes an opening and closing linkage assembly connected to the motor shaft seat, and a shock-absorbing clamping assembly disposed on the opening and closing linkage assembly; the shock-absorbing clamping assembly is disposed on the end face of the opening and closing linkage mechanism near the drive motor.

[0029] The OHT-based vehicle vibration reduction fall arrestor 100 mainly includes two opposing fall arrest and shock absorption mechanisms. Each fall arrest and shock absorption mechanism is independently set and fixed to both sides of the OHT main body via a central mounting beam. Each fall arrest and shock absorption mechanism includes: a motor base 110, a drive mechanism 120, a detection component 130, and an opening and closing linkage mechanism 140. The motor base 110 provides installation and mechanical support; the drive mechanism 120 realizes the opening and closing action of the linkage; the detection component 130 monitors the drive mechanism and clamping status in real time; and the opening and closing linkage mechanism 140 realizes vehicle clamping and fall arrest under drive, and effectively buffers vehicle vibration through the internal shock-absorbing clamping component.

[0030] Specifically, the motor base 110 is installed in a pre-set mounting position on the main structure of the OHT. One end is fixed to the transverse bearing beam of the OHT by bolts, and the other end extends towards the carrier to form a mounting platform. The motor base 110 includes a first mounting surface and a second mounting surface. The first mounting surface is used to install the drive motor, and the second mounting surface is used to install the detection component 130. The motor base has wire through holes and positioning pin holes inside to achieve precise positioning and wiring of the drive motor and the detection component. The drive mechanism 120 includes a drive motor and a motor shaft seat 121. The drive motor is fixed to the first mounting surface of the motor base 110, and the motor shaft seat 121 is sleeved on the output shaft of the drive motor to transmit driving torque and form a rotational connection with the opening and closing linkage assembly. The motor shaft seat 121 preferably adopts an integral metal processing structure, and its outer edge is provided with a pivot connection part for hinged connection with the first linkage. The rotation of the output shaft of the drive motor drives the motor shaft seat 121 to rotate in a set direction, thereby realizing the synchronous opening and closing action of the linkage mechanism. Preferably, the drive motor is a small, high-precision servo motor, which uses PWM signal control to achieve precise adjustment of angle and speed, ensuring smooth and controllable movement during clamping and release. The detection component 130 is mounted on the second mounting surface of the motor base 110 and is used to monitor the motor's operating status and the clamping status of the anti-fall device in real time. The detection component 130 includes a detection unit, a control unit, and an alarm unit. The detection unit collects the current, voltage, and angle signals of the drive motor to determine whether the motor is in normal operating condition; the control unit analyzes and processes the detection signals and generates control commands; the alarm unit issues audible and visual alarm signals in abnormal conditions and sends data to the host computer via communication in case of an abnormal situation. The detection component 130 and the drive mechanism 120 are electrically connected to form a closed-loop control structure, enabling the system to automatically execute stop or lock actions when abnormal displacement of the carrier or clamping failure is detected, thereby improving the overall safety of the OHT operation.

[0031] The opening and closing linkage mechanism 140 is installed at the output end of the drive mechanism 120 and includes a first link 147 and a shock-absorbing clamping assembly, which are hinged to each other via a pivot. One end of the first link 147 is connected to the motor shaft seat 121, and the other end is connected to the shock-absorbing clamping assembly via the first pivot. The other end of the shock-absorbing clamping assembly is connected to the shock-absorbing clamping assembly via a mounting pin. The shock-absorbing clamping assembly includes a spring bearing seat 143, which is disposed at the end of the shock-absorbing clamping assembly, a support arm 141, a spring arm 142, a shock-absorbing wheel 146, and a spring. The spring arm 142 and the support arm 141 form a clamping bracket. The shock-absorbing wheel 146 is installed at the end of the spring arm 142 for contacting the bottom of the carrier. The spring is disposed inside the spring bearing seat 143 and achieves cushioning through the relative movement between the spring arm 142 and the support arm 141. When the vehicle comes into contact with the fall arrestor, the shock absorber 146 can produce a slight displacement under the action of spring force, absorbing the vibration impact from the vehicle, thereby slowing down the transmission of vibration energy to the vehicle.

[0032] The drive motor output shaft drives the motor shaft seat 121 to rotate in a first or second direction, thereby driving the first connecting rod 147 to swing around the first pivot. The shock-absorbing clamping assembly rotates synchronously with the first connecting rod 147 through the second pivot, realizing the opening and closing action. When the motor shaft seat 121 rotates in the forward direction, the linkage mechanism opens, driving the shock-absorbing clamping assembly to move outward to release the carrier; when the motor shaft seat 121 rotates in the reverse direction, the linkage mechanism closes, driving the shock-absorbing clamping assembly to clamp the carrier inward, thereby achieving fall protection and fixation. In a specific embodiment of this application, a dead-point locking structure is formed between the first connecting rod 147 and the shock-absorbing clamping assembly. When the two connecting rods are in the closed position and extend to the same straight line or their extensions pass through the second pivot, the linkage mechanism enters the dead-point locking state. At this time, no reverse rotation will occur under the action of external force or vibration, and mechanical self-locking can be achieved, thereby maintaining a stable clamping state after the fall protection mechanism is closed, preventing the carrier from falling due to external force. This structure achieves passive locking through mechanical characteristics, does not rely on a continuous power supply from a motor, and features high reliability and energy efficiency. The shock-absorbing clamping assembly includes a spring bearing 143 located at the end of the assembly, a support arm 141, a spring arm 142, a shock-absorbing wheel 146, and a spring. The spring arm 142 and the support arm 141 form a clamping bracket. The shock-absorbing wheel 146 is mounted at the end of the spring arm 142 for contact with the bottom of the vehicle. The spring is located inside the spring bearing 143 and provides cushioning through the relative movement between the spring arm 142 and the support arm 141. When the vehicle contacts the fall arrestor, the shock-absorbing wheel 146 undergoes a slight displacement under the spring force, absorbing the vibration impact from the vehicle and thus reducing the transmission of vibration energy to the vehicle. Preferably, the opening / closing linkage mechanism 140 and the shock-absorbing clamping assembly are connected by a locking mechanism to form a detachable modular structure, facilitating maintenance and replacement. During operation, the motor shaft seat 121 drives the first connecting rod 147 to rotate. The first connecting rod 147 drives the shock-absorbing clamping assembly to rotate via a pivot connection, causing the shock-absorbing clamping assembly to perform opening and closing actions. In the clamping state, the shock-absorbing wheel 146 contacts the bottom of the carrier and forms a support interface; in the released state, the shock-absorbing wheel 146 retracts along the Z-axis to avoid interference with the carrier.

[0033] In one possible embodiment, the shock-absorbing clamping assembly includes two opposing shock-absorbing linkage mechanisms, each linkage comprising: a spring arm, a support arm disposed near the second end face of the spring arm, a shock-absorbing wheel disposed at a first end of the spring arm, a spring bearing disposed at a second end of the spring arm, and a spring disposed in the spring bearing; the shock-absorbing clamping assembly is used to clamp the carrier and reduce the amount of vibration of the carrier during the operation of the OHT; the support arm is used to support the carrier; the spring is used to absorb the vibration of the carrier; and the shock-absorbing wheel is used to contact the carrier and provide frictional force to the carrier in the vertical direction.

[0034] The spring arm is preferably made of a metal material with high elastic modulus and fatigue resistance, such as spring steel or high-strength aluminum alloy. One end is connected to the motor shaft seat, and the other end is connected to the second connecting rod through a hinge structure. During clamping, the spring arm can generate slight deformation under stress, thereby converting external vibration energy into elastic potential energy for absorption and release, thus providing a buffering effect. The spring shaft seat is used to install and define the position of the spring. It has guide holes inside to ensure the linear movement of the spring during axial compression and recovery, preventing offset or tilting and ensuring the stability of the shock absorption response. The spring can be a helical compression spring or a disc spring structure. During OHT handling, when the vehicle experiences vertical displacement due to track micro-vibrations, the spring counteracts part of the vibration force through compression and rebound, thereby reducing the peak dynamic acceleration of the vehicle and improving the stability of the anti-fall device. The shock-absorbing wheel is preferably made of wear-resistant rubber or polyurethane material, with a high coefficient of friction on the outer layer to form a reliable friction damping interface between the clamping contact surfaces. Simultaneously, a metal bearing structure can be embedded inside to reduce rolling resistance and improve rotational response sensitivity. By making rolling contact between the shock-absorbing wheels and the surface of the vehicle, high-frequency micro-vibrations caused by OHT acceleration and deceleration can be absorbed without compromising clamping stability, thus achieving flexible support for the vehicle's attitude.

[0035] Specifically, when the OHT performs carrier transport, the drive motor rotates the motor shaft in a first direction, thereby achieving the closing action of the shock-absorbing clamping assembly through the linkage of the first and second connecting rods. At this time, the two shock-absorbing connecting rods simultaneously approach the carrier from both sides and form a clamping structure through the contact between the shock-absorbing wheels and the carrier. After clamping, the spring arm stores a certain amount of elastic potential energy under compression to continuously absorb vibration and impact energy during transportation. As the OHT runs along the track, if the carrier experiences slight vertical displacement due to inertia, the spring periodically compresses and rebounds, forming a flexible buffer system, thereby effectively reducing vibration transmission efficiency and preventing the carrier from shifting or slipping due to instantaneous impact.

[0036] In one possible embodiment, the opening and closing linkage assembly includes a first link and a second link; When the opening and closing linkage mechanism is opened, the drive motor drives the motor shaft seat sleeved on the output shaft to rotate in the first direction. The first link and the second link respond to the rotation of the motor shaft seat to drive the shock-absorbing clamping assembly disposed on the first link and the second link to clamp the carrier. When the opening and closing linkage mechanism is closed, the drive motor drives the motor shaft seat sleeved on the output shaft to rotate in the second direction. The first link and the second link respond to the rotation of the motor shaft seat to drive the shock-absorbing clamping assembly provided on the first link and the second link to release the carrier and retract the opening and closing linkage mechanism.

[0037] The first link is arranged horizontally to provide structural locking when the opening and closing linkage mechanism is closed. A mechanical limiting part is located at the end of the first link, forming a through-center structure with the second link. When the opening and closing linkage mechanism rotates to the closed position, the line connecting the first and second links crosses the geometric dead point, forming a mechanical self-locking state, thus maintaining the closed state even without external driving force. This self-locking structure, through the constraint of the link geometry, prevents the linkage mechanism from rotating in the opposite direction when subjected to external vibrations or inertial impacts from the vehicle.

[0038] During rotation, the motor shaft drives the first connecting rod to extend and clamp along a certain direction, adjusting the clamping angle and force of the fall arrestor. When the OHT is in operation, even if the drive motor is powered off or the control signal is abnormal, the first connecting rod remains in a static equilibrium state at its dead point position, preventing the opening and closing linkage mechanism from being accidentally opened due to OHT track vibration or external disturbances, thus preventing the vehicle from falling off. This geometric dead point locking structure allows for passive safety maintenance of the fall arrestor without increasing energy consumption or sensor control.

[0039] Specifically, the length and hinge angle of the first link are parametrically designed based on the output stroke of the motor shaft seat, so that when the fall arrestor is in the closed state, the angle between the first and second links is slightly less than 180°. When the vehicle is subjected to a downward external force or vibration, the external force is transmitted to the first link through the second link. Because the link geometry has crossed the dead point position, the force acts in the opposite direction on the link pivot point, thereby forming a reverse torque to resist opening and ensuring that the fall arrestor remains in the closed state.

[0040] In one possible embodiment, the shock-absorbing wheel is made of antistatic polyurethane, and the antistatic resistance value of the antistatic polyurethane is in the range of 10. 6 ~10 8 Ohms; the shock-absorbing wheel is used to reduce vibration and prevent static electricity generated between the shock-absorbing mechanism and the vehicle.

[0041] The antistatic polyurethane material is composed of a polyether-type polyurethane matrix and conductive fillers, including micro / nano particles such as carbon black, carbon nanotubes, or conductive graphene. By uniformly distributing the conductive components within the polyurethane matrix, a continuous conductive path is formed on the surface of the shock absorber, enabling it to maintain high elasticity and wear resistance while possessing stable surface resistance characteristics, thereby effectively dissipating static electricity from friction. The antistatic resistance value is controlled within 10. 6 ~10 8 Within the ohm range, this design avoids the risk of instantaneous discharge due to electrostatic accumulation and prevents excessive conductivity from introducing electrical noise interference or causing coupling effects on wafer products in the carrier. While ensuring antistatic performance, this structure significantly improves shock absorption performance, enabling the shock-absorbing wheel to provide a smooth buffer response when in contact with the carrier, reducing peak impact and extending wheel life.

[0042] Specifically, the shock-absorbing wheel is mounted at the end of the shock-absorbing linkage mechanism via a bearing assembly, with its axis perpendicular to the output direction of the linkage. In the assembled state, the shock-absorbing wheel forms linear contact with the bottom of the vehicle. When the vehicle experiences slight vertical displacement or swaying during OHT operation, the shock-absorbing wheel can adjust its contact pressure dynamically under the rebound of the spring arm, achieving dynamic stability support for the vehicle's posture. Due to the excellent elastic recovery properties of the shock-absorbing wheel material, its radial compression deformation can effectively absorb impact kinetic energy within the range of 1-3mm, thereby reducing the vibration intensity transmitted to the linkage pivot and motor base. Furthermore, during the start-up, stopping, or turning phases of OHT operation, the antistatic layer on the surface of the shock-absorbing wheel continuously releases triboelectric charge, maintaining potential equilibrium between the bottom of the vehicle and the fall arrestor, preventing discharge damage or microparticle adsorption caused by static electricity accumulation. Through this structural design, the fall arrestor can simultaneously meet the dual requirements of mechanical shock absorption and electrostatic protection in high-speed operating environments.

[0043] In one possible embodiment, the opening and closing linkage assembly further includes a first pivot member hinged to the motor shaft seat and the first link, and a second pivot member hinged to the motor shaft seat and the second link; when the first link and the second link move to the closed position and the first link and the second link are close to a straight line, the opening and closing linkage assembly is in a dead-point locked state to prevent the fall arrestor from opening due to vibration and falling off the vehicle.

[0044] The first and second pivots are respectively mounted on opposite sides of the motor shaft seat to form a symmetrical drive structure, thereby achieving a balanced force distribution during opening and closing. The dead-point locking state is achieved through the self-locking effect of the linkage geometry; when the angle between the first and second linkages is less than a preset threshold, the linkage system cannot automatically open under external force.

[0045] Specifically, the preset threshold can be set to 170°~178° to ensure sufficient self-locking strength in the closed state, and to unlock smoothly when the drive motor reverses, ensuring the safety and reliability of the fall arrestor in a vibration environment.

[0046] In one possible embodiment, the motor base includes: a transverse support beam, and a first platform of a predetermined shape disposed on the transverse support beam; a first hole of a predetermined size is provided in the middle area of ​​the first platform, and the drive motor is mounted on the first platform by fasteners and connected to the motor shaft seat for transmission through the first hole.

[0047] The transverse support beam connects the main structure of the OHT system and provides stable mechanical support for the entire fall arrestor. A first platform of a predetermined shape is mounted on the transverse support beam. The shape of the first platform can be designed as rectangular, trapezoidal, or a chamfered irregular structure according to the structural space constraints of the OHT to adapt to different models of OHT equipment. A first hole of a predetermined size is opened in the middle area of ​​the first platform. The diameter of the first hole is determined according to the outer diameter of the drive motor output shaft and the rotation space requirements, allowing for through-mounting and power transmission of the motor output shaft. The drive motor is mounted on the first platform using several fasteners and connected to the motor shaft seat through the first hole, thereby achieving stable power output and precise control.

[0048] Preferably, the drive motor is a servo motor with closed-loop control function, which achieves precise control of speed and angle through a built-in encoder. The bottom of the drive motor can be equipped with anti-vibration washers to reduce the transmission of high-frequency vibrations generated during motor operation to the first platform. The output shaft of the drive motor is fixedly connected to the motor shaft seat through the first hole. The motor shaft seat is made of metal or high-strength engineering plastic, and its internal parts are connected to the motor output shaft by key connection or thread locking to ensure the reliability of torque transmission.

[0049] In one possible embodiment, the detection component includes: a detection unit, a control unit, and an alarm unit disposed on a second platform; the second platform is parallel to the second end face and spaced from the second end face by a second preset length, wherein: The detection unit is used to detect a first signal of the vehicle within the clamping area; the clamping area is the area formed by the cooperation of a pair of the opening and closing linkage mechanisms. The control unit is connected to the detection unit and is used to receive the first signal; determine the speed parameters of the vehicle based on the first signal; and send a preset alarm message to the alarm unit when the speed parameters are greater than or equal to a preset speed threshold. The alarm unit receives the alarm information sent by the control unit and outputs the corresponding prompt information.

[0050] The detection unit may include at least one of an infrared detection module and a laser velocity measurement module. The infrared detection module detects the reflection characteristics of the vehicle as it passes through the clamping area by emitting and receiving infrared light signals to identify whether the vehicle has entered a danger zone. The laser velocity measurement module utilizes the principle of multi-point ranging to calculate the vehicle's velocity value by measuring the displacement change of the vehicle within a preset time period, maintaining high-precision detection while the vehicle is moving. The control unit includes a signal acquisition circuit, a processing circuit, and a threshold comparison module. The signal acquisition circuit receives the output electrical signal from the detection unit and performs filtering and amplification to eliminate noise effects from environmental interference or mechanical vibration. The processing circuit performs analog-to-digital conversion on the filtered signal and calculates the instantaneous and average speed of the vehicle based on a preset speed calculation model. The threshold comparison module compares the speed calculation result with the speed threshold stored in the system. When the detected speed exceeds the threshold, a trigger signal is generated and transmitted to the alarm unit. The control unit can also communicate with the main control system to upload the detection results to the central control platform for remote monitoring and status recording.

[0051] Specifically, the detection components are structurally arranged and installed on the second platform, preferably close to the centerline of the clamping area, to ensure that the detection signal accurately covers the entire vehicle's travel path. The second platform can be connected to the main body of the shock absorption mechanism via an insulating bracket, forming a stable installation reference surface, thereby ensuring that the detection module maintains consistency in detection angle and distance during long-term operation. When the vehicle enters the clamping area, the detection unit collects the vehicle's first signal in real time and sends it to the control unit. After the control unit calculates and analyzes the signal, if it finds that the vehicle's movement speed exceeds a set threshold, it immediately triggers the alarm unit. The alarm unit may include an audible and visual alarm, an indicator light assembly, or a wireless communication module. The indicator light assembly is used to display the operating status on the equipment panel, such as "Safe," "Overspeed," or "Detection Abnormality." The wireless communication module can transmit alarm information to a remote monitoring terminal via Bluetooth, Wi-Fi, or LoRa networks to realize real-time reporting and recording of alarm events.

[0052] In one possible embodiment, regarding the determination of the vehicle's speed parameters based on the first signal, the control unit is specifically configured to: Determine the amplitude parameter in the first signal; The amplitude change rate of the preset time interval is determined based on the amplitude parameter; The speed parameter corresponding to the amplitude change rate is determined based on the preset mapping relationship between the amplitude change rate and the preset vehicle speed parameter, and the speed parameter is obtained.

[0053] The amplitude parameter refers to the instantaneous or average amplitude of the first signal output by the detection unit. This amplitude reflects the reflection intensity, magnetic flux change, or infrared energy change of the vehicle as it passes through the detection area. The meaning of the amplitude differs depending on the type of detection unit; for example, the amplitude parameter in an infrared detection unit corresponds to the intensity of infrared reflected light. By extracting the amplitude parameter, the dynamic response of the vehicle under changes in spatial position or velocity can be reflected without direct distance measurement.

[0054] The amplitude change rate within a preset time interval is used to reflect the trend of vehicle speed change over time. The control unit calculates the amplitude change rate by differential or moving average calculation of the amplitude parameters within a continuous sampling period. The calculation formula can be expressed as: ΔA / Δt=(A2-A1) / (t2-t1), where A1 and A2 are the amplitude parameters at the first and second sampling times, respectively, t2 is the second sampling time, t1 is the first sampling time, ΔA is the change in amplitude, and Δt is the time interval. The control unit can adaptively adjust the time interval Δt according to the sampling frequency to ensure that the amplitude change rate accurately reflects the transient response of the vehicle under different speed conditions. When the amplitude change rate is large, it indicates that the vehicle is moving at a high speed through the detection area; when the amplitude change rate is small or close to zero, it indicates that the vehicle is moving at a low speed or is stationary.

[0055] Specifically, after receiving the raw signal from the detection unit, the control unit first performs noise reduction and smoothing processing on the signal using a filtering algorithm (such as Kalman filtering or low-pass filtering) to eliminate the fluctuations caused by mechanical vibration, changes in ambient light, or electromagnetic interference. Then, it extracts the signal amplitude sequence and calculates the amplitude change rate, which is then input into a stored mapping model for table lookup or calculation to obtain the corresponding speed parameter. If the speed parameter exceeds a preset speed threshold, the control unit outputs a trigger signal to the alarm unit to achieve overspeed warning.

[0056] For easier understanding, please refer to Figure 2 , Figure 2 This is a structural schematic diagram of a carrier provided in an embodiment of this application. The structural schematic diagram 200 of the carrier is a three-view drawing and a partial cross-sectional view of the carrier. It can be seen that the carrier is mainly composed of a clamping part, a product compartment, and a positioning pin seat (KC PIN seat), etc., and is used to carry semiconductor wafers, chip carriers or other precision devices. It cooperates with the gripper mechanism and fall protection device in the OHT fall protection system to achieve high-precision handling, positioning and fall protection functions.

[0057] Specifically, the clamping section is located above the carrier and is used to contact the OHT grippers during handling, forming a stable support interface. The clamping section can be flat or T-shaped, capable of withstanding static loads and dynamic impacts in the vertical direction, and providing guidance during the opening and closing of the grippers, ensuring the OHT grippers remain stable during gripping and releasing, preventing displacement or shaking. The product compartment is the main bearing cavity of the carrier, used to place semiconductor wafers, packaging substrates, or electronic components. This structure adopts a frame design, internally divided into several independent storage units, each with fixed dimensions and positioning guide surfaces to ensure precise positioning of products during handling and placement. The side walls of the product compartment can be made of high-strength engineering plastics or aluminum alloys to balance structural strength and lightweight performance. Positioning pin holders are located at the bottom or side of the carrier and are used to connect electrical signals or positioning interfaces between the carrier and the equipment. Positioning pin holders typically adopt a standardized design to ensure compatibility with different models of OHT systems and temporary storage stations. The positioning pin holder not only serves as an electrical connection and signal transmission point, but also acts as a mechanical positioning reference point, ensuring precise alignment of the carrier with the workstation surface during placement or clamping. In some embodiments, the positioning pin holder may integrate features such as wedge slots or limiting holes to prevent reverse insertion or misalignment of the carrier. The carrier can be clamped from above by the grippers of an overhead transport trolley or an OHT system. When the OHT moves to the designated temporary storage station, the anti-fall device is activated to maintain mobility; when the carrier reaches the placement station, the anti-fall device closes and aligns with both sides of the gripping part, forming a mechanical lock to ensure that the carrier does not fall or slide during loading and unloading. The positioning pin holder at the bottom of the carrier automatically docks with the interface port of the workstation to achieve electrical signal detection or equipment communication. The system can identify the carrier type, status, or product specifications by recognizing the signals, thereby achieving intelligent control of the automated handling process.

[0058] For easier understanding, please refer to Figure 3 , Figure 3 This is an architectural diagram of a fall protection system based on OHT to reduce vehicle vibration, provided in an embodiment of this application. As can be seen, the fall protection system 300 based on OHT to reduce vehicle vibration includes components such as an aerial transport trolley, transport trolley grippers, fall protection devices, and an aerial temporary storage station for the vehicle. The whole system is used to realize the safe handling, fall protection, and vibration control of vehicles (MAGAZINE or wafer cassettes) in semiconductor or automated production lines.

[0059] Specifically, the Mini OHT (Extended-Installation Trolley) is installed in the production line's track structure for automated transport of vehicles between different process areas. The Mini OHT moves along a pre-defined path via a suspended structure, typically in a horizontal or vertical direction. During transport, the OHT grippers at the bottom of the Mini OHT can extend and retract vertically to grasp or place vehicles, facilitating automated handover from the overhead storage station to the ground-based process station. The OHT grippers are mounted on a lifting mechanism at the bottom of the Mini OHT, used to grip, raise, lower, and release vehicles at different stages of the transport process. The gripping action of the OHT grippers coordinates with the activation and deactivation of the fall arrestor to ensure stable support during vehicle movement and docking, preventing the risk of vehicles falling due to inertial impact, speed fluctuations, or external vibrations. The fall arrestor is located on both sides of the aerial transport trolley. Its main function is to provide additional mechanical support and vibration buffering during the gripping or release of the carrier by the trolley's claws. The fall arrestor internally includes a drive motor, an opening and closing linkage mechanism, and a shock-absorbing clamping assembly. The drive motor drives the linkage mechanism via a rotating shaft to achieve the gripping or release action. The shock-absorbing clamping assembly contacts the outer wall of the carrier, using elastic elements to absorb the micro-vibrations and impacts generated during the aerial transport trolley's operation, thereby reducing the carrier's vibration amplitude and improving handling stability. When the aerial transport trolley is moving, the fall arrestor is in the open state to ensure the system's flexibility. When the aerial transport trolley is parked at a carrier placement station or aerial temporary storage station, the fall arrestor closes and clamps the carrier, achieving fall arrest locking. Additionally, a carrier placement station is included. The carrier placement station is a ground-based process station used to receive carriers transported by the aerial transport trolley during the production process. Carrier placement stations are typically equipped with positioning structures for precise alignment after carrier placement, ensuring the accuracy of wafer or component transport within the carrier. Conversely, aerial storage stations are located below the tracks to temporarily store carriers awaiting retrieval or placement. During operation, the aerial transport trolley, following instructions from the scheduling system, sequentially retrieves carriers from the aerial storage station, transports and places them at the process station, and then returns to the aerial storage station.

[0060] In one specific embodiment, when the aerial transport trolley carrying the carrier travels along the track to the landing-type process station, the fall arrestor is initially activated to reduce vibration coupling. Once the OHT (Outer Handling Trolley) precisely stops at the process station and completes its positioning, the system controls the fall arrestor to deactivate. The drive motor then activates the linkage mechanism to clamp the carrier, ensuring its stable docking with the placement station. At this point, the trolley's grippers descend, smoothly placing the carrier onto the placement station platform. Subsequently, the grippers release and retract, the fall arrestor reactivates, and the aerial transport trolley leaves the current workstation to enter the next work cycle.

[0061] As can be seen, this application provides a fall prevention device based on OHT to reduce vehicle vibration. The fall prevention device includes two opposing fall prevention and shock absorption mechanisms, each comprising: a motor base disposed at a preset mounting position of the OHT; a drive mechanism including a drive motor and a motor shaft seat, the drive motor being disposed on a first end face of the motor base, and the motor shaft seat being sleeved on the output shaft of the drive motor; a detection component disposed on a second end face of the motor base; and an opening / closing linkage mechanism including an opening / closing linkage assembly connected to the motor shaft seat, and a shock-absorbing clamping component disposed on the opening / closing linkage assembly, wherein the shock-absorbing clamping component is disposed on the end face of the opening / closing linkage mechanism near the drive motor. By implementing the fall prevention device described in this application, the vibration of the vehicle can be reduced and the vehicle can be prevented from falling, thereby improving the continuous and stable material handling of the OHT.

[0062] After understanding the software and hardware architecture of this application, the following will be combined with... Figure 4 This application describes a fall prevention method based on OHT (Optical Hierarchical Turbine) to reduce vehicle vibration. Figure 4 This is a flowchart illustrating a method for preventing vehicle vibration based on an OHT (Optical Handling Device) according to an embodiment of this application. The method is applied to an OHT handling system, which includes an OHT, OHT grippers, a vehicle, and a fall arrestor. The method specifically includes the following steps: Step S410: Control the OHT to transport the vehicle. When the OHT arrives at the temporary storage station, control the OHT grippers to grip the vehicle according to a preset gripping strategy.

[0063] The vehicle is a MAGAZINE. When the OHT travels to the temporary storage station, the system determines the OHT's position status through the feedback data from the positioning sensor and encoder, and then enters the gripping preparation stage.

[0064] Step S420, wherein during the vehicle transport process, the OHT is controlled to travel according to a preset travel strategy, the travel strategy including: Control the OHT to carry the vehicle along a preset direction of travel to the first temporary storage station, and control the fall protection device to be in the activated state; In response to the OHT stopping and positioning at the first temporary storage station, the system controls the fall arrestor to be in the off state, and controls the OHT to place the first vehicle at the first temporary storage station.

[0065] The OHT (Overhead Handling Station) is the main structure of the overhead handling system, used to perform horizontal and vertical handling of wafers or carriers in low-rise clean environments (below 3m in height). To meet the high cleanliness and precision requirements of semiconductor packaging production, the OHT requires precise position calibration and fall protection via a control module during operation to ensure stability of the carrier during high-speed movement and transfers. The OHT's direction of travel is defined as the Y-axis, with the Z-axis corresponding to the carrier's lifting direction and the X-axis corresponding to the lateral extension and retraction of the grippers. During the OHT's travel strategy, the target station is first determined. This target station can be a ground-based process station or an overhead temporary storage station. When the OHT travels along the Y-axis, the fall protection device is activated. In this state, the Z-axis opening and closing linkage assembly in the fall protection linkage mechanism is in the open position, and the shock-absorbing clamping assembly remains in the released state. This reduces clamping friction and lowers the resonant energy transfer caused by track vibration or airflow disturbance during handling, thereby effectively reducing carrier vibration and avoiding product damage caused by vibration. Once the OHT reaches the first temporary storage station and completes station detection and positioning, the system issues a fall protection command signal, switching the fall protection device from the open to the closed state. During this stage, the drive motor output shaft rotates, causing the motor shaft seat to rotate along a preset angle, which in turn drives the Z-axis opening and closing linkage mechanism to close synchronously. As the linkage mechanism closes, the shock-absorbing wheel, made of antistatic polyurethane material, in the shock-absorbing linkage assembly begins to contact the outer edge of the vehicle's bottom. The elastic deformation of the spring arm and spring shaft seat provides clamping force, achieving a wrap-around clamping of the vehicle. After the fall protection device closes, the lower edge of the vehicle is supported by the shock-absorbing wheel, forming an elastic contact surface. This structure not only absorbs the instantaneous impact force caused by the vehicle falling or undergoing slight displacement, but also, due to the use of antistatic polyurethane wheels, maintains a 10° contact surface. 6 ~10 8 The stable resistance value of Ω effectively releases static charge generated during handling, preventing electrostatic discharge from damaging the wafer or product surface.

[0066] Specifically, after the OHT completes positioning and executes the shutdown of the fall arrestor mechanism, the system simultaneously controls the OHT grippers to descend along the Z-axis, smoothly lowering the MAGAZINE vehicle from the vehicle platform to the first temporary storage station. At this time, the fall arrestor is in a closed state, forming an outer protective boundary for the vehicle. When the grippers are released and retracted, the fall arrestor remains closed to prevent displacement of the vehicle. Subsequently, the OHT grippers rise back into the vehicle body and await the next instruction. The travel strategy is implemented through a multi-axis synchronous control algorithm of the central control system. The system monitors the OHT's travel speed, vehicle center of gravity offset, and fall arrestor mechanism status in real time. The opening and closing actions of the fall arrestor are linked to the OHT's travel status, ensuring that the fall arrestor remains closed when the vehicle is not secured by the grippers and opens when the vehicle is fully controlled by the grippers. This achieves a full-process safety interlock logic, preventing the vehicle from falling due to control delays or erroneous commands. In one possible embodiment, when the fall arrestor is in the open state, the angle between the first and second links on both sides of its opening and closing linkage assembly can be maintained within the range of 60° to 90° to provide sufficient clearance, allowing the OHT gripper to freely pass through the clamping area to perform lifting operations. When the device switches to the closed state, the drive motor drives the linkage to rotate to within 10° of the angle. At this time, the linkage mechanism enters the dead-point locking range, forming a mechanical self-locking effect. Even if subjected to external impact, there will be no reverse rotation or fall arrestor clamping failure, thereby ensuring stable parking of the vehicle.

[0067] Furthermore, the opening / closing process of the fall arrestor is synchronized with the OHT's travel trajectory. Dynamic linkage is achieved by setting trigger conditions at path nodes through the control system. When the system detects the OHT approaching the temporary storage station, it issues a pre-closing command to ensure the fall arrestor is ready to clamp before the vehicle approaches the platform, avoiding response delays. This dynamic control strategy maintains handling efficiency by activating the fall arrestor during transport to reduce vibration energy accumulation and by closing the fall arrestor during temporary storage and delivery to provide mechanical protection, thus improving the overall safety, stability, and product yield of the handling system.

[0068] For easier understanding, please refer to Figure 5 , Figure 5This is a schematic diagram of an aerial transport trolley transport vehicle provided in an embodiment of this application. As can be seen, the aerial transport trolley, fall protection device, vehicle storage station, and vehicle together constitute a low-floor transport system. This low-floor transport system is used to transport wafer products from low floors (3m and below). The aerial transport trolley mainly includes the trolley body, fall protection device (i.e., fall protection mechanism), vehicle (MAGAZINE, magazine type), and transport trolley grippers (MINI OHT grippers). These components are arranged according to functional logic and work together to precisely realize the entire process of aerial transfer, temporary storage, and placement of semiconductor products. The aerial transport trolley moves horizontally in the direction of travel indicated by the arrow in the diagram (the direction of travel of the aerial transport trolley). The fall protection device is integrated inside the aerial transport trolley. The vehicle placement station is a ground-based process station, and the vehicle temporary storage station is an aerial temporary storage structure. The two correspond to the terminal placement and intermediate transfer connection functions of the vehicle, respectively. The transport trolley grippers are mounted under the aerial transport trolley and can move in multiple directions to complete the gripping and releasing actions of the vehicle. The overall layout is compact and reasonable, and fully adapts to the clearance height limit of low-rise buildings below 3m.

[0069] Specifically, the air transport vehicle has a storage chamber inside, with anti-fall mechanisms integrated on both sides of the chamber to ensure the safety of the vehicle throughout the transfer process. The anti-fall device consists of an opening and closing linkage mechanism, a shock-absorbing linkage mechanism, a support arm, and an anti-fall detection system. The anti-fall device maintains an anti-fall state during vehicle transfer, preventing external forces from causing the mechanism to close erroneously. The shock-absorbing wheels of the components are made of anti-static urethane rubber material (resistance value 10). 6 ~10 8 The Ω-shaped wafer carrier, combined with a spring-loaded elastic support structure, effectively absorbs vibrations during transport and discharges static electricity to prevent wafer product damage. The carrier is a magazine-style wafer cassette with 10 product slots for semiconductor products. A three-point horizontal positioning interface at the bottom ensures precise docking between the carrier, grippers, and stations. The side gripping section provides stable positioning and fixing points for the grippers. The transport trolley's grippers and the main body's winch module work together to achieve lifting and lowering movements, meeting the carrier loading and unloading needs of different stations. The carrier placement station, a floor-mounted process station, receives completed carriers and connects them to subsequent manufacturing processes. The carrier temporary storage station is an aerial suspended structure used for temporary storage and transport scheduling of carriers. Their rational layout shortens the transport path and improves transport efficiency. After the aerial transport trolley moves to the target station, the anti-fall mechanism switches between open and closed states, coordinating with the multi-directional movement of the grippers to complete the precise loading, unloading, and stable transport of the carrier. Throughout the entire collaborative process, the fall protection mechanism provides full protection against falling, the shock absorption structure effectively reduces vibration interference, and the anti-static design prevents product damage. It is fully adapted to the space constraints of low floors and the requirements of semiconductor nanometer-level precision manufacturing, achieving a balance of safety, stability, and efficiency in vehicle handling.

[0070] Step S430: After the first vehicle is placed at the first temporary storage station, control the OHT gripper to retract to the OHT and control the fall arrestor to be in the open state.

[0071] The OHT gripper retrieval process is a crucial reset step after the OHT system completes the carrier placement operation. This process is implemented through motion commands from the control unit and mainly includes three stages: gripper release, lifting, and retraction. First, after the carrier is successfully placed on the pallet or carrying platform of the first temporary storage station, the control unit sends a release command to the gripper actuator, causing the gripper to open along a preset trajectory and release the clamping force on the carrier. Then, the gripper rises along the Z-axis to a safe height to avoid mechanical interference with the carrier or surrounding structures. Finally, the gripper retracts into the gripper storage area of ​​the OHT main structure, ready for the next handling task. Throughout the retrieval process, the system monitors the gripper position feedback signal and torque parameters in real time to ensure the synchronization and positional accuracy of the gripper movement, thereby avoiding mechanical resonance caused by inertia or vibration.

[0072] The activation state of the fall arrestor is used to ensure the safety of the OHT during subsequent movement or unloaded operation. The fall arrestor typically includes a pair of openable linkage mechanisms and a clamping mechanism. In the activated state, it is either freely movable or locked out, preventing interference with external structures during the OHT's return stroke or unloaded operation. Preferably, after detecting a signal indicating that the gripper retraction is complete, the control unit automatically triggers an unlocking command for the fall arrestor, causing the fall arrestor linkage assembly to extend in a preset direction or enter a standby state, ensuring the stability and dynamic response performance of the OHT system during track operation.

[0073] Step S440, wherein, during the vehicle grabbing process, the OHT is controlled to perform operations according to a preset grabbing strategy, the grabbing strategy including: Control the OHT to travel to the second temporary storage station; In response to the OHT stopping and positioning at the second temporary storage station, the OHT gripper is controlled to descend along the Z-axis to the second temporary storage station; The OHT gripper is controlled to pick up the second carrier; the second carrier is placed in the second temporary storage station; In response to the successful gripping of the second vehicle by the OHT gripper, the OHT gripper is controlled to lift the second vehicle upward and place the second vehicle on the fall arrestor; Control the OHT gripper to retract to the OHT, and control the anti-fall device to activate.

[0074] The gripping strategy involves the OHT performing a reverse pick-and-place operation after completing the placement task at the first temporary storage station. This primarily aims to achieve a vibration-free transition from a static storage state to a dynamic transportation state. After receiving scheduling instructions from the central control system, the OHT moves along the Y-axis to the second temporary storage station according to the trajectory preset by the path planning module. The system automatically switches to a low-speed mode as it approaches the target station to ensure the OHT's positioning accuracy and the stability of the gripper alignment. Upon reaching the positioning area, the OHT uses an optical positioning sensor mounted below the walking mechanism in conjunction with an RFID positioning module to achieve high-precision docking. After positioning, the OHT gripper slowly descends along the Z-axis to the top area of ​​the vehicle at the second temporary storage station according to the system's descent command. The Z-axis lifting mechanism uses a servo drive motor in conjunction with a lead screw or synchronous belt structure. During the descent, the gripper's torque sensor monitors the contact force in real time. When the contact pressure reaches a preset threshold, the system determines that the gripper has made contact with the vehicle and triggers the gripping action. The clamping action is completed by a bidirectional slider mechanism driven by a motor. The clamping force is adjusted by controlling the closed-loop circuit to ensure that the carrier can be stably fixed during the clamping process without causing squeezing deformation or micro-crack damage to its shell.

[0075] Specifically, after clamping is complete, the control unit detects a clamping stability signal and immediately initiates a Z-axis lifting command, raising the gripper and the second carrier together to a safe height while keeping the fall arrestor in the closed state. At this time, the fall arrestor linkage mechanism is in the clamping position, providing auxiliary support during the OHT's lifting phase to prevent the carrier from swaying. After rising to the preset height, the OHT gripper moves along a horizontal trajectory, transferring the second carrier above the fall arrestor on the OHT main body. When the gripper moves to the center area of ​​the fall arrestor, the control system issues a placement command, and the Z-axis drive mechanism drives the gripper to slowly descend vertically until the bottom of the carrier contacts the shock-absorbing wheel assembly of the fall arrestor. At this point, the antistatic polyurethane shock-absorbing wheel, located in the shock-absorbing clamping assembly, provides flexible support through a spring arm structure, absorbing the impact force during descent and ensuring the carrier lands smoothly on the fall arrestor. The displacement sensor in the detection component monitors the stress state of the fall arrestor in real time. When the system confirms that the vehicle has been placed stably, the control unit automatically sends an "open" signal to the fall arrestor, causing the linkage mechanism to open and releasing the fixed constraint on the vehicle, thus providing space for the OHT to execute the next transportation path.

[0076] In one possible embodiment, the fall arrestor includes a drive motor and a fall arrestor linkage mechanism; placing the second vehicle on the fall arrestor includes: A1. Obtain the weight of the second vehicle and the speed of the OHT gripper; A2. Obtain the first included angle and the second included angle in the fall protection linkage mechanism of the fall protection device; the first included angle is the angle formed by the first link and the second link in the fall protection linkage mechanism; the second included angle is the angle formed by the third link and the fourth link in the fall protection linkage mechanism; A3. When both the first included angle and the second included angle reach the preset included angle threshold, control the drive motor to rotate and drive the anti-fall linkage mechanism to lock the second vehicle.

[0077] The control system uses a built-in weighing sensor to monitor the weight of the second carrier in real time. This weight data is used to calibrate the clamping force threshold of the fall arrestor. Simultaneously, the speed signal of the OHT gripper is obtained through feedback from a servo driver; its value reflects the moment of inertia during carrier placement. When the carrier is heavy or the gripper descends quickly, the system automatically adjusts the initial torque output of the drive motor in advance, ensuring the fall arrestor has sufficient impact resistance at the moment of contact, thus preventing secondary collisions during the carrier's descent. The first and second included angles are obtained through rotation angle sensors located at the pivot point of the fall arrestor linkage mechanism. The first included angle monitors the opening and closing state of the main linkage group (i.e., the first and second links), while the second included angle monitors the support state of the auxiliary linkage group (i.e., the third and fourth links). Changes in the angles of the two sets of links reflect the overall force balance and clamping synchronization of the fall arrestor. For example, when the first included angle gradually approaches 180°, the linkage mechanism approaches a dead point, and the structural stiffness increases sharply. The system determines that the clamping position of the fall arrestor is close to its limit at this time. When the second included angle approaches 90°, the supporting force provided by the auxiliary linkage mechanism reaches its maximum. By monitoring these two angles in real time, the control system can accurately determine the timing of the fall arrestor locking.

[0078] Preferably, the fall arrestor linkage mechanism has a mechanical limit structure during locking, and its limit position is monitored in real time by a motor encoder. When the drive motor reaches the preset locking angle (e.g., 35°~40°), the system stops the motor output and enters the locking holding mode to prevent the motor from over-driving and causing the mechanism to become too tight or the gears to overload. Furthermore, during the carrier placement stage, the clamping force curve is automatically matched according to the weight parameters of the second carrier and the descent speed parameters of the OHT gripper. For example, when the carrier is relatively light, the system reduces the torque output of the drive motor to avoid excessive clamping and deformation of the carrier shell; while when the carrier is relatively heavy or the vibration risk is high, the system improves the clamping response rate of the fall arrestor mechanism through PID control, so that the locking action intervenes earlier, thereby improving the fall arrestor efficiency.

[0079] For easier understanding, please refer to Figure 6 , Figure 6This is a schematic diagram of a scenario where an aerial transport trolley grips a vehicle, as provided in an embodiment of this application. The schematic diagram 600 illustrates the process of the aerial transport trolley gripping a vehicle at a vehicle storage station. The vehicle gripping process consists of components such as the aerial transport trolley, a fall arrestor, an OHT gripper, a vehicle, and a vehicle storage station. The aerial transport trolley moves to the corresponding workstation in the vehicle storage station along the direction of travel indicated by the arrow (aerial transport trolley travel direction). The OHT gripper performs a gripping action vertically. The fall arrestor is integrated into the side of the aerial transport trolley body. The vehicle is positioned within the vehicle storage station. The overall layout clearly demonstrates the spatial constraints and mechanical adaptability of the gripping process.

[0080] Specifically, the side-integrated fall arrestor (i.e., fall arrest mechanism) of the aerial transport trolley is activated during the gripping phase, pre-establishing a fall protection mechanism for subsequent vehicle transfer. The trolley's grippers, acting as actuators, can rise and fall vertically and extend and retract horizontally to adapt to the spatial layout of the vehicle storage station, achieving precise gripping of the vehicle. The vehicle has a magazine-style structure and is positioned within the vehicle storage station. Its side gripping parts cooperate with the gripping structure of the trolley's grippers, while the bottom positioning structure ensures stable parking of the vehicle within the storage station. The vehicle storage station is an aerial suspended support structure, serving as a temporary storage and positioning reference for the vehicle. Its structural dimensions match the specifications of the aerial transport trolley and the vehicle, ensuring spatial accuracy of the gripping action. During the gripping process, the aerial transport trolley moves along the direction of travel to be directly above the vehicle storage station and completes precise positioning. Then, the trolley's grippers extend downwards vertically to precisely grip the gripping part on the side of the vehicle. During this process, the fall protection device remains in the active state to avoid the gripping action. After the grippers lift the vehicle to the storage position inside the aerial transport trolley, the fall protection device switches to the active state. Through the linkage dead point locking and support arm structure, the vehicle is provided with full fall protection throughout the process.

[0081] As can be seen, the above-mentioned method for preventing falls by reducing vehicle vibration based on OHT can reduce the vibration of the vehicle during the handling process, thereby improving the yield of wafer manufacturing.

[0082] The above primarily describes the solutions of the embodiments of this application from the perspective of the method execution process. It is understood that, in order to achieve the above functions, the electronic device includes corresponding hardware structures and / or software modules for executing each function. Those skilled in the art should readily recognize that, in conjunction with the units and algorithm steps of the various examples described in the embodiments provided herein, this application can be implemented in hardware or a combination of hardware and computer software. Whether a function is executed by hardware or by computer software driving hardware depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0083] When dividing functional modules according to their respective functions, the following is combined with... Figure 7 The electronic devices in the embodiments of this application will be described. Figure 7 This is a schematic diagram of the structure of an electronic device provided in the application embodiment, such as... Figure 7 As shown, the electronic device includes one or more processors 710, a memory 720, a communication interface 730, and one or more programs 721. The processor 710 is communicatively connected to the memory 720 and the communication interface 730 via an internal communication bus.

[0084] The one or more programs 721 are stored in the memory 720 and configured to be executed by the processor 710. The one or more programs 721 include instructions for performing any step in the above method embodiments.

[0085] The processor 710 may be, for example, a central processing unit (CPU), a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It can implement or execute the various exemplary logic blocks, cells, and circuits described in conjunction with the disclosure of this application. The processor may also be a combination that implements computational functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc. The communication unit may be a communication interface, a transceiver, a transceiver circuit, etc., and the storage unit may be a memory.

[0086] The memory 720 can be volatile memory or non-volatile memory, or may include both. The non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. The volatile memory can be random access memory (RAM), which is used as an external cache. By way of example, but not limitation, many forms of random access memory (RAM) are available, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate synchronous DRAM (DDR SDRAM), enhanced synchronous DRAM (ESDRAM), synchronous linked DRAM (SLDRAM), and direct rambus RAM (DR RAM).

[0087] It is understood that the electronic device 700 may include more or fewer structural elements than those shown in the above block diagram, such as a power module, physical buttons, a Wi-Fi module, a speaker, a Bluetooth module, sensors, a display module, etc., without limitation. It is understood that the electronic device may incorporate elements such as... Figure 1 The structure of the aforementioned OHT-based vehicle vibration reduction fall arrestor is designed to achieve the following: Figure 4 Any or all of the steps in the aforementioned method for preventing vehicle vibration from falling.

[0088] This application also provides a computer-readable storage medium storing a computer program for electronic data interchange, which causes a computer to perform some or all of the steps of any of the methods described in the above method embodiments, wherein the computer includes an electronic device.

[0089] This application also provides a fall arrest system based on OHT to reduce vehicle vibration, which can perform some or all of the steps of any of the methods described in the above method embodiments.

[0090] It should be noted that, for the sake of simplicity, the above embodiments are all described as a series of actions. Those skilled in the art should understand that this application is not limited to the described order of actions, as some steps in the embodiments of this application can be performed in other orders or simultaneously. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions, steps, modules, or units involved are not necessarily essential to the embodiments of this application.

[0091] In the above embodiments, the descriptions of each embodiment in this application have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0092] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. This program can be stored in a computer-readable storage medium, and when executed, it can include the processes described in the above method embodiments. The aforementioned storage medium includes various media capable of storing program code, such as ROM or random access memory (RAM), magnetic disks, or optical disks.

[0093] The steps of the methods or algorithms described in the embodiments of this application can be implemented in hardware or by a processor executing software instructions. The software instructions can consist of corresponding software modules, which can be stored in RAM, flash memory, ROM, EPROM, electrically erasable programmable read-only memory (EEPROM), registers, hard disk, portable hard disk, read-only optical disk (CD-ROM), or any other form of storage medium well known in the art. An exemplary storage medium is coupled to a processor, enabling the processor to read information from and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and storage medium can reside in an ASIC. Furthermore, the ASIC can reside in a terminal device or management device. Alternatively, the processor and storage medium can exist as discrete components in the terminal device or management device.

[0094] Those skilled in the art will recognize that, in one or more of the examples above, the functions described in the embodiments of this application can be implemented, in whole or in part, by software, hardware, firmware, or any combination thereof. When implemented in software, it can be implemented, in whole or in part, as a computer program product. This computer program product includes one or more computer instructions. When these computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another via wired (e.g., coaxial cable, fiber optic, digital subscriber line (DSL)) or wireless (e.g., infrared, microwave, etc.) means. The computer-readable storage medium can be any available medium accessible to a computer or a data storage device such as a server or data center that integrates one or more available media. The available media can be magnetic media (e.g., floppy disks, hard disks, magnetic tapes), optical media (e.g., digital video discs (DVDs)), or semiconductor media (e.g., solid-state disks (SSDs)).

[0095] The modules / units included in the various devices and products described in the above embodiments can be software modules / units, hardware modules / units, or a combination of both. For example, for devices and products applied to or integrated into a chip, all modules / units can be implemented using hardware methods such as circuits, or at least some modules / units can be implemented using software programs that run on a processor integrated within the chip, while the remaining (if any) modules / units can be implemented using hardware methods such as circuits. For devices and products applied to or integrated into a chip module, all modules / units can be implemented using hardware methods such as circuits. Different modules / units can be located in the same component (e.g., chip, circuit module, etc.) or different components of the chip module, or at least some modules / units can be implemented using hardware methods such as circuits. The implementation is achieved through a software program that runs on the processor integrated within the chip module. The remaining modules / units (if any) can be implemented using hardware methods such as circuits. For various devices and products applied to or integrated into terminal equipment, each of their modules / units can be implemented using hardware methods such as circuits. Different modules / units can be located in the same component (e.g., chip, circuit module, etc.) or different components within the terminal equipment. Alternatively, at least some modules / units can be implemented through a software program that runs on the processor integrated within the terminal equipment, while the remaining modules / units (if any) can be implemented using hardware methods such as circuits.

[0096] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the embodiments of this application. It should be understood that the above descriptions are merely specific embodiments of the embodiments of this application and are not intended to limit the protection scope of the embodiments of this application. Any modifications, equivalent substitutions, improvements, etc., made on the basis of the technical solutions of the embodiments of this application should be included within the protection scope of the embodiments of this application.

Claims

1. A fall arrestor based on OHT to reduce vehicle vibration, characterized in that, The fall protection device includes two fall protection and shock absorption mechanisms arranged opposite to each other, and the fall protection and shock absorption mechanisms include: The motor base is positioned at the preset mounting location of the OHT; A drive mechanism includes a drive motor and a motor shaft seat, wherein the drive motor is disposed on the first end face of the motor base and the motor shaft seat is sleeved on the output shaft of the drive motor. The detection component is disposed on the second end face of the motor base; The opening and closing linkage mechanism includes an opening and closing linkage assembly connected to the motor shaft seat, and a shock-absorbing clamping assembly disposed on the opening and closing linkage assembly; the shock-absorbing clamping assembly is disposed on the end face of the opening and closing linkage mechanism near the drive motor.

2. The fall arrestor as described in claim 1, characterized in that, The shock-absorbing clamping assembly includes two opposing shock-absorbing linkage mechanisms. Each shock-absorbing linkage mechanism includes: a spring arm, a support arm disposed near the second end face of the spring arm, a shock-absorbing wheel disposed at the first end of the spring arm, a spring bearing seat disposed at the second end of the spring arm, and a spring disposed in the spring bearing seat. The shock-absorbing clamping assembly is used to clamp the carrier and reduce the amount of vibration of the carrier during the operation of the OHT. The support arm is used to support the carrier. The spring is used to absorb the vibration of the carrier. The shock-absorbing wheel is used to contact the carrier and provide friction force to the carrier in the vertical direction.

3. The fall arrestor as described in claim 1, characterized in that, The opening and closing linkage assembly includes a first link and a second link; When the opening and closing linkage mechanism is opened, the drive motor drives the motor shaft seat sleeved on the output shaft to rotate in the first direction. The first link and the second link respond to the rotation of the motor shaft seat to drive the shock-absorbing clamping assembly disposed on the first link and the second link to clamp the carrier. When the opening and closing linkage mechanism is closed, the drive motor drives the motor shaft seat sleeved on the output shaft to rotate in the second direction. The first link and the second link respond to the rotation of the motor shaft seat to drive the shock-absorbing clamping assembly provided on the first link and the second link to release the carrier and retract the opening and closing linkage mechanism.

4. The fall arrestor as described in claim 2, characterized in that, The shock-absorbing wheel is made of antistatic polyurethane, and the antistatic resistance value of the antistatic polyurethane is in the range of 10. 6 ~10 8 Ohms; the shock-absorbing wheel is used to reduce vibration and prevent static electricity generated between the shock-absorbing mechanism and the vehicle.

5. The fall arrestor as described in claim 3, characterized in that, The opening and closing linkage assembly further includes a first pivot member hinged to the motor shaft seat and the first link, and a second pivot member hinged to the motor shaft seat and the second link; when the first link and the second link move to the closed position and the first link and the second link are close to a straight line, the opening and closing linkage assembly is in a dead-point locked state to prevent the fall protection device from opening due to vibration and falling off the vehicle.

6. The fall arrestor as described in claim 1, characterized in that, The motor base includes: a transverse support beam, and a first platform of a preset shape disposed on the transverse support beam; a first hole of a preset size is provided in the middle area of ​​the first platform, and the drive motor is installed on the first platform by fasteners and is connected to the motor shaft seat for transmission through the first hole.

7. The fall arrestor as described in claim 1, characterized in that, The detection component includes: a detection unit, a control unit, and an alarm unit disposed on the second platform; the second platform is parallel to the second end face and spaced from the second end face by a second preset length, wherein: The detection unit is used to detect a first signal of the vehicle within the clamping area; the clamping area is the area formed by the cooperation of a pair of the opening and closing linkage mechanisms. The control unit is connected to the detection unit and is used to receive the first signal; determine the speed parameters of the vehicle based on the first signal; and send a preset alarm message to the alarm unit when the speed parameters are greater than or equal to a preset speed threshold. The alarm unit receives the alarm information sent by the control unit and outputs the corresponding prompt information.

8. The fall arrestor as described in claim 7, characterized in that, In determining the speed parameters of the vehicle based on the first signal, the control unit is specifically configured to: Determine the amplitude parameter in the first signal; The amplitude change rate of the preset time interval is determined based on the amplitude parameter; The speed parameter corresponding to the amplitude change rate is determined based on the preset mapping relationship between the amplitude change rate and the preset vehicle speed parameter, and the speed parameter is obtained.

9. A method for preventing vehicle falls by reducing vibration based on OHT, characterized in that, Applied to an OHT handling system, the OHT handling system including an OHT, OHT grippers, a carrier, and a fall arrestor, the method includes: The system controls the OHT to transport the vehicle. When the OHT arrives at the temporary storage station, the system controls the OHT grippers to grip the vehicle according to a preset gripping strategy. During vehicle transport, the system controls the OHT to move according to a preset traveling strategy, which includes: Control the OHT to carry the vehicle along a preset direction of travel to the first temporary storage station, and control the fall protection device to be in the activated state; In response to the OHT stopping and positioning at the first temporary storage station, the system controls the fall arrestor to be in the off state, and controls the OHT to place the first vehicle at the first temporary storage station; After the first vehicle is placed at the first temporary storage station, the OHT gripper is controlled to retract to the OHT, and the fall arrestor is controlled to be in the activated state. During the vehicle grabbing process, the OHT is controlled to perform operations according to a preset grabbing strategy, which includes: Control the OHT to travel to the second temporary storage station; In response to the OHT stopping and positioning at the second temporary storage station, the OHT gripper is controlled to descend along the Z-axis to the second temporary storage station; The OHT gripper is controlled to pick up the second carrier; the second carrier is placed in the second temporary storage station; In response to the successful gripping of the second vehicle by the OHT gripper, the OHT gripper is controlled to lift the second vehicle upward and place the second vehicle on the fall arrestor; Control the OHT gripper to retract to the OHT, and control the anti-fall device to activate.

10. The method as described in claim 9, characterized in that, The fall arrestor includes a drive motor and a fall arrestor linkage mechanism; placing the second vehicle on the fall arrestor includes: The weight of the second vehicle and the speed of the OHT gripper are obtained; Obtain the first included angle and the second included angle in the fall arrestor linkage mechanism of the fall arrestor device; the first included angle is the angle formed by the first link and the second link in the fall arrestor linkage mechanism; the second included angle is the angle formed by the third link and the fourth link in the fall arrestor linkage mechanism; When both the first included angle and the second included angle reach the preset included angle threshold, the drive motor is controlled to rotate, and the anti-fall linkage mechanism is driven to lock the second vehicle.

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