Pressure sensor and preparation method thereof

Abstract

The invention provides a pressure sensor and a preparation method thereof, a first electrode in the pressure sensor comprises a first substrate and a first electrode unit, and a first groove of the first substrate is filled with the first electrode unit; the second electrode comprises a second substrate and a second electrode unit, and the second groove of the second substrate is filled with the second electrode unit; the distance between the two first electrode subsections is L1, the width of each first electrode subsection is L2, the thickness of each first electrode subsection is H1, L1 is greater than or equal to 2 microns and less than or equal to 500 microns, L2 is greater than or equal to 2 microns and less than or equal to 500 microns, and H1 / L2 is greater than or equal to 1; the distance between the two second electrode subsections is L3, the width of each second electrode subsection is L4, the thickness of each second electrode subsection is H2, L3 is larger than or equal to 2 micrometers and smaller than or equal to 500 micrometers, L4 is larger than or equal to 2 micrometers and smaller than or equal to 500 micrometers, and H2 / L4 is larger than or equal to 1. The electrode structure in the pressure sensor has the advantages of narrow line width, high aspect ratio, high consistency and uniformity, the prepared electrode structure of the pressure sensor has the characteristics of high density and high resolution, and the quality of the electrode structure is improved.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, and in particular to a pressure sensor and its fabrication method. Background Technology

[0002] Pressure sensors are devices used to sense the magnitude of forces acting on the surface of an object, and they have broad application prospects in fields such as medical health, robotics, biomechanics, and human-computer interaction interfaces. With the development of high technologies such as artificial intelligence, pressure sensors that combine high precision, high stability, consistency, fatigue resistance, large range, and high sensitivity have become a hot topic of interest. Summary of the Invention

[0003] This invention provides a pressure sensor and its fabrication method. By adjusting the electrode structure, the electrode structure can be made to have the advantages of narrow linewidth, high aspect ratio, high consistency and uniformity, thereby achieving high density and high resolution in the pressure sensor and improving the quality of the pressure sensor.

[0004] In a first aspect, embodiments of the present invention provide a pressure sensor, including an electrode structure and a sensing layer;

[0005] The electrode structure includes a first electrode and a second electrode;

[0006] The first electrode includes a first substrate and a first electrode unit. The first substrate includes a plurality of first grooves, which penetrate a portion of the first substrate. The first electrode unit includes a plurality of first electrode portions, which fill the first grooves. Along the thickness direction of the first substrate, the sensing layer at least partially overlaps with the first electrode portions.

[0007] The second electrode includes a second substrate and a second electrode unit. The second substrate includes a plurality of second grooves, which penetrate a portion of the second substrate. The second electrode unit includes a plurality of second electrode portions, which fill the second grooves. Along the thickness direction of the second substrate, the sensing layer at least partially overlaps with the second electrode portions.

[0008] Wherein, along the arrangement direction of the plurality of first electrode portions, the distance between two adjacent first electrode portions is L1, the width of the first electrode portion is L2, and along the thickness direction of the first substrate, the thickness of the first electrode portion is H1, satisfying: 2 micrometers ≤ L1 ≤ 500 micrometers, 2 micrometers ≤ L2 ≤ 500 micrometers, 1 ≤ H1 / L2.

[0009] Along the arrangement direction of the plurality of second electrode portions, the spacing between two adjacent second electrode portions is L3, the width of the second electrode portion is L4, and along the thickness direction of the second substrate, the thickness of the second electrode portion is H2, satisfying: 2 micrometers ≤ L3 ≤ 500 micrometers, 2 micrometers ≤ L4 ≤ 500 micrometers, and 4 ≤ H2 / L4.

[0010] Optionally, the second substrate and the first substrate are the same substrate, and the first groove and the second groove are located on the same side of the first substrate;

[0011] The first electrode portion extends along a first direction, and a plurality of the first electrode portions are arranged along a second direction; the second electrode portions extend along the first direction, and a plurality of the second electrode portions are arranged along the second direction.

[0012] Along the second direction, the first electrode portion and the second electrode portion are alternately arranged; the first direction and the second direction intersect and are parallel to the plane where the first substrate is located.

[0013] Optionally, the pressure sensor further includes a first adhesive film and a flexible substrate;

[0014] Along the thickness direction of the first substrate, the first adhesive film is located between the sensing layer and the first substrate; the orthographic projection of the first adhesive film on the first substrate does not overlap with the orthographic projection of the first electrode portion on the first substrate, and the orthographic projection of the first adhesive film on the first substrate does not overlap with the orthographic projection of the second electrode portion on the first substrate.

[0015] The flexible substrate is located on the side of the sensing layer away from the first substrate.

[0016] Optionally, the first substrate further includes a plurality of third grooves, the third grooves penetrating a portion of the first substrate, the first electrode unit including a plurality of third electrode portions, the third electrode portions filling the third grooves; along the thickness direction of the first substrate, the sensing layer does not overlap with the third electrode portions; the third electrode portions connect the first electrode portions and the external module;

[0017] The second substrate further includes a plurality of fourth grooves, the fourth grooves penetrating a portion of the second substrate, the second electrode unit including a plurality of fourth electrode portions, the fourth electrode portions filling the fourth grooves; along the thickness direction of the second substrate, the sensing layer does not overlap with the fourth electrode portions; the fourth electrode portions connect the second electrode portions and the external module.

[0018] Optionally, the first substrate and the second substrate are arranged parallel to each other and facing each other, with the first electrode portion located on the side of the first substrate closer to the second substrate, and the second electrode portion located on the side of the second substrate closer to the first substrate.

[0019] The first electrode portion extends along a third direction, and a plurality of first electrode portions are arranged along a fourth direction. The second electrode portion extends along the fourth direction, and a plurality of second electrode portions are arranged along the third direction. Along the thickness direction of the first substrate, the first electrode portion and the second electrode portion at least partially overlap. The third direction and the fourth direction intersect and are parallel to the plane of the first substrate.

[0020] Optionally, the pressure sensor includes a sensing layer located between the first substrate and the second substrate along the thickness direction of the first substrate.

[0021] The pressure sensor further includes an adhesive film, which includes a second adhesive film and a third adhesive film; along the thickness direction of the first substrate, the second adhesive film is located between the sensing layer and the first substrate, and the third adhesive film is located between the sensing layer and the second substrate.

[0022] The orthographic projection of the adhesive film on the first substrate does not overlap with the orthographic projection of the first electrode portion on the first substrate, and the orthographic projection of the adhesive film on the first substrate does not overlap with the orthographic projection of the second electrode portion on the first substrate.

[0023] Optionally, the sensing layer includes a first sensing layer and a second sensing layer; along the thickness direction of the first substrate, the first sensing layer is located on the side of the first substrate closer to the second substrate, and the second sensing layer is located on the side of the second substrate closer to the first substrate.

[0024] The pressure sensor further includes a fourth adhesive film, which is located between the first sensing layer and the second sensing layer; the orthographic projection of the fourth adhesive film on the first substrate does not overlap with the orthographic projection of the first electrode portion on the first substrate, and the orthographic projection of the fourth adhesive film on the first substrate does not overlap with the orthographic projection of the second electrode portion on the first substrate.

[0025] Optionally, the first substrate further includes a plurality of fifth grooves, the fifth grooves penetrating a portion of the first substrate, the first electrode unit including a plurality of fifth electrode portions, the fifth electrode portions filling the fifth grooves; along the thickness direction of the first substrate, the sensing layer does not overlap with the fifth electrode portions; the fifth electrode portions connect the first electrode portions and the external module;

[0026] The second substrate further includes a plurality of sixth grooves, the sixth grooves penetrating a portion of the second substrate, the second electrode unit including a plurality of sixth electrode portions, the sixth electrode portions filling the sixth grooves; along the thickness direction of the second substrate, the sensing layer does not overlap with the sixth electrode portions; the sixth electrode portions connect the second electrode portions and the external module.

[0027] Along the arrangement direction of the plurality of fifth electrode portions, the distance between two adjacent fifth electrode portions is L5, and along the arrangement direction of the plurality of sixth electrode portions, the distance between two adjacent sixth electrode portions is L6, satisfying: 10 micrometers ≤ L5 ≤ 5 millimeters, 10 micrometers ≤ L6 ≤ 5 millimeters.

[0028] Optionally, the first groove includes a first sub-groove and / or a second sub-groove, the first sub-groove extending along a fifth direction, the second sub-groove extending along a sixth direction, the fifth direction intersecting the sixth direction and being parallel to the plane where the sensing layer is located;

[0029] The second groove includes a third sub-groove and / or a fourth sub-groove, the third sub-groove extending along a seventh direction and the fourth sub-groove extending along an eighth direction, the seventh direction and the eighth direction intersecting and being parallel to the plane of the sensing layer.

[0030] In a second aspect, embodiments of the present invention provide a method for fabricating a pressure sensor, used to fabricate the pressure sensor described in any one of the first aspects, the fabrication method comprising:

[0031] Provide a first substrate;

[0032] A plurality of first grooves are formed in the first substrate, and the first grooves penetrate a portion of the first substrate;

[0033] The first electrode portion is filled in the first groove; wherein, along the arrangement direction of the plurality of first electrode portions, the distance between two adjacent first electrode portions is L1, the width of the first electrode portion is L2, and along the thickness direction of the first substrate, the thickness of the first electrode portion is H1, satisfying: 2 micrometers ≤ L1 ≤ 500 micrometers, 2 micrometers ≤ L2 ≤ 500 micrometers, 1 ≤ H1 / L2.

[0034] Provide a second substrate;

[0035] A plurality of second grooves are formed in the second substrate, and the second grooves penetrate a portion of the second substrate;

[0036] The second electrode portion is filled in the second groove; wherein, along the arrangement direction of the plurality of second electrode portions, the distance between two adjacent second electrode portions is L3, the width of the second electrode portion is L4, and along the thickness direction of the second substrate, the thickness of the second electrode portion is H2, satisfying: 2 micrometers ≤ L3 ≤ 500 micrometers, 2 micrometers ≤ L4 ≤ 500 micrometers, 1 ≤ H2 / L4.

[0037] A sensing layer is prepared, wherein the sensing layer overlaps at least partially with the first electrode portion and at least partially with the second electrode portion along the thickness direction of the sensing layer.

[0038] In summary, this invention provides a pressure sensor, wherein the electrode structure of the pressure sensor includes a first electrode and a second electrode. The first electrode includes a first substrate and a first electrode unit. The first substrate includes a plurality of first grooves, and the first electrode unit fills the first grooves. The second electrode includes a second substrate and a second electrode unit. The second substrate includes a plurality of second grooves, and the second electrode unit fills the second grooves. The distance between two first electrode portions is L1, the width of the first electrode portion is L2, and the thickness of the first electrode portion is H1, satisfying 2 μm ≤ L1 ≤ 500 μm, 2 μm ≤ L2 ≤ 500 μm, and 1 ≤ H1 / L2. The distance between two second electrode portions is L3, the width of the second electrode portion is L4, and the thickness of the second electrode portion is H2, satisfying 2 μm ≤ L3 ≤ 500 μm, 2 μm ≤ L4 ≤ 500 μm, and 1 ≤ H2 / L4. This ensures that the electrode structure in the pressure sensor has the advantages of narrow linewidth, high aspect ratio, high consistency, and uniformity. When applied to pressure sensors, this ensures that the pressure sensor has high density and high resolution, improving the quality of the pressure sensor. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of the first pressure sensor provided in the embodiment of the present invention;

[0041] Figure 2 yes Figure 1 A schematic diagram of the structure of the first electrode in the middle;

[0042] Figure 3 yes Figure 1 A schematic diagram of the structure of the second electrode in the middle;

[0043] Figure 4 yes Figure 1 A schematic diagram of a cross-section along section line A-A';

[0044] Figure 5 This is a schematic diagram of the structure of the second type of pressure sensor provided in this embodiment of the invention;

[0045] Figure 6 yes Figure 5 A schematic diagram of the structure of the first electrode in the middle;

[0046] Figure 7 yes Figure 5 A schematic diagram of the structure of the second electrode in the middle;

[0047] Figure 8 yes Figure 5 A schematic diagram of a cross-section along section line B-B';

[0048] Figure 9 yes Figure 1 A schematic diagram of a cross-section along section line C-C';

[0049] Figure 10 This is a schematic diagram of the structure of the third type of pressure sensor provided in the embodiments of the present invention;

[0050] Figure 11 This is a schematic diagram of the structure of the fourth type of pressure sensor provided in the embodiments of the present invention;

[0051] Figure 12 This is a schematic diagram of the structure of the fifth type of pressure sensor provided in the embodiments of the present invention;

[0052] Figure 13 This is a schematic diagram of the structure of the sixth pressure sensor provided in this embodiment of the invention;

[0053] Figure 14 yes Figure 5 Another schematic diagram of a cross section along section line B-B';

[0054] Figure 15 yes Figure 6 A schematic diagram of a cross-section along section line D-D';

[0055] Figure 16 This is a structural schematic diagram of the seventh type of pressure sensor provided in the embodiments of the present invention;

[0056] Figure 17 This is a schematic diagram of the structure of the eighth pressure sensor provided in this embodiment of the invention;

[0057] Figure 18 This is an enlarged schematic diagram of a first electrode portion provided in an embodiment of the present invention;

[0058] Figure 19 This is an enlarged schematic diagram of a second electrode portion provided in an embodiment of the present invention;

[0059] Figure 20 yes Figure 19 A magnified schematic diagram of one type of sensing layer;

[0060] Figure 21 yes Figure 19 A magnified schematic diagram of another type of sensing layer in the middle;

[0061] Figure 22 yes Figure 19 An enlarged schematic diagram of another type of sensing layer;

[0062] Figure 23 A schematic flowchart of a method for preparing a pressure sensor is provided in an embodiment of the present invention. Detailed Implementation

[0063] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0064] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0065] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0066] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0067] Figure 1 This is a schematic diagram of the structure of the first pressure sensor provided in the embodiment of the present invention. Figure 2 yes Figure 1 A schematic diagram of the structure of the first electrode. Figure 3 yes Figure 1 A schematic diagram of the structure of the second electrode. Figure 4 yes Figure 1 A schematic diagram of a cross-section along section line A-A'. Figure 5 This is a schematic diagram of the structure of the second type of pressure sensor provided in this embodiment of the invention. Figure 6 yes Figure 5 A schematic diagram of the structure of the first electrode. Figure 7 yes Figure 5 A schematic diagram of the structure of the second electrode. Figure 8 yes Figure 5 A schematic diagram of a cross-section along section line B-B', for reference. Figures 1 to 8As shown, this embodiment of the invention provides a pressure sensor 10, which includes an electrode structure 100 and a sensing layer 200. The electrode structure 100 includes a first electrode 110 and a second electrode 120. The first electrode 110 includes a first substrate 111 and a first electrode unit 112. The first substrate 111 includes a plurality of first grooves 111a, which penetrate a portion of the first substrate 111. The first electrode unit 112 includes a plurality of first electrode portions 112a, which fill the first grooves 111a. Along the thickness direction of the first substrate 111, the sensing layer 200 at least partially overlaps with the first electrode portions 112a. The second electrode 120 includes a second substrate 121 and a second electrode unit 122. The second substrate 121 includes a plurality of second grooves 121a, which penetrate a portion of the second substrate 121. The second electrode unit 122 includes a plurality of second electrode portions 122a. The second electrode portion 122a fills the second groove 121a; along the thickness direction of the second substrate 121, the sensing layer 200 at least partially overlaps with the second electrode portion 122a; wherein, along the arrangement direction of the plurality of first electrode portions 112a, the spacing between two adjacent first electrode portions 112a is L1, the width of the first electrode portion 112a is L2, and along the thickness direction of the first substrate 111, the thickness of the first electrode portion 112a is H1, satisfying: 2 microns. Meters ≤ L1 ≤ 500 micrometers, 2 micrometers ≤ L2 ≤ 500 micrometers, 1 ≤ H1 / L2; along the arrangement direction of the plurality of second electrode portions 122a, the spacing between two adjacent second electrode portions 122a is L3, the width of the second electrode portion 122a is L4, and along the thickness direction of the second substrate 121, the thickness of the second electrode portion 122a is H2, satisfying: 2 micrometers ≤ L3 ≤ 500 micrometers, 2 micrometers ≤ L4 ≤ 500 micrometers, 1 ≤ H2 / L4.

[0068] Among them, reference Figure 1 and Figure 5 As shown, the pressure sensor 10 includes an electrode structure 100 and a sensing layer 200. Along the thickness direction of the pressure sensor 10, the sensing layer 200 is located in a region where at least a portion of the electrode structure 100 overlaps. The pressure sensor 10, through the cooperation of the sensing layer 200 and the electrode structure 100, achieves a conversion between mechanical energy and electrical energy. Specifically, the pressure sensor 10 can include capacitive pressure sensors, resistive pressure sensors, piezoelectric pressure sensors, and triboelectric pressure sensors, etc. This embodiment of the invention does not specifically limit the specific type of pressure sensor 10. The material of the sensing layer 200 can be a piezoresistive material, an ionizing material, etc. Piezoresistive materials can be MXene, carbon nanotubes, carbon black, silver nanowires, or graphene, etc. The specific material of the sensing layer 200 can be adaptively adjusted according to actual needs, and this embodiment of the invention does not specifically limit it.

[0069] Specifically, the electrode structure 100 includes a first electrode 110 and a second electrode 120 that are insulated from each other. The first electrode 110 includes a first substrate 111 and a first electrode unit 112. The first substrate 111 includes multiple groove structures, and the first electrode unit 112 fills the groove structures. Thus, the first electrode unit 112 for transmitting electrical signals in the first electrode 110 is embedded in the first substrate 111. Similarly, the second electrode 120 includes a second substrate 121 and a second electrode unit 122. The second substrate 121 includes multiple groove structures, and the second electrode unit 122 fills the groove structures. Thus, the second electrode unit 122 for transmitting electrical signals in the second electrode 120 is embedded in the second substrate 121. Optionally, the first substrate 111 and the second substrate 121 can be flexible substrates, such as polyimide (PI), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polymethyl methacrylate (PMMA), polyurethane (PU), thermoplastic polyurethane (TPU), etc. This makes the pressure sensor 10 a flexible pressure sensor. Specifically, the materials of the first substrate 111 and the second substrate 121 are not specifically limited and can be adjusted adaptively according to requirements.

[0070] Furthermore, the materials of the first electrode unit 112 and the second electrode unit 122 can be one or a combination of metal nanoparticles and metallic materials, such as gold, silver, nickel, copper, platinum, zinc, iron, etc. By embedding the first electrode unit 112 and the second electrode unit 122 into their respective substrates, fatigue resistance, stability, and consistency of the first electrode unit 112 and the second electrode unit 122 can be ensured. The morphology and spacing of the first electrode unit 112 and the second electrode unit 122 can also be better adjusted, thereby improving the quality of the pressure sensor 10.

[0071] For details, please refer to Figure 1 , Figure 2 and Figure 4 or for reference Figure 5 , Figure 6 and Figure 8 As shown, the first substrate 111 includes a plurality of arrayed first grooves 111a. Each first groove 111a penetrates a portion of the first substrate 111, meaning it does not completely penetrate the entire first substrate 111. The arrangement of the first grooves 111a can be varied, such as... Figure 1 and Figure 5 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 1 and Figure 5In this embodiment, the number of first grooves 111a in the pressure sensor 10 is merely an example. Further, the first grooves 111a are groove structures formed by etching or slotting on the first substrate 111. The first electrode unit 112 includes multiple first electrode portions 112a, and the first electrode portions 112a fill the first grooves 111a. Thus, the first electrode portions 112a are embedded in the first substrate 111. By embedding the first electrode portions 112a into the first substrate 111, compared to placing the first electrode portions 112a on one side of the first substrate 111, the spacing, linewidth, etc., of the first electrode portions 112a provided in this embodiment can be finely adjusted. While achieving a high density of first electrode portions 112a, it also avoids short circuits between different first electrode portions 112a, ensuring the operational stability of the pressure sensor 10. Further, referring to... Figure 1 , Figure 2 and Figure 4 or for reference Figure 5 , Figure 6 and Figure 8 As shown, along the thickness direction of the pressure sensor 10, at least a portion of the first groove 111a overlaps with the sensing layer 200. That is, in the first electrode 110, the first electrode portion 112a achieves a partial overlap between the first electrode unit 112 and the sensing layer 200, satisfying the positional relationship of the partial sensing layer 200 and the electrode structure 100 in the pressure sensor 10.

[0072] Similarly, refer to Figure 1 , Figure 3 and Figure 4 or for reference Figure 5 , Figure 7 and Figure 8 As shown, the second substrate 121 includes a plurality of arrayed second grooves 121a. The second grooves 121a penetrate a portion of the second substrate 121, meaning they do not completely penetrate the entire second substrate 121. The arrangement of the second grooves 121a can be varied, such as... Figure 1 and Figure 5 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 1 and Figure 5In this embodiment, the number of second grooves 121a in the pressure sensor 10 is merely an example. Further, the second grooves 121a are groove structures formed by etching or slotting on the second substrate 121. The second electrode unit 122 includes multiple second electrode portions 122a, and the second electrode portions 122a fill the second grooves 121a. Thus, the second electrode portions 122a are embedded in the second substrate 121. By embedding the second electrode portions 122a into the second substrate 121, compared to placing the second electrode portions 122a on one side of the second substrate 121, the spacing, line width, etc., of the second electrode portions 122a provided in this embodiment can be finely adjusted. While achieving a high density of second electrode portions 122a, it also avoids short circuits between different second electrode portions 122a, ensuring the operational stability of the pressure sensor 10. Further, referring to... Figure 1 , Figure 3 and Figure 4 or for reference Figure 5 , Figure 7 and Figure 8 As shown, along the thickness direction of the pressure sensor 10, at least a portion of the second groove 121a overlaps with the sensing layer 200. That is, in the second electrode 120, a portion of the second electrode unit 122 overlaps with the sensing layer 200 through the second electrode portion 122a, satisfying the positional relationship of overlapping between a portion of the sensing layer 200 and the electrode structure 100 in the pressure sensor 10.

[0073] Specifically, in combination Figure 2 and Figure 4 As shown, or in combination Figure 6 and Figure 8 As shown, along the arrangement direction of the plurality of first electrode portions 112a, the spacing between two adjacent first electrode portions 112a is L1, where L1 satisfies 2 μm ≤ L1 ≤ 500 μm. Preferably, L1 can also be adjusted to satisfy 2 μm ≤ L1 ≤ 3 μm. Along the arrangement direction of the plurality of first electrode portions 112a, the width of the first electrode portion 112a is L2, where L2 satisfies 2 μm ≤ L2 ≤ 500 μm. Preferably, L2 can also be adjusted to satisfy 2 μm ≤ L2 ≤ 3 μm. By adjusting the spacing and width of the first electrode portions 112a, a high-density arrangement of the first electrode portions 112a in the first electrode 110 can be achieved, which is beneficial for realizing the high-density performance of the pressure sensor 10. Along the thickness direction of the first substrate 111, the thickness of the first electrode portion 112a is H1, where H1 / L2 satisfies: 1≤H1 / L2. This allows the first electrode portion 112a to have a larger aspect ratio, meaning that a larger volume of the first electrode portion 112a can be filled in the first substrate 111, ensuring the working stability and reliability of the pressure sensor 10.

[0074] Similarly, refer to Figure 3 and Figure 4 or refer to Figure 7 and Figure 8 As shown, along the arrangement direction of the plurality of second electrode portions 122a, the spacing between two adjacent second electrode portions 122a is L3, where L3 satisfies 2 μm ≤ L3 ≤ 500 μm. Preferably, L3 can also be adjusted to satisfy 2 μm ≤ L3 ≤ 3 μm. Along the arrangement direction of the plurality of second electrode portions 122a, the width of the second electrode portion 122a is L4, where L4 satisfies 2 μm ≤ L2 ≤ 500 μm. Preferably, L4 can also be adjusted to satisfy 2 μm ≤ L1 ≤ 3 μm. By adjusting the spacing and width of the second electrode portions 122a, a high-density arrangement of the second electrode portions 122a in the second electrode 120 can be achieved, which is beneficial for realizing the high-density performance of the pressure sensor 10. Along the thickness direction of the second substrate 121, the thickness of the second electrode portion 122a is H2, where H2 / L4 satisfies: 1≤H2 / L4. This allows the second electrode portion 122a to have a larger aspect ratio, meaning that a larger volume of the second electrode portion 122a can be filled in the second substrate 121, ensuring the working stability and reliability of the pressure sensor 10.

[0075] Optionally, in the pressure sensor provided in this embodiment of the invention, the array density of the electrode structure can be greater than or equal to 1000 electrodes / cm². 2 It should be noted that, Figures 1 to 8 Only a portion of the structure of the pressure sensor 10 is shown. (Combined with...) Figure 1 As shown in the figure, a sensing layer 200 covers a portion of the electrode structure. The electrode structure in the area covered by one sensing layer 200 can be understood as an electrode array unit in a pressure sensor. A piezoelectric sensor may include multiple electrode array units, for example, a pressure sensor may include more than or equal to 1000 electrodes / cm. 2 This demonstrates the high density of electrode structures in the pressure sensor. Similarly, combined with... Figure 5 As shown, along the thickness direction of sensor 200, the overlapping area of ​​a first electrode portion 112a and a second electrode portion 122a can be understood as an electrode array unit. A piezoelectric sensor may include multiple electrode array units, for example, a pressure sensor may include more than or equal to 1000 electrodes / cm. 2 This reflects the high density of electrode structures in the pressure sensor.

[0076] In summary, the pressure sensor provided by this invention includes an electrode structure comprising a first electrode and a second electrode. The first electrode comprises a first substrate and a first electrode unit, the first substrate comprising a plurality of first grooves, the first electrode unit being filled within the first grooves. The second electrode comprises a second substrate and a second electrode unit, the second substrate comprising a plurality of second grooves, the second electrode unit being filled within the second grooves. The distance between two first electrode portions is L1, the width of the first electrode portion is L2, and the thickness of the first electrode portion is H1, satisfying 2 μm ≤ L1 ≤ 500 μm, 2 μm ≤ L2 ≤ 500 μm, and 1 ≤ H1 / L2. The distance between two second electrode portions is L3, the width of the second electrode portion is L4, and the thickness of the second electrode portion is H2, satisfying 2 μm ≤ L3 ≤ 500 μm, 2 μm ≤ L4 ≤ 500 μm, and 1 ≤ H2 / L4. This design solves the problems of consistency and stability of the electrode structure and ensures high precision in the electrode structure. When applied to pressure sensors, it ensures high density and high resolution, improving the quality of the pressure sensor.

[0077] Continue to refer to Figures 1 to 4 As shown, the second substrate 121 and the first substrate 111 are the same substrate, and the first groove 111a and the second groove 121a are located on the same side of the first substrate 111; the first electrode portion 112a extends along the first direction X1, and a plurality of first electrode portions 112a are arranged along the second direction X2; the second electrode portion 122a extends along the first direction X1, and a plurality of second electrode portions 122a are arranged along the second direction X2; wherein, along the second direction X2, the first electrode portion 112a and the second electrode portion 122a are alternately arranged; the first direction X1 and the second direction X2 intersect and are parallel to the plane where the first substrate 111 is located.

[0078] For details, please refer to Figures 1 to 4 As shown, the second substrate 121 and the first substrate 111 are the same substrate, therefore the first groove 111a and the second groove 121a are located on the same side of the first substrate 111. In other words, the first electrode 110 and the second electrode 120 are disposed on the same side of the same substrate, which is equivalent to the first electrode unit 112 and the second electrode unit 122 being embedded in the same substrate structure. This facilitates the thin design of the pressure sensor 10 and the integrated arrangement of the pressure sensor 10.

[0079] Among them, reference Figure 1As shown, the extension direction of the first electrode portion 112a is parallel to the extension direction of the second electrode portion 122a, and the first electrode portion 112a and the second electrode portion 122a are alternately arranged along the extension direction perpendicular to the first electrode portion 112a. This makes the first electrode 110 and the second electrode 120 "interdigitated" in the area covered by the sensing layer 200, thereby improving the sensitivity and high density of the pressure sensor 10.

[0080] Further reference Figures 1 to 4 As shown, in the pressure sensor 10, the first electrode portion 112a and the second electrode portion 122a are embedded on the same substrate, forming interdigitated electrodes. Since both the first electrode portion 112a and the second electrode portion 122a are embedded, the spacing between two adjacent first electrode portions 112a in the interdigitated pressure sensor 10 can be effectively adjusted, thus adjusting the linewidth of the first electrode portion 112a; the spacing between two adjacent second electrode portions 122a can be adjusted, thus adjusting the linewidth of the second electrode portion 122a; furthermore, the aspect ratio of the first electrode portion 112a and the second electrode portion 122a can also be adjusted. In other words, the fabricated embedded high-density electrode structure has the advantages of narrow linewidth, high aspect ratio, high consistency, and uniformity; based on this, the fabricated pressure sensor array has high density, high resolution, and high consistency, ensuring that the interdigitated pressure sensor has high density and high resolution, thus improving the quality of the pressure sensor.

[0081] Continue to refer to Figures 1 to 4 As shown, the pressure sensor 10 also includes a first adhesive film 310 and a flexible substrate 400; along the thickness direction of the first substrate 111, the first adhesive film 310 is located between the sensing layer 200 and the first substrate 111; the orthographic projection of the first adhesive film 310 on the first substrate 111 does not overlap with the orthographic projection of the first electrode portion 112a on the first substrate 111, and the orthographic projection of the first adhesive film 310 on the first substrate 111 does not overlap with the orthographic projection of the second electrode portion 122a on the first substrate 111; the flexible substrate 400 is located on the side of the sensing layer 200 away from the first substrate 111.

[0082] For further details, please refer to [link / reference]. Figure 4 As shown, the pressure sensor 10 also includes a first adhesive film 310, which is located between the sensing layer 200 and the first substrate 111 along the thickness direction of the pressure sensor 10. Since the first substrate 111 and the second substrate 121 are the same substrate, the first adhesive film 310 is also located between the sensing layer 200 and the second substrate 121. Optionally, the first adhesive film 310 can be a high-viscosity colloid or a high-viscosity film material; the specific material of the first adhesive film 310 is not limited in this embodiment of the invention. Figure 4As shown, the first adhesive film 310 is located on the side of the first substrate 111 near the sensing layer 200. By setting the first adhesive film 310, the structural stability of the sensing layer 200 and the first substrate 111 can be ensured, further improving the structural stability and reliability of the pressure sensor 10. Furthermore, the orthographic projection of the first adhesive film 310 on the first substrate 111 does not overlap with the orthographic projection of the second electrode portion 122a on the first substrate 111, thus demonstrating that the first adhesive film 310 protects the structural stability of the pressure sensor 10 without interfering with the electrode structure 100, ensuring the reliability of the pressure sensor 10.

[0083] Further reference Figure 4 As shown, the pressure sensor 10 also includes a flexible substrate 400, which is located on the side of the sensing layer 200 away from the first substrate 111. Therefore, the flexible substrate 400 can further protect the structure of the pressure sensor 10, ensuring the structural stability and reliability of the pressure sensor 10. Optionally, the material of the flexible substrate 400 can be the same as that of the first substrate 111.

[0084] Figure 9 yes Figure 1 A schematic diagram of a cross-section along section line C-C'. Figure 10 This is a schematic diagram of the structure of the third type of pressure sensor provided in this embodiment of the invention. Figure 11 This is a schematic diagram of the structure of the fourth type of pressure sensor provided in this embodiment of the invention. Figure 12 This is a schematic diagram of the structure of the fifth type of pressure sensor provided in this embodiment of the invention. Figure 13 This is a structural schematic diagram of the sixth type of pressure sensor provided in this embodiment of the invention, for reference. Figures 1 to 4 , Figures 9 to 13 As shown, the first substrate 111 further includes a plurality of third grooves 111b, the third grooves 111b penetrating a portion of the first substrate 111; the first electrode unit 112 includes a plurality of third electrode portions 112b, the third electrode portions 112b filling the third grooves 111b; along the thickness direction of the first substrate 111, the sensing layer 200 does not overlap with the third electrode portions 112b; the third electrode portions 112b connect the first electrode portion 112a and the external module 20; the second substrate 121 further includes a plurality of fourth grooves 121b, the fourth grooves 121b penetrating a portion of the second substrate 121; the second electrode unit 122 includes a plurality of fourth electrode portions 122b, the fourth electrode portions 122b filling the fourth grooves 121b; along the thickness direction of the second substrate 121, the sensing layer 200 does not overlap with the fourth electrode portions 122b; the fourth electrode portions 122b connect the second electrode portion 122a and the external module 20.

[0085] Further reference Figures 1 to 4 , Figure 9 As shown, the first substrate 111 includes a plurality of arrayed third grooves 111b. The third grooves 111b penetrate a portion of the first substrate 111, meaning they do not completely penetrate the entire first substrate 111. The arrangement of the third grooves 111b can be varied, such as... Figure 1 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 1 The number of third grooves 111b in the pressure sensor 10 is merely an example. Further, the third grooves 111b are groove structures formed by etching or slotting the first substrate 111. The first electrode unit 112 includes multiple third electrode portions 112b, and the third electrode portions 112b fill the third grooves 111b. Thus, the third electrode portions 112b are embedded in the first substrate 111. By filling the third electrode portions 112b into the third grooves 111b, compared to placing the third electrode portions 112b on one side of the surface of the first substrate 111, the structural stability and reliability of the third electrode portions 112b are improved. One side of the third electrode portion 112b is electrically connected to the first electrode portion 112a, and the other side of the third electrode portion 112b is electrically connected to the external module 20, realizing the transmission of electrical signals from the pressure sensor 10 and ensuring the normal operation of the pressure sensor 10. The external module 20 can be an external test terminal or test equipment, such as a circuit board. Test terminals and test equipment are existing technologies, and this embodiment of the invention will not describe them in detail.

[0086] Similarly, refer to Figures 1 to 4 , Figure 9 As shown, the second substrate 121 includes a plurality of fourth grooves 121b arranged in an array. The fourth grooves 121b penetrate a portion of the second substrate 121, meaning they do not completely penetrate the entire second substrate 121. The arrangement of the fourth grooves 121b can be varied, such as... Figure 1 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 1The number of fourth grooves 121b in the pressure sensor 10 is merely an example. Further, the fourth grooves 121b are groove structures formed by etching or slotting on the second substrate 121. The second electrode unit 122 includes multiple fourth electrode portions 122b, and the fourth electrode portions 122b fill the fourth grooves 121b. Thus, the fourth electrode portions 122b are embedded in the second substrate 121. By filling the fourth electrode portions 122b into the fourth grooves 121b, compared to placing the fourth electrode portions 122b on one side of the surface of the second substrate 121, the structural stability and reliability of the fourth electrode portions 122b are improved. One side of the fourth electrode portion 122b is electrically connected to the second electrode portion 122a, and the other side of the fourth electrode portion 122b is electrically connected to the external module 20, realizing the transmission of electrical signals from the pressure sensor 10 and ensuring the normal operation of the pressure sensor 10. The external module 20 can be an external test terminal or test equipment, such as a circuit board. Test terminals and test equipment are existing technologies, and this embodiment of the invention will not describe them in detail.

[0087] Further reference Figure 1 , Figure 10 and Figure 11 As shown, the first electrode portion 112a and the second electrode portion 122a extend in the same direction and are alternately arranged to form an interdigitated pressure sensor 10. However, the extending directions of the third electrode portion 112b and the fourth electrode portion 122b in the pressure sensor 10 are flexible. Figure 1 , Figure 10 and Figure 11 This is merely an example; the extending directions of the third electrode portion 112b and the fourth electrode portion 122b can be the same or different, and the extending directions of the third electrode portion 112b and the first electrode portion 112a can be the same or different. Figure 1 , Figure 10 and Figure 11 This can be understood as an enlarged schematic diagram of a set of electrode structures 100 in the pressure sensor 10. The number of electrode structures 100 in the pressure sensor 10 can be diverse, and can be referenced. Figure 12 and Figure 13 As shown. Further, see reference. Figure 13 As shown, since the third electrode portion 112b and the fourth electrode portion 122b intersect, in order to ensure the insulation arrangement of the first electrode 110 and the second electrode 120, the fourth electrode portion 122b can be located on the other side of the first substrate 111. That is, the fourth electrode portion 122b and the second electrode portion 122a are located on opposite sides of the first substrate 111, and the two are connected by a via ( Figure 13 The via (as indicated by o) enables electrical connection.

[0088] For example, an interdigitated electrode groove structure is formed on a 100-micrometer-thick PET substrate (first substrate) using a nanoimprint method. There are 9 pairs of interdigitated electrodes (the specific number can be adjusted according to actual needs). The linewidth of the first and second electrode portions is approximately 5 micrometers, the depth of the first and second grooves is approximately 6 micrometers, the line spacing of the first and second electrode portions is approximately 5 micrometers, and the size of the interdigitated portion is approximately 100 micrometers × 100 micrometers. A 1-micrometer-thick silver nanoparticle seed layer is then formed at the bottom of the first and second grooves using a blade coating method and annealed at 130°C for 10 minutes. Next, nickel is filled into the grooves using electrodeposition to completely fill them, forming the first and second electrode portions of the interdigitated electrodes. Then, a carbon paste layer is formed on the surface of the PET substrate using screen printing and annealed at 100°C for 10 minutes to remove the solvent. Finally, an adhesive film is attached to the periphery of the interdigitated electrodes, and the PET with the printed carbon layer is bonded to the interdigitated electrodes, thereby forming a piezoresistive pressure sensor for a high-interdigitated motor. This type of piezoresistive pressure sensor has a sensitivity of 8.5 kPa. -1 (0-100kPa range), the consistency reaches 8%, and the sensitivity changes by only 10% after 5000 cycles at 300kPa pressure.

[0089] Continue to refer to Figures 5 to 8 As shown, the first substrate 111 and the second substrate 121 are arranged parallel to each other and facing each other. The first electrode portion 112a is located on the side of the first substrate 111 close to the second substrate 121, and the second electrode portion 122a is located on the side of the second substrate 121 close to the first substrate 111. The first electrode portion 112a extends along a third direction X3, and a plurality of first electrode portions 112a are arranged along a fourth direction X4. The second electrode portion 122a extends along the fourth direction X4, and a plurality of second electrode portions 122a are arranged along a third direction X3. Along the thickness direction of the first substrate 111, the first electrode portion 112a and the second electrode portion 122a at least partially overlap. The third direction X3 and the fourth direction X4 intersect and are parallel to the plane where the first substrate 111 is located.

[0090] Specifically, in combination Figures 5 to 8 As shown, the first substrate 111 and the second substrate 121 are arranged parallel to each other and facing each other. Specifically, the first electrode portion 112a is located on the side of the first substrate 111 closer to the second substrate 121, and the second electrode portion 122a is located on the side of the second substrate 121 closer to the first substrate 111. In other words, the first electrode unit 112 and the second electrode unit 122 are disposed on two different substrates. (Reference) Figure 8As shown, along the thickness direction of the pressure sensor 10, there is a sensing layer 200 between the first electrode portion 112a and the second electrode portion 122a. The pressure sensor 10 can be understood as a "sandwich" electrode structure.

[0091] Further reference Figures 5 to 7 As shown, the first electrode portion 112a extends along a third direction X3, and multiple first electrode portions 112a are arranged along a fourth direction X4. The second electrode portion 122a extends along the fourth direction X4, and multiple second electrode portions 122a are arranged along a third direction X3. In other words, the extending directions of the first electrode portion 112a and the second electrode portion 122a intersect. Since both the first electrode portion 112a and the second electrode portion 122a are embedded in their respective substrates, the linewidth and spacing of the first electrode portion 112a and the second electrode portion 122a can be adjusted stably and reliably. Therefore, the arrangement of the first electrode portion 112a and the second electrode portion 122a is more flexible and reliable, and the signal transmission effect is more stable. Thus, the pressure sensor 10 with the "sandwich" electrode structure has stability and reliability.

[0092] Continue to refer to Figure 8 As shown, the pressure sensor 10 includes a sensing layer 200 located between the first substrate 111 and the second substrate 121 along the thickness direction of the first substrate 111. The pressure sensor 10 also includes an adhesive film 300, which includes a second adhesive film 320 and a third adhesive film 330. Along the thickness direction of the first substrate 111, the second adhesive film 320 is located between the sensing layer 200 and the first substrate 111, and the third adhesive film 330 is located between the sensing layer 100 and the second substrate 121. The orthographic projection of the adhesive film 300 on the first substrate 111 does not overlap with the orthographic projection of the first electrode portion 112a on the first substrate 111, and the orthographic projection of the adhesive film 300 on the first substrate 111 does not overlap with the orthographic projection of the second electrode portion 122a on the first substrate 111.

[0093] Among them, reference Figure 8As shown, the pressure sensor 10 includes a sensing layer 200 located between a first substrate 111 and a second substrate 121. The pressure sensor 10 also includes a second adhesive film 320 and a third adhesive film 330. The second adhesive film 320 is located between the sensing layer 200 and the first substrate 111, ensuring structural stability between the sensing layer 200 and the first substrate 111. The third adhesive film 330 is located between the sensing layer 100 and the second substrate 121, ensuring structural stability between the sensing layer 200 and the second substrate 121. Optionally, the second adhesive film 320 and the third adhesive film 330 can be high-viscosity colloids or high-viscosity film materials. This embodiment of the invention does not limit the specific materials of the second adhesive film 320 and the third adhesive film 330. By providing the second adhesive film 320 and the third adhesive film 330, the structural stability and reliability of the pressure sensor 10 can be further improved.

[0094] Furthermore, the orthographic projection of the adhesive film 300 on the first substrate 111 does not overlap with the orthographic projection of the second electrode portion 122a on the first substrate 111, thereby demonstrating that the adhesive film 300 protects the structural stability of the pressure sensor 10 while not interfering with the electrode structure 100, thus ensuring the reliability of the pressure sensor 10.

[0095] Figure 14 yes Figure 5 Another schematic diagram of a cross-section along section line B-B', see reference. Figure 14 As shown, the sensing layer 200 includes a first sensing layer 210 and a second sensing layer 220; along the thickness direction of the first substrate 111, the first sensing layer 210 is located on the side of the first substrate 111 close to the second substrate 121, and the second sensing layer 220 is located on the side of the second substrate 121 close to the first substrate 111; the pressure sensor 10 also includes a fourth adhesive film 340, which is located between the first sensing layer 210 and the second sensing layer 220; the orthographic projection of the fourth adhesive film 340 on the first substrate 111 does not overlap with the orthographic projection of the first electrode portion 112a on the first substrate 111, and the orthographic projection of the fourth adhesive film 340 on the first substrate 111 does not overlap with the orthographic projection of the second electrode portion 122a on the first substrate 111.

[0096] Furthermore, the sensing layer 200 located between the first substrate 111 and the second substrate 121 can be a multilayer structure, as shown in the reference. Figure 14 As shown, the sensing layer 200 includes a first sensing layer 210 and a second sensing layer 220. The first sensing layer 210 is located on the side of the first substrate 111 near the second substrate 121 and is attached to the first substrate 111. The second sensing layer 220 is located on the side of the second substrate 121 near the first substrate 111 and is attached to the second substrate 121.

[0097] Furthermore, the pressure sensor 10 also includes a fourth adhesive film 340, which is located between the first sensing layer 210 and the second sensing layer 220. The fourth adhesive film 340 can be a high-viscosity colloid or a high-viscosity film material. This embodiment of the invention does not limit the specific material of the fourth adhesive film 340. The provision of the fourth adhesive film 340 ensures the structural stability between the first sensing layer 210 and the second sensing layer 220, further improving the structural stability and reliability of the pressure sensor 10.

[0098] Figure 15 yes Figure 5 A schematic diagram of a cross-section along section line D-D'. Figure 16 This is a structural schematic diagram of the seventh pressure sensor provided in this embodiment of the invention. Figure 17 This is a structural schematic diagram of the eighth pressure sensor provided in this embodiment of the invention, for reference. Figures 5 to 8 , Figures 15 to 17 As shown, the first substrate 111 further includes a plurality of fifth grooves 111c, the fifth grooves 111c penetrating a portion of the first substrate 111, and the first electrode unit 112 includes a plurality of fifth electrode portions 112c, the fifth electrode portions 112c filling the fifth grooves 111c; along the thickness direction of the first substrate 111, the sensing layer 200 does not overlap with the fifth electrode portions 112c; the fifth electrode portions 112c connect the first electrode portion 112a and the external module 20; the second substrate 121 further includes a plurality of sixth grooves 121c, the sixth grooves 121c penetrating a portion of the second substrate 121, and the second electrode unit 122 includes a plurality of sixth electrode portions 122c, the sixth electrode portions 122c filling the sixth grooves 121c; along the thickness direction of the second substrate 121, the sensing layer 200 does not overlap with the sixth electrode portions 122c; the sixth electrode portions 122c connect the second electrode portion 122a and the external module 20. Along the arrangement direction of the plurality of fifth electrode portions 112c, the distance between two adjacent fifth electrode portions 112c is L5, and along the arrangement direction of the plurality of sixth electrode portions 122c, the distance between two adjacent sixth electrode portions 122c is L6, satisfying: 10 micrometers ≤ L5 ≤ 5 millimeters, 10 micrometers ≤ L6 ≤ 5 millimeters.

[0099] Further reference Figures 5 to 8 , Figure 15 and Figure 16 As shown, the first substrate 111 also includes a plurality of fifth grooves 111c arranged in an array. The fifth grooves 111c penetrate a portion of the first substrate 111, meaning they do not penetrate the entire first substrate 111. The arrangement of the fifth grooves 111c can be varied, such as... Figure 5This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 5 In this example, the number of fifth grooves 111c in the pressure sensor 10 is merely illustrative. Furthermore, the fifth grooves 111c are groove structures formed by etching or slotting the first substrate 111. The first electrode unit 112 includes multiple fifth electrode portions 112c, and the fifth electrode portions 112c fill the fifth grooves 111c. Thus, the fifth electrode portions 112c are embedded in the first substrate 111. By filling the fifth grooves 111c with the fifth electrode portions 112c, compared to placing the fifth electrode portions 112c on one side of the surface of the first substrate 111, the structural stability and reliability of the fifth electrode portions 112c are improved. (Referring to...) Figure 16 As shown, one side of the fifth electrode portion 112c is electrically connected to the first electrode portion 112a, and the other side of the fifth electrode portion 112c is electrically connected to the external module 20, thereby realizing the transmission of electrical signals from the pressure sensor 10 and ensuring the normal operation of the pressure sensor 10. The external module 20 can be an external test terminal or test equipment, such as a circuit board. Test terminals and test equipment are existing technologies, and this embodiment of the invention will not provide specific descriptions of them.

[0100] Similarly, refer to Figures 5 to 8 , Figure 15 and Figure 16 As shown, the second substrate 121 also includes a plurality of arrayed sixth grooves 121c. The sixth grooves 121c penetrate a portion of the first substrate 111, meaning they do not completely penetrate the first substrate 111. The arrangement of the sixth grooves 121c can be varied, such as... Figure 5 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 5 In this example, the number of sixth grooves 121c in the pressure sensor 10 is merely illustrative. Further, the sixth grooves 121c are groove structures formed by etching or slotting on the first substrate 111. The second electrode unit 122 includes multiple sixth electrode portions 122c, and the sixth electrode portions 122c fill the sixth grooves 121c. Thus, the sixth electrode portions 122c are embedded in the first substrate 111. By filling the sixth grooves 121c with the sixth electrode portions 122c, compared to placing the sixth electrode portions 122c on one side of the surface of the first substrate 111, the structural stability and reliability of the sixth electrode portions 122c are improved. (Referring to...) Figure 16As shown, one side of the sixth electrode portion 122c is electrically connected to the second electrode portion 122a, and the other side of the sixth electrode portion 122c is electrically connected to the external module 20, thereby realizing the transmission of electrical signals from the pressure sensor 10 and ensuring the normal operation of the pressure sensor 10. The external module 20 can be an external test terminal or test equipment, such as a circuit board. Test terminals and test equipment are existing technologies, and this embodiment of the invention will not provide specific descriptions of them.

[0101] Furthermore, in the pressure sensor 10, the extending directions of the first electrode portion 112a and the second electrode portion 122a intersect, while the extending directions of the fifth electrode portion 112c and the sixth electrode portion 122c are diverse. Specifically, the extending directions of the fifth electrode portion 112c and the sixth electrode portion 122c can be the same or different, and the extending directions of the fifth electrode portion 112c and the first electrode portion 112a can be the same or different. This embodiment of the invention does not impose specific limitations on this, and adaptive adjustments can be made according to actual needs. Figure 5 and Figure 16 This is just one example. Figure 16 This can be understood as a structural schematic diagram of pressure sensor 10. Figure 17 This can be understood as a physical schematic diagram of pressure sensor 10.

[0102] Further reference Figure 6 and Figure 7 As shown, along the arrangement direction of the plurality of fifth electrode portions 112c, the spacing between two adjacent fifth electrode portions 112c is L5, where L5 satisfies: 10 micrometers ≤ L5 ≤ 5 millimeters. Combined with the spacing L1 between two adjacent first electrode portions 112a, which satisfies: 2 micrometers ≤ L1 ≤ 500 micrometers, the first electrode portion 112a can be understood as a high-density electrode portion region, and the fifth electrode portion 112c as a low-density electrode portion region. The linewidths of the first electrode portions 112a and the fifth electrode portions 112c can be the same or different (e.g., the linewidth of the first electrode portion 112a is smaller than the linewidth of the fifth electrode portion 112c), and the aspect ratios of the first electrode portions 112a and the fifth electrode portions 112c on the first substrate 111 can also be the same or different (e.g., the aspect ratio of the first electrode portion 112a is smaller than the aspect ratio of the fifth electrode portion 112c).

[0103] Similarly, refer to Figure 6 and Figure 7As shown, along the arrangement direction of the multiple sixth electrode portions 122c, the spacing between two adjacent sixth electrode portions 122c is L6, where L6 satisfies: 10 micrometers ≤ L6 ≤ 5 millimeters. Combined with the spacing L3 between two adjacent second electrode portions 122a, which satisfies: 2 micrometers ≤ L3 ≤ 500 micrometers, the second electrode portion 122a can be understood as a high-density electrode portion region, and the sixth electrode portion 122c as a low-density electrode portion region. The linewidths of the second electrode portions 122a and the sixth electrode portions 122c can be the same or different (e.g., the linewidth of the second electrode portion 122a is smaller than the linewidth of the sixth electrode portion 122c), and the aspect ratios of the second electrode portions 122a and the sixth electrode portions 122c on the second substrate 121 can also be the same or different (e.g., the aspect ratio of the second electrode portion 122a is smaller than the aspect ratio of the sixth electrode portion 122c).

[0104] For example, a first groove and a second groove are formed on a 100-micrometer-thick PET substrate using a nanoimprint method. Subsequently, a first electrode portion and a second electrode portion are filled into the first and second grooves, respectively. The high-density electrode portion region, as described above, has an array linewidth of approximately 150 micrometers, a line spacing of approximately 50 micrometers, and 32 lines. The low-density electrode portion region, as described above, has an array linewidth of approximately 300 micrometers and a line spacing of approximately 200 micrometers. The grid groove structure inside the lines is rectangular, with a groove depth of 8 micrometers, a linewidth of 6 micrometers, and a rectangular size of 400 × 50 μm. A 1-micrometer-thick silver nanoparticle seed layer is formed at the bottom of the first and second grooves by a blade coating method and annealed at 100°C for 10 minutes. Then, metallic copper is filled into the grooves by electrodeposition to completely fill them. Finally, a carbon paste layer is formed on the electrode surface by screen printing and annealed at 100°C for 10 minutes to remove the solvent, thus completing the preparation of the first and second electrode portions. Finally, an adhesive film is attached to the periphery, aligning the first and second substrates face-to-face to form a high-density sandwich-type piezoresistive pressure sensor. This type of piezoresistive pressure sensor has a sensitivity of 10.5 kPa. -1 (0-40kPa range), consistency reaches 10%, and after 5000 cycles at 500kPa pressure, sensitivity changes by only 10%, with a pressure sensor density of 2500 / cm³. 2 .

[0105] Figure 18 This is an enlarged schematic diagram of a first electrode portion provided in an embodiment of the present invention. Figure 19 This is an enlarged schematic diagram of a second electrode portion provided in an embodiment of the present invention, for reference. Figures 17 to 19As shown, the first groove 111a1 includes a first sub-groove 111a1 and / or a second sub-groove 111a2. The first sub-groove 111a1 extends along the fifth direction, and the second sub-groove 111a2 extends along the sixth direction. The fifth direction and the sixth direction intersect and are parallel to the plane where the sensing layer 200 is located. The second groove 121a includes a third sub-groove 121a1 and / or a fourth sub-groove 122a2. The third sub-groove 121a1 extends along the seventh direction, and the fourth sub-groove 122a2 extends along the eighth direction. The seventh direction and the eighth direction intersect and are parallel to the plane where the sensing layer 200 is located.

[0106] Among them, reference Figure 18 As shown, the first groove 111a embedded in the first substrate 111 may include a first sub-groove 111a1 and a second sub-groove 111a2, wherein the extending direction of the first sub-groove 111a1 is different from the extending direction of the second sub-groove 111a2. Furthermore, the first groove 111a embedded in the first substrate 111 may also include only the first sub-groove 111a1 or only the second sub-groove 111a2, demonstrating the flexibility in the arrangement of the first groove 111a. Whether the first groove 111a includes one type of sub-groove or two sub-grooves with different extending directions depends on the extending length and width of the first groove 111a. If the required width of the first groove 111a is short, the first groove 111a may include only the first sub-groove 111a1 or only the second sub-groove 111a2; if the required width of the first groove 111a is long, the first groove 111a may include both the first sub-groove 111a1 and the second sub-groove 111a2.

[0107] Furthermore, the first sub-groove 111a1 extends along the fifth direction, and the second sub-groove 111a2 extends along the sixth direction, wherein the fifth and sixth directions intersect, and can be perpendicular or not perpendicular. The specific angle of intersection can be adaptively adjusted according to requirements. If the first groove 111a1 includes the first sub-groove 111a1 and the second sub-groove 111a2, and multiple first sub-grooves 111a1 and multiple second sub-grooves 111a2 are connected to form a first grid structure. Furthermore, the first electrode portion 112a fills the first grid structure. This demonstrates the flexibility in the arrangement of the first groove 111a, and the first electrode portion 112a filling the grid-like first groove 111a improves the scratch resistance and pressure resistance of the first electrode portion 112a. Specifically, the grid shape in the first grid structure can be rhomboid, rectangular, or other shapes, etc., and the embodiments of the present invention do not impose specific limitations on this.

[0108] For example, refer to Figure 18As shown, the first groove 111a includes a plurality of first sub-grooves 111a1 and a plurality of second sub-grooves 111a2, wherein the extending directions of the first sub-grooves 111a1 and the second sub-grooves 111a2 intersect, for example, the extending directions of the first sub-grooves 111a1 and the second sub-grooves 111a2 are arranged perpendicularly. Combined with Figure 18 As shown, multiple first sub-grooves 111a1 and multiple second sub-grooves 111a2 are interconnected to form a first mesh structure. Furthermore, the first electrode portion 112a fills the first mesh structure. This demonstrates the flexibility in the arrangement of the first grooves 111a, and the filling of the first electrode portion 112a within the mesh-like first grooves 111a improves the scratch resistance and pressure resistance of the first electrode portion 112a.

[0109] Among them, reference Figure 19 As shown, the second groove 121a embedded in the second substrate 121 may include a third sub-groove 121a1 and a fourth sub-groove 122a2, wherein the extending direction of the third sub-groove 121a1 is different from the extending direction of the fourth sub-groove 122a2. Furthermore, the second groove 121a embedded in the second substrate 121 may also include only the third sub-groove 121a1 or only the fourth sub-groove 122a2, demonstrating the flexibility in the arrangement of the second groove 121a. Whether the second groove 121a includes one type of sub-groove or two sub-grooves with different extending directions depends on the extending length and width of the second groove 121a. If the width of the required second groove 121a is short, the second groove 121a may include only the third sub-groove 121a1 or the fourth sub-groove 122a2; if the width of the required second groove 121a is long, the second groove 121a may include both the third sub-groove 121a1 and the fourth sub-groove 122a2.

[0110] Furthermore, the third sub-groove 121a1 extends along the seventh direction, and the fourth sub-groove 122a2 extends along the eighth direction, wherein the seventh and eighth directions intersect, and can be perpendicular or not perpendicular. The specific angle of intersection can be adaptively adjusted according to requirements. If the second groove 121a includes the third sub-groove 121a1 and the fourth sub-groove 122a2, and multiple third sub-groove 121a1 and multiple fourth sub-groove 122a2 are connected to form a second grid structure. Furthermore, the second electrode portion 122a fills the first grid structure. This demonstrates the flexibility in the arrangement of the second groove 121a, and the second electrode portion 122a filling the grid-like second groove 121a improves the scratch resistance and pressure resistance of the second electrode portion 122a. Specifically, the grid shape in the second grid structure can be rhomboid, rectangular, or other shapes, etc., and the embodiments of the present invention do not impose specific limitations on this.

[0111] For example, refer to Figure 19 As shown, the second groove 121a includes a plurality of third sub-grooves 121a1 and a plurality of fourth sub-grooves 122a2, wherein the extending directions of the third sub-grooves 121a1 and the fourth sub-grooves 122a2 intersect, for example, the extending directions of the third sub-grooves 121a1 and the fourth sub-grooves 122a2 are arranged perpendicularly. Combined with Figure 19 As shown, multiple third sub-grooves 121a1 and multiple fourth sub-grooves 122a2 form a second mesh structure. Furthermore, the second electrode portion 122a fills the second mesh structure. This demonstrates the flexibility in the arrangement of the second grooves 121a, and the second electrode portion 122a filling the mesh-like second grooves 121a improves the scratch resistance and pressure resistance of the second electrode portion 122a.

[0112] Furthermore, the electrode structures 100 in the pressure sensor 10 can all adopt a grid embedding method, thereby improving the structural stability and reliability of the pressure sensor 10. For example, refer to... Figure 17 As shown, the electrode structures 100 in the pressure sensor 10 all adopt a grid-like arrangement. It should be noted that, for Figure 1 , Figure 5 , Figures 10 to 13 In any type of pressure sensor 10, the electrode structure 100 can be arranged in a grid pattern. This embodiment of the invention will not provide specific examples of this.

[0113] Optional, Figure 20 yes Figure 19 A magnified schematic diagram of one type of sensing layer. Figure 21 yes Figure 19 An enlarged schematic diagram of another type of sensing layer in the middle. Figure 22 yes Figure 19 Another enlarged schematic diagram of a sensing layer, see reference. Figures 19 to 22 As shown, specifically, refer to Figure 20 As shown, the sensing layer 200 in the pressure sensor 10 may consist of only one complete sensing layer 200, i.e. Figure 20 The sensing layer 200 is a piezoelectric structure covering an entire surface. For details, please refer to... Figure 21 and Figure 22 As shown, the sensing layer 200 in the pressure sensor 10 may consist of only multiple segmented or partitioned sub-sensing layers 200a. For example... Figure 21 Neutron sensing layer 200a is a strip-shaped piezoelectric structure, or as referenced Figure 22 The neutron sensing layer 200a is a block piezoelectric structure. This embodiment of the invention does not impose specific limitations on it, and the shape and number of piezoelectric structures can be enriched according to actual conditions.

[0114] Figure 23A schematic flowchart of a method for fabricating a pressure sensor provided in an embodiment of the present invention is shown below. Figure 23 As shown, the preparation method includes:

[0115] S110, Provides a first substrate.

[0116] The pressure sensor includes an electrode structure and a sensing layer. Along the thickness direction of the pressure sensor, the sensing layer is located in a region where at least a portion of the electrode structure overlaps. The pressure sensor, through the combined action of the sensing layer and the electrode structure, achieves a conversion between mechanical energy and electrical energy. Specifically, the pressure sensor can include capacitive pressure sensors, resistive pressure sensors, piezoelectric pressure sensors, and triboelectric pressure sensors, etc. This embodiment of the invention does not specifically limit the specific type of pressure sensor. The material of the sensing layer can be a piezoresistive material, an ionizing material, etc. Piezoresistive materials can be MXene, carbon nanotubes, carbon black, silver nanowires, or graphene, etc. The specific material of the sensing layer can be adaptively adjusted according to actual needs, and this embodiment of the invention does not specifically limit it.

[0117] Optionally, the first substrate can be a flexible substrate, and there is no specific limitation on the material of the first substrate, such as polyimide (PI), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polymethyl methacrylate (PMMA), polyurethane (PU), thermoplastic polyurethane (TPU), etc.

[0118] S120. A plurality of first grooves are prepared on the first substrate, and the first grooves penetrate the first substrate.

[0119] Specifically, the first substrate includes multiple arrayed first grooves, each groove penetrating a portion of the first substrate; that is, the first groove does not penetrate the entire first substrate. The arrangement of the first grooves can be varied; for example, such as... Figure 1 and Figure 5 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 1 and Figure 5 The number of first grooves 111a in the pressure sensor 10 is merely an example. Furthermore, the first grooves 111a are groove structures formed by etching or slotting on the first substrate 111.

[0120] Optionally, the first groove can be prepared on the first substrate using nanoimprinting.

[0121] S130, fill the first electrode portion into the first groove.

[0122] The pressure sensor's electrode structure includes a first electrode and a second electrode. The first electrode is fabricated first. The first electrode includes a first substrate and a first electrode unit. The first substrate includes multiple groove structures, and the first electrode unit fills the groove structures. Thus, it can be understood that the first electrode unit used for transmitting electrical signals is embedded in the first substrate.

[0123] Specifically, the first electrode unit includes multiple first electrode portions, and the first electrode portions fill the first groove. This achieves embedding of the first electrode portions into the first substrate. Compared to placing the first electrode portions on one side of the first substrate, embedding the first electrode portions into the first substrate allows for finer adjustment of the spacing, linewidth, etc., of the first electrode portions provided in this embodiment. While achieving a high-density arrangement of the first electrode portions, it also avoids short circuits between different first electrode portions, ensuring the operational stability of the pressure sensor.

[0124] Furthermore, along the arrangement direction of the multiple first electrode portions, the spacing between two adjacent first electrode portions is L1, where L1 satisfies 2 μm ≤ L1 ≤ 500 μm. Along the arrangement direction of the multiple first electrode portions, the width of each first electrode portion is L2, where L2 satisfies 2 μm ≤ L2 ≤ 500 μm. By adjusting the spacing and width of the first electrode portions, a high-density arrangement of the first electrode portions can be achieved, which is beneficial for realizing the high-density performance of the pressure sensor. Along the thickness direction of the first substrate, the thickness of the first electrode portion is H1, where H1 / L2 satisfies 1 ≤ H1 / L2. This allows for a larger aspect ratio of the first electrode portions, meaning a larger volume of first electrode portions can be filled within the first substrate, ensuring the operational stability and reliability of the pressure sensor.

[0125] Optionally, the first electrode portion can be filled in the first groove by a scraping method, a scraping method combined with electrodeposition, or a scraping method combined with chemical deposition.

[0126] S140, Provide a second substrate.

[0127] Optionally, the second substrate can be a flexible substrate, and there is no specific limitation on the material of the second substrate. It should be noted that the type of pressure sensor is diverse, and it may include two substrates, that is, both the first substrate and the second substrate, or it may include only one substrate, that is, the second substrate and the first substrate are the same substrate.

[0128] S150: A plurality of second grooves are prepared on the second substrate, the second grooves penetrating a portion of the second substrate.

[0129] In this process, multiple arrayed second grooves are fabricated on the second substrate. These second grooves penetrate a portion of the second substrate, meaning they do not completely penetrate the entire substrate. The arrangement of these second grooves can be varied, such as... Figure 1 and Figure 5 This is merely an example and does not show all possible arrangements. It should also be noted that... Figure 1 and Figure 5 The number of second grooves 121a in the pressure sensor 10 is merely an example. Furthermore, the second grooves 121a are groove structures formed by etching or slotting on the second substrate 121.

[0130] S160, fill the second electrode portion into the second groove.

[0131] The pressure sensor's electrode structure includes a first electrode and a second electrode. The second electrode includes a second substrate and a second electrode unit. The second substrate has multiple groove structures, and the second electrode unit fills the groove structures. Thus, the second electrode unit used for transmitting electrical signals is embedded in the second substrate.

[0132] Specifically, the second electrode unit includes multiple second electrode portions, and these second electrode portions fill the second groove. This embeds the second electrode portions into the second substrate. Compared to placing the second electrode portions on one side of the second substrate, embedding the second electrode portions into the second substrate allows for finer adjustment of the spacing, linewidth, etc., of the second electrode portions provided in this embodiment. While achieving a high density of second electrode portions, it also avoids short circuits between different second electrode portions, ensuring the operational stability of the pressure sensor.

[0133] Furthermore, along the arrangement direction of the multiple second electrode portions, the spacing between two adjacent second electrode portions is L3, where L3 satisfies 2 μm ≤ L3 ≤ 500 μm. Along the arrangement direction of the multiple second electrode portions, the width of each second electrode portion is L4, where L4 satisfies 2 μm ≤ L2 ≤ 500 μm. By adjusting the spacing and width of the second electrode portions, a high-density arrangement of the second electrode portions can be achieved, which is beneficial for realizing the high-density performance of the pressure sensor. Along the thickness direction of the second substrate, the thickness of the second electrode portion is H2, where H2 / L4 satisfies 1 ≤ H2 / L4. This allows for a larger aspect ratio of the second electrode portions, meaning a larger volume of second electrode portions can be filled in the second substrate 1, ensuring the operational stability and reliability of the pressure sensor.

[0134] Optionally, the second electrode portion can be filled in the second groove by a scraping method, a scraping method combined with electrodeposition, or a scraping method combined with chemical deposition.

[0135] S170. Prepare a sensing layer, wherein the sensing layer overlaps at least partially with the first electrode portion and at least partially with the second electrode portion along the thickness direction of the sensing layer.

[0136] A sensing layer is fabricated. Along the thickness direction of the pressure sensor, at least a portion of the first groove overlaps with the sensing layer. That is, in the first electrode, a portion of the first electrode unit overlaps with the sensing layer through the first electrode distribution, satisfying the positional relationship of overlapping between a portion of the sensing layer and the electrode structure in the pressure sensor. Furthermore, along the thickness direction of the pressure sensor, at least a portion of the second groove overlaps with the sensing layer. That is, in the second electrode, a portion of the second electrode unit overlaps with the sensing layer through the second electrode distribution, satisfying the positional relationship of overlapping between a portion of the sensing layer and the electrode structure in the pressure sensor 1. Furthermore, to ensure the structural stability of the sensing layer and the first substrate and / or the second substrate, an adhesive film is placed between the sensor and the substrate to ensure the overall structural stability and reliability.

[0137] Optionally, in the pressure sensor provided in this embodiment of the invention, the array density of the first electrode portion and the second electrode portion can be greater than or equal to 1000 per cm². 2 It should be noted that, Figures 1 to 8 Only a portion of the structure of the pressure sensor 10 is shown. (Combined with...) Figure 1 As shown in the figure, a sensing layer 200 covers a portion of the electrode structure. The electrode structure in the area covered by one sensing layer 200 can be understood as an electrode array unit in a pressure sensor. A piezoelectric sensor may include multiple electrode array units, for example, a pressure sensor may include more than or equal to 1000 electrodes / cm. 2 This demonstrates the high density of electrode structures in the pressure sensor. Similarly, combined with... Figure 5 As shown, along the thickness direction of sensor 200, the overlapping area of ​​a first electrode portion 112a and a second electrode portion 122a can be understood as an electrode array unit. A piezoelectric sensor may include multiple electrode array units, for example, a pressure sensor may include more than or equal to 1000 electrodes / cm. 2 This reflects the high density of electrode structures in the pressure sensor.

[0138] Furthermore, the materials of the first and second electrode units can be one or a combination of metal nanoparticles and bulk metal materials, such as gold, silver, nickel, copper, platinum, zinc, and iron. By embedding the first and second electrode units into their respective substrates, fatigue resistance, stability, and consistency can be ensured. The morphology and spacing of the first and second electrode units can also be better adjusted, thereby improving the quality of the pressure sensor.

[0139] In summary, the embodiments of the present invention provide a method for fabricating a pressure sensor. By embedding a first electrode unit in a first electrode into a first substrate and embedding a second electrode unit in a second electrode into a second substrate, the pressure sensor is guaranteed to have fatigue resistance, stability, and consistency, thereby improving the quality of the pressure sensor.

[0140] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A pressure sensor, characterized in that, Including electrode structure and sensing layer; The electrode structure includes a first electrode and a second electrode; The first electrode includes a first substrate and a first electrode unit. The first substrate includes a plurality of first grooves, which penetrate a portion of the first substrate. The first electrode unit includes a plurality of first electrode portions, which fill the first grooves. Along the thickness direction of the first substrate, the sensing layer at least partially overlaps with the first electrode portions. The second electrode includes a second substrate and a second electrode unit. The second substrate includes a plurality of second grooves, which penetrate a portion of the second substrate. The second electrode unit includes a plurality of second electrode portions, which fill the second grooves. Along the thickness direction of the second substrate, the sensing layer at least partially overlaps with the second electrode portions. Wherein, along the arrangement direction of the plurality of first electrode portions, the distance between two adjacent first electrode portions is L1, the width of the first electrode portion is L2, and along the thickness direction of the first substrate, the thickness of the first electrode portion is H1, satisfying: 2 micrometers ≤ L1 ≤ 500 micrometers, 2 micrometers ≤ L2 ≤ 500 micrometers, 1 ≤ H1 / L2. Along the arrangement direction of the plurality of second electrode portions, the distance between two adjacent second electrode portions is L3, the width of the second electrode portion is L4, and along the thickness direction of the second substrate, the thickness of the second electrode portion is H2, satisfying: 2 micrometers ≤ L3 ≤ 500 micrometers, 2 micrometers ≤ L4 ≤ 500 micrometers, 1 ≤ H2 / L4.

2. The pressure sensor according to claim 1, characterized in that, The second substrate and the first substrate are the same substrate, and the first groove and the second groove are located on the same side of the first substrate; The first electrode portion extends along a first direction, and a plurality of the first electrode portions are arranged along a second direction; the second electrode portions extend along the first direction, and a plurality of the second electrode portions are arranged along the second direction. Along the second direction, the first electrode portion and the second electrode portion are alternately arranged; the first direction and the second direction intersect and are parallel to the plane where the first substrate is located.

3. The pressure sensor according to claim 2, characterized in that, The pressure sensor also includes a first adhesive film and a flexible substrate; Along the thickness direction of the first substrate, the first adhesive film is located between the sensing layer and the first substrate; the orthographic projection of the first adhesive film on the first substrate does not overlap with the orthographic projection of the first electrode portion on the first substrate, and the orthographic projection of the first adhesive film on the first substrate does not overlap with the orthographic projection of the second electrode portion on the first substrate. The flexible substrate is located on the side of the sensing layer away from the first substrate.

4. The pressure sensor according to claim 2, characterized in that, The first substrate further includes a plurality of third grooves, the third grooves penetrating a portion of the first substrate; the first electrode unit includes a plurality of third electrode portions, the third electrode portions filling the third grooves; along the thickness direction of the first substrate, the sensing layer does not overlap with the third electrode portions; the third electrode portions connect the first electrode portions and the external module; The second substrate further includes a plurality of fourth grooves, the fourth grooves penetrating a portion of the second substrate, the second electrode unit including a plurality of fourth electrode portions, the fourth electrode portions filling the fourth grooves; along the thickness direction of the second substrate, the sensing layer does not overlap with the fourth electrode portions; the fourth electrode portions connect the second electrode portions and the external module.

5. The pressure sensor according to claim 1, characterized in that, The first substrate and the second substrate are arranged parallel to each other and facing each other. The first electrode portion is located on the side of the first substrate closer to the second substrate, and the second electrode portion is located on the side of the second substrate closer to the first substrate. The first electrode portion extends along a third direction, and a plurality of first electrode portions are arranged along a fourth direction. The second electrode portion extends along the fourth direction, and a plurality of second electrode portions are arranged along the third direction. Along the thickness direction of the first substrate, the first electrode portion and the second electrode portion at least partially overlap. The third direction and the fourth direction intersect and are parallel to the plane of the first substrate.

6. The pressure sensor according to claim 5, characterized in that, The pressure sensor includes a sensing layer located between the first substrate and the second substrate along the thickness direction of the first substrate. The pressure sensor further includes an adhesive film, which includes a second adhesive film and a third adhesive film; along the thickness direction of the first substrate, the second adhesive film is located between the sensing layer and the first substrate, and the third adhesive film is located between the sensing layer and the second substrate. The orthographic projection of the adhesive film on the first substrate does not overlap with the orthographic projection of the first electrode portion on the first substrate, and the orthographic projection of the adhesive film on the first substrate does not overlap with the orthographic projection of the second electrode portion on the first substrate.

7. The pressure sensor according to claim 5, characterized in that, The sensing layer includes a first sensing layer and a second sensing layer; along the thickness direction of the first substrate, the first sensing layer is located on the side of the first substrate closer to the second substrate, and the second sensing layer is located on the side of the second substrate closer to the first substrate. The pressure sensor further includes a fourth adhesive film, which is located between the first sensing layer and the second sensing layer; the orthographic projection of the fourth adhesive film on the first substrate does not overlap with the orthographic projection of the first electrode portion on the first substrate, and the orthographic projection of the fourth adhesive film on the first substrate does not overlap with the orthographic projection of the second electrode portion on the first substrate.

8. The pressure sensor according to claim 5, characterized in that, The first substrate further includes a plurality of fifth grooves, the fifth grooves penetrating a portion of the first substrate; the first electrode unit includes a plurality of fifth electrode portions, the fifth electrode portions filling the fifth grooves; along the thickness direction of the first substrate, the sensing layer does not overlap with the fifth electrode portions; the fifth electrode portions connect the first electrode portions and the external module; The second substrate further includes a plurality of sixth grooves, the sixth grooves penetrating a portion of the second substrate, the second electrode unit including a plurality of sixth electrode portions, the sixth electrode portions filling the sixth grooves; along the thickness direction of the second substrate, the sensing layer does not overlap with the sixth electrode portions; the sixth electrode portions connect the second electrode portions and the external module. Along the arrangement direction of the plurality of fifth electrode portions, the distance between two adjacent fifth electrode portions is L5, and along the arrangement direction of the plurality of sixth electrode portions, the distance between two adjacent sixth electrode portions is L6, satisfying: 10 micrometers ≤ L5 ≤ 5 millimeters, 10 micrometers ≤ L6 ≤ 5 millimeters.

9. The pressure sensor according to claim 1, characterized in that, The first groove includes a first sub-groove and / or a second sub-groove, the first sub-groove extending along a fifth direction and the second sub-groove extending along a sixth extension direction; the fifth direction intersects the sixth direction and is parallel to the plane where the sensing layer is located; The second groove includes a third sub-groove and / or a fourth sub-groove, the third sub-groove extending along a seventh direction and the fourth sub-groove extending along an eighth direction, the seventh direction and the eighth direction intersecting and being parallel to the plane of the sensing layer.

10. A method for manufacturing a pressure sensor, used to manufacture the pressure sensor according to any one of claims 1-9, characterized in that, The preparation method includes: Provide a first substrate; A plurality of first grooves are formed in the first substrate, and the first grooves penetrate a portion of the first substrate; The first electrode portion is filled in the first groove; wherein, along the arrangement direction of the plurality of first electrode portions, the distance between two adjacent first electrode portions is L1, the width of the first electrode portion is L2, and along the thickness direction of the first substrate, the thickness of the first electrode portion is H1, satisfying: 2 micrometers ≤ L1 ≤ 500 micrometers, 2 micrometers ≤ L2 ≤ 500 micrometers, 1 ≤ H1 / L2. Provide a second substrate; A plurality of second grooves are formed in the second substrate, and the second grooves penetrate a portion of the second substrate; The second electrode portion is filled in the second groove; wherein, along the arrangement direction of the plurality of second electrode portions, the distance between two adjacent second electrode portions is L3, the width of the second electrode portion is L4, and along the thickness direction of the second substrate, the thickness of the second electrode portion is H2, satisfying: 2 micrometers ≤ L3 ≤ 500 micrometers, 2 micrometers ≤ L4 ≤ 500 micrometers, 1 ≤ H2 / L4. A sensing layer is prepared, wherein the sensing layer overlaps at least partially with the first electrode portion and at least partially with the second electrode portion along the thickness direction of the sensing layer.

Images